JP2015129680A - Shape measurement device, attitude control device, structure manufacturing system, and shape measurement method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a shape measurement device, an attitude control device, a structure manufacturing system, and a shape measurement method which reduce measurement errors attributed to the shape of the surface of an object to be measured, and accurately measure the shape of the object.SOLUTION: A shape measurement device includes: an illumination part 11 for radiating by an illumination optical system 112 a plurality of light rays at different positions on a surface 21 of an object 20 to be measured; an imaging part 12 for taking images of the object 20 to be measured having the plurality of light rays radiated thereon by an imaging optical system 122 disposed in the direction different from the radiation direction; a control part for transmitting a control signal for controlling the relative direction of the object 20 to be measured with respect to the illumination part 11 or the imaging part 12 on the basis of the position of an image taken by the imaging part 12 with respect to each of the plurality of light lays; and a shape calculation part for calculating the shape of the surface 21 of the object to be measured having at least one of the plurality of light rays radiated thereon.

Description

  The present invention relates to a shape measuring device, an attitude control device, a structure manufacturing system, and a shape measuring method for optically measuring the shape of an object to be measured.

  A light cutting method is known as a method for measuring the surface shape of an object in a non-contact manner. In the light cutting method, pattern light formed in, for example, a line shape on the surface of an object to be measured and photographed by an image pickup unit including an image pickup optical system and an image pickup element arranged in a direction different from the irradiation direction. This is a method of obtaining the shape of the object surface from the position of the image (see, for example, Patent Document 1). Specifically, when the pattern light is in the form of a line, the position of the pattern light image is obtained for each pixel column of the image sensor that is orthogonal to the longitudinal direction of the pattern light image. Based on the position where the image was formed, the position of the illumination optical system that irradiated the pattern light, and the position of the imaging optical system, the three-dimensional coordinates of the position irradiated with the pattern light were calculated using the principle of triangulation To do. Then, a three-dimensional shape of the surface of the object to be measured can be obtained by performing imaging each time the pattern light irradiation position is sequentially moved on the surface of the object to be measured. Hereinafter, pattern light formed in a line shape is referred to as line light or the like.

US Patent Application Publication No. 2012/0194651

  The irradiated line light is reflected by the surface of the object to be measured. Among the reflected light, there is regular reflected light whose reflection direction is determined according to the direction of the surface irradiated with the line light. There is also diffuse reflection light that propagates in a direction different from regular reflection light. Further, the amount of received light when the regular reflection light is received by the image sensor is extremely large compared to the case where diffuse reflection light is received. Hereinafter, regular reflection light and diffuse reflection light are collectively referred to as reflected light.

  Since the surface of the test object has various shapes, the angle formed between the direction in which the specular reflected light travels and the optical axis direction of the imaging optical system depends on the measurement position irradiated with the line light on the surface of the test object. It is not uniform. Therefore, the intensity of the reflected light incident on the image sensor varies depending on the direction of the surface of the measurement position. However, the intensity of light that can be identified by the image sensor has an upper limit value and a lower limit value. Therefore, particularly when reflected light having a light intensity higher than the upper limit is incident on the image sensor, the peak position of the intensity of the line light image cannot be accurately determined. Therefore, if the intensity of the reflected light incident on the image sensor does not fall within the range of the identifiable intensity difference of the image sensor, the image position of the line light on the image sensor cannot be obtained accurately, and the surface of the object to be measured There was a problem that an error in the measurement of the shape was caused.

  A first aspect of the present invention for achieving the above object is a shape measuring device, wherein an illumination unit that irradiates a plurality of lights to different positions on the surface of an object to be measured by an illumination optical system, and the plurality of lights irradiates An imaging unit that captures an image of the measured object using an imaging optical system in a direction different from the irradiation direction, and illumination based on each position of the plurality of light images in the image captured by the imaging unit A control unit that transmits a control signal that controls the relative orientation of the object to be measured with respect to the imaging unit and a shape calculating unit that calculates the shape of the surface of the object being irradiated with at least one of a plurality of lights; Have

  Further, the second aspect of the present invention is an attitude control device, wherein an illumination unit that irradiates a plurality of lights to different positions on the surface of the object to be measured by an illumination optical system, and a device under measurement to which a plurality of lights are irradiated An imaging unit that captures an image of an object using an imaging optical system in a direction different from the irradiation direction, and an illumination unit and an imaging unit based on positions of a plurality of light images in the image captured by the imaging unit A detection unit that detects an estimated amount of the relative direction of the object to be measured, and a warning generation device that generates a warning when the estimated amount is not within a predetermined range.

  Further, a third aspect of the present invention is a shape measuring apparatus, wherein an illumination unit that irradiates a plurality of lights to different positions on the surface of the object to be measured by an illumination optical system, and a measurement object that is irradiated with the plurality of lights An imaging unit that captures an image of an object using an imaging optical system in a direction different from the irradiation direction, and an illumination unit and an imaging unit based on positions of a plurality of light images in the image captured by the imaging unit A detection unit that detects an estimated amount of a relative direction of the object to be measured, a shape calculation unit that calculates shape data of the surface of the object being irradiated with at least one of a plurality of lights, and an estimated amount And a reliability evaluation unit for evaluating the reliability of the shape data.

  A fourth aspect of the present invention is a shape measurement method, wherein the illumination unit irradiates a plurality of lights to different positions on the surface of the object to be measured by the illumination optical system, and the imaging unit irradiates the plurality of lights. An image of the measured object using an imaging optical system in a direction different from the irradiation direction, and the control unit based on the respective positions of the plurality of light images in the image captured by the imaging unit And a control signal for controlling the relative orientation of the object to be measured with respect to the imaging unit, and the shape calculating unit calculates the shape of the surface of the object to be measured that is irradiated with at least one of the plurality of lights.

  According to the present invention, there are provided a shape measuring device, a shape measuring method, a posture control device, and a posture control method capable of reducing measurement errors due to the shape of the surface of the object to be measured and performing shape measurement with high accuracy. can do.

It is a perspective view which shows the structure of a shape measuring apparatus. It is a front view which shows the structure of a shape measuring apparatus. It is a figure which shows the principal part structure of a sensor part. It is a figure which shows the principal part structure of an illumination part. It is a figure which shows the block diagram of the principal part of a shape measuring apparatus. It is a figure which shows the optical path of the light irradiated to the to-be-measured object surface. FIG. 2A is a diagram showing a path of light diffused on the surface of the object to be measured, and FIG. 2B is a diagram showing an image of light irradiated on the object to be measured and photographed by the imaging unit. FIG. 4A is a diagram illustrating a light path when the surface of the object to be measured is inclined with respect to the sensor unit, and FIG. 5B is a diagram illustrating an image of light that is irradiated on the object to be measured and photographed by the imaging unit. FIG. 5A is a diagram illustrating a light path when the surface of an object to be measured is inclined with respect to a sensor unit, and FIG. 5B is a diagram illustrating an image of light photographed by an imaging unit. It is. It is a figure which shows the method of pinpointing the position of the image of the line light irradiated to the to-be-measured object. It is a flowchart which shows the flow of a shape measurement. It is a figure explaining diffuse reflection light and regular reflection light. It is a figure which shows the block diagram of the principal part of the shape measuring apparatus which performs a warning. It is a flowchart which shows the flow of a shape measurement. It is a figure which shows the principal part structure of the shape measuring apparatus which performs reliability evaluation. It is a flowchart which shows the flow of a shape measurement. It is a figure which shows the block diagram of the principal part of a structure manufacturing system. It is a flowchart which shows the flow of structure manufacture.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The present embodiment is for specifically explaining the present invention, and does not limit the present invention unless otherwise specified. The drawings may show the invention by enlarging the main parts for convenience, and the dimensional ratio may differ from the actual unless otherwise specified.

