JP2015003315A - Solution discharge device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technology that applies a discharge force to a solution according to a driving force in a solution discharge device which discharges the solution by moving a pin, and to provide a technology that prevents or reduces damage of an elastic body, which is caused by an edge of the pin, in the solution discharge device which discharges the solution by moving the pin.SOLUTION: A solution discharge device 1A includes an exciting mechanism 40A which vibrates a pin 30A between a first position where a tip of the pin 30A contacts with a periphery or an inner peripheral surface of a drain hole 22A and a second position where the tip of the pin 30A is spaced away from the drain hole 22A in an upper direction. The exciting mechanism 40A includes a pull function that accelerates the pin 30A in a pull direction from the first position to the second position and a push function which accelerates the pin 30A in a push direction from the second position to the first position. At least the push function utilizes a driving force that is electromagnetically generated. Thus, the solution discharge device 1A is able to apply a discharge force to the solution according to the driving force.

Description

  The present invention relates to a liquid agent discharge device.

2. Description of the Related Art Conventionally, an apparatus that discharges a liquid agent toward an object is known. For example, US Pat. No. 3,506,716 describes an apparatus for dispensing a small amount of liquid or viscous material on a substrate such as a printed circuit board (Column 11, lines 15-18, FIG. 1). ). Japanese Patent No. 4053601 describes a device that has a valve member and a diaphragm spring provided in an internal chamber, and distributes fluid by movement of the valve member (Claims, Figure 2).
Japanese Patent No. 3506716 Japanese Patent No. 4053601

  In the device described in Japanese Patent No. 3506716, a closing force is applied to the valve head by a compression spring (column 14, lines 8 to 10, line 1). In this device, the valve head is retracted by introducing compressed air from the air solenoid into the air chamber (column 15, lines 12-16). Then, by stopping the air solenoid, the compression spring presses the valve head against the valve seat (column 15, lines 32-34).

  The device described in Japanese Patent No. 4053601 is biased in the closing direction with respect to the valve member by a diaphragm spring (page 6, lines 32 to 33, FIG. 3). The valve of this device is normally closed by the action of a diaphragm spring (page 6, lines 40-41). Then, by applying a voltage to the coil, the valve member is separated from the valve seat by electromagnetic force (page 6, lines 42 to 50).

  Thus, in the conventional apparatus, the elastic force of the spring is used for the movement of the valve in the closing direction. For this reason, it has been difficult to arbitrarily adjust the force of the valve in the closing direction according to the viscosity of the liquid agent and the required discharge force. In such a configuration, there is a case where the valve cannot be reliably closed particularly when a highly viscous liquid agent is used. In addition, when a strong spring is used to securely close the valve, a very strong driving force that resists the pressure of the spring is required when the valve is moved in the opening direction.

  In order to close the valve reliably, it is preferable to bring the tip of the valve into contact with an elastic body such as rubber. However, when a cylindrical pin is used as the valve, an annular edge located at the boundary between the lower surface of the pin and the outer peripheral surface of the pin comes into contact with the elastic body. For this reason, there is a possibility that the elastic body may be damaged while the liquid agent is repeatedly discharged.

  The 1st subject of this application is providing the technique which can provide the discharge force according to a driving force with respect to a liquid agent in the liquid agent discharge apparatus which discharges a liquid agent by the movement of a pin. A second problem of the present application is to provide a technique capable of preventing or reducing damage to an elastic body due to an edge of a pin in a liquid agent discharge device that discharges a liquid agent by moving a pin. An object of the present invention is to solve at least one of the first problem and the second problem.

  An exemplary first invention of the present application is a liquid agent discharge device that discharges a liquid agent toward an object, and is located in a vertically extending gap and a lower side end of the gap and communicates with the outside of the gap. A chamber having a discharge port and a discharge port positioned below the discharge port; a pin whose tip is accommodated in the gap; and the tip of the pin on a peripheral edge or an inner peripheral surface of the discharge port A vibration mechanism that vibrates the pin between a first position in contact with the pin and a second position in which the tip of the pin is spaced upward from the discharge port, and the vibration mechanism includes the pin A pull function that accelerates in the pull direction from the first position to the second position, and a push function that accelerates in the push direction from the second position to the first position, at least the push function is Liquid that uses electromagnetically generated driving force A discharge device.

  An exemplary second invention of the present application is a liquid agent discharge device that discharges a liquid agent toward an object, and is located at a vertically extending gap and a lower side end of the gap and communicates with the outside of the gap. A chamber having a discharge port and a discharge port positioned below the discharge port; a pin whose tip is accommodated in the gap; and the tip of the pin on a peripheral edge or an inner peripheral surface of the discharge port A vibration mechanism that vibrates the pin between a first position in contact with the pin and a second position in which the tip of the pin is spaced upward from the discharge port, and the bottom plate portion of the chamber has a chamber And a damper that is an elastic body disposed on the bottom of the chamber, the upper opening of the through hole provided in the bottom plate is the discharge port, and the lower opening of the through hole is the discharge port. A region that is an outlet and faces the lower surface of the pin of the damper The damper has an upper surface located at the highest position in the axial direction, and the lower surface of the pin and the upper surface of the damper are in contact with each other in a state where the pin is disposed at the first position. In the plan view, the outer peripheral edge of the upper surface of the damper is located at the same position as the annular edge located at the boundary between the lower surface of the pin and the outer peripheral surface of the pin or on the inner side of the edge. It is.

  According to the exemplary first invention of the present application, the ejection force corresponding to the driving force can be applied to the liquid agent by using the electromagnetically generated driving force for driving the pin in the push direction. Thus, according to the first invention of the present application, at least the first problem of the present application can be solved.

  According to the second exemplary invention of the present application, the lower surface of the pin is in direct contact with the damper that is an elastic body. For this reason, the adhesiveness of a pin and a baseplate part increases. Therefore, the liquid agent can be discharged with higher accuracy. Moreover, even if the edge of a pin contacts the upper surface of a damper, or it contacts, the pressure by the said contact can be reduced. For this reason, it can prevent or reduce that the upper surface of a damper is damaged by the edge of a pin. Thus, according to the second invention of the present application, at least the second problem of the present application can be solved.

FIG. 1 is a diagram illustrating the configuration of the liquid agent discharge device according to the first embodiment. FIG. 2 is a longitudinal sectional view of the liquid agent discharge device according to the second embodiment. FIG. 3 is a partial longitudinal sectional view of the liquid agent discharge device. FIG. 4 is a partial longitudinal sectional view of the liquid agent discharge device. FIG. 5 is a partial longitudinal sectional view of the liquid agent discharge device. FIG. 6 is a block diagram of the control circuit. FIG. 7 is a time chart showing temporal changes of signals in each part of the control circuit. FIG. 8 is a time chart showing temporal changes of signals in each part of the control circuit. FIG. 9 is a configuration diagram of a control circuit according to a modification. FIG. 10 is a longitudinal sectional view of a liquid agent discharge device according to a modification. FIG. 11 is a longitudinal sectional view of a liquid agent discharge device according to a modification. FIG. 12 is a longitudinal sectional view of a liquid agent discharge device according to a modification. FIG. 13 is a longitudinal sectional view of a liquid agent discharge device according to a modification. FIG. 14 is a partial longitudinal sectional view of a liquid agent discharge device according to a modification. FIG. 15 is a bottom view of a pin according to a modified example. FIG. 16 is a partial vertical cross-sectional view of a liquid agent discharge device according to a modification. FIG. 17 is a partial longitudinal sectional view of a liquid agent discharge device according to a modification. FIG. 18 is a partial longitudinal sectional view of a liquid agent discharge device according to a modification.

