JP2016008881A

JP2016008881A - Shape measuring device

Info

Publication number: JP2016008881A
Application number: JP2014129453A
Authority: JP
Inventors: 正典藤原; Masanori Fujiwara; 俊哉林; Toshiya Hayashi; 英児鍋田; Eiji Nabeta; 勇二西依; Yuji Nishii
Original assignee: Think Free Co Ltd
Current assignee: Think Free Co Ltd
Priority date: 2014-06-24
Filing date: 2014-06-24
Publication date: 2016-01-18

Abstract

PROBLEM TO BE SOLVED: To provide a shape measuring device that detects each of the different-width shapes and paired flanks of a work with restraint on any deterioration of the resolution power.SOLUTION: A shape measuring device 10 irradiates with light a work 15 of which a rear face 12 is arranged on a virtual XY plane, the center is arranged in the position where the X axis 13 and the Y axis are orthogonal to each other and the widthwise direction is along the X axis 13 and thereby detects the shape of the front face 17 and the shapes of flanks 18 and 19 respectively disposed on the two sides of the work 15. The device is equipped with a plurality of laser displacement sensors 25, 25a and 25b that irradiate with light expanding in the direction of the X axis 13 toward the area on the positive side direction of the X axis 13 of the XY plane in such a direction that the proceeding direction of the center of the light forms an acute angle to the negative side direction of the X axis 13, and a plurality of laser displacement sensors 26, 26a and 26b that irradiate with light expanding in the direction of the X axis 13 toward the area on the negative side direction of the X axis 13 in such a direction that the proceeding direction of the center of the light forms an acute angle to the positive side direction of the X axis 13.

Description

本発明は、レーザ変位センサを用いてワークの形状を検出する形状計測装置に関する。 The present invention relates to a shape measuring apparatus that detects the shape of a workpiece using a laser displacement sensor.

従来、ビジョンカメラや非接触型のレーザ変位センサを用いて、ワークの形状を検出する作業が行われ、その具体例が特許文献１に記載されている。
ビジョンカメラによって撮像した画像は、２次元であるため、その画像から、原則、ワークの形状の撮像方向の成分を検出することはできない。プロジェクタから所定のラインパターンの光をワークに照射して、ワークに当たって映し出されたラインパターンをビジョンカメラで読み取り、読み取ったラインパターンを基に撮像方向の距離を計測することは可能であるが、レーザ変位センサに比べ、撮像方向（レーザ変位センサの場合、光の照射方向）の分解能は低くなる。 Conventionally, an operation of detecting the shape of a workpiece has been performed using a vision camera or a non-contact type laser displacement sensor, and a specific example thereof is described in Patent Document 1.
Since the image captured by the vision camera is two-dimensional, in principle, the component in the imaging direction of the workpiece shape cannot be detected from the image. Although it is possible to irradiate a workpiece with light of a predetermined line pattern from a projector, read the line pattern projected on the workpiece with a vision camera, and measure the distance in the imaging direction based on the read line pattern. Compared to the displacement sensor, the resolution in the imaging direction (in the case of a laser displacement sensor, the light irradiation direction) is lower.

そのため、高精度な検出が要求される現場においては、レーザ変位センサを用いるのが好ましいと言える。
そして、対向配置された対となる側面が表面の両端にそれぞれ連続して設けられたワークにおいて、その対となる側面と表面の形状を検出する場合、表面に向かって光を照射する表面計測用のレーザ変位センサ、及び、両側の側面に向かってそれぞれ光を照射する側面計測用のレーザ変位センサを用いればよいことになる。 Therefore, it can be said that it is preferable to use a laser displacement sensor in the field where highly accurate detection is required.
And in the work where the paired side surfaces arranged opposite each other are continuously provided at both ends of the surface, when detecting the shape of the paired side surfaces and the surface, for surface measurement that irradiates light toward the surface And a laser displacement sensor for side surface measurement that irradiates light toward the side surfaces on both sides.

特開２００６−３２２９０１号公報JP 2006-322901 A

しかしながら、ワークの幅、即ち、対となる側面間の距離が、短いワークに対しては、側面計測用のレーザ変位センサとワークの側面間の距離が所定範囲内に収まらず、要求される測定の分解能（以下、単に「分解能」とも言う）を確保できないという課題があった。
本発明は、かかる事情に鑑みてなされるもので、幅が異なるワークの表面及び対となる側面の各形状を、分解能の低下を抑制して検出する形状計測装置を提供することを目的とする。 However, for workpieces with a short workpiece width, that is, a distance between the paired side surfaces, the distance between the laser displacement sensor for measuring the side surface and the side surface of the workpiece is not within the predetermined range, and the required measurement is performed. There is a problem that it is not possible to ensure the resolution (hereinafter also simply referred to as “resolution”).
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a shape measuring device that detects the shape of the surface of a workpiece having a different width and each shape of a pair of side surfaces while suppressing a decrease in resolution. .

前記目的に沿う本発明に係る形状計測装置は、仮想のＸＹ平面に裏面が配され、前記ＸＹ平面のＸ軸とＹ軸が直交する位置に中心が配され、幅方向が前記Ｘ軸に沿ったワークに対して照射した光の反射を基に、前記ワークの表面、及び、該ワークの幅方向両側にそれぞれ設けられた側面Ａ、Ｂの各形状を検出する形状計測装置であって、進行しながら前記Ｘ軸方向に広がる光を、前記ＸＹ平面の前記Ｘ軸方向正側の領域に向かって、光の中心の進行方向が前記Ｘ軸の負側方向に対して鋭角をなす向きで、それぞれ照射しつつ、前記ワークに対して前記Ｙ軸方向に移動する複数のレーザ変位センサＰと、進行しながら前記Ｘ軸方向に広がる光を、前記ＸＹ平面の前記Ｘ軸方向負側の領域に向かって、光の中心の進行方向が前記Ｘ軸の正側方向に対して鋭角をなす向きで、それぞれ照射しつつ、前記ワークに対して前記Ｙ軸方向に移動する複数のレーザ変位センサＱとを備え、前記複数のレーザ変位センサＰ、Ｑはそれぞれ、照射した光の少なくとも一部が、前記ワークを非配置にした前記ＸＹ平面に対し、他の前記レーザ変位センサＰ、Ｑが照射した光とは、前記Ｘ軸方向成分が異なる位置に到達し、前記複数のレーザ変位センサＰの少なくとも一、及び、前記複数のレーザ変位センサＱの少なくとも一はそれぞれ、前記表面に光を当て、前記複数のレーザ変位センサＰの少なくとも一は、前記側面Ａに光を当て、前記複数のレーザ変位センサＱの少なくとも一は、前記側面Ｂに光を当てる。 In the shape measuring apparatus according to the present invention that meets the object, the back surface is arranged on a virtual XY plane, the center is arranged at a position where the X axis and Y axis of the XY plane are orthogonal, and the width direction is along the X axis. A shape measuring device for detecting each shape of the surface of the workpiece and the side surfaces A and B provided on both sides in the width direction of the workpiece based on reflection of light irradiated to the workpiece, While the light spreading in the X-axis direction is directed toward the region on the X-axis direction positive side of the XY plane, the traveling direction of the center of the light forms an acute angle with respect to the negative-side direction of the X-axis, A plurality of laser displacement sensors P that move in the Y-axis direction with respect to the workpiece while irradiating the light, and light that spreads in the X-axis direction while traveling to the X-axis direction negative region of the XY plane Toward the positive side of the X-axis And a plurality of laser displacement sensors Q that move in the Y-axis direction with respect to the workpiece while irradiating each in an acute angle direction, and each of the plurality of laser displacement sensors P and Q is irradiated light. At least a part of the X-axis direction component differs from the light irradiated by the other laser displacement sensors P and Q with respect to the XY plane in which the workpiece is not disposed, At least one of the laser displacement sensors P and at least one of the plurality of laser displacement sensors Q each shine light on the surface, and at least one of the plurality of laser displacement sensors P shine light on the side surface A, At least one of the plurality of laser displacement sensors Q applies light to the side surface B.

