JP2015213128A - Thermal treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thermal treatment device capable of making improvement of energy efficiency of heater heating and quick cooling compatible.SOLUTION: In a thermal treatment device 1, a column 11 provided between a heater 5 and an active cooling plate 7 includes a heat conduction part 15 and a heat insulation part 17. When heating a mounting plate 3, a rotary drive part 13 disposes the heat conduction part 15 of the heater 11 closer to the active cooling plate 7 and disposes the heat insulation part 17 of the column 11 closer to the heater 5. Since the heat insulation part 17 is disposed closer to the heater 5, discharge of heat from the heater 5 is suppressed. Further, the heat conduction part 1 is sufficiently cooled by the active cooling plate 7. When cooling the mounting plate 3, on the other hand, the rotary drive part 13 disposes the heat conduction part 15 closer to the heater 5 and disposes the heat insulation part 17 closer to the active cooling plate 7. Since the heat conduction part 15 is disposed closer to the heater 5, heat of the mounting plate 3 is absorbed without stopping by the sufficiently cooled heat conduction part 15.

Description

  The present invention relates to a heat treatment apparatus for performing heat treatment on a substrate such as a semiconductor substrate, a glass substrate for a liquid crystal display device, a glass substrate for a photomask, or an optical disk substrate, which is placed on a placement plate.

  2. Description of the Related Art Conventionally, a substrate processing apparatus that performs a series of processes such as a coating process and a developing process on a substrate includes a heat treatment apparatus that performs a heat treatment on the substrate (see, for example, Patent Document 1).

  As shown in FIG. 11, the heat treatment apparatus is provided on the opposite side of the bake plate portion 102 that heats the placed substrate W and the substrate placement surface 102 a of the bake plate portion 102, and cools the bake plate portion 102. The cooling plate portion 104 is provided. The bake plate unit 102 includes a heater 105 for heating. On the other hand, the cooling plate unit 104 includes a water-cooled active cooling plate 107 and a passive cooling plate 111 configured to be movable between the bake plate unit 102 and the active cooling plate 107. The passive cooling plate 111 is moved up and down by an air cylinder (not shown).

  When the bake plate portion 102 is heated, the passive cooling plate 111 is lowered and brought into contact with the active cooling plate 107. Thereby, the passive cooling plate 111 is forcibly cooled by the active cooling plate 107. Further, when the bake plate portion 102 is cooled, the passive cooling plate 111 is raised and brought into contact with the bake plate portion 102. Thereby, the heat of the bake plate part 102 can be moved to the passive cooling plate 111 side. Therefore, the time required for changing the temperature of the bake plate portion 102 can be shortened.

JP 2012-238690 A

  However, the above-described heat treatment apparatus has a problem that the energy efficiency of heater heating is poor. That is, the heat treatment apparatus rapidly cools the bake plate unit 102 by raising the passive cooling plate 111 and pressing it against the bake plate unit 102. In the case of such a configuration, the surface 102b of the bake plate portion 102 that comes into contact with the passive cooling plate 111 needs to be configured with a member having high thermal conductivity. However, if the surface 102b is made of a material having a high thermal conductivity, the surface 102b having a high thermal conductivity is exposed to the air when the bake plate portion 102 is heated, and heat is released from the surface 102b. End up. That is, an air flow exists in the gap between the bake plate portion 102 and the movable cooling plate 111, and the air flow in contact with the bake plate portion 102 takes heat from the bake plate portion 102.

  Further, when the surface 102b is exposed to the air, the surface 102b is easily affected by the temperature change, and the in-plane temperature uniformity may be lost. Therefore, there is a problem that a stable heat treatment for the substrate W cannot be realized.

  This invention is made | formed in view of such a situation, Comprising: It aims at providing the heat processing apparatus which can make improvement of the energy efficiency of heater heating and rapid cooling compatible.

In order to achieve such an object, the present invention has the following configuration.
That is, a heat treatment apparatus according to the present invention includes a mounting plate for mounting a substrate, a heater provided on the opposite side of the mounting plate on which the substrate is mounted, and heating the mounting plate, An active cooling plate that is provided on the opposite side of the mounting plate with the heater interposed therebetween and that is separated from the heater, is provided between the heater and the active cooling plate, and is provided between the heater and the active cooling plate. A passive cooling unit having a heating part, and the heating plate is arranged on the active cooling plate side and the heat insulating part is arranged on the heater side when the mounting plate is heated. In some cases, the heat transfer section is disposed on the heater side, and the drive section is disposed on the active cooling plate side.

  According to the heat treatment apparatus according to the present invention, the passive cooling unit provided between the heater and the active cooling plate has a heat transfer unit and a heat insulating unit. A drive part arrange | positions the heat-transfer part of a passive cooling part to the active cooling plate side, and arrange | positions the heat insulation part of a passive cooling part to the heater side at the time of heating of a mounting plate. Since the heat insulating portion is disposed on the heater side, the release of heat from the heater can be suppressed. Further, since the heat transfer section is disposed on the active cooling plate side, the heat transfer section can be sufficiently cooled by the active cooling plate. On the other hand, the drive unit arranges the heat transfer unit on the heater side and the heat insulating unit on the active cooling plate side when the mounting plate is cooled. Since the heat transfer part is arranged on the heater side, the heat of the mounting plate can be absorbed at once by the sufficiently cooled heat transfer part. Therefore, improvement in energy efficiency of heater heating and rapid cooling can both be achieved.

