JP2014081198A - Anisotropic conductive member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an anisotropic conductive member including an electricity through part, which is capable of achieving high levels of contact stability, increase in density, and reduction in thickness.SOLUTION: The anisotropic conductive member includes a tabular elastic socket and a plurality of electricity through parts which are individually held in the elastic socket and allow a current to flow in a thickness direction of the elastic socket. Each of the electricity through parts includes first and second movable members which can vary the relative positions in the thickness direction of the elastic socket in electric connection with each other. The movable members are arranged so as to be able to compress a part of the elastic socket at least in a state where they are close to each other, so that elastic resilience for separating the movable members from each other occurs in the elastic socket when external force is applied to the movable members to bring them close to each other. A slide contact structure allowing the relative positions of the movable members to be varied includes movement limiting means.

Description

  The present invention relates to an anisotropic conductive member used for IC inspection and the like.

  When inspecting an IC having a large number of terminals, an inspection connected to each terminal of the IC and an inspection device (IC tester) for inspecting the IC while suppressing electrical connection between adjacent terminals in the IC. An anisotropic conductive member is used for electrically connecting the electrodes corresponding to the terminals on the circuit board.

  The anisotropic conductive member is generally plate-shaped as a whole, and its electrical conductivity in the normal direction of its main surface is sufficiently high so that an electric signal can pass through it, but it is insulated in the in-plane direction of the main surface. And has the property of not conducting electricity. Based on this characteristic, the anisotropic conductive member has a structure including a large number of portions through which current passes in the normal direction of the main surface corresponding to the terminals of the IC to be inspected. In the present invention, a portion through which a current passes in the normal direction of the main surface corresponding to the terminal of the IC is referred to as an electric through portion.

  The specific structure of the electric through-hole is arbitrary, a structure including conductive thin wires such as metal embedded in the member so as to be exposed from both main surfaces of the anisotropic conductive member, and between the two main surfaces. A structure comprising a group of filled conductive fine particles, a tubular body that is opened while being partially closed at both ends, a coil spring disposed inside the tubular body, and the above-mentioned partial while being urged by the coil spring Examples thereof include a probe pin composed of two contact members partially protruding from the tubular body in a state of being locked to a closed portion.

  In use of the electric through-portion in use, the terminal of the IC and the inspection substrate and the end portion on the main surface of the electric through-hole portion of the anisotropic conductive member are in a predetermined state in order to stabilize the electrical contact between them. Contact with pressure. In many cases, a structure for generating contact pressure using an elastic restoring force is provided in the electrical penetration portion so that the contact pressure is generated to such an extent that the above-described electrical contact is stabilized. .

  For example, the electrical penetration part using the above-mentioned conductive thin wires and the electrical penetration part using a group of conductive fine particles have a structure in which these members are embedded in an elastic body. The contact pressure with the substrate is generated. In the probe pin, the coil spring urges the two contact members so as to separate the contact members, thereby generating contact pressure between the contact members and the IC terminals and the inspection substrate.

  In addition to the above example, an electrical penetration part having a structure as disclosed in Patent Documents 1 and 2 is exemplified.

JP 2001-291430 A JP 2008-21737 A

  In addition to the basic requirement of passing through current with as little loss as possible, the electrical penetration must stabilize the electrical contact state of the electrical penetration for a long time (contact stabilization), and the distance between adjacent electrical penetrations As much as possible (densification), and as one of the specific means to meet the above basic requirements, the distance between the main surfaces of anisotropic conductive members should be as narrow as possible (thinning) ) Is also required.

  However, the electrical penetration portion according to the above-described prior art cannot satisfy all of these requirements.

  That is, in the electric through-hole portion in which the conductive fine wire or conductive fine particle is embedded in the elastic body, the portion in contact with the IC terminal is the cross section of the fine wire or the surface of the fine particle, and the contact state with the IC terminal is stabilized. Hateful. In addition, there is a limit to dealing with higher density due to manufacturing reasons.

  In the case of a probe pin, since a coil spring is inherent, there is a trade-off relationship in principle between increasing the density and reducing the thickness.

  In the electrical penetration part disclosed in Patent Document 1, since the conductive member made of a metal plate material is repeatedly subjected to the application and release of the compressive force, this member is prone to metal fatigue, which is a big problem in terms of contact stabilization. I have it.

  The electric through-hole disclosed in Patent Document 2 has a metal circuit on the main surface, and further has a through hole at a position different from the metal circuit on the main surface. Is possible.

  In view of such a technical background, an object of the present invention is to provide an anisotropic conductive member including an electric through portion that can be achieved at a high level for any of the aforementioned contact stabilization, densification, and thinning. .

