JP2014149917A - Organic electroluminescent element and method of manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing a low-cost organic electroluminescent element which is suppressed in short circuit and reduced in influence on operational reliability.SOLUTION: Disclosed is a method of manufacturing an organic electroluminescent element in which, after a functional layer 26 including at least a light emission layer 25 is formed by being laminated on a first electrode 27, a second electrode 22 is formed by being laminated on the functional layer 26. The second electrode 22 has light permeability and is formed by a wet process.

Description

  The present invention relates to an organic electroluminescence element used for a lighting fixture, a liquid crystal backlight, various displays, a display device, and the like, and a method for manufacturing the same.

  As a typical surface light emitter, there is an organic electroluminescence element (hereinafter referred to as an organic EL element). As shown in FIG. 5, in this organic EL element, a light transmissive second electrode 12 is provided on the surface (lower surface) of a light transmissive support substrate 11, and holes are injected into the surface (lower surface) of the second electrode 12. The functional layer 16 including the layer 13, the hole transport layer 14, and the light emitting layer 15 is provided, and the light reflective first electrode 17 is provided on the surface (lower surface) of the functional layer 16. The light emitted from the functional layer 16 by applying a voltage between the second electrode 12 and the first electrode 17 is extracted through the second electrode 12 and the support substrate 11.

  In recent years, a method of applying and forming each layer by roll-to-roll using a flexible support substrate has attracted attention as a means for reducing the cost of organic EL elements. However, as a flexible support substrate, it is assumed that a film with a barrier film having sealing performance is used. However, the price of the film is high, and it is a great obstacle to achieve cost reduction.

  In general, the light transmissive second electrode 12 is made of a metal oxide such as ITO, IZO, AZO, GZO, FTO, or ATO as a transparent conductive material, and is subjected to a vacuum process such as sputtering or vacuum deposition. It is formed. These film forming methods require expensive equipment and a large amount of energy, and techniques for reducing manufacturing costs and environmental burdens are required. Furthermore, the refractive index of the transparent conductive film formed by these is higher than that of the glass support substrate, and in the case of an organic EL device, the total reflection loss due to the difference in refractive index at the interface with the front and rear layers reduces the light extraction efficiency. It is a factor.

  In order to overcome these problems, a method of forming a transparent conductive film by applying or printing using a solution containing conductive nanoparticles has been proposed (see Patent Document 1). According to this method, since a vacuum process is not necessary, not only the process cost can be suppressed, but also the optically advantageous element that can control the refractive index of the transparent conductive film by selecting the binder material holding the conductive nanoparticles. A structure can be formed. However, in a film formed by coating using a solution in which conductive nanoparticles and a binder are mixed, the surface roughness is generally higher than that of a glass supporting substrate surface used in organic semiconductor devices such as organic EL. large. This relatively large surface roughness is caused by the contained particles, and when an organic EL device is formed by laminating a functional layer including a light emitting layer on this film, it may affect the occurrence of short circuits and operational reliability. Is very expensive. Therefore, as a method for alleviating this, a technique for improving flatness by overcoating a binder material containing no nanoparticles or a low content on a transparent conductive film containing nanoparticles has been disclosed. (See Patent Document 2). However, in such a method, since the conductivity of the overcoat layer is lower than that of the transparent conductive film, there is a possibility that the electrical characteristics as an electrode may be deteriorated, which is not a fundamental solution.

JP 2009-181856 A JP 2009-505358 A

  This invention is made | formed in view of said point, and it aims at providing the low cost organic electroluminescent element which suppressed the short circuit and reduced the influence on operation | movement reliability, and its manufacturing method.

  The method for manufacturing an organic electroluminescent element according to the present invention is a method for manufacturing an organic electroluminescent element in which a functional layer including at least a light emitting layer is stacked on a first electrode, and then a second electrode is stacked on the functional layer. The second electrode is light transmissive and is formed by a wet process.

