JP2014158997A - Gas treatment device - Google Patents

Gas treatment device Download PDF

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JP2014158997A
JP2014158997A JP2013030187A JP2013030187A JP2014158997A JP 2014158997 A JP2014158997 A JP 2014158997A JP 2013030187 A JP2013030187 A JP 2013030187A JP 2013030187 A JP2013030187 A JP 2013030187A JP 2014158997 A JP2014158997 A JP 2014158997A
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gas
processing
pipe
side pipe
outlet
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JP5933467B2 (en
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Kimiaki Yonetani
公昭 米谷
Nobuo Takeya
宣夫 竹谷
Masatsugu Niioka
正継 新岡
Gogo Matsumura
剛吾 松村
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Taiyo Nippon Sanso Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a gas treatment device capable of decreasing a floor area for installing the gas treatment device, without increasing a pressure loss in pipelines.SOLUTION: A gas treatment device includes: a plurality of treatment cylinders 21 and 31 filled with a gas treatment agent; inlet side pipelines 22, 23, 32, and 33 which are branched off from a material gas lead-in pipeline 11 and connect to inlet sides of the treatment cylinders; and outlet side pipelines 24, 25, 34, and 35 which branch off from a treatment gas lead-out pipeline 12 and connect to outlet sides of the treatment pipelines. At bending portions of the inlet side pipelines and the outlet side pipelines, automatic valves 26, 27, 36, and 37 in which an axis of a gas inflow side pipeline connection port Vi and an axis of a gas outflow side pipeline connection port Vo intersect each other is disposed.

Description

本発明は、ガス処理装置に関し、詳しくは、ガス処理剤を充填した複数の処理筒を使用し、圧力変動法や温度変動法によってガスの分離処理やガスの精製処理などを行うガス処理装置に関する。   The present invention relates to a gas processing apparatus, and more particularly, to a gas processing apparatus that uses a plurality of processing cylinders filled with a gas processing agent and performs a gas separation process or a gas purification process by a pressure fluctuation method or a temperature fluctuation method. .

吸着剤などのガス処理剤を充填した複数の処理筒を、相対的に高い圧力又は低い温度の吸着工程（処理工程）と相対的に低い圧力又は高い温度の再生工程とに切り替えることにより、吸着工程で混合ガス中の特定成分をガス処理剤に吸着させ、ガス処理剤に吸着した成分を再生工程でガス処理剤から脱離させることにより、連続的にガスの分離や精製、除害を行うようにした圧力変動ガス分離装置（ＰＳＡ装置）や温度変動ガス分離装置（ＴＳＡ装置）が広く用いられている（例えば、特許文献１〜３参照。）。   Adsorption by switching a plurality of treatment cylinders filled with a gas treatment agent such as an adsorbent to a relatively high pressure or low temperature adsorption process (treatment process) and a relatively low pressure or high temperature regeneration process. By separating specific components in the mixed gas in the gas treatment agent in the process and desorbing the components adsorbed in the gas treatment agent from the gas treatment agent in the regeneration process, gas separation, purification, and detoxification are continuously performed. The pressure fluctuation gas separation device (PSA device) and the temperature fluctuation gas separation device (TSA device) as described above are widely used (see, for example, Patent Documents 1 to 3).

このようなガス処理装置は、基本的に、一つの原料ガス導入配管から分岐して複数の処理筒の入口側にそれぞれ接続する入口側配管と、一つの処理ガス導出配管から分岐して複数の処理筒の出口側にそれぞれ接続する出口側配管と、入口側配管及び出口側配管のそれぞれに設けられた自動弁とを備えており、各自動弁を所定の順序で切替開閉することにより、前記複数の処理筒を所定の順序で吸着工程と再生工程とに切り替え、ガスの分離や精製を連続的に行うようにしている。さらに、前記入口側配管及び出口側配管には、再生ガス導入配管や再生ガス導出配管から分岐した再生ガス入口側配管や再生ガス出口側配管が接続され、これらの再生ガス用の配管にも自動弁がそれぞれ設けられている。   Such a gas processing apparatus basically has an inlet side pipe branched from one source gas introduction pipe and connected to the inlet side of a plurality of processing cylinders, and a plurality of branching from one processing gas outlet pipe. An outlet side pipe connected to the outlet side of the processing cylinder, and an automatic valve provided in each of the inlet side pipe and the outlet side pipe, and switching and opening each automatic valve in a predetermined order, A plurality of processing cylinders are switched between an adsorption process and a regeneration process in a predetermined order, and gas separation and purification are continuously performed. Furthermore, a regeneration gas inlet side pipe and a regeneration gas outlet side pipe branched from the regeneration gas introduction pipe and the regeneration gas outlet pipe are connected to the inlet side pipe and the outlet side pipe, and these regeneration gas pipes are also automatically connected. Each valve is provided.

