JP2015208800A - Guide rail - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a guide rail which is pressed against a reference surface of a base by appropriate force and then installed on an installation surface of the base.SOLUTION: A guide rail (2) is installed on an installation surface (13) formed on a base (1) along a reference surface (14) perpendicular to the installation surface, where a pipe (28) into which a screw can be inserted and a biasing portion (29) that biases the pipe toward an opposite direction of the reference surface are stored inside a through-hole (23) having a longer direction orthogonal to the reference surface; and a screw is inserted into the pipe and the screw is screwed to a screw hole of the base, so that one side surface of the guide rail is pressed against the reference surface by predetermined force.

Description

  The present invention relates to a guide rail that guides linear movement of a movable part.

  Conventionally, in a semiconductor manufacturing apparatus, a guide rail is used to move a movable part in the apparatus linearly. Guide rails are distorted in the short direction and often lose linearity as a whole. For this reason, when attaching a guide rail to the installation surface of a base, it is necessary to make a guide rail straight. A reference surface perpendicular to the installation surface is straightly formed on the base to which the guide rail is attached. By pressing the side surface of the guide rail against the reference surface, the guide rail is straightened along the reference surface. By screwing the guide rail in this state, the guide rail can be appropriately attached to the installation surface of the base.

  In order to mount the guide rail straight, a guide rail mounting tool that maintains the guide rail along the reference plane has been proposed (see, for example, Patent Document 1 to Patent Document 4). The guide rail mounting tool described in these patent documents converts the screwing force on the installation surface into a direction orthogonal to the reference surface and presses the guide rail toward the reference surface. Accordingly, the guide rail can be attached to the installation surface of the base with the guide rail straightly corrected along the reference surface.

Japanese Patent No. 4170659 JP 2001-1224025 A JP 2003-301817 A JP 2004-263793 A

  However, in the guide rail mounting tool described in the above-mentioned patent document, it is difficult to adjust the pressing force because the pressing force increases as much as the screw is screwed into the installation surface. For this reason, if the screw is excessively screwed into the installation surface, the guide rail is pressed against the reference surface with a larger pressure than necessary, and the guide rail may be deformed more than necessary.

  This invention is made | formed in view of such a point, and it aims at providing the guide rail which can be pressed on the reference surface of a base with an appropriate pressure, and can be attached to the installation surface of a base.

  The guide rail of the present invention is a guide rail that is mounted on a base and guides to move an object in the extending direction. The base includes an installation surface, a reference surface perpendicular to the installation surface, and an installation surface. And the reference surface extend in the same direction and have screw holes arranged on the installation surface at equal intervals in the extending direction, and penetrate the lower surface contacting the installation surface and the upper and lower surfaces facing the lower surface. A through hole having a long direction perpendicular to the reference surface and a reference surface in which one side surface is in contact with the reference surface. A screw can be inserted into the inner cavity of the cylinder and accommodated in the through hole. And a biasing portion that biases the pipe with a predetermined force in a direction away from the reference surface, and when mounted on the base, it is placed on the mounting surface and brought into contact with the lower surface, and the pipe is screwed And insert the screw into the screw hole of the base, so that There pressed against a predetermined force to the reference surface of the base, characterized in that can be mounted along the reference plane.

  According to this configuration, by inserting the screw into the pipe and screwing it into the screw hole of the base, the reference surface of the guide rail is moved toward the reference surface of the base by the biasing portion that biases the pipe. Pressed with force. Thereby, the guide rail can be fixed in a state where the reference surface is in contact with the reference surface of the base. For this reason, even if the guide rail loses linearity, the guide rail can be attached straight along the reference plane. Further, since the guide rail is pressed against the reference surface only by a constant urging force by the urging portion, the guide rail is not pressed against the reference surface with an excessive force. For this reason, the guide rail can be appropriately attached to the base without being deformed more than necessary. In addition, since the guide rail can be easily mounted along the reference surface simply by screwing, workability is improved.

  According to the present invention, by pressing the guide rail with the urging force of the urging portion, the guide rail can be appropriately attached in a state along the reference surface of the base.

It is a perspective view of the base with which the guide rail which concerns on this Embodiment is attached. It is a disassembled perspective view of the guide rail which concerns on this Embodiment. It is the elements on larger scale of the guide rail which concerns on this Embodiment. It is attachment explanatory drawing of the guide rail which concerns on this Embodiment.

