JP2014219281A - Spectral measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable a measurement time to be shortened by reducing a time required for alignment of a measurement object.SOLUTION: A microscopic spectral measurement device 50 comprises: a light source 1; a pinhole diaphragm 2; a collimator lens 3; an objective lens 7; a tested body holder that holds a reference body 60, and changes over an arrangement position of a reference plane surface 60a to a measurement position having a position relation optically conjugate with the pinhole diaphragm 2 and to a retreat position away from the measurement position; a tested body holding part 10 that holds a tested lens 61, and changes over an arrangement position of a tested lens surface 61a to the measurement position and to the retreat position; a positioning surface that is arranged so as to have a fixed position relation with regard to the objective lens 7, and positions a reference part 8 by abutting against the reference part 8; a condensing lens 15 that condenses a flux of light reflected by a tested body arranged at the measurement position; and a spectral measurement part 19 that measures a spectral distribution of the flux of light.

Description

  The present invention relates to a spectrometer.

Conventionally, measurement light emitted from a pinhole is condensed on the surface of the sample to be measured, and the reflected light is guided into a pinhole arranged at a position optically conjugate with the pinhole and received by a spectroscope. Thus, a spectroscopic measurement device that measures spectral characteristics is known.
In such a spectroscopic measurement apparatus, for example, a reference body serving as a measurement standard is prepared in advance in order to correct the spectral distribution of measurement light and the influence of the substrate of the sample to be measured. In many cases, the spectral characteristics of the reference body and the subject are measured, and the relative spectral characteristics of the specimen based on the surface of the reference body are measured.
For example, in Patent Document 1, as an example of such a spectroscopic measurement apparatus, measurement light from a light source unit is incident on a microscopic optical system including a reflective objective lens, and is irradiated on the surface of a sample to be measured by the reflective objective lens. A microphotometric apparatus is described in which the reflected light is collected by a microscopic optical system and incident on a photometric spectroscopic unit from a pinhole unit to measure a spectral spectrum.
In this microphotometer, the sample stage on which the reference sample and the sample to be measured are placed can be moved up and down in the direction of the optical axis of the microscopic optical system. The position is adjusted by moving the sample stage so as to focus on the surface of the measurement sample.

Japanese Patent No. 2806747

However, the conventional spectrometer as described above has the following problems.
In the microphotometer of Patent Document 1, unless the reference sample and the sample to be measured are accurately arranged at the condensing position of the reflective objective lens, part of the reflected light from the reference sample and the sample to be measured does not enter the spectroscope. Therefore, a measurement error occurs.
For this reason, in order to perform measurement using the microphotometer described in Patent Document 1, the height of the surface of the measurement object is adjusted each time the measurement object is changed, and the measurement object is positioned at the condensing position of the reflective objective lens. The surface needs to be aligned.
In particular, in the production process for producing a large amount of lenses, it is necessary to inspect spectral characteristics after coating, and it is necessary to repeatedly perform measurement of a measurement object having a different shape and measurement of a reference body.
As a result, compared to mass production of the same type of lens, the measurement time for the measurement and positioning of the reference object is relatively increased in the overall measurement time. There is a problem that it ends up.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a spectroscopic measurement apparatus that can shorten the measurement time by reducing the time required for alignment of the measurement target. .

  In order to solve the above-described problem, the spectroscopic measurement apparatus according to the first aspect of the present invention measures the spectral reflection characteristics of the reference object and the subject to obtain the relative spectral reflection characteristics of the subject with respect to the reference body. A spectroscopic measurement device for measuring, a light source, a pinhole diaphragm for shaping a light beam emitted from the light source, a collimator lens for condensing the light beam transmitted through the pinhole diaphragm to form a substantially parallel light beam, An objective lens that collects the light beam that has passed through the collimator lens, and the reference body are held, and the arrangement position of the surface of the reference body is optically aligned with the pinhole diaphragm via the collimator lens and the objective lens. A reference body holder that can be switched between a measurement position having a conjugate positional relationship and a retreat position away from the measurement position, the object is held, and the arrangement position of the surface of the subject is determined. An object holding unit provided to be switchable between the measurement position and a retracted position away from the measurement position, and the reference body holding unit, which is disposed so as to have a certain positional relationship with respect to the objective lens. And a measurement positioning unit that positions at least the reference body holding unit at the measurement position by abutting at least the reference body holding unit among the holding units including the subject holding unit and the measurement unit. A condensing lens that collects a light beam reflected by the reference body or the subject and transmitted through the objective lens, and a spectroscope that measures a spectral distribution of the light beam collected by the condensing lens. It is set as the structure provided.

  In the spectroscopic measurement device, it is preferable that the reference body holding part is detachably fixed to a member having the measurement positioning part.

  In the spectroscopic measurement apparatus, a repositioning positioning unit that is disposed so as to have a certain positional relationship with the objective lens, and that positions at least the position of the reference body holding unit among the holding units at the retreating position; Preferably, the reference body holding portion includes a movable support portion that movably supports the reference body holding portion between a state in contact with the measurement positioning portion and a state in contact with the retraction positioning portion.

  In the spectroscopic measurement device, it is preferable that the movable support portion supports the reference body holding portion so as to be movable in parallel.

  In the spectroscopic measurement apparatus, it is preferable that the movable support portion supports the reference body holding portion so as to be rotatable.

  In the spectroscopic measurement device, the reference body holding unit holds the plurality of reference bodies at positions different from each other in a state where the surfaces are aligned on the same plane, It is arranged in a fixed positional relationship and includes a plurality of abutting portions provided so as to be able to abut on the measuring positioning portion, and each surface of the reference body includes the measuring position. A first positioning part for positioning the reference body holding part so as to be aligned with a plane; and a surface of the reference body for selectively placing the surface at the measurement position; It is preferable to include a second positioning portion that positions the surface of the reference body corresponding to the contact portion at the measurement position.

  The spectroscopic measurement apparatus of the present invention has a measurement positioning unit that positions the reference body holding unit by contacting at least the reference body holding unit, and therefore at least the time required for alignment when the reference body is a measurement target. The effect is that the measurement time can be shortened by reducing the time.

It is a typical block diagram which shows the structure at the time of the reference body measurement of the spectrometry apparatus of the 1st Embodiment of this invention. It is a typical block diagram which shows the structure at the time of the test object measurement of the spectrometry apparatus of the 1st Embodiment of this invention. It is typical sectional drawing which shows the structure of the reference body holding | maintenance part and measurement positioning part of the spectrometry apparatus of the 1st Embodiment of this invention. It is a typical exploded view of a reference body holding part and a positioning part for measurement of a spectroscopic measurement device of a 1st embodiment of the present invention. It is A view in FIG. It is typical sectional drawing which shows the structure of the principal part of the spectrometer of the 2nd Embodiment of this invention. It is a top view which shows the structure of the reference body holding part of the spectrometry apparatus of the 2nd Embodiment of this invention. It is typical sectional drawing which shows arrangement | positioning of the principal part at the time of the analyte measurement of the spectrometer of the 2nd Embodiment of this invention. It is typical sectional drawing which shows the structure of the principal part of the spectrometer of the 3rd Embodiment of this invention. It is a top view which shows the structure of the reference body holding | maintenance part of the spectrometry apparatus of the 3rd Embodiment of this invention. FIG. 10 is a B view in FIG. 9. It is typical sectional drawing which shows arrangement | positioning of the principal part at the time of the analyte measurement of the spectrometer of the 3rd Embodiment of this invention.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. In all the drawings, even if the embodiments are different, the same or corresponding members are denoted by the same reference numerals, and common description is omitted.

[First Embodiment]
A spectroscopic measurement apparatus according to a first embodiment of the present invention will be described.
FIG. 1 is a schematic configuration diagram showing a configuration at the time of measuring a reference body of the spectrometer according to the first embodiment of the present invention. FIG. 2 is a schematic configuration diagram showing a configuration of the spectroscopic measurement apparatus according to the first embodiment of the present invention at the time of subject measurement. FIG. 3 is a schematic cross-sectional view illustrating configurations of the reference body holding unit and the measurement positioning unit of the spectroscopic measurement apparatus according to the first embodiment of the present invention. FIG. 4 is a schematic exploded view of the reference body holding unit and the measurement positioning unit of the spectrometer according to the first embodiment of the present invention. FIG. 5 is a view on A in FIG.

  A microspectrophotometer 50 (spectrometer) according to the present embodiment shown in FIG. 1 irradiates the surface of a reference body having a known spectral reflectance or the surface of the object by epi-illumination, thereby allowing the surface of the reference object and the object to be illuminated. The spectral reflection characteristics of the surface of the subject are measured, and the relative spectral reflection characteristics of the surface of the subject are measured based on the spectral reflection characteristics obtained by the respective measurements.