特開２００５−２１８９１号公報JP 2005-21891 A 特開２０１１−１４８６７０号公報JP 2011-148670 A 特開平７−１８５２５６号公報JP-A-7-185256

前記各配管は、配管の合流や分岐に対応するため、また、配管同士の干渉を避けるために、適宜な位置にエルボ（直角エルボ）を配置して配管を屈曲させる必要があった。さらに、自動弁としては、配管の設計や弁自体のコストを考慮し、弁両側の配管が一直線状になるストレートスルー形式の自動弁を用いているため、配管の直線部をある程度長くする必要があり、複数の吸着筒同士の間隔を狭くすることができなかった。このため、処理筒の外径が比較的小さい小型のガス処理装置であっても、配管スペースを含めたガス処理装置を設置するための床面積が大きくなり、ガス処理装置の設置場所が限られる場合があった。また、吸着筒同士の間隔を狭くして床面積を小さくするため、各配管にエルボを追加して配管の屈曲数を多くすることも試みられているが、この場合は、全体の配管長が長くなったり、エルボにおける圧力損失が増大したりするため、配管径を大きくしたり、圧縮機や真空ポンプの能力を高める必要があり、コストの上昇を避けることができなかった。   In order to cope with the joining and branching of the pipes and to avoid interference between the pipes, it is necessary to bend the pipes by arranging elbows (right angle elbows) at appropriate positions. Furthermore, as the automatic valve, a straight-through type automatic valve with straight piping on both sides of the valve is used in consideration of the piping design and the cost of the valve itself. In addition, the interval between the plurality of adsorption cylinders could not be reduced. For this reason, even if it is a small gas processing apparatus with a relatively small outer diameter of the processing cylinder, the floor area for installing the gas processing apparatus including the piping space becomes large, and the installation place of the gas processing apparatus is limited. There was a case. In addition, in order to reduce the space between the adsorption cylinders and reduce the floor area, it has been attempted to add elbows to each pipe to increase the number of pipe bends. Since it becomes longer and pressure loss in the elbow increases, it is necessary to increase the diameter of the pipe and increase the capacity of the compressor and the vacuum pump, and it is impossible to avoid an increase in cost.

そこで本発明は、配管における圧力損失の増大を招くことなく、ガス処理装置を設置するための床面積を小さくすることができるガス処理装置を提供することを目的としている。   Therefore, an object of the present invention is to provide a gas processing apparatus capable of reducing the floor area for installing the gas processing apparatus without causing an increase in pressure loss in the piping.

上記目的を達成するため、本発明のガス処理装置は、ガス処理剤を充填した複数の処理筒と、一つの原料ガス導入配管から分岐して前記複数の処理筒の入口側にそれぞれ接続する入口側配管と、一つの処理ガス導出配管から分岐して前記複数の処理筒の出口側にそれぞれ接続する出口側配管と、入口側配管及び出口側配管のそれぞれに設けられた弁とを備えたガス処理装置において、前記入口側配管及び前記出口側配管の屈曲部の少なくとも一つに、ガス流入側配管接続口の軸線とガス流出側配管接続口の軸線とが直交する形式の弁を配置したことを特徴としている。   In order to achieve the above object, a gas processing apparatus of the present invention includes a plurality of processing cylinders filled with a gas processing agent, and inlets branched from one source gas introduction pipe and connected to the inlet sides of the plurality of processing cylinders, respectively. Gas provided with a side pipe, an outlet side pipe branched from one processing gas outlet pipe and connected to the outlet side of the plurality of processing cylinders, and a valve provided in each of the inlet side pipe and the outlet side pipe In the processing apparatus, at least one of the bent portions of the inlet side pipe and the outlet side pipe is provided with a valve of a type in which the axis of the gas inflow side pipe connection port and the axis of the gas outflow side pipe connection port are orthogonal to each other. It is characterized by.

さらに、本発明のガス処理装置は、前記弁が、流入側配管接続口の軸線と弁体の開閉移動方向の軸線とが一直線上に配置され、前記流入側配管接続口の反対側に、弁体を開閉駆動するためのアクチュエータが設けられた自動弁であることを特徴としている。   Further, in the gas treatment device of the present invention, the valve is arranged such that the axis of the inflow side pipe connection port and the axis of the opening / closing movement direction of the valve body are arranged in a straight line, and on the opposite side of the inflow side pipe connection port It is an automatic valve provided with an actuator for opening and closing the body.