  Hereinafter, exemplary embodiments of the present invention will be described with reference to the drawings. In the present application, for convenience of explanation, the shape, positional relationship, and operation of each part will be described with the vibration direction of the pin being the “vertical direction” and the pin side facing up with respect to the discharge port of the chamber. However, when actually operating the liquid agent discharge device according to the present invention, the liquid agent discharge device can be arranged and operated not only in the vertical vertical direction but also in an arbitrary posture.

  In addition, in the present application, “plan view” refers to a state viewed from the top or bottom in the above definition in the direction of the central axis of the pin. In addition, when explaining using “plan view” in the present application, a member that is hidden behind other members but is not actually seen is also “plan view” as a two-dimensional figure obtained by projecting in the direction of the central axis of the pin. It shall be possible.

<1. First Embodiment>
FIG. 1 is a diagram showing a configuration of a liquid agent discharge apparatus 1A according to the first embodiment of the present invention. The liquid agent discharge device 1A is a device that intermittently discharges the liquid agent 9A toward the object 90A. As shown in FIG. 1, the liquid agent discharge device 1A includes a chamber 20A, a pin 30A, and a vibration mechanism 40A.

  The chamber 20A has a gap 21A inside. The gap 21A extends in the vertical direction inside the chamber 20A. During the operation of the liquid agent discharge device 1A, the liquid agent 9A is stored inside the gap 21A. The chamber 20A has a discharge port 22A and a discharge port 23A. The discharge port 22A is located at the lower end portion of the gap 21A. The discharge port 23A is located below the discharge port 22A. The gap 21A communicates with the external space of the chamber 20A via the discharge port 22A and the discharge port 23A.

  The lower end of the pin 30A is accommodated in the gap 21A. The vibration mechanism 40A vibrates the pin 30A between a first position indicated by a broken line in FIG. 1 and a second position indicated by a solid line in FIG. When the pin 30A is disposed at the first position, the lower end of the pin 30A is in contact with the peripheral edge or the inner peripheral surface of the discharge port 22A. On the other hand, when the pin 30A is arranged at the second position, the lower end of the pin 30A moves away from the discharge port 22A. In this way, the liquid 9A is intermittently discharged from the discharge port 23A by vibrating the pin 30A between the first position and the second position.

  The vibration mechanism 40A has a pull function for accelerating the pin 30A in the pull direction from the first position toward the second position, and a push function for accelerating the pin 30A in the push direction from the second position toward the first position. And at least for the push function, an electromagnetically generated driving force is used. In this way, if a driving force generated electromagnetically is used for driving the pin 30A in the push direction, a discharge force corresponding to the driving force can be applied to the liquid 9A.

<2. Second Embodiment>
<2-1. Configuration of Liquid Discharge Device 1>
FIG. 2 is a longitudinal sectional view of the liquid agent discharge device 1 according to the second embodiment of the present invention. The liquid agent discharge apparatus 1 is an apparatus that intermittently discharges the liquid agent 9 toward the surface of an object by driving a pin 30. For example, in the manufacturing process of automobiles, electronic devices, communication devices, flat panel displays, optical disks, secondary batteries, etc., the liquid agent discharge device 1 applies a liquid agent 9 such as adhesive, oil, grease, etc. to the surface of various objects. Used to apply.

  As shown in FIG. 2, the liquid agent discharge device 1 of this embodiment includes a syringe 10, a chamber 20, a pin 30, a vibration mechanism 40, a circuit board 50, and a frame body 60.

  The syringe 10 is a container that stores the liquid 9 before being discharged. The syringe 10 is connected to the chamber 20 via the liquid supply pipe 11. A gas inlet 12 is provided at the upper end of the syringe 10. As conceptually shown in FIG. 2, the inlet 12 is connected to the gas supply unit 14 via the air supply pipe 13. When the gas supply unit 14 is operated, a gas such as clean air or nitrogen gas is introduced into the syringe 10 through the air supply pipe 13 and the introduction port 12. Here, the gas supplied from the air supply pipe 13 is pressurized to a pressure higher than the atmospheric pressure. When the liquid agent discharge device 1 is used, the liquid agent 9 stored in the syringe 10 is supplied to the chamber 20 through the liquid supply pipe 11 due to the pressure of the gas. That is, in this embodiment, the syringe 10 is a liquid agent supply unit that supplies the liquid agent 9 pressurized to the space 21 in the chamber 20.

  The chamber 20 is a part that stores the liquid 9 supplied from the syringe 10 and discharges the liquid 9 toward the object 90. The chamber 20 has a gap 21 in which the liquid agent 9 is stored. A discharge port 23 is provided on the lower surface of the chamber 20. During the operation of the liquid agent discharge apparatus 1, the liquid agent 9 stored in the gap 21 in the chamber 20 is discharged downward from the discharge port 23. A more detailed configuration of the chamber 20 will be described later.

  The pin 30 is a substantially columnar member that extends vertically. The diameter of the pin 30 is gradually reduced as it goes downward. For example, a metal such as an iron alloy is used as the material of the pin 30. It is preferable that the surface of the pin 30 is quenched in order to improve wear resistance. However, a material other than metal may be used for the material of the pin 30. For example, a resin having high corrosion resistance corresponding to the type of liquid agent may be used for the material of the pin 30. The pin 30 vibrates up and down along a guide 61 disposed in the upper part of the chamber 20. The tip of the lower part of the pin 30 is accommodated in the space 21 in the chamber 20. On the other hand, the upper portion of the pin 30 is connected to the vibration mechanism 40 above the guide 61.

  The pin 30 has a ring-shaped magnet 31. In the present embodiment, the magnet 31 is disposed above the guide 61 and below the vibration mechanism 40. When the pin 30 vibrates up and down, the magnet 31 also vibrates up and down together with the pin 30.

  The vibration mechanism 40 is a mechanism that vibrates the pin 30 up and down. In this embodiment, a linear vibration actuator is used for the vibration mechanism 40. The linear vibration actuator generates a magnetic flux according to an input electric signal, and vibrates the pin 30 by an electromagnetic driving force generated thereby. Among linear vibration actuators, in particular, if a linear resonance actuator is used, it is easy to suppress noise during driving of the excitation mechanism 40. However, the vibration mechanism of the present invention only needs to generate a driving force electromagnetically. For example, instead of the linear vibration actuator, a linear motor, a voice coil motor, a stepping motor, or a servo motor may be used as the vibration mechanism.

  The circuit board 50 is a control unit that controls the operation of the vibration mechanism 40. The circuit board 50 has a control circuit constituted by a plurality of electronic components including the Hall element 501. The Hall element 501 detects the magnetic flux generated from the magnet 31 to detect the vertical position of the magnet 31, that is, the vertical position of the pin 30. The Hall element 501 outputs a detection signal corresponding to the position of the pin 30 in the vertical direction. The circuit board 50 supplies a drive signal to the vibration mechanism 40 based on the detection signal output from the Hall element 501. Thereby, operation | movement of the vibration excitation mechanism 40 is controlled.

