JP2015210976A - Method of manufacturing separator of fuel battery and thermal crimping device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing a separator of a fuel battery having small contact resistance efficiently and easily.SOLUTION: A method of manufacturing a first separator of a fuel battery has a first step of applying first coating material containing binder formed of thermosetting resin and filler onto the surface of a base material formed of stainless steel to form a first layer, and applying second coating material containing graphite onto the surface of the first layer to form a second layer to form a workpiece 50, a second step of mounting the workpiece 50 between the lower surface of a sheet member 40 provided to a heating part 31 of an upper mold 30 of a thermal crimping device 10 and the upper surface of a sheet member 40 provided to a heating part 21 of a lower mold 20 at a position away from the sheet member 40, and a third step of heating the workpiece 50 while pinching the workpiece 50 by the lower surface of the sheet member 40 of the upper mold 30 and the upper surface of the sheet member 40 of the lower mold 20.

Description

  The present invention relates to a method of manufacturing a separator for a fuel cell and a thermocompression bonding apparatus suitable for manufacturing the separator.

  2. Description of the Related Art Conventionally, a technique for producing a polymer electrolyte fuel cell separator by press-molding a metal plate such as a stainless steel plate is well known (see Patent Document 1). An oxide film is present on the surface of the base material of such a separator, and such an oxide film has a higher electrical resistance than the base body. Therefore, during power generation of the fuel cell, a large amount of Joule heat is generated at the contact portion between the separator surface and the membrane electrode assembly, which is a cause of reducing the power generation efficiency of the fuel cell.

  On the other hand, in Patent Document 1, an oxide film is removed by pickling the surface of the base material, and a coating film containing a mixed powder of graphite powder and carbon black is formed on the surface. . According to such a separator, the electrical resistance of the surface of the base material is reduced by removing the oxide film, so that the contact resistance between the separator and the membrane electrode assembly is reduced.

JP-A-11-345618

However, in the case of the technique described in Patent Document 1, since the surface of the separator substrate needs to be pickled, the manufacture of the separator becomes complicated.
The objective of this invention is providing the manufacturing method of the separator of a fuel cell which can manufacture the separator of a fuel cell with small contact resistance efficiently and easily.

  Another object of the present invention is to provide a thermocompression bonding apparatus that can increase the operation efficiency.

  In order to achieve the above object, a method of manufacturing a separator for a fuel cell is characterized in that the surface of a base material made of a metal material has a higher hardness and higher conductivity than a binder made of a thermosetting resin and the coating film of the base material. A first layer including the first filler and a second layer including a second filler having a lower hardness than the first filler and having conductivity on the surface of the first layer. The workpiece is placed at a position spaced apart from the heating unit between the lower surface of the upper heating unit of the thermocompression bonding apparatus and the upper surface of the lower heating unit. And a third step of heating while pressing the workpiece between the lower surface of the upper mold heating unit and the upper surface of the lower mold heating unit.

  According to this method, the work is placed at a position spaced apart from the lower surface of the upper heating unit of the thermocompression bonding apparatus and the upper surface of the lower heating unit, and the work is added from that state. Pressed and heated. For this reason, before the work is pressurized, the work does not come into contact with the upper surface of the lower heating part, and the temperature of the work rises due to the heat received from the heating part and the bonding material is hardened. be able to. Thus, by pressurizing the workpiece before the binder is cured, the first filler and the second filler are easily moved between the binders. Therefore, the first filler can be brought into contact with the base material through the coating of the base material, and the first filler and the second filler can be brought into contact with each other. That is, it is possible to suppress the formation of the binder layer at the interface between the base material and the first filler or at the interface between the first filler and the second filler.

  For these reasons, even if a coating film is present on the surface of the substrate, a conductive path that does not pass through the coating film having a large electrical resistance is formed by the base material, the first filler, and the second filler of the substrate. . Moreover, since the surface of the binding material is covered with the second filler having a lower hardness than the first filler, it is possible to suppress damage to the membrane electrode assembly and the like with which the separator contacts.

Moreover, according to the said method, even if it is a case where the heating part is heated in the thermocompression bonding process of the workpiece | work just before, it is not necessary to wait until a heating part is cooled when mounting a workpiece | work.
In addition, a thermocompression bonding apparatus for achieving the above object includes an upper mold and a lower mold each having a heating unit, and a workpiece is sandwiched between the lower surface of the upper mold heating unit and the upper surface of the lower mold heating unit. A thermocompression bonding apparatus that performs surface treatment of the workpiece by heating while being heated at a position spaced apart from these heating parts between the lower surface of the upper mold heating unit and the upper surface of the lower mold heating unit. A support member capable of supporting the workpiece is provided.