本発明のガス処理装置では、従来のガス処理装置では、配管の屈曲部にはエルボを使用し、配管の直線部に弁を設けていたのに対し、配管の屈曲部に、ガス流入側配管接続口の軸線とガス流出側配管接続口の軸線とが直交する形式の弁をそれぞれ配置したので、エルボを省略して配管の直線部を短くすることができる。これにより、処理筒同士の間隔を狭くすることが可能となり、ガス処理装置を設置する床面積を小さくすることができる。また、エルボを省略することによって配管の圧力損失を小さくすることができるので、圧縮機などの動力費の低減も図ることができる。   In the gas processing apparatus of the present invention, in the conventional gas processing apparatus, the elbow is used for the bent portion of the pipe and the valve is provided in the straight portion of the pipe, whereas the gas inflow side pipe is provided in the bent portion of the pipe. Since the valves of the type in which the axis of the connection port and the axis of the gas outflow side pipe connection port are orthogonal to each other are arranged, the elbow can be omitted and the straight portion of the pipe can be shortened. Thereby, it becomes possible to narrow the space | interval of process cylinders, and the floor area which installs a gas processing apparatus can be made small. Moreover, since the pressure loss of the piping can be reduced by omitting the elbow, the power cost of the compressor and the like can be reduced.

本発明のガス処理装置の第１形態例における配管の状態を説明するための斜視図である。It is a perspective view for demonstrating the state of piping in the 1st example of a gas treatment apparatus of the present invention. 同じく設置面積を説明するための平面図である。It is a top view for demonstrating the installation area similarly. 本発明のガス処理装置の第２形態例における配管の状態を説明するための斜視図である。It is a perspective view for demonstrating the state of piping in the 2nd example of a gas treatment apparatus of the present invention. 同じく設置面積を説明するための平面図である。It is a top view for demonstrating the installation area similarly. 本発明のガス処理装置の第３形態例における配管の状態を説明するための斜視図である。It is a perspective view for demonstrating the state of piping in the 3rd example of a gas treatment apparatus of the present invention. 同じく設置面積を説明するための平面図である。It is a top view for demonstrating the installation area similarly.

