JP2015217365A - Fluid concentration/vaporization device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid concentration/vaporization device needing no conveyance of high-concentration hydrogen peroxide solution, with low adverse effect on electronic apparatuses and capable of downsizing.SOLUTION: A fluid concentration/vaporization device comprises: a vaporization chamber in which the inflow and outflow ports are comprised and the aqueous solution of high-boiling point liquid having a standard boiling point higher than 100°C is housed; a flow rate controller controlling the flow rate of the vapor flowing out of the outflow port; a heater heating the prescribed places of the vaporization chamber and the flow rate controller; a discharge flow channel through which the vapor flow-controlled in the flow rate controller is discharged; a drain flow channel branched from the discharge flow channel; a switching valve switching the discharge flow channel and the drain flow channel; and a controller switching the switching valve from the drain flow channel to the discharge flow channel when the concentration of the high-boiling point liquid in the aqueous solution in the vaporization chamber is a prescribed estimated level or higher.

Description

  The present invention relates to an apparatus for concentrating and vaporizing a two-component solution such as an aqueous hydrogen peroxide solution.

  2. Description of the Related Art Conventionally, for example, a device that sterilizes and sterilizes a medical facility, an emergency transport vehicle, and the like by vaporizing a sterilizing / sterilizing solution such as an aqueous hydrogen peroxide solution (for example, Patent Documents 1 to 7).

Japanese Patent No. 3915598 Japanese Patent No. 4421181 Japanese Patent No. 4330940 Japanese Patent No. 5222140 JP 2011-125788 A JP 2012-034781 A JP 2012-135378 A

  Among the above conventional devices, a device that vaporizes a low concentration hydrogen peroxide aqueous solution having a hydrogen peroxide concentration of about 30 to 35 wt% does not need to handle a high concentration hydrogen peroxide aqueous solution that is difficult to transport, There is a problem in that vapor containing moisture is diffused to adversely affect electronic devices.

  On the other hand, the conventional device that concentrates and vaporizes the aqueous hydrogen peroxide solution does not transport the high-concentration aqueous hydrogen peroxide solution, and the moisture content is low, so there is little adverse effect on electronic devices. The size of the apparatus increases.

  Therefore, a main object of the present invention is to provide a fluid concentrating and vaporizing apparatus that does not need to transport high-concentration hydrogen peroxide water, has little adverse effect on electronic devices, and can be miniaturized.

  In order to achieve the above object, a fluid concentrating vaporizer according to the present invention includes, as a first aspect, a vaporization chamber that includes an inlet and an outlet and that contains a solution containing two components, and is contained in the vaporization chamber. A heating device for heating and vaporizing the solution, a flow rate control device for controlling the flow rate of the vapor vaporized in the vaporization chamber, a discharge channel for releasing the vapor flow-controlled by the flow rate control device, A first drain channel that branches from the discharge channel, a switching valve that switches between the discharge channel and the first drain channel, and one component concentration in the solution in the vaporization chamber is equal to or higher than a predetermined estimated concentration. And a control device that controls the switching valve so as to close the first drain channel and open the discharge channel.

  The fluid concentrating vaporizer according to the present invention includes, as a second aspect, a vaporization chamber having an inlet and an outlet, in which a solution containing two components is accommodated, and the solution contained in the vaporization chamber being heated. A heating device for vaporization, a flow control device for controlling the flow rate of the vapor vaporized in the vaporization chamber, a second drain flow channel for draining the vapor flow-controlled by the flow control device, and the vaporization chamber A third drain channel for discharging the solution in the interior, a drainage control valve for circulating or blocking the drainage from the third drain channel, and a predetermined estimate of one component concentration in the solution in the vaporization chamber And a controller for controlling the drainage control valve so as to drain the solution in the vaporization chamber when the concentration is higher than the concentration.

  In the first or second aspect, the apparatus includes a temperature detector that detects a vapor temperature vaporized in the vaporization chamber or a liquid temperature in the vaporization chamber, and the one based on the temperature detected by the temperature detector. It is preferable to estimate the component concentration.

  The first or second aspect includes a first pressure detector for detecting a pressure of steam sent from the vaporization chamber to the flow rate control device, and the one of the ones based on a detected pressure of the first pressure detector. It is good also as estimating the component density | concentration of.

  In the first or second aspect, including a liquid level detector for detecting the liquid level in the vaporization chamber, the one component concentration is estimated based on a detection value of the liquid level detector. It is good.

