JP2015117993A - Three-dimensional measurement system, three-dimensional measurement method, and measurement object body, and position detection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a three-dimensional measurement system capable of detecting a position of a measurement object body with high accuracy.SOLUTION: A three-dimensional measurement system 1 includes a probe 2 having first to ninth infrared LEDs 261 to 269 disposed thereon, and an imaging apparatus 5 and an arithmetic control unit 6 which detect a position of the probe 2. The imaging apparatus 5 condenses light from the first to ninth infrared LEDs 261 to 269 onto X and Y axes and detects first and second brightness distributions on the X and Y axes. The arithmetic control unit 6 calculates position information on the probe 2 on the basis of the first and second brightness distributions. The probe 2 includes: a three-axis geomagnetic sensor 29; a first attitude calculation unit 333 for calculating first attitude information on the probe 2 on the basis of detection results of the three-axis geomagnetic sensor 29; and a first confrontation determination unit 334 which determines whether the probe 2 confronts the imaging apparatus 5 or not on the basis of first reference attitude information indicative of an attitude in which the probe 2 confronts the imaging apparatus 5, and the first attitude information.

Description

  The present invention relates to a three-dimensional measurement system, a three-dimensional measurement method, an object to be measured, and a position detection device.

Conventionally, a configuration for measuring the three-dimensional coordinates of an object to be measured is known (see, for example, Patent Document 1).
Patent Document 1 discloses a position measuring device that measures a three-dimensional coordinate of a probe device using a probe device having a contact as an object to be measured.
The probe device includes three light emitting points that are spaced apart from each other in a predetermined relative positional relationship, and contacts that are disposed in a predetermined relative positional relationship with respect to the three light emitting points. With such a configuration, the three-dimensional coordinates of the contact can be measured by measuring the positions of the three light emitting points.
The position measuring device includes three imaging devices arranged along the horizontal direction. Of the three imaging devices, the CCD elements provided in the imaging devices at both ends have a linear imaging range along the horizontal direction. The CCD element provided in the intermediate imaging device has a linear imaging range along the vertical direction.

When measuring the three-dimensional coordinates of the probe device, first, one of the three light emitting points is caused to emit light. Then, the imaging devices at both ends capture the light emission, and the position measurement device obtains the coordinates of the light emitting point on the horizontal plane based on the imaging result. Further, this light emission is imaged by the imaging devices at both ends, and the position measuring device obtains the vertical coordinates of the light emitting point based on the imaging result. Thereafter, the position measuring device obtains the three-dimensional coordinates of one light emitting point based on the imaging results of the three imaging devices. Further, the imaging device and the position measurement device perform the same process for the remaining two light emitting points, and obtain the three-dimensional coordinates of all the light emitting points. And a position measuring device calculates | requires the three-dimensional coordinate of a probe apparatus based on the three-dimensional coordinate of three light emission points.
The three-dimensional coordinates of the probe device thus obtained are used as data for moving the probe device to a desired position and posture when a drive device for adjusting the position and posture of the probe device is provided.

JP 2013-68541 A

By the way, in order to accurately measure the position of the probe device, it is desirable that the probe device is directly opposed to the imaging device. When the probe device is not directly facing the imaging device, in particular, when the probe device is tilted in the front-rear direction with respect to the imaging device, the light intensity distribution of the light emitting points imaged by the imaging device is distorted, and the probe device This is because the position information has a large error. However, in the configuration as described in Patent Document 1, since the measurer holds and moves the probe device, it is difficult to accurately face the probe device to the imaging device. Therefore, it is conceivable that the probe device faces the imaging device based on the posture of the probe device obtained from the three-dimensional coordinates.
However, since the posture of the probe device is detected based on the imaging result of the light emitting point, the detection accuracy is limited. In particular, the detection accuracy of the posture in the front-rear direction with respect to the imaging apparatus is not good due to the measurement principle. For this reason, even if the probe device is directly opposed to the imaging device based on the detection result of the posture, the probe device is actually inclined in the front-rear direction from the state of being directly opposed to the imaging device, and the position of the probe device is It may not be possible to measure accurately.

  An object of the present invention is to provide a three-dimensional measurement system, a three-dimensional measurement method, a measurement object, and a position detection device that can accurately detect the position of the measurement object.

  In the three-dimensional measurement system of the present invention, three or more measurement light sources spaced apart from each other are arranged, a measurement object movable to an arbitrary position, light from the measurement light source is received, and the measurement object A position detection device for detecting the position of the measurement object, wherein the measured object includes a posture sensor for detecting the posture of the measured object, and the position detection device includes an imaging device, A pair of first optical systems that are provided apart from each other and that collect light from the measurement light source on a first axis, and the pair of first optical systems. A pair of first line sensors for receiving the light collected on the first axis and detecting a first luminance distribution on the first axis; and the light from the measurement light source as the first axis A second optical system that focuses light on a second axis perpendicular to each other, and the second optical system. A second line sensor that receives light collected on the second axis and detects a second luminance distribution on the second axis, wherein the arithmetic and control unit includes the first luminance distribution and the first luminance distribution. A position calculating unit that calculates position information indicating the position of the measured object based on two luminance distributions, and at least one of the measured object and the calculation control device is based on a detection result of the posture sensor; A posture calculation unit that calculates posture information representing a posture of the measurement object with respect to the imaging device, and at least one of the measurement object and the calculation control device is configured so that the measurement object is relative to the imaging device. A confrontation determination unit that determines whether or not the object to be measured is facing the imaging device based on reference posture information representing a facing posture and the posture information calculated by the posture calculation unit. Characterized in that it comprises.

  In the three-dimensional measurement method of the present invention, three or more measurement light sources spaced from each other are arranged, a measurement object that can be moved to an arbitrary position, light from the measurement light source, and the measurement object A position detection device that detects the position of the object, wherein the object to be measured is provided with a posture sensor that detects the posture of the object to be measured, and the position detection device is an imaging device, A pair of first optical systems configured to be separated from each other and focused on the first axis, and the pair of first optics. A pair of first line sensors for receiving light collected on the first axis by the system and detecting a first luminance distribution on the first axis; and light from the measurement light source for the first axis. A second optical system for focusing on a second axis orthogonal to the second optical system, and the second optical system A step of receiving light collected on two axes and detecting a second luminance distribution on the second axis, wherein the three or more measurement light sources emit light one by one; The posture sensor detecting the posture of the object to be measured during the light emitting step, and the first line sensor and the second line sensor receive light from the measurement light source. Detecting the first luminance distribution and the second luminance distribution, and the arithmetic and control unit, based on the first luminance distribution and the second luminance distribution, position information representing the position of the object to be measured. And calculating at least one of the object to be measured and the calculation control device based on a detection result of the posture sensor, and calculating posture information representing the posture of the object to be measured with respect to the imaging device. Measuring body And at least one of the arithmetic and control devices, based on the reference posture information indicating the posture of the object to be measured facing the image pickup device and the posture information, and the object to be measured with respect to the image pickup device And determining whether or not the two are facing each other.

