JP2015137958A - Inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection device which is capable of achieving connection between the inspection device and a receptacle while suppressing breakage of the inspection device or the receptacle.SOLUTION: The inspection device includes: a probe including a center conductor extending in a prescribed direction and a cylindrical outer conductor surrounding the center conductor and extending in the prescribed direction; a holder which holds the probe so that end parts on one side in the prescribed direction of the center conductor and the outer conductor can be moved from prescribed positions in a direction along a plane orthogonal to the prescribed direction; and a first elastic body which exerts a force on the probe so that the end parts on one side in the prescribed direction of the center conductor and the outer conductor can be restored to the prescribed positions.

Description

  The present invention relates to an inspection apparatus, and more particularly to an inspection apparatus that can be attached to a receptacle.

  As an invention related to a conventional inspection device, for example, an inspection coaxial connector described in Patent Document 1 is known. The inspection coaxial connector includes a cylindrical tip portion extending in the vertical direction and a plunger extending in the vertical direction within the tip portion. Such an inspection coaxial connector is attached to a receptacle including a movable terminal and an external conductor. The outer conductor has a cylindrical shape extending in the vertical direction. The movable terminal is provided below the outer conductor, and is located at the center of the outer conductor when viewed from above. The outer conductor of the receptacle is inserted into the tip portion. Thereby, the inner peripheral surface of a front-end | tip part and the outer peripheral surface of a receptacle contact. The plunger passes through the outer conductor of the receptacle and is connected to the movable terminal of the receptacle. Thereby, the signal which flows through a movable terminal can be test | inspected with the test | inspection apparatus connected to the coaxial connector for a test | inspection.

  By the way, in the coaxial connector for a test | inspection, there existed a possibility that a damage might arise when mounting | wearing to a receptacle. More specifically, the receptacle is mounted on the circuit board. The receptacle mounting position is located within a predetermined tolerance from the predetermined mounting position. Therefore, if the mounting position of the receptacle is largely displaced, for example, the tip of the inspection coaxial connector and the outer conductor of the receptacle may collide at the time of mounting, and the inspection coaxial connector or the receptacle may be damaged.

JP 2012-28118 A

  Then, the objective of this invention is providing the inspection apparatus which can suppress connecting these, suppressing damaging an inspection apparatus or a receptacle.

  An inspection apparatus according to an aspect of the present invention includes a probe including a central conductor extending in a predetermined direction, a cylindrical outer conductor surrounding the central conductor and extending in the predetermined direction, and the central conductor And a holder for holding the probe, the center conductor, and the outer conductor so that an end portion on one side of the outer conductor can move from a predetermined position in a direction along a plane perpendicular to the predetermined direction. And a first elastic body that exerts a force on the probe so that the position of one end in the predetermined direction is restored to the predetermined position.

  In the inspection apparatus, the first elastic body may exert a force on the probe in a direction along a plane orthogonal to the predetermined direction.

  In the inspection apparatus, the holder has a first facing surface facing the probe in an orthogonal direction orthogonal to the predetermined direction, and the first elastic body includes the first facing surface and the first facing surface. It may be in contact with the probe.

  In the inspection apparatus, the first facing surface is provided in the holder so as to go around the outer conductor around a central axis extending in the predetermined direction, and the first elastic body includes the first elastic body. The opposite surface and the outer conductor may be in contact with each other and may have an annular shape.

  In the inspection apparatus, the holder has a second facing surface that faces the other side of the predetermined direction and faces the probe, and the first elastic body includes the second facing surface and the second facing surface. It may be in contact with the probe.

  In the inspection apparatus, at least a part of the end portion on the other side in the predetermined direction of the probe has a curved shape protruding toward the other side in the predetermined direction and is in contact with the holder. Good.

  In the inspection apparatus, the holder has a third facing surface facing one side in the predetermined direction and facing the other end of the probe in the predetermined direction. You may further provide the 2nd elastic body which contact | connects the said 3rd opposing surface and the edge part of the other side of the said holder.

  In the inspection apparatus, the holder has a third facing surface facing one side of the predetermined direction and facing the probe, and the first elastic body is arranged in the predetermined direction of the probe. You may contact | connect the edge part of the other side, and the said 3rd opposing surface.

  In the inspection apparatus, a spring constant of the first elastic body in a direction orthogonal to the predetermined direction may be smaller than a spring constant of the first elastic body in the predetermined direction.

  ADVANTAGE OF THE INVENTION According to this invention, it can suppress that a test | inspection apparatus or a receptacle is damaged.

1 is an external perspective view of an inspection apparatus 10 according to an embodiment of the present invention. It is a disassembled perspective view of the inspection apparatus 10 of FIG. 2 is an exploded perspective view of a probe 12 of the inspection apparatus 10. FIG. 1 is a cross-sectional structure diagram of an inspection apparatus 10. It is a cross-section figure of inspection device 10 when probe 12 inclines to the right from a predetermined position. 2 is a cross-sectional structure diagram of a receptacle 301. FIG. 2 is a cross-sectional structure diagram of a receptacle 301. FIG. It is sectional structure drawing of the inspection apparatus 10a which concerns on a 1st modification. It is a sectional structure figure of inspection device 10a when probe 12 leans to the right from a predetermined position. It is a model figure of the inspection apparatus 10b. It is a model figure of the inspection apparatus 10c. It is a model figure of the inspection apparatus 10d. It is a model figure of the inspection apparatus 10e.

