JP2015161680A - Inspection system, image processing apparatus, method, and program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of allowing a displacement meter, which can execute product inspection without connecting an image processing apparatus, to be set from the image processing apparatus when connected thereto.SOLUTION: When a stand-alone two-dimensional profile measuring unit 10 is connected to an image processing apparatus 20, a control parameter on the two-dimensional profile measuring unit 10 can be set from the image processing apparatus 20, as well as an external control apparatus 30.

Description

  The present invention relates to an inspection system, an image processing apparatus, a method, and a program using a displacement meter.

  As a product inspection device, an image processing device that images the product (workpiece) and inspects the shape and area of pins, etc., and measures the cross-sectional shape (two-dimensional profile) to determine whether it matches the good two-dimensional profile There is a displacement meter (note that a two-dimensional profile may be called a height profile). A stand-alone type displacement meter that inspects the displacement meter alone is common, but there is also a displacement meter that can be connected to an image processing apparatus (Patent Document 1). The image processing apparatus may create a three-dimensional profile (height image) by connecting a plurality of two-dimensional profiles measured by a displacement meter. As a result, the product inspection can be executed using the height image that cannot be executed by the displacement meter alone.

JP 09-257414 A

  Although the displacement meter may be designed on the assumption that it is connected to the image processing device in advance, the user already has a stand-alone displacement meter that is not supposed to be connected to the image processing device. Sometimes. Even if such a stand-alone displacement meter can be connected to the image processing apparatus, product inspection can be performed based on a three-dimensional profile. A stand-alone type displacement meter generally performs product inspection using a two-dimensional profile only with a displacement meter. It is assumed that various settings necessary for product inspection are performed by connecting a computer such as a notebook computer to a displacement meter and executing dedicated software on the computer. Since the stand-alone displacement meter has several communication interfaces, an image processing device could be connected to one of them. As a result, the image processing apparatus can receive a two-dimensional profile from the displacement meter and create a height image.

  In order for the displacement meter to acquire a highly accurate two-dimensional profile, it is necessary to set the displacement meter accurately. As described above, the stand-alone displacement meter is designed to be set from a computer. Therefore, the displacement meter cannot be set from the image processing apparatus connected to the displacement meter. Therefore, it would be convenient for the user if such a displacement meter setting could be executed from the image processing apparatus.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to enable setting of a displacement meter from an image processing device when a displacement meter capable of performing product inspection without being connected to the image processing device is connected to the image processing device.

The present invention is an inspection system including an optical displacement meter and an inspection device connected to the optical displacement meter by wire or wirelessly,
The optical displacement meter is
A light receiving unit for receiving reflected light from the object;
A first setting unit for setting control parameters necessary for acquiring the two-dimensional profile;
A control unit for controlling the light receiving unit according to the control parameter set by the first setting unit;
A profile generation unit that generates and outputs the two-dimensional profile based on a luminance image output from the light receiving unit;
Have
The inspection device includes:
A height image generating unit that acquires a plurality of two-dimensional profiles from the optical displacement meter, and creates a height image in which the acquired plurality of two-dimensional profiles are integrated to express the height of the object with pixel values; ,
An inspection unit that performs a measurement process or an inspection process on the object using the height image;
There is provided an inspection system comprising: a second setting unit configured to set the control parameter settable by the first setting unit from the inspection apparatus.

  According to the present invention, when a displacement meter capable of performing product inspection without being connected to an image processing device is connected to the image processing device, the displacement meter can also be set from the image processing device.

It is a figure which shows the outline of the test | inspection system which does not contain an image processing apparatus. It is a figure which shows the outline of the test | inspection system containing an image processing apparatus. It is a figure which shows an example of a test target object, an example of a two-dimensional profile, and an example of a three-dimensional profile. It is a figure which shows the example of the two-dimensional profile and height image about a certain workpiece | work. It is a figure which shows an example of a height image when exposure setting is inappropriate, and an example of a height image when exposure setting is appropriate. It is a figure which shows an example of the user interface which an image processing apparatus displays on a display part. It is a figure which shows an example of a sampling setting window. It is a figure which shows an example of an acquisition setting window. It is a figure which shows an example of a correction setting window. It is the block diagram which showed the function required about an inspection system. It is a figure which shows an example of the mode selection user interface and the imaging setting user interface 902. It is a figure which shows an example of the mode selection user interface and the imaging setting user interface 902. It is a flowchart which shows a setting process.

  An embodiment of the present invention is shown below. The individual embodiments described below will help to understand various concepts, such as the superordinate concept, intermediate concept and subordinate concept of the present invention. Further, the technical scope of the present invention is determined by the scope of the claims, and is not limited by the following individual embodiments.

  FIG. 1A is a diagram showing an outline of an inspection system. This inspection system functions as a product (work) inspection device or measurement device. The inspection system includes a two-dimensional profile measuring instrument 10 that is an optical displacement meter and an external control device 30 such as a notebook computer.

  Line 1 is a transport device such as a conveyor (transport belt) controlled by a control device such as a programmable logic controller (PLC). The two-dimensional profile measuring instrument 10 is an example of a two-dimensional profile measuring instrument that measures a two-dimensional profile of an inspection object (work) and outputs two-dimensional profile data having a first number of bits (for example, 20 bits). . The two-dimensional profile measuring device 10 is sometimes called a laser displacement meter, and irradiates the workpiece 2 conveyed in the y-axis direction with a wide laser beam and receives the reflected light. Data indicating a two-dimensional cross-sectional shape (two-dimensional profile data) is created. At this time, the workpiece 2 is virtually cut by a cutting plane parallel to the zy plane, and the outer shape (contour or outer edge) of the cutting plane becomes a two-dimensional profile. The two-dimensional profile data is, for example, data expressed by 20 bits per measurement point. Usually, the two-dimensional profile data is a distance (distance in the z-axis direction) from the head unit 11 to the measurement point of the workpiece 2 and is a set of distances for a plurality of measurement points arranged along the x-axis direction. . The two-dimensional profile measuring instrument 10 has a head unit 11 and a controller unit 12. The head unit 11 is an example of a measurement unit that measures a two-dimensional profile of the workpiece 2 and includes a light emitting element such as a laser and a light receiving element (line sensor or two-dimensional imaging element). Although FIG. 1A and FIG. 1B show the light-cutting type head unit 11, other types of head units may be employed. Moreover, although the head unit 11 and the controller unit 12 are physically separated, they may be integrated. 1A and 1B, the head unit 11 is connected to the head connector 13 of the controller unit 12 via a cable. The two-dimensional profile measuring instrument 10 is a stand-alone displacement meter, and can perform product inspection based on the acquired two-dimensional profile.

