JP2014085032A - Operational method for low dew point air conditioning installation and low dew point air conditioning installation - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform a more positive holding of an indoor low dew point environment.SOLUTION: A transient mode operation is caused to be present during transit from a door closed mode operation accompanying with an increasing of air-supply amount q3 to a door opened mode operation. Under this transient mode operation, while a circulation bypass passage 32 is opened to cause low dew point air ΔSA of the same air amount as a set increased air amount Δq3 of the low dew point air SA fed out of a dehumidifier 5 to be circulated through the circulation bypass passage 32, original air MA of the same basic feeding air amount q2 as that of the closed door mode operation is fed through a feeding passage 12, mixed air of the original air MA and the circulating low dew point air ΔSA is dehumidified with the dehumidifier 5 and in the dehumidification processing state, the low dew point air SA of the same basic air feeding amount as that of the closed door mode operation is fed to a low dew point chamber 1 or an arranging area 26 of an inter-room opening 3.

Description

  The present invention relates to a low dew point air conditioner that forms a low dew point environment necessary in a manufacturing process of a lithium battery, a thin film, or an organic EL.

Specifically (see FIG. 1), the inter-chamber opening 3 that opens the low-dew point chamber 1 to the auxiliary chamber 2 is provided with an inter-room door 4 that opens and closes the inter-chamber opening 3.
A dehumidifier 5 is provided for dehumidifying the raw air MA introduced through the introduction path 12 to generate a low dew point air SA having a low dew point temperature;
An air supply path 21 for supplying the low dew point air SA generated by the dehumidifier 5 to the area where the low dew point chamber 1 or the inter-chamber opening 3 is provided,
When the room door 4 is in the open state, the air volume of the raw air MA to be dehumidified to the set supply air dew point temperature ts in the dehumidifier 5 is less than that when the room door 4 is in the closed state. The present invention relates to a low dew point air conditioning system that increases the air volume of the low dew point air SA to be supplied to the arrangement area of the low dew point chamber 1 or the inter-chamber opening 3 in the state of the set supply air dew point temperature ts by increasing the increased air volume Δq3.

  Conventionally, as this type of low dew point air conditioning equipment, Patent Document 1 (see FIG. 1) discloses that the first air inlet 22 and the second air inlet 24 through the air supply path 21 regardless of whether the inter-room door 4 is opened or closed. In addition to the low dew point air SA that is supplied quantitatively to each of the low dew point chamber 1 and the auxiliary chamber 2, when the inter-chamber door 4 is in an open state, the low dew point air SA diverted from the air supply passage 21 is reduced. An air curtain supply port (corresponding to the third air supply port 27) in the dew point chamber 1 is supplied to the inter-chamber opening 3, whereby the inter-chamber opening 3 in a state where the inter-room door 4 is opened. In addition, a low dew point air conditioning system for forming an air curtain composed of low dew point air SA has been proposed.

  That is, in this low dew point air conditioning system, by forming the air curtain, the chamber door 4 is opened for the purpose of carrying in / out articles to the low dew point chamber 1 and maintaining the low dew point chamber 1, etc. Water intrusion due to air intrusion from the auxiliary chamber 2 to the low dew point chamber 1 through the inter-chamber opening 3 is prevented, and the room of the low dew point chamber 1 is maintained in a required low dew point environment.

  Further, in Patent Document 2, in a facility configuration in which a plurality of low dew point chambers 1 are provided for a common auxiliary chamber 2, low dew point air SA is supplied to each of the plurality of low dew point chambers 1 through an air supply passage 21. At the same time, a low dew point air conditioning system has been proposed in which when the inter-room door 4 of any low dew point chamber 1 is opened, the amount of air supplied to the low dew point chamber 1 is increased.

JP 2012-52718 A JP 2007-265880 A

  However, in all of these conventional low dew point air conditioning facilities (see FIG. 1), when the inter-room door 4 is opened, the raw air is dehumidified by the dehumidifier 5 in order to form an air curtain and increase the supply air volume. The air volume of the MA (generally, the outside air OA and the return air RA from the auxiliary chamber 2) is immediately increased to increase the generated air volume of the low dew point air SA. At this time, the increased raw air MA is reduced. Since a corresponding time is required for the dehumidifier 5 to start up to a state where it can be dehumidified to the same low dew point temperature ts as before the increase necessary for supply to the dew point chamber 1, a so-called start-up delay occurs.

  Due to this delay in the rise, the dew point temperature of the low dew point air SA supplied from the dehumidifier 5 through the air supply path 21 rises temporarily even immediately after the inter-room door 4 is opened, and this causes the formation of the air curtain. In spite of the increase in the supply air volume, the indoor low dew point environment in the low dew point chamber 1 may be deteriorated.

  In view of this situation, the main problem of the present invention is to effectively solve the above-mentioned problems by adopting a rational operation mode, so that the room in the low dew point room is required regardless of the opening operation of the room door. It is in the point which enables it to hold | maintain more reliably and stably in a low dew point environment.

The first characteristic configuration of the present invention relates to a method for operating a low dew point air conditioning facility,
In the inter-chamber opening that opens the low dew point chamber to the auxiliary chamber, an inter-chamber door that opens and closes the inter-chamber opening is provided,
A dehumidifier that generates low dew point air at a low dew point temperature by dehumidifying the raw air introduced through the introduction path,
An air supply path for supplying the low dew point air generated by the dehumidifier to the low dew point chamber or the arrangement area of the inter-chamber opening is provided,
When the room door is in an open state, compared to when the room door is in a closed state, increase the air volume of the raw air to be dehumidified to the set supply air dew point temperature with the dehumidifier, A method of operating a low dew point air conditioner that increases the amount of low dew point air to be supplied to the low dew point chamber or the arrangement area of the inter-chamber opening in a state of a set supply dew point temperature,
A bypass path for circulation connecting the supply path and the introduction path in a short circuit is provided,
When the inter-chamber door is in a closed state, the raw air having a basic introduction air amount introduced through the introduction passage in a state where the circulation bypass passage is closed is dehumidified to a set supply air dew point temperature by the dehumidifier. The closed air mode operation for supplying the low dew point air of the basic supply air volume at the set supply air dew point temperature to the arrangement area of the low dew point chamber or the inter-chamber opening,
When the inter-chamber door is in an opened state, the air volume of the raw air introduced through the introduction path with the circulation bypass path closed is increased by a set increase air volume from the basic introduction air volume during the closed mode operation. The increased raw air is dehumidified to the set supply air dew point temperature by the dehumidifier, and is sent to the low dew point chamber or the opening area of the inter-chamber opening at the set supply air dew point temperature. The door-opening mode operation in which the air volume of the dew point air is increased by the set increase air volume from the basic air supply air volume during the door-closing mode operation,
When opening the closed room door, perform a transient mode operation prior to opening the room door,
In the transient mode operation, the circulation bypass path is opened, and the low dew point air having the same air volume as the set increased air volume among the low dew point air sent from the dehumidifier is circulated through the circulation bypass path. The raw air of the same basic introduction air volume as that in the closed mode operation is introduced through the introduction path, and the dehumidifier removes the mixed air of the basic air of the basic introduction air quantity and the circulating low dew point air having the same air volume as the set increase air volume. In a state where the dehumidification processing is performed, the low dew point air having the same basic air supply amount as that in the closed door mode operation is supplied to the low dew point chamber or the arrangement area of the inter-chamber opening, and
By adjusting the dehumidifying capacity of the dehumidifier, the dew point temperature of the low dew point air sent from the dehumidifier is adjusted to the set supply air dew point temperature,
In the implementation of this transient mode operation, after the dew point temperature of the low dew point air sent from the dehumidifier is stabilized at the set supply air dew point temperature, the circulation bypass is closed and the operation proceeds to the door opening mode operation. The point is that the room door is opened and operated.