(Inspection device structure)
Below, the structure of the inspection apparatus which concerns on one Embodiment of this invention is demonstrated with reference to drawings. FIG. 1 is an external perspective view of an inspection apparatus 10 according to an embodiment of the present invention. FIG. 2 is an exploded perspective view of the inspection apparatus 10 of FIG. FIG. 3 is an exploded perspective view of the probe 12 of the inspection apparatus 10. FIG. 4 is a cross-sectional structure diagram of the inspection apparatus 10. Hereinafter, the direction in which the plunger 36 of the inspection apparatus 10 extends is defined as the vertical direction. The direction in which the coaxial cable 16 extends is defined as the front-rear direction. The direction orthogonal to the up-down direction and the front-rear direction is defined as the left-right direction. The vertical direction, the front-rear direction, and the left-right direction are orthogonal to each other.

  The inspection apparatus 10 is detachable from a receptacle that is an object to be inspected, and includes a probe 12, a holder 14, a coaxial cable 16, a connector 18, an O-ring 60, and a drive unit 100 as shown in FIGS. ing.

  As shown in FIG. 3, the coaxial cable 16 includes a core wire 16a, an insulator 16b, an outer conductor 16c, and a coating 16d. The core wire 16a is, for example, a copper wire. The insulator 16b is a resin surrounding the core wire 16a. The outer conductor 16c surrounds the periphery of the insulator 16b, and is produced, for example, by knitting a thin copper wire in a net shape. The coating 16d surrounds the outer conductor 16c. At the front end portion (hereinafter also referred to as the tip) of the coaxial cable 16, the insulator 16b, the outer conductor 16c, and the coating 16d are removed, and the core wire 16a is exposed. Further, in a portion adjacent to the rear side of the portion where the core wire 16a is exposed, the outer conductor 16c and the coating 16d are removed, and the insulator 16b is exposed. Further, in a portion adjacent to the rear side of the portion where the insulator 16b is exposed, the coating 16d is removed, and the outer conductor 16c is exposed.

  The connector 18 is connected to a rear end portion (hereinafter also referred to as a rear end) of the coaxial cable 16 and is used when the coaxial cable 16 is connected to a signal measuring instrument.

  As shown in FIG. 2, the holder 14 includes a holder upper part 20 and a holder lower part 22, and holds a probe 12 described later. The holder lower part 22 has a main body 22a and a housing part 22b. The main body 22a has a rectangular parallelepiped shape extending in the left-right direction. The storage portion 22b protrudes from the front half of the short side on the right side of the main body 22a toward the right side when viewed from above, and has a rectangular shape. On the upper surface of the accommodating portion 22b, a concave portion having an annular shape is provided when viewed from above. Thus, a columnar protrusion 62 protruding upward is formed at the center of the upper surface of the accommodating portion 22b. Hereinafter, as shown in FIGS. 2 and 4, the bottom surface of the inner peripheral surface of the recess is referred to as a surface S3, and the outer annular inner peripheral surface of the inner peripheral surface of the recess is referred to as a surface S4. The surface S3 faces upward, and the surface S4 faces a direction orthogonal to the vertical direction. Further, the upper surface of the protrusion 62 is referred to as a surface S5. The surface S5 has a curved surface that is recessed downward. In the present embodiment, the surface S5 has a spherical shape.

  The holder upper part 20 has a main body 20a and a housing part 20b. The main body 20a has a rectangular parallelepiped shape extending in the left-right direction. The storage part 20b protrudes from the front half of the short side on the right side of the main body 20a toward the right side when viewed from above, and has a rectangular shape. The accommodating part 20b is comprised by the upper surface 21a and the pillars 21b-21e (The pillar 21e is not shown in FIG. 2 since it is hidden in FIG. 2).

  The upper surface 21a has a rectangular plate shape when viewed from above. A circular through hole H1 penetrating the upper surface 21a in the vertical direction is provided at the center of the upper surface 21a. Moreover, as shown in FIG. 4, the lower surface of the upper surface 21a is provided with a concave portion that forms an annular shape when viewed from below. As shown in FIG. 4, the through hole H1 is located at the center of the recess. Hereinafter, as shown in FIG. 4, the bottom surface of the inner peripheral surface of the recess is referred to as surface S <b> 2, and the outer annular inner peripheral surface of the inner peripheral surface of the recess is referred to as surface S <b> 1. The surface S2 faces the lower side, and the surface S1 faces the direction orthogonal to the vertical direction.

