JP2015176763A - Destaticizer and destaticizing head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a destaticizer and a destaticizing head that can perform sufficient destaticization irrespective of the ambient environment.SOLUTION: Humidified air is generated by humidifying air in a humidified air generator. The humidified air flows out from an air flow-out port 212 of a destaticizing head 200A, and rectified in a fixed direction by a rectifying plate 240. One or plural destaticizing needles 220 and a ground electrode 230 are held at the destaticizing head 200A. The destaticizing needles 220 are disposed to project more greatly than the tip of the rectifying plate 240 in the flow-out direction of the humidified air. A voltage for generating corona discharge is applied between the one or plural destaticizing needles 220 and the ground electrode 230 by a power supply device.

Description

  The present invention relates to a static eliminator and a static elimination head for neutralizing a static elimination object.

  In a clean room where a semiconductor device or the like is manufactured, a static eliminator is used, for example, to remove static electricity in the air or to prevent charging of a workpiece to be manufactured. The static elimination apparatus described in Patent Document 1 includes an apparatus main body and a louver. A discharge electrode and a fan are accommodated in the apparatus main body. Ions generated from the discharge electrode are sent out through the louver by the rotation of the fan.

  The louver includes fins provided in a lattice pattern in the frame. The fin portion on the center side in the radial direction of the fan is formed thicker in the axial direction of the fan. The ion flow pushed out by the fan is regulated so as to advance in the straight direction by the thickly formed portion of the fin. As a result, the straightness of the ion flow is improved, and a static elimination effect can be obtained for a wider area.

JP 2007-311229 A

  The static elimination effect by the static elimination device varies depending on the environment around the static elimination object. Therefore, depending on the season, the static elimination effect of the static elimination device of Patent Document 1 may be insufficient.

  The objective of this invention is providing the static elimination apparatus and static elimination head which can fully perform static elimination irrespective of the surrounding environment.

  (1) A static eliminator according to a first aspect of the present invention is a static eliminator that neutralizes an object, a humidified air generator that humidifies air to generate humidified air, and a humidified air generated by the humidified air generator A holding body having an outlet that allows air to flow out, a rectifying plate that is held by the holding body and is provided to rectify the humidified air that flows out from the outlet in a certain direction, and an outflow of humidified air that is held by the holding body One or more static elimination needles arranged so as to protrude from the tip of the current plate in the direction, an electrode held by the holding body, and between the one or more static elimination needles and the electrode for generating corona discharge And a power supply device for applying a voltage to the power supply.

  In this static elimination apparatus, humidified air is produced | generated when air is humidified by the humidified air production | generation part. The humidified air flows out from the outlet of the holding body and is rectified in a certain direction by the rectifying plate. The holding body holds one or more static elimination needles and electrodes. A voltage for generating corona discharge is applied between the one or more static elimination needles and the electrode by the power supply device. According to this configuration, the object is neutralized by supplying humidified air to the object, and the object is further neutralized by supplying ions to the object.

  The rectifying plate suppresses the humidified air sent out from the outlet from diffusing in the air around the outlet. Thereby, while being able to send out humid air to a distant place, humid air can fully be supplied to a target object. In addition, since the one or more static elimination needles protrude beyond the tip of the rectifying plate in the direction of the humidified air flow, the generated ions are reduced from being charged on the rectifying plate. Therefore, it is possible to prevent the neutralizing effect by the ions from being inhibited by the rectifying plate. Accordingly, a static elimination effect of a certain level or more can be obtained even in an environment with low humidity. As a result, it is possible to sufficiently remove static electricity regardless of the surrounding environment.

  (2) The static eliminator may further include a temperature adjustment unit that adjusts the temperature of the air, and the humidified air generation unit may humidify the air whose temperature has been adjusted by the temperature adjustment unit.

  In this case, since the temperature of the air is adjusted, the amount of moisture that the air can acquire from the humidified air generation unit can be increased. Thereby, static elimination efficiency can be improved more.

  (3) The static eliminator may further include a first control unit that controls the temperature adjustment unit such that the absolute humidity of the humidified air flowing out from the outlet is equal to or less than the saturated water vapor amount of the air around the object. .

  In this case, the absolute humidity of the humidified air supplied to the object is equal to or less than the saturated water vapor amount of the air around the object. Thereby, dew condensation of a target object can be prevented.

  (4) The static eliminator further includes a temperature measurement unit that measures the temperature of the humidified air generated by the humidified air generation unit, and an external temperature acquisition unit that acquires the temperature of the external air, and the first control unit includes: The temperature adjustment unit may be controlled such that the temperature of the humidified air measured by the temperature measurement unit is equal to or lower than the temperature of the external air acquired by the external temperature acquisition unit.

  In this case, the condensation of the object can be easily prevented based on the temperature of the humidified air measured by the temperature measuring unit and the temperature of the external air acquired by the external temperature acquiring unit. Further, according to this configuration, since it is not necessary to directly measure the relative humidity of the inside of the static elimination device and the outlet, the configuration of the static elimination device can be simplified.

  (5) The static eliminator includes a temperature measurement unit that measures the temperature of the humidified air generated by the humidified air generation unit, an external temperature acquisition unit that acquires the temperature of the external air, and an input unit that inputs the target relative humidity The absolute humidity of the humidified air is estimated based on the temperature of the humidified air measured by the temperature measurement unit, and the relative humidity at the temperature of the external air acquired by the external temperature acquisition unit calculated based on the absolute humidity is the target. You may further provide the 2nd control part which controls a temperature adjustment part so that it may become relative humidity.

  In this case, humidity control can be easily performed based on the temperature of the humidified air measured by the temperature measurement unit and the temperature of the external air acquired by the external temperature acquisition unit. Further, according to this configuration, it is not necessary to directly measure the absolute humidity and the relative humidity of the inside of the static eliminator and the outlet, so that the configuration of the static eliminator can be simplified.

  In this case, based on the temperature of the air whose temperature has been adjusted by the temperature adjusting unit, the temperature of the air around the object, and the relative humidity of the humidified air generated by the humidified air generating unit, Humidity is easily calculated. Further, the relative humidity of the air around the object is input to the input unit. Thereby, the relative humidity of the air around the object can be efficiently made equal to or less than the relative humidity of the air around the object.

  (6) One or a plurality of static elimination needles may be arranged on the holder so that ions generated by corona discharge are sent out by humidified air flowing out from the outlet.

  According to this structure, the static elimination effect improves compared with the case where ion is sent out by the air with low humidity. Thereby, a high static elimination effect can be obtained even in an environment with low humidity. As a result, it is possible to sufficiently remove static electricity regardless of the surrounding environment.

  (7) The electrode includes first and second electrodes arranged to face each other, and the one or more static elimination needles are arranged between the first electrode and the second electrode, Includes a first outlet for letting humid air flow between the first electrode and the one or more static elimination needles, and a first outlet for letting humid air flow between the second electrode and the one or more static elimination needles. And two outlets.

  In this case, ions generated between the first counter electrode and the one or more static elimination needles are sent out by humidified air flowing out from the first outlet. In addition, ions generated between the second counter electrode and the one or more static elimination needles are sent out by humidified air flowing out from the second outlet. According to this configuration, ions generated on both sides of each static elimination needle can be efficiently sent out with humidified air. Therefore, it is possible to efficiently neutralize the object.

  (8) One or a plurality of static elimination needles may be provided so as to be located in the humidified air flowing out from the outlet.

  In this case, ions generated around each static elimination needle can be efficiently sent out with humidified air. Therefore, it becomes easy to efficiently neutralize the object.

  (9) The electrode may be formed so as to surround each static elimination needle in an annular shape, and the outlet may allow the humid air to flow out into an annular region between each static elimination needle and the electrode.

  In this case, ions generated around each static elimination needle can be efficiently sent out with humidified air. Therefore, it becomes easy to efficiently neutralize the object.

  (10) The holding body includes an internal space, an inflow port, and an outflow port, and includes a casing that houses at least a part of the rectifying plate and the one or more static elimination needles, and the static elimination device is generated by the humidified air generation unit. A supply pipe for guiding the humidified air to the inlet of the housing may be further provided.

  In this case, the humidified air generated by the humidified air generating unit is guided to the housing by the supply pipe. Therefore, the housing and the humidified air generation unit can be separated. Thereby, it becomes easy to arrange | position the 1 or several static elimination needle of a housing | casing in the vicinity of a target object. As a result, the charge removal efficiency can be improved.

  (11) The housing includes first and second housings, and the rectifying plate includes a first rectifying plate held by the first housing and a second rectifying plate held by the second housing. And the one or more static elimination needles are arranged so as to protrude from the front end of the first current plate in the outflow direction of the humidified air, and are held in the first housing. And a second number of second static elimination needles disposed so as to protrude from the tip of the second rectifying plate in the outflow direction of the humidified air and held by the second casing. The first number is greater than the second number, and the electrode includes a first electrode held in the first housing and a second electrode held in the second housing, The apparatus includes a first power supply device that applies a voltage between the first static elimination needle and the first electrode, and a second power supply that applies a voltage between the second static elimination needle and the second electrode. Equipment and The first casing, the first rectifying plate, the first static elimination needle, the first electrode, and the first power supply device constitute a first static elimination head, and the second casing, the second rectification The plate, the second static elimination needle, and the second electrode may constitute a second static elimination head, and the first and second static elimination heads may be configured to be selectively connectable to and detachable from the humidified air generating unit. .

