JP2015216401A - Semiconductor light emission device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor light emission device that can be enhanced in light emission efficiency.SOLUTION: A semiconductor light emission device has a first semiconductor layer, a light emission layer provided on a second face of the first semiconductor device, a second semiconductor layer provided on the light emission layer, a p-side electrode which is provided on the second semiconductor layer and has reflectivity for light emitted from the light emission layer, plural n-side electrodes provided onto the second face, an insulation film provided on the second semiconductor layer between the plural n-side electrodes, plural n-side vias provided on the plural n-side electrodes, a connection portion which is provided on the insulation film and connects the plural n-side vias, and an n-side reflection electrode which has higher reflectivity for light emitted from the light emission layer than the n-side electrode and is formed of the same material as the p-side electrode.

Description

  Embodiments described herein relate generally to a semiconductor light emitting device.

  A structure in which a p-side electrode and an n-side electrode are formed on a surface opposite to a light extraction surface in a semiconductor layer including a light emitting layer is known. In this structure, since the electrode does not prevent light extraction from the light extraction surface, the degree of freedom of the shape and layout of the electrode is high. Since the shape and layout of the electrodes affect the electrical characteristics and light emission efficiency, an appropriate design is required.

Special table 2007-527123 gazette JP 2008-135789 A

  Embodiments of the present invention provide a semiconductor light emitting device capable of improving light emission efficiency.

  According to the embodiment, the semiconductor light emitting device includes a first semiconductor layer having a first surface and a second surface provided on the opposite side of the first surface, and the second surface. A light-emitting layer provided on the light-emitting layer, a second semiconductor layer provided on the light-emitting layer, and a p-side electrode provided on the second semiconductor layer and having reflectivity with respect to light emitted from the light-emitting layer A plurality of n-side electrodes provided on the second surface, an insulating film provided on the second semiconductor layer between the plurality of n-side electrodes, and each of the plurality of n-side electrodes. A plurality of n-side vias provided on the insulating film, and a connecting portion provided on the insulating film and connecting the plurality of n-side vias, and reflecting light emitted from the light-emitting layer more than the n-side electrode. And an n-side reflective electrode made of the same material as the p-side electrode.

1 is a schematic plan view of a semiconductor light emitting device according to a first embodiment. FIG. 2 is a cross-sectional view taken along line A-A ′ in FIG. 1. B-B 'sectional drawing in FIG. FIG. 3 is a schematic plan view showing the method for manufacturing the semiconductor light emitting device of the first embodiment. FIG. 3 is a schematic plan view showing the method for manufacturing the semiconductor light emitting device of the first embodiment. FIG. 3 is a schematic plan view showing the method for manufacturing the semiconductor light emitting device of the first embodiment. FIG. 3 is a schematic plan view showing the method for manufacturing the semiconductor light emitting device of the first embodiment. FIG. 3 is a schematic plan view showing the method for manufacturing the semiconductor light emitting device of the first embodiment. FIG. 3 is a schematic cross-sectional view showing the method for manufacturing the semiconductor light emitting device of the first embodiment. FIG. 3 is a schematic cross-sectional view showing the method for manufacturing the semiconductor light emitting device of the first embodiment. FIG. 6 is a schematic cross-sectional view showing a modification of the semiconductor light emitting device of the first embodiment. The schematic plan view of the semiconductor light-emitting device of 2nd Embodiment. C-C 'sectional drawing in FIG. D-D 'sectional drawing in FIG. The schematic plan view which shows the manufacturing method of the semiconductor light-emitting device of 2nd Embodiment. The schematic plan view which shows the manufacturing method of the semiconductor light-emitting device of 2nd Embodiment. The schematic plan view which shows the manufacturing method of the semiconductor light-emitting device of 2nd Embodiment. FIG. 9 is a schematic cross-sectional view illustrating a method for manufacturing a semiconductor light emitting device according to a second embodiment. FIG. 9 is a schematic cross-sectional view illustrating a method for manufacturing a semiconductor light emitting device according to a second embodiment. FIG. 9 is a schematic cross-sectional view showing a modification of the semiconductor light emitting device of the second embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 3rd Embodiment. FIG. 10 is a schematic view showing a method for manufacturing the semiconductor light emitting device of the fourth embodiment. FIG. 10 is a schematic view showing a method for manufacturing the semiconductor light emitting device of the fourth embodiment. The schematic plan view of the modification of the semiconductor light-emitting device of 3rd-5th embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device of 5th Embodiment. FIG. 10 is a schematic cross-sectional view of a semiconductor light emitting device according to a sixth embodiment. The schematic plan view of the semiconductor light-emitting device of 6th Embodiment. The schematic plan view of the semiconductor light-emitting device of 6th Embodiment. The schematic plan view of the semiconductor light-emitting device of 7th Embodiment. The schematic plan view of the modification of the semiconductor light-emitting device of 3rd Embodiment.

  Hereinafter, embodiments will be described with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same element in each drawing.

(First embodiment)
FIG. 1 is a schematic plan view of the semiconductor light emitting device 1 of the first embodiment.
FIG. 2 is a cross-sectional view taken along the line AA ′ in FIG.
3 is a cross-sectional view taken along the line BB ′ in FIG.

  FIG. 1 shows a second surface side opposite to the first surface 15a of the semiconductor layer 15, and shows a planar layout of elements excluding the insulating film and the resin layer.

As shown in FIGS. 2 and 3, the semiconductor light emitting device 1 has a semiconductor layer 15. The semiconductor layer 15 includes a first semiconductor layer 11, a second semiconductor layer 12, and a light emitting layer 13. All of the first semiconductor layer 11, the second semiconductor layer 12, and the light emitting layer 13 are In _x Al _y Ga _1-xy N (0 ≦ x ≦ 1, 0 ≦ y ≦ 1, x + y ≦ 1). It is a nitride semiconductor represented by It should be noted that the “nitride semiconductor” includes an impurity added to control the conductivity type.

  The first semiconductor layer 11 has a first surface 15a and a second surface provided on the opposite side of the first surface 15a. Furthermore, the second surface has a p-side region 14a and an n-side region 14b. The first semiconductor layer 11 includes, for example, a base buffer layer and an n-type GaN layer.

  A light emitting layer (active layer) 13 is provided on the p-side region 14 a on the second surface of the first semiconductor layer 11. The light emitting layer 13 has, for example, an InGaN multiple quantum well structure in which a plurality of pairs of InGaN well layers and GaN or InGaN barrier layers are stacked, and emits blue, purple, blue-violet, ultraviolet light, and the like.

  A second semiconductor layer 12 including a p-type GaN layer is provided on the light emitting layer 13. The light emitting layer 13 is provided between the first semiconductor layer 11 and the second semiconductor layer 12. In the n-side region 14 b on the second surface of the first semiconductor layer 11, the light emitting layer 13 and the second semiconductor layer 12 are not provided.

  The n-side region 14 b is formed by selectively removing a part of the light emitting layer 13 and the second semiconductor layer 12 formed on the entire second surface of the first semiconductor layer 11, thereby forming the first semiconductor layer. 11 is exposed and formed.

  The first surface 15a of the first semiconductor layer 11 functions as a main light extraction surface, and the emitted light of the light emitting layer 13 is emitted from the first surface 15a mainly to the outside of the semiconductor layer 15. A p-side electrode, an n-side electrode, a p-side wiring portion, and an n-side wiring portion, which will be described below, are provided on the opposite side of the first surface 15a.

  A p-side electrode 16 a is provided on the second semiconductor layer 12. The p-side electrode 16 a is in ohmic contact with the second semiconductor layer 12. An n-side electrode 17 a is provided in the n-side region 14 b on the second surface of the first semiconductor layer 11. The n-side electrode 17 a is in ohmic contact with the first semiconductor layer 11.

  The p-side electrode 16a and the n-side electrode 17a are provided on the same surface side opposite to the first surface 15a which is the main light extraction surface in the semiconductor layer 15, and the p-side electrode 16a is on the region including the light emitting layer 13. The n-side electrode 17 a is provided on the n-side region 14 b that does not include the light emitting layer 13.

  Furthermore, a p-side pad 16b that covers the p-side electrode 16a is provided on the surface and side surfaces of the p-side electrode 16a. The p-side electrode 16a includes a material having a high reflectance with respect to the light emitted from the light emitting layer 13, such as Ag or an Ag alloy. The p-side pad 16b includes a material that protects the p-side electrode 16a from corrosion, such as Al, Ti, Ni, Au, and the like.

  An n-side pad 17b that covers the n-side electrode 17a is provided on the surface and side surfaces of the n-side electrode 17a. The n-side electrode 17a includes, for example, at least one of nickel (Ni), gold (Au), and rhodium (Rh) that can form an alloy with gallium (Ga) included in the semiconductor layer 15. The n-side pad 17b includes a material that protects the n-side electrode 17a from corrosion, such as Al, Ti, Ni, Au, and the like.

  FIG. 4 shows a planar layout of the p-side region 14a, the n-side region 14b, the p-side electrode 16a, the p-side pad 16b, the n-side electrode 17a, and the n-side pad 17b on the second surface.

  A plurality of n-side regions 14b are evenly scattered in the p-side region 14a extending over the entire second surface. Each n-side region 14b is formed as a circular region, for example. In the second surface, the plurality of n-side regions 14b are not connected to each other and are separated from each other, and the p-side region 14a surrounds each n-side region 14b.

  An n-side electrode 17a is provided on each of the plurality of n-side regions 14b. The plurality of n-side electrodes 17a are evenly scattered in the form of dots or islands on the second surface.

  As shown in FIG. 2, the second semiconductor layer 12 surrounds each n-side electrode 17a and n-side pad 17b. The n-side region 14 b of the first semiconductor layer 11, the n-side electrode 17 a provided on the n-side region 14 b, and the n-side pad 17 b covering the n-side electrode 17 a are stacked on the light emitting layer 13 and the light emitting layer 13. The second semiconductor layer 12 is partitioned and separated into a plurality on the second surface.

  As shown in FIGS. 2 and 3, a first insulating film (hereinafter simply referred to as an insulating film) 18 is provided on the second surface side of the semiconductor layer 15. The insulating film 18 covers the n-side region 14b, the surface of the second semiconductor layer 12, the side surface of the second semiconductor layer 12, the side surface of the light emitting layer 13, the p-side pad 16b and the n-side pad 17b.

  Note that another insulating film (for example, a silicon oxide film) may be provided between the insulating film 18 and the semiconductor layer 15. The insulating film 18 is, for example, a resin such as polyimide having excellent patterning characteristics for fine openings. Alternatively, an inorganic film such as a silicon oxide film or a silicon nitride film may be used as the insulating film 18.

  On the surface of the insulating film 18 opposite to the semiconductor layer 15, an n-side wiring layer (first n-side wiring layer) 22 shown in FIG. 2 and a p-side wiring layer (first first layer) shown in FIG. p-side wiring layer) 21 is provided.

  As shown in FIG. 2, an n-side via 22 a is provided on each n-side pad 17 b so as to penetrate the insulating film 18. The n-side wiring layer 22 is electrically connected to each n-side pad 17b and n-side electrode 17a through each n-side via 22a.

  As shown in FIG. 3, a plurality of p-side vias 21 a are provided on the p-side pad 16 b so as to penetrate the insulating film 18. The p-side wiring layer 21 is electrically connected to the p-side pad 16b and the p-side electrode 16a through a plurality of first p-side vias 21a.

  FIG. 5 shows a planar layout of the n-side via 22a and the p-side via 21a, and FIG. 6 shows a plan view in which the n-side wiring layer 22 and the p-side wiring layer 21 are superimposed on FIG.

  A plurality of (for example, three in FIG. 6) n-side electrodes 17a provided separately on the second surface are connected to one common n-side wiring layer 22 extending in the first direction X in FIG. Are connected via n-side vias 22a. As shown in FIG. 2, one n-side wiring layer 22 is commonly connected to a plurality of n-side electrodes 17a so as to straddle the p-side electrode 16a and the p-side pad 16b with an insulating film 18 interposed therebetween. ing.

  A plurality of n-side wiring layers 22 are provided, and each n-side wiring layer 22 extends in the first direction X in FIG. A p-side wiring layer 21 is provided in a region between the n-side wiring layers 22 adjacent in the second direction Y orthogonal to the first direction X.

  A plurality of n-side wiring layers 22 and a plurality of p-side wiring layers 21 are alternately arranged on the insulating film 18 so as to be separated from each other in the second direction Y.