  In the first or second aspect, when a liquid level detector for detecting a liquid level in the vaporization chamber is provided, and the liquid level detected by the liquid level detector is lowered to a predetermined level Further, it is preferable that an aqueous solution to be vaporized is additionally supplied into the vaporization chamber.

  In the first or second aspect, the one component concentration may be estimated based on an integrated flow rate of steam whose flow rate is controlled by the flow rate control device.

  In the first or second aspect, it is preferable that a plurality of the fluid concentration vaporizers are provided side by side, and the concentration times of the fluid concentration vaporizers are set in different time zones.

  In the first or second aspect, when the solution containing the two components is an aqueous hydrogen peroxide solution, the aqueous hydrogen peroxide solution may be adjusted to a predetermined temperature in the range of 115 to 130 ° C. by the heating device. preferable.

  In the first aspect, a liquid storage tank for storing the solution is provided, and the first drain channel flows through the first drain channel by exchanging heat with the solution in the liquid storage tank. It is preferable to provide a heat exchanging unit that condenses the steam to be condensed.

  In the first or second aspect, the flow control device includes a control valve for controlling a steam flow rate, an orifice plate interposed in a downstream flow path of the control valve, the control valve, and the orifice plate. A second pressure detector for detecting the pressure in the flow path between the control valve and a control unit for controlling the control valve based on the detected pressure of the second pressure detector, the control valve being a piezoelectric drive type A metal diaphragm valve is preferred.

  According to the present invention, the two-component mixed solution is concentrated by vaporization, evaporated until the concentration of one component reaches a predetermined estimated concentration, the vapor is drained, and after the concentration exceeds a predetermined estimated concentration. Since the high-concentration solution can be used by switching the flow path, the apparatus can be miniaturized.

It is sectional drawing which shows schematic structure of 1st embodiment of the fluid concentration vaporization apparatus which concerns on this invention. It is sectional drawing which shows an example of the flow control apparatus which is a component of this invention. It is an external appearance perspective view which shows an example of the fluid concentration vaporization apparatus which concerns on this invention. It is a graph which shows the experimental result for description of this invention with the phase diagram of hydrogen peroxide aqueous solution. It is a bar graph which shows the experimental result for description of this invention. It is a schematic sectional drawing which shows 2nd Embodiment of the fluid concentration vaporization apparatus which concerns on this invention. It is a schematic sectional drawing which shows 3rd Embodiment of the fluid concentration vaporization apparatus which concerns on this invention. It is a schematic sectional drawing which shows 4th Embodiment of the fluid concentration vaporization apparatus which concerns on this invention. It is a schematic sectional drawing which shows the modification of 4th Embodiment.

  Embodiments of a fluid concentration and vaporization apparatus according to the present invention will be described below with reference to FIGS. In addition, the same code | symbol was attached | subjected to the same or similar component through all the figures and all the embodiment.

  FIG. 1 schematically shows a first embodiment of a fluid concentrating vaporizer according to the present invention. The fluid concentration vaporizer 1 includes an inlet 2 and an outlet 3, a vaporization chamber 4 in which a solution L containing two components is accommodated, a flow rate controller 5 that adjusts the flow rate of the vapor flowing out of the outlet 3, and A heating device 6 for heating and vaporizing the solution contained in the vaporization chamber, a discharge flow channel 7 for discharging the vapor whose flow rate is controlled by the flow rate control device 5, and a first drain branched from the discharge flow channel 7. The switching valve 9 for switching the flow path 8, the discharge flow path 7 and the first drain flow path 8, and the first drain flow when the concentration of one component in the solution L in the vaporization chamber 4 is equal to or higher than a predetermined estimated concentration. And a control device C that controls the switching valve 9 so as to close the passage 8 and open the discharge passage 7.

  The vaporization chamber 4 is provided with three chambers 4a, 4b, and 4c by partition walls 12 and 13 provided with orifices 10 and 11, respectively, as in the illustrated example, thereby sufficiently heating the steam and controlling the flow rate. Inflow of liquid into the device 5 is prevented. A raw material solution is supplied from a tank (not shown) to the inlet 2 via the orifice 14, and the supply amount is controlled by a liquid supply valve 15 provided upstream of the orifice 14.

