JP2015087342A - Shear strength measurement method, shear tool and shear strength measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a shear strength measurement method capable of measuring a shear strength even in a narrow gap of protrusions which are disposed proximately to a measured work on a substrate surface, a shear tool and a shear strength measurement device.SOLUTION: In the shear strength measurement method, a shear tool 15 includes: a root shaft part 21 mounted in a tool holder 27; and a tip shaft part 26 vertically extending from the root shaft part 21. The tip shaft part 26 includes a slope part 23 that is inclined in a vertical direction. In the state where the slope part 23 is abutted to a ridge line 24 of a surface of a measured work 11 opposite to its surface joined to a substrate 12 via a joint member 12, a load is applied to the measured work 11 in a substantially vertical direction towards the substrate 13 by the shear tool 15, and a shear strength in a joint part between the substrate 13 and the measured work 11 is then measured.

Description

  The present invention relates to a shear strength measurement method, a shear tool, and a shear strength measurement apparatus using the shear tool.

  Conventionally, measurement of the shear strength of a joint part of a workpiece to be measured such as a semiconductor chip joined to a substrate with a joining member is performed by applying a load parallel to the substrate to the workpiece by a shear tool. A method of measuring the strength at the time of breaking is generally used. In Patent Document 1, a shear tool is brought into contact with the side surface of a workpiece to be measured such as a semiconductor chip bonded to a substrate, a load parallel to the substrate surface is applied to the side surface of the workpiece to be measured, and the shear strength of the joint is determined. A method for measuring the shear strength for measuring the angle is disclosed.

Japanese Patent Laid-Open No. 7-130819

  In the shear strength measurement method described in Patent Document 1, when a workpiece such as another electronic component is disposed in proximity to the workpiece to be measured on the substrate surface, or in the thickness direction from the substrate in proximity to the workpiece to be measured. When a protrusion is provided, the gap between these other workpieces or the protrusion and the workpiece to be measured may be narrowed. Therefore, there are cases where the shear tool cannot be inserted into the gap, and in such a case, there is a problem that the shear strength cannot be measured. Even if the share tool can be inserted, the share tool becomes thin (thin), and the strength of the share tool may be lower than the share strength.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  [Application Example 1] In the shear strength measurement method according to this application example, a load parallel to the substrate is applied to the workpiece to be measured bonded to the substrate via a bonding member, and the substrate and the substrate to be measured are applied. A shear strength measurement method for measuring a shear strength of a joint with a measurement workpiece, wherein the shear tool includes a root shaft portion and a tip shaft portion, and the tip shaft portion includes the root shaft portion from the root shaft portion. A slope portion that is inclined with respect to a direction toward the tip shaft portion, and a direction from the root shaft portion toward the tip shaft portion is disposed substantially perpendicular to the substrate; and the substrate of the workpiece to be measured A substantially vertical direction toward the substrate with respect to the workpiece to be measured by the shear tool in a state in which the slope portion is in contact with a ridge line on a surface opposite to the surface joined via the joining member. Apply a load of Wherein the serial substrate to measure the shear strength of the joint between the measured workpiece, characterized in that.

  Here, the shear strength includes the peel strength between the workpiece to be measured and the joining member, the peel strength between the substrate and the joining member, and the shear strength of the joining member.

  According to the shear strength measurement method according to this application example, the slope of the shear tool is pressed against the ridgeline of the workpiece to be measured and a load is applied in the vertical direction, so that the workpiece to be measured is parallel to the substrate due to the slope effect of the slope. A load can be applied, and the shear strength of the joint between the substrate and the workpiece to be measured can be measured.

  Further, by providing a slope portion on the tip shaft portion of the shear tool, the contact portion and the tip portion side of the slope portion and the ridge line of the workpiece to be measured are thinner (thinner) than the root portion side of the tip shaft portion. . From this, when a protrusion projecting from another workpiece such as an electronic component close to the workpiece to be measured or the substrate is arranged, the workpiece to be measured is a plane perpendicular to the substrate of the shear tool, Compared with the measurement method of Patent Document 1 in which a load parallel to the substrate is applied, even if the gap between the other workpiece or projection and the workpiece to be measured is small, the tip shaft portion of the shear tool can be inserted into this gap.

  In addition, since the thickness of the base shaft part of the shear tool and the base shaft part side of the tip shaft part can be made thicker than the thickness of the position where the shear force is applied to the workpiece to be measured, Sufficient strength can be secured against the shear strength.

  [Application Example 2] In the shear strength measurement method according to the application example, a vertical distance from a contact position between the slope portion and the ridge line to a tip portion of the tip shaft portion of the shear tool is the contact force. It is preferable that the distance is shorter than the vertical distance from the position to the substrate.

  In this way, the shear strength can be reliably measured before the tip of the shear tool reaches the substrate.

  [Application Example 3] In the shear strength measurement method according to the application example, the tip shaft portion includes the slope portion and a second slope sloped in a reverse direction of the slope portion on a back surface opposite to the slope portion. Are preferably provided.

  The shape of the tip shaft portion of the shear tool of this application example is substantially wedge-shaped by providing the second slope portion on the back side of the slope portion. If the tip shaft portion has such a shape, the thickness of the tip shaft portion at the position where the shear strength is measured (contact position with the workpiece to be measured) is set to the workpiece to be measured as in Patent Document 1. The plane perpendicular to the substrate can be smaller than the thickness of the shear tool of the measuring method that applies a load parallel to the substrate. From this, even if the gap between the other workpiece or protrusion and the workpiece to be measured is small, the shear strength can be measured by inserting the tip shaft portion of the shear tool into this gap. Furthermore, the strength of the shear tool can be increased by making the tip shaft portion into a substantially wedge shape. In addition, even if it forms in the range which reaches the front-end | tip part of a front-end | tip shaft part, you may form a 2nd slope part in the range which does not reach a front-end | tip part.

  Application Example 4 In the shear strength measurement method according to the application example, the tip shaft portion has a polygonal pyramid shape whose surface is cut by a plane orthogonal to a direction from the root shaft portion toward the tip shaft portion. It is preferable that it is comprised.

