JP2015175666A - Information processing method, information processing system, information processing device, and program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate measurement of dynamic characteristics.SOLUTION: In respect to information processing relating to testing of a sample, which is performed by an information processing system including a measurement instrument and an information processing device, the measurement instrument includes pressure application means which applies a load to the sample, measurement means which measures the load, and imaging means which images a portion to which the load is applied on the sample by the pressure application means, and the information processing device acquires a captured image obtained by the imaging means, acquires a measurement result of the measurement means, generates an analyzed image resulting from analysis of at least the captured image, and outputs a comparison image for comparison between at least the captured image and the analyzed image.

Description

  The present invention relates to an information processing method, an information processing system, an information processing apparatus, and a program.

  Conventionally, a method of measuring mechanical properties such as hardness of a substance such as metal is known (for example, Non-Patent Document 1 to Non-Patent Document 5).

  In addition, a method is known in which a measurement contact device optically observes and measures a projected contact area of a depression that can be applied to a measurement target (for example, Non-Patent Document 5, Patent Document 1, and Patent Document 2). .

JIS Z 2255 Ultra micro load hardness test method JIS B 7725 Vickers Hardness Test-Testing machine verification and calibration JIS B 7735 Vickers hardness test-Calibration of reference piece JIS K 7215 Plastic Durometer Hardness Test Method Norio Hagiri, Motoji Sakai, Tatsuya Miyajima “Development of Micro Indenter and Application to Indenter Mechanics”, Materials, 56, 6, 510-515 (2007)

JP 2005-195357 A Utility Model Registration No. 3182252

  However, in the conventional method, when using the area, it was difficult to compare the image obtained by imaging the contact surface of the indenter with the image showing the area that can be calculated from the indentation load and hardness of the indenter. Sometimes it was difficult to measure.

  An object of one aspect of the present invention is to facilitate measurement of mechanical characteristics.

  In one aspect, an information processing method according to a sample test to be performed by an information processing system having a measurement device and an information processing device, wherein the measurement device includes a pressurizing unit that applies a load to the sample, Image acquisition comprising: a measuring unit that measures a load; and an imaging unit that images a portion where a load is applied to the sample by the pressurizing unit, and causes the information processing apparatus to acquire a captured image captured by the imaging unit A procedure, a measurement result acquisition procedure for acquiring a measurement result measured by the measuring unit, a generation procedure for generating an analysis image obtained by analyzing at least the captured image, and at least the captured image and the analysis image are compared. And outputting an output procedure for outputting a comparison image.

  This makes it easier to measure mechanical properties.

It is the schematic explaining an example of the whole information processing system composition concerning one embodiment of the present invention. It is a block diagram explaining an example of the hardware constitutions of the measuring device which concerns on one Embodiment of this invention. It is a block diagram explaining an example of the hardware constitutions of the information processing apparatus which concerns on one Embodiment of this invention. It is a sequence diagram explaining an example of the whole process by the information processing system which concerns on one Embodiment of this invention. It is a figure explaining an example of the analysis process by the information processing system which concerns on one Embodiment of this invention. It is a figure explaining an example of a comparative image concerning one embodiment of the present invention. It is a figure explaining an example of the 2nd comparison picture concerning one embodiment of the present invention. It is a flowchart figure explaining an example of the whole process of the information processing apparatus which concerns on one Embodiment of this invention. It is a functional block diagram explaining an example of a function structure of the information processing system which concerns on one Embodiment of this invention. It is a sequence diagram explaining an example of the whole process of 2nd Embodiment by the information processing system which concerns on one Embodiment of this invention. It is a figure explaining an example of the change of the gamma value which concerns on one Embodiment of this invention. It is a flowchart figure explaining an example of the whole process of 2nd Embodiment of the information processing apparatus which concerns on one Embodiment of this invention.

  Embodiments of the present invention will be described below.

<First Embodiment>
<Overall configuration>
FIG. 1 is a schematic diagram illustrating an example of the overall configuration of an information processing system according to an embodiment of the present invention.

  The information processing system is, for example, the information processing system 1. Hereinafter, the information processing system 1 will be described as an example.

  The information processing system 1 includes an information processing device 11 and a measurement device 12. The information processing system 1 is connected to the display 3.

  The information processing apparatus 11 causes the user to input an operation related to the measurement apparatus 12 and inputs various commands, measurement conditions, and the like to the measurement apparatus 12 based on the user's operation.

  The information processing apparatus 11 outputs the image captured by the measurement apparatus 12 and the measurement result to the display 3.

  The measuring device 12 measures the sample 2. The measuring device 12 is a device for measuring a mechanical property value of the sample 2.

  The measuring device 12 has a camera 12H2 and an indenter 12H3. Each element of the measuring device 12 is configured to be assembled to the frame 12H1 as shown in the figure.

  The camera 12H2 is connected to a microscope 12H15 that is an optical system.