  The frame body 60 is a housing located at the upper part of the chamber 20. The vibration mechanism 40, the circuit board 50, and the guide 61 described above are accommodated inside the frame body 60. The syringe 10, the chamber 20, the vibration mechanism 40, the circuit board 50, and the guide 61 are fixed directly or indirectly to the frame body 60. Thereby, the mutual positions of the syringe 10, the chamber 20, the vibration mechanism 40, the circuit board 50, and the guide 61 are determined.

<2-2. Detailed configuration of chamber>
Next, a more detailed configuration of the chamber 20 will be described. FIG. 3 is a partial longitudinal sectional view of the liquid agent discharge device 1 in the vicinity of the chamber 20.

  As described above, the chamber 20 has the gap 21 in which the liquid agent 9 is stored. As shown in FIG. 3, the gap 21 has a horizontal gap 211 and a vertical gap 212. The vertical gap 212 extends in the vertical direction inside the chamber 20. The lower end of the pin 30 is accommodated in the vertical gap 212. The horizontal gap 211 connects the liquid supply pipe 11 and the vertical gap 212 in a substantially horizontal direction.

  The chamber 20 has an O-ring 24. For example, an elastomer is used as the material of the O-ring. The O-ring 24 is located at the upper end portion of the vertical gap 212 and is interposed between the member constituting the chamber 20 and the pin 30. Thereby, the leakage of the liquid agent 9 to the upper side from the O-ring 24 is prevented. The pin 30 vibrates up and down while contacting the O-ring 24. If the outer peripheral surface of the pin 30 is quenched in advance, wear of the pin 30 due to contact with the O-ring 24 can be suppressed.

  Further, the chamber 20 of the present embodiment includes a heater 25 and a heat insulating member 26. For the heater 25, for example, a ceramic heater is used. When the heater 25 is energized, the heater 25 generates heat. The heat generated from the heater 25 is conducted to the liquid agent 9 in the gap 21 through the members constituting the chamber 20. Thereby, the temperature fall of the liquid agent 9 in the space 21 is suppressed. If the temperature drop of the liquid agent 9 is suppressed, an increase in the viscosity of the liquid agent 9 is suppressed. As a result, the liquid agent 9 can be intermittently discharged from the discharge port 23 with higher accuracy.

  The heat insulating member 26 covers the gap 21 and the upper part of the heater 25. The heat insulating member 26 is made of a material having a lower thermal conductivity than the other members constituting the chamber 20. The heat insulating member 26 suppresses heat generated from the heater 25 from being conducted to the Hall element 501 and the vibration mechanism 40. Thereby, the drive error by heating can be suppressed. Moreover, since the upward leakage of the heat generated from the heater 25 is suppressed, the liquid agent 9 in the gap 21 is heated more efficiently.

  4 and 5 are partial longitudinal sectional views of the liquid agent discharge device 1 in the vicinity of the discharge port 23. FIG. As shown in FIGS. 4 and 5, the object 90 is disposed below the chamber 20 when the liquid agent discharge device 1 is used. The lower surface of the chamber 20 having the discharge port 23 and the surface of the object 90 are vertically opposed to each other through a gap.

  The chamber 20 of the present embodiment has a bottom plate portion 27. The bottom plate portion 27 includes a chamber bottom portion 71, a damper 72, and a washer 73. The chamber bottom 71 is a part of the nozzle member 28 that is detachably attached to the chamber 20. The chamber bottom 71 extends substantially horizontally below the vertical gap 212. The chamber bottom 71 has a first circular hole 81 penetrating vertically. The lower opening of the first circular hole 81 is the discharge port 23 described above.

  The damper 72 is disposed on the upper portion of the chamber bottom 71. As the material of the damper 72, for example, a resin having a larger elasticity than the nozzle member 28 is used. The damper 72 has a second circular hole 82 penetrating vertically. The first circular hole 81 and the second circular hole 82 communicate with each other in the axial direction. In the present embodiment, a gap 84 is interposed between the upper surface of the chamber bottom 71 and the damper 72 around the first circular hole 81 and the second circular hole 82.

  The washer 73 is disposed on the damper 72. For the material of the washer 73, for example, a metal having a smaller elasticity than that of the damper 72 is used. In addition, the washer 73 has a third circular hole 83 penetrating vertically. The first circular hole 81, the second circular hole 82, and the third circular hole 83 communicate with each other in the axial direction. In the present embodiment, the upper opening of the third circular hole 83 serves as the discharge port 22 for the liquid agent 9. The discharge port 22 is located at the lower end of the vertical gap 212. Further, the discharge port 23 described above is located below the discharge port 22.

  As described above, the bottom plate portion 27 of the present embodiment has the through hole 80 in which the first circular hole 81, the second circular hole 82, and the third circular hole 83 are formed continuously in the vertical direction. The through-hole 80 penetrates the chamber bottom 71, the damper 72, and the washer 73 in the vertical direction. The upper opening of the through hole 80 is the discharge port 22, and the lower opening of the through hole 80 is the discharge port 23. The through hole 80 connects the discharge port 22 and the discharge port 23 up and down. The discharge port 22 communicates with the outside of the gap 21 through the through hole 80.

  Further, the chamber 20 has an air bleeding mechanism (not shown). Before performing the discharge process of the liquid agent 9, air is discharged from the gap 21 to the outside of the chamber 20 by the air vent mechanism while the liquid agent 9 is pumped from the syringe 10 to the gap 21 in the chamber 20. Thereby, the liquid agent 9 is filled in the space 21 in the chamber 20.

  When the vibration mechanism 40 is operated, the pin 30 vibrates between a first position (position in FIG. 4) and a second position (position in FIG. 5) above the first position. That is, the pin 30 moves alternately in the pull direction from the first position to the second position and in the push direction from the second position to the first position. When the pin 30 is disposed at the first position, the lower end of the pin 30 contacts the peripheral portion of the discharge port 22 on the upper surface of the washer 73. Thereby, the discharge port 22 is blocked. On the other hand, when the pin 30 is disposed at the second position, the lower end of the pin 30 moves away from the discharge port 22 upward. Thereby, the discharge port 22 is opened, and the vertical gap 212 and the through hole 80 communicate with each other.

  As described above, when the pin 30 is vibrated, the liquid agent 9 in the vertical gap 212 is intermittently discharged downward from the discharge port 23. The liquid agent 9 is divided for each period of the vibration of the pin 30 to become droplets. Then, the liquid droplets fly downward from the discharge port 23 and adhere to the surface of the object 90. In particular, in the present embodiment, the liquid agent 9 is discharged from the discharge port 23 using not only the pressure of extrusion by the pin 30 but also the pressure of the liquid agent 9 from the syringe 10. Thereby, the discharge force of the liquid agent 9 is enhanced. Moreover, compared with the case where there is no pressure from the syringe 10, the highly viscous liquid agent 9 can be discharged stably.