  According to this configuration, the work is supported by the support member at a position separated from the lower surface of the upper mold heating unit and the upper surface of the lower mold heating unit, and the upper mold is lowered from that state to pressurize the work. Can be heated together. For this reason, before a workpiece | work is pressurized, a workpiece | work does not contact | abut on the upper surface of a lower mold | type heating part, and it can suppress that the temperature of a workpiece | work raises by the heat receiving from a heating part. As a result, it is possible to suppress the occurrence of a problem that the workpiece cannot be properly thermocompression bonded due to the temperature rise of the workpiece before the workpiece is pressurized.

  Moreover, according to the said structure, even if it is a case where the heating part is heated in the thermocompression bonding process of the workpiece | work just before, it is not necessary to wait until a heating part is cooled when mounting a workpiece | work.

  ADVANTAGE OF THE INVENTION According to this invention, the separator of a fuel cell with small contact resistance can be manufactured efficiently and easily. Moreover, according to this invention, the operating efficiency of a thermocompression bonding apparatus can be improved.

Sectional drawing of the cell which comprises the fuel cell of one Embodiment. The perspective sectional view of the 1st separator of the embodiment. Sectional drawing of the 1st separator of the embodiment. It is sectional drawing which shows the manufacturing process of the 1st separator of the embodiment in order, Comprising: (a) is sectional drawing of the state in which the 1st coating material was apply | coated to the surface of a base material, (b) is a 1st coating material of FIG. Sectional drawing of the state in which the 2nd coating material was apply | coated to the surface. It is sectional drawing which shows typically the cross-sectional structure of the thermocompression bonding apparatus of the embodiment, (a) is a figure which shows the state in which the workpiece | work was mounted on the support surface of a supporting member, (b) is during pressurization. The figure which shows a state. Sectional drawing of the sheet | seat member of the thermocompression bonding apparatus of the embodiment. Sectional drawing of the 1st separator of a comparative example. Sectional drawing of the thermocompression bonding apparatus of a modification.

Hereinafter, an embodiment will be described with reference to FIGS.
A polymer electrolyte fuel cell (hereinafter abbreviated as a fuel cell) includes a cell 90 having a membrane electrode assembly 91 and a pair of separators 92 and 93 sandwiching the membrane electrode assembly 91, and the cells 90 are stacked. It is configured by being. The membrane electrode assembly 91 is formed by sandwiching an electrolyte membrane made of a solid polymer membrane between a fuel electrode and an air electrode (not shown), and is referred to as so-called MEA (Membrane Electrode Assembly).

  As shown in FIGS. 1 and 2, concave grooves 92 a and 92 b are alternately formed on the lower surface and the upper surface of the first separator 92. The membrane electrode assembly 91 is in contact with the lower surface of the first separator 92, and the flat separator 94 is in contact with the upper surface of the first separator 92. The concave surface 92a on the lower surface side of the first separator 92, that is, the membrane electrode assembly 91 side is used as a fuel gas flow path, and the upper surface side of the first separator 92, that is, the concave groove 92b on the flat separator 94 side, It is considered a road.

  As shown in FIG. 1, the second separator 93 includes a flat separator 94 and a porous channel plate 95 interposed between the flat separator 94 and the membrane electrode assembly 91. Both the flat separator 94 and the porous channel plate 95 are formed of stainless steel plates.

A large number of through-holes 96a are formed in the porous flow path plate 95, and an oxidant gas flow path 96 is constituted by these through-holes 96a.
As shown in FIG. 3, a conductive coating 58 is formed on the surface of the substrate 51 of the first separator 92 that contacts the membrane electrode assembly 91 and the surface that contacts the flat separator 94.

  The coating 58 includes a binder 53 made of a thermosetting resin such as an epoxy resin, and a first filler 54 made of granular titanium nitride having higher hardness and conductivity than the oxide coating 51b of the base 51. And a second filler 56 made of granular graphite. Graphite is a material having lower hardness than titanium nitride and having conductivity. A large amount of the first filler 54 is distributed on the substrate 51 side in the thickness direction of the coating film 58, and a part of the first filler 54 penetrates through the oxide film 51 b of the substrate 51 and is in contact with the substrate body 51 a. The second filler 56 is distributed in a large amount on the surface side of the coating film 58 in the thickness direction of the coating film 58, and a part of the second filler 56 is in contact with the first filler 54.