  The information processing system 1 measures dynamic physical property values by, for example, a so-called instrumented indentation method. In the instrumented indentation method, for example, the indenter 12H3 is pushed into the sample 2, the load applied by the indenter 12H3 to the sample 2, the depth of indentation, or the contact area is measured, and the sample is based on the shape and characteristics of the indenter 12H3. 2 is measured. Hereinafter, a case where measurement by the instrumented indentation method is performed will be described as an example.

  The indenter 12H3 is a jig that is pushed into the sample 2 in the case of the instrumented indentation method. At the time of pushing, the measuring device 12 cannot measure the contact depth of the indenter 12H3, and therefore measures the pushing depth as an alternative to the contact depth. The measuring device 12 calculates the contact area from the indentation depth of the indenter 12H3.

  The measuring device 12 can measure, for example, a film formed on a substrate, a so-called functional thin film, a so-called functional thick film, or a so-called functional film by using an instrumented indentation method.

  The indenter 12H3 is a jig having a shape in accordance with a mechanical property value to be measured. The indenter 12H3 is an indenter having an acute shape such as a triangular pyramid, a quadrangular pyramid, and a cone. The indenter 12H3 is an indenter shaped indenter such as a sphere or a flat plate.

  The material of the indenter 12H3 is, for example, diamond or cemented carbide having excellent hardness and wear resistance.

  When the indenter 12H3 has an acute shape, the sample 2 is subjected to a high pressure because the contact area is small even when the load applied to the sample 2 is small when contacting the indenter 12H3. Therefore, the sample 2 often undergoes plastic deformation or viscous flow.

  When the indenter 12H3 has an obtuse shape and the load is small, the sample 2 is elastically deformed. When the indenter 12H3 has an obtuse shape and a large load, the sample 2 undergoes plastic deformation.

  Plastic deformation or viscous flow that occurs when the indenter 12H3 is pushed into the surface affects the periphery of the location where the indenter 12H3 is pushed in, so surface deformation different from elastic deformation occurs. The contact depth of the indenter 12H3 is greatly affected by surface deformation depending on the plasticity or viscoelastic characteristics of the sample 2. Therefore, the actual contact area is determined from the indentation depth of the indenter 12H3 assuming that the sample 2 is a complete elastic body. It may be very different from the calculated result.

  The instrumented indentation method is, for example, a microindentation method. Hereinafter, the microindentation method will be described as an example. The microindentation method is a method using an indenter 12H3 made of a highly transparent material. By using the indenter 12H3 made of a highly transparent material, the camera 12H2 can image the contact area between the indenter 12H3 and the sample 2, and optically measure the contact area. Therefore, the microindentation method does not need to measure the indentation depth.

  The microindentation method accurately measures the actual area where the indenter 12H3 contacts the sample surface even when surface deformation different from that of a completely elastic body is caused by the plastic or viscoelastic properties of the sample 2. be able to.

  Hereinafter, a case where the hardness H is measured by the information processing system 1 will be described as an example. The hardness H is, for example, a so-called Meyer hardness. Hereinafter, measurement of Meyer hardness will be described as an example.

  The hardness H can be measured by, for example, the projected area of an indentation (hereinafter referred to as a dent) that becomes a dent formed on the surface of the sample 2 when a load is applied to the sample 2 with the indenter 12H3.

  The measuring device 12 is a device for measuring the hardness H, for example, by observing a dent. The measuring device 12 images the contact area between the sample 2 and the indenter 12H3 with the camera 12H2 through the observation window 12H14 and the microscope 12H15.

<Hardware configuration of measuring device>
FIG. 2 is a block diagram illustrating an example of the hardware configuration of the measurement apparatus according to the embodiment of the present invention.

  The measuring device 12 includes a camera 12H2, an indenter 12H3, an indenter control device 12H4, a load measuring device 12H5, a D / A (Digital Analog) converter 12H6, and an A / D (Analog Digital) converter 12H7. Have. The measurement device 12 includes an image input I / F (interface) 12H8, an input I / F 12H9, an output I / F 12H10, a CPU (Central Processing Unit) 12H11, and a storage device 12H12. Each element of the measuring device 12 is connected by a bus 12H13.

  The camera 12H2 includes, for example, a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor) optical sensor. As shown in FIG. 1, the camera 12H2 is an apparatus for imaging the surface of the sample 2 so as to include a depression formed on the surface of the sample 2 by the indenter 12H3.

  The indenter control device 12H4 is a control device for moving the indenter 12H3. The indenter control device 12H4 is, for example, an actuator and a control circuit. The indenter controller 12H4 controls the position of the indenter 12H3 or the sample 2 in order to press the indenter 12H3 against the surface of the sample 2, for example.

  The load measuring device 12H5 is a device for measuring the load applied to the sample 2 by the indenter 12H3. The load measuring device 12H5 is, for example, a so-called load cell that uses a strain sensor or the like.

  The D / A conversion device 12H6 is a device that outputs a signal for controlling the indenter control device 12H4. The D / A conversion device 12H6 is composed of, for example, a D / A conversion circuit.

  The A / D conversion device 12H7 is a device for inputting a signal output from the load measuring device 12H5. The A / D conversion device 12H7 is composed of, for example, an A / D conversion circuit.