本発明に係る形状計測装置において、前記複数のレーザ変位センサＰ、Ｑはそれぞれ、光の中心が、前記ワークを非配置にした前記ＸＹ平面に、前記Ｘ軸方向成分で隣り合って到達する前記レーザ変位センサＰ、Ｑとの関係において、光の中心が、前記ワークを非配置にした前記ＸＹ平面に対し、前記Ｙ軸方向成分が異なる位置に到達するのが好ましい。 In the shape measuring apparatus according to the present invention, each of the plurality of laser displacement sensors P and Q has a light center adjacent to the XY plane where the workpiece is not disposed adjacent to the X-axis direction component. In relation to the laser displacement sensors P and Q, it is preferable that the center of light reaches a position where the Y-axis direction component is different from the XY plane where the work is not arranged.

本発明に係る形状計測装置において、前記複数のレーザ変位センサＰ、Ｑはそれぞれ、前記Ｘ軸方向成分で隣り合って設けられた該複数のレーザ変位センサＰ、Ｑが、前記Ｙ軸方向成分の異なる位置に配置されているのが好ましい。 In the shape measuring apparatus according to the present invention, each of the plurality of laser displacement sensors P and Q provided adjacent to each other in the X-axis direction component is the Y-axis direction component. It is preferable that they are arranged at different positions.

本発明に係る形状計測装置において、前記複数のレーザ変位センサＰ、Ｑはそれぞれ、光の中心が、前記ワークを非配置にした前記ＸＹ平面に、前記Ｘ軸方向成分で隣り合って到達する前記レーザ変位センサＰ、Ｑとの関係において、光が、前記ワークを非配置にした前記ＸＹ平面に対し、前記Ｘ軸方向成分で部分的に重なり合って到達するのが好ましい。 In the shape measuring apparatus according to the present invention, each of the plurality of laser displacement sensors P and Q has a light center adjacent to the XY plane where the workpiece is not disposed adjacent to the X-axis direction component. In relation to the laser displacement sensors P and Q, it is preferable that the light reaches the XY plane where the workpiece is not disposed partially overlapping with the X-axis direction component.

本発明に係る形状計測装置において、前記複数のレーザ変位センサＰ、Ｑそれぞれが前記ワークに対して照射した光の反射を受光して得られる部分像は、校正治具に前記複数のレーザ変位センサＰ、Ｑそれぞれから光を照射して得られた部分像と、前記校正治具の実際の形状とを比較して予め算出した校正式を基に、一つの全体像に合成されるのが好ましい。 In the shape measuring apparatus according to the present invention, a partial image obtained by receiving reflection of light irradiated to the workpiece by each of the plurality of laser displacement sensors P and Q is provided on a calibration jig. It is preferable that a partial image obtained by irradiating light from each of P and Q and a calibration formula calculated in advance by comparing the actual shape of the calibration jig are combined into one overall image. .

本発明に係る形状計測装置によれば、複数のレーザ変位センサＰの少なくとも一、及び、複数のレーザ変位センサＱの少なくとも一がそれぞれ、ワークの表面に光を当て、複数のレーザ変位センサＰの少なくとも一が、ワークの側面Ａに光を当て、複数のレーザ変位センサＱの少なくとも一が、ワークの側面Ｂに光を当てる。従って、ワークの表面及び側面Ａ、Ｂにそれぞれ光を当てることができるレーザ変位センサが一つである場合に比べ、ワークの側面Ａとそれに光を当てるレーザ変位センサＰとの距離、及び、ワークの側面Ｂとそれに光を当てるレーザ変位センサＱとの距離を短く保つことが可能になり、ワークの表面及び対となる側面の各形状を、分解能の低下を抑制して検出できる。 According to the shape measuring apparatus of the present invention, at least one of the plurality of laser displacement sensors P and at least one of the plurality of laser displacement sensors Q respectively shine light on the surface of the workpiece, At least one applies light to the side surface A of the workpiece, and at least one of the plurality of laser displacement sensors Q applies light to the side surface B of the workpiece. Accordingly, the distance between the side surface A of the workpiece and the laser displacement sensor P that applies the light to the surface of the workpiece and the side surfaces A and B can be compared with the case where there is one laser displacement sensor that can apply light to each of the surface and the side surfaces A and B. It is possible to keep the distance between the side surface B of the laser beam and the laser displacement sensor Q that applies light to it short, and the shapes of the workpiece surface and the paired side surfaces can be detected while suppressing a decrease in resolution.

本発明の一実施の形態に係る形状計測装置が適用されるワークとＸＹ平面の位置関係を示す説明図である。It is explanatory drawing which shows the positional relationship of the workpiece | work to which the shape measuring apparatus which concerns on one embodiment of this invention is applied, and an XY plane. 同形状計測装置の正面図である。It is a front view of the same shape measuring apparatus. レーザ変位センサの接続を示すブロック図である。It is a block diagram which shows the connection of a laser displacement sensor. 各レーザ変位センサの光の照射方向を示す説明図である。It is explanatory drawing which shows the irradiation direction of the light of each laser displacement sensor.

続いて、添付した図面を参照しつつ、本発明を具体化した実施の形態につき説明し、本発明の理解に供する。
図１、図２に示すように、本発明の一実施の形態に係る形状計測装置１０は、仮想のＸＹ平面１１に裏面１２が配され、ＸＹ平面１１のＸ軸１３とＹ軸１４が直交する位置に中心が配され、幅方向がＸ軸１３に沿ったワーク１５に対して照射した光の反射を基に、ワーク１５の表面１７、及び、ワーク１５の幅方向両側にそれぞれ設けられた側面１８、１９（側面Ａ、Ｂ）の各形状を検出する装置である。以下、詳細に説明する。 Next, embodiments of the present invention will be described with reference to the accompanying drawings for understanding of the present invention.
As shown in FIGS. 1 and 2, a shape measuring apparatus 10 according to an embodiment of the present invention has a back surface 12 disposed on a virtual XY plane 11, and an X axis 13 and a Y axis 14 of the XY plane 11 are orthogonal to each other. The center is arranged at the position where the width of the workpiece 15 is set, and the width direction is provided on the surface 17 of the workpiece 15 and both sides of the workpiece 15 in the width direction based on the reflection of the light irradiated to the workpiece 15 along the X axis 13. It is an apparatus for detecting each shape of the side surfaces 18 and 19 (side surfaces A and B). Details will be described below.