  FIG. 1 is a perspective view showing a configuration example of an embodiment according to the shape measuring apparatus of the present invention, and FIG. 2 is a front view. The shape measuring apparatus 100 according to the present embodiment scans the line light 60 on the surface 21 to be measured by moving the sensor unit 10 described later relative to the surface 21 to be measured by the moving unit 40. The three-dimensional shape of the surface 21 to be measured is measured. Specifically, an imaging unit 12 (described later) included in the sensor unit 10 captures an image of the line light 60 irradiated on the surface 21 to be measured at a predetermined timing. Shooting timing can be set in advance at a predetermined time interval. When the shooting timing is set to a certain time interval, the number of measurement points acquired by the shape measuring apparatus 100 with respect to the object surface 21 by adjusting the scanning speed of the line light 60, that is, the unit area, that is, The density of the measurement points can be changed. Further, the measurement timing or scanning speed may be set by the measurer, or the density of the measurement points to be acquired may be set. The measurement point is a point on the object to be measured and is a point for calculating coordinate data in an xyz orthogonal coordinate system described later. Then, based on the image data from the imaging unit 12 and the positional information indicating the relative positional relationship between the sensor unit 10 and the object 20 to be measured at the time when the image data was captured, the object is measured using the principle of triangulation. The three-dimensional shape of the measurement object 20 is measured.

  Hereinafter, for the sake of explanation, as shown in FIGS. 1 and 2, an orthogonal coordinate system including an x axis, a y axis, and a z axis that are orthogonal to each other is used. As shown in FIGS. 1 and 2, the shape measuring apparatus 100 includes a posture changing unit 30, a moving unit 40, a sensor unit 10, and a control unit 50.

  The posture changing unit 30 is a mechanism that supports the device under test 20 and changes the relative posture of the sensor unit 10 with respect to the surface of the device under test 21, and is provided on the surface plate 31. The posture changing unit 30 includes a support base 32, a first rotation driving unit 33, and a second rotation driving unit 34. The support base 32 has a configuration capable of fixing the DUT 20 in an arbitrary posture. For this purpose, the first rotation drive unit 33 rotates the support table 32 around the axis indicated by the one-dot chain line 331 in FIGS. 1 and 2 for the support table 32 and the second rotation drive unit 34. Therefore, the attitude of the support base 32 can be changed with respect to the sensor unit 10, and the direction of the surface of the DUT 20 can be changed with respect to the sensor unit 10. The second rotation drive unit 34 drives the support base 32 so as to rotate about the direction indicated by the broken line 341 in FIGS. 1 and 2 perpendicular to the mounting surface of the support base 32.

  By driving both the first rotation driving unit 33 and the second rotation driving unit 34, the surface of the object to be measured 20 can be directed in a preferable direction with respect to the sensor unit 10, and the relative posture can be changed. . Of course, since the first rotation drive unit 33 and the second rotation drive unit 34 have rotation position detection means such as an encoder, the angle of the support base 32 tilted with respect to the surface plate 31 can be supported. It is possible to know which angle the table 32 has been rotated by the second rotation drive unit 34.

  The moving unit 40 includes a portal frame 41 installed so as to straddle the posture changing unit 30, a rotating unit 42 that allows the sensor unit 10 to rotate about a rotation axis parallel to the z axis, a head unit 43, And a horizontal moving unit 44 for moving the portal frame in a direction parallel to the x-axis. The portal frame 41 includes a leg portion 411 and a beam portion 412 passed over the posture changing portion 30. A rotating unit 42 is provided below the head unit 43. The rotating unit 42 includes a rotation driving unit (not shown) that rotates the sensor unit 10 about a direction parallel to the z direction. The head portion 43 is provided on the beam portion 412. The inside of the head part 43 has a y-axis direction drive part (not shown). The head unit 43 is configured to be movable in the y-axis direction with respect to the surface plate 31 by the y-axis direction driving unit. Further, the head unit 43 has a z-axis direction driving unit (not shown) that allows the rotating unit 42 and the sensor unit 10 to move in the z-axis direction. The horizontal moving part 44 is connected to the leg part 411 and is driven by a horizontal driving part (not shown). The rotating unit 42 has a rotation position detecting unit such as an encoder. Each of the y-axis direction drive unit, the z-axis direction drive unit, and the horizontal movement unit 44 includes a unit for detecting a position including a sensor such as an encoder. The sensor unit is based on the posture change unit 30. Ten positions can be identified.

  FIG. 3 is a diagram illustrating a main configuration of the sensor unit 10. The solid line indicates the central light beam 61 in the longitudinal direction of the line light. The central light beam is a light beam that passes through the center of an aperture stop (not shown) of the illumination optical system, and here refers to a light beam that passes through the center of the light beam of the line light 60. The sensor unit 10 includes an illumination unit 11 that irradiates the measurement object surface 21 with measurement light 601 and reference light 602 that are line lights, and an imaging unit 12 that images the measurement object surface 21. Connected to the sensor unit 10 is a control unit 50 including a calculation unit 51 (described later) that calculates the surface shape of the DUT 20 based on an image captured by the imaging unit 12.

  FIG. 4 is a diagram illustrating a main configuration of the illumination unit 11. A solid line 61 indicates a central ray. The illumination unit 11 is configured to irradiate the measurement object surface 21 with measurement light 601 and reference light 602 that are linear lights having a longitudinal direction. Light emitted from the light source 111 is converted into a parallel light beam by the illumination optical system 112 and is incident on the half mirror 113. The light that has passed through the half mirror 113 is converged by the cylindrical lens 115 only in the direction in which the surface has a curvature. Thereby, it becomes a line-shaped light on the surface of the object to be measured, and is irradiated on the surface 21 of the object to be measured. In the shape measuring apparatus 100 according to the present embodiment, this line light is used as measurement light 601. On the other hand, of the light emitted from the light source 111, the light whose direction of travel is changed by the half mirror 113 is incident on the mirror 114, the direction is changed again, and the light travels parallel to the measurement light 601 and is incident on the cylindrical lens 115. As a result, line light is formed. In the present embodiment, this line light is referred to as reference light 602.

  In the present embodiment, the measurement light 601 is line light mainly used for measuring the shape of the measurement object surface 21, and the reference light 602 is a line mainly used for calculating the direction of the measurement object surface 21 relative to the sensor unit 10. Light.

  In the present embodiment, the measurement light 601 and the reference light 602 are defined as described above in the generation process, but either line light may be the measurement light 601 and is not limited to the above. In some cases, the measurement light 601 mainly used for shape measurement may be used for tilt calculation, and the reference light 602 may be used for shape measurement. For example, when comparing the image of the measurement light 601 and the image of the reference light 602, the one that can easily identify the peak position of the image may be used for shape measurement.

  In addition to the cylindrical lens 115, the illumination unit 11 may be configured by a slit plate, liquid crystal, or the like to form line-shaped pattern light. In addition, the line-shaped light may be formed by irradiating the illuminating unit 11 while moving the point-shaped light onto the DUT 20 at a high speed within the time when the imaging unit 12 captures one image. . As the light source 111, for example, an LED, a laser light source, an SLD, or the like can be used.

