JP2014081218A - Exterior appearance inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an exterior appearance inspection device that can generate a pseudo image corresponding to a part having linear light interrupted even when, for one example, an optical cutting method generates the part.SOLUTION: The exterior appearance inspection device according to an embodiment comprises: an imaging section that photographs a linear light image formed in an inspection object area of a linear inspection object surface by being lightened with sheet-like light from a direction crossing the sheet-like light; an image generation section that determines a luminance value at each point in accordance with a deviation from a reference line of the image of the light corresponding to a plurality of points in the inspection object area, and generates a two-dimensional pseudo image; and a display control section that controls a display section such that the pseudo image is displayed. The image generation section interpolates a luminance value of the point where the light image is not obtained from the luminance value of the plurality of points where the light image is obtained or the deviation therefrom, and determines the luminance value thereof.

Description

  The present invention relates to an appearance inspection apparatus.

  Conventionally, an appearance inspection apparatus capable of obtaining an image corresponding to a three-dimensional shape of a surface to be inspected by a so-called light cutting method is known (for example, Patent Document 1). In this type of visual inspection apparatus, the height at each position of the inspection target region is calculated based on the position and shape of the linear light irradiated on the inspection target surface, and further at each position corresponding to the height. May be set to generate a two-dimensional pseudo image.

JP 2011-141260 A

  However, in this type of appearance inspection apparatus, depending on the uneven shape of the surface to be inspected, the uneven shape may cause a blind spot in the imaging range, and linear light may be partially interrupted. In the portion where the light is interrupted, the unevenness of the surface to be inspected cannot be discriminated, and an area having no luminance value is generated in the pseudo image. When image processing is performed in consideration of a portion where light is interrupted, the processing becomes complicated, such as the necessity of branching depending on determination, and the calculation time for the processing may increase.

  Therefore, as an example, the embodiment of the present invention is an appearance inspection apparatus capable of generating a pseudo image corresponding to a portion where linear light is interrupted by a light cutting method. Is one of the purposes.

  In the appearance inspection apparatus according to the embodiment of the present invention, in the appearance inspection apparatus according to the embodiment, the linear shape formed in the linear inspection target region of the inspection target surface by being illuminated by the light sheet. The brightness value at each point is determined in accordance with the imaging unit that captures the image of the light from the direction intersecting the light sheet and the deviation from the reference line of the light image corresponding to the plurality of points in the inspection target area. An image generation unit that generates a two-dimensional pseudo image, and a display control unit that controls the display unit so that the pseudo image is displayed. The value is determined by interpolating from the luminance values or deviations of a plurality of points where the light image is obtained.

  According to the embodiment of the present invention, as an example, it is possible to obtain an appearance inspection apparatus that can generate a pseudo image corresponding to a portion where linear light is interrupted. it can.