The subject is not particularly limited, and examples thereof include optical elements such as lenses, optical filters, and reflection mirrors. Hereinafter, as an example, a case where the subject includes the test lens 61 and the surface of the subject includes the test lens surface 61a will be described.
In FIG. 1, the test lens 61 is depicted as a biconvex lens, but this is an example, and the surface shape of the test lens surface 61a is not limited to a convex surface. The test lens surface 61a may be, for example, a concave surface or a flat surface.

  The shape and material of the reference body are not particularly limited as long as the reference body is a member that can be used as a standard for spectroscopic measurement of the test lens surface 61 a of the test lens 61. In the present embodiment, as an example, a reference body 60 having a disk-like outer shape and having a reference plane 60a (the surface of the reference body) on one surface is employed.

  The schematic configuration of the microspectroscopic light measurement device 50 includes a light source 1, a pinhole diaphragm 2, a collimator lens 3, an annular aperture diaphragm 4, a half mirror 5, an objective lens 7, a subject holding table 13, a reference unit positioning unit 6, and a reference unit. 8, the condensing lens 15, and the spectroscopic measurement part 19 (spectrometer) are provided.

First, the schematic arrangement of these device parts will be described.
Each device portion excluding the reference unit 8 and the subject holding base 13 is fixed directly to the housing 20 or fixed via a support member (not shown).
In addition, the object holder 13, the objective lens 7, the half mirror 5, the condensing lens 15, and the spectroscopic measurement unit 19 are measured by the measurement reference axis O of the microspectroscopic light measurement device 50 defined by the incident optical axis of the spectroscopic measurement unit 19. They are arranged in this order on the top.

The reference unit 8 is detachably disposed between the objective lens 7 and the subject holding base 13 via the reference unit positioning unit 6.
FIG. 1 shows a state in which the reference unit 8 including the reference body 60 is attached to the reference unit positioning unit 6 in order to perform spectroscopic measurement of the reference body 60 (hereinafter referred to as reference body measurement). FIG. 2 shows a state in which the reference unit 8 is removed from the reference unit positioning unit 6 in order to perform spectroscopic measurement of the test lens 61 (hereinafter referred to as “subject measurement”).

In the following, when the matters common to the reference body measurement and the subject measurement or the matters that do not need to be distinguished from the reference body measurement and the subject measurement are described, the reference body 60 and the lens 61 are referred to as “the subject”. The reference plane 60a and the test lens surface 61a may be referred to as “measurement surfaces”.
However, “measurement object” and “measurement surface” represent the reference object 60 and the reference plane 60a, respectively, in the description limited to the reference object measurement, and in the description limited to the object measurement, respectively, the test lens 61 and the test object. It represents the lens surface 61a.

The annular aperture stop 4, the collimator lens 3, the pinhole stop 2, and the light source 1 are arranged in this order from the side closer to the half mirror 5 on the side facing the half mirror 5.
Although not shown in the drawings, the microspectroscopic light measuring device 50 is not limited to the calculation unit, a calculation unit that calculates a spectral spectrum and a spectral reflectance from the output of the spectroscopic measurement unit 19, a control unit that controls the measurement operation, and a control unit. And an observation optical system disposed on the optical path between the condenser lens 15 and the pinhole diaphragm 16 for aligning the lens 61 to be tested. .

The light source 1 for illuminating a surface to be measured, intended to generate a measuring light beam L ₀ to a white light, it is possible for example to adopt a halogen lamp or a deuterium lamp. In addition, for example, a light source composed of a light emitting element such as a light emitting diode can be employed as long as it can generate light having a necessary band.

Pinhole diaphragm 2 is a diaphragm member having a pinhole 2a on the optical axis O ₁ of the light source 1. Thus, the measuring light beam L ₀ generated by the light source 1 is limited to a range inside the pinhole 2a is the measuring light beam L ₀ is shaped.

The collimator lens 3, to a parallel beam of measurement beam L ₀ emitted from the pinhole 2a, is arranged a lens or lens group such that the focal point position coincides with the center of the pin hole 2a.
The annular aperture stop 4 is a diaphragm member that shapes the cross-sectional shape of the light beam transmitted through the collimator lens 3 into a parallel light beam into an annular pattern centered on the optical axis O ₁ to form the measurement light beam L _1. It is.
The half mirror 5 is an optical path dividing unit that reflects a part of the measurement light beam L ₁ toward the objective lens 7 and guides it to the objective lens 7. As a result, the optical axis O ₁ is reflected and aligned with the measurement reference axis O.

Objective lens 7, measuring the measuring beam L ₁ reflected by the half mirror 5, as well as condensed as measuring beam L ₂ onto the measurement surface of the object to be measured placed below, which is reflected by the measurement surface a lens or lens group for converging a light beam L _3.
The lens optical axis of the objective lens 7 is aligned with the measurement reference axis O.
In the present embodiment, as shown in FIG. 3, the objective lens 7 is held by an objective lens holder 21 that constitutes a part of a reference portion positioning unit 6 described later, and the housing 20 is interposed via the objective lens holder 21. And are fixed.

  In FIG. 3, the objective lens 7 is illustrated as a lens group including two lenses of lenses 7A and 7B, but this is an example, and the lens configuration of the objective lens 7 is limited to a two-lens configuration. It may be a single lens or may be composed of three or more lens groups. Further, the lens configuration is not particularly limited as long as it has a positive refractive power as a whole.

As shown in FIGS. 1 and 2, the subject holding base 13 is an apparatus portion that holds the subject lens 61 so that the position of the subject lens 61 can be adjusted, and is arranged at a position facing the objective lens 7.
In the present embodiment, the subject holding stage 13 includes a subject holding unit 10 that holds the test lens 61, an XY axis stage 11 that moves the subject holding unit 10 in a direction orthogonal to the measurement reference axis O, and XY. And a Z-axis stage 12 that moves the axis stage 11 in a direction along the measurement reference axis O.

According to the subject holding stand 13, the subject lens surface 61a is held on the subject holding portion 10, and the position of the subject lens surface 61a is adjusted by adjusting the position with the XY axis stage 11 and the Z axis stage 12. The lens 61 to be measured can be arranged so as to be orthogonal to the measurement reference axis O and coincide with the focal position of the objective lens 7.
According to such an arrangement, the pinhole 2a and the top surface of the lens surface 61a to be measured are in an optically conjugate positional relationship via the optical system including the collimator lens 3 and the objective lens 7, so that the light source 1 The image of the pinhole 2a due to the measurement light beam L0 generated in step ₁ is projected in a spot shape on the surface top of the lens surface 61a.
Such an arrangement state of the test lens surface 61a is hereinafter referred to as a measurement position of the test lens 61.
Further, as shown in FIG. 1, the Z-axis stage 12 of the subject holding base 13 has a reference portion positioning portion 6 and a reference portion 8 described later disposed between the lens surface 61a to be examined and the housing 20, And it has the movable range which can make the space of the grade which can attach or detach the reference part 8 to the reference part positioning part 6. FIG.
A state where the test lens 61 is retracted to such a position is referred to as a retracted position of the test lens 61.
That is, according to the subject holding table 13, the subject lens surface 61a of the reference body 60 held in the subject holding unit 10 can be switched between the measurement position and the retracted position.

  For example, the XY axis stage 11 can be deleted if the test lens surface 61a can be held at a position orthogonal to the measurement reference axis O only by holding the test lens 61 in the test object holding unit 10. Is possible. For example, when the subject holding unit 10 is aligned at a position where the holding center of the subject holding unit 10 is aligned with the measurement reference axis O in the direction orthogonal to the measurement reference axis O, the XY axis stage 11 is deleted. Is possible.

  As shown in FIGS. 3 and 4, the reference unit positioning unit 6 includes an objective lens holder 21, a fixing member 22, and a positioning member 23 (a member having a measurement positioning unit).

The objective lens holder 21 is a cylindrical member that holds the objective lens 7 in a state in which the lens optical axis of the objective lens 7 is aligned with the measurement reference axis O, and the objective lens 7 is accommodated and fixed on the inner periphery. A lens housing portion 21c is formed.
A method for fixing the objective lens 7 to the lens housing portion 21c is not particularly limited. Although illustration is omitted, for example, an appropriate fixing method such as adhesion, caulking, or a fixing ring can be adopted depending on the lens configuration.
In the present embodiment, the objective lens holder 21 is fixed to the housing 20 at a proximal end mounting portion 21a provided on the proximal end side, and protrudes outward (lower side in the drawing) of the housing 20.
The distal end portion of the objective lens holder 21 is formed with an opening 21d communicating with the lens housing portion 21c at the center thereof, and a tapered portion 21b whose diameter increases from the distal end side toward the proximal end side is formed at the outer peripheral portion of the opening 21d. Has been.
A male screw portion 21e for screwing with the fixing member 22 and the positioning member 23 is formed on the outer peripheral portion between the base end mounting portion 21a and the tapered portion 21b.
In the present embodiment, the central axes of the objective lens holder 21 and the male screw portion 21e are aligned with the measurement reference axis O, respectively.