  In this embodiment, line light is used as measurement light and reference light, but the present invention is not limited to line light. At least one of them may be point light.

  Hereinafter, when there is no need to distinguish between the measurement light 601 and the reference light 602, both will be collectively described as the line light 60.

  As illustrated in FIG. 3, the imaging unit 12 includes an imaging optical system 121 and an imaging element 122. Pixels are arrayed in the two-dimensional direction on the image sensor 122, and are composed of, for example, a CCD or the like. The imaging unit 12 is arranged so as to capture an image of the pattern light 60 irradiated on the surface of the object 20 to be measured from a direction different from the light irradiation direction. The image sensor 122 includes an imaging surface 123 that receives light. The imaging optical system 121 is configured such that the imaging surface 123 and the position irradiated with the measurement light on the object to be measured 20 have a conjugate relationship.

  In the shape measuring apparatus 100 according to the present embodiment, the position of the measurement light 601 on the surface 21 to be measured and the imaging surface 123 have a conjugate relationship regardless of the distance between the sensor unit 10 and the object 20 to be measured. The imaging surface 123 is inclined with respect to the main plane of the imaging optical system 121. With such an arrangement, it is possible to obtain an image of the measuring light 601 in focus regardless of the shape of the object 20 to be measured.

  However, since the imaging surface 123 is arranged so as to be conjugate with the irradiation region of the measurement light 601 irradiated on the object 20 to be measured, there is a possibility that the irradiation region of the reference light 602 cannot be focused. Therefore, the imaging optical system 121 may be configured so that the depth of focus of the measurement light 601 and the reference light 602 is increased by providing a diaphragm.

  In the shape measuring apparatus 100 in the present embodiment, the illumination unit 11 and the imaging unit 12 are fixed in the same housing of the sensor unit 10. That is, the imaging optical system 121 and the illumination optical system 112 are fixed. Therefore, from the position coordinates of the sensor unit 10 and the pixel position of the image of the measurement light 601 imaged on the image sensor 122, the position on the surface of the object to be measured 21 irradiated with the measurement light 601 and the illumination optical system 112. The distance can be determined. The object under measurement where the measuring light 601 is irradiated is obtained by obtaining the distance between the illumination optical system 112 and the surface 21 of the object to be measured for each pixel column in the longitudinal direction of the image of the measuring light 601 on the image sensor 122. The shape of the surface 21 can be determined.

  In the shape measuring apparatus 100 according to the present embodiment, the illumination unit 11 and the imaging unit 12 are fixed in the housing of the sensor unit 10, but the arrangement thereof may be variable. In this case, it is only necessary to have a configuration in which the position coordinates of the illumination optical system 112 and the imaging optical system 121 and the irradiation direction of the line light are known at the time of imaging.

  FIG. 5 shows a block diagram of the main part of the shape measuring apparatus 100 including the control unit 50. The control unit 50 includes a calculation unit 51, a control unit 52, a storage unit 53, an input unit 54, an output unit 55, and a communication unit 56. The calculation unit 51 includes a shape calculation unit 511, a surface direction estimation unit 512, a drive amount calculation unit 513, and a position specifying unit 514. The control unit 52 includes an arithmetic control unit 521 and a mechanism control unit 522.

  The shape calculation unit 511 is a functional block that calculates the shape of the DUT 20 at the measurement position irradiated with the measurement light 601. As described above, information from each position detection means and rotation position detection means provided in the moving unit 40, each rotation position detection means provided in the posture change unit 30, and the measurement light 61 acquired from the imaging unit 12 Based on the position of the image, the position of the measurement site of the DUT 20 is calculated. Here, the shape calculation unit 511 may use the reference light 602 for the shape calculation.

  The position specifying unit 514 specifies one pixel that represents the position of the image of the line light 60 on the image captured by the image sensor 122. That is, one pixel indicating the position of the image of the measurement light 601 and one pixel indicating the position of the image of the reference light 602 are specified. Further, as long as the position of the line light image is required, the position of the image of the line light 60 on the captured image may be specified by a plurality of pixels.

  The surface direction estimation unit 512 is a functional block that estimates the direction of the surface 21 to be measured with respect to the sensor unit 10 at the position irradiated with the measurement light 601 and the reference light 602. A method for estimating the direction of the surface 21 to be measured will be described later.

  Based on the information on the direction of the measurement object surface 21 obtained by the surface direction estimation unit 512, the drive amount calculation unit 513 has the surface of the measurement site of the measurement object 20 facing the sensor unit 10 in the optimum direction. Similarly, this is a functional block for calculating the drive amount of the posture changing unit 30. Specifically, the driving amount for driving each rotation driving unit of the posture changing unit 30 is calculated. Further, the drive amount calculation unit 513 is a functional block that calculates the drive amount of the moving unit 40 for scanning the measurement light 601 on the surface 21 of the object to be measured. Specifically, the drive amount of each drive unit and rotation drive unit of the moving unit 40 is calculated.

  The calculation control unit 521 is a functional block that causes the shape calculation unit 511, the surface direction estimation unit 512, and the drive amount calculation unit 513 to sequentially execute calculations based on the data stored in the storage unit 53. The mechanism control unit 522 is a functional block that drives the posture changing unit 30 and the moving unit 40 by the next photographing timing based on the driving amounts of the posture changing unit 30 and the moving unit 40 obtained by the driving amount calculating unit 531. is there.

  In the present embodiment, each part of the control unit 50 is configured to function as a functional block, but is not limited thereto. The central processing unit (CPU) may read a necessary program and execute the function of each part of the control unit 50.

  The storage unit 53 stores image data captured by the imaging unit, calculation data such as a shape calculation unit 511, a surface direction estimation unit 512, and a drive amount calculation unit 513, a program, and the like. The input unit 54 includes a mouse, a keyboard, a touch panel, and the like. The input unit 54 may be used to input and set the scanning speed of the sensor unit 10. The output unit 55 includes a display or the like, and displays a calculation result. The communication unit 56 communicates between the shape measuring apparatus 100 and other devices by wireless or wired.

  FIG. 6 is a view of the optical path of the line light 60 irradiated to the DUT 20 as seen from a direction different from the irradiation direction. In this embodiment, when the line light 60 is irradiated on a plane perpendicular to the light irradiation direction from the light source 111, the patterns formed by the line light 60 are linear patterns parallel to each other. Yes. Further, in the present embodiment, on the surface including the central light beam (hereinafter referred to as the central light beam 61) of each light beam of the line light 60 indicated by the solid line in FIG. 20 is configured to be irradiated. Hereinafter, the solid line indicates the optical path of the central ray 61 of the line light 60 from the illumination unit 11, and the broken line indicates the optical path of the end 62 of the line light 60.

  FIG. 7A shows an optical path in a plane including the central rays 61 of the measurement light 601 and the reference light 602 shown in FIG. The measurement light 601 and the reference light 602 are irradiated from the illumination unit 11 to the measurement object surface 21, reflected by the measurement object surface 21, and part of each reflected light enters the imaging optical system 121. Images of the measurement light 601 and the reference light 602 formed on the imaging surface 123 are taken by the imaging element 122. At this time, the positions 6011 and 6021 of the images of the measurement light 601 and the reference light 602 photographed by the image sensor are shown in FIG.

  FIG. 7A is a diagram showing the irradiation direction of each light when the line light 60 is irradiated onto a surface having a certain height. A case is shown in which the distance from the light source 111 to the object to be measured 20 is a standard distance, and the measurement light 601 and the reference light 602 are irradiated almost perpendicularly to the surface of the object to be measured 21.