図１及び図２は、本発明のガス処理装置の第１形態例を示すもので、本形態例に示すガス処理装置１０は、２筒式のガス処理装置であって、軸線を鉛直方向とし、内部にガス処理剤をそれぞれ充填した第１処理筒２１及び第２処理筒３１と、装置上部に設けられた一つの原料ガス導入配管１１からチーズにて水平方向に分岐し、前記第１処理筒２１側に向かう第１処理筒入口側分岐配管２２及び前記第２処理筒３１側に向かう第２処理筒入口側分岐配管３２と、前記第１処理筒２１の頂部中央から鉛直方向上方に向かって設けられた第１処理筒入口側配管２３及び前記第２処理筒３１の頂部中央から鉛直方向上方に向かって設けられた第２処理筒入口側配管３３と、装置下部に設けられた一つの処理ガス導出配管１２からチーズにて水平方向に分岐し、前記第１処理筒２１側に向かう第１処理筒出口側分岐配管２４及び前記第２処理筒３１側に向かう第２処理筒出口側分岐配管３４と、前記第１処理筒２１の底部中央から鉛直方向下方に向かって設けられた第１処理筒出口側配管２５及び前記第２処理筒３１の底部中央から鉛直方向下方に向かって設けられた第２処理筒出口側配管３５と、第１処理筒２１の入口側配管である前記第１処理筒入口側分岐配管２２と第１処理筒入口側配管２３とが直角に交わる入口側配管の屈曲部に設けられた第１処理筒入口弁２６及び第２処理筒３１の入口側配管である前記第２処理筒入口側分岐配管３２と第２処理筒入口側配管３３とが直角に交わる入口側配管の屈曲部に設けられた第２処理筒入口弁３６と、第１処理筒２１の出口側配管である前記第１処理筒出口側分岐配管２４と第１処理筒出口側配管２５とが直角に交わる出口側配管の屈曲部に設けられた第１処理筒出口弁２７及び第２処理筒３１の出口側配管である前記第２処理筒出口側分岐配管３４と第２処理筒出口側配管３５とが直角に交わる出口側配管の屈曲部に設けられた第２処理筒出口弁３７とを備えており、各入口弁２６，３６及び出口弁２７，３７には、計装ガスで作動するアクチュエータＡｃによって弁体を開閉する自動弁がそれぞれ用いられている。   1 and 2 show a first embodiment of the gas processing apparatus of the present invention. A gas processing apparatus 10 shown in this embodiment is a two-cylinder gas processing apparatus, and the axis is a vertical direction. The first processing cylinder 21 and the second processing cylinder 31 each filled with a gas processing agent inside, and one raw material gas introduction pipe 11 provided in the upper part of the apparatus branch in the horizontal direction with cheese, and the first processing From the top center of the first processing cylinder 21 upward in the vertical direction, the first processing cylinder inlet-side branching pipe 22 toward the cylinder 21 and the second processing cylinder inlet-side branching pipe 32 toward the second processing cylinder 31. A first processing cylinder inlet side pipe 23 provided in the vertical direction and a second processing cylinder inlet side pipe 33 provided vertically upward from the center of the top of the second processing cylinder 31; Horizontal direction with cheese from processing gas outlet pipe 12 A first processing tube outlet side branch pipe 24 that branches off and goes toward the first processing cylinder 21 side, a second processing cylinder outlet side branch pipe 34 that goes toward the second processing cylinder 31 side, and a bottom portion of the first processing cylinder 21 A first processing tube outlet side pipe 25 provided vertically downward from the center, a second processing tube outlet side pipe 35 provided vertically downward from the bottom center of the second processing cylinder 31; The first processing cylinder inlet valve provided at the bent portion of the inlet side pipe where the first processing cylinder inlet side branch pipe 22 and the first processing cylinder inlet side pipe 23 intersect at a right angle, which is the inlet side pipe of the one processing cylinder 21. 26 and the 2nd process pipe | tube 2nd process provided in the bending part of the inlet side piping where the said 2nd process cylinder inlet side branch piping 32 and the 2nd processing cylinder inlet side piping 33 cross | intersect at right angles. A pipe inlet valve 36 and an outlet side pipe of the first processing cylinder 21 The first processing cylinder outlet valve 27 and the outlet side of the second processing cylinder 31 provided at the bent part of the outlet side pipe where the first processing cylinder outlet side branch pipe 24 and the first processing cylinder outlet side pipe 25 intersect at right angles. A second processing cylinder outlet valve 37 provided at a bent portion of the outlet side pipe where the second processing cylinder outlet side branch pipe 34 and the second processing cylinder outlet side pipe 35 which are pipes intersect at right angles; For each of the inlet valves 26 and 36 and the outlet valves 27 and 37, an automatic valve that opens and closes a valve body by an actuator Ac that is operated by an instrument gas is used.

各入口弁２６，３６は、各入口側分岐配管２２，３２がそれぞれ接続されるガス流入側配管接続口Ｖｉの軸線を水平方向に向け、各入口側配管２３，３３がそれぞれ接続されるガス流出側配管接続口Ｖｏの軸線を鉛直方向下方に向けた状態で、各処理筒２１，３１の上方にそれぞれ配置されている。同様に、各出口弁２７，３７は、各出口側分岐配管２４，３４がそれぞれ接続されるガス流出側配管接続口Ｖｏの軸線を水平方向に向け、各出口側配管２５，３５がそれぞれ接続されるガス流入側配管接続口Ｖｉの軸線を鉛直方向上方に向けた状態で、各処理筒２１，３１の下方にそれぞれ配置されている。また、各弁における流入側配管接続口Ｖｉの軸線は、各弁を開閉する弁体の移動軸線と一直線上に位置しており、弁本体部Ｖｂを挟んで流入側配管接続口Ｖｉの反対側には、弁体を開閉駆動するための前記アクチュエータＡｃがそれぞれ設けられている。   Each inlet valve 26, 36 has a gas inflow line connected to each inlet side pipe 23, 33, with the axis of the gas inlet side pipe connection port Vi to which each inlet side branch pipe 22, 32 is connected oriented horizontally. The side pipe connection port Vo is disposed above the processing cylinders 21 and 31 with the axis of the side pipe connection port Vo facing downward in the vertical direction. Similarly, the outlet valves 27 and 37 are connected to the outlet side pipes 25 and 35, respectively, with the axis of the gas outlet side pipe connection port Vo to which the outlet side branch pipes 24 and 34 are connected oriented in the horizontal direction. The gas inflow side pipe connection port Vi is disposed below the processing cylinders 21 and 31 with the axis of the gas inlet side connection port Vi facing upward in the vertical direction. Further, the axis of the inflow side pipe connection port Vi in each valve is positioned in line with the moving axis of the valve body that opens and closes each valve, and is opposite to the inflow side pipe connection port Vi across the valve body Vb. Are provided with actuators Ac for opening and closing the valve body.