  As shown in FIGS. 2 and 3, an insulating film 41 is provided on the insulating film 18, the n-side wiring layer 22, and the p-side wiring layer 21. The insulating film 41 is also the same material as the insulating film 18, for example, an inorganic insulating film such as a silicon oxide film, or a resin film such as polyimide. The insulating film 41 covers the n-side wiring layer 22 and the p-side wiring layer 21.

  On the insulating film 41, an n-side wiring layer (second n-side wiring layer) 32 and a p-side wiring layer (second p-side wiring layer) 31 are provided.

  As shown in FIG. 2, an n-side via 33 is provided on the n-side wiring layer 22 so as to penetrate the insulating film 41. The n-side wiring layer 32 is electrically connected to the n-side wiring layer 22 through the n-side via 33.

  As shown in FIG. 3, a p-side via 34 is provided on the p-side wiring layer 21 through the insulating film 41. The p-side wiring layer 31 is electrically connected to the p-side wiring layer 21 through the p-side via 34.

  FIG. 7 shows a planar layout of the n-side via 33 and the p-side via 34, and FIG. 8 shows a plan view in which the n-side wiring layer 32 and the p-side wiring layer 31 are superimposed on FIG.

  One n-side via 33 is provided for one n-side wiring layer 22. Therefore, a plurality of n-side vias 33 are arranged in the second direction Y corresponding to the number of n-side wiring layers 22.

  One p-side via 34 is provided for one p-side wiring layer 21. Therefore, a plurality of p-side vias 34 are arranged in the second direction Y corresponding to the number of p-side wiring layers 21.

  The plurality of n-side vias 33 and the plurality of p-side vias 34 are provided separately on the left and right with respect to the center in the first direction X. 7 and 8, an n-side via 33 is provided in a region on the left side of the center in the first direction X, and a p-side via 34 is provided in a region on the right side of the center in the first direction X.

  The n-side wiring layer 32 extends to a region on the left side of the center in the first direction X in FIG. A plurality of n-side wiring layers 22 are connected to one common n-side wiring layer 32 through n-side vias 33.

  The p-side wiring layer 31 extends in a region on the right side of the center in the first direction X in FIG. A plurality of p-side wiring layers 21 are connected to one common p-side wiring layer 31 through p-side vias 34.

  The n-side wiring layer 32 and the p-side wiring layer 31 are spread in the left and right directions with the same area across the center in the first direction X. The n-side wiring layer 32 and the p-side wiring layer 31 are separated from each other on the insulating film 41.

  As shown in FIGS. 2 and 3, a p-side metal pillar 23 is provided on the p-side wiring layer 31. The p-side wiring layer 21, the p-side wiring layer 31, and the p-side metal pillar 23 constitute a p-side wiring portion in the present embodiment.

  An n-side metal pillar 24 is provided on the n-side wiring layer 32. The n-side wiring layer 22, the n-side wiring layer 32, and the n-side metal pillar 24 constitute the n-side wiring portion in the present embodiment.

  On the insulating film 41, for example, a resin layer 25 is stacked as a second insulating film. The resin layer 25 covers the periphery of the n-side wiring layer 32, the periphery of the n-side metal pillar 24, the periphery of the p-side interconnect layer 31, and the periphery of the p-side metal pillar 23. The resin layer 25 is filled between the p-side wiring layer 31 and the n-side wiring layer 32 and between the p-side metal pillar 23 and the n-side metal pillar 24.

  The side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 are covered with a resin layer 25. The surface of the p-side metal pillar 23 opposite to the p-side wiring layer 31 is exposed from the resin layer 25 and functions as the p-side external terminal 23a. The surface of the n-side metal pillar 24 opposite to the n-side wiring layer 32 is exposed from the resin layer 25 and functions as the n-side external terminal 24a.

  The p-side external terminal 23a and the n-side external terminal 24a are joined to a pad formed on a mounting board (not shown) via solder or the like.

  The distance between the p-side external terminal 23a and the n-side external terminal 24a exposed on the same surface (the upper surface in FIGS. 2 and 3) of the resin layer 25 is the same as the p-side wiring layer 31 and the n-side wiring on the insulating film 41. It is larger than the distance between the layers 32. Further, the distance between the p-side external terminal 23 a and the n-side external terminal 24 a is larger than the distance between the p-side wiring layer 21 and the n-side wiring layer 22 on the insulating film 18.

  The p-side external terminal 23a and the n-side external terminal 24a are separated by a distance that is not short-circuited by solder when mounted on the mounting board.

  The p-side wiring layer 21 can be brought close to the n-side wiring layer 22 up to the process limit, and the area of the p-side wiring layer 31 can be increased. The p-side wiring layer 31 can also be brought close to the n-side wiring layer 32 to the limit in the process. As a result, the areas of the p-side wiring layer 21 and the p-side wiring layer 31 can be increased, and current distribution and heat dissipation can be improved.

  The area where the p-side wiring layer 21 contacts the p-side pad 16b through the plurality of p-side vias 21a is larger than the area where the n-side wiring layer 22 contacts the n-side pad 17b through the plurality of n-side vias 22a. Therefore, the current distribution to the light emitting layer 13 can be improved, and the heat dissipation of the light emitting layer 13 can be improved.

  The area of the n-side wiring layer 22 extending on the insulating film 18 is larger than the area where the n-side wiring layer 22 is connected to the n-side pad 17b through the n-side via 22a.

  According to the embodiment, a high light output can be obtained by the light emitting layer 13 extending over a wider area than the n-side electrode 17a. Further, the n-side electrode 17a provided in the n-side region 14b narrower than the region including the light emitting layer 13 is formed on the opposite side of the light extraction surface (first surface 15a) as the n-side wiring layer 22 having a larger area. Has been pulled out.

  As shown in FIG. 2, the first semiconductor layer 11 includes an n-side electrode 17a, an n-side pad 17b, an n-side via 22a, an n-side wiring layer 22, an n-side via 33, an n-side wiring layer 32, and an n-side. The metal pillar 24 is electrically connected to the n-side external terminal 24a.

  As shown in FIG. 3, the second semiconductor layer 12 includes a p-side electrode 16a, a p-side pad 16b, a p-side via 21a, a p-side wiring layer 21, a p-side via 34, a p-side wiring layer 31, and a p-side. The p-side external terminal 23 a is electrically connected through the metal pillar 23.

  The p-side metal pillar 23 is thicker than the p-side wiring layer 21 and thicker than the p-side wiring layer 31. The n-side metal pillar 24 is thicker than the n-side wiring layer 22 and thicker than the n-side wiring layer 32. Each of the p-side metal pillar 23, the n-side metal pillar 24, and the resin layer 25 is thicker than the semiconductor layer 15. The “thickness” here represents the thickness in the vertical direction in FIGS.

  The thicknesses of the p-side metal pillar 23 and the n-side metal pillar 24 are larger than the thickness of the chip including the semiconductor layer 15, the p-side electrode 16a, the p-side pad 16b, the n-side electrode 17a, and the n-side pad 17b. thick. In addition, the aspect ratio (ratio of the thickness to the plane size) of each metal pillar 23 and 24 is not limited to 1 or more, and the ratio may be smaller than 1. That is, the thickness of the metal pillars 23 and 24 may be smaller than the planar size.

  According to the embodiment, even if the substrate used to form the semiconductor layer 15 is removed, the semiconductor layer 15 is stabilized by the support including the p-side metal pillar 23, the n-side metal pillar 24, and the resin layer 25. The mechanical strength of the semiconductor light emitting device 1 can be increased.

  p-side via 21a, p-side wiring layer 21, p-side via 34, p-side wiring layer 31, p-side metal pillar 23, n-side via 22a, n-side wiring layer 22, n-side via 33, n-side wiring layer 32, As a material of the n-side metal pillar 24, copper, gold, nickel, silver or the like can be used. Among these, when copper is used, good thermal conductivity, high migration resistance, and excellent adhesion with an insulating material can be obtained.

  The resin layer 25 reinforces the p-side metal pillar 23 and the n-side metal pillar 24. It is desirable to use a resin layer 25 having the same or close thermal expansion coefficient as the mounting substrate. As such a resin layer 25, an epoxy resin, a silicone resin, a fluororesin, etc. can be mentioned as an example, for example.

  Further, in the state where the semiconductor light emitting device 1 is mounted on the mounting substrate via the p-side external terminal 23a and the n-side external terminal 24a, the stress applied to the semiconductor layer 15 via the solder is applied to the p-side metal pillar 23 and the n-side. It can be mitigated by absorption by the metal pillar 24.

  The substrate used when forming the semiconductor layer 15 is removed from the first surface 15a. For this reason, the semiconductor light emitting device 1 can be reduced in height.

  A phosphor layer 50 can be provided on the first surface 15a as shown in FIG. The phosphor layer 50 includes a transparent resin 51 as a transparent medium and a plurality of particulate phosphors 52 dispersed in the transparent resin 51.

  The transparent resin 51 has transparency with respect to the light emitted from the light emitting layer 13 and the light emitted from the phosphor 52. For example, a silicone resin, an acrylic resin, a phenyl resin, or the like can be used.

  The phosphor 52 can absorb the light emitted from the light emitting layer 13 (excitation light) and emit wavelength converted light. For this reason, the semiconductor light emitting device of the embodiment can emit mixed light of the light emitted from the light emitting layer 13 and the wavelength converted light from the phosphor 52.

  For example, when the phosphor 52 is a yellow phosphor that emits yellow light, a mixed color of blue light of the light emitting layer 13 that is an InGaN-based material and yellow light that is wavelength converted light in the phosphor 52 is white or a light bulb. Color can be obtained. The phosphor layer 50 may include a plurality of types of phosphors (for example, a red phosphor that emits red light and a green phosphor that emits green light).

  In the semiconductor light emitting device 1 of the embodiment, the p-side electrode 16a and the n-side electrode 17a are provided on the second surface opposite to the first surface 15a that is a main light extraction surface. Therefore, light extraction from the first surface 15a is not hindered by the electrodes. The p-side electrode 16 a is provided on the region including the light emitting layer 13. The n-side electrode 17 a is provided on the first semiconductor layer 11 that does not include the light emitting layer 13.

  According to the embodiment, the contact surface between the n-side electrode 17a and the first semiconductor layer 11, that is, the n-side region 14b on the second surface of the first semiconductor layer 11 is evenly formed in a dot shape on the second surface. Is arranged. Therefore, a uniform current distribution in the surface direction of the light emitting layer 13 can be realized while reducing the area not including the light emitting layer 13 to increase the light emitting area.

  The holes are supplied from the p-side electrode 16a to the light emitting layer 13 through the contact surface between the p-side electrode 16a and the second semiconductor layer 12, and the electrons are supplied from the n-side electrode 17a to the n-side electrode 17a. The light emitting layer 13 is supplied through a contact surface with the semiconductor layer 11. The current density in the light emitting layer 13 tends to increase in a region near the n-side electrode 17a.

  According to the embodiment, the p-side region 14a and the light emitting layer 13 exist all around the n-side region 14b and the n-side electrode 17a. Therefore, as schematically represented by a broken line in FIG. 4, the current spreads from one n-side electrode 17 a in the direction of 360 degrees around it, and the current can be efficiently supplied to the entire region of the light emitting layer 13. Therefore, according to the embodiment, the entire region of the light emitting layer 13 can emit light efficiently.

  The plurality of n-side electrodes 17a are separated from each other on the second surface of the first semiconductor layer 11, but are responsible for mounting on the mounting substrate on the opposite side of the light extraction surface (first surface 15a). It is connected to the common n-side wiring part. Therefore, the same potential can be applied to the plurality of n-side electrodes 17a with a simple configuration without wire bonding to each of the plurality of n-side electrodes 17a.

  Next, with reference to FIGS. 4-10 (b), the manufacturing method of the semiconductor light-emitting device 1 of 1st Embodiment is demonstrated.

  FIG. 9A represents the A-A ′ section in FIG. 4, and FIG. 9B represents the B-B ′ section in FIG. 4.

  The semiconductor layer 15 is formed on the substrate 10. First, the first semiconductor layer 11 is formed on the main surface of the substrate 10, the light emitting layer 13 is formed thereon, and the second semiconductor layer 12 is formed thereon.

The semiconductor layer 15 that is a nitride semiconductor represented by In _x Al _y Ga _1-xy N (0 ≦ x ≦ 1, 0 ≦ y ≦ 1, x + y ≦ 1) is formed on, for example, a MOCVD (metal Crystal growth can be achieved by organic chemical vapor deposition). Alternatively, a silicon substrate can be used as the substrate 10.