  According to this configuration, the transient mode operation is performed prior to opening the room door, and in this transient mode operation, dehumidification is performed as compared to the previous closed mode operation with the room door closed. The processing air volume in the machine is increased in advance by an air volume equal to the set increased air volume during the opening mode operation.

  However, the increase in the processing air volume in the transient mode operation is caused by circulating a part of the low dew point air dehumidified by the dehumidifier (that is, the low dew point air having the same air volume as the set increased air volume) in the circulation bypass passage. Since the increase in the processing air volume to be generated and the increase in the dehumidifying load due to this increase in the processing air volume is small, the dew point temperature of the low dew point air sent from the dehumidifier in this transient mode operation is adjusted to the set supply air dew point temperature The adjustment range of the dehumidifying capacity to the enhancement side of the dehumidifier required for this is smaller than that in the case of directly switching the operation of the facility from the closed mode operation to the open mode operation as in the above-described conventional facility.

  From this, in this transient mode operation, the dehumidifying capacity of the dehumidifier can be increased to some extent prior to the transition to the subsequent door opening mode operation, and the supply low dew point caused by the rise delay as described above It is also possible to prevent an increase in the dew point temperature of air from occurring in the transient mode operation.

  Subsequently, in the above configuration, after the dew point temperature of the low dew point air sent from the dehumidifier in the transient mode operation is stabilized to the set supply air dew point temperature, the circulation bypass path is closed and the operation proceeds to the door opening mode operation. In this open mode operation, instead of increasing the processing air volume by circulating low dew point air, as with the conventional equipment described above, the processing air volume of the dehumidifier is increased by increasing the air volume of the raw air introduced through the introduction path by the set increase air volume ( In other words, the generated air volume of low dew point air is increased.

  However, at the time of transition to the door opening mode operation, the dehumidifying capacity of the dehumidifier is increased to some extent in the previous transient mode operation as described above, so that the dehumidifier is sent out in the door opening mode operation. The range of adjustment of the dehumidifying capacity to the dehumidifier's augmentation side required to adjust the dew point temperature of the low dew point air to the set supply air dew point temperature is also possible when equipment operation is switched directly from closed door mode operation to open door mode operation. Compared to the smaller one.

  From this, as in the case of the transient mode operation, it is also possible to prevent the dew point temperature increase of the supply low dew point air caused by the rise delay as described above from occurring during the transition to the door opening mode operation.

  In addition, in the above configuration, the dehumidifying function in the low dew point chamber or the inter-chamber opening area is increased by increasing the supply air volume in the low dew point chamber or inter-chamber opening area by shifting to the door opening mode operation. Since the chamber door is opened and operated in advance after raising the temperature, deterioration of the indoor low dew point environment of the low dew point chamber caused by moisture intrusion through the opening of the chamber can be more effectively prevented.

  Therefore, according to the above configuration, the low dew point air-conditioning equipment can maintain the room of the low dew point room more reliably and stably in the required low dew point environment regardless of the opening operation of the door between the rooms than before. Can do.

According to the second feature configuration of the present invention, in the implementation of the first feature configuration,
After transitioning from the transient mode operation to the door opening mode operation, the dew point temperature of the low dew point air sent from the dehumidifier is stabilized at the set supply air dew point temperature for the adjustment of the dehumidifying capacity of the dehumidifier. Later, the room door is opened and operated.

  According to this configuration, immediately after shifting from the transient mode operation to the door opening mode operation, the room door is opened because the dew point temperature of the low dew point air sent from the dehumidifier is not yet stable. After the opening operation, the dew point temperature of the low dew point air supplied to the area where the low dew point chamber or the inter-chamber opening is arranged becomes carelessly higher than the set supply air dew point temperature. It is possible to prevent the low dew point environment from being deteriorated.

The third feature configuration of the present invention is the first or second feature configuration,
The low dew point during the opening operation of the inter-chamber door with respect to the supply air volume of the low dew point air that is supplied to the low dew point chamber or the arrangement area of the inter-chamber opening at the set dew point temperature through the air passage Calculating in advance the increased air supply amount necessary to process the predicted increase in moisture load in the chamber or in the area where the inter-chamber opening is disposed,
The calculated air volume is set in advance as the set increased air volume prior to the operation of the equipment.

  According to this configuration, for example, each time the door between the rooms is actually opened, the amount of increase in the water load is determined by determining the amount of increase in the water load in the low dew point chamber or the area where the room opening is provided. Compared with the calculation of the increased supply air volume of the low dew point air required to process the air flow, the above-mentioned air volume increase treatment (that is, the transition from the closed mode operation to the open mode operation involving the transient mode operation) ) Can be performed easily and quickly.

The fourth feature configuration of the present invention is any one of the first to third feature configurations,
When closing the door between the rooms, after completing the closing operation of the door between the rooms, the operation of the equipment is directly switched from the door opening mode operation to the door closing mode operation.

  According to this configuration, since the operation switching from the door opening mode operation to the door closing mode operation is performed after the operation of closing the door between the rooms is completed, for example, the door closing mode and the door opening mode operation are switched to the door closing mode. When switching to operation at the same time, when the door between the rooms is not yet completely closed, switching from open-door mode operation to closed-mode operation and the area where the low dew point chamber or inter-chamber opening is located As a result, the supply air volume (supply air volume) of the low dew point air with respect to the air flow is reduced, which can surely prevent the deterioration of the indoor low dew point environment in the low dew point room.

In the fifth feature configuration of the present invention, in any one of the first to fourth feature configurations,
As an air supply port for supplying low dew point air fed through the air supply passage, a first air supply port for the low dew point chamber, a second air supply port for the auxiliary chamber, and an arrangement between the chamber openings. While providing a third air inlet for the site,
The low dew point air supplied from the first to third air supply ports finally passes through the auxiliary chamber, and a part or all of the low dew point air is returned to the dehumidifier through the introduction path as the original air. ,
When the room door is in an open state,
In a state where the supply air volume of the low dew point air from each of the first and second air supply ports is maintained at the same air volume as that when the inter-room door is closed, the third air supply port Increasing only the supply air volume of the low dew point air from the supply air volume when the inter-room door is closed,
Alternatively, the first and third air supply ports in a state where the supply air amount of the low dew point air from the second air supply port is maintained at the same air amount as the air supply amount when the inter-room door is closed. Increasing the supply air volume of the low dew point air from each of the above, compared to the supply air volume when the chamber door is in a closed state,
Alternatively, in the state where the supply air volume of the low dew point air from each of the second and third air supply ports is maintained at the same air volume as that when the inter-room door is closed, the first supply air flow is maintained. Only the supply air volume of the low dew point air from the air mouth is increased from the supply air volume when the inter-chamber door is closed.