  In this case, the static elimination head connected to the humidified air generating unit can be selected according to the application and the shape of the object. The second static elimination needle of the second static elimination head is fewer than the first static elimination needle of the first static elimination head. In addition, since the second static elimination head does not need to include the second power supply device, the second static elimination head can be more easily downsized than the first static elimination head. Accordingly, a relatively wide range or a relatively large object can be easily removed by using the first charge eliminating head, and a relatively narrow range or relatively small object can be obtained by using the second charge eliminating head. An object can be easily neutralized.

  (12) The holding body may include a casing that has an outlet and accommodates a current plate, at least a part of one or a plurality of static elimination needles, and a humidified air generation unit.

  In this case, the outflow port, at least a part of the one or more static elimination needles, and the humidified air generating unit are integrally provided. Thereby, the structure of a static elimination apparatus can be simplified, and a static elimination apparatus can be reduced in size and weight.

  (13) The electrode may be arranged so as to intersect a plane perpendicular to each static elimination needle and positioned at the tip of each static elimination needle.

  In this case, the efficiency of corona discharge is improved. Thereby, static elimination efficiency can be improved more.

  (14) A static elimination head according to a second aspect of the present invention is a static elimination head configured to be connectable to a humidified air generating unit that humidifies air and generates humidified air by a supply pipe, and performs static elimination on an object. It is configured to be connectable to the humidified air generating unit by a pipe, and has a holding body having an outlet that flows out the humidified air generated by the humidified air generating unit, and the humidified air that is held by the holding body and flows out from the outlet is constant. A rectifying plate provided so as to rectify in the direction and a voltage for generating corona discharge can be applied, arranged so as to protrude from the tip of the rectifying plate in the outflow direction of the humidified air, and held by the holding body One or a plurality of static elimination needles, and an electrode configured to be able to apply a voltage for generating corona discharge and held by a holding body.

  In this static elimination head, the humidified air produced | generated by the humidified air production | generation part is supplied to a holding body through a supply pipe | tube. The humidified air supplied to the holding body flows out from the outlet and is rectified in a fixed direction by the rectifying plate. The holding body holds one or more static elimination needles and electrodes. A voltage for generating corona discharge is applied between the one or more static elimination needles and the electrode by the power supply device.

  The rectifying plate suppresses the humidified air sent out from the outlet from diffusing in the air around the outlet. Thereby, while being able to send out humidified air to a distant place, humidified air can fully be supplied to a target object. In addition, since the one or more static elimination needles protrude beyond the tip of the rectifying plate in the direction of the humidified air flow, the generated ions are reduced from being charged on the rectifying plate. Therefore, it is possible to prevent the neutralizing effect by the ions from being inhibited by the rectifying plate. Accordingly, a static elimination effect of a certain level or more can be obtained even in an environment with low humidity. As a result, it is possible to sufficiently remove static electricity regardless of the surrounding environment.

  According to the present invention, it is possible to sufficiently remove static electricity regardless of the surrounding environment.

It is an external appearance perspective view of the static elimination apparatus which concerns on the 1st Embodiment of this invention. It is a schematic diagram which shows the internal structure of the humidification air production | generation part of the static elimination apparatus of FIG. It is an external appearance perspective view which shows the static elimination head in a 1st example. FIG. 4 is a longitudinal sectional view in the width direction of the static elimination head of FIG. 3. It is an enlarged view of the A section of FIG. FIG. 4 is a longitudinal sectional view of the static elimination head of FIG. 3. FIG. 4 is a cross-sectional perspective view in the width direction of the static elimination head of FIG. 3. It is an expanded sectional view of the B section of FIG. It is an external appearance perspective view which shows the static elimination head in a 2nd example. FIG. 10 is a longitudinal sectional view of the static elimination head of FIG. 9. It is a front view of the baffle plate unit of the static elimination head of FIG. It is an enlarged view of the C section of FIG. It is an external appearance perspective view which shows the static elimination head in a 3rd example. It is a longitudinal cross-sectional view of the static elimination head of FIG. It is a flowchart which shows an example of the temperature control process of the humidified air by a control part. It is a flowchart which shows the other example of the temperature control process of the humidified air by a control part. It is a typical external appearance perspective view of the static elimination apparatus which concerns on 2nd Embodiment. It is an enlarged view of the D section of FIG. It is typical which shows the structure of the humidification filter in another system. It is a top view which shows the 1st modification of the baffle plate unit of a static elimination head. It is a top view which shows the 2nd modification of the baffle plate unit of a static elimination head. It is a figure which shows the static elimination performance of the static elimination head of Example 1, and the static elimination apparatus using the same. It is a figure which shows the static elimination performance of the static elimination apparatus using the static elimination head of Examples 2-4. It is a figure which shows the static elimination performance of the static elimination apparatus using the static elimination head of Examples 5-7. FIG. 10 is a diagram illustrating a plurality of partition walls of a static elimination head according to an eighth embodiment. FIG. 10 is a diagram illustrating a plurality of partition walls of a static elimination head of Example 9. FIG. 10 is a diagram illustrating a plurality of partition walls of a static elimination head according to Example 10. It is a figure which shows the some partition of the static elimination head of Example 11. FIG. It is a figure which shows the static elimination performance of the static elimination apparatus using the static elimination head of Examples 8-11. It is a figure which shows the static elimination head of Example 12 and Comparative Examples 1-3. It is a figure which shows the static elimination performance of the static elimination apparatus using the static elimination head of Example 12 and Comparative Examples 1-3. It is a figure which shows the static elimination head of Comparative Examples 4-6 and Example 13. FIG. It is a figure which shows the static elimination performance of the static elimination apparatus using the static elimination head of Comparative Examples 4-6 and Example 13. FIG. It is an external appearance perspective view which shows the static elimination head in case a baffle plate is not provided. It is a graph which shows the relationship between the position from a static elimination head, and the relative humidity of air.

[1] First Embodiment Hereinafter, a static eliminator according to a first embodiment of the present invention will be described with reference to the drawings.

(1) Configuration of the static eliminator FIG. 1 is an external perspective view of the static eliminator according to the first embodiment of the present invention. As shown in FIG. 1, the static eliminator 100 includes a static elimination head 200 and a humidified air generation unit 300. The static elimination head 200 and the humidified air generation unit 300 are connected by a bellows-like hose 101. In FIG. 1, only one end and the other end of the hose 101 are shown. Various types of static elimination heads 200 can be connected to the humidified air generation unit 300. FIG. 1 shows a static elimination head 200 of a first example described later.

  FIG. 2 is a schematic diagram illustrating an internal configuration of a humidified air generation unit of the static eliminator of FIG. As shown in FIG. 2, the humidified air generating unit 300 includes a housing 310, a heater 320, a humidifying filter 330, a turbo fan 340, an electronic board 350, and a heat sink 360. In this example, the humidified air generation unit 300 generates humidified air by a hybrid vaporization method. In the hybrid vaporization method, the amount of moisture that can be acquired from the humidification filter 330 of the vaporization method can be increased by heating the air with the heater 320.

  The casing 310 has a substantially rectangular parallelepiped shape including four side surface portions 310a, a bottom surface portion 310b, and an upper surface portion 310c. A heater 320, a humidifying filter 330, a turbo fan 340, an electronic board 350, and a heat sink 360 are disposed in the housing 310. An air inflow port 311 for allowing air to flow into the housing 310 is formed at an upper portion of one side surface portion 310 a of the housing 310. An air outlet 312 for allowing the air inside the casing 310 to flow out is formed on the upper surface portion 310 c of the casing 310. One end of the hose 101 in FIG. 1 is connected to the air outlet 312.

  A display portion 313 (see FIG. 1) is provided on the upper surface portion 310c of the housing 310. The display unit 313 includes, for example, an LED (light emitting diode) panel, and displays an operation state of the static eliminator 100. Further, the user of the static elimination apparatus 100 can input or select a set value of the relative humidity on the surface of the static elimination object in advance by operating the display unit 313. Thereby, the relative humidity of the surface of the static elimination object can be controlled so as to be a set value desired by the user. As a result, it is possible to neutralize the static elimination object without causing condensation on the static elimination object. Details will be described later.

  Air flow paths inside the housing 310 are indicated by thick dotted arrows in FIG. The air flowing into the housing 310 from the air inlet 311 travels in the horizontal direction and then travels downward and passes through the heater 320. Thereby, air is heated. The air that has passed through the heater 320 travels in the horizontal direction in the lower part of the housing 310 and passes through the humidifying filter 330.

  The humidifying filter 330 includes a humidifying material supplied with water. The humidifying material is, for example, a nonwoven fabric. The humidifying material may be, for example, a moisture permeable membrane type humidifying material using a porous moisture permeable membrane. The humidifying material is woven in a corrugated shape (corrugated cardboard cross-sectional shape) or a pleated shape (accordion shape) in order to increase the contact area with air.

  In this example, a capillary type is adopted in which a part of the humidifying material is immersed in water so that water is supplied to the entire humidifying material by capillary action. A dripping and penetrating method in which water is supplied to the entire humidifying material by dropping water from the top of the humidifying material may be employed. Alternatively, a rotary type in which water is supplied to the entire humidifying material by rotating the humidifying material while a part of the humidifying material is immersed in water may be employed.

  When the air passes through the humidifying material of the humidifying filter 330, moisture is acquired from the humidifying material. Thereby, the humidity of air increases. The air that has passed through the humidifying filter 330 travels upward as humidified air, and is sent out by the turbofan 340 to the hose 101 connected to the air outlet 312. In the vicinity of the turbo fan 340, a temperature measuring unit 314 for measuring the temperature of the humidified air that has passed through the humidifying filter 330 is disposed.

