JP2015060145A - Data compensation method, data conversion method, data compensation device, data conversion device, image drawing system, and program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To execute a high-precision compensation within a short time.SOLUTION: A data compensation device 72 generates, by compensating vector data of a pattern element provided as element input data, compensated data. On an occasion for prompting a subsidiary point setting unit 724 to set, amidst the compensation, subsidiary points for sides of the pattern element, a first strain vector, a second strain vector, and a third strain vector respectively expressing strains of first, second, and third points set atop the sides of the pattern element are calculated based on the strain of the arrangement region of the pattern element acquired by a strain acquisition unit 722. Only in a case where the first component length or second component length of the side strain vector calculated based on the first strain vector, second strain vector, and third strain vector is equal to or greater than a strain threshold set in advance, the second point is set as a subsidiary point, and the position thereof is compensated by a position compensation unit 725. It accordingly becomes possible to compensate, in a high precision within a brief time, the respective element input data included within the input data.

Description

  The present invention relates to a technique for correcting vector data corresponding to a graphic element in generating drawing data used in a drawing apparatus that draws a pattern on a substrate.

  Conventionally, a pattern can be drawn by irradiating a photosensitive material formed on a semiconductor substrate, a printed circuit board, a glass substrate for a plasma display device or a liquid crystal display device (hereinafter referred to as “substrate”) with light. Has been done. 2. Description of the Related Art In recent years, with high definition of patterns, pattern drawing apparatuses that directly draw a pattern by scanning a light beam on a photosensitive material are used.

  Such a pattern is usually expressed by vector data such as CAD data at the design stage. When the pattern is drawn by the pattern drawing apparatus, the vector data is converted into a raster such as run-length data that can be used by the pattern drawing apparatus. Processing for converting into data (RIP: Raster Image Processing) is performed.

  In the pattern drawing apparatus as described above, if a substrate or a pattern already formed on the substrate (so-called base) is distorted, the pattern is distorted when drawing on the distorted region. It is corrected together. For example, in Patent Document 1, pattern data that is vector data is converted into initial drawing data that is raster data, and the initial drawing data is divided into a plurality of mesh regions arranged in a matrix. A plurality of mesh regions are rearranged according to the deformation of the substrate. Thereafter, a plurality of mesh regions are combined to generate drawing data corresponding to the deformation of the substrate.

  In Patent Document 2, rectangular correction regions having a predetermined size are set in a matrix using alignment marks provided in a grid on the workpiece. Subsequently, the wiring pattern, which is vector data, is divided into a plurality of correction areas arranged in a matrix, and a graphic element straddling the plurality of correction areas is divided into a plurality of divided graphic elements at the boundary line of the correction area. The Then, the divided graphic elements in each correction area are corrected using the correction coefficient for each correction area, and then converted into raster data for each correction area. Thereafter, the exposure pattern is generated by combining the raster data of each correction area.

JP 2010-204421 A JP 2011-28182 A

  By the way, if the correction corresponding to the deformation of the substrate is performed after converting the pattern data, which is vector data, into the raster data as in Patent Document 1, the time required for the correction can be shortened, but the correction quality is improved. There is a limit to improvement. On the other hand, when the vector data is corrected and converted to raster data as in Patent Document 2, the correction can be performed with higher accuracy than when the raster data is corrected.

  However, as in Patent Document 2, when the wiring pattern is divided into a plurality of correction areas of a predetermined size, the graphic elements on the area where the substrate is not deformed are also divided into a plurality of graphic elements. For this reason, the time required for the correction process and the time required for conversion to the exposure pattern which is raster data are increased. Further, in Patent Document 2, the correction coefficient of each correction area is obtained based on the positions of the alignment marks located at the four vertices of the correction area. That is, the correction coefficient is determined on the assumption that the deformation of the substrate is uniform within one correction area. For this reason, when the deformation of the substrate is not uniform within one correction area, for example, when a part of one correction area is deformed into a concave shape and another part is deformed into a convex shape, Corresponding high-precision correction cannot be performed.

  The present invention has been made in view of the above problems, and an object thereof is to perform highly accurate correction in a short time.

  According to the first aspect of the present invention, in the generation of drawing data used in a drawing apparatus that draws a pattern on a substrate, an area including a graphic element is defined in advance by an address pitch that is a straight line facing the first direction. Element input that is vector data corresponding to the graphic element when generating element output data that is run-length data representing the graphic element as a substantial set of run lengths of each divided area A data correction method for correcting data, comprising: a) preparing element input data representing graphic elements each surrounded by a plurality of sides, each of which is a straight line; and b) a plurality of data provided on the substrate. Obtaining a distortion of an arrangement region on which the graphic element is arranged on the substrate based on a deviation amount of the mark from the reference position; c) a deviation amount of the plurality of marks from the reference position; And a step of determining a unit distance based on the address pitch, and d) one end of the plurality of sides of the graphic element as a first point, and the side from the first point to the side A point separated by the unit distance in the direction facing the second point as a second point, and a point separated from the second point by the unit distance in the direction toward the side as a third point; e) the step b) The first distortion vector indicating the distortion at the first point, the second distortion vector indicating the distortion at the second point, and the second distortion vector indicating the distortion at the third point, based on the distortion of the arrangement region acquired in step S1. A step of obtaining three distortion vectors; f) a first temporary difference vector that is a difference between the second distortion vector and the first distortion vector; and a difference between the third distortion vector and the second distortion vector. Second temporary difference vector Obtaining a difference vector that is a difference between the second temporary difference vector and the first temporary difference vector; and g) obtaining an edge distortion vector that is a normal direction component of the edge of the difference vector; H) a first component length that is the length of the first direction component of the side distortion vector, or a length of a second direction component that is perpendicular to the first direction of the side distortion vector. When the second component length is equal to or greater than a predetermined distortion threshold value below the address pitch, in the step of setting the second point as an auxiliary point, and i) in the step h), the first component length Or when the second component length is greater than or equal to the distortion threshold, the auxiliary point, the third point, and a point separated from the third point by the unit distance in the direction in which the side faces are newly added. As the first point, the second point and the third point, As long as three points exist on the side, the steps e) to h) are repeated, and when the first component length and the second component length are smaller than the distortion threshold, the third point and As long as the third point exists on the side, a point separated by the unit distance in the direction in which the side is directed from the third point is newly set as the second point and the third point. ) Step of repeating the step, j) step d) to step i) for each of the plurality of sides, k) based on the distortion of the arrangement region acquired in step b), And correcting the positions of the end points and auxiliary points on the plurality of sides.

  Invention of Claim 2 is the data correction method of Claim 1, Comprising: The said c) process respond | corresponds to said two marks about each combination of two marks among c1) said several marks The distance between two reference positions is L1, and the first mark distortion vector from one reference position corresponding to one mark to the one mark and the other reference position corresponding to the other mark are set to the other A length of a difference vector from the second landmark distortion vector toward the landmark of L2 is set to L2, the address pitch is set to P, and L1 · P / L2 is determined as a temporary unit distance threshold; c2) the unit distance is And determining a value equal to or smaller than a minimum temporary unit distance threshold value among the temporary unit distance threshold values of each combination.

  A third aspect of the present invention is the data correction method according to the first or second aspect, wherein the distortion threshold is equal to the address pitch.

  The invention according to claim 4 is a data conversion method for converting element input data to generate element output data, wherein the element input data is converted by the data correction method according to any one of claims 1 to 3. A step of generating corrected data by correction, and a region including the graphic element represented by the corrected data is divided for each address pitch by a straight line facing the first direction, and the run of each divided region is Generating element output data which is run-length data representing the graphic element as a substantial set of lengths.