  In addition, since the heat insulating part is arranged on the heater side when the mounting plate is heated, the in-plane temperature of the mounting surface of the mounting plate is uniform due to the influence of the temperature change caused by the surface of the heater being exposed to the air. It is possible to suppress the possibility of the loss of sex. Therefore, stable heat treatment for the substrate W can be realized.

  Moreover, arrangement | positioning with the heat-transfer part and heat insulation part in a passive cooling part is replaced at the time of the heating of a mounting plate, and cooling. Therefore, it is possible to suppress the installation area from expanding in the direction along the mounting surface of the substrate of the mounting plate.

  Further, in an example of the heat treatment apparatus according to the present invention, the passive cooling unit is rotatably provided between the heater and the active cooling plate, and is configured in a plurality along the opposite surface, When each of the passive cooling units is divided into two regions, one region is configured by the heat transfer unit, the other region is configured by a heat insulating unit, and the driving unit rotates the passive cooling unit. is there. Thereby, the drive part can replace arrangement | positioning of the heat-transfer part and heat insulation part which were formed in the passive cooling part by rotating a passive cooling part.

  Further, in the heat treatment apparatus according to the present invention, the heater side heat transfer assist provided on the surface of the heater on the active cooling plate side and formed with a plurality of recesses corresponding to the shape of the plurality of rotatable passive cooling units. A plurality of recesses corresponding to the shapes of the plurality of passive cooling units that are rotatable and provided on the heater-side surface of the active cooling plate with a clearance from the heater-side heat transfer auxiliary unit. It is preferable to further include an active cooling plate side heat transfer auxiliary part formed. Thereby, the heater side heat transfer auxiliary part and the active cooling plate side heat transfer auxiliary part can easily come into contact with the heat transfer part of the passive cooling part, and heat can be easily transferred. The heater side heat transfer auxiliary part fills the space between the heater and the passive cooling part, and the active cooling plate side heat transfer auxiliary part fills the space between the active cooling plate and the passive cooling part. It is possible to suppress the air that circulates and to prevent the heat from being taken away.

  Moreover, in the heat treatment apparatus according to the present invention, the passive cooling unit is configured by a plurality of columns arranged in parallel, and each of the columns is divided into two regions along a plane along the central axis. It is preferable that one region is configured by the heat transfer unit, the other region is configured by the heat insulating unit, and the driving unit rotates the column body around a central axis of the column body. Thereby, the drive part can replace arrangement | positioning of the heat-transfer part and heat insulation part which were formed in the pillar body by rotating a pillar body.

  Further, in the heat treatment apparatus according to the present invention, the passive cooling unit is configured by any of a plurality of spheres and polyhedrons arranged in a two-dimensional manner, and each of the spheres or the polyhedrons includes a permanent magnet, When each of the sphere or the polyhedron is divided into two regions, one region is configured by the heat transfer unit, the other region is configured by the heat insulating unit, the drive unit is configured by an electromagnet, and the electromagnet It is preferable that the sphere or the polyhedron is rotated by the magnetic force of. Thereby, the drive part can replace arrangement | positioning of the heat-transfer part and heat insulation part which were formed in the sphere or a polyhedron by rotating a sphere or a polyhedron.

  An example of the heat treatment apparatus according to the present invention is such that the passive heat transfer section is provided in contact with the heater and the active cooling plate, and includes a sealed container that accommodates either a vacuum layer or a gas layer, and the sealed container. A heat transfer section provided in the interior, wherein the driving section moves the heat transfer section between the inner wall on the heater side and the inner wall on the cooling plate side in the sealed container. The heat insulation part of the passive heat transfer part is either a vacuum layer or a gas layer housed in a sealed container. The drive unit can change the arrangement of the heat transfer unit and any of the vacuum layer and the gas layer functioning as a heat insulating unit by moving the heat transfer unit.

  According to the heat treatment apparatus according to the present invention, the passive cooling unit provided between the heater and the active cooling plate has a heat transfer unit and a heat insulating unit. A drive part arrange | positions the heat-transfer part of a passive cooling part to the active cooling plate side, and arrange | positions the heat insulation part of a passive cooling part to the heater side at the time of heating of a mounting plate. Since the heat insulating portion is disposed on the heater side, the release of heat from the heater can be suppressed. Further, since the heat transfer section is disposed on the active cooling plate side, the heat transfer section can be sufficiently cooled by the active cooling plate. On the other hand, the drive unit arranges the heat transfer unit on the heater side and the heat insulating unit on the active cooling plate side when the mounting plate is cooled. Since the heat transfer part is arranged on the heater side, the heat of the mounting plate can be absorbed at once by the sufficiently cooled heat transfer part. Therefore, improvement in energy efficiency of heater heating and rapid cooling can both be achieved.

It is a longitudinal cross-sectional view which shows schematic structure of the heat processing apparatus which concerns on Example 1, and shows the state at the time of the mounting plate heating. It is a top view which shows the structure of a cylinder. It is a side view which shows the structure of a rotation drive part. (A) is a figure for demonstrating operation | movement of a cylinder, (b) is a figure which shows the state at the time of cooling of a mounting plate. (A) is a longitudinal cross-sectional view which shows the schematic structure of the heat processing apparatus which concerns on Example 2, and shows the state at the time of the heating of a mounting plate, (b) is a figure which shows the state at the time of cooling of a mounting plate. It is. It is a top view which shows the structure of a spherical body. (A) is a longitudinal cross-sectional view which shows the schematic structure of the heat processing apparatus which concerns on Example 3, and shows the state at the time of the heating of a mounting plate, (b) is a figure which shows the state at the time of cooling of a mounting plate. It is. It is a top view which shows the structure of a plate-shaped heat-transfer part. 6 is a longitudinal sectional view showing a schematic configuration of a heat treatment apparatus according to a modification of Example 3. FIG. 6 is a longitudinal sectional view showing a schematic configuration of a heat treatment apparatus according to a modification of Example 3. FIG. It is a longitudinal cross-sectional view which shows schematic structure of the conventional heat processing apparatus.