A relative humidity measuring unit for measuring the relative humidity of the humidified air that has passed through the humidifying filter 330 may be provided in the vicinity of the temperature measuring unit 314. Alternatively, it may be designed in advance such that the relative humidity of the humidified air that has passed through the humidifying filter 330 in the vicinity of the temperature measuring unit 314 is about 90% to 95%. Based on the temperature and relative humidity, the absolute humidity of the humidified air or the relative humidity of the humidified air at a predetermined temperature can be estimated. Here, the absolute humidity in the present embodiment is a volume absolute humidity, and means the mass [g] of water vapor contained per unit volume [m ³ ] of the atmosphere.

  A control unit 351 including a CPU (Central Processing Unit) that controls the operation of the heater 320 and the turbo fan 340 is mounted on the electronic board 350. In addition, a power supply device 352 that supplies power to the heater 320, the turbo fan 340, the control unit 351, and the like is mounted on the electronic board 350. The heat sink 360 is disposed on the electronic substrate 350. The heat sink 360 cools the heat generating components on the electronic substrate 350.

(2) Static elimination head (a) 1st example FIG. 3: is an external appearance perspective view which shows the static elimination head 200 in a 1st example. 4 is a longitudinal sectional view in the width direction of the static elimination head 200 of FIG. FIG. 5 is an enlarged view of a portion A in FIG. 6 is a longitudinal sectional view of the static elimination head 200 of FIG. FIG. 7 is a cross-sectional perspective view of the static elimination head 200 of FIG. 3 in the width direction. FIG. 8 is an enlarged cross-sectional view of a portion B in FIG. Hereinafter, the static elimination head 200 in the 1st example of FIG. 3 is called the static elimination head 200A.

  As shown in FIGS. 3 to 6, the static elimination head 200 </ b> A includes a housing 210, a plurality of static elimination needles 220 (FIG. 6), a pair of ground electrodes 230 (FIG. 4), and a plurality of rectifying plates 240 (FIGS. 4 and 6). including. The pair of ground electrodes 230 are electrically connected to each other. The housing 210 of the static elimination head 200A has a substantially rectangular cross section and extends in a long shape along one direction (longitudinal direction). The length in the longitudinal direction of the casing 210 is, for example, 400 mm. The length in the longitudinal direction of the casing 210 may be, for example, 700 mm or 1000 mm. Alternatively, the length of the casing 210 in the longitudinal direction may exceed 1000 mm.

  As shown in FIG. 3, an air inlet 211 for allowing humidified air to flow into the housing 210 is formed at one end of the housing 210. A pair of air outlets 212 for allowing the humid air inside the casing 210 to flow out is formed on the lower surface of the casing 210. The air inflow port 211 is provided on one end surface of the casing 210 in the longitudinal direction. The other end of the hose 101 in FIG. 1 is connected to the air inlet 211. Humidified air flows into the housing 210 from the humidified air generating unit 300 through the hose 101 at the air inlet 211. The humidified air that has flowed in is ejected from the air outlet 212 to the static elimination object.

  As shown in FIG. 6, a temperature measurement unit 214 that measures the temperature of the air outside the housing 210 is provided inside the housing 210. The temperature measurement unit 214 is disposed at a position that does not directly contact the humid air but contacts the air outside the housing 210. Thereby, it becomes possible to measure the temperature of the air outside the casing 210.

  In addition, a power supply device 215 is provided inside the housing 210. A plurality of (five in the example of FIG. 6) circular openings 213 are formed in a substantially central portion in the width direction of the lower surface of the casing 210 so as to be aligned along the longitudinal direction. A plurality of static elimination needles 220 are provided inside the casing 210 so as to face downward (outward of the casing 210).

  As shown in FIG. 5, the static elimination needle 220 protrudes from each opening 213. Around the opening 213, a plurality of (four in this example) protrusions 218 are provided. The lower surfaces of the plurality of protrusions 218 are positioned below the tip of the static elimination needle 220. Thereby, the plurality of protrusions 218 have a function of protecting the static elimination needle 220. Even when the static elimination needle 220 collides with a static elimination target object or another object, the needle tip of the static elimination needle 220 is prevented from being bent by the plurality of protrusions 218.

  As shown in FIGS. 4 and 8, the ground electrode 230 is provided at the lower part of both side surfaces in the width direction of the casing 210 so as to extend in the longitudinal direction. The air outlet 212 is provided at both ends in the width direction of the casing 210 so as to extend along the longitudinal direction. Accordingly, one air outlet 212 is positioned between one ground electrode 230 and the plurality of static elimination needles 220, and the other air outlet 212 is between the other ground electrode 230 and the plurality of static elimination needles 220. Located in. A plurality of planar rectifying plates 240 are disposed at each air outlet 212.

  A gap between two adjacent protrusions 218 is positioned on a straight line connecting the static elimination needle 220 and the ground electrode 230. In this case, since no obstacle is disposed between the needle tip of the static elimination needle 220 and the ground electrode 230, corona discharge can be efficiently generated between the static elimination needle 220 and the ground electrode 230.

  As shown by arrows in FIGS. 6 and 7, the humidified air that has flowed in from the air inflow port 211 travels in the longitudinal direction and flows out from the air outflow port 212 while being rectified downward by the rectifying plate 240. The rectifying plate 240 suppresses the humidified air ejected from the air outlet 212 from diffusing in the air around the casing 210. Thereby, the static elimination head 200 can eject humid air farther.

  As shown in FIG. 8, each static elimination needle 220 is disposed so as to protrude by a distance L from each rectifying plate 240 in the direction in which the humidified air flows (downward in this example). A high voltage is applied between the plurality of static elimination needles 220 and the ground electrode 230 by the power supply device 215 in the housing 210 of FIG. As a result, corona discharge occurs between the plurality of static elimination needles 220 and the ground electrode 230. Ions are generated by corona discharge. The generated ions are sent out by the humidified air flowing out from the air outlet 212 and ejected to the static elimination object.

  As described above, in the static elimination head 200A, ions generated between one ground electrode 230 and the plurality of static elimination needles 220 are sent out by humidified air flowing out from one air outlet 212. Further, ions generated between the other ground electrode 230 and the plurality of static elimination needles 220 are sent out by humidified air that flows out from the other air outlet 212.

  According to this configuration, ions generated on both sides of the plurality of static elimination needles 220 are efficiently sent out with humidified air. Accordingly, since static elimination is performed over a wide range, the static elimination head 200A is suitable for static elimination of, for example, a wide static elimination object or a line-shaped static elimination object (for example, paper, film, or glass).

(B) Second Example FIG. 9 is an external perspective view showing a static elimination head 200 in the second example. FIG. 10 is a longitudinal sectional view of the static elimination head 200 of FIG. FIG. 11 is a front view of the rectifying plate unit of the static elimination head 200 of FIG. FIG. 12 is an enlarged view of a portion C in FIG. Hereinafter, the static elimination head 200 in the 2nd example of FIG. 9 is called the static elimination head 200B.

  As shown in FIG. 9, the casing 210 of the static elimination head 200B has a substantially disk shape. An air inflow port 211 is provided on one surface (back surface) of the casing 210. A plurality of air outlets 212 are provided on the other surface (front surface). As shown in FIG. 10, a temperature measurement unit 214 that measures the temperature of the air outside the housing 210 is provided inside the housing 210. The temperature measurement unit 214 is disposed at a position that does not directly contact the humid air but contacts the air outside the housing 210. Thereby, it becomes possible to measure the temperature of the air outside the casing 210. In addition, a power supply device 215 is provided inside the housing 210.

  As shown in FIG. 9, a plurality of static elimination needles 220 are provided inside the casing 210 so as to face the front at substantially equal angular intervals. In this example, six static elimination needles 220 are arranged at intervals of about 60 °. A ground electrode 230 is disposed on the front surface of the casing 210. The ground electrode 230 includes an inner electrode 231, a plurality of connection electrodes 232, and an outer electrode 233.

  The inner electrode 231 is an electrode having an annular shape surrounding the substantial center of the front surface of the casing 210. The outer electrode 233 is an electrode that is concentric with the inner electrode 231 and has an annular shape surrounding the inner electrode 231. The plurality of connection electrodes 232 electrically connect the inner electrode 231 and the outer electrode 233. In this example, the six connection electrodes 232 are arranged at intervals of about 60 °.

  As illustrated in FIG. 11, the static elimination head 200 </ b> B is provided with a rectifying plate unit 240 </ b> U including a plurality of rectifying plates 240. In addition to the plurality of rectifying plates 240, the rectifying plate unit 240U includes a holding member 241, a plurality of holding members 242, holding members 243, 244, 245, and a plurality of partition walls 246.

  The plurality of rectifying plates 240 and the plurality of partition walls 246 are integrally formed. The plurality of rectifying plates 240 and the plurality of partition walls 246 are arranged so as to form a honeycomb structure composed of a plurality of regular hexagons. The inside of each regular hexagon formed by the plurality of partition walls 246 is an opening 213.

  The holding members 241 and 243 to 245 have an annular shape, and are formed concentrically in this order from the inside. The plurality of holding members 242 connect the holding member 241 and the holding member 243. In this example, six holding members 242 are arranged at intervals of about 60 °. In this example, the plurality of openings 213 are arranged in a plurality of regions surrounded by the holding member 241, the two adjacent holding members 242 and the holding member 243, respectively.

  The holding members 244 and 245 are fixed to the casing 210 of FIG. Thereby, the current plate unit 240U is fixed to the casing 210. In a state where the rectifying plate unit 240U is fixed to the housing 210, the inner electrode 231 in FIG. 9 is positioned on the holding member 241. The plurality of connection electrodes 232 in FIG. 9 are respectively positioned on the plurality of holding members 242. The outer electrode 233 in FIG. 9 is located on the holding members 243 to 245.