  According to a fifth aspect of the present invention, in the generation of drawing data used in a drawing apparatus that draws a pattern on a substrate, an area including a graphic element is defined in advance by an address pitch that is a straight line that faces the first direction. Element input that is vector data corresponding to the graphic element when generating element output data that is run-length data representing the graphic element as a substantial set of run lengths of each divided area A data correction device for correcting data, a storage unit for storing element input data representing graphic elements each surrounded by a plurality of sides each being a straight line, and a reference for a plurality of marks provided on the substrate A distortion acquisition unit that acquires distortion of an arrangement region in which the graphic element is arranged on the substrate based on a deviation amount from a position; a deviation amount from a reference position of the plurality of landmarks; and Based on the address pitch, a unit distance determination unit that determines a unit distance, an auxiliary point setting unit that sets an auxiliary point for each of the plurality of sides, and distortion of the placement region acquired by the distortion acquisition unit And a position correction unit that corrects the positions of the end points and auxiliary points on the plurality of sides, and setting of auxiliary points by the auxiliary point setting unit is a) one of the plurality of sides of the graphic element. One end point of the side is a first point, a point separated from the first point by the unit distance in the direction of the side is a second point, and the unit is in a direction of the side from the second point. A step of setting a point separated by a distance as a third point; and b) a first distortion vector indicating a distortion at the first point based on the distortion of the arrangement region acquired by the distortion acquisition unit, the second point Second distortion vector showing distortion in And a step of obtaining a third distortion vector indicating a distortion at the third point, c) a first temporary difference vector that is a difference between the second distortion vector and the first distortion vector, and the third distortion. Obtaining a second temporary difference vector that is a difference between the vector and the second distortion vector, and obtaining a difference vector that is a difference between the second temporary difference vector and the first temporary difference vector; and d) the difference vector. E) obtaining a side distortion vector that is a normal direction component of the side, e) a first component length that is a length of the first direction component of the side distortion vector, or the side distortion vector of the side distortion vector When the second component length, which is the length of the second direction component perpendicular to the first direction, is equal to or greater than a predetermined distortion threshold value below the address pitch, the second point is set as an auxiliary point. And f ) In the step e), when the first component length or the second component length is greater than or equal to the distortion threshold, the side points from the auxiliary point, the third point, and the third point. The steps b) to e) are repeated as long as the third point exists on the side, with the points separated by the unit distance as the first point, the second point, and the third point. When the first component length and the second component length are smaller than the distortion threshold value, a second point that is separated from the third point and the third point by the unit distance in the direction in which the side faces is newly added. As a third point, as long as the third point exists on the side, the step b) to the step e) are repeated, and g) the step a) to the f for each of the plurality of sides. And a step of performing a step.

  The invention according to claim 6 is the data correction apparatus according to claim 5, wherein the unit distance is determined by the unit distance determining unit. H) For each combination of two marks among the plurality of marks. The distance between the two reference positions corresponding to the two marks is L1, and the first mark distortion vector heading from the one reference position corresponding to the one mark to the one mark and the other mark Obtaining a length of a difference vector from a second reference position from the other reference position to the second landmark distortion vector as L2, L2 as the address pitch, and L1 · P / L2 as a temporary unit distance threshold; i) determining the unit distance to a value equal to or smaller than a minimum temporary unit distance threshold value among the temporary unit distance threshold values of each combination.

  The invention according to claim 7 is the data correction apparatus according to claim 5 or 6, wherein the distortion threshold is equal to the address pitch.

  The invention according to claim 8 is a data converter for converting element input data to generate element output data, wherein the element input data is corrected to generate corrected data. The data correction device according to claim 1 and a region including the graphic element represented by the corrected data are divided for each address pitch by a straight line facing the first direction, and the run length of each divided region is substantially A run-length generating unit that generates element output data that is run-length data representing the graphic elements as a general set.

  The invention described in claim 9 is a drawing system for drawing a pattern on a substrate, wherein the data converter according to claim 8 and the element output data generated by the data converter are on the substrate. A drawing device that draws a pattern on the substrate, wherein the drawing device holds the substrate, a light modulation element that irradiates light to the substrate, and the substrate of light guided from the light modulation device An irradiation position moving mechanism for moving the irradiation position relative to the substrate in a direction corresponding to the first direction on the substrate, and light from the light modulation element based on the element output data A light modulation element control unit for controlling the modulation of the light.

  According to a tenth aspect of the present invention, in the generation of drawing data used in a drawing apparatus that draws a pattern on a substrate, an area including graphic elements is defined in advance by an address pitch that is a straight line facing the first direction. Element input that is vector data corresponding to the graphic element when generating element output data that is run-length data representing the graphic element as a substantial set of run lengths of each divided area A program for correcting data, the computer executing the program includes: a) preparing element input data representing graphic elements surrounded by a plurality of sides, each of which is a straight line; b ) Based on the amount of deviation from the reference position of the plurality of marks provided on the substrate, the distortion of the arrangement area in which the graphic element on the substrate is arranged C) a step of determining a unit distance based on a shift amount from a reference position of the plurality of marks and the address pitch; and d) one side of the plurality of sides of the graphic element. , One end point is a first point, a point separated from the first point by the unit distance in the direction of the side is a second point, and the unit distance is in the direction of the side from the second point. A step of setting a distant point as a third point; and e) a first distortion vector indicating a distortion at the first point based on the distortion of the arrangement region acquired in the step b), and a distortion at the second point. And a step of obtaining a third distortion vector indicating distortion at the third point, and f) a first temporary difference vector that is a difference between the second distortion vector and the first distortion vector, And the third strain Obtaining a second temporary difference vector that is a difference between the vector and the second distortion vector, and obtaining a difference vector that is a difference between the second temporary difference vector and the first temporary difference vector; and g) the difference vector. Obtaining a side distortion vector that is a normal direction component of the side of h, and h) a first component length that is a length of the first direction component of the side distortion vector or the side distortion vector of the side distortion vector When the second component length, which is the length of the second direction component perpendicular to the first direction, is equal to or greater than a predetermined distortion threshold value below the address pitch, the second point is set as an auxiliary point. And i) in the step h), when the first component length or the second component length is equal to or greater than the distortion threshold, from the auxiliary point, the third point, and the third point The unit distance in the direction in which the side faces As long as the third point exists on the side, the points e) to h) are repeated as the first point, the second point, and the third point as new points, and the first component length is repeated. When the length and the second component length are smaller than the distortion threshold, the second point and the third point are newly defined by separating the third point and the third point by the unit distance in the direction in which the side faces. As long as the third point exists on the side, the steps e) to h) are repeated, and j) the steps d) to i) are performed for each of the plurality of sides. And k) correcting the positions of the end points and auxiliary points on the plurality of sides based on the distortion of the arrangement region acquired in the step b).

  In the present invention, highly accurate correction can be performed in a short time.