  According to this configuration, part or all of the low dew point air supplied from the first to third air supply ports is returned as raw air to the dehumidifier through the introduction path. For example, compared to using all outside air as the raw air. The dew point temperature variation of the raw air can be reduced, and the dew point temperature of the low dew point air supplied to the low dew point chamber or the area where the inter-chamber opening is disposed can be further stabilized.

  In addition, the adjustment range of the dehumidifying capacity adjustment to the dehumidifier enhancement side required in each of the transient mode operation and the door opening mode operation can be further reduced, and the dew point temperature rise of the supply low dew point air caused by the delay in the start-up can be reduced. Further, it can be effectively suppressed, and by these, the interior of the low dew point chamber can be more reliably and stably maintained in the required low dew point environment.

The sixth characteristic configuration of the present invention relates to a low dew point air conditioning facility,
In the inter-chamber opening that opens the low dew point chamber to the auxiliary chamber, an inter-chamber door that opens and closes the inter-chamber opening is provided,
A dehumidifier that generates low dew point air at a low dew point temperature by dehumidifying the raw air introduced through the introduction path,
An air supply path for supplying the low dew point air generated by the dehumidifier to the low dew point chamber or the arrangement area of the inter-chamber opening is provided,
When the room door is in an open state, compared to when the room door is in a closed state, increase the air volume of the raw air to be dehumidified to the set supply air dew point temperature with the dehumidifier, Low dew point air conditioning equipment provided with a control means for increasing the air volume of the low dew point air to be supplied to the low dew point chamber or the arrangement area of the inter-chamber opening in the state of the set supply air dew point temperature,
Provide a bypass path for circulation connecting the supply path and the introduction path in a short-circuit manner,
The control means includes
When the inter-chamber door is in a closed state, the raw air having a basic introduction air amount introduced through the introduction passage in a state where the circulation bypass passage is closed is dehumidified to a set supply air dew point temperature by the dehumidifier. The closed air mode operation for supplying the low dew point air of the basic supply air volume at the set supply air dew point temperature to the arrangement area of the low dew point chamber or the inter-chamber opening,
When the inter-chamber door is in an opened state, the air volume of the raw air introduced through the introduction path with the circulation bypass path closed is increased by a set increase air volume from the basic introduction air volume during the closed mode operation. The increased raw air is dehumidified to the set supply air dew point temperature by the dehumidifier, and is sent to the low dew point chamber or the opening area of the inter-chamber opening at the set supply air dew point temperature. The door-opening mode operation in which the air volume of the dew point air is increased by the set increase air volume from the basic air supply air volume during the door-closing mode operation,
When the door opening request signal for requesting the opening operation of the room door is received, the transient mode operation is performed as the operation prior to the opening operation of the room door,
In the transient mode operation, the circulation bypass path is opened, and the low dew point air having the same air volume as the set increased air volume among the low dew point air sent from the dehumidifier is circulated through the circulation bypass path. The raw air of the same basic introduction air volume as that in the closed mode operation is introduced through the introduction path, and the dehumidifier removes the mixed air of the basic air of the basic introduction air quantity and the circulating low dew point air having the same air volume as the set increase air volume. In a state where the dehumidification processing is performed, the low dew point air having the same basic air supply amount as that in the closed door mode operation is supplied to the low dew point chamber or the arrangement area of the inter-chamber opening, and
By adjusting the dehumidifying capacity of the dehumidifier, the dew point temperature of the low dew point air sent from the dehumidifier is adjusted to the set supply air dew point temperature,
In the implementation of this transient mode operation, after the dew point temperature of the low dew point air sent from the dehumidifier is stabilized at the set supply air dew point temperature, the circulation bypass is closed and the operation proceeds to the door opening mode operation. In the above, it is informed that the opening operation of the inter-room door is possible, or is configured to automatically open the inter-door door.

  According to this configuration, the operation method of the first characteristic configuration described above is automatically implemented by the control operation of the control means, and the effect can be obtained.

The seventh feature configuration of the present invention is the implementation of the sixth feature configuration.
After the transition from the transient mode operation to the door opening mode operation, the control means sets the dew point temperature of the low dew point air sent from the dehumidifier for the adjustment of the dehumidifying capacity of the dehumidifier. After the temperature is stabilized, it is informed that it is possible to open the door between the rooms, or the door is automatically opened.

  According to this configuration, the operation method of the second characteristic configuration described above is automatically implemented by the control operation of the control means, and the effect can be obtained.

The eighth feature configuration of the present invention is the implementation of the sixth or seventh feature configuration,
The low dew point during the opening operation of the inter-chamber door with respect to the supply air volume of the low dew point air that is supplied to the low dew point chamber or the arrangement area of the inter-chamber opening at the set dew point temperature through the air passage A storage means is provided for storing in advance, as the set increased air volume, an increased supply air volume necessary for processing the predicted increase in moisture load in the chamber or the area where the opening between the chambers is disposed,
The control means is configured to perform the transient mode operation and the door opening mode operation based on the set increased air volume read from the storage means.

  According to this configuration, the operation method of the third characteristic configuration described above is automatically implemented by the control operation of the control means, and the effect can be obtained.

The ninth feature configuration of the present invention is the implementation of the eighth feature configuration.
The storage means is configured to store, as the set increase air volume, a plurality of types of the set increase air volumes for each situation condition at the time of opening the room door,
The control means reads from the storage means a set increased air volume that matches the status information given with the door opening request signal among the plurality of types of increased air volumes, and based on the read set increased air volume There exists in the point which is set as the structure which implements the said transient mode driving | operation and the said door opening mode driving | operation.

  According to this configuration, as the situation at the time of the opening operation of the inter-room door, for example, a plurality of kinds of situations with different conditions such as the number of persons arranged in the arrangement area of the inter-chamber opening (that is, the increased amount of moisture to be processed is Corresponding to the case where there are a plurality of different situations), the effect of the eighth feature configuration can be obtained.

In the tenth feature configuration of the present invention, in any one of the sixth to eighth feature configurations,
The control means is configured to directly switch the operation of the equipment from the door opening mode operation to the door closing mode operation when receiving a door closing completion signal notifying that the closing operation of the room door has been completed. It is in.

  According to this configuration, the operation method of the fourth characteristic configuration described above is automatically implemented by the control operation of the control means, and the effect can be obtained.

The eleventh characteristic configuration of the present invention is any one of the sixth to tenth characteristic configurations,
As an air supply port for supplying low dew point air fed through the air supply passage, a first air supply port for the low dew point chamber, a second air supply port for the auxiliary chamber, and an arrangement between the chamber openings. While providing a third air inlet for the site,
The low dew point air supplied from the first to third air supply ports finally passes through the auxiliary chamber, and a part or all of the low dew point air is returned to the dehumidifier through the introduction path as the original air. ,
When the control means is in a state where the room door is opened,
In a state where the supply air volume of the low dew point air from each of the first and second air supply ports is maintained at the same air volume as that when the inter-room door is closed, the third air supply port Increasing only the supply air volume of the low dew point air from the supply air volume when the inter-room door is closed,
Alternatively, the first and third air supply ports in a state where the supply air amount of the low dew point air from the second air supply port is maintained at the same air amount as the air supply amount when the inter-room door is closed. Increasing the supply air volume of the low dew point air from each of the above, compared to the supply air volume when the chamber door is in a closed state,
Alternatively, in the state where the supply air volume of the low dew point air from each of the second and third air supply ports is maintained at the same air volume as that when the inter-room door is closed, the first supply air flow is maintained. Only the supply air volume of the low dew point air from the mouth is configured to be increased more than the supply air volume when the inter-room door is closed.

