JP2015060735A - X-ray generation device and sample inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an X-ray generation device and a sample inspection device, with which it is possible to improve a utilization efficiency of X rays.SOLUTION: The x-ray generation device includes a photoexcitation-type X-ray generation source and an X-ray capillary lens that is disposed at a position at which X rays outputted from the photoexcitation-type X-ray generation source are incident. The photoexcitation-type X-ray generation source includes a vacuum container 116, a photoelectron emission layer 112 that is disposed in the vacuum container 116 and converts incident light into electrons, and an X-ray target 114 that is disposed to oppose the photoelectron emission layer 112. The X-ray capillary lens includes a plurality of capillaries made of a material capable of guiding X rays.

Description

  The present invention relates to an X-ray generator and a sample inspection apparatus using the same.

  A conventional X-ray generator is described in Patent Document 1. This X-ray generator is a photoexcited X-ray generator and exhibits very excellent characteristics.

JP 2002-231165 A

  However, in the conventional apparatus, there is room for improvement in the utilization efficiency of X-rays when X-rays are irradiated on a sample or the like. An aspect of the present invention has been made in view of such problems, and an X-ray generator that can improve the utilization efficiency of X-rays and a sample inspection apparatus that can improve the inspection accuracy of a sample by using the X-ray generator. The purpose is to provide.

  In order to solve the above-described problems, an X-ray generation apparatus according to an aspect of the present invention includes a photoexcitation X-ray generation source and an X-ray disposed at a position where X-rays output from the photoexcitation X-ray generation source are incident. The photoexcited X-ray generation source is disposed in the vacuum container, and is disposed opposite to the photoelectron emission layer. The photoelectron emission layer is disposed in the vacuum container and converts incident light into electrons. An X-ray target, and the X-ray capillary lens includes a plurality of capillaries made of a material capable of X-ray wave guiding.

  Since the X-ray capillary lens can efficiently focus or collimate the X-rays, the X-rays output from the photoexcitation X-ray generation source can be efficiently emitted toward the sample or the like. In particular, in an inspection apparatus, X-ray generation is required at precise X-ray irradiation timing and position. However, a photoexcitation X-ray generation source can be adjusted by adjusting the timing of photoexcitation and the electron travel path during excitation. These can be adjusted, and in this state, if the sample is irradiated with X-rays with high X-ray utilization efficiency, very high-precision sample inspection that could not be achieved conventionally can be performed.

  The X-ray generator according to an aspect of the present invention further includes an aperture member disposed between the X-ray emission window of the photoexcitation X-ray generation source and the X-ray capillary lens. . The aperture member is made of an X-ray shielding material, and X-rays that do not transmit through the aperture are shielded by the aperture member, so that X-rays that become noise can be prevented from entering the X-ray capillary lens. As a result, a more accurate sample inspection can be performed.

  The aperture diameter of the aperture member is smaller than the area of the end face on the X-ray incident side of the X-ray capillary lens.

  As a result, X-rays that are not used for inspection can be more reliably blocked by the aperture member.

  An X-ray generation apparatus according to an aspect of the present invention includes a case that accommodates the X-ray capillary lens, and the case includes a case main body made of a metal cylinder, and the X-ray capillary lens and the case The main body is coaxially arranged.

  Thereby, the X-ray traveling axis (optical axis) of the X-ray capillary lens can be adjusted only by adjusting the position of the case body, and the handling becomes easy.

  The case includes an X-ray transmission window that seals openings at both ends of the case body.

  The inside of the case is hermetically sealed by the X-ray transmission window, so that a stable state can always be maintained, and the use conditions are eased.

  The photo-excited X-ray generation source is further provided with a deflecting unit that is disposed between the photoelectron emission layer and the X-ray target and deflects electrons traveling between them.

  The irradiation position of the electron to the X-ray target can be changed by the deflecting unit. Therefore, the position where the X-ray is focused can be changed, and the intensity and direction of the X-ray to be output can be adjusted / changed. .

  A sample inspection apparatus according to an aspect of the present invention includes any one of the above-described X-ray generators, a sample holding unit disposed at a position where the X-rays output from the X-ray generator are irradiated, and X-ray incidence Accordingly, a detection device that detects an energy beam output from the sample to be arranged in the sample holding unit is provided.

  Various energy rays are output from the sample as X-rays enter. As energy rays, in addition to X-rays transmitted through the sample, fluorescence is output when an appropriate fluorescent substance is added to the sample. Note that some energy rays are scattered or reflected by the sample.

  One example of sample inspection is inspection in the medical field. For example, when performing a tissue examination or the like, a labeling reagent that binds only to a specific tissue is given to the tissue, and a fluorescent substance is included in the labeling reagent. Can be observed.

  In addition, the sample inspection apparatus includes an excitation light source that generates incident light to the photoelectron emission layer, a drive circuit that supplies a drive current to the excitation light source, and a control unit that performs pulse drive control of the drive circuit, The control unit controls the detection device in synchronization with the pulse drive timing.

  By controlling a detection device that detects an energy beam in synchronization with the timing at which X-rays are generated, the energy beam can be inspected at a desired timing.

  A sample inspection apparatus according to an aspect of the present invention includes an X-ray generator provided with a deflection unit, a sample holding unit disposed at a position where X-rays output from the X-ray generator are irradiated, and an X-ray incident Accordingly, a detection device that detects an energy beam output from a sample to be arranged in the sample holding unit, and a control unit that controls the deflection unit based on an output of the detection device is provided. And

  By controlling the deflection unit based on the intensity of the energy beam detected by the detection device, the intensity of the energy beam that can be detected can be maximized. That is, when the intensity of the detected energy beam is small, the deflection unit is controlled to deflect electrons, and when the intensity is increased as a result of the deflection, the deflection is further reduced. In this case, control is performed to return the deflection to the original state.

  According to the X-ray generator according to the present invention, the utilization efficiency of X-rays can be improved, and the sample inspection apparatus using the X-ray generator has high utilization efficiency of X-rays, so that high-accuracy inspection can be performed. .

It is a schematic block diagram of an X-ray generator (1st Embodiment). It is a timing chart of each signal. It is a schematic block diagram of a X-ray generator (2nd Embodiment). It is a figure which shows the deformation | transformation structure of the streak camera vicinity. It is a schematic block diagram of X-ray generator (3rd Embodiment). It is a side view which shows the polycapillary lens which concerns on one Embodiment of this invention. (A) The cross section of the polycapillary lens along the II-II line shown in FIG. 6 is shown. (B) It is sectional drawing which expands and shows area | region A1. (C) It is sectional drawing which expands and shows area | region A2. It is a figure which shows the cross-section of the base material used for manufacture of a polycapillary lens. It is a figure which expands and shows a part of cross-sectional structure of the base material shown by FIG. (A) It is a side view of a polycapillary lens. (B) An example of an X-ray intensity distribution incident on one end face is shown. (C) An example of the intensity distribution of X-rays emitted from the other end surface is shown. It is a graph which shows the result of having compared the intensity | strength distribution of the emitted X-ray with the polycapillary lens of one Embodiment and the polycapillary lens of the comparative example with a uniform capillary inner diameter. (A) It is a figure which shows the cross section which cross | intersects the X-ray waveguide direction of the polycapillary lens which concerns on a 1st modification. (B) It is sectional drawing which expands and shows area | region A1. (C) It is sectional drawing which expands and shows area | region A2. (A) It is a side view of the polycapillary lens which concerns on a 1st modification. (B) An example of an X-ray intensity distribution incident on one end face is shown. (C) An example of the intensity distribution of X-rays emitted from the other end surface is shown. It is a side view which shows the polycapillary lens which concerns on a 2nd modification. (A) It is a side view of the polycapillary lens which concerns on a 2nd modification. (B) An example of an X-ray intensity distribution incident on one end face is shown. (C) An example of the intensity distribution of X-rays emitted from the other end surface is shown. (A) It is a side view of the polycapillary lens which concerns on a 2nd modification. (B) An example of an X-ray intensity distribution incident on one end face is shown. (C) An example of the intensity distribution of X-rays emitted from the other end surface is shown. It is a side view which shows the polycapillary lens which concerns on a 3rd modification. (A) It is a side view of the polycapillary lens which concerns on a 3rd modification. (B) An example of an X-ray intensity distribution incident on one end face is shown. (C) An example of the intensity distribution of X-rays emitted from the other end surface is shown. (A) It is a side view of the polycapillary lens which concerns on a 3rd modification. (B) An example of an X-ray intensity distribution incident on one end face is shown. (C) An example of the intensity distribution of X-rays emitted from the other end surface is shown. It is a figure which shows the cross-section of the base material used for manufacture of a polycapillary lens as a 4th modification. It is a figure which expands and shows a part of cross-sectional structure of the base material shown by FIG. It is a figure which shows another form of a 4th modification, Comprising: Part of the cross-section of the base material used for manufacture of a polycapillary lens is expanded and shown. It is a figure which shows the cross-section of the base material used for manufacture of a polycapillary lens as a 5th modification. It is a figure which shows the cross-section of the base material used for manufacture of a polycapillary lens as a 5th modification. (A) The cross section along the waveguide direction of the capillary with a large internal diameter is shown. (B) The cross section along the waveguide direction of the capillary with a small inner diameter is shown. (A) The cross section along the waveguide direction of the capillary with a large internal diameter is shown. (B) The cross section along the waveguide direction of the capillary with a small inner diameter is shown. It is a figure of the lens structure formed by accommodating a polycapillary lens in a case. It is a figure which shows a part of X-ray generator tube provided with the deflection | deviation part of an electron.

