JP2014081244A - Tracking laser device and measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tracking laser device capable of correcting the emitting direction of laser light to a direction toward a tracking target highly accurately in a short time and to provide a measuring device.SOLUTION: A length measuring device 1 includes the tracking laser device allowing the laser light emitted from a laser light source to track a retro reflector 3, picked-up image acquisition means 51 for acquiring a picked-up image around the length measuring device 1, position detection means 52 for detecting an angle adjusting direction from a relative position in a laser emitting direction where the laser light is emitted and in a tracking target direction toward the retro reflector 3 from the length measuring device 1, based on the picked-up image, a rotating mechanism 30 changing the emitting direction of the laser light, and direction control means 54 for controlling the rotating mechanism 30 on the basis of the angle adjusting direction detected by the position detection means 52, to correct the laser emitting direction to the tracking target direction.

Description

  The present invention relates to a tracking laser device and a measuring apparatus equipped with the tracking laser device.

2. Description of the Related Art Conventionally, a tracking type laser apparatus that tracks laser light with respect to a tracking target is known (for example, see Patent Document 1).
The tracking laser interferometer described in Patent Document 1 emits laser light from a light source to a retroreflector provided on a moving body, and returns light reflected by the retroreflector and laser light from the light source. Is interfered with the reference light reflected by the reference surface, and the distance from the tracking laser interferometer to the moving body is measured based on the amount of received interference light.

The tracking laser interferometer of Patent Document 1 includes a change mechanism that changes the emission direction of the laser light emitted from the light source, detects the deviation amount from the received light amount of the return light, and the deviation amount is within a predetermined range. Thus, a change mechanism control means for controlling the change mechanism is provided.
Further, the change mechanism control means performs a process of scanning the laser light along a spiral pattern and searching for the retroreflector when the amount of the return light becomes equal to or less than the threshold value.

JP 2010-190634 A

In the tracking type laser interferometer described in Patent Document 1, when the retroreflector of the moving body is slightly shifted from the emission direction of the laser beam, the retroreflector is efficiently moved by scanning the laser beam in a vortex shape. Can be explored.
However, when the retroreflector of the moving body is far away from the laser light emission direction, the retroreflector may not be found even if the laser light is scanned in a vortex. It is possible to search for a retroreflector by widening the vortex diameter, but in this case, depending on the distance between the laser beam emission direction and the retroreflector, it takes a very long time to search. If there is a problem and the vortex interval is widened to shorten the time, the search accuracy may be lowered and the retroreflector may not be searched.

  An object of the present invention is to provide a tracking type laser apparatus and a measuring apparatus capable of correcting the emission direction of laser light in a direction toward a tracking target with high accuracy in a short time in view of the above problems. And

  The tracking type laser apparatus of the present invention is a tracking type laser apparatus that tracks laser light emitted from a laser light source with respect to a tracking target, and obtains a captured image obtained by imaging the periphery of the tracking type laser apparatus. Based on the captured image acquisition means, based on the captured image, a position detection means for detecting a laser emission direction in which the laser light is emitted and a relative position in a tracking target direction from the tracking laser device toward the tracking target; Direction change means for changing the laser emission direction; and direction control means for controlling the direction change means based on the relative position and correcting the laser emission direction to the tracking target direction. .

In the present invention, based on the captured image around the tracking laser device, the relative position between the laser emission direction of the laser light emitted from the tracking laser beam and the tracking target direction from the tracking laser device toward the tracking target is determined. Based on the detected relative position, the laser emission direction is adjusted to the tracking target direction.
In such a configuration, even when the laser emission direction is away from the tracking target direction and the tracking target is lost, the relative position between the laser emission direction and the tracking target direction can be quickly detected from the pixel position of the captured image. . Therefore, by correcting the laser emission direction toward the tracking target direction with reference to the captured image, for example, as described above, the laser beam is scanned in a vortex shape and compared with a case where the tracking target is searched for. In addition, the laser emission direction can be aligned with the tracking target direction with high accuracy.

The tracking laser apparatus according to the present invention includes an imaging unit that captures a predetermined range of angle of view centered on a predetermined imaging direction, and the captured image acquisition unit acquires a captured image captured by the imaging unit. Is preferred.
In the present invention, an imaging means for capturing a captured image is provided. As the captured image, for example, the positional relationship between the tracking laser device and the tracking target may be captured by an imaging camera or the like provided at a position away from the tracking laser device. Processing such as inputting the positional relationship between the installation position and the tracking laser device to the tracking laser device in advance is required. On the other hand, by adopting a configuration in which an imaging means is provided in the tracking laser device, the positional relationship of the imaging direction with respect to the laser emission direction can be easily detected, and the laser emission direction is adjusted to the tracking target direction. Processing is also easy.

In the tracking type laser apparatus of the present invention, it is preferable that the imaging direction of the imaging unit is the laser emission direction.
In the present invention, the laser emission direction coincides with the imaging direction. That is, the center pixel in the captured image is the laser emission direction. In this case, there is no bias in the searchable range of the tracking target centered on the laser emission direction (center pixel of the captured image), so the laser emission direction can be corrected quickly and accurately regardless of the direction the tracking target moves. can do.

The tracking type laser apparatus according to the present invention includes: an image determination unit that determines whether or not the tracking target exists in the captured image; and the direction when the tracking target is determined not to exist in the image determination unit. It is preferable to include an imaging direction control unit that controls the changing unit to change the imaging direction.
In the present invention, as described above, in the configuration in which the imaging direction of the imaging unit and the laser emission direction substantially coincide with each other, when there is no tracking target in the captured image, the direction changing unit is controlled to change the imaging direction. To search for tracking targets.
In such a configuration, even when a tracking target is not found in the captured image, for example, only the laser light is scanned along the spiral pattern by changing the imaging range of the imaging unit and changing the imaging range sequentially. The tracking target can be searched more efficiently than in the case.

In the tracking type laser apparatus according to the present invention, a plurality of the imaging units are provided, each of the imaging units has a different imaging direction, and the position detection unit is a captured image captured by the plurality of imaging units. It is preferable to detect the relative position based on the above.
In the present invention, a plurality of imaging means having different imaging directions are provided. For this reason, the imaging range imaged by each imaging means is also different. In such a configuration, even when the tracking target is out of the captured image of one imaging unit, the position can be detected if the tracking target moves within the imaging range of the other imaging unit, and the laser emission direction Can be corrected.

In the tracking type laser apparatus of the present invention, the plurality of imaging units may be arranged so that all directions around the tracking type laser apparatus can be imaged by an imaging range of each imaging unit. preferable.
In the present invention, the plurality of imaging means as described above are set toward all directions of the tracking type laser apparatus. For this reason, even if the tracking target moves to any position, the position can be specified from any one of the plurality of imaging means, and the laser emission direction can be corrected quickly and accurately. it can.