It is a figure which shows the structure of the drawing system which concerns on one embodiment. It is a side view of a drawing apparatus. It is a top view of a drawing apparatus. It is a figure which expands and shows a spatial light modulator. It is a figure which shows the cross section of a light modulation element. It is a figure which shows the cross section of a light modulation element. It is a figure which shows the structure of a data converter. It is a figure which shows the flow of data conversion. It is a figure which shows a part of flow of data conversion. It is a figure which shows a part of flow of data conversion. It is a figure which shows a part of flow of data conversion. It is a figure which shows a graphical element. It is a figure which shows a part of board | substrate. It is a figure which shows a graphical element. It is a figure which shows a distortion vector and a temporary difference vector. It is a figure which shows a distortion vector and a temporary difference vector. It is a figure which shows a difference vector and a side distortion vector. It is a figure which shows a graphical element. It is a figure which shows a graphical element. It is a figure which shows a graphical element. It is a figure which shows a graphical element. It is a figure which shows a graphical element. It is a figure which shows the corrected figure element. It is a figure which shows the corrected figure element.

  FIG. 1 is a diagram showing a configuration of a drawing system 100 according to an embodiment of the present invention. The drawing system 100 is a system that draws a pattern on a photosensitive material on a glass substrate (hereinafter simply referred to as “substrate”) for a liquid crystal display device by using light. As shown in FIG. 1, the drawing system 100 includes a data conversion device 7 and a drawing device 1. The data converter 7 converts input data, which is vector data indicating a pattern, into output data, which is run-length data (that is, performs rasterization). The drawing device 1 draws a pattern on the substrate based on the output data generated by the data conversion device 7. In FIG. 1, each function of the data converter 7 is also shown. In the following, after describing the drawing device 1, the data conversion device 7 and the data handled by the data conversion device 7 will be described.

  2 and 3 are a side view and a plan view of the drawing apparatus 1, respectively. As shown in FIGS. 2 and 3, the drawing apparatus 1 includes a holding unit moving mechanism 2, a substrate holding unit 3, a light irradiation unit 4, an imaging unit 5, and a frame 12. The substrate holding unit 3 holds the substrate 9 on which a layer of a photosensitive material is formed on the (+ Z) side main surface 91 (hereinafter referred to as “upper surface 91”). The holding unit moving mechanism 2 is provided on the base 11 and moves the substrate holding unit 3 in the X direction and the Y direction perpendicular to the Z direction. The frame 12 is fixed to the base 11 so as to straddle the substrate holding unit 3 and the holding unit moving mechanism 2. The light irradiation unit 4 and the imaging unit 5 are attached to the frame 12. The light irradiation unit 4 irradiates the photosensitive material on the substrate 9 with modulated light. The imaging unit 5 is provided over the entire width of the substrate 9 in the X direction, and images the upper surface 91 of the substrate 9. Moreover, the drawing apparatus 1 is provided with the control part 6 which controls each structure, such as the holding | maintenance part moving mechanism 2, the light irradiation part 4, and the imaging part 5, as shown in FIG.

  As shown in FIGS. 2 and 3, the substrate holding unit 3 includes a stage 31, a stage rotating mechanism 32, and a support plate 33. The substrate 9 is placed on the stage 31. The support plate 33 supports the stage 31 rotatably. The stage rotation mechanism 32 rotates the stage 31 about a rotation axis 321 perpendicular to the upper surface 91 of the substrate 9 on the support plate 33.

  The holding unit moving mechanism 2 includes a sub-scanning mechanism 23, a base plate 24, and a main scanning mechanism 25. The sub-scanning mechanism 23 moves the substrate holder 3 in the X direction (hereinafter referred to as “sub-scanning direction”) in FIGS. 2 and 3. The base plate 24 supports the support plate 33 via the sub scanning mechanism 23. The main scanning mechanism 25 moves the substrate holder 3 together with the base plate 24 in the Y direction perpendicular to the X direction (hereinafter referred to as “main scanning direction”). In the drawing apparatus 1, the holding unit moving mechanism 2 moves the substrate holding unit 3 in the main scanning direction and the sub-scanning direction parallel to the upper surface 91 of the substrate 9.

  As shown in FIGS. 2 and 3, the sub-scanning mechanism 23 includes a linear motor 231 and a pair of linear guides 232. The linear motor 231 extends in the sub-scanning direction parallel to the main surface of the stage 31 and perpendicular to the main scanning direction on the lower side (that is, the (−Z) side) of the support plate 33. The pair of linear guides 232 extends in the sub-scanning direction on the (+ Y) side and (−Y) side of the linear motor 231. The main scanning mechanism 25 includes a linear motor 251 and a pair of air sliders 252. The linear motor 251 extends in the main scanning direction parallel to the main surface of the stage 31 below the base plate 24. The pair of air sliders 252 extends in the main scanning direction on the (+ X) side and (−X) side of the linear motor 251.

  As shown in FIG. 3, the light irradiation unit 4 includes a plurality (eight in the present embodiment) of optical heads 41 arranged at an equal pitch along the sub-scanning direction and attached to the frame 12. As shown in FIG. 2, the light irradiation unit 4 includes a light source optical system 42 connected to each optical head 41, a UV light source 43 that emits ultraviolet light, and a light source driving unit 44. The UV light source 43 is a solid state laser. By driving the light source driving unit 44, ultraviolet light having a wavelength of 355 nm is emitted from the UV light source 43 and guided to the optical head 41 through the light source optical system 42.

  Each optical head 41 includes an emitting unit 45, optical systems 451 and 47, and a spatial light modulator 46. The emitting unit 45 emits light from the UV light source 43 downward. The optical system 451 reflects the light from the emitting part 45 and guides it to the spatial light modulator 46. The spatial light modulator 46 modulates and reflects the light from the emitting part 45 irradiated through the optical system 451. The optical system 47 guides the modulated light from the spatial light modulator 46 onto the photosensitive material provided on the upper surface 91 of the substrate 9.

  FIG. 4 is an enlarged view showing the spatial light modulator 46. As shown in FIG. 4, the spatial light modulator 46 has a plurality of diffraction grating type lights that guide light from the UV light source 43 (see FIG. 2) irradiated through the emitting unit 45 to the upper surface 91 of the substrate 9. A modulation element 461 is provided. The light modulation element 461 is manufactured using a semiconductor device manufacturing technique, and is a diffraction grating capable of changing the depth of the grating. In the light modulation element 461, a plurality of flexible ribbons 461a and a plurality of fixed ribbons 461b are alternately arranged in parallel. The plurality of flexible ribbons 461a can be individually moved up and down with respect to the reference plane on the back. The fixed ribbon 461b is fixed to the reference plane. As a diffraction grating type light modulation element, for example, GLV (Grating Light Valve) (registered trademark of Silicon Light Machines (Sunnyvale, Calif.)) Is known.

  FIG. A and FIG. B is a view showing a cross section of the light modulation element 461 in a plane perpendicular to the flexible ribbon 461a and the fixed ribbon 461b. FIG. As shown in A, when the flexible ribbon 461a and the fixed ribbon 461b are located at the same height with respect to the reference surface 461c (that is, the flexible ribbon 461a does not flex), the surface of the light modulation element 461 is a surface. The reflected light of the incident light L1 is derived as the 0th-order light L2. On the other hand, FIG. When the flexible ribbon 461a bends to the reference surface 461c side of the fixed ribbon 461b as shown in B, the flexible ribbon 461a becomes the bottom surface of the groove of the diffraction grating, and the incident light L1 is incident on the light modulation element 461. First-order diffracted light L3 (and higher-order diffracted light) is derived, and zero-order light disappears. As described above, the light modulation element 461 performs light modulation using a diffraction grating.