  According to this configuration, the operation method of the fifth characteristic configuration described above is automatically implemented by the control operation of the control means, and the effect can be obtained.

Equipment configuration diagram showing low dew point air conditioning equipment in closed door mode operation Equipment configuration diagram showing low dew point air conditioning equipment in transient mode operation Equipment configuration diagram showing low dew point air conditioning equipment in open door mode operation state Flow chart of equipment operation

  FIG. 1 shows a low dew point air conditioning system. 1 is a low dew point room that is required to keep the room in a low dew point environment during indoor production work or indoor storage of articles, and 2 is the delivery of articles to the low dew point room 1. The auxiliary room 2 is an auxiliary room for performing entry and maintenance for the low dew point chamber 1, and the auxiliary room 2 is required to have an indoor low dew point environment next to the low dew point room 1 as a semi-low dew point room.

  The low dew point chamber 1 is provided with an inter-chamber opening 3 that opens the chamber to the auxiliary chamber 2 and an inter-room door 4 that opens and closes the inter-chamber opening 3.

  Normally, the room door 4 is closed to preserve the room low dew point environment of the low dew point chamber 1, and when necessary, the room door 4 is opened to carry out articles to the low dew point chamber 1 through the room opening 3. Maintenance and maintenance of the interior of the low dew point chamber 1 is performed.

  Reference numeral 5 denotes an adsorption rotor type dehumidifier that generates low dew point air SA having a set supply air dew point temperature ts (for example, −60 ° C. DP).

  The dehumidifier 5 includes a disk-shaped suction rotor 6 that rotates around a central axis in a predetermined direction r. The suction rotor 6 can ventilate in the central axis direction (that is, the rotation axis direction). A honeycomb material is used as a main material, and an adsorbent x such as zeolite is supported on the honeycomb material.

  The storage chamber 7 of the adsorption rotor 6 (in other words, the rotation area of the adsorption rotor 6) is divided into four areas, ie, a regeneration area 7a, a purge area 7b, a treatment area 7c, and an outside air treatment area 7d, in that order in the rotor rotation direction r. The suction rotor 6 is divided in a state of being arranged from the upper side, and is rotated in a state of straddling these four regions 7a to 7d.

  In this dehumidifier 5, the constant air volume qo outside air OA taken in by the outside air fan 8 through the outside air intake passage 9 is passed through the outside air processing area 7 d following the cooling by the cooler 10, and the outside air processing area of the adsorption rotor 6. By ventilating the adsorption rotor portion in the process of passing through 7d, the outside air OA is pre-dehumidified by the moisture adsorption by the adsorbent x in the ventilation process.

  The outside air OA ′ after the pre-dehumidification is passed through the processing path 7 c by the processing fan 11 through the introduction path 12 after the cooling in the cooler 13. The outside air OA ′ after the pre-dehumidification is passed before the cooling in the cooler 13. Then, it is mixed with the return air RA returning from the auxiliary chamber 2 through the return air passage 14.

  That is, in this dehumidifier 5, this mixed air MA is used as the raw air to be dehumidified, and the mixed air MA is passed through the processing zone 7c and is passed through the adsorption rotor portion in the process zone 7c. Thus, in the aeration process, the mixed air MA as raw air is dehumidified by moisture adsorption by the adsorbent x, thereby generating low dew point air SA having a low dew point temperature.

  Part of the outside air OA ′ after the pre-dehumidification is passed through the branch path 15 from the introduction path 12 to the purge area 7b as the purge air PA, and is passed through the adsorption rotor portion in the process of passing through the purge area 7b. Thus, the suction rotor portion (that is, the suction rotor portion that has passed through the regeneration zone 7a) is purged.

  The spent purge air PA 'that has passed through the purge zone 7b is passed through the regeneration air passage 17 as the regeneration air HA by the regeneration fan 16 through the regeneration air passage 17 and then passed through the regeneration zone 7 as the regeneration air HA. Thus, the adsorption rotor portion in the process of passing through the region is vented, and thereby the adsorbent x in the adsorption rotor portion (that is, the adsorbent adsorbed with moisture in each of the treatment area 7c and the outside air treatment area 7d) is regenerated.

  The used regeneration air HA 'that has passed through the regeneration zone 7a is discharged to the outside through the exhaust passage 19, but a part of the used regeneration air HA' is passed through the regeneration circulation passage 20 before being heated by the heater 18. In this way, a part of the heat quantity of the used regeneration air HA ′ is recovered and used for the regeneration process of the adsorbent x.

  On the other hand, the low dew point chamber 1 is provided with a first air supply port 22 for supplying low dew point air SA generated by the dehumidifier 5 and guided through the air supply passage 21 into the room. The air volume of the low dew point air SA supplied from the first air supply port 22 to the low dew point chamber 1 is automatically adjusted to the set first air supply air volume q1 (constant). 1 constant air volume device 23 is equipped.

  The auxiliary chamber 2 is provided with a second air supply port 24 for supplying low dew point air SA, which is also guided through the air supply channel 21, into the room, and a terminal of the air supply channel 21 connected to the second air supply port 24. The portion 21b is equipped with a second constant air volume device 25 that automatically adjusts the air volume of the low dew point air SA supplied from the second air inlet 24 to the auxiliary chamber 2 to the set second air volume q2 (constant). .

  Similarly, as a supply port for supplying the low dew point air SA guided through the supply passage 21 to the arrangement area of the inter-chamber opening 3, an opposite location (pre-opening location) of the inter-chamber opening 3 on the auxiliary chamber 2 side. 26) is provided with a third air supply port 27 for spotting low dew point air SA to the location 26 before the opening, and a terminal of the air supply path 21 connected to the third air supply port 27. The portion 21c is equipped with an air volume adjustment damper 28 for adjusting the third supply air volume q3, which is the air volume of the low dew point air SA supplied from the third air supply port 27 to the location 26 before opening.

  Reference numeral 29 denotes an air shield that covers the pre-opening portion 26 in a state where the pre-opening location 26 and the auxiliary chamber 2 are kept in communication (in short, in an unsealed state). Thus, the moisture load at the location 26 before opening can be intensively and efficiently processed by the low dew point air SA supplied from the third air inlet 27.

  Moreover, the supply of the low dew point air SA from the third air supply port 27 can be shut off (q3 = 0) by fully closing the air volume adjusting damper 28 with respect to the third air supply port 27. .

  The low dew point chamber 1 includes a low dew point chamber in a state where the inter-room door 4 is closed by automatically finely adjusting the leakage air amount qp of the indoor low dew point air SA ′ from the low dew point chamber 1 to the auxiliary chamber 2. A differential pressure holding damper 30 is provided to prevent the one chamber pressure p1 from rising beyond the chamber pressure p2 of the auxiliary chamber 2 to a set chamber pressure difference Δpa or more.

  Therefore, when the inter-room door 4 is in a closed state, the low dew point chamber 1 has an air volume qp equal to the set first supply air volume q1 that is the supply air volume of the low dew point air SA from the first air inlet 22. (= Q1) indoor low dew point air SA ′ flows out to the auxiliary chamber 2 through the differential pressure maintaining damper 30.