  By forming the shear tool with a polygonal pyramid such as a triangular pyramid or a quadrangular pyramid, it will have multiple slopes that can contact the ridgeline of the workpiece to be measured. This will extend the life of the share tool.

  Application Example 5 In the shear strength measurement method according to the application example described above, it is preferable that the distal end shaft portion is formed in a conical shape having a bottom surface on the root shaft portion side.

  By making the tip shaft part of the shear tool conical, it is possible to set the slope part (actually point contact) that can contact the ridgeline of the workpiece to be measured at any position in the circumferential direction. The life of the share tool can be extended. Moreover, it becomes easy to respond | correspond to the shape which has the unevenness | corrugation which is not a straight line of the to-be-measured workpiece.

  Application Example 6 In the shear strength measurement method according to the application example described above, the slope portion includes a curved surface from the root shaft portion side toward the tip portion side of the tip shaft portion, and the curved surface has a convex shape and a concave shape. It is preferable that either one of them is provided.

  The curved surface provided in the slope portion may be a convex curved surface or a concave curved surface. Thus, by providing a curved surface on the slope portion, it is possible to expand the application range even when the shape of the workpiece to be measured is not a regular shape such as a rectangular parallelepiped.

  Application Example 7 In the shear strength measurement method according to the application example described above, the tip end portion of the tip shaft portion is more than an inclination angle with respect to a plane orthogonal to the direction from the root shaft portion toward the tip shaft portion of the slope portion. It is preferable that an obtuse angle part is provided, and the obtuse angle part includes at least one of a flat surface and a curved surface.

  Examples of the surface having an obtuse angle than the inclination angle of the slope portion include a shape in which the tip is rounded into a hemisphere and a shape that becomes a trapezoid when the tip shaft portion is viewed from the side surface direction. By doing in this way, when the inclination angle of the slope portion is the same, the vertical distance from the contact position between the slope portion and the ridge line to the tip portion of the shear tool rather than the shape where the tip end of the shear tool remains at an acute angle And the vertical distance from the contact position to the substrate can be made large. In addition, the strength of the tip of the shear tool can be increased.

  Application Example 8 In the shear strength measurement method according to the application example, it is preferable that a load parallel to the surface of the substrate is further applied to the workpiece to be measured by the slope portion.

  For example, when a load is applied in the vertical direction with a shear tool, if the component force in the horizontal direction of the load applied in the vertical direction is insufficient for the drag of the shear strength, the horizontal direction (with respect to the board) By applying a load in the (parallel direction), the shear strength measurement range can be widened even when the resistance of the shearing force of the joint is large. In addition, in order to apply a load parallel to the substrate to the workpiece to be measured on the slope of the shear tool, insert the shear tool into this gap even if the gap between another workpiece or projection and the workpiece to be measured is small. Can do.

  Application Example 9 A shear tool according to this application example is a shear tool for measuring the shear strength of a workpiece to be measured joined to a substrate via a joining member, and the shear tool includes a root shaft portion and a shear tool. A tip shaft portion, and the tip shaft portion includes a slope portion that is inclined with respect to a direction from the root shaft portion toward the tip shaft portion and is in contact with the workpiece to be measured. It is characterized by that.

  According to the shear tool according to this application example, for example, by pressing the slope portion of the shear tool against the ridge line of the workpiece to be measured and applying a load in the vertical direction, the workpiece to the workpiece to be measured is caused by the slope effect of the slope portion. A parallel load can be applied, and the shear strength of the joint between the substrate and the workpiece to be measured can be measured. Further, by providing a slope portion on the tip shaft portion of the shear tool, for example, the contact portion and the tip portion side of the slope portion and the ridge line of the workpiece to be measured are thinner (thinner) than the root side of the tip shaft portion. ing. From this, when a protrusion projecting from another workpiece such as an electronic component close to the workpiece to be measured or the substrate is arranged, the workpiece to be measured is a plane perpendicular to the substrate of the shear tool, Compared to the measurement method of Patent Document 1 in which a load parallel to the substrate is applied, even if the gap between the other workpiece or protrusion and the workpiece to be measured is small, the tip shaft portion of the shear tool can be inserted into this gap. it can. Furthermore, since the thickness of the base shaft part of the shear tool and the base shaft part side of the tip shaft part can be made larger than the thickness of the position where the shearing force is applied to the workpiece to be measured, Sufficient strength can be secured against the shear strength.

  Application Example 10 A shear strength measurement device according to this application example is a shear strength measurement device using the shear tool according to the application example, and includes a driving unit that applies a load to the shear tool, and driving of the driving unit. A control unit that controls the detection unit, a detection unit that measures a reaction force perpendicular to the substrate that the shear tool receives from the ridge line of the workpiece to be measured, and a joint between the substrate and the workpiece to be measured is broken. And an arithmetic processing unit that calculates a shear strength based on the reaction force when the power is applied.

  According to the shear strength measurement device according to this application example, the tip side is thinned (thinned) by providing a slope on the tip side of the shear tool, so other workpieces close to the workpiece to be measured are placed. Even if there is a protruding part from the board close to the workpiece to be measured, insert a shear tool in the gap between another workpiece or the protruding part and the workpiece to be measured. The intensity can be measured.