  The flow control device 5 in the illustrated example is a known pressure type flow control device, and as shown in a cross-sectional view in FIG. 2, a control valve 20 for controlling the flow rate of steam, and a downstream flow path of the control valve 20. The second pressure detector 22 for detecting the pressure in the flow path between the orifice plate 21, the control valve 20 and the orifice plate 21, and the control valve 20 based on the detected pressure of the second pressure detector 22. And a control unit 23 having a control circuit for controlling. The illustrated control valve 20 is a piezoelectric drive type metal diaphragm valve, and includes a metal diaphragm valve 20b that opens and closes a flow path by expansion and contraction of the piezoelectric element 20a.

The pressure type flow rate control device, the flow rate Q of gas passing through the orifice of the orifice plate 21, an orifice upstream of the absolute pressure P ₁ is more than twice the critical expansion conditions of the orifice downstream side pressure P ₂ (P ₁ ≧ about 2P ₂ ), the flow rate can be controlled with high accuracy by using the principle calculated by Q = KP ₁ (K is a constant).

  The heating device 6 keeps the inside of the vaporizing chamber 4 in a predetermined high temperature state to vaporize the solution in the chamber, and desirably keeps a desired portion such as a flow path in the flow rate control device 5 in a predetermined high temperature state. Can do.

  The vaporization chamber 4 is formed in a box shape from stainless steel. In this case, the heating device 6 is, for example, as a metal plate 6b (aluminum plate or the like) embedded with a sheathed heater 6a as shown in FIG. 4 and the side surface of the flow control device 5 can be attached. Moreover, you may cover the outer side of the said metal plate with a built-in heater with the heat insulating material which is not shown in figure. Further, as shown in FIG. 2, a cartridge heater 6c and an auxiliary sheathed heater 6d can be added in the main body block of the flow control device 5.

  Although the switching valve 9 can be a direction switching valve, for example, an opening / closing valve (not shown) may be provided in each of the discharge channel 7 and the first drain channel 8.

  The vaporization chamber 4 may be supplied with an aqueous solution of hydrogen peroxide or peracetic acid used for sterilization and sterilization, for example, as a high-boiling liquid solution L having a normal boiling point higher than 100 ° C. An aqueous hydrogen peroxide solution having a concentration of about 30 wt% is commercially available. Table 1 shows the physical properties of the aqueous hydrogen peroxide solution. The normal boiling point of hydrogen peroxide is 151.4 ° C., but hydrogen peroxide is dissolved in water, and the boiling point of the aqueous hydrogen peroxide solution varies as shown in Table 1 depending on the concentration of hydrogen peroxide.

  Tables 2 and 3 show the results of experiments in which a commercially available aqueous hydrogen peroxide solution was heated with a mantle heater and the temperature of the aqueous hydrogen peroxide solution and the concentration of hydrogen peroxide were measured every predetermined time. The heating set temperatures are 190 ° C. in Table 2 and 230 ° C. in Table 3, respectively.

  From Tables 2 and 3, the concentration of hydrogen peroxide increases as the temperature of the aqueous solution increases, confirming the tendency of concentration, and if the heating input temperature is increased to increase the amount of heat input, moisture content can be efficiently increased. It can be confirmed that concentration can proceed efficiently. And it turns out that the liquid temperature of aqueous solution and the density | concentration of hydrogen peroxide in aqueous solution have a correlation. FIG. 4 shows Table 3 together with the phase diagram of the aqueous hydrogen peroxide solution. From this phase diagram, the correlation between the hydrogen peroxide concentration of the aqueous hydrogen peroxide solution and the temperature of the aqueous solution can be seen.

  By using this correlation, the concentration of hydrogen peroxide can be estimated by detecting the temperature of the aqueous hydrogen peroxide solution in the vaporization chamber 4.

  Next, the results of examining the concentration and residual amount of hydrogen peroxide when the heating temperature of the mantle heater is set to 230 ° C. and the liquid temperature reaches 115 ° C., 120 ° C., and 130 ° C. are shown in FIG. FIG. 5 is a bar graph of the results shown in FIG.

  From the graphs in Table 4 and FIG. 5, it can be seen that the remaining ratio of hydrogen peroxide is the highest at 120 ° C., and decreases in the order of 115 ° C. and 130 ° C. Accordingly, it is considered that there is a temperature between 115 ° C. and 130 ° C. at which the remaining ratio becomes the maximum value. Referring to Table 4, the hydrogen peroxide concentration when the liquid temperature is 115 ° C. to 130 ° C. is 53.6 to 87.1%.