  In other words, when the inter-room door 4 is in a closed state, the auxiliary chamber 2 is supplied with the low dew point air SA having the set second supply air volume q2 from the second supply port 24, Indoor low dew point air SA ′ having an air volume qp equal to the set first supply air volume q 1 is supplied from the low dew point chamber 1 through the differential pressure holding damper 30.

  The auxiliary chamber 2 is connected to the indoor exhaust passage 31 together with the return air passage 14 to supply low dew point air SA, SA ′ to the auxiliary chamber 2 from the second air supply port 24 and the differential pressure holding damper 30. Along with this, the room air having the air volume qr corresponding to a part of the supplied air volume (q2 + qp) is returned from the auxiliary chamber 2 to the dehumidifier 5 through the return air passage 14 as the return air RA.

  With the supply of the low dew point air SA, SA ′ from the second air supply port 24 and the differential pressure holding damper 30 to the auxiliary chamber 2, the room air having the air volume qe corresponding to the remainder of the supplied air volume (q2 + qp) is exhausted. Air EA is discharged from the auxiliary chamber 2 to the outside through the indoor exhaust passage 31.

  Although the differential pressure holding damper 30 is employed in this example, the low dew point chamber 1 and the auxiliary chamber 2 may be communicated with each other by a simple vent instead of the differential pressure holding damper 30.

  Regarding the set first supply air volume q1, which is the air volume of the low dew point air SA supplied from the first air supply port 22 to the low dew point chamber 1, the set first supply air volume when the inter-chamber door 4 is closed. Only by supplying the low dew point air SA of q1 to the low dew point chamber 1, the chamber pressure holding function of the differential pressure holding damper 30 causes the chamber pressure p1 of the low dew point chamber 1 to be higher than the chamber pressure p2 of the auxiliary chamber 2 by a set chamber pressure difference Δpa. The air volume is set so that the interior of the low dew point chamber 1 is maintained in a low dew point environment at a temperature equal to or lower than the first target dew point temperature t1 (for example, −40 ° C. DP).

  On the other hand, with respect to the set second supply air volume Q2, which is the air volume of the low dew point air SA supplied from the second air supply opening 24 to the auxiliary chamber 2, the second air supply opening 24 in the state where the inter-room door 4 is closed. From the low dew point air SA of the set second supply air volume Q2 supplied from the air and the indoor low dew point air SA ′ flowing from the low dew point chamber 1 through the differential pressure maintaining damper 30 The amount of air generated by processing the generated moisture load due to perspiration or the like and maintaining the interior of the auxiliary chamber 2 in a low dew point environment below the second target dew point temperature t2 (for example, −25 ° C. DP) is set.

  The supply of the low dew point air SA from the third air supply port 27 to the pre-opening location 26 is not performed in a situation where the inter-room door 4 is closed, and only when the inter-room door 4 is opened. For the purpose of maintaining the indoor low dew point environment of the low dew point chamber 1 in the open state, the air volume adjustment damper 28 is opened and the low dew point air SA is supplied from the third air supply port 27 to the location 26 before opening.

  The vicinity of the outlet of the dehumidifier 5 in the air supply path 21 and the middle part of the return air path 14 are short-circuited by a circulation bypass path 32, and the circulation bypass path 32 includes the circulation bypass path. A bypass damper 33 that opens and closes 32 and adjusts the passing air volume is provided.

  Reference numeral 34 denotes an operation panel installed in the vicinity of the inter-room door 4 on the auxiliary room 2 side, and reference numeral 35 denotes a controller that controls the operation of the equipment based on an operation command from the operation panel 34.

  The operation panel 34 is provided with a door opening request switch 34a and a door closing completion switch 34b, and a status information input device 34c.

  Furthermore, on the operation panel 34, an opening permission display lamp 34x that displays that the opening operation of the room door 4 is possible and a door opening prohibition that displays the opening operation prohibition of the room door 4 by lighting. An indicator lamp 34y is provided.

  When the operator operates the door opening request switch 34a, the door opening request signal sa is transmitted from the operation panel 34 to the controller 35. Similarly, after the closing operation of the inter-room door 4, the operator operates the door closing completion switch 34b. Then, the closing completion signal sb is transmitted from the operation panel 34 to the controller 35.

  Further, when status information such as the number of workers and the content of work at the location 26 before opening when the worker opens the inter-room door 4 is input to the status information input device 34c, the status information signal having the input status information as signal content si is transmitted from the operation panel 34 to the controller 35.

  The controller 35 is provided with a storage unit 36 for storing its own operation program P and the like, and the storage unit 36 stores a plurality of types of set increased airflow amounts Δq3 in advance.

  With respect to the set increased air volume Δq3, the amount of increase in moisture load at the location 26 before opening during the opening operation of the inter-room door 4 is determined for each situation condition such as the number of work personnel and work contents at the location 26 before opening. Predict by simulation or test operation.

  Then, the third supply air volume q3 for each of the situation conditions necessary to process each of the predicted water load increases for each of these situation conditions (that is, in this example, the zero air volume (q3 = 0) of the third supply air volume q3). ) Is calculated in advance, and these calculated air volumes are stored in the storage unit 34 in advance as the set increased air volume Δq3 for each situation condition prior to the start of the facility.

  In contrast, the controller 33 executes the following controls (a) to (d) in the operation of the equipment (see FIG. 4).

  (A) When the inter-room door 4 is in a closed state, the closed door mode operation is performed.

  In the closed door mode operation (see FIG. 1), the bypass damper 33 is closed and the circulation bypass path 32 is closed, and the air volume adjustment damper 28 for the third air supply port 27 is closed.

  Further, the raw air MA introduced through the introduction passage 12 and passed through the treatment area 7c of the dehumidifier 5 (that is, the mixed air of the pre-dehumidified outside air OA ′ having a constant air volume and the return air RA from the auxiliary chamber 2). By adjusting the rotational speed of the processing fan 11, the air volume is set to the basic introduction air volume qi (= q 1 + q 2) equal to the sum of the set first supply air volume q 1 for the low dew point chamber 1 and the set second supply air volume q 2 for the auxiliary chamber 2. adjust.

  And with this air volume adjustment, the dew point of the low dew point air SA after dehumidification sent from the treatment area 7c of the dehumidifier 5 is adjusted by adjusting the dehumidifying capacity of the dehumidifier 5 by adjusting the temperature of the regeneration air HA, etc. Is adjusted to the set supply air dew point temperature ts.

  That is, in this closed mode operation, the third supply air amount q3, which is the supply air amount of the low dew point air SA to the location 26 before opening from the third supply port 27, is zero air flow (the basic supply in this example for the location 26 before opening). The low dew point air SA having the set first supply air volume q1 at the set supply air dew point temperature ts is supplied from the first supply port 22 to the low dew point chamber 1 and the set supply air dew point temperature ts. The low dew point air SA having the set second supply air volume q2 is supplied to the auxiliary chamber 2 from the second supply port 24.

  Further, in the door closing mode operation, the door opening prohibition indicator lamp 34y on the operation panel 34 is turned off and the door opening prohibition indicator lamp 34y is turned on.

  (B) In this closing mode operation, when the operator receives the opening request signal sa and the situation information signal si transmitted from the operation panel 34 by the operation of the opening request switch 34a and the input operation to the situation information input device 34c. The transition from the closed door mode operation to the transient mode operation is performed.