The present invention provided to solve the above problems is as follows.
(1) A plate-like elastic socket made of an insulator and having elasticity, and individually held in the elastic socket in the thickness direction of the elastic socket (that is, the main surface of the anisotropic conductive member according to the present invention) An anisotropic conductive member having a plurality of electrical through portions that allow current to pass in the normal direction), and the electrical through portions are electrically connected and vary in relative position in the thickness direction of the elastic socket. A first movable member and a second movable member, wherein the first movable member has an electrode contact portion for contacting an electrode attached to the measurement object on one main surface side of the elastic socket. The second movable member includes a substrate contact portion for contacting the wiring substrate of the measuring device on the other main surface side of the elastic socket, and external force is applied to the electrode contact portion and the substrate contact portion. Given these is the thickness of the elastic socket The first and second movable members are arranged in the state where at least the electrode contact portion and the substrate contact portion are close to each other so that an elastic restoring force is generated in the elastic socket when they are close to each other in the direction. A part of the elastic socket is disposed so as to be compressible, and the electric through-hole includes a sliding shaft provided on one of the first and second movable members and a sliding surface provided on the other of the members. It has a sliding contact structure that slides in the thickness direction of the elastic socket, and the distance between the electrode contact portion and the substrate contact portion maintains the electrical connection of these contact portions by the sliding contact structure. The sliding contact structure can be moved in the thickness direction of the elastic socket as it is, and the sliding contact structure includes a movable limiting means for limiting a range in which the sliding shaft slides on the sliding surface in the thickness direction of the elastic socket. , Movable by restriction means, the anisotropic conductive member movable range with respect to the substrate contact portion of the electrode contact portion is characterized by having an upper limit.

  (2) The movable restricting means includes a detachment stopper that restricts a range in which the electrode contact portion is separated from the substrate contact portion, and the detachment stopper protrudes from the slide surface toward the slide shaft. The anisotropic conductive member according to (1) above, comprising a surface protruding portion and a sliding shaft locking portion that stops sliding in one direction of the sliding shaft by contacting the sliding surface protruding portion.

  (3) A first columnar body extending from one of the electrode contact portion and the substrate contact portion toward the elastic socket in the thickness direction of the elastic socket is one of the first and second movable members. And a second columnar body extending from the other of the electrode contact portion and the substrate contact portion toward the elastic socket in the thickness direction of the elastic socket. The other is provided, the first columnar body includes a large diameter portion and a small diameter portion continuously disposed in the thickness direction of the elastic socket, the sliding shaft is provided in the large diameter portion, The sliding shaft locking portion is provided at the connecting portion between the large diameter portion and the small diameter portion, and the second columnar body is hollow inside and the first columnar shape in the thickness direction of the elastic socket. There is an opening at the end on the body side, and the sliding surface is the inner surface of the hollow portion A partially closed portion that protrudes inward from an edge of the opening so as to partially close the opening constitutes the sliding surface protruding portion, and the sliding shaft provided in the large diameter portion is the hollow The anisotropic conductive member according to (2) above, wherein the anisotropic conductive member is disposed in a portion and contacts the sliding surface provided on the inner surface of the hollow portion to constitute the sliding contact structure.

  (4) The partially closed portion can be deformed by contact with the large-diameter portion, and the large-diameter portion exceeds the partially closed portion by the deformation of the partially closed portion, and is hollow in the second columnar body. The anisotropic conductive member according to (3), which is inserted into the part.

  (5) The partial blocking portion is configured such that an external force corresponding to an adhesion force generated between the electrode contact portion and the electrode attached to the measurement object using an anisotropic conductive member is the thickness of the elastic socket. The anisotropic conductive member according to (4) above, which forms the sliding surface protruding portion even when applied in a direction opposite to the center direction of the elastic socket.

  (6) The anisotropic conductive member according to (5), wherein the large-diameter portion is made of a metal-based material and the partially closed portion is made of a resin-based material.

  (7) In the first and second movable members, the first and second columnar bodies are inserted into through-holes provided in the elastic socket, and the through-holes are fine pores having a small diameter. And a thick hole portion with a large diameter adjacent to the thickness direction of the elastic socket, wherein at least a part of the small diameter portion of the first columnar body is disposed in the pore portion, The anisotropic conductive member according to any one of (3) to (6), wherein the second columnar body is disposed.

  (8) In the second columnar body, the member constituting the partially closed portion is separate from the other members, and the member constituting the partially closed portion is defined by the large hole portion and the pore portion. The anisotropic conductive member according to the above (7), in which a positional variation with respect to the other member is restricted by being sandwiched between the formed step and the other member.