本実施の形態において、ワーク１５は、図１、図２に示すように、矩形の板状部材であり、具体的には、建材の外壁パネルである。ワーク１５は、表面１７（ワーク１５を建屋に設置した際に露出する面）に、プレス加工等によって所定の模様が形成され、表面１７の反対側にある裏面１２は、平坦に形成されている。
本実施の形態では、ワーク１５のＹ軸１４に沿う縦方向が幅方向に比べて長いが、縦方向が幅方向に比べて短くてもよい。ここで、ワーク１５の幅方向とは、ワーク１５を建屋に設置した際の左右方向あるいは高さ方向に当たり、ワーク１５の縦方向とは、ワーク１５を建屋に設置した際の高さ方向あるいは左右方向に該当する。
なお、図１、図２においては、表面１７に形成された模様の記載を省略している。 In the present embodiment, the work 15 is a rectangular plate-like member as shown in FIGS. 1 and 2, specifically, an outer wall panel of building materials. The workpiece 15 has a predetermined pattern formed on the front surface 17 (the surface exposed when the workpiece 15 is installed in the building) by pressing or the like, and the back surface 12 on the opposite side of the front surface 17 is formed flat. .
In the present embodiment, the vertical direction of the workpiece 15 along the Y axis 14 is longer than the width direction, but the vertical direction may be shorter than the width direction. Here, the width direction of the work 15 corresponds to the left-right direction or the height direction when the work 15 is installed in the building, and the vertical direction of the work 15 is the height direction or the left-right direction when the work 15 is installed in the building. Corresponds to the direction.
In FIG. 1 and FIG. 2, the description of the pattern formed on the surface 17 is omitted.

ワーク１５は、ワーク１５の表面１７及び側面１８、１９の各形状を計測する検査位置に、図示しないコンベヤによって、搬送されて台座２０に載置され、計測が完了した後、検査位置から別の場所に搬送される。一のワーク１５が検査位置から別位置に搬送された後、検査位置には、別のワーク１５がコンベヤによって搬送され、表面１７及び側面１８、１９の各形状が計測される。本実施の形態では、検査位置において、裏面１２を除くワーク１５全体の形状が立体的に検出され、検出されたワーク１５全体の立体像を基に、ワーク１５の縦方向の長さ、幅、及び、厚みそれぞれの計測や、表面１７に形成された模様が、所定の位置に設けられているか等の判定が行われる。本実施の形態において、側面１８、１９の各形状の検出は、主として、ワーク１５の幅を計測する目的で行われている。 The workpiece 15 is transported by a conveyor (not shown) and placed on the pedestal 20 at an inspection position for measuring the shape of the surface 17 and the side surfaces 18 and 19 of the workpiece 15. It is transported to the place. After one workpiece 15 is conveyed from the inspection position to another position, another workpiece 15 is conveyed to the inspection position by the conveyor, and the shapes of the surface 17 and the side surfaces 18 and 19 are measured. In the present embodiment, the shape of the entire work 15 excluding the back surface 12 is detected three-dimensionally at the inspection position, and the vertical length, width, and the like of the work 15 are determined based on the detected three-dimensional image of the entire work 15. Further, each thickness is measured, and it is determined whether the pattern formed on the surface 17 is provided at a predetermined position. In the present embodiment, detection of each shape of the side surfaces 18 and 19 is performed mainly for the purpose of measuring the width of the workpiece 15.

ここで、検査位置に配されたワーク１５の裏面１２に仮想のＸＹ平面１１（以下、単に「ＸＹ平面１１」と言う）があると定義し、ＸＹ平面１１において直交するＸ軸１３とＹ軸１４は、同ワーク１５の幅方向中心かつ縦方向中心の位置で交わり、Ｘ軸１３は同ワーク１５の幅方向に沿い、Ｙ軸１４は同ワーク１５の縦方向に沿っているものとする。
本実施の形態では、ワーク１５の幅方向両側にそれぞれ設けられた側面１８、１９は、ワーク１５が検査位置に配置された状態で、Ｙ軸１４方向に配される。 Here, it is defined that there is a virtual XY plane 11 (hereinafter, simply referred to as “XY plane 11”) on the back surface 12 of the work 15 arranged at the inspection position, and the X axis 13 and the Y axis orthogonal to each other on the XY plane 11. 14 intersects at the position of the center of the workpiece 15 in the width direction and the center of the longitudinal direction, the X axis 13 is along the width direction of the workpiece 15, and the Y axis 14 is along the longitudinal direction of the workpiece 15.
In the present embodiment, the side surfaces 18 and 19 provided on both sides in the width direction of the workpiece 15 are arranged in the Y-axis 14 direction in a state where the workpiece 15 is arranged at the inspection position.

検査位置には、図２に示すように、台座２０のＸ軸１３方向（左右方向）両側に、支持部材２１、２２がそれぞれ立設されている。支持部材２１、２２はそれぞれ、台座２０より高い位置にＹ軸１４方向（前後方向）に沿った図示しないガイドレールを備え、支持部材２１のガイドレール及び支持部材２２のガイドレールには、Ｘ軸１３方向に長い横架材２３の両端がそれぞれ進退自在に取り付けられている。横架材２３は、図示しない動力伝達機構を介して、図３に示すサーボモータ２４から駆動力を与えられＹ軸１４方向に移動する。 As shown in FIG. 2, support members 21 and 22 are erected at the inspection position on both sides of the pedestal 20 in the X-axis 13 direction (left-right direction). Each of the support members 21 and 22 includes a guide rail (not shown) along the Y-axis 14 direction (front-rear direction) at a position higher than the pedestal 20, and the guide rail of the support member 21 and the guide rail of the support member 22 have an X-axis Both ends of the horizontal member 23 that is long in 13 directions are attached so as to freely advance and retract. The horizontal member 23 is moved in the Y-axis 14 direction by a driving force from the servo motor 24 shown in FIG. 3 via a power transmission mechanism (not shown).

横架材２３には、それぞれＸＹ平面１１まで距離を有する位置からＸＹ平面１１に向かって光を照射して距離を測定する複数のレーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂが取り付けられている。レーザ変位センサ２５、２５ａ、２５ｂは、レーザ変位センサＰの一例であり、レーザ変位センサ２６、２６ａ、２６ｂは、レーザ変位センサＱの一例である。
レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂは、図１、図２に示すように、Ｘ軸１３方向成分（Ｘ軸１３方向の座標）において、負側（左側）に向かって順に配置されている。 A plurality of laser displacement sensors 25, 25 a, 25 b, 26, 26 a, and 26 b that measure the distance by irradiating light from the position having a distance to the XY plane 11 toward the XY plane 11 are attached to the horizontal member 23. It has been. The laser displacement sensors 25, 25a, and 25b are examples of the laser displacement sensor P, and the laser displacement sensors 26, 26a, and 26b are examples of the laser displacement sensor Q.
As shown in FIGS. 1 and 2, the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b are arranged in order toward the negative side (left side) in the X-axis 13 direction component (coordinates in the X-axis 13 direction). Has been placed.

レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂは、それぞれ、光を対象物に照射する図示しない照射部と、反射した光を検出する図示しない受光部とを備え、受光部が検出した光を基に、対象物において、光が当たった部分の形状を検知する。レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂの各照射部は、ＸＹ平面１１まで距離を有し、他のレーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂの各照射部とは、Ｘ軸１３方向成分が異なる位置に配置されている。
以下、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂが照射する光を、それぞれ、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂとして説明する。 Each of the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b includes an irradiation unit (not shown) that irradiates an object with light and a light receiving unit (not shown) that detects reflected light, and the light receiving unit detects Based on the light, the shape of the portion of the object that is exposed to light is detected. Each irradiation part of the laser displacement sensors 25, 25a, 25b, 26, 26a, 26b has a distance to the XY plane 11, and each irradiation part of the other laser displacement sensors 25, 25a, 25b, 26, 26a, 26b Are arranged at different positions in the X-axis 13 direction component.
Hereinafter, the light irradiated by the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b will be described as light 27, 27a, 27b, 28, 28a, and 28b, respectively.

レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂは、図２、図４に示すように、照射した光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂがそれぞれ、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂから離れるにつれ、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂの各中心の進行方向に直交する一の方向に広がるように進行する。本実施の形態において、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂはそれぞれ、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂが進行しながらＸ軸１３方向に広がる配置で、横架材２３に固定され、光２７（光２７ａ、２７ｂ、２８、２８ａ、２８ｂについても同じ）は、図１に示すように、ワーク１５に対し、Ｘ軸１３方向に沿う線分状の部分に到達する。 As shown in FIGS. 2 and 4, the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b are irradiated with irradiated light 27, 27a, 27b, 28, 28a, and 28b, respectively. As the distance from 25b, 26, 26a, and 26b increases, the light 27, 27a, 27b, 28, 28a, and 28b travel so as to spread in one direction orthogonal to the traveling direction of each center. In the present embodiment, the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b are arranged so as to spread in the X-axis 13 direction while the light 27, 27a, 27b, 28, 28a, and 28b travel, Light 27 (same for light 27a, 27b, 28, 28a, and 28b) reaches the line-segmented part along the X-axis 13 direction with respect to the work 15, as shown in FIG. To do.

レーザ変位センサ２５、２５ａ、２５ｂは、図１、図４に示すように、Ｙ軸１４よりＸ軸１３方向正側（右側）に位置し、光２７、２７ａ、２７ｂの各中心が、ＸＹ平面１１のＸ軸１３方向正側の領域へ向かう方向に、光２７、２７ａ、２７ｂをそれぞれ照射する。即ち、レーザ変位センサ２５、２５ａ、２５ｂは、ＸＹ平面１１のＸ軸１３方向正側の領域に向かって、光２７、２７ａ、２７ｂをそれぞれ照射する。
光２７、２７ａ、２７ｂは、検査位置に配されて、側面１８、１９がＸ軸１３方向正側の領域及びＸ軸１３方向負側の領域にそれぞれ配置されたワーク１５に対し、Ｘ軸１３方向正側にある領域に向かって進む。 As shown in FIGS. 1 and 4, the laser displacement sensors 25, 25a, 25b are located on the X axis 13 direction positive side (right side) from the Y axis 14, and the centers of the lights 27, 27a, 27b are in the XY plane. 11 are irradiated with light 27, 27a, and 27b in the direction toward the region on the positive side in the X-axis 13 direction. That is, the laser displacement sensors 25, 25a, and 25b irradiate the light 27, 27a, and 27b toward the region on the X axis 13 direction positive side of the XY plane 11, respectively.
The lights 27, 27a, and 27b are arranged at the inspection position, and the X axis 13 with respect to the workpiece 15 in which the side surfaces 18 and 19 are arranged in the X axis 13 direction positive region and the X axis 13 direction negative region, respectively. Proceed toward the area on the positive side.

一方、レーザ変位センサ２６、２６ａ、２６ｂは、Ｙ軸１４よりＸ軸１３方向負側に位置し、光２８、２８ａ、２８ｂの各中心が、ＸＹ平面１１のＸ軸１３方向負側の領域へ向かう方向に、光２８、２８ａ、２８ｂをそれぞれ照射する。即ち、レーザ変位センサ２６、２６ａ、２６ｂは、ＸＹ平面１１のＸ軸１３方向負側の領域に向かって、光２８、２８ａ、２８ｂをそれぞれ照射する。
光２８、２８ａ、２８ｂは、検査位置に配されたワーク１５のＸ軸１３方向負側にある領域に向かって進行する。 On the other hand, the laser displacement sensors 26, 26 a, 26 b are positioned on the negative side in the X-axis 13 direction from the Y-axis 14, and the centers of the lights 28, 28 a, 28 b go to the region on the negative side in the X-axis 13 direction of the XY plane 11. Lights 28, 28a, and 28b are respectively irradiated in the directions. That is, the laser displacement sensors 26, 26 a, and 26 b irradiate the light 28, 28 a, and 28 b toward the X-axis 13 direction negative region of the XY plane 11, respectively.
The lights 28, 28a, and 28b travel toward a region on the negative side in the X-axis 13 direction of the work 15 disposed at the inspection position.

そして、レーザ変位センサ２５、２５ａ、２５ｂは、Ｘ軸１３方向負側に傾いた状態で横架材２３に固定され、光２７、２７ａ、２７ｂの中心の進行方向が、Ｘ軸１３の負側方向に対して鋭角（本実施の形態では、６０°〜８０°）をなす向きで、光２７、２７ａ、２７ｂをそれぞれ照射する。レーザ変位センサ２６、２６ａ、２６ｂは、Ｘ軸１３方向正側に傾いた状態で横架材２３に固定され、光２８、２８ａ、２８ｂの中心の進行方向が、Ｘ軸１３の正側方向に対して鋭角（本実施の形態では、６０°〜８０°）をなす向きで、光２８、２８ａ、２８ｂをそれぞれ照射する。 The laser displacement sensors 25, 25 a, 25 b are fixed to the horizontal member 23 in a state inclined to the X axis 13 direction negative side, and the traveling direction of the centers of the light 27, 27 a, 27 b is on the negative side of the X axis 13. Lights 27, 27a, and 27b are irradiated in directions that form an acute angle (60 ° to 80 ° in the present embodiment) with respect to the direction. The laser displacement sensors 26, 26 a, 26 b are fixed to the horizontal member 23 in a state inclined to the X axis 13 direction positive side, and the traveling direction of the centers of the lights 28, 28 a, 28 b is in the positive direction of the X axis 13. On the other hand, the light 28, 28a, and 28b are irradiated in directions that form an acute angle (in this embodiment, 60 ° to 80 °).