  In the light irradiation unit 4 shown in FIG. 2, the light from the UV light source 43 is converted into linear light (light having a light beam cross-section linear) by the light source optical system 42, and the line of the spatial light modulator 46 passes through the emission unit 45. Irradiation is performed on a plurality of flexible ribbons 461a and fixed ribbons 461b (see FIG. 5.A and FIG. 5.B) arranged in a shape. In the light modulation element 461, when each adjacent one flexible ribbon 461a and fixed ribbon 461b is one ribbon pair, three or more ribbon pairs correspond to one pixel of a pattern to be drawn.

  In the light modulation element 461, the flexible ribbon 461a of the ribbon pair corresponding to each pixel of the pattern is controlled based on the signal from the light modulation element control unit 61 connected to each spatial light modulator 46, and each pixel is controlled. 5. Corresponding ribbon pair emits 0th order light (regular reflection light). A state shown in A and non-zero order diffracted light (mainly first order diffracted light ((+1) order diffracted light and (−1) order diffracted light)) Transition to the state shown in B is possible. The light modulating element 461 has a flexible ribbon 461a as shown in FIG. A state shown in FIG. By bending to a state between that shown in B, FIG. A state in which 0th-order light having a lower intensity than the state shown in A is emitted.

  The 0th-order light emitted from the light modulation element 461 is guided to the optical system 47, and the first-order diffracted light is guided in a direction different from that of the optical system 47. In order to prevent stray light from being generated, the first-order diffracted light is shielded by a light shielding unit (not shown). The zero-order light from the light modulation element 461 is guided to the upper surface 91 of the substrate 9 through the optical system 47, and thereby a plurality of light beams arranged in the X direction (that is, the sub-scanning direction) on the upper surface 91 of the substrate 9. The modulated light is irradiated to each irradiation position.

  In the drawing apparatus 1 shown in FIGS. 2 and 3, the light modulated from the light modulation element 461 of the light irradiation unit 4 is applied to the substrate 9 moved in the main scanning direction by the main scanning mechanism 25 of the holding unit moving mechanism 2. Irradiated. In other words, the main scanning mechanism 25 moves the irradiation position on the substrate 9 of the light guided from the light modulation element 461 to the substrate 9 relative to the substrate 9 in the main scanning direction. It has become. In the drawing apparatus 1, for example, the irradiation position on the substrate 9 may be moved in the main scanning direction by moving the light modulation element 461 in the main scanning direction without moving the substrate 9. In the drawing apparatus 1, while the substrate 9 is moved in the main scanning direction, the light modulation element control unit 61 of the control unit 6 shown in FIG. 2 modulates the light from the light modulation element 461 from the data conversion apparatus 7 to the drawing apparatus 1. As a result, the pattern indicated by the input data input to the data converter 7 is drawn on the substrate 9.

  Next, the data conversion device 7 will be described. FIG. 6 is a diagram showing the configuration of the data conversion device 7. As with a normal computer, the data conversion device 7 includes a CPU 701 that performs various arithmetic processes, a RAM 702 that stores programs to be executed and a work area for arithmetic processes, a ROM 703 that stores basic programs, and a fixed memory that stores various information. The disk 704, a display 705 for displaying various information to the worker, and an input unit 706 such as a keyboard or a mouse are connected. A program 707 executed by the data converter 7 is stored in the fixed disk 704. The program 707 is a program that converts input data, which is vector data indicating a pattern to be drawn on a substrate, into output data, which is run-length data (that is, performs rasterization).

  In FIG. 1, functions realized by the CPU 701 (see FIG. 6) or the like of the data conversion device 7 performing arithmetic processing or the like according to the program 707 (that is, by executing the program 707 by the data conversion device 7) are blocked. Is shown. The data reception unit 71, the data correction device 72, the run length generation unit 73, the format conversion unit 74, and the data output unit 75 in FIG. 1 correspond to functions realized by the CPU 701 and the like. Note that these functions may be realized by a plurality of computers. The data correction device 72 includes a storage unit 721, a distortion acquisition unit 722, a unit distance determination unit 723, an auxiliary point setting unit 724, and a position correction unit 725.

  Next, data conversion from input data to output data by the data converter 7 will be described. 7, FIG. 8, FIG. A and FIG. B is a diagram showing a flow of data conversion by the data conversion device 7. In the data converter 7, first, input data that is vector data is received by the data receiving unit 71 shown in FIG.

  FIG. 10 is a diagram illustrating a part of a pattern represented by input data. In the input data, the pattern drawn in the predetermined drawing area 80 is regarded as a plurality of graphic elements, and each of the plurality of graphic elements is vector data indicating the shape of each graphic element, the position on the substrate 9 and the like. Expressed as a data element that is a set. FIG. 10 shows one graphic element 81 included in the pattern. In the actual data conversion device 7, processing described later is performed on data elements corresponding to a plurality of graphic elements included in the input data. However, in the following description, for easy understanding, the graphic elements themselves are used. Will be described as a handling target of processing. Actual input data usually includes data elements indicating a large number of graphic elements of various types and various shapes.

  In the following, for one graphic element 81, the flow of a data conversion method when converting element input data that is vector data corresponding to the graphic element 81 into element output data that is run-length data representing the graphic element 81 explain. Actually, in the data converter 7, the same data conversion is performed on a plurality of graphic elements, and the input data including vector data of the plurality of graphic elements is output data including run-length data of the plurality of graphic elements. Is converted to

  The element input data of the graphic element 81 represents the graphic element 81 surrounded by a plurality of sides, each of which is a straight line. The graphic element 81 shown in FIG. 10 is rectangular and is surrounded by four sides. Specifically, the element input data of the graphic element 81 includes information indicating the coordinates of four vertices and four sides of the graphic element 81. The input data received by the data receiving unit 71 described above is stored in the storage unit 721 of the data correction device 72. Thereby, the element input data of the graphic element 81 is stored and prepared in the storage unit 721 (step S11).

  10, the direction from the upper side to the lower side in the drawing (hereinafter referred to as “first direction”) is the (−Y) side from the (+ Y) side in the drawing apparatus 1 shown in FIGS. 2 and 3. The direction from the left side to the right side in the drawing (ie, the direction perpendicular to the first direction, hereinafter referred to as “second direction”) corresponds to the main scanning direction toward the drawing. This corresponds to the sub-scanning direction from the (+ X) side to the (−X) side. The same applies to FIGS. 11 to 22.

  Subsequently, the upper surface 91 of the substrate 9 is imaged by the imaging unit 5 of the drawing apparatus 1. As shown by black circles in FIG. 11, a plurality of marks (hereinafter referred to as “alignment marks 82”) used for drawing a pattern are provided on the upper surface 91 of the substrate 9. 9 are obtained. On the substrate 9, for example, nine vertical and horizontal alignment marks 82 (a total of 81) are arranged in a lattice pattern. The positions of the plurality of alignment marks 82 acquired through the imaging unit 5 (hereinafter referred to as “reading positions”) are sent to the distortion acquisition unit 722 of the data converter 7 shown in FIG.

  In the data conversion device 7, reference positions that are design positions of the plurality of alignment marks 82 are stored in the storage unit 721 in advance. In FIG. 11, the reference position of the alignment mark 82 is indicated by a broken-line circle. In the distortion acquisition unit 722, a deviation amount from the reference position of the reading positions of the plurality of alignment marks 82 is obtained, and the distortion of the arrangement region 810 where the graphic element 81 on the substrate 9 is to be arranged is based on the deviation amount. Obtained (step S12). The reference arrangement area 810a, which is an arrangement area without distortion, is a rectangular area having apexes at the reference positions of the four alignment marks 82 adjacent in the first direction and the second direction, for example. In the present embodiment, due to the distortion of the substrate 9 or the like, the arrangement region 810 is distorted so as to protrude toward one side in the first direction as shown in FIG. In FIG. 11, the arrangement area 810 and the reference arrangement area 810a are indicated by a two-dot chain line.