  (9) The other of the first and second movable members provided with the second columnar body is hollow inside and at the end on the first columnar body side in the thickness direction of the elastic socket. A first columnar member and a second columnar member having an opening and coaxially disposed, wherein the first columnar member has at least a part of a peripheral portion of the opening and an outer side surface following the first columnar member. The anisotropic conductive member according to any one of (3) to (8), wherein the anisotropically closed member is disposed in a hollow of the second columnar member, and the partial blocking portion is provided in an opening of the second columnar member. .

  (10) The second columnar member has a second opening at an end opposite to the first columnar body in the thickness direction of the elastic socket, and the second opening is located on the inner side from the edge. And the first columnar member has a peripheral edge portion of the opening and at least a part of the outer side surface that follows the partial closed portion and the second partial closed portion at both ends. The anisotropic conductive member according to (9), which is disposed in the hollow of the second columnar member.

  (11) The anisotropic conductive member according to (9) or (10), wherein the first columnar member is made of a metal-based material, and the second columnar member is made of a resin-based material.

  (12) One of the electrode contact portion and the substrate contact portion on which the first columnar body is extended is made of a conductive material, and is a central member that is in direct contact with the electrode, and the electrode contact portion and the substrate. The electrode contact portion comprises a ring-shaped member made of an insulator including a portion having the largest outer diameter on one side of the contact portion, and the center-side member is fitted in a central hollow portion of the ring-shaped member. The anisotropic conductive member according to any one of (3) to (11), wherein one of the substrate contact portions is configured.

  (13) The other of the electrode contact portion and the substrate contact portion on which the second columnar body extends is provided with a protruding portion protruding in an in-plane direction of the main surface of the elastic socket, and the protruding portion is The anisotropic conductive member according to any one of (3) to (12), wherein the second columnar body is inserted into the through hole so as to be in contact with a main surface of the elastic socket.

  The anisotropic conductive member according to the present invention has two movable members that can slide in the thickness direction of the elastic socket while maintaining an electrical contact state, and attach these in the direction in which these movable members are separated. The urging force is provided by an elastic restoring force of an elastic socket disposed between the two movable members. Therefore, a high balance between contact stabilization, densification and thinning has been realized. Moreover, even if a high contact pressure is generated between the IC terminal and the electrode contact portion, and the electrode contact portion may bite into the IC terminal, the two movable members are movable in the vertical direction. Therefore, when the inspection is finished and the IC is separated from the anisotropic conductive member, the movable member having the electrode contact portion that bites into the terminal of the IC is detached from the anisotropic conductive member. It is sufficiently suppressed.

It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on 1st embodiment of this invention. It is sectional drawing which shows notionally the use condition of the anisotropically conductive member which concerns on FIG. It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on 2nd embodiment of this invention. It is sectional drawing which shows notionally the use condition of the anisotropically conductive member which concerns on 2nd embodiment of this invention. It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on Example 3-1. It is sectional drawing which shows notionally the use condition of the anisotropically conductive member which concerns on Example 3-1 of this invention. It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on Example 3-2 of this invention. It is sectional drawing which shows notionally the use condition of the anisotropically conductive member which concerns on Example 3-2 of this invention. It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on Example 3-3 of this invention. It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on the modification 1 of this invention. It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on the modification 2 of this invention. It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on the modification 3 of this invention. It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on the modification 4 of this invention. It is a figure which shows notionally a part of cross section of the thickness direction of the elastic socket of the anisotropically conductive member which concerns on the modification 5 of this invention.

Hereinafter, an anisotropic conductive member according to the present invention will be described with reference to the drawings.
FIG. 1 is a view conceptually showing a part of a cross section in the thickness direction of an elastic socket of an anisotropic conductive member according to a first embodiment of the present invention.

  The anisotropic conductive member 100 according to the present embodiment includes an elastic plate-like elastic socket 101 made of an insulator and a plurality of elastic sockets 101 that are individually held in the elastic socket 101 and allow current to pass in the thickness direction of the elastic socket. The electrical penetration part 102 is provided. The material of the elastic socket is not particularly limited. Examples of the material include an insulating material having elasticity such as silicone rubber, fluororubber, or acrylic elastomer.

  The electric through-hole 102 includes a first movable member 103 and a second movable member 104 that are electrically connected and can change the relative position in the thickness direction of the elastic socket. The first movable member 103 includes an electrode contact portion 105 on one main surface side of the elastic socket 101 for contacting an electrode attached to the measurement object. The second movable member 104 includes a board contact portion 106 for contacting the wiring board of the measuring device on the other main surface side of the elastic socket 101.