The fixing member 22 is a member that positions and fixes the positioning member 23 in a direction along the measurement reference axis O.
In the present embodiment, the fixing member 22 employs, as an example, a nut member having a female screw portion 22a that engages with the male screw portion 21e of the objective lens holder 21 at the center.
Of the end surfaces in the axial direction of the fixing member 22, the end surface facing the distal end side of the objective lens holder 21 when screwed into the female screw portion 22 a of the objective lens holder 21 is a plane orthogonal to the central axis of the fixing member 22. A positioning surface 22b for positioning the positioning member 23 is configured.

The positioning member 23 is a member that positions and fixes the reference portion 8 in a direction along the measurement standard axis O.
In the present embodiment, as an example, the positioning member 23 employs a cylindrical member having a female screw portion 23a that engages with the male screw portion 21e of the objective lens holder 21 at the center.
At one end of the positioning member 23 in the axial direction, a base end surface 23d which is a plane orthogonal to the central axis is formed, and is in contact with the positioning surface 22b of the fixing member 22 attached by screwing to the objective lens holder 21. You can come in contact.
At the other end of the positioning member 23 in the axial direction, a positioning surface 23b (measuring positioning portion) composed of a plane perpendicular to the central axis of the positioning member 23 is used to position the reference portion 8 in the direction along the measurement standard axis O. And the protrusion part 23c which protrudes in an annular | circular shape from the positioning surface 23b in the area | region near the inner periphery on the positioning surface 23b is formed.
In the positioning member 23, at least the protrusion 23c is formed of a magnetic body that attracts a magnet. In the present embodiment, the entire positioning member 23 is composed of SUS430 that is a magnetic material.

As shown in FIG. 3, in the reference portion positioning portion 6 having such a configuration, the fixing member 22 and the positioning member 23 are screwed into the male screw portion 21e in this order from the proximal end side to the distal end side of the objective lens holder 21. Assembled.
The positioning surface 22b of the fixing member 22 and the base end surface 23d of the positioning member 23 are fastened with a double nut by applying a fastening force in a state where they are in contact with each other. Thereby, the relative position in the direction along the measurement reference axis O with respect to the objective lens holder 21 is fixed.
This relative position can be adjusted as necessary by assembling the positioning surface 22b of the fixing member 22 by changing the position in the direction along the measurement reference axis O.
In the present embodiment, the distance from the positioning surface 23b to the focal position F of the objective lens 7 is adjusted in advance to a position where it is H1.

The reference portion 8 (reference body holding portion, holding portion) is a device portion that holds the reference body 60 and is detachably fixed to the reference portion positioning portion 6. The reference plane 60 a of the reference body 60 is attached when the reference portion 8 is mounted. It is positioned at a measurement position on the reference plane 60a, which is a position orthogonal to the measurement reference axis O and coincident with the focal position F of the objective lens 7.
In this embodiment, the reference unit 8 includes a reference body holder 24 that fixes the reference body 60, a positioning member 23, and a magnet 25 that is detachably fixed.

As shown in FIGS. 4 and 5, the reference body holder 24 is a bottomed cylindrical member having a hole 24 b at the center.
At the center of the bottom of the hole 24b, a concave reference body fixing portion 24a that holds the reference plane 60a of the reference body 60 in a state of being arranged in a direction orthogonal to the central axis of the reference body holder 24 is provided.
The reference body 60 is fixed to the reference body fixing portion 24a with the reference plane 60a facing the opening side of the hole 24b.
The fixing method of the reference body 60 employs adhesion in the present embodiment. However, it is also possible to fix in an exchangeable manner with an appropriate clamp material.

A contact surface 24 f made of a plane orthogonal to the central axis of the reference body holder 24 is formed at the opening side end of the hole 24 b of the reference body holder 24. The distance between the contact surface 24f and the reference plane 60a fixed to the reference body fixing portion 24a is H1.
At the center of the contact surface 24f, a hole inner peripheral surface 24e made of a cylindrical surface having a diameter larger than that of the hole 24b and formed coaxially with the central axis of the reference body holder 24, and the outer periphery of the hole 24b are circular. A hole having an annular bottom surface 24d is formed.

The inner diameter of the hole inner peripheral surface 24 e is larger than the outer diameter of the protrusion 23 c of the positioning member 23 and smaller than the outer diameter of the positioning member 23.
The difference between the inner diameter of the hole inner peripheral surface 24e and the outer diameter of the protrusion 23c is not particularly limited as long as it is within the radius of the effective reference region in the reference plane 60a. However, the smaller the difference between the inner diameter of the hole inner peripheral surface 24e and the outer diameter of the protrusion 23c, the smaller the range of the effective reference region in the reference plane 60a. For this reason, it is preferable that the difference between the inner diameter of the hole inner peripheral surface 24e and the outer diameter of the protrusion 23c is as narrow as possible within a range that does not hinder the attachment and detachment of the reference portion 8.

The depth of the hole bottom 24d is slightly deeper than the protrusion height of the protrusion 23c so that the tip of the protrusion 23c of the positioning member 23 does not contact the hole bottom 24d.
As shown in FIG. 5, the hole bottom surface 24d is provided with a magnet accommodation hole 24c for fixing the magnet 25 in a state where it does not protrude from the hole bottom surface 24d at a position where the circumferential direction is equally divided.

The magnet 25 is a member that has a magnetic force that attracts the positioning member 23 with a force larger than at least the weight of the reference portion 8 and fixes the relative position between the reference portion 8 and the positioning member 23 by the action of the magnetic force.
In this embodiment, the magnet 25 has a disk-like outer shape, and is fixed to the reference body holder 24 by adhesion in a state of being embedded in the magnet accommodation hole 24c.

Condensing lens 15, as shown in FIGS. 1 and 2, is reflected by the object to be measured, of the measuring beam L ₃ into a parallel beam by the objective lens 7, collecting the measurement light beam L ₄ passing through the half mirror 5 as the measurement light beam L ₅ light, and is intended to be focused on the entrance aperture of the spectral measurement unit 19 formed by the pinhole diaphragm 16 which will be described later.

Spectrometry unit 19 is to measure the spectral distribution of the measurement light beam L _5, in the present embodiment includes a pinhole diaphragm 16, a diffraction grating 17, a light receiving element 18, the.
Pinhole diaphragm 16, the condensing position of the objective lens 7 is made incident on the entire measuring beam L ₅ spectrometry unit 19 when the matching surface to be measured, the measurement surface relative to the condensing position of the objective lens 7 This is a diaphragm member for preventing the reflected light from being incident on the spectroscopic measurement unit 19 when the distance is shifted. For this reason, the pinhole diaphragm 16 is provided with a pinhole 16a provided coaxially with the measurement reference axis O at a position optically conjugate with the focusing position of the objective lens 7 via the objective lens 7 and the focusing lens 15. Have

Diffraction grating 17, by diffracting the measuring beam L ₅ incident from the pinhole 16a, and separated into each wavelength is for imaging at different positions on the light-receiving element 18.

The light receiving element 18 includes, for example, a plurality of light receiving portions formed of photodiodes arranged in a line, and reading means such as a shift register that sequentially reads out the accumulated charges of each light receiving portion and extracts them as video signals. The data is sent to a calculation unit (not shown).
As the light receiving element 18, for example, a one-dimensional imaging element or a one-dimensional photodiode array can be employed.

Next, the operation of the microspectroscopic light measurement apparatus 50 of this embodiment will be described.
In order to measure the relative spectral reflection characteristics of the test lens 61 by the microspectroscopic measurement device 50, the measurement of the measured object and the measurement of the reference object are performed. Either of these measurement orders may be performed first. Further, when measuring a plurality of test lenses 61 of the same type collectively, the reference body measurement may be performed at least once.

In order to perform the reference body measurement, as shown in FIG. 1, the Z-axis stage 12 is lowered to leave a space below the reference portion positioning portion 6, and the reference portion positioning portion 6 as shown by a two-dot chain line. The reference portion 8 that has been removed from is attached to the reference portion positioning portion 6 as indicated by a solid line.
That is, as shown in FIG. 3, the contact surface 24 f of the reference body holder 24 is opposed to the positioning surface 23 b of the positioning member 23, the reference portion 8 is approached from below the reference portion positioning portion 6, and the hole inner peripheral surface 24 e is The projection 23c is externally fitted.

When the protrusion 23c and the magnet 25 approach each other, the reference body holder 24 is attracted to the positioning member 23 by the magnetic force of the magnet 25, and the contact surface 24f and the positioning surface 23b contact each other. Thereby, the relative position of the reference body holder 24 and the positioning member 23 is fixed.
In the present embodiment, the reference body 60 in the reference body holder 24 is positioned in the direction along the measurement standard axis O while the central portion thereof is located on the measurement standard axis O. The distance between the reference plane 60a and the positioning surface 23b is H1.
Since the reference plane 60a and the contact surface 24f are parallel, the reference plane 60a is measured even if the fixing position of the reference plane 60a is displaced in the radial direction due to the fitting clearance between the hole inner peripheral surface 24e and the protrusion 23c. It only moves in a direction perpendicular to the reference axis O. Therefore, the distance between the reference plane 60a and the positioning surface 23b does not change.