Next, a procedure for manufacturing the first separator 92 will be described.
When the first separator 92 is manufactured, first, a stainless steel plate is press-formed by a pressing device (not shown) to form the base material 51 having a predetermined uneven shape shown in FIG.

Next, as shown in FIG. 4A, the first layer 52 is formed by applying the first paint containing the binding material 53 and the first filler 54 to the surface of the base material 51. Is done.
Next, as shown in FIG. 4B, the second layer 55 is formed by applying the second paint made of the second filler 56 to the surface of the first layer 52, thereby forming the workpiece 50. Is formed. Note that the step of forming the first layer 52 and the second layer 55 corresponds to the first step.

Here, the configuration of the thermocompression bonding apparatus 10 for thermocompression bonding the first layer 52 and the second layer 55 to the surface of the substrate 51 will be described.
As shown in FIGS. 5A and 5B, the thermocompression bonding apparatus 10 is positioned above the lower mold 20, the guide pillar 12 fixed to the lower mold 20 and extending upward, and the lower mold 20. And an upper mold 30 provided so as to be able to move up and down by being guided by the guide pillar 12. The lower mold 20 is made of a metal material, and has a heating portion 21 whose central portion protrudes upward, and a heating wire 22 is built in the heating portion 21. The upper mold 30 is made of a metal material, and has a heating part 31 whose central part protrudes downward, and a heating wire 32 is built in the heating part 31.

A sheet member 40 made of an elastic material is bonded to the upper part of the heating part 21 of the lower mold 20 and the upper part of the heating part 31 of the upper mold 30.
As shown in FIG. 6, the sheet member 40 includes a pair of rubber sheets 41 made of a heat-resistant rubber material such as fluororubber, a reinforcing cloth 42 made of glass fibers bonded between the pair of rubber sheets 41, have.

  As shown in FIGS. 5A and 5B, the lower mold 20 is separated from the sheet member 40 between the upper surface of the sheet member 40 of the lower mold 20 and the lower surface of the sheet member 40 of the upper mold 30. A plurality of support members 27 that can support the workpiece 50 at a certain position are provided across the sheet member 40. The lower end of the support member 27 is accommodated in the accommodation hole 25 of the lower mold 20 via a spring 28. For this reason, the support member 27 is urged upward by the spring 28. As shown in FIG. 5A, the support surface 27 a of the support member 27 is configured such that the sheet member 40 of the lower mold 20 and the sheet member 40 of the upper mold 30 are separated from the workpiece 50 in the state where the sheet member 40 of the lower mold 20 is separated from the workpiece 50. It is located between the upper surface of the member 40 and the lower surface of the sheet member 40 of the upper mold 30.

Next, a procedure for forming the coating film 58 by thermocompression bonding the first layer 52 and the second layer 55 to the surface of the work 50 will be described.
As shown in FIG. 5A, in thermocompression bonding, first, the workpiece 50 is placed on the support surface 27a of the support member 27 in the thermocompression bonding apparatus 10 (second process). Note that a release paper may be disposed between the sheet member 40 and the workpiece 50 as necessary.

  Next, when the upper mold 30 is lowered, the lower surface of the sheet member 40 of the upper mold 30 is brought into contact with the upper surface of the workpiece 50. Thereafter, when the upper mold 30 is further lowered against the urging force of the spring 28, the spring 28 is compressed via the peripheral edge of the workpiece 50 and the support member 27, thereby allowing the support member 27 to be lowered. As shown in FIG. 5B, the lower surface of the work 50 is brought into contact with the upper surface of the sheet member 40 of the lower mold 20. In this way, the workpiece 50 is pinched by the sheet member 40 of the upper mold 30 and the sheet member 40 of the lower mold 20.

  Thereafter, the work 50 is heated to a predetermined temperature by supplying current to the heating wires 22 and 32 while the work 50 is being pressurized (third step). This predetermined temperature is a temperature at which the binding material 53, which is a thermosetting resin, is cured, and is about a few hundred tens of degrees Celsius to two hundreds tens of degrees Celsius.

  Thereafter, when the supply of current to the heating wires 22 and 32 is stopped and the upper mold 30 is raised, the work 50 is lifted to the position shown in FIG. The workpiece 50 is separated from the upper surface of the sheet member 40 of the heating unit 21 of the lower mold 20.