It is a figure which shows schematic structure of the shear strength measuring apparatus which concerns on the 1st Embodiment of this invention. It is a figure explaining the share intensity | strength measuring method which concerns on the 1st Embodiment of this invention. It is a figure which shows the share tool which concerns on 1st Example, (A) is a side view, (B) is the bottom view visually recognized from the arrow direction of (A). It is a figure which shows the share tool which concerns on 2nd Example, (A) is a side view, (B) is a side view which shows the modification of (A). It is a figure which shows the share tool which concerns on 3rd Example, (A) is a side view, (B) is the bottom view visually recognized from the arrow direction of (A). It is a side view which shows the share tool which concerns on 4th Example. It is a figure which shows the share tool which concerns on 5th Example, (A) is a side view in the case of having a convex-shaped curved surface, (B) is a side view in the case of having a concave-shaped curved surface. It is a figure which shows the front-end | tip shaft part of the share tool which concerns on 6th Example, (A) is a side view in case a front-end | tip part is a plane, (B) is a side view which shows the case where a front-end | tip part has a curved surface. It is a part.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment: shear strength measuring device)
First, the configuration of the shear strength measuring apparatus of the present invention will be described.
FIG. 1 is a diagram showing a schematic configuration of a shear strength measuring apparatus 10 according to the present embodiment. As shown in FIG. 1, the shear strength measuring apparatus 10 includes a table 14 that holds a substrate 13 on a surface of which a workpiece 11 to be measured is fixed via a joining member 12 at a predetermined position. Furthermore, the shear strength measuring apparatus 10 includes a drive unit 16 that applies a load in the vertical direction to the surface of the substrate 13 by the shear tool 15, and a vertical reaction against the substrate 13 that the shear tool 15 receives from the workpiece 11 to be measured. A detection unit 17 that measures force, an arithmetic processing unit 18 that calculates a force parallel to the substrate 13 (substrate surface 13A) based on the reaction force, and an interface that converts the calculation result into necessary data information and displays it Part 19.

  The shear strength measuring apparatus 10 according to the present embodiment has a shear strength (bonding strength between the workpiece 11 to be measured and the bonding member 12, a bond strength between the workpiece 13 and the workpiece 13) fixed to the substrate 13 by the bonding member 12. This is a device for measuring the peel strength with the member 12 and the shear strength of the joining member 12. In other words, when the shear strength measuring apparatus 10 applies a load parallel to the surface 13A of the substrate 13 to the workpiece to be measured 11 by the shear tool 15, the joint between the workpiece 11 to be measured and the substrate 13 is destroyed. This is a measure of the strength of the share.

  The workpiece 11 is a member bonded to the substrate 13 such as a vibrating piece that vibrates due to a piezoelectric effect such as a semiconductor chip or a quartz vibrating piece, and a vibrating piece that vibrates due to static electricity such as MEMS (Micro Electro Mechanical Systems). is there. The workpiece 11 shown in FIG. 1 illustrates the case of a flat rectangular parallelepiped. The bonding member 12 is made of an adhesive (a bonding material mainly composed of a resin such as a conductive adhesive or an insulating adhesive), a metal bonding material such as solder, or a metal bonding material such as a metal bump (solder bump, gold bump, or the like). ), Or a configuration in which a plurality of these bonding materials are used, and is not particularly limited. In FIG. 1, the substrate 13 is a flat plate member such as a circuit board. However, the substrate 13 can be applied to, for example, a ceramic package having a side wall that can accommodate the workpiece 11 to be measured at the inner bottom.

  In the example shown in FIG. 1, a protrusion 20 is provided in the vicinity of the workpiece 11 to be measured on the surface 13 </ b> A of the substrate 13. Further, in the shear tool 15 shown in FIG. 1, the distance between the workpiece 11 to be measured and the projection 20 is smaller than the thickness of the root shaft portion 21 of the shear tool 15, and the workpiece 11 to be measured and the projection 20 The root shaft portion 21 of the share tool 15 cannot be inserted between the two. Note that the shear strength measuring apparatus 10 of the present embodiment is not limited to the case where other workpieces such as electronic components joined to the substrate 13 are disposed in addition to the protrusions 20 or a ceramic package in which the protrusions 20 have side walls. Even if it is a side wall, it is suitable when it has the same positional relationship as the above-mentioned to-be-measured workpiece 11 and the projection part 20. FIG.

  The share tool 15 is a columnar member formed of a high hardness material such as a super steel alloy, and includes a root shaft portion 21 attached to a tool holder (not shown) and a tip extending from the root shaft portion 21 toward the substrate 13. A shaft portion 26 is provided. The tip shaft portion 26 is inclined so that the width between the workpiece 11 to be measured and the projection portion 20 gradually becomes thinner (thinner) from the root shaft portion 21 side to the tip portion 22 of the tip shaft portion 26. 23 is formed. The tip shaft portion 26 is shaped like a plane cut at an inclination angle θ. In FIG. 1, the inclined surface portion 23 is in contact with a ridge line (corner portion) 24 on the surface opposite to the surface to be bonded to the substrate 13 of the workpiece 11 to be measured. In this state, the vertical distance H1 from the contact position between the slope portion 23 and the ridge line 24 to the distal end portion 22 of the shear tool 15 is shorter than the vertical distance H2 from the contact position to the substrate 13. Is set to Note that the back surface portion 25 on the opposite side of the tip shaft portion 26 from the inclined surface portion 23 does not come into contact with the protruding portion 20 even if the shear tool 15 moves in the vertical direction. However, the shear tool 15 may be in contact with the protrusion 20 within a range where no side pressure is applied.

  The drive unit 16 includes a drive unit (not shown) and a control unit (not shown) that controls the drive of the drive unit 16 (drive unit). The drive unit 16 controls the vertical load applied to the workpiece 11 by the shear tool 15 by the control unit. As a means for applying a load to the share tool 15, it is possible to control air pressure and hydraulic pressure using a motor, an air cylinder, a hydraulic cylinder, or the like. In order to ensure safety, it is preferable to provide a brake system.

  The detection unit 17 measures a vertical reaction force that the shear tool 15 receives from the workpiece 11 to be measured. The detection unit 17 uses a spring having a known spring constant, a load sensor, and the drive unit 16 is an air cylinder. When using a hydraulic cylinder, use a pressure sensor.

  The arithmetic processing unit 18 calculates the force in the horizontal direction based on the vertical reaction force detected by the detection unit 17 and sends the information to the interface unit 19. The interface unit 19 converts this information into management information, displays the information on a display, and stores the management information.

(Share strength measurement method)
Subsequently, a shear strength measuring method using the shear strength measuring apparatus 10 will be described with reference to FIGS. 1 and 2.