In this way, in the present embodiment, the reference plane 60a is arranged at the measurement position only by fitting the inner peripheral surface 24e of the reference body holder 24 to the protrusion 23c of the positioning member 23 and bringing them closer to each other. That is, the reference plane 60a is disposed at the focal position F of the objective lens 7 that is orthogonal to the measurement standard axis O and is optically conjugate with the pinhole diaphragm 2 via the collimator lens 3 and the objective lens 7. The
On the other hand, when the test lens 61 is attached to the subject holding unit 10, the test lens 61 is disposed at a retracted position away from the measurement position.

In this state, the light source 1 is turned on and the spectroscopic measurement of the reference plane 60a is started.
The measurement light beam L ₀ emitted from the light source 1 illuminates the pinhole 2 a, and the measurement light beam L ₁ shaped by the pinhole 2 a diverges from the pinhole 2 a and enters the collimator lens 3.
Pinhole 2a of the pinhole diaphragm 2, because it is disposed at the focal position of the collimator lens 3, the measuring light beam L ₁ becomes a parallel light beam when passing through the collimator lens 3, the annular aperture stop 4, a light beam cross-section is annular And is incident on the half mirror 5.

In the half mirror 5, a part of the measurement light beam L ₁ is reflected toward the objective lens 7, enters the objective lens 7 as an axial light beam that travels along the measurement reference axis O, and collects toward the focal position of the objective lens 7. It is light, and reaches the reference plane 60a as measuring beam _{L 2.}
An image of the pinhole 2 a corresponding to the optical magnification of the illumination optical system including the collimator lens 3 and the objective lens 7 is projected onto the focal plane of the objective lens 7.

At reference plane 60a, a portion of the measuring beam L ₂ is reflected, it is condensed and enters the objective lens 7 as a measuring beam L _3, incident on the half mirror 5 as a measuring beam L ₄ is a parallel light beam.
In the half mirror 5, a part of the measurement light beam L ₄ is transmitted and enters the condenser lens 15.
Measuring beam L ₄ are the measuring light beam L ₅ is condensed to form by the condenser lens 15.
Measuring beam L ₅ represents, passed through the pinhole 16a in the center of the pinhole aperture 16, then enters the interior of the spectroscopic measurement section 19 with diverging.
When the measurement light beam L ₅ reaches the diffraction grating 17, it is diffracted according to the wavelength by the diffraction grating 17 and is imaged at different positions on the light receiving element 18.

When the measuring light beam L ₅ is formed on the light receiving portion of the light receiving element 18, depending on the amount of charge generated in the respective light receiving portions of the light-receiving element 18, an output signal corresponding to the light intensity is generated. This output signal is A / D converted and sent to an arithmetic unit (not shown).
In the calculation unit, after performing noise removal processing and dark current correction as necessary, a spectral spectrum representing a light intensity distribution for each wavelength corresponding to the arrangement position of the light receiving unit is generated and stored in a storage unit (not shown). .
This completes the reference body measurement.

In order to measure the object to be measured, the reference portion 8 is released by applying a force equal to or greater than the attractive force of the magnet 25 to release the reference portion 8 downward, and the reference portion 8 is removed (see FIG. 2). .
Prior to or after this, the subject lens 61 is held by the subject holding portion 10 of the subject holding stand 13 with the subject lens surface 61a facing upward.

Next, as shown in FIG. 2, the Z-axis stage 12 is raised, and the position is adjusted so that the surface top of the lens surface 61 a coincides with the condensing position of the objective lens 7.
This position adjustment can be performed, for example, by not shown in the observation optical system, the measuring beam L ₅ in the pinhole aperture 16 and optically conjugate position by observing the spot image.
For example, when the subject lens surface 61a is in the defocus position, the projected image on the pinhole diaphragm 16 by the measuring light beam L ₂ is, to become a ring shape, a ring-shaped spot image in the image plane of the observation optical system Observed. For this reason, in order to set the defocus to 0, the movement amount of the Z-axis stage 12 is adjusted so that a spot-like spot image is observed.

Further, when the eccentric in the direction of the subject lens surface 61a is perpendicular to the measurement reference axis O, a part of the measuring beam L ₃ is, to cause a light amount loss is reflected outside the aperture angle of the objective lens 7, The amount of light that reaches the image plane of the observation optical system decreases.
Therefore, the XY axis stage 11 is moved so that the brightness of the spot image on the image plane of the observation optical system is maximized, and the position of the Z axis stage 12 is finely adjusted as necessary.

In this way, as shown in FIG. 2, the test lens surface 61a is arranged at the measurement position.
On the other hand, the reference body 60 is disposed at the retracted position of the reference body 60 away from the measurement position. Thus, the retracted position of the reference body 60 may be a position different from the retracted position of the test lens 61.

The adjustment by the XY axis stage 11 can be omitted when the holding center of the subject holding unit 10 is accurately aligned with the measurement reference axis O.
Further, if the manufacturing error of the lens thickness of the test lens 61 is sufficiently small and the variation in the height of the test lens surface 61a is within the allowable measurement range even if the test lens 61 is replaced, the Z-axis stage It is possible to position the lens surface 61a to be measured at the measurement position only by moving the movement amount of 12 to a predetermined position.

In this state, the light source 1 is turned on and the spectroscopic measurement of the lens surface 61a to be measured is performed.
The operation in this case are that the measuring light beam L ₃ becomes reflected light beam at the target lens surface 61a, except spectrum obtained is a point which is spectrum of the lens surface 61a, and the reference body measurements Since it is the same, description is abbreviate | omitted.
The subject measurement is thus completed.

The calculation unit multiplies the ratio of the spectral spectrum measured by the subject measurement with respect to the spectral spectrum measured by the reference object measurement, and the spectral reflectance of the known reference plane 60a, thereby calculating the relative spectrum of the lens surface 61a. The reflectance is calculated and displayed on a monitor or the like as necessary.
This completes the measurement of the relative spectral reflection characteristics of the lens 61 to be examined.

According to the microspectroscopic light measuring device 50, the contact surface 24f of the reference body holder 24 is brought into contact with the positioning surface 23b of the reference positioning unit 6 and the position of the reference body holder 24 is fixed by the attractive force of the magnet 25. The reference body 60 can be arranged at the measurement position. Therefore, it is possible to reference member 60 from moving in the optical path of the measurement beam L _1, starts the reference object measured without adjusting the position of the reference member 60.
Further, in order to perform the subject measurement, the operation of moving the test lens surface 61a to the measurement position can be started only by removing the reference unit 8 from the reference unit positioning unit 6 and moving it to the retracted position.
As described above, according to the microspectroscopic measurement device 50, the time required for alignment when the reference body 60 is a measurement target can be reduced as compared with the case where the position of the reference body 60 is adjusted. As a result, the measurement time of the spectroscopic measurement can be shortened.

In this embodiment, since the reference body 60 is held by the dedicated reference body holder 24, the reference body 60 does not need to be held by the subject holding unit 10.
For this reason, the shape and size of the reference body 60 can be selected regardless of the lens 61 to be examined. For example, it can be formed in a shape and size that cannot be held by the subject holding unit 10. Therefore, since the reference body 60 can be reduced in size, thinned, or formed into a shape that is easy to manufacture, the manufacturing cost of the reference body 60 can be reduced.

  Moreover, in this embodiment, since the reference body 60 is switched between the measurement position and the retracted position by attaching and detaching the reference unit 8, there is no need to provide a moving mechanism for moving the reference unit 8. It can be simplified.

  Further, in the present embodiment, the subject holding unit 10 does not hold the reference body 60, and therefore the work using the subject holding unit 10 during the reference body measurement, for example, the test lens 61 is attached to the subject holding unit 10. It is possible to perform the work of detaching in parallel. In this respect, the measurement efficiency can be improved.

[Second Embodiment]
Next, a spectroscopic measurement apparatus according to a second embodiment of the present invention will be described.
FIG. 6 is a schematic cross-sectional view showing the configuration of the main part of the spectrometer according to the second embodiment of the present invention. FIG. 7 is a plan view showing the configuration of the reference body holding unit of the spectrometer according to the second embodiment of the present invention. FIG. 8 is a schematic cross-sectional view showing the arrangement of the main part of the spectroscopic measurement apparatus according to the second embodiment of the present invention during measurement of an object.

As shown in FIG. 6, the microspectroscopic light measurement apparatus 51 (spectroscopic measurement apparatus) of the present embodiment includes a reference part positioning part 6 and a reference part 8 of the microspectroscopic light measurement apparatus 50 of the first embodiment. Instead, a reference unit positioning unit 36 and a reference unit 38 are provided.
Hereinafter, a description will be given centering on differences from the first embodiment.