FIG. 1 is a schematic perspective view illustrating an example of an appearance inspection apparatus according to an embodiment. FIG. 2 is a schematic plan view illustrating an example of linear light applied to an inspection target area obtained by the appearance inspection apparatus according to the embodiment. FIG. 3 is a schematic block diagram illustrating an example of an appearance inspection apparatus according to the embodiment. FIG. 4 is a schematic block diagram illustrating an example of a control unit of the appearance inspection apparatus according to the embodiment. FIG. 5 is a flowchart illustrating an example of an inspection method performed by the appearance inspection apparatus according to the embodiment. FIG. 6 is a flowchart showing an example of details of step S5 of FIG. FIG. 7 is an example of a pseudo image obtained by the appearance inspection apparatus according to the embodiment, in which an image of a portion where the linear light is interrupted is interpolated and the detected abnormality is shown. FIG. FIG. 8 is a pseudo image obtained by the visual inspection apparatus according to the embodiment, and shows an example of a pseudo image in which there is no image of a portion where the linear light is interrupted and the detected abnormality is shown. It is a figure. FIG. 9 is a diagram illustrating an example of a light image obtained by the appearance inspection apparatus according to the embodiment. FIG. 10 is a partial enlarged view of a pseudo image obtained by the appearance inspection apparatus according to the embodiment, and is a schematic diagram illustrating an example of a non-detection region. FIG. 11 is a partial enlarged view of a pseudo image obtained by the appearance inspection apparatus according to the embodiment, and is a schematic diagram illustrating an example of a non-detection region and its surrounding region. FIG. 12 is a partial enlarged view of the pseudo image obtained by the appearance inspection apparatus according to the embodiment, and shows an example of the first area and the second area of the non-detection area and its surrounding area. It is a schematic diagram. FIG. 13 is a partially enlarged view of the pseudo image obtained by the appearance inspection apparatus according to the embodiment, and shows the first detection area and the center of the second area and the center of gravity of the second area and the surrounding area. It is the schematic diagram by which an example of the circumscribed reference shape was shown. FIG. 14 is a partial enlarged view of a pseudo image obtained by the appearance inspection apparatus according to the embodiment, and is a first representative of the first area and the second area of the non-detection area and its surrounding area. It is the schematic diagram by which an example of the position and the 2nd position was shown. FIG. 15 is a partial enlarged view of a pseudo image obtained by the appearance inspection apparatus according to the embodiment, and is a schematic diagram illustrating an example in which a non-detection region is interpolated.

  In the present embodiment, as an example, the appearance inspection apparatus 1 illustrated in FIGS. 1 to 4 inspects the inspection target surface 101 of the inspection target 100 based on an image obtained by imaging the inspection target 100. As shown in FIG. 3, the appearance inspection apparatus 1 includes a light source 2, an imaging unit 3, a control unit 40, a conveyance device 5 (conveyance unit), a display device 6 (display unit), and the like.

  As shown in FIGS. 1 and 2, the light source 2 emits a light sheet (sheet-like light, flat curtain-like light, slit light), and irradiates the inspection target surface 101 with linear light L. The light source 2 is, for example, a laser light source for emitting bright lines. The imaging unit 3 images a two-dimensional area on the inspection target surface 101 including the inspection target area A from the direction intersecting with the light sheet.

  In the present embodiment, as an example, as illustrated in FIG. 1, the light source 2 is configured such that the normal direction (Z direction in FIG. 1) of the inspection target surface 101 and the width of the linear light L (inspection target area A). The linear inspection object region A is illuminated from an oblique direction (obliquely upward direction) between directions (Y direction in FIGS. 1 and 2). When the inspection target surface 101 is a flat surface, the light L (bright line) on the inspection target surface 101 is linear. However, if the inspection target surface 101 has a convex portion, and the light L when the inspection target surface 101 is a flat surface is defined as a reference line R (straight line, reference position), the light L that has hit the convex portion. Is shifted from the reference line R to the light source 2 side (side closer to the light source 2). On the other hand, when the inspection target surface 101 has a recess, the light L hitting the recess shifts from the reference line R to the side opposite to the light source 2 (the side far from the light source 2). That is, the unevenness of the inspection target surface 101 and the degree of the unevenness (the height of the convex part, the depth of the concave part, and the position in the normal direction) are determined based on the position of the light L (shape, deviation from the reference line R). be able to. The light sheet emission direction and the imaging direction of the imaging unit 3 can be set in various ways.

  The imaging unit 3 captures at least an image of the light L in the inspection target area A from above the inspection target surface 101 (in this embodiment, a position separated in the normal direction as an example). The imaging unit 3 includes, for example, an area sensor (a solid-state imaging device, for example, a charge coupled device (CCD) image sensor, a complementary metal oxide semiconductor (CMOS)) having two-dimensionally arranged photoelectric conversion elements (photoelectric conversion units). Image sensor).

