JP2014213366A - Tool hone for metal ultrasonic bonding, and metal bonding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tool hone for metal ultrasonic bonding which prevents a metal sheet from breaking in an outside vicinity of a bonding region when bonding electrode metal sheets or wire rods for a solar cell of a highly-advanced lamination, or for an automobile lithium cell using ultrasonic waves, and to provide a metal bonding device.SOLUTION: In a tool hone for metal ultrasonic bonding and a metal bonding device using the tool hone for metal ultrasonic bonding, a plurality of first projections each having outer slopes of a curved form, are arranged at an outside part of a pressing portion of the tool hone, and a plurality of second projections each having outer slopes of a planar form, are arranged at an inside part than the first projections of the pressing portion.

Description

  The present invention relates to a metal ultrasonic horn tool horn and a metal bonding apparatus, and more particularly, a metal ultrasonic horn tool horn and a metal bonding apparatus that prevent breakage of a metal material in the vicinity of an ultrasonic bonding area. About.

  As shown in FIG. 10, the tool horn 21 of the conventional metal joining device 20 performs knurling and iris processing on the surface of the pressing portion 21 a at the lower end of the tool horn 21, and has many identical shapes with a predetermined height. The protrusions 21b are formed in a lattice shape. In addition, a large number of protrusions 22b having the same height are arranged in a grid pattern on the surface of the anvil 22 of the conventional metal bonding apparatus that is in contact with the metal material 23 to prevent slippage.

  The conventional metal joining apparatus 20 uses a metal foil, a metal sheet, or a wire rod placed on the anvil 22 with the tips of many protrusions 21b arranged on the pressing portion 21a of the tool horn 21 as contact portions 21c of the tool horn 21. In a state where the abutting portion 21c of the tool horn 21 is pressed against the surface of the metal material 23, the vibration control means 24 is driven to ultrasonically vibrate the vibrator 25, and the fixed horn 26 in which the vibrator 25 is incorporated. Then, the tool horn 21 integrally coupled to the fixed horn 26 was ultrasonically oscillated along the surface of the metal material 23 with an amplitude of several μm and a vibration frequency of 15 kHz or more. Many protrusions 21b of the tool horn 21 rub the surface of the metal material 23, destroy molecules on the metal surface, and cause the metal material 23 to be solid-phase bonded to each other.

  FIG. 11 shows a cross-sectional view of the pressing portion 21 a of the tool horn 21. A knurled groove is carved in the pressing portion 21a with a knurling tool (cutter) having a predetermined angle (θ). Therefore, both the outer slope portion 21d and the inner slope portion 21f of the protrusion 21b are inclined by 1 / 2θ with respect to the normal to the surface of the pressing portion 21a. For example, when the angle (θ) of the knurled groove is 90 degrees, the inclination of the outer slope portion 21d and the inner slope portion 21f of the pressing portion 21a with respect to the perpendicular is 45 degrees. In addition, since the pointed end of the protrusion is worn or chipped when sharp, it has been cut in advance to provide a small flat portion 21e.

  FIG. 12 is a perspective view showing the surface of the pressing portion 21 a of the tool horn 21. As shown in FIG. 12, the protrusions 21b have the same shape. Since the knurled grooves have the same angle, the inclined surfaces of the numerous protrusions 21b arranged in a lattice form are inclined at the same angle with respect to the normal to the surface of the pressing portion 21a. By making the shape of the plurality of protrusions 21b that press the metal material 23 the same, it can be expected that a uniform joining state is obtained in the entire abutting portion where the protrusion abuts (for example, see Patent Document 1).

JP 2004-221294 A

  However, knurling or iris processing is performed on the pressing portion 21a of the conventional tool horn described with reference to FIGS. 10 to 12, and a plurality of protrusions 21b having the same cross-sectional shape are formed in a lattice shape at a predetermined height so that the ultrasonic vibration When metal bonding is performed, a metal material such as a metal sheet or wire is bent, torn, or broken near the outside of the metal bonding region, that is, near the protrusion 21b of the outermost portion of the pressing portion 21a of the tool horn. There was something to do.