Next, the operation of this embodiment will be described.
The workpiece 50 is placed between the lower surface of the sheet member 40 of the upper mold 30 and the upper surface of the sheet member 40 of the lower mold 20 at a position separated from the sheet member 40, and the workpiece 50 is pressurized from this state. Heated with. For this reason, before the work 50 is pressurized, the work 50 does not come into contact with the upper surface of the sheet member 40 of the lower mold 20, and the temperature of the work 50 rises due to heat received from the sheet member 40, and the bonding material 53. Can be cured. As described above, the first filler 54 and the second filler 56 are easily moved between the binders 53 by pressurizing the workpiece 50 before the binder 53 is cured. Therefore, the first filler 54 can be brought into contact with the substrate main body 51a through the oxide film 51b of the substrate 51, and the first filler 54 and the second filler 56 can be brought into contact with each other. That is, it is possible to suppress the formation of the layer of the binding material 53 at the interface between the base material 51 and the first filler 54 or at the interface between the first filler 54 and the second filler 56.

  On the other hand, when thermocompression bonding is performed using a thermocompression bonding apparatus that does not include the support member 27, the work 50 is placed on the upper surface of the sheet member 40 of the lower mold 20. Therefore, the temperature of the workpiece 50 rises due to the heat received from the sheet member 40, and the binding material 53 is cured before the workpiece 50 is pressurized. As a result, the first filler 54 and the second filler 56 hardly move between the binders 53, and as shown in FIG. 7, the interface between the base material 51 and the first filler 54, A layer of the binder 53 is formed at the interface between the first filler 54 and the second filler 56. In addition, it is conceivable that the workpiece 50 is clamped by the cooled heating units 31 and 21 and the heating units 31 and 21 are heated from that state. In this case, in the thermocompression bonding process of the immediately preceding workpiece 50. When the heating units 31 and 21 are heated, it is necessary to wait until the heating units 31 and 21 are cooled, and it is difficult to increase the operation efficiency of the thermocompression bonding apparatus 10.

  From these things, according to this embodiment, even if the oxide film 51b exists on the surface of the base 51, the base body 51a of the base 51, the first filler 54, and the second filler 56 Thus, a conductive path that does not pass through the oxide film 51b having a large electric resistance is formed. In addition, since the surface of the binding material 53 is covered with the soft second filler 56, it is possible to prevent the membrane electrode assembly 91 and the like that are in contact with the first separator 92 from being damaged.

  Even when the heating units 31 and 21 are heated in the thermocompression bonding process of the immediately preceding workpiece 50, there is no need to wait until the heating units 31 and 21 are cooled when the workpiece 50 is placed. Therefore, the operating efficiency of the thermocompression bonding apparatus 10 can be increased, and the first separator 92 having a small contact resistance can be efficiently manufactured.

According to the separator manufacturing method and the thermocompression bonding apparatus according to the present embodiment described above, the following effects can be obtained.
(1) The manufacturing method of the 1st separator 92 applies the 1st coating material which contains the binder 53 and the 1st filler 54 which consist of a thermosetting resin to the surface of the base material 51, and is the 1st layer 52. The second layer 55 is formed by applying a second paint containing a second filler 56 having a hardness lower than that of the first filler 54 to the surface of the first layer 52, thereby forming the workpiece 50. A first step of forming. Further, the manufacturing method described above is performed between the lower surface of the sheet member 40 provided in the heating unit 31 of the upper mold 30 of the thermocompression bonding apparatus 10 and the upper surface of the sheet member 40 provided in the heating unit 21 of the lower mold 20. A second step of placing the workpiece 50 at a position separated from the sheet member 40 is provided. The manufacturing method includes a third step of heating the workpiece 50 while pressing the workpiece 50 between the lower surface of the sheet member 40 of the upper mold 30 and the upper surface of the sheet member 40 of the lower mold 20.

  According to the above method, the workpiece 50 does not contact the upper surface of the sheet member 40 of the lower mold 20 before the workpiece 50 is pressurized, and the temperature of the workpiece 50 rises due to heat received from the sheet member 40. Can be suppressed. Therefore, the first filler 54 can be brought into contact with the base body 51a through the oxide film 51b of the base 51, and the first filler 54 and the second filler 56 can be brought into contact with each other. Therefore, even if the oxide film 51b exists on the surface of the base material 51, the base material body 51a, the first filler 54, and the second filler 56 of the base material 51 pass through the oxide film 51b having a large electric resistance. A conductive path is formed. Further, since the surface of the binding material 53 is covered with the second filler 56 having a hardness lower than that of the first filler 54, the membrane electrode assembly 91 and the like with which the first separator 92 contacts are appropriately prevented from being damaged. be able to.