  In the method of manufacturing the organic electroluminescence element, it is preferable to form the first electrode as a support substrate.

  In the method for manufacturing the organic electroluminescence element, it is preferable to form the second electrode in a mesh shape.

  An organic electroluminescence device according to the present invention is an organic electroluminescence device comprising a functional layer including at least a light-emitting layer formed on a first electrode and a second electrode formed on the functional layer. A support substrate is provided on the opposite side of the functional layer of the first electrode, and the second electrode is light transmissive.

  An organic electroluminescence device according to the present invention is an organic electroluminescence device comprising a functional layer including a light emitting layer formed on a first electrode, and a second electrode formed on the functional layer. The first electrode is formed as a support substrate, and the second electrode is light transmissive.

  In the organic electroluminescence element, the second electrode is preferably formed in a mesh shape.

  The present invention can provide a low-cost organic electroluminescence device that suppresses short-circuiting and reduces the influence on operation reliability.

It is a schematic sectional drawing which shows an example of embodiment of this invention. It is a schematic sectional drawing which shows an example of other embodiment of this invention. An example of other embodiment of this invention is shown, (a) is schematic sectional drawing, (b) is a partial top view. It is a schematic sectional drawing which shows an example of other embodiment of this invention. It is general | schematic sectional drawing which shows a prior art example.

  Hereinafter, modes for carrying out the present invention will be described.

  An example of the layer structure of the organic EL device according to the present invention is shown in FIG. The organic EL element includes a support substrate 21, a first electrode 27 formed on the support substrate 21, a functional layer (organic layer) 26 including a light emitting layer 25, a hole transport layer 24, and a hole injection layer 23, a function A light-transmissive second electrode 22 formed on the layer 26 is provided. The functional layer 26 is formed by being laminated on one surface of the first electrode 27, and one surface of the first electrode 27 on which the functional layer 26 is formed is the surface of the second electrode 22 on the functional layer 26 side. It is formed more smoothly. Accordingly, the influence of the irregularities on the surface of the first electrode 27 on the functional layer 26 can be reduced, and the functional layer 26 is formed on the surface of the second electrode 22 having a larger roughness than the surface of the first electrode 27. As compared with the above, it is possible to suppress a short circuit that is likely to occur in the functional layer 26 and to reduce the influence on the operation reliability. The second electrode can be formed on the functional layer 26 by a wet process. Therefore, it is possible to form a low-cost organic EL element that suppresses a short circuit that is likely to occur when the functional layer 26 is formed on the second electrode 22 formed by a wet process and reduces the influence on the operation reliability.

  Examples of the support substrate 21 include a rigid transparent glass plate such as soda glass and non-alkali glass, a flexible transparent plastic plate such as polycarbonate and polyethylene terephthalate, and a metal film made of aluminum, copper, stainless steel, or the like. However, it is not limited to these. Moreover, although it is common in any kind of support substrate 21, in order to suppress the short circuit of an organic EL element, the smoothness of the surface of the support substrate 21 is very important. In general, the metal film may have a rougher surface than glass or the like, but it is preferable to suppress the surface roughness to Ra 100 nm or less, and more preferably to Ra 10 nm or less. Thereby, the influence which the roughness of the surface of the support substrate 21 has on the first electrode 27 can be reduced, and the short circuit of the first electrode 27 can be easily suppressed.