  The column 21b is a prismatic member extending downward from the left front corner of the upper surface 21a. The column 21c is a prismatic member extending downward from the right front corner of the upper surface 21a. The column 21d is a prismatic member extending downward from the right rear corner of the upper surface 21a. The column 21e is a prismatic member extending downward from the left rear corner of the upper surface 21a.

  When the holder upper portion 20 configured as described above is overlapped with the holder lower portion 22 from the upper side, the lower ends of the columns 21b to 21e come into contact with the four corners of the accommodating portion 22b, respectively. Thereby, a space Sp is formed between the upper surface 21a and the accommodating portion 22b.

  The probe 12 is accommodated in the space Sp as shown in FIGS. As shown in FIG. 3, the probe 12 includes a protect ring 30, a housing 32, a bushing 34, a plunger 36, a spring 38, a bushing 40, a barrel 44, a housing 46, a disk 48, a cable adapter 50, a caulking pipe 52, and a sheath 54. Contains.

  As shown in FIGS. 3 and 4, the housing 32 includes a housing upper part 32a, a housing middle part 32b, and a housing lower part 32c, and is made of a conductive material (for example, beryllium copper). The housing upper part 32a is a cylindrical member extending in the vertical direction. The housing middle part 32b is a cylindrical member connected to the lower end of the housing upper part 32a and extending in the vertical direction. The housing middle part 32b is thicker than the diameter of the housing upper part 32a. The housing lower part 32c is a cylindrical member connected to the lower end of the housing middle part 32b and extending in the vertical direction. The housing lower part 32c is thicker than the diameter of the housing middle part 32b. The housing upper part 32a is provided with a slit S extending downward from the upper end of the housing upper part 32a. Thereby, the slit S spreads by the spring property of the housing upper part 32a, and the housing upper part 32a can spread in the front-back, left-right direction.

  The bushing 34 includes a bushing upper part 34a and a bushing lower part 34b, and is made of an insulator such as a resin. The bushing upper part 34a is a cylindrical member extending in the vertical direction. The bushing lower part 34b is a cylindrical member connected to the lower end of the bushing upper part 34a and extending in the vertical direction. The diameter of the bushing lower part 34b is larger than the diameter of the bushing upper part 34a.

  The bushing 34 configured as described above is inserted into the housing 32 from below. Thereby, as shown in FIG. 4, the bushing upper part 34a is accommodated in the housing upper part 32a, and the bushing lower part 34b is accommodated in the vicinity of the upper end of the housing middle part 32b.

  The bushing 40 is a cylindrical member made of an insulator such as resin. The bushing 40 is inserted into the housing 32 from below. Thereby, as shown in FIG. 4, the bushing 40 is accommodated in the housing lower part 32c. However, the lower end of the bushing 40 protrudes from the housing lower part 32c.

  As shown in FIG. 3, the plunger 36 includes a plunger upper part 36a and a plunger lower part 36b, and is a pin made of a conductive material (for example, beryllium copper). The plunger upper part 36a is a thin pin extending in the vertical direction. The plunger lower part 36b is connected to the lower end of the plunger upper part 36a and has a columnar shape extending in the vertical direction. The diameter of the plunger lower part 36b is larger than the diameter of the plunger upper part 36a.

  The barrel 44 includes a barrel upper portion 44a and a barrel lower portion 44b, and is a rod-shaped member made of a conductive material (for example, brass). The upper barrel portion 44a has a cylindrical shape extending in the vertical direction. An opening is provided at the upper end of the barrel upper portion 44a. However, no opening is provided at the lower end of the barrel upper portion 44a. A spring 38 is inserted into the barrel upper portion 44a, and a plunger lower portion 36b is further inserted. However, the plunger upper portion 36 a extends upward from the upper end of the barrel upper portion 44 a in a state where the plunger 36 is attached to the barrel 44. When the plunger 36 is pressed from the upper side, the spring 38 can be retracted and retracted downward.

  As shown in FIG. 3, the barrel lower part 44b is provided at the lower end of the barrel upper part 44a, and the cylinder is divided into two on the left and right.

  The assembly of plunger 36, spring 38 and barrel 44 is inserted into housing 32 from below. More specifically, the assembly of the plunger 36, the spring 38 and the barrel 44 penetrates the bushings 34 and 40 attached to the housing 32 in the vertical direction. Thus, the assembly of the plunger 36, the spring 38 and the barrel 44 is held by the bushings 34 and 40 and insulated from the housing 32 by the bushings 34 and 40.

  Here, the plunger upper part 36a extends vertically in the housing upper part 32a and the bushing upper part 34a. Further, the upper end of the plunger upper portion 36a protrudes upward from the housing upper portion 32a and the bushing upper portion 34a.

  The barrel upper part 44a extends in the vertical direction in the housing middle part 32b and the housing lower part 32c. The upper end of the barrel upper part 44a is inserted into the bushing lower part 34b. Thereby, the plunger lower part 36b is caught by the bushing 34 so that it may not come out from the bushing 34 to the upper side. Further, the lower end of the barrel upper portion 44 a is inserted into the bushing 40. The lower barrel portion 44 b protrudes downward from the bushing 40.