According to such a configuration, the first and second line sensors of the imaging apparatus receive the light from the measurement light source of the measurement object and detect the first and second luminance distributions. Then, the calculation control device calculates the position information of the measured object based on the first and second luminance distributions. On the other hand, during the execution of the process in which the measurement light source emits light, the posture sensor of the measured object detects the posture of the measured object. At least one of the measured object and the calculation control device calculates posture information based on the detection result in the posture sensor, and at least one of the measured object and the calculation control device uses the posture information and the reference posture information. Based on this, it is determined whether or not the measured object is facing the imaging apparatus.
As described above, since the posture of the object to be measured is directly detected by the posture sensor, as compared with the configuration in which the posture is detected based on the light reception result in the imaging device as described in Patent Document 1, the front-rear direction with respect to the imaging device It is possible to improve the accuracy of posture detection. Therefore, it can be determined with high accuracy whether or not the object to be measured is facing the imaging apparatus, and the position of the object to be measured can be detected with high accuracy.

  In the three-dimensional measurement system of the present invention, the measured object includes a motion sensor that detects the movement of the measured object, and the position calculation unit is configured to detect the first line sensor based on a detection result of the motion sensor. When it is determined that the measured object is moving between the start and end of light reception in the second line sensor, it is determined that the measured object is not moving without calculating the position information. In this case, it is preferable to calculate the position information.

Here, if the object to be measured moves between the start and end of light reception in the first and second line sensors, that is, during acquisition of information used for calculating position information, appropriate first and second luminances are obtained. The distribution cannot be detected, and the position information of the measured object cannot be accurately calculated.
According to such a configuration, since the position information is calculated only when the measured object is not moving between the start and end of light reception in the first and second line sensors, appropriate first and second luminances are obtained. Based on the distribution, the position of the measurement object can be accurately detected.

  In the three-dimensional measurement system of the present invention, the position calculation unit validates the position information when the facing determination unit determines that the measured object is facing the imaging apparatus, and When it is determined that they are not facing each other, it is preferable to invalidate the position information.

  According to such a configuration, since the position information is valid only when measurement is possible with high accuracy, the reliability of the position detection result of the measured object can be improved.

  In the three-dimensional measurement system according to the present invention, it is preferable that at least one of the measured object and the arithmetic and control unit includes a determination result notifying unit that notifies a determination result of the confrontation determining unit.

  According to such a configuration, by notifying the determination result, the measurer can recognize whether or not the measured object is directly facing the imaging apparatus, and whether the position detection result of the measured object is accurate. It can be easily judged whether or not. In addition, the measurer can correct the posture of the measurement object so that the measurement object faces the imaging apparatus.

  In the three-dimensional measurement system of the present invention, the object to be measured is a probe that can move to an arbitrary position, and the probe is integrated with a probe main body including the measurement light source and the posture sensor. And a stylus having a contact that contacts the workpiece at the tip, and the position calculation unit is based on an arrangement position of the contact with respect to the measurement light source, the first luminance distribution, and the second luminance distribution. It is preferable to calculate the position information of the contact.

  According to such a configuration, since the measurement light source is attached to the probe having the contact at the tip, if the contact of the probe is brought into contact with the measurement site of the workpiece, the measurement site of the workpiece contacted by the contact Can be measured accurately.

  In the three-dimensional measurement system of the present invention, the object to be measured is a probe movable to an arbitrary position, and the probe is provided on the probe body including the measurement light source and the posture sensor, and the probe body. And a non-contact position detector capable of detecting the irradiation position of the light, and the position calculating unit includes the irradiation position of the light detected by the non-contact position detector, the first luminance distribution, and It is preferable to calculate position information representing an irradiation position of the light based on the second luminance distribution.

  According to such a configuration, since the measurement point light source is attached to the probe incorporating the non-contact position detector, the light from the non-contact position detector is measured on the work without contacting the probe to the work. If it irradiates toward a site | part, the measurement site | part of the workpiece | work irradiated with light can be measured correctly.

  The measurement object according to the present invention includes three or more measurement light sources spaced apart from each other, receives the light from the measurement light source that is movable to an arbitrary position, and the measurement object. An object to be measured that is used in a three-dimensional measurement system including a position detection device that detects a position, based on an attitude sensor that detects the attitude of the object to be measured, and a detection result of the attitude in the attitude sensor A posture calculation unit that calculates posture information representing the posture of the measured object with respect to the imaging device that constitutes the position detection device, and a reference posture that represents the posture of the measured object facing the imaging device And a face-to-face determination unit that determines whether or not the object to be measured is facing the imaging apparatus based on the information and the posture information calculated by the posture calculation unit. To do.

  In the position detection device of the present invention, three or more measurement light sources spaced apart from each other are arranged, a measurement object movable to an arbitrary position, light from the measurement light source is received, and the measurement object The position detection device used in a three-dimensional measurement system including a position detection device for detecting a position, comprising: an image pickup device and an arithmetic control device, wherein the image pickup devices are provided apart from each other, A pair of first optical systems for condensing light from the measurement light source on the first axis, and light collected on the first axis by the pair of first optical systems is received, and the first axis A pair of first line sensors for detecting the first luminance distribution above, a second optical system for condensing light from the measurement light source on a second axis orthogonal to the first axis, and the second optical Receiving light collected on the second axis by the system, and And a second line sensor for detecting a luminance distribution, wherein the calculation control device calculates position information representing the position of the object to be measured based on the first luminance distribution and the second luminance distribution. The position calculation unit validates the position information when determining that the measured object is facing the imaging apparatus based on a facing signal transmitted from the measured object. The position information is invalidated when it is determined that the person does not face the person.

  According to such a configuration, it is possible to provide an object to be measured and a position detection device suitable for the above-described three-dimensional measurement system.

The perspective view which shows the three-dimensional measuring system which concerns on one Embodiment of this invention. The perspective view which shows the probe which comprises the said three-dimensional measurement system. The block diagram which shows the said three-dimensional measurement system. The perspective view which shows the principal part of the detection part which comprises the said three-dimensional measurement system. The flowchart which shows the workpiece | work measurement process using the said three-dimensional measurement system. The flowchart which shows the said workpiece | work measurement process. The figure which shows the pulse signal transmitted from the arithmetic and control unit in the said workpiece | work measurement process. The perspective view which shows the probe which concerns on the modification of this invention.