The first electrode 27 can be formed as a cathode. As the material constituting the first electrode 27, Al, Ag, or the like, or a compound containing these metals can be used, but a layered structure or the like may be constituted by combining Al and another electrode material. . Such electrode material combinations include alkali metal and Al laminates, alkali metal and silver laminates, alkali metal halides and Al laminates, and alkali metal oxides and Al laminates. Bodies, alkaline earth metal or laminates of rare earth metals and Al, and alloys of these metal species with other metals, such as sodium, sodium-potassium alloy, lithium, magnesium, etc. For example, a laminate with Al, a magnesium-silver mixture, a magnesium-indium mixture, an aluminum-lithium alloy, a LiF / Al mixture / laminate, an Al / Al ₂ O ₃ mixture, and the like can be given as examples. Further, in addition to those listed above, it is more preferable to insert a layer that promotes electron injection from the first electrode 27 into the light emitting layer 25, that is, an electron injection layer between the first electrode 27 and the light emitting layer 25. . As a material constituting the electron injection layer, a material common to the material constituting the first electrode 27, a metal oxide such as titanium oxide and zinc oxide, and a dopant for promoting electron injection are mixed. However, it is not limited to these.

  Examples of the organic electroluminescent material constituting the light emitting layer 25 include polyparaphenylene vinylene derivatives, polythiophene derivatives, polyparaphenylene derivatives, polysilane derivatives, polyacetylene derivatives, polyfluorene derivatives, polyvinylcarbazole derivatives, the above dye bodies, and metal complex light emission. Polymerized materials, anthracene, naphthalene, pyrene, tetracene, coronene, perylene, phthaloperylene, naphthaloperylene, diphenylbutadiene, tetraphenylbutadiene, coumarin, oxadiazole, bisbenzoxazoline, bisstyryl, cyclopentadiene, coumarin , Oxadiazole, bisbenzoxazoline, bisstyryl, cyclopentadiene, quinoline metal complex, tris (8-hydroxyquinolinato) al Ni complex, tris (4-methyl-8-quinolinato) aluminum complex, tris (5-phenyl-8-quinolinato) aluminum complex, aminoquinoline metal complex, benzoquinoline metal complex, tri- (p-terphenyl-4-yl) ) Amine, pyran, quinacridone, rubrene, and derivatives thereof, or 1-aryl-2,5-di (2-thienyl) pyrrole derivative, distyrylbenzene derivative, styrylarylene derivative, styrylamine derivative, and light emission thereof And compounds having a group consisting of a functional compound in a part of the molecule. Further, not only compounds derived from fluorescent dyes typified by the above compounds, but also so-called phosphorescent materials, for example, luminescent materials such as Ir complexes, Os complexes, Pt complexes, and europium complexes, or compounds or polymers having these in the molecule It can be used suitably. These materials can be appropriately selected and used as necessary.

  As a material constituting the hole transport layer 24, a low molecular to high molecular material having a small LUMO can be used. For example, an aromatic amine is added to a side chain or main chain of polyvinylcarbazole (PVCz), polypyridine, polyaniline, or the like. Examples thereof include polymers containing aromatic amines such as polyarylene derivatives, but are not limited thereto.

  Examples of the material constituting the hole injection layer 23 include organic materials including thiophene, triphenylmethane, hydrazoline, arylamine, hydrazone, stilbene, triphenylamine, and the like. Specifically, aromatic carbene derivatives such as polyvinyl carbazole (PVCz), polyethylene dioxythiophene: polystyrene sulfonate (PEDOT: PSS), TPD, etc., the above materials may be used alone, or two or more kinds of materials. May be used in combination.

  The second electrode 22 can be formed as an anode. As the conductive material constituting the second electrode 22, fine particles of metal such as silver, indium-tin oxide (ITO), indium-zinc oxide (IZO), tin oxide, Au, conductive polymer, conductive Organic material, dopant (donor or acceptor) -containing functional layer, a mixture of a conductor and a conductive organic material (including a polymer), and a mixture of these conductive material and non-conductive material. It is not limited. Non-conductive materials include acrylic resin, polyethylene, polypropylene, polyethylene terephthalate, polymethyl methacrylate, polystyrene, polyethersulfone, polyarylate, polycarbonate resin, polyurethane, polyacrylonitrile, polyvinyl acetal, polyamide, polyimide, diacrylphthalate. Resins, cellulosic resins, polyvinyl chloride, polyvinylidene chloride, polyvinyl acetate, other thermoplastic resins, and copolymers of two or more monomers constituting these resins, but are not limited to these Is not to be done. Moreover, in order to improve electroconductivity, you may perform doping using the following dopants. Examples of the dopant include, but are not limited to, sulfonic acid, Lewis acid, proton acid, alkali metal, alkaline earth metal, and the like.