  Hereinafter, an X-ray generator according to an embodiment will be described with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant descriptions are omitted.

  FIG. 1 is a schematic configuration diagram of an X-ray generator (first embodiment). This X-ray generation apparatus includes a photoexcitation X-ray generation source and an X-ray capillary lens 10A (10B, 10C, 10D) disposed at a position where X-rays output from the photoexcitation X-ray generation source are incident (FIG. 3 and FIG. 5).

  The photoexcitation X-ray generation source includes a photoexcitation type X-ray generation tube 100 having a photoelectron emission layer 112 and an X-ray target 114, and a light source 2 for generating pulsed light such as a laser diode. A dividing unit 3, a delay unit 4, and a beam expander 5 are sequentially arranged between the light source 2 and the X-ray generation tube 100.

  The dividing means 3 is composed of a half mirror or the like, the delay means 4 to which the passing light is incident is composed of an optical fiber, and a beam expander 5 composed of a convex lens and a concave lens is arranged on the output side of the delay means 4. ing. Then, the laser beam from the light source 2 whose spot diameter is enlarged by the beam expander 5 is incident on the photoelectron emission layer 112 formed on the inner surface of the incident window 11 of the X-ray generation tube 100.

  On the other hand, the reflected light (control light) of the half mirror (dividing means 3) is reflected by the total reflection mirror 6 and is incident on the photodetector (light receiving unit) 118 electrically connected to the power source 117. Has been. The power source 117 is a DC power source for generating a pulsed acceleration voltage. The photodetector 118 includes a switching unit that generates a pulsed voltage according to the output signal. When light enters the photodetector 118, the switching means is turned on in a pulse shape, and the power source 117 is connected to the photoelectron emission layer 112. When the light incident on the photodetector 118 is a pulse, the photodetector 118 itself can function as a switching means. Even when the light incident on the photodetector 118 is not a pulse, the light detection is possible. By generating a pulsed switching voltage from the output of the voltage generator 118 and applying it to switching means connected between the power source 117 and the photoelectron emission layer 112, a pulsed acceleration voltage is applied from the power source 117 to the X-ray. It can be applied between the photoelectron emission layer 112 of the generator tube 100 and the X-ray target 114.

  As described above, the light passing through the dividing unit 3 enters the X-ray generation tube 100 via the delay unit 4, whereas the reflected light of the dividing unit 3 does not pass through the delay element and is a photodetector 118. And is used for controlling the acceleration voltage of the X-ray generator tube 100, so that the acceleration voltage can be controlled to be the pulse top voltage immediately before the photoelectron emission timing. In addition, since the laser beam whose spot diameter is enlarged by the beam expander 5 is incident on the X-ray generator tube 100, a wide area of the photoelectron emission layer 112 can function as an effective photoelectron source, and therefore sufficient. An amount of photoelectrons can be emitted, and damage to the photoelectron emission layer 112 can be reduced.

  Note that the pulsed acceleration voltage (the output voltage of the power supply 117) whose rise timing is controlled by the control light divided by the dividing means 3 is generated between the photoelectron emission layer 112 as the cathode and the X-ray target 114 as the anode. Applied between.

  Here, the vacuum vessel 116 forming the envelope of the X-ray generation tube 100 is made of an incident window 111 made of glass or the like transparent to the light from the light source 2 and beryllium or the like transparent to X-rays. An X-ray exit window 115 is formed. A photoelectron emission layer 112 made of an alkali metal or antimony is formed on the inner surface of the entrance window 111, and an X-ray target 114 made of a metal such as tungsten is provided inside the entrance window 111 so as to face the photoelectron emission layer 112. An electron lens 113 is provided between the photoelectron emission layer 112 and the X-ray target 114 to focus the photoelectrons E1 emitted from a large area of the photoelectron emission layer 112 onto one point of the X-ray target 114.

  The electron lens 113 generates an electric field or a magnetic field in a space through which electrons pass by applying a voltage or flowing a current between a pair or a plurality of pairs of electrodes or electromagnetic coils arranged opposite to each other. The degree and position of electron focus can be controlled by controlling the supply current. That is, when the electron focusing position is moved, the electron lens 113 can also function as an electron deflecting unit. However, the electron lens 113 may include a deflecting unit separately from the electron lens 113.

  That is, as shown in FIG. 28, the deflecting portion CL can be provided outside the vacuum vessel 116, for example, at a position sandwiching the electron lens 113. Since the deflecting portion CL only needs to have an electron deflection function, it can be composed of a pair or a plurality of pairs of electrodes or electromagnetic coils. In a space sandwiched between electrodes, an electric field is generated by applying a voltage between them, and in a space sandwiched between electromagnetic coils, a magnetic field is generated in the space between them. In either case, electrons traveling in the space can be deflected.

  The sample inspection apparatus of this embodiment includes an X-ray generator provided with the deflection unit CL shown in FIG. 28, and an X-ray output from the X-ray capillary lens 10A (10B, 10C, 10D) of the X-ray generator. And a detection device (streak tube M and video camera) for detecting energy rays output from the sample to be placed on the sample holder S as X-rays are incident (Streak camera provided with (solid-state image sensor) 38). This device includes a control unit (including a computer 33) that controls the deflection unit CL based on the output of the detection device.

  The control unit outputs a control signal CTR to the deflection unit CL of FIG. 28 based on the intensity of the energy beam from the sample detected by the detection device, and controls the amount of electron deflection in the deflection unit CL. Thereby, the intensity | strength of the energy ray which can be detected with a detection apparatus can be maximized. That is, when the detected energy beam intensity is small, the deflection unit CL is controlled to deflect electrons, and when the intensity increases as a result of the deflection, the deflection is further reduced. In the event of a failure, control is performed to return the deflection to the original state.

  The deflection unit CL preferably deflects the electron beam with a magnetic field of an electromagnetic coil (= deflection coil). At an intermediate position between the photocathode and the X-ray target, the magnetic field is arranged so as to be orthogonal to the electron beam to deflect the electron beam. Two pairs of electromagnetic coils for generating the magnetic field are fixed to the outside of the vacuum vessel 116. Left / right deflection is performed with one pair (= 2 coils), and upper / lower deflection is performed with the other pair. With the control signal CTR (coil current), the irradiation position of the electron beam on the target can be adjusted so that the output X-ray intensity of the capillary lens is maximized while deflecting the electron beam.

  In FIG. 1, the X-ray X1 output from the photoexcitation X-ray generation source passes through the opening of the aperture member 42 and enters the X-ray capillary lens 10A (10B). The incident X-ray is collimated by the X-ray capillary lens 10A (10B), emitted as the final output X-ray X2, and irradiated onto the sample holder S.

