JP2014190933A - Calibrator of x-ray ct scanner - Google Patents
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- 238000000034 method Methods 0.000 claims description 13
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 6
- 229910001750 ruby Inorganic materials 0.000 claims description 6
- 239000010979 ruby Substances 0.000 claims description 6
- 229910052790 beryllium Inorganic materials 0.000 claims description 5
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000004925 Acrylic resin Substances 0.000 claims description 3
- 229920000178 Acrylic resin Polymers 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 18
- 238000005259 measurement Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000012937 correction Methods 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Abstract
Description
本発明は、産業用Ｘ線ＣＴ装置の断面画像を計測可能なデータへ変換する校正器に関する。 The present invention relates to a calibrator that converts a cross-sectional image of an industrial X-ray CT apparatus into measurable data.
従来、産業用Ｘ線ＣＴ装置を計測に利用する取り組みは、欧州、主にドイツにおいて、３次元計測機メーカによる三次元計測を目的としたＸ線ＣＴ装置が開発されている。一方、日本において、分析機器メーカや電機機器メーカ製の産業用Ｘ線ＣＴ装置は、工業製品のクラックや内部欠陥の有無の判定を行う検査機用としてのものが主流であり、寸法精度にかかわる３次元計測を目的としたものは、まれであった。 Conventionally, as an effort to use an industrial X-ray CT apparatus for measurement, an X-ray CT apparatus for three-dimensional measurement by a three-dimensional measuring instrument manufacturer has been developed in Europe, mainly Germany. On the other hand, in Japan, industrial X-ray CT apparatuses manufactured by analytical equipment manufacturers and electrical equipment manufacturers are mainly used for inspection machines that determine the presence or absence of cracks and internal defects in industrial products, and are related to dimensional accuracy. Those aimed at three-dimensional measurement were rare.
その中で、Ｘ線ＣＴ装置から得られる投影イメージのデータの校正および評価用の標準ゲージにおいて、ベリリウム成形体を内装し、該ベリリウム成形体と異なるコントラストで示される外装体からなる標準ゲージの提案が、特許文献１に示されている。また、上下にＸ線透過性の良い材料に埋設されたタングステン線を具えた、中心位置校正治具付き試料台となして、中心位置校正治具と資料を回転台に装着して、回転台を昇降させ、タングステン線をＸ線ビーム高さに位置し、そして回転走査し、回転位置ずれを検出器で検出し記憶させる。次に、試料をＸ線ビーム高さに位置し、回転走査して検出器でデータ収集し、得られたデータから断層像を再構成する時に、前記回転中心位置ずれのデータ値だけ空間座標をずらせて、回転中心の校正をソフトウエアにより自動で行い、断層像を得るものとして、特許文献２が提案されている。 Among them, in the standard gauge for calibration and evaluation of projection image data obtained from an X-ray CT apparatus, a proposal of a standard gauge comprising a beryllium molded body and an exterior body having a contrast different from that of the beryllium molded body is proposed. Is shown in Patent Document 1. In addition, a sample table with a center position calibration jig with tungsten wires embedded in a material with good X-ray transparency is mounted on the top and bottom. , The tungsten wire is positioned at the X-ray beam height and rotationally scanned, and the rotational misalignment is detected and stored by the detector. Next, when the sample is positioned at the X-ray beam height, rotationally scanned, data is collected by the detector, and a tomographic image is reconstructed from the obtained data, the spatial coordinates are set by the data value of the rotational center position deviation. Patent Document 2 has been proposed as a technique for obtaining a tomographic image by automatically calibrating the center of rotation using software.
しかしながら、上述の発明では、試料の形状等に対応して成形された標準ゲージの寸法の確認が、三次元計測機では適切に出来ない場合もあり得る。 However, in the above-described invention, there may be a case where confirmation of the dimensions of the standard gauge formed corresponding to the shape of the sample or the like cannot be properly performed by the three-dimensional measuring machine.
本発明は、このような課題に鑑みてなされたものであり、必要に応じていつでも各部の寸法の実測が可能である校正器を提供することを目的とする。 The present invention has been made in view of such a problem, and an object of the present invention is to provide a calibrator capable of measuring the dimensions of each part whenever necessary.
所定の寸法の円筒体または円柱体の円周の外部に、異なる外径の球を複数個配置することを特徴とするＸ線ＣＴ装置の校正器とその使用方法である。 A calibrator for an X-ray CT apparatus and a method of using the same, wherein a plurality of spheres having different outer diameters are arranged outside a circumference of a cylindrical body or a cylindrical body having a predetermined size.