Normally, aberrations and the like are kept low on the optical axis of the imaging optical system 121 and its vicinity. Further, the central region of the image sensor 123 is disposed so as to be positioned on the optical axis of the image pickup optical system. Therefore, the measurement accuracy is generally good at the center of the image sensor 122. Therefore, the image of the DUT 20 at the position irradiated with the measurement light 601 comes near the center of the imaging region of the imaging element 122.
The mechanism control unit 522 acquires an image of the measurement light 601 by the sensor unit 10 while controlling the moving unit 40. Accordingly, FIG. 7B also shows that the measurement light image 6011 is formed in the center of the imaging region of the imaging element 122.

  FIG. 8A shows the path of light irradiated to the DUT 20 as in FIG. 7A. FIG. 8A shows an example where the direction of the surface 21 to be measured is different with respect to the irradiation direction of the line light 60 from the sensor unit 10. At this time, images (6011, 6021) of the measurement light 601 and the reference light 602 imaged by the image sensor 122 are shown in FIG.

  FIG. 9A shows the path of light irradiated to the DUT 20 as in FIGS. 7A and 8A. FIG. 9A shows an example where the direction of the surface 21 to be measured is different from the irradiation direction of the line light 60 from the sensor unit 10. At this time, images (6011, 6021) of the measurement light 601 and the reference light 602 captured by the image sensor 122 are shown in FIG.

  If the direction of the surface of the DUT 20 is different from the irradiation directions of the measurement light 601 and the reference light 602, the image of the measurement light 601 and the images of the reference light 602 (6011, 6021) captured by the sensor unit 10 will be described. The positional relationship changes. For example, the image of the measurement light 601 taken in the case of FIG. 7A and the image 6011 of the measurement light 601 taken in the case of FIG. An image is formed at the center of. On the other hand, the position of the image 6021 of the reference light 602 photographed in the case of FIG. 7A is different from the position of the image 6021 of the reference light 602 photographed in the case of FIG. 8B. As described above, the shape measuring apparatus 100 according to the present embodiment is based on the position information of the image of the measurement light 601 and the image of the reference light 602, and the direction of the surface of the object to be measured with respect to the sensor unit 10 at the position to be measured next. Is detected.

  The surface direction estimation unit 512 obtains an amount for estimating the orientation of the surface of the DUT 20 with respect to the sensor unit 10 as surface direction data. The surface direction data can be obtained, for example, as an amount corresponding to the angle formed between the normal line assumed in the region irradiated with the line light 60 of the device under test 20 and the irradiation direction of the line light 60.

  Further, when only the orientation of the surface with respect to the direction orthogonal to the longitudinal direction of the line light 60 is considered, the measurement light 601 and the reference light 602 of the normal line assumed in the region irradiated with the line light 60 of the object 20 to be measured. The surface direction data may be obtained with the projection onto the surface including the central ray 61 as the normal direction.

  A procedure in which the surface direction estimation unit 512 obtains the surface direction data will be described. First, images (6011, 6021) of the measurement light 601 and the reference light 602 are taken by the image sensor 122. In order to examine the orientation of the surface of the DUT 20 in the area irradiated with the line light 60, in this embodiment, the position specifying unit 514 first displays the image of the line light 60 on the image photographed by the image sensor 122. Each pixel representing the position is specified.

  The position specifying unit 514 specifies the pixel position 71 from the measurement light image 6011 and further specifies the pixel position 72 from the reference light image 6021 on the image captured by the image sensor 122. The surface direction estimation unit 512 calculates the probe coordinates of the measurement object 20 irradiated with the measurement light 601 by the shape calculation unit 511 based on the pixel position 71 and the irradiation direction of the measurement light 601. Similarly, the probe coordinates of the object to be measured corresponding to the pixel position 72 are also calculated. The probe coordinates are used to distinguish from the xyz coordinates set for the shape measuring apparatus, and are the coordinates set for the sensor unit 10. That is, even if each component of the moving unit is driven, the predetermined position of the sensor unit 10 is uniquely indicated in the probe coordinates regardless of the drive amount. The probe coordinates can be converted into xyz coordinates by taking into account the driving amount of each component of the moving unit. Conversely, it is also possible to convert xyz coordinates to probe coordinates.

  By calculating the probe coordinates of the object to be measured corresponding to the pixel positions 71 and 72 and converting them to xyz coordinates, the line connecting the two points and at least one of the two points pass through and are parallel to the x axis and the y axis. Find the angle between the surface. From this angle, an estimated amount for estimating the direction of the surface 21 of the object to be measured at the position where the line light 60 is irradiated can be obtained. A method of specifying the pixel position 70 of the image of the line light 60 by the position specifying unit 514 will be described later.

  In addition, when the image of the measurement light 601 is at the center of the image, a lookup table that uniquely determines the orientation of the surface 21 of the object to be measured based on the position of the image of the reference light 602 may be used. By using a look-up table, the measurement light can be obtained without obtaining the angle between the optical axis direction of the imaging optical system 121 and the direction in which the reflected light reflected by the DUT 20 enters the center of the imaging optical system 121. The direction of the surface 21 to be measured can be obtained from the position of the image 602. In addition to the determination based on the position of the reference light 602, the determination may be performed based on the interval between the position of the image of the measurement light 601 and the position of the image of the reference light 602. In this case as well, a look-up table that can uniquely determine the interval between the positions of the images of the measurement light 601 and the reference light 602 and the direction of the surface 21 to be measured may be used.

  Further, in the present embodiment, the line lights 60 are irradiated in parallel to each other so that the distance between the pixel positions of the line light image does not change according to the distance from the sensor unit 10 to the object 20 to be measured. In the case where irradiation is not performed in parallel, for example, the object to be measured 20 whose inclination is known can be measured while changing the distance from the sensor unit 10 to the object surface 21 and the lookup table can be calibrated. it can.

  A method for specifying one pixel indicating the position of the line light image will be described. As described above, the measurement accuracy is generally good at the center of the image sensor 123. Therefore, the shape measuring apparatus 100 according to the present embodiment uses the center in the longitudinal direction of the measurement light image 6011 as the pixel position 71 of the measurement light image, and the center in the longitudinal direction of the reference light image 6021 as the pixel of the reference light image. A position 72 is assumed. Here, the line light image spreads with a luminance distribution in the short direction perpendicular to the longitudinal direction. Therefore, in the present embodiment, the pixel position in the short direction can be specified as the pixel at the peak position of the luminance distribution in the short direction perpendicular to the long direction at the center position in the long direction of the line light image.

  Further, when the line light is interrupted in the middle, such as when the surface 21 to be measured has a complicated shape or a hole, the distance between the measurement light and the reference light images 6011 and 6021 is the shortest. Alternatively, the pixel positions 71 and 72 of the image of the measurement light and the reference light may be obtained. The pixel position in the short direction at this time may be obtained based on the luminance distribution in the short direction as described above.

  Further, when the object to be measured 20 has a complicated surface shape and only one of the measurement light 601 and the reference light 602 is obtained, an error may be generated.