<Configuration of 3D measurement system>
As shown in FIG. 1, the three-dimensional measurement system 1 of the present embodiment includes a probe 2 as a measurement object and a position detection device 4. The position detection device 4 includes an imaging device 5, an arithmetic control device 6, and a display device 7.

As shown in FIG. 2, the probe 2 includes a probe main body 21 that can be moved to an arbitrary position by a measurer, and a stylus 27 that is provided integrally with the probe main body 21.
The probe main body 21 has two arms 22 and 23 that are joined at one end, bent in an arcuate shape so that the other end is gradually separated and then joined again, and is configured so that a measurer can hold it with both hands. Further, on the front surface of the probe main body 21, three first light sources as measurement light sources are provided on one end coupling portion 24 of the arms 22 and 23 and both side portions sandwiching the other end coupling portion 25 of the arms 22 and 23. Third infrared LEDs (light emitting diodes) 261 to 263, fourth to sixth infrared LEDs 264 to 266, and seventh to ninth infrared LEDs 267 to 269 are arranged, respectively. That is, a total of nine first to ninth infrared LEDs 261 to 269 are arranged in the probe main body 21.
The stylus 27 is provided so as to protrude from the other end coupling portion 25 of the arms 22 and 23 of the probe main body 21 to the opposite side of the one end coupling portion 24 and has a spherical contact 28 at the tip. Thus, since the 1st-9th infrared LED261-269 and the contact 28 are arrange | positioned by the predetermined positional relationship with respect to the probe main body 21, the coordinate of 1st-9th infrared LED261-269 is set. By obtaining, the coordinates of the contact 28 can be obtained from these coordinates.

  2 and 3, the probe 2 includes a triaxial geomagnetic sensor 29 as a posture sensor, a triaxial acceleration sensor 30 as a motion sensor, a determination result notification unit 31, and a probe storage unit 32. The probe control unit 33 is provided.

The triaxial geomagnetic sensor 29 and the triaxial acceleration sensor 30 are provided inside the one end coupling portion 24 in the probe main body 21. The triaxial geomagnetic sensor 29 and the triaxial acceleration sensor 30 may be provided at any position as long as they are provided integrally with the probe 2. Further, the number of the triaxial geomagnetic sensor 29 and the triaxial acceleration sensor 30 may be one or plural.
The triaxial geomagnetic sensor 29 detects the magnitude and direction of geomagnetism under the control of the probe control unit 33, and outputs the detection result to the probe control unit 33.
The triaxial acceleration sensor 30 detects the magnitude and direction of the acceleration of the probe 2 under the control of the probe control unit 33 and outputs the detection result to the probe control unit 33.

  The determination result notification unit 31 includes a facing LED 311 and a non-facing LED 312. The directly-facing LED 311 and the non-facing LED 312 are respectively formed of a green LED and a red LED, and are provided so as to be exposed from the upper surface of the one end coupling portion 24 in the probe main body 21. The facing LED 311 is turned on under the control of the probe control unit 33 when the probe 2 is facing the imaging device 5. The non-facing LED 312 is turned on under the control of the probe control unit 33 when the probe 2 is not facing the imaging apparatus 5.

  The “state in which the probe 2 is directly facing the imaging device 5” refers to a reference plane (for example, a surface on which the detection units 531 to 533 are exposed) in a case 52 described later of the imaging device 5. The opposed surfaces of the probe main body 21 of the probe 2 (for example, the surface from which the first to ninth infrared LEDs 261 to 269 are exposed) may be in parallel, or the three-dimensional coordinates of the contact 28 may be calculated. It may be tilted to the extent that it does not affect In other words, there may be no difference between a posture (orientation) represented by first and second posture information described later and a posture (orientation) represented by the first and second reference posture information, and the difference is allowable. The state may be within the range.

The probe control unit 33 is configured by processing a program and data stored in the probe storage unit 32 by a CPU (Central Processing Unit). The probe control unit 33 includes a lighting control unit 331, an abnormality determination unit 332, a first posture calculation unit 333 as a posture calculation unit, and a first face-to-face determination unit 334 as a face-to-face determination unit.
The lighting control unit 331 sequentially turns on the first to ninth infrared LEDs 261 to 269 in synchronization with the pulse signal transmitted from the arithmetic control device 6.
The abnormality determination unit 332 acquires detection results from the triaxial geomagnetic sensor 29 and the triaxial acceleration sensor 30. If the abnormality determination unit 332 determines that the detection result of at least one of the triaxial geomagnetic sensor 29 and the triaxial acceleration sensor 30 is abnormal, the abnormality determination unit 332 transmits an abnormality signal to the arithmetic control device 6.

  The first posture calculation unit 333 calculates first posture information as posture information representing the posture of the probe 2 with respect to the imaging device 5 based on the detection result of the triaxial geomagnetic sensor 29. In addition, as 1st attitude | position information, the information showing the direction of the opposing surface (for example, surface where the 1st-9th infrared LED261-269 is exposed) with respect to the imaging device 5 in the probe main body 21 can be illustrated. Then, when the first reference posture information is not stored in the probe storage unit 32, the first posture calculation unit 333 stores the first posture information in the probe storage unit 32 as the first reference posture information as the reference posture information. .

  Based on the orientation represented by the first orientation information calculated by the first orientation computation unit 333 and the orientation represented by the first reference orientation information stored in the probe storage unit 32, the first facing determination unit 334 performs imaging. It is determined whether or not the probe 2 is facing the device 5. Then, the first facing determination unit 334 controls the determination result notification unit 31 based on the determination result, and transmits a signal representing the determination result to the arithmetic control device 6.

As shown in FIGS. 1 and 3, the imaging device 5 includes a tripod 51, a horizontally long box-like case 52 supported substantially horizontally by the tripod 51, three detectors 531, 532, 533, a frame grabber 57 and an imaging control unit 58.
As shown in FIG. 4, the three detection units 531, 532, and 533 are arranged at three locations on the front surface of the case 52, that is, at the left and right and the center. The detection units 531 to 533 receive the light collected by the cylindrical lenses 541 to 543 and the cylindrical lenses 541 to 543 that collect the light incident from the light collection region 59 on one axis, and receive the light collected on the one axis. Line sensors 551 to 553 that output luminance distribution signals representing the luminance distribution, and shutters 561 to 563 that control the incidence of light to the cylindrical lenses 541 to 543 are provided. The line sensors 551 to 553 have a configuration in which, for example, CCDs (Charge Coupled Devices) are arranged in a line.