前項記載の異なる外径の球の複数の配置が、円筒体または円柱体の軸に直角な平面の円周上であることを特徴とする請求項１に記載のＸ線ＣＴ装置の校正器とその使用方法である。 2. The calibrator for an X-ray CT apparatus according to claim 1, wherein the plurality of spheres having different outer diameters described above are arranged on a circumference of a plane perpendicular to an axis of a cylindrical body or a cylindrical body. How to use it.
前項記載の球の配置の構造が、円筒体または円柱体の一方端より間隔をあけて、複数段設置することを特徴とする請求項１、２のいずれかに記載のＸ線ＣＴ装置の校正器とその使用方法である。 The calibration structure of the X-ray CT apparatus according to any one of claims 1 and 2, wherein the structure of the arrangement of the spheres described in the preceding paragraph is installed in a plurality of stages at intervals from one end of a cylindrical body or a cylindrical body. And how to use it.
前項記載の円筒体または円柱体は、アクリル樹脂またはベリリウムのいずれかであることを特徴とする請求項１、２、３のいずれかに記載のＸ線ＣＴ装置の校正器とその使用方法である。 The calibrator for an X-ray CT apparatus according to any one of claims 1, 2, and 3, and a method for using the same, wherein the cylindrical body or columnar body according to the preceding paragraph is either acrylic resin or beryllium. .
前項記載の球は、ルビーまたはジルコニアのいずれかであることを特徴とする請求項１、２、３、４のいずれかに記載のＸ線ＣＴ装置の校正器とその使用方法である。 The calibrator for an X-ray CT apparatus according to any one of claims 1, 2, 3, and 4, and a method of using the sphere, wherein the sphere described in the preceding paragraph is either ruby or zirconia.
前項記載の校正器が円筒体の場合、円筒体の内部の空間に試料を設置でき、校正器と試料を同時にも別々にも計測できることを特徴とする請求項１、２、３、４、５のいずれかに記載のＸ線ＣＴ装置の校正器とその使用方法である。 When the calibrator described in the preceding paragraph is a cylindrical body, the sample can be placed in the space inside the cylindrical body, and the calibrator and the sample can be measured simultaneously or separately. The calibrator of the X-ray CT apparatus according to any one of the above and its method of use.
本発明の校正器を用いれば、接触式三次元計測機により必要に応じて、いつでも本校正器の各部の寸法の実測が可能であり、Ｘ線ＣＴ装置による精度のよい試料の計測が可能となる。すなわち、スケーリングとともにオフセットをも同時に行える校正器である。 If the calibrator of the present invention is used, it is possible to measure the dimensions of each part of the calibrator at any time using a contact type three-dimensional measuring machine, and to measure a sample with high accuracy using an X-ray CT apparatus. Become. In other words, it is a calibrator that can simultaneously perform offset as well as scaling.
図１は、本発明に係る、Ｘ線ＣＴ装置の校正器１の全体図であり、図２は、Ｘ線ＣＴ装置の校正器１の上面図であり、図３は、Ｘ線ＣＴ装置の校正器１の正面図であり、図４は、Ｘ線ＣＴ装置の校正器１の右側面図である。 FIG. 1 is an overall view of a calibrator 1 of an X-ray CT apparatus according to the present invention, FIG. 2 is a top view of the calibrator 1 of the X-ray CT apparatus, and FIG. FIG. 4 is a front view of the calibrator 1, and FIG. 4 is a right side view of the calibrator 1 of the X-ray CT apparatus.
前記の図１〜４の円筒体２は、Ｘ線の透過性の良好な材料、例えば、アクリル樹脂やベリリウム等がよく、大球３、中球４、小球５は、前記の円筒体２よりもＸ線透過性が低く、真球加工が容易な、例えば、ルビーやジルコニア等がよい。 The cylindrical body 2 shown in FIGS. 1 to 4 is preferably made of a material having good X-ray permeability, such as acrylic resin or beryllium. The large sphere 3, the middle sphere 4, and the small sphere 5 are the above-described cylindrical body 2. For example, ruby or zirconia is preferable because it has a lower X-ray permeability and can be processed into a perfect sphere.
本校正器は、例えば、校正器の仕様書等が手元になくても、接触式三次元計測機により、
必要に応じていつでも、各々の球の直径の実測が可能であり、そして、各々の球の中心間の距離の実測が可能である。
This calibrator, for example, even if you do not have the proofreader's specifications at hand,
The diameter of each sphere can be measured at any time as needed, and the distance between the centers of each sphere can be measured.
