JP2016003919A - Microscope system, calibration method, and height measurement method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique for easily calibrating a scanning type probe microscope without damaging a specimen.SOLUTION: A microscope system 100 includes a microscope device 400 and an arithmetic unit 700. The microscope device 400 includes an optical microscope 200 and an SPM 300. Based on first height information of a specimen S obtained by height measurement by the optical microscope 200 and a correction value for each height of an object which is obtained in advance for correcting a measurement error generated by the height measurement by the SPM 300, the arithmetic unit 700 determines the correction value used in the height measurement by the SPM 300.

Description

  The present invention relates to a microscope system including an optical microscope capable of measuring height and a scanning probe microscope, a calibration method thereof, and a height measurement method.

  Scanning probe microscopes (hereinafter referred to as SPM), represented by atomic force microscopes (hereinafter referred to as AFM), image various physical quantities that act between the probe and the sample. For example, it is used for measuring the height of a sample.

  SPM generally uses a driving element that can be driven minutely, such as a piezo element, to change the distance between the sample and the probe, and this driving element has hysteresis. For this reason, in order to obtain accurate height information, calibration (calibration) is usually performed in SPM. Techniques related to SPM calibration are described in, for example, Patent Document 1 to Patent Document 5.

  In Patent Document 1, a cantilever provided with a probe is displaced by a Z stage, which is a driving means different from the piezoelectric element, and the displacement amount of the cantilever (that is, the height of the sample) is measured. Techniques for calibrating measuring instruments with elements are described. Patent Documents 2 to 5 describe techniques related to standard samples used for calibration.

JP 2008-224587 A JP 2010-78582 A JP 2004-37325 A JP 2006-64459 A JP-A-8-233836

  In the techniques described in Patent Document 1 to Patent Document 5, a sample is scanned with a probe during calibration. For this reason, the sample may be damaged before the measurement.

  Furthermore, in the technique described in Patent Document 1, a sample is scanned twice with a probe for calibration. In the techniques described in Patent Document 2 to Patent Document 5, exchange of the sample to be measured and the standard sample occurs every time calibration is required. For this reason, even if it is a case where the technique described in any literature is used, a calibration work will take time and the measurer will be forced to bear the burden which is not small.

  Based on the above situation, an object of the present invention is to provide a technique for easily calibrating a scanning probe microscope without damaging a sample.

  One embodiment of the present invention includes a microscope apparatus including an optical microscope and a scanning probe microscope, first height information of the sample obtained by height measurement with the optical microscope, and height with the scanning probe microscope. Correction value used in height measurement with the scanning probe microscope based on a correction value acquired in advance for correcting a measurement error caused by height measurement and for each height of the object A microscope system comprising: an arithmetic device for determining

  Another aspect of the present invention is a method for calibrating a microscope apparatus comprising an optical microscope and a scanning probe microscope, wherein the height of a sample is measured with the optical microscope and obtained by measuring the height with the optical microscope. Based on the first height information of the sample and a correction value acquired in advance for correcting a measurement error caused by the height measurement with the scanning probe microscope and for each height of the object Thus, a calibration method for determining a correction value used in height measurement with the scanning probe microscope is provided.

  Still another aspect of the present invention is a method for measuring a height of a microscope apparatus including an optical microscope and a scanning probe microscope, wherein the height of a sample is measured with the optical microscope, and the height measurement with the optical microscope is performed. First height information of the obtained sample and a correction value acquired in advance for correcting a measurement error caused by height measurement with the scanning probe microscope, for each height of the object And determining a correction value used in height measurement with the scanning probe microscope, and measuring the height of the sample with the scanning probe microscope using the determined correction value, A height measurement method for calculating the height of the sample is provided.

  According to the present invention, it is possible to provide a technique for easily calibrating a scanning probe microscope without damaging a sample.

1 is a diagram illustrating a configuration of a microscope system according to Example 1. FIG. 1 is a diagram illustrating a configuration of an optical microscope according to Example 1. FIG. 1 is a diagram illustrating a configuration of an SPM according to Example 1. FIG. 1 is a diagram illustrating a configuration of an arithmetic device according to a first embodiment. 3 is a flowchart illustrating a preliminary preparation process performed in the microscope system according to the first embodiment. 6 is a flowchart illustrating a sample height measurement process performed by the microscope system according to the first embodiment. 10 is a flowchart illustrating a sample height measurement process performed by the microscope system according to the second embodiment. 10 is a flowchart illustrating a sample height measurement process performed by the microscope system according to the third embodiment.