  The first and second movable members 103 and 104 are arranged so that a part of the elastic socket 101 can be compressed in a state where at least the electrode contact portion 105 and the substrate contact portion 106 are close to each other. In FIG. 1, the electrode contact portion 105 and the substrate contact portion 106 have portions with the largest outer diameter (hereinafter also referred to as “trench portions”) 107 and 108, respectively, at the periphery of the through hole 109 on the main surface of the elastic socket 101. It arrange | positions so that the part 110,111 may be contacted. For this reason, when the electrode contact portion 105 and the substrate contact portion 106 come close to each other, the peripheral portions 110 and 111 of the through hole 109 in the main surface of the elastic socket 101 are compressed by the flange portions 107 and 108 of these contact portions. With this arrangement, an elastic force is applied to the elastic socket 101 so that an external force is applied to the electrode contact portion 105 and the substrate contact portion 106 and separates them when they approach each other in the thickness direction of the elastic socket. What happens is realized.

  The electric through-hole 102 includes one of the first or second movable members 103 and 104, in this embodiment, a slide shaft 112 provided on the first movable member 103, and the other of these members 103 and 104. In the form, the sliding surface 113 provided on the second movable member 104 and the sliding contact structure 114 that slides in the thickness direction of the elastic socket are provided. The sliding contact structure 114 allows the distance between the electrode contact portion 105 and the substrate contact portion 106 to vary in the thickness direction of the elastic socket while maintaining the electrical connection between these contact portions.

  The sliding contact structure 114 includes a movable restricting means 115 that restricts a range in which the sliding shaft 112 slides on the sliding surface 113 in the thickness direction of the elastic socket. The movable range of the electrode contact portion 105 relative to the substrate contact portion 106 has an upper limit due to the movable restriction means 115.

  The movable restricting means 115 includes a detachment stopper that restricts a range in which the electrode contact portion 105 is separated from the substrate contact portion 106. In the present embodiment, the movable restricting means 115 is made up of a detachment stopper. The detachment stopper 115 includes a sliding surface protrusion 116 that protrudes from the sliding surface 113 to the sliding shaft 112 side, in this embodiment, to the central axis side of the first movable member 103 including the sliding shaft 112, and the sliding surface protrusion portion. The sliding shaft locking portion 117 is configured to stop sliding in one direction of the sliding shaft 112 by contacting with 116.

  In the electric penetration part 102 according to the present embodiment, the first movable member 103 includes a first columnar body extending from the electrode contact part 105 toward the center of the elastic socket 101 in the thickness direction of the elastic socket. Hereinafter, the first movable member 103 including the first columnar body and the electrode contact portion 105 is also referred to as a plunger. A portion of the plunger 103 that protrudes from the main surface of the elastic socket 101 is included in the electrode contact portion 105. Therefore, the entire first columnar body is disposed inside the through hole 109 of the elastic socket 101. In the present embodiment, the electrode contact portion 105 is partially embedded in the through hole 109, and the outer diameter of the embedded portion is substantially the same as the hole diameter of the through hole 109. The part embedded in the electrode contact portion 105 is to prevent the plunger 103 from falling over due to contact with the IC terminal.

  The second movable member 104 includes a second columnar body extending from the substrate contact portion 106 toward the center of the elastic socket 101 in the thickness direction of the elastic socket. Hereinafter, the second movable member 104 including the second columnar body and the substrate contact portion 106 is also referred to as a barrel. A portion of the barrel 104 that protrudes from the main surface of the elastic socket 101 is included in the substrate contact portion 106. Therefore, the entire second columnar body is disposed inside the through hole 109 of the elastic socket 101.

  The first columnar body included in the plunger 103 includes a large-diameter portion 118 and a small-diameter portion 119 continuously arranged in the thickness direction of the elastic socket, and the slide shaft 113 is provided in the large-diameter portion 118. The sliding shaft locking portion 117 is provided at the connecting portion between the large diameter portion 118 and the small diameter portion 119.

  The second columnar body provided in the barrel 104 is hollow inside and has an opening at the end of the first columnar body side (that is, the plunger 103 side in the present embodiment) in the thickness direction of the elastic socket. A slip surface 113 is provided on the inner surface of the hollow portion inside the opening, and a partially closed portion that protrudes inward from the edge of the opening so as to partially close the opening constitutes a slide surface protruding portion 116. . The specific shape of the partial blockage is arbitrary. The ring may protrude inward from the entire periphery of the edge of the opening, or may protrude inward from a part of the edge of the opening.

  The slide shaft 112 provided in the large diameter portion 118 is disposed in the hollow portion inside the opening of the barrel 104, and forms a sliding contact structure 114 in contact with the slide surface 113 provided on the inner surface of the hollow portion. ing.