  The assembly of the plunger 36, the spring 38 and the barrel 44 extends in the vertical direction and functions as a central conductor through which signals are transmitted. The housing 32 functions as a cylindrical outer conductor that surrounds the assembly of the plunger 36, the spring 38, and the barrel 44 and extends in the vertical direction. The outer conductor is kept at ground potential.

  The housing 46 is a cubic member made of a conductive material (for example, brass). The housing 46 is provided with a circular through hole H2 that connects the upper surface and the lower surface. A hole H3 connected to the through hole H2 is provided on the rear surface of the housing 46.

  The housing lower part 32 c is inserted from below into the through hole H <b> 2 of the housing 46. Thereby, the housing 32 is attached to the housing 46. At this time, the barrel lower part 44b is located in the vicinity of the center of the hole H3 when viewed from the rear side.

  The disk 48 includes a disk part 48a and a contact part 48b. The disk portion 48a is attached to the lower surface of the housing 46 and closes the through hole H2. The contact portion 48 b is a columnar protrusion provided on the lower surface of the disk portion 48 a and constitutes the lower end of the probe 12. The lower surface of the contact part 48b has a curved surface protruding downward. In the present embodiment, the lower surface of the contact portion 48b has a spherical shape.

  As shown in FIGS. 3 and 4, the protect ring 30 has a cylindrical shape and is attached to the upper end of the housing middle portion 32b. Specifically, the inner diameter of the protect ring 30 is larger than the outer diameter of the housing upper part 32a. The protect ring 30 is fixed to the housing middle portion 32b by being press-fitted into the housing middle portion 32b from above. As a result, the protect ring 30 surrounds the periphery of the housing upper portion 32a. That is, the inner peripheral surface of the protect ring 30 is opposed to the outer peripheral surface of the housing upper portion 32a. The protect ring 30 configured as described above plays a role of restricting the diameter of the housing upper part 32a from greatly expanding when the receptacle is mounted.

  The cable adapter 50 is a cylindrical member made of a conductive material. The front end of the cable adapter 50 is inserted into the hole H3 of the housing 46. The tip of the coaxial cable 16 is inserted into the cable adapter 50. Thereby, the core wire 16a is pinched | interposed into the barrel lower part 44b, and is fixed to the barrel lower part 44b with the solder. Thereby, the plunger 36 and the core wire 16a are electrically connected via the barrel 44.

  Further, when the front end of the coaxial cable 16 is inserted into the cable adapter 50, the outer conductor 16 c covers the rear end of the cable adapter 50 without being inserted into the cable adapter 50.

  The caulking pipe 52 is a metal tube and covers the periphery of the outer conductor 16 c that covers the rear end of the cable adapter 50. The caulking pipe 52 fixes the cable adapter 50 and the coaxial cable 16 by being caulked.

  The sheath 54 is a resin cylinder and covers the periphery of the caulking pipe 52 and the coating 16d. Thereby, the connection part of the coaxial cable 16 and the cable adapter 50 is protected.

  The O-ring 60 is an annular elastic body and is made of, for example, rubber or resin (for example, PTFE). The O-ring 60 is attached in an annular recess provided on the lower surface of the upper surface 21a. Further, a spring constant K1, which is a restoring force per unit displacement in a direction (front-rear direction and left-right direction) perpendicular to the vertical direction of the O-ring 60, is a spring that is a restoring force per unit displacement in the vertical direction of the O-ring 60. Constant: smaller than K2. Here, a value obtained by dividing the O-ring deformation amount Δl obtained by displacing the probe by a displacement amount x in a predetermined direction by the initial length L of the O-ring is defined as a strain ε, and a restoring force F received by the probe from the O-ring. Is determined by the value obtained by dividing the stress σ by the strain amount ε. At this time, if it is assumed that Hooke's law holds, the spring constant: K can be easily measured by dividing the restoring force F by the displacement amount x.

  Here, the housing 46 is accommodated in the space Sp. Further, the housing middle portion 32 b passes through the through hole H <b> 1 and the O-ring 60. However, since the diameter of the through hole H1 is smaller than the diameter of the housing lower part 32c, the housing lower part 32c cannot pass through the through hole H1 and is caught by the upper surface 21a. Further, the contact portion 48b is in contact with the surface S5 of the protrusion 62 as shown in FIG.

  The drive unit 100 moves the probe 12 and the holder 14 in the vertical direction, and is configured by, for example, a pneumatic actuator or a motor.

  In the inspection apparatus 10 configured as described above, as shown in FIG. 4, the surface S <b> 1 faces the probe 12 in a direction orthogonal to the vertical direction, and the periphery of the housing lower part 32 c of the probe 12 is vertically aligned. It circulates around a parallel axis as the central axis. The O-ring 60 is in contact with the surface S1 and the peripheral surface of the housing lower portion 32c.