  When discharging the liquid agent 9, the lower end of the pin 30 intermittently contacts the upper surface of the bottom plate portion 27. At this time, the shock of the pin 30 is absorbed by the damper 72 contracting. As a result, damage to the pin 30 and the bottom plate portion 27 is suppressed. However, if the lower end of the pin 30 is brought into direct contact with the damper 72, the damper 72 is extremely deformed around the through hole 80. Thereby, the braking time of the pin 30 in a 1st position becomes long. However, in this embodiment, a washer 73 is disposed on the upper portion of the damper 72. Therefore, the tip of the lower portion of the pin 30 contacts not the damper 72 but the upper surface of the washer 73. Thereby, extreme deformation of the damper 72 around the through hole 80 is suppressed. This also reduces the braking time of the pin 30 at the first position.

<2-3. About drive control of vibration mechanism>
Next, drive control of the vibration exciting mechanism 40 when the liquid agent 9 is discharged in the liquid agent discharge apparatus 1 described above will be described. FIG. 6 is a configuration diagram of the control circuit 500 mounted on the circuit board 50. 7 and 8 are time charts showing temporal changes in signals in the respective parts of the control circuit 500. FIG.

  As shown in FIG. 6, the control circuit 500 of this embodiment includes a Hall element 501, a differential amplifier 502, a pull side envelope detector 503, a push side envelope detector 504, a top dead center setting unit 505, a bottom dead center. Point setting unit 506, pull side integrator 507, push side integrator 508, pull side preset setting unit 509, push side preset setting unit 510, pull side adder 511, push side adder 512, triangular wave generator 513, pull side It has a comparator 514, a push-side comparator 515, a drive circuit 516, and five switches SW1 to SW5.

  The switch SW1 is arranged in parallel with the pull-side integrator 507. Switch SW2 is interposed between top dead center setting unit 505 and the ground terminal. The switch SW3 is arranged in parallel with the push-side integrator 508. The switch SW4 is interposed between the bottom dead center setting unit 506 and the ground terminal. The switch SW5 is interposed between the triangular wave generator 513 and the pull-side comparator 514 and the push-side comparator 515.

  The control circuit 500 is activated by switching the switch SW5 to the ON side (white circle side in FIG. 6). The operation of the pull-side integrator 507 is activated by switching the switches SW1 and SW2 to the ON side (white circle side in FIG. 6). The operation of the push-side integrator 508 is activated by switching the switches SW3 and SW4 to the ON side (white circle side in FIG. 6). 7 and 8 show the timing for switching the switches SW1 to SW5 to the ON side.

  The Hall element 501 detects the magnetic flux generated from the magnet 31 to detect the vertical position of the magnet 31, that is, the vertical position of the pin 30. The Hall element 501 outputs a detection signal corresponding to the position of the pin 30 in the vertical direction. (0) in FIG. 7 shows an example of a detection signal output from the Hall element 501. In this example, the position of the pin 30 is displaced in the pull direction during a part of the period. As a factor that the position of the pin 30 is displaced in the pull direction, for example, resistance due to the viscosity of the liquid 9 is conceivable. A detection signal of the Hall element 501 is input to the differential amplifier 502.

  The differential amplifier 502 amplifies the detection signal of the hall element 501. FIG. 7A shows the detection signal after amplification. The amplified detection signals are input from the differential amplifier 502 to the pull-side envelope detector 503 and the push-side envelope detector 504, respectively.

  The pull-side envelope detector 503 extracts a pull-side envelope signal from the amplified detection signal. FIG. 7B1 shows the pull-side envelope signal extracted by the pull-side envelope detector 503. The pull-side envelope signal is input to one input terminal of the pull-side integrator 507.

  The push-side envelope detector 504 extracts a push-side envelope signal from the amplified detection signal. (B2) in FIG. 7 shows the push-side envelope signal extracted by the push-side envelope detector 504. The push-side envelope signal is input to one input terminal of the push-side integrator 508.

  The top dead center setting unit 505 outputs a top dead center signal having a constant voltage corresponding to the target drive position in the pull direction. The user of the liquid agent discharge device 1 can set an arbitrary target position in the top dead center setting unit 505. The top dead center setting unit 505 outputs a top dead center signal corresponding to the set target position to the other input terminal of the pull-side integrator 507. (C1) in FIG. 7 shows a top dead center signal output from the top dead center setting unit 505.

  The bottom dead center setting unit 506 outputs a bottom dead center signal having a constant voltage corresponding to the target drive position in the push direction. The user of the liquid agent discharge device 1 can set an arbitrary target position in the bottom dead center setting unit 506. The bottom dead center setting unit 506 outputs a bottom dead center signal corresponding to the set target position to the other input terminal of the push-side integrator 508. (C2) in FIG. 7 shows a bottom dead center signal output from the bottom dead center setting unit 506.

  The pull-side integrator 507 takes a difference between the pull-side envelope signal and the top dead center signal, and outputs an integrated signal obtained by integrating the difference. (B1-C1) of FIG. 7 shows the difference between the envelope signal on the pull side and the top dead center signal. (D1) in FIG. 7 shows a pull-side integration signal output from the pull-side integrator 507. The pull-side integration signal is input to the pull-side adder 511.

  The push-side integrator 508 takes the difference between the push-side envelope signal and the bottom dead center signal, and outputs an integrated signal obtained by integrating the difference. (B2-C2) in FIG. 7 shows the difference between the push-side envelope signal and the bottom dead center signal. (D2) in FIG. 7 shows a push-side integration signal output from the push-side integrator 508. The push-side integration signal is input to the push-side adder 512.

  The pull-side preset setting unit 509 outputs a bias signal having a constant voltage to be added to the pull-side integral signal so that the final pull-side pulse signal has an appropriate duty ratio. (E1) in FIG. 8 shows a pull-side bias signal output from the pull-side preset setting unit 509. The bias signal is input to the pull side adder 511.

  The push-side preset setting unit 510 outputs a bias signal having a constant voltage to be added to the push-side integration signal so that the final pull-side pulse signal has an appropriate duty ratio. (E2) in FIG. 8 shows a push-side bias signal output from the push-side preset setting unit 510. The bias signal is input to the push side adder 512.

  The pull side adder 511 adds the pull side integration signal and the pull side bias signal, and outputs a comparison signal used for comparison with a triangular wave signal described later. (F1) in FIG. 8 shows a pull-side comparison signal output from the pull-side adder 511. The comparison signal is input to one input terminal of the pull-side comparator 514.

  The push side adder 512 adds the push side integration signal and the push side bias signal, and outputs a comparison signal used for comparison with a triangular wave signal described later. (F2) in FIG. 8 shows a push-side comparison signal output from the push-side adder 512. The comparison signal is input to one input terminal of the push-side comparator 515.

  The triangular wave generator 513 outputs a triangular wave signal that repeats increasing and decreasing of the voltage at a constant period. FIG. 8G shows a triangular wave signal output from the triangular wave generator 513. The triangular wave signal is input to the other input terminal of the pull-side comparator 514 and the other input terminal of the push-side comparator 515, respectively.

  The pull-side comparator 514 outputs a pull-side pulse signal based on the pull-side comparison signal and the triangular wave signal. Specifically, the pull-side comparator 514 outputs a positive voltage when the triangular wave signal is larger than the comparison signal, and outputs 0 volts when the triangular wave signal is equal to or lower than the comparison signal. (H1) in FIG. 8 shows a pull-side pulse signal output from the pull-side comparator 514. The pulse signal is input to the drive circuit 516.