  In this transient mode operation (see FIG. 2), the bypass damper 33 is opened and the circulation bypass path 32 is opened with the air volume adjustment damper 28 for the third air supply port 27 closed after the previous door closing mode operation.

  Further, among the plurality of set increase air volumes Δq3 stored in the storage unit 36, the set increase air volume Δq3 that matches the content of the received status information signal si is read from the storage unit 36 and introduced through the introduction path 12 to be a dehumidifier. From the basic introduction air volume qi (= q1 + q2) in the previous closed mode operation by the set increase air volume Δq3 read out from the storage unit 36 by adjusting the rotational speed of the processing fan 11 to adjust the air volume of the processing air to be passed through the processing area 7c. Also increase.

  That is, the low dew point of the air volume equal to the basic introduced air volume qi (= q1 + q2) out of the low dew point air SA sent from the treatment area 7c of the dehumidifier 5 due to the increase in the air volume in a state where the circulation bypass passage 32 is opened. The air SA is sent to the first and second air supply ports 22 and 24 through the air supply passage 21 and supplied to the low dew point chamber 1 and the auxiliary chamber 2 as in the closed door mode operation, whereas the processing area of the dehumidifier 5 is supplied. Of the low dew point air SA sent out from 7c, the low dew point air ΔSA having an air volume equal to the set increased air volume Δq3, which is an increase, is circulated to the treatment area 7c of the dehumidifier 5 through the circulation bypass path 32. The mixed air of the circulating low dew point air ΔSA having an air volume equal to the set increased air volume Δq3 and the raw air MA (OA ′ + RA) having the basic introduction air volume qi is passed through the processing zone 7c, so that the raw air MA (OA ′ + RA) is passed. ) Air volume in a state kept in the previous closing mode same basic introduction airflow qi and operating (= q1 + q2), increasing the processing amount of wind dehumidifier 5.

  In the transient mode operation, along with this air volume adjustment, the dehumidifying capacity of the dehumidifier 5 is adjusted by adjusting the temperature of the regeneration air HA, etc., as in the closed door mode operation, so that it is sent out from the processing area 7c of the dehumidifier 5. The dew point temperature of the low dew point air SA after dehumidification is adjusted to the set supply air dew point temperature ts.

  Even in this transition mode operation, the door opening prohibition indicator lamp 34y is kept on with the door opening permission indicator lamp 34x on the operation panel 34 turned off following the previous door closing mode operation.

  (C) In this transient mode operation, when the dew point temperature of the low dew point air SA sent from the treatment area 7a of the dehumidifier 5 becomes stable at the set supply air dew point temperature ts, the transition mode operation is changed to the door opening mode operation. Transition.

  In this door opening mode operation (see FIG. 3), the air volume of the processing air introduced through the introduction path 12 and passed through the processing area 7c of the dehumidifier 5 by adjusting the rotation speed of the processing fan 11 following the previous transient mode operation. Is increased by the set increase air volume Δq3 read from the storage unit 36 rather than the basic introduction air volume qi (= q1 + q2) in the closed door mode operation, the bypass damper 33 is closed and the circulation bypass path 32 is closed.

In addition, the air volume adjustment damper 28 for the third air supply opening 27 is opened, and the air volume of the low dew point air SA supplied from the third air supply opening 27 to the location 26 before opening by adjusting the opening degree of the air flow adjustment damper 28. The third supply air amount q3 is increased from the zero air amount that is the basic supply air amount by the set increase air amount Δq3 read from the storage unit 36.
The

  That is, in the opening mode operation by these operations, instead of increasing the air volume of the processing air passed through the processing chamber 7c by the circulation of the low dew point air ΔSA through the circulation bypass path 32, the return air is increased. The air volume of the original air MA (OA ′ + RA) itself introduced through the introduction path 12 due to the increase in the volume of the return air RA returned from the auxiliary chamber 2 through the path 14 is more than the basic introduction air volume qi (= q1 + q2) in the closed door mode operation. The air volume of the processing air that is passed through the processing area 7c is increased by increasing the set increase air volume Δq3.

  Further, along with this air volume adjustment, the dehumidifier 5 is sent from the processing area 7c of the dehumidifier 5 by adjusting the dehumidifying capacity of the dehumidifier 5 by adjusting the temperature of the regeneration air HA, as in the closed mode operation and the transient mode operation. The dew point temperature of the low dew point air SA after dehumidification is adjusted to the set supply air dew point temperature ts.

  When the dew point temperature of the low dew point air SA after dehumidification sent from the processing area 7c of the dehumidifier 5 is stabilized at the set supply air dew point temperature ts for this capacity adjustment, the door opening prohibition indicator light on the operation panel 34 is displayed. 34y is turned off and the door opening permission indicator lamp 34x is turned on to notify that the opening operation of the inter-room door 4 is possible.

  In this door opening permission indicator lamp 34x, after the transition to the door opening mode operation, the dew point temperature of the low dew point air SA after dehumidification sent from the processing area 7c of the dehumidifier 5 is stable at the set supply air dew point temperature ts. In addition, it may be turned on when the measured dew point temperature at the location 26 before opening is equal to or lower than the first target dew point temperature t1 of the low dew point chamber 1.

  (D) After the operator opens the room door 4 after waiting for the opening of the door opening permission indicator lamp 34x, the door opening mode operation is continued while the room door 4 is in the open state.

  Thereafter, when the operator closes the inter-room door 4 and receives the door closing signal sb transmitted from the operation panel 34 by the operation of the door closing switch 34b by the worker, the door opening operation mode is changed to the door closing operation mode. The third supply air amount q3 that is the supply air amount of the low dew point air SA from the third supply port 27 to the location 26 before opening is set to the zero air amount that is the basic supply air amount before the increase. In this state, the low dew point air SA having the set first supply air volume q1 is supplied from the first air supply port 22 to the low dew point chamber 1, and the low dew point air SA having the set second supply air volume q2 is supplied to the second air supply port. It returns to the state which supplies to the auxiliary chamber 2 from 24.

  At this time, the door opening permission indicator lamp 34x on the operation panel 34 is turned off and the door opening prohibition indicator lamp 34y is turned on.

  In other words, the transition from the closed mode operation to the open mode operation via the transient mode operation as described above, compared with the direct transition from the closed mode operation to the open mode operation, at the time of the operation transition The deterioration of the indoor low dew point environment of the low dew point chamber 1 due to the effective start-up delay of the dehumidifier 5 is more effectively and reliably prevented.

[Another embodiment]
Next, another embodiment of the present invention will be listed.

  In the above-described embodiment, when the inter-room door 4 is in an open state, the inter-room door 4 supplies the supply air volumes q1 and q2 of the low dew point air SA from the first and second air supply ports 22 and 24, respectively. Only when the air flow q3 of the low dew point air SA from the third air supply port 27 is kept in the state in which the inter-room door 4 is in a closed state while maintaining the same air flow as that in the closed state. Instead of this, the supply air volume q2 of the low dew point air SA from the second air supply port 24 is set to the same air volume as when the inter-room door 4 is closed. In the maintained state, the supply air volume of the low dew point air SA from each of the first and third air supply ports 22 and 27 may be increased from the supply air volume when the inter-room door 4 is closed. Good.

