JP2014183276A - Cooler - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cooler which can inhibit the deterioration of cooling performance.SOLUTION: A cooler 2 cools cooled objects 92a to 92c and includes: a base plate 3 where the cooled objects are attached to a front surface 3a; and multiple fins 4 which are attached to a rear surface 3b of the base plate 3 and are arranged in parallel to each other with flat surfaces facing each other. The cooler 2 includes: a refrigerant supply passage 12 which is provided at the rear surface side of the base plate 3 so as to be separated from tips of the multiple fins 4 and extends along the base plate 3; a refrigerant discharge passage 14 which communicates with spaces between the multiple fins 4 and is provided between the refrigerant supply passage 12 and the base plate 3; and a refrigerant nozzle 6 which is provided at the refrigerant supply passage 12 and jets a refrigerant to the rear surface of the base plate 3. The cooler 2 further includes elastic bodies 21 which are disposed in the refrigerant supply passage 12 and press the refrigerant nozzle 6 toward the fins 4.

Description

  The present invention relates to a cooler. In particular, the present invention relates to a collision jet type cooler in which an object to be cooled such as a semiconductor chip is attached to one surface of a base plate, and a coolant collides with the other surface of the base plate.

  For cooling semiconductor chips and electronic components, there is known a type of cooler in which an object to be cooled such as a semiconductor chip is attached to one surface and a coolant is jetted toward the other surface opposite to the one surface. . Such a type of cooler is sometimes referred to as a collision jet type cooler because the ejected refrigerant collides with the back surface of the base plate. In this specification, a part to which a cooling target such as a semiconductor chip is attached is referred to as a “base plate”. For convenience of explanation, the surface on which the object to be cooled (the above “one surface”) is referred to as the front surface of the base plate, and the opposite surface (the above “other surface”) is referred to as the back surface.

  An example of a collision jet type cooler is described in Patent Document 1, for example. In the cooler described in Patent Document 1, one side wall of the housing corresponds to the base plate. A partition plate is provided that divides the space in the housing into a space facing the base plate and a space separated from the base plate so as to face the base plate. A refrigerant is supplied from the outside into a space separated from the base plate. That is, the space itself constitutes the refrigerant supply path. A port for supplying a refrigerant provided in the housing is referred to as a refrigerant supply port. A refrigerant nozzle that ejects refrigerant from the partition plate toward the back surface of the base plate is provided. The refrigerant nozzle has a long opening extending from a side near the refrigerant supply port to a side far from the refrigerant supply port. Alternatively, the cooler has a plurality of refrigerant nozzles scattered side by side from the side closer to the refrigerant supply port to the side farther from the side. Among the spaces partitioned by the partition plate, a space facing the base plate is provided with a refrigerant discharge port on the wall surface of the housing. The refrigerant discharge port is provided on the side wall of the housing facing the side wall provided with the refrigerant supply port. Further, the space between the partition plate and the base plate constitutes a refrigerant discharge path. Furthermore, this cooler is provided with a plurality of fins on the back surface of the base plate, and a space through which the refrigerant flows is formed between the plurality of fins. In such a cooler, the refrigerant ejected from the refrigerant nozzle flows in between the plurality of fins and flows toward the refrigerant discharge port after colliding with the back surface of the base plate. Thereby, the base plate is cooled via the fins, and the cooling target attached to the base plate is cooled. Patent Documents 2 and 3 also have a configuration in which an object to be cooled is attached to one surface of the base plate and a plurality of fins are provided on the other surface, and a coolant is allowed to flow between the fins to cool the object to be cooled. Have been described.

JP 2011-166113 A JP 2010-165716 A JP 2012-044828 A

  In the cooler as described above, the partition plate may be distorted by the compressive force from the vertical direction of the casing. In other words, the partition plate near the side wall of the housing is likely to be compressed, but it is difficult to apply the compressive force near the center of the partition plate. It may bend away from the base plate. Since the refrigerant nozzle is attached to the partition plate, if the partition plate is curved as described above, the refrigerant nozzle moves backward from the base plate. When the refrigerant nozzle moves away from the base plate, the momentum of the jet abutting against the back surface of the base plate is reduced, and the cooling capacity is reduced. In particular, if the tip of the refrigerant nozzle is initially in contact with the upper end of the fin, the partition plate is curved as described above to create a gap between the tip of the refrigerant nozzle and the upper end of the fin, and the refrigerant ejected from the refrigerant nozzle passes through the gap. It leaks and the momentum of the refrigerant colliding with the base plate drops. Therefore, the technology disclosed in the present specification provides a technology that suppresses separation of the partition plate (that is, the refrigerant nozzle) from the base plate by the momentum of the refrigerant bounced back to the base plate, and suppresses a decrease in cooling capacity.