  The distortion of the arrangement area 810 is, for example, a matrix that uses all of the alignment marks 82 on the substrate 9 and converts the reference positions so that the reference positions of all the alignment marks 82 coincide with the reading positions, that is, the drawing area 80. It is obtained as a transformation matrix indicating the distortion at each position. In this case, the distortion at each position in the arrangement area 810 is obtained by subtracting the reference coordinates from the actual coordinates obtained by applying the transformation matrix to the reference coordinates that are design coordinates of each position. For calculating the distortion of the arrangement region 810, only a part of the alignment marks 82 in the vicinity of the arrangement region 810 among the plurality of alignment marks 82 on the substrate 9 may be used.

  Next, setting of auxiliary points, which will be described later, is performed by the unit distance determination unit 723 based on the deviation amounts of the reading positions of the plurality of alignment marks 82 obtained in step S12 from the reference position and a predetermined address pitch. A unit distance to be used is determined (step S13). The address pitch is a distance determined based on the drawing resolution in the drawing apparatus 1. The address pitch is a distance that is a unit for dividing an area including a graphic element when run-length data is generated by a run-length generator 73 described later. When generating run-length data, for example, the drawing area 80 in which the graphic element 81 shown in FIG. 10 is arranged is a plurality of straight lines (hereinafter referred to as “scanning lines 801”) facing the first direction. Divided for each address pitch. Thereby, a plurality of unit regions 800 arranged in the second direction are set. The width of each divided unit region 800 in the second direction is equal to the address pitch.

A specific example of step S13 will be described with reference to FIGS. In the unit distance determination unit 723, first, a combination of two alignment marks 82 is extracted from the plurality of alignment marks 82 used for acquiring distortion in step S12. Then, the temporary unit distance threshold L _TV corresponding to the combination of the alignment marks 82 is obtained as L _TV = L1 · P / L2.

  L1 is the distance between the reference positions corresponding to the two extracted alignment marks 82. P is the address pitch described above. L2 is the length of the difference vector between the first mark distortion vector and the second mark distortion vector related to the two alignment marks 82. The first mark distortion vector is a vector from one reference position corresponding to one of the two alignment marks 82 to the reading position of the one alignment mark 82. The second mark distortion vector is a vector from the other reference position corresponding to the other alignment mark 82 to the reading position of the other alignment mark 82 among the two alignment marks 82.

In the unit distance determining unit 723, the temporary unit distance threshold L _TV is obtained for each combination of two alignment marks 82 among the plurality of alignment marks 82 used in step S12 (step S131). The unit distance is, among the provisional unit distance threshold L _TV for each combination of two alignment marks 82 described above, is determined as the minimum of the temporary unit distance threshold L _TV following values (step S132). In the present embodiment, the unit distance is determined to be equal to the minimum provisional unit distance threshold L _TV described above.

By determining the provisional unit distance threshold L _TV as described above, on a straight line connecting the two alignment marks 82, apart provisional unit distance threshold L _TV following distances corresponding to the two alignment marks 82 Between the two points, there is no distortion larger than the address pitch in the first direction and the second direction. Accordingly, in step S132, by the unit distance is determined as the minimum of the temporary unit distance threshold L _TV following values, among the plurality of alignment marks 82, even on a straight line connecting any two alignment marks 82, the unit Between two points separated by a distance, there is no distortion larger than the address pitch in the first direction and the second direction.

  When the unit distance is determined, the auxiliary point setting unit 724 sets auxiliary points for each of the plurality of sides of the graphic element 81 (step S14). Specifically, the auxiliary point setting by the auxiliary point setting unit 724 is performed as shown in FIG. A and FIG. This is performed by steps S141 to S151 shown in FIG. First, as shown in FIG. 12, one end point 83 (left end point 83 in FIG. 12) is set as the first point 813 for one side 811 among the plurality of sides 811 of the graphic element 81. Further, the second point 814 is set to a point that is separated from the first point 813 in the direction in which the side 811 faces (in the present embodiment, the right direction in FIG. 12) by the unit distance described above. Furthermore, a point separated by a unit distance from the second point 814 in the direction in which the side 811 faces is set as the third point 815 (step S141). In FIG. 12, the end point 83 is surrounded by a circle, and the first point 813, the second point 814, and the third point 815 are indicated by an X mark (cross mark) (the same applies to FIGS. 16 to 21). In the present embodiment, description is given assuming that one graphic element 81 is arranged in the arrangement area 810, but a plurality of graphic elements may be arranged in the arrangement area 810.

  Subsequently, based on the distortion of the arrangement region 810 acquired by the distortion acquisition unit 722 in step S12, a first distortion vector d1 indicating the distortion at the first point 813 is obtained. Similarly to the first distortion vector d1, the second distortion vector d2 indicating the distortion at the second point 814 and the third distortion vector d3 indicating the distortion at the third point 815 are also based on the distortion of the arrangement region 810. It is obtained (step S142). In FIG. 12, the first distortion vector d1, the second distortion vector d2, and the third distortion vector d3 are shown as arrows extending from the first point 813, the second point 814, and the third point 815. The first distortion vector d1 is obtained, for example, by applying the transformation matrix obtained in step S12 to the coordinates of the first point 813. Similarly, the second distortion vector d2 and the third distortion vector d3 are obtained by applying the transformation matrix to the coordinates of the second point 814 and the coordinates of the third point 815, respectively.

  Next, as shown in FIG. 13, by subtracting the first distortion vector d1 from the second distortion vector d2, a first temporary difference vector d21 which is the difference between the second distortion vector d2 and the first distortion vector d1. Is required. Further, as shown in FIG. 14, by subtracting the second distortion vector d2 from the third distortion vector d3, a second temporary difference vector d32 that is a difference between the third distortion vector d3 and the second distortion vector d2 is obtained. Desired. Then, as shown in FIG. 15, by subtracting the first temporary difference vector d21 from the second temporary difference vector d32, a difference vector d0 that is the difference between the second temporary difference vector d32 and the first temporary difference vector d21. Is obtained (step S143).

  When the difference vector d0 is obtained, an edge distortion vector dn that is a normal direction component of the edge 811 of the difference vector d0 is obtained (step S144). In the example shown in FIG. 15, the normal direction of the side 811 is parallel to the first direction which is the vertical direction in FIG. 15, and the side distortion vector dn is also parallel to the first direction.

  When the side distortion vector dn is obtained, the first component length that is the length of the first direction component of the side distortion vector dn and the second component that is the length of the second direction component of the side distortion vector dn. Length is required. In the example shown in FIG. 15, the first component length is equal to the length of the edge distortion vector dn, and the second component length is zero. Subsequently, the first component length and the second component length of the side distortion vector dn are compared with a distortion threshold value stored in advance in the storage unit 721 (step S145). The distortion threshold is a predetermined value below the address pitch described above. In the present embodiment, the distortion threshold is equal to the address pitch.