  The reference part positioning part 36 is obtained by deleting the positioning member 23 from the reference part positioning part 6 in the first embodiment.

The reference unit 38 includes a top plate part 31, a side plate part 32, and a reference body holding part 33.
The top plate portion 31 is a plate-like member having a female screw portion 31b that engages with the male screw portion 21e of the objective lens holder 21 at the center. One plate surface of the top plate portion 31 (upper side in the drawing) is a contact surface 31 a that contacts the positioning surface 22 b of the fixing member 22 when screwed into the objective lens holder 21.

The side plate part 32 is a member for supporting a reference body holding part 33 described later so as to be movable in a direction orthogonal to the measurement reference axis O.
In the present embodiment, the side plate portion 32 is fixed to the plate surface on the opposite side of the contact surface 31a in the top plate portion 31, and is disposed in pairs in a positional relationship facing each other across the female screw portion 31b. A side plate 32A and a second side plate 32B are provided.
In the present embodiment, the first side plate 32A and the second side plate 32B are the outer side surfaces of the first side surface 32c (measurement positioning portion) and the second side surface 32d (retraction positioning portion), respectively, from the measurement reference axis O. They are spaced apart by a distance D / 2. That is, the first side surface 32c and the second side surface 32d are arranged in parallel to each other with a distance D (see FIG. 7).
In the first side plate 32A and the second side plate 32B, sliding guide portions 34 (movable support portions) made of bearings through which the reference body holding portion 33 is slidably inserted are embedded at positions facing each other.

  As a specific configuration of the sliding guide portion 34, an appropriate sliding bearing or rolling bearing having an insertion hole shape corresponding to the shaft shape of the reference body holding portion 33 can be employed. In the present embodiment, since the first shaft portion 33c and the second shaft portion 33d of the reference body holding portion 33 described later have a rectangular cross section, the reference body holding portion 33 has a rectangular insertion hole shape in which it can slide.

The reference body holding part 33 is a member for switching the reference body 60 between the measurement position and the retracted position by supporting the reference body 60 so as to be movable in a direction orthogonal to the measurement reference axis O. .
In the present embodiment, as shown in FIG. 7, the reference body holding portion 33 is a rectangular plate-like holding plate portion 33 a and a first portion extended from the center portion of the side surface of the holding plate portion 33 a facing each other. A shaft portion 33c and a second shaft portion 33d are provided.

The holding plate portion 33a is provided with a reference body fixing portion 24a similar to that of the first embodiment in order to hold the reference body 60 in a fixed position.
In the holding plate portion 33a, the next reference object fixed portion 24a, along the central axis _{O 33} of the first shaft portion 33c and the second shaft portion 33d, the center distance d (however, d <D / 2) A circular through hole 33b is provided at a position spaced apart from the holding plate portion 33a in the thickness direction.
The through-hole 33b moves the reference body holding part 33 and the object held by the object holding part 10 when the center of the through-hole 33b is arranged substantially coaxially (including the coaxial case) with the measurement reference axis O. It is formed in a size and shape that secures an empty space necessary for raising the test lens surface 61a of the test lens 61 to the measurement position.
In the present embodiment, a circular hole is formed in the through hole 33b to such an extent that the subject holding part 10 can advance and retreat without interfering.

Each of the first shaft portion 33c and the second shaft portion 33d has a rectangular shape in which the cross-sectional shape perpendicular to the extending direction is slidably fitted to the inner peripheral surface of the sliding guide portion 34, and the outer peripheral surface. Is a smooth plane.
At the end of the first shaft portion 33c in the extending direction, it protrudes to the side of the first shaft portion 33c at a distance D / 2 from the center of the reference body fixing portion 24a and can be locked to the first side surface 32c. A stopper 37 having a locking surface 37a is fixed.
At the end in the extending direction of the second shaft portion 33d, a locking surface protrudes to the side of the second shaft portion 33d at a distance D / 2 from the center of the through hole 33b and can be locked to the second side surface 32d. An operation knob 35 provided with 35a is fixed.

With such a configuration, when the operator advances and retracts the operation knob 35 in the extending direction of the second shaft portion 33d, the reference body holding portion 33 of the reference portion 38 is uniaxially parallel to the contact surface 31a (in FIG. 6). Translated horizontally).
In the present embodiment, when the reference body holding part 33 is translated in this way, the reference plane 60a is moved such that the distance to the contact surface 31a maintains a constant value H2.
Due to such parallel movement, the position of the reference body holding portion 33 is a position where the locking surface 37a is locked to the first side surface 32c (hereinafter referred to as the first position), as shown in FIGS. As shown in FIG. 8, the position can be switched between a position where the locking surface 35a is locked to the second side surface 32d (hereinafter referred to as the second position).

As shown in FIG. 6, the reference portion 38 is screwed in advance at a position closer to the base end side in the objective lens holder 21 by screwing the female screw portion 31 b of the top plate portion 31 with the male screw portion 21 e of the objective lens holder 21. The fixed surface 22b of the fixed member 22 is fixed in a state where the contact surface 31a of the top plate portion 31 is in contact. At this time, the fixing member 22 and the top plate 31 are fastened with a double nut by applying a fastening force in a direction facing each other.
Thereby, the relative position of the fixing member 22 and the reference portion 38 in the direction along the measurement standard axis O with respect to the objective lens holder 21 is fixed.
For this reason, in this embodiment, the positioning surface 22b of the fixing member 22 constitutes a measurement positioning unit that positions the reference body holding unit 33 so that the reference plane 60a is aligned with a plane including the measurement position.
This relative position can be adjusted as necessary by assembling the positioning surface 22b of the fixing member 22 by changing the position in the direction along the measurement reference axis O.
In the present embodiment, the position of the fixing member 22 is adjusted in advance to a position where the distance from the positioning surface 22b to the focal position F of the objective lens 7 is H2.
In the present embodiment, the fixing member 22 is applied with an objective by, for example, application of a screw lock agent or a fixing means such as a fixing screw (not shown) so that the adjusted fixing position does not change even when the reference portion 38 is attached or detached. It is fixed to the lens holder 21.

Next, the operation of the microspectrophotometer 51 of this embodiment will be described.
The microspectroscopic measurement device 51 is different from the first embodiment only in the operation of switching the reference body 60 between the measurement position and the retracted position. Therefore, this point will be mainly described below.

In order to perform the reference body measurement by the microspectroscopic light measurement device 51, the subject holding unit 10 holding the test lens 61 is moved to the retracted position in the same manner as in the first embodiment. In this state, as shown in FIG. 6, the operation knob 35 is moved away from the second side plate 32B, and the locking surface 37a of the stopper 37 is locked to the first side surface 32c.
Thereby, the reference plane 60a of the reference body 60 held by the reference body fixing portion 24a is translated and moved to the measurement position. For this reason, the first side surface 32c is brought into contact with the locking surface 37a, which is a contact portion, so that the reference plane 60a disposed at a distance D / 2 from the locking surface 37a is selected and set to the measurement position. It constitutes a positioning part for measurement to be positioned.
In this state, the reference body measurement is performed in the same manner as in the first embodiment.

In order to perform measurement of an object to be measured by the microspectroscopic measurement device 51, the operation knob 35 is pushed into the second side plate 32B, and the locking surface 35a is locked to the second side surface 32d.
Thereby, the through hole 33b moves to the first side plate 32A side, and the through hole 33b is disposed at a position coaxial with the measurement reference axis O as shown in FIG.
Therefore, as in the first embodiment, the Z-axis stage 12 is raised to move the lens surface 61a to be measured to the measurement position.
In this state, the subject measurement is performed in the same manner as in the first embodiment.
An arithmetic unit (not shown) calculates the relative spectral reflection characteristic of the lens surface 61a to be tested in the same manner as in the first embodiment.

According to the microspectroscopic light measurement device 51, the reference body holding portion 33 is simply moved until the locking surface 37a of the stopper 37 fixed to the reference body holding portion 33 comes into contact with the first side surface 32c of the first side plate 32A. The reference body 60 can be arranged at the measurement position. Therefore, it is possible to reference member 60 from moving in the optical path of the measurement beam L _1, starts the reference object measured without adjusting the position of the reference member 60.
Further, in order to perform the subject measurement, the reference body holding portion 33 is moved until the locking surface 35a of the operation knob 35 fixed to the reference body holding portion 33 comes into contact with the second side surface 32d of the second side plate 32B. Only by this, the reference body 60 can be arranged at the retracted position. Thereby, the operation | work which moves the to-be-tested lens surface 61a to a measurement position can be started.
As described above, according to the microspectroscopic measurement device 51, the time required for alignment when the reference body 60 is a measurement target can be reduced as compared with the case where the position of the reference body 60 is adjusted. As a result, the measurement time of the spectroscopic measurement can be shortened.