Ｘ線ＣＴ装置において、回転台上に載置される測定対象物（試料）を挟んで、Ｘ線管（Ｘ線源）とＸ線検出器が配置されている。測定対象物（試料）を回転台上に載置して、回転台を回転させ、測定対象物（試料）はＸ線を全方位から受け、照射されたＸ線は測定対象物（試料）を通過し、測定対象物（試料）に一部吸収されて減衰した後、Ｘ線管（Ｘ線源）の反対側に位置するＸ線検出器に到達する。これらは、それぞれの方向でどの程度吸収されたかを記録したのち、コンピュータで画像をフーリエ変換で再構成される。内蔵するソフトウエア等を有するコンピュータシステムにより、データ処理され、記録され、表示される。そして、測定対象物（試料）を載置した回転台を３６０度回転させながら、測定情報をＸ線検出器から取得し、この測定情報を３次元像として再構成することにより、投影イメージを得るようにしている。Ｘ線ＣＴ装置では、測定対象物（試料）を固定して、Ｘ線管（Ｘ線源）とＸ線検出器を同時に回転させる方式もあるが、原理は同じである。ここでは、回転台上に載置される測定対象物（試料）を回転させる方式でのべる。
そして、Ｘ線検出器から取得される測定情報から３次元像を再構成して得られる投影イメージのイメージ自体のピクセルサイズ（投影イメージ寸法）に対し、拡大率〔Ｘ線管（Ｘ線源）とＸ線検出器との距離／Ｘ線管（Ｘ線源）と測定対象物（試料）との間の距離〕の逆数をかけることにより、形状寸法を算出できる。前記したように、これらは、内蔵するソフトウエア等を有するコンピュータシステムにより、データ処理され、記録され、表示される。
In an X-ray CT apparatus, an X-ray tube (X-ray source) and an X-ray detector are arranged with a measurement object (sample) placed on a turntable interposed therebetween. The object to be measured (sample) is placed on a turntable, the turntable is rotated, the object to be measured (sample) receives X-rays from all directions, and the irradiated X-ray receives the object to be measured (sample). After passing through and partially absorbed by the measurement object (sample) and attenuated, it reaches an X-ray detector located on the opposite side of the X-ray tube (X-ray source). After recording how much they are absorbed in each direction, the image is reconstructed by Fourier transform on a computer. Data is processed, recorded, and displayed by a computer system having built-in software or the like. The measurement information is acquired from the X-ray detector while rotating the turntable on which the measurement object (sample) is placed, and a projection image is obtained by reconstructing the measurement information as a three-dimensional image. I am doing so. In the X-ray CT apparatus, there is a method in which the measurement object (sample) is fixed and the X-ray tube (X-ray source) and the X-ray detector are rotated at the same time, but the principle is the same. Here, the measurement object (sample) placed on the turntable is rotated.
Then, an enlargement ratio [X-ray tube (X-ray source)] with respect to the pixel size (projection image size) of the projection image itself obtained by reconstructing a three-dimensional image from measurement information acquired from the X-ray detector. The distance between the X-ray detector and the distance between the X-ray tube (X-ray source) and the measurement object (sample)] is multiplied by the reciprocal number. As described above, these data are processed, recorded and displayed by a computer system having built-in software or the like.
次に、測定対象物（試料）の代わりに、校正器１を回転台に載置して、回転台を３６０度回転させながら、測定情報をＸ線検出器から取得し、この測定情報を３次元像として再構成することにより、投影イメージとして図６に示される。すなわち、各球の直径の値や、球中心の距離の値や、球のなす球列の中心の位置と、球のなす球列の中心の位置の距離の値が得られ、内蔵するソフトウエア等を有するコンピュータシステムにより、データ処理され、補正された値で再構成される。
これらの値と、予め接触式三次元計測機により計測された値を基に、Ｘ線ＣＴ装置により再構成された図５に示される各値とを、対比させて、各球の直径の値によりオフセット補正を、距離よりスケーリング補正を行い、Ｘ線ＣＴ装置を校正し、寸法規格の設定が可能となる。
Next, instead of the measurement object (sample), the calibrator 1 is placed on the turntable, and the measurement information is acquired from the X-ray detector while rotating the turntable by 360 degrees. By reconstructing as a dimensional image, it is shown in FIG. 6 as a projection image. That is, the value of the diameter of each sphere, the value of the sphere center distance, the center position of the sphere array formed by the sphere, and the distance value of the center position of the sphere array formed by the sphere are obtained, and the built-in software Are processed and reconstructed with corrected values.