  The push-side comparator 515 outputs a push-side pulse signal based on the push-side comparison signal and the triangular wave signal. Specifically, the push-side comparator 515 outputs a positive voltage when the triangular wave signal is smaller than the comparison signal, and outputs 0 volt when the triangular wave signal is less than or equal to the comparison signal. (H2) in FIG. 8 shows a push-side pulse signal output from the push-side comparator 515. The pulse signal is input to the drive circuit 516.

  The drive circuit 516 includes a plurality of switches that are switched ON / OFF based on the pull-side pulse signal and the push-side pulse signal. When the pulse signal on the pull side is a positive voltage and the pulse signal on the push side is 0 volts, the drive circuit 516 outputs a drive signal of + V volts to the vibration mechanism 40. On the other hand, when the pulse signal on the pull side is 0 volt and the pulse signal on the push side is a positive voltage, the drive circuit 516 outputs a drive signal of −V volt to the vibration mechanism 40. When both the pull-side pulse signal and the push-side pulse signal are 0 volts, the drive circuit 516 outputs a 0-volt drive signal to the vibration mechanism 40. (J) in FIG. 8 shows a drive signal output from the drive circuit 516.

  When a drive signal of + V volts is input to the vibration mechanism 40, the vibration mechanism 40 accelerates the pin 30 to the pull side by electromagnetically generated driving force. In addition, when a drive signal of −V volts is input to the vibration mechanism 40, the vibration mechanism 40 accelerates the pin 30 to the push side by electromagnetically generated driving force.

  In this control circuit 500, when the pin 30 is displaced to the pull side from the drive target position, the duty ratio of the pull-side pulse signal becomes small as shown in FIG. The ratio increases. Therefore, the position of the pin 30 is corrected to the push side. On the contrary, when the pin 30 is displaced from the drive target position to the push side, the duty ratio of the pull-side pulse signal increases and the duty ratio of the pull-side pulse signal decreases. Therefore, the position of the pin 30 is corrected to the pull side. Thus, the control circuit 500 changes the duty ratio of each pulse signal in the push direction and the pull direction based on the detection signal from the Hall element 501 and the target position. Thereby, the operating range of the pin 30 is corrected.

  As described above, the vibration mechanism 40 of the liquid agent discharge apparatus 1 has a pull function that accelerates the pin 30 in the pull direction and a push function that accelerates the pin 30 in the push direction. A driving force generated electromagnetically is used for both the pull function and the push function. By using an electromagnetic force for driving the pin 30 in the push direction, a discharge force corresponding to the electromagnetic force can be applied to the liquid 9. Moreover, the discharge port 22 can be closed without using an elastic member for pressurizing the pin 30 in the push direction or while weakening the force of the elastic member.

  Further, in the liquid agent ejection apparatus 1, the top dead center setting unit 505 can arbitrarily set the target drive position in the pull direction. Therefore, the value of the integration signal on the pull side can be increased or decreased. Thereby, the driving force by which the pin 30 moves in the pull direction can be adjusted between the first position and the second position. Further, in this liquid agent discharge device 1, the bottom dead center setting unit 506 can arbitrarily set the target drive position in the push direction. Therefore, the value of the integration signal on the push side can be increased or decreased. Thereby, the driving force by which the pin 30 moves in the push direction can be adjusted between the first position and the second position.

  The control circuit 500 includes a detection signal from the Hall element 501, a pull-direction drive target position set by the top dead center setting unit 505, and a pull-direction drive target position set by the bottom dead center setting unit 506. Based on the above, the vibration mechanism 40 is controlled. That is, in the present embodiment, the control circuit 500 including the Hall element 501, the top dead center setting unit 505, and the bottom dead center setting unit 506 functions as a driving force adjustment unit. Thereby, each driving force of a push direction and a pull direction can be adjusted according to the viscosity of the liquid agent 9, and the vibration conditions of the pin 30. FIG. As a result, the discharge port 22 can be reliably closed and opened.

  Further, as described above, the liquid agent discharge device 1 performs so-called PWM control in which the driving force of the vibration exciting mechanism 40 is controlled by modulating the width of the pulse signal. If PWM control is used, the voltage ± V of the pulse signal can always be the rated voltage of the vibration mechanism 40. Therefore, the control circuit 500 can be configured more simply than when the driving force is controlled by voltage modulation.

  If a piezo element is used for the vibration mechanism, the amplitude obtained primarily from the piezo element is small, so a mechanism for amplifying the amplitude is required. On the other hand, the liquid agent discharge device 1 of the present embodiment uses an actuator that electromagnetically generates a driving force as the vibration mechanism. For this reason, the amplitude primarily obtained from the vibration mechanism 40 is larger than that of the piezoelectric element. Therefore, it is not necessary to provide an amplification mechanism between the vibration mechanism 40 and the pin 30. That is, the amplitude of the pin 30 is substantially the same as or smaller than the amplitude of the vibration generated primarily by the vibration mechanism 40. Thus, if the amplification mechanism is omitted, the liquid agent discharge device 1 can be further downsized.

<3. Modification>
As mentioned above, although exemplary embodiment of this invention was described, this invention is not limited to said embodiment.

  FIG. 9 is a configuration diagram of a control circuit 500B according to a modification. 9 includes a top dead center setting unit, a bottom dead center setting unit, a pull side integrator, a push side integrator, a pull side preset setting unit, a push side preset setting unit, a pull side adder, and a push side addition. A microcontroller 517B is provided instead of the detector, the triangular wave generator, the pull side comparator, and the push side comparator. The microcontroller 517B includes a top dead center setting unit, a bottom dead center setting unit, a pull side integrator, a push side integrator, a pull side preset setting unit, a push side preset setting unit, a pull side adder, and a push side adder. The arithmetic processing corresponding to the operations of the triangular wave generator, the pull side comparator, and the push side comparator is performed. Thus, a part of the control circuit may be realized by a microcontroller.

  FIG. 10 is a longitudinal sectional view of a liquid agent discharge device 1C according to another modification. In the example of FIG. 10, a support member 41C that supports the vibration mechanism 40C is assembled to a rail 62C provided on the frame 60C. Accordingly, the support member 41C and the vibration mechanism 40C can move up and down with respect to the frame body 60C. The support member 41C is pressed upward by a spring (not shown). 10 has a micrometer 42C as a positioning part. In the example of FIG. 10, the main body of the micrometer 42C is fixed to the frame body 60C. The lower end of the movable shaft 421C of the micrometer 42C is in contact with the upper surface of the support member 41C. For this reason, by displacing the movable shaft 421C of the micrometer 42C in the vertical direction, the support member 41C and the vibration mechanism 40C can be positioned in the vertical direction. As a result, the relative position of the vibration mechanism 40C with respect to the discharge port 22C can be adjusted.

  The main body of the micrometer 42C is not necessarily fixed to the frame body 60C. For example, as shown in FIG. 11, the main body of the micrometer 42C may be fixed to the vibration mechanism 40C side. In this case, the lower end of the movable shaft 421C of the micrometer 42C is brought into contact with the frame 60C or a member fixed to the frame 60C. Even in such a configuration, by operating the micrometer 42C to change the relative position between the main body of the micrometer 42C and the movable shaft 421C, the main body of the micrometer 42C and the vibration mechanism 40C can be moved in the vertical direction. Can be positioned. As a result, the relative position of the vibration mechanism 40C with respect to the discharge port 22C can be adjusted.