  FIG. 1 is a diagram illustrating a configuration of a microscope system 100 according to the present embodiment. The microscope system 100 includes a microscope apparatus 400, a plurality of controllers (a controller 500 and an SPM controller 600), an arithmetic apparatus 700, a monitor 800, and an input apparatus 900.

  The microscope apparatus 400 is a composite microscope apparatus that includes an optical microscope 200 and an SPM 300 each capable of measuring the height of a sample in a single apparatus. The SPM 300 is attached to the revolver 201 of the optical microscope 200. The optical microscope 200 is controlled by the controller 500, and the SPM 300 is controlled by the SPM controller 600.

  The arithmetic device 700 is a device that calculates the height of the sample S arranged on the stage 203. The height of the sample S is the height information of the sample S obtained by measuring the height with the optical microscope 200 and the SPM 300. Is calculated based on

  The monitor 800 is, for example, a liquid crystal display device, an organic EL display device, or a CRT display device. The input device 900 is, for example, a mouse or a keyboard. Input device 900 may be a touch sensor arranged on the screen of monitor 800.

  The microscope system 100 configured as described above measures the height of the sample S with the SPM 300 by measuring the height of the sample S with the optical microscope 200 and calibrating the SPM 300 based on the result. be able to.

  Hereinafter, the optical microscope 200 will be described in detail with reference to FIG. The optical microscope 200 is a microscope apparatus that can perform bright field observation and confocal observation of the sample S, and can measure the height of the sample S and obtain height information by each observation method.

  The optical microscope 200 includes a laser light source 204, a polarizing beam splitter (hereinafter referred to as PBS) 205, an optical scanning unit 206 that scans the sample S, a 1 / 4λ plate 207, an objective lens 202 that irradiates the sample S with light, and a connection. An image lens 208, a pinhole plate 209, a photodetector 210, an AD converter 211, a revolver 201 (see FIG. 1), a stage 203 (see FIG. 1), a white light source 212, an imaging lens 213, and a CCD camera 214 I have.

  The revolver 201 shown in FIG. 1 is a means for switching the objective lens 202 and also a Z position changing means for changing the relative distance between the objective lens 202 and the sample S. The stage 203 is an XY position changing unit that moves the sample S with respect to the objective lens 202 in a direction orthogonal to the optical axis of the objective lens 202. Note that the stage 203 may function as the Z position changing means instead of the revolver 201.

  Laser light emitted from the laser light source 204 is, for example, single-wavelength laser light, which passes through the PBS 205 and then enters the optical scanning unit 206. The optical scanning unit 206 is, for example, a galvanometer mirror. The laser beam deflected by the optical scanning unit 206 is converted from linearly polarized light to circularly polarized light by the ¼λ plate 207 and then irradiated onto the sample S via the objective lens 202 attached to the revolver 201.

  In the optical microscope 200, the optical scanning unit 206 is disposed at or near a position optically conjugate with the pupil position of the objective lens 202. For this reason, when the optical scanning unit 206 deflects the laser light, the condensing position of the laser light moves in the X and Y directions on the focal plane of the objective lens 202, thereby scanning the sample S two-dimensionally with the laser light. Is done.

  Here, two-dimensional scanning by the optical scanning unit 206, switching of the objective lens 202 arranged on the optical path of the optical microscope 200 by rotation driving of the revolver 201, and revolver in the optical axis direction (Z direction) of the objective lens 202. The controller 500 controls the drive of the 201 (or the stage 203) and the drive of the stage 203 in the direction (XY direction) orthogonal to the optical axis of the objective lens 202. As a two-dimensional scanning method by the optical scanning unit 206, for example, a raster scan generally used in a confocal microscope is employed.

  Laser light reflected on the surface of the sample S (hereinafter referred to as reflected light) is converted from circularly polarized light to linearly polarized light by a ¼λ plate 207 incident through the objective lens 202, and then the optical scanning unit 206. It enters into PBS205 via. At this time, since the reflected light incident on the PBS 205 has a polarization plane orthogonal to the polarization plane of the laser light incident on the PBS 205 from the laser light source 204 side, it is reflected by the PBS 205 and guided to the imaging lens 208. It is burned.