  FIGS. 13A, 13B and 13C show an example of a joining process for joining metal materials with a conventional tool horn. FIG. 13A shows a state in which a metal material 23 in which a thin metal sheet 23 a is stacked on a thick metal sheet 23 b is sandwiched between the pressing portion 21 a of the tool horn 21 and the anvil 22. An anti-slip protrusion 22 b is also provided on the surface of the anvil 22. In this state, pressure is applied between the tool horn 21 and the anvil 22 as indicated by the white arrow P in the figure, and the pressing portion 21a of the tool horn is placed on the surface of the metal material 23 as shown in FIG. When ultrasonic vibration is applied in parallel (in the direction along the surface), that is, in the horizontal direction, the metal materials 23 are solid-phase bonded to each other.

  At this time, the metal material 23 held by the plurality of protrusions 21b of the tool horn is pressed as one plane in the contact portion 21c in which the plurality of protrusions 21b are arranged in a lattice pattern. Outside the portion 21c, the unjoined metal sheets are overlapped by their own weight. Therefore, the protrusion 21b on the outermost side of the pressing part 21a of the tool horn bites into the metal material and bends in a V shape outside the protrusion 21b on the outermost side of the pressing part 21a. When the metal material 23 is shaken by ultrasonic vibration, the thin metal sheet 23a is torn and the metal material 23 is broken at the bent portion. After applying pressure and ultrasonic vibration for a certain period of time, as shown in FIG. 13C, when the tool horn 21 and the anvil 22 are separated from the metal material 23 and the metal material 23 is taken out, the metal material 23 is thin. The metal sheet 23a is bent in the vicinity of the joining region, and the part that is not joined is raised. Even if the metal material 23 is not broken at the time of joining, it may be broken or broken at a bent portion due to an external force applied by handling after joining.

  The present invention prevents the metal material from being broken in the vicinity of the joining region when metal materials such as metal sheets for electrodes of thin solar cells and lithium batteries for automobiles and thin wires are joined by ultrasonic waves. An object is to provide a tool horn for metal ultrasonic bonding and a metal bonding apparatus.

In order to achieve the above-described object, a metal ultrasonic welding tool horn according to the present invention has a first protrusion having a curved outer slope on an outer portion of a pressing portion of the tool horn, and A plurality of second protrusions having a flat outer slope are arranged on the inner side of the first protrusion.
By this, in a state where the pressing portion provided with the plurality of protrusions is pressed against the surface of the plurality of stacked metal materials, the pressing portion is ultrasonically vibrated in the direction along the surface of the metal material, thereby joining The plurality of metal materials are stably bonded to each other by solid phase bonding so that the metal materials do not break in the vicinity of the region.

Further, in the metal ultrasonic bonding tool horn of the present invention, a plurality of first projections having a curved outer slope are arranged around the outer portion of the pressing portion of the tool horn, and the first projection of the pressing portion is arranged. A plurality of second protrusions having a flat outer slope are arranged on the inner portion.
In the metal ultrasonic bonding tool horn of the present invention, the flat portion is formed at the tip of the first protrusion having a curved outer slope and the tip of the second protrusion having a flat outer slope.

In the metal ultrasonic bonding tool horn of the present invention, a part of the curved outer slope of the first protrusion is a tapered surface.
Moreover, in the metal joining apparatus of this invention, the metal material is joined using the metal ultrasonic joining tool horn described in any of the above.

  By applying pressure and ultrasonic vibration to a metal material for a certain period of time using the tool horn of the present invention, the metal materials can be stably bonded to each other by solid phase bonding. In particular, there is an effect that the metal material is not bent in the vicinity of the joining region, and the metal material is not broken in the vicinity of the joining region.