  In the example of FIGS. 10 and 11, the driving force in the push direction of the pin 30 </ b> C is adjusted by adjusting the vertical position of the vibration mechanism 40 </ b> C as described above. Specifically, to increase the driving force in the push direction of the pin 30C, the micrometer 42C is operated to lower the vibration mechanism 40C. Further, when it is desired to weaken the driving force in the push direction of the pin 30C, the vibration meter 40C is raised by operating the micrometer 42C. Thus, you may make the micrometer 42C function as a driving force adjustment part.

  FIG. 12 is a longitudinal sectional view of a liquid agent discharge apparatus 1D according to another modification. In the example of FIG. 12, an elastic member 32D is interposed between the vibration mechanism 40D and the pin 30D. For example, a spring can be used as the elastic member 32D. In a state where the pin 30D is disposed at the first position, the length of the elastic member 32D is preferably equal to or less than the natural length. In this way, pressure in the push direction can be applied from the elastic member 32D to the pin 30D. Therefore, the discharge port 22D can be closed by the pin 30D even when the vibration mechanism 40D is not energized.

  However, the elastic force in the push direction that the elastic member 32D applies to the pin 30D is preferably smaller than the maximum driving force in the push direction that the vibration mechanism 40D applies to the pin 30D. That is, when discharging the liquid agent 9D, it is preferable to move the pin 30D in the push direction mainly by the driving force of the vibration mechanism 40D.

  Further, another member may be interposed between the vibration mechanism 40D and the elastic member 32D. That is, the elastic member 32D may be interposed between the pin 30D and the member that is vibrated by the vibration mechanism 40D.

  The elastic member 32D of FIG. 12 couples the pin 30D and the vibration mechanism 40D or the member that is vibrated by the vibration mechanism 40D in a state where the relative distance between the pin 30D and the vibration mechanism 40D can be varied. Here, the excitation mechanism 40D preferably performs excitation drive at a frequency different from the resonance frequency determined by the spring constant associated with the mass of the pin 30D and the coupling force. In this way, it is possible to quickly correct the vibration position of the pin 30D by avoiding the resonance point while reducing the impact of the collision between the pin 30D and the discharge port 22D.

  FIG. 13 is a longitudinal sectional view of a liquid agent discharge apparatus 1E according to another modification. In the example of FIG. 13, instead of the elastic member of FIG. 12, a magnetic component 33E is interposed between the vibration mechanism 40E and the pin 30E. The magnetic component 33E generates a magnetically generated force with the pin 30E. Specifically, in a state where the pin 30E is disposed at the first position, the magnetic component 33E applies a force toward the discharge port 22E to the pin 30E. In this way, pressure in the push direction can be applied from the magnetic component 33E to the pin 30E. Therefore, even when the vibration mechanism 40E is not energized, the discharge port 22E can be closed by the pin 30E.

  Further, another member may be interposed between the vibration mechanism 40E and the magnetic component 33E. That is, the magnetic component 33E may be interposed between the pin 30E and the member that is vibrated by the vibration mechanism 40E.

  The magnetic component 33E of FIG. 13 couples both the pin 30E and the vibration mechanism 40E or the member that is vibrated by the vibration mechanism 40E in a state where the relative distance between the pin 30E and the vibration mechanism 40E can be varied. Here, the excitation mechanism 40E preferably performs excitation drive at a frequency different from the resonance frequency determined by the magnetic spring constant associated with the mass of the pin 30E and the coupling force. In this way, the vibration position of the pin 30E can be quickly corrected by avoiding the resonance point while reducing the impact of the collision between the pin 30E and the discharge port 22E.

  FIG. 14 is a partial vertical cross-sectional view of a liquid agent discharge device 1F according to another modification. In the example of FIG. 14, no washer is interposed between the damper 72F and the pin 30F. Therefore, when the pin 30F is vibrated, the lower surface of the pin 30F comes into direct contact with the damper 72F. The damper 72F in FIG. 14 has a convex portion 721F and a flange portion 722F. The convex portion 721F surrounds the second circular hole 82F in an annular shape. The upper surface 723F of the convex portion 721F is located at the highest position in the axial direction in the region facing the lower surface of the pin 30F of the damper 72F. The flange portion 722F extends perpendicularly to the vibration direction of the pin 30F from the outer peripheral surface of the convex portion 721F.

  In the example of FIG. 14, the opening above the second circular hole 82F of the damper 72F is the discharge port 22F for the liquid 9F. When the pin 30F is disposed at the first position, as shown in FIG. 14, the lower surface of the pin 30F and the upper surface 723F of the damper 72F are in contact with each other. As a result, the discharge port 22F is closed. Thus, if the lower surface of the pin 30F is brought into direct contact with the damper 72F, which is an elastic body, the adhesion between the pin 30F and the bottom plate portion 27F increases. Therefore, the liquid 9F can be discharged with higher accuracy.

  In the example of FIG. 14, the convex portion 721F of the damper 72F has an inclined surface 724F outside the upper surface 723F. The height of the inclined surface 724F decreases from the outer peripheral edge of the upper surface 723F toward the radially outer side. When the pin 30F comes into contact with the damper 72F, the lower surface of the pin 30F comes into contact with a part near the inner peripheral portion of the inclined surface 724F due to elastic deformation of the damper 72F. Thereby, the contact area of the pin 30F and the damper 72F becomes wider. As a result, the discharge of the liquid 9F can be stopped more reliably. In the example of FIG. 14, the inclined surface 724 </ b> F is curved in the longitudinal section, but the inclined surface 724 </ b> F may be linear in the longitudinal section.

  FIG. 15 is a bottom view of the pin 30F. In FIG. 15, the portion in contact with the damper 72 </ b> F is indicated by cross hatching. As shown in FIGS. 14 and 15, the pin 30F has an annular edge 34F located at the boundary between the lower surface and the outer peripheral surface. In the liquid agent ejection device 1F, the outer peripheral edge of the upper surface 723F of the convex portion 721F of the damper 72F is positioned on the inner side of the edge 34F of the pin 30F in plan view. For this reason, as shown in FIG. 15, the damper 72F does not contact the edge 34F of the pin 30F. In this way, it is possible to prevent the damper 72F from being damaged by the edge 34F of the pin 30F.

  Note that the outer peripheral edge of the upper surface of the convex portion 721F of the damper 72F may be at the same position as the edge 34F of the pin 30F in plan view. Moreover, when the pin 30F contacts the damper 72F, the edge 34F of the pin 30F may lightly contact the inclined surface 724F of the damper 72F by elastically deforming the damper 72F. That is, even if the edge 34F of the pin 30F comes into contact with the surface of the damper 72F, it is sufficient that the pressure due to the contact is reduced. And the damage of the damper 72F by the contact with the edge 34F should just be reduced.