  The imaging lens 208 condenses the reflected light reflected by the PBS 205. A pinhole plate 209 provided on the reflection optical path from the PBS 205 has a pinhole formed at a position optically conjugate with the condensing position of the laser beam formed on the focal plane of the objective lens 202. For this reason, when a certain part on the surface of the sample S is at a condensing position of the laser light by the objective lens 202, the reflected light from this part is condensed in the pinhole and passes through the pinhole. On the other hand, when a certain part on the surface of the sample S is deviated from the condensing position of the laser light by the objective lens 202, the reflected light from this part does not converge on the pinhole, and therefore does not pass through the pinhole. Are blocked by the pinhole plate 209.

  The light that has passed through the pinhole is detected by the photodetector 210. The photodetector 210 is, for example, a photomultiplier tube (PMT). The photodetector 210 receives the light that has passed through the pinhole, that is, the reflected light from only the portion of the surface of the sample S that is located at the condensing position of the laser light by the objective lens 202, and according to the amount of received light. A detection signal having a predetermined magnitude is output as a luminance signal indicating the luminance of the part. This luminance signal, which is an analog signal, is analog-to-digital converted by the AD converter 211 and input to the controller 500 as luminance value information indicating the luminance of the part. The controller 500 generates confocal image data of the sample S based on the luminance value information and information on the scanning position in the two-dimensional scanning by the optical scanning unit 206.

  On the other hand, the light (white light) emitted from the white light source 212 is condensed on the pupil position of the objective lens 202 attached to the revolver 201 and then irradiated onto the sample S. Thereby, the sample S is illuminated by Koehler illumination. The reflected light reflected from the surface of the sample S enters the imaging lens 213, and the imaging lens 213 collects the reflected light on the light receiving surface of a CCD (coupling element) camera 214.

  The CCD camera 214 is a camera having a light receiving surface at a position optically conjugate with the focal plane of the objective lens 202. The CCD camera 214 images the sample S with the reflected light collected on the light receiving surface, and generates non-confocal image data of the sample S. The generated non-confocal image data is sent to the controller 500.

  The optical microscope 200 and the controller 500 change the relative distance between the objective lens 202 and the sample S by the Z position changing unit, and generate confocal image data or non-confocal image data for each Z position. Sample height information (hereinafter referred to as first height information) is acquired and output to the arithmetic unit 700.

  Next, the SPM 300 will be described in detail with reference to FIG. The SPM 300 is configured as a single unit that can be attached to the revolver 201, and is used by switching to the objective lens 202 by the rotation of the revolver 201.

  The SPM 300 includes a cantilever 302 provided with a probe 301, a piezo element 303, a laser diode 304, a lens 305, and a quadrant photodiode 306.

  The piezo element 303 is a means for moving the cantilever 302, and includes a piezo element 303a that moves the cantilever 302 in the XY direction parallel to the stage 203, and a piezo element 303b that moves the cantilever 302 in the Z direction orthogonal to the stage 203. It is out. The piezo element 303b functions as a drive element that changes the relative distance between the probe 301 and the sample S. The piezo element 303 is controlled by the SPM controller 600.

  The laser diode 304, the lens 305, and the four-divided photodiode 306 together with the cantilever 302 constitute an optical lever. The light emitted from the laser diode 304 is applied to the cantilever 302 by the lens 305, and the reflected light is detected by the quadrant photodiode 306. The detection result is output to the SPM controller 600.

  The SPM controller 600 measures the height of the sample S by moving the cantilever 302 in the XY directions to the piezo element 303a and causing the probe 301 to scan the sample S. At this time, the SPM controller 600 performs feedback control on the detection result of the quadrant photodiode 306 in order to cause the position of the probe 301 to follow the height change of the sample S. For example, the SPM controller 600 controls the piezo element 303b so that the amount of bending of the cantilever 302 is constant, that is, the distance between the sample S and the probe 301 is maintained constant.

  The SPM 300 and the SPM controller 600 generate image data of the sample S based on signals input to the piezo elements 303a and 303b during scanning. Then, the height information of the sample S (hereinafter referred to as second height information) is acquired from the image data and output to the arithmetic device 700.

  Next, the arithmetic device 700 will be described in detail with reference to FIG. Based on the first height information acquired by the height measurement by the optical microscope 200 and the correction value for correcting the measurement error caused by the height measurement by the SPM 300, the arithmetic unit 700 calculates the sample S. Calculate the height.