  The semiconductor layer 15 is formed on the entire surface of the substrate 10. Thereafter, as shown in FIG. 9A, a part of the light emitting layer 13 and the second semiconductor layer 12 is removed by, for example, RIE (Reactive Ion Etching) using a resist (not shown) to form the first semiconductor. A portion of layer 11 is exposed. The first semiconductor layer 11 is selectively exposed in a dot shape or an island shape.

  The region where the first semiconductor layer 11 is exposed becomes an n-side region 14 b that does not include the light emitting layer 13 and the second semiconductor layer 12. The region where the second semiconductor layer 12 and the light emitting layer 13 are left becomes a p-side region 14a.

  An n-side electrode 17a and an n-side pad 17b are formed on the n-side region 14b. A p-side electrode 16a and a p-side pad 16b are formed on the surface of the second semiconductor layer 12 in the p-side region 14a.

  For example, a silicon nitride film or a silicon oxide film may be formed as a passivation film between the p-side pad 16b and the n-side pad 17b or on the end face (side face) of the light emitting layer 13 by a CVD (chemical vapor deposition) method.

  Next, after all the exposed portions on the main surface of the substrate 10 are covered with the insulating film 18 shown in FIGS. 10A and 10B, the insulating film 18 is patterned by etching and selected as the insulating film 18. Thus, the first opening 18a and the second opening 18b are formed. FIGS. 10A and 10B correspond to the cross sections of FIGS. 9A and 9B, respectively.

  As shown in FIG. 10B, a plurality of first openings 18a are formed, and each first opening 18a reaches the p-side pad 16b. As shown in FIG. 10A, a second opening 18b is formed on each of the plurality of n-side pads 17b, and each second opening 18b reaches the n-side pad 17b.

  FIG. 10A shows a cross section along the first direction X in FIG. 4, and the first opening is formed on the p-side pad 16 b between the n-side regions 14 b adjacent in the first direction X. 18a is not formed. Therefore, the p-side via 21a embedded in the first opening 18a is not formed on the p-side pad 16b between the n-side regions 14b adjacent in the first direction X.

  As the insulating film 18, for example, an organic material such as photosensitive polyimide or benzocyclobutene can be used. In this case, the insulating film 18 can be directly exposed and developed without using a resist.

  Alternatively, an inorganic film such as a silicon nitride film or a silicon oxide film may be used as the insulating film 18. When the insulating film 18 is an inorganic film, the first opening 18 a and the second opening 18 b are formed by etching after patterning the resist formed on the insulating film 18.

  Next, after forming a metal film (not shown) on the surface of the insulating film 18, the inner wall (side wall and bottom part) of the first opening 18a, and the inner wall (side wall and bottom part) of the second opening 18b, the metal film is Cu electrolytic plating using seed metal (current path) is performed.

  As a result, as shown in FIGS. 2, 3 and 5, a p-side via 21 a is formed in the first opening 18 a, an n-side via 22 a is formed in the second opening 18 b, and p is formed on the insulating film 18. A side wiring layer 21 and an n-side wiring layer 22 are formed. The p-side via 21a, the n-side via 22a, the p-side wiring layer 21 and the n-side wiring layer 22 are made of, for example, a copper material that is simultaneously formed by a plating method using a plating resist (not shown).

  Next, as shown in FIGS. 2 and 3, an insulating film 41 is formed on the p-side wiring layer 21 and the n-side wiring layer 22. Then, in the same manner as the first-layer wiring portion including the p-side via 21a, the n-side via 22a, the p-side wiring layer 21, and the n-side wiring layer 22, the Cu electrolytic plating method is used to perform FIGS. As shown in FIG. 8, a second wiring portion including the p-side via 34, the n-side via 33, the p-side wiring layer 31, and the n-side wiring layer 32 is formed. Further, the p-side metal pillar 23 is formed on the p-side wiring layer 31 and the n-side metal pillar 24 is formed on the n-side wiring layer 32 by Cu electrolytic plating.

  After forming the p-side metal pillar 23 and the n-side metal pillar 24, the resin layer 25 is laminated on the insulating film 41. The resin layer 25 covers the p-side wiring layer 31, the n-side wiring layer 32, the p-side metal pillar 23 and the n-side metal pillar 24.

  Next, the aforementioned substrate 10 used for forming the semiconductor layer 15 is removed. When the substrate 10 is a sapphire substrate, the substrate 10 can be removed by, for example, a laser lift-off method. Specifically, laser light is irradiated from the back surface side of the substrate 10 toward the first semiconductor layer 11. The laser beam is transmissive to the substrate 10 and has a wavelength that serves as an absorption region for the first semiconductor layer 11.

  When the laser light reaches the interface between the substrate 10 and the first semiconductor layer 11, the first semiconductor layer 11 near the interface absorbs the energy of the laser light and decomposes. The first semiconductor layer 11 is decomposed into gallium (Ga) and nitrogen gas. By this decomposition reaction, a minute gap is formed between the substrate 10 and the first semiconductor layer 11, and the substrate 10 and the first semiconductor layer 11 are separated.

  Laser light irradiation is performed over the entire wafer in multiple times for each set region, and the substrate 10 is removed.

  When the substrate 10 is a silicon substrate, the substrate 10 can be removed by etching.

  Since the above-described laminate formed on the main surface of the substrate 10 is reinforced by the p-side metal pillar 23, the n-side metal pillar 24, and the resin layer 25 that are thicker than the semiconductor layer 15, even if the substrate 10 disappears. It is possible to keep the wafer state.

  The resin layer 25 and the metal constituting the p-side metal pillar 23 and the n-side metal pillar 24 are also flexible materials compared to the semiconductor layer 15. The semiconductor layer 15 is supported on such a flexible support. Therefore, even if a large internal stress generated when the semiconductor layer 15 is epitaxially grown on the substrate 10 is released at a time when the substrate 10 is peeled off, the semiconductor layer 15 can be prevented from being destroyed.

  The first surface 15a of the semiconductor layer 15 from which the substrate 10 has been removed is cleaned. For example, gallium (Ga) attached to the first surface 15a is removed with dilute hydrofluoric acid or the like.

  Thereafter, the first surface 15a is wet-etched with, for example, a KOH (potassium hydroxide) aqueous solution or TMAH (tetramethylammonium hydroxide). Thereby, unevenness is formed on the first surface 15a due to the difference in the etching rate depending on the crystal plane orientation. Alternatively, etching may be performed after patterning with a resist to form irregularities on the first surface 15a. The light extraction efficiency can be improved by forming irregularities on the first surface 15a.

  If necessary, the phosphor layer 50 shown in FIG. 11 is formed on the first surface 15a. The liquid transparent resin 51 in which the phosphor 52 is dispersed is supplied onto the first surface 15a by, for example, a method such as printing, potting, molding, or compression molding, and then thermoset.

  Thereafter, the stacked body is cut and separated into a plurality of semiconductor light emitting devices 1. For example, cutting is performed using a dicing blade. Or you may cut | disconnect by laser irradiation.

  The separated semiconductor light emitting device 1 may have a single chip structure including one semiconductor layer 15 or a multichip structure including a plurality of semiconductor layers 15.

  The above-described processes before dicing are performed all at once in the wafer state, so there is no need to perform wiring and packaging for each individual device, and the production cost can be greatly reduced. It becomes possible. That is, wiring and packaging have already been completed in the state of being separated. For this reason, productivity can be improved and as a result, price reduction becomes easy.

(Second Embodiment)
FIG. 12 is a schematic plan view of the semiconductor light emitting device 2 of the second embodiment.
13 is a cross-sectional view taken along the line CC ′ in FIG.
14 is a cross-sectional view along the line DD ′ in FIG.

The semiconductor light emitting device 2 of the second embodiment also has a semiconductor layer 15, and the semiconductor layer 15 is In _x Al _y Ga _1-xy N (0 ≦ x ≦ 1, 0 ≦ y ≦ 1, x + y ≦ 1). The 1st semiconductor layer 11 represented by these, the 2nd semiconductor layer 12, and the light emitting layer 13 are included.

  FIG. 12 shows the second surface side opposite to the first surface 15a of the semiconductor layer 15, and shows a planar layout of elements excluding the insulating film and the resin layer.

  Also in the second embodiment, the n-side electrode 17 a and the n-side pad 17 b are provided on the n-side region 14 b of the first semiconductor layer 11 that does not include the light emitting layer 13 and the second semiconductor layer 12.

  The light emitting layer 13 and the second semiconductor layer 12 are provided on the p-side region 14a that is a region other than the n-side region 14b on the second surface of the first semiconductor layer 11. A p-side electrode 16 a and a p-side pad 16 b are provided on the surface of the second semiconductor layer 12.

  According to the second embodiment, the planar layout of the n-side region 14b and the n-side electrode 17a and the n-side pad 17b provided thereon is different from that of the first embodiment.

  FIG. 15 shows a planar layout of the p-side region 14a, the n-side region 14b, the p-side electrode 16a, the p-side pad 16b, the n-side electrode 17a, and the n-side pad 17b on the second surface.

  A plurality (for example, three in the figure) of n-side regions 14b are evenly arranged in the p-side region 14a extending over the entire second surface. Each n-side region 14b is formed as a rectangular region, for example. In the second surface, the plurality of n-side regions 14b are not connected to each other and are separated from each other, and the p-side region 14a surrounds each n-side region 14b.

  An n-side electrode 17a is provided on each of the plurality of n-side regions 14b. The plurality of n-side electrodes 17a are formed in a rectangular shape on the second surface.

  As shown in FIG. 13, the second semiconductor layer 12 surrounds the n-side electrode 17a and the n-side pad 17b. The n-side region 14 b of the first semiconductor layer 11, the n-side electrode 17 a provided on the n-side region 14 b, and the n-side pad 17 b covering the n-side electrode 17 a are stacked on the light emitting layer 13 and the light emitting layer 13. The second semiconductor layer 12 is partitioned and separated into a plurality on the second surface.

  As shown in FIGS. 13 and 14, an insulating film 18 is provided on the second surface side of the semiconductor layer 15. The insulating film 18 covers the n-side region 14b, the surface of the second semiconductor layer 12, the side surface of the second semiconductor layer 12, the side surface of the light emitting layer 13, the p-side pad 16b and the n-side pad 17b.

  Note that another insulating film (for example, a silicon oxide film) may be provided between the insulating film 18 and the semiconductor layer 15. The insulating film 18 is, for example, a resin such as polyimide having excellent patterning characteristics for fine openings. Alternatively, an inorganic film such as a silicon oxide film or a silicon nitride film may be used as the insulating film 18.

  In the second embodiment, unlike the first embodiment, a p-side wiring layer and an n-side wiring layer having a single layer structure are provided on the insulating film 18. An n-side wiring layer 32 and a p-side wiring layer 31 are provided on the surface of the insulating film 18 opposite to the semiconductor layer 15.

  As shown in FIGS. 13 and 16, an n-side via 22 a is provided on each of the plurality of n-side pads 17 b so as to penetrate the insulating film 18. The n-side wiring layer 32 is electrically connected to the n-side pad 17b and the n-side electrode 17a through the n-side via 22a.

  As shown in FIGS. 14 and 16, a plurality of p-side vias 21 a are provided on the p-side pad 16 b so as to penetrate the insulating film 18. The p-side wiring layer 31 is electrically connected to the p-side pad 16b and the p-side electrode 16a through the p-side via 21a.

  16 shows a planar layout of the n-side via 22a and the p-side via 21a, and FIG. 17 shows a plan view in which the n-side wiring layer 32 and the p-side wiring layer 31 are overlaid on FIG.

  The n-side via 22a and the p-side via 21a are provided separately on the left and right with respect to the center in the first direction X. 16 and 17, an n-side via 22a is provided in a region on the left side of the center in the first direction X, and a p-side via 21a is provided in a region on the right side of the center in the first direction X.

  The n-side wiring layer 32 extends to a region on the left side of the center in the first direction X in FIG. A plurality of n-side electrodes 17a are electrically connected to one common n-side wiring layer 32 through n-side vias 22a.

  The p-side wiring layer 31 extends in a region on the right side of the center in the first direction X in FIG. A p-side electrode 16a extending over the entire second surface other than the n-side region 14b is electrically connected to one common p-side wiring layer 31 via a plurality of p-side vias 21a.

  The n-side wiring layer 32 and the p-side wiring layer 31 are spread in the left and right directions with the same area across the center in the first direction X. The n-side wiring layer 32 and the p-side wiring layer 31 are separated from each other on the insulating film 18.

  As shown in FIGS. 12, 13 and 14, a p-side metal pillar 23 is provided on the p-side wiring layer 31. The p-side wiring layer 31 and the p-side metal pillar 23 constitute a p-side wiring part in the present embodiment. An n-side metal pillar 24 is provided on the n-side wiring layer 32. The n-side wiring layer 32 and the n-side metal pillar 24 constitute an n-side wiring portion in the present embodiment.