  FIG. 2 is a diagram for explaining a shear strength measurement method according to the first embodiment. First, the shear tool 15 is attached to a tool holder (not shown), and the shear tool 15 is moved in the vertical direction (downward) toward the substrate 13 by the drive unit 16, so that the slope portion 23 contacts the ridge line 24 of the workpiece 11 to be measured. Let The slope portion 23 and the ridge line 24 are substantially in line contact. From this state, when the drive unit 16 is driven and a load in the vertical direction is applied to the workpiece 11 by the shear tool 15, a force parallel to the substrate 13 is exerted on the workpiece 11 due to the slope effect of the slope portion 23. When Wh works and this force Wh reaches the limit strength of the joint between the workpiece 11 to be measured and the substrate 13, the joint is destroyed. Then, the moment when the joint is broken is detected, and the vertical force (reaction force) applied to the shear tool 15 is detected by the detection unit 17. In FIG. 2, the force indicated by the dotted line is the reaction force received by the slope portion 23.

  The reaction force measured by the detection unit 17 is calculated by the arithmetic processing unit 18 using a mathematical expression described below, in the horizontal direction Wh. The calculation of the horizontal force Wh will be described with reference to FIG. Here, the force applied vertically below the shear tool 15 is F0 (equal to the reaction force F0), the force in the vertical direction on the inclined surface 23 is W, and the force parallel to the substrate 13 (surface 13A) (horizontal force) is Wh. In addition, the inclination angle of the slope 23 is θ, and the friction angle between the shear tool 15 and the workpiece 11 to be measured is μ.

  First, a force W in a direction perpendicular to the slope portion 23 is calculated.

  Next, the horizontal force Wh is calculated using the vertical force W.

  If the reaction force F0 in the vertical direction is detected as shown in the equations (2) and (3), the horizontal force Wh can be obtained, and the joint between the workpiece 11 to be measured and the substrate 13 is broken. A horizontal force (a force parallel to the substrate) Wh calculated when it is detected is defined as a shear strength. When the joint portion is broken, the reaction force F0 gradually increases when a load is applied after the slope portion 23 is brought into contact with the ridge line 24 of the workpiece 11 to be measured. This is performed by detecting that the reaction force F0 is suddenly reduced. Further, when the breakage of the joint portion is detected, the brake system provided in the drive unit 16 is operated to stop the drive unit 16 or return the share tool 15 to the initial state. It is possible to prevent the shear tool 15 from being broken or the shear strength measuring device 10 from being damaged by hitting the substrate 13.

  The calculation of the share strength is not limited to the above formulas (2) and (3), and may be a formula to which items determined by appropriate correction items and predetermined conditions are added.

  The share strength information calculated by the arithmetic processing unit 18 is sent to the interface unit 19. The interface unit 19 converts this information into management information. As the management information, for example, there is a comparison table between the history of the workpiece 11 to be measured, the substrate 13, the joining member 12, and the shear tool, and the shear strength. The management information may simply be the share strength for each measurement. Such management information is desirably displayed on a display or the like and stored in a storage medium.

  In the shear strength measuring apparatus 10 and the shear strength measuring method described above, there are various types depending on the shape of the workpiece 11 to be measured and the configuration of the protrusion 20 and other workpieces disposed in proximity to the workpiece 11 to be measured. It is possible to selectively use a shape sharing tool. Hereinafter, specific examples of the share tool will be described.

(First embodiment)
FIGS. 3A and 3B are diagrams showing the share tool 15 according to the first embodiment, in which FIG. 3A is a side view, and FIG. 3B is a bottom view viewed from the arrow direction (substrate 13 side) of FIG. The shear tool 15 is a columnar member formed of a high hardness material such as a super steel alloy, and includes a root shaft portion 21 and a tip shaft portion 26 extended from the root shaft portion 21 as shown in FIG. Has been. The root shaft portion 21 is a portion held by the tool holder 27. As shown in FIG. 3B, the distal end shaft portion 26 has a square (rectangular or square) cross-sectional shape on the root shaft portion 21 side. The tip shaft portion 26 is formed with a slope portion 23 from the root shaft portion 21 side to the tip portion 22. The back surface portion 25 on the opposite side to the inclined surface portion 23 is formed in a plane that passes through the tip portion 22 and is perpendicular to the substrate 13. The slope portion 23 is configured by a plane that is inclined at an inclination angle θ with respect to the back surface portion 25.

  When the shear tool 15 is brought into contact with the ridge line 24 of the workpiece 11 to be measured, the shear tool 15 is arranged in a state where the position of the shear tool 15 is adjusted so that the ridge line 24 and the slope portion 23 are parallel to each other. Is done.

  In the present embodiment, the root shaft portion 21 has a substantially circular cross-sectional shape perpendicular to the axial direction. A planar cut portion 29 is formed on the side surface of the root shaft portion 21 in the direction in which the inclined surface portion 23 is formed from the tip portion 28 to the end portion on the tip shaft portion 26 side. The back surface portion 25 of the share tool 15 is brought into a contact state such that the back surface portion 25 does not come into contact with the protruding portion 20 or no side pressure is applied.

  The tool holder 27 has an attachment mechanism (not shown) in which the shear tool 15 can be attached and detached. The tool holder 27 is provided with a hole 30 for inserting the root shaft portion 21 of the shear tool 15, and a guide portion 31 along the plane cut portion 29 of the shear tool 15 is provided on the inner side surface of the hole 30. Thereby, the position in the circumferential direction of the slope portion 23 of the shear tool 15 is determined, and the slope portion 23 is directed in a certain direction. It is desirable that the clearance in the direction perpendicular to the axial direction is set to a minimum while the shear tool 15 is detachable from the tool holder 27.

  As a structure for holding the shear tool 15 by the tool holder 27, when the shear tool 15 is formed of an iron-based metal, a permanent magnet (not shown) is provided close to the bottom surface of the hole 30 of the tool holder 27. ) And can be held by being attracted by a magnetic attractive force. Moreover, it is good also as a structure which arrange | positions a spring (not shown) inside the hole 30 of the tool holder 27, and presses the side surface of the shear tool 15 to the inner side surface of the hole 30 with this spring. Furthermore, it is good also as a structure which fixes the side surface of the shear tool 15 with the screw | thread which penetrates the side surface of the tool holder 27. FIG.