このように、処理筒２１，３１の半径が、アクチュエータＡｃを含めた自動弁の大きさと同等の寸法の場合は、各入口側配管や各出口側配管の屈曲部に、ガス流入側配管接続口Ｖｉの軸線に対してガス流出側配管接続口Ｖｏの軸線が直交する形式、すなわち、アングル弁を用いた自動弁を配置することにより、装置幅方向に配置される入口側分岐配管２２，３２や出口側分岐配管２４，３４の直線部に各自動弁が設けられていないことから、これらの配管の直線部を短くすることができ、処理筒２１，３１同士の間隔を狭くすることができる。これにより、図２に示すように、各入口弁２６，３６や各出口弁２７，３７を、処理筒２１，３１の上方又は下方に納めることが可能となり、ガス処理装置１０の設置面積Ｓを、二つの処理筒２１，３１を立設するのに必要な面積にまで小さくすることができ、室内などの狭い場所でもガス処理装置１０を設置することが可能となる。さらに、エルボを省略できるとともに、全体の配管長も短くすることができるので、配管の口径を小さくして初期コストを低減したり、圧縮機の動力費の低減などを図ることができる。   As described above, when the radius of the processing cylinders 21 and 31 is the same as the size of the automatic valve including the actuator Ac, the gas inflow side pipe connection port is connected to the bent part of each inlet side pipe or each outlet side pipe. By arranging an automatic valve using an angle valve, the inlet side branch pipes 22 and 32 arranged in the apparatus width direction are arranged such that the axis of the gas outflow side pipe connection port Vo is orthogonal to the axis of Vi. Since the automatic valves are not provided in the straight portions of the outlet side branch pipes 24 and 34, the straight portions of these pipes can be shortened, and the interval between the processing cylinders 21 and 31 can be narrowed. As a result, as shown in FIG. 2, the inlet valves 26 and 36 and the outlet valves 27 and 37 can be accommodated above or below the processing cylinders 21 and 31, and the installation area S of the gas processing apparatus 10 can be reduced. The area required for standing the two processing cylinders 21 and 31 can be reduced, and the gas processing apparatus 10 can be installed even in a narrow place such as a room. Furthermore, since the elbow can be omitted and the overall pipe length can be shortened, the diameter of the pipe can be reduced to reduce the initial cost, and the power cost of the compressor can be reduced.

図３及び図４は、本発明のガス処理装置の第２形態例を示している。なお、以下の説明において、前記第１形態例に示したガス処理装置の構成要素と同一の構成要素には同一の符号を付して詳細な説明は省略する。   3 and 4 show a second embodiment of the gas processing apparatus of the present invention. In the following description, the same components as those of the gas processing apparatus shown in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

本形態例に示すガス処理装置４０は、第１処理筒入口側配管２３及び第２処理筒入口側配管３３を、各処理筒２１，３１の上部から一側方に向けて水平方向かつ平行に設けるとともに、第１処理筒出口側配管２５及び第２処理筒出口側配管３５を、前記入口側配管２３，３３と同様に各処理筒２１，３１の下部から水平方向かつ平行に設けたものであって、第１処理筒入口側分岐配管２２と第１処理筒入口側配管２３とが直角に交わる部分に第１処理筒入口弁２６を、第２処理筒入口側分岐配管３２と第２処理筒入口側配管３３とが直角に交わる部分に第２処理筒入口弁３６を、第１処理筒出口側分岐配管２４と第１処理筒出口側配管２５とが直角に交わる部分に第１処理筒出口弁２７を、第２処理筒出口側分岐配管３４と第２処理筒出口側配管３５とが直角に交わる部分に第２処理筒出口弁３７を、それぞれ設けている。   In the gas processing apparatus 40 shown in this embodiment, the first processing cylinder inlet side pipe 23 and the second processing cylinder inlet side pipe 33 are horizontally and parallel from the upper part of each processing cylinder 21, 31 toward one side. The first processing cylinder outlet side pipe 25 and the second processing cylinder outlet side pipe 35 are provided in the horizontal direction and in parallel from the lower part of the processing cylinders 21 and 31 in the same manner as the inlet side pipes 23 and 33. The first processing cylinder inlet valve 26 and the second processing cylinder inlet side branch pipe 32 and the second processing pipe are provided at a portion where the first processing cylinder inlet side branch pipe 22 and the first processing cylinder inlet side pipe 23 intersect at a right angle. The second processing tube inlet valve 36 is provided at a portion where the tube inlet side piping 33 intersects at a right angle, and the first processing tube is disposed at a portion where the first processing tube outlet side branch piping 24 and the first processing tube outlet side piping 25 intersect at a right angle. The outlet valve 27 is connected to the second processing cylinder outlet side branch pipe 34 and the second processing cylinder outlet side. The second processing cylinder outlet valve 37 to a portion where the tube 35 intersect at right angles, are provided respectively.