By comparing these values with the values shown in FIG. 5 reconstructed by the X-ray CT apparatus based on the values previously measured by the contact-type three-dimensional measuring machine, the diameter values of the respective spheres are compared. Thus, offset correction is performed, scaling correction is performed from the distance, the X-ray CT apparatus is calibrated, and a dimensional standard can be set.
今回の実施例１は図１〜４において、校正器１の円筒体２の外径を５８mmとし、厚さ５mmのアクリル樹脂製とした。球は直径の異なる大中小の３種を採用し、大球３の直径を１３mmのルビー球とし、中球４の直径を１０mmのルビー球とし、小球５の直径を５mmのルビー球とした。円筒の軸に直角で、円筒体２の外周より２mm大きい半径の水平な円周上に球の中心位置を定め、計４個の球を９０度の間隔で配置した。 1-4, the outer diameter of the cylindrical body 2 of the calibrator 1 is 58 mm and the thickness is 5 mm. Three types of balls, large, medium, and small, are used. The diameter of the large sphere 3 is a 13 mm ruby ball, the diameter of the medium sphere 4 is a 10 mm ruby ball, and the diameter of the small sphere 5 is a 5 mm ruby ball. . The center position of the sphere was determined on a horizontal circumference having a radius of 2 mm larger than the outer circumference of the cylindrical body 2 at right angles to the cylinder axis, and a total of four spheres were arranged at intervals of 90 degrees.
接触式三次元計測機のプローブで本校正器を計測する際、校正器の球の直径を計測するには、プローブの先端の形状の影響で、円筒の外壁から所定の寸法（実施は２ｍｍ）だけ外側に球を設置する必要がある。 When measuring this calibrator with a probe of a contact-type CMM, the diameter of the calibrator sphere is measured from the outer wall of the cylinder by a predetermined dimension (2 mm for implementation) due to the shape of the tip of the probe. Only need to install the sphere on the outside.
そのうえ、前記の４個の球の配列状態を１セット、円筒体の例えば下方より所定の高さに設置し、その位置より上方の位置にもう１セットを設置した構造の校正器を使用した。各段の球の配置は同一とは限らない。２段にセットした理由は、上下の対角線上の計測データも参照したいためである。 In addition, a calibrator having a structure in which one set of the above-described four spheres was placed at a predetermined height from, for example, the lower part of the cylindrical body, and another set was placed at a position above that position was used. The arrangement of the spheres at each stage is not necessarily the same. The reason for setting two levels is that it is desired to refer to the measurement data on the upper and lower diagonal lines.
円筒に球を固着する方法を述べる。切削工具は、球の直径と同じ直径のボールエンドミルを使用し、円筒の中心軸に直角方向でかつ半径の中心方向に、所定の円筒の外壁面から所定の寸法位置まで移動しながら加工する。次の球の直径と同じ径のボールエンドミルを使用し、円筒の円周上に、９０度位置を変更して同加工を繰り返し、４つの球に適合する４つのくぼみを加工する。そのくぼみは球の着座形状になり、それぞれの球を接着剤で、所定の位置に固着する。先端が円錐のエンドミルも使用可能である。円柱形の通常のエンドミルの貫通穴の場合は、球の着座としての形にならず、楕円を形成し位置決めに注意が必要である。しかし、旧都球の着座の間の接着剤がはみ出すことがあるので、球の着座の底に小さめの案内穴を空けて、または円筒体壁の貫通穴にて接着剤を逃がすことも可能である。 A method for fixing a sphere to a cylinder will be described. The cutting tool uses a ball end mill having the same diameter as that of the sphere, and performs machining while moving from a predetermined cylindrical outer wall surface to a predetermined dimensional position in a direction perpendicular to the central axis of the cylinder and in the central direction of the radius. Using a ball end mill having the same diameter as that of the next sphere, the position is changed by 90 degrees on the circumference of the cylinder, and the same process is repeated to process four recesses that fit the four spheres. The indentation takes the form of a ball seat, and each ball is fixed in place with an adhesive. An end mill with a conical tip can also be used. In the case of a through-hole of a normal cylindrical end mill, it does not have a shape as a seat for a sphere, but an ellipse is formed and attention must be paid to positioning. However, since the adhesive during the seating of the old city sphere may protrude, it is also possible to make a small guide hole in the bottom of the seating of the sphere or to let the adhesive escape through the through hole in the cylindrical wall. is there.