  The technology disclosed in the present specification relates to a cooler that cools a cooling target attached to a base plate. The cooler includes a base plate on which a cooling target is attached to the front surface, and a plurality of fins that are attached to the back surface of the base plate and arranged in parallel with each other facing each other. The cooler is provided on the back side of the base plate so as to be separated from the tips of the plurality of fins, and communicates with a refrigerant supply path extending along the base plate and a space between the plurality of fins. A refrigerant discharge path provided between the refrigerant supply path and the base plate, and a refrigerant nozzle provided in the refrigerant supply path and ejecting the refrigerant toward the back surface of the base plate are provided. Furthermore, the cooler is disposed in the refrigerant supply path, and includes an elastic body that presses the refrigerant nozzle toward the fin. A coil spring or a leaf spring can be used as the elastic body.

  According to such a configuration, the refrigerant nozzle is pressed against the fins by the elastic body, thereby suppressing the refrigerant nozzle from moving away from the base plate due to the momentum of the refrigerant jet. Since the refrigerant nozzle is not separated from the base plate, the cooling capacity is not lowered. Further, when the tip of the refrigerant nozzle is in contact with the upper end of the fin, the elastic body pushes the refrigerant nozzle from the rear (refrigerant supply path side), and the refrigerant nozzle is prevented from moving away from the upper end of the fin. This reduces the possibility of gaps between the two. Thereby, a refrigerant | coolant does not flow out between a refrigerant | coolant nozzle and a fin, but a refrigerant | coolant can be reliably poured in between several fins. Therefore, it is possible to suppress a decrease in cooling capacity.

The perspective view of the cooler concerning an embodiment is shown. A three-sided view of the cooler is shown. FIG. 2A shows a plan view of the casing excluding the top plate. FIG. 2B is a cross-sectional view taken along line BB in FIG. FIG. 2C is a cross-sectional view taken along the line CC in FIG. The figure corresponding to FIG. 2 (A) of the cooler which concerns on other embodiment is shown. The figure corresponding to Drawing 2 (A) and (C) of the cooler concerning other embodiments is shown. The figure corresponding to FIG.2 (C) of the cooler which concerns on other embodiment is shown. The figure corresponding to FIG. 2 (B) of the cooler which concerns on other embodiment is shown. The figure corresponding to Drawing 2 (A) and (B) of the cooler concerning other embodiments is shown. The figure corresponding to Drawing 2 (A) and (B) of the cooler concerning other embodiments is shown. The figure corresponding to Drawing 2 (A) and (C) of the cooler concerning other embodiments is shown. The figure corresponding to Drawing 2 (A) and (C) of the cooler concerning other embodiments is shown.

  Hereinafter, embodiments will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of the cooler 2. However, in FIG. 1, a part of the parts is cut and drawn so that the internal structure of the cooler 2 can be understood. Hatching represents the cut surface. FIG. 2 is a three-side view of the cooler 2. FIG. 2A shows a plan view of the housing 7 excluding the top plate 7a. FIG. 2B shows a cross section (side cross-sectional view) along the line BB in FIG. FIG. 2C shows a cross-section (front cross-sectional view) along the line CC in FIG.

  The cooler 2 is a device that cools the objects to be cooled 92a, 92b, and 92c such as a semiconductor chip. The objects to be cooled 92a to 92c are attached to the front surface 3a of the base plate 3 via an insulating plate 91 that also serves as a heat spreader. The base plate 3 constitutes one side wall of the housing 7. Here, it should be noted that the “front surface” is a convenient expression for distinguishing two planes of the base plate 3. In the present specification, in the base plate 3, a surface facing the outside of the cooler 2 is referred to as a “front surface 3a”, and a surface facing the inside of the cooler 2 is referred to as a “back surface 3b”. The cooler 2 passes the refrigerant through the inside of the housing, in particular, the back side of the base plate 3 to cool the object to be cooled. The refrigerant is preferably water or antifreeze, but may be a gas such as air.