  Accordingly, when the aqueous hydrogen peroxide solution is concentrated, it is efficient to vaporize at a liquid temperature or a hydrogen peroxide concentration at which the residual ratio of hydrogen peroxide is high. When the liquid temperature is 120 ° C., the hydrogen peroxide concentration is 67.2 wt% from Table 4. However, if such a concentration is used, even if it is vaporized and used for sterilization, disinfection, etc., there is little influence on the electronic equipment. it is conceivable that.

  The pressure type flow rate control device constituting the flow rate control device 5 is generally provided with a temperature detector 30 (FIGS. 1 and 2) for detecting the temperature of the gas whose flow rate is controlled. Compensates the temperature of the control flow rate. Since the vapor temperature detected by the temperature detector 30 is approximately the same as or correlated with the liquid temperature, the hydrogen peroxide concentration can be estimated from the detected vapor temperature. Of course, it is also possible to estimate the hydrogen peroxide concentration by providing a separate temperature detector for directly detecting the liquid temperature in the vaporization chamber 4. Conversely, the vapor temperature or liquid temperature can be determined to obtain a predetermined estimated concentration of hydrogen peroxide concentration. The detected vapor temperature or liquid temperature is sent to the control device C, and the control device C calculates an estimated concentration of the hydrogen peroxide concentration (concentration of one component) corresponding to the detected temperature.

  Until the vapor temperature (or liquid temperature) detected by the temperature detector 30 reaches a predetermined temperature, that is, until it is concentrated to the estimated predetermined concentration of hydrogen peroxide solution, the switching valve is instructed by the command from the controller C. 9 is switched to the first drain flow path 8 side, and steam having a low hydrogen peroxide concentration is drained. Although the drained steam is downstream of the first drain flow path 8 and is not shown in FIG. 1, it can be condensed and liquefied by a condensing means.

  When the vapor temperature (or liquid temperature) detected by the temperature detector 30 reaches a predetermined temperature and is concentrated to a predetermined hydrogen peroxide solution concentration, the control valve C causes the switching valve 9 to be discharged from the discharge channel. 7 is switched, and the vapor of the high-concentration hydrogen peroxide solution is released.

  The fluid concentrating and vaporizing apparatus having the above configuration drains vapor evaporated until the high boiling point liquid in the aqueous solution reaches a predetermined estimated concentration based on the temperature difference between the normal boiling point of water and the high boiling point liquid in the aqueous solution. Since the steam flow path is switched and used for sterilization after the concentration exceeds the estimated concentration, a vacuum pump or the like is not required and the size can be reduced.

  In the above embodiment, the hydrogen peroxide concentration was estimated from the vapor temperature or the liquid temperature. However, referring to the physical property table of Table 1 and the boiling point diagram shown in FIG. It can be seen that there is also a correlation with the hydrogen peroxide concentration.

  Accordingly, as shown in FIG. 6 as a second embodiment of the fluid concentration vaporizer according to the present invention, a first pressure detector 40 for detecting the pressure of the vapor sent from the vaporization chamber 4 to the flow rate controller 5 is provided, It is possible to estimate the hydrogen peroxide concentration based on the detected pressure detected by the first pressure detector 40. Accordingly, the switching valve 9 may be controlled to be switched when the detected pressure of the first pressure detector 40 reaches a predetermined value. In the illustrated example, the first pressure detector 40 is provided at a position for detecting the pressure in the flow path between the vaporization chamber 4 and the control valve 20, but is provided at a position for detecting the vapor pressure in the vaporization chamber. May be.

  A liquid level detector (not shown) for detecting the liquid level in the vaporization chamber 4 can be provided, and it is determined that the remaining amount of the aqueous hydrogen peroxide solution in the vaporization chamber 4 has been reduced to a predetermined level. It is detected by the surface level detector, the detection output is received by the control device C, and the control device C controls the liquid supply valve 15 so as to additionally supply the hydrogen peroxide solution, thereby preventing emptying. . In the illustrated example, since the liquid exists only in the chamber 4a, the liquid level detector is provided in the chamber 4a.

  The liquid level detector uses a known level sensor such as a float type liquid level sensor, an optical level sensor, an ultrasonic liquid level sensor, a capacitive liquid level sensor, a conductivity level sensor, or the like. be able to.