  The surface S2 faces the lower surface of the housing 46 in the vertical direction. The O-ring 60 is in contact with the surface S2 and the lower surface of the housing 46.

  In the inspection apparatus 10 configured as described above, the probe 12 can move from a predetermined position in a direction along a plane in which the upper end of the housing 32 and the upper end of the plunger 36 are orthogonal to the vertical direction. More specifically, the predetermined position of the probe 12 is the position of the probe 12 when the plunger 36 is located at the center of the through hole H1 when viewed from above as shown in FIG. The diameter of the through hole H1 of the holder upper part 20 is slightly larger than the diameter of the housing middle part 32b. Therefore, the upper end of the housing 32 and the upper end of the plunger 36 can swing in the front-rear direction and the left-right direction around the portion of the contact portion 48b that is in contact with the protrusion 62.

  The O-ring 60 exerts a force on the probe 12 so that the upper end of the housing 32 and the upper end of the plunger 36 are restored to predetermined positions. In the present embodiment, the O-ring 60 exerts a force on the probe 12 in a direction along a plane perpendicular to the vertical direction. Hereinafter, a case where the probe 12 is tilted to the right from a predetermined position will be described as an example. FIG. 5 is a cross-sectional structure diagram of the inspection apparatus 10 when the probe 12 is tilted to the right from a predetermined position.

  When the probe 12 is tilted to the right side from the predetermined position, the distance between the portion located on the right side of the surface S1 and the right side surface of the housing lower part 32c becomes small. As a result, the portion of the O-ring 60 that is located on the right side of the surface S1 and the portion on the right side of the housing lower portion 32c is compressed in the left-right direction. Therefore, the O-ring 60 pushes the housing lower part 32c toward the left side. That is, the O-ring 60 exerts a force on the probe 12 in a direction along a plane perpendicular to the vertical direction. By this force, the position of the probe 12 tries to be restored to a predetermined position.

  Further, when the probe 12 is tilted to the right side from the predetermined position, the distance between the portion located on the left side of the surface S2 and the upper surface of the housing 46 is reduced. As a result, a portion of the O-ring 60 that is sandwiched between the portion located on the left side of the surface S2 and the lower surface of the housing 46 is compressed in the vertical direction. Therefore, the O-ring 60 pushes the housing 46 downward. As a result, the probe 12 tends to be rotated in the clockwise direction in FIG. 5 around the portion of the contact portion 48b that is in contact with the protrusion 62. As a result, the position of the probe 12 is restored to a predetermined position.

(Receptacle structure)
Next, the configuration of the receptacle 301 will be described with reference to FIGS. 6 and 7 are cross-sectional structural views of the receptacle 301. FIG. In FIG. 6, the inspection apparatus 10 is not attached to the receptacle 301, and in FIG. 7, the inspection apparatus 10 is attached to the receptacle 301.

  The receptacle 301 is, for example, a coaxial connector with a switch provided between a mobile phone antenna and a transmission / reception circuit, and includes a case 304, an outer conductor 305, a movable terminal 306, and a fixed terminal 307.

  The case 304 is a resin member and has a mortar-shaped opening that spreads downward. The outer conductor 305 is a metal member that covers the side surface of the case 304 and has a cylindrical shape. The outer conductor 305 is kept at the ground potential. The movable terminal 306 is attached to the case 304 and extends from the left end of the case 304 in the right direction. Further, the movable terminal 306 crosses the mortar-shaped opening of the case 304 when viewed from below. The movable terminal 306 is connected to a transmission / reception circuit. The fixed terminal 307 is attached to the case 304 and is provided near the right end of the case 304. The fixed terminal 307 is connected to the antenna. The movable terminal 306 is in pressure contact with the fixed terminal 307 from above as shown in FIG. 6 when the inspection apparatus 10 is not mounted. Since the movable terminal 306 and the fixed terminal 307 are in contact with each other, the antenna and the transmission / reception circuit are connected.

  Here, when the inspection apparatus 10 is mounted, the outer conductor 305 is inserted into the housing upper part 32a as shown in FIG. Thereby, the housing upper part 32a and the outer conductor 305 are connected. Therefore, the housings 32 and 46 are kept at the ground potential. Further, the plunger upper portion 36 a is inserted into the opening of the case 304 and pushes up the movable terminal 306. As a result, the fixed terminal 307 and the movable terminal 306 are separated from each other, the plunger 36 and the movable terminal 306 are connected, and the transmission / reception circuit and the measuring instrument are connected.

(effect)
According to the inspection apparatus 10 configured as described above, these can be connected while suppressing damage to the inspection apparatus 10 or the receptacle 301. More specifically, in the inspection apparatus 10, the distal end of the housing upper part 32 a and the distal end of the plunger upper part 36 a can swing in directions along the plane perpendicular to the vertical direction (that is, the front-rear direction and the left-right direction). As a result, even if the position of the inspection apparatus 10 and the receptacle 301 is displaced, the probe 12 is moved in the vertical direction by the tip of the housing upper part 32a and the tip of the plunger upper part 36a contacting the receptacle 301. Can tilt. As a result, the outer conductor 305 is inserted into the housing upper part 32a. Furthermore, the plunger upper part 36a is inserted into the opening of the case 304, and the movable terminal 306 is pushed up. Therefore, according to the inspection apparatus 10, these can be connected, suppressing damaging the inspection apparatus 10 or the receptacle 301.

