JP2015149845A - electromagnetic vibration actuator - Google Patents

electromagnetic vibration actuator Download PDF

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JP2015149845A
JP2015149845A JP2014021874A JP2014021874A JP2015149845A JP 2015149845 A JP2015149845 A JP 2015149845A JP 2014021874 A JP2014021874 A JP 2014021874A JP 2014021874 A JP2014021874 A JP 2014021874A JP 2015149845 A JP2015149845 A JP 2015149845A
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movable part
movable
spring
vibration actuator
movable portion
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JP6444035B2 (en
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穎剛 卜
Yinggang Bu
穎剛 卜
勉 水野
Tsutomu Mizuno
勉 水野
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Shinshu University NUC
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Abstract

PROBLEM TO BE SOLVED: To provide an electromagnetic vibration actuator which allows for energy saving and high efficiency, by reducing attenuation of magnetism while driving, thereby enabling high speed vibration.SOLUTION: An electromagnetic vibration actuator includes a first movable portion 20 supported cooperatively by a fixed support via a first spring 10, a second movable portion 22 supported cooperatively by the first movable portion 20 via a second spring 12, and a drive section 30 supported by the fixed support and reciprocating the first movable portion 20. The first movable portion 20 and second movable portion 22, and the first spring 10 and second spring 12 are set to conditions that the resonance frequency fof the second movable portion 22 goes above the resonance frequency fof the first movable portion 20, and the drive section 30 drives the first movable portion 20 with the resonance frequency fof the second movable portion 22 as the drive frequency, and uses the second movable portion as the output side.

Description

本発明は電磁振動アクチュエータに関し、より詳細にはデュアル共振系を備える電磁振動アクチュエータに関する。   The present invention relates to an electromagnetic vibration actuator, and more particularly to an electromagnetic vibration actuator including a dual resonance system.

図９は、電磁式リニア振動アクチュエータ（Lineａr Oscillａtory Ａctuａtor:LOＡ）の基本構造を示す。この振動アクチュエータは、コイル２ａと磁性ヨーク２ｂとを備える駆動部２と、バネ３により駆動部２に対して可動に支持された可動部４とを備える。可動部４には永久磁石５が固定され、エアギャップを介して永久磁石５と駆動部２のコイル２ａとが対向して配置される。
駆動部２のコイル２ａに交流電流を通電することにより、電磁力の作用によって可動部４がバネ３の伸縮方向に振動駆動され、駆動部２の駆動周波数を共振周波数に設定することにより、可動部４が振動駆動される。バネ３のばね定数K1は共振周波数に関わり、減衰定数C1は振幅に関わる。 FIG. 9 shows the basic structure of an electromagnetic linear vibration actuator (Linear Oscillatory Actuator: LOA). This vibration actuator includes a drive unit 2 including a coil 2a and a magnetic yoke 2b, and a movable unit 4 supported movably with respect to the drive unit 2 by a spring 3. A permanent magnet 5 is fixed to the movable part 4, and the permanent magnet 5 and the coil 2 a of the drive part 2 are arranged to face each other via an air gap.
By applying an alternating current to the coil 2a of the drive unit 2, the movable unit 4 is driven to vibrate in the expansion / contraction direction of the spring 3 by the action of electromagnetic force, and the drive unit 2 is set to the resonance frequency to be movable. The unit 4 is driven to vibrate. The spring constant K 1 of the spring 3 is related to the resonance frequency, and the damping constant C 1 is related to the amplitude.

図９に示す電磁振動アクチュエータにおいては、可動部４が振動駆動される際に、駆動部２と可動部４とのエアギャップに磁束の変化が生じ、磁性ヨーク２ｂと永久磁石５に渦電流が発生し磁気減衰が発生する。この磁気減衰の作用は、機械バネの減衰と比較して非常に大きく、振動周波数と振幅の増加とともに顕著になる。図１０は、磁気減衰がある場合と無い場合の振動特性を示す。図９に示す振動アクチュエータでは、この磁気減衰の作用により、通常10〜100Hz程度を駆動周波数として使用されており、数百または数千Hzでの高速かつ大振幅での駆動は困難である。   In the electromagnetic vibration actuator shown in FIG. 9, when the movable portion 4 is driven to vibrate, a change in magnetic flux occurs in the air gap between the drive portion 2 and the movable portion 4, and eddy currents are generated in the magnetic yoke 2 b and the permanent magnet 5. Occurs and magnetic attenuation occurs. This action of magnetic damping is very large compared to the damping of the mechanical spring, and becomes prominent as the vibration frequency and amplitude increase. FIG. 10 shows vibration characteristics with and without magnetic damping. In the vibration actuator shown in FIG. 9, due to the action of this magnetic damping, usually about 10 to 100 Hz is used as a drive frequency, and it is difficult to drive at a high speed and a large amplitude at several hundreds or thousands of Hz.

本発明者は電磁式リニア振動アクチュエータに関わる技術として、共振周波数以外の周波数による高効率での駆動を可能にする制御方法（特許文献１）、振動アクチュエータを光走査装置に適用した例（特許文献２）について提案している。また、リニア振動アクチュエータにおける可動部の慣性力に起因する振動を抑制する例として、図９に示した可動部４とは別に振幅を抑制する可動部を設け、２つの可動部を逆位相で駆動して慣性力による振動を抑制する例が報告されている（特許文献３）。   As a technique related to the electromagnetic linear vibration actuator, the present inventor has a control method (Patent Document 1) that enables high-efficiency driving at a frequency other than the resonance frequency, and an example in which the vibration actuator is applied to an optical scanning device (Patent Document). 2) is proposed. Further, as an example of suppressing the vibration caused by the inertial force of the movable part in the linear vibration actuator, a movable part for suppressing the amplitude is provided separately from the movable part 4 shown in FIG. 9, and the two movable parts are driven in opposite phases. An example of suppressing vibration due to inertial force has been reported (Patent Document 3).

特開２００８−２５９４０９号公報JP 2008-259409 A 特開２０１２−１５７８０２号公報JP 2012-157802 A 特開２００２−１９９６８９号公報Japanese Patent Laid-Open No. 2002-199689

上述した２つの可動部をバネにより連繋した構成を備える電磁振動アクチュエータは従来から知られている。しかしながら、この２つの可動部を備える従来の電磁振動アクチュエータは、慣性力を相殺したりする目的から、２つの可動部の共振周波数を相互に近似した周波数になるようにして使用するものであって、駆動部における磁気減衰を抑制したり、大振幅で高速振動を可能とさせることを目的とするものではない。
本発明は、従来の電磁振動アクチュエータとは異なる新たな駆動方式を提案するものであり、駆動時の磁気減衰による鉄損を抑制し、産業機器の省エネルギー化、高効率化及び高速振動を図ることを可能にする電磁振動アクチュエータを提供することを目的とする。 2. Description of the Related Art Conventionally, an electromagnetic vibration actuator having a configuration in which the two movable parts described above are connected by a spring is known. However, the conventional electromagnetic vibration actuator having the two movable parts is used so that the resonance frequencies of the two movable parts are close to each other for the purpose of canceling the inertial force. It is not intended to suppress magnetic attenuation in the drive unit or to enable high-speed vibration with a large amplitude.
The present invention proposes a new driving method different from conventional electromagnetic vibration actuators, and suppresses iron loss due to magnetic damping during driving, thereby achieving energy saving, high efficiency and high-speed vibration of industrial equipment. It is an object of the present invention to provide an electromagnetic vibration actuator that enables the above.