  The transport device 5 transports the inspection object 100 in the width direction of the light L (inspection object area A) (longitudinal direction of the inspection object 100, the X direction in FIGS. 1 and 2), and the inspection object on the inspection object surface 101. Move area A. Note that the inspection object 100 may be fixed, and the light source 2, the imaging unit 3, and the like may move along the inspection object surface 101 (a structure that is moved by the transport device 5).

  As shown in FIG. 3, the appearance inspection apparatus 1 includes a control unit 40 (for example, a CPU (central processing unit)), a ROM 41 (read only memory), a RAM 42 (random access memory), an SSD 43 (solid state drive). ), A light irradiation controller 44, an imaging controller 45, a transport controller 46, a display controller 47, and the like. The light irradiation controller 44 controls light emission (ON, OFF) of the light source 2 based on a control signal from the control unit 40. The imaging controller 45 controls imaging by the imaging unit 3 based on a control signal from the control unit 40. The transport controller 46 controls the transport device 5 based on the control signal received from the control unit 40 and controls the transport (start, stop, speed, etc.) of the inspection object 100. The display controller 47 controls the display device 6 based on a control signal from the control unit 40. The control unit 40 reads and executes a program (application) installed in the ROM 41, the SSD 43, or the like as a nonvolatile storage unit. The RAM 42 temporarily stores various data used when the control unit 40 executes programs and executes various arithmetic processes. Note that the hardware configuration shown in FIG. 3 is merely an example, and can be implemented with various modifications such as a chip or a package. Various arithmetic processes can be performed in parallel, and the control unit 40 and the like can have a hardware configuration capable of parallel processing.

  In the present embodiment, as an example, the control unit 40 functions (operates) as at least a part of the appearance inspection apparatus 1 in cooperation with hardware and software (program). That is, as shown in FIG. 4, the control unit 40 functions as a light irradiation control unit 40a, an imaging control unit 40b, a conveyance control unit 40c, an image processing unit 40d, a display control unit 40e, and the like. The light irradiation control unit 40 a controls the light irradiation controller 44. The imaging control unit 40b controls the imaging controller 45. The conveyance control unit 40 c controls the conveyance controller 46. The image processing unit 40d performs image processing on the image data acquired by the imaging unit 3. The display control unit 40e controls the display device 6 (for example, LCD (liquid crystal display), OELD (organic electroluminescent display), etc.).

  Here, in the present embodiment, as an example, the image processing unit 40d uses the reference line R (image L) of the light L corresponding to each point of each of the plurality of inspection target areas A (each point in the longitudinal direction of the inspection target area A). A two-dimensional pseudo image Imv (see FIG. 10 and the like) is generated by determining the luminance value at each point in accordance with the deviation from the reference position. For example, the image processing unit 40d sets the luminance value higher (brightens the pixel) as the deviation from the reference line R at each position toward the side closer to the light source 2 (upper left side in FIG. 1) increases (the pixel becomes brighter). The luminance value is set lower (the pixel is darkened) as the shift from the far side to the far side (lower right side in FIG. 1) increases. Thereby, the pseudo image Imv becomes an image close to the two-dimensional appearance of the inspection target region A. The image processing unit 40d is an example of an image generation unit that generates the pseudo image Imv. The display control unit 40e can control the display device 6 so that the pseudo image Imv is displayed. The pseudo image Imv has an advantage that it is easy to visually determine the unevenness state (size, position, etc.) of the inspection target surface 101.

  In the present embodiment, as an example, the image processing unit 40d changes the position (shape, displacement) of the linear light L in the plurality of inspection target areas A (two-dimensional change) or two-dimensional. Abnormality of the inspection target surface 101 is determined based on a change in luminance value of the pseudo image Imv. As an example, the image processing unit 40d has the same or larger number of pixels whose deviation or luminance value from the reference line R is equal to or larger than a predetermined value (deviation or luminance value threshold) as the predetermined number (pixel number or area threshold). In the case where the inspection target surface 101 has a convex abnormality, it can be determined that there is a convex abnormality. Further, as an example, the image processing unit 40d has a predetermined number of pixels (threshold value or area threshold value) where the deviation from the reference line R or the luminance value is the same as or smaller than a predetermined value (deviation or threshold value of luminance value). Can be determined that there is a concave abnormality on the inspection target surface 101. That is, the image processing unit 40d is an example of an abnormal area determination unit.