  In the present embodiment, since the dedicated reference body holding unit 33 is used to hold the reference body 60, the reference body 60 is held by the subject holding unit 10 as in the first embodiment. There is no need to do. For this reason, as in the case of the first embodiment, the reference body 60 can be downsized, thinned, or formed into a shape that is easy to manufacture, and thus the manufacturing cost of the reference body 60 is reduced. can do.

  In the present embodiment, as in the first embodiment, since the subject holding unit 10 does not hold the reference body 60, an operation using the subject holding unit 10 during the reference body measurement, for example, the subject The operation of detaching the test lens 61 from the specimen holding unit 10 can be performed in parallel. In this respect, the measurement efficiency can be improved.

[Third Embodiment]
Next, a spectroscopic measurement apparatus according to a third embodiment of the present invention will be described.
FIG. 9 is a schematic cross-sectional view showing the configuration of the main part of the spectrometer according to the third embodiment of the present invention. FIG. 10 is a plan view showing the configuration of the reference body holding unit of the spectrometer according to the third embodiment of the present invention. FIG. 11 is a view from B in FIG. FIG. 12 is a schematic cross-sectional view showing the arrangement of the main part of the spectroscopic measurement apparatus according to the third embodiment of the present invention during subject measurement.

As shown in FIG. 9, the microspectroscopic light measurement device 52 (spectroscopic measurement device) of the present embodiment includes a reference portion positioning portion 6 and a reference portion 8 of the microspectroscopic light measurement device 50 of the first embodiment. Instead, a reference unit positioning unit 46 and a reference unit 48 are provided.
Hereinafter, a description will be given centering on differences from the first embodiment.

The reference unit positioning unit 46 includes a fixed plate 41 (a member having a measurement positioning unit) instead of the positioning member 23 of the reference unit positioning unit 6 in the first embodiment.
The fixing plate 41 is a member that positions and fixes the reference portion 48 in a direction along the measurement standard axis O.
In the present embodiment, the fixing plate 41 employs, as an example, a disk member having a female screw portion 41d that engages with the male screw portion 21e of the objective lens holder 21 at the center.
A contact surface 41a, which is one surface in the thickness direction of the fixed plate 41, can come into contact with the positioning surface 22b of the fixed member 22 attached by screwing to the objective lens holder 21.
A fixing surface 41b (measuring positioning portion, first positioning portion) which is the other surface in the thickness direction of the fixing plate 41 is a plane parallel to the contact surface 41a, and a top plate portion 43A of the support member 43 described later. Can be brought into contact with each other.
In the fixing plate 41, a plurality of through holes 41c through which the fixing screw 42 is inserted are penetrated in the plate thickness direction on the circumference centering on the female screw portion 41d.

In the present embodiment, the female screw portion 41d of the fixing plate 41 is screwed into the male screw portion 21e of the objective lens holder 21, and the positioning of the fixing member 22 screwed in advance to a position closer to the base end side in the objective lens holder 21 is determined. The contact surface 41a of the fixing plate 41 is fixed in contact with the surface 22b. At this time, the fixing member 22 and the fixing plate 41 are fastened with a double nut by applying a fastening force in a direction opposite to each other.
Thereby, the relative position of the fixing member 22 and the fixing plate 41 in the direction along the measurement reference axis O with respect to the objective lens holder 21 is fixed.
This relative position can be adjusted as necessary by assembling the positioning surface 22b of the fixing member 22 by changing the position in the direction along the measurement reference axis O.
In the present embodiment, the positions of the fixing member 22 and the fixing plate 41 are adjusted in advance to a position where the distance from the fixing surface 41b of the fixing plate 41 to the focal position F of the objective lens 7 is H3. Here, if the plate thickness of the fixed plate 41 is t, H3 = H2-t.

  The reference portion 48 is a support member 43 that is detachably attached to the fixed plate 41, and a holding plate portion 45 (see reference) that is rotatably fixed to the support member 43 and holds one or more reference bodies so as to be rotatable. Body holding part).

The support member 43 includes a top plate portion 43A, a side plate portion 43B, and a lower surface portion 43C.
The top plate portion 43A is a plate-like portion that has an attachment surface 43a that contacts the fixing surface 41b of the fixing plate 41 and supports the holding plate portion 45 on the back surface side of the attachment surface 43a.
The mounting surface 43a has a plurality of screw holes 43b each having a through hole 43d having a size capable of inserting the objective lens holder 21 and a female screw portion into which a fixing screw 42 inserted into each through hole 41c of the fixing plate 41 is screwed. Are penetrated in the thickness direction.
Each screw hole 43b can be arranged at a position overlapping with each through hole 41c when the central axis O _43d of the through hole 43d is aligned coaxially with the central axis of the objective lens holder 21, that is, the measurement reference axis O. It is like that.

  A bearing portion 44 (movable support portion) that rotationally supports the holding plate portion 45 is provided on the back surface of the mounting surface 43a at a position separated by a distance R from the center of the through hole 43d.

The side plate portion 43B is a wall-like portion erected on the outer peripheral portion on the back surface side of the mounting surface 43a.
A part of the side plate portion 43B is extended to the vicinity of the movement area of the operation knob 47 of the holding plate section 45, which will be described later. A spaced lower end surface 43c is formed.
The other side plate portion 43B is extended to a position that covers the side of the movement area of the operation knob 47, and a lower surface portion 43C that covers the movement area of the operation knob 47 from the lower side of the drawing is extended to the tip in the extending direction. ing.
Although illustration of the shape of the lower surface portion 43C in plan view is omitted, the lower surface portion 43C is formed in a range that does not interfere with the movement range of the subject holding base 13.

In the present embodiment, as shown in FIG. 10, the holding plate portion 45 is a substantially disk-shaped member in which a rotation shaft portion 45a is erected at the center portion.
The end of the rotating shaft 45a opposite to the holding plate 45 is connected to a bearing 44 provided on the top plate 43A, whereby the holding plate 45 is connected to the central axis of the rotating shaft 45a. It is supported so as to be able to rotate around C.

The holding plate portion 45 is provided with three reference body fixing portions 24a for fixing the reference bodies 60, 60A, and 60B on the circumference of the radius R from the central axis C of the rotating shaft portion 45a, and a through hole 33b. It has been.
The reference body fixing portion 24a in the present embodiment is formed on the surface of the holding plate portion 45 that faces the top plate portion 43A, and the through hole 33b is provided so as to penetrate the holding plate portion 45 in the plate thickness direction.
As an example, the arrangement positions in the plan view are positions that divide the circumference of the radius R into four equal parts, and are arranged in the order of the reference bodies 60 and 60A, the through holes 33b, and the reference body 60B in the counterclockwise direction in the drawing. ing.

The reference bodies 60 </ b> A and 60 </ b> B are reference bodies each having a reference plane 60 a having a surface spectral reflection characteristic different from that of the reference body 60. However, the reference planes 60a of the reference bodies 60, 60A, 60B are aligned on the same plane orthogonal to the central axis of the rotation shaft portion 45a.
In the present embodiment, the plane in which the reference plane 60a is aligned has a distance H3 from the mounting surface 43a as shown in FIG.

  In FIG. 10, as an example, an example in which the outer shapes of the reference bodies 60, 60A, and 60B are the same is drawn. However, the outer shapes of the reference bodies 60, 60A, and 60B are the reference body fixing portions 24a according to the outer shapes. As long as the shape is changed, they may be different from each other. In particular, when the thicknesses are different, the depth of the reference body fixing portion 24a may be changed so that the reference planes 60a are aligned on the same plane.

On the side of the holding plate 45, the reference bodies 60, 60A, the through holes 33b, and the radial directions connecting the center of the reference body 60B and the center of the rotating shaft 45a (hereinafter, when there is no risk of misunderstanding) The operation knobs 47A, 47B, 47C, and 47D are provided along the radial direction.
The operation knobs 47A, 47B, 47C, and 47D can be identified by an operator by an identification mark (not shown), but the outer shapes thereof are the same.
The operation knobs 47A, 47B, 47C, 47D have a cylindrical locking shaft portion 47a (contact portion) extending in the radial direction, and an end portion in the extending direction of the locking shaft portion 47a than the locking shaft portion 47a. And an operation shaft portion 47b made of a large-diameter columnar member. The center axis of each locking shaft portion 47a is aligned with a plane orthogonal to the center axis of the rotation shaft portion 45a.
As shown in FIG. 9, each of the locking shaft portions 47a is spaced apart from the lower end surface 43c with a gap h0, and has a length that protrudes more outward than the side plate portion 43B on which the lower end surface 43c is formed. Have. For this reason, in the range in which the lower end surface 43c is formed, the operation shaft portion 47b protrudes to the side of the side plate portion 43B.

With such a configuration, the operator can rotate the holding plate portion 45 by operating the operation shaft portion 47b protruding from the side plate portion 43B from the outside of the reference portion 48.
As shown in FIG. 11, the lower end surface 43c has a pair of locking portions 49 (measuring positioning portions, second positioning portions) for locking the locking shaft portion 47a and fixing the circumferential position of the locking shaft portion 47a. The positioning portion) is provided at a position spaced apart from this plane by an equal distance across a plane including the central axes O _43d and C (a plane corresponding to the plane of FIG. 9).