Here, in the detection units 531 and 533, the line sensors 551 and 553 constitute a first line sensor that is spaced apart from each other. The line sensors 551 and 553 are arranged orthogonal to the Y axis orthogonal to the X axis (first axis) of the light condensing region 59 and inclined slightly inward with respect to the X axis.
Cylindrical lenses 541 and 543 constitute a first optical system. Cylindrical lenses 541 and 543 are arranged orthogonal to the line sensors 551 and 553 (parallel to the Y axis) at substantially the center positions of the line sensors 551 and 553. In other words, the detection units 531 and 533 are arranged to be inclined inward so that the direction thereof slightly faces the central detection unit 532 side. Thereby, the light incident from the light condensing region 59 is detected as the first luminance distribution on the X axis by the line sensors 551 and 553.
In the detection unit 532, the line sensor 552 constitutes a second line sensor. The line sensor 552 is disposed in parallel with the Y axis of the light collection region 59.
The cylindrical lens 542 constitutes a second optical system. The cylindrical lens 542 is disposed at a substantially central position of the line sensor 552 and orthogonal to the line sensor 552 (parallel to the X axis). Thereby, the light incident from the light collection region 59 is detected by the line sensor 552 as the second luminance distribution on the Y axis.
The shutters 561 to 563 are provided on the side opposite to the line sensors 551 to 553 with respect to the cylindrical lenses 541 to 543.
The frame grabber 57 acquires a light intensity profile (X axis: pixel, Y axis: light intensity) from the CCD element.

  The imaging control unit 58 is configured by the CPU processing a program and data stored in a storage unit (not shown). The imaging control unit 58 controls opening and closing of the shutters 561 to 563 of the detection units 531 to 533 in synchronization with the pulse signal transmitted from the arithmetic control device 6. Then, the imaging control unit 58 takes in images from the line sensors 551 to 553 in which the shutters 561 to 563 are opened via the frame grabber 57 and transmits the images as luminance distribution signals to the arithmetic control device 6.

The arithmetic control device 6 includes an arithmetic storage unit 61 and an arithmetic control unit 62.
The calculation control unit 62 is configured by the CPU processing the program and data stored in the calculation storage unit 61. The calculation control unit 62 includes a timing control unit 621, a second attitude calculation unit 622, a second directly facing determination unit 623, and a position calculation unit 624.

  The timing control unit 621 transmits pulse signals for sequentially turning on the first to ninth infrared LEDs 261 to 269 of the probe 2, and at the same time, synchronizes with the pulse signals of the line sensors 551 to 553. A pulse signal for controlling the incorporation of the luminance distribution signal is transmitted.

The second posture calculation unit 622 calculates second posture information representing the posture of the probe 2 based on the luminance distribution signal from the imaging device 5. Specifically, the 2nd attitude | position calculating part 622 calculates the three-dimensional coordinate of 1st-9th infrared LED261-269 using a triangulation method. In addition, the three-dimensional coordinate of each 1st-9th infrared LED261-269 can be calculated | required by the well-known method disclosed by Unexamined-Japanese-Patent No. 2005-233759. And the 2nd attitude | position calculating part 622 calculates 2nd attitude | position information based on the three-dimensional coordinate of 1st-9th infrared LED261-269 obtained by this calculation. For example, the second attitude calculation unit 622 averages the three-dimensional coordinates of the first to third infrared LEDs 261 to 263 and the average of the three-dimensional coordinates of the fourth to sixth infrared LEDs 264 to 266. The second average coordinate, the third average coordinate obtained by averaging the three-dimensional coordinates of the seventh to ninth infrared LEDs 267 to 269 is calculated. Thereafter, the second posture calculation unit 622 calculates the orientation of the plane including the first to third average coordinates as the second posture information.
Further, when the second reference posture information is not stored in the calculation storage unit 61, the second posture calculation unit 622 stores the second posture information in the calculation storage unit 61 as the second reference posture information.

  Based on the orientation represented by the second orientation information calculated by the second orientation computation unit 622 and the orientation represented by the second reference orientation information stored in the computation storage unit 61, the second confrontation determination unit 623 performs imaging. It is determined whether or not the probe 2 is facing the device 5.

The position calculation unit 624 is based on the position of the probe 2 (three-dimensional coordinates of the first to ninth infrared LEDs 261 to 269) and the position of the contact 28 with respect to the first to ninth infrared LEDs 261 to 269 of the probe 2. The three-dimensional coordinates of the contact 28 in the three-dimensional measurement system 1 are calculated. The three-dimensional coordinates of the contact 28 correspond to the position information of the present invention.
Then, the position calculation unit 624 validates the measurement result of the three-dimensional coordinates of the contact 28 based on the determination result of whether or not the probe 2 is facing the first and second facing determination units 334 and 623. Or displayed on the display device 7.

<Work measurement process>
Next, a workpiece measurement process using the three-dimensional measurement system 1 will be described.
First, as shown in FIG. 5, the measurement person sets measurement conditions in the arithmetic and control unit 6 using a computer or the like (not shown) (step S1). As measurement conditions, for example, the lighting cycle, the lighting time, the lighting number (may vary depending on the control target) of the first to ninth infrared LEDs 261 to 269, and the camera imaging timing can be exemplified.
Thereafter, the measurement person presses a measurement switch (not shown) provided on the probe 2 in a state where the contact 28 of the probe 2 is in contact with the measurement site of the workpiece. Then, the probe control unit 33 of the probe 2 drives the triaxial geomagnetic sensor 29 and the triaxial acceleration sensor 30. Further, the timing control unit 621 of the arithmetic control device 6 transmits a pulse signal to the probe 2 and the imaging device 5 based on the measurement conditions. Specifically, the timing controller 621 includes a pulse signal (cycle signal) representing a measurement cycle as shown in FIG. 7A and first to ninth infrared rays as shown in FIG. 7B. A pulse signal (lighting signal) for sequentially lighting (turning on and off) the LEDs 261 to 269 is transmitted to the probe 2. Further, the timing control unit 621 transmits a cycle signal and a pulse signal (open / close signal) for opening / closing the shutters 561 to 563 of the image pickup device 5 to the image pickup device 5.

Here, when the amount of light incident on the imaging device 5 from the first to ninth infrared LEDs 261 to 269 is less than the threshold, the timing control unit 621 first to ninth red as shown in FIG. An open / close signal that opens the shutters 561 to 563 may be transmitted for the same time as the lighting time of the outer LEDs 261 to 269. On the other hand, when the amount of light incident on the imaging device 5 is greater than or equal to the threshold, the timing control unit 621 is shorter than the lighting time of the first to ninth infrared LEDs 261 to 269, as shown in FIG. An open / close signal that opens the shutters 561 to 563 may be transmitted.
As a configuration for determining whether or not the amount of light incident on the imaging device 5 from the first to ninth infrared LEDs 261 to 269 is less than a threshold value, the timing control unit 621 determines based on a measurement result from a light meter (not shown). Alternatively, the timing control unit 621 may make a determination based on a setting input by a measurer using a computer (not shown).