In the tracking type laser apparatus of the present invention, it is preferable that the imaging unit has a fisheye lens and images the range of view angle through the fisheye lens.
In the present invention, a fisheye lens is mounted on the imaging means. For this reason, the field angle which can be imaged can be further widened, and the movement destination of the tracking target can be detected from a wider imaging range. In addition, as described above, even when a plurality of imaging means are used, the range that can be imaged by one imaging means is widened, so the number of imaging means can be reduced, and the apparatus configuration can be simplified and the cost can be reduced. .

In the tracking laser apparatus of the present invention, it is preferable that the imaging unit includes a wireless transmission unit that transmits the captured image by a wireless signal, and the captured image acquisition unit includes a wireless reception unit that receives the wireless signal. .
In the present invention, the captured image is transmitted to the captured image acquisition means by wireless communication. In this case, it is not necessary to carry out wired connection such as a cable line for the image pickup means, and when the laser emission direction is controlled, it is possible to avoid malfunction due to tangling of the wiring.

  In the tracking laser apparatus of the present invention, the tracking target includes a retroreflector that reflects the laser light, and the tracking laser apparatus receives return light that is the laser light reflected by the retroreflector. And a light receiving unit that outputs a light reception signal corresponding to the amount of received light and the amount of deviation of the return light, and the direction control unit corrects the laser emission direction based on the relative position, and then the amount of deviation is predetermined. It is preferable to control the direction changing means so as to be within a range.

  In the present invention, after correcting the laser emission direction to the tracking target direction based on the captured image, the laser emission direction is further corrected based on the amount of return light from the retroreflector to be tracked. The retroreflector may not be properly positioned ahead of the laser emission direction only from the pixel position of the captured image, and the amount of received return light suitable for various processing such as length measurement can be obtained. It is possible that this is not the case. In contrast, the present invention corrects the laser emission direction based on the amount of received return light after correcting the laser emission direction based on the captured image as described above. Thereby, the laser emission direction can be adjusted to the tracking target direction with higher accuracy. Further, in this case, since the laser emission direction is emitted toward the tracking target retroreflector based on the captured image, the laser emission direction and the tracking target direction substantially coincide with each other. The search for the retroreflector does not require an enormous amount of time, and the laser emission direction can be quickly corrected to a suitable direction.

The tracking type laser apparatus according to the present invention includes first determination means for determining whether or not the amount of received light is equal to or less than a predetermined first threshold; and the amount of received light is equal to or less than a predetermined second threshold greater than or equal to the first threshold Second direction determining means for determining whether or not there is, and the direction control means corrects the laser emission direction based on the relative position, and then the received light amount is set to the first level by the first determination means. When it is determined that the value is equal to or less than the threshold value, the direction changing unit is controlled to move the laser emission direction in a vortex shape. During the movement, the second determination unit causes the received light amount to be larger than the second threshold value. When it is determined that the difference has occurred, it is preferable to control the direction changing means so that the deviation amount falls within a predetermined range.
In the present invention, as described above, after correcting the laser emission direction to the tracking target direction based on the captured image, the laser beam is scanned along the spiral pattern to search for the retroreflector. In this case, it is possible to efficiently scan from the position near the center to the position far from the current laser emission direction, and it is possible to quickly search for the retroreflector.

The tracking laser device of the present invention includes an image determination unit that determines whether or not the tracking target exists in the captured image, and the tracking laser device detects a tracking light source from a laser light source when the tracking target cannot be found. It is preferable to stop the emission of laser light.
In the present invention, as described above, when the tracking target is not found even when the imaging direction is changed in a plurality of directions, or when the tracking target is not found even using a plurality of captured images, laser light is emitted. To stop the tracking of the laser beam. Thereby, power saving can be achieved.

The measuring apparatus of the present invention includes the tracking type laser apparatus as described above, a light dividing unit that divides a part of the laser beam as a reference light, and the laser reflected by a retroreflector provided on the tracking target. Based on the length measurement signal, light receiving means for length measurement that receives interference light between the return light that is light and the reference light, and outputs a length measurement signal corresponding to the amount of received light and the amount of displacement of the retroreflector And a length measuring means for calculating a distance from a predetermined reference point to the retroreflector.
In the present invention, the tracking laser device as described above can quickly adjust the laser emission direction to the tracking target direction based on the captured image even when the tracking target is separated from the tracking target and cannot be tracked. Can do. Therefore, after losing sight of the tracking target, it is possible to shorten the time for searching for the tracking target, and it is also possible to shorten the time for the length measurement process in the measuring apparatus.

The block diagram which shows schematic structure of the length measuring apparatus of 1st embodiment which concerns on this invention. It is a figure which shows typically the optical system of the interferometer of 1st embodiment, and is a figure which shows the state which the measurement light reached | attained the center position of a retroreflector. It is a figure which shows typically the optical system of the interferometer of 1st embodiment, and the figure which shows the state from which the measurement light shifted | deviated from the center position of a retroreflector. The flowchart which shows the correction method of the laser emission direction in 1st embodiment. The figure which shows an example of the positional relationship of a length measuring apparatus and a retroreflector when a retroreflector does not exist in the imaging range of an imaging camera in 1st embodiment. The figure which shows the state by which the rotation mechanism was driven and the retroreflector was searched in 1st embodiment. The figure which shows an example of the captured image by which the retroreflection body was imaged in 1st embodiment. The figure which shows the picked-up image in the state in which the laser emission direction and the tracking object direction corresponded in 1st embodiment. The block diagram which shows schematic structure of the length measuring apparatus of 2nd embodiment. The figure which shows an example of the pattern produced | generated by the pattern production | generation means in 2nd embodiment. The figure which shows the other example of the pattern produced | generated by the pattern production | generation means in 2nd embodiment. The figure which shows the positional relationship of an interferometer and an imaging camera in the length measuring apparatus of 3rd embodiment. The figure which shows an example of the captured image imaged with each imaging camera in 3rd embodiment.

[First embodiment]
Next, the tracking type laser interference length measuring apparatus according to the first embodiment of the present invention will be described with reference to the drawings.
[Configuration of tracking laser interferometer]
FIG. 1 is a block diagram showing a schematic configuration of a tracking type laser interference length measuring device (hereinafter sometimes referred to as a length measuring device) according to the first embodiment of the present invention.
In FIG. 1, a length measuring device 1 constitutes a measuring device and a tracking laser device of the present invention.
As shown in FIG. 1, the length measuring device 1 includes a retroreflector 3, an interferometer 10, an imaging camera 20, a rotating mechanism 30, and a control device 40.
And this length measuring device 1 inject | emits a laser beam, and tracks the retroreflection body 3 (tracking object in this embodiment) of the mobile body 2 with the said laser beam. Then, based on the laser light (returned light) reflected by the retroreflector 3, the distance from the reference point C (described later) to the retroreflector 3 is measured.

[Configuration of retroreflector]
The retroreflector 3 is configured by a retro reflector, a cat's eye, or the like, and reflects incident light along the incident direction.
More specifically, the retroreflector 3 reflects the incident light so that the incident light and the reflected light are parallel, and the incident light and the reflected light are point-symmetric with respect to the center of the retroreflector 3. . Therefore, when light is incident at a position away from the center of the retroreflector 3, the incident light and the reflected light are shifted.
The retroreflector 3 is attached to the moving body 2 as shown in FIG.