  In addition, the supply air volumes q2 and q3 of the low dew point air SA from the second and third air supply ports 24 and 27 are maintained at the same air volume as the supply air volume when the inter-room door 4 is closed. Thus, only the supply air amount of the low dew point air SA from the first air supply port 22 may be increased from the supply air amount when the inter-room door 4 is in a closed state.

  In the above-described embodiment, the basic supply when the inter-room door 4 of the air supply port (the third air supply port 27) that increases the air supply amount when the inter-room door 4 is open is closed. Although an example in which the air volume is set to zero is shown, instead of this, when the inter-room door 4 is in an open state, the inter-room door 4 of the air supply port that increases the air supply volume is closed. The basic supply air volume at that time may be set to an air volume other than zero.

  In the above-described embodiment, after the transition from the transient mode operation to the door opening mode operation, the dew point temperature of the low dew point air SA sent from the dehumidifier 5 is stabilized at the set supply air dew point temperature ts, and then the door opening permission is given. The notification that the opening operation of the inter-room door 4 can be performed by turning on the indicator lamp 34x is not limited to the notification by turning on the indicator lamp 34x, but the voice output, the buzzer sound, the character display, You may make it alert | report by a symbol display.

  Also, instead of these notifications, when the dew point temperature of the low dew point air SA sent from the dehumidifier 5 is stabilized at the set supply air dew point temperature ts after transitioning from the transient mode operation to the door opening mode operation, the room door 4 may be configured to automatically open and operate.

  In the above-described embodiment, the closing completion signal sb is transmitted to the controller 35 by the operation of the closing completion switch 34b by the operator. Instead of this, the closing operation of the room door 4 by manual or automatic operation is performed. When the completion of the closing operation is detected, the door closing completion signal sb may be automatically transmitted.

  Each of the first to third air supply ports 22, 24, and 27 may be composed of a single air supply port or a plurality of air supply ports.

  The inter-chamber opening 3 may be used for any purpose as long as it is an opening that requires opening and closing of the inter-room door 4 such as an opening for carrying in / out an article, an opening for maintenance with respect to the low dew point chamber 1, or an opening serving as both. It may be an opening.

  The low dew point chamber 1 may be a room space for any use as long as the room needs to be maintained in a low dew point environment, such as a production room, a storage room, or a test room.

  In the above-described embodiment, in order to supply the low dew point air SA from the third air supply port 27 to the arrangement area of the inter-chamber opening 3, the facing portion 26 of the inter-chamber opening 3 on the auxiliary chamber 2 side. In the above, an example in which the low dew point air SA is supplied from the third air supply port 27 is shown. Thus, the low dew point air SA may be supplied from the third air supply port 27.

  The present invention can also be applied to a low dew point air conditioning facility that does not include the second air supply port 27 but includes only the first or third air supply ports 22 and 27. In addition, the dehumidifier 5 is used in the practice of the present invention. Is not limited to an adsorption rotor type dehumidifier, and various types of dehumidification methods can be adopted.

  The operation method of the low dew point air conditioning equipment and the low dew point air conditioning equipment according to the present invention can be applied to form a low dew point environment for various uses in various fields.

DESCRIPTION OF SYMBOLS 1 Low dew point room 2 Auxiliary room 3 Room opening part 4 Room door 12 Introduction path MA raw air SA Low dew point air 5 Dehumidifier 26 Arrangement area of room opening part 21 Air supply path ts Set supply air dew point temperature 32 Circulation Bypass path qi Basic introduction air flow Δq3 Increased air flow setting ΔSA Circulating low dew point air 22 First air supply port 24 Second air supply port 27 Third air supply port q1 Supply air flow rate of low dew point air from the first air supply port q2 2 Supply air volume of low dew point air from the air supply port q3 Supply air volume of low dew point air from the 2nd air supply port 35 Control means sa Opening request signal 36 Storage means ss Situation information sb Door closing completion signal

Claims (11)