本発明に係る電磁振動アクチュエータは、第１のバネに連繋して支持される第１の可動部と、第２のバネを介して前記第１の可動部に連繋して支持される第２の可動部と、前記第１の可動部を往復駆動する駆動部とを備え、前記第１の可動部及び第２の可動部、前記第１のバネ及び第２のバネは、前記第２の可動部の共振周波数f2が、前記第１の可動部の共振周波数f1を上回る条件に設定され、前記駆動部は、前記第２の可動部の共振周波数f2を駆動周波数として、前記第１の可動部を駆動し、前記第２の可動部を出力側として用いることを特徴とする。
なお、第１の可動部と第２の可動部は可動部として使用するから、通常は、バネの一端側と駆動部は装置のケースや機枠等の固定支持部に支持する。ただし、可動部と駆動部とは相互作用であるから、可動部を固定側とし、駆動部を可動側として使用することも可能である。 The electromagnetic vibration actuator according to the present invention includes a first movable part supported by being linked to a first spring, and a second movable part being supported by being linked to the first movable part via a second spring. A movable portion; and a drive portion that reciprocally drives the first movable portion, wherein the first movable portion, the second movable portion, the first spring, and the second spring are the second movable portion. the resonance frequency f 2 parts is set to condition exceeds the resonant frequency f 1 of the first movable portion, the driving unit, the resonant frequency f 2 of the second movable part as the driving frequency, the first The movable part is driven, and the second movable part is used as an output side.
Since the first movable portion and the second movable portion are used as movable portions, the one end side of the spring and the drive portion are normally supported by a fixed support portion such as a case or a machine frame of the apparatus. However, since the movable portion and the drive portion are interactive, it is also possible to use the movable portion as the fixed side and the drive portion as the movable side.

第１の可動部を電磁的に振動駆動する際の磁気減衰をできるだけ抑えるには、振動駆動時（駆動周波数f2）における第１の可動部の振幅をできるだけ抑える必要がある。そのためには、第１の可動部の共振周波数f1と第２の可動部の共振周波数f2が大きく離れていなければならない。ただし、第２の可動部は第１の可動部の振動が第２のバネを介して第２の可動部に伝達されて振動駆動されるから、第１の可動部もある程度の振幅で振動する必要がある。
実際は、用途に応じて、第１の可動部と第２の可動部の振幅を調節することになるが、磁気減衰を抑え、かつ効果的に第２の可動部を駆動する条件としては、可動部の振幅を規定する減衰定数に基づき、第１の可動部の減衰定数をC1、第２の可動部の減衰定数をC2とするとき、減衰定数C1を減衰定数C2よりも大きくすればよい。 In order to suppress the magnetic attenuation when the first movable part is electromagnetically vibrationally driven as much as possible, it is necessary to suppress the amplitude of the first movable part at the time of vibration driving (drive frequency f 2 ) as much as possible. For this purpose, the resonance frequency f 1 of the first movable part and the resonance frequency f 2 of the second movable part must be greatly separated. However, since the vibration of the first movable part is transmitted to the second movable part via the second spring and driven to vibrate, the first movable part also vibrates with a certain amplitude. There is a need.
Actually, the amplitude of the first movable part and the second movable part is adjusted according to the application, but the condition for suppressing the magnetic attenuation and effectively driving the second movable part is movable. The damping constant C 1 is larger than the damping constant C 2 when the damping constant of the first movable part is C 1 and the damping constant of the second movable part is C 2 based on the damping constant that defines the amplitude of the part. do it.

第１の可動部と駆動部との間で電磁力を作用させるため、第１の可動部は永久磁石を備え、駆動部は、永久磁石との間で電磁力を作用させるコイルとヨークとを備える構成とする。コイルに交流電流あるいは交流パルス電流を通電することにより、第１の可動部が往復振動し、第２のバネを介して第１の可動部に連繋する第２の可動部が往復振動する。   In order to apply an electromagnetic force between the first movable part and the drive part, the first movable part includes a permanent magnet, and the drive part includes a coil and a yoke that apply the electromagnetic force to the permanent magnet. It is set as the structure provided. By applying an alternating current or an alternating pulse current to the coil, the first movable part reciprocates and the second movable part connected to the first movable part via the second spring reciprocates.

第１の可動部と第２の可動部とは、第１の可動部と第２の可動部が、第１の可動部の振動方向に直列となる空間配置とすることもできるし、第２の可動部が、第１の可動部に設けられた収容部に収容され、第１の可動部と第２の可動部は、第１の可動部の振動方向に並列となる空間配置にすることもできる。第２の可動部が、第１の可動部に設けられた収容部に収容されるという意味は、第１の可動部と第２の可動部とが並列に配置されるように、第１の可動部に第２の可動部を収容するための空間が設けられ、この空間内に第２の可動部が、振動方向に可動に収容されるという意味である。   The first movable part and the second movable part may be a spatial arrangement in which the first movable part and the second movable part are in series in the vibration direction of the first movable part. The movable portion is accommodated in the accommodating portion provided in the first movable portion, and the first movable portion and the second movable portion are arranged in a space in parallel in the vibration direction of the first movable portion. You can also. The meaning that the second movable part is accommodated in the accommodating part provided in the first movable part means that the first movable part and the second movable part are arranged in parallel. This means that a space for accommodating the second movable portion is provided in the movable portion, and the second movable portion is movably accommodated in the vibration direction in this space.

第１の可動部と第２の可動部とを並列に配置する場合、第１の可動部に設ける第２の可動部を収容するための収容部は、第１の可動部の内部に設けることも可能であるし、第１の可動部を振動方向に貫通する空間として設けることも可能である。いずれの場合も、第２の可動部は第２のバネを介して第１の可動部に連繋して配置する。第２のバネにより第２の可動部を支持する方法は適宜設定できる。
また、第１の可動部は単体として形成するものとは限らない。たとえば、複数のブロックに分割した可動部を、第２のバネを介して一体的に連結して第２の可動部を収容する収容部を設け、第２のバネにより第２の可動部を支持する構成とすることもできる。 When arranging the first movable part and the second movable part in parallel, the accommodating part for accommodating the second movable part provided in the first movable part is provided inside the first movable part. It is also possible to provide the first movable part as a space penetrating in the vibration direction. In any case, the second movable part is arranged in a manner linked to the first movable part via the second spring. The method of supporting the second movable part by the second spring can be set as appropriate.
Further, the first movable part is not necessarily formed as a single body. For example, a movable portion divided into a plurality of blocks is integrally connected via a second spring to provide a housing portion that houses the second movable portion, and the second spring supports the second movable portion. It can also be set as the structure to do.

前記電磁振動アクチュエータは、第２の可動部を、光を反射するミラー部として構成し、第２のバネが、バネ自体を回転支持軸としてミラー部を往復回転するねじりバネとして構成することにより光スキャナ用振動アクチュエータとして利用することができる。
また、第１の可動部及び第２の可動部と、第１のバネ及び第２のバネと、駆動部を支持する支持枠とが、弾性を備える平板材料からなる平面構造体を基材として形成し、第１の可動部は、支持枠に連繋する第１の支持片部を支持軸として往復回転可能に設け、第２の可動部は第１の可動部に連繋する第２の支持片部を支持軸として往復回転可能に設けることにより、平板構造を備える光スキャナ用振動アクチュエータとなる。
また、第１の可動部を構成する基材に永久磁石を取り付け、支持枠に駆動部のコイルとヨークとを取り付けることにより、平板構造を維持した、高速振動が可能な電磁振動アクチュエータとして構成することができる。 In the electromagnetic vibration actuator, the second movable portion is configured as a mirror portion that reflects light, and the second spring is configured as a torsion spring that reciprocally rotates the mirror portion with the spring itself as a rotation support shaft. It can be used as a vibration actuator for a scanner.
Further, the first movable portion and the second movable portion, the first spring and the second spring, and the support frame that supports the driving portion are made of a planar structure made of a flat plate material having elasticity as a base material. The first movable part is formed so as to be capable of reciprocating rotation with the first support piece part linked to the support frame as a support shaft, and the second movable part is a second support piece linked to the first movable part. By providing the part as a support shaft so as to be reciprocally rotatable, a vibration actuator for an optical scanner having a flat plate structure is obtained.
Further, a permanent magnet is attached to the base material constituting the first movable part, and a coil and a yoke of the drive part are attached to the support frame, thereby constituting an electromagnetic vibration actuator capable of high-speed vibration maintaining a flat plate structure. be able to.