  Moreover, according to the said method, even if it is a case where the heating parts 31 and 21 are heated in the thermocompression bonding process of the workpiece | work 50 immediately before, the heating parts 31 and 21 are cooled when mounting the workpiece | work 50. There is no need to wait until. Therefore, the 1st separator 92 with small contact resistance can be manufactured efficiently and easily.

  (2) The thermocompression bonding apparatus 10 includes an upper mold 30 and a lower mold 20 each having heating units 31 and 21, and the work 50 is formed by the lower surface of the heating unit 31 of the upper mold 30 and the upper surface of the heating unit 21 of the lower mold 20. The surface treatment of the workpiece 50 is performed by heating while pressing. The workpiece 50 is placed at a position spaced from the sheet member 40 between the lower surface of the sheet member 40 provided in the heating unit 31 of the upper mold 30 and the upper surface of the sheet member 40 provided in the heating unit 21 of the lower mold 20. A support member 27 that can be supported is provided.

  According to such a configuration, even when the heating units 31 and 21 are heated in the thermocompression bonding process of the immediately preceding workpiece 50, the process waits until the heating units 31 and 21 are cooled when the workpiece 50 is placed. Since it is not necessary, the operating efficiency of the thermocompression bonding apparatus 10 can be increased.

(3) A plurality of support members 27 are provided across the sheet member 40 of the lower mold 20. The lower mold 20 is provided with a spring 28 that urges the support member 27 upward.
According to such a configuration, the support member 27 is between the position where the work 50 is separated from the upper surface of the sheet member 40 of the lower mold 20 and the position where the work 50 is in contact with the upper surface of the sheet member 40. Can be easily displaced by the spring 28.

(4) Sheet members 40 made of a heat-resistant rubber material are provided on both the upper surface of the heating unit 21 of the lower mold 20 and the lower surface of the heating unit 31 of the upper mold 30.
When the pressing surface of each heating unit is formed of a rigid body such as a metal plate, the workpiece 50 may be plastically deformed when the workpiece 50 is clamped by the pressing surface of each heating unit.

  In this regard, according to the present embodiment, even when the workpiece 50 is pinched by the sheet member 40 provided in each heating unit 31, 21, plastic deformation of the workpiece 50 can be suppressed. Therefore, the shape of the workpiece 50 can be maintained.

  (5) The sheet member 40 is provided with a pair of heat-resistant rubber sheets 41 and regulates the extension of the rubber sheet 41 in the direction along the upper surface or the lower surface, which is the pressure surface of the rubber sheet 41, provided on the rubber sheet 41. And a reinforcing cloth 42.

  According to such a configuration, since the expansion of the rubber sheet 41 in the direction along the lower surface or the upper surface of the rubber sheet 41 is regulated by the reinforcing cloth 42, when the workpiece 50 is clamped by each sheet member 40, It is possible to appropriately suppress the plastic deformation of the workpiece 50 as the rubber sheet 41 extends in the direction.

In addition, the said embodiment can also be changed as follows, for example.
In the above embodiment, the current supply to the heating wires 22 and 32 is stopped before the upper die 30 of the thermocompression bonding apparatus 10 is raised and the workpiece 50 is taken out. Alternatively, the supply of current to the heating wires 22 and 32 can be prevented from stopping. Moreover, in the said embodiment, in the state which pressurized the workpiece | work 50 with the sheet | seat member 40 of the upper mold | type 30, and the sheet | seat member 40 of the lower mold | type 20, current is supplied to the heating wires 22 and 32 so that the workpiece | work 50 may be heated. I made it. Instead of this, the workpiece 50 may be pressurized in a state where current is supplied to the heating wires 22 and 32.

  In the above embodiment, the first coating 52 is applied to the surface of the base material 51 of the workpiece 50 to form the first layer 52, and the second coating is applied to the surface of the first layer 52. Layer 55 was formed. Alternatively, the first layer and the second layer can be formed by thermal transfer or the like.

Other conductive materials such as carbon black can be used as the second filler instead of graphite.
Other conductive materials such as titanium carbide can be used as the first filler instead of titanium nitride.