  According to the shear strength measuring method and the shear strength measuring device 10 described above, the slope 23 of the shear tool 15 is pressed against the ridge line 24 of the workpiece 11 to be measured, and a load is applied in the vertical direction toward the substrate 13. A shearing force (a load parallel to the substrate 13) can be applied to the workpiece 11 to be measured by the slope effect of the slope portion 23, and the shear strength of the joint between the substrate 13 and the workpiece 11 to be measured can be measured.

  Further, by providing the inclined surface portion 23 on the distal end shaft portion 26 of the shear tool 15, the contact portion between the inclined surface portion 23 and the ridge line 24 of the workpiece 11 to be measured and the distal end portion 22 side are more than the root portion of the distal end shaft portion 26. It is thin (thin). For this reason, even if the gap between the other workpiece or the protrusion 20 and the workpiece 11 to be measured is small compared to the measurement method of Patent Document 1 in which a load parallel to the substrate 13 is applied, the shear tool 15 is inserted into this gap. The distal end shaft portion 26 can be inserted.

  Further, the thickness of the root shaft portion 21 of the shear tool 15 and the thickness of the tip shaft portion 26 on the root shaft portion 21 side is larger than the thickness of the position where a shearing force (a load parallel to the substrate 13) is applied to the workpiece 11 to be measured. Therefore, the share tool 15 can secure a sufficient strength with respect to the share strength.

  In addition, in the shear strength measurement method described in Patent Document 1, when a shear force parallel to the substrate 13 is applied to the workpiece by the shear tool, the shear tool is brought into contact with the substrate at the tip (or most recently). In general, the shearing force is applied to the workpiece to be measured by moving it down to a predetermined height position. As a result, the movement trajectory of the share tool becomes longer, and the measurement takes time. On the other hand, in the present embodiment (including Example 1 and each example described below), the slope portion 23 of the shear tool 15 is brought into contact with the ridge line 24 of the workpiece 11 to be measured, and the measurement target is in that state. Since a load is applied to the workpiece 11, the time required for measurement can be shortened.

  In addition, the shear tool 15 shown in the first embodiment has a vertical distance H1 from the contact position between the slope portion 23 and the ridge line 24 to the distal end portion 22 of the shear tool 15 and the vertical distance from the contact position to the substrate 13. It is shorter than the direction distance H2. In this way, the shear strength can be measured before the tip 22 of the shear tool 15 reaches the substrate 13.

(Second embodiment)
Next, a second embodiment of the present invention will be described. FIG. 4 is a view showing a share tool 35 according to the second embodiment, (A) is a side view, and (B) is a side view showing a modification of (A). As shown in FIG. 4A, the tip shaft portion 36 of the shear tool 35 has a first slope portion 37 corresponding to the first embodiment (see FIG. 3) and a back surface opposite to the slope portion 37. And a second inclined surface portion 40 that is inclined in the opposite direction with respect to the inclined portion 37. The second inclined surface portion 40 is formed by a plane having an inclination angle θ <b> 2 with respect to a plane perpendicular to the substrate 13 through the distal end portion 38 of the distal end shaft portion 36. The inclination angle θ2 of the second inclined surface portion 40 is preferably set to be the same as or smaller than the inclination angle θ1 of the first inclined surface portion 37.

  The root shaft portion 39 can take the same shape as the root shaft portion 21 of the first embodiment (see FIG. 3), and the structure of the tool holder 27 and the holding structure of the shear tool 35 by the tool holder 27 The same structure as that of the first embodiment can be adopted.

  In a modification of the second embodiment (see FIG. 4A), as shown in FIG. 4B, the tip portion 38 passes between the second slope portion 40 and the tip portion 38 and is perpendicular to the substrate 13. The flat surface portion 41 is interposed. The flat surface portion 41 corresponds to a part of the back surface portion 25 of the first embodiment, and the second inclined surface portion 40 and the flat surface portion 41 do not contact the protruding portion 20.

  The shape of the tip shaft portion 36 of the shear tool 35 of the second embodiment described above is substantially wedge-shaped by providing the second slope portion 40 on the back side of the slope portion 37. If the distal end shaft portion 36 is formed in such a shape, the width (thickness) of the distal end shaft portion 36 at the position where the shear strength is measured (contact position with the workpiece 11 to be measured) is set as in Patent Document 1, A plane perpendicular to the substrate 13 of the shear tool 35 on the workpiece 11 can be made smaller (thinner) than the width (thickness) of the shear tool of the measurement method in which a load parallel to the substrate 13 is applied. As a result, even if the gap between another workpiece or projection 20 and the workpiece 11 to be measured is small, the tip shaft portion 36 of the shear tool 35 can be inserted into this gap and the shear strength can be measured. Further, by forming the tip shaft portion 36 in such a shape, the root portion of the tip shaft portion 36 can be thickened, and the strength of the shear tool 35 can be increased.

  Even if the shape of the shear tool 35 is the same as the modification of the second embodiment (see FIG. 4B), the same effect as described above can be obtained.

(Third embodiment)
Next, the share tool 45 according to the third embodiment will be described with reference to the drawings. The third embodiment is characterized in that the bottom surface of the tip shaft portion 46 of the shear tool 45 is a polygonal cone (polygonal pyramid). Here, a regular quadrangular pyramid will be described as an example of a polygonal pyramid.

  FIGS. 5A and 5B are views showing a shear tool 45 according to a third embodiment of the present invention, in which FIG. 5A is a side view, and FIG. 5B is a bottom surface viewed from the direction of the arrow (substrate 13 side) of FIG. FIG. As shown in FIG. 5, in the shear tool 45, the distal end shaft portion 46 has a regular quadrangular pyramid. As shown in FIG. 5B, each of the four side surfaces 47A, 47B, 47C, 47D of the distal end shaft portion 46 corresponds to the slope portion 23 of the first embodiment (see FIG. 3). Therefore, these side surfaces are represented as slope portions 47A, 47B, 47C, 47D. Each inclined surface portion has an inclination angle θ with respect to a plane perpendicular to the substrate 13 through the distal end portion (vertex) 48 of the distal end shaft portion 46. This inclination angle θ corresponds to the inclination angle θ of the first embodiment (see FIG. 3A).