本発明によれば、第１の可動部を小振幅に抑えて、かつ第２の可動部を大振幅で高速振動させることができ、磁気減衰を効果的に抑制した、小電力で高速動作を可能にする電磁振動アクチュエータを提供することができる。   According to the present invention, the first movable part can be suppressed to a small amplitude, and the second movable part can be vibrated at a high speed with a large amplitude. An electromagnetic vibration actuator can be provided.

電磁振動アクチュエータの基本構造を示す図である。It is a figure which shows the basic structure of an electromagnetic vibration actuator. 第１の可動部と第２の可動部の振幅−周波数特性を示すグラフである。It is a graph which shows the amplitude-frequency characteristic of a 1st movable part and a 2nd movable part. 電磁振動アクチュエータの設計例を示す図である。It is a figure which shows the example of a design of an electromagnetic vibration actuator. 板バネの平面図である。It is a top view of a leaf | plate spring. 光スキャナ用振動アクチュエータの従来の構成を示す図である。It is a figure which shows the conventional structure of the vibration actuator for optical scanners. 光スキャナ用振動アクチュエータの平面図である。It is a top view of the vibration actuator for optical scanners. 図６におけるＡ-Ａ線断面図である。It is the sectional view on the AA line in FIG. 図６に示す光スキャナ用振動アクチュエータの試作例について、第１の可動部と第２の可動部の振幅−周波数特性を測定した結果を示すグラフである。7 is a graph showing a result of measuring amplitude-frequency characteristics of a first movable part and a second movable part for a prototype example of the vibration actuator for an optical scanner shown in FIG. 6. 電磁式リニア振動アクチュエータの基本構造を示す図である。It is a figure which shows the basic structure of an electromagnetic linear vibration actuator. 磁気減衰がある場合と無い場合の振幅−周波数特性を示すグラフである。It is a graph which shows the amplitude-frequency characteristic with and without magnetic attenuation.

（電磁振動アクチュエータの基本構造）
図１は、デュアル共振系を備える電磁リニア振動アクチュエータの基本構造を示す。図１に示す電磁振動アクチュエータは、第１のバネ１０を介して固定支持部に連繋して支持される第１の可動部２０と、第２のバネ１２を介して第１の可動部２０に連繋支持される第２の可動部２２と、第１の可動部２０を往復駆動する駆動部３０とを備える。
駆動部３０は、第１の可動部２０との電磁作用により第１の可動部２０を往復駆動（振動駆動、リニア駆動）するものであり、駆動部３０はコイル３１とヨーク３２とを備え、第１の駆動部２０はコイル３１に対向する位置に永久磁石２１を備える。 (Basic structure of electromagnetic vibration actuator)
FIG. 1 shows a basic structure of an electromagnetic linear vibration actuator having a dual resonance system. The electromagnetic vibration actuator shown in FIG. 1 includes a first movable part 20 supported by being linked to a fixed support part via a first spring 10 and a first movable part 20 via a second spring 12. A second movable portion 22 that is connected and supported, and a drive portion 30 that reciprocates the first movable portion 20 are provided.
The drive unit 30 drives the first movable unit 20 to reciprocate (vibration drive, linear drive) by electromagnetic action with the first movable unit 20, and the drive unit 30 includes a coil 31 and a yoke 32. The first drive unit 20 includes a permanent magnet 21 at a position facing the coil 31.

図１に示す実施形態の駆動部３０は、リング状のコイル３１の外周にヨーク３２を配し、コイル３１の内側領域にエアギャップを設けて第１の可動部２０を配している。永久磁石２１は第１の可動部２０の外側面に固定し、永久磁石２１とコイル３１とが対向する配置となる。なお、駆動部３０と第１の可動部２０の平面形状及び寸法、第１の可動部２０に設ける永久磁石２１の平面配置、配置数等は適宜設定することができる。図１に示す実施形態では、駆動部３０の平面形状を円環状とし、第１の可動部２０の平面形状を円形とし、円弧状に形成した一対の永久磁石２１、２１を第１の可動部２０に埋設している。
なお、第１のバネ１０の一端側と駆動部３０は、アクチュエータを収容するケースあるいは機枠等の固定支持部に固定する。 In the drive unit 30 of the embodiment shown in FIG. 1, a yoke 32 is disposed on the outer periphery of a ring-shaped coil 31, and an air gap is provided in an inner region of the coil 31 to dispose the first movable unit 20. The permanent magnet 21 is fixed to the outer surface of the first movable part 20, and the permanent magnet 21 and the coil 31 are arranged to face each other. The planar shape and dimensions of the drive unit 30 and the first movable unit 20, the planar arrangement of the permanent magnets 21 provided in the first movable unit 20, the number of arrangements, and the like can be set as appropriate. In the embodiment shown in FIG. 1, a pair of permanent magnets 21, 21 formed in an arc shape with a planar shape of the drive unit 30 being an annular shape, a planar shape of the first movable unit 20 being a circular shape, 20 is buried.
Note that the one end side of the first spring 10 and the drive unit 30 are fixed to a fixed support portion such as a case housing the actuator or a machine frame.

図１に示すように、第１のバネ１０のばね定数をK1、可動部の減衰定数をC1とし、第２のバネ１２のばね定数をK2、可動部の減衰定数をC2とする。ばね定数K1、K2は共振周波数に関わり、減衰定数C1、C2は振動時の振幅に関わる。なお、減衰定数C1については、機械ばねの減衰成分以外に、永久磁石とヨークに磁気減衰が発生するため、C1＞C2となる。
本実施形態においては、第１の可動部２０と第２の可動部２２は、第１のバネ１０と第２のバネ１２を介して空間的に直列に連結されている。第１の可動部２０と第２の可動部２２は直列に配置する他に、空間的に並列に配置する構成とすることも可能であり、図１に示す配置に限定されるものではない。 As shown in FIG. 1, the spring constant of the first spring 10 is K 1 , the damping constant of the movable part is C 1 , the spring constant of the second spring 12 is K 2 , and the damping constant of the movable part is C 2 . To do. The spring constants K 1 and K 2 are related to the resonance frequency, and the damping constants C 1 and C 2 are related to the amplitude during vibration. The damping constant C 1 is C 1 > C 2 because magnetic damping occurs in the permanent magnet and the yoke in addition to the damping component of the mechanical spring.
In the present embodiment, the first movable portion 20 and the second movable portion 22 are spatially connected in series via the first spring 10 and the second spring 12. The first movable unit 20 and the second movable unit 22 can be arranged in parallel in addition to being arranged in series, and are not limited to the arrangement shown in FIG.

図１に示す電磁振動アクチュエータは、第２のバネ１２を介して第１の可動部２０と第２の可動部２２が相互に連繋した構成を備える。したがって、駆動部３０のコイル３１に交流電流を流すと、駆動部３０と第１の可動部２０との間で生じる電磁力の作用により第１の可動部２０が振動駆動され、この第１の可動部２０の振動が第２のバネ１２を介して第２の可動部２２に伝達されて第２の可動部２２が振動駆動される。   The electromagnetic vibration actuator shown in FIG. 1 has a configuration in which a first movable part 20 and a second movable part 22 are connected to each other via a second spring 12. Therefore, when an alternating current is passed through the coil 31 of the drive unit 30, the first movable unit 20 is driven to vibrate by the action of electromagnetic force generated between the drive unit 30 and the first movable unit 20. The vibration of the movable part 20 is transmitted to the second movable part 22 via the second spring 12, and the second movable part 22 is driven to vibrate.