[Configuration of interferometer]
2 and 3 are diagrams schematically showing the optical system of the interferometer 10, and FIG. 2 shows a state in which the laser light (measurement light) emitted in the laser emission direction has reached the center position of the retroreflector. FIG. 3 is a diagram showing a state in which laser light (measurement light) is deviated from the center position of the retroreflector.
As shown in FIGS. 1 to 3, the interferometer 10 includes a length measurement optical system 11 for measuring the distance to the retroreflector 3 and a tracking optical system 12 for tracking the retroreflector 3. .
The configuration of each optical system 11, 12 is well known and will be described briefly.

As shown in FIG. 2 or 3, the length measuring optical system 11 includes a laser light source 111, a splitter 112 (light splitting means in the present invention), and a first light receiving means 113 (in the present invention) having a PD (Photo Detector). Measuring light receiving means) and a plane mirror 114.
As shown in FIG. 2 or FIG. 3, the tracking optical system 12 includes a second light receiving means 122 (as a shift amount detecting means having a splitter 121 and a four-division PD (Photo Diode) or a two-dimensional PSD (Position Sensitive Detector). Light receiving means) according to the present invention.

In such an interferometer 10, the laser light emitted from the laser light source 111 is split into reference light for reference and measurement light by the splitter 112. The reference light is reflected by the plane mirror 114 and then reflected by the splitter 112 toward the first light receiving means 113.
On the other hand, after passing through the splitter 121, the measurement light is emitted toward the retroreflector 3, reflected by the retroreflector 3, becomes return light, and then enters the interferometer 10 again. At this time, since the retroreflector 3 is moved, when the measurement light is incident on a position separated from the center of the retroreflector 3 (FIG. 3), the measurement light is shifted from the incident direction. Therefore, the measurement light and the return light are shifted from each other.

  A part of the return light incident on the interferometer 10 is reflected by the splitter 121 and received by the second light receiving means 122. At this time, the return light is incident with a deviation from the center of the light receiving surface of the second light receiving means 122 (4-division PD) according to the amount of deviation. The second light receiving means 122 has a light receiving surface that is divided into four parts in the vertical and horizontal directions, and outputs four light reception signals corresponding to the amount of return light incident on each divided surface to the control device 40. That is, the second light receiving unit 122 outputs a second light reception signal corresponding to the return light shift amount and the light reception amount.

On the other hand, when the amount of deviation is within a predetermined threshold, the remaining return light that has passed through the splitter 121 becomes interference light with the reference light that has passed through the splitter 112 and then is reflected by the plane mirror, and is the first light receiving light. The light is received by the means 113. The first light receiving means 113 that has received the interference light between the return light and the reference light outputs a first light reception signal corresponding to the displacement of the distance between the interferometer 10 and the retroreflector 3 and the amount of received light to the control device 40.
In the length measuring device 1 of the present embodiment, the laser light is tracked with respect to the retroreflector 3 so that the deviation amount is kept within the threshold value, and the state in which the interference light is observed by the first light receiving unit 113 is maintained. To do.

[Configuration of imaging camera]
The imaging camera 20 is an imaging unit in the present invention, and is attached to the interferometer 10 to capture an emission direction of laser light (measurement light) of the interferometer 10, that is, a laser emission direction.
Specifically, the imaging camera 20 includes an imaging optical system including an imaging lens 21, an imaging unit 22 that captures an image transmitted through the imaging optical system, and a signal output unit 23.
The imaging lens 21 guides an image within a predetermined field angle range to the imaging unit 22 with the optical axis as a central axis. The imaging lens 21 is preferably composed of a fish-eye lens, whereby the angle of view can be expanded to 180 degrees or more, and a wider area can be imaged.
Further, the optical axis of the imaging lens 21 is the imaging direction of the present invention, and in this embodiment, the imaging direction substantially coincides with the laser emission direction.
The imaging unit 22 is configured by an image sensor such as a CCD (Charge Coupled Device Image Sensor) or a CMOS (Complementary Metal Oxide Semiconductor), and captures an image guided by the imaging optical system, and an image signal based on the captured image. Is output.
The signal output unit 23 is a wireless transmission unit of the present invention, and transmits the image signal input from the imaging unit 22 to the control device 40 as a wireless signal.

[Configuration of rotating mechanism]
The rotation mechanism 30 is a mechanism that changes the emission direction (laser emission direction) of the measurement light from the interferometer 10 under the control of the control device 40, and constitutes the direction changing means of the present invention.
As shown in FIG. 1, the rotating mechanism 30 includes a first rotating mechanism 31 that changes the azimuth angle θa of the measuring light and a second rotating mechanism 32 that changes the elevation angle θe of the measuring light.
Note that the point at which the rotation axes of the rotation mechanisms 31 and 32 intersect becomes a fixed point even when the rotation mechanism 30 is driven, and becomes the reference point C (FIG. 1) in the present invention.

[Configuration of control device]
As illustrated in FIG. 1, the control device 40 includes a signal reception unit 41 that is a wireless reception unit, and receives an image signal (wireless signal) transmitted from the signal output unit 23 of the imaging camera 20.
The control device 40 includes a calculation unit 42 configured by a CPU (Central Processing Unit) or the like, and a storage unit 43 configured by a memory or the like, and controls the entire length measuring device 1.
And the calculating part 42 of this control apparatus 40 reads the program memorize | stored in the memory | storage part 43, and as shown in FIG. 1, the captured image acquisition means 51, the position detection means 52, and the distance calculation means 53 are shown. And function as direction control means 54.

The captured image acquisition unit 51 controls the imaging camera 20 to transmit a captured image from the imaging camera 20 and cause the signal reception unit 41 to receive an image signal (wireless signal). That is, the captured image acquisition unit 51 acquires a captured image transmitted from the imaging camera 20.
The position detection unit 52 also functions as an image determination unit of the present invention, and determines whether or not the retroreflector 3 of the moving body 2 exists in the captured image. Further, when the retroreflector 3 is present in the captured image, the position detection unit 52 detects the pixel position of the retroreflector 3 in the captured image. Furthermore, the position detection unit 52 corrects the laser emission direction (angle adjustment) based on the pixel position (for example, the center pixel) corresponding to the laser emission direction in the captured image and the pixel position of the retroreflector 3 in the captured image. Direction).
The distance calculation unit 53 calculates the distance from the reference point C to the retroreflector 3 using the first light reception signal output from the first light reception unit 113.

The direction control unit 54 includes a first direction control unit 541, a state determination unit 542, a deviation determination unit 543, and a second direction control unit 544, and also functions as an imaging direction control unit in the present invention.
The first direction control unit 541 adjusts the attitude of the rotation mechanism 30 based on the angle adjustment amount calculated by the position detection unit 52.