  In the above configuration, when the inspection target surface 101 (inspection target region A) has a steep concavo-convex shape (step), the linear light L on the inspection target surface 101 as shown in FIG. May occur (non-detection area AL, missing part, missing area). The interrupted portion (non-detection area AL) is, for example, a portion where the shadow of the light L is generated due to the uneven shape (step). In such a case, with respect to the interrupted portion, the unevenness cannot be discriminated, and an area without an image also appears in the pseudo image Imv (see FIG. 10). Therefore, in the present embodiment, as an example, the image processing unit 40d interpolates the luminance value of the point where the linear light L image is not obtained from the luminance values of the plurality of points where the light L image is obtained. Thus, the pseudo image Imv can be processed (interpolation processing, hole filling processing) so that there is no area where there is no image (luminance value is 0). Note that the image processing unit 40d does not need to perform such interpolation processing for all points (collection, set, region) where the image of the light L is not obtained, and as an example, determines that there is no abnormality ( This can be done only for the points (sets, sets, regions) that have been determined. In this case, it is easy to suppress visual misidentification of a portion (region) where an abnormality has occurred in the pseudo image Imv.

  Specifically, as illustrated in FIG. 5, the control unit 40 first functions as an image processing unit 40 d (image generation unit), and a reference line R for each point (pixel) in the plurality of inspection target areas A. From the position (shift) of the light L with respect to (reference position), the luminance value of each point is determined, and a two-dimensional pseudo image Imv is generated (step S1). In step S1, the image processing unit 40d can linearly determine the luminance value of each point according to the magnitude of the deviation, for example.

  Next, the control unit 40 functions as an image processing unit 40d (first abnormal region determination unit), and the number of pixels whose luminance value is equal to or larger than a predetermined value (luminance value threshold) is a predetermined number (number of pixels). Or a larger number of pixels having a deviation from the reference line R or a luminance value equal to or smaller than a predetermined value (luminance value threshold). ) Or a larger number, the area where the points have gathered is determined as an abnormal area AU (see FIGS. 7 and 8) (step S2).

  Next, the control unit 40 functions as an image processing unit 40d (pre-processing unit), and performs grouping (grouping), labeling (group distinction), and the like on points where the corresponding light L image data is not obtained. Perform (step S3). By this step S3, an area (non-detection area AL) where points where the corresponding image data of the light L cannot be obtained is obtained. Next, the control unit 40 functions as the image processing unit 40d, and the size of the non-detection area AL (number of pixels (set), area) does not exceed a predetermined value (pixel count or area threshold). In (No in step S4), the luminance value at each point in the non-detection area AL is determined by interpolation from the luminance values at a plurality of points from which the image data of the light L is obtained (step S5). ).

  On the other hand, when the size of the non-detection area AL is equal to or exceeds a predetermined value (pixel count or area threshold) (Yes in step S4), the control unit 40 sets the image processing unit 40d (second abnormality). The region (non-detection region AL) that functions as the region determination unit and where the data of the corresponding image of the light L cannot be obtained is determined as the abnormal region AU (step S6). The threshold value in step S2 and the threshold value in step S6 may be the same value or different values.