  2 shows an anisotropic conductive member 100 according to the first embodiment of the present invention shown in FIG. 1 attached to an inspection substrate 201 and compressed between the IC 202 and the inspection substrate 201 to inspect the IC 202. It is sectional drawing which shows notionally the possible state (it is also called "use state" in this specification).

  When the anisotropic conductive member 100 as a whole is compressed between the facing IC 202 and the inspection substrate 201 by the inspection device, the elastic socket 205 is formed between the flange portion 203 of the electrode contact portion and the flange portion 204 of the substrate contact portion. When compressed, both flange portions 203 and 204 receive elastic restoring force from the elastic socket 205. By transmitting a force based on this elastic restoring force to the electrode contact portion 206, the electrode contact portion 206 contacts the electrode of the IC 202 with a predetermined pressure. Therefore, the electrical contact between the electrode contact portion 206 and the IC 202 is stabilized.

  Subsequently, an anisotropic conductive member in which the partial structures of the plunger and the barrel in the anisotropic conductive member according to the first embodiment of the present invention are specifically specified is a second embodiment of the present invention. This will be described in detail with reference to FIGS.

FIG. 3 is a view conceptually showing a part of a cross section in the thickness direction of the elastic socket of the anisotropic conductive member according to the second embodiment of the present invention.
In the anisotropic conductive member 300 according to the second embodiment of the present invention, the large-diameter portion 301 is made of a metal material, and the partially closed portion 302 is made of a resin material. Here, the metal-based material is a material composed of a metal or an alloy, and is characterized by having sufficiently higher hardness and conductivity than a resin-based material described below. On the other hand, the resin-based material is a material having a resin as a component and is substantially an insulator, and has a sufficiently low elastic modulus as compared with the above-described metal-based material, and therefore is in contact with the metal-based material. In some cases, the resin-based material has a characteristic of preferentially elastic deformation. Therefore, the resin-based material includes a case where it is made of rubber or a case where it is made of an elastomer.

  Specific examples of the resin material include relatively soft resins such as nylon and polyacetal. Specific examples of the metal-based material include iron-based metals such as stainless steel and carbon steel, and copper-based metals such as brass and beryllium copper. In addition, it is desirable that the metal material is plated with gold in order to suppress the contact resistance of the sliding portion.

  Since the metal-based material and the resin-based material have the characteristics as described above, the partially closed portion 302 can be elastically deformed by contact with the large-diameter portion 301. For this reason, the large-diameter portion 301 is initially outside the hollow portion 304 of the barrel 303 but comes into contact with the partially closed portion 302, and exceeds the partially closed portion 302 due to the above-described deformation of the partially closed portion 302. It is installed by being inserted into the hollow portion 304 of 303.

  Here, the partially closed portion 302 is a close contact generated between the electrode contact portion 305 and the electrode attached to the IC that is the measurement object using the anisotropic conductive member 300, for example, a solder ball. Even when the external force corresponding to the force is applied in the direction opposite to the center direction of the elastic socket 306 in the thickness direction of the elastic socket, that is, when the IC is applied in the direction away from the anisotropic conductive member 300, the sliding surface protrusion is formed. Separation of the plunger 307 from the barrel 303 is suppressed.

  The barrel 303 is made of a resin material as described above, and the resin material is generally not a good conductor. On the other hand, the sliding surface on the inner side surface of the hollow portion 304 of the barrel 303 is an electrical contact portion with respect to the plunger 307, and therefore needs to be a good conductor. Therefore, the barrel 303 of the anisotropic conductive member 300 according to the present embodiment is hollow inside, and the first columnar body side in the thickness direction of the elastic socket (that is, the plunger 307 side in the present embodiment). The first columnar member 308 made of a metal-based material and the second columnar member 309 made of a resin-based material, which are coaxially arranged with an opening at the end of). In this embodiment, the first columnar member 308 has one opening 316, and the second columnar member 309 is on the first columnar body side in the thickness direction of the elastic socket (that is, in this embodiment, the plunger 307). The first opening 317 is provided at the end of the second side, and the second opening 318 is provided at the end opposite to the side where the first opening 317 is provided.

  The first columnar member 308 is arranged in the hollow of the second columnar member 309 at the periphery of the opening and at least a part of the outer side surface following the periphery. That is, the barrel 303 according to the present embodiment has a double tube structure arranged coaxially. Hereinafter, the first columnar member 308 is also referred to as an inner barrel, and the second columnar member 309 is also referred to as an outer barrel. A partially closed portion 302 made of a resin material is provided in the first opening 317 of the outer barrel 309. Further, an end 319 of the inner barrel 308 opposite to the opening 316 protrudes from the second opening 318 of the outer barrel 309 and constitutes a portion that directly contacts the substrate in the substrate contact portion.