  According to this configuration, as shown in FIG. 12, each static elimination needle 220 is surrounded by the plurality of partition walls 246. Thereby, a plurality of static elimination needles 220 project from the plurality of openings 213, respectively. Each static elimination needle 220 is surrounded by the inner electrode 231, the connection electrode 232, and the outer electrode 233.

  As indicated by arrows in FIG. 10, the humidified air that has flowed in from the air inlet 211 flows out from the air outlet 212 while being rectified in one direction by the rectifying plate 240. In this example, humidified air also flows out from the opening 213 where the static elimination needle 220 exists. Therefore, each static elimination needle 220 is located in the humidified air that flows out from the air outlet 212. Each static elimination needle 220 is arrange | positioned so that only the distance L may protrude from each baffle plate 240 in the direction (in this example) where humidified air flows out.

  A high voltage is applied between the plurality of static elimination needles 220 and the ground electrode 230 by the power supply device 215 in the casing 210. As a result, corona discharge occurs between the plurality of static elimination needles 220 and the ground electrode 230. Ions are generated by corona discharge. The generated ions are sent out by humidified air flowing out from the plurality of air outlets 212 and are ejected to the static elimination object.

  In this example, notches are formed in a part of the plurality of partition walls 246 surrounding each static elimination needle 220 so that an obstacle between the needle tip of each static elimination needle 220 and the ground electrode 230 is reduced. Accordingly, it is possible to efficiently generate corona discharge between the plurality of static elimination needles 220 and the ground electrode 230 while protecting the static elimination needles 220 by the plurality of partition walls 246.

  As described above, in the static elimination head 200 </ b> B, the plural static elimination needles 220 are provided so as to be positioned in the humidified air that flows out from the air outlet 212. Thereby, the ion produced | generated around each static elimination needle 220 is sent out efficiently with humidified air. According to this configuration, it is possible to provide a relatively large number of static elimination needles 220 on the casing 210. Thereby, since static elimination is performed over a wide range, the static elimination head 200B is suitable for, for example, static elimination of a static elimination object or a small part on a parts feeder in cell production.

(C) Third Example FIG. 13 is an external perspective view showing a static elimination head 200 in the third example. FIG. 14 is a longitudinal sectional view of the static elimination head 200 of FIG. Hereinafter, the static elimination head 200 in the 3rd example of FIG. 13 is called the static elimination head 200C.

  As shown in FIGS. 13 and 14, the casing 210 of the static elimination head 200C has a substantially cylindrical shape. An air inlet 211 is provided at one end (hereinafter referred to as a rear end) of the casing 210, and an air outlet 212 is provided at the other end (hereinafter referred to as a tip). The static elimination needle 220 is provided inside the housing 210 so as to face the tip. As shown in FIG. 14, a temperature measurement unit 214 that measures the temperature of the air outside the housing 210 is provided inside the housing 210. The temperature measurement unit 214 is disposed at a position that does not directly contact the humid air but contacts the air outside the housing 210. Thereby, it becomes possible to measure the temperature of the air outside the casing 210. In this example, no power supply device is provided inside the casing 210.

  A rectifying plate unit 240 </ b> U including a plurality of rectifying plates 240 is provided at the tip of the casing 210. The rectifying plate unit 240U includes a housing 247 and a partition wall 248 in addition to the plurality of rectifying plates 240.

  The plurality of rectifying plates 240 and the partition walls 248 are integrally formed. The partition wall 248 has a cylindrical shape. The inside of the partition wall 248 becomes the opening 213. The plurality of rectifying plates 240 are disposed so as to surround the partition wall 248 and form a honeycomb structure. The housing 247 has a cylindrical shape. The plurality of rectifying plates 240 and the partition 248 are held inside the housing 247.

  The housing 247 is fixed to the housing 210. Thereby, the current plate unit 240U is fixed to the casing 210. In the state where the rectifying plate unit 240U is fixed to the casing 210, the static elimination needle 220 is surrounded by the partition wall 248. Thereby, the static elimination needle 220 protrudes from the opening 213. A cylindrical ground electrode 230 is fitted on the outer peripheral surface of the casing 247 of the rectifying plate unit 240U. The air outlet 212 is located in an annular region between the partition wall 248 and the ground electrode 230.

  As indicated by arrows in FIG. 14, the humidified air that has flowed in from the air inlet 211 flows out from the air outlet 212 while being rectified in one direction by the rectifying plate 240. The static elimination needle 220 is disposed so as to protrude by a distance L from each of the rectifying plates 240 in the direction in which the humidified air flows out (the tip direction in this example).

  In the static elimination head 200 </ b> C, a high voltage is applied between the static elimination needle 220 and the ground electrode 230 by a high voltage power source (not shown) of the humidified air generation unit 300 in FIG. 2. Thereby, corona discharge is generated between the static elimination needle 220 and the ground electrode 230. Ions are generated by corona discharge. The generated ions are sent out by humidified air flowing out from the plurality of air outlets 212 and are ejected to the static elimination object.

  As described above, in the static elimination head 200 </ b> C, the ground electrode 230 is formed so as to surround the static elimination needle 220 in an annular shape, and the air outlet 212 is provided in the annular area between the static elimination needle 220 and the ground electrode 230. Spill. Thereby, the ion produced | generated around the static elimination needle 220 is efficiently sent out with humidified air. According to this configuration, the casing 210 is formed thin. Accordingly, since static elimination is performed only in a narrow range, the static elimination head 200C is suitable for, for example, static elimination of small parts such as an injection molded part or an electronic part.

(3) Humidified Air Temperature Control Processing The control unit 351 of the humidified air generation unit 300 in FIG. 2 performs humidified air temperature control processing so that the static elimination object is not condensed by the humidified air ejected from the static elimination head 200. To do. FIG. 15 is a flowchart illustrating an example of humidified air temperature control processing by the control unit 351.

  The control unit 351 acquires the temperature of the humidified air in the housing 310 of the humidified air generating unit 300 from the temperature measuring unit 314 in FIG. 2 (Step S1). The temperature measuring unit 314 is provided in the vicinity of the turbo fan 340. Therefore, the temperature acquired by the temperature measuring unit 314 is the temperature of the humidified air near the turbo fan 340.

  In this example, the relative humidity of the humidified air that has passed through the humidifying filter 330 in FIG. 2 is set in advance to be approximately 90 to 95%. The control unit 351 calculates the absolute humidity of the humidified air in the housing 310 of the humidified air generating unit 300 based on the preset relative humidity and the temperature acquired from the temperature measuring unit 314 (step S2).

  Next, the control unit 351 acquires the temperature of the air around the static elimination head 200 from the temperature measurement unit 214 of FIG. 6, FIG. 10, or FIG. 14 (step S3). The display unit 313 may be configured to allow the user to input the temperature around the static elimination head 200. In this case, the temperature measuring unit 214 may not be provided in the static elimination head 200. The control unit 351 can acquire the input ambient temperature of the static elimination head 200 from the display unit 313. Subsequently, the control unit 351 calculates the saturated water vapor amount of the air around the static elimination head 200 based on the temperature acquired from the temperature measurement unit 214 or the display unit 313 (step S4).

  Thereafter, the control unit 351 determines whether or not the calculated absolute humidity of the humidified air in the casing 210 of the static elimination head 200 is equal to or less than the saturated water vapor amount of the air around the static elimination head 200 (step S5). In step S5, when the absolute humidity of the humidified air in the casing 210 of the static elimination head 200 is equal to or less than the saturated water vapor amount of the air around the static elimination head 200, the control unit 351 increases the output of the heater 320 (step S6). Thereafter, the control unit 351 returns to the process of step S1.

  On the other hand, when the absolute humidity of the humidified air in the housing 210 of the static elimination head 200 exceeds the saturated water vapor amount of the air around the static elimination head 200 in step S5, the control unit 351 decreases the output of the heater 320 (step S7). . Thereafter, the control unit 351 returns to the process of step S1. By repeating the above procedure, it is possible to neutralize the static elimination object without causing condensation on the static elimination object.

  FIG. 16 is a flowchart illustrating another example of humidified air temperature control processing by the control unit 351. The processing in steps S11 to S13 in FIG. 16 is the same as the processing in steps S1 to S3 in FIG.

  After the process of step S13, the control unit 351 acquires the target relative humidity from the display unit 313 of FIG. 1 (step S14). The target relative humidity may be a target value of the relative humidity of the air around the object, or simply, the humidified air ejected from the static elimination head 200 becomes the temperature of the air around the static elimination head 200. It is good also as a target value of relative humidity at the time. Alternatively, the target relative humidity may be stored in advance in a memory (not shown) mounted on the electronic board 350 in FIG. Next, the control unit 351 converts the target relative humidity into absolute humidity based on the temperature acquired from the temperature measurement unit 214 or the display unit 313 (step S15).

  Thereafter, the control unit 351 determines whether or not the calculated absolute humidity of the humidified air in the casing 210 of the static elimination head 200 is equal to or less than the converted absolute humidity (step S16). In step S16, when the absolute humidity of the humidified air in the casing 210 of the static elimination head 200 is equal to or lower than the converted absolute humidity, the control unit 351 increases the output of the heater 320 (step S17). Then, the control part 351 returns to the process of step S11.

  On the other hand, when the absolute humidity of the humidified air in the casing 210 of the static elimination head 200 exceeds the converted absolute humidity in step S16, the control unit 351 decreases the output of the heater 320 (step S18). Then, the control part 351 returns to the process of step S11. By repeating the above procedure, it is possible to neutralize the static elimination object without causing condensation on the static elimination object.