  A plurality of fins 4 are attached to the back surface 3 b of the base plate 3. The plurality of fins 4 are arranged in parallel with their planes facing each other. The direction of the plurality of fins 4 is a direction in which the plane is orthogonal to the refrigerant flow direction (described later).

  The casing 7 of the cooler 2 is substantially a rectangular parallelepiped, and the internal space excluding the fins 4 serves as a refrigerant flow path. Inside the housing 7, a partition plate 5 that divides the internal space into a space that faces the back surface 3 b of the base plate 3 and a space that is separated from the base plate 3 is provided. The partition plate 5 is disposed in parallel with the base plate 3.

  A refrigerant supply port 8 is provided in a space farther from the base plate 3 than the partition plate 5, and a refrigerant discharge port 9 is provided in a space closer to the base plate 3 than the partition plate 5 (FIG. 2B). )reference). The refrigerant supply port 8 and the refrigerant discharge port 9 are provided on each of two opposing side walls of the housing 7. In FIG. 2B, the refrigerant supply port 8 is provided on the left side wall in the drawing, and the refrigerant discharge port 9 is provided on the right side wall in the drawing. Accordingly, the refrigerant flows from left to right in the figure. In other words, in the coordinate system shown in FIGS. 1 and 2, the refrigerant flows in the positive direction of the X axis. That is, the positive direction of the X axis corresponds to the downstream side of the refrigerant flow.

  A refrigerant nozzle 6 extends from the partition plate 5 toward the base plate 3. As well shown in FIG. 2A, the refrigerant nozzle 6 has a long opening (flow path) along the flow of the refrigerant. The refrigerant supplied from the refrigerant supply port 8 passes through a space farther from the base plate 3 than the partition plate 5, then passes through the refrigerant nozzle 6, and moves to a space closer to the base plate 3 than the partition plate 5. Finally, the refrigerant is discharged from the refrigerant outlet 9. A space farther from the base plate 3 than the partition plate 5 corresponds to the refrigerant supply path 12, and a space closer to the base plate 3 than the partition plate 5 corresponds to the refrigerant discharge path 14.

  As well shown in FIG. 2C, the refrigerant discharge path 14 also corresponds to a U-shaped groove in cross section, and the U-shaped opening side faces the fin 4. That is, the refrigerant discharge path 14 communicates with the space between the fins 4. The refrigerant nozzle 6 has a tip 6a that is in contact with the upper end 4a of the fin 4 (see FIG. 2C).

  The cooler 2 includes a plurality of elastic bodies 21 arranged in the refrigerant supply path 12. In the present embodiment, a cylindrical coil spring is used as the elastic body 21. As shown in FIG. 2C, one end of the elastic body 21 is fixed to the back surface of the partition plate 5, and the other end is fixed to the inner surface of the side wall of the housing 7 that faces the partition plate 5. By disposing the elastic body 21 in this way, the refrigerant nozzle 6 is pressed toward the fin 4 via the partition plate 5, whereby the tip 6 a of the refrigerant nozzle 6 is in close contact with the upper end 4 a of the fin 4. The elastic bodies 21 (coil springs) are arranged side by side with an interval from the upstream side to the downstream side of the refrigerant supply path 12. In this embodiment, six coil springs are used, and three coil springs are arranged in two rows along the refrigerant flow direction. The elastic body 21 is disposed between the plurality of refrigerant nozzles 6. In such a configuration, as indicated by an arrow P in FIG. 2C, the pressing force of the elastic body 21 is transmitted to the partition plate 5 and the refrigerant nozzle 6, and the tip 6 a of the refrigerant nozzle 6 contacts the upper end 4 a of the fin 4. Touch.