  The outer barrel 309 may have an integral structure or may be composed of a plurality of members. As a specific example in the case of being composed of a plurality of members, it can be divided by a plane including the central axis of the outer barrel 309.

  Thus, the barrel 303 has a double-pipe structure, the inner barrel 308 is a good conductor, and the outer barrel 309 is an insulator. When the anisotropic conductive member is used, the electrical signal flowing is a high-frequency signal. In addition, there is an advantage that waveform deterioration is reduced. That is, since the high-frequency signal flows on the surface of the conductor due to the skin effect, the length of the outer surface of the cross-section cut along the cross-section including the central axis of the barrel of the conductor portion of the barrel is short to suppress deterioration of the high-frequency signal To preferred. Since the outer surface of the barrel 303 according to the present embodiment is formed by the inner barrel 308, the length of the outer surface is shorter than the outer surface of the barrel that does not have a double tube structure. Therefore, the barrel 303 according to the present embodiment is less likely to degrade the high-frequency signal as compared with a normal single-tube barrel.

  From the viewpoint of considering the skin effect in such a high frequency signal, the electrode contact portion 305 of the plunger 307 of the anisotropic conductive member 300 according to the present embodiment is made of a conductive material, specifically a metal material, A ring-shaped member (hereinafter referred to as “ring-shaped insulation”) including a member 311 on the center side that is in direct contact and an insulator including a portion having a largest outer diameter (a flange portion) in the electrode contact portion 305, specifically, a resin-based material. 3). The electrode contact portion 305 is configured by fitting the central member 311 into the central hollow portion of the ring-shaped insulating member 312.

  The electrode contact portion 305 having such a structure has a length of the outer surface of a cross section cut by a cross section including the central axis of the plunger with respect to the conductor portion of the plunger as compared with the electrode contact portion 305 having no such structure. The ring-shaped insulating member 312 is not included and the length is shortened. Therefore, the deterioration of the high frequency signal is suppressed by having such a structure.

  When a force that compresses the elastic socket 306 in the thickness direction of the elastic socket is applied to the central member 311, the force is reliably transmitted to the flange portion of the electrode contact portion 305. The central member 311 and the ring-shaped insulating member 312 should have a structure capable of compressing the elastic socket 306 at a portion. Further, the ring-shaped insulating member 312 has a step structure, and a part of the ring-shaped insulating member 312 (stepped portion in the present embodiment) is inserted into the through hole 314 in the elastic socket 306. It is preferable from the viewpoint of suppressing the plunger from sliding while tilting with respect to the barrel during use before and after that.

  The outer barrel 309 according to the present embodiment has two openings as described above, and is provided at the end opposite to the first columnar body side (the plunger 307 side in the present embodiment) in the thickness direction of the elastic socket. The provided second opening 318 includes a second partial blocking portion 313 that protrudes inward from the edge portion. The inner barrel 308 has at least a part thereof, specifically, a peripheral portion of the opening 316 of the inner barrel 308 and at least a part of the outer side surface following the partial closed portion 302 and the second partial closed portion 313. It arrange | positions in the hollow of the outer barrel 309 used as both ends. The specific structure of the second partially closed portion 313 is arbitrary as with the partially closed portion 302.

  By having such a structure, even if there is a clearance between the inner surface of the outer barrel 309 and the outer surface of the inner barrel 308, the inner barrel 308 can move freely within the outer barrel 309. The inner barrel 308 is prevented from dropping from the outer barrel 309.

  In addition, what is necessary is just to select soft resin etc. as a material, when producing the outer barrel 309 which has such two partial obstruction | occlusion parts integrally using a molding die. The outer barrel 309 can be removed from the mold even if there is a portion protruding from the inner surface by a method generally called unreasonable. Specific examples of such materials include nylon and polyacetal exemplified above.

Hereinafter, an example of the method for manufacturing the anisotropic conductive member according to the present embodiment will be described.
First, the inner barrel 308 is press-fitted into the inside from the second opening 318 side where the second partial blocking portion 313 of the outer barrel 309 is provided. 309.

  Next, the barrel 303 including the inner barrel 308 and the outer barrel 309 is inserted from one opening side of the through hole 314 in the elastic socket 306. That is, one surface facing the main surface of the elastic socket 306 in the flange portion 315 which is a protruding portion protruding outward from the outer surface of the end portion on the opposite side to the opening having the partial closing portion 302 of the barrel 303 is an elastic socket. The barrel 303 is partially inserted into the through-hole 314 so as to contact the peripheral edge of the through-hole 314 on the main surface of 306.