(A) Side view of the metal ultrasonic welding tool horn according to the first embodiment of the present invention (b) Bottom view of the metal ultrasonic welding tool horn according to the first embodiment of the present invention. The perspective view which looked at the press part of the tool horn for metal ultrasonic joining which concerns on 1st embodiment of this invention from the bottom. Sectional drawing of the press part of the tool horn for metal ultrasonic joining which concerns on 1st embodiment of this invention. Sectional drawing of the press part of the tool horn for metal ultrasonic joining which concerns on 1st embodiment of this invention. (A) The perspective view which looked at the press part of the tool horn for metal ultrasonic joining which concerns on 1st embodiment of this invention from the bottom (b) For metal ultrasonic joining which concerns on 1st embodiment of this invention The perspective view which looked at the press part of the tool horn from the bottom. (A) Sectional view before processing of the pressing portion of the metal ultrasonic bonding tool horn according to the first embodiment of the present invention (b) Metal ultrasonic bonding tool according to the first embodiment of the present invention Sectional view after processing the corner of the pressing part of the horn into a curved surface (c) Cross section after knurling the pressing part surface of the metal ultrasonic welding tool horn according to the first embodiment of the present invention and the cutter The figure which showed cross-sectional shape (d) Sectional drawing after the process of the press part of the tool horn for metal ultrasonic joining which concerns on 1st embodiment of this invention. (A) Sectional drawing which showed the state which pinched | interposed the metal material between the tool horn for metal ultrasonic joining which concerns on 1st embodiment of this invention, and an anvil (b) The metal which concerns on 1st embodiment of this invention Sectional view (c) showing a state in which the metallic material is joined by ultrasonically vibrating the ultrasonic joining tool horn of FIG. 1, and after joining the metallic material, the metallic ultrasonic according to the first embodiment of the present invention Sectional drawing which showed the state which separated | separated the tool horn for joining and the anvil. Sectional drawing of the modification of the tool horn for metal ultrasonic joining which concerns on 1st embodiment of this invention. Sectional drawing of the tool horn for metal ultrasonic joining which concerns on 2nd embodiment of this invention. The conceptual diagram which showed the positional relationship when joining the metal material mounted on the anvil with the tool horn with the conventional metal joining apparatus. Sectional drawing of the conventional tool horn for metal ultrasonic joining. The perspective view which looked at the surface of the press part of the conventional tool horn for metal ultrasonic bonding from the bottom. (A) Sectional view showing a state in which a metal material is sandwiched between a conventional metal ultrasonic bonding tool horn and an anvil (b) A conventional metal ultrasonic bonding tool horn is vibrated ultrasonically, Sectional drawing which showed the state which has joined (c) After joining a metal material, sectional drawing which shows the state which left | separated the tool horn and the anvil from the joined metal material.

(First embodiment)
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1A is a side view of a metal ultrasonic bonding tool horn (hereinafter referred to as a tool horn) 1 according to a first embodiment of the present invention. The tool horn 1 vibrates in the horizontal direction of the paper surface of FIG. 1 by ultrasonic vibration means (not shown). The tool horn 1 is formed in a cylindrical shape in which a thick cylindrical portion and a thin cylindrical portion are connected by a curved surface, and a rectangular parallelepiped pressing portion 1a is formed on the tip peripheral surface of the thin cylindrical portion. As shown in the bottom view of the metal ultrasonic welding tool horn according to the first embodiment of the present invention in FIG. 1B, the surface of the pressing portion 1a is provided with protrusions by knurling in a grid pattern. ing.

  The present invention has a substantially quadrangular pyramid as a whole, and a first protrusion having a curved outer slope is disposed on the outer portion of the pressing portion of the tool horn, and on the inner portion of the pressing portion of the pressing portion as a whole. A plurality of second protrusions having a substantially quadrangular frustum and having a flat outer slope are arranged. FIG. 2 shows a tool horn for metal ultrasonic bonding according to the first embodiment of the present invention. The perspective view which looked at the surface of the press part from the bottom was shown. As shown in FIG. 2, a plurality of first protrusions 2 having curved outer slope portions 2 d are arranged in a frame shape on the outer side portion of the quadrangular bottom surface of the pressing portion 1 a, and the plurality of first protrusions 2 arranged in the frame shape are arranged. A plurality of second protrusions 3 having a flat outer slope portion 3d are arranged on the inner portion.

  For understanding of the invention, FIG. 3 and FIG. 4 show sectional views of the pressing portion 1a of the metal ultrasonic horn tool horn according to the first embodiment of the present invention. 3 and 4, the first protrusion 2 having the curved outer slope portion 2d is formed in the first protrusion area on the bottom outer portion of the pressing portion 1a, and the second protrusion area on the inner side of the first protrusion area. It is shown that a plurality of second protrusions 3 having a flat outer slope portion 3d are arranged. Further, the inner slope portions 2f and 3f of the first protrusion 2 and the second protrusion 3 are also planar. And the flat part 2e, 3e flat in the horizontal direction is formed in the tip of the 1st protrusion 2 and the 2nd protrusion 3, and each flat part 2e, 3e is a contact part with the metal of joining object mainly. It becomes. In addition, each slope of the first protrusion 2 and the second protrusion 3 forming a substantially square frustum is a vibration direction on the pressing portion 1a or a direction perpendicular to the vibration direction, and the protrusions 2 and 3 have their respective slopes from the center of the pressing portion 1a. The outer slopes are designated as outer slope parts 2d and 3d, and the inner slopes are designated as inner slope parts 2f and 3f. And as FIG. 2 shows, as for the 1st processus | protrusion 2 located in the four corners of the press part 1a among the 1st processus | protrusions, 2 each of the outer side slope part 2d has comprised curved surface shape, In the first protrusion 2 other than the first protrusion 2, one outer slope portion 2 d facing the four sides of the pressing portion 1 a is curved.