  Embodiment 1 of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view showing a schematic configuration of the heat treatment apparatus according to the first embodiment and showing a state when the mounting plate is heated. FIG. 2 is a plan view showing the configuration of the cylinder, and FIG. 3 is a side view showing the configuration of the rotation drive unit. FIG. 4A is a diagram for explaining the operation of the cylinder, and FIG. 4B is a diagram illustrating a state when the mounting plate is cooled.

  Please refer to FIG. The heat treatment apparatus 1 is provided in a substrate processing apparatus together with a coating processing apparatus such as a resist and a development processing apparatus after exposure. The heat treatment apparatus 1 is provided on a placement plate 3 on which the substrate W is placed and a surface 3 b opposite to the placement surface 3 a on which the substrate W is placed, and heats the placement plate 3. A heater 5 and an active cooling plate 7 that is provided on the opposite side of the mounting plate 3 with the heater 5 interposed therebetween and spaced from the heater 5 and cools itself are provided.

  The mounting plate 3 is made of a metal material such as Fe (iron), a metal material having a high thermal conductivity such as Al (aluminum) or Cu (copper), an alloy thereof, and a high thermal conductivity such as SiC (silicon carbide). It is comprised with either of the ceramics which have a rate. The heater 5 uniformly heats the flat surface of the substrate W. For example, the heater 5 includes a plurality of zones arranged two-dimensionally along the placement surface 3b of the substrate W of the placement plate 3. It consists of a heater.

  The active cooling plate 7 is composed of a metal material such as Fe, a metal material having high thermal conductivity such as Al or Cu, an alloy thereof, or a ceramic such as SiC. A passage 7a through which cooling water flows is formed in the active cooling plate 7, and the cooling water is supplied by a pump (not shown). The cooling water is always supplied during the operation of the heat treatment apparatus 1, that is, when the mounting plate 3 is heated and when the mounting plate 3 is cooled.

<Cylinder 11 and Rotation Drive Unit 13>
The outline of the characteristic part of the present invention will be described. As shown in FIG. 1, a plurality of cylinders 11 are provided as a passive cooling unit provided between the heater 5 and the active cooling plate 7. The cylinder 11 includes a heat transfer unit 15 and a heat insulating unit 17. The cylinder 11 is rotated by the rotation drive unit 13. The rotation drive unit 13 corresponds to the drive unit of the present invention.

  When the mounting plate 3 is heated by the heater 5, the rotation driving unit 13 arranges the heat transfer unit 15 on the active cooling plate 7 side and arranges the heat insulating unit 17 on the heater 5 side as shown in FIG. Further, when the mounting plate 3 is cooled, the rotation driving unit 13 arranges the heat transfer unit 15 on the heater 5 side and arranges the heat insulating unit 17 on the active cooling plate 7 side as shown in FIG. .

  Thereby, since the heat insulation part 17 is arrange | positioned at the heater 5 side at the time of the heating of the mounting plate 3, in the heater 5 side, it heat-insulates and heating efficiency improves. In addition, the possibility that the in-plane temperature uniformity of the mounting plate 3 is lost due to the influence of exposure of the highly heat-conductive surface to the air is reduced, and stable heat treatment for the substrate W can be realized. Further, when the mounting plate 3 is cooled, the sufficiently cooled heat transfer section 15 is disposed on the heater 5 side, so that the heat of the mounting plate 3 can be absorbed at a stretch.

  Next, details of the cylinder 11 and the rotation drive unit 13 will be described. The cylinder 11 is provided between the heater 5 and the active cooling plate 7. The cylinder 11 includes a heat transfer unit 15 and a heat insulating unit 17. As shown in FIG. 2, the cylinder 11 is composed of a plurality, and is arranged in parallel along the opposite surface 3 b on which the substrate W of the placement plate 3 is placed. The heat transfer section 15 and the heat insulation section 17 are both semi-cylindrical, and the column 11 is composed of a semi-columnar heat transfer section 15 and a semi-columnar heat insulation section 17. That is, when each of the cylinders 11 is divided into two regions on the surface along the central axis C, one half region is constituted by the heat transfer portion 15 and the other half region is constituted by the heat insulating portion 17.

  The cylinder 11 may be formed of an elliptic cylinder or a polygonal prism such as an octagon. Also in this case, similarly to the cylinder 11, for example, when divided into two regions by a plane along the central axis C of the elliptical cylinder, one half region is constituted by the heat transfer portion 15 and the other half region is the heat insulating portion. 17. The central axis C is a line orthogonal to the center of the bottom surface (for example, a circle in the case of a cylinder) of a column body such as the cylinder 11, the elliptic cylinder, and the prism. Moreover, when the heat insulation part 17 of column bodies, such as the column 11, is comprised with a vacuum layer etc., you may call column bodies, such as the column 11, cylindrical bodies, such as a cylinder.