  The arithmetic device 700 is, for example, a general computer. As shown in FIG. 4, the arithmetic device 700 includes a CPU 701, a memory 702, a storage device 703, a reading device 704, a display IF 705, an input IF 706, and a communication IF 707, which are connected to each other via a bus 708.

  The CPU 701 executes the height measurement program using the memory 702 to calibrate the SPM 300 and further calculates the height of the sample S. The memory 702 is a semiconductor memory, for example, and includes a RAM area and a ROM area.

  The storage device 703 is, for example, a hard disk device, and stores a height measurement program, a correction value for each height of the measurement target described later, and the like. Note that the storage device 703 may be a semiconductor memory such as a flash memory. Further, the storage device 703 may be an external recording device.

  The reading device 704 accesses the portable recording medium 709 according to an instruction from the CPU 701. The portable recording medium 709 includes, for example, a semiconductor device (USB memory, etc.), a medium (information such as a magnetic disk) in which information is input / output by magnetic action, and a medium (CD-ROM, etc.) in which information is input / output by optical action. For example, a DVD).

  The display IF 705 is an interface device that outputs data to the monitor 800 in accordance with an instruction from the CPU 701, for example. The input IF 706 is an interface device that receives data from the input device 900, for example, and is a device that receives an instruction from the user. The communication IF 707 is an interface device that transmits / receives data to / from an external device via a network in accordance with an instruction from the objective lens 202.

  For example, the height measurement program may be installed in the storage device 703 in advance, or may be provided to the arithmetic device 700 via the portable recording medium 709 or via a network.

  Hereinafter, a method for measuring the height of the sample with the microscope system 100 according to the present embodiment will be specifically described. First, in order to measure the height of an arbitrary sample with high accuracy, for example, a process performed in advance before shipping a product (microscope system) from a factory (hereinafter, pre-preparation process), refer to FIG. While explaining.

  The advance preparation process shown in FIG. 5 is a process for acquiring and storing a correction value (also referred to as a calibration value) for correcting a measurement error caused by the height measurement in the SPM 300 for each height of the measurement object. .

  As described above, the piezoelectric element 303 used in the SPM 300 has hysteresis. For this reason, the input (applied voltage) to the piezo element 303 and the drive amount are not exactly proportional, and if the drive amount is calculated from the input to the piezo element 303 on the assumption of a proportional relationship, the actual drive amount is not calculated. An error will occur. As a result, a measurement error occurs in the height of the sample calculated from the driving amount of the piezo element 303. The correction value acquired in FIG. 5 is for correcting this. This correction value may correct the sample height information (second height information) obtained by the height measurement in the SPM 300. In addition, this correction value may correct the input (applied voltage) to the piezo element 303 by measuring the height with the SPM 300. The former directly corrects an error included in the measurement result due to hysteresis. The latter corrects the input to the piezo element 303 in consideration of hysteresis so that the measurement result itself does not include an error.

  Note that the measurement error due to hysteresis changes according to the drive amount (that is, height), and the rate of change is not constant. For this reason, it is desirable that the correction value be acquired for each height of the measurement object. Specifically, it is desirable that the correction values be acquired at a height interval that guarantees the measurement accuracy in the height direction of the SPM 300 defined as the product specification.

  In step S1, the height interval for calculating the correction value is determined. Here, as a product specification, an allowable error allowed by the height measurement by the SPM 300 is ± 3%, a hysteresis characteristic of the SPM 300 is ± 5% / 100 nm, and a height limit of the measurement object that can be measured by the SPM 300 is 2 μm. The case where it is determined that will be described. In this case, in order to keep the measurement error due to hysteresis within ± 3%, correction values may be calculated at height intervals within ± 3/5 × 100 = ± 60 nm. Accordingly, the height interval for calculating the correction value is determined to be 120 nm, for example.

  In step S2, a plurality of standard samples having different heights by the height interval calculated in step S1 are prepared. For example, a plurality of standard samples having different heights of 120 nm each from 0 nm to 2 μm, which is the height limit of the measurement object, are prepared. The standard sample is a sample whose height is guaranteed at the atomic level and whose height is known and whose traceability is guaranteed. The standard sample is stored centrally in a strictly controlled environment, for example.

  Next, one standard sample is selected from the plurality of standard samples prepared in step S2 (step S3), the standard sample is scanned by SPM300, and the height of the standard sample is measured using a predetermined correction value. (Step S4). Furthermore, the measurement error is calculated by comparing the height calculated by the measurement in step S4 with the known standard sample height (step S5). Thereafter, it is determined whether or not the measurement error is within a predetermined range (step S6). Here, the value within the predetermined range is a sufficiently small value with respect to the allowable error allowed in the height measurement by the SPM 300.

