JP2014224693A5 - Apparatus and method for determining polarity and / or front / back of piezoelectric crystal - Google Patents
Apparatus and method for determining polarity and / or front / back of piezoelectric crystal Download PDFInfo
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- JP2014224693A5 JP2014224693A5 JP2013102857A JP2013102857A JP2014224693A5 JP 2014224693 A5 JP2014224693 A5 JP 2014224693A5 JP 2013102857 A JP2013102857 A JP 2013102857A JP 2013102857 A JP2013102857 A JP 2013102857A JP 2014224693 A5 JP2014224693 A5 JP 2014224693A5
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- 238000001514 detection method Methods 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims 1
Description
上述の点に鑑み、本発明は、圧電性を有する結晶体の極性及び／又は表裏を判定できるようにする装置及び方法を提供することを目的とする。 In view of the above points, the present invention aims at providing a to that instrumentation置及beauty how to be able to determine the polarity and / or sides of the crystal having piezoelectricity.
上述の目的を達成するために、本発明の実施例に係る装置は、圧電性の結晶体の極性及び／又は前記結晶体としてのウエハの分極方向に依存する表裏を判定できるようにする装置であって、前記結晶体に対して力を加える力付与部と、前記力に応じて発生する電圧の波形を検出して出力する電圧波形検出部と、を有する。 To achieve the above object, engagement Ru equipment to an embodiment of the present invention is to be able to determine the front and back which depends on the polarization direction of the wafer as the polar and / or the crystal of piezoelectric crystal material a that equipment has a force applying portion for applying a force to the crystal, and a voltage waveform detecting section for detecting and outputting a waveform of a voltage generated in response to said force.
また、本発明の実施例に係る方法は、圧電性の結晶体の極性及び／又は前記結晶体としてのウエハの分極方向に依存する表裏を判定する方法であって、力付与部が前記結晶体に対して力を加える力付与ステップと、電圧波形検出部が前記力に応じて発生する電圧の波形を検出して出力する電圧波形検出ステップと、を有する。 Further, engagement Ru how to embodiments of the present invention is a way you determine sides that depend on the polarization direction of the wafer as the polar and / or the crystal of the piezoelectric crystal element, the force applying portion There has a force applying step of applying a force to the crystal, a voltage waveform detection step of the voltage waveform detecting unit detects and outputs the waveform of the voltage generated in response to the power.
上述の手段により、本発明は、圧電性を有する結晶体の極性及び／又は表裏を判定できるようにする装置及び方法を提供することができる。 The above-described means, the present invention can provide a that enable and determine the polarity and / or sides of the crystal having piezoelectricity instrumentation置及beauty how.
Claims (9)
前記結晶体に対して力を加える力付与部と、
前記力に応じて発生する電圧の波形を検出して出力する電圧波形検出部と、
を有する装置。 A to that equipment to be able to determine the front and back which depends on the polarization directions of the wafer as the polar and / or the crystal of the piezoelectric crystal body,
A force applying unit that applies a force to the crystal;
A voltage waveform detection unit which detects and outputs the waveform of the voltage generated in response to said force,
That equipment having a.
請求項１に記載の装置。 Front and back which depends on the polarization direction of the polar and / or the wafer of the crystal on the basis of a comparison with a reference phase difference pre-registered phase difference of the waveform of the waveform and the voltage of the predetermined frequency of the vibration due to pre Symbol force Having a determination unit for determining
Equipment according to claim 1.
前記２つの電極によって定められる電極軸は、前記結晶体の分極方向に対して非垂直である、
請求項１又は２に記載の装置。 The voltage waveform detection unit detects the waveform of the voltage by using two electrodes placed at two locations of the periphery of the crystal,
The electrode axis defined by the two electrodes is non-perpendicular to the polarization direction of the crystal body,
Equipment according to claim 1 or 2.
請求項１乃至３の何れか一項に記載の装置。 The crystal is supported by an insulator;
Equipment according to any one of claims 1 to 3.
請求項１乃至４の何れか一項に記載の装置。 The force applying unit uses a piezo element as a vibration source,
Equipment according to any one of claims 1 to 4.