この構成によれば、駆動部３０によって第１の可動部２０を振動駆動する周波数（駆動周波数）を、第２の可動部２２の共振周波数f2に設定すれば、機械的な共振により第２の可動部２２を大振幅で振動駆動することができる。この場合に、第１の可動部２０の共振周波数f1が、第２の可動部２２の共振周波数f2と大きく隔たっていれば、第１の可動部２０は共振せず、第１の可動部２０は小さい振幅で振動することになる。すなわち、第１の可動部２０の共振周波数f1を、第２の可動部２２の共振周波数f2から大きく隔たった周波数に設定しておけば、第１の可動部２０を小さい振幅で振動させ、かつ第２の可動部２２を大振幅で振動させることができる。 According to this configuration, if the frequency (driving frequency) for driving the first movable unit 20 to be vibrated by the drive unit 30 is set to the resonance frequency f 2 of the second movable unit 22, the second is caused by mechanical resonance. The movable portion 22 can be driven to vibrate with a large amplitude. In this case, if the resonance frequency f 1 of the first movable part 20 is largely separated from the resonance frequency f 2 of the second movable part 22, the first movable part 20 does not resonate and the first movable part 20 does not resonate. The part 20 vibrates with a small amplitude. That is, if the resonance frequency f 1 of the first movable part 20 is set to a frequency largely separated from the resonance frequency f 2 of the second movable part 22, the first movable part 20 is vibrated with a small amplitude. And the 2nd movable part 22 can be vibrated with a large amplitude.

図２に、第１の可動部２０と第２の可動部２２の振幅−周波数特性を例示する。この振幅−周波数特性は、第１の可動部２０の共振周波数f1が第２の可動部２２の共振周波数f2よりも小さく、共振周波数f1と共振周波数f2が隔たった周波数となるように、第１のバネ１０及び第２のバネ１２のばね定数や減衰定数、第１の可動部２０及び第２の可動部２２の質量を設定した場合である。
第１の可動部２０と第２の可動部２２の振幅−周波数特性を図２に示すような設定条件とすれば、上述したように、駆動部３０の駆動周波数を第２の可動部２２の共振周波数f2に一致させることで、第１の可動部２０をきわめて小さな振幅で振動させながら、第２の可動部２２を共振周波数f2で共振させることができる。共振周波数f2における第１の可動部２０の振幅は、共振周波数f1の曲線が裾を引いた位置に相当し、十分に小さくなることがわかる。 FIG. 2 illustrates the amplitude-frequency characteristics of the first movable part 20 and the second movable part 22. This amplitude-frequency characteristic is such that the resonance frequency f 1 of the first movable part 20 is smaller than the resonance frequency f 2 of the second movable part 22 and the resonance frequency f 1 is separated from the resonance frequency f 2. In addition, the spring constants and damping constants of the first spring 10 and the second spring 12 and the masses of the first movable part 20 and the second movable part 22 are set.
If the amplitude-frequency characteristics of the first movable part 20 and the second movable part 22 are set as shown in FIG. 2, the drive frequency of the drive part 30 is set to the second movable part 22 as described above. By matching the resonance frequency f 2 , the second movable portion 22 can resonate at the resonance frequency f 2 while vibrating the first movable portion 20 with an extremely small amplitude. It can be seen that the amplitude of the first movable portion 20 at the resonance frequency f 2 corresponds to a position where the curve of the resonance frequency f 1 has a trailing edge, and is sufficiently small.

共振周波数f2における第２の可動部２２の振幅と、第１の可動部２０の振幅は、減衰定数C1とC2の比に依存する。駆動時における第１の可動部２０と第２の可動部２２の振幅の比をどの程度とするかは、用途に応じて、適宜設定すればよいが、第１の可動部２０の振幅を第２の可動部２２の振幅の1/50程度とすれば、顕著な作用効果が得られる。可動部の振幅は減衰定数C1とC2に関わるから、この条件を減衰定数で表すと、C1がC2の10倍程度以上、となる。 The amplitude of the second movable part 22 and the amplitude of the first movable part 20 at the resonance frequency f 2 depend on the ratio of the damping constants C 1 and C 2 . The ratio of the amplitude of the first movable unit 20 and the second movable unit 22 at the time of driving may be set as appropriate according to the application, but the amplitude of the first movable unit 20 If the amplitude of the second movable portion 22 is about 1/50, a remarkable effect can be obtained. Since the amplitude of the movable part is related to the damping constants C 1 and C 2 , when this condition is expressed by the damping constant, C 1 is about 10 times or more of C 2 .

図２に示すグラフは、共振周波数f2における第２の可動部２２の振幅と、共振周波数f1における第１の可動部２０の振幅を比較すると、共振周波数f2における第２の可動部２２の振幅が、共振周波数f1における第１の可動部２０の振幅を大きく上回ることを示している。これは、第１の可動部２０が共振周波数f1において共振するときには、第１の可動部２０の振幅が必然的に大きくなり、従来技術における課題である磁気減衰によって振幅を抑制する作用が避けられないのに対して、第２の可動部２２の動作には磁気減衰による影響が排除されていることによる。 The graph shown in FIG. 2, the amplitude of the second movable portion 22 at the resonance frequency f 2, when comparing the amplitude of the first movable portion 20 at the resonance frequency f 1, the second movable portion 22 at the resonance frequency f 2 Is significantly higher than the amplitude of the first movable part 20 at the resonance frequency f 1 . This is because when the first movable part 20 resonates at the resonance frequency f 1 , the amplitude of the first movable part 20 inevitably increases, and the effect of suppressing the amplitude by magnetic attenuation, which is a problem in the prior art, is avoided. In contrast, the operation of the second movable portion 22 is excluded from the influence of magnetic attenuation.

本実施形態の電磁振動アクチュエータによれば、第１の可動部２０については小振幅で振動駆動することにより、磁気減衰の影響を抑えて効率的に振動駆動することができ、第２の可動部２２については、磁気減衰の影響を排除することにより、大振幅の高速振動を可能にすることができる。第２の可動部２２を出力側とすることにより、本発明に係る電磁振動アクチュエータによれば、従来の電磁振動アクチュエータにおいては、100Hz程度が工業的に利用できる上限であった振動周波数を、数100Hz〜数ｋHzまで拡大することができ、大振幅の高速振動と、効率的な駆動が可能な電磁振動アクチュエータとして提供することができる。   According to the electromagnetic vibration actuator of the present embodiment, the first movable portion 20 can be driven to vibrate efficiently while suppressing the influence of magnetic attenuation by being driven to vibrate with a small amplitude. For No. 22, it is possible to enable high-speed vibration with a large amplitude by eliminating the influence of magnetic damping. By setting the second movable portion 22 to the output side, according to the electromagnetic vibration actuator according to the present invention, in the conventional electromagnetic vibration actuator, the vibration frequency that is about 100 Hz is the upper limit that can be industrially used. It can be expanded to 100 Hz to several kHz, and can be provided as an electromagnetic vibration actuator capable of high-speed vibration with large amplitude and efficient driving.

（電磁振動アクチュエータの他の構成例）
図３は、本発明に係る電磁振動アクチュエータの他の構成例を示す。
図３に示す電磁振動アクチュエータは、ブロック状に形成した２つの可動部２０ａ、２０ｂの上面と下面とにそれぞれ板バネ１４を掛け渡すように固定して、可動部２０ａ、２０ｂを一体化して第１の可動部２０とし、板バネ１４に第２の可動部２２を取り付けた構成としたものである。
第２の可動部２２は、２つの可動部２０ａ、２０ｂに掛け渡した板バネ１４の中央に、第１の可動部２０の振動方向を長手方向とし、上端と下端とを板バネ１４からそれぞれ突出させた配置として取り付けられている。 (Other structural examples of electromagnetic vibration actuator)
FIG. 3 shows another configuration example of the electromagnetic vibration actuator according to the present invention.
The electromagnetic vibration actuator shown in FIG. 3 is fixed in such a manner that the leaf springs 14 are stretched over the upper and lower surfaces of two movable parts 20a and 20b formed in a block shape, and the movable parts 20a and 20b are integrated. The movable portion 20 is a single movable portion 20, and the second movable portion 22 is attached to the leaf spring 14.
The second movable part 22 has a longitudinal direction in the vibration direction of the first movable part 20 at the center of the leaf spring 14 spanned between the two movable parts 20a and 20b, and an upper end and a lower end from the leaf spring 14, respectively. It is attached as a protruding arrangement.