  The shape of the root shaft portion 49 of the shear tool 45 is a regular quadrangular prism, and includes side surfaces that are continuous with the slope portions 47A, 47B, 47C, and 47D.

  The tool holder 50 is provided with a hole 51 into which the root shaft portion 49 of the shear tool 45 is inserted. Therefore, the bottom shape of the hole 51 is also a regular square. Accordingly, the tool holder 50 can be attached so that any one of the slope portions 47A, 47B, 47C, 47D of the shear tool 45 faces the ridge line 24 of the workpiece 11 to be measured. Further, since the shear tool 45 is a regular quadrangular pyramid, even if the shear tool 45 is replaced with the tool holder 50, all of the slope portions 47A, 47B, 47C, and 47D are in the same state as the ridge line 24 of the workpiece 11 to be measured. Abutment is possible. For example, the shear strength can be measured under the same conditions even when the inclined surface portion to be contacted is changed from the inclined surface portions 47A to 47B. Note that it is desirable that the clearance with the hole 51 is set to a minimum while the share tool 45 can be attached to and detached from the tool holder 50. In addition, the holding structure of the share tool 45 by the tool holder 50 can take the same structure as the first embodiment described above.

  Note that the shape of the tip shaft portion 46 of the shear tool 45 is not limited to a regular quadrangular pyramid, but may be a regular triangular pyramid, a regular pentagonal pyramid, or the like, but may also be a quadrangular pyramid that is not a regular polygon. Further, the bottom shape of the root shaft portion 49 may be a polygonal column other than the regular quadrangular column.

  In the shear tool 45 of the third embodiment described above, the tip shaft portion 46 is formed of a polygonal pyramid such as a triangular pyramid or a quadrangular pyramid, so that a slope portion that can contact the ridge line 24 of the workpiece 11 to be measured is formed. Since a plurality of slopes are provided, the life of the shear tool 45 can be extended by sequentially switching the slopes that are brought into contact with the ridge line 24 of the workpiece 11 to be measured. In addition, when the front-end | tip axis | shaft part 46 is formed in the polygonal pyramid which is not a regular polygonal pyramid, any slope part 47A-47D is used by the inclination angle and area differing between slope part 47A-47D. Thus, the measurement conditions can be changed.

(Fourth embodiment)
Next, the share tool 55 according to the fourth embodiment will be described with reference to the drawings. The fourth embodiment is characterized in that the tip shaft portion of the shear tool 55 has a conical shape.

  FIG. 6 is a side view showing the share tool 55 according to the fourth embodiment. As shown in FIG. 6, the share tool 55 has a tip shaft portion 56 having a conical shape. However, in this conical shape, the length of the generatrix 58 is constant when the tip portion (vertex) 57 of the tip shaft portion 56 is set as the rotation center. 1/2 of the apex angle θ3 corresponds to the inclination angle θ of the first embodiment (see FIG. 3), and the conical side surface corresponds to the inclined surface portion 60. The root shaft portion 59 of the share tool 55 is a cylinder.

  The tool holder 61 is provided with a hole 62 into which the root shaft portion 59 of the shear tool 55 is inserted. Therefore, the bottom shape of the hole 62 is circular. By making the tip shaft portion 56 conical, even when the shear tool 55 rotates around the central axis (axis passing through the vertex 57 and perpendicular to the substrate 13), it contacts the ridge line 24 of the workpiece 11 to be measured. The conditions do not change. Further, the slope 60 and the ridge line 24 are in point contact. Note that it is desirable that the clearance with the hole 62 is set to a minimum while the share tool 55 can be attached to and detached from the tool holder 61. The holding structure of the shear tool 55 by the tool holder 61 can be the same as that of the first embodiment described above.

  According to the fourth embodiment described above, the tip shaft portion 56 of the shear tool 55 is formed into a conical shape, so that the slope portion 60 (actually point contact can be brought into contact with the ridgeline 24 of the workpiece 11 to be measured. ) Can be set at an arbitrary position in the circumferential direction of the bus 58, and the life of the shear tool can be extended. Moreover, it becomes easy to cope with the ridgeline 24 of the workpiece 11 to be measured having an irregular shape that is not a straight line.

  Further, since the root shaft portion 59 is a cylinder, the shear tool 55 can be attached to the hole 62 of the tool holder 61 without considering the slope direction by making the inner bottom surface of the hole 62 of the tool holder 61 circular. Is possible.

(5th Example)
Next, the share tool 65 according to the fifth embodiment will be described with reference to the drawings. In the fifth embodiment, the slope portion of the shear tool 65 that contacts the ridge line 24 of the workpiece 11 to be measured has a curved surface having a convex shape or a concave shape from the root shaft portion 21 side to the tip portion 22 side of the tip shaft portion 26. It is characterized by having.

  FIGS. 7A and 7B are diagrams showing a shear tool 65 according to the fifth embodiment, in which FIG. 7A is a side view in the case of having a convex curved surface, and FIG. 7B is a side view in the case of having a concave curved surface. It is. Here, a case where a curved surface is formed on the slope portion 23 of the shear tool 15 of the first embodiment (see FIG. 3) will be described as an example. In FIG. 7, the convex and concave curved surfaces are exaggerated. In addition, the same reference numerals as those in the first embodiment are attached to common parts with the first embodiment.

  As shown in FIG. 7 (A), the slope portion 23 of the shear tool 65 (a part of the original shape is indicated by a two-dot chain line) is directed from the root shaft portion 21 side toward the tip portion 22 of the tip shaft portion 26. An arcuate convex curved surface 66 is formed in the middle. In the range of the convex curved surface 66, the ridgeline 24 of the workpiece 11 to be measured comes into contact. The convex curved surface 66 is set so that the center 67 of the circular arc is located above the contact position with the ridge line 24 (on the base shaft portion 21 side). In FIG. 7A, the convex curved surface 66 is formed in the range inside the slope portion 23, but the entire slope portion 23 may be the convex curved surface 66.