  The image input I / F 12H8 is an interface for inputting image data output from the camera 12H2. The image input I / F 12H8 includes, for example, a connector and a driver.

  The input I / F 12H9 is an interface for inputting information from the information processing apparatus 11. The input I / F 12H9 includes, for example, a connector and a driver. The input I / F 12H9 inputs, for example, an imaging condition that is a parameter at the time of imaging by the camera 12H2 from the information processing apparatus 11.

  The output I / F 12H10 is an interface for outputting information to the information processing apparatus 11. The output I / F 12H10 includes, for example, a connector and a driver. The output I / F 12H10 outputs image data captured by the camera 12H2, for example, to the information processing apparatus 11.

  The CPU 12H11 is an arithmetic device that performs arithmetic operations for various processes performed by the measuring device 12. The CPU 12 </ b> H <b> 11 is a control device that controls various devices included in the measurement device 12 for various processes performed by the measurement device 12.

  The storage device 12H12 is a device for storing data, parameters, programs, and the like used by the measurement device 12. The storage device 12H12 is, for example, a main storage device and an auxiliary storage device. The main storage device is a so-called memory, for example. The auxiliary storage device is, for example, a hard disk.

<Hardware configuration of information processing device>
FIG. 3 is a block diagram illustrating an example of a hardware configuration of the information processing apparatus according to the embodiment of the present invention.

  The information processing apparatus is, for example, the information processing apparatus 11. Hereinafter, the information processing apparatus 11 will be described as an example. The information processing apparatus 11 is, for example, a PC (Personal Computer).

  The information processing apparatus 11 includes a CPU 11H1, a storage device 11H2, an input I / F 11H3, an output I / F 11H4, an input I / F 11H5, and an output I / F 11H6. Each element included in the information processing apparatus 11 is connected by a bus 11H7.

  The CPU 11 </ b> H <b> 1 is a calculation device that performs calculations for various processes performed by the information processing apparatus 11. The CPU 11 </ b> H <b> 1 is a control device that controls various devices included in the information processing device 11 for various processes performed by the information processing device 11.

  The storage device 11H2 is a device for storing data, parameters, programs, and the like used by the information processing device 11. The storage device 11H2 is, for example, a main storage device and an auxiliary storage device. The main storage device is a so-called memory, for example. The auxiliary storage device is, for example, a hard disk.

  The input I / F 11H3 is an interface for inputting a user operation. The input I / F 11H3 includes, for example, a connector and a driver. The input device 11H31 is connected to the input I / F 11H3. The input device 11H31 is, for example, a keyboard or a mouse. The input I / F 11H3 performs a process for inputting a user operation input by the input device 11H31 to the information processing device 11.

  The output I / F 11H4 is an interface for performing output for displaying information to the user. The output I / F 11H4 includes, for example, a connector and a driver. The output I / F 11H4 is connected to an output device such as a display 3, for example. The display 3 displays the image data acquired from the measurement device 12 to the user.

  The input I / F 11H5 is an interface for performing input from the measuring device 12. The input I / F 11H5 includes, for example, a connector, a cable, and a driver. The information processing apparatus 11 acquires image data and the like from the measurement apparatus 12 via the input I / F 11H5.

  The output I / F 11H6 is an interface for outputting to the measuring device 12. The output I / F 11H6 includes, for example, a connector, a cable, and a driver. The information processing apparatus 11 outputs imaging condition parameters and the like to the measurement apparatus 12 via the output I / F 11H6.

<Overall processing>
FIG. 4 is a sequence diagram illustrating an example of overall processing by the information processing system according to the embodiment of the present invention.

  In step S0401, the information processing apparatus 11 performs a process for causing the user to input an indenter shape. For example, when the indenter 12H3 is a triangular pyramid, the indenter shape is triangular. The user inputs an indenter shape based on the indenter 12H3 to be used.

  In step S0402, the information processing apparatus 11 performs processing for causing the user to input imaging conditions and analysis conditions. The imaging conditions are, for example, the imaging magnification of the microscope 12H5 and the camera 12H2 that are the optical system of FIG. The user inputs imaging conditions based on the microscope 12H5 and the camera 12H2 to be used. The analysis condition is, for example, brightness, contrast, gamma value, or threshold value for binarization processing.

  In step S0403, the information processing apparatus 11 performs processing based on the reference value. The reference value is a value that is input when the user verifies the apparatus. The verification of the apparatus is performed by, for example, a sample having a reference hardness or a standard sample (hereinafter referred to as a reference piece). The reference piece is a sample whose hardness has already been calibrated according to standards and the like. The standard piece is, for example, steel, beryllium steel, brass, or a copper material defined in JIS B 7735. The reference piece is, for example, a substance made of polyurethane elastomer or methacrylic resin as defined in JIS K 7215. The process based on the reference value is a process performed based on the reference piece, for example. The hardness H is represented by the following formula (1).

  In the above equation (1), when the sample to be measured is a reference piece, the hardness H is known based on the selected reference piece. The theoretical area Ath when the load P is applied to the reference piece of hardness H can be expressed by the equation (2) from the equation (1).