  The auxiliary point setting unit 724 sets the second point 814 as the auxiliary point 84 because the first component length or the second component length of the side distortion vector dn is greater than or equal to the distortion threshold value (step S146). In FIG. 12, the auxiliary points 84 are surrounded by triangular marks (the same applies to FIGS. 16 to 22). Then, the auxiliary point 84 and the third point 815 in FIG. 12 are newly set as the first point 813 and the second point 814 as shown in FIG. Also, a point separated from the third point 815 in FIG. 12 by the unit distance in the direction in which the side 811 faces (ie, a point separated from the third point 815 in FIG. 12 by the unit distance on the opposite side of the second point 814). As shown in FIG. 16, a point) is newly set as a third point 815 (step S147).

  When a new third point 815 is set (step S149), the process returns to step S142, and steps S142 to S149 are repeated. As a result, as shown in FIG. 17, a plurality of auxiliary points 84 are set in the left part of the side 811.

  Subsequently, Steps S142 to S145 are performed for the first point 813, the second point 814, and the third point 815 shown in FIG. Thereby, an edge distortion vector is obtained based on the first distortion vector d1, the second distortion vector d2, and the third distortion vector d3, and the first component length and the second component length of the edge distortion vector are determined by the address pitch. Compared to the above-described distortion threshold equal to. In the example shown in FIG. 17, since the first component length and the second component length of the side distortion vector are smaller than the distortion threshold, auxiliary points are not set, and the third point 815 and the third point 815 in FIG. As shown in FIG. 18, the points that are apart from each other in the direction in which the side 811 faces are newly set as the second point 814 and the third point 815 (step S148). In step S148, the first point 813 is not changed. When a new third point 815 is set (step S149), the process returns to step S142, and steps S142 to S149 are repeated. Thereby, the third point 815 approaches the other end point 83 of the side 811 (that is, the right end point 83 in FIG. 18).

  In the auxiliary point setting unit 724, steps S142 to S149 are repeated as long as a new third point 815 is set in step S147 or step S148, that is, as long as the third point 815 exists on the side 811. Thereby, as shown in FIG. 19, a plurality of auxiliary points 84 are set on the side 811.

  When the setting of the auxiliary point 84 for one side 811 is completed, the next side 811 is selected (steps S150 and S151), the process returns to step S141, and steps S141 to S149 are repeated for the new side 811. In the auxiliary point setting unit 724, steps S141 to S149 are performed for each of the plurality of sides 811 of the graphic element 81, and an auxiliary point 84 is set as shown in FIG. In the auxiliary point setting unit 724, the number of auxiliary points 84 set on the side 811 is variously changed according to the degree of distortion of the arrangement region 810, the direction of the side 811 of the graphic element 81, and the like. Further, the auxiliary point 84 may not be set on the side 811.

  When the setting of the auxiliary points 84 is completed, the position correction unit 725 determines the end points 83 and the auxiliary points 84 on the plurality of sides 811 based on the distortion of the arrangement area 810 acquired in step S12 as shown in FIG. The position is corrected (FIG. 7: Step S15). The end point 83 and the auxiliary point 84 are corrected by, for example, applying the above-described transformation matrix to the coordinates of the end point 83 and the auxiliary point 84. In FIG. 21, the graphic element 81 before correction is indicated by a two-dot chain line.

  A corrected graphic element 81a which is a corrected graphic element shown in FIG. 21 is represented by a plurality of end points 83 and a plurality of auxiliary points 84 after position correction, and a plurality of sides connecting these end points 83 and the auxiliary points 84. Is done. Hereinafter, vector data including information such as end points 83, auxiliary points 84, and sides representing the corrected graphic element 81a is referred to as “corrected data”. In the data correction device 72, by performing steps S11 to S15, the element input data representing the graphic element 81 is corrected, and corrected data representing the corrected graphic element 81a is generated.

  When the corrected data is generated, the run length generation unit 73 causes the arrangement area 810 including the corrected graphic element 81a to be addressed by a plurality of scanning lines 801 facing the first direction as shown in FIG. It is divided every time. Subsequently, a unit run length indicating a run length of the corrected graphic element 81a in each unit region 800 is generated for each unit region 800 that is each divided region. Then, these unit run lengths are associated with data indicating the position of the corresponding unit region 800, so that run length data representing the corrected graphic element 81a as a substantial set of run lengths of each unit region 800 is obtained. Certain element output data is generated (step S16).

  In the data conversion device 7 shown in FIG. 1, for all graphic elements included in the input data received by the data receiving unit 71, the element output data (vector data) to the element output data (run-length data) are the same as described above. Is converted to output data that is a set of element output data of all graphic elements. Then, the output data is subjected to format conversion by the format conversion unit 74 into a format suitable for processing in the drawing apparatus 1. The data after the format conversion is drawing data used for pattern drawing in the drawing apparatus 1.

  The drawing data generated in the data conversion device 7 is output to the drawing device 1 by the data output unit 75. In the drawing apparatus 1, a signal is sent from the light modulation element control unit 61 of the control unit 6 shown in FIG. 2 to each spatial light modulator 46 based on the drawing data, and the substrate 9 is main-scanned by the main scanning mechanism 25. It moves in a direction (that is, a direction corresponding to the first direction on the substrate 9). As a result, the pattern indicated by the input data input to the data converter 7 is drawn on the photosensitive material on the substrate 9.

  As described above, in the data correction device 72 of the data conversion device 7 described above, the element input data, which is the vector data of the graphic element 81, is corrected by the data correction method in steps S11 to S15 described above, and is converted into vector data. Some corrected data is generated. In the setting of the auxiliary point 84 in step S14 by the auxiliary point setting unit 724, the first point set on the side 811 of the graphic element 81 based on the distortion of the arrangement area 810 acquired by the distortion acquisition unit 722 in step S12. A first distortion vector d1, a second distortion vector d2, and a third distortion vector d3 indicating the distortion at 813, the second point 814, and the third point 815, respectively, are obtained. Only when the first component length or the second component length of the side distortion vector dn obtained based on the first distortion vector d1, the second distortion vector d2, and the third distortion vector d3 is equal to or greater than the distortion threshold value, The second point 814 is set as the auxiliary point 84.

  If it is assumed in step S14 that auxiliary points are set for each unit distance on each side of each graphic element, the time required for correcting the position of the auxiliary point in step S15 increases. As a result, the efficiency of data conversion from input data to output data in the data converter decreases. On the other hand, when it is assumed that the auxiliary point is not set in step S14 described above, only the position of the end point of the graphic element is corrected in step S15, so that high-precision correction cannot be performed. For example, when a rectangular graphic element is corrected, the corrected graphic element cannot take a shape other than a square.

  On the other hand, in the data correction device 72 of the data conversion device 7 according to the present embodiment, as described above, only when the first component length or the second component length of the side distortion vector dn is greater than or equal to the distortion threshold value. An auxiliary point 84 is set. For this reason, in the graphic element 81, the distortion in the normal direction of the side 811 is relatively large, and the change in the inclination of the deformed portion when the side 811 is deformed corresponding to the distortion is relatively large (for example, Auxiliary points 84 are set in regions where the radius of curvature is relatively large when deformed into a curved shape, and no auxiliary points are set in other regions. In other words, since the degree of deformation due to distortion greatly changes in the graphic element 81, the auxiliary point 84 is set only in the part where the auxiliary point is necessary, and the deformation due to distortion is uniform and no deformation due to distortion occurs. A useless auxiliary point is not set in a part (that is, a part that does not require an auxiliary point). Thereby, in the data correction apparatus 72, highly accurate correction | amendment with respect to each element input data contained in input data can be performed in a short time. As a result, the efficiency of data conversion from input data to output data in the data converter 7 can be improved, and the time required for pattern drawing in the drawing system 100 can be shortened.