  Next, the control unit 40 functions as the display control unit 40e, and the luminance value (pseudo image) at each point other than the non-detection area AL obtained in step S1 and the non-detection area AL obtained in step S5. And the image showing the abnormal area AU obtained in step S2 and step S4 (for example, an area colored with a predetermined color, an index) Etc.) (for example, FIG. 7), the display controller 47 and thus the display device 6 can be controlled (step S7). Note that the display control unit 40e interpolates the non-detection area AL in which the luminance value interpolated in step S5 is calculated in response to an instruction input from an input unit (for example, a keyboard or the like, not shown). A state in which the luminance value is displayed on the display device 6 (FIG. 7) and a state in which the luminance value (pseudo image) is displayed so as not to be obtained (for example, the luminance value of the area is displayed as 0) It is possible to switch between the performed states, for example, FIG. That is, the display control unit 40e can switch the display mode of the point where the light image on the display device 6 was not obtained. Note that the display control unit 40e can also switch between the state in which an image (an index or the like) indicating the abnormal region AU is displayed and the state in which the abnormal region AU is not displayed in response to an instruction input from the input unit. it can.

In step S5, for example, the image processing unit 40d determines a luminance value by the procedure shown in FIG. 6 and generates a pseudo image Imv. FIG. 10 is an example of a region that is two-dimensionally arranged in the order in which the points P (pixels) included in the plurality of detection target regions A are detected. 10 to 15, each point P is indicated by a minimum square frame. The two-dimensional coordinates of each point P are determined at the arranged positions. As an example, the coordinate axis i is along the width direction (conveyance direction, X direction) of the detection target area A, and the coordinate axis j is along the longitudinal direction (Y direction) of the detection target area A. In FIGS. 10 to 15, the symbols of the points P are shown one by one, but the smallest square frame in the coordinates is the point P. In addition, in FIGS. 10 to 15, the darkness of each point P (pixel) indicates a luminance value, and as an example, the brighter (white) the higher the luminance value. For the non-detection area AL illustrated in FIG. 10, the image processing unit 40 d first has a plurality of points P (pixels, pixels shaded in FIG. 11) around which the light image is obtained. , The surrounding area AS) is extracted (step S51). Next, the image processing unit 40d calculates an average value m of luminance values of all the points P (pixels) in the surrounding area AS, and sets the surrounding area AS to an area AS1 higher than the average value m (in FIG. 12, an example). As shown in FIG. 12, the region AS2 (lower right hatched region in the surrounding region AS) and the region AS2 lower than the average value m (in FIG. 12, as an example, the region hatched rightward, The area is divided into the upper left area in the surrounding area AS (step S52). The region AS1 is an example of a first region, and the region AS2 is an example of a second region. Next, the image processing unit 40d calculates an average value m1 of the luminance values of the pixels included in the region AS1 and an average value m2 of the luminance values of the pixels included in the region AS2 (Step S53). The average value m1 is an example of a first luminance value, and the average value m2 is an example of a second luminance value. Next, the image processing unit 40d calculates a quadrangle S (a square shown in FIG. 13, a function on coordinates) circumscribing the surrounding area AS (step S54). The square S is an example of a reference shape. Next, as shown in FIG. 14, the image processing unit 40d performs a straight line L12 (coordinate function) passing through the center G1 (coordinate position) of the area AS1 and the center G2 (coordinate position) of the area AS2. ) And the quadrangle S, C1 and C2 (coordinate positions) are calculated (step S55). The intersection C1 is an example of a first position, and the intersection C2 is an example of a second position. Next, the image processing unit 40d uses the following equation (1) based on the average values m1 and m2 and the positions of the intersections C1 and C2 on the coordinates P (i, The luminance value vl (i, j) of j) is calculated (step S56).
[Equation 1]
vl (i, j) = m1 * k2 / (k1 + k2) + m2 * k1 / (k1 + k2)
(1)
Here, k1 is the distance between each point P and the intersection C1, and k2 is the distance between each point P and the intersection C2.
According to this equation (1), the luminance value vl in the non-detection area AL is closer to the average value m1 (first luminance value) as the distance k1 is smaller, that is, closer to the intersection C1 (first position). The closer the distance k2 is, that is, the closer to the intersection C2 (second position), the closer to the average value m2 (second luminance value). As an example, the above-described processing in step S5 generates a pseudo image Imv in which the non-detection area AL (see FIG. 10) is interpolated and embedded as shown in FIG.