  The external control device 30 is connected to a communication connector 15 such as a universal serial bus, and sets control parameters for the two-dimensional profile measuring instrument 10. As the control parameters, there are an imaging condition, a sampling condition, a capture condition, a correction condition, and the like for the head unit 11. Details of these control parameters will be described later. Further, the control parameters that can be set from the external control device 30 include parameters (such as a master work two-dimensional profile and an inspection threshold) required for product inspection performed in the two-dimensional profile measuring instrument 10.

  As described above, the two-dimensional profile measuring instrument 10 is a stand-alone displacement meter that can execute product inspection alone, but may be connected to an image processing apparatus to form an inspection system.

  FIG. 1B is a diagram showing an outline of the inspection system. The image processing apparatus 20 performs a predetermined image process on the image data acquired from the work 2 and performs an appearance inspection of the work 2. The image processing apparatus 20 has an input card 22 for inputting or receiving two-dimensional profile data output from the two-dimensional profile measuring instrument 10. The image processing apparatus 20 has an expansion slot, and an input card 22 is inserted therein. Since the image processing apparatus 20 and the two-dimensional profile measuring instrument 10 execute high-speed communication of, for example, 512 Mbps, the input card 22 corresponds to a high-speed communication standard such as 1000BASE-T. That is, the communication connector 14 of the two-dimensional profile measuring instrument 10 and the communication connector 23 of the input card 22 comply with the high-speed communication standard and are connected by the cable 21. As described above, the communication connector 23 of the input card 22 functions as a connection unit that connects to the two-dimensional profile measuring device 10 that outputs two-dimensional profile data of the first number of bits (for example, 20 bits).

  The image processing apparatus 20 performs image processing with a bit number smaller than 20 bits (here, 15 bits for convenience of explanation). Therefore, the image processing apparatus 20 cannot handle 20-bit two-dimensional profile data as it is. Therefore, in this embodiment, the input card 22 converts the two-dimensional profile data having the first number of bits received through the communication connector 23 or the like into the two-dimensional profile data having the second number of bits smaller than the first number of bits. It functions as a bit conversion means for conversion. That is, the input card 22 converts 20-bit two-dimensional profile data into 15-bit two-dimensional profile data, and enables the image processing apparatus 20 to execute image processing. The input card 22 also functions as a creation unit that creates a three-dimensional profile data indicating a three-dimensional shape of the inspection object by combining a plurality of two-dimensional profile data output from the bit conversion unit. The two-dimensional profile measuring device 10 outputs two-dimensional profile data of the workpiece 2 conveyed on the line 1 every moment. That is, each two-dimensional profile data is data indicating a cross-sectional shape of a different part of the workpiece 2. Therefore, the input card 22 creates three-dimensional profile data of the work 2 by arranging a plurality of (for example, 800 samples) two-dimensional profile data sampled in time series. For example, a plurality of two-dimensional profile data from the front end to the rear end of the work 2 are arranged in order in the traveling direction of the work 2. The resulting three-dimensional profile data is, for example, 15-bit gray scale image data. That is, the distance (height) from the head unit 11 to the work 2 is expressed as light and shade (gradation value). One two-dimensional profile data is called one sample or one line. That is, the three-dimensional profile data is created from a predetermined number of lines.

  FIG. 2A is a diagram illustrating an example of a three-dimensional shape of the workpiece 2. FIG. 2B is a diagram illustrating an example of a two-dimensional cross-sectional shape (two-dimensional profile data for one line) of the workpiece 2. The cross-sectional shape for one sample shown in FIG. 2B corresponds to one line on FIG. Therefore, the two-dimensional profile data is sometimes called a line. FIG. 2C is a diagram illustrating an example of three-dimensional profile data (grayscale image data) of the work 2. 2A to 2C, the portion of the surface of the workpiece 2 having a low height in the z-axis direction is a light color, and the portion having a high height in the z-axis direction is a dark color. I understand that. The relationship between concentration and height may be reversed. As described above, the three-dimensional profile data is height image data indicating the height of each position constituting the surface of the inspection object.

The image processing apparatus 20 performs appearance inspection by applying a plurality of measurement modules (image processing tools) to the three-dimensional profile data. Here, a measurement module that performs an appearance inspection is referred to as an image processing tool or a measurement tool. There are various image processing tools. The main image processing tools are edge position measurement tool, edge angle measurement tool, edge width measurement tool, edge pitch measurement tool, area measurement tool, blob measurement tool, and pattern search measurement. Tools, scratch measurement tools, etc.
● Height measurement tool: Measures the height of each part of the workpiece 2 based on the 3D profile data. For example, one measurement point of the work 2 is set as a reference position, and the maximum difference is calculated as the maximum height from the difference between the gradation value of the reference position and the gradation value of each measurement point in the region of interest. Alternatively, a plane may be set as the reference surface, and the maximum difference (distance) between the gradation value of the reference surface and the gradation value of each measurement point in the region of interest may be obtained as the height. Note that 15-bit three-dimensional profile data is used in order to prioritize the height measurement accuracy.