  In the data correction device 72, by performing steps S131 and S132 in step S13, as described above, among the plurality of alignment marks 82 used in step S12, on the straight line connecting any two alignment marks 82. However, there is no distortion larger than the address pitch in the first direction and the second direction between two points separated by a unit distance. Therefore, on each side 811 of the graphic element 81, by examining whether or not the auxiliary point 84 needs to be set for each unit distance, a part where deformation more than the address pitch occurs on each side 811 (that is, in the element output data) A site where the run length is changed) can be easily detected. And the precision of correction | amendment with respect to each element input data can be improved by setting the auxiliary | assistant point 84 to the said site | part.

  In the data correction device 72, the distortion threshold used in step S145 is equal to the address pitch. As a result, it is possible to detect a portion where the run length is changed in the element output data with high probability and set the auxiliary point 84 at the portion, and to suppress an increase in the number of set auxiliary points 84. . As a result, it is possible to further shorten the time required for correction while maintaining high correction accuracy for each element input data.

  Various changes can be made in the drawing system 100 described above.

  In the data correction device 72, as long as steps S12 and S13 are performed before step S14, they may be performed before step S11 or may be performed in parallel with step S11.

  Imaging of the alignment mark 82 in step S12 may be performed by an apparatus other than the drawing apparatus 1. In this case, the imaging unit 5 may be omitted from the drawing device 1. Further, the deviation amounts of the reading positions of the plurality of alignment marks 82 from the reference position may be obtained by another device and then sent to the data correction device 72 of the data conversion device 7.

  The determination of the unit distance in step S13 is not necessarily performed by the methods of steps S131 and S132, and is performed by various methods based on the deviation amounts of the plurality of alignment marks 82 from the reference position and the address pitch. Good. For example, the relationship between the amount of deviation from the reference position of the plurality of alignment marks 82 and the unit distance is determined in advance based on the address pitch, and the unit based on the imaging result of the alignment mark 82 in step S12 and the relationship. A distance may be determined.

  The distortion threshold used in step S145 described above is not necessarily equal to the address pitch, and may be changed variously as long as it is equal to or smaller than the address pitch. For example, the distortion threshold may be a value equal to half of the address pitch. Thereby, the correction accuracy with respect to each element input data can be further improved.

  In the data converter 7, the graphic elements included in the input data may be a sub graphic element group including a plurality of sub graphic elements. The input data may have a hierarchical structure in which one graphic element refers to another graphic element. Further, in the data conversion device 7, when the capacity of the input data is large, a part of the input data is expanded and the processing such as the above-described correction and conversion to run-length data is performed, and output is performed by repeating the processing. Data may be generated. Thereby, memory consumption of the data conversion device 7 and generation of an intermediate file can be suppressed. As a result, the conversion efficiency from input data to output data can be improved.

  In the drawing system 100, the output data may be output to the drawing apparatus 1 without being subjected to format conversion in the data conversion apparatus 7, and format conversion may be performed in the drawing apparatus 1.

  Input data converted into output data by the data converter 7 is not necessarily limited to data indicating a pattern drawn on a glass substrate for a liquid crystal display device. For example, other flat panel displays such as a plasma display device It may be data indicating a pattern drawn on a glass substrate for an apparatus or a photomask, or may be pattern data for LSI. Further, input data used for various other purposes may be converted into output data by a data converter.

  The drawing apparatus 1 is not limited to the one having the above-described structure, and may be any apparatus that performs drawing based on output data that is run-length data. For example, the light irradiation unit 4 of the drawing apparatus 1 may include a spatial light modulator including a light modulation element other than the GLV.

  The configurations in the above-described embodiments and modifications may be combined as appropriate as long as they do not contradict each other.

DESCRIPTION OF SYMBOLS 1 Drawing apparatus 3 Board | substrate holding part 7 Data converter 9 Board | substrate 25 Main scanning mechanism 61 Light modulation element control part 72 Data correction apparatus 73 Run length production | generation part 81 Graphic element 81a Corrected graphic element 82 Alignment mark 83 End point 84 Auxiliary point 100 Drawing System 461 Light modulation element 707 Program 721 Storage unit 722 Distortion acquisition unit 723 Unit distance determination unit 724 Auxiliary point setting unit 725 Position correction unit 800 Unit region 801 Scan line 810 Arrangement region 811 Side 813 First point 814 Second point 815 Third Point d0 Difference vector d1 First distortion vector d2 Second distortion vector d3 Third distortion vector d21 First temporary difference vector d32 Second temporary difference vector dn Side distortion vectors S11 to S16, S131, S132, S141 to S151 Steps

Claims (10)

