JP2015219059A - Position detector and method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a position inspection device and method capable of easily determining the current position by composing a first position detected using a laser beam and a second position determined by acceleration integral from an inertial sensor of an IMU(inertial measurement unit).SOLUTION: The configuration includes: first and second fixed light receiving elements 4 and 5 disposed at both ends on the diagonal line of a member 1 to be inspected; and a biaxial polygon mirror 3 for scanning the surface with a laser beam 2a. In the method, a first position of an IMU 7 is determined on the basis of the time difference between a first timing at which the first fixed light receiving element 4 receives light and a second timing at which a light receiving element for movement of the IMU 7 receives light, a second position is determined by acceleration integral using an inertia signal from an inertial sensor of the IMU 7, and the current position is determined by composing the first and second positions.

Description

  The present invention relates to a position detection apparatus and method, and in particular, combines a first position where a position is detected using a laser beam and a second position where the position is obtained by acceleration integration of acceleration from an inertial sensor of an IMU. The present invention relates to a new improvement for obtaining the current position.

Conventionally, as an XY position detection method that has been used, patent documents and the like are not disclosed, but it is generally performed to detect an XY position by touching a liquid crystal screen.
Further, as disclosed in Patent Document 1, for example, a detection method for measuring the surface state of a semiconductor layer with high accuracy in a short time is disclosed.

JP 2011-101049 A

Since the conventional position detecting method is configured as described above, the following problems exist.
That is, in the above-described XY position detection method on the liquid crystal screen, since the detection is performed using a human hand or a point bar, it is not possible to require an accuracy higher than the contact part of the human hand or the point bar, and a fine position detection is performed. It was difficult.
In addition, in the semiconductor layer inspection method disclosed in Patent Document 1, it is possible to detect the fine state of the surface by an optical spectrum analysis method, but it is impossible to apply to the position detection of the semiconductor layer. there were.

  The present invention has been made to solve the above-described problems. In particular, the position is obtained by integrating the first position where the position is detected using a laser beam and the acceleration integral of the acceleration from the inertial sensor of the IMU. It is an object of the present invention to provide a position detection apparatus and method for obtaining a current position by combining a second position.

  A position detection apparatus according to the present invention includes an inertial measurement unit (hereinafter referred to as IMU) having a light receiving element for movement on a member to be measured or a measurement region having a surface having a predetermined length in the X-axis direction and the Y-axis direction. In the position detecting device that can move along the X-axis direction and the Y-axis direction and detect the XY position by the IMU, the first member provided at both ends on the diagonal line of the member to be measured or the region to be measured 1. A second fixed light receiving element and a biaxial polygon mirror for scanning the surface with a laser beam, wherein the first fixed light receiving element receives the laser beam at the start, and the first fixed light receiving element. A first position of the IMU is obtained from a time difference between a first timing at which the light receiving element receives light and a second timing at which the moving light receiving element of the IMU receives light, and the IMU has the IMU. The present position is obtained by combining the second position obtained by acceleration integration using the inertial signal from the inertial sensor and the first position obtained by the laser beam, and the acceleration integration is performed twice. In addition, the position detection method according to the present invention includes an inertial measurement unit having a moving light receiving element on a member to be measured or a region to be measured having a surface having a predetermined length in the X-axis direction and the Y-axis direction. (Hereinafter referred to as IMU) is movable along the X-axis direction and the Y-axis direction, and a position detection device that detects the XY position by the IMU is used on the diagonal line of the member to be measured or the region to be measured. First and second fixed light receiving elements provided at both ends of the first and second fixed light receiving elements, and a biaxial polygon mirror for scanning the surface with a laser beam. A first position of the IMU is obtained from a time difference between a first timing when the laser beam is received and received by the first fixed light receiving element and a second timing received by the light receiving element for movement of the IMU, and the IMU It is a method of obtaining a current position by combining a second position obtained by acceleration integration using an inertial signal from an inertial sensor of the IMU and the first position obtained by the laser beam, and the acceleration integration is This is a method performed twice.