  In the process based on the reference value, for example, the imaging condition is changed so that the theoretical area Ath calculated by the equation (2) is obtained. That is, the process based on the reference value is a process for calculating the theoretical area Ath when the sample is a reference piece, so that the measuring device 12 can capture an image having the theoretical area Ath. Note that the process of step S0403 is verification of the apparatus, and is not indispensable every time measurement is performed.

  In step S0404, the information processing apparatus 11 transmits information such as various parameters input to the information processing apparatus 11 by the user, such as imaging conditions, to the measurement apparatus 12.

  In step S0405, the measuring device 12 performs a process of pressing the indenter 12H3 against the sample 2. In step S0405, the measuring device 12 performs a pressurizing process for applying a load to the sample 2.

  In step S0406, the measuring device 12 measures the load applied to the sample 2 by the pressurizing process in step S0405.

  In step S0407, the measurement device 12 transmits the measurement result in step S0406 to the information processing device 11.

  In step S0408, the measuring device 12 images a portion where a load is applied to the sample 2 by the pressurizing process in step S0405.

  In step S0409, the measuring device 12 transmits the image data captured in the process of step S0408 to the information processing device 11.

  In step S0410, the information processing apparatus 11 performs a process of generating a reference image. The reference image is an image corresponding to the shape input in step S0401 and the theoretical area Ath calculated in step S0403. That is, the reference image is an image for allowing the theoretical area Ath calculated by the above equation (2) to be visually recognized in the shape of the indenter.

  In step S0411, the information processing apparatus 11 performs analysis processing. The analysis process is performed on the imaging data acquired from the measurement device 12 in step S0409.

  FIG. 5 is a diagram illustrating an example of analysis processing by the information processing system according to an embodiment of the present invention.

  The captured data is, for example, a captured image 1I1. Hereinafter, the captured image 1I1 will be described as an example.

FIG. 5A is a diagram illustrating an example of a captured image according to an embodiment of the present invention.
The captured image 1I1 has a low luminance pixel region 1I11. The low luminance pixel region 1I11 corresponds to a depression formed by pressurizing the indenter 12H3 on the sample 2. Since the shape of the depression is determined by the shape of the indenter 12H3, when the shape of the indenter 12H3 is a triangular pyramid, it becomes a triangle like the low-luminance pixel region 1I11 shown in the drawing. Since the light does not hit the bright field observation in the bright field observation, when the image is captured by the camera 12H2 in FIG. 1, the depression is darker than the surrounding area and becomes a low luminance image area.

  The analysis process is a process for specifying a hollow portion of the captured image 1I1. The analysis process is a process of setting a predetermined luminance value, for example, and determining a pixel portion of the captured image 1I1 having a luminance value lower than the set luminance value as a hollow portion. Note that FIG. 5A may show the reference image 1I4 at the same time. The reference image 1I4 will be described later.

  The analysis process is not limited to the determination process based on the luminance value. The analysis process should just be a process which can identify a hollow. The analysis process may be, for example, a process of determining a range surrounded by edges as a recessed portion.

  FIG. 5B is a diagram illustrating an example of an analysis image according to an embodiment of the present invention.

  The analysis image 1I2 is an image generated by analysis processing. The analysis image 1I2 is an image showing an analysis area Aan obtained by analyzing the low luminance pixel region 1I11. For example, the analysis image 1I2 is generated by cutting out the low-luminance pixel region 1I11 from the captured image 1I1 based on the analysis processing. The analysis image 1I2 is generated by, for example, transparentizing peripheral portions other than the analysis area Aan calculated by the analysis processing.

  When the analysis image 1I2 is generated by, for example, cutting out or making the peripheral portion transparent, for example, when the analysis image 1I2 is overlaid on another image, the analysis image 1I2 overwrites a portion other than the analysis area Aan. Without being overlaid on other images.

  In step S0412, the information processing apparatus 11 performs processing for generating a comparison image.

  The comparison image 1I3 is an image for evaluation that makes it easy for the user to compare the size of the theoretical area Ath and the analysis area Aan of the analysis image 1I2 in FIG.

  FIG. 6 is a diagram illustrating an example of a comparative image according to an embodiment of the present invention.

  The comparison image 1I3 is an image generated based on, for example, the captured image 1I1, the analysis image 1I2, and the reference image 1I4.

  The comparison image 1I3 is generated based on the captured image 1I1 acquired from the measurement device 12 in step S0409, for example. The comparison image 1I3 is generated by capturing at least the analysis image 1I2 in the captured image 1I1 as illustrated. Note that the comparison image 1I3 may be generated by taking in a reference image as illustrated in order to ensure so-called traceability in the measuring instrument. Hereinafter, the comparative image will be described by taking as an example a case where both the analysis image and the reference image are captured.

  The reference image 1I4 is an image that displays the area calculated in step S0410.

  Since the reference image 1I4 indicating the theoretical area Ath and the analysis image 1I2 indicating the analysis area Aan are displayed, the comparison image 1I3 is an image that the user can easily compare visually.