  If the measurement error is outside the predetermined range, the correction value used in step S4 is adjusted (step S7), and the processes in and after step S4 are repeated. When the measurement error falls within the predetermined range, the height of the standard sample and the correction value set at that time are associated with each other and stored in the storage device 703 (step S8).

  Thereafter, it is determined whether or not all the standard samples prepared in step S2 have been measured (step S9). If there is another standard sample that has not been measured, the other standard sample is selected (step S10), and the processes in and after step S4 are repeated. When the measurement of all the standard samples is completed, the preparation process in FIG. 5 is completed.

  Accordingly, a correction value for correcting a measurement error caused by height measurement in the SPM 300 and a correction value for each height of the object is acquired in advance and stored in the storage device 703.

  Next, processing for measuring the height of an arbitrary sample S performed after the product (microscope system) is shipped will be described with reference to FIG. Here, an example using a correction value for correcting the height information of the sample obtained by the height measurement in the SPM 300 will be described.

  The microscope system 100 measures the height of the sample S with the optical microscope 200 (step S11). Here, for example, the height of the sample S is measured by confocal observation, and the first height information is output to the arithmetic unit 700.

  Then, the arithmetic device 700 acquires the correction value for each height stored in the storage device 703 in advance by the preparatory process of FIG. 5 from the storage device 703 (step S12), and the acquired correction value for each height, Based on the first height information obtained by the measurement in step S11, a correction value used in the height measurement in SPM 300 is determined (step S13).

  Specifically, for example, the arithmetic device 700 associates the correction value for each height of the object stored in the storage device 703 with the height closest to the height specified by the first height information. The stored correction value is selected and determined as the correction value used in the height measurement in the SPM 300. Further, the arithmetic device 700 calculates a correction value for the height specified by the first height information by interpolation from the correction value for each height of the object stored in the storage device 703, for example. The corrected value may be determined as a correction value used for height measurement in the SPM 300.

  Thereafter, the microscope system 100 measures the height of the sample S with the SPM 300 (step S14). As a result, the second height information is output to the arithmetic device 700.

  Finally, the arithmetic unit 700 corrects the second height information obtained by the measurement in step S14 with the correction value determined in step S13, and calculates the height of the sample S (step S15).

  According to the microscope system 100, since the SPM 300 is calibrated with a correction value corresponding to the height of the sample S, the influence of the hysteresis of the piezo element 303 on the measurement is greatly reduced, and the height of the sample S is increased with high accuracy. Can be calculated. Further, the SPM 300 can be easily calibrated based on the result of measuring the height of the sample S with the optical microscope 200. Therefore, in order to calibrate the SPM 300, it is not necessary to scan the sample with the probe 301 for each sample to be measured. Therefore, it is possible to prevent the sample S and the probe 301 from being damaged before the measurement. In addition, since a standard sample is not required for calibration after obtaining a correction value for each height of the object, the burden of maintenance and management of the standard sample can be eliminated.

  In the above, the example using the correction value for correcting the second height information has been described. That is, a highly accurate measurement result is obtained by correcting the measurement result in the SPM 300. Instead of such a correction value, a correction value for correcting the voltage applied to the piezo element 303 may be used. That is, a highly accurate measurement result is obtained by correcting the input to the SPM 300. In this case, the second height information output to the arithmetic device 700 in step S14 is height information in which the measurement error is corrected.

  FIG. 7 is a flowchart illustrating a sample height measurement process performed by the microscope system according to the present embodiment. Hereinafter, the height measurement process shown in FIG. 7 will be described focusing on differences from the height measurement process shown in FIG. The microscope system according to the present embodiment is the same as the microscope system 100 except that the height measurement program to be executed is different. Therefore, the components of the microscope system according to the present embodiment are referred to by the same reference numerals as those in the first embodiment.

  The processing from step S21 to step S23 shown in FIG. 7 is the same as the processing from step S1 to step S3 shown in FIG. The arithmetic device 700 displays the correction value determined in step S23 on the monitor 800 (step S24). And the instruction | indication from the user of a microscope system is received about whether the displayed correction value is used for the height measurement in SPM300.