  In addition, the pixel position 71 of the measurement light image 6011 and the pixel position 72 of the reference light image 6021 are specified by comparing an average position on the image by comparing pixels separated from each other in the longitudinal direction of the line light. You may ask. For example, as shown in FIG. 10, three pixels 71 ′, 71 ″, 72 ″ ″, 72 ′, 72 ″, 72 ″ ″ in the longitudinal direction of the line light are compared. For example, 71 ′, 71 ″, 72 ″ ′, 72 ′, 72 ″, 72 ′ ″ can be set by setting the central pixel in the longitudinal direction of the image 6011 of the measurement light as 71 ′ in the longitudinal direction. Pixels separated by a predetermined distance from the edge of the pixel are denoted by 71 ″ and 71 ′ ″. Next, a pixel passing through 71 ′ and a line extending in a direction perpendicular to the longitudinal direction of the measurement light image 6011 and the reference light image 6021 is defined as 72 ′. Similarly, the pixels where the perpendicular to the longitudinal direction of the measurement light image 6011 passing through 71 ″ and 71 ″ ″ and the reference light image 6021 intersect with each other are denoted by 72 ″ and 72 ″ ″. An average pixel position can be obtained based on the pixel positions of the three pixels 71 ′, 71 ″, 71 ′ ″, and can be used as the pixel position of the measurement light image 6011. The same applies to the pixel position of the reference light image 6021. If the two points 71 ′, 72 ′ ″, 72 ′, 72 ′ ″ other than the vicinity of the center of the line light in the longitudinal direction are photographed at positions away from the center of the image sensor 122, the error may increase. Therefore, it is preferable to adopt the inner pixel position from the end in the longitudinal direction of the line light toward the center in the longitudinal direction of the line light. For example, a pixel on the inside of about 20% of the length of the line light image can be employed. In this case, the pixel position in the short direction may be obtained based on the luminance distribution in the short direction as described above. Further, the present invention is not limited to the above, and a plurality of positions having a predetermined length from the end in the longitudinal direction of the line light 60 may be selected. By obtaining pixel positions representing the image of the line light 60 based on a plurality of positions in the longitudinal direction of the image of the line light 60, the line light 60 can be accurately bent even when the image of the line light 60 is bent or curved. A pixel position representing the image of the line light 60 can be selected. Further, one pixel position may be specified by specifying a pixel position for all the pixels in the longitudinal direction of the line light 60 and taking an average.

  Also, other methods for specifying the pixel position based on the luminance distribution in the short direction of the line light image can be used. First, the luminance values of the pixels forming the line light image are added in the longitudinal direction for each predetermined width in the lateral direction. The predetermined width corresponds to one pixel, for example. Then, the pixel position where the added value is maximum is set as the pixel position in the short direction.

  Next, driving amounts of the posture changing unit 30 and the moving unit 40 will be described. Based on the calculation result of the surface direction estimation unit 512, the drive amount calculation unit 513 calculates the drive amount of the posture changing unit 30 such that the sensor unit 10 has an appropriate posture with respect to the device under test 20. The appropriate posture is a posture in which regular reflection light or diffuse reflection light whose intensity of light incident on the image sensor 122 is outside the dynamic range of the image sensor does not enter. In addition, the posture changing unit 30 may be controlled so that the irradiation direction of the line light 60 and the region on the surface 21 to be measured irradiated with the line light 60 are perpendicular to each other. In this case, since the specularly reflected light travels in a direction closer to the illumination unit 11, it can be prevented from directly entering the image sensor 122. Hereinafter, an example of a control method in which the irradiation direction of the line light 60 and the region on the surface 21 of the measurement object irradiated with the line light 60 are perpendicular to each other will be described. First, one point representing each of the images of the measurement light 601 and the reference light 602 is determined, and probe coordinates corresponding to these points are calculated. Assuming a line connecting these coordinates, an angle formed with the irradiation direction of the line light 60 is obtained. Then, the driving amount of the posture changing unit 30 such that the angle becomes a right angle is obtained, and the posture changing unit 30 is driven. When selecting three representative points for the line light 60 as shown in FIG. 10, probe coordinates corresponding to the two outer points (71 ′ ″ or 72 ′, 72 ′ ″ in FIG. 71 ′) are set. The angle between the line connecting them and the irradiation direction of the line light 60 can be calculated, and the driving amount of the posture changing unit 30 at which this angle becomes a right angle can be determined. Thereby, it is possible to control the irradiation direction of the line light 60 and the surface 21 to be measured to be perpendicular to the inclination of the line light in the longitudinal direction. These control methods are merely examples, and other methods may be used as long as the control is performed so that the irradiation direction of the line light 60 and the region on the surface 21 of the measurement object irradiated with the line light 60 are perpendicular to each other. Good. Further, the driving of the posture changing unit 30 may change the direction of the surface 21 to be measured in the direction in which the line light 60 is scanned with respect to the device 20 to be measured, for example. That is, when the surface of the object to be measured is assumed to be a plane, the scanning direction may be the direction in which the line light 60 is scanned, and the direction perpendicular to the scanning direction in this plane may be rotated as an axis. The scanning direction may be the driving direction of the moving unit 40.

  The moving unit 40 is controlled by the drive amount calculation unit 513 so that the sensor unit 10 scans the DUT 20. At this time, the driving amount calculation unit 513 is configured such that the direction of the object surface 21 with respect to the sensor unit 10, that is, the angle formed by the direction of the optical axis direction of the illumination optical system and the direction of the object surface 21 is larger than a predetermined amount, You may make it judge the part by which angle changes are many and it is estimated that the to-be-measured object surface 21 is carrying out the complicated shape. In this case, control may be performed so that the scanning interval is further narrowed, and conversely, the angle formed by the optical axis direction of the illumination optical system and the direction of the surface 21 of the object to be measured is smaller than a predetermined amount, or the angle change When there are few, you may make it make a scanning interval wide. As a method for changing the scanning interval, for example, the scanning speed can be changed. It is also possible to change the interval of timing for acquiring images while keeping the scanning speed constant.

  When the moving unit 40 causes the sensor unit 10 to scan the measured object 20, the scanning direction of the sensor unit 10 relative to the measured object 20 is orthogonal to the longitudinal direction of the line light 60, and the reference light 602 is obtained from the measuring light 601. Can also be preceded. Thereby, when the position irradiated with the measurement light 601 is moved to the next position, the sensor unit 10 can be controlled to have an appropriate posture at the next measurement position. Therefore, the sensor unit 10 can be scanned while maintaining an appropriate posture with respect to the object 20 to be measured. Therefore, accurate shape measurement can be performed according to the surface shape.

  Further, when the sensor unit 10 is scanned at a constant speed while performing posture control, the measurement interval may not be constant at a place where the shape of the object surface 21 undergoes a sudden change. That is, by changing the posture of the sensor unit 10, the position where the line light 60 is irradiated is changed as compared with the case where the posture is not changed. Here, the measurement interval is an interval with respect to the scanning direction at a position where the three-dimensional coordinate point of the object to be measured 20 is acquired based on the image of the measurement light 601. The adjustment of the scanning interval can be performed by changing the scanning speed of the moving unit 40 or controlling the driving amount of the moving unit 40. Further, the measurement interval may be adjusted by changing the time interval of the timing for acquiring the image. The measurement interval may be adjusted so as to be constant with respect to the surface 21 of the object to be measured, or may be adjusted narrowly so that more coordinate points can be acquired in a place where the shape changes rapidly.

  Next, the flow of shape measurement by the shape measuring apparatus 100 of the present embodiment will be described with reference to the flowcharts of FIGS.

  First, the measurer fixes the object to be measured 20 to the posture changing unit 30. In step S <b> 101, when measurement is started by the measurer, the illumination unit 11 irradiates the measurement light 601 and the reference light 602 on the part to be measured of the measurement object 20.