  Next, the refrigerant flow will be described with reference to FIGS. 1 and 2B. The thick line with the arrow of FIG. 1, FIG. 2 (B) has shown the flow of the refrigerant | coolant. The symbol “Fin” in FIG. 2B represents that the refrigerant flows into the cooler 2, and the symbol “Fout” represents that the refrigerant flows out of the cooler 2. The refrigerant supplied from the refrigerant supply port 8 flows downstream through the refrigerant supply path 12. The refrigerant changes its flow direction toward the base plate 3 through the long opening of the refrigerant nozzle 6 while flowing through the refrigerant supply path 12. The refrigerant is ejected vigorously from the refrigerant nozzle 6 toward the back surface 3 b of the base plate 3 and flows between the plurality of fins 4. At this time, the refrigerant nozzle 6 is pressed toward the fin 4 by the elastic body 21, and the tip 6a of the refrigerant nozzle 6 is in close contact with the upper end 4a of the fin 4, so that the tip 6a of the refrigerant nozzle 6 and the fin 4 The refrigerant does not flow out from between the upper ends 4 a, and the refrigerant can be reliably poured between the plurality of fins 4. Thereafter, the refrigerant colliding with the back surface 3 b of the base plate 3 rebounds, passes between the fins 4, and moves to the refrigerant discharge path 14. In the refrigerant discharge path 14, the refrigerant flows toward the refrigerant outlet 9. Finally, the refrigerant is discharged from the refrigerant discharge port 9. Note that a refrigerant pipe (not shown) is connected to the refrigerant supply port 8 and the refrigerant discharge port 9, and a tank and a pump (not shown) are connected to the tip of the refrigerant pipe. The refrigerant is sent to the cooler 2 by the tank, the pump, and the refrigerant pipe, and is recovered from the cooler 2.

  As described above, the cooler 2 enhances the cooling capacity by vigorously spraying the refrigerant onto the back surface 3b of the base plate 3 to which the object to be cooled is attached. Further, the refrigerant bounced off the base plate 3 takes heat from the fins 4 while passing between the fins 4, and cools the base plate 3 (that is, a cooling target). The cooler having such a structure is sometimes called an impinging jet type cooler.

  Points to be noted regarding the technology described in the embodiment will be described. The characteristics of the cooler of the embodiment are simply expressed as follows. The cooler 2 includes a housing 7, a base plate 3, a partition plate 5, and a refrigerant nozzle 6. The base plate 3 constitutes one side wall of the housing 7. A cooling target is attached to the front surface 3a of the base plate 3, and a plurality of fins 4 are arranged in parallel on the back surface 3b with the flat surfaces facing each other. The partition plate 5 divides the internal space of the housing into a space facing the base plate 3 and a space separated from the base plate 3. The space that is separated from the base plate 3 constitutes the refrigerant supply path 12, and the space that faces the base plate 3 constitutes the refrigerant discharge path 14. The refrigerant nozzle 6 extends from the partition plate 5 toward the base plate 3. The refrigerant nozzle 6 has a long opening along the flow direction of the refrigerant, and ejects the refrigerant toward the back surface 3 b of the base plate 3. The plurality of fins 4 are arranged so that the planes are orthogonal to the refrigerant flow direction. The upper ends 4 a of the plurality of fins 4 are in contact with the tips 6 a of the refrigerant nozzle 6. In addition, the cooler 2 includes an elastic body 21 that is disposed in the refrigerant supply path 12 and presses the refrigerant nozzle 6 toward the fin 4. A coil spring or a leaf spring can be used as the elastic body 21.

  According to such a configuration, by pressing the refrigerant nozzle 6 toward the fin 4 by the elastic body 21, the nozzle is prevented from moving away from the base plate due to the momentum of the refrigerant jet. Since the refrigerant nozzle 6 does not move away from the base plate 3, the cooling capacity does not decrease. When the tip 6 a of the refrigerant nozzle 6 is in contact with the upper end 4 a of the fin 4, the elastic body 21 pushes the refrigerant nozzle 6 from the rear (refrigerant supply path side), and the refrigerant nozzle 6 is separated from the upper end of the fin 4. This suppresses the possibility that a gap is generated between the refrigerant nozzle 6 and the fin 4. Thereby, the refrigerant does not flow out between the refrigerant nozzle 6 and the fins 4, and the refrigerant can be surely poured into the plurality of fins 4. Thus, the cooling capacity is not reduced. Further, even if there are component tolerances such as the fins 4 and the refrigerant nozzle 6, the component tolerances can be absorbed by pressing the refrigerant nozzle 6 with the elastic body 21. Moreover, even if a compressive force acts on the partition plate 5 by a compressive force from the vertical direction of the housing 7, the elastic body 21 can resist the compressive force, and the strength of the cooler 2 can be improved.