  Instead of the process of step S15, based on the absolute humidity of the humidified air in the casing 310 of the humidified air generating unit 300 and the temperature acquired by the temperature measuring unit 214 or the display unit 313, the air around the static elimination head 200 is changed. Relative humidity may be calculated. In this case, in the process of step S16, it is determined whether or not the calculated relative humidity of the air around the static elimination object is equal to or lower than the target relative humidity.

  When the calculated relative humidity of the air around the static elimination object is equal to or lower than the target relative humidity, the output of the heater 320 is increased. On the other hand, when the calculated relative humidity of the air around the static elimination object exceeds the target relative humidity, the output of the heater 320 is decreased.

  As another function of the control unit 351, the control unit 351 controls the heater 320 so that the temperature measured by the temperature measurement unit 314 becomes the temperature acquired by the temperature measurement unit 214 or the display unit 313. The control of the heater 320 in the process, the control of the heater 320 in the process of FIG. 15 and the control of the heater 320 in the process of FIG. 16 may be performed by a single control unit 351, or may be performed by separate control units. It may be broken.

  As yet another function of the control unit 351, the control unit 351 may have a function of performing feedback control of ion balance by measuring ion current. Further, the control unit 351 may have a function of detecting the amount of ions or a function of outputting an alarm when abnormal discharge occurs.

(4) Effects In the static eliminator 100 according to the present embodiment, humidified air is generated by the humidified air generation unit 300. The generated humid air flows out from the air outlet 212 of the static elimination head 200 and is rectified in a certain direction by the rectifying plate 240. The static elimination head 200 holds one or a plurality of static elimination needles 220 and a ground electrode 230. A high voltage for generating corona discharge is applied between the one or more static elimination needles 220 and the ground electrode 230.

  According to this configuration, the static elimination object is neutralized by supplying humidified air to the static elimination object, and the static elimination object is further neutralized by supplying ions to the static elimination object. The rectifying plate 240 suppresses the humidified air sent from the air outlet 212 from diffusing in the air around the air outlet 212. Thereby, while being able to send out humid air to a distant place, humid air can fully be supplied to a static elimination object.

  In addition, since the one or more static elimination needles 220 protrude from the tip of the rectifying plate 240 in the direction of the humidified air flow, it is possible to reduce the generated ions from charging the rectifying plate 240. Therefore, it is possible to prevent the rectifying plate 240 from inhibiting the neutralizing effect by ions. Accordingly, a static elimination effect of a certain level or more can be obtained even in an environment with low humidity. As a result, it is possible to sufficiently remove static electricity regardless of the surrounding environment.

  In the present embodiment, one or more static elimination needles 220 are arranged on the static elimination head 200 so that ions generated by corona discharge are sent out by humidified air. Therefore, the charge removal effect is improved as compared with the case where ions are sent out by air with low humidity. Thereby, the static elimination effect more than fixed can be acquired even in an environment with low humidity.

  In the present embodiment, the humidified air generated by the humidified air generation unit 300 is guided to the static elimination head 200 by the hose 101. Therefore, the static elimination head 200 and the humidified air production | generation part 300 can be spaced apart. Thereby, it becomes easy to arrange one or a plurality of static elimination needles 220 of the static elimination head 200 in the vicinity of the static elimination object. As a result, the charge removal efficiency can be improved.

  Furthermore, in the present embodiment, the static elimination heads 200A to 200C connected to the humidified air generation unit 300 can be selected according to the application and the shape of the static elimination object. The static elimination needles 220 of the static elimination head 200C are fewer than the static elimination needles 220 of the static elimination heads 200A and 200B. Further, the static elimination head 200C does not need to include a power supply device therein, and thus is smaller than the static elimination heads 200A and 200B.

  Accordingly, a relatively wide range or a relatively large charge removal object can be easily removed by using the charge removal heads 200A and 200B, and a relatively narrow range or relatively small charge removal object can be obtained by using the charge removal head 200C. An object can be easily neutralized.

  In the present embodiment, any of the plurality of static elimination heads 200 is configured to be detachably attached to the humidified air generation unit 300, but is not limited thereto. Two or more static elimination heads 200 may be configured to be attached to the wet air generation unit 300.

[2] Second Embodiment (1) Configuration of Charge Removal Device Differences between the charge removal device according to the second embodiment and the charge removal device 100 according to the first embodiment will be described. FIG. 17 is a schematic external perspective view of the static eliminator according to the second embodiment. FIG. 18 is an enlarged view of a portion D in FIG.

  As shown in FIGS. 17 and 18, the static eliminator 100 according to the present embodiment includes a housing 110, a static eliminator 120, a ground electrode 130, a rectifying plate 140, and a water supply unit 150. The static elimination needle 120, the ground electrode 130, and the rectification | straightening board 140 have the structure and function similar to the static elimination needle 220 of FIG. 13, the ground electrode 230, and the rectification | straightening board 240, respectively.

  The casing 110 has a substantially rectangular parallelepiped shape. In the housing 110, the same heater, humidification filter, and electronic substrate as the heater 320, the humidification filter 330, and the electronic substrate 350 of FIG. 2 are provided, respectively. In addition, a temperature measurement unit (not shown) is provided in the housing 110. Based on the temperature acquired by the temperature measurement unit, the control unit mounted on the electronic board in the casing 110 can execute the temperature control process of the humidified air similar to FIG.

  The water supply unit 150 is disposed so as to be adjacent to the one end face of the casing 110. The water supply unit 150 is a water storage tank, for example, and includes a container 151 and a lid 152. The water supply unit 150 may be a plastic bottle, for example. Alternatively, the water supply unit 150 may be directly connected to the water pipe.

  An inlet 153 and an outlet 154 are formed in the container 151. Water is injected into the container 151 from the injection port 153, and water is stored in the container 151. The lid 152 is attached to the container 151 so as to close the injection port 153 of the container 151. The water stored in the container 151 is supplied from the discharge port 154 to the inside of the adjacent casing 110.

  A display portion 113 similar to the display portion 313 in FIG. 1 is provided on the upper surface of the housing 110. Further, an air inlet 111 for supplying compressed air to the inside of the housing 110 is formed on the upper surface of the housing 110. A compressed air pipe 102 is connected to the air inlet 111. When a small fan for taking in air is provided in the housing 110, the compressed air pipe 102 does not have to be connected to the air inlet 111.

  As shown in FIG. 18, a rectifying plate unit 140 </ b> U having a cylindrical shape is provided so as to protrude from the other end surface of the casing 110. An air outlet 112 is provided at one end of the current plate unit 140U. The rectifying plate unit 140U includes a plurality of rectifying plates 140, a housing 141, and a partition wall 142.

  The plurality of rectifying plates 140 and the partition walls 142 are integrally formed. The partition wall 142 has a cylindrical shape. An opening 114 is formed inside the partition wall 142. The plurality of rectifying plates 140 are disposed so as to surround the partition wall 142 and form a honeycomb structure. The housing 141 has a cylindrical shape. The plurality of rectifying plates 140 and the partition walls 142 are held inside the housing 141.

  The housing 141 is fixed to the housing 110. Thereby, the current plate unit 140U is fixed to the housing 110. In the state where the rectifying plate unit 140U is fixed to the housing 110, the static elimination needle 120 is surrounded by the partition wall 142. Thereby, the static elimination needle 120 protrudes from the opening part 114. A ground electrode 130 having a cylindrical shape is fitted on the outer peripheral surface of the housing 141. The air outlet 212 is located in an annular region between the partition wall 142 and the ground electrode 230.

  The air that flows in from the air inlet 111 is humidified in the housing 110 and flows out from the air outlet 112 while being rectified in one direction by the rectifying plate 140 as humidified air. The static elimination needle 120 is arrange | positioned so that only the distance L may protrude from each baffle plate 140 in the direction where humidified air flows out.

  A high voltage is applied between the static elimination needle 120 and the ground electrode 130 by a power supply device mounted on an electronic board (not shown) in the housing 110. As a result, corona discharge occurs between the static elimination needle 120 and the ground electrode 130. Ions are generated by corona discharge. The generated ions are sent out by the humidified air flowing out from the plurality of air outlets 112 and ejected to the static elimination object.

  The power supply device is preferably a high-frequency AC power supply device. In this case, the static elimination apparatus 100 can be reduced in size. Alternatively, when the positive electrode static elimination needle 120 and the negative electrode neutralization needle 120 are provided in the casing 110, the power supply device may be a DC power supply device. Even in this case, the static eliminator 100 can be reduced in size while maintaining a good ion balance.

  Similar to the first embodiment, the control unit mounted on an electronic board (not shown) in the housing 110 may have a function of performing feedback control of ion balance by measuring ion current. The control unit may have a function of detecting the amount of ions or a function of outputting an alarm when an abnormal discharge occurs.

(2) Effects Also in the present embodiment, the humidified air sent from the air outlet 112 is diffused in the air around the air outlet 112 by the rectifying plate 140, as in the first embodiment. It is suppressed. Thereby, while being able to send out humid air to a distant place, humid air can fully be supplied to a static elimination object.

  Moreover, since the static elimination needle 120 protrudes from the front-end | tip of the baffle plate 140 in the outflow direction of humidified air, it is reduced that the produced | generated ion charges the baffle plate 140. FIG. Therefore, it is possible to prevent the neutralization effect due to ions from being obstructed by the rectifying plate 140. Accordingly, a static elimination effect of a certain level or more can be obtained even in an environment with low humidity. As a result, it is possible to sufficiently remove static electricity regardless of the surrounding environment.