  The energy beam L2 emitted from the sample arranged in the sample holding unit S passes through the slit of the appropriate slit member 43 and enters the streak tube M. The streak tube M converts incident energy rays into electrons through a photocathode M2 provided in the tube M1, and then accelerates through an acceleration electrode M3. The electron stream is focused by the focusing electrode M4. Later, the light is deflected by the deflecting electrode M5, and then electrons are made incident on the electron multiplier (multichannel plate: MCP) M6. In the electron multiplier M6, the incident electrons are multiplied, and the electrons are irradiated to the phosphor M7 to be converted into a fluorescent image. Accordingly, a fluorescent image is output from the streak tube M, and this fluorescent image is taken by the video camera 38. The photocathode M2 can convert fluorescence into electrons, but can also convert X-rays into electrons when X-rays are incident on the photocathodes M2. The photocathode M2 can be formed by arranging a photoelectric conversion material on the inner surface of a glass face plate.

  The video signal from the video camera 38 is stored for each frame by the frame grabber 39, and the stored image data is input to the computer 33. The computer 33 can display the acquired image data on the display 40. The computer 33 can be controlled by an input signal from the input device 41.

  Here, a sweep voltage is applied from the sweep circuit 37 to the pair of deflection electrodes M5 of the streak tube M. Thereby, with the passage of time, the direction of electrons passing between them changes, and a series of streak images for each time is displayed at different positions of the phosphor M7. A series of these streak images (fluorescent images) are taken by the video camera 38. The frame rate of the video camera 38 can be set to a period in which one frame can be read out after all of a series of streak images generated with the incidence of one pulse X-ray are incident.

  As described above, this sample inspection apparatus is arranged in the sample holder S arranged at the position where the X-rays output from the X-ray generator are irradiated, and in the sample holder along with the X-ray incidence. And a detection device for detecting energy rays output from the sample to be processed.

  Various energy rays are output from the sample as X-rays enter. As energy rays, in addition to X-rays transmitted through the sample, fluorescence is output when an appropriate fluorescent substance is added to the sample. Note that some energy rays are scattered or reflected by the sample.

  One example of sample inspection is inspection in the medical field. For example, when performing a tissue examination or the like, a labeling reagent that binds only to a specific tissue is given to the tissue, and a fluorescent substance is included in the labeling reagent. Can be observed.

  Further, the sample inspection apparatus performs pulse drive control of the excitation light source (laser light source) 2 that generates the incident light L1 to the photoelectron emission layer 112, the drive circuit 31 that supplies a drive current to the excitation light source 2, and the drive circuit 31. A control unit (computer 33 and synchronization circuit 34) is provided, and this control unit controls the detection device in synchronization with the timing of pulse driving.

  When a desired pulse signal is output from the computer 33, the synchronization circuit 34 outputs a synchronization signal to the drive circuit 31, and the drive circuit 31 is driven from the power source 32 to the excitation light source 2 in synchronization with the input of the synchronization signal. Supply current. Therefore, the light source 2 emits pulses. On the other hand, the synchronizing circuit 34 also outputs a synchronizing signal to the frequency divider 35, and the frequency dividing device 35 converts the inputted synchronizing signal into a pulse having an appropriate period and converts it into a delay circuit 36. Input sync signal. The frequency dividing ratio of the frequency divider 35 is controlled by the computer 33. The delay circuit 36 determines the delay amount of the synchronization signal, and determines the delay amount according to the time when the output signal DLY from the photodetector 118 that detects the light emission of the light source 2 is input. The synchronization signal with an appropriate delay is input to the sweep circuit 37, and the sweep circuit 37 sweeps the output voltage in synchronization with the synchronization signal. The amount of delay by the delay circuit 36 is set so that sweeping is started at the timing when the sample is irradiated with X-rays and converted into electrons and then passes through the deflection electrode M5.

  As described above, the above-described X-ray generation apparatus includes a photoexcitation X-ray generation source and an X-ray capillary lens disposed at a position where X-rays output from the photoexcitation X-ray generation source are incident. The photoexcited X-ray generation source includes a vacuum container 116, a photoelectron emission layer 112 that is disposed in the vacuum container 116 and converts incident light into electrons, and an X-ray target 114 that is disposed to face the photoelectron emission layer 112. The X-ray capillary lens includes a plurality of capillaries made of a material capable of X-ray wave guiding.

  Since the X-ray capillary lens can efficiently collimate X-rays, the X-rays output from the photoexcitation X-ray generation source can be efficiently emitted toward a sample or the like. In particular, in an inspection apparatus, X-ray generation is required at precise X-ray irradiation timing and position. However, a photoexcitation X-ray generation source can be adjusted by adjusting the timing of photoexcitation and the electron travel path during excitation. These can be adjusted, and in this state, if the sample is irradiated with X-rays with high X-ray utilization efficiency, very high-precision sample inspection that could not be achieved conventionally can be performed.

  In addition, the above-described X-ray generation apparatus is provided between the X-ray emission window 115 of the photoexcitation X-ray generation source and the X-ray capillary lens 10A (10B, 10C, 10D) (see FIGS. 1, 3, and 5). The aperture member 42 is further provided. The aperture member 42 is made of an X-ray shielding material, and the X-ray that does not transmit through the opening is shielded by the aperture member 42, thereby preventing X-rays that become noise from entering the X-ray capillary lens. . As a result, a more accurate sample inspection can be performed.

  The aperture diameter of the aperture member 42 is smaller than the area of the end face 14 on the X-ray incident side in the X-ray capillary lens. Thereby, X-rays that are not used for inspection can be blocked by the aperture member 42 more reliably.

  Further, as shown in FIG. 28, the above-described photoexcited X-ray generation source is provided between the photoelectron emission layer and the X-ray target, and includes a deflection unit CL that deflects electrons traveling between them. Yes. The irradiation position of the electron to the X-ray target can be changed by the deflecting unit. Therefore, the position where the X-ray is focused can be changed, and the intensity and direction of the X-ray to be output can be adjusted / changed. .

  Next, the operation of the X-ray generator shown in FIG. 1 will be described with reference to the timing chart of FIG. 2A to 2D, the horizontal axis is the time axis, the vertical axes are the light intensity, the light intensity is shown in FIG. 2C, the voltage is shown in FIG. 2C, and the X is shown in FIG. Line strength.

  First, the waveforms of incident light (light incident on the photoelectron emission layer 112) emitted from the light source 2 and divided into two by the dividing means 3 and control light (light incident on the photodetector 118) are shown in FIG. As shown in Of these, incident light that has passed through the dividing means 3 becomes delayed incident light that is delayed in timing through the delay means 4 (see FIG. 2B), and photoelectrons are emitted from the photoelectron emission layer 112 in synchronization therewith. Is done.

  On the other hand, the control light reflected by the dividing means 3 enters the photodetector 118 without passing through the delay element, and a pulsed acceleration voltage (output voltage of the power supply 117) is synchronized with the rising timing of the control light. stand up. Here, when the time constant of the path from the power supply 117 to the photoelectron emission layer 112 is set so that the fall timing of the acceleration voltage is delayed from the fall timing of the delayed incident light (see FIG. 2B), The voltage waveform can be controlled so as to maintain the pulse top voltage until photoelectrons are emitted from the photoelectron emission layer 112 and collide with the X-ray target 114, as shown in FIG.

  The time from the rise to the fall of the acceleration voltage (holding time of the pulse top voltage) is set to a time shorter than the time at which discharge occurs between the photoelectron emission layer (photocathode) 112 and the X-ray target (anode) 114. Is done. The time required for discharge to occur (discharge required time) is shorter as the voltage between both electrodes is higher, and the pulse width of the acceleration voltage must be shorter than the required discharge time.

  As is apparent from FIGS. 2B and 2C, the delayed incident light light pulse and the acceleration pulse voltage pulse are converted into photoelectrons while the voltage pulse is the pulse top voltage. The light enters the emission layer 112. That is, a high acceleration voltage has already been applied at the time when a light pulse of delayed incident light is incident on the photoelectron emission layer 112. Therefore, the emitted photoelectrons are gradually accelerated while being focused by the electron lens 113 to which a voltage is applied by a power source (not shown), and collide with the X-ray target 114 at a high speed.

  Since the photoelectrons thus speeded up have increased kinetic energy, they collide with the X-ray target 114 to generate X-rays with higher energy than conventional X-rays. This high energy pulse X-ray is extracted through the exit window 15. The mode of the pulse X-ray is shown in FIG.