本実施の形態では、ＸＹ平面１１に対し垂直に配置された側面１８に対して、レーザ変位センサ２５から照射された光２７の一部が当てられ、ＸＹ平面１１に対し垂直に配置された側面１９に対して、レーザ変位センサ２６ｂから照射された光２８ｂの一部が当てられる。
ワーク１５の表面１７のＸ軸１３方向正側にある領域に対しては、レーザ変位センサ２５から照射された光２７の一部、レーザ変位センサ２５ａから照射された光２７ａの全部、レーザ変位センサ２５ｂから照射された光２７ｂの一部（本実施の形態では、半分以上）、及び、レーザ変位センサ２６から照射された光２８の一部が当たる。そして、ワーク１５の表面１７のＸ軸１３方向負側にある領域に対しては、レーザ変位センサ２５ｂから照射された光２７ｂの一部、レーザ変位センサ２６から照射された光２８の一部（本実施の形態では、半分以上）、レーザ変位センサ２６ａから照射された光２８ａの全部、及び、レーザ変位センサ２６ｂから照射された光２８ｂの一部が当たる。 In the present embodiment, a part of the light 27 emitted from the laser displacement sensor 25 is applied to the side surface 18 arranged perpendicular to the XY plane 11, and the side surface arranged perpendicular to the XY plane 11. 19, a part of the light 28b emitted from the laser displacement sensor 26b is applied.
For the region on the positive side in the X-axis 13 direction of the surface 17 of the work 15, a part of the light 27 emitted from the laser displacement sensor 25, the whole light 27a emitted from the laser displacement sensor 25a, the laser displacement sensor A part of the light 27b irradiated from 25b (half or more in the present embodiment) and a part of the light 28 irradiated from the laser displacement sensor 26 are hit. For the region on the negative side of the surface 17 of the workpiece 15 in the X-axis 13 direction, a part of the light 27b emitted from the laser displacement sensor 25b and a part of the light 28 emitted from the laser displacement sensor 26 ( In this embodiment, more than half of the light 28a irradiated from the laser displacement sensor 26a and a part of the light 28b irradiated from the laser displacement sensor 26b are hit.

また、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂはそれぞれ、図１、図４に示すように、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂの中心の進行経路が、他のレーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂの光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂの中心の進行経路に交わらない方向（非交差の方向）に光を照射する。 Further, the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b are respectively shown in FIGS. 1 and 4 in which the traveling path at the center of the light 27, 27a, 27b, 28, 28a, and 28b Light is emitted in a direction (non-crossing direction) that does not intersect the traveling path at the center of the light 27, 27a, 27b, 28, 28a, 28b of the laser displacement sensors 25, 25a, 25b, 26, 26a, 26b.

そして、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂはそれぞれ、図４に示すように、照射した光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂの少なくとも一部が、他のレーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂに対し、ワーク１５を非配置にしたＸＹ平面１１のＸ軸１３方向成分が異なる位置に到達する。
更に、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂはそれぞれ、ワーク１５を非配置にしたＸＹ平面１１に、光の中心が、Ｘ軸１３方向成分で隣り合って到達するレーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂとの関係において、ワーク１５を非配置にしたＸＹ平面１１に対し、光が、Ｘ軸１３方向成分で部分的に重なり合って到達する。 As shown in FIG. 4, the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b respectively emit at least a part of the irradiated light 27, 27a, 27b, 28, 28a, and 28b. With respect to the sensors 25, 25a, 25b, 26, 26a, and 26b, the X-axis 13 direction component of the XY plane 11 in which the work 15 is not disposed reaches different positions.
Further, each of the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b is a laser displacement sensor in which the center of light reaches the XY plane 11 where the work 15 is not disposed adjacent to each other in the X-axis 13 direction component. In relation to 25, 25a, 25b, 26, 26a, and 26b, the light reaches the XY plane 11 where the work 15 is not arranged, partially overlapping in the X-axis 13 direction component.

従って、ワーク１５を非配置にしたＸＹ平面１１において、Ｘ軸１３方向の最も負側に到達する光２８ｂから、Ｘ軸１３方向の最も正側に到達する光２７まで、Ｘ軸１３方向成分で、隙間なく、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂが到達することになる。
本実施の形態では、レーザ変位センサ２５、２５ａと、レーザ変位センサ２５ａ、２５ｂと、レーザ変位センサ２５ｂ、２６と、レーザ変位センサ２６、２６ａと、レーザ変位センサ２６ａ、２６ｂとが、それぞれ、ワーク１５を非配置にしたＸＹ平面１１に対し、Ｘ軸１３に沿って線分状に広がって到達した光の一部が、Ｘ軸１３方向成分において重なり合っている。 Accordingly, in the XY plane 11 in which the work 15 is not arranged, from the light 28b that reaches the most negative side in the X-axis 13 direction to the light 27 that reaches the most positive side in the X-axis 13 direction, The light 27, 27a, 27b, 28, 28a, 28b arrives without any gap.
In the present embodiment, laser displacement sensors 25 and 25a, laser displacement sensors 25a and 25b, laser displacement sensors 25b and 26, laser displacement sensors 26 and 26a, and laser displacement sensors 26a and 26b are respectively workpieces. A part of the light that has spread in a line segment along the X axis 13 with respect to the XY plane 11 in which 15 is not arranged overlaps in the X axis 13 direction component.

また、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂは、図１に示すように、それぞれ、Ｘ軸１３方向成分で隣り合って設けられたレーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂ（例えば、レーザ変位センサ２５とレーザ変位センサ２５ａ）が、Ｙ軸１４方向成分の異なる位置に配置されている。
本実施の形態では、レーザ変位センサ２５、２５ｂ、２６ａがＹ軸１４方向成分において同じ位置に配され、レーザ変位センサ２５ａ、２６、２６ｂがＹ軸１４方向成分において同じ位置に配されているが、これに限定されない。 Further, as shown in FIG. 1, the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b are respectively disposed adjacent to each other in the X-axis 13 direction component. 26a and 26b (for example, the laser displacement sensor 25 and the laser displacement sensor 25a) are disposed at different positions in the Y-axis 14 direction component.
In the present embodiment, the laser displacement sensors 25, 25b, and 26a are arranged at the same position in the Y-axis 14 direction component, and the laser displacement sensors 25a, 26, and 26b are arranged at the same position in the Y-axis 14 direction component. However, the present invention is not limited to this.

レーザ変位センサ２５、２５ａは、図３に示すように、制御器３０を介して、情報処理端末３１及びサーボモータ２４に接続され、レーザ変位センサ２５ｂ、２６は、制御器３２を介して、情報処理端末３１及びサーボモータ２４に接続され、レーザ変位センサ２６ａ、２６ｂは、制御器３３を介して、情報処理端末３１及びサーボモータ２４に接続されている。
検査位置にワーク１５が搬送されると、サーボモータ２４は、情報処理端末３１から指令信号を送られて、作動を開始し、Ｙ軸１４方向で最も負側に配置されていた横架材２３を、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂと共にＹ軸１４方向正側に移動させる。なお、サーボモータ２４は、シーケンスコントローラ、即ち、ＰＬＣ（ＰｒｏｇｒａｍｍａｂｌｅＬｏｇｉｃＣｏｎｔｒｏｌｌｅｒ）を介して、情報処理端末３１に接続されていてもよい。 As shown in FIG. 3, the laser displacement sensors 25 and 25 a are connected to the information processing terminal 31 and the servo motor 24 via the controller 30, and the laser displacement sensors 25 b and 26 are connected to the information via the controller 32. The laser displacement sensors 26 a and 26 b are connected to the processing terminal 31 and the servo motor 24, and the laser displacement sensors 26 a and 26 b are connected to the information processing terminal 31 and the servo motor 24 via the controller 33.
When the workpiece 15 is transported to the inspection position, the servo motor 24 receives a command signal from the information processing terminal 31 and starts to operate, and the horizontal member 23 arranged on the most negative side in the Y-axis 14 direction. Are moved together with the laser displacement sensors 25, 25a, 25b, 26, 26a, 26b to the Y axis 14 direction positive side. The servo motor 24 may be connected to the information processing terminal 31 through a sequence controller, that is, a PLC (Programmable Logic Controller).