  A resin layer 25 is laminated on the insulating film 18. The resin layer 25 covers the periphery of the n-side wiring layer 32, the periphery of the n-side metal pillar 24, the periphery of the p-side interconnect layer 31, and the periphery of the p-side metal pillar 23. The resin layer 25 is filled between the p-side wiring layer 31 and the n-side wiring layer 32 and between the p-side metal pillar 23 and the n-side metal pillar 24.

  The side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 are covered with a resin layer 25. The surface of the p-side metal pillar 23 opposite to the p-side wiring layer 31 is exposed from the resin layer 25 and functions as the p-side external terminal 23a. The surface of the n-side metal pillar 24 opposite to the n-side wiring layer 32 is exposed from the resin layer 25 and functions as the n-side external terminal 24a.

  The p-side external terminal 23a and the n-side external terminal 24a are joined to a pad formed on a mounting board (not shown) via solder or the like.

  The area where the p-side wiring layer 31 contacts the p-side pad 16b through the plurality of p-side vias 21a is larger than the area where the n-side wiring layer 32 contacts the n-side pad 17b through the plurality of n-side vias 22a. Therefore, the current distribution to the light emitting layer 13 can be improved, and the heat dissipation of the light emitting layer 13 can be improved.

  The area of the n-side wiring layer 32 extending on the insulating film 18 is larger than the area where the n-side wiring layer 32 is connected to the n-side pad 17b through the n-side via 22a.

  According to the second embodiment, a high light output can be obtained by the light emitting layer 13 extending over a wider area than the n-side electrode 17a. Further, the n-side electrode 17a provided in the n-side region 14b narrower than the region including the light emitting layer 13 is formed on the opposite side of the light extraction surface (first surface 15a) as the n-side wiring layer 32 having a larger area. Has been pulled out.

  As shown in FIG. 13, the first semiconductor layer 11 includes an n-side external terminal via an n-side electrode 17a, an n-side pad 17b, an n-side via 22a, an n-side wiring layer 32, and an n-side metal pillar 24. 24a is electrically connected.

  As shown in FIG. 14, the second semiconductor layer 12 includes a p-side external terminal through a p-side electrode 16a, a p-side pad 16b, a p-side via 21a, a p-side wiring layer 31, and a p-side metal pillar 23. 23a is electrically connected.

  The p-side metal pillar 23 is thicker than the p-side wiring layer 21 and thicker than the p-side wiring layer 31. The n-side metal pillar 24 is thicker than the n-side wiring layer 22 and thicker than the n-side wiring layer 32. Each of the p-side metal pillar 23, the n-side metal pillar 24, and the resin layer 25 is thicker than the semiconductor layer 15. The thicknesses of the p-side metal pillar 23 and the n-side metal pillar 24 are larger than the thickness of the chip including the semiconductor layer 15, the p-side electrode 16a, the p-side pad 16b, the n-side electrode 17a, and the n-side pad 17b. thick.

  According to the second embodiment, even if the substrate used to form the semiconductor layer 15 is removed, the semiconductor layer 15 is formed by the support including the p-side metal pillar 23, the n-side metal pillar 24, and the resin layer 25. It can support stably and can raise the mechanical strength of the semiconductor light-emitting device 1. FIG.

  Further, in the state where the semiconductor light emitting device 2 is mounted on the mounting substrate via the p-side external terminal 23a and the n-side external terminal 24a, the stress applied to the semiconductor layer 15 via the solder is applied to the p-side metal pillar 23 and the n-side. It can be mitigated by absorption by the metal pillar 24.

  The substrate used when forming the semiconductor layer 15 is removed from the first surface 15a. For this reason, the semiconductor light emitting device 2 can be reduced in height.

  A phosphor layer 50 can be provided on the first surface 15a as shown in FIG. The phosphor layer 50 includes a transparent resin 51 as a transparent medium and a plurality of particulate phosphors 52 dispersed in the transparent resin 51.

  The transparent resin 51 has transparency with respect to the light emitted from the light emitting layer 13 and the light emitted from the phosphor 52. For example, a silicone resin, an acrylic resin, a phenyl resin, or the like can be used.

  The phosphor 52 can absorb the light emitted from the light emitting layer 13 (excitation light) and emit wavelength converted light. For this reason, the semiconductor light emitting device of the second embodiment can emit mixed light of the light emitted from the light emitting layer 13 and the wavelength converted light from the phosphor 52.

  For example, when the phosphor 52 is a yellow phosphor that emits yellow light, a mixed color of blue light of the light emitting layer 13 that is an InGaN-based material and yellow light that is wavelength converted light in the phosphor 52 is white or a light bulb. Color can be obtained. The phosphor layer 50 may include a plurality of types of phosphors (for example, a red phosphor that emits red light and a green phosphor that emits green light).

  In the semiconductor light emitting device 2 of the second embodiment, a p-side electrode 16a and an n-side electrode 17a are provided on the second surface opposite to the first surface 15a, which is a main light extraction surface. Therefore, light extraction from the first surface 15a is not hindered by the electrodes. The p-side electrode 16 a is provided on the region including the light emitting layer 13. The n-side electrode 17 a is provided on the first semiconductor layer 11 that does not include the light emitting layer 13.

  According to the second embodiment, the contact surface between the n-side electrode 17a and the first semiconductor layer 11, that is, the n-side region 14b in the second surface of the first semiconductor layer 11 is evenly arranged on the second surface. Has been. Therefore, a uniform current distribution in the surface direction of the light emitting layer 13 can be realized while reducing the area not including the light emitting layer 13 to increase the light emitting area.

  Also in the second embodiment, the p-side region 14a and the light emitting layer 13 exist all around the n-side region 14b and the n-side electrode 17a. Therefore, a current spreads from one n-side electrode 17a to the entire peripheral region, and the current can be efficiently supplied to the entire region of the light emitting layer 13. Therefore, according to the second embodiment, the entire region of the light emitting layer 13 can be made to emit light efficiently.

  The plurality of n-side electrodes 17a are separated from each other on the second surface of the first semiconductor layer 11, but are responsible for mounting on the mounting substrate on the opposite side of the light extraction surface (first surface 15a). It is connected to the common n-side wiring part. Therefore, the same potential can be applied to the plurality of n-side electrodes 17a with a simple configuration without wire bonding to each of the plurality of n-side electrodes 17a.

  Next, with reference to FIGS. 15 to 19B, a method for manufacturing the semiconductor light emitting device 2 of the second embodiment will be described.

  FIG. 18A shows a C-C ′ cross section in FIG. 15, and FIG. 18B shows a D-D ′ cross section in FIG. 15.

  Similar to the first embodiment, the semiconductor layer 15 is formed on the entire surface of the substrate 10. Thereafter, as shown in FIG. 18A, a part of the first semiconductor layer 11 is removed by removing a part of the light emitting layer 13 and the second semiconductor layer 12 by, for example, RIE using a resist (not shown). To expose. The first semiconductor layer 11 is selectively exposed in a rectangular shape.

  The region where the first semiconductor layer 11 is exposed becomes an n-side region 14 b that does not include the light emitting layer 13 and the second semiconductor layer 12. The region where the second semiconductor layer 12 and the light emitting layer 13 are left becomes a p-side region 14a.

  An n-side electrode 17a and an n-side pad 17b are formed on the n-side region 14b. A p-side electrode 16a and a p-side pad 16b are formed on the surface of the second semiconductor layer 12 in the p-side region 14a.

  For example, a silicon nitride film or a silicon oxide film may be formed as a passivation film between the p-side pad 16b and the n-side pad 17b or on the end face (side surface) of the light emitting layer 13 by a CVD method.

  Next, after all the exposed portions on the main surface of the substrate 10 are covered with the insulating film 18 shown in FIGS. 19A and 19B, the insulating film 18 is patterned by etching and selected as the insulating film 18. Thus, the first opening 18a and the second opening 18b are formed. FIGS. 19A and 19B correspond to the cross sections of FIGS. 18A and 18B, respectively.

  As shown in FIG. 19B, a plurality of first openings 18a are formed, and each first opening 18a reaches the p-side pad 16b. As shown in FIG. 19A, a second opening 18b is formed on each of the plurality of n-side pads 17b, and each second opening 18b reaches the n-side pad 17b.

  Next, after forming a metal film (not shown) on the surface of the insulating film 18, the inner wall (side wall and bottom part) of the first opening 18a, and the inner wall (side wall and bottom part) of the second opening 18b, the metal film is Cu electrolytic plating using seed metal (current path) is performed.

  As a result, as shown in FIGS. 13, 14, 16 and 17, a p-side via 21a is formed in the first opening 18a, an n-side via 22a is formed in the second opening 18b, and the insulating film 18 is formed. The p-side wiring layer 31 and the n-side wiring layer 32 are formed. The p-side via 21a, the n-side via 22a, the p-side wiring layer 31, and the n-side wiring layer 32 are made of, for example, a copper material that is simultaneously formed by a plating method using a plating resist (not shown).

  Further, the p-side metal pillar 23 is formed on the p-side wiring layer 31 and the n-side metal pillar 24 is formed on the n-side wiring layer 32 by Cu electrolytic plating.

  After forming the p-side metal pillar 23 and the n-side metal pillar 24, the resin layer 25 is laminated on the insulating film 41. The resin layer 25 covers the p-side wiring layer 31, the n-side wiring layer 32, the p-side metal pillar 23 and the n-side metal pillar 24.

  Next, the aforementioned substrate 10 used for forming the semiconductor layer 15 is removed. When the substrate 10 is a sapphire substrate, the substrate 10 can be removed by, for example, a laser lift-off method. When the substrate 10 is a silicon substrate, the substrate 10 can be removed by etching.

  Since the above-described laminate formed on the main surface of the substrate 10 is reinforced by the p-side metal pillar 23, the n-side metal pillar 24, and the resin layer 25 that are thicker than the semiconductor layer 15, even if the substrate 10 disappears. It is possible to keep the wafer state.

  The resin layer 25 and the metal constituting the p-side metal pillar 23 and the n-side metal pillar 24 are also flexible materials compared to the semiconductor layer 15. The semiconductor layer 15 is supported on such a flexible support. Therefore, even if a large internal stress generated when the semiconductor layer 15 is epitaxially grown on the substrate 10 is released at a time when the substrate 10 is peeled off, the semiconductor layer 15 can be prevented from being destroyed.

  The first surface 15a of the semiconductor layer 15 from which the substrate 10 has been removed is cleaned. Thereafter, the first surface 15a is wet-etched with, for example, a KOH (potassium hydroxide) aqueous solution or TMAH (tetramethylammonium hydroxide). Thereby, unevenness is formed on the first surface 15a due to the difference in the etching rate depending on the crystal plane orientation. Alternatively, etching may be performed after patterning with a resist to form irregularities on the first surface 15a. The light extraction efficiency can be improved by forming irregularities on the first surface 15a.

  As necessary, the phosphor layer 50 shown in FIG. 20 is formed on the first surface 15a. The liquid transparent resin 51 in which the phosphor 52 is dispersed is supplied onto the first surface 15a by, for example, a method such as printing, potting, molding, or compression molding, and then thermoset.

  Thereafter, the stacked body is cut and separated into a plurality of semiconductor light emitting devices 2. For example, cutting is performed using a dicing blade. Or you may cut | disconnect by laser irradiation.

  The separated semiconductor light emitting device 1 may have a single chip structure including one semiconductor layer 15 or a multichip structure including a plurality of semiconductor layers 15.

  The above-described processes before dicing are performed all at once in the wafer state, so there is no need to perform wiring and packaging for each individual device, and the production cost can be greatly reduced. It becomes possible. That is, wiring and packaging have already been completed in the state of being separated. For this reason, productivity can be improved and as a result, price reduction becomes easy.

  In the embodiment described above, the p-side wiring layer 31 and the n-side wiring layer 32 may be bonded to the pads of the mounting substrate without providing the p-side metal pillar 23 and the n-side metal pillar 24.

  In addition, the p-side wiring layer 31 and the p-side metal pillar 23 are not limited to being separate bodies, and the p-side wiring layer 31 and the p-side metal pillar 23 may be integrally provided in the same process. Similarly, the n-side wiring layer 32 and the n-side metal pillar 24 are not limited to being separate bodies, and the n-side wiring layer 32 and the n-side metal pillar 24 may be integrally provided in the same process.