The state determination unit 542 is in a tracking state in which the laser light (measurement light) emitted from the interferometer 10 is tracking the retroreflector 3 or slightly deviated from the retroreflector 3, but the return light Based on the above, it is determined whether the tracking state can be corrected (trackable state), or there is no return light from the retroreflector 3 and tracking is impossible (tracking impossible state).
That is, when the return light is received by the second light receiving unit 122, the state determination unit 542 determines that the tracking state or the tracking is possible, and when the return light is not received by the second light receiving unit 122, tracking is impossible. It is determined that it is in a state.
The state determination unit 542 determines each state based on the second light reception signal output from the second light reception unit 122, for example. Each state may be determined based on whether or not the laser emission direction matches the tracking target direction based on a captured image captured by the imaging camera 20.

  Based on the light reception signals output from the light receiving units 113 and 122, the deviation determination unit 543 determines the amount of light received by the light receiving units 113 and 122 (that is, the signal level of the light reception signal) to each of the light receiving units 113 and 122. On the other hand, it is determined whether or not each is below a predetermined first threshold (first level) set. Thereby, the deviation determination unit 543 can determine whether the laser light is in a tracking state or in a tracking impossible state.

  The second direction control unit 544 is determined to be in the tracking state or the tracking possible state by the state determination unit 542, and the light reception amount of each of the light receiving units 113 and 122 is determined to be less than or equal to the first threshold by the deviation determination unit 543. In this case (when it is determined that the tracking is possible), the rotation mechanism 30 is controlled so that the amount of received light is larger than the first threshold value. Specifically, the second direction control unit 544 includes the distance from the reference point C calculated by the distance calculation unit 53 to the retroreflector 3 and the second light reception signal (return light) from the second light reception unit 122. The angle adjustment amount of the rotation mechanism 30 is calculated based on the deviation amount), and the rotation mechanism 30 is controlled to track the retroreflector 3 (the measurement light can be emitted to the center of the retroreflector 3). To change the attitude of the interferometer 10).

[Retroreflector tracking method in length measuring device]
Next, processing when the length measuring device 1 loses sight of the retroreflector 3 when measuring the distance from the reference point C to the retroreflector 3 will be described below.
In the length measuring device 1 of the present embodiment, the state determination unit 542 determines the tracking state, the tracking enabled state, and the tracking impossible state.
Here, when it is determined that the tracking state is established, the distance calculation unit 53 calculates the distance from the reference point C to the retroreflector 3 based on the first reception signal from the first light receiving unit 113.
Also, when it is determined that tracking is possible, return light is detected, but because it is deviated from the measurement light, interference light between the return light and the reference light cannot be obtained. Then, the laser emission direction is adjusted by the second direction control means 54 so that the tracking state is possible.
Specifically, the deviation determination unit 543 determines whether the signal level of the second light reception signal with respect to the center of the light receiving surface of the second light receiving unit 122 is equal to or higher than a predetermined first threshold value. When it is determined that the signal level is equal to or lower than the first threshold, the second direction control unit 544 detects a light receiving point where the return light on the light receiving surface is received based on the second received signal, and receives the light receiving point. The angle adjustment amount is calculated on the basis of the position, and the rotation mechanism 30 is controlled based on the angle adjustment amount. As a result, the rotation mechanism 30 is controlled so as to maintain the tracking state, and the distance calculation process based on the first light reception signal by the distance calculation means 53 becomes possible.

On the other hand, when the state determination unit 542 determines that the tracking is impossible, the length measuring device 1 performs the following process.
FIG. 4 is a flowchart showing a method of detecting the retroreflector 3 and correcting the laser emission direction when it is determined that tracking is impossible in this embodiment.
When the state determination unit 542 determines that the tracking is impossible, the control device 40 of the length measuring apparatus 1 causes the imaging camera 20 to capture a captured image. Thereby, the image signal of the captured image is transmitted as a radio signal from the signal output unit 23 to the signal reception unit 41 of the control unit, and the captured image acquisition unit 51 acquires the captured image received by the signal reception unit 41 (step). S1).

  Next, the position detection means 52 analyzes the acquired captured image and determines whether or not the retroreflector 3 is present in the captured image (step S2). That is, the position detection unit 52 determines whether or not a captured image obtained by capturing the retroreflector 3 has been acquired.

When it is determined in step S2 that the retroreflector 3 is not present in the captured image, the first direction control unit 541 searches for the retroreflector 3 by changing the imaging direction (step S3). .
FIG. 5 is a diagram illustrating an example of a positional relationship between the length measuring device 1 and the retroreflector 3 when the retroreflector 3 does not exist within the imaging range of the imaging camera 20. FIG. 6 is a diagram illustrating a state in which the retroreflector 3 is searched by controlling the rotation mechanism 30.
The imaging camera 20 acquires a range of a predetermined angle of view θg centered on the imaging direction as a captured image. Therefore, as shown in FIG. 5, when there is no retroreflector 3 within the range of the angle of view θg, the retroreflector 3 is not reflected in the captured image.
In step S3, the first direction control unit 541 controls the first rotation mechanism 31 to rotate the azimuth angle θa of the measurement light by, for example, 360 degrees, and the position detection unit 52 captures the retroreflector 3 during this time. It is determined whether a captured image has been acquired. Here, when the captured image obtained by capturing the retroreflector 3 is not acquired, the first direction control unit 541 further controls the second rotation mechanism 32 to set the elevation angle θe of the measurement light to a predetermined amount ( For example, the azimuth angle θa of the measurement light is rotated again by 360 degrees, for example, and a captured image in which the retroreflector 3 is captured by the position detection unit 52 is acquired during this time. It is determined whether or not.
In this way, the imaging direction is sequentially changed with respect to all the surrounding directions of the length measuring device 1, and it is determined whether or not a captured image obtained by imaging the retroreflector 3 has been acquired.
When the position detection unit 52 determines that a captured image obtained by capturing the retroreflector 3 has been acquired, the driving of the rotating mechanism 30 is stopped in that state. Thereby, as shown in FIG. 6, the posture of the imaging camera 20 is changed so that the retroreflector 3 is positioned within the imaging range of the imaging camera 20.

Next, the position detection means 52 determines whether or not a captured image obtained by capturing the retroreflector 3 is acquired in step S3, that is, whether or not the search for the retroreflector 3 is successful (step S4). . In this step S4, when a captured image obtained by imaging the retroreflector 3 is not obtained (when the search for the retroreflector 3 fails), an error signal is output and the length measuring process in the length measuring device 1 is performed. Discontinue.
On the other hand, when the orientation of the imaging camera 20 is changed as shown in FIG. 6 in step S4 and a captured image obtained by imaging the retroreflector 3 is acquired, and when “Yes” is determined in step S2, The position detection unit 52 detects the tracking target direction based on the acquired captured image (step S5).