The image processing tool described below may be executed after converting 15-bit three-dimensional profile data into three-dimensional profile data having a smaller third bit number (for example, 8 bits). This is because the following image processing tools give priority to processing speed over accuracy. Note that the process of converting 15-bit two-dimensional profile data (height data) into 8-bit height data is called height extraction. In height extraction, an arbitrary plane or curved surface may be set as a reference plane, and the difference between the gradation value of the reference plane and the gradation value of each measurement point may be handled as 8-bit data. By using an appropriate reference plane, it is possible to sufficiently hold the difference information necessary for image processing even with 8 bits.
● Edge position measurement tool: By setting a window for the inspection area where the edge position is to be detected on the screen on which the image of the workpiece 2 is displayed, the scan is performed in any direction within the set inspection area. A plurality of edges (locations switching from light to dark or locations switching from dark to light) are detected. The specification of one edge is received from the detected plurality of edges, and the position of the edge that has received the specification is measured.
Edge angle measuring tool: Two segments are set in the inspection area where the setting is accepted, and the inclination angle of the workpiece 2 from the edge detected in each segment is measured. The tilt angle can be positive, for example, clockwise.
Edge width measurement tool: Detects a plurality of edges by scanning in an arbitrary direction within the inspection region that has received the setting, and measures the width between the detected edges.
● Edge pitch measurement tool: Scans in any direction within the inspection area that accepts the settings to detect multiple edges. The maximum value / minimum value and average value of the distances (angles) between the detected edges are measured.
Area measurement tool: Measures the area of the white area or black area by binarizing the workpiece 2 image. For example, the area of the white region or the black region is measured by accepting the specification of a white region or a black region as a parameter to be measured.
Blob measurement tool: The image of the workpiece 2 is binarized, and the number, area, barycentric position, etc. as parameters are measured for a set (blob) of pixels having the same luminance value (255 or 0).
Pattern search measurement tool: The image pattern (model image) to be compared is stored in the storage device in advance, and the part similar to the stored image pattern is detected from the captured image of the work 2 Thus, the position, inclination angle, and correlation value of the image pattern are measured.
Scratch measurement tool: A small area (segment) is moved within the inspection area where the setting is received to calculate an average density value of pixel values, and a position where a density difference equal to or greater than a threshold value is determined to be scratched.
● In addition, OCR recognition tool that recognizes character strings by cutting out character information in the inspection area and collating it with dictionary data, etc., while shifting the window (area) set on the image, at each window position Trend edge tool with a function to repeat edge detection, density tool with a function to measure the average and deviation of the density in the set window, density with a function to measure the average and deviation of the density in the set window There are tools and the like, and the user can select a necessary image processing tool in accordance with the inspection contents. Note that these image processing tools are merely representative examples of typical functions and their implementation methods. An image processing tool corresponding to any image processing can be a subject of the present invention.

<Significance of Setting Control Parameters of Two-Dimensional Profile Measuring Device 10 from Image Processing Device 20>
As shown in FIG. 1A, the two-dimensional profile measuring instrument 10 is a stand-alone displacement meter, and can perform product inspection based on the two-dimensional profile without connecting the image processing apparatus 20. Further, setting of control parameters regarding the two-dimensional profile measuring instrument 10 can be executed from the external control device 30. On the other hand, as shown in FIG. 1B, by connecting the image processing device 20 to the two-dimensional profile measuring instrument 10, the two-dimensional profile measuring instrument 10 can execute the inspection, and the image processing apparatus 20 also executes the inspection. It becomes possible. In this case, the image processing apparatus 20 executes an inspection that cannot be performed by the two-dimensional profile measuring instrument 10 alone. Control parameters necessary for product inspection of the image processing apparatus 20 can be set through a user interface realized by an input unit or a display unit of the image processing apparatus 20. As described above, since there are two setting units such as the user interface of the external control device 30 and the image processing device 20, the setting related to the control parameter may be troublesome for the user. If some of the control parameters related to the two-dimensional profile measuring instrument 10 can be set from the image processing apparatus 20, it will be convenient for the user. As described above, by enabling the setting of the two-dimensional profile measuring instrument 10 from the image processing apparatus 20, the user can set the two-dimensional profile measuring instrument 10 in the same manner as other inspection-purpose camera apparatuses connected to the image processing apparatus 20. It will be possible to handle. This will improve the convenience of setting.

  It may be desirable to be able to set the control parameters of the two-dimensional profile measuring instrument 10 from the image processing device 20 so that the two-dimensional profile measuring instrument 10 can acquire a highly accurate two-dimensional profile. By connecting the image processing apparatus 20 to the two-dimensional profile measuring instrument 10, the image processing apparatus 20 can create a height image. By looking at the height image, the control parameters of the two-dimensional profile measuring instrument 10 are obtained. It may be easier to set. In other words, even if the control parameter is difficult to set only by the two-dimensional profile displayed on the external control device 30, it can be easily set by looking at the height image displayed by the image processing device 20.

  FIG. 3A is a diagram showing an example of a two-dimensional profile 310 and a height image 300 for a certain work 2. In particular, the two-dimensional profile 310 is a two-dimensional profile of a line indicated by a broken line 301 in the height image 300. As shown in the height image 300 of FIG. 3, since there is a defect in the circled portion 302 of the work 2, it is desirable to set the imaging conditions of the head unit 11 so that the defect can be detected with high accuracy. It is. Such a defect cannot be recognized only by looking at the two-dimensional profile 310, but can be recognized only by looking at the height image. Therefore, in the external control device 30 that receives and displays the two-dimensional profile 310, it will be difficult for the user to accurately set the imaging conditions and the like. In this way, even if the control parameter can be set from the external control device 30, there are cases where the control parameter can be set more efficiently and accurately by setting from the image processing device 20.

In the two-dimensional profile measuring instrument 10 and the image processing apparatus 20, various control parameters required for the inspection are set, and these are classified into the following two types.
(A) Control parameters related to the image to be captured (b) Control parameters related to the measurement process (c) Control parameters such as tolerance required for evaluating the measurement results If the area measurement tool described above is used, the following control parameters Setting is required.
(A) Camera shutter speed, illumination light quantity (b) Threshold value for binarizing the acquired image (c) Threshold value for comparing with the measured area However, unless the control parameters relating to (a) can be set appropriately Cannot obtain a correct test result no matter how the settings are made for (b) and (c). That is, it is important to set the control parameters related to the imaging conditions in the two-dimensional profile measuring instrument 10, and if it can be set from the image processing apparatus 20, the user-friendliness will be improved.

  FIG. 3B shows an example of a height image when the exposure setting is inappropriate and an example of a height image when the exposure setting is appropriate. The height image 321 is a height image acquired in a state where the exposure time is insufficient. If the exposure time is insufficient, noise will occur. The height image 322 is a height image acquired in a state where the exposure time is appropriately set. Noise is not seen in the height image 322. In order to appropriately set the exposure time in this way, a user interface is provided that allows the image processing apparatus 20 to display a height image and a luminance image and to find an appropriate exposure time while confirming the image. It will be required.