  In FIG. 3, the horizontal dimension of the outer slope 2d of the first protrusion is indicated by a, the horizontal dimension of the flat part 2e of the first protrusion is indicated by b, and the horizontal dimension of the flat part 3e of the second protrusion is indicated by b. The dimension is indicated by e, and the horizontal dimension of the knurled groove, which is the sum of the horizontal dimensions of the outer slope part 3d and the inner slope part 3f between the plurality of second protrusions 3, is indicated by c. Each of these values a, b, c, and e is a value that is determined by a bonding condition, and an optimum value is obtained depending on the material, thickness, and shape of the metal material to be bonded. In the present invention, the outer slope portion 2d of the first projection 2 is an essential slope, and the dimension a must be a value exceeding zero, but the flat portion 2e of the first projection 2 approaches the horizontal. The curved surface-like outer slope portion 2d may be a portion that is close to the horizontal slope. That is, the dimension b of the first protrusion 2 as the flat portion 2e is a value that may be zero.

  As shown in FIG. 4, each of the first protrusion 2 and the second protrusion 3 has outer slope portions 2d and 3d, flat surface portions 2e and 3e, and inner slope portions 2f and 3f. 3 and 4, the shape when the dimension a is made larger than those in FIGS. 2 and 5 is illustrated in order to emphasize that the first protrusion 2 has the curved outer slope portion 2d. did.

  The perspective view which looked at the press part 1a of the tool horn which concerns on FIG. 5 (a) (b) from 1st embodiment from the bottom is shown. In FIG. 5A, the first protrusion 2 is indicated by a solid line and the second protrusion 3 is indicated by a dotted line to clearly show how the first protrusions 2 are arranged. Further, in FIG. 5B, the first protrusion 2 is indicated by a dotted line and the second protrusion 3 is indicated by a solid line to clearly show how the second protrusion 3 is arranged. As is apparent from FIGS. 5A and 5B, the first protrusion 2 is disposed on the outer portion of the pressing portion 1a, and the second protrusion 3 is disposed on the inner portion of the pressing portion 1a. ing.

  FIGS. 6A, 6B, and 6C show an example of a processing step for forming the first protrusion 2 and the second protrusion 3 on the pressing portion 1a of the tool horn. FIG. 6A shows a state where the processing target surface (bottom surface) of the pressing portion 1a is turned up. The pressing portion 1a is a portion where a part of the peripheral surface of the tip of the tool horn 1 is raised in a cuboid shape in the radial direction, and the cross section before processing is a quadrangle. As shown in FIG. 6B, the corners at both ends of the cross-sectional square are deleted so that the cross-section becomes a curve such as a radius R or a parabola.

  The height of the flat portion 2e at the tip of the first protrusion 2 and the flat portion 3e at the tip of the second protrusion 3 are determined depending on how the cross-sectional shape of FIG. For example, if the radius R or the curve such as a parabola is small, the height of the flat portion 2e of the first protrusion 2 and the height of the flat portion 3e of the second protrusion 3 are the same, but the radius R or the curve such as a parabola is increased. Then, the height of the flat portion 2 e of the first protrusion 2 is not the same as the height of the flat portion 3 e of the second protrusion 3. What is necessary is just to set the optimal thing according to the joining conditions required for the magnitude | size of the radius R or how to set curves, such as a parabola.

  Then, the knurled groove 11 is carved with a knurling tool (cutter) 10 having a cross-sectional shape as shown in FIG. If the knurled grooves are deeply carved at a constant angle, the horizontal dimensions of the flat portions 2e and 3e are shortened, and if they are carved shallowly, they are long. As a result, the first protrusion 2 having a curved outer sloped portion near the four sides of the pressing portion 1a of the tool horn 1 is formed, and a plurality of second protrusions 3 are formed in a lattice shape between the first protrusions 2. Yes. In FIG.6 (d), sectional drawing of the press part 1a of the tool horn after a process was shown. The detailed shapes of the first protrusion 2 and the second protrusion 3 are as already described with reference to FIGS. Note that the order of the step in FIG. 6B and the step in FIG. 6C may be interchanged. This is because the corners of the pressing portion 1a are curved before the knurling grooves 11 are carved, and the corners of the pressing portions 1a are curved after the knurling grooves 11 are carved.