  The heat transfer section 15 is composed of any one of a metal material such as Fe, a metal material having a high thermal conductivity such as Al and Cu, an alloy thereof, and a ceramic such as SiC.

  On the other hand, the heat insulation part 17 is comprised with the heat insulating material, the airtight container which accommodated the vacuum layer, and what combined them. As a heat insulating material, it is comprised with what has heat resistance, The airtight container which accommodated resin, such as Teflon (trademark), foaming moldings, such as resin, and fibrous materials, such as glass wool and asbestos, is mentioned. In addition, you may make it use a well-known material as a heat insulating material. Moreover, the vacuum layer accommodated in the sealed container is a decompressed gas layer. Moreover, it may replace with a vacuum layer and may accommodate the gas layer which is not pressure-reduced in an airtight container. The sealed container may be made of any metal such as Fe and glass. The heater 5 heats the mounting plate 3 to a maximum of about 400 ° C., and a heat insulating material is selected depending on the heating temperature.

  The cylinder 11 is supported, for example, by a housing (not shown) of the heat treatment apparatus 1 so as to be rotatable around the central axis C. The cylinder 11 is rotated around the central axis C by the rotation drive unit 13. That is, the heat treatment apparatus 1 includes a rotation drive unit 13 that rotates the column 11 around the central axis C of the column 11.

  For example, as shown in FIG. 3, the rotation drive unit 13 includes a cylinder 19 such as an air cylinder composed of a piston 19 a that is a movable part and a cylinder body 19 b that is a fixed part, a rack 21 that is fixed to the piston 19 a, A pinion 23 fixed to the central axis C of each column 11 for meshing with the rack 21 is provided. The air cylinder 19 rotates the pinion 23 that meshes with the rack 23 by moving the piston 19 forward and backward. The pinion 23 is fixed to the cylinder 11, and the cylinder 11 rotates with the rotation of the pinion 23. Note that the rotation drive unit 13 may be driven by a motor so as to transmit rotation to the cylinder 11 by a belt or a chain.

  Further, as shown in FIG. 1, the heater 5 side heat transfer assisting portion 25 is provided on the active cooling plate 7 side surface 5 a of the heater 5, while the heater 5 side surface 7 b of the active cooling plate 7 is provided on the surface 5 b. A heat transfer auxiliary part 27 on the active cooling plate 7 side is provided. Moreover, the heat-transfer auxiliary | assistant part 25 and the heat-transfer auxiliary | assistant part 27 have a clearance gap. The transmission assisting portions 25 and 27 are formed with a plurality of concave curved surfaces 25 a and 27 a corresponding to the shapes of the plurality of rotatable cylinders 11. The concave curved surfaces 25a and 27a may be a combination of flat surfaces instead of curved surfaces as necessary. The concave curved surfaces 25a and 27a correspond to the concave portions of the present invention.

  Further, the heat treatment apparatus 1 includes a control unit 29 and an operation unit 31. The control unit 29 comprehensively controls each component of the heat treatment apparatus 1. The control unit 29 includes a central processing unit (CPU). The operation unit 31 operates the heat treatment apparatus 1 and includes, for example, a touch panel and various switches. The operation unit 31 may be configured by a personal computer and input an operation using a mouse, a keyboard, or the like.

<Operation of heat treatment equipment>
Next, the operation of the heat treatment apparatus 1 will be described. The substrate W is transported to the mounting plate 3. The substrate W is transported by a transport mechanism (not shown). The control unit 29 controls each component in order to heat and cool the mounting plate 3.

  The heater 5 heats the placement plate 3. The heater 5 may be heated after the substrate W is placed on the placement plate 3 or before the substrate W is placed on the placement plate 3. When the mounting plate 3 is heated by the heater 5, the substrate W is also heated together with the mounting plate 3.

At the time of heating the mounting plate 3, as shown in FIG.
The semi-cylindrical heat transfer section 15 is disposed on the active cooling plate 7 side, while the semi-cylindrical heat insulating section 17 is disposed on the heater 5 side. When the heat insulating portion 17 of the column 11 is disposed between the heater 5 and the heat transfer portion 15 and covers the heater 5, heat input / output between the heater 5 and the active cooling plate 7 is cut off. Therefore, first, the heater 5 can efficiently heat the mounting plate 3. Further, the heat transfer section 15 of the cylinder 11 is sufficiently cooled by the cooling water of the active cooling plate 7. Therefore, the active cooling plate 7 can cool the heat transfer part 15 of the column 11 efficiently.

  The heating of the mounting plate 3 includes the processing of the substrate W, the temperature of the mounting plate 3, and the standby time when the substrate W does not exist on the mounting plate 3. In addition, during the processing of the substrate W and during standby, in order to maintain the temperature of the mounting plate 3, intermittent heating that repeats heating of the heater 5 and stopping of heating is also included. That is, the heating of the mounting plate 3 includes continuous heating and intermittent heating.

  In addition, when the mounting plate 3 is cooled after the mounting plate 3 is heated, the rotation driving unit 13 rotates the column 11 as shown in FIG. That is, as shown in FIG. 4B, the rotation driving unit 13 rotates the column 11 by 180 °, arranges the heat transfer unit 15 of the column 11 on the heater 5 side, and actively cools the heat insulating unit 17 of the column 11. It arrange | positions at the plate 7 side.