<User interface>
FIG. 4 is a diagram illustrating an example of a user interface 400 displayed on the display unit 152 by the image processing apparatus 20. In the image display area 401, a luminance image acquired from the two-dimensional profile measuring instrument 10 is displayed. The luminance image is an image as raw data output from the imaging sensor of the head unit 11 and is an image that is the basis of a two-dimensional profile. That is, the luminance image is a set of luminance values corresponding to each position in the x-axis direction. The luminance image is a blurred image that is brightened only at the condensing position, and is particularly useful when setting the imaging conditions of the head unit 11. The setting content selection unit 402 is a button for selecting setting content. In this example, sampling settings, capture settings, imaging settings, and correction settings can be selected. In this example, the pointer 409 is operated through the input unit 150, and the imaging setting is selected.

Imaging Setting Window The imaging setting window 403 is a window for setting control parameters relating to imaging conditions. The imaging setting window 403 includes a light receiving sensitivity characteristic setting unit 404, a peak detection sensitivity setting unit 405, a peak selection setting unit 406, a peak width filter setting unit 407, and an exposure time setting unit 408.

  The light receiving sensitivity characteristic is a light receiving sensitivity characteristic of the head unit 11. In the light receiving sensitivity characteristic setting unit 404, for example, either a high dynamic range or a high accuracy can be set. Selecting a high dynamic range has the advantage that even light with low intensity can be detected. When high accuracy is selected, the dynamic range is narrowed, so the S / N of the detection result is improved.

  The peak detection sensitivity is a sensitivity (threshold value) for detecting the edge of the workpiece 2. In the peak detection sensitivity setting unit 405, for example, one sensitivity among a plurality of levels of sensitivity can be selected. When high sensitivity is selected, even if the luminance value of the peak of light detected by the head unit 11 is small, it is detected as an edge. On the other hand, when a low sensitivity is selected, a peak having a low luminance value is not detected as an edge. The peak is a peak of the amount of received light, and the peak position indicates the distance from the head unit 11 to the work 2.

  Peak selection refers to selecting a rule that serves as a reference for extracting which peak when a plurality of peaks are detected on the same x coordinate. The peak selection setting unit 406 can select, for example, a rule for removing standard (maximum peak), NEAR, FAR, and X multiple reflections. Standard (maximum peak) refers to selecting a peak with the maximum amount of received light from a plurality of peaks. NEAR means selecting the peak closest to the NEAR side (side closer to the head unit 11). FAR means selecting the peak on the most FAR side (the side far from the head unit). The removal of X multiple reflection is a rule in which X / Y polarized light is emitted from a light source and a peak that is multiple reflected in the x-axis direction is removed. This can efficiently remove multiple reflections generated by unevenness extending in the x-axis direction on the surface of the workpiece 2.

  With the peak width filter, compared to the original light reflected by the workpiece 2, the shape of the light receiving peak due to disturbance light or multiple reflected light tends to be wider. It is a rule that prevents detection as a “suspicious peak”. The peak width filter setting unit 407 can select whether to enable or disable the peak width filter.

  The exposure time is the exposure time of the image sensor of the head unit 11. In the exposure time setting unit 408, for example, AUTO can be selected. AUTO is a rule for obtaining the exposure time from the sampling period set in the head unit 11.

Sampling Setting Window FIG. 5 is a diagram showing an example of the sampling setting window 500. The sampling setting window 500 is used for setting a period (sampling period) for acquiring a two-dimensional profile. The sampling method setting unit 501 is used to select a device that generates a pulse signal indicating a sampling period. Examples of such a device include an encoder attached to the line 1 and the two-dimensional profile measuring instrument 10 itself. The input mode setting unit 502 sets a pulse signal input method from an encoder or the like. The input mode setting unit 502 can select, for example, 1-phase 1-fold, 1-phase 2-fold, 2-phase 1-fold, 2-phase 2-fold, or 2-phase 4-fold. The thinning setting unit 503 sets a pulse thinning rate in the input pulse signal. The sampling period setting unit 504 sets a sampling period. Here, the fastest line speed is determined by setting the sampling period. The fastest line speed is the upper limit of the conveying speed of the factory production line that can measure all the profiles. Since the upper limit of the period at which the profile can be acquired is determined by the sampling period, the fastest line speed can be obtained from the input pitch of the encoder and the sampling period.

Acquisition Setting Window FIG. 6 is a diagram showing an example of the acquisition setting window 600. The capture setting is a setting related to a capture method and capture range of a two-dimensional profile necessary for generating a height image. A capture method setting unit 601 sets a capture method for a two-dimensional profile. Here, for example, one of continuous capture and single wafer capture can be selected. Continuous capture refers to capturing a two-dimensional profile continuously from capture start to capture stop regardless of the workpiece 2. Single-sheet capture refers to capturing a two-dimensional profile for each workpiece 2. In the capture range setting, a parameter related to the size of the height image can be set. The pixel number setting unit 602 sets the number of pixels in the X direction. That is, the number of pixels constituting one line is set. The acquisition line setting 603 sets the number of lines constituting one height image, the number of lines shared between the two height images (the number of overlap lines), and the like.

Correction Setting Window FIG. 7 is a view showing an example of the correction setting window 700. In the correction setting window 700, for example, control parameters relating to profile correction and installation correction are set. Profile correction refers to smoothing a two-dimensional profile acquired by the head unit 11 by filtering, for example. The invalid pixel interpolation setting unit 701 sets whether to execute an interpolation process for interpolating invalid pixels from surrounding valid pixels. The X direction smoothing setting unit 702 sets a level for smoothing the two-dimensional profile by averaging in the X direction. The Y direction averaging setting unit 703 sets a level for smoothing the two-dimensional profile by averaging in the Y direction. The installation correction setting unit 704 sets to invert the data in the x-axis direction or invert the data in the y-axis direction according to the installation status of the head unit 11 or the workpiece 2.

<Functional block>
FIG. 8 is a block diagram showing functions required for the inspection system. The image processing apparatus 20 that functions as an inspection apparatus is connected to the two-dimensional profile measuring instrument 10 that functions as an optical displacement meter by wire or wirelessly. Note that the external control device 30 is also connected to the two-dimensional profile measuring instrument 10 by wire or wirelessly. Note that the functions described below can be configured by a CPU, a ROM, a RAM, an ASIC, a program, and the like. For example, functions that emphasize high speed (such as the image processing unit 830 and the display processing unit 151) may be implemented by an ASIC, and functions that do not place great importance on high speed may be implemented by a program.