  Moreover, according to the inspection apparatus 10, these can be connected, suppressing damaging the inspection apparatus 10 or the receptacle 301 also for the following reasons. More specifically, the deviation between the inspection apparatus 10 and the receptacle 301 is caused by the mounting deviation of the receptacle 301. The mounting deviation of the receptacle 301 occurs randomly in the front-rear direction and the left-right direction. Therefore, the O-ring 60 exerts a force on the probe 12 so that the probe 12 is restored to a predetermined position. Thereby, before mounting | wearing, the probe 12 is located in a predetermined position and can incline in any direction of the front-back direction and the left-right direction. Thereby, even if the receptacle 301 is displaced in any direction, the probe 12 is inclined and the inspection apparatus 10 and the receptacle 301 are connected.

  Moreover, according to the inspection apparatus 10, the lifetime of the inspection apparatus 10 can be extended. As described above, the mounting deviation of the receptacle 301 occurs randomly in the front-rear direction and the left-right direction. Therefore, when the inspection apparatus 10 and the receptacle 301 are connected a plurality of times, the specific position of the upper end of the housing upper portion 32a is not concentrated and contacts the outer conductor 305, but the entire upper end of the housing upper portion 32a is It contacts the outer conductor 305 evenly. Accordingly, the specific position of the housing upper part 32a is prevented from being concentrated and worn. As a result, the life of the inspection apparatus 10 can be extended.

  Moreover, according to the inspection apparatus 10, the movable range in the front-back direction and the left-right direction of the front-end | tip of the housing upper part 32a and the front-end | tip of the plunger upper part 36a can be enlarged. More specifically, when the probe 12 translates in the front-rear direction and the left-right direction, the distal end of the housing upper portion 32a and the distal end of the plunger upper portion 36a are within the range of the difference between the diameter of the through hole H2 and the diameter of the housing middle portion 32b. Can move in the front-rear direction and the left-right direction.

  On the other hand, the lower surface of the contact portion 48b has a curved shape protruding downward, and is in contact with the surface S5 of the protrusion 62. Therefore, the probe 12 swings around the contact portion with the protrusion 62 of the contact portion 48b (that is, the lower end of the probe 12). When the probe 12 swings around the lower end, the front end of the housing upper portion 32a and the front end of the plunger upper portion 36a and the front end of the plunger upper portion 36a in the front-rear direction and the left-right direction are compared to the case where the probe 12 translates in the front-rear direction and the left-right direction. The range of motion is large. Therefore, according to the inspection apparatus 10, the movable range in the front-rear direction and the left-right direction of the tip of the housing upper part 32a and the tip of the plunger upper part 36a can be increased.

  In the inspection apparatus 10, the contact portion 48 b is in contact with the protrusion 62. Therefore, the probe 12 does not move downward when the inspection apparatus 10 is attached to the receptacle 301. Therefore, the vertical movement amount of the inspection apparatus 10 at the time of mounting can be reduced, and the time required for mounting can be shortened.

(First modification)
Hereinafter, an inspection apparatus 10a according to a first modification will be described with reference to the drawings. FIG. 8 is a cross-sectional structure diagram of the inspection apparatus 10a according to the first modification.

  The inspection device 10a is different from the inspection device 10 in that the inspection device 10a further includes an O-ring 70 and the disk 48 does not have the contact portion 48b. Since the other structure of the inspection apparatus 10a is the same as that of the inspection apparatus 10, description is abbreviate | omitted.

  The O-ring 70 is an annular elastic body, and is made of, for example, rubber or resin (for example, PTFE). The O-ring 70 is attached in an annular recess provided in the housing portion 22b.

  Further, since the inspection device 10a is not provided with the contact portion 48b, the lower end of the probe 12 and the holder 14 are not in contact as shown in FIG.

  In the inspection apparatus 10a configured as described above, as shown in FIG. 8, the surface S3 faces the lower end of the probe 12 (the lower surface of the housing 46). The O-ring 70 is in contact with the surface S3 and the lower surface of the housing 46.

  In the inspection apparatus 10a configured as described above, the O-ring 70 exerts a force on the probe 12 so that the upper end of the housing 32 and the upper end of the plunger 36 are restored to predetermined positions. Hereinafter, a case where the probe 12 is tilted to the right from a predetermined position will be described as an example. FIG. 9 is a cross-sectional structure diagram of the inspection apparatus 10a when the probe 12 is tilted to the right from a predetermined position.