  When the heat transfer unit 15 of the cylinder 11 is disposed on the heater 5 side, the heat transfer unit 15 can absorb the heat on the heater 5 side at once. Therefore, the cooling time can be performed in a short time. Moreover, since the heat insulation part 17 is arrange | positioned between the active cooling plate 7 and the heat-transfer part 15, the active cooling plate 7 itself can fully be cooled with cooling water.

  In addition, when cooling by the heat-transfer part 15 of the cylinder 11 is not enough at the time of cooling of the mounting plate 3 of FIG.4 (b), the cylinder 11 is rotated again to the state of FIG. After the heat transfer section 15 is sufficiently cooled, the cylinder 11 may be rotated to the state shown in FIG. Moreover, you may be in the state of Fig.4 (a).

  According to the present embodiment, the column 11 provided between the heater 5 and the active cooling plate 7 has the heat transfer section 15 and the heat insulating section 17. The rotation drive unit 13 arranges the heat transfer unit 15 of the column 11 on the active cooling plate 7 side and arranges the heat insulation unit 17 of the column 11 on the heater 5 side when the mounting plate 3 is heated. Since the heat insulating portion 17 is disposed on the heater 5 side, the release of heat from the heater 5 can be suppressed. Further, since the heat transfer section 15 is disposed on the active cooling plate 7 side, the heat transfer section 15 can be sufficiently cooled by the active cooling plate 7. On the other hand, the rotation drive unit 13 arranges the heat transfer unit 15 on the heater 5 side and the heat insulation unit 15 on the active cooling plate 7 side when the mounting plate 3 is cooled. Since the heat transfer section 15 is disposed on the heater 5 side, the heat of the mounting plate 3 can be absorbed at once by the sufficiently cooled heat transfer section 15. Therefore, improvement in energy efficiency of heater heating and rapid cooling can both be achieved.

  Further, since the heat insulating portion 17 is disposed on the heater 5 side when the mounting plate 3 is heated, the mounting plate 3 is mounted due to the influence of a temperature change caused by exposure of the surface 5a on the heater 5 side to the air. The possibility that the in-plane temperature uniformity of the surface 3a is lost can be suppressed. Therefore, stable heat treatment for the substrate W can be realized.

  Further, when each of the cylinders 11 is divided into two regions along the surface along the central axis C, one half region (half cylinder) is constituted by the heat transfer section 15 and the other half region (half cylinder) is thermally insulated. The unit 17 is configured. Thereby, the rotation drive part 13 can replace arrangement | positioning of the heat-transfer part 15 and the heat insulation part 17 which were formed in the cylinder 11 by rotating the cylinder 11. FIG.

  Further, the arrangement of the heat transfer section 15 and the heat insulating section 17 in the cylinder 11 is switched during heating and cooling of the mounting plate 3. Therefore, it is possible to suppress the installation area from expanding in the direction along the placement surface 3 a of the substrate W of the placement plate 3. For example, when the mounting plate 3 is heated, the heat insulating portion covers the heater 5, and when the mounting plate 3 is cooled, the space between the heater 5 and the active cooling plate 7 extends along the surface 5 a of the heater 5, and the heat insulating portion extends in the lateral direction. Suppose that there is a configuration to slide. In this case, the installation area increases.

  Further, the heat treatment apparatus 1 is provided on the surface 5a of the heater 5 on the active cooling plate 7 side, and the transmission on the heater 5 side in which a plurality of concave curved surfaces 25a are formed corresponding to the shape of the plurality of rotatable columns 11 is provided. Corresponding to the shape of the plurality of rotatable cylinders 11 provided on the surface 7b on the heater 5 side of the heat auxiliary part 25 and the active cooling plate 7 with a gap from the heat transfer auxiliary part 25 on the heater 5 side. And a heat transfer auxiliary portion 27 on the active cooling plate 7 side on which a plurality of concave curved surfaces 27a are formed. Thereby, the heat transfer auxiliary part 25 on the heater 5 side and the heat transfer auxiliary part 27 on the active cooling plate 7 side can easily come into contact with the heat transfer part 15 of the column 11, and heat can be easily transferred. In addition, the heat transfer auxiliary part 25 fills the space between the heater 5 and the cylinder 11, and the heat transfer auxiliary part 27 fills the space between the active cooling plate 7 and the cylinder 11, so that the circulating air It is possible to suppress the heat from being taken away.

  Next, Embodiment 2 of the present invention will be described with reference to the drawings. FIG. 5A is a longitudinal sectional view illustrating a schematic configuration of the heat treatment apparatus according to the second embodiment and illustrating a state during heating of the mounting plate. FIG.5 (b) is a figure which shows the state at the time of cooling of a mounting plate. FIG. 6 is a plan view showing the configuration of a sphere. In addition, the description which overlaps with Example 1 is abbreviate | omitted.

  In Example 1 mentioned above, the several cylinder 11 arrange | positioned in parallel was demonstrated as a passive cooling part. The cylinder 11 includes a semi-cylindrical heat transfer section 15 and a semi-cylindrical heat insulating section 17, and the rotation driving section 13 rotates the cylinder 11 around the central axis C of the cylinder 11. In the second embodiment, as shown in FIG. 5A, a sphere 33 is provided as a passive cooling unit in place of the column 11 of the first embodiment.