  The present invention is not limited to the above embodiment, and various modifications can be made.

  For example, the light source 2 is not limited to a laser diode, and may be a light emitting diode or a solid-state laser as long as it emits pulsed laser light. The delay means 4 is not limited to an optical fiber having a fixed length, and a prism or reflecting mirror may be used. In combination, the optical path to the photoelectron emission layer 112 may be extended. If the X-ray generation tube 100 is of a photoexcitation type, the materials, shapes, and positional relationships of the photoelectron emission layer 112, the X-ray target 114, the exit window 115, and the like can be changed as appropriate.

  In addition to the method of using the same light pulse by the dividing means 3 such as a half mirror, the method of synchronizing the light pulse of the incident light and the voltage pulse, for example, by dividing the voltage pulse of the power source of the light source 2, Any method may be used as long as the rising timing is synchronized, such as a method in which one is input to the light source 2 and the other is input to the voltage control unit 7 to achieve synchronization.

  Further, the voltage control unit including the power source 117 and the photodetector 118 applies a constant positive bias voltage equal to or lower than an allowable voltage at which discharge does not occur separately from the application of the pulse voltage between the photoelectron emission layer 112 and the X-ray target 114. You may apply between. In this case, since the pulse rise time and the pulse fall time of the voltage pulse are shortened, a higher acceleration voltage can be applied.

  Since the above-described photoexcited X-ray generation source does not cause a discharge phenomenon even when photoelectrons are accelerated at a high voltage, it is possible to generate high-energy high-frequency pulsed X-rays. Further, by changing the pulse repetition period of the light pulse or voltage pulse, the pulse repetition period of the pulse X-ray can be easily changed from the millisecond region to the picosecond region, and can be used for a wide range of applications.

  FIG. 3 is a schematic configuration diagram of an X-ray generator (second embodiment). The second embodiment is different from the first embodiment only in that an X-ray capillary lens 10C (10D) that focuses X-rays is used as the X-ray capillary lens, and the other points are the same. . In this embodiment, since the focused X-ray X2 is irradiated onto the sample, it is possible to irradiate the sample with higher-intensity X-rays and to perform highly accurate detection.

  FIG. 4 is a diagram showing a modified structure near the streak camera.

  The energy beam (fluorescence in this case) L <b> 2 output from the sample holder S can pass through another optical system before entering the slit member 43. That is, the energy beam L2 enters the appropriate second optical member 45 via the first optical member 44, and then passes through the slit of the slit member 43 and is irradiated to the photocathode M2. A condensing lens or a slit member can be used as the first optical member 44, and a collimating lens can be used as the second optical member 45, for example. The structure of the streak tube M is as described above.

  A spectroscope may be used as the second optical member 45. In this case, since the streak camera is coupled to the spectroscope, time-resolved spectroscopic measurement can be performed. In particular, for light emission measurement in the vacuum ultraviolet region and soft X-ray region, a measurement system (parts from the X-ray exit window 115 to the energy ray incident surface of the streak camera) can be arranged in the vacuum chamber. In this case, absorption of X-rays and energy rays by the atmosphere can be reduced.

  FIG. 5 is a schematic configuration diagram of an X-ray generator (third embodiment).

  The third embodiment is different from the above-described embodiment in that the video camera 38 is arranged directly after the sample holder S. The energy beam L2 from the sample is directly input to the video camera 38, but may of course be incident on the video camera 38 via an appropriate optical system. The video signal from the video camera is input to the computer 33, and the acquired image data of the energy ray image from the sample is displayed on the display 40. The computer 33 can be controlled by an input signal from the input device 41.

  A synchronization signal composed of a clock signal with an appropriate timing is input to the drive circuit 31 from the computer 33. The drive circuit 31 supplies a drive current from the power source 32 to the light source 2 in synchronization with the input of the synchronization signal. In response to this, the light source 2 emits light. Other configurations and operational effects are the same as those of the above-described embodiment.

  Next, the X-ray capillary lens will be described.

  FIG. 6 is a side view showing a (poly) capillary lens (multicapillary lens) 10A according to an embodiment of the present invention. FIG. 6 shows an X-ray XR1 incident on the polycapillary lens 10A and an X-ray XR2 emitted from the polycapillary lens 10A. The polycapillary lens 10A has a substantially cylindrical shape, and a cross section perpendicular to the central axis is a circle having a center on the central axis. The polycapillary lens 10A outputs the X-ray XR1 incident on the one end surface 14 from the dotted X-ray source 12 from the other end surface 16 as a parallel X-ray (X-ray XR2). Therefore, the diameter of the polycapillary lens 10 </ b> A gradually decreases as it approaches the incident end face 14.

  FIG. 7A shows a cross section of the polycapillary lens 10A along the line II-II shown in FIG. 6, that is, a cross section intersecting the X-ray waveguide direction of the polycapillary lens 10A. More specifically, this cross section is a cross section perpendicular to the central axis B of the polycapillary lens 10A.

  As shown in FIG. 7A, this polycapillary lens 10A has a plurality (two in this embodiment) of concentric regions A1 and A2 in a plane intersecting the X-ray waveguide direction. ing. In other words, the polycapillary lens 10A includes a first region (effective central portion) A1 and a second region (peripheral portion) A2 surrounding the first region A1 in a plane intersecting the X-ray waveguide direction. And have. The center common to these regions A1 and A2 is, for example, on the central axis B of the polycapillary lens 10A, and coincides with the central axis of the guided X-ray bundle. The diameter of the area A1 is, for example, ½ of the diameter of the area A2.

  FIG. 7B is an enlarged cross-sectional view of the region A1. FIG. 7C is a cross-sectional view showing the area A2 in an enlarged manner. As shown in FIGS. 7B and 7C, the polycapillary lens 10A has a plurality of capillaries 18a in the region A1 and a plurality of capillaries 18b in the region A2. The plurality of capillaries 18a are two-dimensionally aligned in a region A1 in a plane intersecting the X-ray waveguide direction. Similarly, the plurality of capillaries 18b are two-dimensionally aligned in a region A2 in a plane intersecting the X-ray waveguide direction. The capillaries 18a and 18b are holes extending from the incident end face (one end face) 14 to the exit end face (other end face) 16 of the polycapillary lens 10A, and are formed so as to penetrate between these faces. The capillaries 18a and 18b guide X-rays (incident X-rays XR1) incident on the openings on the incident end face 14 side, and emit parallel X-rays XR2 from the openings on the exit end face 16 side. In the drawing, capillaries 18a and 18b having a circular cross section are shown. However, the cross-sectional shapes of capillaries 18a and 18b are, for example, regular polygons (regular hexagons in one example), or regular polygons having rounded corners. It may be.

  As described above, in the polycapillary lens 10A of the present embodiment, the X-ray XR1 incident from the point-shaped X-ray source 12 is output as the parallel X-ray XR2. It is getting smaller. Specifically, in order to make the X-ray XR1 radiated from the point-like X-ray source 12 and gradually spreading enter efficiently, the extension line of the central axes of the capillaries 18a and 18b on the incident end face 14 passes through the X-ray source 12. Moreover, the capillaries 18a and 18b near the incident end face 14 are inclined toward the center of the lens 10A. On the other hand, since the parallel X-ray XR2 is emitted, the central axes of the capillaries 18a and 18b on the emission end face 16 are parallel to the central axis of the lens 10A. The capillaries 18a and 18b extend linearly on and near the central axis of the lens 10A so that the X-rays are preferably guided through the capillaries 18a and 18b having such a configuration. It is curved with a large curvature away from it. That is, the capillary 18a included in the region A1 close to the central axis is linear or slightly curved, and the capillary 18b included in the region A2 away from the central axis is greatly curved.

  Further, in the present embodiment, the inner diameter La of the capillary 18a in the region A1 and the inner diameter Lb of the capillary 18b in the region A2 are different from each other. For example, in the present embodiment, as shown in FIG. 7, the inner diameter La of the capillary 18a in the region A1 close to the central axis B is larger than the inner diameter Lb of the capillary 18b in the region A2 away from the central axis B. Here, the inner diameter La is twice as large as the inner diameter Lb. Such a difference between the inner diameter La and the inner diameter Lb is caused by a so-called dimensional error, a deviation in temperature distribution in the manufacturing process, or the like. It is sufficiently larger than the inner diameter difference.