Since the position detection apparatus and method according to the present invention are configured as described above, the following effects can be obtained.
That is, an inertial measurement unit (hereinafter referred to as IMU) having a light receiving element for movement on a measured member or a measured region having a surface having a predetermined length in the X-axis direction and the Y-axis direction, In the position detection apparatus that is movable along the Y-axis direction and detects the XY position by the IMU, first and second fixed light receptions provided at opposite ends of the member to be measured or the region to be measured. An element and a biaxial polygon mirror for scanning the surface with a laser beam, wherein the first fixed light receiving element receives the laser beam at the start, and the first fixed light receiving element receives the first beam A first position of the IMU is obtained from a time difference between one timing and a second timing received by the light receiving element for movement of the IMU, and the IMU receives from an inertial sensor of the IMU. The position drift is reduced by obtaining the current position by combining the second position obtained by acceleration integration using the sex signal and the first position obtained by the laser beam, and high position accuracy can be achieved even with an inexpensive accelerometer. can get. The laser beam side is inexpensive because it does not require beam modulation. Further, since the position can be measured based on the light receiving sensor reference, the adjustment of the laser beam scan becomes simple.
Further, the acceleration integration is performed twice, thereby preventing the position from being shifted with time.

1 is a configuration diagram illustrating a position detection apparatus and method according to the present invention. It is explanatory drawing which shows the specific detection structure in FIG.

  The position detection apparatus and method according to the present invention combine a first position where a position is detected using a laser beam and a second position where the position is obtained by acceleration integration of acceleration from an inertial sensor of the IMU, to obtain a current position. Is to seek.

Hereinafter, preferred embodiments of a position detection apparatus and method according to the present invention will be described with reference to the drawings.
In FIG. 1, what is indicated by reference numeral 1 is, for example, a plate-like member to be measured or a region to be measured. This member to be measured 1 or the region to be measured is hereinafter referred to as a member 1 to be measured.

  As shown in FIG. 1, the member 1 to be measured is reflected by a biaxial polygon mirror 3 with a laser beam 2a generated from a laser beam generator 2 provided at a position away from the member 1 to be measured. The surface 1a of the member to be measured 1 can be scanned.

The measured member 1 has the surface 1a having a predetermined length in the X-axis direction X and the Y-axis direction Y.
First and second fixed light receiving elements 4 and 5 are configured to receive the laser beam 2a at opposite ends of the member 1 to be measured.

On the member 1 to be measured, for example, a well-known inertial measurement unit (hereinafter referred to as IMU) having a light-receiving element 6 configured to move in the XY direction via a well-known XY movement mechanism (not shown). 7) is provided.
The IMU 7 contains a gyro (not shown) and an accelerometer that are well-known inertial sensors.

Next, a case where position detection is performed in the above configuration will be described.
The first laser beam 2a from the laser beam generator 2 is reflected by the polygon mirror 3 and can be scanned as shown by the dotted line in FIG. The fixed light receiving element 4 receives the laser beam 2a at the start St of the scan, and the first received light pulse 4a of the laser beam 2a received by the first fixed light receiving element 4 is input to the IMU 7.

When the IMU 7 reaches the XY position shown in FIG. 2, the built-in moving light receiving element 6 receives the laser beam 2a after the start St, and the moving light receiving element 6 receives the laser beam 2a. The second received light pulse 6a in terms of XY coordinates is time TX = Xt in the X-axis direction X, and time TY = Yt in the Y-axis direction Y. This second received light pulse 6a is taken into the IMU 7.
Therefore, the calculation in the IMU 7 is performed based on the time difference between the first timings X _t1 and Y _t1 received by the first fixed light receiving element 4 at the start St and the second timings X _t2 and Y _t2 received by the moving light receiving element 6. A first position which is an XY position of the IMU 7 is obtained by a unit (not shown).

The IMU 7 uses an inertial signal (not shown) from the inertial sensor (not shown) of the IMU 7 to obtain a second position that is the XY position of the IMU 7 by acceleration integration that integrates acceleration.
Therefore, the calculation unit (not shown) of the IMU 7 obtains the current position by combining the first and second positions.
The above-described acceleration integration is obtained by integrating the detected acceleration twice to obtain the position, and can be calculated while preventing position shift due to the speed offset with time.