  The two-dimensional profile measuring instrument 10 includes a sensor unit 801 as a light receiving unit that receives reflected light from the workpiece 2 that is an inspection target. The sensor unit 801 is, for example, a CMOS image sensor or a CCD image sensor mounted on the head unit 11. The external control device 30 includes a first setting unit 802 that sets control parameters necessary for acquiring a two-dimensional profile. In this case, the user interface of the first setting unit 802 is included in the external control device 30 that is a computer connected to the controller unit 12 of the two-dimensional profile measuring instrument 10. Note that the first setting unit 802 may be provided in the two-dimensional profile measuring instrument 10. Note that the first setting unit 802 is the two-dimensional profile measuring instrument 10 because the two-dimensional profile measuring instrument 10 including the external control device 30 may be considered. The two-dimensional profile measuring instrument 10 generates a two-dimensional profile based on the control unit 803 that controls the sensor unit 801 according to the control parameter set by the first setting unit 802 and the luminance image output from the sensor unit 801. A two-dimensional profile generation unit 804 for outputting. The communication unit 805 is a communication interface that communicates with the external control device 30 and the image processing device 20. For example, the communication unit 805 functions as a first luminance image transmission unit that transmits the luminance image acquired by the sensor unit 801 to the image processing apparatus 20 together with the two-dimensional profile. Thereby, the display unit 152 of the image processing apparatus 20 can display the luminance image and the two-dimensional profile. The communication unit 805 may function as a second luminance image transmission unit that transmits the luminance image acquired by the sensor unit 801 to the external control device 30 together with the two-dimensional profile. Accordingly, the first setting unit 802 of the external control device 30 may provide a user interface for setting the control parameter by displaying the luminance image and the two-dimensional profile on the display device. Further, the communication unit 805 may function as a luminance profile transmission unit that transmits a luminance profile configured by luminance information at each position of the two-dimensional profile to the image processing apparatus 20 or the external control apparatus 30 together with the two-dimensional profile. The first inspection unit 806 is an inspection unit that functions when the two-dimensional profile measuring instrument 10 independently performs product inspection. That is, the first inspection unit 806 functions as an execution unit that executes measurement processing or inspection processing using a two-dimensional profile independently of the image processing apparatus 20. The storage unit 807 stores and holds the set control parameter 808 and the like.

  The first setting unit 802 may set an image mask on the luminance image displayed on the user interface. In this case, the first inspection unit 806 performs measurement processing or inspection processing on the remaining part of the two-dimensional profile excluding the part to which the image mask is applied. For example, since the user can confirm the location of noise generation due to multiple reflection or the like by referring to the luminance image, a mask is set at that portion through the input unit 150. The two-dimensional profile generation unit 804 generates a two-dimensional profile ignoring the masked portion. Therefore, the first inspection unit 806 executes the measurement process or the inspection process for the remaining part of the two-dimensional profile excluding the part to which the image mask is applied. Alternatively, the first inspection unit 806 may perform the measurement process or the inspection process on the remaining part of the two-dimensional profile excluding the part to which the image mask is applied without correcting the two-dimensional profile. This makes it less susceptible to noise and the like.

  The first setting unit 802 may set a feedback control region for a luminance image or a two-dimensional profile displayed on the user interface. The first setting unit 802 may update the imaging condition as a control parameter by feeding back luminance information in the feedback control region. For example, if the pixel value of each pixel in the region set as the feedback control region is saturated, the exposure time is too long, so the exposure time is reduced.

  The first setting unit 802 sets a height measurement position for the two-dimensional profile displayed on the user interface and sets a tolerance for each height measurement position. The first inspection unit 806 may inspect whether or not the target object is a non-defective product based on the height and tolerance acquired from the height measurement position of the target object.

  The input card 22 of the image processing apparatus 20 includes a communication unit 811 that communicates with the two-dimensional profile measuring instrument 10 and a height image generation unit 812. The height image generation unit 812 acquires a plurality of two-dimensional profiles from the two-dimensional profile measuring device 10, integrates the acquired two-dimensional profiles, and displays a height image in which the height of the object is expressed by pixel values. create. The second inspection unit 840 and the image processing unit 830 execute measurement processing or inspection processing on the object using the height image. The image processing unit 830 includes a measurement unit 831 that provides the above-described image processing tool. The second inspection unit 840 determines whether the workpiece 2 is a non-defective product based on the control parameters (tolerance, etc.) set by the second setting unit 820 and the height image measurement result by the measurement unit 831. Note that the height image generation unit 812 creates a height image from the two-dimensional profile and acquires and connects a plurality of luminance profiles composed of luminance information at each position of the two-dimensional profile to support the height image. You may create a shaded image. That is, a gray image is obtained by combining a plurality of luminance profiles to form an image. The grayscale image is a focused image as if a position corresponding to the height image was captured by the camera. The image processing apparatus 20 may perform workpiece measurement and appearance inspection using such a grayscale image. As a result, the two-dimensional profile measuring instrument 10 can be used as a camera for acquiring a workpiece image. Note that the creation of the grayscale image may be executed by the two-dimensional profile measuring instrument 10. In this case, the two-dimensional profile measuring device 10 may execute various measurement processes and appearance inspection processes using the grayscale image.

  The storage device 850 includes the two-dimensional profile 851, the luminance profile 852, and the luminance image 853 received from the two-dimensional profile measuring instrument 10, the height image 854 generated by the height image generating unit 812, and the two-dimensional profile measuring instrument. 10 and the control parameter 855 of the image processing apparatus 20 are stored.

  As described with reference to FIG. 4, the second setting unit 820 may display the control parameter setting user interface on the display unit 152 in a state where the two-dimensional profile is displayed on the display unit 152. Thereby, the user will be able to adjust the control parameters appropriately while confirming the state of the two-dimensional profile.

  As described with reference to FIG. 3B, the second setting unit 820 may display the control parameter setting user interface on the display unit 152 in a state where the height image is displayed on the display unit 152. Thereby, the user will be able to adjust the control parameters appropriately while checking the state of the height image.

  The second setting unit 820 sets control parameters used by the measurement unit 831 and the pass / fail determination unit 841. Further, the second setting unit 820 sets the control parameters of the two-dimensional profile measuring instrument 10 that can be set by the first setting unit 802 from the image processing apparatus 20 side. As described with reference to FIG. 4 and the like, some of the parameters that can be set from the second setting unit 820 are control parameters related to the imaging conditions of the two-dimensional profile measuring instrument 10.