  When the probe 12 is tilted to the right side from the predetermined position, the distance between the portion located on the right side of the surface S1 and the right side surface of the housing lower part 32c becomes small. As a result, the portion of the O-ring 60 that is located on the right side of the surface S1 and the portion on the right side of the housing lower portion 32c is compressed in the left-right direction. Therefore, the O-ring 60 pushes the housing lower part 32c toward the left side. That is, the O-ring 60 exerts a force on the probe 12 in a direction along a plane perpendicular to the vertical direction. With this force, the position of the probe 12 is restored to a predetermined position.

  Further, when the probe 12 is tilted to the right side from the predetermined position, the distance between the portion located on the left side of the surface S2 and the upper surface of the housing 46 is reduced. As a result, a portion of the O-ring 60 that is sandwiched between the portion located on the left side of the surface S2 and the lower surface of the housing 46 is compressed in the vertical direction. Therefore, the O-ring 60 pushes the housing 46 downward. As a result, the probe 12 tends to be rotated in the clockwise direction of FIG. As a result, the position of the probe 12 is restored to a predetermined position.

  Further, when the probe 12 is tilted to the right side from the predetermined position, the distance between the portion located on the right side of the surface S3 and the lower surface of the housing 46 is reduced. As a result, a portion of the O-ring 70 sandwiched between the portion located on the left side of the surface S3 and the upper surface of the housing 46 is compressed in the vertical direction. Therefore, the O-ring 70 pushes the housing 46 upward. As a result, the probe 12 tends to be rotated in the clockwise direction of FIG. As a result, the position of the probe 12 is restored to a predetermined position.

  In the inspection apparatus 10a configured as described above, similarly to the inspection apparatus 10, these can be connected while suppressing damage to the inspection apparatus 10a or the receptacle 301.

(Second modification)
Next, an inspection apparatus 10b according to a second modification will be described with reference to the drawings. FIG. 10 is a model diagram of the inspection apparatus 10b.

  The inspection apparatus 10b differs from the inspection apparatus 10 in that the lower end of the probe 12 is flat. Since the other structure of the inspection apparatus 10b is the same as that of the inspection apparatus 10, description thereof is omitted.

  In the inspection apparatus 10b, the lower end of the probe 12 is a flat surface, and the upper surface of the accommodating portion 22b is also a flat surface. Therefore, the lower end of the probe 12 and the upper surface of the accommodating portion 22b are in surface contact. Therefore, the probe 12 does not oscillate but moves in parallel in the front-rear direction and the left-right direction from a predetermined position.

  In the inspection apparatus 10b configured as described above, similarly to the inspection apparatus 10, these can be connected while suppressing damage to the inspection apparatus 10b or the receptacle 301.

(Third Modification)
Next, an inspection apparatus 10c according to a third modification will be described with reference to the drawings. FIG. 11 is a model diagram of the inspection apparatus 10c.

  The inspection apparatus 10c is different from the inspection apparatus 10b in that the holder upper part 20 does not go around to the upper side of the O-ring 60 and the probe 12. Since the other structure of the inspection apparatus 10c is the same as that of the inspection apparatus 10b, description thereof is omitted.

  When the holder upper part 20 is wrapping up to the upper side of the O-ring 60 and the probe 12 as in the inspection apparatus 10b, the O-ring 60 and the probe 12 are prevented from dropping from the holder 14. However, when it is not necessary to consider that the O-ring 60 and the probe 12 fall off from the holder 14, the holder upper portion 20 does not wrap around to the upper side of the O-ring 60 and the probe 12 as in the inspection apparatus 10 b. It does not have to be.

  In the inspection apparatus 10c configured as described above, it is possible to connect them while suppressing damage to the inspection apparatus 10c or the receptacle 301 as in the case of the inspection apparatus 10b.

(Fourth modification)
Next, an inspection apparatus 10d according to a fourth modification will be described with reference to the drawings. FIG. 12 is a model diagram of the inspection apparatus 10d.

  The inspection apparatus 10d is different from the inspection apparatus 10c in that the probe 12 has a bar shape extending in the vertical direction and the lower end of the probe 12 has a spherical shape. Since the other configuration of the inspection apparatus 10d is the same as that of the inspection apparatus 10c, description thereof is omitted.

  Like the inspection device 10d, the probe 12 may have a rod shape. In this case, the O-ring 60 comes into contact with the surface S1 and the peripheral surface of the probe 12. Therefore, the O-ring 60 exerts a force in the front-rear direction or the left-right direction when the probe 12 is tilted from a predetermined position, and does not exert a force in the vertical direction.

  In the inspection apparatus 10d configured as described above, it is possible to connect them while suppressing damage to the inspection apparatus 10d or the receptacle 301, similarly to the inspection apparatus 10c.

(Fifth modification)
Next, an inspection apparatus 10e according to a fifth modification will be described with reference to the drawings. FIG. 13 is a model diagram of the inspection apparatus 10e.

  The inspection apparatus 10e is different from the inspection apparatus 10 in that the lower end of the probe 12 has a curved surface protruding downward and the O-ring 60 is in contact with the lower end of the probe 12 and the upper surface of the housing portion 22b. To do. Since the other structure of the inspection apparatus 10e is the same as that of the inspection apparatus 10, description thereof is omitted.