  As described above, in this embodiment, as an example, the image processing unit 40d uses the luminance value of the point P in the non-detection area AL in which a plurality of points P for which an image of the light L is not collected as the non-detection value. It is determined by interpolating from the luminance values of a plurality of points (points P in the surrounding area AS) where the image of the light L is obtained around the detection area AL. Therefore, according to the present embodiment, as an example, the luminance value of the point P in the non-detection area AL can be calculated according to the situation around the non-detection area AL. Is small, and it is easy to obtain a pseudo image Imv with less uncomfortable appearance in which the non-detection area AL and the area other than the non-detection area AL are more smoothly connected. In the present embodiment, as an example, the image processing unit 40d includes the position coordinates (first position) of the intersection C1 representing the area AS1 having a high luminance value in the surrounding area AS and the average value m1 (first) of the area AS1. One luminance value), the position coordinates (second position) and the average value m2 (second luminance value) of the intersection C2 representing the region AS2 having the lower luminance value in the surrounding area AS, and the image of the light L are obtained. From the position coordinates of each point P that has not been obtained, the luminance value of each point P for which no image of the light has been obtained is calculated. Therefore, according to the present embodiment, as an example, it is easy to give a luminance value distribution according to the luminance value distribution of the surrounding area AS to the non-detection area AL. Further, in the present embodiment, as an example, the surrounding area AS is divided into the areas AS1 and AS2 with the average value as a boundary, so that the brightness value at each point P in the non-detection area AL is obtained by easier and faster calculation. The characteristics (features) of the distribution (change) of luminance values around the non-detection area AL are more easily reflected. In the present embodiment, as an example, the image processing unit 40d sets the intersection C1 on the side opposite to the non-detection area AL of the area AS, and sets the intersection C2 on the side opposite to the non-detection area AL of the area AS. Is set. Therefore, according to the present embodiment, as an example, the distance between each point P and the position representing each of the areas AS1 and AS2 is likely to be a value larger than 0, and weighting is performed according to the distance ratio (for example, the above-described formula). The calculation according to equation (1) is more easily performed.

  As described above, in the present embodiment, as an example, the image processing unit 40d (image generation unit) that generates the pseudo image Imv has the luminance of the point in the non-detection area AL where the image of the light L is not obtained. The value is determined by interpolating from the luminance values or deviations of a plurality of points (a plurality of points other than the non-detection area AL) where the image of the light L is obtained. Therefore, according to the present embodiment, as an example, a pseudo image Imv in which a luminance value is set in the non-detection area AL (filled with an image) can be obtained.

  In the present embodiment, as an example, the image processing unit 40d has the number of points (area size, area) of the non-detection area AL where the image of the light L is not obtained equal to or less than a predetermined value. In this case, the luminance value of each point in the non-detection area AL is determined by interpolating from the luminance values of a plurality of points from which an image of the light L is obtained. Therefore, according to the present embodiment, as an example, it is possible to obtain a pseudo image Imv in which a luminance value is set (filled with an image) for a non-detection area AL that is small in size and is unlikely to be abnormal.

  In the present embodiment, as an example, the image processing unit 40d (abnormal region determination unit) that determines the abnormal region AU on the inspection target surface 101 based on the light image or the pseudo image Imv is provided, and the display control unit 40e includes The display device 6 is controlled so that an image (index) indicating the abnormal area AU is displayed together with the pseudo image Imv. Therefore, according to the present embodiment, as an example, the abnormal area AU can be easily understood together with the uneven shape of the inspection target surface 101 in appearance.

  In the present embodiment, as an example, the display control unit 40e can switch the display mode of points in the non-detection area AL where the image of the light L on the display device 6 (display unit) was not obtained. Therefore, according to the present embodiment, as an example, the presence / absence of the non-detection area AL can be easily understood by switching the display mode.