  The heat treatment apparatus 1 is provided between the heater 5 and the active cooling plate 7, and is two-dimensionally arranged along the opposite surface 3b on which the substrate W of the placement plate 3 is placed as shown in FIG. A plurality of spheres 33 are provided. The sphere 33 includes a semi-spherical heat transfer section 15 and a semi-spherical heat insulation section 17, and the sphere 33 further includes a permanent magnet 35. The heat transfer section 15 of the sphere 33 is made of a nonmagnetic material such as Al or Cu. The heat insulating portion 17 is also made of a nonmagnetic material as a material for the sealed container. The sphere 33 is placed on the heat transfer auxiliary unit 27 on the active cooling plate 7 side.

  The rotation drive unit 13 is provided on the opposite side of the sphere 33 with the active cooling plate 7 interposed therebetween. The rotation drive unit 13 is composed of a magnet capable of switching between N pole and S pole, and is composed of, for example, an electromagnet. 5A and 5B, the permanent magnet 35 has an N pole disposed on the heat transfer section 15 side and an S pole disposed on the heat insulation section 17 side. The arrangement of the poles and the S poles may be reversed.

  The active cooling plate 7 and the metal parts such as the heat transfer auxiliary portion 27 on the active cooling plate 7 side are made of a non-magnetic material such as Al or Cu so that the rotation of the sphere 33 by the rotation driving unit 13 is not hindered. Has been.

  Next, operation | movement of the heat processing apparatus 1 of Example 2 is demonstrated. When the mounting plate 3 is heated, the rotation driving unit 13 sets the active cooling plate 7 side to the S pole as shown in FIG. Thereby, the south pole heat insulation part 17 repels the south pole of the electromagnet of the rotation drive part 13, and the north pole heat transfer part 15 is attracted to rotate the sphere 33. Therefore, the N pole heat transfer section 15 is disposed on the active cooling plate 7 side, and the S pole heat insulation section 17 is disposed on the heater 5 side.

  Further, when the mounting plate 3 is cooled, the rotation driving unit 13 sets the active cooling plate 7 side to the N pole as shown in FIG. As a result, the N-pole heat transfer section 15 repels the N-pole of the electromagnet of the rotary drive section 13, and the S-pole heat insulation section 17 is attracted to rotate the sphere 33. Therefore, the N-pole heat transfer section 15 is disposed on the heater 5 side, and the S-pole heat insulation section 17 is disposed on the active cooling plate 7 side.

  According to the present embodiment, the passive cooling section is composed of a plurality of spheres 33 that are two-dimensionally arranged. Each of the spheres 33 has a permanent magnet 35. When the spheres 33 are divided into two regions, one half region is constituted by the heat transfer portion 15 and the other half region is constituted by the heat insulating portion 17. Yes. And the rotation drive part 13 is comprised with the electromagnet, and rotates the spherical body 33 with the magnetic force of an electromagnet. Thereby, the rotation drive part 13 can replace the arrangement | positioning of the heat-transfer part 15 and the heat insulation part 17 which were formed in the spherical body 33 by rotating the spherical body 33. FIG.

  In the second embodiment, the sphere 33 is used as the passive cooling unit. However, a polyhedron such as a truncated icosahedron may be used.

  Next, Embodiment 3 of the present invention will be described with reference to the drawings. FIG. 7A is a longitudinal sectional view illustrating a schematic configuration of the heat treatment apparatus according to the third embodiment and illustrating a state during heating of the mounting plate. FIG.7 (b) is a figure which shows the state at the time of cooling of a mounting plate. FIG. 8 is a plan view showing the configuration of the plate-shaped heat transfer section. In addition, the description which overlaps with Example 1 and 2 is abbreviate | omitted.

  In Example 1 and 2 mentioned above, the position of the heat-transfer part 15 or the heat insulation part 17 is replaced by using the cylinder 11 or the sphere 33 as a passive cooling part, and rotating the cylinder 11 or the sphere 33 with the rotation drive part 13. It was. In this regard, in Example 3, the heat transfer unit 45 is provided in the sealed container 43 in which the vacuum layer 41 is formed.

  As shown in FIG. 7A, the heat treatment apparatus 1 according to the third embodiment includes a passive cooling container 47 provided between the heater 5 and the active cooling plate 7 and a moving drive unit that moves a heat transfer unit 45 described later. 49. The passive cooling container 47 corresponds to the passive cooling unit of the present invention, and the movement driving unit 49 corresponds to the driving unit of the present invention.

  The passive cooling container 47 includes a sealed container 43 that accommodates the vacuum layer 41 in an internal space, and a heat transfer unit 45 provided in the sealed container 43. The sealed container 43 and the heat transfer unit 45 are made of a nonmagnetic metal material having high thermal conductivity such as Al or Cu. The sealed container 43 is provided in contact with the heater 5 and the active cooling plate 7. As shown in FIGS. 7A and 8, the heat transfer unit 45 is configured in a plate shape and includes at least one permanent magnet 35. In the permanent magnet 35, the south pole faces the heater 5 side, and the north pole faces the active cooling plate 7 side.

  Moreover, the movement drive part 49 is comprised with the electromagnet similarly to the rotation drive part 13 of Example 2, and moves the heat-transfer part 45 between the heater 5 and the active cooling plate 7. As shown in FIG. Yes.