サーボモータ２４は、横架材２３を所定距離（本実施の形態では、０．０１ｍｍ〜０．５ｍｍ）移動させるごとに、制御器３０を介したレーザ変位センサ２５、２５ａへのパルス信号の送信と、制御器３２を介したレーザ変位センサ２５ｂ、２６へのパルス信号の送信と、制御器３３を介したレーザ変位センサ２６ａ、２６ｂへのパルス信号の送信とを同時に行う。 The servo motor 24 transmits a pulse signal to the laser displacement sensors 25 and 25a via the controller 30 every time the horizontal member 23 is moved a predetermined distance (0.01 mm to 0.5 mm in the present embodiment). The transmission of the pulse signal to the laser displacement sensors 25b and 26 via the controller 32 and the transmission of the pulse signal to the laser displacement sensors 26a and 26b via the controller 33 are simultaneously performed.

レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂは、サーボモータ２４からのパルス信号を受信したタイミングでそれぞれ光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂを照射し、反射した光を受光して、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂが当たった箇所の像（形状情報）をそれぞれ得る。
従って、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂはそれぞれ、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂを照射しつつ、ワーク１５に対してＹ軸１４方向に相対的に移動する。
レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂのワーク１５に対するＹ軸１４方向の移動は、少なくとも、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂそれぞれがワーク１５のＹ軸１４方向負側の端からＹ軸１４方向正側の端まで当たる範囲で行われる。 The laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b emit light 27, 27a, 27b, 28, 28a, and 28b, respectively, at the timing of receiving the pulse signal from the servo motor 24, and receive the reflected light. Thus, images (shape information) of the places where the lights 27, 27a, 27b, 28, 28a, and 28b are respectively irradiated are obtained.
Accordingly, the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b move relative to the work 15 in the Y-axis 14 direction while irradiating the light 27, 27a, 27b, 28, 28a, and 28b, respectively. To do.
The movement of the laser displacement sensors 25, 25a, 25b, 26, 26a, 26b in the Y-axis 14 direction relative to the workpiece 15 is such that at least the light 27, 27a, 27b, 28, 28a, 28b is negative in the Y-axis 14 direction of the workpiece 15. This is performed in the range from the side end to the end on the Y axis 14 direction positive side.

情報処理端末３１は、レーザ変位センサ２５、２５ａがそれぞれ得た像を制御器３０を経由して受信し、レーザ変位センサ２５ｂ、２６がそれぞれ得た像を制御器３２を経由して受信し、レーザ変位センサ２６ａ、２６ｂがそれぞれ得た像を制御器３３を経由して受信する。なお、情報処理端末３１と制御器３０の間に、レーザ変位センサ２５、２５ａがそれぞれ得た像のデータを記憶する情報処理端末を設けて、情報処理端末３１は、その情報処理端末からデータを取得するようにしてもよく、情報処理端末３１と制御器３２の間、情報処理端末３１と制御器３３の間それぞれにも、データ記憶用の情報処理端末を設けてもよい。
情報処理端末３１は、横架材２３がＹ軸１４方向で最も正側に移動するまで、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂそれぞれから、数万オーダ、あるいは、数十万オーダの数の像を受信し、これらを基にして、裏面１２を除くワーク１５全体の形状を立体的に検出し、ワーク１５の縦方向及び幅方向の長さや厚みの計測、並びに、表面１７に形成された模様が所定の位置に設けられているかの判定を行う。 The information processing terminal 31 receives the images obtained by the laser displacement sensors 25 and 25a via the controller 30 and receives the images obtained by the laser displacement sensors 25b and 26 via the controller 32, respectively. Images obtained by the laser displacement sensors 26 a and 26 b are received via the controller 33. An information processing terminal for storing image data obtained by the laser displacement sensors 25 and 25a is provided between the information processing terminal 31 and the controller 30, and the information processing terminal 31 receives data from the information processing terminal. You may make it acquire, and you may provide the information processing terminal for data storage also between the information processing terminal 31 and the controller 32, and between the information processing terminal 31 and the controller 33, respectively.
The information processing terminal 31 is tens of thousands or hundreds of thousands from each of the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b until the horizontal member 23 moves to the most positive side in the Y-axis 14 direction. Receiving the image of the number of orders, based on these, the shape of the entire work 15 excluding the back surface 12 is detected three-dimensionally, measuring the length and thickness of the work 15 in the vertical and width directions, and the surface 17 It is determined whether or not the pattern formed at the predetermined position is provided.

ここで、検査位置に配置されたワーク１５の表面１７及び側面１８、１９に対し、Ｘ軸１３方向成分において、隙間なく、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂが当たる。即ち、レーザ変位センサ２５、２５ａ、２５ｂの少なくとも一、及び、レーザ変位センサ２６、２６ａ、２６ｂの少なくとも一はそれぞれ、ワーク１５の表面１７に光を当て、レーザ変位センサ２５、２５ａ、２５ｂの少なくとも一（ワーク１５の幅方向の長さによっては２つ）は、ワーク１５の側面１８に光を当て、レーザ変位センサ２６、２６ａ、２６ｂの少なくとも一（ワーク１５の幅方向の長さによっては２つ）は、ワーク１５の側面１９に光を当てる。 Here, the light 17, 27 a, 27 b, 28, 28 a, and 28 b strike the surface 17 and the side surfaces 18 and 19 of the work 15 disposed at the inspection position without any gap in the X-axis 13 direction component. That is, at least one of the laser displacement sensors 25, 25a, and 25b and at least one of the laser displacement sensors 26, 26a, and 26b each shine light on the surface 17 of the workpiece 15, and at least one of the laser displacement sensors 25, 25a, and 25b. One (two depending on the length of the workpiece 15 in the width direction) applies light to the side surface 18 of the workpiece 15, and at least one of the laser displacement sensors 26, 26a, 26b (two depending on the length of the workpiece 15 in the width direction). ) Shines light on the side surface 19 of the workpiece 15.