このように、各入口弁２６，３６及び各出口弁２７，３７を各処理筒２１，３１の一側方に配置することにより、前記第１形態例におけるガス処理装置１０に比べてガス処理装置４０の全高を低く抑えることができ、室内のような高さ制限がある場所でもガス処理装置４０を設置することができる。また、前記第１形態例と同様に、装置幅方向に配置される入口側分岐配管２２，３２や出口側分岐配管２４，３４の直線部を短くできることから、処理筒２１，３１同士の間隔を狭くすることができ、ガス処理装置４０の設置面積Ｓを小さくすることができる。   In this manner, by arranging the inlet valves 26 and 36 and the outlet valves 27 and 37 on one side of the processing cylinders 21 and 31, respectively, the gas processing apparatus can be compared with the gas processing apparatus 10 in the first embodiment. The overall height of 40 can be kept low, and the gas processing device 40 can be installed even in places where there is a height restriction such as indoors. Further, similarly to the first embodiment, since the straight portions of the inlet side branch pipes 22 and 32 and the outlet side branch pipes 24 and 34 arranged in the apparatus width direction can be shortened, the interval between the processing cylinders 21 and 31 is increased. The installation area S of the gas processing apparatus 40 can be reduced.

図５及び図６は、本発明のガス処理装置の第３形態例を示すもので、本形態例に示すガス処理装置５０は、手動弁１１ａ，１２ａをそれぞれ備えた原料ガス導入配管１１及び処理ガス導出配管１２が、共にガス処理装置５０の一側方から上方に向かって設けられている場合の構成例を示している。   5 and 6 show a third embodiment of the gas processing apparatus according to the present invention. The gas processing apparatus 50 shown in this embodiment has a raw material gas introduction pipe 11 provided with manual valves 11a and 12a, respectively, and processing. A configuration example is shown in which both the gas outlet pipes 12 are provided upward from one side of the gas processing device 50.

第１処理筒入口側配管２３及び第２処理筒入口側配管３３と、第１処理筒出口側配管２５及び第２処理筒出口側配管３５とは、前記第２形態例と同様に、各処理筒２１，３１の上部、下部から一側方に向けて水平方向かつ平行に設けられており、各入口側配管２３，３３は、各入口弁２６，３６のガス流出側配管接続口Ｖｏにそれぞれ直接接続され、各出口側配管２５，３５は、エルボ２５ａ，３５ａによって鉛直方向上方に向きを変えた後、各出口弁２７，３７のガス流入側配管接続口Ｖｉにそれぞれ接続されている。   The first process cylinder inlet side pipe 23 and the second process cylinder inlet side pipe 33, and the first process cylinder outlet side pipe 25 and the second process cylinder outlet side pipe 35 are the same as in the second embodiment. The pipes 21 and 31 are provided in parallel in the horizontal direction from the upper part and the lower part to one side, and the inlet side pipes 23 and 33 are respectively connected to the gas outlet side pipe connection ports Vo of the inlet valves 26 and 36, respectively. The outlet-side pipes 25 and 35 are directly connected to each other and, after being turned upward in the vertical direction by elbows 25a and 35a, are connected to the gas inflow-side pipe connection ports Vi of the outlet valves 27 and 37, respectively.

また、原料ガス導入配管１１からチーズにて水平方向に分岐した各入口側分岐配管２２，３２は、エルボ２２ａ，３２ａによって鉛直方向上方に向きを変えた後、各入口弁２６，３６のガス流入側配管接続口Ｖｉにそれぞれ接続されており、処理ガス導出配管１２から水平方向に分岐した各出口側分岐配管２４，３４は、各出口弁２７，３７のガス流出側配管接続口Ｖｏにそれぞれ直接接続されている。   The inlet side branch pipes 22 and 32 branched horizontally from the raw material gas introduction pipe 11 with cheese are turned upward in the vertical direction by the elbows 22a and 32a, and then gas flows into the inlet valves 26 and 36. The outlet side branch pipes 24 and 34 that are respectively connected to the side pipe connection ports Vi and branch in the horizontal direction from the processing gas outlet pipe 12 are directly connected to the gas outlet side pipe connection ports Vo of the outlet valves 27 and 37, respectively. It is connected.