  Further, in the present embodiment, the air outlet 112, at least a part of the one or more static elimination needles 120, and the humidifying filter 330 are integrally provided in the casings 110 and 141. Thereby, the structure of the static elimination apparatus 100 can be simplified, and the static elimination apparatus 100 can be reduced in size and weight.

[3] Other Embodiments (1) In the first and second embodiments, the humidification filter 330 is a vaporization type humidification filter, but is not limited thereto. The humidification filter 330 may be another type of humidification filter. FIG. 19 is a schematic diagram showing the configuration of the humidifying filter 330 in another method.

  The humidifying filter 330 in FIG. 19 includes a filter unit 331 and a humidifying unit 332. The filter unit 331 is a filter material that allows air to pass through and removes water droplets. The humidifying unit 332 is, for example, a spray, and supplies water droplets to the filter unit 331. As shown by the arrows in FIG. 19, the air is humidified by passing through the filter portion 331 and becomes humidified air.

  (2) In the first embodiment, the power supply device 215 is provided inside the housing 210 of the static elimination heads 200A and 200B, but is not limited thereto. The power supply device 215 may not be provided in the housing 210 of the static elimination heads 200A and 200B. In this case, a high voltage is applied between the static elimination needle 220 and the ground electrode 230 by a high voltage power source (not shown) of the humidified air generation unit 300.

  Further, the power supply device is not provided inside the casing 210 of the static elimination head 200C, but the present invention is not limited to this. When there is sufficient space inside the casing 210 of the static elimination head 200C, a power supply device may be provided inside the casing 210. In this case, a high voltage is applied between the static elimination needle 220 and the ground electrode 230 by the power supply device inside the casing 210 of the static elimination head 200C.

  (3) In the first embodiment, the plurality of rectifying plates 240 of the rectifying plate unit 240U of the static elimination head 200B are arranged so as to form a honeycomb structure, but are not limited thereto. The plurality of rectifying plates 240 may be arranged to form a structure having a plurality of other shapes.

  FIG. 20 is a plan view showing a first modification of the rectifying plate unit 240U of the static elimination head 200B. As shown in FIG. 20, in the first modification of the rectifying plate unit 240U, the plurality of rectifying plates 240 are arranged so as to form a structure composed of a plurality of squares. The plurality of partition walls 246 are arranged so as to form a square. The inside of each square formed by the plurality of partition walls 246 becomes the opening 213.

  FIG. 21 is a plan view showing a second modification of the rectifying plate unit 240U of the static elimination head 200B. As shown in FIG. 21, in the second modification of the rectifying plate unit 240U, the plurality of rectifying plates 240 are arranged so as to form a structure composed of a plurality of circles. The plurality of partition walls 246 are arranged so as to form a circle. The inside of each circle formed by the plurality of partition walls 246 is an opening 213.

  Similarly, in the first embodiment, the plurality of rectifying plates 240 of the rectifying plate unit 240U of the static elimination head 200C may be arranged to form a structure having a plurality of other shapes. In the second embodiment, the plurality of rectifying plates 140 of the rectifying plate unit 140U of the static eliminator 100 may be arranged to form a structure having a plurality of other shapes.

  (4) In the first embodiment, the static elimination needle 220 is disposed at the approximate center in the width direction of the casing 210 of the static elimination head 200A. However, the present invention is not limited to this. In the static elimination head 200A of the first embodiment, the static elimination needle 220 is disposed at a position different from the center of the casing 210 in the width direction.

  Here, the static elimination object was neutralized using the static elimination head 200A of Example 1. FIG. 22 is a diagram illustrating the static elimination performance of the static elimination head 200A of Example 1 and the static elimination device 100 using the same.

  FIG. 22A is a schematic cross-sectional view of a part of the static elimination head 200A of the embodiment. The housing 210 of the static elimination head 200A shown in FIG. 22A has a width of 50 mm. The static elimination needle 220 is arranged at a position displaced 20 mm from the center in the width direction of the casing 210 to one side, and the ground electrode 230 is arranged at a position displaced 5 mm to the other side.

  FIG. 22B shows the static elimination performance of the static eliminator 100 using the static elimination head 200A shown in FIG. The vertical axis | shaft of FIG.22 (b) shows the static elimination time, shows the position from the center in the width direction of the housing 210, and shows the static elimination time of the static elimination object. In FIG. 22B, a position displaced from the center in the width direction of the casing 210 to one side is defined as a positive position, and a position displaced to the other side is defined as a negative position.

  When the static elimination needle 220 is arranged at a position different from the center in the width direction of the casing 210, the neutralization possible region is slightly biased. Therefore, as shown in FIG. 22B, the static elimination time of the static elimination object near the end in the width direction of the casing 210 is slightly increased compared to the static elimination time of the static elimination object near the center. When such an increase in the static elimination time can be allowed, the static elimination needle 220 may be arranged at a position different from the center in the width direction of the casing 210 of the static elimination head 200A.

  Similarly, in the static elimination head 200 </ b> C of the first embodiment, the static elimination needle 220 is disposed substantially at the center of the casing 210, but the present invention is not limited to this. If an increase in the charge removal time can be allowed, the charge removal needle 220 may be arranged at a position different from the center of the housing 210 of the charge removal head 200C. In the static elimination head 200B of the first embodiment, the plurality of static elimination needles 220 are arranged at substantially equal angular intervals, but the invention is not limited to this. When an increase in the charge removal time can be allowed, the plurality of charge removal needles 220 may not be arranged at substantially equal angular intervals.

  In the static elimination apparatus 100 of 2nd Embodiment, although the static elimination needle 120 is arrange | positioned in the approximate center of the air outflow port 112 of the housing 110, it is not limited to this. If the increase in the charge removal time can be allowed, the charge removal needle 120 may be arranged at a position different from the center of the air inlet 111 of the housing 110.

  (5) In the first embodiment, the ground electrode 230 of the static elimination head 200B includes the inner electrode 231 and the outer electrode 233, but is not limited thereto. In the static elimination head 200B of the second embodiment, the ground electrode 230 includes an inner electrode 231 and an outer electrode 233. The inner electrode 231 and the outer electrode 233 are electrically connected by one connection electrode 232. In the static elimination head 200B according to the third embodiment, the ground electrode 230 includes the inner electrode 231 and does not include the connection electrode 232 and the outer electrode 233. In the static elimination head 200B of the fourth embodiment, the ground electrode 230 includes the outer electrode 233 and does not include the inner electrode 231 and the connection electrode 232.

  The neutralization target was neutralized using the neutralization head 200B of Examples 2-4. Here, an AC voltage having a frequency of 33 Hz was applied to each static elimination needle 220. The positive voltage applied to each static elimination needle 220 was set to 5.3 kV, and the negative voltage was set to -3.7 kV. The positive voltage and the negative voltage are different because the ratio (duty ratio) between the period in which the positive voltage is applied and the period in which the negative voltage is applied is different. The distance between the needle tip of each static elimination needle 220 and the static elimination object was set to 300 mm, and the wind speed of the humidified air ejected from the air outlet 212 to the static elimination object was 1 m / sec.

  FIG. 23 is a diagram illustrating the charge removal performance of the charge removal apparatus 100 using the charge removal head 200 </ b> B according to the second to fourth embodiments. The vertical axis | shaft of FIG. 23 shows the static elimination time of the static elimination object. As shown in FIG. 23, the static elimination time in Examples 3 and 4 increased from the static elimination time in Example 2. When such an increase in the charge removal time can be allowed, the ground electrode 230 of the charge removal head 200B may not include the inner electrode 231 or the outer electrode 233. Furthermore, even when the ground electrode 230 is not disposed on the static elimination head 200, the ground electrode 230 may not be disposed on the static elimination head 200 if stable corona discharge can be generated.

  In addition, a plurality of static elimination heads 200B in which the distance between the inner electrode 231 and each static elimination needle 220 was changed were manufactured. In the static elimination head 200B of Examples 5, 6, and 7, the distance between the inner electrode 231 and each static elimination needle 220 was 10 mm, 20 mm, and 30 mm, respectively. The neutralization target was neutralized using the neutralization head 200B of Examples 5-7. The conditions for static elimination are the same as the conditions for static elimination in Examples 2 to 4.

  FIG. 24 is a diagram illustrating the static elimination performance of the static eliminator 100 using the static elimination head 200 </ b> B according to the fifth to seventh embodiments. The vertical axis | shaft of FIG. 24 shows the static elimination time of the static elimination object. As shown in FIG. 24, the static elimination time in Example 6 was shorter than the static elimination time in Example 5. The static elimination time in Example 7 was shorter than the static elimination time in Example 6. From these results, it was confirmed that the static elimination time of the static elimination object can be shortened by increasing the distance between the inner electrode 231 and each static elimination needle 220.

  However, the static elimination time of the static eliminator 100 when the distance between the inner electrode 231 and each static elimination needle 220 is greater than 30 mm is greater than the static elimination time in the seventh embodiment. This is considered to be caused by a decrease in the distance between the outer electrode 233 and each static elimination needle 220. Therefore, it was confirmed that the optimum static elimination performance can be obtained by arranging each static elimination needle 220 at the optimum position between the inner electrode 231 and the outer electrode 233.

  (6) In the first embodiment, notches are formed in a part of the plurality of partition walls 246 surrounding each static elimination needle 220 of the static elimination head 200B, but the present invention is not limited to this. FIG. 25 to FIG. 28 are diagrams showing a plurality of partition walls 246 of the static elimination head 200B of Examples 8 to 11, respectively. FIGS. 25A to 28A are perspective views of the plurality of partition walls 246, and FIGS. 25B to 28B are plan views of the plurality of partition walls 246. FIG.