このため、情報処理端末３１は、表面１７、及び、側面１８、１９それぞれの全体の形状を得ることが可能である。ワーク１５の表面１７（側面１８、１９についても同じ）の全体の形状を得る必要がない場合、Ｘ軸１３方向成分において、隙間なく、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂを当てる必要はない。
本実施の形態では、更に、ワーク１５と厚みが異なるワークについても、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂがそれぞれ、Ｘ軸１３方向成分で隣り合ってワークに当たる光２７、２７ａ、２７ｂ、２８、２８ａ、２８との関係において、Ｘ軸１３方向成分で重なり合ってワークにあたる限り、そのワークの表面全体、幅方向両側の２つの側面、及び、縦方向両側の２つの側面の各形状を検出することができる。よって、厚みが所定範囲内にあるワークについて、ワークの裏面を除く全体の立体像を検出可能である。 For this reason, the information processing terminal 31 can obtain the entire shape of the surface 17 and the side surfaces 18 and 19. When it is not necessary to obtain the entire shape of the surface 17 of the workpiece 15 (the same applies to the side surfaces 18 and 19), it is necessary to irradiate the light 27, 27a, 27b, 28, 28a, 28b without any gap in the X-axis 13 direction component. There is no.
In the present embodiment, the light 27, 27a, 27b, 28, 28a, 28b is also adjacent to the X-axis 13-direction component and strikes the work 27, 27a, 27b, even for a work having a thickness different from that of the work 15. , 28, 28a, and 28, as long as the workpiece overlaps with the X-axis 13 direction component, each shape of the entire surface of the workpiece, two side surfaces on both sides in the width direction, and two side surfaces on both sides in the vertical direction Can be detected. Therefore, it is possible to detect the entire stereoscopic image excluding the back surface of the workpiece having a thickness within a predetermined range.

そして、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂの各中心が、ワーク１５を非配置にしたＸＹ平面１１に、Ｘ軸１３方向成分で隣り合って到達するレーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂの組はそれぞれ、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂの各中心が、ワーク１５を非配置にしたＸＹ平面１１に対し、Ｙ軸１４方向成分が異なる位置に到達する。
例えば、レーザ変位センサ２５ａから照射される光２７ａの中心は、レーザ変位センサ２５、２５ｂからそれぞれ照射される光２７、２７ｂの各中心と、ワーク１５を非配置にしたＸＹ平面１１に対して、Ｘ軸１３方向成分で隣り合った位置、かつ、Ｙ軸１４方向成分が異なる位置に到達する。 Then, laser displacement sensors 25, 25a, 25b in which the centers of the lights 27, 27a, 27b, 28, 28a, 28b reach the XY plane 11 where the workpiece 15 is not disposed adjacent to each other in the X-axis 13 direction component. , 26, 26a, and 26b, the respective centers of the light 27, 27a, 27b, 28, 28a, and 28b are at positions where the Y-axis 14 direction component is different from the XY plane 11 on which the work 15 is not disposed. To reach.
For example, the center of the light 27a emitted from the laser displacement sensor 25a is relative to the centers of the lights 27 and 27b emitted from the laser displacement sensors 25 and 25b and the XY plane 11 where the work 15 is not arranged. It reaches a position adjacent to the X-axis 13 direction component and a position where the Y-axis 14 direction component is different.

従って、検査位置にワーク１５を配した状態で、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂは、ワーク１５あるいはＸＹ平面１１において、重なることはなく、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂ相互の光の干渉から、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂそれぞれの形状計測が不安定になるのを回避することができる。但し、検査精度等によっては、ワーク１５あるいはＸＹ平面１１において、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂの一部が相互に重なるようにしてもよい。 Therefore, the light 27, 27a, 27b, 28, 28a, 28b does not overlap on the work 15 or the XY plane 11 in the state where the work 15 is arranged at the inspection position, and the light 27, 27a, 27b, 28, 28a. 28b, it is possible to avoid instability of the shape measurement of each of the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b due to mutual light interference. However, depending on the inspection accuracy or the like, a part of the light 27, 27a, 27b, 28, 28a, 28b may overlap each other on the workpiece 15 or the XY plane 11.

ここで、レーザ変位センサ２５、２５ａ、２５ｂはそれぞれ、光２７、２７ａ、２７ｂの中心の進行方向が、Ｘ軸１３の負側方向に対して鋭角をなす向きに配置され、レーザ変位センサ２６、２６ａ、２６ｂはそれぞれ、光２８、２８ａ、２８ｂの中心の進行方向が、Ｘ軸１３の正側方向に対して鋭角をなす向きに配置されているので、ワーク１５より幅方向が短いワークが検査位置に配置され、そのワークの幅方向一側の側面に、光２７が当たらずとも、光２７ａあるいは光２７ｂが当たり、そのワークの幅方向他側の側面に、光２８ｂが当たらずとも、光２８あるいは光２８ａが当たる。従って、幅方向の長さが所定の範囲内にあるワークについて、幅方向両側にある２つの側面の形状を検出可能である。 Here, the laser displacement sensors 25, 25 a, 25 b are arranged such that the traveling directions of the centers of the light 27, 27 a, 27 b make an acute angle with respect to the negative direction of the X axis 13, respectively. 26a and 26b are arranged in such a way that the traveling direction of the centers of the lights 28, 28a and 28b makes an acute angle with respect to the positive side direction of the X axis 13, so that a work whose width direction is shorter than the work 15 is inspected. Even if the light 27 does not hit the side surface on one side in the width direction of the work, the light 27a or the light 27b hits the light, and the light 28b does not hit the side surface on the other side in the width direction of the work. 28 or light 28a hits. Accordingly, it is possible to detect the shapes of the two side surfaces on both sides in the width direction for the workpiece having a length in the width direction within a predetermined range.

本実施の形態において、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂからそれぞれ照射された光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂの少なくとも一部が、ワーク１５を非配置にしたＸＹ平面１１に対し、他の光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂとは、Ｘ軸１３方向成分が異なる位置に到達するようにしているのは、光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂが、Ｘ軸１３方向成分において、異なる範囲で、形状の検出ができるようにするためである。 In the present embodiment, at least a part of the light 27, 27a, 27b, 28, 28a, 28b emitted from the laser displacement sensors 25, 25a, 25b, 26, 26a, 26b, respectively, made the work 15 non-arranged. The other light 27, 27a, 27b, 28, 28a, 28b with respect to the XY plane 11 reaches the position where the X-axis 13 direction component is different from the light 27, 27a, 27b, 28, This is because the shapes 28a and 28b can detect shapes in different ranges in the X-axis 13 direction component.

また、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂそれぞれが得た像（以下、「部分像」とも言う）は、ワーク１５の一部の像であるため、情報処理端末３１は、その複数の部分像を合成して、裏面１２を除くワーク１５全体の立体像（全体像の一例）を得る必要がある。
本実施の形態では、全体の立体形状が確認されている校正治具をワーク１５と同様の条件（即ち、ＸＹ平面１１に裏面が配され、Ｘ軸１３とＹ軸１４が直交する位置に中心が配され、幅方向がＸ軸１３に沿う条件）で検査位置に配置し、校正治具にレーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂそれぞれから光２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂを照射して得られた部分像と、校正治具の実際の形状とを比較して、個々の部分像から全体像を得るための校正式を予め算出する。 In addition, since the images obtained by the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b (hereinafter also referred to as “partial images”) are partial images of the work 15, the information processing terminal 31 It is necessary to combine the plurality of partial images to obtain a three-dimensional image of the entire work 15 excluding the back surface 12 (an example of an overall image).
In the present embodiment, the calibration jig whose overall three-dimensional shape has been confirmed is centered on the same condition as the workpiece 15 (that is, the back surface is arranged on the XY plane 11 and the X axis 13 and the Y axis 14 are orthogonal to each other). Are arranged at the inspection position under the condition that the width direction is along the X axis 13), and the light 27, 27a, 27b, 28, and 27b from the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b are respectively placed on the calibration jig. The partial image obtained by irradiating 28a and 28b is compared with the actual shape of the calibration jig, and a calibration formula for obtaining the entire image from each partial image is calculated in advance.