In the generation of drawing data used in a drawing apparatus that draws a pattern on a substrate, an area including a graphic element is divided at a predetermined address pitch by a straight line facing the first direction, This is a data correction method for correcting element input data, which is vector data corresponding to a graphic element, when generating element output data, which is run-length data representing the graphic element, as a substantial set of region run lengths. And
a) preparing element input data representing a graphic element surrounded by a plurality of sides each of which is a straight line;
b) obtaining a distortion of an arrangement region in which the graphic element on the substrate is arranged based on a deviation amount from a reference position of a plurality of marks provided on the substrate;
c) determining a unit distance based on an amount of deviation from a reference position of the plurality of landmarks and the address pitch;
d) For one side of the plurality of sides of the graphic element, one end point is defined as a first point, and a point separated from the first point in the direction in which the side is directed by the unit distance is defined as a second point, A point that is separated from the second point by the unit distance in the direction in which the side faces is a third point;
e) based on the distortion of the arrangement region acquired in the step b), a first distortion vector indicating distortion at the first point, a second distortion vector indicating distortion at the second point, and the third Obtaining a third strain vector indicative of the strain at the point;
f) obtaining a first temporary difference vector that is a difference between the second distortion vector and the first distortion vector, and a second temporary difference vector that is a difference between the third distortion vector and the second distortion vector; Obtaining a difference vector that is a difference between the second temporary difference vector and the first temporary difference vector;
g) obtaining an edge distortion vector which is a normal direction component of the edge of the difference vector;
h) a first component length that is a length of the first direction component of the side distortion vector or a length of a second direction component that is perpendicular to the first direction of the side distortion vector; A step of setting the second point as an auxiliary point when a two-component length is equal to or greater than a predetermined distortion threshold below the address pitch;
i) In the step h), when the first component length or the second component length is equal to or greater than the distortion threshold, the side points from the auxiliary point, the third point, and the third point. Repeat steps e) to h) as long as the third point exists on the side, with the points separated by the unit distance in the direction as the first point, the second point, and the third point. When the first component length and the second component length are smaller than the distortion threshold, a second point that is separated from the third point and the third point by the unit distance in the direction in which the side faces is newly added. As long as the third point exists on the side as a point and a third point, the step e) to the step h) are repeated.
j) performing the steps d) to i) for each of the plurality of sides;
k) correcting the positions of the end points and auxiliary points on the plurality of sides based on the distortion of the arrangement area acquired in the step b);
A data correction method comprising: The data correction method according to claim 1,
Step c)
c1) For each combination of two marks among the plurality of marks, the distance between two reference positions corresponding to the two marks is set to L1, and the one mark from one reference position corresponding to one mark The length of the difference vector between the first landmark distortion vector going to the second landmark distortion vector going from the other reference position corresponding to the other landmark to the other landmark, and L is the address pitch, Obtaining L1 · P / L2 as a temporary unit distance threshold;
c2) determining the unit distance to a value equal to or less than a minimum temporary unit distance threshold value among the temporary unit distance threshold values of each combination;
A data correction method comprising: The data correction method according to claim 1 or 2,
A data correction method, wherein the distortion threshold is equal to the address pitch. A data conversion method for generating element output data by converting element input data,
Correcting the element input data by the data correction method according to claim 1 to generate corrected data;
An area including the graphic element represented by the corrected data is divided for each address pitch by a straight line facing the first direction, and the graphic element is represented as a substantial set of run lengths of the divided areas. Generating element output data which is run-length data;
A data conversion method comprising: In the generation of drawing data used in a drawing apparatus that draws a pattern on a substrate, an area including a graphic element is divided at a predetermined address pitch by a straight line facing the first direction, A data correction apparatus that corrects element input data that is vector data corresponding to a graphic element when generating element output data that is run-length data representing the graphic element as a substantial set of region run lengths. And
A storage unit for storing element input data representing a graphic element surrounded by a plurality of sides each of which is a straight line;
A distortion acquisition unit that acquires distortion of an arrangement region in which the graphic element on the substrate is arranged based on a deviation amount from a reference position of a plurality of marks provided on the substrate;
A unit distance determining unit that determines a unit distance based on the amount of deviation from a reference position of the plurality of landmarks and the address pitch;
An auxiliary point setting unit for setting auxiliary points on each of the plurality of sides;
A position correction unit that corrects positions of end points and auxiliary points on the plurality of sides based on the distortion of the arrangement region acquired by the distortion acquisition unit;
With
Setting of auxiliary points by the auxiliary point setting unit is
a) For one side of the plurality of sides of the graphic element, one end point is defined as a first point, and a point separated from the first point by the unit distance in a direction toward the side is defined as a second point, A point that is separated from the second point by the unit distance in the direction in which the side faces is a third point;
b) a first distortion vector indicating a distortion at the first point, a second distortion vector indicating a distortion at the second point, and the third based on the distortion of the arrangement region acquired by the distortion acquisition unit; Obtaining a third strain vector indicative of the strain at the point;
c) obtaining a first temporary difference vector that is a difference between the second distortion vector and the first distortion vector, and a second temporary difference vector that is a difference between the third distortion vector and the second distortion vector; Obtaining a difference vector that is a difference between the second temporary difference vector and the first temporary difference vector;
d) obtaining an edge distortion vector which is a normal direction component of the edge of the difference vector;
e) a first component length that is a length of the first direction component of the side distortion vector or a length of a second direction component that is perpendicular to the first direction of the side distortion vector; A step of setting the second point as an auxiliary point when a two-component length is equal to or greater than a predetermined distortion threshold below the address pitch;
f) In the step e), when the first component length or the second component length is equal to or greater than the distortion threshold, the side points from the auxiliary point, the third point, and the third point. Repeat steps b) to e) as long as the third point exists on the side, with the points separated by the unit distance in the direction as the first point, the second point, and the third point. When the first component length and the second component length are smaller than the distortion threshold, a second point that is separated from the third point and the third point by the unit distance in the direction in which the side faces is newly added. As long as the third point exists on the side as a point and a third point, the step b) to the step e) are repeated;
g) performing the steps a) to f) for each of the plurality of sides;
A data correction apparatus comprising: The data correction apparatus according to claim 5, wherein
Determination of the unit distance by the unit distance determination unit is
h) For each combination of two marks among the plurality of marks, the distance between the two reference positions corresponding to the two marks is L1, and the one mark from one reference position corresponding to the one mark The length of the difference vector between the first landmark distortion vector going to the second landmark distortion vector going from the other reference position corresponding to the other landmark to the other landmark, and L is the address pitch, Obtaining L1 · P / L2 as a temporary unit distance threshold;
i) determining the unit distance to a value equal to or less than a minimum temporary unit distance threshold value among the temporary unit distance threshold values of each combination;
A data correction apparatus comprising: The data correction apparatus according to claim 5 or 6, wherein
A data correction apparatus, wherein the distortion threshold is equal to the address pitch. A data converter for converting element input data to generate element output data,
The data correction device according to any one of claims 5 to 7, wherein corrected data is generated by correcting the element input data;
An area including the graphic element represented by the corrected data is divided for each address pitch by a straight line facing the first direction, and the graphic element is represented as a substantial set of run lengths of the divided areas. A run-length generator that generates element output data that is run-length data;
A data conversion device comprising: A drawing system for drawing a pattern on a substrate,
A data conversion device according to claim 8,
A drawing device for drawing a pattern on a substrate based on the element output data generated by the data conversion device;
With
The drawing device is
A substrate holder for holding the substrate;
A light modulation element for irradiating the substrate with light;
An irradiation position moving mechanism for moving an irradiation position on the substrate of the light guided from the light modulation element relative to the substrate in a direction corresponding to the first direction on the substrate;
A light modulation element control unit that controls modulation of light from the light modulation element based on the element output data;
A drawing system comprising: In the generation of drawing data used in a drawing apparatus that draws a pattern on a substrate, an area including a graphic element is divided at a predetermined address pitch by a straight line facing the first direction, A program for correcting element input data that is vector data corresponding to the graphic element when generating element output data that is run-length data representing the graphic element as a substantial set of region run lengths, Execution of the program by the computer is performed on the computer,
a) preparing element input data representing a graphic element surrounded by a plurality of sides each of which is a straight line;
b) obtaining a distortion of an arrangement region in which the graphic element on the substrate is arranged based on a deviation amount from a reference position of a plurality of marks provided on the substrate;
c) determining a unit distance based on an amount of deviation from a reference position of the plurality of landmarks and the address pitch;
d) For one side of the plurality of sides of the graphic element, one end point is defined as a first point, and a point separated from the first point in the direction in which the side is directed by the unit distance is defined as a second point, A point that is separated from the second point by the unit distance in the direction in which the side faces is a third point;
e) based on the distortion of the arrangement region acquired in the step b), a first distortion vector indicating distortion at the first point, a second distortion vector indicating distortion at the second point, and the third Obtaining a third strain vector indicative of the strain at the point;
f) obtaining a first temporary difference vector that is a difference between the second distortion vector and the first distortion vector, and a second temporary difference vector that is a difference between the third distortion vector and the second distortion vector; Obtaining a difference vector that is a difference between the second temporary difference vector and the first temporary difference vector;
g) obtaining an edge distortion vector which is a normal direction component of the edge of the difference vector;
h) a first component length that is a length of the first direction component of the side distortion vector or a length of a second direction component that is perpendicular to the first direction of the side distortion vector; A step of setting the second point as an auxiliary point when a two-component length is equal to or greater than a predetermined distortion threshold below the address pitch;
i) In the step h), when the first component length or the second component length is equal to or greater than the distortion threshold, the side points from the auxiliary point, the third point, and the third point. Repeat steps e) to h) as long as the third point exists on the side, with the points separated by the unit distance in the direction as the first point, the second point, and the third point. When the first component length and the second component length are smaller than the distortion threshold, a second point that is separated from the third point and the third point by the unit distance in the direction in which the side faces is newly added. As long as the third point exists on the side as a point and a third point, the step e) to the step h) are repeated.
j) performing the steps d) to i) for each of the plurality of sides;
k) correcting the positions of the end points and auxiliary points on the plurality of sides based on the distortion of the arrangement area acquired in the step b);
A program characterized by having executed.

Images