２つの可動部２０ａ、２０ｂに板バネ１４を掛け渡し、板バネ１４によって第２の可動部２２を支持する構成としている理由は、第１の可動部２０と第２の可動部２２を空間的に並列に配置し、可動部全体をコンパクトに構成するためである。２つの可動部２０ａ、２０ｂを板バネ１４により連結することにより、第２の可動部２２を収容する収容部（収容空間）を第１の可動部２０に形成することができ、第１の可動部２０と第２の可動部２２が並列に配置される。   The reason why the leaf spring 14 is spanned between the two movable portions 20a and 20b and the second movable portion 22 is supported by the leaf spring 14 is that the first movable portion 20 and the second movable portion 22 are spatially separated. This is because the entire movable part is configured in a compact manner. By connecting the two movable parts 20a and 20b by the leaf spring 14, a housing part (housing space) for housing the second movable part 22 can be formed in the first movable part 20, and the first movable part The part 20 and the second movable part 22 are arranged in parallel.

図４に板バネ１４の構成例を示す。この板バネ１４は、第２の可動部２２を支持するためのリング状の係止部１４ａと、係止部１４ａに一体に連結された取り付け部１４ｂ、１４ｂとからなる。取り付け部１４ｂ、１４ｂは平面形状がＤ字形に形成され、係止部１４ａを挟んで、対称配置に設けられている。実施形態の板バネ１４に透孔を設けているのは、所要の弾性を確保するためであるが、板バネ１４の形状が限定されるものではない。
取付け部１４ｂ、１４ｂの端片部分が可動部２０ａ、２０ｂへの取り付け部である。第２の可動部２２は、板バネ１４とが交差する部位で第２の可動部２２の外周側面と板バネ１４とを係止させて固定する。 FIG. 4 shows a configuration example of the leaf spring 14. The leaf spring 14 includes a ring-shaped locking portion 14a for supporting the second movable portion 22, and mounting portions 14b and 14b integrally connected to the locking portion 14a. The mounting portions 14b and 14b are formed in a D-shape in plan view, and are provided in a symmetrical arrangement with the locking portion 14a interposed therebetween. The reason why the plate spring 14 of the embodiment is provided with a through hole is to ensure required elasticity, but the shape of the plate spring 14 is not limited.
The end pieces of the attachment portions 14b and 14b are attachment portions to the movable portions 20a and 20b. The second movable portion 22 engages and fixes the outer peripheral side surface of the second movable portion 22 and the leaf spring 14 at a portion where the leaf spring 14 intersects.

可動部２０ａ、２０ｂはそれぞれバネ１０ａ、１０ｂを介して、ケースあるいは機枠等の支持体に支持する。本実施形態においては、２つのバネ１０ａ、１０ｂが図１に示した第１のバネ１０に相当する。
駆動部３０は、第１の可動部２０に取り付けた永久磁石２１に対向してコイル３１を配置し、アクチュエータのケースあるいは機枠に固定する。コイル３１に交流電流を流すことにより、第１の可動部２０が振動駆動され、第２のバネ１２に相当する板バネ１４を介して、第１の可動部２０の振動が第２の可動部２２に伝達され、第２の可動部２２が振動駆動される。 The movable parts 20a and 20b are supported by a support such as a case or a machine frame via springs 10a and 10b, respectively. In the present embodiment, the two springs 10a and 10b correspond to the first spring 10 shown in FIG.
The drive unit 30 is arranged with a coil 31 facing the permanent magnet 21 attached to the first movable unit 20 and fixed to the actuator case or machine frame. By passing an alternating current through the coil 31, the first movable part 20 is driven to vibrate, and the vibration of the first movable part 20 is transmitted through the leaf spring 14 corresponding to the second spring 12 to the second movable part. The second movable portion 22 is driven to vibrate.

本実施形態の電磁振動アクチュエータにおいても、図１に示した電磁振動アクチュエータと同様に、駆動部３０の駆動周波数を第２の可動部２２の共振周波数f2に設定する一方、可動部２０ａ、２０ｂからなる第１の可動部２０の共振周波数f1を第２の可動部２２の共振周波数f2から大きく隔たった周波数に設定することにより、第１の可動部２０については小振幅で振動させ、磁気減衰を十分に小さく抑えながら、第２の可動部２２を大振幅で、高速振動させることができる。 Also in the electromagnetic vibration actuator of the present embodiment, the drive frequency of the drive unit 30 is set to the resonance frequency f 2 of the second movable unit 22 as in the electromagnetic vibration actuator shown in FIG. by setting the first large spaced frequency from the resonance frequency f 2 of the resonance frequency f 1 of the movable portion 20 and the second movable portion 22 made of, it is vibrated with a small amplitude for the first movable portion 20, The second movable part 22 can be vibrated at a high speed with a large amplitude while suppressing the magnetic attenuation sufficiently small.

本実施形態の電磁振動アクチュエータでは、第１の可動部２０と第２の可動部２２とを空間的に並列配置にするため、第１の可動部２０に第２の可動部２２を収容する収容部（収容空間）を設けている。第２の可動部２２を可動に収容する収容部を設ける方法としては、図２に示した例に限らず、３個以上のブロック状に形成した可動部をバネで連結して第１の可動部２０に収容空間を設ける方法、第１の可動部をリング状として振動方向に貫通する収容空間を設ける方法、第１の可動部２０を厚い円板状として円板の内部に収容空間を設ける方法等が可能である。
本実施形態の電磁振動アクチュエータによれば、アクチュエータ全体を小型化することができ、各種装置に容易に組み込んで使用することが可能である。 In the electromagnetic vibration actuator of the present embodiment, the first movable part 20 and the second movable part 22 are accommodated in the first movable part 20 in order to spatially arrange the first movable part 20 and the second movable part 22 in parallel. A part (accommodating space) is provided. The method of providing the accommodating portion that movably accommodates the second movable portion 22 is not limited to the example shown in FIG. 2, and the first movable portion is formed by connecting three or more movable portions formed in a block shape with a spring. A method of providing an accommodation space in the portion 20, a method of providing an accommodation space penetrating in the vibration direction with the first movable portion as a ring shape, and providing an accommodation space inside the disc with the first movable portion 20 as a thick disc shape A method etc. are possible.
According to the electromagnetic vibration actuator of this embodiment, the entire actuator can be reduced in size, and can be easily incorporated into various devices.

（光スキャナ用振動アクチュエータへの応用）
上述した電磁振動アクチュエータを光スキャナ用振動アクチュエータに利用する例について説明する。
光スキャナ用振動アクチュエータはレーザーディスプレイやレーザ式バーコードリーダなどのレーザ光源を走査する装置に利用されている。
図５は、光スキャナ用振動アクチュエータの従来の構成例である（特許文献２）。この光スキャナ用振動アクチュエータは、可動部４０として、ミラー４１、ねじりバネ４２、永久磁石４３を備え、可動部４０を駆動する駆動部５０としてコイル５１とヨーク５２とを備える。
可動部４０はねじりバネ４２を回転支持軸として、平面内において往復回転するように構成され、可動部４０のコイル５１に交流パルス電流を通電させることにより、永久磁石４３に作用する電磁力と、ねじりバネ４２のねじりにより生じる弾性力（復元力）とのバランスにより、ミラー４１が所定の角度範囲にわたり往復回転駆動（振動駆動）される。 (Application to vibration actuators for optical scanners)
An example in which the above-described electromagnetic vibration actuator is used as a vibration actuator for an optical scanner will be described.
A vibration actuator for an optical scanner is used in a device that scans a laser light source such as a laser display or a laser bar code reader.
FIG. 5 shows a conventional configuration example of a vibration actuator for an optical scanner (Patent Document 2). This vibration actuator for an optical scanner includes a mirror 41, a torsion spring 42, and a permanent magnet 43 as a movable part 40, and a coil 51 and a yoke 52 as a drive part 50 that drives the movable part 40.
The movable portion 40 is configured to reciprocate in a plane with the torsion spring 42 as a rotation support shaft, and by applying an AC pulse current to the coil 51 of the movable portion 40, an electromagnetic force acting on the permanent magnet 43, and Due to the balance with the elastic force (restoring force) generated by the torsion of the torsion spring 42, the mirror 41 is reciprocally rotated (vibrated) over a predetermined angular range.