  It is also possible to estimate the hydrogen peroxide solution concentration from the detected value of the liquid level by the liquid level detector. If the initial hydrogen peroxide concentration (for example, 30 wt%) and the supply amount (liquid level) of the aqueous hydrogen peroxide solution supplied into the vaporization chamber 4 are known, the liquid level reached a certain height by vaporization. Sometimes, the volume in the vaporization chamber 4 is known, so that the amount of liquid evaporated / decreased by heating is known, and as a result, the concentration of hydrogen peroxide is also known. The relationship between the liquid level and the hydrogen peroxide concentration may be simulated in advance by testing or the like and converted into data, and stored in the storage device of the control device C.

  Since the amount of the remaining liquid after evaporation is also known from the integrated flow rate of the steam whose flow rate is controlled by the flow rate control device 5, the degree of concentration can be estimated in the same manner as the liquid level detection. In addition, it is possible to obtain an estimated value of the concentration of hydrogen peroxide by detecting the specific gravity and refractive index of the solution in the vaporization chamber 4.

  The liquid remaining amount in the vaporization chamber 4 can also be detected by the first pressure detector 40. That is, when the remaining solution in the vaporization chamber 4 is reduced, the pressure in the vaporization chamber 4 is decreased. Therefore, when the detection pressure of the first pressure detector 40 is reduced to a predetermined value, an aqueous hydrogen peroxide solution is additionally supplied. Can be controlled.

  A plurality of fluid concentrating vaporizers 1 may be provided side by side, the concentration times of the respective fluid concentrating vaporizers may be set in different time zones, and vapor may be alternately discharged. That is, the fluid concentrating vaporizer 1 requires a certain time until the inside of the vaporizing chamber 4 reaches a predetermined temperature, and also requires a certain time for the discharge of the vapor, so that one fluid concentrating vaporizer releases the vapor. In the meantime, the other fluid concentration vaporizer 1 heats the fluid to a predetermined temperature and repeats this, so that the time zone in which the vapor is not released can be eliminated as much as possible.

  FIG. 7 is a schematic sectional view showing a third embodiment of the fluid concentrating vaporizer according to the present invention.

  The fluid concentration vaporizer 1 of the third embodiment includes a liquid storage tank 50 for storing a solution at the upper part of the vaporization chamber 4, and the first drain channel 8 exchanges heat with the solution in the liquid storage tank 50. In addition, the liquid storage tank 50 is provided with a heat exchanging portion 51 that condenses the steam flowing through the first drain channel 8. The solution in the liquid storage tank 50 is preheated by heat exchange. Since the other configuration of the third embodiment is the same as that of the first embodiment, detailed description thereof is omitted.

  FIG. 8 is a schematic cross-sectional view showing a fourth embodiment of the fluid concentrating vaporizer according to the present invention.

  The fluid concentration and vaporization apparatus according to the fourth embodiment is different from the first to third embodiments in that the concentrated liquid is not extracted as a vapor but is extracted in a liquid state.

  In the fluid concentration vaporizer 1 of the fourth embodiment, the steam whose flow rate is controlled by the flow rate control device 5 is drained through the second drain channel 60 and connected to the solution inlet 2. In addition, a third drain channel 63 is connected via a drainage control valve 62. Although the drainage control valve 62 in the illustrated example is a direction switching valve, a drainage control valve may be configured by providing an open / close control valve in each of the solution supply channel 61 and the third drain channel 63.

  In the fourth embodiment, when a hydrogen peroxide solution having a hydrogen peroxide concentration of 30 wt% is used as a solution in the same manner as described above, the drainage control valve 62 is set so that the solution can be supplied from the solution supply channel 61 to the vaporization chamber 4. Under the switching control, a predetermined amount is supplied into the vaporizing chamber 4 through the solution supply path 61. Then, by heating, evaporating and concentrating the solution in the vaporization chamber 4, when the hydrogen peroxide concentration reaches a predetermined concentration, the drainage control valve 62 is switched to the third drain flow path 63 side, The aqueous hydrogen peroxide solution concentrated to a predetermined concentration from the third drain channel 63 can be accommodated in a container or the like (not shown) to obtain an aqueous hydrogen peroxide solution concentrated to a high concentration. Since the other configuration of the fourth embodiment is the same as that of the first embodiment, detailed description thereof is omitted.

  FIG. 9 is a modified example of the fourth embodiment, in which a third drain channel 63 is connected to the inner bottom of the vaporization chamber 4 and drainage control is configured with an open / close valve in the third drain channel 3. A valve 62 is interposed. Other configurations are the same as those in the fourth embodiment.

  In the above description, the hydrogen peroxide aqueous solution has been mainly described. However, it is obvious to those skilled in the art that the present invention can be applied to other fluids. In the above description, the use of sterilization / sterilization is mainly described, but the present invention can be applied to other fields such as a semiconductor manufacturing field. The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.