  In such a polycapillary lens 10A, a base material is produced by bundling a plurality of capillary assemblies (hollow multi-fibers) formed by bundling a plurality of hollow tubes constituting capillaries 18a and 18b, and heat is applied to the base material. In addition, it is manufactured by stretching in a tapered shape. FIG. 8 is a view showing a cross-sectional structure of the base material 20 used for manufacturing the polycapillary lens 10A, and shows a cross section intersecting the X-ray waveguide direction. FIG. 9 is an enlarged view of a part of the cross-sectional structure of the base material 20 shown in FIG. In FIG. 8, the hatched area near the central axis B is the area A1 shown in FIG. Moreover, the area | region where the surrounding hatching is not given is an area | region used as area | region A2 shown by Fig.7 (a).

  As shown in FIG. 8, the base material 20 includes a plurality of capillary assemblies 21A and 21B. In the region A1, a plurality of capillary assemblies 21A are two-dimensionally aligned in a plane intersecting the X-ray waveguide direction. In the region A2, the plurality of capillary assemblies 21B are two-dimensionally aligned in a plane that intersects the X-ray waveguide direction. As shown in FIG. 9, the capillary assembly 21A is configured by bundling a plurality of hollow tubes 22a constituting the capillary 18a, and the capillary assembly 21B is a plurality of hollow tubes constituting the capillary 18b. 22b is bundled and constituted. In the present embodiment, the cross-sectional shapes of the capillary assemblies 21A and 21B in the plane intersecting the X-ray waveguide direction are regular hexagons, and the sides of the regular hexagons of adjacent capillary assemblies 21A (or 21B) are in contact with each other. A honeycomb-like arrangement is made. Such a form of the base material 20 is inherited by the polycapillary lens 10A, and the polycapillary lens 10A also includes a plurality of capillary assemblies having a regular hexagonal cross section.

  Further, as shown in FIG. 9, the inner diameter and the outer diameter of the hollow tube 22a constituting the capillary assembly 21A included in the region A1 are the same as those of the hollow tube 22b constituting the capillary assembly 21B included in the region A2. It is larger than the inner and outer diameters. Thus, also in the polycapillary lens 10A after the base material 20 is heated and stretched, the inner diameter of the capillary 18a in the region A1 is larger than the inner diameter of the capillary 18b in the region A2.

  However, as shown in FIG. 9, the cross-sectional shape and size of the capillary assembly 21A in the plane intersecting the X-ray waveguide direction and the cross-sectional shape and size of the capillary assembly 21B are equal to each other. Specifically, the cross-sectional shapes of the capillary assemblies 21A and 21B are both regular hexagons, and their outer diameters L1 and L2 are equal to each other.

  The effects obtained by the polycapillary lens 10A of the present embodiment described above will be described. FIG. 10 is a diagram for explaining the characteristics of the polycapillary lens 10A. FIG. 10A is a side view of the polycapillary lens 10A, FIG. 10B shows an example of the intensity distribution of the X-ray XR1 incident on the end face 14, and FIG. Shows an example of the intensity distribution of the X-ray XR2. For comparison, in FIG. 10C, the intensity distribution assumed when the inner diameter of the capillary is uniform is indicated by a broken line.

  In the polycapillary lens 10A, the capillary 18a included in the region A1 extends substantially linearly, and the capillary 18b included in the region A2 is greatly curved. In such a case, if the inner diameters of the capillaries in the regions A1 and A2 are equal to each other, as shown in FIGS. 25 and 26, the inner diameter of the capillary is narrow in the region A1, and the loss of X-rays increases. In the area A2, the inner diameter of the capillary is wide and the loss of X-rays increases. On the other hand, in the present embodiment, the inner diameter La of the capillary 18a included in the region A1 is larger than the inner diameter Lb of the capillary 18b included in the region A2. This increases the X-ray reflection interval in the capillary 18a in the region A1 (see FIG. 25 (a)), thereby reducing the number of reflections, reducing X-ray loss, and increasing the transmittance. . Further, in the capillary 18b included in the region A2, since the first reflection position of the incident X-ray approaches the end face 14, the incident angle of the X-ray to the inner wall is increased and the reflectance is increased (see FIG. 26B). ), The loss of X-rays can be reduced and the transmittance can be increased. Therefore, the intensity of the entire emitted X-ray XR2 can be increased, and for example, XRD that requires a large X-ray dose can be suitably implemented.

  FIG. 11 is a graph showing the result of comparing the intensity distribution of the emitted X-rays between the polycapillary lens 10A of the present embodiment and the comparative polycapillary lens having a uniform capillary inner diameter. In FIG. 11, the horizontal axis represents the radial position of the emission end face, and the vertical axis represents the X-ray intensity. A graph G11 shows the intensity distribution of the polycapillary lens 10A of this embodiment, and a graph G12 shows the intensity distribution of the polycapillary lens of the comparative example. The intensity distribution of incident X-rays is equal to each other. Further, in the polycapillary lens of the comparative example, the capillary inner diameter at the base material stage is uniformly 6 μm, and in the polycapillary lens 10A of the present embodiment, the capillary inner diameter La of the region A1 at the base material 20 stage is 12 μm, and the area A2 The capillary inner diameter Lb was 6 μm.

  As shown in FIG. 11, in the polycapillary lens 10A of the present embodiment, it can be seen that the intensity of the emitted X-ray is higher in both the regions A1 and A2 than in the comparative example. That is, according to the polycapillary lens 10A of the present embodiment, X-ray loss can be reduced and X-rays can be collimated efficiently.

  In the present embodiment, the capillary inner diameter La in the region A1 close to the central axis B is increased and the capillary inner diameter Lb in the region A2 far from the central axis B is decreased. It may be set as appropriate according to the use of the polycapillary lens and the required characteristics. For example, when it is desired to increase the loss in the region A1 including the linear capillary 18a, the inner diameter La of the capillary 18a in the region A1 may be decreased. When it is desired to increase the loss in the region A2 including the curved capillary 18b, the inner diameter Lb of the capillary 18b may be increased. Thus, by varying the inner diameter of the capillary for each of a plurality of regions, it is possible to realize lens characteristics suitable for the application.

  Further, the total reflection critical angle when X-rays are reflected on the inner walls of the capillaries 18a and 18b (here, the total reflection critical angle is the tangent of the inner wall surface along the waveguide direction and the X-ray incident on the inner wall surface). (The largest angle at which X-rays can be totally reflected) is smaller as the X-ray energy is higher, and is larger as the X-ray energy is lower. The total reflection critical angle also depends on the density of the constituent material of the polycapillary lens 10A. The higher the density, the larger the total reflection critical angle. For example, when the constituent material of the polycapillary lens 10A is borosilicate glass, the total reflection critical angle when the X-ray energy is 8 keV is about 0.22 °, and the total reflection critical angle when the X-ray energy is 20 keV is 0. 0.08 °. Therefore, when the X-ray energy is high, the total reflection critical angle is small, so that the inner diameter Lb of the capillary 18b in the region A2 (peripheral portion) is preferably small. Thereby, each incident can be enlarged and a loss can be reduced effectively. Conversely, when the X-ray energy is low, the total reflection critical angle is large, and therefore it is preferable that the inner diameter Lb of the capillary 18b in the region A2 (peripheral portion) is large. Thereby, the number of reflections can be reduced and the loss can be effectively reduced. Thus, in this embodiment, the intensity of the entire X-ray output from the polycapillary lens 10A can be increased by selecting an appropriate capillary inner diameter in accordance with the X-ray energy.

  In addition, as in the present embodiment, the cross-sectional shape and size of the capillary assembly are preferably equal to each other between the adjacent regions A1 and A2. As a result, the capillary assemblies 21A and 21B can be continuously aligned at the boundary between adjacent regions A1 and A2 having different inner diameters of the capillaries as in the regions A1 and A2. Therefore, the polycapillary lens 10A can be suitably manufactured while suppressing the occurrence of a gap at the boundary portion. The cross-sectional shapes of the capillary assemblies 21A and 21B are preferably regular hexagons as in this embodiment. Thereby, it is possible to easily align the capillary assemblies 21A and 21B closely without gaps.