(Third embodiment)
FIG. 32A is a schematic plan view of the semiconductor light emitting device 3 of the third embodiment, and FIG. 32B is a schematic cross-sectional view of the semiconductor light emitting device 3 of the third embodiment.
FIG. 32A shows, for example, four semiconductor light emitting devices 3 separated from the wafer state. FIG. 32B is a cross-sectional view taken along the line EE ′ in FIG.

  The semiconductor light emitting device 3 of the third embodiment also has a semiconductor layer 15 as in the first and second embodiments. The semiconductor layer 15 includes a first semiconductor layer 11, a second semiconductor layer 12, and a light emitting layer 13.

  The first semiconductor layer 11 has a first surface 15a and a second surface provided on the opposite side of the first surface 15a. Furthermore, as shown in FIG. 32B, the second surface has a p-side region 80a and an n-side region 80b. The first semiconductor layer 11 includes, for example, a base buffer layer and an n-type GaN layer.

  A light emitting layer (active layer) 13 is provided on the p-side region 80 a on the second surface of the first semiconductor layer 11. The light emitting layer 13 has, for example, an InGaN multiple quantum well structure in which a plurality of pairs of InGaN well layers and GaN or InGaN barrier layers are stacked, and emits blue, purple, blue-violet, ultraviolet light, and the like.

  A second semiconductor layer 12 including a p-type GaN layer is provided on the light emitting layer 13. The light emitting layer 13 is provided between the first semiconductor layer 11 and the second semiconductor layer 12. The light emitting layer 13 and the second semiconductor layer 12 are not provided in the n-side region 80 b on the second surface of the first semiconductor layer 11.

  The first surface 15a of the first semiconductor layer 11 functions as a main light extraction surface, and the emitted light of the light emitting layer 13 is emitted from the first surface 15a mainly to the outside of the semiconductor layer 15. A p-side electrode 62, an n-side electrode 61, and an n-side reflective electrode 63 described below are provided on the opposite side of the first surface 15a.

  A p-side electrode 62 is provided on the surface of the second semiconductor layer 12. An n-side electrode 61 is provided on the n-side region 80 b on the second surface of the first semiconductor layer 11.

  As shown in FIGS. 22A and 22B, the n-side region 80 b is a part of the light emitting layer 13 and the second semiconductor layer 12 formed on the entire second surface of the first semiconductor layer 11. By selectively removing, the surface of the first semiconductor layer 11 is exposed.

  For one chip, n-side regions 80b are formed at a plurality of locations (for example, two locations). An n-side electrode 61 is provided on each n-side region 80b. The two n-side electrodes 61 are located with the second semiconductor layer 12 sandwiched in the surface direction of the second surface.

  An insulating film 71 is provided on the second semiconductor layer 12 sandwiched between the two n-side electrodes 61, and the p-side electrode 62 is not provided. An n-side reflective electrode 63 is provided on the two n-side electrodes 61 and on the insulating film 71 on the second semiconductor layer 12 sandwiched between the n-side electrodes 61.

  That is, the n-side reflective electrode 63 has two n-side vias 63a provided on each of the two n-side electrodes 61, and a connecting portion 63b that connects the two n-side vias 63a. The side via 63a and the connecting portion 63b are integrally formed of the same material. The connecting portion 63 b extends in the direction connecting the two n-side vias 63 a and is provided on the second semiconductor layer 12 sandwiched between the two n-side electrodes 61 via the insulating film 71.

  The n-side reflective electrode 63 is provided so as to straddle the second semiconductor layer 12 provided between the two n-side electrodes 61, and the planar shape of the n-side reflective electrode 63 is as shown in FIG. It is formed in a rectangular shape.

  A direction in which the n-side reflective electrode 63 extends is defined as a first direction X, and a direction orthogonal to the first direction X in the plan view of FIG. The light emitting layer 13, the second semiconductor layer 12, and the p-side electrode 62 are provided on both sides of the n-side reflective electrode 63 in the second direction Y. The p-side electrode 62 sandwiches the n-side reflective electrode 63 in the second direction Y.

  The p-side electrode 62, the n-side electrode 61, and the n-side reflective electrode 63 are provided on the same surface side opposite to the first surface 15 a that is the main light extraction surface in the semiconductor layer 15. The p-side electrode 62 is provided on the region including the light emitting layer 13, and the n-side electrode 61 is provided on the n-side region 80 b not including the light emitting layer 13. The n-side reflective electrode 63 is provided on the n-side electrode 61 and on the light emitting layer 13 between the n-side electrodes 61.

  The p-side electrode 62 is in contact with the second semiconductor layer 12 and can form an alloy with gallium (Ga) contained in the second semiconductor layer 12, for example, nickel (Ni), gold (Au), and rhodium ( A contact layer including at least one of Rh). Furthermore, the p-side electrode 62 is provided on the contact layer, has a higher reflectance for the emitted light of the light emitting layer 13 than the contact layer, and includes a reflective layer containing, for example, silver (Ag) as a main component.

  The n-side electrode 61 is in contact with the first semiconductor layer 11 and can form an alloy with gallium (Ga) contained in the first semiconductor layer 11. For example, nickel (Ni), gold (Au), and rhodium ( At least one of Rh).

  The n-side reflective electrode 63 is formed of the same material as the p-side electrode 62 at the same time. The n-side reflective electrode 63 has a higher reflectance with respect to the emitted light of the light-emitting layer 13 than the n-side electrode 61 and contains, for example, silver (Ag) as a main component.

  An insulating film 76 is provided on the insulating film 71, the p-side electrode 62, and the n-side reflective electrode 63. The insulating film 76 covers the p-side electrode 62 and the n-side reflective electrode 63.

  The insulating film 76 is, for example, a resin such as polyimide. Alternatively, an inorganic film such as a silicon oxide film or a silicon nitride film may be used as the insulating film 76.

  A p-side wiring layer 65 and an n-side wiring layer 66 are provided on the insulating film 76 so as to be separated from each other. The p-side wiring layer 65 and the n-side wiring layer 66 are formed by electrolytic plating as will be described later. The p-side wiring layer 65 including the metal film 64 used as a seed metal at the time of plating is used. Similarly, the n-side wiring layer 66 including the metal film 64 used as a seed metal is formed.

  The p-side wiring layer 65 is provided on the p-side electrode 62 through the insulating film 76. A first opening reaching the p-side electrode 62 is formed in the insulating film 76, and the p-side wiring layer 65 is electrically connected to the p-side electrode 62 through a p-side via provided in the first opening. ing.

  The n-side wiring layer 66 is provided on the n-side reflective electrode 63 via the insulating film 76. A second opening reaching the n-side reflective electrode 63 is formed in the insulating film 76, and the n-side wiring layer 66 is connected to the n-side reflective electrode 63 and the n-side electrode through an n-side via provided in the second opening. 61 is electrically connected.

  A p-side metal pillar 67 is provided on the p-side wiring layer 65. The p-side wiring layer 65 and the p-side metal pillar 67 constitute a p-side wiring part in the present embodiment. An n-side metal pillar 68 is provided on the n-side wiring layer 66. The n-side wiring layer 66 and the n-side metal pillar 68 constitute an n-side wiring portion in the present embodiment.

  On the insulating film 76, a resin layer 77 is laminated as another insulating film. The resin layer 77 covers the periphery of the p-side wiring portion and the periphery of the n-side wiring portion. The resin layer 77 is filled between the p-side metal pillar 67 and the n-side metal pillar 68.

  The side surface of the p-side metal pillar 67 and the side surface of the n-side metal pillar 68 are covered with a resin layer 77. The surface of the p-side metal pillar 67 opposite to the p-side wiring layer 65 is exposed from the resin layer 77 and functions as the p-side external terminal 67a. A surface of the n-side metal pillar 68 opposite to the n-side wiring layer 66 is exposed from the resin layer 77 and functions as an n-side external terminal 68a. The p-side external terminal 67a and the n-side external terminal 68a are joined to a pad formed on a mounting board (not shown) via solder or the like.

  The distance between the p-side external terminal 67a and the n-side external terminal 68a exposed on the same surface of the resin layer 77 (upper surface in FIG. 32B) is the p-side wiring layer 65 on the insulating film 76 and the n-side. It is larger than the distance between the wiring layer 66. The p-side external terminal 67a and the n-side external terminal 68a are separated by a distance that is not short-circuited by solder or the like when mounted on the mounting board.

  The p-side wiring layer 65 and the n-side wiring layer 66 can be brought close to the process limit, and the areas of the p-side wiring layer 65 and the n-side wiring layer 66 can be increased. As a result, current distribution and heat dissipation can be improved.

  The area of the n-side wiring layer 66 extending on the insulating film 76 is larger than the total area of the plurality of n-side electrodes 61 on the second surface.

  According to the third embodiment, a high light output can be obtained by the light emitting layer 13 formed over a region wider than the n-side electrode 61. In addition, the n-side electrode 61 provided in a region narrower than the region including the light emitting layer 13 is drawn out to the mounting surface side as an n-side wiring layer 66 having a larger area.

  The p-side metal pillar 67 is thicker than the p-side wiring layer 65, and the n-side metal pillar 68 is thicker than the n-side wiring layer 66. Each of the p-side metal pillar 67, the n-side metal pillar 68, and the resin layer 77 is thicker than the semiconductor layer 15. Here, “thickness” represents the thickness in the vertical direction in FIG.

  The thickness of each of the p-side metal pillar 67 and the n-side metal pillar 68 is larger than the thickness of the stacked body (chip) including the semiconductor layer 15, the p-side electrode 62, the n-side electrode 61, and the n-side reflective electrode 63. thick. The aspect ratio (ratio of thickness to plane size) of each metal pillar 67 and 68 is not limited to 1 or more, and the ratio may be smaller than 1. That is, the metal pillars 67 and 68 may have a thickness smaller than the planar size.

  According to the third embodiment, even if a substrate 10 (to be described later) used to form the semiconductor layer 15 is removed, the support including the p-side metal pillar 67, the n-side metal pillar 68, and the resin layer 77 provides a semiconductor The layer 15 can be stably supported, and the mechanical strength of the semiconductor light emitting device 3 can be increased.

  As a material for the p-side wiring layer 65, the n-side wiring layer 66, the p-side metal pillar 67, and the n-side metal pillar 68, copper, gold, nickel, silver, or the like can be used. Among these, when copper is used, good thermal conductivity, high migration resistance, and excellent adhesion with an insulating material can be obtained.

  The resin layer 77 reinforces the p-side metal pillar 67 and the n-side metal pillar 68. It is desirable to use a resin layer 77 having the same or similar thermal expansion coefficient as that of the mounting substrate. As such a resin layer 25, an epoxy resin, a silicone resin, a fluororesin, etc. can be mentioned as an example, for example.

  In a state where the semiconductor light emitting device 3 is mounted on the mounting substrate via the p-side external terminal 67a and the n-side external terminal 68a, the stress applied to the semiconductor layer 15 via solder is applied to the p-side metal pillar 67 and the n-side metal pillar. It can relieve because 68 absorbs.

  As will be described later, the substrate 10 used for forming the semiconductor layer 15 is removed from the first surface 15a. For this reason, the semiconductor light emitting device 3 can be reduced in height.

  A phosphor layer 50 is provided on the first surface 15a. The phosphor layer 50 includes a transparent resin 51 as a transparent medium and a plurality of particulate phosphors 52 dispersed in the transparent resin 51.

  The transparent resin 51 has transparency with respect to the light emitted from the light emitting layer 13 and the light emitted from the phosphor 52. For example, a silicone resin, an acrylic resin, a phenyl resin, or the like can be used.

  The phosphor 52 can absorb the light emitted from the light emitting layer 13 (excitation light) and emit wavelength converted light. For this reason, the semiconductor light emitting device 3 of the third embodiment can emit mixed light of the light emitted from the light emitting layer 13 and the wavelength converted light from the phosphor 52.

  For example, when the phosphor 52 is a yellow phosphor that emits yellow light, a mixed color of blue light of the light emitting layer 13 that is an InGaN-based material and yellow light that is wavelength converted light in the phosphor 52 is white or a light bulb. Color can be obtained. The phosphor layer 50 may include a plurality of types of phosphors (for example, a red phosphor that emits red light and a green phosphor that emits green light).

  In the semiconductor light emitting device 3 of the third embodiment, the p-side electrode 62, the n-side electrode 61, and the n-side reflective electrode 63 are provided on the second surface opposite to the first surface 15a, which is the main light extraction surface. It has been. Therefore, light extraction from the first surface 15a is not hindered by the electrodes.

  The n-side region 80b on the second surface of the first semiconductor layer 11 and the n-side electrode 61 provided on the n-side region 80b are scattered on the second surface in the form of dots or islands. Therefore, a uniform current distribution in the surface direction of the light emitting layer 13 can be realized while reducing the area not including the light emitting layer 13 to increase the light emitting area.