レーザーディスプレイや高速バーコードリーダなどの光スキャナでは、周波数3ｋHz以上で、50度以上の走査角度が必要である。図５に示した振動アクチュエータでは、ミラー４１と永久磁石４３が可動部４０にあるため、ミラー４１の回転角度が大きくなると、永久磁石４３の振幅も大きくなる。そのため、永久磁石４３とヨーク５２との間に渦電流に起因する磁気減衰が発生し、この磁気減衰の作用は振動周波数が増大するとともに顕著となり、3kHz以上の高周波数での駆動は、消費電力が極めて増加するため、駆動が困難となる。永久磁石とヨークに生じる渦電流の作用による磁気減衰の作用は、図１０に示した磁気減衰の作用と同一である。   Optical scanners such as laser displays and high-speed barcode readers require a scanning angle of 50 degrees or more at a frequency of 3 kHz or more. In the vibration actuator shown in FIG. 5, since the mirror 41 and the permanent magnet 43 are in the movable part 40, the amplitude of the permanent magnet 43 increases as the rotation angle of the mirror 41 increases. Therefore, magnetic damping caused by eddy current occurs between the permanent magnet 43 and the yoke 52, and the effect of this magnetic damping becomes remarkable as the vibration frequency increases, and driving at a high frequency of 3 kHz or more is power consumption. Is extremely increased, and driving becomes difficult. The action of magnetic damping by the action of eddy currents generated in the permanent magnet and the yoke is the same as the action of magnetic damping shown in FIG.

図６、７は、3kHz以上の高周波数での駆動を可能にする光スキャナ用振動アクチュエータの構成例を示す。図６は光スキャナ用振動アクチュエータの平面図、図７は図６におけるＡ-Ａ線断面図である。
本実施形態の光スキャナ用振動アクチュエータは、図１に示した電磁振動アクチュエータと同様の構成を備え、バネを介して相互に連繋支持された第１の可動部２０及び第２の可動部２２と、第１の可動部２０を介して第２の可動部２２を振動駆動する駆動部３０を備える。 6 and 7 show a configuration example of a vibration actuator for an optical scanner that can be driven at a high frequency of 3 kHz or more. 6 is a plan view of the vibration actuator for an optical scanner, and FIG. 7 is a cross-sectional view taken along line AA in FIG.
The vibration actuator for an optical scanner of the present embodiment has the same configuration as the electromagnetic vibration actuator shown in FIG. 1, and includes a first movable portion 20 and a second movable portion 22 that are connected and supported via a spring. A drive unit 30 that vibrates and drives the second movable unit 22 via the first movable unit 20 is provided.

駆動部３０は、平面形状が矩形枠状に形成された支持枠１５と、支持枠１５の内周に沿って巻回して設けたコイル３１と、支持枠１５の対向する２つの枠部１５ａ、１５ｂ上にそれぞれ固定したヨーク３２、３２からなる。駆動部３０は、支持枠１５をアクチュエータのケースあるいは機枠等の固定支持部に取り付けることにより固定される。   The drive unit 30 includes a support frame 15 whose planar shape is formed in a rectangular frame shape, a coil 31 that is wound around the inner periphery of the support frame 15, two frame portions 15 a that the support frame 15 faces, It consists of yokes 32 and 32 respectively fixed on 15b. The drive unit 30 is fixed by attaching the support frame 15 to a fixed support unit such as an actuator case or a machine frame.

駆動部３０により振動駆動される第１の可動部２０は、支持枠１５によって囲まれた内側領域に配置された平面形状がリング状の環状支持片部１６と、環状支持片部１６上でヨーク３２、３２と対向する位置に取り付けられた永久磁石２１、２１からなる。
環状支持片部１６は、支持枠１５のヨーク３２、３２が取り付けられていない側の対向する２つの枠部１５ｃ、１５ｄから延出する２つの第１の支持片部１７ａ、１７ｂを介して支持される。第１の支持片部１７ａ、１７ｂは所要の弾性を備えるように設計され、環状支持片部１６自体が備える弾性と合わせて、第１の可動部２０は支持枠１５に弾性的に支持される。この場合、支持枠１５は駆動部３０と第１の可動部２０の共通の固定支持部となっている。 The first movable unit 20 that is driven to vibrate by the drive unit 30 includes an annular support piece 16 having a ring shape in a planar shape disposed in an inner region surrounded by the support frame 15, and a yoke on the annular support piece 16. It consists of permanent magnets 21 and 21 attached at positions facing 32 and 32.
The annular support piece 16 is supported via two first support pieces 17a and 17b extending from two opposing frame portions 15c and 15d on the side of the support frame 15 where the yokes 32 and 32 are not attached. Is done. The first support piece portions 17a and 17b are designed to have required elasticity, and the first movable portion 20 is elastically supported by the support frame 15 together with the elasticity of the annular support piece portion 16 itself. . In this case, the support frame 15 serves as a common fixed support portion for the drive portion 30 and the first movable portion 20.

第２の可動部２２は、環状支持片部１６のさらに内側領域に配置された円形のミラー部１８である。ミラー部１８は、環状支持片部１６から延出する第２の支持片部１９ａ、１９ｂを介して連結されている。
第２の支持片部１９ａ、１９ｂも弾性を備えるように設計され、ミラー部１８は第２の支持片部１９ａ、１９ｂを介して弾性的に可動に支持される。第２の支持片部１９ａ、１９ｂは、図１における第２のバネ１２に相当する。
ミラー部１８は、レーザ光を反射する作用をなす部位である。ミラー部１８は、基材表面にめっき等を施して鏡面とすることができ、別部材のミラーを基材上に装着してミラー部１８とすることもできる。 The second movable portion 22 is a circular mirror portion 18 disposed in a further inner region of the annular support piece portion 16. The mirror portion 18 is connected via second support piece portions 19 a and 19 b extending from the annular support piece portion 16.
The second support piece portions 19a and 19b are also designed to have elasticity, and the mirror portion 18 is supported elastically and movably through the second support piece portions 19a and 19b. The second support piece portions 19a and 19b correspond to the second spring 12 in FIG.
The mirror unit 18 is a part that functions to reflect laser light. The mirror part 18 can be made into a mirror surface by plating or the like on the surface of the base material, and the mirror part 18 can also be mounted by mounting another mirror on the base material.

ステンレス等の平板状の素材に機械加工あるいは化学的加工（エッチング加工）を施して、支持枠１５、環状支持片部１６、第１の支持片部１７ａ、１７ｂ、第２の支持片部１９ａ、１９ｂ、ミラー部１８の各部を形成することができる。また、基材の所要位置にコイル３１、ヨーク３２、永久磁石２１を配置して、第１の可動部２０、第２の可動部２２、駆動部３０を構成することにより、全体を平面構造体として形成することができる。
第１の支持片部１７ａ、１７ｂ、及び第２の支持片部１９ａ、１９ｂは、第１の可動部２０（環状支持片部１６、永久磁石２１）と第２の可動部２２（ミラー部１８）を弾性的に支持するバネの機能を付与したものであり、ねじりバネとして作用する。これらのバネ性を備える支持片部は基材の材質や厚さによって、ばね定数等が適宜設定される。 A plate-like material such as stainless steel is subjected to machining or chemical processing (etching), and the support frame 15, the annular support piece 16, the first support pieces 17a and 17b, the second support piece 19a, 19b, each part of the mirror part 18 can be formed. Further, by arranging the coil 31, the yoke 32, and the permanent magnet 21 at a required position of the base material to constitute the first movable portion 20, the second movable portion 22, and the drive portion 30, the whole is a planar structure. Can be formed as
The first support piece portions 17a and 17b and the second support piece portions 19a and 19b include a first movable portion 20 (annular support piece portion 16 and permanent magnet 21) and a second movable portion 22 (mirror portion 18). ) Is elastically supported, and acts as a torsion spring. The spring constant or the like of the support piece portion having the spring property is appropriately set depending on the material and thickness of the base material.