  Next, operation | movement of the heat processing apparatus 1 of Example 3 is demonstrated. When the mounting plate 3 is heated, the movement drive unit 49 sets the active cooling plate 7 side to the S pole as shown in FIG. As a result, the heat transfer unit 45 is attracted to the inner wall on the active cooling plate 7 side in the sealed container 43 with respect to the S pole of the electromagnet of the movement drive unit 49. Therefore, the heat transfer part 45 is arranged on the active cooling plate 7 side, and the vacuum layer 41 functioning as a heat insulating part is arranged on the heater 5 side. In addition, the movement drive part 49 may arrange | position the heat-transfer part 45 to the active cooling plate 7 side by the dead weight of the heat-transfer part 45, without generating magnetic force at the time of the mounting plate 3 heating.

  Further, when the mounting plate 3 is cooled, the movement drive unit 49 sets the active cooling plate 7 side to the N pole as shown in FIG. As a result, the heat transfer section 45 repels and moves to the inner wall on the heater 5 side in the sealed container 43. Therefore, the heat transfer part 45 is disposed on the heater 5 side, and the vacuum layer 41 functioning as a heat insulating part is disposed on the active cooling plate 7 side.

  Although the vacuum layer 41 is formed in the internal space of the sealed container 43, a gas layer such as air may be used. That is, either the vacuum layer 41 or the gas layer is formed in the internal space of the sealed container 43. Moreover, you may provide the guide 51 for moving the heat-transfer part 45 stably like the broken line of Fig.7 (a).

  According to the present embodiment, the heat insulating portion is the vacuum layer 41 accommodated in the sealed container 43 provided in contact with the heater 5 and the active cooling plate 7. The heat transfer unit 45 is formed in a plate shape and is provided in the sealed container 43. The movement drive unit 49 moves the heat transfer unit 45 provided in the sealed container 43 between the inner wall on the heater 5 side and the inner wall on the active cooling plate 7 side in the sealed container 43. Thereby, when the heat-transfer part 45 is located in the inner wall by the side of the active cooling plate 7, the vacuum layer 41 by the side of the heater 5 functions as a heat insulation part. On the other hand, when the heat transfer part 45 is located on the inner wall on the heater 5 side, the vacuum layer 41 on the active cooling plate 7 side functions as a heat insulating part. Thereby, the movement drive part 49 can change arrangement | positioning of the heat-transfer part 45 and the heat insulation part by moving the heat-transfer part 45. FIG.

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) In Example 1 mentioned above, the cylinder 11 was driven by the cylinder 19 etc. as shown in FIG. In this regard, as in the second embodiment, the permanent magnet 35 may be provided on the cylinder 11, and the rotation driving unit 13 may be configured by an electromagnet. The rotation drive unit 13 rotates the column 11 by the magnetic force of the electromagnet.

  (2) In Example 1 mentioned above, in FIG. 1, a clearance gap exists between the heat-transfer part 15 of the cylinder 11, and the heat-transfer auxiliary | assistant part 27 by the side of the active cooling plate 7, and in FIG. There is a gap between the heat transfer section 15 of 11 and the heat transfer auxiliary section 25 on the heater 5 side. In this regard, the rotation drive unit 13 may be configured to move the column 11 in the vertical direction, that is, to the heater 5 side and the active cooling plate 7 side in addition to the rotation of the column 11. Thereby, in FIG. 1, after making the cylinder 11 into the state of FIG. 1, the heat-transfer part 15 of the cylinder 11 is made to contact the heat-transfer auxiliary | assistant part 27 by the side of the active cooling plate 7. FIG. 4B, after the cylinder 11 is brought into the state of FIG. 4B, the heat transfer section 15 of the cylinder 11 is brought into contact with the heat transfer auxiliary section 25 on the heater 5 side. The rotation drive unit 13 is composed of an air cylinder, a motor, or the like, and moves in the vertical direction of the column 11.

  (3) In Example 2 mentioned above, a clearance gap exists between the heat-transfer part 15 and the heat-transfer auxiliary | assistant part 25 by the side of the heater 5 like FIG.5 (b). In this regard, the rotation driving unit 13 may be configured to move the sphere 33 in the vertical direction in addition to the rotation of the sphere 33. After the sphere 33 is brought into the state shown in FIG. 5B, the rotation drive unit 13 raises at least the heat transfer auxiliary unit 27 on which the sphere 33 is placed, so that the heat transfer unit 15 of the sphere 33 is moved to the heater 5 side. You may make it contact the heat-transfer auxiliary | assistant part 25. FIG. In addition, the rotation drive unit 13 may lower the placement plate 3, the heater 5, and the heat transfer auxiliary unit 25 to bring the heat transfer auxiliary unit 25 into contact with the heat transfer unit 15 of the sphere 33. The rotation drive unit 13 is configured by an air cylinder, a motor, or the like.

  (4) In Embodiments 1 and 2 and Modifications (1) to (3) described above, the active cooling plate 7 and the heat transfer auxiliary unit 27 are configured separately as shown in FIG. The plate 7 and the heat transfer auxiliary part 27 may be integrally formed.

  (5) In Example 3 mentioned above, the heat-transfer part 45 provided in the internal space of the airtight container 43 and having the permanent magnet 35 was moved by the movement drive part 49 comprised with an electromagnet. In this regard, the movement drive unit may be configured to mechanically move the heat transfer unit 45. For example, as shown in FIG. 9, the movement drive unit is configured to mesh with the motor 61, the screw shaft 63 that transmits the rotation of the motor 61, and the thread of the screw shaft 63, and the rotational motion of the screw shaft 63 is linearly moved. And a guide 67 for guiding the heat transfer section 45 between the heater 5 and the active cooling plate 7. The movement drive unit can move the heat transfer unit 45 between the heater 5 and the active cooling plate 7 by rotating the motor 61. In this case, the internal space of the sealed container 43 is configured to maintain a vacuum. In addition, you may comprise with a cylinder like FIG. In this case, the cylinder body may be provided outside the sealed container 43.