  Furthermore, as shown in FIG. 25 (a), the p side having high reflectivity with respect to the light emitted from the light emitting layer 13 over almost the entire surface opposite to the light extraction surface (first surface 15a). The electrode 62 and the n-side reflective electrode 63 are spread. Therefore, the reflection area of the light emitted from the light emitting layer 13 to the opposite side of the light extraction surface (first surface 15a) can be increased, and high light extraction efficiency can be obtained.

  The n-side electrode 61 is separated into a plurality on the second surface of the first semiconductor layer 11. The plurality of n-side electrodes 61 are electrically connected to each other by an n-side reflecting electrode 63 provided on the second semiconductor layer 12 existing between the plurality of n-side electrodes 61 via an insulating film 71. .

  As an electrode for connecting a plurality of n-side electrodes 61, a reflective area on the opposite side of the light extraction surface can be enlarged by using a material having a high reflectance such as silver. In addition, when the n-side reflective electrode 63 is formed of the same material as the p-side electrode 62 when the p-side electrode 62 is formed, the number of processes is not increased and the cost can be reduced.

  Next, with reference to FIGS. 21A to 21B, a method for manufacturing the semiconductor light emitting device 3 of the third embodiment will be described. FIG. 21A to FIG. 32B show a partial region in the wafer state.

  21 (b), FIG. 22 (b), FIG. 23 (b), FIG. 24 (b), FIG. 25 (b), FIG. 26 (b), FIG. 27 (b), FIG. (B), FIG. 30 (b), and FIG. 32 (b) are respectively shown in FIG. 21 (a), FIG. 22 (a), FIG. 23 (a), FIG. 24 (a), FIG. 26 (a), FIG. 27 (a), FIG. 28 (a), FIG. 29 (a), FIG. 30 (a), and FIG.

  As shown in FIG. 21B, the semiconductor layer 15 is formed on the substrate 10. First, the first semiconductor layer 11 is formed on the main surface of the substrate 10, the light emitting layer 13 is formed thereon, and the second semiconductor layer 12 is formed thereon.

The semiconductor layer 15 which is a nitride semiconductor represented by In _x Al _y Ga _1-xy N (0 ≦ x ≦ 1, 0 ≦ y ≦ 1, x + y ≦ 1) is formed on a sapphire substrate by MOCVD, for example. Crystals can be grown. Alternatively, a silicon substrate can be used as the substrate 10.

  The semiconductor layer 15 is formed on the entire surface of the substrate 10. After that, as shown in FIGS. 22A and 22B, the light emitting layer 13 and the second semiconductor layer 12 are partially removed by, for example, RIE using a resist (not shown) to form the first semiconductor layer. A part of 11 is exposed. Further, the semiconductor layer 15 is separated into a plurality on the substrate 10 by grooves 73 formed, for example, in a lattice-like plane pattern.

  The region where the first semiconductor layer 11 is exposed becomes an n-side region 80 b that does not include the light emitting layer 13 and the second semiconductor layer 12.

  Next, after all the exposed portions on the substrate 10 are covered with the insulating film 71 shown in FIGS. 23A and 23B, the openings 74 are selectively formed in the insulating film 71. The insulating film 71 is a resin film or an inorganic film such as a silicon nitride film or a silicon oxide film.

  The opening 74 is formed on a portion where the first semiconductor layer 11 is exposed (n-side region 80b) and reaches the surface of the n-side region 80b. An n-side electrode 61 is formed in the opening 74.

  Next, a part of the insulating film 71 covering the surface of the second semiconductor layer 12 is removed as shown in FIGS. 24A and 24B, and the insulating film on the second semiconductor layer 12 is removed. An opening 75 is formed in 71. No opening 75 is formed on the second semiconductor layer 12 sandwiched between the n-side electrodes 61 in the X direction, and the surface of the second semiconductor layer 12 between the n-side electrodes 61 remains covered with the insulating film 71. is there.

  As shown in FIGS. 25A and 25B, an n-side via 63 a is formed on the n-side electrode 61 in the opening 74, and on the insulating film 71 on the second semiconductor layer 12 between the n-side electrodes 61. The connecting portion 63b is formed, and the p-side electrode 62 is formed on the surface of the second semiconductor layer 12 in the opening 75. That is, the p-side electrode 62 and the n-side reflective electrode 63 are simultaneously formed of the same material. The p-side electrode 62 and the n-side reflective electrode 63 can be formed, for example, by sputtering using a mask (not shown).

  Next, after all the exposed portions on the main surface of the substrate 10 are covered with the insulating film 76 shown in FIG. 26B, a part of the insulating film 76 on the p-side electrode 62 is removed to remove the first An opening 76a is formed, and a part of the insulating film 76 on the n-side reflective electrode 63 is removed to form a second opening 76b. The p-side electrode 62 is exposed in the first opening 76a, and the n-side reflective electrode 63 is exposed in the second opening 76b.

  Next, as shown in FIG. 27B, a metal film 64 is formed on the surface of the insulating film 76, the inner wall (side wall and bottom) of the first opening 76a, and the inner wall (side wall and bottom) of the second opening 76b. Form. The metal film 64 is used as a seed metal for plating described later.

  The metal film 64 is formed by sputtering, for example. The metal film 64 includes, for example, a laminated film of titanium (Ti) and copper (Cu) laminated in order from the lower layer side. Alternatively, an aluminum film may be used instead of the titanium film.

  Then, a resist 81 is selectively formed on the metal film 64, and Cu electrolytic plating using the metal film 64 as a current path is performed.

  Thereby, the p-side wiring layer 65 and the n-side wiring layer 66 are selectively formed on the metal film 64. The p-side wiring layer 65 and the n-side wiring layer 66 are made of, for example, a copper material that is simultaneously formed by plating.

  Next, as shown in FIGS. 28A and 28B, a metal pillar forming resist 82 is formed. The resist 82 is thicker than the resist 81 described above. Note that the resist 81 may be left without being removed in the previous step, and the resist 82 may be overlapped with the resist 81.

  Then, Cu electrolytic plating using the metal film 64 as a current path is performed using the resist 82 as a mask. As a result, the p-side metal pillar 67 is formed on the p-side wiring layer 65, and the n-side metal pillar 68 is formed on the n-side wiring layer 66. The p-side metal pillar 67 and the n-side metal pillar 68 are made of, for example, a copper material that is simultaneously formed by a plating method.

  The resist 82 is removed as shown in FIG. 29B using, for example, a solvent or oxygen plasma. Thereafter, the exposed portion of the metal film 64 used as the seed metal is removed by wet etching. As a result, as shown in FIG. 29B, the electrical connection through the metal film 64 between the p-side wiring layer 65 and the n-side wiring layer 66 is broken.

  Next, as shown in FIGS. 30A and 30B, after forming a resin layer 77 covering the p-side wiring layer 65, the n-side wiring layer 66, the p-side metal pillar 67, and the n-side metal pillar 68, The resin layer 77 is ground to expose the end face of the p-side metal pillar 67 (p-side external terminal 67 a) and the end face of the n-side metal pillar 68 (n-side external terminal 68 a) from the resin layer 77.

  The resin layer 77 has insulating properties. Further, for example, carbon black may be contained in the resin layer 77 so as to give a light shielding property to the light emitted from the light emitting layer 13.

  Next, as shown in FIG. 31A, the substrate 10 is removed. When the substrate 10 is a sapphire substrate, the substrate 10 can be removed by, for example, a laser lift-off method. Specifically, laser light is irradiated from the back surface side of the substrate 10 toward the first semiconductor layer 11. The laser beam is transmissive to the substrate 10 and has a wavelength that serves as an absorption region for the first semiconductor layer 11.

  When the laser light reaches the interface between the substrate 10 and the first semiconductor layer 11, the first semiconductor layer 11 near the interface absorbs the energy of the laser light and decomposes. The first semiconductor layer 11 is decomposed into gallium (Ga) and nitrogen gas. By this decomposition reaction, a minute gap is formed between the substrate 10 and the first semiconductor layer 11, and the substrate 10 and the first semiconductor layer 11 are separated.

  Laser light irradiation is performed over the entire wafer in multiple times for each set region, and the substrate 10 is removed.

  When the substrate 10 is a silicon substrate, the substrate 10 can be removed by etching.

  Since the above-described laminate formed on the main surface of the substrate 10 is reinforced by the p-side metal pillar 67, the n-side metal pillar 68, and the resin layer 77 that are thicker than the semiconductor layer 15, even if the substrate 10 disappears. It is possible to keep the wafer state.

  The resin layer 77 and the metal constituting the p-side metal pillar 67 and the n-side metal pillar 68 are also flexible materials compared to the semiconductor layer 15. The semiconductor layer 15 is supported on such a flexible support. Therefore, even if a large internal stress generated when the semiconductor layer 15 is epitaxially grown on the substrate 10 is released at a time when the substrate 10 is peeled off, the semiconductor layer 15 can be prevented from being destroyed.

  A phosphor layer 50 is formed on the first surface 15a exposed by removing the substrate 10 as shown in FIG. The above-described grinding process of the resin layer 77 may be performed after the removal process of the substrate 10 or may be performed after the formation of the phosphor layer 50.

  The liquid transparent resin 51 in which the phosphor 52 is dispersed is supplied onto the first surface 15a by, for example, a method such as printing, potting, molding, and compression molding, and then thermally cured to form the phosphor layer 50. The

  Next, the resin layer 77, the insulating film 76, the insulating film 71, the first semiconductor layer 11, and the phosphor layer 50 are cut at the position of the groove 73 shown in FIG. ) And (b), the semiconductor light emitting devices 3 are separated into individual pieces.

  The separated semiconductor light emitting device 3 may have a single chip structure including one semiconductor layer 15 or a multichip structure including a plurality of semiconductor layers 15.

  The above-described processes before dicing are performed all at once in the wafer state, so there is no need to perform wiring and packaging for each individual device, and the production cost can be greatly reduced. It becomes possible. That is, wiring and packaging have already been completed in the state of being separated. For this reason, productivity can be improved and as a result, price reduction becomes easy.

(Fourth embodiment)
FIG. 34A is a schematic plan view of the semiconductor light emitting device 4 of the fourth embodiment, and FIG. 34B is a schematic cross-sectional view of the semiconductor light emitting device 4 of the fourth embodiment.

  FIG. 34 (a) shows, for example, four semiconductor light emitting devices 4 separated from the wafer state. FIG. 34B is a cross-sectional view taken along the line E-E ′ in FIG.

  The semiconductor light emitting device 4 of the fourth embodiment is different from the semiconductor light emitting device 3 of the third embodiment in that the metal pillars 67 and 68 and the resin layer 77 are not provided.

  In the semiconductor light emitting device 4 of the fourth embodiment, the substrate 10 used for the growth of the semiconductor layer 15 is left on the first surface 15 a, and the substrate 10 functions as a support for the semiconductor layer 15. The substrate 10 is, for example, a sapphire substrate that is transparent to the light emitted from the light emitting layer 13.

  The refractive indexes of the GaN layer, sapphire substrate, and air are 2.4, 1.8, and 1.0, respectively, and the refractive index of the medium changes stepwise in the direction in which light is extracted. For this reason, the light extraction efficiency can be improved. A phosphor layer 50 may be provided on the substrate 10.

  Solder 91 is provided on the p-side wiring layer 65, and solder 92 is provided on the n-side wiring layer 66. The semiconductor light emitting device 4 joins the solders 91 and 92 to the pads of the mounting board, Implemented above.

  The steps up to the steps shown in FIGS. 27A and 27B are performed in the same manner as in the third embodiment. Thereafter, as shown in FIGS. 33A and 33B, solder 91 is formed on the p-side wiring layer 65 and solder 92 is formed on the n-side wiring layer 66 by plating using the resist 81 as a mask.

  Thereafter, the resist 81 is removed, and the exposed portion of the metal film 64 used as a seed metal for plating is removed as shown in FIG. Thereby, the electrical connection through the metal film 64 between the p-side wiring layer 65 and the n-side wiring layer 66 is cut off.

  Thereafter, the insulating film 76, the insulating film 71, the first semiconductor layer 11, and the substrate 10 are cut and separated into a plurality of semiconductor light emitting devices 4.

(Fifth embodiment)
FIG. 47A is a schematic plan view of the semiconductor light emitting device 5 of the fifth embodiment, and FIG. 47B is a schematic cross-sectional view of the semiconductor light emitting device 5 of the fifth embodiment.
FIG. 47A shows, for example, four semiconductor light emitting devices 5 separated from the wafer state. FIG. 47B is a cross-sectional view taken along the line EE ′ in FIG.