  Therefore, the information processing system 1 can make it easier for the user to compare the captured image 1I1 and the analysis area Aan by displaying the comparison image 1I3. Therefore, the information processing system 1 can easily measure the mechanical characteristics by displaying the comparison image 1I3.

  Further, by comparing the captured image 1I1, the analysis image 1I2, and the reference image 1I4, the information processing system 1 has an area where the analysis area Aan of the analysis image 1I2 is smaller than expected, for example, compared to the captured image 1I1. It is possible to make the user find the case that becomes. When the user evaluates that the analysis area Aan of the analysis image 1I2 is smaller than expected, the information processing system 1 changes the analysis conditions, for example, and shows the analysis area Aan of the analysis image 1I2 with a high accuracy in the captured image 1I1. Can be an image.

  The comparative image is not limited to the image shown in FIG.

  FIG. 7 is a diagram illustrating an example of a second comparison image according to an embodiment of the present invention.

  The case where the second comparative image 1I5 is generated based on the captured image 1I1 as in FIG. 6 will be described as an example.

  For example, when the analysis image 1I2 and the reference image 1I4 are displayed in the image, the second comparison image 1I5 is generated by allowing the user to specify a display position. For example, the position where the analysis image 1I2 is arranged by the user operating the input device 11H31 in FIG. 3 is determined. For example, the information processing system 1 can display the second comparison image 1I5 by moving the analysis image 1I2 so that the analysis image 1I2 overlaps the depression of the captured image 1I1 as shown in FIG. The information processing system 1 can display the area of the captured image 1I1 and the analysis image 1I2 so that the user can easily compare the size of the areas.

<Processing of information processing apparatus>
FIG. 8 is a flowchart for explaining an example of the overall processing of the information processing apparatus according to the embodiment of the present invention.

  In step S0801, the information processing apparatus 11 performs processing for inputting an indenter shape. The process of step S0801 corresponds to the process of step S0401 of FIG. In step S0801, the information processing apparatus 11 performs a process of allowing the user to input an indenter shape based on the indenter 12H3.

  In step S0802, the information processing apparatus 11 performs processing for inputting imaging conditions and analysis conditions. The process of step S0802 corresponds to the process of step S0402 of FIG. In step S0802, the information processing apparatus 11 performs processing for causing the user to input imaging conditions for capturing the captured image 1I1 illustrated in FIG. In step S0802, the information processing apparatus 11 performs processing for causing the user to input analysis conditions for generating the analysis image 1I2 of FIG. 5B from the captured image 1I1 of FIG.

  In step S0803, the information processing apparatus 11 performs processing based on the reference value. The process of step S0803 corresponds to the process of step S0403 of FIG. In step S0803, the information processing apparatus 11 calculates a reference value for verifying the measurement apparatus 12 and for generating the reference image 1I4 of FIG. The process of step S0803 is performed using the sample 2 as a reference piece. Since information such as the hardness H of the reference piece is known, it is input to the information processing apparatus 11 by the user. In step S0803, the information processing apparatus 11 calculates a reference value such as the theoretical area Ath from the hardness H.

  In step S0804, the information processing apparatus 11 performs a process of transmitting parameters to the measurement apparatus. The parameter is, for example, the imaging condition input in step S0802. The measuring device 12 performs imaging and processing for pressing the indenter 12H3 against the sample 2 based on the parameters transmitted in step S0804. The process of step S0804 corresponds to the process of step S0404 of FIG.

  In step S0805, the information processing apparatus 11 performs a process of acquiring a measurement result. In step S0805, the information processing apparatus 11 acquires the measurement result of the load measured by the measurement apparatus 12 during the process of step S0405 of FIG. The process in step S0805 corresponds to the process in step S0407 in FIG.

  In step S0806, the information processing apparatus 11 performs processing for acquiring imaging data. The process in step S0806 corresponds to the process in step S0409 in FIG. In step S0806, the information processing apparatus 11 performs a process of acquiring the captured image 1I1 of FIG.

  In step S0807, the information processing apparatus 11 performs a process of generating a reference image. The process in step S0807 corresponds to the process in step S0410. In step S0807, the information processing apparatus 11 generates the reference image 1I4 in FIG. 6 based on the indenter shape input in step S0801, the reference value calculated in step S0803, and the load P that can be obtained from the measurement result acquired in step S0805. Generate.

  In step S0808, the information processing apparatus 11 performs analysis processing. The process in step S0808 corresponds to the process in step S0411. The analysis process is a process of analyzing the captured image 1I1 of FIG. 5A acquired in step S0806 based on the analysis condition input in step S0802. The analysis process is a process for generating the analysis image 1I2 of FIG. 5B based on the captured image 1I1 of FIG.