  Below, the manufacturing method of said organic EL element is demonstrated.

  First, the first electrode 27 is formed on one surface of the support substrate 21. Various formation methods can be adopted for the first electrode 27 according to the constituent material, and examples thereof include a non-wet process and a wet process. In the non-wet process, the first electrode 27 is formed without using a solvent, and examples thereof include a vacuum deposition method, a sputtering method, and a lamination method in which a metal thin film is thermocompression bonded. In the wet process, the first electrode 27 is formed using a solvent. For example, a spin coating method, a casting method, a micro gravure coating method, a gravure coating method, a bar coating method, a roll coating method, a wire bar coating method, Examples thereof include a dip coating method, a spray coating method, a screen printing method, a flexographic printing method, an offset printing method, and an ink jet printing method. Since it is preferable that the first electrode 27 has less surface roughness (unevenness) than the second electrode 22, the first electrode 27 is preferably formed by a non-wet process that can form a smooth surface more easily than the wet process. .

  Next, the functional layer 26 is formed on one surface (the surface opposite to the support substrate 21) of the first electrode 27 formed on the support substrate 21. Various forming methods can be adopted for the functional layer 26 according to the constituent material, and examples thereof include the above-described wet process. The functional layer 26 can be sequentially formed in the order of the light emitting layer 25, the hole transport layer 24, and the hole injection layer 23 from the first electrode 27 side.

  When each layer of the functional layer 26 is laminated by a wet process such as a coating method, the underlying layer is dissolved, the coating solution of the next layer does not spread uniformly on the functional layer 26, and the wettability is poor. There is a problem. Even when the functional layer formation order of a general organic EL element as shown in FIG. 5 does not cause a problem, the above problem may appear remarkably when the reverse order is configured. When such a problem occurs, for example, with regard to the film thickness, taking into account the amount to be dissolved, a film having a thickness larger than the target film thickness is formed as one method. In order to improve the wettability, a method of adding a solvent (alcohol or the like) that improves the wettability to the coating solution may be used.

  Next, the second electrode 22 is formed on one surface (the surface opposite to the first electrode 27) of the functional layer 26 formed on the first electrode 27 on the support substrate 21. The second electrode 22 can be formed by the above-described wet process. In this case, a large-scale facility such as a vacuum deposition method is not required, and cost reduction can be achieved.

  When the second electrode is formed by a wet process, it is necessary to reduce the surface roughness on the second electrode in order to suppress a short circuit in the organic EL element having a configuration in which the functional layer is formed on the second electrode. In general, since the second electrode portion defines a light emitting area, it is necessary to form a pattern in order to prevent a short circuit with the first electrode. In order to perform such patterning, there are printing patterning methods such as bank formation after film formation, etching, screen printing and the like. Normally, bank formation and etching involve steps of resist coating, developing solution, and immersion in a resist stripping solution, and the second electrode formed by the wet process is easily damaged and may deteriorate the characteristics of the second electrode. The nature is very high. On the other hand, in patterning by printing, for example, when surface printing is used, surface unevenness caused by the plate mesh, when gravure printing or slit die coating is used, a film thickness difference occurs at the start and finish of coating. Very likely. These surface roughness and film thickness step are likely to cause a short circuit when an organic EL element is formed by laminating a functional layer on top of these second electrodes. In any printing, the leveling property after application can be improved by reducing the viscosity of the printing ink, but it becomes difficult to increase the film thickness as the viscosity decreases. When a conductive polymer material such as a highly conductive type PEDOT: PSS, which is commonly used as an electrode material formed by a wet process, is used, a transparent oxide conductive film such as ITO having a thickness of about 100 to 200 nm and In order to obtain equivalent conductivity, a film thickness of about 500 to 1000 nm is required. For this reason, when using these conductive polymer materials, it is difficult to lower the viscosity of the printing ink. In the case of a highly conductive material, since a relatively thin film is sufficient, the viscosity of the printing ink is low and there is no problem. However, when the viscosity is low, there are problems such as wettability with the base and bleeding, and the stability. It is not easy to form.