  In the configuration shown in FIG. 7B, the shear tool 65 includes a slope portion 23 (a part of the original shape is represented by a two-dot chain line) from the root shaft portion 21 side to the tip portion of the tip shaft portion 26. An arc-shaped concave curved surface 68 is formed in the middle of the direction 22. The shear tool 65 contacts the ridge line 24 of the workpiece 11 within the range of the concave curved surface 68. The concave curved surface 68 is set so that the center 69 of the circular arc is located below the contact position with the ridge line 24 (on the substrate 13 side). In FIG. 7B, the concave curved surface 68 is formed in the range inside the slope portion 23, but the entire slope portion 23 may be the concave curved surface 68.

  In addition, when the slope part 23 is provided with the convex curved surface 66 or the concave curved surface 68, let these curved surfaces be the inclination | tilt angle of the tangent of the curved surface in a contact position with the ridgeline 24, and shear strength (horizontal force). What is necessary is just to calculate Wh.

  Further, when this embodiment is adapted to the second embodiment, it is possible to configure the convex curved surface and the concave curved surface by combining them according to the position on the slope portion 23. For example, in the configuration of the second embodiment (see FIG. 4), the first slope portion 37 may be a convex curved surface or a concave curved surface, and the second slope portion 40 may be a concave curved surface.

  As shown in FIGS. 7 (A) and 7 (B), the shear tool 65 of the fifth embodiment described above has a sloped surface portion 23 having a convex curved surface 66 from the root shaft portion 21 side toward the tip end portion 22 side. Alternatively, a concave curved surface 68 is provided. In this way, by providing the inclined surface 23 with the convex curved surface 66 or the concave curved surface 68, the shape of the workpiece 11 to be measured is, for example, even when the side surface on the side contacting the inclined surface portion 23 is uneven. It becomes possible to expand the application range of shear strength measurement.

(Sixth embodiment)
Next, the share tool 15 according to the sixth embodiment will be described with reference to the drawings. The sixth embodiment is characterized in that the distal end portion of the shear tool 15 is formed as a flat surface or a curved surface having an obtuse angle than the inclination angle of the slope portion 23. The present embodiment can be adapted to each of the share tools 15, 35, 45, 55 shown in the first to fifth embodiments described above, but here the first embodiment (see FIG. 3). The share tool 15 will be described as an example.

  FIGS. 8A and 8B are views showing the distal end shaft portion 26 of the shear tool 15 according to the sixth embodiment, where FIG. 8A is a side view when the distal end portion is a plane, and FIG. 8B is a side view where the distal end portion has a curved surface. It is a part of side view which shows a case. As shown in FIG. 8A, the distal end portion 22 of the distal end shaft portion 26 of the shear tool 15 has a shape that is cut by a plane 70 parallel to the substrate 13. The plane 70 may be a single plane or a combination of a plurality of planes as long as the plane 70 has an obtuse angle than the inclination angle θ. 8B, the distal end portion 22 of the distal end shaft portion 26 of the shear tool 15 has the distal end portion 22 rounded by a curved surface 71. The curved surface 71 is a hemispherical curved surface when the tip shaft portion is a conical shape or a polygonal pyramid.

  If the inclination angle θ of the shear tool 15 and the thickness of the workpiece 11 to be measured are the same as those in the first embodiment, in the sixth embodiment, the tip of the shear tool 15 is determined from the contact position between the slope portion 23 and the ridge line 24. The vertical distance H3 to (the plane 70 or the curved surface 71) is smaller than the distance H1 at the same position in the first embodiment. Therefore, if the shear tool 15 has such a shape, it is possible to measure the workpiece 11 to be measured which is thinner than the first embodiment. In addition, the strength of the tip of the shear tool can be increased.

(Second Embodiment)
Subsequently, a shear strength measurement method according to the second embodiment will be described. The second embodiment is characterized in that a load in the vertical direction is applied to the workpiece 11 to be measured 11 and a load parallel to the substrate 13 is further applied. In this embodiment, it can be adapted to each of the share tools 15, 35, 45, 55, 65 of the first to sixth examples, but here, the share tool 15 of the first example (see FIG. 3). ) Will be described as an example with reference to FIG.

  In the shear strength measurement method according to the first embodiment, the shear tool 15 applies a load in the direction perpendicular to the substrate 13 to the ridge line 24 of the workpiece 11 to be measured, and the joint portion between the workpiece 11 and the substrate 13 is measured. Is measuring the strength of share. In the second embodiment, when the horizontal force generated by the load applied in the vertical direction is insufficient with respect to the shear strength (drag), the slope portion 23 is in contact with the ridge line 24 of the workpiece 11 to be measured. In this method, a load parallel to the substrate 13 is further applied to the workpiece 11 to be measured.

  In such a shear strength measuring apparatus using the shear strength measuring method, the drive unit 16 includes means for applying a load in the vertical direction to the substrate 13 and means for applying a parallel load. The detection unit 17 includes means for detecting a reaction force in the vertical direction that the shear tool 15 receives from the workpiece 11 to be measured, and means for detecting a reaction force in the parallel direction. Based on the detected vertical reaction force, the arithmetic processing unit 18 calculates a horizontal force. In the shear strength measurement method of the present embodiment, the sum of the horizontal force and the reaction force in the parallel direction when the joint between the workpiece 11 to be measured and the substrate 13 is broken is the shear strength.

  Further, without applying a load in the vertical direction to the workpiece 11 to be measured, the slope portion 23 of the shear tool 15 is brought into contact with the ridge line 24 of the workpiece 11 to be measured, and in this state, the slope portion 23 is parallel to the substrate 13. It is also possible to apply a load to the workpiece 11 and measure the shear strength.