  For example, in this embodiment, the fluid control device is stacked on the vaporization chamber. However, the fluid control device may be disposed on the side surface of the vaporization chamber or behind the vaporization chamber. Of course it is good.

DESCRIPTION OF SYMBOLS 1 Fluid concentration vaporizer 2 Inflow port 3 Outlet 4 Vaporization chamber 5 Flow rate control device 6 Heating device 7 Release flow path 8 First drain flow path 9 Switching valve 20 Control valve 21 Orifice plate 22 Second pressure detector 30 Temperature detector 40 First pressure detector 50 Liquid storage tank 51 Heat exchange unit 60 Second drain flow path 62 Drainage control valve 63 Third drain flow path

Claims (11)

A vaporization chamber having an inlet and an outlet and containing a solution containing two components;
A heating device for heating and vaporizing the solution contained in the vaporization chamber;
A flow rate control device for controlling a flow rate of vapor vaporized in the vaporization chamber;
A discharge passage for discharging steam whose flow rate is controlled by the flow rate control device;
A first drain channel branched from the discharge channel;
A switching valve for switching between the discharge channel and the first drain channel;
A control device for controlling the switching valve so as to close the first drain channel and open the discharge channel when the concentration of one component in the solution in the vaporization chamber is equal to or higher than a predetermined estimated concentration;
A fluid concentrating and vaporizing apparatus comprising: A vaporization chamber having an inlet and an outlet and containing a solution containing two components;
A heating device for heating and vaporizing the solution contained in the vaporization chamber;
A flow rate control device for controlling a flow rate of vapor vaporized in the vaporization chamber;
A second drain passage for draining steam whose flow rate is controlled by the flow rate control device;
A third drain channel for discharging the solution in the vaporization chamber;
A drainage control valve for circulating or blocking drainage from the third drain channel;
A control device that controls the drainage control valve to discharge the solution in the vaporization chamber when the concentration of one component in the solution in the vaporization chamber is equal to or higher than a predetermined estimated concentration;
A fluid concentrating and vaporizing apparatus comprising:   A temperature detector that detects a vapor temperature vaporized in the vaporization chamber or a liquid temperature in the vaporization chamber, and the concentration of the one component is estimated based on the temperature detected by the temperature detector. The fluid concentration vaporizer according to claim 1 or 2.   Including a first pressure detector for detecting a pressure of steam sent from the vaporization chamber to the flow rate control device, and estimating the one component concentration based on a detected pressure of the first pressure detector. The fluid concentration vaporizer according to claim 1 or 2.   3. A liquid level detector for detecting a liquid level in the vaporization chamber, wherein the one component concentration is estimated based on a detection value of the liquid level detector. The fluid concentration vaporizer described.   A liquid level detector for detecting a liquid level in the vaporization chamber is provided, and the vaporized aqueous solution to be vaporized when the liquid level detected by the liquid level detector falls to a predetermined level. The fluid concentrating and vaporizing apparatus according to claim 1, wherein the fluid concentrating and vaporizing apparatus is configured to be additionally supplied into the chamber.   3. The fluid concentration vaporizer according to claim 1, wherein the concentration of the one component is estimated based on an integrated flow rate of steam whose flow rate is controlled by the flow rate control device.   3. The fluid concentration vaporizer according to claim 1, wherein a plurality of the fluid concentration vaporizers are provided side by side, and the concentration times of the fluid concentration vaporizers are set in different time zones.   3. The solution according to claim 1, wherein the solution containing the two components is an aqueous hydrogen peroxide solution, and the aqueous hydrogen peroxide solution is adjusted to a predetermined temperature in a range of 115 to 130 ° C. by the heating device. Fluid concentration vaporizer.   A liquid storage tank for storing the solution is provided, and the first drain passage exchanges heat with the solution in the liquid storage tank to condense the vapor flowing through the first drain passage. The fluid concentrating and vaporizing apparatus according to claim 1, further comprising a unit. The flow rate control device detects a pressure in a flow path between the control valve and the orifice plate, a control valve for controlling the flow rate of the steam, an orifice plate interposed in a downstream flow path of the control valve, and the control valve And a control unit that controls the control valve based on a detected pressure of the second pressure detector, and the control valve is a piezoelectric driven metal diaphragm valve. The fluid concentrating vaporizer according to claim 1 or 2.

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