  The accommodating portion 22b of the holder 14 has a surface S3 facing upward and facing the probe 12. The lower end of the probe 12 has a curved surface protruding downward. In this modification, the lower end of the probe 12 forms a cone protruding downward. Further, the O-ring 60 is in contact with the lower end of the probe 12 so as to go around the apex of the cone, and is in contact with the upper surface of the housing portion 22b.

  Also in the inspection apparatus 10e configured as described above, the probe 12 can slide in the front-rear direction and the left-right direction. Further, the probe 12 is restored to a predetermined position (the center of the through hole H2) by the O-ring 60.

  In the inspection apparatus 10e configured as described above, similarly to the inspection apparatus 10, these can be connected while preventing the inspection apparatus 10e or the receptacle 301 from being damaged.

(Other embodiments)
The inspection device according to the present invention is not limited to the inspection devices 10, 10a to 10e, and can be changed within the scope of the gist thereof.

  In addition, you may combine arbitrarily the structure with which the inspection apparatus 10 and 10a-10e are equipped.

  Note that the O-rings 60 and 70 do not have to be annular. Instead of the O-rings 60 and 70, a plurality of spherical elastic bodies may be arranged in the recess.

  The O-rings 60 and 70 are in contact with the probe 12 and the holder 14, but may be bonded to the probe 12 and the holder 14, for example.

  Note that in the inspection apparatuses 10 and 10a to 10e, facing surfaces includes not only a state in which two surfaces are opposed in parallel but also a state in which the two surfaces are opposed in a non-parallel state.

  Further, in the inspection apparatuses 10 and 10a to 10e, when a surface faces a specific direction, not only the surface normal is parallel to the specific direction but also the surface normal includes a component in a specific direction. It includes the state that is.

  As described above, the present invention is useful for an inspection apparatus, and is particularly excellent in that connection between them can be suppressed while suppressing damage to the inspection apparatus or the receptacle.

10, 10a to 10e: Inspection device 12: Probe 14: Holder 16: Coaxial cable 16a: Core wire 16b: Insulator 16c: Outer conductor 16d: Cover 18: Connector 20: Holder upper part 20a: Main body 20b: Housing portion 21a: Upper surface 22 : Holder lower part 22a: Main body 22b: Housing part 32: Housing 32a: Housing upper part 32b: Housing middle part 32c: Housing lower part 34: Bushing 34a: Bushing upper part 34b: Bushing lower part 36: Plunger 36a: Plunger upper part 36b: Plunger lower part 38: Spring 40: bushing 44: barrel 44a: barrel upper part 44b: barrel lower part 46: housing 48: disk 48a: disk part 48b: contact part 60, 70: O-ring 62: protrusion 100: driving parts S1 to S5: surface

Claims (9)

A probe including a central conductor extending in a predetermined direction, and a cylindrical outer conductor surrounding the central conductor and extending in the predetermined direction;
A holder for holding the probe so that an end of one side of the predetermined direction of the center conductor and the outer conductor can move from a predetermined position in a direction along a plane perpendicular to the predetermined direction;
A first elastic body that exerts a force on the probe so that the position of one end of the central conductor and the outer conductor in the predetermined direction is restored to the predetermined position;
Having
Inspection device characterized by The first elastic body exerts a force on the probe in a direction along a plane perpendicular to the predetermined direction;
The inspection apparatus according to claim 1. The holder has a first facing surface facing the probe in an orthogonal direction orthogonal to the predetermined direction;
The first elastic body is in contact with the first facing surface and the probe;
The inspection apparatus according to claim 1, wherein the inspection apparatus is characterized by the following. The first facing surface is provided on the holder so as to go around the outer conductor around a central axis extending in the predetermined direction,
The first elastic body is in contact with the first facing surface and the outer conductor and has an annular shape;
The inspection apparatus according to claim 3. The holder faces the other side of the predetermined direction and has a second facing surface facing the probe,
The first elastic body is in contact with the second facing surface and the probe;
The inspection apparatus according to claim 3, wherein: At least a part of an end portion on the other side in the predetermined direction of the probe has a curved surface shape protruding toward the other side in the predetermined direction, and is in contact with the holder;
The inspection apparatus according to claim 3, wherein: The holder has a third facing surface facing one side of the predetermined direction and facing the other end of the probe in the predetermined direction;
The inspection device includes:
A second elastic body in contact with the third opposing surface and the other end of the holder;
More
The inspection apparatus according to claim 5. The holder has a third facing surface facing one side of the predetermined direction and facing the probe,
The first elastic body is in contact with the other end of the probe in the predetermined direction and the third facing surface;
The inspection apparatus according to claim 1. A spring constant in a direction perpendicular to the predetermined direction of the first elastic body is smaller than a spring constant in the predetermined direction of the first elastic body;
The inspection apparatus according to claim 1, wherein:

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