  When the probe 2 receives the cycle signal and the lighting signal from the arithmetic and control unit 6, as shown in FIG. 5, the abnormality determination unit 332 synchronizes with the cycle signal indicating the start of the cycle, and the three-axis geomagnetic sensor 29 and the three-axis Acquisition of the detection result by the acceleration sensor 30 is started (step S2). Further, the first to ninth infrared LEDs 261 to 269 by the probe 2 and the imaging by the imaging device 5 are started (step S3). At this time, the lighting control unit 331 of the probe 2 sequentially lights the first to ninth infrared LEDs 261 to 269 in synchronization with the lighting signal. In addition, the imaging control unit 58 of the imaging device 5 opens and closes the shutters 561 to 563 simultaneously in synchronization with the open / close signal. Through such processing, the luminance distribution signals are detected on the basis of the light from the first to ninth infrared LEDs 261 to 269 in the detection units 531 to 533 of the imaging device 5. Then, this luminance distribution signal is transmitted to the arithmetic and control unit 6.

Then, the abnormality determination unit 332 determines whether one cycle is completed based on the cycle signal (step S4). In step S4, the abnormality determining unit 332 determines that one cycle has not ended when a cycle signal indicating the end of the cycle has not been received, and performs the process of step S4 after a predetermined time has elapsed. On the other hand, in step S4, abnormality determination unit 332 determines that one cycle has ended when it has received a cycle signal indicating the end of the cycle, and synchronizes with this cycle signal, so that triaxial geomagnetic sensors 29 and 3 The capturing of the detection result by the axial acceleration sensor 30 is terminated (step S5).
In the present embodiment, the cycle for lighting all the first to ninth infrared LEDs 261 to 269 once is set to one cycle, but the cycle for lighting two times or three times or more may be set to one cycle. .

Thereafter, the abnormality determination unit 332 determines whether the detection results of the triaxial geomagnetic sensor 29 and the triaxial acceleration sensor 30 are normal (step S6). In step S6, the abnormality determination unit 332 obtains detection results from both sensors due to signal disturbance from at least one of the three-axis geomagnetic sensor 29 and the three-axis acceleration sensor 30, the absence of a signal, or the like. When the data cannot be captured, it is determined that the detection result is abnormal, and an abnormal signal indicating that the detection result is abnormal is transmitted to the arithmetic and control unit 6. Accordingly, the process returns to step S2, and the cycle signal, the lighting signal, and the open / close signal are transmitted from the timing control unit 621 to the probe 2 and the imaging device 5, respectively, and remeasurement is performed.
On the other hand, when the abnormality determination unit 332 determines in step S <b> 6 that the detection results from both the triaxial geomagnetic sensor 29 and the triaxial acceleration sensor 30 have been successfully captured, the detection result from the triaxial acceleration sensor 30. Based on the above, it is determined whether or not the probe 2 was stationary during imaging of the first to ninth infrared LEDs 261 to 269 (step S7).

In step S7, when the abnormality determination unit 332 determines that the probe 2 has moved, the abnormality determination unit 332 transmits an abnormality signal indicating that the probe 2 has moved to the arithmetic and control unit 6, and performs the process of step S2. Thereby, remeasurement is performed. On the other hand, when the abnormality determination unit 332 determines in step S7 that the probe 2 is stationary, the first posture calculation unit 333 determines the first posture information of the probe 2 based on the detection result of the triaxial geomagnetic sensor 29. Calculation is performed (step S8). In addition, the abnormality determination unit 332 transmits a stationary signal indicating that the probe 2 is stationary to the arithmetic and control unit 6.
The abnormality determination unit 332 may determine that the probe 2 is stationary only when the probe 2 is completely stationary, or does not affect the calculation of the three-dimensional coordinates of the contact 28 even if the probe 2 moves slightly. If so, it may be determined that the object is stationary.

Thereafter, when the arithmetic control device 6 receives the stationary signal, the second posture calculation unit 622 calculates the second posture information of the probe 2 based on the imaging result of the imaging device 5, and the position calculation unit 624 makes contact. The three-dimensional coordinates of the child 28 are calculated (step S9). Thereby, the coordinate of the measurement site | part of the workpiece | work which the contact 28 of the probe 2 contacted can be calculated | required.
Then, the first and second posture calculation units 333 and 622 determine whether or not the first and second reference posture information are stored in the probe storage unit 32 and the calculation storage unit 61, respectively. That is, as shown in FIG. 6, the first and second attitude calculation units 333 and 622 determine whether or not the first and second reference attitude information has been set (step S10). In this step S10, when the first and second posture calculation units 333 and 622 determine that they have not been set, the first posture information is stored in the probe storage unit 32 as the first reference posture information, and the second posture information is stored. Is stored in the calculation storage unit 61 as second reference posture information. That is, the first and second posture calculation units 333 and 622 set the first and second posture information as the first and second reference posture information (step S11). Then, it returns to step S2 and remeasurement is performed.

Here, the measurer adjusts the posture of the probe 2 so that the probe 2 faces the imaging device 5 in order to accurately measure the probe 2 when contacting the workpiece. For this reason, normally, the first and second posture information represents the posture (orientation) in which the probe 2 adjusted by the measurer and the imaging device 5 are facing each other. In the present embodiment, the orientation of the probe 2 adjusted by the measurer is used as first and second reference posture information indicating the orientation in which the probe 2 and the imaging device 5 are facing each other.
With such a configuration, even when the installation location and orientation of the imaging device 5 change, it takes time for the measurer to manually input new first and second reference posture information corresponding to the installation location and orientation. The first and second reference posture information can be set without any problem.

  On the other hand, when the first and second posture calculation units 333 and 622 determine in step S10 that the first and second reference posture information has been set, the first and second facing determination units 334 and 623 It is calculated whether or not the probe 2 is facing the imaging device 5 (step S12). At this time, the first facing determination unit 334 calculates the difference between the direction represented by the first reference posture information and the direction represented by the latest first posture information, and the second facing determination unit 623 performs the second reference posture information. And the difference between the direction represented by the latest second posture information.

  Thereafter, the first facing determination unit 334 displays the facing state of the probe 2 (step S13). At this time, when the first facing determination unit 334 determines that the probe 2 is facing the imaging device 5 based on the calculation result in step S12, the first facing LED 311 is turned on and the facing is performed. The signal is transmitted to the arithmetic and control unit 6. In addition, when the first facing determination unit 334 determines that the facing is not performed, the first facing LED 312 is turned on and a non-facing signal is transmitted to the arithmetic control device 6.