  However, in the organic EL element as described above, a layered structure reverse to the normal element formation order as shown in FIG. 1 is used, so that the function is formed on the light transmissive second electrode 22 formed by the wet process. The knowledge that suppression of a short circuit and operation reliability were improved as compared with the case where the layer 26 was formed was obtained. In particular, the process cost can be reduced by applying and forming each layer by roll-to-roll using the flexible support substrate 21.

  The organic EL element supplies power to the functional layer 26 through the first electrode 27 and the second electrode 22 and emits light from the light emitting layer 25 by the power supply. And can be taken out through.

  FIG. 2 shows an example of another embodiment. The organic EL element in FIG. 1 is a combination of the support substrate 21 and the first electrode 27. Other configurations are the same as those in FIG. By using the support substrate 21 and the first electrode 27 in this way, it is not necessary to form the support substrate 21 and the first electrode 27 separately, the number of parts can be reduced, and the first electrode can be reduced. The step of forming 27 is not necessary, and the cost can be reduced. In addition, by using a flexible metal for the support substrate 21, it is cheaper than the barrier film, has the same sealing performance, and can also serve as the first electrode 27, thereby greatly reducing costs. Can do.

  FIG. 3 shows an example of another embodiment. This organic EL element is the same as that shown in FIG. 1 except that the second electrode 22 is formed in a mesh shape. Other configurations are the same as those in FIG. The second electrode 22 can be formed of the above-described conductive material. For example, a metal material such as silver or copper or a conductive material such as carbon is formed on a thin wire, and a plurality of thin wires are formed. It can be formed by crossing appropriately in the vertical and horizontal directions. The width of the thin wire can be about 1 to 100 μm, but is not limited thereto. Moreover, arbitrary things can be used also about the width space | interval of a thin wire material, and the aspect-ratio of a thin wire material. In addition, the mesh-like second electrode 22 can be formed using a conductive paste containing the above by screen printing or the like, but is not limited thereto.

  The shape of the mesh (opening) 30 of the mesh-like second electrode 22 in plan view can be set as appropriate. As shown in FIG. 3B, the mesh-like second electrode 22 has a grid structure (lattice structure). As a structure), a square mesh 30 can be formed in a plan view. The mesh 30 can be formed in an arbitrary shape such as a triangle, a hexagon, or a circle in a plan view.

  The second electrode 22 can easily extract light emitted from the light emitting layer 25 of the functional layer 26 through the mesh 30. This organic EL element can reduce the resistivity and sheet resistance of the second electrode 22 as compared with the case where the second electrode 22 is a thin film formed of a conductive transparent oxide. It is possible to reduce luminance unevenness by reducing the resistance of the electrode 22.

  FIG. 4 shows an example of another embodiment. The organic EL element in FIG. 3 combines the support substrate 21 and the first electrode 27. Other configurations are the same as those in FIG.

  Hereinafter, the present invention will be specifically described by way of examples.