  When an instruction to use the correction value is input by the user using the input device 900 (step S25 YES), the microscopic system 100 thereafter measures the height of the sample S with the SPM 300 (step S26). Then, the arithmetic device 700 corrects the second height information output in step S26 with the correction value determined in step S23, and calculates the height of the sample (step S27). On the other hand, when an instruction not to use the correction value is input (NO in step S25), thereafter, the microscope system 100 measures the height of the sample S with the SPM 300 (step S28). Then, the computing device 700 calculates the height of the sample from the second height information output in step S26 without using the correction value determined in step S23 (step S29).

  Also by the microscope system according to the present embodiment, the same effects as those of the microscope system 100 according to the first embodiment can be obtained. In addition, according to the microscope system according to the present embodiment, it is possible to determine whether the user uses the correction value determined by the arithmetic device 700. The microscope system according to the present embodiment is the same as the microscope system 100 according to the first embodiment in that a correction value for correcting the voltage applied to the piezo element 303 may be used.

FIG. 8 is a flowchart illustrating a sample height measurement process performed by the microscope system according to the present embodiment. Hereinafter, the height measurement process shown in FIG. 8 will be described focusing on differences from the height measurement process shown in FIG. The microscope system according to the present embodiment is the same as the microscope system 100 except that the height measurement program to be executed is different. Therefore, the components of the microscope system according to the present embodiment are referred to by the same reference numerals as those in the first embodiment.
The process of step S31 shown in FIG. 8 is the same as the process of step S1 shown in FIG.

  In step S32, the arithmetic unit 700 determines that the height corresponding to the first height information obtained by the height measurement in step S31 is a height range in which the measurement performance of the SPM 300 is guaranteed (hereinafter, guaranteed range). It is determined whether or not it is inside. Note that the guaranteed range is determined in advance according to the specifications of the SPM 300 and is stored in the storage device 703, for example.

  When it is determined based on the determination result in step S32 that the height corresponding to the first height information is within the guaranteed range, the arithmetic device 700 executes the processing from step S33 to step S36. Note that the processing from step S33 to step S36 shown in FIG. 8 is the same as the processing from step S12 to step S15 shown in FIG.

  On the other hand, when it is determined that the height corresponding to the first height information is outside the guaranteed range based on the determination result in step S32, the arithmetic device 700 displays that fact on the monitor 800 (step S27). ), And finishes the height measurement process.

  Also by the microscope system according to the present embodiment, the same effects as those of the microscope system 100 according to the first embodiment can be obtained. Further, according to the microscope system according to the present embodiment, it is possible to prevent the measurement of the height of the sample for which the measurement performance cannot be guaranteed. For this reason, it is possible to prevent the sample S and the probe 301 from being damaged due to waste measurement by the SPM 300. The microscope system according to the present embodiment is the same as the microscope system 100 according to the first embodiment in that a correction value for correcting the voltage applied to the piezo element 303 may be used.

  The above-described embodiments are specific examples for facilitating understanding of the invention, and the present invention is not limited to these embodiments. The microscope system, the calibration method, and the height measurement method can be variously modified and changed without departing from the concept of the present invention defined by the claims.

  In FIG. 5, an example of using a standard sample is shown as an example of a preparation process for acquiring a correction value for each height. However, the correction value for each height may be acquired by another method. For example, you may acquire the correction value for every height using an optical length measuring device. In this case, for each applied voltage input to the piezo element 303b, the amount of movement of the cantilever 302 is measured by a length measuring device, and the amount of movement calculated from the applied voltage is compared with the amount of movement measured by the length measuring device. The correction value for each height (movement amount) may be calculated. It is desirable for the length measuring device to guarantee accuracy and reproducibility at least in a specific environment.

  Although FIG. 1 shows an example in which the SPM controller 600 and the arithmetic device 700 are configured as separate bodies, the SPM controller 600 may function as the arithmetic device. In the first embodiment, an example is shown in which an arithmetic device 700 separate from the SPM controller 600 determines a correction value and corrects the second height information with the determined correction value to calculate the height of the sample. ing. However, these processes may be performed by the SPM controller 600 instead of the arithmetic device 700. For example, the correction value determined by the arithmetic device 700 may be set in the SPM controller 600, and the SPM controller 600 may correct the second height information with the correction value to calculate the height of the sample. Further, the SPM controller 600 may determine a correction value, and the SPM controller 600 may calculate the height of the sample based on the correction value. In this case, the first height information is output from the controller 500 to the SPM controller 600. As described above, the SPM controller 600 may serve as the arithmetic device 700. Furthermore, although the example in which the correction value for each height is stored in the storage device 703 illustrated in FIG. 4 is illustrated, the correction for each height may be stored in the storage device in the SPM controller 600.