  The embodiment has been described above, but the specific mode is not limited to the above embodiment. For example, in the above embodiment, six elastic bodies 21 (coil springs) are arranged in two rows, but the number and arrangement of the elastic bodies 21 are not particularly limited. For example, as shown in FIG. 3, the structure using the four elastic bodies 21 may be sufficient. Further, the arrangement of the elastic body 21 can be appropriately changed according to the configuration of the refrigerant supply path 12. For example, as shown in FIG. 4, in a configuration in which the refrigerant nozzle 6 is tapered and the partition plate 5 is bent, the elastic body 21 may be fixed to the bent portion 121 of the partition plate 5. The bent portion 121 extends along the refrigerant flow direction.

  Moreover, in the said embodiment, although the cylindrical coil spring was used as the elastic body 21, the shape of a coil spring is not specifically limited, For example, you may use a conical coil spring as shown in FIG. The conical coil spring has a large diameter at one end and a small diameter at the other end. According to such a configuration, the coil spring is provided with a portion having a large diameter and a portion having a small diameter, and the influence on the flow of the refrigerant can be reduced in the portion having the small diameter, so that the refrigerant can flow smoothly.

  Further, since it is not necessary to press the refrigerant nozzle 6 with the elastic body 21 at the portion where the fins 4 are not disposed on the back side of the base plate 3, as shown in FIG. Also good. For example, the fins 4 may not be disposed at the upstream end portion and the downstream end portion of the refrigerant supply path 12. In such a case, the support columns 22 are disposed at the upstream end portion and the downstream end portion. The support column 22 is fixed to the back surface of the partition plate 5 and the inner surface of the housing 7 and supports the partition plate 5.

  Moreover, although the structure using a coil spring as the elastic body 21 was demonstrated in the said embodiment, it is not limited to this, You may use a leaf | plate spring as the elastic body 21. FIG. Further, the number and arrangement of the leaf springs (elastic bodies 21) are not particularly limited. 7 and 8 show views corresponding to FIGS. 2A and 2B of the cooler using a leaf spring as an elastic body. When a leaf spring is used as the elastic body 21, for example, as shown in FIGS. 7A and 7B, two leaf springs are arranged in parallel, or as shown in FIGS. 8A and 8B. It is possible to adopt a configuration in which two leaf springs are arranged so as to cross each other. In the configuration shown in FIG. 7, the elastic body 21 (plate spring) extends in parallel to the refrigerant flow direction from upstream to downstream of the refrigerant supply path 12. In the configuration shown in FIG. 8, the elastic body 21 (plate spring) extends obliquely with respect to the refrigerant flow direction from upstream to downstream of the refrigerant supply path 12. Moreover, the leaf | plate spring is curving in the waveform, and presses the refrigerant | coolant nozzle 6 using this curvature. 9 and 10, a plate spring may be used as the elastic body 21 even in the configuration in which the partition plate 5 has the bent portion 121. In addition to the spring, a member having elasticity can be used as the elastic body 21.

  Specific examples of the present invention have been described in detail above, but these are merely examples and do not limit the scope of the claims. The technology described in the claims includes various modifications and changes of the specific examples illustrated above. The technical elements described in this specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology exemplified in this specification or the drawings can achieve a plurality of objects at the same time, and has technical usefulness by achieving one of the objects.

2: Cooler 3: Base plate 3a: Front surface 3b: Back surface 4: Fin 5: Partition plate 6: Refrigerant nozzle 7: Housing 7a: Top plate 8: Refrigerant supply port 9: Refrigerant discharge port 12: Refrigerant supply path 14: Refrigerant discharge path 21: Elastic body 22: Strut 91: Insulating plates 92a, 92b, 92c: Semiconductor chip (cooling target)
121: Bending part

Claims (2)

A base plate on which the object to be cooled is attached to the front surface;
A plurality of fins attached to the back surface of the base plate and arranged in parallel with the planes facing each other;
A refrigerant supply path that is provided apart from the tips of the fins on the back side of the base plate, and extends along the base plate;
A refrigerant discharge path that communicates with a space between the plurality of fins and is provided between the refrigerant supply path and the base plate;
A refrigerant nozzle that is provided in the refrigerant supply path and ejects the refrigerant toward the back surface of the base plate;
A cooler comprising: an elastic body that is disposed in the refrigerant supply path and presses the refrigerant nozzle toward the fin. The cooler according to claim 1, wherein the tip of the nozzle is in contact with the upper end of the fin.

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