  Hereinafter, a guide rail and a base to which the guide rail is attached will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of a base to which a guide rail according to the present embodiment is attached. FIG. 2 is an exploded perspective view of the guide rail according to the present embodiment. FIG. 3 is a partially enlarged view of the guide rail according to the present embodiment. FIG. 3A shows a partially enlarged view of the guide rail as viewed from above, and FIG. 3B shows a cross-sectional view taken along line XX. In addition, the guide rail which concerns on this Embodiment is not limited to the structure shown in the following figures.

  First, with reference to FIG. 1, the base to which the guide rail which concerns on this embodiment is attached is demonstrated. As shown in FIG. 1, a step 12 that extends linearly in a predetermined direction is formed on the upper surface 11 of the base 1. The step portion 12 includes a horizontal surface 13 that is lowered by one step from the upper surface 11, and a side surface 14 that rises from the horizontal surface 13 and continues to the upper surface 11. The horizontal surface 13 functions as an installation surface (hereinafter referred to as an installation surface 13) on which the guide rail 2 is installed, and the side surface 14 is a reference surface (hereinafter referred to as a reference surface 14) for maintaining the linearity of the guide rail 2. ).

  On the installation surface 13, a plurality of screw holes 15 are arranged at equal intervals along the formation direction (extending direction) of the stepped portion 12 at a position away from the reference surface 14 by a predetermined distance. In the present embodiment, the lower surface 20 (see FIG. 2) of the guide rail 2 is brought into contact with the installation surface 13, and one side surface 22 (reference surface (see FIG. 2)) of the guide rail 2 is brought into contact with the reference surface 14. The guide rail 2 is attached to the base 1 by screwing in the contacted state.

  Next, with reference to FIG.2 and FIG.3, the specific structure of the guide rail which concerns on this Embodiment is demonstrated. As shown in FIGS. 2 and 3, the guide rail 2 has a rectangular shape in cross section and extends linearly, and guides the movement of the moving block 31 (object) in the extending direction. It is configured. The lower surface 20 of the guide rail 2 is in contact with the installation surface 13 of the base 1, and one side surface 22 (the left side surface in the present embodiment) of the guide rail 1 is in contact with the reference surface 14 of the base 1. It is a reference plane. On the upper surface 21 of the guide rail 2, a pair of grooves 27 are formed in the vicinity of both ends in the width direction along the extending direction of the guide rail 2. Further, grooves 27 are formed on both side surfaces of the guide rail 2 at the same height along the extending direction of the guide rail 2. Each of these grooves 27 is formed in a semicircular shape in sectional view, and serves as a guide groove 27 that guides the linear movement of the moving block 31 as a movable part.

  Further, a plurality of through holes 23 for inserting the screws 30 are formed at a predetermined pitch along the extending direction of the guide rail 2 at a substantially center in the width direction of the upper surface 21 of the guide rail 2. Each through hole 23 is formed to penetrate from the upper surface 21 toward the lower surface 20, and the plurality of through holes 23 are arranged at the same pitch as the screw holes 15 of the base 1 described above. Therefore, the screw 30 inserted through each through hole 23 is screwed into each screw hole 15 of the base 1, so that the guide rail 2 is positioned on the base 1 in a state where the guide rail 2 is positioned in the direction in which the screw hole 15 is formed. It is attached.

  The through hole 23 has a long hole shape extending in the width direction of the guide rail 2 (a direction orthogonal to the reference surface 14 of the base 1). The inner surface on one end side (the reference surface 14 side of the base 1) of the through hole 23 is a flat surface 24, and the inner surface on the other end side is a curved surface 25 having an arc shape when viewed from above. Further, a counterbore hole 26 that is slightly larger than the through hole 23 is formed on the upper surface 21 side of the through hole 23, and the head of the screw 30 is accommodated in the counterbore hole 26. The counterbore hole 26 has such a depth that the head of the screw 30 does not protrude from the upper surface 21.