FIG. 7 is a diagram illustrating an example of a captured image in which the retroreflector 3 is captured. FIG. 8 is a diagram illustrating a captured image in a state where the laser emission direction matches the tracking target direction.
In the present embodiment, the imaging direction is substantially coincident with the laser emission direction, and an image in a range of a predetermined angle of view θg centered on the imaging direction is captured as a captured image. Therefore, the center pixel O of the captured image substantially coincides with the laser emission direction. Further, the pixel P of the retroreflector 3 in the captured image indicates a direction from the length measuring device 1 toward the moving body 2, and is a tracking target direction in the present invention. That is, in step S5, the position detection unit 52 analyzes the captured image and detects the pixel P of the retroreflector 3 as the tracking target direction.

Next, the position detection unit 52 obtains an angle adjustment direction for aligning the laser emission direction with the tracking target direction (step S6).
As described above, when the pixel P of the retroreflector 3 is detected in the captured image, the direction from the pixel O toward the pixel P (arrow Y1) is the angle adjustment direction for correcting the laser emission direction to the tracking target direction. It becomes.
Thereafter, the first direction control means 541 controls the rotation mechanism 30 to move the laser emission direction in the angle adjustment direction obtained in step S6 (step S7).
Thereafter, the state determination unit 542 determines whether or not the tracking impossible state is changed to the tracking possible state or the tracking state based on the second light reception signal of the second light receiving unit 122 (step S8).

In step S8, when there is no state change (when it is determined No), it is considered that the laser irradiation direction and the tracking target direction are deviated, and the process returns to step S1 again. That is, the adjustment of the laser emission direction is continued while referring to the captured image.
On the other hand, when it is determined in step S8 that the state determination unit 542 has switched to the tracking state or the tracking possible state (when determined to be Yes), a captured image as illustrated in FIG. 8 is captured. The laser emission direction matches the tracking target direction. In this case, the direction control unit 54 ends the control of the rotation mechanism 30 by the first direction control unit 541, and thereafter, the tracking process by the second direction control unit 544 as described above in the tracking state and the tracking possible state is performed. To be implemented. If the state determination unit 542 determines again that the tracking is impossible, the processes of steps S1 to S8 are performed.

[Operational effects of the first embodiment]
In the present embodiment, the captured image acquisition unit 51 acquires a captured image around the length measuring device 1, and the position detection unit 52 emits the pixel P from the retroreflector 3 in the captured image and the interferometer 10. The relative position between the laser emission direction and the tracking target direction and the angle adjustment direction are detected from the pixel O corresponding to the laser emission direction of the measurement light to be measured. Then, the first direction control means 541 moves the laser emission direction in the angle adjustment direction so that the pixel P coincides with the pixel O.
For this reason, in this embodiment, it is not necessary for the measurer to manually adjust the attitude of the interferometer 10, and the laser emission direction can be easily adjusted to the tracking target direction. In addition, since the angle adjustment direction for adjusting the laser emission direction can be detected based on the captured image, for example, the laser emission direction can be tracked quickly and accurately compared to a configuration in which the laser emission direction is moved in a vortex. Can be adjusted to the target direction.

In the present embodiment, the length measuring device 1 is provided with an imaging camera 20.
In the case where an imaging unit that captures a captured image around the length measuring device 1 is separately provided, a configuration for separately detecting the current laser emission direction in the captured image captured by the imaging unit is necessary, and the imaging unit Processing such as inputting the positional relationship between the imaging direction and the length measuring device 1 to the control device 40 in advance is also necessary. On the other hand, in this embodiment, since the imaging camera 20 is provided at the predetermined position of the length measuring device 1 as described above, the laser emission direction in the captured image can be easily detected, and the configuration can be simplified.

In the present embodiment, the laser emission direction and the imaging direction are substantially the same. Therefore, the angle adjustment direction can be easily detected by setting a predetermined pixel (center pixel O) in the captured image as the laser emission direction.
In addition, when the laser emission direction is the center pixel O in the captured image, the searchable range of the retroreflector 3 is not biased, and the laser emission direction is quick and accurate regardless of the direction in which the retroreflector 3 moves. Can be corrected.

In the present embodiment, when the retroreflector 3 is not present in the captured image, the first direction control unit 541 controls the rotation mechanism 30 to scan the imaging direction of the imaging camera 20 (substantially coincides with the laser emission direction). Then, the retroreflector 3 is searched.
For this reason, even when there is no retroreflector 3 within the angle of view of the imaging camera 20, the retroreflector 3 can be searched. Even in this case, the imaging camera 20 can acquire a captured image in which the range of the predetermined angle of view θg is an imaging region. Therefore, for example, a linear laser beam (measurement light) is scanned along a spiral pattern to make a retroreflector The retroreflector 3 can be searched efficiently as compared with the configuration for searching 3.

  The imaging camera 20 of the present embodiment preferably uses a fisheye lens as the imaging lens 21. In this case, a wider angle of view can be set in the imaging range via the fisheye lens, and the retroreflector 3 can be found efficiently even when the moving body 2 moves greatly.

The length measuring device 1 of the present embodiment transmits an image signal based on the captured image as a radio signal from the signal output unit 23 of the imaging camera 20 to the signal receiving unit 41 of the control device 40.
Therefore, wiring for transmitting the captured image around the imaging camera 20 is not necessary, and even when the rotation mechanism 30 is driven to rotate the interferometer 10 and the imaging camera 20, there is no inconvenience such as entanglement of wiring. This can also prevent malfunctions.

  In the present embodiment, if the retroreflector 3 cannot be searched when the imaging direction of the imaging camera 20 is changed in step S3, the length measurement process is terminated. That is, the output of the laser beam is stopped. Thereby, useless length measurement processing can be avoided and power saving can be achieved.

  In the present embodiment, the tracking state or the tracking enabled state is achieved by correcting the laser emission direction based on the captured image by the processing of step S1 to step S8. If the tracking is possible, the second direction control unit 544 further detects the return light shift amount based on the second light reception signal output from the second light reception unit 122, and the shift amount is predetermined. Correct the laser beam emission direction so that it is within the range. Thereby, the tracking state is changed to the tracking state, and the distance from the reference point C to the retroreflector 3 can be appropriately calculated based on the interference light between the return light and the reference light.

[Second Embodiment]
In the first embodiment, the example in which the laser emission direction is matched with the tracking target direction based on the captured image and the state is changed from the tracking impossible state to the tracking possible state or the tracking state is shown. On the other hand, in the second embodiment, based on the captured image, the laser emission direction is moved to the vicinity of the tracking target direction, and then the laser emission direction is moved in a predetermined pattern to search for a retroreflector. This is different from the first embodiment described above.

FIG. 9 is a block diagram showing a schematic configuration of the length measuring device 1A in the second embodiment. In the following description of the embodiments, the same reference numerals are given to the configurations that have already been described, and the description thereof will be omitted or simplified.
As shown in FIG. 9, the control device 40 of the length measuring device 1 </ b> A according to the present embodiment further includes a pattern generation unit 545, a pattern scanning control unit 546, and a received light amount determination unit 547 as the direction control unit 54.