  In the static elimination head 200B of Examples 8 to 11, six partition walls 246a to 246f are arranged so as to surround the static elimination needle 220 and form a regular hexagon. Further, the six partition walls 246a to 246f are arranged so as to be adjacent in this order. Therefore, the partition wall 246a and the partition wall 246d face each other with the static elimination needle 220 interposed therebetween. The partition wall 246b and the partition wall 246e face each other with the static elimination needle 220 interposed therebetween. The partition wall 246c and the partition wall 246f face each other with the static elimination needle 220 interposed therebetween.

  In the static elimination head 200B according to the eighth embodiment, as shown in FIGS. 25A and 25B, no notch is formed in any of the partition walls 246a to 246f. In the static elimination head 200B according to the ninth embodiment, as shown in FIGS. 26A and 26B, substantially trapezoidal notches are formed in a pair of partition walls 246a and 246d facing each other with the static elimination needle 220 interposed therebetween.

  In the static elimination head 200B of the tenth embodiment, as shown in FIGS. 27A and 27B, a pair of partition walls 246a and 246d and the other two partition walls 246c and 246e which are opposed to each other with the static elimination needle 220 interposed therebetween are substantially mounted. A cutout in shape is formed. In the static elimination head 200B of the eleventh embodiment, as shown in FIGS. 28A and 28B, substantially trapezoidal notches are formed in all the partition walls 246a to 246f. In FIGS. 25B to 28B, hatching patterns are attached to the portions of the partition walls 246a to 246f where the notches are formed.

  The static elimination target was neutralized using the static elimination head 200B of Examples 8-11. The conditions for static elimination are the same as the conditions for static elimination in Examples 2 to 4. FIG. 29 is a diagram illustrating the static elimination performance of the static eliminator 100 using the static elimination head 200 </ b> B according to the eighth to eleventh embodiments. The vertical axis in FIG. 29A indicates the ion current due to corona discharge that is generated when a positive voltage is applied to the static elimination needle 220. The vertical axis in FIG. 29B shows the ion current due to corona discharge that occurs when a negative voltage is applied to the static elimination needle 220.

  As shown in FIGS. 29A and 29B, the ion current in Example 9 increased from the ion current in Example 8. The ionic current in Example 10 increased from the ionic current in Example 9. The ion current in Example 11 increased from the ion current in Example 10. From these results, it was confirmed that the ion current can be increased by forming notches in the plurality of partition walls 246a to 246f.

  This is considered to be because corona discharge is efficiently generated between the static elimination needle 220 and the ground electrode 230 by reducing the obstacle between the needle tip of the static elimination needle 220 and the ground electrode 230. . Therefore, in the case where corona discharge can be generated with sufficiently high efficiency, it is not necessary to form notches in some of the plurality of partition walls 246a to 246f.

  In this example, since the substantially trapezoidal notches are formed in the plurality of partition walls 246a to 246f, a plurality of protrusions 246s are formed at the boundary portions (regular hexagonal corners) of the plurality of partition walls 246a to 246f. . The plurality of protrusions 246s have a function of protecting the static elimination needle 220, like the plurality of protrusions 218 in FIG. Even when the static elimination needle 220 collides with a static elimination object or another object, the needle tip of the static elimination needle 220 is prevented from being bent by the plurality of protrusions 246s.

  When the function of protecting the static elimination needle 220 is unnecessary, a part of the plurality of partition walls 246a to 246f may be removed so that the protruding portion 246s is not formed. Alternatively, some of the plurality of partition walls 246a to 246f may be removed such that the plurality of partition walls 246a to 246f are flush with the surrounding plurality of rectifying plates 240.

  (7) Hereinafter, the difference of the static elimination effect by the difference in the protrusion amount of the static elimination needle from the current plate is compared. FIG. 30 is a diagram illustrating the static elimination heads of Example 12 and Comparative Examples 1 to 3. The static elimination head of FIG. 30 has the same shape as the static elimination head 200B of FIG. FIGS. 30A to 30D show part of the cross section of the static elimination head of Example 12 and Comparative Examples 1 to 3, respectively.

  In the static elimination head of the twelfth embodiment, as shown in FIG. 30A, the needle tip of the static elimination needle 220 protrudes from the end portion (hereinafter referred to as one end portion) of the rectifying plate 240 in the outflow direction of the humidified air. To do. The distance L from one end of the current plate 240 to the needle tip of the static elimination needle 120 is 10 mm. In the static elimination head of Comparative Example 1, as shown in FIG. 30 (b), the needle tip of the static elimination needle 220 is located at the center of the rectifying plate 240 in the outflow direction of the humidified air. The distance L from one end of the current plate 240 to the needle tip of the static elimination needle 120 is −5 mm.

  In the static elimination head of Comparative Example 2, as shown in FIG. 30C, the needle tip of the static elimination needle 220 is located on a plane that is flush with the other end of the rectifying plate 240. The distance L from one end of the current plate 240 to the needle tip of the static elimination needle 120 is −10 mm. In the static elimination head of Comparative Example 3, as shown in FIG. 30 (d), the needle tip of the static elimination needle 220 is located above the rectifying plate 240. The distance L from one end of the rectifying plate 240 to the needle tip of the static elimination needle 220 is -16 mm.

  The static elimination object was neutralized using the static elimination heads of Example 12 and Comparative Examples 1 to 3. The conditions for static elimination are the same as the conditions for static elimination in Examples 2 to 4. FIG. 31 is a diagram illustrating the static elimination performance of the static eliminator using the static elimination heads of Example 12 and Comparative Examples 1 to 3. The vertical axis | shaft of FIG. 31 shows the static elimination time of the static elimination object.

  As shown in FIG. 31, the static elimination time in Comparative Example 1 was slightly increased as compared with the static elimination time in Example 12. The static elimination time in Comparative Example 2 was slightly increased as compared with the static elimination time in Comparative Example 1. The static elimination time in Comparative Example 3 increased from the static elimination time in Comparative Example 2. From these results, it was confirmed that the static elimination time of the static elimination object can be shortened by disposing the needle tip of the static elimination needle 220 at a position further downstream of the humidified air. This is considered to be because the generated ions adhere (charge) to the rectifying plate 240.

  (8) Hereinafter, the difference of the static elimination effect by the difference of the positional relationship of a static elimination needle, a ground electrode, and a baffle plate is compared. FIG. 32 is a diagram illustrating the static elimination heads of Comparative Examples 4 to 6 and Example 13. The static elimination head of FIG. 32 has the same shape as the static elimination head 200C of FIG. 32A to 32D show positional relationships among the static elimination needle 220, the ground electrode 230, and the rectifying plate 240 in the static elimination heads of Comparative Examples 4 to 6 and Example 13, respectively. 32A to 32D, the hatching pattern is attached to the ground electrode 230 and the dot pattern is attached to the rectifying plate 240 for easy understanding.

  In the static elimination head of Comparative Example 4, as shown in FIG. 32A, the ground electrode 230 is disposed at the needle tip of the static elimination needle 220, and the rectifying plate 240 is downstream of the humidified air from the needle tip of the static elimination needle 220. Placed in. In the static elimination head of Comparative Example 5, as shown in FIG. 32 (b), the ground electrode 230 and the rectifying plate 240 are arranged on the downstream side of the humidified air from the needle tip of the static elimination needle 220.

  In the static elimination head of Comparative Example 6, as shown in FIG. 32C, the ground electrode 230 is disposed upstream of the needle tip of the static elimination needle 220 and the rectifying plate 240 is the needle tip of the static elimination needle 220. It arrange | positions rather than the downstream of humidified air. In the static elimination head of Example 13, as shown in FIG. 32 (d), the ground electrode 230 is disposed at the needle tip of the static elimination needle 220, and the rectifying plate 240 is upstream of the humidified air from the needle tip of the static elimination needle 220. Placed in.

  The static elimination object was neutralized using the static elimination heads of Comparative Examples 4 to 6 and Example 13. The conditions for static elimination are the same as the conditions for static elimination in Examples 2 to 4. FIG. 33 is a diagram illustrating the static elimination performance of the static eliminator using the static elimination heads of Comparative Examples 4 to 6 and Example 13. The vertical axis | shaft of FIG. 33 shows the static elimination time of the static elimination object.

  As shown in FIG. 33, the static elimination time in Comparative Examples 4 to 6 increased from the static elimination time in Example 13. From these results, the ground electrode 230 is arranged at the needle tip of the static elimination needle 220, and the rectifying plate 240 is arranged at the upstream side of the humidified air from the needle tip of the static elimination needle 220, thereby shortening the static elimination time of the static elimination object. Confirmed that you can.

  This is considered to be because the efficiency of corona discharge is improved by disposing the ground electrode 230 so as to intersect the plane perpendicular to the static elimination needle 220 and at the tip of the static elimination needle 220. Further, it is considered that the static electricity generation needle 220 is arranged so as to protrude from the tip of the rectifying plate 240 in the humidified air outflow direction, so that the generated ions are less charged to the rectifying plate 240. .

  (9) Hereinafter, the difference of the static elimination effect by the presence or absence of a baffle plate is compared. FIG. 34 is an external perspective view showing the static elimination head when the rectifying plate 240 is not provided. In the static elimination head of FIG. 34, the rectifying plate 240 and the partition 248 are not provided in the rectifying plate unit 240U. Therefore, the inside of the holding member 247 of the rectifying plate unit 240U becomes the opening 213.

As Example 14 and Comparative Example 7, humidified air was ejected from the static elimination heads of FIGS. 13 and 34 to an environment having an ambient temperature of 25 ° C. with an air volume of 0.3 m ³ / min. In these cases, the relative humidity of the air at a position away from each static elimination head was measured.