  (6) In Example 3 mentioned above, the heat-transfer part 45 was comprised with the plate-shaped object. In this regard, for example, the heat transfer section 71 may be configured with either a powdered material or a granular material. That is, as shown in FIG. 10, a heat transfer portion 71 configured by either a powdery material or a granular material is provided in the internal space of the sealed container 43. The heat transfer section 71 is made of a magnetic material such as Fe. In addition, the movement drive unit 73 composed of an electromagnet is provided between the heater 5 and the sealed container 43. A heat transfer assisting part 75 that comes into contact with the heater 5 and the passive cooling container 47 is provided between the adjacent movement drive parts 73.

  When the mounting plate 3 is heated, the movement driving unit 73 does not generate a magnetic force by the electromagnet. Therefore, the heat transfer part 71 comprised by either a powdery material or a granular material is arrange | positioned at the active cooling plate 7 side with dead weight. In FIG. 10, the heat transfer part 71 is shown with a broken line. On the other hand, when the mounting plate 3 is cooled, the movement drive unit 73 generates a magnetic force by the electromagnet and sucks the heat transfer unit 71. In FIG. 10, the movement drive unit 73 generates an N pole on the active cooling plate 7 side. Thereby, like the heat transfer part 71 of a continuous line, the heat transfer part 71 is arrange | positioned at the movement drive part 73 and the heater 5 side.

DESCRIPTION OF SYMBOLS 1 ... Heat processing apparatus 3 ... Mounting plate 3a ... Mounting surface 3b ... Opposite surface 5 ... Heater 5a ... Active cooling plate side surface of heater 7 ... Active cooling plate 7b ... Heater side surface of active cooling plate 11 ... Cylinder 13 ... Rotation drive part 15, 45, 71 ... Heat transfer part 17 ... Heat insulation part 25, 27, 75 ... Heat transfer auxiliary part 25a, 27a ... Concave curved surface 29 ... Control part 33 ... Spherical body 35 ... Permanent magnet 41 ... Vacuum Layer 43 ... Sealed container 47 ... Passive cooling container 49, 73 ... Movement drive unit W ... Substrate

Claims (6)

A mounting plate for mounting a substrate;
A heater that is provided on the opposite surface on which the substrate of the mounting plate is mounted, and that heats the mounting plate;
An active cooling plate that is provided on the opposite side of the mounting plate with the heater interposed therebetween and separated from the heater, and cools itself;
A passive cooling unit provided between the heater and the active cooling plate, and having a heat transfer unit and a heat insulating unit;
When the mounting plate is heated, the heat transfer section is disposed on the active cooling plate side, the heat insulating section is disposed on the heater side, and when the mounting plate is cooled, the heat transfer section is disposed on the heater plate side. A heat treatment apparatus comprising: a drive unit arranged on the heater side and a drive unit arranged to arrange the heat insulation unit on the active cooling plate side. The heat treatment apparatus according to claim 1,
The passive cooling unit is rotatably provided between the heater and the active cooling plate, and is configured with a plurality along the opposite surface,
When each of the passive cooling parts is divided into two areas, one area is constituted by the heat transfer part, and the other area is constituted by a heat insulating part,
The heat treatment apparatus characterized in that the drive unit rotates the passive cooling unit. The heat treatment apparatus according to claim 2,
A heater-side heat transfer auxiliary part provided on a surface of the heater on the side of the active cooling plate and having a plurality of recesses corresponding to the shape of the plurality of rotatable passive cooling parts;
The heater-side surface of the active cooling plate is provided with a gap with the heater-side heat transfer auxiliary part, and a plurality of recesses are formed corresponding to the shape of the plurality of passive cooling parts that can rotate. A heat treatment apparatus, further comprising an active cooling plate side heat transfer auxiliary section. In the heat treatment apparatus according to claim 2 or 3,
The passive cooling unit is composed of a plurality of pillars arranged in parallel,
When each of the column bodies is divided into two regions along a plane along the central axis, one region is configured by the heat transfer unit, and the other region is configured by the heat insulating unit,
The said drive part rotates the said column around the central axis of the said column, The heat processing apparatus characterized by the above-mentioned. In the heat treatment apparatus according to claim 2 or 3,
The passive cooling unit is composed of any of a plurality of spheres and polyhedra arranged in a two-dimensional manner,
Each of the sphere or the polyhedron has a permanent magnet,
When each of the sphere or the polyhedron is divided into two regions, one region is constituted by the heat transfer portion, and the other region is constituted by the heat insulating portion,
The said drive part is comprised with an electromagnet, and rotates the said spherical body or the said polyhedron with the magnetic force of the said electromagnet, The heat processing apparatus characterized by the above-mentioned. The heat treatment apparatus according to claim 1,
The passive heat transfer unit is provided in contact with the heater and the active cooling plate, and includes a sealed container that accommodates either a vacuum layer or a gas layer, and a heat transfer unit provided in the sealed container. ,
The said drive part moves the said heat-transfer part between the inner wall by the side of the said heater in the said airtight container, and the inner wall by the side of the said cooling plate, The heat processing apparatus characterized by the above-mentioned.

Images