The position detection method and apparatus according to the present invention are summarized as follows.
That is, an inertial measurement unit 7 (hereinafter referred to as an IMU) having a moving light receiving element 6 on a member 1 or a region to be measured, which is made of a surface 1a having a predetermined length in the X-axis direction X and the Y-axis direction Y. ) Is movable along the X-axis direction X and the Y-axis direction Y, and the MU position is detected by the IMU 7 at the opposite ends of the measured member 1 or the measured region on the diagonal line. First and second fixed light receiving elements 4 and 5 provided, and a biaxial polygon mirror 3 for scanning the surface 1a with a laser beam 2a, the first fixed light receiving element 4 at the start St wherein receiving the laser beam 2a, the first fixing light receiving element 4 of the first timing _{X t1,} second timing _X moving receiving element 6 of the the _{Y t1} IMU7 has received _{t2, Y t2} which received the A first position of the IMU 7 is obtained from the difference, and the IMU 7 obtains a second position obtained by acceleration integration using an inertia signal from an inertial sensor of the IMU 7 and the first position obtained by the laser beam 2a. And the acceleration integration is a configuration and method performed twice.

  Since the position detection device according to the present invention can perform position detection based on the first position detected using the laser beam and the second position detected using the inertia signal, from a small one to a large one, It is possible to detect a position in a member to be measured or a region to be measured in any field.

DESCRIPTION OF SYMBOLS 1 Measured member 1a Surface 1b XY plane 2 Laser beam generator 2a Laser beam 3 Polygon mirror 4 First fixed light receiving element 4a First light receiving pulse 5 Second fixed light receiving element 6 Moving light receiving element 6a Second light receiving pulse 7 IMU ( Inertial measurement unit)
X X-axis direction Y Y-axis direction X _t1 , Y _t1 first timing X _t2 , Y _t2 second timing Xt time X
Yt Time Y

Claims (4)

Inertial measurement unit having a member to be measured (1) having a surface (1a) having a predetermined length in the X-axis direction (X) and the Y-axis direction (Y) or a moving light-receiving element (6) on the measurement region (7) In a position detection apparatus in which an IMU (7) can detect an XY position by allowing movement along the X-axis direction (X) and the Y-axis direction (Y) (hereinafter referred to as IMU). ,
In order to scan the first and second fixed light receiving elements (4, 5) provided at the opposite ends of the member to be measured (1) or the region to be measured and the surface (1a) with a laser beam (2a) 2 axis polygon mirror (3)
The first fixed light receiving element (4) receives the laser beam (2a) at the start (St), and receives the first timing (X _t1 , Y _t1 ) when the first fixed light receiving element (4) receives the light. The first position of the IMU (7) is obtained from the time difference of the second timing (X _t2 , Y _t2 ) received by the moving light receiving element (6) of the IMU (7),
The IMU (7) is obtained by combining the second position obtained by acceleration integration using the inertia signal from the inertial sensor of the IMU (7) and the first position obtained by the laser beam (2a). A position detection device characterized by obtaining a position.   The position detection apparatus according to claim 1, wherein the acceleration integration is performed twice. Inertial measurement unit having a member to be measured (1) having a surface (1a) having a predetermined length in the X-axis direction (X) and the Y-axis direction (Y) or a moving light-receiving element (6) on the measurement region (7) A position detecting device that is movable along the X-axis direction (X) and the Y-axis direction (Y) (hereinafter referred to as IMU) and detects the XY position by the IMU (7). Use
In order to scan the first and second fixed light receiving elements (4, 5) provided at the opposite ends of the member to be measured (1) or the region to be measured and the surface (1a) with a laser beam (2a) 2 axis polygon mirror (3)
The first fixed light receiving element (4) receives the laser beam (2a) at the start (St), and the first timing (X _t1 , Y _t1 ) when the first fixed light receiving element (4) receives light and the The first position of the IMU (7) is obtained from the time difference of the second timing (X _t2 , Y _t2 ) received by the moving light receiving element (6) of the IMU (7),
The IMU (7) is obtained by combining the second position obtained by acceleration integration using the inertia signal from the inertial sensor of the IMU (7) and the first position obtained by the laser beam (2a). A position detection method characterized by obtaining a position.   The position detection method according to claim 3, wherein the acceleration integration is performed twice.

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