  FIG. 35 is a graph showing the relationship between the position from the static elimination head and the relative humidity of the air. The horizontal axis in FIG. 35 indicates the position of each static elimination head from the air outlet 212, and the vertical axis indicates the relative humidity of the air. The results for the static elimination head of Example 14 are indicated by black circles, and the results for the static elimination head of Comparative Example 7 are indicated by black squares.

  As shown in FIG. 35, the relative humidity of air at any position from the static elimination head of Example 14 was higher than the relative humidity of air at the same position from the static elimination head of Comparative Example 7. Thereby, it was confirmed that the static elimination head 200 provided with the rectifying plate 240 can eject humid air farther than the static elimination head 200 not provided with the rectifying plate 240.

[4] Correspondence relationship between each constituent element of claim and each part of the embodiment Hereinafter, an example of correspondence between each constituent element of the claim and each part of the embodiment will be described. It is not limited.

  In the above embodiment, the static eliminator 100 is an example of a static eliminator, the power source device 352 is an example of a power source device, and the heater 320 is an example of a temperature adjustment unit. The control unit 351 is an example of the first and second control units, the temperature measurement unit 314 is an example of the temperature measurement unit, and the temperature measurement unit 214 or the display unit 313 is an example of the external temperature acquisition unit.

  In the first embodiment, the humidified air generating unit 300 is an example of a humidified air generating unit, the air outlet 212 is an example of an outlet, the static elimination head 200 is an example of a holding body, and the static elimination needle 220. Is an example of a static elimination needle, and the ground electrode 230 is an example of an electrode. The power supply devices 215 and 352 are examples of first and second power supply devices, the display unit 313 is an example of an input unit, the air inlet 211 is an example of an inlet, and the casing 210 is an example of a casing. Yes, the hose 101 is an example of a supply pipe, and the rectifying plate 240 is an example of a rectifying plate.

  In the first example of the static elimination head 200, the static elimination head 200A is an example of the first static elimination head, the rectification plate 240 is an example of the first and second rectification plates, and the ground electrode 230 is the first and second rectification plates. 2 is an example of two counter electrodes or an example of a first electrode. The air outlet 212 is an example of the first and second outlets, the casing 210 is an example of the first casing, and the static elimination needle 220 is an example of the first static elimination needle.

  In the second example of the static elimination head 200, the static elimination head 200B is an example of the first static elimination head, the casing 210 is an example of the first casing, and the static elimination needle 220 is an example of the first static elimination needle. The ground electrode 230 is an example of the first electrode. In the third example of the static elimination head 200, the static elimination head 200C is an example of the second static elimination head, the casing 210 is an example of the second casing, and the static elimination needle 220 is an example of the second static elimination needle. The ground electrode 230 is an example of the second electrode.

  In the second embodiment, the humidifying filter 330 is an example of a humidified air generating unit, the air outlet 112 is an example of an outlet, and the casings 110 and 141 are examples of a holding body or a casing. The static elimination needle 120 is an example of a static elimination needle, the ground electrode 130 is an example of an electrode, the display unit 113 is an example of an input unit, the air inlet 111 is an example of an inlet, and the rectifying plate 140 is a rectifying plate. It is an example.

  As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.

  The present invention can be effectively used to prevent the static elimination object from being charged.

DESCRIPTION OF SYMBOLS 100 Static elimination apparatus 101 Hose 102 Compressed air piping 110, 141, 210, 247, 310 Housing 111, 211, 311 Air inlet 112, 212, 312 Air outlet 113, 313 Display part 114, 213 Opening part 120, 220 Static elimination needle 130, 230 Ground electrode 140, 240 Rectifier plate 140U, 240U Rectifier plate unit 241-245 Holding member 142, 246, 246a-246f, 248 Partition 150 Water supply unit 151 Container 152 Lid unit 153 Inlet 154 Discharge port 200, 200A- 200C Static elimination head 214, 314 Temperature measurement part 215, 352 Power supply device 218 Protrusion part 231 Inner electrode 232 Connection electrode 233 Outer electrode 246s Projection part 300 Humidified air generation part 310a Side part 310b Bottom part 310c Upper surface part 3 0 heater 330 humidifying filter 331 filter unit 332 humidifying unit 340 turbofan 350 electronic substrate 351 controller 360 heatsink

Claims (14)

A static eliminator that neutralizes an object,
A humidified air generating section that humidifies air to generate humidified air;
A holding body having an outlet through which the humidified air generated by the humidified air generating section flows out;
A rectifying plate that is held by the holding body and is provided so as to rectify the humidified air flowing out from the outlet in a certain direction;
One or a plurality of static elimination needles held by the holding body and arranged so as to protrude from the tip of the current plate in the outflow direction of the humidified air;
An electrode held by the holder;
A static eliminator comprising a power supply device that applies a voltage between the one or more static eliminator needles and the electrode in order to generate a corona discharge. A temperature adjustment unit for adjusting the temperature of the air;
The static elimination apparatus according to claim 1, wherein the humidified air generating unit humidifies the air whose temperature is adjusted by the temperature adjusting unit. The static elimination of Claim 2 further provided with the 1st control part which controls the said temperature adjustment part so that the absolute humidity of the humidification air which flows out from the said outflow port becomes below the saturated water vapor quantity of the air around the said target object. apparatus. A temperature measuring unit for measuring the temperature of the humidified air generated by the humidified air generating unit;
An external temperature acquisition unit that acquires the temperature of the external air;
The said 1st control part controls the said temperature adjustment part so that the temperature of the humidified air measured by the said temperature measurement part may become below the temperature of the external air acquired by the said external temperature acquisition part. The static elimination apparatus of description. A temperature measuring unit for measuring the temperature of the humidified air generated by the humidified air generating unit;
An external temperature acquisition unit for acquiring the temperature of the external air;
An input unit for inputting the target relative humidity;
The absolute humidity of the humidified air is estimated based on the temperature of the humidified air measured by the temperature measuring unit, and the relative humidity at the temperature of the external air acquired by the external temperature acquiring unit calculated based on the absolute humidity is The static elimination apparatus of Claim 2 or 3 further provided with the 2nd control part which controls the said temperature adjustment part so that it may become the said target relative humidity. The said 1 or several static elimination needle is arrange | positioned at the said holding body so that the ion produced | generated by the said corona discharge may be sent out by the humidified air which flows out out of the said outflow port, The any one of Claims 1-5. The static eliminator described in 1. The electrodes include first and second counter electrodes arranged to face each other,
The one or more static elimination needles are disposed between the first counter electrode and the second counter electrode,
The outlet includes a first outlet for allowing humid air to flow between the first counter electrode and the one or more static elimination needles, the second counter electrode, the one or more static elimination needles, The static elimination apparatus of Claim 6 including the 2nd outflow port which lets humid air flow out between. The static elimination apparatus according to claim 6, wherein the one or more static elimination needles are provided so as to be positioned in the humidified air flowing out from the outlet. The electrode is formed so as to surround each static elimination needle in an annular shape,
The neutralization device according to claim 6, wherein the outflow port causes humidified air to flow out into an annular region between each neutralization needle and the electrode. The holding body includes an inner space, an inflow port, and an outflow port, and a housing that houses at least a part of the rectifying plate and the one or more static elimination needles,
The said static elimination apparatus is a static elimination apparatus as described in any one of Claims 1-9 further equipped with the supply pipe | tube which guides the humidified air produced | generated by the said humidified air production | generation part to the said inflow port of the said housing | casing. The housing includes first and second housings;
The rectifying plate includes a first rectifying plate held by the first casing and a second rectifying plate held by the second casing,
The one or more static elimination needles are arranged so as to protrude beyond the tip of the first rectifying plate in the outflow direction of the humidified air, and are a first number of the first number held by the first casing. A static elimination needle, and a second number of second static elimination needles arranged so as to protrude from the tip of the second rectifying plate in the outflow direction of the humidified air and held by the second casing. ,
The first number is greater than the second number;
The electrode includes a first electrode held by the first casing and a second electrode held by the second casing;
The power supply device applies a voltage between the first power supply device that applies a voltage between the first static elimination needle and the first electrode, and a voltage between the second static elimination needle and the second electrode. A second power supply device to apply,
The first casing, the first rectifying plate, the first static elimination needle, the first electrode, and the first power supply device constitute a first static elimination head,
The second casing, the second rectifying plate, the second static elimination needle, and the second electrode constitute a second static elimination head,
11. The static eliminator according to claim 10, wherein the first and second static elimination heads are configured to be selectively connectable to and detachable from the humidified air generation unit. The said holding body contains the housing | casing which has the said outflow port and accommodates the said baffle plate, at least one part of the said 1 or several static elimination needle, and the said humidified air production | generation part. The static eliminator described in 1. The said electrode is a static elimination apparatus as described in any one of Claims 1-12 arrange | positioned so that it may be perpendicular | vertical to each static elimination needle and may cross | intersect the plane located in the front-end | tip of each static elimination needle. A static elimination head configured to be connected to a humidified air generating unit that humidifies air to generate humidified air by a supply pipe, and performs static elimination on an object,
A holding body configured to be connectable to the humidified air generation unit by the supply pipe, and having an outlet for flowing out the humidified air generated by the humidified air generation unit;
A rectifying plate that is held by the holding body and is provided so as to rectify the humidified air flowing out from the outlet in a certain direction;
One or a plurality of static elimination needles configured to be able to apply a voltage for generating corona discharge, disposed so as to protrude from the tip of the current plate in the outflow direction of the humidified air, and held by the holding body;
A static elimination head configured to be able to apply a voltage for generating corona discharge and comprising an electrode held by the holding body.

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