  In step S0809, the information processing apparatus 11 performs processing for generating a comparison image. The process in step S0809 corresponds to the process in step S0412. In step S0809, the information processing apparatus 11 generates the comparison image 1I3 in FIG. 6 and the like based on the image generated in step S0807 and step S0808. The information processing apparatus 11 outputs the generated comparison image to, for example, the display 3 in FIG. The information processing apparatus 11 causes the user to perform evaluation by outputting a comparison image. The information processing apparatus 11 causes the user to change analysis conditions, for example, based on the evaluation of the output comparison image. The information processing apparatus 11 can adjust the analysis image 1I2 generated by the analysis process by changing the analysis conditions and the like. In particular, in the case of the microindentation method, the analysis image 1I2 is generated with high accuracy, whereby mechanical characteristics such as hardness can be accurately measured. In addition, when the analysis condition is examined, the reference image is included in the comparison image, so that the user can confirm whether the captured image is generated correctly.

<Functional configuration>
FIG. 9 is a functional block diagram illustrating an example of a functional configuration of the information processing system according to the embodiment of the present invention.

  The information processing system 1 includes a parameter input unit 11F1, a measurement result acquisition unit 11F2, an image acquisition unit 11F3, an analysis processing unit 11F4, a calculation processing unit 11F5, and a comparative image generation unit 11F6. The information processing system 1 includes a pressurizing unit 12F1, a measuring unit 12F2, and an imaging unit 12F3.

  The parameter input unit 11F1 performs processing for causing the user to input parameters such as hardness, imaging conditions, and analysis conditions. The parameter input unit 11F1 is realized by, for example, the input I / F 11H3 in FIG. For example, the parameter input unit 11F1 allows the user to input the indenter shape in step S0801 in FIG. 8, the imaging conditions in step S0802 in FIG. 8, and the analysis conditions, and the hardness H of the reference piece in step S0803 in FIG. Process to input.

  The measurement result acquisition unit 11F2 performs a process of acquiring measurement results such as a load measured by the measurement device 12 from the measurement device 12. The measurement result acquisition unit 11F2 is realized by, for example, the input I / F 11H5 of FIG. When the measurement device 12 applies a load to the sample 2, the measurement result acquisition unit 11F2 acquires the load P applied to the sample 2 in order to perform the calculation of the above-described equation (2).

  The image acquisition unit 11F3 acquires the captured image 1I1 of FIG. The image acquisition unit 11F3 is realized by, for example, the input I / F 11H5 of FIG. The image acquisition unit 11F3 acquires the captured image 1I1 and the like of FIG. 5 for the analysis process and the process of generating the comparison image from the measurement device 12.

  The analysis processing unit 11F4 performs analysis processing. The analysis processing unit 11F4 is realized by the CPU 11H1 in FIG. The analysis processing unit 11F4 performs analysis processing on the captured image 1I1 of FIG. 5 acquired by the image acquisition unit 11F3. The analysis processing unit 11F4 performs analysis processing based on the analysis conditions input by the parameter input unit 11F1 to the user. The analysis processing unit 11F4 generates an analysis image by analysis processing.

  The calculation processing unit 11F5 performs processing for calculating the theoretical area Ath. The calculation processing unit 11F5 is realized by the CPU 11H1 in FIG. The calculation processing unit 11F5 calculates the theoretical area Ath from the above equation (2) based on the hardness H that is the information of the reference piece by the parameter input unit 11F1 and the load P input from the measurement result acquisition unit 11F2. . The calculation processing unit 11F5 generates a reference image based on the calculated theoretical area Ath and the indenter shape that the parameter input unit 11F1 inputs to the user.

  The comparison image generation unit 11F6 performs processing for generating a comparison image. The comparison image generation unit 11F6 is realized by the CPU 11H1 in FIG. The comparison image generation unit 11F6 outputs the generated comparison image to the display 3 of FIG. 3 by using, for example, the output I / F 11H4 of FIG. 3, and allows the user to perform evaluation. The comparison image generation unit 11F6 generates a comparison image based on the captured image acquired by the image acquisition unit 11F3, the analysis image generated by the analysis processing unit 11F4, the reference image generated by the calculation processing unit 11F5, and the like.

  The pressurizing unit 12F1 applies a load to the sample. The pressurizing unit 12F1 is realized by, for example, the indenter 12H3 and the indenter control device 12H4 in FIG. The pressurizing unit 12F1 performs a process for pressing the indenter 12H3 against the sample 2.

  The measurement unit 12F2 measures the load. The measuring unit 12F2 is realized by, for example, the load measuring device 12H5 in FIG. The measurement result is, for example, load information. The measurement result is output to the measurement result acquisition unit 11F2 by the output I / F 12H10 of FIG.

  The imaging unit 12F3 images a portion to which the pressing unit 12F1 applies a load. The imaging unit 12F3 is realized by a camera 12H2, for example. The imaging unit 12F3 generates a captured image. The generated captured image is output to the image acquisition unit 11F3 by the output I / F 12H10 of FIG.

  The functional configuration is not limited to the configuration in FIG. For example, the information processing apparatus 11 may have a part or all of the functions of the measurement apparatus 12 and may be one information processing apparatus.

  The information processing system 1 generates a comparison image in order to make it easy to compare the captured image 1I1, the analysis image 1I2, and the reference image 1I4. With the comparison image, the information processing system 1 can make it easier for the user to compare the size of the captured image 1I1, the analysis image 1I2, and the reference image 1I4. Therefore, the information processing system 1 can facilitate measurement of hardness and the like by generating a comparison image.