  As described with reference to FIGS. 4 to 7, the second setting unit 820 causes the display unit 152 to display a control parameter setting user interface that can be set by the second setting unit 820. The profile selection unit 821 selects one two-dimensional profile among a plurality of two-dimensional profiles constituting the height image displayed on the display unit 152 in accordance with a user instruction input from the input unit 150. . The second setting unit 820 may set the control parameter in a state where the two-dimensional profile selected by the profile selection unit 821 is displayed on the display unit 152.

  As described with reference to FIG. 3A, the second setting unit 820 may first display the height image 300 on the display unit 152. When any part of the height image 300 is designated through the input unit 150, the second setting unit 820 selects the two-dimensional profile 310 corresponding to the designated part, reads it from the storage device 850, and displays it. You may display on the part 152. FIG. Thus, the user can easily call and confirm the two-dimensional profile of the portion to be further watched while looking at the height image 300. Note that the second setting unit 820 may read a luminance image corresponding to the two-dimensional profile corresponding to the designated portion from the storage device 850 and display the luminance image on the display unit 152. By checking the luminance image, the user can easily grasp whether the imaging condition is appropriate.

  One or more camera devices may be further connected to the image processing device 20. In this case, the two-dimensional profile measuring instrument 10 can be handled by the image processing apparatus 20 as one of a plurality of camera apparatuses.

  A height image, a user interface, a luminance profile, a luminance image, and the like are displayed on the display unit 152 through the display processing unit 151.

  The second setting unit 820 may include a parameter synchronization unit 822 and a control right management unit (setting right management unit) 823. This is a function related to the control right (setting right) described below. The control right is a right to change a control parameter for the two-dimensional profile measuring instrument 10.

<Management of control rights>
In the present embodiment, at least some control parameters of the two-dimensional profile measuring instrument 10 can be set not only from the external control device 30 but also from the image processing device 20. However, it may be inconvenient if the setting authority is given to both at the same time. For example, when the image processing condition is changed from the image processing device 20 while the two-dimensional profile measuring instrument 10 is executing the inspection processing alone, the inspection processing of the two-dimensional profile measuring instrument 10 becomes an error. End up. Further, if the control parameter is changed by the external control device 30 after setting a certain control parameter, the control parameter held by the two-dimensional profile measuring instrument 10 and the image processing device 20 are held. The control parameter is not consistent. Therefore, some synchronization means is required for the control parameters. When the two-dimensional profile measuring instrument 10 is already at hand of the user and the image processing apparatus 20 is purchased to construct an inspection system, it is difficult to add a synchronization function to the two-dimensional profile measuring instrument 10. Yes, it is easier to add synchronization means to the image processing apparatus 20.

  Therefore, the image processing apparatus 20 is provided with a first mode in which control parameters can be edited from the image processing apparatus 20 and a second mode in which editing of control parameters from the image processing apparatus 20 is prohibited.

  FIG. 9 shows an example of a mode selection user interface 901 provided by the control right management unit 823 and an imaging setting user interface 902 provided by the second setting unit 820. According to FIG. 9, the mode selection user interface 901 has a mode selection unit 903, and the user can select either the first mode or the second mode through the input unit 150. When the control right management unit 823 detects that the first mode has been selected, the control right management unit 823 grants the control parameter setting right to the second setting unit 820. As a result, the second setting unit 820 displays an imaging setting user interface 902 that can be set for imaging conditions on the display unit 152, as shown in FIG.

  In the first mode, the parameter synchronization unit 822 of the image processing apparatus 20 writes the control parameter 808 in the storage unit 807 of the two-dimensional profile measuring instrument 10, so that the two-dimensional profile is stored in the control parameter 855 held by the image processing apparatus 20. The control parameters 808 held by the measuring instrument 10 are synchronized.

  In the first mode, the second setting unit 820 has a control right, but since the control by the first setting unit 802 cannot be prohibited, the control parameter 808 may be changed by the first setting unit 802. Therefore, the parameter synchronization unit 822 acquires the control parameter 808 by periodically transmitting a read command for reading the control parameter 808 to the two-dimensional profile measuring instrument 10, and the control parameter stored in the storage device Compare with 855. If they do not match, the second setting unit 820 transmits an overwrite command for the control parameter 808 and overwrites the control parameter 808 with the control parameter 855. As a result, the control parameters relating to the two-dimensional profile measuring instrument 10 are synchronized between the two-dimensional profile measuring instrument 10 and the image processing apparatus 20.

  FIG. 10 shows an example of a mode selection user interface 901 provided by the control right management unit 823 and an imaging setting user interface 902 provided by the second setting unit 820. As shown in FIG. 10, when the control right management unit 823 detects that the second mode is selected by the mode selection unit 903, only the first setting unit 802 sets the control parameters related to the two-dimensional profile measuring instrument 10. Grant rights. The second setting unit 820 detects that the user does not have the setting right, and displays the imaging setting user interface 902 in which the setting unit related to the imaging condition is grayed out on the display unit 152.

  In the second mode, since the control right is not in the second setting unit 820, the control parameter 808 may be changed by the first setting unit 802. Therefore, in the second mode, the parameter synchronization unit 822 reads the control parameter 808 held in the storage unit 807 of the two-dimensional profile measuring instrument 10, so that the control parameter 808 held by the two-dimensional profile measuring instrument 10 is obtained. The control parameters 855 held by the image processing apparatus 20 are synchronized.

  The control right management unit 823 assigns the right to set the control parameter 808 involved in the inspection process while the first inspection unit 806 of the two-dimensional profile measuring instrument 10 performs the inspection process on the workpiece 2. It is not given to 820.

<Flowchart>
FIG. 11 is a flowchart showing control parameter setting processing executed by the second setting unit 820.

  In step S <b> 1101, the second setting unit 820 determines whether the second setting unit 820 has the right to set the control parameter 808. The setting right is set in advance by the control right management unit 823, and information such as a flag indicating the presence or absence of the setting right is stored in the storage device 850. Therefore, the second setting unit 820 reads this information to determine whether the second setting unit 820 has a setting right. If it has the setting right, the process proceeds to S1102. This is a case where the first mode described above is effective.

  In step S1102, the second setting unit 820 displays a user interface (UI) for setting control parameters on the display unit 152.