  7A, 7B, and 7C show an example of a joining process for joining metal materials. FIG. 7A shows a state in which a metal material 23 in which a thin metal sheet 23a is stacked on a thick metal sheet 23b is sandwiched between the tool horn 1 and the anvil 22 according to the first embodiment of the present invention. FIG. 7B shows the ultrasonic vibration along the surface of the metal material 23 in a state where the contact portions of the first protrusion 2 and the second protrusion 3 of the pressing portion 1a of the tool horn are pressed against the metal material 23. The state which has joined metal sheet 23a, 23b mutually is shown. Since a large number of protrusions 22b are provided on the surface of the anvil 22, the tips of the first protrusion 2 and the second protrusion 3 of the pressing portion 1a bite into the metal material 23, and the metal sheets 23a and 23b are mutually solid-phased. Joined by joining. However, in the vicinity of the joining region, that is, in the vicinity of the contact portion where the tips of the first protrusion 2 and the second protrusion 3 are in contact with the metal material 23, the curved outer slope portion 2 d of the first protrusion 2 is also formed of the metal material 23. Press down on the surface. Therefore, the flat portion 2e at the tip of the first protrusion does not sharply penetrate the surface of the metal material 23 and does not bend the metal material 23 into a V shape. The outer slope portion 2d and the flat portion 2e of the first protrusion 2 press the surface of the metal material 23, and the metal sheets 23a and 23b in the vicinity of the joining region where the metal is not joined are in close contact with each other in a pressed state.

  FIG. 7C shows a state in which the pressing portion 1 a of the tool horn and the anvil 22 are separated from the metal material 23 after the metal sheets 23 a and 23 b are joined. In the vicinity of the contact portion where the tips of the first protrusion 2 and the second protrusion 3 are in contact with the metal material 23, that is, in the vicinity of the joining region, the curved surface of the first protrusion 2 is pressed against the surface of the metal material 23. Therefore, the metal sheets 23a and 23b are pressed against each other without being separated from each other. In the vicinity of the joining region, the metal material 23 does not float up and is not broken, and the metal material 23 is not broken.

  Again, in the present invention, the first projection 2 having the outer slope 2d having a curved surface is provided outside the pressing portion of the tool horn, and the second projection 3 is disposed inside the first projection 2. The outer slope portion 2d of the first protrusion 2 has a curved surface, and the surface of the outer slope portion 2d gradually moves from the flat portion 2e where the first protrusion 2 is in contact with the metal material 23 toward the outside of the joining region. By being separated, the tip of the first protrusion 2 does not bite into the metal material, and the metal material 23 is deformed along the curved surface of the outer slope portion 2d of the first protrusion 2 around the joining region. Further, the metal material is not bent into a V-shaped cross section, and the metal material is prevented from being broken and broken due to bending and ultrasonic vibration during metal bonding.

As a modification of the first embodiment, the horizontal length (L ₁ ) of the flat portion 2e of the first protrusion has been described above, as shown in the sectional view of another tool horn in FIG. It may be longer than the shape. The planar portion 2e has an effect of imparting bonding strength to the metal material 23 and simultaneously pressing the vicinity of the bonding area to prevent the metal material 23 from being broken. By increasing the length (L ₁ ) in the horizontal direction of the flat surface portion 2e, a wider area in the vicinity of the joining area can be pressed down. Conversely, the flat surface portion 2e may be completely eliminated so that the outer slope portion 2d and the inner slope portion 2f of the first protrusion 2 are directly adjacent to each other. This is because it may be preferable depending on the thickness of the metal sheet and the thickness of the wire as the joining conditions.

(Second embodiment)
The present invention is not limited to the first embodiment. As a second embodiment, as shown in FIG. 9, instead of making the outer slope 2d of the first protrusion 2 into a simple arc R _{1 having} a radius R ₁ or a cross-sectional shape such as a parabola, the first protrusion 2 A tapered surface 2g having a small inclination angle (θ ₂ ) is smoothly connected outward from the flat surface portion 2e, and the tapered surface 2g is connected to a curved surface having a radius R ₂ or a parabolic curved surface. Under the joining condition in which the plurality of second protrusions 3 sink deeply into the metal material 23, the surface of the outer slope 2d of the first protrusion 2 is obtained by adding a tapered surface 2g to the outer slope 2d of the first protrusion 2. The metal material 23 can be more strongly joined by moving the second protrusion 3 deeply into the metal material 23 and ultrasonically vibrating along the surface of the metal material 23. .