Second Embodiment
The second embodiment uses the information processing system 1 of FIG. 1 as in the first embodiment. Therefore, description of the information processing system 1 is omitted.

  The information processing system 1 according to the second embodiment performs processing described in FIG. 10 instead of the processing described in FIG.

<Overall Processing of Second Embodiment>
FIG. 10 is a sequence diagram illustrating an example of the overall processing of the second embodiment by the information processing system according to the embodiment of the present invention.

  FIG. 10 is different from FIG. 4 of the first embodiment in that the processes after step S0404 are repeated. FIG. 10 differs from FIG. 4 of the first embodiment in that the process of step S1001 is performed instead of the process of step S0412. FIG. 10 is different from FIG. 4 of the first embodiment in that the process of step S0410 is not performed. 10 that are the same as those in FIG. 4 are given the same reference numerals, and descriptions thereof are omitted.

  In step S1001, the information processing apparatus 11 performs a process of comparing the analysis image 1I2 and the ideal image 1I4. In step S1001, the information processing apparatus 11 calculates a difference Adiff between the area values of the analysis area Aan and the theoretical area Ath of the analysis image 1I2, for example. The difference Adiff is calculated based on the following equation (3), for example.

  The information processing system 1 changes the analysis condition for generating the analysis image 1I2 so that the value of the difference Adiff calculated by the above-described expression (3) is not more than a predetermined value, that is, sufficiently close to zero. The change of the analysis condition is, for example, a change of a gamma value that is a parameter for gamma correction.

  FIG. 11 is a diagram illustrating an example of changing a gamma value according to an embodiment of the present invention.

  FIG. 11 shows an example when the gamma value is changed in step S1001. FIG. 11 shows an image when the comparison image is generated by changing the gamma value from 0.1 to 0.4 in step S1001.

  When the gamma value is changed, the analysis area Aan of the analysis image 1I2 changes due to the change. Since the theoretical area Ath is based on the above-described equation (2), it does not change unless the hardness H and the load P are changed. Therefore, the information processing system 1 can adjust the value of the difference Adiff to be sufficiently close to zero by changing the analysis area Aan.

  At the time of repetition, in step S0404, the imaging condition changed based on the comparison result in step S1001 is transmitted.

  In the case of changing the analysis conditions, it is possible to repeat the processing from the analysis processing that is the processing of step S0411 based on the changed analysis conditions.

  In the second embodiment, it is only necessary to calculate the difference Adiff between the area values of the analysis area Aan and the theoretical area Ath, and the comparison image need not be generated. Hereinafter, a case where an image is not generated will be described as an example.

<Processing of Information Processing Device of Second Embodiment>
FIG. 12 is a flowchart for explaining an example of the overall processing of the second embodiment of the information processing apparatus according to the embodiment of the present invention.

  The information processing apparatus 11 according to the second embodiment performs the process of FIG. 12 instead of the process of FIG. The process of FIG. 12 performs the process of step S1201 thru | or step S1203 instead of the process of step S0809. The processing in FIG. 12 is different from the processing in FIG. 8 in that there is no processing in step S0807. The same processes as those in FIG. 8 are denoted by the same reference numerals in FIG.

  In step S1201, the information processing apparatus 11 performs a process of comparing the theoretical area and the analysis area. The process of step S1201 is a process of calculating the difference Adiff by, for example, calculating the above-described equation (3). The comparison result is, for example, the difference Adiff. Hereinafter, a case where the comparison result is the difference Adiff will be described as an example.

  In step S1202, the information processing apparatus 11 determines whether or not the difference between the theoretical area and the analysis area is equal to or less than a predetermined value. When the information processing apparatus 11 determines that the difference between the theoretical area, which is the comparison result in step S1201, and the analysis area is equal to or less than a predetermined value (YES in step S1202), the information processing apparatus 11 ends the entire process. When the information processing apparatus 11 determines that the difference between the theoretical area, which is the comparison result in step S1201, and the analysis area is not equal to or less than a predetermined value (NO in step S1202), the information processing apparatus 11 proceeds to step S1203. .

  In step S1203, the information processing apparatus 11 performs a process of changing analysis conditions.

  The processing in steps S1201 to S1203 corresponds to the processing in step S1001 in FIG.

  The information processing system 1 compares the analysis image 1I2 and the ideal image 1I4, and changes the analysis conditions based on the comparison result. By changing the analysis conditions, the information processing system 1 can change the analysis image 1I2 and obtain a condition that does not have a sufficient difference that the difference between the theoretical area and the analysis area is a predetermined value or less. Therefore, the information processing system 1 can generate the analysis image 1I2 close to the ideal image 1I4 by changing the analysis condition based on the comparison result. Therefore, the information processing system 1 can acquire the numerical value of the analysis area by changing the analysis condition based on the comparison result, and can easily measure the mechanical characteristics.

  In the second embodiment, the user may output an image as in the first embodiment. That is, the second embodiment may be an overall process that performs the process of step S0807 and the process of step S0809 of FIG.