  After the laser emission direction is moved to the vicinity of the tracking target direction by the first direction control unit 541, the pattern generation unit 545 has at least one of the received light amounts of the light receiving units 113 and 122 determined by the deviation determination unit 543. When it is determined that the value is equal to or less than one threshold value, a spiral pattern is generated as the planned emission path of the measurement light.

FIG. 10 is a diagram illustrating an example of a pattern generated by the pattern generation unit 545.
When the deviation determination unit 543 determines that at least one of the amounts of light received by the light receiving units 113 and 122 is equal to or less than the first threshold, the pattern generation unit 545 first outputs the laser emission direction (azimuth angle θa and elevation angle θe). Above, a reference point only by a predetermined distance R (for example, the distance to the retroreflector 3 calculated by the distance calculating unit 53 immediately before the light receiving amount is determined to be less than or equal to the first threshold by the deviation determining unit 543). Point Q is set at a position away from C.

  Then, the pattern generation unit 545 changes the azimuth angle θa in the laser emission direction by taking the X axis so as to be parallel to the rotation axis of the second rotation mechanism 32 for changing the elevation angle θe and passing through the point Q. The XY plane is set by taking the Y axis so as to be parallel to the rotation axis of the first rotation mechanism 31 and pass through the point Q.

  Next, as shown in FIG. 10, the pattern generation unit 545 sets the spot coordinates S (x, y) of the measurement light to (x (t), y (t)) = (r (t ) cosθ (t), r (t) sinθ (t)). That is, the pattern generation unit 545 generates an Archimedean vortex pattern that is represented by the locus of the point S and is a curve and has a constant width f between each circumference as the expected emission locus of the measurement light. Note that r (t) represents the distance from the point Q to the point S, and θ (t) represents the angle formed by the line segment PQ and the X axis. Both r (t) and θ (t) are functions that increase monotonically with time.

  Note that the pattern generated by the pattern generation unit 545 is not limited to the vortex shape formed by a curve as shown in FIG. 10, for example, a vortex shape formed by a straight line as shown in FIG. 11. Also good.

The pattern scanning control unit 546 searches the retroreflector 3 while controlling the rotation mechanism 30 and scanning the measurement light along the pattern generated as described above.
The received light amount determining means 547 controls the rotation mechanism 30 by the pattern scanning control means 546, and while the measurement light is emitted along the spiral pattern, the received light amounts of the respective light receiving means 113 and 122 are changed to the respective light receiving means 113. , 122 are determined to be equal to or greater than a predetermined second threshold value. Note that the second threshold value may be set to a value equal to the first threshold value, or may be set to a value larger than the first threshold value.

[Retroreflector Tracking Method in Length Measuring Device of Second Embodiment]
In the length measuring apparatus 1A of the present embodiment, in step S7 of the retroreflector tracking method in the first embodiment, the first direction control means 541 moves the laser emission direction to a position near the tracking target direction based on the captured image. Move. That is, the first direction control unit 541 refers to the captured image, and the distance between the pixel O indicating the laser emission direction in the captured image and the pixel P indicating the position of the retroreflector 3 is equal to or less than a predetermined number of pixels. Thus, the rotation mechanism 30 is driven.
Thereafter, the pattern generation unit 545 generates a pattern, and the pattern scanning control unit 546 controls the rotation mechanism 30 based on the generated pattern.
While the pattern scanning by the pattern scanning control unit 546 is being performed, the received light amount determination unit 547 monitors the received light amount of each of the light receiving units 113 and 123, and when the received light amount becomes equal to or greater than a predetermined second threshold value. Thus, the pattern scanning by the pattern scanning control means 546 is stopped.

[Operational effects of the second embodiment]
In the present embodiment, the direction control unit 54 moves the laser emission direction to the vicinity of the tracking target direction by the first direction control unit 541 and then uses the pattern scanning control unit 546 according to the pattern generated by the pattern generation unit 545. The laser emission direction is displaced, and when the received light amount determination means 547 determines that the received light amount is greater than or equal to the second threshold value, the movement in the laser emission direction is stopped.
In the first embodiment described above, the laser emission direction is adjusted to the tracking target direction based on the captured image. However, the laser irradiation direction and the center pixel O do not match due to the lens aberration of the imaging optical system. There is also. Here, if there is the retroreflector 3 in the laser irradiation direction and the return light can be detected, the laser irradiation direction can be corrected based on the deviation amount of the return light. However, when the return light cannot be detected, the length measurement process cannot be performed. On the other hand, in the present embodiment, as described above, after correcting the laser emission direction based on the captured image, the emission position of the measurement light is accurately set to the center position of the retroreflector 3 based on the spiral pattern. Can be matched. Thereby, the laser irradiation direction can be corrected with higher accuracy, and the measurement light can be tracked by the retroreflector 3.
Further, in this embodiment, since the laser emission direction is moved to the vicinity of the tracking target direction based on the captured image, even when searching for the retroreflector 3 using a spiral pattern, the laser emission direction is set to a minute amount. It is possible to search the retroreflector 3 easily and quickly by only moving.

[Third embodiment]
In the first embodiment, an example is shown in which one imaging camera 20 is used and the retroreflector 3 is searched based on one captured image captured by the imaging camera 20. On the other hand, the third embodiment is different from the first embodiment in that a plurality of imaging cameras 20 are used.
That is, in the first embodiment, when the retroreflector 3 is not present in the captured image, the retroreflector 3 is searched by sequentially changing the imaging direction of the imaging camera 20 to switch the imaging range. Even in this case, since the imaging range of the imaging camera 20 is larger than the laser diameter of the measurement light, the search is performed in comparison with the conventional case where the retroreflector 3 is searched by scanning the measurement light along a predetermined pattern. Although the time can be shortened, depending on the position of the retroreflector 3, it can be considered that the search time becomes longer until the position where the retroreflector 3 is imaged is detected.
In contrast, in the present embodiment, by using a plurality of imaging cameras 20, a range acquired as a captured image is widened, and a more efficient search for the retroreflector 3 can be performed.

FIG. 12 is a diagram illustrating a positional relationship between the interferometer 10 and the imaging camera 20 in the length measuring device 1B of the present embodiment.
In the present embodiment, as shown in FIG. 12, a plurality of imaging cameras 20 are provided for the interferometer 10. Specifically, the imaging camera 20 (20A, 20B, 20C, 20D) is fixed to the interferometer 10 so that almost all directions around the length measuring device 1B are within the imaging range by a plurality of captured images.
In the example shown in FIG. 12, an example in which four imaging cameras 20 are installed around the rotation axis of the first rotating mechanism 31 at intervals of 90 degrees is shown. However, five or more imaging cameras are arranged at smaller angular intervals. 20 may be configured, and may be set as appropriate depending on the imaging range (view angle θg) of each imaging camera 20.
In the example shown in FIG. 12, a plurality of imaging cameras 20 are provided around the rotation axis (azimuth angle direction) of the first rotation mechanism 31, but a configuration in which a plurality of imaging cameras 20 are also installed in the elevation angle direction is also possible. Good. For example, it is good also as a structure provided with the imaging camera 20 which made the imaging direction the direction (rotation axis direction of the 1st rotation mechanism 31) orthogonal to the paper surface in FIG.