Example 1
A non-alkali glass plate (No. 1737, manufactured by Corning) having a thickness of 0.7 mm was used as a support substrate, and aluminum was formed to a thickness of 80 nm on the support substrate by a vacuum deposition method to form a first electrode (cathode). . Next, a solution obtained by dissolving a red polymer (“Light Emitting Polymer ATS111RE” manufactured by American Dye Source Co., Ltd.) in a THF solvent so as to be 1 wt% was applied on the cathode with a spin coater so that the film thickness was about 200 nm. The luminescent layer was obtained by baking at 100 ° C. for 10 minutes. Next, TFB (Poly [(9,9-dioctylfluorenyl-2,7-diyl) -co- (4,4 ′-(N- (4-sec-butyphenyl))) diphenyl amine)] (American Dye Source) A solution prepared by dissolving “Hole Transport Polymer ADS259BE”) in THF solvent to a concentration of 1 wt% was applied on the light emitting layer with a spin coater to a film thickness of about 12 nm to prepare a TFB film. A hole transport layer was obtained by baking at 10 ° C. for 10 minutes. A solution prepared by mixing polyethylenedioxythiophene / polystyrene sulfonic acid (PEDOT-PSS) (“Baytron P AI4083”, PEDOT: PSS = 1: 6) manufactured by Starck Vitec and isopropyl alcohol on the hole transport layer in a ratio of 1: 1. Was applied by a spin coater so that the film thickness of PEDOT-PSS was 30 nm, and baked at 150 ° C. for 10 minutes to obtain a hole injection layer. Further, ITO nanoparticle (particle size: about 40 nm, NanoTek (registered trademark) ITCW 15 wt% -G30 manufactured by CI Kasei Co., Ltd.) and methyl cellulose (METOLOSE (registered trademark) 60SH manufactured by Shin-Etsu Chemical Co., Ltd.) 5 wt% mixed on the hole injection layer. 1 is formed using a screen printing machine so that the film thickness is about 300 nm, and dried at 120 ° C. for 15 minutes to form a second electrode (anode). Thus, an organic EL element having a layer structure as shown in FIG. Got.

(Example 2)
Aluminum foil (about 30 μm thick) was used as the support substrate, and this support substrate was also used as the first electrode. 2 was obtained in the same manner as in Example 1 except that the light emitting layer was formed on the smooth surface side of the support substrate by the same method as in Example 1.

(Example 3)
A highly conductive polyethylene dioxythiophene / polystyrene sulfonic acid (PEDOT-PSS) was coated on the hole injection layer to form a highly conductive polymer layer of about 200 nm. Furthermore, using the silver paste material for printing on the surface, the mesh-like 2nd electrode as shown to Fig.3 (a) (b) was formed by screen printing, and it was set as the anode. The line width was about 40 μm, the pitch between line centers was about 1000 μm, and the mesh height was about 5 μm. Other than that was carried out similarly to Example 1, and obtained the organic EL element of the layer structure as shown to Fig.3 (a).

(Example 4)
A highly conductive polyethylene dioxythiophene / polystyrene sulfonic acid (PEDOT-PSS) was coated on the hole injection layer to form a highly conductive polymer layer of about 200 nm. Furthermore, using the silver paste material for printing on the surface, the mesh-like 2nd electrode as shown in FIG. 4 was formed by screen printing, and it was set as the anode. The line width was about 40 μm, the pitch between line centers was about 1000 μm, and the mesh height was about 5 μm. Other than that was carried out similarly to Example 2, and obtained the organic EL element of a layer structure like FIG.