  Here, since the inner diameter of the through hole 314 is set to be approximately equal to the diameter of the cylindrical outer surface of the barrel 303, the barrel 303 is held by the inner surface of the through hole 314, and the barrel 303 can be easily moved from the through hole 314 to the barrel 303. Will not fall out.

  When the outer barrel 309 is divided by the plane including the central axis as described above, first, the outer barrel 309 is inserted into the through hole 314, and then the inner barrel 308 is inserted into the outer barrel 309. Also good. Since the outer barrel 309 is divided, the inner barrel 308 can be easily inserted.

  Subsequently, a plunger 307 including a central member 311 and a ring-shaped insulating member 312 is inserted from the other opening side of the through hole 314 in the elastic socket 306. When the large diameter portion 301 of the plunger 307 comes into contact with the partially closed portion 302 of the barrel 303 by inserting the plunger 307, the plunger 307 is further pushed into the through hole 314 to be inserted, and the large diameter portion 301 The closed portion 302 is deformed and the large diameter portion 301 is inserted into the hollow portion 304 of the barrel 303. When the large diameter portion 301 is completely inserted into the hollow portion 304, the partially closed portion 302 returns from the deformed state to the initial state, and the large diameter portion 301 is held in the hollow portion 304.

  In this way, the coupling body (hereinafter sometimes referred to as “probe pin”) composed of the plunger 307 and the barrel 303 is held in the through hole 314 of the elastic socket 306 without being easily separated.

  FIG. 4 is a cross-sectional view conceptually showing a usage state of the anisotropic conductive member 300 according to the present embodiment.

FIG. 5 is a part of a cross section in the thickness direction of an elastic socket of an example of an anisotropic conductive member according to the third embodiment of the present invention (also referred to as “Example 3-1” in the present specification). FIG.
The anisotropic conductive member according to Example 3-1 shown in FIG. 5 is held with respect to the elastic socket by partially inserting the probe pin into the through hole provided in the elastic socket. .

  The structure of the barrel of the anisotropic conductive member according to Example 3-1 is the same as that of the barrel 303 of the anisotropic conductive member 300 according to the second embodiment. The structure of the plunger of the anisotropic conductive member according to Example 3-1 is almost the same as that of the plunger 307 of the anisotropic conductive member 300 according to the second embodiment, but is anisotropic according to Example 3-1. In the conductive member, unlike the through hole 314 of the anisotropic conductive member 300 according to the second embodiment, the region including the plunger side opening in the through hole is narrowed. That is, the through-hole of Example 3-1 includes a fine-diameter fine hole part and a thick-diameter thick hole part adjacent to the thickness direction of the elastic socket, and the small-diameter part of the plunger is located in the fine hole part. The portion other than the substrate contact portion of the barrel 303 is disposed in the thick hole portion. In accordance with this configuration, the ring-shaped insulating member in the plunger of Example 3-1 has a smaller diameter of the central hollow portion than the ring-shaped insulating member 312 in the plunger 307 of the second embodiment. Yes. Further, in the case of this structure, the sliding of the plunger while tilting with respect to the barrel during use or before and after use thereof is suppressed by the inner side surface of the pore portion in the through hole, so that Example 3- One ring-shaped insulating member may not have a step structure. In addition, when the outer diameter of the ring-shaped insulating member is small, this member can also be prevented from entering the inside of the through hole and hindering sliding between the barrel and the plunger due to the small hole diameter of the through hole. Has been.

FIG. 6 is a cross-sectional view conceptually showing a usage state of the anisotropic conductive member according to Example 3-1 shown in FIG.
As shown in FIG. 6, when the plunger is pushed in by the IC terminal (solder ball), the large diameter portion of the plunger moves to the back of the hollow portion of the barrel. The void area within which the barrel or plunger is not present is compressed. In the anisotropic conductive member according to Example 3-1 shown in FIG. 6, the step portion between the fine hole portion and the thick hole portion in the elastic socket is in contact with the barrel. The presence / absence and size of the void region can be arbitrarily set by changing the balance of the length of the elastic socket in the through hole to the pore portion and the large hole portion. It may be allowed to disappear or may remain.

FIG. 7 is a partial cross-sectional view in the thickness direction of an elastic socket of another example of the anisotropic conductive member according to the third embodiment (also referred to as “Example 3-2” in this specification). It is a figure shown notionally.
In the anisotropic conductive member according to Example 3-2 shown in FIG. 7, the gap region is given an external force that compresses them in the state before use, that is, the electrode contact portion and the substrate contact portion. Even if there is no gap, the gap is not generated. In other words, in this embodiment, the end of the barrel in the thickness direction of the elastic socket in the barrel (hereinafter also referred to as “the end on the electrode side of the barrel”) is the large hole portion and the pore of the through hole. Is in contact with a step portion formed by the portion (hereinafter also referred to as “through-hole step portion”). In the case of this structure, when an external force is applied to the electrode contact portion and the substrate contact portion in the usage state, and when they are close to each other in the thickness direction of the elastic socket, an elastic restoring force is generated in the elastic socket to separate them. The part that compresses a part of the elastic socket is a ring-shaped insulating member in the plunger and an electrode side end of the barrel in the barrel. Therefore, the barrel according to this modification does not require the flange portion of the substrate contact portion that is essential in the barrels of the first embodiment, the second embodiment, and the example 3-1. The fact that the substrate contact portion does not have a flange portion is effective for narrowing the arrangement of probe pins.