  14 has an annular ring member 74F. The ring member 74F is located around the convex portion 721F. The lower surface of the ring member 74F is in contact with the upper surface of the flange portion 722F. In the example of FIG. 14, the lower surface of the ring member 74 </ b> F is an opposing surface located above the upper surface of the flange portion 722 </ b> F. When the viscosity of the liquid 9F is high, when the pin 30F is raised from the first position to the second position, a force for pulling up the damper 72F is generated. However, in the example of FIG. 14, the damper 72 </ b> F is prevented from being lifted by the contact between the upper surface of the flange portion 72 </ b> F and the lower surface of the ring member 74 </ b> F.

  Note that the lower surface of the ring member 74F does not necessarily need to be in constant contact with the upper surface of the flange portion 72F. For example, the lower surface of the ring member 74F may be positioned on the upper side with a gap from the upper surface of the flange portion 72F. Further, the ring member 74F may be omitted, and a member constituting the chamber 20F such as the nozzle member 28F may have a facing surface located on the upper side of the flange portion 722F. That is, when an upward force is applied to the damper 72F, the upper surface of the flange portion 722F may approach or come into contact with the opposing surface, and the lift of the damper 72F may be limited.

  FIG. 16 is a partial longitudinal sectional view of a liquid agent discharge device 1G according to another modification. Compared to the example of FIG. 14, the chamber 20 </ b> G of FIG. 16 does not have a ring member. Also, the damper 72G in FIG. 16 does not have a flange portion. Even in such a form, for example, the damper 72G may be prevented from being lifted by fixing the damper 72G to the chamber bottom 71G with an adhesive or the like.

  FIG. 17 is a partial longitudinal sectional view of a liquid agent discharge device 1H according to another modification. Compared with the example of FIG. 14, in the example of FIG. 17, the convex portion 721 </ b> H of the damper 72 </ b> H has a substantially cylindrical step surface 725 </ b> H instead of the inclined surface. The step surface 725H extends downward from the outer peripheral edge of the upper surface 723H of the convex portion 721H. In this way, when the pin 30H contacts the damper 72H, the edge 34H of the pin 30H does not contact the damper 72H even if the damper 72H is elastically deformed. Therefore, damage to the damper 72H due to the edge 34H can be further prevented.

  FIG. 18 is a partial longitudinal sectional view of a liquid agent discharge device 1J according to another modification. Compared with the example of FIG. 14, in the example of FIG. 18, the damper 72 </ b> J has an annular upper surface 726 </ b> J positioned higher than the upper surface 723 </ b> J of the convex portion 721 </ b> J. The annular upper surface 726J is located outside the edge 34J of the pin 30J in plan view. Thus, the upper surface 723J that contacts the lower surface of the pin 30J is not necessarily the surface that is located at the highest position in the damper 72J. That is, the upper surface 723J that contacts the lower surface of the pin 30J only needs to be positioned at the highest position in the axial direction in the region facing the lower surface of the pin 30J of the damper 72J.

  14 to 18, the lower surface of the pin is a flat surface, but the lower surface of the pin is not necessarily a flat surface. For example, the lower surface of the pin may be a concave surface or a convex surface, or may be a substantially conical pointed surface that converges downward. Moreover, in the example of FIGS. 14-18, the lower surface and outer peripheral surface of the pin adjoined, and those boundaries became an edge. However, a taper surface or a curved surface (R surface) may be interposed at the boundary between the lower surface and the outer peripheral surface of the pin. In that case, the inner edge of the tapered surface or curved surface, that is, the outer edge of the lower surface of the pin is referred to as an “edge” in the present invention.

  Moreover, about the detailed structure of a liquid agent discharge apparatus, you may differ from the structure shown by each figure of this application. For example, when the pin is arranged at the first position, the tip of the pin fits inside the outlet, and the tip of the pin contacts the inner peripheral surface of the outlet, thereby closing the outlet. Also good.

  In the control circuit, the Hall element and the differential amplifier may be replaced with a Hall IC. In addition, another type of sensor such as a photo sensor may be used as the detection unit instead of the Hall element. However, these sensors need to be able to detect the position in the vertical direction. For example, a type of sensing method that measures the vibration speed of the actuator by measuring the counter electromotive force cannot be used alone. However, even in such a case, the liquid material discharge device of the present invention can be realized if a sensor for detecting the target position for control is used in combination. Further, instead of PWM control, the drive of the excitation mechanism may be controlled by voltage modulation.

  Further, there may be a structure in which the liquid agent is discharged from the chamber with no pressure of the liquid agent from the syringe and only the pressure of the push-out by the pin.

  The vibration mechanism of the present invention only needs to use electromagnetically generated driving force for at least the push function. Therefore, an elastic force of an elastic body such as a spring may be used for the pull function, and a driving force generated electromagnetically may be used only for the push function.

  Moreover, you may combine suitably each element which appeared in said embodiment and modification in the range which does not produce inconsistency.

<4. Supplement regarding the second invention of the present application>
In the upper page, the structure of FIGS. 14 to 18 has been described as a modified example. However, in the second invention for solving the second problem of the present application, the “chamber of the chamber” illustrated in FIGS. The bottom plate portion includes a chamber bottom portion and a damper that is an elastic body disposed on the chamber bottom portion. The upper opening of the through hole provided in the bottom plate portion is a discharge port, and the lower opening of the through hole is The damper has an upper surface located at the highest position in the axial direction in a region facing the lower surface of the pin of the damper, and the lower surface of the pin and the damper in a state where the pin is disposed at the first position. It is essential that the outer peripheral edge of the upper surface of the damper is located at the same position as the annular edge located at the boundary between the lower surface of the pin and the outer peripheral surface of the pin or inside the edge in plan view. It becomes a requirement. In the second invention of the present application, “the excitation mechanism accelerates the pin in the pull direction from the first position to the second position and the push direction from the second position to the first position”. “It has a push function, and at least the push function uses electromagnetically generated driving force” is not an essential requirement.

  Moreover, you may combine suitably the element which appeared in said embodiment and modification in this 2nd invention in the range which does not produce inconsistency.

  The present invention can be used in a liquid agent discharge device.

1,1A, 1C, 1D, 1E, 1F, 1G, 1H, 1J Liquid Dispenser 9, 9A, 9D, 9F Liquid 10 Syringe 20, 20A, 20F, 20G Chamber 21, 21A Air gap 22, 22A, 22C, 22D, 22E, 22F Discharge port 23, 23A Discharge port 24 O-ring 25 Heater 26 Heat insulation member 27, 27F Bottom plate part 30, 30A, 30C, 30D, 30E, 30F, 30H, 30J Pin 31 Magnet 32D Elastic member 33E Magnetic component 34F, 34H , 34J Edge 40, 40A, 40C, 40D, 40E Excitation mechanism 41C Support member 42C Micrometer 50 Circuit board 60, 60C Frame 61 Guide 62C Rail 71, 71G Chamber bottom 72, 72F, 72G, 72H, 72J Damper 73 Washer 74F Ring member 80 Through hole 90, 90A Object 211 Horizontal gap 212 Vertical gap 500, 500B Control circuit 501 Hall element 505 Top dead center setting section 506 Bottom dead center setting section 516 Drive circuit 517B Microcontroller 721F, 721H, 721J Convex section 722F Flange section 723F , 723H, 723J Top surface 724F Inclined surface 725H Step surface

Claims (24)