  The position calculation unit 624 of the calculation control device 6 determines whether the probe 2 is directly facing the imaging device 5 when receiving the directly facing signal or the unfacing signal from the first facing determining unit 334. (Step S14). At this time, the position calculating unit 624 determines that the first facing determination unit 334 is facing the position based on the detection result of the triaxial geomagnetic sensor 29 and the second facing determination unit 623 is the imaging device 5. It is determined that the probe 2 is facing the imaging apparatus 5 only when it is determined that the probe 2 is facing the image capturing result. On the other hand, in the position calculation unit 624, the probe 2 is facing the imaging device 5 when the first facing determination unit 334 determines that the facing is not facing regardless of the imaging result of the imaging device 5. Judge. As described above, the reason why the detection result of the triaxial geomagnetic sensor 29 is more important than the imaging result of the imaging device 5 is that, as described above, in the measurement principle, the posture of the probe 2 is detected using the imaging result. This is because the detection accuracy of the triaxial geomagnetic sensor 29 is high while the detection accuracy of the posture in the front-rear direction with respect to the imaging device 5 is not good.

In step S14, when the position calculation unit 624 determines that the positions are not facing each other, the measurement result of the three-dimensional coordinates of the contact 28 is invalidated (step S15). Then, it returns to step S2 and remeasurement is performed.
On the other hand, if it is determined in step S14 that the position calculation unit 624 is facing directly, the measurement result of the three-dimensional coordinates of the contact 28 is validated (step S16) and the measurement result is displayed on the display device 7. .
In addition, the following processes may be sufficient as the process in step S15, S16, for example. That is, when performing a process of not storing the measurement result in the calculation storage unit 61 in step S15, a process of storing the measurement result in the calculation storage unit 61 may be performed in step S16. In step S15, when the measurement result is stored in the calculation storage unit 61 and the process of associating information (for example, flag information) indicating invalidity with the measurement result is performed, the measurement result is calculated in step S16. While storing in the memory | storage part 61, you may perform the process which links | relates the information (for example, flag information) which shows that it is effective to the said measurement result.

  Then, the timing control unit 621 determines whether or not the measurement is finished, for example, whether or not the measurement of all the set parts that have been set is finished (step S17). If the timing control unit 621 determines in step S17 that the process has not ended, the process returns to step S2. As a result, the next measurement site is measured. On the other hand, if the timing control unit 621 determines in step S17 that the processing has ended, the processing ends.

<Effect of embodiment>
According to the present embodiment, the triaxial geomagnetic sensor 29 detects the posture of the probe 2 during the imaging of the first to ninth infrared LEDs 261 to 269 by the imaging device 5. And the 1st attitude | position calculating part 333 of the probe 2 calculates 1st attitude | position information based on the detection result in the triaxial geomagnetic sensor 29, and the 1st facing determination part 334 is 1st attitude | position information and 1st reference | standard attitude | position information. Based on the above, it is determined whether or not the probe 2 is facing the imaging device 5.
As described above, since the attitude of the probe 2 is directly detected by the triaxial geomagnetic sensor 29, the detection accuracy of the attitude in the front-rear direction with respect to the imaging apparatus 5 is improved compared to the configuration in which the attitude is detected based on the imaging result of the imaging apparatus 5. Can be improved. Therefore, it can be determined with high accuracy whether or not the probe 2 is facing the imaging apparatus 5, and the position of the probe 2 can be detected with high accuracy.

In addition, the triaxial acceleration sensor 30 detects the movement of the probe 2 during imaging of the first to ninth infrared LEDs 261 to 269 by the imaging device 5. The position calculation unit 624 of the calculation control device 6 calculates the three-dimensional coordinates of the contact 28 only when the probe 2 is stationary.
For this reason, the position of the contact 28 can be accurately detected based on the appropriately detected first and second luminance distributions.

Further, the position calculation unit 624 of the calculation control device 6 determines the three-dimensional shape of the contact 28 when the first directly-facing determination unit 334 of the probe 2 determines that the probe 2 is facing the imaging device 5. The coordinate measurement result is validated, and the measurement result is invalidated when it is determined that the coordinates are not facing each other.
For this reason, since the measurement result is validated only when accurate measurement is possible, the reliability of the position detection result of the probe 2 can be improved.

The determination result notifying unit 31 of the probe 2 displays the determination result in the first direct determination unit 334.
Therefore, the measurer can easily recognize whether or not the probe 2 is directly facing the imaging device 5 and can easily determine whether or not the position measurement result of the probe 2 is accurate. Further, the measurer can easily perform remeasurement by correcting the posture of the probe 2 so that the probe 2 faces the imaging device 5.

The probe 2 having the contact 28 is used as the measurement object of the present invention.
For this reason, if the contact 28 is brought into contact with the workpiece measurement site, the workpiece measurement site can be accurately measured.

<Modification>
It should be noted that the present invention is not limited to the above-described embodiment, but includes modifications and improvements as long as the object of the present invention can be achieved.

For example, the contact-type probe 2 having the contact 28 at the tip has been described as an example of the measurement object of the present invention. However, the present invention is not limited to this and may be a non-contact type probe.
For example, as shown in FIG. 8, the non-contact type probe 2A includes a light emitter 361A that emits light toward the workpiece, a light receiver 362A that receives reflected light from the workpiece, A non-contact measuring device 36A including a calculator (not shown) for calculating the position information of the workpiece with respect to the probe main body 21A from the position where the light is received in the measuring device 362A is built in. Further, the probe 2A is provided with a triaxial geomagnetic sensor 29, a triaxial acceleration sensor 30, a determination result notification unit 31, and 40 infrared LEDs 901, 902, 903,.
In this case, the position calculation unit 624 of the calculation control device 6 includes the position of the probe 2A obtained based on the imaging result of the infrared LED by the imaging device 5 and the position of the measurement point obtained by the non-contact measuring device 36A. Thus, the coordinates of the light irradiation position of the non-contact measuring device 36A are obtained.
In the non-contact type probe 2A, since it is not necessary to contact the workpiece, it is possible to measure a workpiece having a more complicated shape. For that purpose, various postures of the probe 2A can be detected. More infrared LEDs, for example, 40 infrared LEDs 901, 902, 903... Are mounted. However, in order to detect the attitude of the probe 2A, it is not always necessary to detect all infrared LEDs. If at least three infrared LEDs can be detected, the attitude of the probe 2A can be obtained.
Furthermore, the measurement object of the present invention is not limited to a probe, and a known device or a known object to be measured can be employed.