Ｘ線ＣＴ装置においては、輝度が変化してもＣＴ画像の球の中心位置は変化がないため、球を用いて、スケーリング（球の中心距離の調整）を行う。また物質の厚さと密度に対して、強度が指数関数的に変化するＸ線の特徴から、同一素材で大きさを変えた球を用いることにより、輝度の閾値を設定し、オフセット（球の直径の調整）を行う。すなわち、本校正器１はスケーリングとオフセットを同時に行える校正器である。 In the X-ray CT apparatus, since the center position of the sphere of the CT image does not change even if the luminance changes, scaling (adjustment of the center distance of the sphere) is performed using the sphere. In addition, the brightness threshold is set by using a sphere of the same material whose size changes exponentially with the thickness and density of the material, and the offset (the diameter of the sphere). Adjustment). That is, the calibrator 1 is a calibrator that can perform scaling and offset simultaneously.
以上、本発明の実施の形態を説明したが、本発明の範囲は、これに限定されるものではなく、本発明の要旨を逸脱しない範囲内において種々変更を加え得ることは勿論である。 Although the embodiment of the present invention has been described above, the scope of the present invention is not limited to this, and it goes without saying that various modifications can be made without departing from the scope of the present invention.
本発明はＸ線ＣＴ装置を製造、販売する産業分野または、Ｘ線ＣＴ装置を使用する産業分野や医療分野で利用することが出来る。 The present invention can be used in an industrial field in which an X-ray CT apparatus is manufactured and sold, or in an industrial field or a medical field in which the X-ray CT apparatus is used.
１ Ｘ線ＣＴ装置の校正器
２ 校正器１の円筒体
３ 大球
４ 中球
５ 小球
1 Calibrator of X-ray CT apparatus 2 Cylindrical body of calibrator 1 Large ball 4 Medium ball 5 Small ball
Claims (6)
When the calibrator described in the preceding paragraph is a cylindrical body, the sample can be placed in the space inside the cylindrical body, and the calibrator and the sample can be measured simultaneously or separately. A calibrator for the X-ray CT apparatus according to any one of the above and a method for using the calibrator.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| WO2017181471A1 (en) * | 2016-04-20 | 2017-10-26 | 广州华端科技有限公司 | Calibration method and system for geometric calibration phantom |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3195802A1 (en) * | 2016-01-19 | 2017-07-26 | Danmarks Tekniske Universitet | Geometrical calibration of x-ray ct scanners |
| WO2017181471A1 (en) * | 2016-04-20 | 2017-10-26 | 广州华端科技有限公司 | Calibration method and system for geometric calibration phantom |
| JP2018063243A (en) * | 2016-10-13 | 2018-04-19 | 地方独立行政法人東京都立産業技術研究センター | Calibrator for ct scanner |
| JP7038399B2 (en) | 2016-10-13 | 2022-03-18 | 地方独立行政法人東京都立産業技術研究センター | Calibrator for CT equipment |
| WO2018193800A1 (en) | 2017-04-21 | 2018-10-25 | 株式会社島津製作所 | Utensil for evaluating length measurement error in x-ray ct device for three-dimensional shape measurement |
| CN110520689A (en) * | 2017-04-21 | 2019-11-29 | 株式会社岛津制作所 | The length-measuring error evaluation utensil of 3-d shape measurement X ray CT device |
| JPWO2018193800A1 (en) * | 2017-04-21 | 2020-02-06 | 株式会社島津製作所 | Equipment for evaluating the length measurement error of X-ray CT equipment for three-dimensional shape measurement |
| JP2020020799A (en) * | 2017-04-21 | 2020-02-06 | 株式会社島津製作所 | Equipment for length measurement error estimation of x-ray ct apparatus for three-dimensional shape measurement |
| CN110520689B (en) * | 2017-04-21 | 2021-09-07 | 株式会社岛津制作所 | Instrument for evaluating length measurement error of X-ray CT apparatus for three-dimensional shape measurement |
| CN113624169A (en) * | 2017-04-21 | 2021-11-09 | 株式会社岛津制作所 | Instrument for evaluating length measurement error of X-ray CT apparatus for three-dimensional shape measurement |
| US11291425B2 (en) | 2017-04-21 | 2022-04-05 | Shimadzu Corporation | Utensil for evaluating length measurement error in X-ray CT device for three-dimensional shape measurement |
| EP4019893A1 (en) | 2017-04-21 | 2022-06-29 | Shimadzu Corporation | Utensil for evaluating length measurement error in x-ray ct device for three-dimensional shape measurement |
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