なお、第１の支持片部１７ａ、１７ｂと、第２の支持片部１９ａ、１９ｂは、２つの枠部１５ｃ、１５ｄのそれぞれの中点位置を結ぶ一直線上に、それぞれの長手方向を一致させて配置する。このように、第１の支持片部１７ａ、１７ｂと第２の支持片部１９ａ、１９ｂを直列に配置したことにより、環状支持片部１６とミラー部１８は、第１の支持片部１７ａ、１７ｂと第２の支持片部１９ａ、１９ｂが支持軸となって振動駆動される。すなわち、第１の支持片部１７ａ、１７ｂと第２の支持片部１９ａ、１９ｂは、振動駆動時にねじりバネとして作用し、駆動部３０により可動部に電磁力が作用した際に、ねじりバネの釣合位置まで第１の可動部２０と第２の可動部２２が回転する。   The first support piece portions 17a and 17b and the second support piece portions 19a and 19b have their longitudinal directions aligned with each other on a straight line connecting the midpoint positions of the two frame portions 15c and 15d. Arrange. Thus, by arranging the first support piece portions 17a, 17b and the second support piece portions 19a, 19b in series, the annular support piece portion 16 and the mirror portion 18 are connected to the first support piece portion 17a, 17b and the second support piece portions 19a and 19b serve as a support shaft and are driven to vibrate. That is, the first support piece portions 17a and 17b and the second support piece portions 19a and 19b act as torsion springs during vibration driving, and when the electromagnetic force acts on the movable part by the drive unit 30, the torsion springs The first movable part 20 and the second movable part 22 rotate to the balanced position.

図７は、駆動部３０のコイル３１に交流パルス電流を作用させることにより、第１の可動部２０の永久磁石３１に電磁力が作用し、第１の可動部２０が第１のバネ１０に相当する第１の支持片部１７ａ、１７ｂを支持軸として往復回転し、第２の可動部２２であるミラー部１８が、第２のバネ１２に相当する第２の支持片部１９ａ、１９ｂを支持軸として往復回転することを示している。   In FIG. 7, by applying an AC pulse current to the coil 31 of the drive unit 30, an electromagnetic force acts on the permanent magnet 31 of the first movable unit 20, and the first movable unit 20 acts on the first spring 10. The first support piece portions 17 a and 17 b corresponding to each other are rotated back and forth, and the mirror portion 18 as the second movable portion 22 moves the second support piece portions 19 a and 19 b corresponding to the second spring 12. It shows reciprocating rotation as a support shaft.

図６、７に示す光スキャナ用振動アクチュエータの基本的な構造は、図１に示した電磁振動アクチュエータの構成とまったく同様である。すなわち、図６、７に示す電磁振動アクチュエータを使用すれば、第２の可動部２２に相当するミラー部１８は、磁気減衰の作用をまったく受けることなく往復回転（振動）することができる。この光スキャナ用振動アクチュエータによれば、図５に示した従来の光スキャナ用振動アクチュエータとくらべて、はるかに高速の往復回転（振動）と、大振幅の往復回転が可能になる。   The basic structure of the vibration actuator for an optical scanner shown in FIGS. 6 and 7 is exactly the same as that of the electromagnetic vibration actuator shown in FIG. That is, if the electromagnetic vibration actuator shown in FIGS. 6 and 7 is used, the mirror portion 18 corresponding to the second movable portion 22 can reciprocate (vibrate) without receiving any magnetic damping action. According to the vibration actuator for an optical scanner, a much faster reciprocating rotation (vibration) and a large amplitude reciprocating rotation are possible as compared with the conventional optical scanner vibrating actuator shown in FIG.

図８は、図６に示す構成を備える光スキャナ用振動アクチュエータを試作し、駆動周波数に対する走査角振幅について測定した例を示す。走査角振幅θ1は、第１の可動部２０が振動するときの振幅、走査角振幅θ2は第２の可動部２２（ミラー部１８）が振動するときの振幅に相当する。第２の可動部２２の共振周波数f02＝4634Hzでは、θ1＝0.04度、θ2＝2.2度となり、振幅の比は55倍となった。すなわち、第２の可動部２２の共振周波数において、第１の可動部２０はきわめて小振幅で駆動されることが確認できた。 FIG. 8 shows an example in which an optical scanner vibration actuator having the configuration shown in FIG. 6 is prototyped and the scan angle amplitude with respect to the drive frequency is measured. The scanning angle amplitude θ 1 corresponds to the amplitude when the first movable part 20 vibrates, and the scanning angle amplitude θ 2 corresponds to the amplitude when the second movable part 22 (mirror part 18) vibrates. At the resonance frequency f 02 = 4634 Hz of the second movable part 22, θ 1 = 0.04 degrees and θ 2 = 2.2 degrees, and the amplitude ratio was 55 times. That is, it was confirmed that the first movable portion 20 was driven with a very small amplitude at the resonance frequency of the second movable portion 22.

上述した説明においては、説明上、第１の支持片部１７ａ、１７ｂが図１の電磁振動アクチュエータの第１のバネ１０に相当し、第２の支持片部１９ａ、１９ｂが第２のバネ１２に相当するとしたが、第１の支持片部１７ａ、１７ｂ、環状支持片部１６、第２の支持片部１９ａ、１９ｂ、ミラー部１８は相互に弾性的に連結され、各部位自体も弾性を有している。したがって、図１の電磁振動アクチュエータにおける第１のバネ１０に相当する部位と第２のバネ１２に相当する部位を、支持片部の部位ごとに分離して規定することは実際には正確でない。
しかしながら、本実施形態の光スキャナ用振動アクチュエータが、図１に示した電磁振動アクチュエータと同様に、弾性的に連繋して支持された第１の可動部２０と、弾性的に相互に連繋して支持された第１の可動部２０と第２の可動部２２とを備えることは明らかであり、本実施形態の光スキャナ用振動アクチュエータは、図１に示した電磁振動アクチュエータと同様の作用をなす。 In the above description, the first support piece portions 17 a and 17 b correspond to the first spring 10 of the electromagnetic vibration actuator of FIG. 1 and the second support piece portions 19 a and 19 b are the second spring 12. The first support piece portions 17a and 17b, the annular support piece portion 16, the second support piece portions 19a and 19b, and the mirror portion 18 are elastically connected to each other, and each portion itself is also elastic. Have. Accordingly, in practice, it is not accurate to separate and define the portion corresponding to the first spring 10 and the portion corresponding to the second spring 12 in the electromagnetic vibration actuator of FIG.
However, like the electromagnetic vibration actuator shown in FIG. 1, the vibration actuator for an optical scanner of the present embodiment is elastically connected to the first movable portion 20 supported in an elastic manner. It is clear that the first movable portion 20 and the second movable portion 22 that are supported are provided, and the vibration actuator for an optical scanner according to the present embodiment performs the same operation as the electromagnetic vibration actuator shown in FIG. .