  Further, the embodiment is not limited to the configuration described in FIG. For example, the information processing device 11 and the measurement device 12 may be one information processing device.

  The mechanical characteristics used for verification are not limited to hardness. The mechanical characteristics used for verification are less dependent on the measurement time, and may be elastic, elastic-plastic, or mechanical characteristics related to plasticity. For example, Young's modulus may be used.

  The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to such specific embodiments, and various modifications can be made within the scope of the gist of the present invention described in the claims. Can be changed.

1 Information processing system 11 Information processing apparatus 11H1 CPU
11H2 Storage device 11H3 Input I / F
11H31 Input device 11H4 Output I / F
11H5 input I / F
11H6 output I / F
11H7 Bus 11F1 Parameter input unit 11F2 Measurement result acquisition unit 11F3 Image acquisition unit 11F4 Analysis processing unit 11F5 Calculation processing unit 11F6 Comparison image generation unit 12 Measuring device 12H1 Frame 12H2 Camera 12H3 Indenter 12H4 Indenter control device 12H5 Load measuring device 12H6 D / A conversion Device 12H7 A / D converter 12H8 Image input I / F
12H9 input I / F
12H10 output I / F
12H11 CPU
12H12 Storage device 12H13 Bus 12H14 Observation window 12H15 Microscope 12F1 Pressurization unit 12F2 Measurement unit 12F3 Imaging unit 2 Sample 3 Display Ath Theoretical area Aan Analysis area 1I1 Captured image 1I11 Low luminance pixel region 1I2 Analysis image 1I3 Comparison image 1I4 Reference image

Claims (7)

An information processing method for testing a sample to be performed by an information processing system having a measurement device and an information processing device,
The measuring device is
Pressurizing means for applying a load to the sample;
Measuring means for measuring the load;
And imaging means for imaging a location where a load is applied to the sample by the pressurizing means,
In the information processing apparatus,
An image acquisition procedure for acquiring a captured image captured by the imaging unit;
A measurement result acquisition procedure for acquiring a measurement result measured by the measuring means;
A generation procedure for generating an analysis image obtained by analyzing at least the captured image;
An information processing method for executing at least an output procedure for outputting a comparison image for comparing the captured image with the analysis image. An input procedure for acquiring information of a reference piece including at least the hardness of the reference piece;
A theoretical area calculation procedure for calculating a theoretical area based on the hardness and the measurement result,
The information processing method according to claim 1, wherein the comparison image includes a reference image based on the theoretical area. An information processing method for testing a sample to be performed by an information processing system having a measurement device and an information processing device,
The measuring device is
Pressurizing means for applying a load to the sample;
Measuring means for measuring the load;
And imaging means for imaging a location where a load is applied to the sample by the pressurizing means,
In the information processing apparatus,
An input procedure for acquiring information on the reference piece,
An image acquisition procedure for acquiring a captured image captured by the imaging unit;
A measurement result acquisition procedure for acquiring a measurement result measured by the measuring means;
A calculation procedure for calculating a theoretical area based on the measurement result and the information of the reference piece;
An information processing method for changing an analysis condition which is a condition of the analysis based on an analysis result obtained by analyzing the captured image and the theoretical area.   The information processing method according to claim 1, wherein the captured image is an image when the pressurizing unit applies a load to the sample. An information processing system having a measurement device and an information processing device and performing processing related to a test of a sample,
The measuring device is
Pressurizing means for applying a load to the sample;
Measuring means for measuring the load;
And imaging means for imaging a location where a load is applied to the sample by the pressurizing means,
The information processing apparatus includes:
Image acquisition means for acquiring a captured image taken by the imaging means;
Measurement result acquisition means for acquiring a measurement result measured by the measurement means;
Generating means for generating an analysis image obtained by analyzing at least the captured image;
An information processing system comprising: output means for outputting a comparison image for comparing at least the captured image and the analysis image. An information processing apparatus for testing a sample,
Pressurizing means for applying a load to the sample;
Measuring means for measuring the load;
Imaging means for imaging a location where a load is applied to the sample by the pressurizing means;
Image acquisition means for acquiring a captured image taken by the imaging means;
Measurement result acquisition means for acquiring a measurement result measured by the measurement means;
Generating means for generating an analysis image obtained by analyzing at least the captured image;
An information processing apparatus comprising: output means for outputting a comparison image for comparing at least the captured image and the analysis image. A program that has a measurement device and an information processing device and that is executed by an information processing system that performs processing related to a test of a sample,
The measuring device is
Pressurizing means for applying a load to the sample;
Measuring means for measuring the load;
And imaging means for imaging a location where a load is applied to the sample by the pressurizing means,
In the information processing apparatus,
An image acquisition procedure for acquiring a captured image captured by the imaging unit;
A measurement result acquisition procedure for acquiring a measurement result measured by the measuring means;
A generation procedure for generating an analysis image obtained by analyzing at least the captured image;
A program for executing at least an output procedure for outputting a comparison image for comparing the captured image with the analysis image.