  In step S <b> 102, the imaging unit 12 captures an image of the line light 60 on the surface 21 to be measured. At this time, the obtained image is sent to the calculation unit 51, the storage unit 53, and the control unit 53.

  The image captured in step S101 and sent to the calculation unit 51 is sent to the shape calculation unit 511, the position specifying unit 514, and the surface direction estimation unit 512. In step S103, the shape calculation unit 511 and the surface direction estimation unit 512 determine the measurement light image 6011 and the reference light image 6021 on the image. At this time, in the shape measuring apparatus 100 according to the present embodiment, the measurement light 601 and the reference light 602 are specified from the order in which the images are arranged.

  Further, as long as the measurement light 601 or the reference light 602 can be identified, the method is not limited to the above method, and either the measurement light 601 or the reference light 602 may be blinked for identification. In addition, the measurement light 601 and the reference light 602 may be irradiated with different wavelengths so that they can be identified, or the line light of each line light may be varied so as to be identifiable, and the object to be measured 20 may be irradiated. .

  Next, in step S <b> 104, the shape calculation unit 511 calculates the surface shape of the measurement object 20 irradiated with the measurement light 601. Specifically, the position of the measurement object surface 21 corresponding to each pixel position in the longitudinal direction of the measurement light image 6011 is calculated. Here, since each pixel position in the longitudinal direction has a light quantity distribution in the short direction perpendicular to the longitudinal direction, the pixel at the peak position of the light quantity distribution is specified, and the surface of the object to be measured 21 corresponding to this pixel position. The position of is calculated. The calculation result is sent to and stored in the storage unit 53.

  The shape calculation may be a method using a correspondence table that uniquely indicates the position of the object to be measured corresponding to the pixel position on the image.

  In step S105, the position specifying unit 514 obtains the pixel position 71 of the measurement light image and the pixel position 72 of the reference light image based on the image obtained in step S102. Then, the surface direction calculation unit 512 calculates the probe coordinates of the measurement object 20 corresponding to each pixel position by calculation, and calculates the direction of the measurement object surface 20 with respect to the sensor unit 10. Information on this direction is sent to the storage unit 52 and the drive amount calculation unit 513.

  In addition, after the position specifying unit 514 specifies the pixel position of each line light as described above, the direction of the DUT 20 can be obtained using the lookup table stored in the storage unit 52.

  In step S <b> 106, the drive amount calculation unit 513 is driven until it moves to the next measurement position so that the relative position of the sensor unit 10 with respect to the object 20 to be measured becomes appropriate at the next measurement position. The driving amount of the changing unit 30 is calculated. In addition, when the driving amount of the moving unit 40 is controlled to adjust the measurement interval, the driving amount of the moving unit 40 is obtained in advance.

  For example, the appropriate posture of the sensor unit 10 with respect to the device under test 20 is estimated such that the intensity of reflected light incident on the image sensor 122 at the next measurement position falls within the measurable intensity range of the image sensor 122. It is posture.

  In step S107, the mechanism control unit 522 drives each part of the posture changing unit 30 and the moving unit 40 based on the driving amount obtained in step S106 until the next photographing timing.

  Steps S <b> 102 to S <b> 107 are repeated until shape measurement of a desired region on the surface 21 to be measured is completed.

  In step 103, if the measurement light 601 and the reference light 602 cannot be discriminated, an error may be displayed to notify the measurer, and the posture changing unit 30, the moving unit 40, etc. are driven to a position where they can be discriminated. May be.

  In the shape measuring apparatus 100 according to the present embodiment, the posture of the sensor unit 10 with respect to the object surface 21 is incident on the imaging surface 122 based on information on the direction of the object 20 at the measurement position where the line light 60 is irradiated. Control is performed so that the intensity signals of the regular reflection light and the diffuse reflection light fall within the dynamic range of the image sensor 121. The posture of the sensor unit 10 with respect to the measured object surface 21 is assumed to be, for example, the optical axis direction of the illumination optical system 112 and the direction of the measured object surface, that is, the region irradiated with the line light 60 on the measured object 20. It is expressed in an amount corresponding to the angle formed by the direction of the normal line.

  FIG. 12 shows regular reflection light 81 and diffuse reflection light 82 and 83 of the line light 60 irradiated to the object 20 to be measured. The regular reflection light 81 is light reflected at an angle equal to the incident angle with respect to the normal 80 assumed on the surface of the object to be measured. Depending on the attitude of the sensor unit 10 with respect to the object surface 21 to be measured, the direction 81 in which the line light 60 is regularly reflected on the surface 20 to be measured and the optical axis direction of the illumination optical system 112 substantially coincide with each other. Diffuse reflected light 82 reflected at an angle close to the angle may enter the image sensor 121. In this case, the signal intensity of the specularly reflected light 81 and the diffusely reflected light 82 and 83 is strong and may not be within the dynamic range of the image sensor 121. When the optical axis direction of the imaging optical system is oriented away from the regular reflection direction 81 of the line light 60 (83), the signal intensity of the diffuse reflected light 83 incident on the imaging optical system is the lower limit of the dynamic range. May be weaker than

  Further, in the shape measuring apparatus 100 according to the present embodiment, the appropriate angle of the relative posture of the sensor unit 10 when the image used for calculating the coordinate position of the surface 21 to be measured is acquired. You may add the reliability evaluation information which shows whether it exists in the range to the pixel value or the shape data of the to-be-measured object 20. FIG. As a result, in a series of measurement operations, when a plurality of shape data at a predetermined position or a position in the vicinity thereof are obtained on the surface 21 to be measured, the value to which the best reliability evaluation information is added is It can be adopted as shape data at the position. Similarly, when a plurality of pixel values corresponding to a predetermined position on the object to be measured 20 and the vicinity thereof are obtained, a pixel value with high reliability is adopted.

  In addition, when it is determined that the posture of the sensor unit 10 with respect to the object 20 to be measured is not within an appropriate range, a setting may be made such that shooting is not performed.

  Moreover, in the shape measuring apparatus 100 according to the present embodiment, the case where both the measurement light 601 and the reference light 602 are line lights has been shown, but the reference light 602 may be point light. In this case, for example, the pixel position of the reference light 602 can be specified by the luminance distribution on the image, and the tilt information can be obtained.

  As described above, the shape measuring apparatus 100 according to the present embodiment estimates the inclination of the surface 21 to be measured with respect to the sensor unit 10 as inclination information based on the positions of the images of the measurement light 601 and the reference light 602, and this inclination. Based on the information, it is possible to control the posture of the sensor unit 10 at the next measurement position to be in an appropriate angle range.

  Further, in the present embodiment, the case where the sensor unit 10 is automatically moved by the posture changing unit and the moving unit has been described, but also in an arm type shape measuring device or a portable type shape measuring device having multiple joints. Can be implemented. The arm-type shape measuring device is a device in which a measurer can move relative to the object to be measured 20 with the sensor unit 10. Below, the case where this invention is applied to these shape measuring apparatuses is demonstrated.

  In an arm type shape measuring device or a portable type shape measuring device, a warning may be issued if the orientation of the sensor unit 10 with respect to the object to be measured 20 is not appropriate. Specifically, the output unit 55 generates a warning when the direction estimated from the calculation result of the surface direction estimation unit 512 is not within a predetermined range. The case where the direction of the sensor unit 10 with respect to the object to be measured 20 is not appropriate is assumed to be that the intensity of the reflected light reflected on the surface of the object to be measured 21 and incident on the image sensor 121 does not fall within the dynamic range of the image sensor 121. This is the case. In addition, by setting an inappropriate posture according to the measurement environment, device identification, or the like, a warning may be given when these inappropriate postures are obtained.