本実施形態の光スキャナ用振動アクチュエータは、第１の支持片部１７ａ、１７ｂや第２の支持片部１９ａ、１９ｂ等の弾性を適宜設計することにより、振動周波数や回転角といった、光スキャナ用振動アクチュエータに求められる特性に応じて設計することが可能である。
また、本実施形態の光スキャナ用振動アクチュエータは、薄型の平板部材を使用して形成することにより、薄型でかつ小型のアクチュエータとして形成することができ、支持片部等の各部を任意の形状および寸法に形成することができるから、用途に応じた設計が容易に可能であり、量産も容易である等の種々の利点を有する。
また、本実施形態は、光スキャナ用振動アクチュエータとして構成した例であるが、本実施形態のアクチュエータは、光スキャナ用とする他に、大きな角度範囲での高速振動が求められるアクチュエータとして利用することが可能である。 The vibration actuator for an optical scanner of the present embodiment is designed for an optical scanner such as a vibration frequency and a rotation angle by appropriately designing the elasticity of the first support piece portions 17a and 17b and the second support piece portions 19a and 19b. It is possible to design according to the characteristics required for the vibration actuator.
Further, the vibration actuator for an optical scanner according to the present embodiment can be formed as a thin and small actuator by using a thin flat plate member, and each part such as a support piece can have any shape and shape. Since it can be formed into dimensions, it has various advantages such as easy design according to the application and easy mass production.
Although this embodiment is an example configured as a vibration actuator for an optical scanner, the actuator of this embodiment can be used as an actuator that requires high-speed vibration in a large angle range in addition to being used for an optical scanner. Is possible.

２ 駆動部
４ 可動部
１０ 第１のバネ
１２ 第２のバネ
１４ 板バネ
１４ａ 係止部
１４ｂ 取り付け部
１５ 支持枠
１５ａ、１５ｂ 枠部
１６ 環状支持片部
１７ａ、１７ｂ 第１の支持片部
１８ ミラー部
１９ａ、１９ｂ 第２の支持片部
２０ 第１の可動部
２０ａ、２０ｂ 可動部
２１ 永久磁石
２２ 第２の可動部
３１ コイル
３２ ヨーク
４０ 可動部
４１ ミラー
４２ ねじりバネ
５０ 駆動部
５２ ヨーク
2 Drive part 4 Movable part 10 1st spring 12 2nd spring 14 Leaf spring 14a Locking part 14b Attachment part 15 Support frame 15a, 15b Frame part 16 Annular support piece part 17a, 17b First support piece part 18 Mirror Part 19a, 19b Second support piece part 20 First movable part 20a, 20b Movable part 21 Permanent magnet 22 Second movable part 31 Coil 32 Yoke 40 Movable part 41 Mirror 42 Torsion spring 50 Drive part 52 Yoke

Claims (11)

第１のバネに連繋して支持される第１の可動部と、
第２のバネを介して前記第１の可動部に連繋して支持される第２の可動部と、
前記第１の可動部を往復駆動する駆動部とを備え、
前記第１の可動部及び第２の可動部、前記第１のバネ及び第２のバネは、前記第２の可動部の共振周波数f2が、前記第１の可動部の共振周波数f1を上回る条件に設定され、
前記駆動部は、前記第２の可動部の共振周波数f2を駆動周波数として、前記第１の可動部を駆動し、前記第２の可動部を出力側として用いることを特徴とする電磁振動アクチュエータ。 A first movable part supported in connection with the first spring;
A second movable part supported in connection with the first movable part via a second spring;
A drive unit that reciprocates the first movable unit;
The first movable part, the second movable part, the first spring, and the second spring have a resonance frequency f 2 of the second movable part that is equal to a resonance frequency f 1 of the first movable part. Set to exceed the conditions,
The drive unit drives the first movable unit by using the resonance frequency f2 of the second movable unit as a drive frequency, and uses the second movable unit as an output side. . 前記第１の可動部の減衰定数をC1、第２の可動部の減衰定数をC2とするとき、前記減衰定数C1を前記減衰定数C2よりも大とすることを特徴とする請求項１記載の電磁振動アクチュエータ。 The attenuation constant C 1 is set to be larger than the attenuation constant C 2 when the attenuation constant of the first movable part is C 1 and the attenuation constant of the second movable part is C 2. Item 2. The electromagnetic vibration actuator according to Item 1. 前記第１の可動部は永久磁石を備え、
前記駆動部は、前記永久磁石との間で電磁力を作用させるコイルとヨークとを備えることを特徴とする請求項１または２記載の電磁振動アクチュエータ。 The first movable part includes a permanent magnet;
3. The electromagnetic vibration actuator according to claim 1, wherein the driving unit includes a coil and a yoke for applying an electromagnetic force to the permanent magnet. 4. 前記第１の可動部と第２の可動部は、第１の可動部の振動方向に直列に配置されていることを特徴とする請求項１〜３のいずれか一項記載の電磁振動アクチュエータ。   The electromagnetic vibration actuator according to claim 1, wherein the first movable part and the second movable part are arranged in series in a vibration direction of the first movable part. 前記第２の可動部は、前記第１の可動部に設けられた収容部に収容され、
前記第１の可動部と第２の可動部は、第１の可動部の振動方向に並列に配置されていることを特徴とする請求項１〜３のいずれか一項記載の電磁振動アクチュエータ。 The second movable part is accommodated in an accommodating part provided in the first movable part,
The electromagnetic vibration actuator according to claim 1, wherein the first movable part and the second movable part are arranged in parallel in a vibration direction of the first movable part. 前記収容部は、前記第１の可動部を振動方向に貫通して設けられていることを特徴とする請求項５記載の電磁振動アクチュエータ。   6. The electromagnetic vibration actuator according to claim 5, wherein the housing portion is provided so as to penetrate the first movable portion in the vibration direction. 前記第１の可動部は、複数のブロックに分割して設けられた可動部を、前記第２のバネを介して一体的に連結して構成されていることを特徴とする請求項４〜６のいずれか一項記載の電磁振動アクチュエータ。   The said 1st movable part is comprised by integrally connecting the movable part provided by dividing | segmenting into a some block via the said 2nd spring. The electromagnetic vibration actuator according to any one of the above. 請求項１記載の電磁振動アクチュエータを利用した光スキャナ用振動アクチュエータであって、
前記第２の可動部が、光を反射するミラー部として構成され、
前記第２のバネが、バネを回転支持軸として前記ミラー部を往復回転するねじりバネとして構成されていることを特徴とする電磁振動アクチュエータ。 A vibration actuator for an optical scanner using the electromagnetic vibration actuator according to claim 1,
The second movable part is configured as a mirror part that reflects light,
2. The electromagnetic vibration actuator according to claim 1, wherein the second spring is configured as a torsion spring that reciprocally rotates the mirror portion using the spring as a rotation support shaft. 前記第１の可動部及び第２の可動部と、前記第１のバネ及び第２のバネと、前記駆動部を支持する支持枠とが、弾性を備える平板材料からなる平面構造体を基材として形成され、
前記第１の可動部は、前記支持枠に連繋する第１の支持片部を支持軸として往復回転可能に設けられ、
前記第２の可動部は前記第１の可動部に連繋する第２の支持片部を支持軸として往復回転可能に設けられていることを特徴とする請求項８記載の電磁振動アクチュエータ。 The first movable portion and the second movable portion, the first spring and the second spring, and the support frame that supports the drive portion are made of a planar structure made of a flat plate material having elasticity. Formed as
The first movable portion is provided to be reciprocally rotatable with a first support piece portion connected to the support frame as a support shaft,
9. The electromagnetic vibration actuator according to claim 8, wherein the second movable portion is provided so as to be capable of reciprocating rotation with a second support piece portion connected to the first movable portion as a support shaft. 前記第１の支持片部と前記第２の支持片部とが、一直線上に配置されていることを特徴とする請求項９記載の電磁振動アクチュエータ。   The electromagnetic vibration actuator according to claim 9, wherein the first support piece and the second support piece are arranged on a straight line. 前記第１の可動部を構成する基材に永久磁石が取り付けられ、
前記支持枠に前記駆動部のコイルとヨークとが取り付けられていることを特徴とする請求項１０記載の電磁振動アクチュエータ。

A permanent magnet is attached to the base material constituting the first movable part,
The electromagnetic vibration actuator according to claim 10, wherein a coil and a yoke of the driving unit are attached to the support frame.

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JPWO2020184439A1 (en) * 2019-03-14 2021-09-13 フォスター電機株式会社 Actuator and display equipped with it
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