A liquid agent discharge device for discharging a liquid agent toward an object,
A chamber having a gap extending in the vertical direction, a discharge port located at a lower side end portion of the gap and communicating with the outside of the gap, and a discharge port positioned below the discharge port;
A pin whose tip is housed in the gap;
The pin is vibrated between a first position where the tip of the pin is in contact with a peripheral edge or an inner peripheral surface of the discharge port and a second position where the tip of the pin is spaced upward from the discharge port. A vibration mechanism;
Have
The vibration mechanism has a pull function for accelerating the pin in a pull direction from the first position toward the second position, and a push function for accelerating in a push direction from the second position toward the first position. Have
At least the push function utilizes a driving force generated electromagnetically, and is a liquid agent discharge device. In the liquid agent discharge device according to claim 1,
A liquid agent discharge device further comprising a liquid agent supply unit that supplies a pressurized liquid agent into the gap. In the liquid agent ejection device according to claim 1 or 2,
A liquid agent ejection device, further comprising: a driving force adjusting unit that adjusts a driving force for moving the pin in the push direction between the first position and the second position. In the liquid agent discharge device according to claim 3,
The driving force adjusting unit is
A detection unit for detecting a position of the pin in a vibration direction;
A bottom dead center setting unit in which a target position for driving in the push direction is set;
A control unit for controlling the excitation mechanism based on a detection signal from the detection unit and a target position for driving in the push direction;
A liquid agent discharge device. In the liquid agent discharge device according to claim 4,
The driving force adjusting unit is
A top dead center setting unit in which a target position for driving in the pull direction is set;
The liquid ejection device that controls the vibration mechanism based on a detection signal from the detection unit, a target position for driving in the push direction, and a target position for driving in the pull direction. In the liquid agent discharge device according to claim 4 or 5,
The control unit operates the excitation mechanism with a pulse voltage, and changes a duty ratio of the pulse voltage based on a detection signal from the detection unit and the target position. In the liquid agent discharge device according to claim 3,
The driving force adjusting unit is
A liquid agent discharge device having a positioning portion for adjusting a relative position of the vibration exciting mechanism with respect to the discharge port. In the liquid agent discharge device according to any one of claims 1 to 7,
An elastic member interposed between the pin and the vibration mechanism or the member that is vibrated by the vibration mechanism;
In the state where the pin is disposed at the first position, the length of the elastic member is equal to or less than a natural length. In the liquid agent discharge device according to claim 8,
The liquid agent ejection device, wherein an elastic force in a push direction that the elastic member gives to the pin is smaller than a maximum driving force in the push direction that the vibration excitation mechanism gives to the pin. In the liquid agent discharge device according to any one of claims 1 to 7,
A magnetic component interposed between the pin and the vibration mechanism or the member that is vibrated by the vibration mechanism;
In the state where the pin is disposed at the first position, the magnetic component applies a force toward the discharge port to the pin. In the liquid agent discharge device according to any one of claims 1 to 10,
The liquid ejection device, wherein the excitation mechanism is a linear vibration actuator. In the liquid agent discharge device according to any one of claims 1 to 7,
An elastic member or a magnetic component interposed between the pin and the vibration mechanism or the member that is vibrated by the vibration mechanism;
The elastic member or the magnetic component couples both in a state where the relative distance between the pin and the vibration mechanism or the member that is vibrated by the vibration mechanism is variable,
The liquid ejection device, wherein the vibration mechanism performs vibration driving at a frequency different from a resonance frequency determined by a mass of the pin and a spring constant associated with the coupling force. In the liquid agent discharge device according to any one of claims 1 to 12,
The bottom plate of the chamber is
The bottom of the chamber;
A damper which is an elastic body disposed on the bottom of the chamber;
With
The liquid agent discharge device, wherein an upper opening of a through hole provided in the bottom plate portion is the discharge port, and a lower opening of the through hole is the discharge port. The liquid agent discharge device according to claim 13,
In the region facing the lower surface of the pin of the damper, the damper has an upper surface located at the highest place in the axial direction,
In a state where the pin is disposed at the first position, the lower surface of the pin and the upper surface of the damper are in contact with each other,
In plan view, the outer peripheral edge of the upper surface of the damper is located at the same position as the annular edge located at the boundary between the lower surface of the pin and the outer peripheral surface of the pin or on the inner side of the edge. The liquid agent discharge device according to claim 14,
The damper has a sloping surface whose height decreases from the outer peripheral edge of the upper surface toward the radially outer side. In the liquid agent discharge device according to claim 14 or 15,
The damper is
An annular projection,
A flange portion extending perpendicularly to the vibration direction of the pin from the outer peripheral surface of the convex portion;
Have
The convex portion has the upper surface;
The liquid agent discharge device, wherein the chamber has a facing surface located above the upper surface of the flange portion. The liquid agent discharge device according to claim 16,
The chamber is
The liquid agent discharge device further comprising an annular ring member positioned around the convex portion and in contact with the upper surface of the flange portion. The liquid agent discharge device according to claim 13,
The bottom plate portion is
A metal washer disposed on the upper portion of the damper;
The liquid agent discharge device, wherein the washer has the discharge port. In the liquid agent discharge device according to any one of claims 13 to 18,
A liquid agent discharge device in which a gap is interposed between the damper and the upper surface of the chamber bottom around the through hole. In the liquid agent discharge device according to any one of claims 1 to 19,
The liquid agent ejection device, wherein an amplitude of the pin is substantially the same as or smaller than an amplitude of vibration generated primarily by the vibration mechanism. A liquid agent discharge device for discharging a liquid agent toward an object,
A chamber having a gap extending in the vertical direction, a discharge port located at a lower side end portion of the gap and communicating with the outside of the gap, and a discharge port positioned below the discharge port;
A pin whose tip is housed in the gap;
The pin is vibrated between a first position where the tip of the pin is in contact with a peripheral edge or an inner peripheral surface of the discharge port and a second position where the tip of the pin is spaced upward from the discharge port. A vibration mechanism;
Have
The bottom plate of the chamber is
The bottom of the chamber;
A damper which is an elastic body disposed on the bottom of the chamber;
With
The upper opening of the through hole provided in the bottom plate portion is the discharge port, and the lower opening of the through hole is the discharge port,
In the region facing the lower surface of the pin of the damper, the damper has an upper surface located at the highest place in the axial direction,
In a state where the pin is disposed at the first position, the lower surface of the pin and the upper surface of the damper are in contact with each other,
In plan view, the outer peripheral edge of the upper surface of the damper is located at the same position as the annular edge located at the boundary between the lower surface of the pin and the outer peripheral surface of the pin or on the inner side of the edge. The liquid agent discharge device according to claim 21,
The damper has a sloping surface whose height decreases from the outer peripheral edge of the upper surface toward the radially outer side. In the liquid agent discharge device according to claim 21 or claim 22,
The damper is
An annular projection,
A flange portion extending perpendicularly to the vibration direction of the pin from the outer peripheral surface of the convex portion;
Have
The convex portion has the upper surface;
The liquid agent discharge device, wherein the chamber has a facing surface located above the upper surface of the flange portion. The liquid agent discharge device according to claim 23,
The chamber is
The liquid agent discharge device further comprising an annular ring member positioned around the convex portion and in contact with the upper surface of the flange portion.

Images