  The warning may be displayed on a monitor or the like, a warning lamp may be turned on, or the measurer may be notified by sound such as a buzzer. In accordance with the warning, the drive amount calculation unit 513 may calculate the drive amount of the sensor unit 10 so as to be in an appropriate posture with respect to the object to be measured 20, and notify the measurer by the output unit 55.

  FIG. 13 shows the configuration of the main part of the shape measuring apparatus when a warning is generated. The shape measuring apparatus 100 illustrated in FIG. 13 further includes a determination unit 515. The flow will be described with reference to FIG. First, steps S201 to S205 are the same as steps S101 to S105 in FIG.

  In step S <b> 206, the determination unit 515 refers to the calculation result of the surface direction estimation unit 512 and determines whether the relative posture of the sensor unit 10 with respect to the measurement target 20 is within a predetermined range.

  If the determination is appropriate (Yes), the process returns to step S202 to continue the shape measurement. If it is not appropriate (No), the driving amount calculation unit 513 refers to the calculation result of the surface direction estimation unit 512 in step 207 and calculates an appropriate driving amount.

  In step 208, the output unit 55 displays the calculation result of the drive amount calculation unit 513, returns to step 202, and repeats the flow.

  Further, the calculation by the shape calculation unit 511 and the operation of storing the shape data in the storage unit 53 in step S204 may be performed after the determination in S206. When shape calculation and shape data are stored after S206, shape measurement is performed if the determination result is appropriate (Yes), and when it is not appropriate (No), the drive amount calculation unit 513 in step S207 is performed without performing shape measurement. Then, the operation proceeds to step 208. In addition, the operation of storing the shape data in the storage unit 53 can be performed after S206. In this case, if the determination result is appropriate (Yes), step S206 'for performing a storing operation is provided, and then the process proceeds to step S202. If not (No), the process proceeds to step 207 without performing the storage operation.

  In addition, as described above, the imaging unit may shoot at a certain time, or a shooting button may be provided on the measurer's handle, etc., and shooting may be performed when the measurer presses the shoot button. good. Further, when it is determined that the posture of the sensor unit 10 with respect to the object 20 to be measured is not within an appropriate range, the photographing may not be performed. Further, instead of generating a warning according to the posture of the sensor unit 10 with respect to the object 20 to be measured, the amount of light emitted from the illumination unit 11 may be changed according to the posture. For example, when the posture is estimated to be incident at regular reflection light or light that travels at an angle close to that of regular reflection light, the amount of light is reduced, and the posture at which light at an angle away from the angle at which regular reflection light travels is estimated to be incident. In some cases, the amount of light may be increased. Thereby, the amount of light can be controlled so as to be within the dynamic range of the imaging unit 12.

  Thus, based on the position of each image of the measurement light 601 and the reference light 602, the direction of the surface of the object to be measured 21 with respect to the sensor unit 10 is obtained. When this direction is not within an appropriate range, a warning is given to the measurer. Notification can guide the appropriate way of travel. This makes it possible to realize accurate shape measurement that does not depend on the shape of the surface.

  Further, according to the output of the surface direction estimation unit 512, evaluation may be added to each of the shape data of the DUT 20 obtained by the shape calculation unit 511. Specifically, if the attitude of the sensor unit 10 with respect to the measured object 20 obtained when the shape data is acquired is within a predetermined range, a high reliability evaluation value is added to the shape data, and outside the predetermined range. If so, a low reliability evaluation value can be added. Since the range of the appropriate posture of the sensor unit 10 depends on the device configuration of the sensor unit 10 or the like, the evaluation criteria for the reliability evaluation value may be determined based on these device configurations. In addition, in order to reduce the influence of specular reflection light, it is possible to make a judgment by giving a binary evaluation between an attitude in which specular reflection light is estimated to be incident and an attitude in which specular reflection light is not incident. good. By adding the reliability evaluation value, since the attitude of the sensor unit 10 is not appropriate, the measurement accuracy is lowered due to the fact that the peak position of the intensity of the line light reflected by the object to be measured 20 cannot be obtained accurately. It is possible to identify shape data that may be lost.

  Further, when a plurality of pieces of shape data at a predetermined position of the object to be measured are acquired including the vicinity thereof, the shape data having a high reliability evaluation value can be employed to obtain the shape of the object to be measured. Further, a place where shape data having a high reliability evaluation value is not sufficiently obtained may be specified and output to the output unit 55 to prompt the measurer to perform further measurement.

  FIG. 15 shows a main configuration of the shape measuring apparatus 100 to which the reliability evaluation value is added. The shape measuring apparatus 100 in FIG. 15 further includes a reliability evaluation unit 516. The flow will be described with reference to FIG.

  Steps S301 to S305 in FIG. 16 correspond to S101 to S105 in FIG.

  In step S306, the reliability evaluation unit 516 provided in the control unit 50 refers to the output of the surface direction estimation unit in step S305, and calculates a reliability evaluation value based on the orientation of the object 20 to be measured with respect to the sensor unit 10. To do. The arithmetic control unit 521 stores the shape data obtained in step S304 and the reliability evaluation value in the storage unit 35 in association with each other.

  The reliability evaluation value is, for example, high in the reliability evaluation of shape data output to a pixel on which reflected light traveling in a direction estimated to be within the dynamic range of the image sensor 121 is incident. The reliability evaluation of diffuse reflected light traveling in a direction estimated to be out of the dynamic range of the element 121 is lowered.

  Returning to step S302, the same flow is repeated until the shape measurement of the desired region of the surface 21 to be measured is completed. Here, whether or not to end the shape measurement may be determined by whether or not a certain number or more of shape data has been acquired per predetermined area of the region where the shape measurement is desired, and the reliability evaluation value is a certain value or more. The determination may be made based on whether or not a certain number of data is obtained per predetermined area.

  After a series of measurements is completed, in step S307, the selection unit 91 has the highest reliability evaluation when a plurality of pixel values corresponding to the same or nearby positions on the device under test 20 are obtained. The coordinate value of the object to be measured 20 obtained by the above is adopted as shape data.

  As described above, the shape measuring apparatus 100 according to the present embodiment performs reliability evaluation according to information on the attitude of the sensor unit 10 calculated based on the positions of the images of the measurement light 601 and the reference light 602, and performs appropriate evaluation. By providing a configuration in which the pixel value of the reflected light image incident at an angle can be selected, accurate shape measurement according to the shape of the surface can be performed.

  In each of the above-described embodiments, the shape measuring device has been described. However, a posture control device that does not include the shape calculating unit 511 may be used.

  FIG. 17 is a diagram illustrating an example of a structure manufacturing system 200 including the shape measuring apparatus 100 described above. FIG. 18 is a flowchart showing the flow of processing by the structure manufacturing system. The structure manufacturing system 200 includes a design device 240, a molding device 250, a shape measuring device 100, and a repair device 260. The control device 210 includes a coordinate storage unit 220 and an inspection unit 230. The communication unit 56 of the shape measuring apparatus 100 communicates with various devices such as the repair device 260. First, the design device 240 creates design information related to the shape of the structure and sends it to the molding device 250 (step S401). In addition, the design device 240 stores design information in the coordinate storage unit 220. The design information includes coordinate information of the structure. Next, the molding apparatus 250 produces the structure described above based on the design information (step S402). Next, the shape measuring apparatus 100 measures coordinates related to the shape of the structure and stores them in the coordinate storage unit 220 (step S403). Next, the inspection unit 230 of the control device 210 compares the coordinate information of the shape of the structure created from the shape measuring device 100 with the design information described above, so that whether or not the structure is created according to the design information. (Step S404).