FIG. 13 is a diagram illustrating a state in which the captured images captured by the imaging cameras 20 illustrated in FIG. 12 are joined together.
The captured image acquisition unit 51 of the length measuring device 1B acquires captured images acquired by the plurality of imaging cameras 20, and the position detection unit 52 determines the tracking target direction and the angle adjustment direction based on these captured images. To detect.
That is, as shown in FIG. 13, the position detection unit 52 is a captured image of the imaging camera 20A among the captured images Ga, Gb, Gc, and Gd captured by the imaging cameras 20 (20A, 20B, 20C, and 20D). The angle adjustment direction is detected using the Ga central pixel O as the laser emission direction.
Here, when the image obtained by capturing the retroreflector 3 is the captured image Ga including the pixel O indicating the laser emission direction, the angle adjustment direction is based on the captured image Ga as in the first embodiment. Is detected.

On the other hand, when the retroreflector 3 is captured in other captured images Gb, Gc, Gd, the captured images Ga, Gb, Gc, Gd are connected according to the sequence of the imaging camera 20 as shown in FIG. . The position detection unit 52 then moves from the pixel O to the pixel P based on the pixel O indicating the laser emission direction in the joined image and the pixel P indicating the position of the retroreflector 3 (arrow Y2). Is detected as the angle adjustment direction.
Then, the first direction control unit 541 controls the rotation mechanism 30 so that the laser emission direction moves along the arrow Y2.

In the present embodiment, as shown in FIG. 12, since each imaging camera 20 is installed so that the imaging range of each imaging camera 20 is substantially adjacent, each captured image is displayed as described above. The angle adjustment direction can be detected based on the joined images.
On the other hand, when there is a gap (non-imaging area) between the imageable ranges of the respective imaging cameras 20, the position detection unit 52 tentatively determines the size of the non-imaging area between the respective captured images. The direction from the pixel O to the pixel P may be detected after setting the area.
Alternatively, the angle adjustment direction may be calculated based on the angle in the imaging direction of each imaging camera 20 and the pixel P corresponding to the retroreflector 3 in the captured image obtained by imaging the retroreflector 3.

  Alternatively, the first direction control unit 541 may first correct the imaging direction of the imaging camera 20A and then detect the angle adjustment direction based on the captured image Ga of the imaging camera 20A. For example, referring to the examples of FIGS. 12 and 13, when the captured image Gc obtained by imaging the retroreflector 3 is detected by the position detection unit 52, the first direction control unit 541 first moves the rotation mechanism 30. By controlling, the imaging direction of the imaging camera 20A is moved in the imaging direction (the imaging direction of the imaging camera 20C) in which the captured image Gc is captured. Thereafter, the position detection unit 52 corrects the laser emission direction by the same process as in the first embodiment, based on the captured image Ga captured by the imaging camera 20A.

[Operational effects of the third embodiment]
In the present embodiment, the position of the retroreflector 3 of the moving body 2 can be searched using a plurality of imaging cameras 20. Therefore, for example, as in step S3 in the first embodiment, the rotation mechanism 30 is controlled and the retroreflector 3 is searched more quickly by changing the imaging direction (imaging range) in each direction. The position of the retroreflector 3 can be specified. Accordingly, the laser emission direction can be more quickly matched with the tracking target direction, and the measurement light can be tracked by the retroreflector 3.

  Here, in this embodiment, each imaging camera 20 is installed so that the imaging ranges of the plurality of imaging cameras 20 cover all directions of the length measuring apparatus 1B. For this reason, there is a high possibility that the retroreflector 3 is captured in any one of the captured images, and the retroreflector 3 can be searched more easily without driving the rotating mechanism 30.

[Other Embodiments]
Note that the present invention is not limited to the above-described embodiment, and modifications, improvements, and the like within a scope in which the object of the present invention can be achieved are included in the present invention.
For example, in the first embodiment, the imaging camera 20 is fixed to the interferometer 10 and the laser emission direction and the imaging direction coincide with each other. However, the imaging direction and the laser emission direction may be different.
In this case, the imaging direction of the imaging camera 20 is further provided with an imaging camera rotation mechanism that can be controlled separately from the laser emission direction, and the control device 40 further controls the imaging direction changing means for controlling the imaging camera rotation mechanism. It is preferable to provide.
In such a configuration, when the state determination unit 542 determines that the tracking is impossible (the retroreflector 3 is lost), the imaging camera rotation mechanism is controlled to change the imaging direction of the imaging camera 20. . When a captured image obtained by capturing the retroreflector 3 is acquired, the first direction control unit 541 controls the rotation mechanism 30 to align the laser emission direction with the imaging direction of the imaging camera 20. Thereafter, the same processing as in the first embodiment is performed, and the laser emission direction is matched with the tracking target direction.
In such a configuration, a configuration for independently driving the imaging camera 20 is required. For example, a deviation caused by an attachment error or the like when the imaging camera 20 is attached to the interferometer 10 is corrected. And the laser emission direction can be accurately adjusted to the tracking target direction.

  Further, the imaging camera 20 is not installed in the length measuring devices 1, 1 </ b> A, 1 </ b> B. For example, the captured image acquisition unit 51 is captured by a camera provided separately in a room, a camera captured by a measurer, or the like. A captured image may be acquired. In this case, a configuration for detecting the position where the captured image is acquired, the laser emission direction in the captured image, and the like is necessary. However, the configuration of the length measuring devices 1, 1A, 1B is not provided because the imaging camera 20 is not mounted. It can be simplified.

In the first embodiment, when the retroreflector 3 is not detected in the captured image by the position detection unit 52, the process of searching the retroreflector 3 by changing the imaging direction by the process of step S3 is performed. It is not limited to this.
For example, when the moving range of the tracking target is set in advance and the entire moving range can be imaged by the imaging camera 20, when the retroreflector 3 cannot be detected in the captured image, An error signal may be output and the length measurement process may be terminated.

In the first embodiment, the pixel corresponding to the laser emission direction in the captured image is the center pixel O of the captured image, but is not limited thereto. Depending on the installation position of the imaging camera 20 or the like, a pixel above the center pixel of the captured image may be set as a pixel corresponding to the laser emission direction.
Further, when the moving direction of the moving body 2 can be predicted in advance, the imaging camera 20 may be installed so that a wide imaging range can be obtained with respect to the moving direction of the moving body 2. For example, when the moving direction of the moving body 2 is the right direction with respect to the laser emission direction, the imaging direction of the imaging camera is previously shifted to the right side from the laser emission direction. In this case, the pixel indicating the laser emission direction in the captured image is set on the left side of the center pixel, and a wide imaging region is set on the right side of the laser emission direction. In this case, even when the moving body 2 moves greatly in the right direction, a captured image obtained by capturing the retroreflector 3 can be acquired without changing the posture of the rotating mechanism 30.