In the inter-chamber opening that opens the low dew point chamber to the auxiliary chamber, an inter-chamber door that opens and closes the inter-chamber opening is provided,
A dehumidifier that generates low dew point air at a low dew point temperature by dehumidifying the raw air introduced through the introduction path,
An air supply path for supplying the low dew point air generated by the dehumidifier to the low dew point chamber or the arrangement area of the inter-chamber opening is provided,
When the room door is in an open state, compared to when the room door is in a closed state, increase the air volume of the raw air to be dehumidified to the set supply air dew point temperature with the dehumidifier, A method of operating a low dew point air conditioner that increases the amount of low dew point air to be supplied to the low dew point chamber or the arrangement area of the inter-chamber opening in a state of a set supply dew point temperature,
A bypass path for circulation connecting the supply path and the introduction path in a short circuit is provided,
When the inter-chamber door is in a closed state, the raw air having a basic introduction air amount introduced through the introduction passage in a state where the circulation bypass passage is closed is dehumidified to a set supply air dew point temperature by the dehumidifier. The closed air mode operation for supplying the low dew point air of the basic supply air volume at the set supply air dew point temperature to the arrangement area of the low dew point chamber or the inter-chamber opening,
When the inter-chamber door is in an opened state, the air volume of the raw air introduced through the introduction path with the circulation bypass path closed is increased by a set increase air volume from the basic introduction air volume during the closed mode operation. The increased raw air is dehumidified to the set supply air dew point temperature by the dehumidifier, and is sent to the low dew point chamber or the opening area of the inter-chamber opening at the set supply air dew point temperature. The door-opening mode operation in which the air volume of the dew point air is increased by the set increase air volume from the basic air supply air volume during the door-closing mode operation,
When opening the closed room door, perform a transient mode operation prior to opening the room door,
In the transient mode operation, the circulation bypass path is opened, and the low dew point air having the same air volume as the set increased air volume among the low dew point air sent from the dehumidifier is circulated through the circulation bypass path. The raw air of the same basic introduction air volume as that in the closed mode operation is introduced through the introduction path, and the dehumidifier removes the mixed air of the basic air of the basic introduction air quantity and the circulating low dew point air having the same air volume as the set increase air volume. In a state where the dehumidification processing is performed, the low dew point air having the same basic air supply amount as that in the closed door mode operation is supplied to the low dew point chamber or the arrangement area of the inter-chamber opening, and
By adjusting the dehumidifying capacity of the dehumidifier, the dew point temperature of the low dew point air sent from the dehumidifier is adjusted to the set supply air dew point temperature,
In the implementation of this transient mode operation, after the dew point temperature of the low dew point air sent from the dehumidifier is stabilized at the set supply air dew point temperature, the circulation bypass is closed and the operation proceeds to the door opening mode operation. A method of operating a low dew point air conditioning system that opens and operates the inter-room door.   After transitioning from the transient mode operation to the door opening mode operation, the dew point temperature of the low dew point air sent from the dehumidifier is stabilized at the set supply air dew point temperature for the adjustment of the dehumidifying capacity of the dehumidifier. The operation method of the low dew point air conditioning equipment according to claim 1, wherein the room door is opened and operated later. The low dew point during the opening operation of the inter-chamber door with respect to the supply air volume of the low dew point air that is supplied to the low dew point chamber or the arrangement area of the inter-chamber opening at the set dew point temperature through the air passage Calculating in advance the increased air supply amount necessary to process the predicted increase in moisture load in the chamber or in the area where the inter-chamber opening is disposed,
The operation method of the low dew point air conditioning equipment according to claim 1 or 2, wherein the calculated air volume is set in advance as the set increased air volume prior to the operation of the equipment.   4. When closing the room door, the operation of the facility is directly switched from the door opening mode operation to the door closing mode operation after completing the operation of closing the room door. The operation method of the low dew point air conditioning equipment described in 2. As an air supply port for supplying low dew point air fed through the air supply passage, a first air supply port for the low dew point chamber, a second air supply port for the auxiliary chamber, and an arrangement between the chamber openings. While providing a third air inlet for the site,
The low dew point air supplied from the first to third air supply ports finally passes through the auxiliary chamber, and a part or all of the low dew point air is returned to the dehumidifier through the introduction path as the original air. ,
When the room door is in an open state,
In a state where the supply air volume of the low dew point air from each of the first and second air supply ports is maintained at the same air volume as that when the inter-room door is closed, the third air supply port Increasing only the supply air volume of the low dew point air from the supply air volume when the inter-room door is closed,
Alternatively, the first and third air supply ports in a state where the supply air amount of the low dew point air from the second air supply port is maintained at the same air amount as the air supply amount when the inter-room door is closed. Increasing the supply air volume of the low dew point air from each of the above, compared to the supply air volume when the chamber door is in a closed state,
Alternatively, in the state where the supply air volume of the low dew point air from each of the second and third air supply ports is maintained at the same air volume as that when the inter-room door is closed, the first supply air flow is maintained. The operation of the low dew point air-conditioning equipment according to any one of claims 1 to 4, wherein only the supply air volume of low dew point air from the air vent is increased more than the supply air volume when the inter-room door is closed. Method. In the inter-chamber opening that opens the low dew point chamber to the auxiliary chamber, an inter-chamber door that opens and closes the inter-chamber opening is provided,
A dehumidifier that generates low dew point air at a low dew point temperature by dehumidifying the raw air introduced through the introduction path,
An air supply path for supplying the low dew point air generated by the dehumidifier to the low dew point chamber or the arrangement area of the inter-chamber opening is provided,
When the room door is in an open state, compared to when the room door is in a closed state, increase the air volume of the raw air to be dehumidified to the set supply air dew point temperature with the dehumidifier, Low dew point air conditioning equipment provided with a control means for increasing the air volume of the low dew point air to be supplied to the low dew point chamber or the arrangement area of the inter-chamber opening in the state of the set supply air dew point temperature,
Provide a bypass path for circulation connecting the supply path and the introduction path in a short-circuit manner,
The control means includes
When the inter-chamber door is in a closed state, the raw air having a basic introduction air amount introduced through the introduction passage in a state where the circulation bypass passage is closed is dehumidified to a set supply air dew point temperature by the dehumidifier. The closed air mode operation for supplying the low dew point air of the basic supply air volume at the set supply air dew point temperature to the arrangement area of the low dew point chamber or the inter-chamber opening,
When the inter-chamber door is in an opened state, the air volume of the raw air introduced through the introduction path with the circulation bypass path closed is increased by a set increase air volume from the basic introduction air volume during the closed mode operation. The increased raw air is dehumidified to the set supply air dew point temperature by the dehumidifier, and is sent to the low dew point chamber or the opening area of the inter-chamber opening at the set supply air dew point temperature. The door-opening mode operation in which the air volume of the dew point air is increased by the set increase air volume from the basic air supply air volume during the door-closing mode operation,
When the door opening request signal for requesting the opening operation of the room door is received, the transient mode operation is performed as the operation prior to the opening operation of the room door,
In the transient mode operation, the circulation bypass path is opened, and the low dew point air having the same air volume as the set increased air volume among the low dew point air sent from the dehumidifier is circulated through the circulation bypass path. The raw air of the same basic introduction air volume as that in the closed mode operation is introduced through the introduction path, and the dehumidifier removes the mixed air of the basic air of the basic introduction air quantity and the circulating low dew point air having the same air volume as the set increase air volume. In a state where the dehumidification processing is performed, the low dew point air having the same basic air supply amount as that in the closed door mode operation is supplied to the low dew point chamber or the arrangement area of the inter-chamber opening, and
By adjusting the dehumidifying capacity of the dehumidifier, the dew point temperature of the low dew point air sent from the dehumidifier is adjusted to the set supply air dew point temperature,
In the implementation of this transient mode operation, after the dew point temperature of the low dew point air sent from the dehumidifier is stabilized at the set supply air dew point temperature, the circulation bypass is closed and the operation proceeds to the door opening mode operation. The low dew point air conditioner configured to notify that opening of the room door is possible or to automatically open the room door.   After the transition from the transient mode operation to the door opening mode operation, the control means sets the dew point temperature of the low dew point air sent from the dehumidifier for the adjustment of the dehumidifying capacity of the dehumidifier. The low dew point air conditioning system according to claim 6, wherein the low dew point air conditioning system is configured to notify that opening of the room door is possible after the temperature is stabilized or to automatically open the room door. The low dew point during the opening operation of the inter-chamber door with respect to the supply air volume of the low dew point air that is supplied to the low dew point chamber or the arrangement area of the inter-chamber opening at the set dew point temperature through the air passage A storage means is provided for storing in advance an increased supply air volume necessary for processing a predicted increase in moisture load in a room or an area where the inter-chamber opening is disposed, as the set increased air volume,
The low dew point air conditioning system according to claim 6 or 7, wherein the control unit is configured to perform the transient mode operation and the door opening mode operation based on the set increased air volume read from the storage unit. The storage means is configured to store, as the set increase air volume, a plurality of types of the set increase air volumes for each situation condition at the time of opening the room door,
The control means reads from the storage means a set increased air volume that matches the status information given with the door opening request signal among the plurality of types of increased air volumes, and based on the read set increased air volume The low dew point air conditioner according to claim 8, wherein the transient mode operation and the door opening mode operation are performed.   The control means is configured to directly switch the operation of the equipment from the door opening mode operation to the door closing mode operation when receiving a door closing completion signal notifying that the closing operation of the room door has been completed. Item 10. The low dew point air conditioner according to any one of Items 6 to 9. As an air supply port for supplying low dew point air fed through the air supply passage, a first air supply port for the low dew point chamber, a second air supply port for the auxiliary chamber, and an arrangement between the chamber openings. While providing a third air inlet for the site,
The low dew point air supplied from the first to third air supply ports finally passes through the auxiliary chamber, and a part or all of the low dew point air is returned to the dehumidifier through the introduction path as the original air. ,
When the control means is in a state where the room door is opened,
In a state where the supply air volume of the low dew point air from each of the first and second air supply ports is maintained at the same air volume as that when the inter-room door is closed, the third air supply port Increasing only the supply air volume of the low dew point air from the supply air volume when the inter-room door is closed,
Alternatively, the first and third air supply ports in a state where the supply air amount of the low dew point air from the second air supply port is maintained at the same air amount as the air supply amount when the inter-room door is closed. Increasing the supply air volume of the low dew point air from each of the above, compared to the supply air volume when the chamber door is in a closed state,
Alternatively, in the state where the supply air volume of the low dew point air from each of the second and third air supply ports is maintained at the same air volume as that when the inter-room door is closed, the first supply air flow is maintained. The low dew point according to any one of claims 6 to 10, wherein only the supply air volume of low dew point air from the air mouth is configured to be larger than the supply air volume when the inter-room door is closed. Air conditioning equipment.

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