(Comparative Example 1)
A non-alkali glass plate (No. 1737, manufactured by Corning) having a thickness of 0.7 mm was used as the support substrate, and ITO nanoparticles (particle size: about 40 nm, NanoTek (registered trademark) ITCW 15 wt% -G30 manufactured by CI Kasei Co., Ltd.) on the hole injection layer. ) And methylcellulose (METOLOSE (registered trademark) 60SH manufactured by Shin-Etsu Chemical Co., Ltd.) at 5 wt% is patterned to a film thickness of about 300 nm using a screen printer and dried at 120 ° C. for 15 minutes. Two electrodes (anode) were formed. Next, polyethylenedioxythiophene / polystyrene sulfonic acid (PEDOT-PSS) (“Baytron P AI4083”, PEDOT: PSS = 1: 6, manufactured by Starck Vitech) and isopropyl alcohol were mixed on the anode in a ratio of 1: 1. The hole injection layer was obtained by apply | coating the solution with a spin coater so that the film thickness of PEDOT-PSS might be set to 30 nm, and baking for 10 minutes at 150 degreeC. Furthermore, TFB (Poly [(9,9-dioctylfluorenyl-2,7-diyl) -co- (4,4 ′-(N- (4-sec-butyphenyl))) diphenyl amine)] (manufactured by American Dye Source) A solution obtained by dissolving “Hole Transport Polymer ADS259BE”) in THF solvent so as to be 1 wt% was applied on the hole injection layer with a spin coater so as to have a film thickness of about 12 nm, and a TFB film was formed. A hole transport layer was obtained by baking at 10 ° C. for 10 minutes. Next, a solution obtained by dissolving a red polymer (“Light Emitting Polymer ATS111RE” manufactured by American Dye Source Co., Ltd.) in THF solvent to 1 wt% is formed on a hole transport layer with a spin coater so that the film thickness is about 200 nm. The light emitting layer was obtained by apply | coating and baking at 100 degreeC for 10 minute (s). Finally, an organic EL element was obtained by forming a film of aluminum with a thickness of 80 nm on the substrate as a first electrode (cathode) by vacuum deposition.

(Comparative Example 2)
An organic EL device was obtained in the same manner as in Comparative Example 1 except that an aluminum foil (about 30 μm thick) was used as the support substrate and the light emitting layer was formed on the smooth surface side by the same method as in Comparative Example 1.

In the organic EL elements obtained in each Example and Comparative Example, a current was passed between the electrodes so that the current density was 10 mA / cm ^2, and the front luminance was measured with a luminance meter (BM-7A manufactured by Topcon Technohouse). Measured.

  In Table 1, the relative value of each front luminance when the front luminance of the comparative example 1 is set to 1 is shown.

  As can be seen from Table 1, Examples 1-4 are equivalent to Comparative Example 1 in terms of front luminance, but Comparative Example 1 is greater than Examples 1-4 in terms of drive voltage. Furthermore, light emission could not be confirmed for Comparative Example 2 in which the forward laminated structure was formed on the metal foil. Therefore, a functional layer (organic layer) is formed on a light-transmitting anode (second electrode) formed by a wet process by using a layered structure reverse to the normal element formation order as shown in FIG. In this case, it is possible to confirm the suppression of short circuit that is likely to occur. Further, from the results of Examples 2 and 4, it can be confirmed that when the metal foil is used as the substrate, no deterioration in the characteristics is observed even if the metal foil also serves as the cathode.

21 support substrate 22 second electrode 25 light emitting layer 26 functional layer 27 first electrode

Claims (6)

  A method of manufacturing an organic electroluminescent element comprising: forming a functional layer including at least a light emitting layer on a first electrode; and then forming a second electrode on the functional layer, wherein the second electrode has light transmittance. And the manufacturing method of the organic electroluminescent element characterized by forming by a wet process.   The method of manufacturing an organic electroluminescence element according to claim 1, wherein the first electrode is formed as a support substrate.   The method of manufacturing an organic electroluminescent element according to claim 1, wherein the second electrode is formed in a mesh shape.   An organic electroluminescence device comprising a functional layer including at least a light emitting layer formed on a first electrode and a second electrode formed on the functional layer, the organic electroluminescence element being opposite to the functional layer of the first electrode An organic electroluminescence device comprising: a support substrate; and the second electrode having optical transparency.   An organic electroluminescence device comprising a functional layer including a light emitting layer laminated on a first electrode and a second electrode laminated on the functional layer, wherein the first electrode is formed as a support substrate, 2. The organic electroluminescence device according to claim 1, wherein the second electrode is light transmissive. 6. The organic electroluminescence element according to claim 4, wherein the second electrode is formed in a mesh shape.

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