このように、原料ガス導入配管１１や処理ガス導出配管１２の配置によっては、配管途中にエルボを用いる必要が生じるが、この場合でも、配管の屈曲部に、ガス流入側配管接続口Ｖｉの軸線に対してガス流出側配管接続口Ｖｏの軸線が直交する形式の自動弁を配置することにより、前記両形態例と同様に、装置幅方向に配置される入口側分岐配管２２，３２や出口側分岐配管２４，３４の直線部を短くできるので、処理筒２１，３１同士の間隔を狭くすることができ、ガス処理装置５０の設置面積Ｓを小さくすることができる。   As described above, depending on the arrangement of the raw material gas introduction pipe 11 and the processing gas outlet pipe 12, it is necessary to use an elbow in the middle of the pipe. Even in this case, the axis of the gas inflow side pipe connection port Vi is provided at the bent portion of the pipe. By arranging an automatic valve of the type in which the axis of the gas outflow side pipe connection port Vo is orthogonal to the inlet side branch pipes 22 and 32 arranged in the apparatus width direction and the outlet side as in the above two embodiments Since the straight portions of the branch pipes 24 and 34 can be shortened, the interval between the processing cylinders 21 and 31 can be reduced, and the installation area S of the gas processing apparatus 50 can be reduced.

例えば、第３形態例に示す構成のガス処理装置を窒素ガス精製装置に適用した場合、入口側分岐配管２２，３２及び出口側分岐配管２４，３４に自動弁をそれぞれ設け、これらをエルボを介して第１処理筒入口側配管２３及び第２処理筒入口側配管３３や出口側配管２５，３５に接続した従来の窒素ガス精製装置では、窒素ガス量が２０Ｎｍ３／ｈの場合、設置面積Ａが０．７２ｍ２であるのに対し、第３形態例に示す構成では、設置面積Ａを０．２４ｍ２にすることができ、設置面積を６７％減少させることができる。同様に、窒素ガス量が１００Ｎｍ３／ｈの場合、従来の装置の設置面積Ａが０．９０ｍ２であるのに対し、第３形態例に示す構成の装置では、設置面積Ａを０．４２ｍ２にすることができ、設置面積を５３％減少させることができる。 For example, when the gas processing apparatus having the configuration shown in the third embodiment is applied to a nitrogen gas purification apparatus, automatic valves are provided in the inlet side branch pipes 22 and 32 and the outlet side branch pipes 24 and 34, respectively, and these are connected via elbows. In the conventional nitrogen gas purification apparatus connected to the first processing cylinder inlet side pipe 23 and the second processing cylinder inlet side pipe 33 and the outlet side pipes 25 and 35, the installation area A is determined when the nitrogen gas amount is 20 Nm 3 / h. Is 0.72 m 2 , in the configuration shown in the third embodiment, the installation area A can be 0.24 m 2 and the installation area can be reduced by 67%. Similarly, when the amount of nitrogen gas is 100 Nm 3 / h, the installation area A of the conventional apparatus is 0.90 m 2 , whereas in the apparatus having the configuration shown in the third embodiment, the installation area A is 0.42 m. 2 and the installation area can be reduced by 53%.

なお、各形態例では、原料ガス及び処理ガスに関係する配管のみを例示したが、再生ガス及び再生排ガスの配管についても同様であり、基本的に、各入口側配管２３，３３にチーズを介して再生排ガスの配管を分岐させ、出口側配管２５，３５にチーズを介して再生ガスの配管を分岐させればよく、必要に応じてエルボを用いることもできる。また、ガス流入側配管接続口Ｖｉの軸線に対してガス流出側配管接続口Ｖｏの軸線が直交する形式の自動弁としては、例えば、特開２０１０−１３８９９３号に記載されているような市販の自動弁を使用することができる。さらに、自動弁ではなく手動で開閉する弁を使用することもできる。   In each embodiment, only the piping related to the raw material gas and the processing gas is illustrated, but the same applies to the piping of the regeneration gas and the regeneration exhaust gas. Basically, the cheese is inserted into each of the inlet side piping 23 and 33. Then, the regeneration exhaust gas pipe may be branched, and the regeneration gas pipe may be branched to the outlet side pipes 25 and 35 via cheese, and an elbow may be used if necessary. Further, as an automatic valve of a type in which the axis of the gas outflow side pipe connection port Vo is orthogonal to the axis of the gas inflow side pipe connection port Vi, for example, a commercially available one as described in JP 2010-138993 A is available. Automatic valves can be used. Further, a valve that is manually opened and closed can be used instead of an automatic valve.