  In step S <b> 1103, the second setting unit 820 transmits a command for acquiring a two-dimensional profile to the two-dimensional profile measuring instrument 10 via the communication unit 811. Upon receiving this command, the control unit 803 of the two-dimensional profile measuring instrument 10 controls the sensor unit 801 according to the control parameter 808 to acquire a luminance image or luminance profile. Further, the control unit 803 causes the two-dimensional profile generation unit 804 to create a two-dimensional profile from the luminance image (or luminance profile), and transmits the two-dimensional profile to the image processing apparatus 20 via the communication unit 805. The control unit 803 may also transmit a luminance profile and a luminance image. Upon receiving the two-dimensional profile, the second setting unit 820 renders it on the user interface (UI) and displays it on the display unit 152. Note that the second setting unit 820 may display a height image generated from the received two-dimensional profile on the display unit 152. Further, the second setting unit 820 may render the received luminance profile and luminance image on the UI and display them on the display unit 152.

  In step S <b> 1104, the second setting unit 820 receives a control parameter setting change input through the input unit 150.

  In step S <b> 1105, the second setting unit 820 transmits a command for writing the changed control parameter to the storage unit 807 of the two-dimensional profile measuring device 10 to the two-dimensional profile measuring device 10. The control unit 803 writes the control parameter received together with the write command to the storage unit 807.

  By the way, if it is determined that there is no control right in S1101, the process proceeds to S1111. This is a case where the second mode described above is effective. In step S1111, the second setting unit 820 updates the control parameter 855 by writing the control parameter 808 acquired from the two-dimensional profile measuring instrument 10 to the storage device 850.

<Summary>
According to the present embodiment, when a displacement meter such as a two-dimensional profile measuring instrument 10 capable of executing product inspection without connecting the image processing device 20 is connected to the image processing device 20, the displacement meter also from the image processing device 20. It becomes possible to set.

  The image processing apparatus 20 includes a second setting unit 820, and the user can set control parameters related to the imaging conditions of the optical displacement meter such as the two-dimensional profile measuring instrument 10 by the second setting unit 820. As described with reference to FIGS. 3A and 3B, the control parameters related to the imaging conditions greatly affect the inspection process by the measurement process in the image processing apparatus 20. Therefore, it would be convenient for the user if the control parameters related to the imaging conditions can be set from the second setting unit 820.

  Although the two-dimensional profile measuring instrument 10 has been described as having the head unit 11 and the controller unit 12 separated, the two may be integrated.

  The user interface of the first setting unit 802 may be displayed on the display device of the external control device 30 that is a computer connected to the controller unit 12. When the two-dimensional profile measuring instrument 10 includes a function as the external control device 30, the user interface of the first setting unit 802 is displayed on the display device of the two-dimensional profile measuring instrument 10. In this case, a pointing device, a console, a keyboard, and the like will be connected to the two-dimensional profile measuring instrument 10.

  Only one of the first setting unit 802 and the second setting unit 820 may be given the authority to change the control parameters of the two-dimensional profile measuring instrument 10. In particular, by giving the authority only to the first setting unit 802, the control parameter cannot be changed from the second setting unit 820. This will be effective in preventing errors when the two-dimensional profile measuring instrument 10 is operating as an inspection apparatus independently of the image processing apparatus 20.

  When the second setting unit 820 changes the control parameter, the luminance image acquired by the two-dimensional profile measuring instrument 10 and the two-dimensional profile may be displayed on the display unit 152. The luminance image will be helpful in determining whether the exposure time is appropriate. For a two-dimensional profile, it may be useful in determining whether the control parameters have been adjusted so that the two-dimensional profile can be accurately acquired.

  As described with reference to FIGS. 4 to 7, the display unit 152 may display a control parameter setting user interface that can be set by the second setting unit 820. This makes it easier for the user to change the control parameter while visually grasping the setting contents.

  By specifying a position with respect to the height image displayed on the display unit 152, a two-dimensional profile may be displayed on the display unit 152 corresponding to the position. The height image is easy to grasp the position in relation to the workpiece, and this makes it easy to confirm the state of the two-dimensional profile at the desired position.

  Note that a luminance image corresponding to the selected two-dimensional profile may also be displayed on the display unit 152. The luminance image will be extremely effective in determining whether the imaging conditions such as the exposure time are appropriate.

  The two-dimensional profile measuring device 10 may transmit a luminance profile instead of transmitting a luminance image, and the height image generation unit 812 of the image processing device 20 may generate a grayscale image from the luminance profile. As a result, it is possible to acquire a grayscale image corresponding to the height image from the luminance profiles corresponding to the two-dimensional profiles. In this case, the measurement unit 831 executes the measurement process described above using the grayscale image, passes the obtained measurement result to the second inspection unit 840, and the second inspection unit 840 executes the inspection process using the measurement result. Then, the quality of the work may be determined. This makes it possible to inspect both the height image and the gray image without separately providing a camera for acquiring the gray image.

  The two-dimensional profile measuring device 10 may be a stand-alone displacement meter that performs measurement processing or inspection processing using a two-dimensional profile independently of the image processing apparatus 20. Although such a displacement meter is not assumed to be connected to the image processing device 20, the image processing device 20 is made to stand-alone two-dimensional by using an interface or protocol for communicating with the external control device 30. It becomes possible to connect to the profile measuring instrument 10. Further, the two-dimensional profile measuring instrument 10 can be set from the image processing apparatus 20, which is convenient for the user.

  Since the external control device 30 includes the first setting unit 802, the luminance image and the two-dimensional profile received from the two-dimensional profile measuring device 10 can be displayed, and the control parameter 808 can be set. However, when the image processing apparatus 20 is connected to the two-dimensional profile measuring instrument 10, control parameters can be set from the second setting unit 820 instead of the first setting unit 802. Since the second setting unit 820 can also set control parameters related to the image processing device 20, the image processing device 20 and the two-dimensional profile measuring instrument 10 can be set uniformly from the second setting unit 820. This may be convenient for the user.

  Note that the first setting unit 802 can set control parameters (image mask, feedback control region, tolerance, etc.) related to the inspection process for the measurement process executed by the two-dimensional profile measuring instrument 10. These may be set from the second setting unit 820.

  In addition to the two-dimensional profile measuring device 10, other camera devices can be set in the image processing device 20. However, it is advantageous for the user that the two-dimensional profile measuring device 10 can be handled as one of the camera devices. .