  The through-hole 23 of the guide rail 2 accommodates a pipe 28 having a diameter smaller than the width of the through-hole 23 in the short direction and a biasing portion 29 that biases the pipe 28 in a predetermined direction (the curved surface 25 side). The pipe 28 is disposed on the curved surface 25 side of the through hole 23, and the urging portion 29 is disposed on the flat surface 24 side of the through hole 23. The pipe 28 is slidable in the longitudinal direction along the shape of the through hole 23 inside the through hole 23.

  The pipe 28 is formed of, for example, resin and has a cylindrical shape having a height equal to or smaller than the depth of the through hole 23. Further, the inner diameter of the pipe 28 is slightly larger than the screw hole 15, so that the screw 30 can be inserted into the inner cavity of the pipe 28. The urging portion 29 is constituted by, for example, a coil spring, and one end is in contact with the flat surface 24 of the through hole 23 and the other end is in contact with the outer peripheral surface of the pipe 28. The pipe 28 is constantly urged toward the curved surface 25 by the urging portion 29.

  The guide rail 2 configured as described above brings the lower surface 20 into contact with the installation surface 13 with the through hole 23 facing the screw hole 15 of the base 1. Then, the screw 30 is inserted into the pipe 28 accommodated in the through hole 23, and the screw hole 15 and the center of the screw 30 are made to coincide against the biasing force of the biasing portion 29. The guide rail 2 is attached to the base 1 by screwing the screws 30 into the screw holes 15. The guide rail 2 is pressed toward the reference surface 14 by the urging portion 29 at the same time that the screw 30 is screwed into the base 1. For this reason, one side surface 22 of the guide rail 2 contacts the reference surface 14, and the distortion is adjusted. Therefore, the guide rail 2 can be fixed straight along the reference plane 14.

  Next, with reference to FIG. 4, the guide rail mounting operation according to the present embodiment will be described. FIG. 4 is an explanatory view of attachment of the guide rail according to the present embodiment. 4A to 4C show operation transition diagrams when the guide rail is screwed.

  In the state shown in FIG. 4A, the guide rail 2 is placed on the base 1, and the lower surface 20 of the guide rail 2 is in contact with the installation surface 13 of the base 1. Further, a slight gap is left between the reference surface 14 of the base 1 and the one side surface 22 of the guide rail 2 due to distortion of the guide rail 2 or the like. At this time, the urging portion 29 urges the pipe 28 in a direction away from the one side surface 22, and the pipe 28 is pressed against the curved surface 25 side by the urging portion 29. Further, the pipe 28 and the screw hole 15 are shifted from each other in the center, and the screw 30 cannot be screwed into the screw hole 15.

  As shown in FIG. 4B, when the guide rail 2 is attached, the screw 30 is inserted into the pipe 28 and the screw 30 and the pipe 28 are pushed toward the flat surface 24 against the urging portion 29 against the urging force. . At this time, the thread of the screw 30 comes into contact with the inner peripheral surface of the pipe 28, and the pipe 28 and the screw 30 slide along the longitudinal direction of the through hole 23. The screw 30 can be screwed into the screw hole 15 when the center of the pipe 28 and the center of the screw hole 15 substantially coincide.

  As shown in FIG. 4C, when the screw 30 is screwed into the screw hole 15, the position of the pipe 28 is regulated in a state where the inner peripheral surface of the pipe 28 is in contact with the thread of the screw 30. For this reason, the urging portion 29 receives a reaction force from the pipe 28, and the urging force of the urging portion 29 is converted into a force that presses the flat surface 24 of the through hole 23. That is, before the screw 30 is screwed into the screw hole 15, the urging portion 29 urges the pipe 28 toward the curved surface 25, whereas after the screw 30 is screwed into the screw hole 15, The urging unit 29 urges the guide rail 2 toward the reference surface 14 of the base 1.

  As a result of the pressing of the flat surface 24 of the through-hole 23 by the urging force of the urging portion 29, one side surface 22 of the guide rail 2 comes into contact with the reference surface 14 of the base 1 and the distortion of the guide rail 2 is corrected. . Then, the guide rail 2 is fixed to the base 1 by completely tightening the screw 30. At this time, even if the pipe 28 is inclined and comes into contact with the screw 30 due to the looseness of the screw 30 or the pipe 28, the pipe 28 rises vertically by being screwed. For this reason, the urging force of the urging portion 29 can be reliably transmitted to the guide rail 2 along the horizontal direction.