情報処理端末３１は、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂそれぞれがワーク１５に対して照射して得た部分像を、校正式を基に、裏面１２を除くワーク１５全体の立体像、即ち、一つの全体像に合成する。
校正治具を用いることなく、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂの各配置を基に、個々の部分像から一つの全体像を合成することも可能であるが、その場合、レーザ変位センサ２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂの配置を厳密に行う必要があり、煩雑である。 The information processing terminal 31 uses a calibration formula to generate a partial image obtained by irradiating the workpiece 15 with the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b. A three-dimensional image, that is, one overall image is synthesized.
It is possible to synthesize one whole image from individual partial images on the basis of the arrangement of the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b without using a calibration jig. It is necessary to strictly arrange the laser displacement sensors 25, 25a, 25b, 26, 26a, and 26b, which is complicated.

以上、本発明の実施の形態を説明したが、本発明は、上記した形態に限定されるものでなく、要旨を逸脱しない条件の変更等は全て本発明の適用範囲である。
例えば、ワークの形状は、矩形の板状に限定されず、楕円形の板状や、平行四辺形の板状、あるいは、三角形の板状であってもよく、更に、角部がＲであってもよい。また、ワークは、板状である必要もない。
そして、ＸＹ平面は水平配置されている必要はなく、例えば、鉛直に配置することや、水平に対して傾いて配置することができる。 Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and all changes in conditions and the like that do not depart from the gist are within the scope of the present invention.
For example, the shape of the workpiece is not limited to a rectangular plate shape, and may be an elliptical plate shape, a parallelogram plate shape, or a triangular plate shape, and the corner portion is R. May be. Further, the work need not be plate-shaped.
The XY plane does not need to be horizontally arranged, and can be arranged vertically or inclined with respect to the horizontal.

また、各レーザ変位センサＰ、Ｑは、照射部と受光部が一つの物体に設けられている必要はなく、照射部が設けられた物体とは別の物体に受光部を設けてもよい。
更に、各レーザ変位センサＰ、ＱをＹ軸方向に移動させる代わりに、固定した各レーザ変位センサＰ、Ｑに対して、ワークをＹ軸方向に移動させることによって、各レーザ変位センサＰ、Ｑをワークに対し、Ｙ軸方向に相対的に移動させるようにしてもよい。
また、複数のレーザ変位センサＰからそれぞれ照射される光は、光の中心の進行方向が同じでなくてもよく、それは、複数のレーザ変位センサＱにおいても同様である。
そして、複数のレーザ変位センサＰ、Ｑは、ＸＹ平面までの距離が等しくなくてもよい。 In each laser displacement sensor P, Q, the irradiation unit and the light receiving unit do not need to be provided on one object, and the light receiving unit may be provided on an object different from the object provided with the irradiation unit.
Further, instead of moving the laser displacement sensors P and Q in the Y-axis direction, the laser displacement sensors P and Q are moved by moving the workpiece in the Y-axis direction with respect to the fixed laser displacement sensors P and Q. May be moved relative to the workpiece in the Y-axis direction.
Further, the light irradiated from each of the plurality of laser displacement sensors P may not have the same traveling direction at the center of the light, and the same applies to the plurality of laser displacement sensors Q.
The plurality of laser displacement sensors P and Q may not have the same distance to the XY plane.

１０：形状計測装置、１１：ＸＹ平面、１２：裏面、１３：Ｘ軸、１４：Ｙ軸、１５：ワーク、１７：表面、１８、１９：側面、２０：台座、２１、２２：支持部材、２３：横架材、２４：サーボモータ、２５、２５ａ、２５ｂ、２６、２６ａ、２６ｂ：レーザ変位センサ、２７、２７ａ、２７ｂ、２８、２８ａ、２８ｂ：光、３０：制御器、３１：情報処理端末、３２、３３：制御器 10: shape measuring device, 11: XY plane, 12: back surface, 13: X axis, 14: Y axis, 15: workpiece, 17: front surface, 18, 19: side surface, 20: pedestal, 21, 22: support member, 23: Horizontal member, 24: Servo motor, 25, 25a, 25b, 26, 26a, 26b: Laser displacement sensor, 27, 27a, 27b, 28, 28a, 28b: Light, 30: Controller, 31: Information processing Terminals 32 and 33: Controller

Claims

Based on the reflection of the light irradiated on the workpiece along the X axis, the back surface is arranged on the virtual XY plane, the center is arranged at the position where the X axis and Y axis of the XY plane are orthogonal to each other, and the width direction is A shape measuring device for detecting each shape of the surface of the workpiece and side surfaces A and B provided on both sides in the width direction of the workpiece,
The light spreading in the X-axis direction while traveling toward the X-axis direction positive side region of the XY plane is directed in such a direction that the traveling direction of the center of the light forms an acute angle with respect to the negative-side direction of the X-axis. , A plurality of laser displacement sensors P that move in the Y-axis direction with respect to the workpiece while irradiating, and light that spreads in the X-axis direction while traveling, a region on the X-axis direction negative side of the XY plane A plurality of laser displacement sensors Q that move in the Y-axis direction with respect to the workpiece while irradiating in the direction in which the traveling direction of the center of light forms an acute angle with respect to the positive direction of the X-axis. And
Each of the plurality of laser displacement sensors P and Q is light irradiated by the other laser displacement sensors P and Q with respect to the XY plane in which at least a part of the irradiated light is not disposed on the workpiece. The X-axis direction components reach different positions, and at least one of the plurality of laser displacement sensors P and at least one of the plurality of laser displacement sensors Q respectively shine light on the surface, and the plurality of laser displacements At least one of the sensors P applies light to the side surface A, and at least one of the plurality of laser displacement sensors Q applies light to the side surface B.

2. The shape measuring apparatus according to claim 1, wherein each of the plurality of laser displacement sensors P and Q reaches the XY plane where the workpiece is not disposed adjacent to each other in the X-axis direction component. A shape measuring apparatus characterized in that, in relation to the laser displacement sensors P and Q, the center of light reaches a position where the Y-axis direction component is different from the XY plane where the work is not arranged.

3. The shape measuring apparatus according to claim 1, wherein the plurality of laser displacement sensors P and Q are adjacent to each other in the X-axis direction component, and the plurality of laser displacement sensors P and Q are the Y-axis. A shape measuring device, wherein the shape measuring device is arranged at a position having different direction components.

4. The shape measuring apparatus according to claim 1, wherein each of the plurality of laser displacement sensors P and Q has a center of light on the XY plane in which the workpiece is not disposed, and the X axis In relation to the laser displacement sensors P and Q that arrive adjacent to each other in the direction component, the light reaches the XY plane where the workpiece is not arranged partially overlapping with the X-axis direction component. A shape measuring device characterized by

5. The shape measuring apparatus according to claim 1, wherein a partial image obtained by receiving reflection of light irradiated to the workpiece by each of the plurality of laser displacement sensors P and Q is calibrated. Based on a calibration formula calculated in advance by comparing a partial image obtained by irradiating the jig with light from each of the plurality of laser displacement sensors P and Q and an actual shape of the calibration jig, A shape measuring apparatus which is synthesized into a whole image.