  As mentioned above, although embodiment of this invention was illustrated, the said embodiment is an example to the last. The embodiment can be implemented in various other forms, and various omissions, replacements, combinations, and changes can be made without departing from the scope of the invention. In addition, the configuration and shape of the embodiment can be partially replaced with other configurations and shapes. In addition, specifications (structure, type, direction, angle, shape, size, length, width, thickness, height, number, arrangement, position, material, etc.) of each configuration, shape, etc. are changed as appropriate. Can be implemented. For example, the inspection object may be an object other than a belt. Moreover, the inspection object surface without abnormality may have unevenness. Further, the luminance value of each point in the non-detection area may be calculated based on the amount of deviation of the linear light image from the reference line.

  DESCRIPTION OF SYMBOLS 1 ... Appearance inspection apparatus, 3 ... Imaging part, 6 ... Display apparatus (display part), 40d ... Image processing part (image generation part), 40e ... Display control part, 101 ... Inspection object surface, m1 ... Average value (1st Brightness value), m2 ... average value (second brightness value), vl ... luminance value, A ... inspection area, AL ... non-detection area, AU ... abnormal area, C1 ... intersection (first position), C2 ... Intersection (second position), Imv ... pseudo image, P ... point, R ... reference line.

Claims (8)

An imaging unit that captures an image of linear light formed in a linear inspection target region on the inspection target surface by being illuminated by the light sheet, from a direction crossing the light sheet;
An image generation unit that determines a luminance value at each point according to a deviation from a reference line of the image of the light corresponding to a plurality of points in the inspection target region, and generates a two-dimensional pseudo image;
A display control unit for controlling the display unit so that the pseudo image is displayed;
With
The visual inspection device, wherein the image generation unit determines the luminance value of the point where the light image is not obtained by interpolating from the luminance value or the deviation of the plurality of points where the light image is obtained .   When the number of points in the non-detection area where the points where the light image was not obtained is equal to or less than a predetermined value, the image generation unit is configured to calculate each point in the non-detection area. The appearance inspection apparatus according to claim 1, wherein the luminance value is determined by interpolating from the luminance values of the plurality of points from which the light image is obtained. An abnormal area determination unit that determines an abnormal area on the inspection target surface based on the light image or the pseudo image,
The visual inspection apparatus according to claim 1, wherein the display control unit controls the display unit so that an image indicating the abnormal region is displayed together with the pseudo image.   The appearance inspection apparatus according to claim 1, wherein the display control unit is capable of switching a display mode of the points where the image of the light is not obtained on the display unit.   The image generation unit obtains the brightness value of the point in the non-detection region where the plurality of points where the light image was not obtained gathered and is located around the non-detection region to obtain the light image. The appearance inspection apparatus according to claim 1, wherein the appearance inspection apparatus is determined based on the luminance value or the shift of the plurality of points obtained.   The image generation unit includes a first position representing a first area having a high luminance value and a first position among surrounding areas composed of a plurality of the points from which the image of the light surrounding the non-detection area is obtained. From the brightness value, the second position representing the second area having the lower brightness value in the surrounding area, the second brightness value, and the position of each point where the image of the light was not obtained, The appearance inspection apparatus according to claim 5, wherein a luminance value of each point where an image is not obtained is calculated.   The image generation unit sets the first position on a side opposite to the non-detection area of the first area, and sets the second position as the non-detection area of the second area. The appearance inspection apparatus according to claim 6, wherein the appearance inspection apparatus is set on the opposite side.   The first area is an area composed of the points whose luminance value is equal to or higher than the average value of the luminance values of the entire surrounding area, and the second area is a luminance value of the entire surrounding area. The visual inspection apparatus according to claim 6, wherein the visual inspection device is an area including the points that are equal to or lower than an average value of luminance values.

Images