In 3rd embodiment, although the example which installs the some imaging camera 20 was shown so that all the circumference | surroundings of the length measuring apparatus 1B could be covered as an imaging range, it was not limited to this.
For example, when the movement range of the tracking target is a limited range set in advance, a plurality of imaging cameras 20 may be installed so that the range can be imaged.

In each of the above embodiments, the rotation mechanism 30 rotates the interferometer 10 about two rotation axes, but this is not a limitation. For example, as the rotation mechanism 30, the interferometer 10 may be rotated about only one rotation axis, or the interferometer 10 may be rotated about three or more rotation axes.
Further, in each of the embodiments, the example in which the imaging camera 20 and the control device 40 are wirelessly connected has been described.

In each of the above embodiments, the tracking laser device of the present invention is applied to the tracking laser interference length measuring device. However, the present invention is not limited to this, and a predetermined tracking target is tracked by laser light. It can be applied to any device. For example, the present invention can be applied to an operation inspection apparatus that tracks the movement of an arm of a machine tool or the like using laser light.
Further, as the tracking type laser device, the length measuring devices 1, 1A, 1B are exemplified, and the length measuring process is performed based on the return light of the retroreflector 3. Although the configuration in which the presence or absence of the retroreflector 3 is determined is described, in the case where the tracking laser device is applied to other industrial machines or the like, a configuration in which the retroreflector is not provided may be employed. In this case, the position detection unit 52 can detect a predetermined fixed point (for example, the center of gravity) of the tracking target in the captured image as the tracking target direction. Further, in such a configuration, it is not necessary to detect the return light, and the first light receiving unit 113, the second light receiving unit 122, the splitter 112 that divides the laser light into the measurement light and the reference light, and the like become unnecessary.

  INDUSTRIAL APPLICABILITY The present invention can be used in various industrial machines such as a tracking laser device that tracks laser light on a tracking target, and a measurement device that includes the tracking laser device.

  DESCRIPTION OF SYMBOLS 1,1A, 1B ... Tracking type laser interference length measuring device (measuring device, tracking type laser device), 2 ... Moving body, 3 ... Retroreflector (tracking target), 10 ... Interferometer, 11 ... Length measuring optical system, DESCRIPTION OF SYMBOLS 12 ... Tracking optical system, 20 ... Imaging camera, 21 ... Imaging lens, 22 ... Imaging part, 23 ... Signal output part (wireless transmission means), 30 ... Rotation mechanism (direction changing means), 40 ... Control apparatus, 41 ... Signal Receiving unit (wireless receiving unit), 51 ... captured image acquisition unit, 52 ... position detection unit (also functions as an image determination unit), 53 ... distance calculation unit, 54 ... direction control unit (also functions as an imaging direction control unit), DESCRIPTION OF SYMBOLS 111 ... Laser light source, 112 ... Splitter, 113 ... First light-receiving means, 114 ... Plane mirror, 122 ... Second light-receiving means, 541 ... First direction control means, 542 ... State determination means, 543 ... Deviation determination means (first determination) means), 44 ... second direction control means, 545 ... pattern generating means, 546 ... pattern scanning control unit, 547 ... light amount determining means (second determination means).

Claims (12)

A tracking laser device for tracking a laser beam emitted from a laser light source with respect to a tracking target,
Captured image acquisition means for acquiring a captured image obtained by capturing the periphery of the tracking laser device;
Based on the captured image, a position detection unit that detects a laser emission direction in which the laser light is emitted, and a relative position in a tracking target direction from the tracking laser device toward the tracking target;
Direction changing means for changing the laser emission direction;
Direction control means for controlling the direction changing means based on the relative position and correcting the laser emission direction to the tracking target direction;
A tracking laser device characterized by comprising: The tracking laser device according to claim 1,
An imaging means for imaging a predetermined angle of view range centered on a predetermined imaging direction;
The tracked laser apparatus, wherein the captured image acquisition unit acquires a captured image captured by the imaging unit. In the tracking type laser apparatus according to claim 2,
The tracking type laser apparatus, wherein the imaging direction of the imaging means is the laser emission direction. In the tracking type laser apparatus according to claim 3,
Image determining means for determining whether or not the tracking target exists in the captured image;
An imaging direction control unit that controls the direction changing unit to change the imaging direction when it is determined that the tracking target does not exist in the image determination unit;
A tracking laser device characterized by comprising: In the tracking type laser apparatus according to claim 2,
A plurality of the imaging means are provided, and these imaging means have different imaging directions,
The tracking type laser apparatus, wherein the position detection unit detects the relative position based on each captured image captured by the plurality of imaging units. In the tracking type laser apparatus according to claim 5,
The tracking type laser apparatus, wherein the plurality of imaging units are arranged so that imaging can be performed in all directions around the tracking type laser apparatus according to an imaging range of each imaging unit. In the tracking type laser apparatus according to any one of claims 2 to 6,
The tracking type laser apparatus, wherein the imaging unit includes a fisheye lens and images the range of angle of view through the fisheye lens. In the tracking type laser apparatus according to any one of claims 2 to 7,
The imaging means includes wireless transmission means for transmitting the captured image by a wireless signal,
The tracked laser apparatus, wherein the captured image acquisition means includes wireless reception means for receiving the wireless signal. In the tracking type laser apparatus according to any one of claims 1 to 8,
The tracking target includes a retroreflector that reflects the laser light,
The tracking laser device includes a light receiving unit that receives the return light that is the laser light reflected by the retroreflector, and outputs a light reception signal corresponding to a light reception amount and a shift amount of the return light,
The tracking type laser apparatus, wherein the direction control means controls the direction changing means so that the deviation amount is within a predetermined range after correcting the laser emission direction based on the relative position. In the tracking type laser apparatus according to claim 9,
First determination means for determining whether the amount of received light is equal to or less than a predetermined first threshold;
Second determination means for determining whether or not the amount of received light is equal to or less than a predetermined second threshold equal to or greater than the first threshold;
The direction control unit controls the direction changing unit when the first determination unit determines that the amount of received light is equal to or less than the first threshold after correcting the laser emission direction based on the relative position. Then, when the laser emission direction is moved in a spiral shape and the second determination means determines that the amount of received light is larger than the second threshold during the movement, the deviation amount is within a predetermined range. The tracking type laser apparatus, wherein the direction changing means is controlled so as to be accommodated. In the tracking type laser apparatus according to any one of claims 1 to 10,
Image determining means for determining whether or not the tracking target exists in the captured image;
The tracking laser apparatus stops the emission of laser light from a laser light source when the tracking target cannot be found. The tracking laser device according to any one of claims 1 to 11,
A light splitting means for splitting a part of the laser light as reference light;
A length measurement signal that receives interference light between the return light, which is the laser light reflected by the retroreflector provided on the tracking target, and the reference light, and that corresponds to the amount of received light and the amount of displacement of the retroreflector A light receiving means for length measurement that outputs
Based on the length measurement signal, a length measurement means for calculating a distance from a predetermined reference point to the retroreflector;
A measuring apparatus comprising:

Images