  The semiconductor light emitting device 5 of the fifth embodiment includes a transparent electrode 95 in addition to the elements of the semiconductor light emitting device 3 of the third embodiment described above. The transparent electrode 95 is transmissive to the light emitted from the light emitting layer 13 (transparent), and the material of the transparent electrode 95 is, for example, ITO (Indium Tin Oxide).

  The transparent electrode 95 is provided on the second semiconductor layer 12 and is not provided in the n-side region 80b. The transparent electrode 95 is provided between the p-side electrode 62 and the second semiconductor layer 12 and is electrically connected to the p-side electrode 62 and the second semiconductor layer 12.

  Further, the transparent electrode 95 is also provided on the second semiconductor layer 12 below the n-side reflective electrode 63. An insulating film 71 is provided between the n-side reflective electrode 63 and the transparent electrode 95, and the n-side reflective electrode 63 and the transparent electrode 95 are not connected.

  As shown in FIG. 37A showing a top view of the transparent electrode 95, the transparent electrode 95 is provided on the second semiconductor layer 12 in the same plane pattern as the second semiconductor layer 12.

  The transparent electrode 95 below the p-side electrode 62 and the transparent electrode 95 below the n-side reflective electrode 63 are connected together. Therefore, current can be supplied from the p-side electrode 62 to the light emitting layer 13 below the n-side reflective electrode 63 through the transparent electrode 95.

  The second semiconductor layer 12 containing p-type GaN, which has higher resistance than n-type GaN, has a capability of flowing current in the lateral direction (direction perpendicular to the thickness direction), and the first semiconductor layer containing n-type GaN. It is inferior to 11.

  However, according to the fifth embodiment, by providing the transparent electrode 95 on the second semiconductor layer 12, the ability of the current supplied from the second semiconductor layer 12 side to the light emitting layer 13 to flow in the lateral direction is improved. It can be improved. As a result, it is possible to increase the emission intensity particularly in the region under the n-side reflective electrode 63 where the p-side electrode 62 is not provided.

  Further, by controlling the thickness of the transparent electrode 95 so that the distance between the light emitting layer 13 and the n-side reflective electrode 63 is ½ of the light emitting wavelength of the light emitting layer 13, reflection loss due to interference can be reduced. It can be suppressed and high reflection efficiency is obtained.

  Next, with reference to FIGS. 36A to 47B, a method for manufacturing the semiconductor light emitting device 5 of the fifth embodiment will be described. FIG. 36A to FIG. 47B show a partial region in the wafer state.

  36 (b), 37 (b), 38 (b), 39 (b), 40 (b), 41 (b), 42 (b), 43 (b), and 44. (B), FIG. 45 (b), and FIG. 47 (b) are respectively FIG. 36 (a), FIG. 37 (a), FIG. 38 (a), FIG. 39 (a), FIG. 41 (a), FIG. 42 (a), FIG. 43 (a), FIG. 44 (a), FIG. 45 (a), and FIG.

  As shown in FIG. 36B, after the semiconductor layer 15 including the first semiconductor layer 11, the light emitting layer 13, and the second semiconductor layer 12 is formed on the substrate 10, the entire surface of the second semiconductor layer 12 is formed. Then, the transparent electrode 95 is formed.

  Next, as shown in FIGS. 37A and 37B, a part of the laminated film of the transparent electrode 95, the second semiconductor layer 12, and the light emitting layer 13 is removed by, for example, RIE using a resist (not shown). Then, a part of the first semiconductor layer 11 is exposed. The region where the first semiconductor layer 11 is exposed becomes an n-side region 80b that does not include the transparent electrode 95, the second semiconductor layer 12, and the light emitting layer 13.

  Next, after all of the exposed portion on the substrate 10 is covered with the insulating film 71 shown in FIGS. 38A and 38B, an opening 74 is selectively formed in the insulating film 71. Further, a part of the insulating film 71 covering the surface of the transparent electrode 95 is removed as shown in FIGS. 39A and 39B to form an opening 75 in the insulating film 71 on the transparent electrode 95. .

  As shown in FIGS. 40A and 40B, an n-side via 63a is formed on the n-side electrode 61 in the opening 74, and on the insulating film 71 on the second semiconductor layer 12 between the n-side electrodes 61. The connecting portion 63 b is formed, and the p-side electrode 62 is formed on the surface of the transparent electrode 95 in the opening 75.

  Next, after all the exposed portions on the main surface of the substrate 10 are covered with the insulating film 76 shown in FIG. 41B, a part of the insulating film 76 on the p-side electrode 62 is removed to remove the first film. An opening 76a is formed, and a part of the insulating film 76 on the n-side reflective electrode 63 is removed to form a second opening 76b. The p-side electrode 62 is exposed in the first opening 76a, and the n-side reflective electrode 63 is exposed in the second opening 76b.

  Next, as shown in FIG. 42B, a metal film 64 is formed on the surface of the insulating film 76, the inner wall (sidewall and bottom) of the first opening 76a, and the inner wall (sidewall and bottom) of the second opening 76b. Form.

  Then, a resist 81 is selectively formed on the metal film 64, and Cu electrolytic plating using the metal film 64 as a current path is performed. Thereby, the p-side wiring layer 65 and the n-side wiring layer 66 are selectively formed on the metal film 64.

  Next, as shown in FIGS. 43A and 43B, a resist 82 for forming metal pillars is formed. Then, Cu electrolytic plating using the metal film 64 as a current path is performed using the resist 82 as a mask. As a result, the p-side metal pillar 67 is formed on the p-side wiring layer 65, and the n-side metal pillar 68 is formed on the n-side wiring layer 66.

  The resist 82 is removed as shown in FIG. 44B using, for example, a solvent or oxygen plasma. Thereafter, the exposed portion of the metal film 64 used as the seed metal is removed by wet etching. Thereby, as shown in FIG. 44B, the electrical connection through the metal film 64 between the p-side wiring layer 65 and the n-side wiring layer 66 is broken.

  Next, as shown in FIGS. 45A and 45B, after forming a resin layer 77 covering the p-side wiring layer 65, the n-side wiring layer 66, the p-side metal pillar 67, and the n-side metal pillar 68, The resin layer 77 is ground to expose the end face of the p-side metal pillar 67 (p-side external terminal 67 a) and the end face of the n-side metal pillar 68 (n-side external terminal 68 a) from the resin layer 77.

  Next, as shown in FIG. 46A, the substrate 10 is removed. When the substrate 10 is a sapphire substrate, the substrate 10 can be removed by, for example, a laser lift-off method. When the substrate 10 is a silicon substrate, the substrate 10 can be removed by etching.

  A phosphor layer 50 is formed on the first surface 15a exposed by removing the substrate 10 as shown in FIG. The above-described grinding process of the resin layer 77 may be performed after the removal process of the substrate 10 or may be performed after the formation of the phosphor layer 50.

  Next, the resin layer 77, the insulating film 76, the insulating film 71, the first semiconductor layer 11, and the phosphor layer 50 are cut at the position of the groove 73 shown in FIG. As shown in (b), the semiconductor light emitting devices 5 are separated into individual pieces.

  Also in this embodiment, each process described before dicing is performed collectively in a wafer state, so there is no need to perform wiring and packaging for each individual device, which is greatly reduced. Production cost can be reduced. That is, wiring and packaging have already been completed in the state of being separated. For this reason, productivity can be improved and as a result, price reduction becomes easy.

  FIG. 35 shows a modification of the semiconductor light emitting device of the third to fifth embodiments, and corresponds to one chip region in the plan view of FIG.

  That is, in the structure of FIG. 35, as in the first and second embodiments described above, the p-side region 80a, the light emitting layer 13 and the n-side region 80b and the n-side electrode 61 provided thereon are all formed around the n-side region 80b. A second semiconductor layer 12 is present.

  Therefore, a current spreads from one n-side electrode 61 to the entire peripheral region, and the current can be efficiently supplied to the entire region of the light emitting layer 13. Therefore, the entire region of the light emitting layer 13 can be made to emit light efficiently.

(Sixth embodiment)
FIG. 48 is a schematic cross-sectional view of the semiconductor light emitting device 6 of the sixth embodiment.
FIG. 50C is a schematic plan view of the semiconductor light emitting device 6 according to the sixth embodiment, and FIG. 48 corresponds to the FF ′ cross section in FIG.
FIG. 49A to FIG. 50B are schematic plan views of elements on the second surface side in the semiconductor light emitting device 6 of the sixth embodiment.

  The semiconductor light emitting device 6 of the sixth embodiment also has a semiconductor layer 15 as in the above embodiment. The semiconductor layer 15 includes a first semiconductor layer 11, a second semiconductor layer 12, and a light emitting layer 13.

  The first semiconductor layer 11 including the n-type GaN layer has a first surface 15a and a second surface provided on the opposite side of the first surface 15a. Furthermore, as shown in FIG. 49A, the second surface has a p-side region 80a and an n-side region 80b.

  A light emitting layer (active layer) 13 is provided on the p-side region 80 a on the second surface of the first semiconductor layer 11, and the second semiconductor layer 12 including a p-type GaN layer is formed on the light emitting layer 13. Is provided. The light emitting layer 13 is provided between the first semiconductor layer 11 and the second semiconductor layer 12. The light emitting layer 13 and the second semiconductor layer 12 are not provided in the n-side region 80 b on the second surface of the first semiconductor layer 11.

  A p-side electrode 62 is provided on the surface of the second semiconductor layer 12. An n-side electrode 61 is provided on the n-side region 80 b on the second surface of the first semiconductor layer 11.

  The n-side region 80b is formed by selectively removing a part of the light emitting layer 13 and the second semiconductor layer 12 formed on the entire second surface of the first semiconductor layer 11, thereby allowing the first semiconductor layer to be removed. 11 is exposed and formed.

  As shown in FIG. 49A, n-side regions 80b are formed at a plurality of locations (for example, 2 locations) per chip. As shown in FIG. 49B, an n-side electrode 61 is provided on each n-side region 80b.

  A p-side electrode 62 is also provided on the second semiconductor layer 12 sandwiched between the two n-side electrodes 61. The p-side electrode 62 is provided on the region including the light emitting layer 13, and the n-side electrode 61 is provided on the n-side region 80 b not including the light emitting layer 13.

  An insulating film 71 is provided on the p-side electrode 62. An insulating film 71 is also provided on the side surface of the n-side electrode 61, the side surface of the light emitting layer 13, the side surface of the second semiconductor layer 12, and the side surface of the p-side electrode 62.

  The p-side electrode 62 is in contact with the second semiconductor layer 12 and can form an alloy with gallium (Ga) contained in the second semiconductor layer 12, for example, nickel (Ni), gold (Au), and rhodium ( A contact layer including at least one of Rh). Furthermore, the p-side electrode 62 is provided on the contact layer, has a higher reflectance for the emitted light of the light emitting layer 13 than the contact layer, and includes a reflective layer containing, for example, silver (Ag) as a main component.

On the insulating film 71, a p-side wiring layer 65 and an n-side wiring layer 66 are provided so as to be separated from each other with a metal film 64 interposed therebetween.
FIG. 50A shows a planar layout of the p-side wiring layer 65 and the n-side wiring layer 66.

  The p-side wiring layer 65 and the n-side wiring layer 66 are formed by an electrolytic plating method as in the above embodiment. The metal film 64 is used as a seed metal at the time of plating.

  As shown in FIG. 49C, a first opening 71a reaching the p-side electrode 62 is formed in the insulating film 71, and a p-side via 65a (shown in FIG. 48) provided in the first opening 71a is formed. The p-side wiring layer 65 is electrically connected to the p-side electrode 62.

  As shown in FIG. 49C, the insulating film 71 has a second opening 71b reaching the n-side electrode 61, and an n-side via 66a (shown in FIG. 48) provided in the second opening 71b. The n-side wiring layer 66 is electrically connected to the n-side electrode 61.

  Further, the n-side wiring layer 66 is also provided on the insulating film 71 on the semiconductor layer 15 between the two n-side electrodes 61.

A p-side metal pillar 67 is provided on the p-side wiring layer 65. An n-side metal pillar 68 is provided on the n-side wiring layer 66.
FIG. 50B shows a planar layout of the p-side metal pillar 67 and the n-side metal pillar 66.

  The p-side wiring layer 65 and the p-side metal pillar 67 constitute a p-side wiring part in the present embodiment. The n-side wiring layer 66 and the n-side metal pillar 68 constitute an n-side wiring portion in the present embodiment.