請求項３に記載の装置。 The electrode is formed of conductive rubber.
Equipment according to claim 3.
請求項５に記載の装置。 The crystal body is sandwiched between the piezoelectric element and an elastic pressing member.
Equipment according to claim 5.
力付与部が前記結晶体に対して力を加える力付与ステップと、
電圧波形検出部が前記力に応じて発生する電圧の波形を検出して出力する電圧波形検出ステップと、
を有する方法。 A way that enable and determine the front and back which depends on the polarization direction of the wafer as the polar and / or the crystal of the piezoelectric crystal body,
A force applying step in which a force applying unit applies a force to the crystal;
A voltage waveform detection steps the voltage waveform detecting unit detects and outputs the waveform of the voltage generated in response to said force,
How that have a.
請求項８に記載の方法。 The determination unit depends on the polarity of the crystal and / or the polarization direction of the wafer based on the comparison between the phase difference between the waveform of the predetermined frequency due to the force and the phase difference of the waveform of the voltage and a reference phase difference registered in advance. A determination step for determining the front and back to be performed ,
Method who claim 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013102857A JP6393958B2 (en) | 2013-05-15 | 2013-05-15 | A device that can determine the polarity of a piezoelectric cylindrical crystal, or can determine the front and back depending on the polarization direction of a wafer as a crystal. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013102857A JP6393958B2 (en) | 2013-05-15 | 2013-05-15 | A device that can determine the polarity of a piezoelectric cylindrical crystal, or can determine the front and back depending on the polarization direction of a wafer as a crystal. |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014224693A JP2014224693A (en) | 2014-12-04 |
| JP2014224693A5 true JP2014224693A5 (en) | 2016-07-28 |
| JP6393958B2 JP6393958B2 (en) | 2018-09-26 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013102857A Active JP6393958B2 (en) | 2013-05-15 | 2013-05-15 | A device that can determine the polarity of a piezoelectric cylindrical crystal, or can determine the front and back depending on the polarization direction of a wafer as a crystal. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6393958B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106324374B (en) * | 2015-06-24 | 2018-12-21 | 中国石油化工股份有限公司 | For detecting the method and system of the piezoelectric modulus of shale samples to be measured |
| JP6872374B2 (en) * | 2017-01-24 | 2021-05-19 | 住友金属鉱山株式会社 | Piezoelectric wafer front / back judgment device and chamfering device |
| JP6819315B2 (en) * | 2017-01-24 | 2021-01-27 | 住友金属鉱山株式会社 | Method for manufacturing piezoelectric oxide wafer |
| JP6878082B2 (en) * | 2017-03-29 | 2021-05-26 | 株式会社東京精密 | Wafer front / back judgment device and chamfering device using it |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5254999Y2 (en) * | 1973-02-15 | 1977-12-13 | ||
| JP2618404B2 (en) * | 1987-09-16 | 1997-06-11 | キヤノン株式会社 | Method for manufacturing non-ferroelectric piezoelectric thin film and method for investigating polarization |
| JP2554377B2 (en) * | 1989-11-30 | 1996-11-13 | 信越化学工業株式会社 | Method for manufacturing transparent single crystal wafer |
| JPH06201591A (en) * | 1992-12-28 | 1994-07-19 | Mitsui Mining & Smelting Co Ltd | Detecting method of polarity of piezoelectric crystal element |
| JPH0949813A (en) * | 1995-08-08 | 1997-02-18 | Fuji Elelctrochem Co Ltd | Polarity inspecting method |
| JP2001349836A (en) * | 2000-06-07 | 2001-12-21 | Shibuya Kogyo Co Ltd | Article inspecting device |
| NO20016100D0 (en) * | 2001-12-14 | 2001-12-14 | Hans Gude Gudesen | Piezo non-destructive readout |
| JP2008232906A (en) * | 2007-03-22 | 2008-10-02 | Ngk Insulators Ltd | Method for measuring characteristic of piezo-electric element |
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- 2013-05-15 JP JP2013102857A patent/JP6393958B2/en active Active
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