Each locking portion 49 is a protrusion made of an elastic member whose height h1 from the lower end surface 43c changes when an external force is applied. The maximum value of the height h1 is set to a dimension slightly larger than the gap h0 between the lower end surface 43c and the locking shaft portion 47a.
The elastic force of each locking portion 49 and the circumferential arrangement interval are such that the locking shaft portion 47a is sandwiched between the locking portions 49, and the reaction force from each locking portion 49 is substantially 0 (including the case of 0). ) Is set so as to be in contact.
The specific configuration of each locking portion 49 includes, for example, an elastic protrusion formed of a synthetic resin or rubber, a protrusion formed of a metal or synthetic resin leaf spring, and a base end protruding by a spring or the like. A structure such as a protrusion elastically supported in the direction can be employed.

With such a configuration, when the operating knob 47 is rotated about the central axis C, when the locking shaft portion 47a hits one locking portion 49, the locking portion 49 is caused by an external force from the locking shaft portion 47a. If the height of the lock shaft is lowered and the rotation is further continued, the lock shaft portion 47 a gets over the lock portion 49. Here, when the rotational movement of the operation knob 47 is stopped, the locking shaft portions 47a are fitted and locked between the respective locking portions 49, and the positions of the locking shaft portions 47a in the circumferential direction are positioned.
At this time, since the reaction force acting on the locking shaft portion 47a from each locking portion 49 is substantially 0, the distance between the locking shaft portion 47a and the lower end surface 43c is kept at h0.
Further, when the operation knob 47 is rotated about the central axis C, the locking shaft portion 47a gets over the other locking portion 49 in the same manner, and the locked state is released.

As shown in FIG. 9, the reference portion 48 having such a configuration allows the fixing screw 42 to be inserted from the contact surface 41 a side in a state where the mounting surface 43 a of the support member 43 is in contact with the fixed surface 41 b of the fixing plate 41. It is detachably fixed by being screwed into the screw hole 43b.
At this time, the reference portion 48 is positioned at a position where the measurement standard axis O _43d is coaxial with the measurement reference axis O by the fixed surface 41b of the fixed plate 41, and each reference plane 60a held by the holding plate portion 46. Are aligned in the focal position F of the objective lens 7.
For this reason, the fixed surface 41b constitutes a first positioning portion that positions the holding plate portion 46 so that the reference planes 60a of the reference bodies 60, 60A, 60B are aligned with the plane including the measurement position.

Next, the operation of the microspectroscopic light measurement device 52 of this embodiment will be described.
The microspectroscopic light measurement device 52 is different from the first embodiment only in the operation of switching the reference bodies 60, 60A, 60B between the measurement position and the retracted position. Therefore, this point will be mainly described below.

In order to perform the reference body measurement by the microspectrophotometer 52, as shown in FIG. 9, the subject holding unit 10 holding the test lens 61 is moved to the retracted position, as in the first embodiment. As described above, the operation knob 47D is rotated to the position where the locking shaft portion 47a of the operation knob 47D abuts on each locking portion 49 and is locked between the locking portions 49, and the holding plate portion 45 is rotated. To do. At this time, if the operation knob 47D does not come out of the side plate portion 43B, the other operation knob 47 coming out from the side plate portion 43B is operated, and the holding plate portion until the operation knob 47D comes out of the side plate portion 43B. 45 is rotated.
Thereby, the reference body fixing | fixed part 24a in the position facing the through-hole 33b on both sides of the rotating shaft part 45a is positioned on the measurement reference axis O. Thereby, the reference plane 60a of the reference body 60 held by the reference body fixing portion 24a moves to the measurement position.
In this state, the reference body measurement is performed in the same manner as in the first embodiment.

At this time, the reference bodies 60 </ b> A and 60 </ b> B are located at a retracted position that is shifted by 90 ° from the measurement position.
When it is necessary to perform the reference body measurement using the reference body 60A (60B) according to the type of the lens 61 to be measured, the operation knob 47C (47B) is replaced with the locking portion 49 instead of the above operation. The holding plate portion 45 is rotated to a position where the reference body 60A (60B) is locked at the measurement position. Thereby, the reference bodies except the reference body 60A (60B) are moved to the retracted position.

As described above, in the present embodiment, the holding plate portion 46 holds the plurality of reference bodies 60, 60A, and 60B at positions different from each other with the respective reference planes 60a aligned on the same plane. There are provided locking shaft portions 47a that are a plurality of abutting portions that are arranged in a fixed positional relationship with respect to 60a and are provided so as to be able to abut on the locking portion 49 that is a measurement positioning portion.
In addition, the locking portion 49 abuts on the locking shaft portion 47a to selectively place each reference plane 60a at the measurement position, so that the reference bodies 60, 60A, 60B corresponding to the locking shaft portion 47a are in contact with each other. A second positioning portion that positions the reference plane 60a at the measurement position is configured.

In order to perform measurement of an object to be measured by the microspectroscopic measurement device 52, the operation knob 47A is rotated, and the holding plate portion 45 is rotationally moved to a position where the operation knob 47A is locked to each locking portion 49.
Thereby, as shown in FIG. 12, the through hole 33 b is arranged at a position coaxial with the measurement reference axis O.
Therefore, as in the first embodiment, the Z-axis stage 12 is raised to move the lens surface 61a to be measured to the measurement position.
In this state, the subject measurement is performed in the same manner as in the first embodiment.
An arithmetic unit (not shown) calculates the relative spectral reflection characteristic of the lens surface 61a to be tested in the same manner as in the first embodiment.

According to the microspectroscopic light measuring device 52, the holding plate portion 45 is rotated by the operation knob 47, and the operation knob 47 to be locked to the locking portion 49 is selected from the operation knobs 47D, 47C, and 47B, thereby the reference body. One of the 60, 60A, and 60B can be moved to the measurement position to perform reference object measurement.
For this reason, the reference body measurement can be started without adjusting the position of the moved reference body after moving _one of the reference bodies 60, 60A, 60B onto the optical path of the measurement light beam L1.
Further, in order to perform the subject measurement, all the reference bodies can be arranged at the retracted position only by selecting the operation knob 47A and locking it to the locking portion 49. Thereby, the operation | work which moves the to-be-tested lens surface 61a to a measurement position can be started.
As described above, according to the microspectroscopic measurement device 52, it is necessary for alignment when the reference body 60 (60A, 60B) is the measurement target, compared to the case where the position of the reference body 60 (60A, 60B) is adjusted. Since the time can be reduced, the measurement time of the spectroscopic measurement can be shortened as a whole.

Further, in the present embodiment, since the dedicated holding plate portion 45 that holds the reference bodies 60, 60A, and 60B at the same time is used, the reference bodies 60, 60A, and 60B are covered by the same as in the first embodiment. There is no need to hold it by the sample holder 10. For this reason, as in the case of the first embodiment, the reference bodies 60, 60A, 60B can be downsized, thinned, or formed into a shape that is easy to manufacture. Manufacturing cost can be reduced.
Further, when the reference body is measured by changing the reference body, the reference body can be switched without attaching or detaching the reference section 48 within the range of the reference body fixed to the reference section 48. The working time for attaching and detaching the part 48 can be reduced and the measurement efficiency can be improved.

  In this embodiment, as in the first embodiment, the subject holding unit 10 does not hold the reference bodies 60, 60A, and 60B. Therefore, the work using the subject holding unit 10 during the reference body measurement is performed. For example, it is possible to perform the operation of attaching / detaching the test lens 61 to / from the subject holding unit 10 in parallel. In this respect, the measurement efficiency can be improved.

In the description of each of the above embodiments, the subject holding unit 10 is supported by the XY axis stage 11 and the Z axis stage 12 so that the position thereof can be adjusted, thereby switching the measurement position and the retracted position of the test lens 61. Explained in the example. For this reason, as for the positioning part for a measurement, all demonstrated the example in the case of positioning only a reference body holding part in a measurement position.
However, the subject holding unit may be configured to be positioned at the measurement position in contact with the measurement positioning unit like the reference body holding unit. At this time, the subject holding unit may be a separate body from the reference body holding unit, or may also serve as a reference body holding unit.
For example, in the first embodiment, instead of the reference body fixing portion 24a of the reference portion 8, a member provided with a holding portion similar to the subject holding portion 10 can be used as the subject holding portion. In this case, the lens 61 to be examined can be attached to and detached from the positioning member 23 while being held by the holding portion.
In this case, the positioning surface 23b constitutes a measurement positioning unit that positions the subject holding unit at the measurement position.
Further, in place of the through hole 33b of the reference body holding portion 33 of the second embodiment, the subject holding portion 10 is provided, and when the reference body holding portion 33 is moved to the second position, this subject holding portion. It is possible to position the lens surface 61a to be measured on the measurement position.
In this case, the second side surface 32d constitutes a measurement positioning unit that positions the subject holding unit at the measurement position.
In addition, instead of the through hole 33b of the holding plate portion 45 of the third embodiment, the subject holding portion 10 is provided, and when the operation knob 47A is locked to the locking portion 49, the subject holding portion 10 is provided. The upper lens surface 61a can be positioned at the measurement position.
In this case, the locking portion 49 constitutes a measurement positioning portion that positions the subject holding portion at the measurement position.
According to such a configuration, as in the case of the reference body 60, the subject measurement is started without adjusting the position of the subject lens 61 after the subject lens 61 is moved on the optical path of the measurement light beam L1. can do. For this reason, the measurement time can be further shortened.