  (First Modification) FIG. 12A is a view showing a cross section intersecting with the X-ray waveguide direction of a polycapillary lens 10B according to a first modification. The difference between the polycapillary lens 10B and the polycapillary lens 10A of the above embodiment is that the inner diameter La of the plurality of capillaries 18a included in the region A1 and the inner diameter Lb of the plurality of capillaries 18b included in the region A2 are large and small. It is. In this modification, as shown in FIGS. 12B and 12C, the inner diameter Lb is larger than the inner diameter La. Other configurations are the same as those in the above embodiment.

  In order to manufacture such a polycapillary lens 10B, in the base material 20 shown in FIGS. 8 and 9, the inner diameter and the outer diameter of the hollow tube 22b of the capillary assembly 21B included in the region A2 are set to the region. The inner diameter and the outer diameter of the hollow tube 22a of the capillary assembly 21A included in A1 may be larger.

  FIG. 13 is a diagram for explaining the characteristics of the polycapillary lens 10B. FIG. 13A is a side view of the polycapillary lens 10B, FIG. 13B shows an example of the intensity distribution of the X-ray XR1 incident on the end face 14, and FIG. Shows an example of the intensity distribution of the X-ray XR2. For comparison, in FIG. 13C, the intensity distribution assumed when the inner diameter of the capillary is uniform is indicated by a broken line.

  In this polycapillary lens 10B, the inner diameter La of the capillary 18a is small in the region A1 close to the central axis B. This shortens the X-ray reflection interval in the capillary 18a in the region A1 (see FIG. 25B), thereby increasing the number of reflections and increasing the X-ray loss. Therefore, as shown in FIG. 13C, the intensity distribution in the vicinity of the central axis of the outgoing X-ray XR2 can be reduced and the intensity distribution can be made closer to uniform. Such a polycapillary lens 10B is suitably used, for example, when it is desired to uniformly irradiate an XRD sample with X-rays.

  (Second Modification) FIG. 14 is a side view showing a polycapillary lens 10C according to a second modification. FIG. 14 also shows the X-ray XR3 incident on the polycapillary lens 10C and the X-ray XR4 emitted from the polycapillary lens 10C. The polycapillary lens 10C has a substantially cylindrical shape, and a cross section perpendicular to the central axis is a circle having a center on the central axis. The polycapillary lens 10C has a cross-sectional structure similar to the cross-sectional structure shown in FIG. 7, and has concentric regions A1 and A2 in a plane intersecting the X-ray waveguide direction. .

  The polycapillary lens 10C outputs the parallel X-ray XR3 incident on the one end surface 14 from the other end surface 16 as a focused X-ray XR4 that is focused toward the focusing point D. Therefore, the diameter of the polycapillary lens 10 </ b> C gradually decreases as it approaches the emission end face 16.

  Specifically, in order to efficiently enter the parallel X-ray XR3, the extension of the central axis of the capillaries 18a and 18b on the entrance end face 14 passes through the X-ray source 12 so that the capillaries 18a and 18b near the entrance end face 14 pass. The extending direction is parallel to the central axis of the polycapillary lens 10C. On the other hand, in order to focus the X-ray XR4 toward the converging point D, the capillaries 18a and 18b in the vicinity of the output end face 16 are made of poly so that the extension line of the central axis of the capillaries 18a and 18b on the output end face 16 passes through the converging point D. It is inclined toward the central axis of the capillary lens 10C. The capillaries 18a and 18b extend linearly at and near the central axis of the polycapillary lens 10C so that the X-rays are preferably guided inside the capillaries 18a and 18b having such a configuration. As the distance from the central axis of the capillary lens 10C increases, the curve is increased with a large curvature. That is, the capillary 18a included in the region A1 (see FIG. 7) close to the central axis of the polycapillary lens 10C is linear or slightly curved, and the region A2 (FIG. 7) away from the central axis of the polycapillary lens 10C. The capillary 18b included in FIG.

  FIG. 15 is a diagram for explaining the characteristics of the polycapillary lens 10C when the inner diameter La of the capillary 18a included in the region A1 is larger than the inner diameter Lb of the capillary 18b included in the region A2. FIG. 15A is a side view of the polycapillary lens 10C, FIG. 15B shows an example of the intensity distribution of the X-ray XR3 incident on the end face 14, and FIG. Shows an example of the intensity distribution of the X-ray XR4. For comparison, in FIG. 15C, the intensity distribution assumed when the inner diameter of the capillary is uniform is indicated by a broken line.

  In this polycapillary lens 10C, as in the above embodiment, the inner diameter La of the capillary 18a in the region A1 close to the central axis of the polycapillary lens 10C is larger than the inner diameter Lb of the capillary 18b in the surrounding region A2. This increases the X-ray reflection interval in the capillary 18a in the region A1 (see FIG. 25A), so that the number of reflections is reduced and the loss of X-rays can be reduced. Therefore, the intensity of the entire emitted X-ray XR4 can be increased, and for example, XRD that requires a large X-ray dose can be suitably implemented.

  FIG. 16 is a diagram for explaining the characteristics of the polycapillary lens 10C when the inner diameter La of the capillary 18a included in the region A1 is smaller than the inner diameter Lb of the capillary 18b included in the region A2. In this polycapillary lens 10C, since the X-ray reflection interval in the capillary 18a in the region A1 is shortened (see FIG. 25B), the number of reflections increases, and the loss of X-rays can be increased. . As a result, as shown in FIG. 16C, the intensity of the outgoing X-ray XR4 in the vicinity of the central axis of the polycapillary lens 10C can be reduced, and the intensity distribution can be made close to uniform. Such a polycapillary lens 10C is suitably used, for example, when it is desired to collect X-rays generated from the sample surface with uniform intensity.

  (Third Modification) FIG. 17 is a side view showing a polycapillary lens 10D according to a third modification. FIG. 17 also shows the X-ray XR5 incident on the polycapillary lens 10D and the X-ray XR6 emitted from the polycapillary lens 10D. The polycapillary lens 10D has a substantially cylindrical shape, and a cross section perpendicular to the central axis is a circle having a center on the central axis. The polycapillary lens 10D has a cross-sectional structure similar to that shown in FIG. 7, and has concentric regions A1 and A2 in a plane intersecting the X-ray waveguide direction. .

  The polycapillary lens 10D outputs the X-ray XR5 incident on the one end surface 14 from the point-shaped X-ray source 12 from the other end surface 16 as a focused X-ray XR6 that converges toward the focusing point D. Therefore, the diameter of the polycapillary lens 10D gradually decreases from the central portion in the central axis direction toward the incident end surface 14, and gradually decreases from the central portion in the central axial direction toward the emission end surface 16.

  Specifically, in order to make the X-ray XR5 radiated from the point-shaped X-ray source 12 and gradually spreading enter efficiently, the extension line of the central axes of the capillaries 18a and 18b on the incident end face 14 passes through the X-ray source 12. Further, the capillaries 18a and 18b near the incident end face 14 are inclined toward the central axis of the polycapillary lens 10D. On the other hand, in order to focus the X-ray XR6 toward the converging point D, the capillaries 18a and 18b in the vicinity of the output end face 16 are made of poly. It is inclined toward the central axis of the capillary lens 10D. The capillaries 18a and 18b extend linearly at and near the central axis of the polycapillary lens 10D so that X-rays can be guided preferably inside the capillaries 18a and 18b having such a configuration. As the distance from the central axis of the capillary lens 10D increases, the curve is increased with a large curvature. That is, the capillary 18a included in the region A1 close to the central axis of the polycapillary lens 10D is linear or slightly curved, and the capillary 18b included in the region A2 away from the central axis of the polycapillary lens 10D is greatly curved. ing.

  FIG. 18 is a diagram for explaining the characteristics of the polycapillary lens 10D when the inner diameter La of the capillary 18a included in the region A1 is larger than the inner diameter Lb of the capillary 18b included in the region A2. FIG. 18A is a side view of the polycapillary lens 10D, FIG. 18B shows an example of the intensity distribution of the X-ray XR5 incident on the end face 14, and FIG. Shows an example of the intensity distribution of the X-ray XR6. For comparison, FIG. 18C shows the intensity distribution assumed when the inner diameter of the capillary is uniform by a broken line.