１０，４０，５０…ガス処理装置、１１…原料ガス導入配管、１１ａ…手動弁、１２…処理ガス導出配管、１２ａ…手動弁、２１…第１処理筒、２２…第１処理筒入口側分岐配管、２２ａ…エルボ、２３…第１処理筒入口側配管、２４…第１処理筒出口側分岐配管、２５…第１処理筒出口側配管、２５ａ…エルボ、２６…第１処理筒入口弁、２７…第１処理筒出口弁、３１…第２処理筒、３２…第２処理筒入口側分岐配管、３２ａ…エルボ、３３…第２処理筒入口側配管、３４…第２処理筒出口側分岐配管、３５…第２処理筒出口側配管、３５ａ…エルボ、３６…第２処理筒入口弁、３７…第２処理筒出口弁、Ａｃ…アクチュエータ、Ｓ…設置面積、Ｖｂ…弁本体部、Ｖｉ…ガス流入側配管接続口、Ｖｏ…ガス流出側配管接続口   DESCRIPTION OF SYMBOLS 10,40,50 ... Gas processing apparatus, 11 ... Raw material gas introduction piping, 11a ... Manual valve, 12 ... Processing gas outlet piping, 12a ... Manual valve, 21 ... 1st processing cylinder, 22 ... 1st processing cylinder inlet side branch Piping, 22a ... Elbow, 23 ... First processing tube inlet side piping, 24 ... First processing tube outlet side branch piping, 25 ... First processing tube outlet side piping, 25a ... Elbow, 26 ... First processing tube inlet valve, 27 ... 1st processing cylinder outlet valve, 31 ... 2nd processing cylinder, 32 ... 2nd processing cylinder inlet side branch piping, 32a ... Elbow, 33 ... 2nd processing cylinder inlet side piping, 34 ... 2nd processing cylinder outlet side branch Piping, 35 ... second processing cylinder outlet side piping, 35a ... elbow, 36 ... second processing cylinder inlet valve, 37 ... second processing cylinder outlet valve, Ac ... actuator, S ... installation area, Vb ... valve body, Vi ... Gas inflow side piping connection port, Vo ... Gas outflow side piping connection port

Claims (2)

ガス処理剤を充填した複数の処理筒と、一つの原料ガス導入配管から分岐して前記複数の処理筒の入口側にそれぞれ接続する入口側配管と、一つの処理ガス導出配管から分岐して前記複数の処理筒の出口側にそれぞれ接続する出口側配管と、入口側配管及び出口側配管のそれぞれに設けられた弁とを備えたガス処理装置において、前記入口側配管及び前記出口側配管の屈曲部の少なくとも一つに、ガス流入側配管接続口の軸線とガス流出側配管接続口の軸線とが直交する形式の弁をそれぞれ配置したことを特徴とするガス処理装置。   A plurality of processing cylinders filled with a gas processing agent, an inlet side pipe branched from one raw material gas introduction pipe and connected to the inlet side of each of the plurality of processing cylinders, and branched from one processing gas outlet pipe In a gas processing apparatus comprising an outlet side pipe connected to the outlet side of a plurality of processing cylinders, and a valve provided on each of the inlet side pipe and the outlet side pipe, the inlet side pipe and the outlet side pipe are bent. A gas processing apparatus characterized in that at least one of the parts is provided with a valve of a type in which the axis of the gas inflow side pipe connection port and the axis of the gas outflow side pipe connection port are orthogonal to each other. 前記弁は、流入側配管接続口の軸線と弁体の開閉移動方向の軸線とが一直線上に配置され、前記流入側配管接続口の反対側に、弁体を開閉駆動するためのアクチュエータが設けられた自動弁であることを特徴とする請求項１記載のガス処理装置。   In the valve, the axis line of the inflow side pipe connection port and the axis line in the opening / closing movement direction of the valve body are arranged in a straight line, and an actuator for opening and closing the valve body is provided on the opposite side of the inflow side pipe connection port. The gas processing apparatus according to claim 1, wherein the gas processing apparatus is an automatic valve.
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