  In the description of each of the above embodiments, the fixing member 22 is an example of an annular member. However, the fixing member 22 is an annular member as long as the positioning member 23, the reference portion 38, and the fixing plate 41 can be positioned. It is not limited to.

In the description of each of the above embodiments, the fixing member 22 and the objective lens holder 21 are fixed by screwing, so that the position of the positioning surface 22b of the fixing member 22 can be adjusted as necessary. The configuration for adjusting the position of the fixing member 22 with respect to the objective lens holder 21 is not limited to this.
For example, it is possible to adopt a configuration in which the male screw portion 21e on the side of the objective lens holder 21 is deleted, a fixing screw hole is provided, and the fixing member 22 is screwed by a screw member screwed into the screw hole. it can. In this case, by forming the screw insertion hole in the fixing member 22 as a long hole movable in the direction along the measurement reference axis O, the position of the fixing member 22 in the direction along the measurement reference axis O is changed when the screw is fixed. By fixing, the position of the fixing member 22 can be adjusted.

In the description of each of the above embodiments, the fixing member 22 is screwed onto the objective lens holder 21 and attached to the objective lens holder 21. Thus, the position of the positioning surface 22b of the fixing member 22 can be adjusted as necessary. The member 22 is good also as a structure fixed with respect to the objective lens holder 21 so that position adjustment is impossible.
For example, a disk-shaped member corresponding to the fixing member 22 may be fixed to the side portion of the objective lens holder 21 so that the position cannot be adjusted by adhesion, welding, screwing, or the like.
Further, a flange portion protruding in a disk shape corresponding to the fixing member 22 may be provided on the side portion of the objective lens holder 21.

In the description of each of the above embodiments, the example in which the member having the measurement positioning portion is fixed to the objective lens holder 21 has been described. However, the measurement positioning portion is the measurement reference axis O and the focal position F of the objective lens 7. Can be provided on a member other than the objective lens holder 21. For example, it can be provided on an appropriate member such as a member to which the objective lens holder 21 is fixed, the case 20, or a member fixed to the case 20.
In addition, when a plurality of measurement positioning portions are provided as in the second and third embodiments, the measurement positioning portions can be provided by being divided into a plurality of members.

In the above description of the second embodiment, when the reference body holding portion 33 is switched between the first position and the second position, an example in which there is no means for fixing the reference body holding portion 33 to these positions has been described. However, it is good also as a structure which provided the lock | rock part which fixes the position of the appropriate reference body holding | maintenance part 33 to a 1st position and a 2nd position, respectively.
For example, a mechanical locking mechanism such as an engaging portion or a mechanism that locks the position by the magnetic force of the magnet 25 can be adopted as the locking portion, as in the first embodiment.

In the description of the second and third embodiments, the example in which the through hole 33b is moved to a position coaxial with the measurement reference axis O when the reference body is switched to the retracted position has been described. If the subject holding part 10 can be arranged at the measurement position without the part 10 interfering with the reference body holding part, the through hole 33b need not be arranged coaxially with the measurement reference axis O. That is, you may arrange | position from the coaxial position.
Therefore, the shape of the through hole 33b can be an arbitrary opening shape whose center cannot be specified, or a shape such as a notch.

Further, all the components described above can be implemented by being appropriately combined or deleted within the scope of the technical idea of the present invention.
For example, in the second embodiment, it is possible to restrict the movement position of the reference body holding part 33 in multiple stages in the movement direction and to arrange a plurality of reference bodies on the holding plate part 33a.
In addition, for example, in the third embodiment, a configuration in which the reference bodies 60A and 60B are deleted can be employed.

DESCRIPTION OF SYMBOLS 1 Light source 2a Pinhole 3 Collimator lens 4 Ring zone aperture stop 5 Half mirror 6, 36, 46 Reference part positioning part 7 Objective lens 8 Reference part (reference body holding part, holding part)
38, 48 Reference unit 10 Subject holding unit (holding unit)
13 Object holder 15 Condensing lens 19 Spectroscopic measurement unit 21 Objective lens holder 22 Fixing member (member having measurement positioning unit)
22b Positioning surface (measurement positioning part)
23 Positioning member (member having a positioning portion for measurement)
23b Positioning surface (measurement positioning part)
24 Reference body holder 24a Reference body fixing portion 24f Contact surface 25 Magnet 31 Top plate portion 31a Contact surface 32c First side surface (measurement positioning portion)
32d 2nd side surface (positioning part for evacuation)
33 Reference body holding part (holding part)
33a Holding plate portion 33b Through hole 34 Sliding guide portion (movable support portion)
35, 47, 47A, 47B, 47C, 47D Operation knobs 35a, 37a Locking surface 37 Stopper 41 Fixing plate (member having a positioning portion for measurement)
41b Fixed surface (measurement positioning part, first positioning part)
42 Fixing screw 43 Support member 43a Mounting surface 43A Top plate portion 43B Side plate portion 43c Lower end surface 44 Bearing portion (movable support portion)
45 Holding plate part (reference body holding part)
45a Rotating shaft portion 47a Locking shaft portion (contact portion)
49 Locking part (measurement positioning part, second positioning part)
50, 51, 52 Microspectrophotometer (spectrometer)
60, 60A, 60B Reference object (object to be measured)
60a Reference plane (reference body surface, surface to be measured)
61 Test lens (subject, object to be measured)
61a Lens surface to be examined (surface of subject, surface to be measured)
C Center axis F Focus position L ₀ , L ₁ , L ₂ , L ₃ , L ₄ , L ₅ Measurement beam O Measurement reference axis

Claims (6)

A spectroscopic measurement device that measures relative spectral reflection characteristics of the subject with respect to the reference body by measuring spectral reflectance characteristics of a reference body and the subject,
A light source;
A pinhole diaphragm for shaping the light beam emitted from the light source;
A collimator lens that condenses the light beam that has passed through the pinhole diaphragm to form a substantially parallel light beam;
An objective lens for condensing the light beam that has passed through the collimator lens;
The reference body is held, and the arrangement position of the surface of the reference body is separated from the measurement position and the measurement position optically conjugate with the pinhole diaphragm via the collimator lens and the objective lens. A reference body holding portion provided to be switchable at the retracted position,
An object holding unit that holds the object, and is arranged so that the arrangement position of the surface of the object can be switched between the measurement position and a retreat position away from the measurement position;
It is arranged so as to have a certain positional relationship with respect to the objective lens, and at least by contacting the reference body holding portion among the holding portions composed of the reference body holding portion and the subject holding portion, A positioning unit for measurement that positions the reference body holding unit at the measurement position;
A condensing lens that collects a light beam reflected by the reference body or the subject placed at the measurement position and transmitted through the objective lens;
A spectroscope for measuring the spectral distribution of the light beam collected by the condenser lens;
A spectroscopic measurement device. The reference body holding part is
The spectroscopic measurement apparatus according to claim 1, wherein the spectroscopic measurement apparatus is detachably fixed to a member having the measurement positioning portion. A retraction positioning unit that is arranged to have a certain positional relationship with respect to the objective lens, and that positions at least the position of the reference body holding unit among the holding units at the retraction position;
A movable support unit that supports the reference body holding unit so as to be movable between a state in contact with the measurement positioning unit and a state in contact with the retraction positioning unit;
The spectroscopic measurement apparatus according to claim 1, comprising: The movable support portion is
The spectroscopic measurement apparatus according to claim 3, wherein the reference body holding portion is supported so as to be movable in parallel. The movable support portion is
The spectroscopic measurement apparatus according to claim 3, wherein the reference body holding unit is rotatably supported. The reference body holding part is
The plurality of reference bodies are held at different positions with their respective surfaces aligned in the same plane, and are arranged in a fixed positional relationship with respect to the surfaces of the reference bodies, A plurality of contact portions provided so as to be able to contact,
The measurement positioning part is
A first positioning unit that positions the reference body holding unit so that each surface of the reference body is aligned with a plane including the measurement position;
In order to selectively place each surface of the reference body at the measurement position, a second positioning is performed in which the surface of the reference body corresponding to the contact portion is positioned at the measurement position in contact with the contact portion. And
The spectroscopic measurement device according to claim 1, comprising:

Images