  In this polycapillary lens 10D, as in the above embodiment, the inner diameter La of the capillary 18a in the region A1 close to the central axis B is larger than the inner diameter Lb of the capillary 18b in the surrounding region A2. Therefore, since the X-ray reflection interval in the capillary 18a in the region A1 is increased (see FIG. 25A), the number of reflections is reduced, and the X-ray loss can be reduced. Further, in the capillary 18b included in the region A2, since the first reflection position of the incident X-ray XR5 approaches the end face 14, the incident angle of the X-ray to the inner wall is increased and the reflectance is increased (FIG. 26B). X-ray loss can be reduced. Therefore, the intensity of the entire emitted X-ray XR6 can be increased, and for example, XRD that requires a large X-ray dose can be suitably implemented.

  FIG. 19 is a diagram for explaining the characteristics of the polycapillary lens 10D when the inner diameter La of the capillary 18a included in the region A1 is smaller than the inner diameter Lb of the capillary 18b included in the region A2. In this polycapillary lens 10D, since the X-ray reflection interval in the capillary 18a in the region A1 is shortened (see FIG. 25B), the number of reflections increases, and the loss of X-rays can be increased. . As a result, as shown in FIG. 19C, the intensity of the outgoing X-ray XR6 in the vicinity of the central axis of the polycapillary lens 10D can be reduced, and the intensity distribution can be made close to uniform. Such a polycapillary lens 10D is suitably used, for example, when it is desired to collect X-rays generated from one point of the sample with uniform intensity.

  (Fourth Modification) FIG. 20 is a diagram showing a cross-sectional structure of a base material 25 used for manufacturing a polycapillary lens as a fourth modification, showing a cross section intersecting the X-ray waveguide direction. Yes. FIG. 21 is an enlarged view showing a part of the cross-sectional structure of the base material 25 shown in FIG.

  As shown in FIG. 20, the base material 25 includes a plurality of capillary assemblies 26A and 26B. The plurality of capillary assemblies 26A are two-dimensionally aligned in the vertical direction and the horizontal direction in a region A1 in a plane intersecting the X-ray waveguide direction. In addition, the plurality of capillary assemblies 26B are aligned two-dimensionally in the vertical and horizontal directions in a region A2 in a plane that intersects the X-ray waveguide direction. As shown in FIG. 21, the capillary assembly 26A is formed by bundling a plurality of hollow tubes 22a constituting the capillary 18a (see FIG. 9), and the capillary assembly 26B is composed of the capillary 18b (see FIG. 9). A plurality of hollow tubes 22b constituting the above are bundled.

  In the present embodiment, the cross-sectional shapes of the capillary assemblies 26A and 26B in the plane intersecting the X-ray waveguide direction are square, and the sides of the squares of the adjacent capillary assemblies 26A (or 26B) are in contact with each other. An array has been made. Such a form of the base material 25 is also inherited by the polycapillary lens, and the polycapillary lens also includes a plurality of capillary assemblies having a square cross section.

  In FIG. 20, the hatched region near the center is a region that becomes the region A1. Moreover, the area | region where the surrounding hatching is not given is an area | region used as area | region A2. In one example, the inner and outer diameters of the hollow tubes 22a constituting the capillary assembly 26A included in the region A1 are larger than the inner and outer diameters of the hollow tubes 22b constituting the capillary assembly 26B included in the region A2. (Or small). Thereby, also in the polycapillary lens after the base material 25 is heated and stretched, the inner diameter of the capillary 18a in the region A1 becomes larger (or smaller) than the inner diameter of the capillary 18b in the region A2.

  Further, as shown in FIG. 21, the cross-sectional shape and size of the capillary assembly 26A in the region A1 and the cross-sectional shape and size of the capillary assembly 26B in the region A2 in the plane intersecting the X-ray waveguiding direction. Equal to each other. Specifically, the cross-sectional shapes of the capillary assemblies 26A and 26B are both square, and the lengths of their one sides are equal to each other.

  As in the present modification, the cross-sectional shape of the capillary assembly may be square, and even in such a shape, the capillary assemblies 26A and 26B can be closely aligned without a gap. Further, as in the present modification, the cross-sectional shapes and sizes of the capillary assemblies 26A and 26B are equal to each other, so that the capillary assemblies at the boundary portions between the adjacent regions A1 and A2 are the same as in the regions A1 and A2. The bodies 26A, 26B can be aligned continuously. Therefore, a polycapillary lens can be suitably manufactured while suppressing the occurrence of a gap at the boundary portion.

  FIG. 22 is a diagram showing another embodiment of the present modification, and shows an enlarged part of a cross-sectional structure of a base material 28 used for manufacturing a polycapillary lens. The difference between the base material 28 and the base material 25 shown in FIG. 21 is the size of the capillary assembly in the regions A1 and A2. That is, in the base material 28, the size of one side of the capillary assembly 26A in the region A1 and the size of one side of the capillary assembly 26B in the region A2 are different from each other. It is twice the size of one side of the aggregate 26B. The configurations of the capillary assemblies 26A and 26B other than the size are the same as those shown in FIGS.

  When the cross-sectional shape of the capillary assembly is square as in the present modification, the sizes of the capillary assemblies in the two regions A1 and A2 adjacent to each other may be different as shown in FIG. Even in such a case, the capillary assembly can be continuously aligned at the boundary portion between the adjacent regions A1 and A2, and generation of a gap at the boundary portion can be suppressed.

  (Fifth Modification) FIG. 23 is a view showing a cross-sectional structure of a base material 24 used for manufacturing a polycapillary lens as a fifth modification. As shown in FIG. 23, the base material 24 includes a plurality of capillary assemblies 21. Similar to the above-described embodiment, these capillary assemblies 21 are members having a regular hexagonal cross section formed by bundling a plurality of hollow tubes constituting a capillary and intersecting the X-ray waveguide direction. It is arranged in a honeycomb shape inside.

  FIG. 24 is a diagram showing a cross-sectional structure of a base material 29 used for manufacturing a polycapillary lens. As shown in FIG. 24, the base material 29 includes a plurality of capillary assemblies 26. These capillary assemblies 26 are members having a square section formed by bundling a plurality of hollow tubes constituting a capillary, as in the fourth modification described above, and intersect the X-ray waveguide direction. They are aligned vertically and horizontally in the plane.

  A base material 24 shown in FIG. 23 and a base material 29 shown in FIG. 24 have three concentric regions A3 to A5 in a cross section intersecting the X-ray waveguide direction. In FIGS. 23 and 24, a region A3 is a region that is densely hatched near the center, a region A4 is a region that is roughly hatched around it, and a region A5 is further hatched around it. It is an area where is not given. Therefore, the polycapillary lens produced from these base materials 24 and 29 also has three concentric regions corresponding to the regions A3 to A5 in the cross section intersecting with the X-ray waveguide direction. In other words, the polycapillary lens manufactured from the base materials 24 and 29 has a first region, a second region surrounding the first region, and a second region in a plane intersecting the X-ray waveguide direction. And a third region surrounding the region. The center common to these regions is, for example, on the central axis of the polycapillary lens, and coincides with the central axis of the guided X-ray bundle.

  In one example, the inner and outer diameters of the hollow tubes constituting the capillary assemblies 21 and 26 are the largest in the region A3 and the smallest in the region A5. Thereby, also in the polycapillary lens after these base materials 24 and 29 are heated and extended, the inner diameter of the capillary in the region A3 is the largest, and the inner diameter of the capillary in the region A5 is the smallest. Thus, since the inner diameter of the capillary is larger in the region closer to the central axis of the polycapillary lens, the reflection interval of X-rays in the capillary near the central axis of the polycapillary lens becomes longer, so that the number of reflections is reduced. Wire loss can be reduced.

  In another example, the inner and outer diameters of the hollow tubes constituting the capillary assemblies 21 and 26 are the largest in the region A5 and the smallest in the region A3. Thereby, also in the polycapillary lens after these base materials 24 and 29 are heated and extended, the inner diameter of the capillary in the region A5 is the largest, and the inner diameter of the capillary in the region A3 is the smallest. As described above, the closer to the central axis of the polycapillary lens, the smaller the inner diameter of the capillary, so that the X-ray reflection interval in the capillary near the central axis is shortened. Can be increased. Therefore, the intensity of the emitted X-ray near the central axis of the polycapillary lens can be reduced, and the intensity distribution can be made closer to uniform.