Moreover, although the structure which provided the attitude | position calculating part and the facing determination part of this invention in the probe 2 was illustrated, you may provide an attitude | position calculating part in at least one among the probe 2 and the calculation control apparatus 6, The determination unit may be provided in at least one of the probe 2 and the arithmetic control device 6.
For example, the abnormality determination unit 332 is not provided in the probe 2 but the abnormality determination unit 332 is provided in the calculation control device 6 without providing the abnormality determination unit 332, the first posture calculation unit 333, and the first facing determination unit 334. It may be configured to cause the two-facility determination unit 623 to perform the processes of the abnormality determination unit 332 and the first facing-up determination unit 334.
In this case, the three-dimensional measurement system 1 performs the following processing, for example. First, the triaxial geomagnetic sensor 29 and the triaxial acceleration sensor 30 transmit detection results to the arithmetic control device 6. When the abnormality determination unit 332 of the arithmetic and control unit 6 determines that the probe 2 is stationary during imaging, the second posture calculation unit 622 includes the first posture information based on the detection result of the triaxial geomagnetic sensor 29 and Then, the second posture information based on the imaging result of the imaging device 5 is calculated, and the first and second posture information is stored in the calculation storage unit 61 as the first and second reference posture information as necessary. Thereafter, the position calculator 624 is configured such that the probe 2 faces the imaging device 5 based on the first and second posture information and the first and second reference posture information in the second facing determination unit 623. If it is determined, the measurement result is validated.

Further, the probe 2 is not provided with the first posture calculation unit 333, the calculation control device 6 is provided with the abnormality determination unit 332, and the second posture calculation unit 622 is configured to perform the processing of the first posture calculation unit 333. May be.
In this case, the three-dimensional measurement system 1 performs the following processing, for example. First, the triaxial geomagnetic sensor 29 and the triaxial acceleration sensor 30 transmit detection results to the arithmetic control device 6. When the abnormality determination unit 332 of the calculation control device 6 determines that the probe 2 is stationary during imaging, the second posture calculation unit 622 calculates the first posture information and the second posture information, and is necessary. Accordingly, the second posture information is stored in the calculation storage unit 61 as the second reference posture information. In addition, the second posture calculation unit 622 transmits the first posture information to the probe 2. The first facing determination unit 334 of the probe 2 causes the probe storage unit 32 to store the first posture information from the second posture calculation unit 622 as the first reference posture information. Then, when the first confrontation determination unit 334 acquires new first posture information from the second posture calculation unit 622, based on the acquired first posture information and first reference posture information, the first facing determination unit 334 It is determined whether or not the probe 2 is directly facing.

Further, the probe 2 may be configured not to provide the first facing determination unit 334 but to cause the second facing determination unit 623 of the arithmetic control device 6 to perform the processing of the first facing determination unit 334.
In this case, the three-dimensional measurement system 1 performs the following processing, for example. First, the first posture calculation unit 333 of the probe 2 transmits the first posture information to the calculation control device 6. Then, the second facing determination unit 623 of the arithmetic control device 6 stores the first posture information in the calculation storage unit 61 as the first reference posture information. Then, when the second correctness determination unit 623 acquires new first posture information from the first posture calculation unit 333, based on the acquired first posture information and first reference posture information, It is determined whether or not the probe 2 is directly facing.

  In addition, the first posture information is calculated by both the first and second posture calculation units 333 and 622 and stored in the storage units 32 and 61 as the first reference posture information as necessary. Both the two facing determination units 334 and 623 may determine whether or not the probe 2 is facing the imaging device 5 based on the first posture information and the first reference posture information.

Further, without providing the three-axis acceleration sensor 30, the position calculation unit 624 of the calculation control device 6 may calculate the three-dimensional coordinates of the contact 28 regardless of whether or not the probe 2 is stationary.
In addition, when the second facing determination unit 623 determines that the probe 2 is not facing the imaging device 5, the position calculating unit 624 of the calculation control device 6 does not calculate the three-dimensional coordinates of the contact 28. May be.
Furthermore, although the determination result notification unit 31 is provided in the probe 2, it may be provided in at least one of the probe 2, the imaging device 5, and the arithmetic control device 6, or may not be provided in all devices.
Further, without providing the second posture calculation unit 622 and the second alignment determination unit 623, the position calculation unit 624 is connected to the contact 28 based on the alignment state determined only by the detection result of the triaxial geomagnetic sensor 29. The measurement result of the three-dimensional coordinates may be validated or invalidated.
Further, for example, when the installation location of the imaging device 5 is fixed, if the measurer sets the first and second reference posture information before measurement using a computer or the like, the first and second reference positions are set. There is no need to update posture information.
In addition, as a method for setting the first reference posture information, the following method may be employed. For example, the imaging device 5 irradiates the probe 2 with laser light, and the posture of the probe 2 is adjusted so that the imaging device 5 can receive reflected light from the probe 2. Then, information indicating the posture of the probe 2 after adjustment may be set as the first reference posture information.

In addition, the posture sensor of the present invention is not limited to the triaxial geomagnetic sensor 29, and a known sensor such as a gyro sensor, a triaxial acceleration sensor, a rotary sensor, or an inclination angle sensor can be adopted, and a combination thereof. Can also be adopted.
Furthermore, the motion sensor of the present invention is not limited to the triaxial acceleration sensor 30, but may be a known sensor such as a vibration sensor, a gyro sensor, or a triaxial geomagnetic sensor, and a configuration in which these are combined is adopted. You can also.
In addition, the determination result notification unit of the present invention is not limited to the light source that notifies the determination result using colors such as the directly facing LED 311 and the non-facing LED 312, but a display device that notifies the determination result using characters, symbols, colors, or images. In addition, a known configuration such as a sound output device that notifies the determination result by sound can be adopted, and a configuration in which these are combined can also be adopted.

Although nine first to ninth infrared LEDs 261 to 269 are arranged as the measurement light source of the present invention, at least three are sufficient.
As the measurement light source of the present invention, a known light source other than an LED can be employed, and light other than infrared light can be employed as light to be emitted.
Although the detection units 531 to 533 are configured to include cylindrical lenses 541 to 543 and line sensors 551 to 553, any optical element capable of condensing light from the light condensing region 59 in one axis direction may be used. It does not have to be a cylindrical lens.