  In the present invention, the first projection having a curved outer slope is arranged outside the pressing portion of the tool horn, and a plurality of second projections having a planar outer slope are arranged inside the first projection. It is a feature, and other modifications based on the first and second embodiments described above can be adopted. For example, in the above description, the case where the pressing portion of the tool horn is raised in a cuboid in the radial direction on the tip peripheral surface of the tool horn has been described. It may be applied when the shape is raised, or the second protrusion provided inside the first protrusion may be a combination of the second protrusion and a third protrusion different from the shape of the second protrusion.

  In the metal sheet metal-bonded according to the present invention, the vicinity of the bonding area is pressed by the curved outer slope of the pressing portion of the tool horn and is in close contact with each other. Therefore, the metal material is not bent in the vicinity of the bonding area, and is broken. I have not done it. Since the metallic material is not bent in the vicinity of the joining region, the metallic material does not break near the joining region even if an external force is applied during handling after joining.

  Moreover, in the said embodiment, although the 1st processus | protrusion 2 is arrange | positioned in multiple numbers by the edge of each edge which is an outer part of the square press part 1a, it is the vibration direction of a press part that a metal material tends to bend most easily. Since it is the vicinity of both ends, the 1st protrusion should just be provided in the both ends or one end with respect to the vibration direction of a press part at least. For example, each first protrusion 2 provided corresponding to two sides parallel to the vibration direction of the pressing portion 1a of the above embodiment is replaced with a second protrusion, and corresponding to two sides located at both ends in the vibration direction. Only the first protrusion 2 provided may be provided. Alternatively, in the case of a tool horn in which the pressing portion is narrow and the protrusions can be disposed only in one line along the vibration direction, the first protrusion is disposed only at one or both ends of the pressing portion, It is good also as a structure which has arrange | positioned the 2nd protrusion in the inner part.

  The present invention relates to a tool horn for metal ultrasonic bonding and a metal bonding apparatus, and more particularly, to a tool horn for metal ultrasonic bonding and a metal bonding apparatus in which breakage of the metal material in the vicinity of the ultrasonic bonding region is prevented. can do. In particular, when metal materials such as metal sheets for electrodes of thin solar cells and automobile lithium batteries, and thin wire rods, etc., which are thinned, are joined ultrasonically, the metal material that prevents the metal material from breaking near the joining area. It can be applied to a tool horn for ultrasonic bonding and a metal bonding apparatus.

DESCRIPTION OF SYMBOLS 1 Tool horn 1a Press part 2 1st protrusion 2d Outer slope part 2e Plane part 2f Inner slope part 3 Second projection 3d Outer slope part 3e Plane part 3f Inner slope part 10 Cutter 21 Tool horn 21a Press part 21b Projection 21c Contact part 21d Outer slope part 21e Plane part 21f Inner slope part 22 Anvil 23 Metal material

Claims (5)

In a state in which the pressing portions provided with the plurality of protrusions are pressed against the surfaces of the plurality of stacked metal materials, the pressing portions are ultrasonically vibrated in a direction along the surface of the metal materials to bring the plurality of metal materials together. A tool horn for joining by solid phase joining,
A first protrusion having a curved outer slope is disposed on the outer portion of the pressing portion;
A metal ultrasonic bonding tool horn, wherein a plurality of second protrusions having a flat outer slope are arranged on the inner side of the first protrusion of the pressing portion. In a state in which the pressing portions provided with the plurality of protrusions are pressed against the surfaces of the plurality of stacked metal materials, the pressing portions are ultrasonically vibrated in a direction along the surface of the metal materials to bring the plurality of metal materials together. A tool horn for joining by solid phase joining,
A plurality of first protrusions having a curved outer slope are disposed around the outer portion of the pressing portion,
A metal ultrasonic bonding tool horn, wherein a plurality of second protrusions having a flat outer slope are arranged on the inner side of the first protrusion of the pressing portion.   3. The tool horn for metal ultrasonic bonding according to claim 1, wherein a flat portion is formed at the tip of the first protrusion and the tip of the second protrusion. 4.   The metal ultrasonic horn tool horn according to any one of claims 1 to 3, wherein a part of the curved outer slope of the first protrusion is a tapered surface.   A metal bonding apparatus using the metal ultrasonic bonding tool horn according to any one of claims 1 to 4.

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