  As shown in FIG. 8, a recess 123 may be formed on the upper surface of the heating part 121 of the lower mold 120 in the thermocompression bonding apparatus 110, and a sheet member 140 made of a heat-resistant rubber material may be fitted into the recess 123. Alternatively, a recess 133 may be formed on the lower surface of the heating unit 131 of the upper mold 130 and the sheet member 140 may be fitted into the recess 133.

  In this case, since the peripheral edge of the sheet member 140 is in contact with the regulating walls 124 and 134 that are the inner circumferential walls of the recesses 123 and 133, the expansion in the direction along the pressing surface of the sheet member 140 is regulated. The effect according to the effect (5) can be achieved. Further, the sheet member 40 of the above embodiment may be fitted into the recesses 123 and 133 of the lower mold 120 and the upper mold 130.

If the plastic deformation of the workpiece 50 due to the elongation of the rubber sheet 41 in the direction along the pressing surface of the sheet member 40 can be ignored, the reinforcing cloth 42 can be omitted.
The rubber sheet 41 can be formed of other heat resistant rubber material such as silicon rubber.

The sheet member 40 can be provided on either the heating part 21 of the lower mold 20 or the heating part 31 of the upper mold 30.
-If the workpiece 50 is not plastically deformed, the sheet member 40 can be omitted.

  DESCRIPTION OF SYMBOLS 10,110 ... Thermocompression bonding apparatus, 12,112 ... Guide pillar, 20,120 ... Lower mold | type, 21,121 ... Heating part, 22,122 ... Heating wire, 25,125 ... Housing hole, 27,127 ... Supporting member, 27a, 127a ... support surface, 28, 128 ... spring (biasing member), 30, 130 ... upper mold, 31, 131 ... heating section, 32, 132 ... heating wire, 40, 140 ... sheet member, 41 ... rubber sheet 42 ... Reinforcement cloth (regulating member), 50, 150 ... Workpiece, 51 ... Substrate, 51a ... Substrate body, 51b ... Oxide coating, 52 ... First layer, 53 ... Binder, 54 ... First filler 55 ... second layer 56 ... second filler 58 ... coating film 90 ... cell 91 ... membrane electrode assembly 92 ... first separator (separator) 92a, 92b ... concave groove 93 ... first 2 separators, 94 ... flat separator, 95 ... porous Channel plate, 96 ... flow path of the oxidant gas, 96a ... through holes, 123 and 133 ... recess, 124, 134 ... restricting wall.

Claims (7)

On the surface of the base material made of a metal material, a first layer including a binder made of a thermosetting resin and a first filler having higher hardness and conductivity than the coating film of the base material is formed, A first step of forming a workpiece by forming a second layer including a second filler having a lower hardness and conductivity than the first filler on the surface of the first layer;
A second step of placing the workpiece at a position spaced from these heating parts between the lower surface of the upper heating part of the thermocompression bonding apparatus and the upper surface of the lower heating part;
A third step of heating while pressing the workpiece with the lower surface of the upper mold heating unit and the upper surface of the lower mold heating unit,
A method of manufacturing a separator for a fuel cell. At least one of the lower surface of the upper mold heating unit and the upper surface of the lower mold heating unit is provided with a sheet member made of a heat-resistant elastic material,
The manufacturing method of the separator of the fuel cell of Claim 1. Thermocompression bonding comprising an upper die and a lower die each having a heating portion, and performing surface treatment of the workpiece by heating while pressing the workpiece between the lower surface of the upper die heating portion and the upper surface of the lower die heating portion. A device,
A support member capable of supporting the workpiece at a position spaced from the heating unit between the lower surface of the upper mold heating unit and the upper surface of the lower mold heating unit is provided.
Thermocompression bonding equipment. A plurality of the support members are provided across the heating part of the lower mold,
The lower mold is provided with a biasing member that biases the support member upward.
The thermocompression bonding apparatus according to claim 3. At least one of the lower surface of the upper mold heating unit and the upper surface of the lower mold heating unit is provided with a sheet member made of a heat-resistant elastic material,
The thermocompression bonding apparatus according to claim 3 or 4. The sheet member includes a heat-resistant rubber sheet, and a regulating member that is provided on the rubber sheet and regulates the extension of the rubber sheet in a direction along the pressure surface of the rubber sheet.
The thermocompression bonding apparatus according to claim 5. At least one of the upper mold heating section and the lower mold heating section is a regulating wall that abuts the periphery of the sheet member and regulates the extension of the sheet member in the direction along the pressure surface of the sheet member Is formed,
The thermocompression bonding apparatus according to claim 5 or 6.