  The optical microscope 200 shown in FIG. 2 is configured as a confocal microscope capable of performing confocal observation. However, the optical microscope 200 only needs to be able to measure the height optically in a non-contact manner, and may be a white interference microscope, for example.

  In the third embodiment, an example in which an error message is displayed on the monitor 800 when the height corresponding to the first height information is a height outside the guaranteed range of the SPM 300 is shown. However, the notification unit that notifies that the height corresponding to the first height information is out of the guaranteed range is not limited to the monitor 800. For example, the notification may be made by voice or vibration.

DESCRIPTION OF SYMBOLS 100 Microscope system 200 Optical microscope 201 Revolver 202 Objective lens 203 Stage 204 Laser light source 205 PBS
206 Optical Scanning Section 207 1 / 4λ Plate 208 Imaging Lens 209 Pinhole Plate 210 Photodetector 211 AD Converter 212 White Light Source 213 Imaging Lens 214 CCD Camera 300 SPM
301 Probe 302 Cantilever 303, 303a, 303b Piezo element 304 Laser diode 305 Lens 306 Quadrant photodiode 400 Microscope device 500 Controller 600 SPM controller 700 Arithmetic device 701 CPU
702 Memory 703 Storage device 704 Reading device 705 Display IF
706 Input IF
707 Communication IF
708 Bus 709 Portable recording medium 800 Monitor 900 Input device S Sample

Claims (9)

A microscope apparatus comprising an optical microscope and a scanning probe microscope;
The first height information of the sample obtained by the height measurement with the optical microscope and a correction value acquired in advance for correcting the measurement error caused by the height measurement with the scanning probe microscope. A microscope system comprising: an arithmetic unit that determines a correction value used in height measurement of the sample with the scanning probe microscope based on a correction value for each height of an object. The microscope system according to claim 1, wherein
The scanning probe microscope includes a probe that scans the sample, and a drive element that changes a relative distance between the probe and the sample,
The arithmetic unit obtains in advance at height intervals determined based on the first height information, the hysteresis of the drive element, and the allowable error allowed for height measurement with the scanning probe microscope. The microscope system, wherein the correction value used in the height measurement with the scanning probe microscope is determined based on the correction value for each height of the target object. The microscope system according to claim 1 or 2,
The correction value used in the height measurement with the scanning probe microscope is a correction value for correcting the second height information of the sample obtained by the height measurement with the scanning probe microscope. A microscope system. The microscope system according to claim 2,
The microscope system according to claim 1, wherein the correction value used in the height measurement with the scanning probe microscope is a correction value for correcting an input to the driving element by the height measurement with the scanning probe microscope. The microscope system according to any one of claims 1 to 4,
The arithmetic device selects the correction value used in height measurement with the scanning probe microscope from the correction value for each height of the object based on the first height information. A microscope system. The microscope system according to any one of claims 1 to 5, further comprising:
A microscope system comprising a storage device that stores the correction value for each height of an object. The microscope system according to any one of claims 1 to 6, further comprising:
A microscope system comprising: a notification unit that notifies that a height corresponding to the first height information is outside a height range in which the measurement performance of the scanning probe microscope is guaranteed. A method for calibrating a microscope apparatus comprising an optical microscope and a scanning probe microscope,
Measure the height of the sample with the optical microscope,
The first height information of the sample obtained by the height measurement with the optical microscope and a correction value acquired in advance for correcting a measurement error caused by the height measurement with the scanning probe microscope. A calibration method, wherein a correction value used in height measurement with the scanning probe microscope is determined based on a correction value for each height of an object. A method for measuring the height of a microscope apparatus comprising an optical microscope and a scanning probe microscope,
Measure the height of the sample with the optical microscope,
The first height information of the sample obtained by the height measurement with the optical microscope and a correction value acquired in advance for correcting a measurement error caused by the height measurement with the scanning probe microscope. Based on the correction value for each height of the object, determine the correction value used in the height measurement with the scanning probe microscope,
A height measurement method comprising: calculating the height of the sample by measuring the height of the sample with the scanning probe microscope using the determined correction value.

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