  Further, the guide rails 2 can be attached straight along the reference plane 14 by screwing the screws 30 in the adjacent screw holes 15 in order. Note that it is not necessary to screw all of the screw holes 15; for example, one or more adjacent screw holes 15 may be skipped and screwed so that the linearity of the guide rail 2 can be maintained. Good. The screwing location can be appropriately adjusted according to the length of the guide rail 2 and workability. Further, when screwing, the screws 30 may be finally tightened one by one, or the screws 30 may be finally tightened one by one after temporarily fixing the screws 30 at several places.

  In the present embodiment, since the distortion of the guide rail 2 is corrected only by the urging force of the urging unit 29, the guide rail 2 is not pressed against the reference surface 14 more than necessary. Therefore, it is possible to prevent an excessive pressure from being applied to the guide rail 2, and the guide rail 2 can be pressed against the reference surface 14 with an appropriate pressure. For this reason, the guide rail 2 is not pressed against the base 1 of the base 1 more than necessary, and the guide rail 2 can be attached to the base 1 with an appropriate pressure. Thus, it is preferable that the urging portion 29 presses the guide rail 2 against the reference surface 14 with an urging force that can remove at least the distortion of the guide rail 2. Moreover, since the distortion of the guide rail 2 can be corrected only by screwing and the guide rail 2 can be fixed along the reference plane 14, the mounting operation of the guide rail 2 can be facilitated.

  As described above, according to the guide rail 2 according to the present embodiment, the screw 30 is inserted into the pipe 28 and screwed into the screw hole 15 of the base 1, whereby the biasing portion 29 that biases the pipe 28 is used. The one side surface 22 (reference surface) of the guide rail 2 is pressed against the reference surface 14 of the base 1 with a predetermined force. Thereby, the guide rail 2 can be fixed in a state where the one side surface 22 is in contact with the reference surface 14 of the base 1. For this reason, even if the guide rail 2 loses linearity, the guide rail 2 can be attached straight along the reference plane 14. Further, since the guide rail 2 is pressed against the reference surface 14 only by the urging force of the urging portion 29, the guide rail 2 is not pressed against the reference surface 14 with excessive force. For this reason, the guide rail 2 can be appropriately attached to the base 1 without being deformed more than necessary.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the above-described embodiment, the urging portion 29 is configured by a coil spring, but is not limited to this configuration. The urging unit 29 may be configured in any way as long as it urges at a predetermined pressure.

  In the above-described embodiment, a screw is inserted into the pipe 28, and the pipe 28 is urged by the urging portion 29 in a direction away from the reference surface (one side surface 22). Not. The pipe 28 may not be provided. For example, the screw may be directly urged by the urging portion. Further, a plate-like member may be provided on the other end side of the urging portion 29 and the screw may be urged through the plate-like member. In this case, the pipe 28 and the plate-like member function as a protective member that protects the screw thread of the screw 30.

  As described above, the present invention has an effect that the guide rail can be appropriately attached in a state of being aligned with the reference plane of the base only by screwing, and particularly guides the linear movement of the moving portion. Useful for guide rails.

DESCRIPTION OF SYMBOLS 1 Base 13 Installation surface 14 Reference surface 15 Screw hole 2 Guide rail 20 Lower surface 21 Upper surface 22 One side surface (reference surface)
23 Through-hole 28 Pipe 29 Biasing part 30 Screw

Claims (1)

A guide rail that is attached to the base and guides the object to move in the extending direction,
The base includes an installation surface, a reference surface perpendicular to the installation surface, and screws disposed on the installation surface at equal intervals in an extending direction in which the installation surface and the reference surface extend in the same direction. With holes,
The guide rail has a lower surface in contact with the installation surface, a through-hole penetrating the upper surface and the lower surface facing the lower surface and extending in a direction perpendicular to the reference surface, and one side surface in contact with the reference surface. A reference surface,
The through hole includes a pipe that can be inserted into a cylindrical inner cavity and accommodated in the through hole, and a biasing portion that biases the pipe with a predetermined force in a direction away from the reference surface. ,
When mounting on the base, it is placed on the installation surface, brought into contact with the lower surface, a screw is inserted into the pipe, and a screw is screwed into the screw hole of the base. A guide rail characterized in that the reference surface is pressed against the reference surface of the base with a predetermined force and can be mounted along the reference surface.

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