  A resin layer 77 is laminated on the insulating film 71. The resin layer 77 covers the periphery of the p-side wiring portion and the periphery of the n-side wiring portion. The resin layer 77 is filled between the p-side metal pillar 67 and the n-side metal pillar 68.

  Also in the sixth embodiment, a high light output can be obtained by the light emitting layer 13 formed over a region wider than the n-side electrode 61. In addition, the n-side electrode 61 provided in a region narrower than the region including the light emitting layer 13 is drawn out to the mounting surface side as an n-side wiring layer 66 having a larger area.

  The p-side electrode 62 is connected to a p-side metal pillar 67 having an external terminal 67a at the time of mounting via a single layer wiring (p-side wiring layer 65). The n-side electrode 61 is connected to a p-side metal pillar 68 having an external terminal 68a at the time of mounting through a single layer wiring (n-side wiring layer 66).

  A phosphor layer 50 is provided on the first surface 15a. The phosphor layer 50 includes a transparent resin 51 as a transparent medium and a plurality of particulate phosphors 52 dispersed in the transparent resin 51.

  Also in the semiconductor light emitting device 6 of the sixth embodiment, the p-side electrode 62 and the n-side electrode 61 are provided on the second surface opposite to the first surface 15a, which is the main light extraction surface. Light extraction from the first surface 15a is not hindered by the electrodes.

  The n-side region 80b on the second surface of the first semiconductor layer 11 and the n-side electrode 61 provided on the n-side region 80b are scattered on the second surface in the form of dots or islands. Therefore, a uniform current distribution in the surface direction of the light emitting layer 13 can be realized while reducing the area not including the light emitting layer 13 to increase the light emitting area.

  Further, as shown in FIG. 49B, the p-side electrode 62 having high reflectivity with respect to the light emitted from the light-emitting layer 13 spreads over substantially the entire second surface. Therefore, the reflection area of the light emitted from the light emitting layer 13 to the opposite side of the light extraction surface (first surface 15a) can be increased, and high light extraction efficiency can be obtained.

  Further, as shown in FIGS. 48, 49A, and 49B, the light emitting layer 13 and the p-side electrode 62 exist all around the n-side region 80b and the n-side electrode 61. Therefore, a current spreads from one n-side electrode 61 in the direction of 360 degrees around it, and the current can be efficiently supplied to the entire region of the light emitting layer 13. Therefore, according to the present embodiment, the entire region of the light emitting layer 13 can be made to emit light efficiently.

  In the structure of the sixth embodiment, a transparent electrode may be provided between the second semiconductor layer 12 and the p-side electrode 62 as in the fifth embodiment described above. By controlling the thickness of the transparent electrode so that the distance between the light emitting layer 13 and the p-side electrode 62 is ½ of the light emitting wavelength of the light emitting layer 13, reflection loss due to interference can be suppressed and high. Reflective efficiency is obtained.

(Seventh embodiment)
51A to 51D are schematic plan views of elements on the second surface side in the semiconductor light emitting device 7 of the seventh embodiment.

  The semiconductor light emitting device 7 of the seventh embodiment includes a p-side region 80a, an n-side region 80b, a p-side electrode 62, an n-side electrode 61, a p-side wiring layer 65, an n-side wiring layer 66, a p-side metal pillar 67 and n. The planar layout of the side metal pillar 68 is different from that of the semiconductor light emitting device 6 of the sixth embodiment.

FIG. 51A corresponds to FIG. 49B of the sixth embodiment, and shows a planar layout of the p-side electrode 62 and the n-side electrode 61 in the semiconductor light emitting device 7 of the seventh embodiment.
FIG. 51B corresponds to FIG. 49C of the sixth embodiment, and shows a plan view of the insulating film 71 and the openings 71a and 71b in the semiconductor light emitting device 7 of the seventh embodiment.
FIG. 51C corresponds to FIG. 50A of the sixth embodiment, and shows a planar layout of the p-side wiring layer 65 and the n-side wiring layer 66 in the semiconductor light emitting device 7 of the seventh embodiment.
FIG. 51D corresponds to FIG. 50B of the sixth embodiment, and shows a planar layout of the p-side metal pillar 67 and the n-side metal pillar 68 in the semiconductor light emitting device 7 of the seventh embodiment.

  As in the above embodiment, the n-side region 80b is formed by selectively removing a part of the light emitting layer 13 and the second semiconductor layer 12 formed on the entire second surface of the first semiconductor layer 11. The surface of the first semiconductor layer 11 is exposed.

  N-side regions 80b are formed at a plurality of locations per chip. In the present embodiment, for example, four n-side regions 80b are formed at the four corners of the chip. An n-side electrode 61 is provided on each n-side region 80b. A p-side electrode 62 is also provided between the n-side electrodes 61 in the plan view of FIG.

  As in the above embodiment, as shown in FIG. 51C, the p-side wiring layer 65 and the n-side wiring layer 66 are provided on the insulating film 71 so as to be separated from each other.

  As shown in FIG. 51B, a first opening 71a reaching the p-side electrode 62 is formed in the insulating film 71, and a p-side wiring is formed through a p-side via provided in the first opening 71a. The layer 65 is electrically connected to the p-side electrode 62.

  Further, as shown in FIG. 51B, a second opening 71b reaching the n-side electrode 61 is formed in the insulating film 71, and n through a n-side via provided in the second opening 71b. The side wiring layer 66 is electrically connected to the n-side electrode 61.

  The plurality of n-side electrodes 61 are not connected to each other on the second surface and are separated from each other. The plurality of n-side electrodes 61 are connected to a common n-side wiring layer 66 extending on the insulating film 71.

  As shown in FIG. 51D, a p-side metal pillar 67 is provided on the p-side wiring layer 65, and an n-side metal pillar 68 is provided on the n-side wiring layer 66.

  The p-side electrode 62 is connected to the p-side metal pillar 67 through a single layer wiring (p-side wiring layer 65). The n-side electrode 61 is connected to the p-side metal pillar 68 through a single layer wiring (n-side wiring layer 66).

  Also in the seventh embodiment, a high light output can be obtained by the light emitting layer 13 formed over a region wider than the n-side electrode 61. In addition, the n-side electrode 61 provided in a region narrower than the region including the light emitting layer 13 is drawn out to the mounting surface side as an n-side wiring layer 66 having a larger area.

  The n-side region 80b and the n-side electrode 61 provided on the n-side region 80b are scattered on the second surface in the form of dots or islands. Therefore, a uniform current distribution in the surface direction of the light emitting layer 13 can be realized while reducing the area not including the light emitting layer 13 to increase the light emitting area.

  Further, as shown in FIG. 51A, the p-side electrode 62 having high reflectivity with respect to the light emitted from the light emitting layer 13 is spread over almost the entire second surface other than the four corners. Therefore, the reflection area of the light emitted from the light emitting layer 13 to the opposite side of the light extraction surface (first surface 15a) can be increased, and high light extraction efficiency can be obtained.

  52A to 52D are schematic plan views showing modifications of the planar layout of each element on the second surface side in the semiconductor light emitting device 3 of the third embodiment described above.

FIG. 52A corresponds to FIG. 25A and shows a planar layout of the p-side electrode 62, the n-side electrode 61, and the n-side reflective electrode 63.
FIG. 52B corresponds to FIG. 26A and shows a plan view of the insulating film 76 and the openings 76a and 76b.
FIG. 52C corresponds to FIG. 27A and shows a planar layout of the p-side wiring layer 65 and the n-side wiring layer 66.
FIG. 52 (d) corresponds to FIG. 29 (a) and shows a planar layout of the p-side metal pillar 67 and the n-side metal pillar 68.

  Also in this modification, n-side regions 80b are formed at a plurality of locations (for example, 3 locations) per chip, and the n-side electrode 61 is provided on each n-side region 80b. The three n-side electrodes 61 are arranged in the longitudinal direction of the chip (X direction in FIG. 25A), for example.

  In this modification, unlike the third embodiment, as shown in FIG. 52A, the p-side electrode 62 is divided into two by the n-side reflective electrode 63 in one chip. The n-side reflective electrode 63 is provided on the n-side electrode 61 and on the light emitting layer 13 between the n-side electrodes 61.

  As shown in FIG. 52B, the insulating film 76 provided on the p-side electrode 62 and the n-side reflective electrode 63 has one (second) opening 76b and two (first) p. A side opening 76a is formed.

  The opening 76 b is formed on the n-side reflective electrode 63 and communicates with the n-side reflective electrode 63. An opening 76 a is formed on each of the two p-side electrodes 62 divided by the n-side reflective electrode 63, and the opening 76 a communicates with the p-side electrode 62.

  As shown in FIG. 52C, the p-side wiring layer 65 and the n-side wiring layer 66 are provided on the insulating film 76 so as to be separated from each other.

  The p-side wiring layer 65 is electrically connected to the p-side electrode 62 through a p-side via provided in the opening 76 a formed in the insulating film 76. The n-side wiring layer 66 is electrically connected to the n-side reflective electrode 63 and the n-side electrode 61 through an n-side via provided in the opening 76 b formed in the insulating film 76.

  As shown in FIG. 52D, a p-side metal pillar 67 is provided on the p-side wiring layer 65, and an n-side metal pillar 68 is provided on the n-side wiring layer 66.

  Also in this modification, a high light output can be obtained by the light emitting layer 13 formed over a region wider than the n-side electrode 61. In addition, the n-side electrode 61 provided in a region narrower than the region including the light emitting layer 13 is drawn out to the mounting surface side as an n-side wiring layer 66 having a larger area.

  The n-side region 80b and the n-side electrode 61 provided on the n-side region 80b are scattered on the second surface in the form of dots or islands. Therefore, a uniform current distribution in the surface direction of the light emitting layer 13 can be realized while reducing the area not including the light emitting layer 13 to increase the light emitting area.

  Further, as shown in FIG. 52 (a), the p side having high reflectivity with respect to the light emitted from the light emitting layer 13 over almost the entire surface opposite to the light extraction surface (first surface 15a). The electrode 62 and the n-side reflective electrode 63 are spread. Therefore, the reflection area of the light emitted from the light emitting layer 13 to the opposite side of the light extraction surface (first surface 15a) can be increased, and high light extraction efficiency can be obtained.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 1-7 ... Semiconductor light-emitting device, 11 ... 1st semiconductor layer, 12 ... 2nd semiconductor layer, 13 ... Light emitting layer, 15 ... Semiconductor layer, 14a, 80a ... p side area | region, 14b, 80b ... n side area | region, 15a ... first surface, 16a, 62 ... p-side electrode, 17a, 61 ... n-side electrode, 21, 31, 65 ... p-side wiring layer, 22, 32, 66 ... n-side wiring layer, 23, 67 ... p Side metal pillar, 24, 68 ... n side metal pillar, 50 ... phosphor layer, 63 ... n side reflection electrode, 63a ... n side via, 63b ... connecting portion, 95 ... transparent electrode

Claims (7)

A first semiconductor layer having a first surface and a second surface provided on the opposite side of the first surface;
A light emitting layer provided on the second surface;
A second semiconductor layer provided on the light emitting layer;
A p-side electrode provided on the second semiconductor layer and having reflectivity with respect to light emitted from the light emitting layer;
A plurality of n-side electrodes provided on the second surface;
An insulating film provided on the second semiconductor layer between the plurality of n-side electrodes;
A plurality of n-side vias provided on each of the plurality of n-side electrodes, and a connecting portion provided on the insulating film and connecting the plurality of n-side vias; A high reflectance of the light emitting layer with respect to the emitted light, and an n-side reflective electrode of the same material as the p-side electrode;
A semiconductor light emitting device comprising:   The semiconductor light-emitting device according to claim 1, wherein the p-side electrode and the n-side reflective electrode contain silver.   The semiconductor light-emitting device according to claim 1, further comprising a transparent electrode provided on the second semiconductor layer between the n-side reflective electrode and the second semiconductor layer.   The semiconductor light-emitting device according to claim 1, wherein the plurality of n-side electrodes are scattered in a dot shape on the second surface. A p-side wiring layer provided on the p-side electrode;
A p-side metal pillar provided on the p-side wiring layer and thicker than the p-side wiring layer;
An n-side wiring layer provided on the n-side reflective electrode;
An n-side metal pillar provided on the n-side wiring layer and thicker than the n-side wiring layer;
The semiconductor light-emitting device according to claim 1, further comprising:   The semiconductor light-emitting device according to claim 5, further comprising a second insulating film provided between the p-side metal pillar and the n-side metal pillar.   The semiconductor light emitting device according to claim 6, wherein the second insulating film continuously covers the periphery of the p-side metal pillar and the periphery of the n-side metal pillar.

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