Claims (22)

An inspection system comprising an optical displacement meter and an inspection device connected to the optical displacement meter by wire or wirelessly,
The optical displacement meter is
A light receiving unit for receiving reflected light from the object;
A first setting unit for setting control parameters necessary for obtaining a two-dimensional profile of the object;
A control unit for controlling the light receiving unit according to the control parameter set by the first setting unit;
A profile generation unit that generates and outputs the two-dimensional profile based on a luminance image output from the light receiving unit;
Have
The inspection device includes:
A height image generating unit that acquires a plurality of two-dimensional profiles from the optical displacement meter, and creates a height image in which the acquired plurality of two-dimensional profiles are integrated to express the height of the object with pixel values; ,
An inspection unit that performs a measurement process or an inspection process on the object using the height image;
An inspection system comprising: a second setting unit configured to set a control parameter settable by the first setting unit from the inspection apparatus.   The inspection system according to claim 1, wherein the parameter settable from the second setting unit is a control parameter related to an imaging condition of the optical displacement meter. The optical displacement meter is
A head having the light receiving portion;
The inspection system according to claim 1, further comprising a controller that is connected to the head and includes the control unit and the profile generation unit.   The inspection system according to claim 3, wherein a user interface of the first setting unit is included in a computer connected to the controller.   5. The apparatus according to claim 1, further comprising a setting right management unit that grants the setting right of the control parameter to only one of the first setting unit and the second setting unit. The inspection system described.   The setting right management unit does not give a setting right of a control parameter related to the inspection process to the second setting unit while the optical displacement meter executes the inspection process on the object. The inspection system according to claim 5. The optical displacement meter further includes a first luminance image transmission unit that transmits the luminance image acquired by the light receiving unit together with the two-dimensional profile to the inspection apparatus,
The inspection device includes:
The inspection system according to claim 1, further comprising a display unit that displays the luminance image and the two-dimensional profile.   The inspection system according to claim 7, wherein the display unit displays a control parameter setting user interface that can be set by the second setting unit. A selection unit that selects one two-dimensional profile among a plurality of two-dimensional profiles constituting the height image displayed on the display unit;
The inspection system according to claim 7 or 8, wherein the second setting unit sets the control parameter in a state where the two-dimensional profile selected by the selection unit is displayed on the display unit.   The said 2nd setting part sets the said control parameter in the state by which the brightness | luminance image corresponding to the two-dimensional profile selected by the said selection part was displayed on the said display part. Inspection system.   The optical displacement meter further includes a luminance profile transmission unit that transmits a luminance profile composed of luminance information at each position of the two-dimensional profile to the inspection apparatus together with the two-dimensional profile. Item 11. The inspection system according to any one of Items 1 to 10. The height image generation unit is configured to create the height image from the two-dimensional profile and to create a grayscale image corresponding to the height image from the luminance profile,
The inspection system according to claim 11, wherein the inspection unit is configured to perform an inspection process using a measurement result obtained using the grayscale image.   13. The optical displacement meter further includes an execution unit that executes measurement processing or inspection processing using the two-dimensional profile independently of the inspection device. Inspection system as described in. The optical displacement meter further includes a second luminance image transmission unit that transmits the luminance image acquired by the light receiving unit together with the two-dimensional profile to an external control device connected to the optical displacement meter. ,
The external control device provides a user interface for setting control parameters in the external control device as the first setting unit by displaying the luminance image and the two-dimensional profile on a display device. The inspection system according to claim 13. The first setting unit sets an image mask for the luminance image displayed on the user interface,
The inspection system according to claim 14, wherein the execution unit executes a measurement process or an inspection process on a remaining part of the two-dimensional profile excluding a part to which the image mask is applied.   The first setting unit sets a feedback control region for the luminance image or the two-dimensional profile displayed on the user interface, feeds back luminance information in the feedback control region, and sets an imaging condition as the control parameter. The inspection system according to claim 13, wherein the inspection system is updated. The first setting unit sets a height measurement position for the two-dimensional profile displayed on the user interface, sets a tolerance for each height measurement position,
The said execution part test | inspects whether the said target object is non-defective based on the height and tolerance which were acquired from the height measurement position of the target object, The Claim 13 thru | or 15 characterized by the above-mentioned. Inspection system.   The inspection system according to claim 1, wherein one or more camera devices are further connected to the inspection device. Among the control parameters, the control parameters related to the imaging conditions are
The light receiving sensitivity characteristic of the light receiving unit,
Peak detection sensitivity for detecting the peak from the luminance profile acquired by the light receiving unit and creating the two-dimensional profile;
A rule for selecting one peak when there are a plurality of peaks at the same position in the luminance profile acquired by the light receiving unit;
A parameter indicating whether or not to detect a wide peak among the peaks in the luminance profile acquired by the light receiving unit;
An exposure time of the light receiving unit;
The inspection system according to claim 1, comprising at least one of the following. A light receiving unit for receiving reflected light from the object;
A first setting unit for setting control parameters necessary for obtaining a two-dimensional profile of the object;
A control unit for controlling the light receiving unit according to the control parameter set by the first setting unit;
A profile generation unit that generates and outputs the two-dimensional profile based on a luminance image output from the light receiving unit;
An image processing apparatus that can be used by connecting to an optical displacement meter having:
A height image generating unit that acquires a plurality of two-dimensional profiles from the optical displacement meter, and creates a height image in which the acquired plurality of two-dimensional profiles are integrated to express the height of the object with pixel values; ,
An inspection unit that performs a measurement process or an inspection process on the object using the height image;
An image processing apparatus comprising: a second setting unit configured to set a control parameter settable by the first setting unit from the image processing apparatus. A light receiving unit for receiving reflected light from the object;
A first setting unit for setting control parameters necessary for obtaining a two-dimensional profile of the object;
A control unit for controlling the light receiving unit according to the control parameter set by the first setting unit;
A profile generation unit that generates and outputs the two-dimensional profile based on a luminance image output from the light receiving unit;
A method executed in an image processing apparatus usable by connecting to an optical displacement meter having:
A setting step of setting from the image processing device for control parameters that can be set by the first setting unit; and acquiring a plurality of two-dimensional profiles from the optical displacement meter; integrating the acquired two-dimensional profiles; A height image creation process for creating a height image expressing the height of an object with pixel values;
An inspection process for performing a measurement process or an inspection process on the object using the height image;
A method characterized by comprising:   A program causing an image processing apparatus to execute the method according to claim 21.