  According to the shear strength measuring method according to the present embodiment described above, the substrate 13 and the workpiece 11 to be measured are joined by applying a load parallel to the substrate 13 in addition to the load in the vertical direction on the workpiece 11 to be measured. Even when the drag of the part is large, it is possible to widen the measurement range of the shear strength. Further, in the present embodiment, a load in the horizontal direction (parallel to the substrate 13) is applied to the workpiece 11 to be measured by the slope portion 23 of the shear tool 15. Therefore, the width of the distal end shaft portion 26 (thickness at the contact position with the workpiece 11 to be measured) is set to be a substrate perpendicular to the workpiece 13 to be measured 11 as in the case of Patent Document 1. 13 can be made smaller than the width (thickness) of the shear tool of the measuring method in which a load parallel to 13 is applied. As a result, even if the gap between the other workpiece or projection 20 and the workpiece 11 to be measured is small, for example, the tip shaft portion 36 of the shear tool 15 of the first embodiment is inserted into this gap to increase the shear strength. It can be measured.

  It should be noted that the present invention is not limited to the above-described embodiments, but includes modifications and improvements as long as the object of the present invention can be achieved. For example, in the above-described embodiment, the workpiece 11 to be measured is fixed to the table 14, and the drive unit 16 is perpendicular to the workpiece 11 to be measured via the share tool 15 (or the share tools 35, 45, 55, 65). Although the load is applied in the direction or the parallel direction, the shear tool 15 may be fixed and the table 14 may be driven. Or it is good also as a combination drive of a share tool drive and a table drive.

  In each of the above-described embodiments, the share tool is attached to the tool holder. However, the share tool may be provided with attachment means and directly attached to the drive unit 16.

  In addition, when there are workpieces 11 to be measured on both the slope portion side and the back side of the shear tool, the shear strength of the workpieces 11 to be measured on both sides can be continuously measured. This will be described with reference to FIG. Here, the protrusion 20 is a workpiece 20 to be measured. First, the slope portion 23 is brought into contact with the ridge line 24 of the workpiece 11 to be measured, a vertical load is applied, and the shear strength of the workpiece 11 to be measured is measured. Subsequently, the shear tool 15 in that state is moved toward the workpiece 20 to be measured, and a load in the horizontal direction (parallel to the substrate 13) is applied to the workpiece 20 to measure the shear strength of the workpiece 20 to be measured. By applying such a measuring method, it is possible to measure the shear strength of other workpieces arranged in a direction perpendicular to the straight line connecting the workpiece 11 and the workpiece 20 to be measured.

  DESCRIPTION OF SYMBOLS 10 ... Shear strength measuring apparatus, 11 ... Work to be measured, 12 ... Joining member, 13 ... Substrate, 15 ... Share tool, 16 ... Drive part, 17 ... Detection part, 18 ... Arithmetic processing part, 19 ... Interface part, 20 ... Projection part, 21 ... Root shaft part, 23 ... Slope part, 24 ... Ridge line, 26 ... Tip shaft part, 27 ... Tool holder.

Claims (10)

A shear strength measurement method for measuring a shear strength of a joint between the substrate and the workpiece to be measured by applying a load parallel to the substrate to the workpiece to be measured joined to the substrate via a joining member. Because
The share tool includes a root shaft portion and a tip shaft portion,
The tip shaft portion includes a slope portion that is inclined with respect to a direction from the root shaft portion toward the tip shaft portion,
A direction from the root shaft portion toward the tip shaft portion is arranged substantially perpendicular to the substrate, and a surface opposite to the surface of the workpiece to be measured that is bonded to the substrate via the bonding member. In a state where the slope portion is in contact with a ridge line, a load in a substantially vertical direction toward the substrate is applied to the workpiece to be measured by the shear tool, and a share of the joint portion between the substrate and the workpiece to be measured is applied. Measure strength,
A shear strength measurement method characterized by that. The shear strength measurement method according to claim 1,
The vertical distance from the contact position between the slope part and the ridge line to the tip part of the tip shaft part of the shear tool is shorter than the vertical distance from the contact position to the substrate,
A shear strength measurement method characterized by that. The shear strength measurement method according to claim 1 or 2, wherein
The tip end shaft portion is provided with the slope portion and a second slope portion inclined in the opposite direction of the slope portion on the back surface opposite to the slope portion. Method. The shear strength measurement method according to claim 1 or 2, wherein
The tip shaft portion is formed of a polygonal pyramid having a shape cut by a plane orthogonal to the direction from the root shaft portion toward the tip shaft portion.
A shear strength measurement method characterized by that. The shear strength measurement method according to claim 1 or 2, wherein
The tip shaft portion is configured in a conical shape having a bottom surface on the root shaft side,
A shear strength measurement method characterized by that. A shear strength measurement method according to any one of claims 1 to 5,
The slope portion includes a curved surface from the root shaft portion side toward the tip portion of the tip shaft portion, and the curved surface includes one of a convex shape and a concave shape.
A shear strength measurement method characterized by that. The shear strength measurement method according to any one of claims 1 to 6,
The distal end portion of the distal end shaft portion includes a portion having an obtuse angle with respect to a plane perpendicular to a direction from the base shaft portion toward the distal end shaft portion of the slope portion, and the obtuse angle portion is a flat surface and a curved surface. At least one of
A shear strength measurement method characterized by that. The shear strength measurement method according to any one of claims 1 to 7,
A load parallel to the surface of the substrate is further applied to the workpiece to be measured by the slope portion.
A shear strength measurement method characterized by that. A shear tool for measuring the shear strength of a workpiece to be measured joined to a substrate via a joining member,
The share tool includes a root shaft portion and a tip shaft portion,
The tip shaft portion includes a slope portion that is inclined with respect to a direction from the root shaft portion toward the tip shaft portion and is in contact with the workpiece to be measured.
Share tool characterized by that. A shear strength measuring device using the shear tool according to claim 9,
A drive unit for applying a load to the share tool;
A control unit for controlling the driving of the driving unit;
A detector that measures a reaction force in a direction perpendicular to the substrate that the shear tool receives from the ridge line of the workpiece to be measured;
An arithmetic processing unit that calculates a shear strength based on the reaction force when the joint between the substrate and the workpiece to be measured is destroyed,
A shear strength measuring device characterized by that.

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