  The polycapillary lens according to the present invention is not limited to the above-described embodiment, and various other modifications are possible. For example, although the regular hexagon and the square are exemplified as the cross-sectional shape of the capillary assembly in the embodiment and each modification, the cross-sectional shape of the capillary assembly is not limited to these. In the above embodiment and each modification, the capillary inner diameters of two (or three) regions in the plane intersecting the X-ray waveguide direction are different from each other. May be different.

  FIG. 27 is a diagram of a lens structure in which the capillary lens 10A (10B, 10C, 10D) is accommodated in the case. As shown in the figure, the external case includes a case main body 10c made of a metal cylinder and X-ray transmission windows 10a and 10b that seal the openings at both ends of the case main body 10c. The X-ray transmission windows 10a and 10b are made of a material that can transmit X-rays, and can be made of, for example, resin, glass, or semiconductor. The inside of the case can be filled with an inert gas such as nitrogen, but the inside can be evacuated to a reduced pressure state. Thereby, deterioration of polycapillary lens 10A (10B) is suppressed. The inside of the case is hermetically sealed by the X-ray transmission window, so that a stable state can always be maintained, and the use conditions are eased.

  Further, the X-ray capillary lens and the case main body are coaxially arranged, and the axis adjustment at the time of handling and arrangement is easy. That is, when the axis of the case body 10c is adjusted, the axis of the X-ray capillary lens can be adjusted.

  The X-ray capillary lens 10A (10B, 10C, 10D) includes a plurality of capillaries made of a material capable of X-ray waveguide such as borosilicate glass. The material of each capillary is X As long as the material can transmit rays and the X-rays are reflected inside the capillary, it can be made of other glass such as quartz glass or a resin material.

  As described above, in the above-described embodiment, the X-rays emitted from the X-ray emission window 115 spread radially and diverge, but by using an X-ray capillary lens, the X-rays per unit area can be obtained. Reduction of dose can be suppressed. Therefore, sufficient X-ray intensity can be maintained without bringing the X-ray exit window 115 close to the sample.

  Even if the X-ray excitation location is a small part of the sample, it is possible to irradiate only that part by focusing the X-ray capillary lens. is there. When it is desired to excite a minute portion of the sample, the X-ray is focused and condensed, and the size of the minute portion can be condensed to about the focal point size (φ = 100 μm or less) of the X-ray capillary lens. The X-ray tube used has a focal size (focus size on the X-ray target) that is equal to or smaller than the focal size of the X-ray capillary lens, so that sufficient focusing can be performed. If the electron beam size on the X-ray target is spatially reduced, the size of the focused X-ray is reduced. At that time, in order to efficiently guide the X-rays to the converging point of the X-ray capillary lens, an electron beam can be scanned on the X-ray target to find the position on the target where the light is focused most. This is a simpler method than when the X-ray capillary lens is mechanically adjusted.

  In addition, since the X-ray focusing position and irradiation position can be changed by the capillary lens, this apparatus can be used even when the excitation portion of the sample is arranged in the back of the component. Moreover, the state of the sample can be observed and analyzed by analyzing light (fluorescent X-ray, visible light, etc.) generated from these minute portions.

  In addition, in the case of a point-parallel type capillary lens that allows focused X-rays to be emitted in parallel to the sample, the surface is irradiated with X-rays when the excitation part of the sample is to be excited with a relatively large size. can do. Moreover, the average state of the sample can be observed and analyzed by analyzing the light (fluorescent X-ray, visible light, etc.) generated from the excitation surface. Furthermore, since the collimated X-ray has little divergence due to distance (because it does not spread radially), the position of the measurement system can be given a degree of freedom.

  A sample inspection apparatus using a streak tube constitutes a time-resolved detector, but a structure using a PMT (photomultiplier tube) or a solid-state detector (CCD or the like) as the detection device is also possible. .

  Further, the X-rays generated from the light excitation type X-ray tube can be changed to either a direct current operation or a pulse operation depending on the form of incident light from the excitation light source. The photoexcited X-ray tube is an X-ray tube using a photocathode as an electron source, and can emit X-rays of a short pulse (100 ps or less). X-rays generated from the X-ray target retain temporal repetition and are emitted from the X-ray emission window (beryllium) to the atmosphere side at a certain solid angle.

  When the X-ray capillary lens is a point-point lens, the focused X-rays are emitted from the lens exit and focused on one point on the sample. In the point-parallel type lens, the focused X-rays are emitted in parallel from the lens exit and irradiated on the surface of the sample in parallel. In either case, the X-rays emitted from the X-ray capillary lens are: The sample is irradiated with a temporal repetition. When focusing is performed, the X-ray intensity is several tens to several tens of times per unit area than when this is not performed.

DESCRIPTION OF SYMBOLS 100 ... Photo-excitation type | mold X-ray generation source, 111 ... Incident window, 112 ... Photoelectron emission layer (photocathode), 113 ... Electron lens, 114 ... X-ray target, 115 ... X-ray emission window, 116 ... Vacuum container, 2 ... Light source 3 ... Splitting means, 4 ... Delay means, 5 ... Beam expander, 6 ... Mirror, 117 ... Power supply, 118 ... Photo detector, M ... Streak tube, 38 ... Video camera (solid-state imaging device), 10A, 10B, 10C, 10D (poly) capillary lens, 12 ... X-ray source, 14 ... one end face (incident end face), 16 ... other end face (exit end face), 18a, 18b ... capillary, 20, 24, 25, 28, 29 ... Base material, 21A, 21B, 26A, 26B ... capillary assembly, 22a, 22b ... hollow tube, A1-A5 ... region, B ... central axis, D ... focusing point, La, Lb ... capillary inner diameter, XR1, X 3, XR5 ... incident X-ray, XR2, XR4, XR6 ... emitted X-rays.

Claims (9)

A photoexcited X-ray source;
An X-ray capillary lens disposed at a position where X-rays output from the photoexcitation X-ray generation source are incident;
With
The photoexcited X-ray generation source is:
A vacuum vessel;
A photoelectron emission layer disposed in the vacuum vessel and converting incident light into electrons;
An X-ray target disposed opposite to the photoelectron emission layer;
With
The X-ray capillary lens includes a plurality of capillaries made of a material capable of X-ray waveguide.
An X-ray generator characterized by that. An aperture member disposed between the X-ray emission window of the photoexcitation X-ray generation source and the X-ray capillary lens;
The X-ray generator according to claim 1. The aperture diameter of the aperture member is smaller than the area of the end face on the X-ray incident side in the X-ray capillary lens,
The X-ray generator according to claim 2. A case for accommodating the X-ray capillary lens;
The case includes a case body made of a metal cylinder,
The X-ray capillary lens and the case body are arranged coaxially.
The X-ray generator according to any one of claims 1 to 3, wherein The case is
X-ray transmission windows that respectively seal the openings at both ends of the case body are provided.
The X-ray generator according to claim 4. The photoexcited X-ray generation source is:
A deflection unit that is disposed between the photoelectron emission layer and the X-ray target and deflects electrons traveling between them;
The X-ray generator according to any one of claims 1 to 5, wherein: The X-ray generator according to any one of claims 1 to 6,
A sample holder disposed at a position where X-rays output from the X-ray generator are irradiated;
A detection device for detecting an energy ray output from a sample to be arranged in the sample holding unit in accordance with X-ray incidence;
A sample inspection apparatus comprising: An excitation light source for generating incident light on the photoelectron emission layer;
A drive circuit for supplying a drive current to the excitation light source;
A control unit that performs pulse drive control of the drive circuit;
With
The control unit controls the detection device in synchronization with the timing of the pulse drive;
The sample inspection apparatus according to claim 7. X-ray generator according to claim 6,
A sample holder disposed at a position where X-rays output from the X-ray generator are irradiated;
A detection device for detecting an energy ray output from a sample to be arranged in the sample holding unit in accordance with X-ray incidence;
A control unit for controlling the deflection unit based on an output of the detection device;
A sample inspection apparatus comprising:

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