DESCRIPTION OF SYMBOLS 1 ... Three-dimensional measuring system 2, 2A ... Probe (measurement object)
DESCRIPTION OF SYMBOLS 4 ... Position detection apparatus 5 ... Imaging device 6 ... Arithmetic control device 27 ... Stylus 28 ... Contact 29 ... 3-axis geomagnetic sensor (attitude sensor)
30 ... 3-axis acceleration sensor (motion sensor)
31 ... Judgment result notification part 261-269 ... 1st-9th infrared LED (light source for measurement)
333... First posture calculation unit (posture calculation unit)
334 ... 1st confrontation judgment part (confrontation judgment part)
541, 543 ... Cylindrical lens (first optical system)
542 ... Cylindrical lens (second optical system)
551, 553 ... Line sensor (first line sensor)
552 ... Line sensor (second line sensor)
624: Position calculation unit 901, 902, 903 ... Infrared LED (light source for measurement)

Claims (9)

Three or more measurement light sources spaced apart from each other are arranged, and a measurement object that can be moved to an arbitrary position; a position detection device that receives light from the measurement light source and detects the position of the measurement object; A three-dimensional measurement system comprising:
The measured object includes an attitude sensor that detects the attitude of the measured object;
The position detection device includes an imaging device and an arithmetic control device,
The imaging device is provided apart from each other, and a pair of first optical systems that collect light from the measurement light source on a first axis;
A pair of first line sensors that receive light collected on the first axis by the pair of first optical systems and detect a first luminance distribution on the first axis;
A second optical system for condensing light from the measurement light source on a second axis orthogonal to the first axis;
A second line sensor that receives light collected on the second axis by the second optical system and detects a second luminance distribution on the second axis;
The calculation control device includes a position calculation unit that calculates position information representing the position of the measurement object based on the first luminance distribution and the second luminance distribution.
At least one of the measured object and the calculation control device includes a posture calculation unit that calculates posture information representing a posture of the measured object with respect to the imaging device based on a detection result in the posture sensor.
At least one of the measured object and the calculation control device is based on reference posture information indicating a posture of the measured object facing the imaging device and the posture information calculated by the posture calculation unit. A three-dimensional measurement system comprising a confrontation determination unit that determines whether or not the object to be measured is confronting the imaging apparatus. The three-dimensional measurement system according to claim 1,
The measured object includes a motion sensor that detects the movement of the measured object,
When the position calculation unit determines that the object to be measured is moving between the start and end of light reception in the first line sensor and the second line sensor based on the detection result in the motion sensor The position information is calculated when it is determined that the object to be measured is not moving without calculating the position information. The three-dimensional measurement system according to claim 1 or 2,
When the position calculation unit determines that the object to be measured is facing the imaging apparatus in the facing determination unit, the position calculation unit validates the position information and determines that the object is not facing The three-dimensional measurement system, wherein the position information is invalidated. The three-dimensional measurement system according to any one of claims 1 to 3,
At least one of the object to be measured and the arithmetic and control unit includes a determination result notifying unit for notifying a determination result of the confrontation determining unit. The three-dimensional measurement system according to any one of claims 1 to 4,
The object to be measured is a probe movable to an arbitrary position,
The probe includes a probe main body provided with the measurement light source and the posture sensor, and a stylus having a contactor provided integrally with the probe main body and contacting a workpiece at a tip.
The position calculation unit calculates position information of the contact based on an arrangement position of the contact with respect to the measurement light source, the first luminance distribution, and the second luminance distribution. system. The three-dimensional measurement system according to any one of claims 1 to 4,
The object to be measured is a probe movable to an arbitrary position,
The probe includes a probe main body provided with the measurement light source and the attitude sensor, and a non-contact position detector that is provided on the probe main body and irradiates light and can detect an irradiation position of the light,
The position calculation unit calculates position information representing the light irradiation position based on the light irradiation position detected by the non-contact position detector, the first luminance distribution, and the second luminance distribution. Characteristic 3D measurement system. Three or more measurement light sources spaced apart from each other are arranged, and a measurement object that can be moved to an arbitrary position; a position detection device that receives light from the measurement light source and detects the position of the measurement object; A three-dimensional measurement method using
The measurement object is provided with a posture sensor for detecting the posture of the measurement object,
The position detection device is composed of an imaging device and a calculation control device,
A pair of first optical systems that are provided in the imaging device so as to be spaced apart from each other and collect light from the measurement light source on a first axis;
A pair of first line sensors that receive light collected on the first axis by the pair of first optical systems and detect a first luminance distribution on the first axis;
A second optical system for condensing light from the measurement light source on a second axis orthogonal to the first axis;
A second line sensor that receives light collected on the second axis by the second optical system and detects a second luminance distribution on the second axis; and
The three or more light sources for measurement emit light one by one;
The posture sensor detecting the posture of the measured object during execution of the light emitting step;
The first line sensor and the second line sensor receiving light from the measurement light source and detecting the first luminance distribution and the second luminance distribution;
The arithmetic and control unit calculating position information representing the position of the measured object based on the first luminance distribution and the second luminance distribution;
At least one of the measured object and the arithmetic and control unit calculates posture information representing the posture of the measured object with respect to the imaging device based on a detection result in the posture sensor,
At least one of the measured object and the arithmetic and control unit is configured to control the imaging apparatus based on reference attitude information indicating the attitude of the measured object facing the imaging apparatus and the attitude information. And a step of determining whether or not the object to be measured is facing the three-dimensional measuring method. Three or more measurement light sources spaced apart from each other are arranged, and a measurement object that can be moved to an arbitrary position; a position detection device that receives light from the measurement light source and detects the position of the measurement object; The measurement object used in a three-dimensional measurement system comprising:
A posture sensor for detecting the posture of the measured object;
A posture calculation unit that calculates posture information representing the posture of the measured object with respect to the imaging device that constitutes the position detection device based on the detection result of the posture by the posture sensor;
Based on the reference posture information indicating the posture in which the measured object is facing the imaging device and the posture information calculated by the posture calculation unit, the measured object is facing the imaging device. A to-be-measured object comprising a confrontation determination unit that determines whether or not the Three or more measurement light sources spaced apart from each other are arranged, and a measurement object that can be moved to an arbitrary position; a position detection device that receives light from the measurement light source and detects the position of the measurement object; The position detection device used in a three-dimensional measurement system comprising:
An imaging device and an arithmetic and control unit;
The imaging device is provided apart from each other, and a pair of first optical systems that collect light from the measurement light source on a first axis;
A pair of first line sensors that receive light collected on the first axis by the pair of first optical systems and detect a first luminance distribution on the first axis;
A second optical system for condensing light from the measurement light source on a second axis orthogonal to the first axis;
A second line sensor that receives light collected on the second axis by the second optical system and detects a second luminance distribution on the second axis;
The calculation control device includes a position calculation unit that calculates position information representing the position of the measurement object based on the first luminance distribution and the second luminance distribution.
When the position calculation unit determines that the measured object is facing the imaging apparatus based on a facing signal transmitted from the measured object, the position calculation unit validates the position information, and A position detection device that invalidates the position information when it is determined that the position information is not matched.

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