  Next, the inspection unit 230 of the control device 210 determines whether or not the created structure is a non-defective product (step S405). If the created structure is a non-defective product (step S405, YES), the structure manufacturing system 200 ends the process. When the created structure is not a non-defective product (step S405, NO), the inspection unit 230 of the control device 210 determines whether the created structure can be repaired (step S406). When the manufactured structure can be repaired (step S406, YES), the repair device 260 performs reworking of the structure (step S407), and returns to the process of step S403. When the manufactured structure cannot be repaired (step S406, NO), the structure manufacturing system 200 ends the process. Above, the process of this flowchart is complete | finished.

  In this embodiment, after acquiring an image, shape calculation is performed using the image. However, the present invention is not limited to this, and image acquisition and shape calculation may be performed in parallel in different flows, and all images are stored. The shape calculation may be performed after the acquisition.

  In this embodiment, the direction of the surface 21 to be measured is examined based on the representative position of the line light 60. However, the shape calculation is performed with the line light 60 of the measurement light 601 and the reference light 602, and the calculation result is based on the calculation result. Alternatively, the orientation of the surface 21 to be measured may be estimated. In this case, the direction may be estimated by obtaining the average coordinate position of the three-dimensional coordinates corresponding to each pixel in the longitudinal direction of the line light 60.

  In the present embodiment, the posture changing unit 30 supports the object to be measured 20 and is provided on the surface plate 31, but is not limited thereto, for example, the driving configuration of the sensor unit 10, The relative posture may be changed by changing the orientation of the sensor unit 10. For example, the sensor unit 10 may rotate around a direction parallel to the longitudinal direction of the line light 60 to change the relative posture.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to this, A part of structure may not be used. Moreover, each structure can also be combined.

100 ... shape measuring device,
10 ... sensor part,
11 ... Illumination part,
111 ... light source,
112 ... illumination optical system,
113 ... Half mirror,
114 ... mirror,
115 ... Cylindrical lens,
12 ... Imaging unit,
121 ... Imaging optical system,
122... Image sensor,
123 ... imaging surface,
20 ... object to be measured,
20 ... surface of the object to be measured,
30 ... posture change part,
31 ... surface plate,
32 ... support stand,
33. First rotation drive unit,
331 ... the rotation axis of the first rotation drive unit,
34 ... Second rotation drive unit,
341 ... Rotational axis of the second rotational drive unit,
40 ... moving part,
41 ... Gate frame,
411 ... leg,
412: Beam part,
42 ... rotating part,
43. Head part,
44 ... Horizontal moving part,
50 ... Control unit,
51. Calculation unit,
511 ... shape calculation unit,
512 ... surface direction estimation unit,
513 ... Drive amount calculation unit,
514 ... Position specifying unit 515 ... Determination unit 516 ... Reliability evaluation unit 52 ... Control unit,
521 ... Calculation control unit,
512 ... mechanism control unit,
53. Storage unit,
60 ... line light,
601 ... Measurement light,
6011: Image of measurement light,
602: Reference light,
6021 ... Reference light image,
61 ... Central ray,
62 ... the end of the beam,
200 ... structure manufacturing system,
210 ... control device,
220 ... coordinate storage unit,
230 ... inspection section,
240 ... design equipment,
250 ... molding apparatus,
260 ... Repair device

Claims (14)

An illumination unit that irradiates a plurality of lights to different positions on the surface of the object to be measured by an illumination optical system;
An imaging unit that captures an image of the measurement object irradiated with the plurality of lights using an imaging optical system in a direction different from an irradiation direction;
A control unit that transmits a control signal for controlling the relative orientation of the object to be measured with respect to the illumination unit or the imaging unit based on the positions of the plurality of light images in the image captured by the imaging unit. When,
A shape measuring device comprising: a shape calculating unit that calculates shape data corresponding to the shape of the surface of the object to be measured irradiated with at least one of the plurality of lights.   The shape measuring apparatus according to claim 1, further comprising a posture changing unit that changes the relative direction based on a control signal from a previous control unit.   3. The control unit according to claim 2, wherein the control unit transmits the control signal to the posture changing unit so that an amount of light incident on a predetermined area of the imaging unit falls within a predetermined range during one shooting. The shape measuring apparatus described.   The said attitude | position change part changes the said relative direction so that the said irradiation direction and the area | region where the said several light of the to-be-measured object surface is irradiated become this perpendicular | vertical. Shape measuring device.   3. The scanning device according to claim 1, further comprising: a scanning unit that scans the surface of the object to be measured with the plurality of lights, wherein the posture changing unit changes the relative direction of the object to be measured in the scanning direction of the plurality of lights. Or the shape measuring apparatus of 3.   The shape measuring apparatus according to claim 1, wherein the control unit includes a position specifying unit that specifies positions of images of the plurality of lights in the image captured by the imaging unit. .   The shape measuring apparatus according to claim 6, wherein the first-stage control unit includes a surface direction estimation unit that estimates the relative direction based on the positions of the images of the plurality of lights specified by the position specifying unit. .   The imaging unit includes a plurality of pixels, and the control unit determines that the amount of light incident on each pixel of the imaging unit is within a predetermined range based on the relative direction obtained by the surface direction estimation unit. The shape measuring apparatus according to claim 7, further comprising a driving amount calculation unit that calculates a driving amount of the posture changing unit that can be accommodated. When at least one of the plurality of lights is line light,
The shape measuring device according to any one of claims 6 to 8, wherein the position specifying unit specifies the position of the image based on a position of an approximate center in the longitudinal direction of the image of the line light in the image. An illumination unit that irradiates a plurality of lights to different positions on the surface of the object to be measured by an illumination optical system;
An imaging unit that captures an image of the measurement object irradiated with the plurality of lights using an imaging optical system in a direction different from an irradiation direction;
A detection unit that detects an estimated amount of a relative orientation of the object to be measured with respect to the illumination unit or the imaging unit, based on the position of each of the plurality of light images in the image captured by the imaging unit;
A posture generating device that generates a warning when the estimated amount is not within a predetermined range. The attitude control device according to claim 10;
A shape measuring device comprising: a shape calculating unit that calculates shape data corresponding to the shape of the surface of the object to be measured irradiated with at least one of the plurality of lights.   The shape measuring apparatus according to claim 1, further comprising: a reliability evaluating unit that evaluates the reliability of the shape data based on the estimated amount. A molding apparatus for molding a structure based on design information;
The shape measuring device according to any one of claims 1 to 9, 11 and 12, which measures the shape of the structure formed by the forming device,
A structure manufacturing device comprising: a control device that compares shape data of the structure measured by the shape measuring device with the design information; and a repair device that repairs the structure based on a comparison result of the control device. system.   The illumination unit emits a plurality of lights to different positions on the surface of the object to be measured by the illumination optical system, and the imaging unit has an image of the object to be measured that is irradiated with the plurality of lights in a direction different from the irradiation direction. Relative of the object to be measured with respect to the illumination unit or the imaging unit based on the position of each of the plurality of light images in the image captured by the control unit by the imaging unit. A shape measurement method for generating a detection signal for detecting a proper direction, and for calculating a shape of the surface of the object to be measured on which the shape calculation unit is irradiated with at least one of the plurality of lights.

Images