FIG. 8 is a sectional view conceptually showing a usage state of the anisotropic conductive member according to Example 3-2 shown in FIG. 7.
As shown in FIG. 8, when the plunger is pushed in by the IC terminal (solder ball), the large-diameter portion of the plunger moves to the back of the hollow portion of the barrel. Along with this movement, the elastic socket that forms the periphery of the pore portion of the through hole is compressed, and based on the elastic recovery force of the elastic socket of this compressed portion, the ring-shaped insulating member of the plunger and the electrode side end of the barrel A force for separating the two is applied.

FIG. 9 is a cross-sectional view in the thickness direction of an elastic socket of another example of the anisotropic conductive member according to the third embodiment (also referred to as “Example 3-3” in this specification). It is a figure which shows a part notionally.
The relationship between the probe pin and the through hole in Example 3-3 is the same as that in Example 3-2, and the electrode side end of the barrel is in contact with the through hole step. However, unlike the barrel of Example 3-2, the barrel of Example 3-3 does not have a double tube structure. The barrel of Example 3-3 has a single tube structure, but the member constituting the partially closed portion is separate from the other members. Specifically, the member constituting the partially closed portion is made of a resin material. The other parts are made of a metal-based material. And the member which comprises a partial obstruction | occlusion part is pinched | interposed into the through-hole level | step-difference part and the other member which consists of metal type materials, and the position fluctuation | variation with respect to another member is restrict | limited.

  In this configuration, the outer diameter of the barrel is smaller than that of the barrel of Example 3-2 because the outer barrel is not provided. The narrow barrel is effective in reducing the pitch of the probe pins because the maximum inner diameter of the through hole can be reduced.

  In Example 3-3, the member constituting the partially closed portion is made of a resin material, but is not limited to this. For example, when the member which comprises a partial obstruction | occlusion part is comprised from several members, this member may be comprised from the metal type material. As a specific example in such a case, there is a configuration in which a ring-shaped structure is divided into two on a plane including the central axis of the ring. In this configuration, by contacting the large diameter portion of the plunger, this member is separated so that the ring-shaped structure is bent, and the function as a partially closed portion is lost, and the large diameter portion is inserted into the barrel. It is possible to On the other hand, since the through-hole step portion and the other member made of a metal-based material compress the ring-shaped structure in use, the separation of the structure is suppressed. Therefore, the large diameter portion is sufficiently prevented from coming out of the barrel in use.

Hereinafter, the anisotropic conductive members according to the second embodiment described so far and the modified examples of the anisotropic conductive members according to Examples 3-1 to 3-3 will be listed.
FIG. 10 conceptually shows a part of a cross section in the thickness direction of an elastic socket of a modified example (also referred to as “modified example 1” in this specification) of an anisotropic conductive member according to the second embodiment. FIG.
The anisotropic conductive member according to Modification 1 is in a state before use, that is, in a state where the probe pin is disposed in the through hole of the elastic socket, and the flange portion of the electrode contact portion and the flange portion of the substrate contact portion are elastic sockets. Is compressed. For this reason, from the initial stage when the contact between the electrode contact portion of the anisotropic conductive member and the IC terminal (solder ball) is started, between the plunger and the IC terminal, and between the barrel and the electrode of the inspection substrate A contact pressure is generated in this case, and electrical contact is more stable and preferable.

  The configuration of Modification 1 can be applied to both the anisotropic conductive member according to the second embodiment and the anisotropic conductive member according to Examples 3-1 to 3-3.

  FIG. 11 conceptually shows a part of a cross section in the thickness direction of an elastic socket of another modified example of the anisotropic conductive member according to the second embodiment (also referred to as “modified example 2” in this specification). FIG.

  The anisotropic conductive member which concerns on the modification 2 has an adhesive layer between the ring-shaped insulation member and the surface of the elastic socket facing this. By fixing the ring-shaped insulating member to the surface of the elastic socket with an adhesive or the like, it is possible to eliminate the possibility that the ring-shaped insulating member will sink into the through hole of the elastic socket when the elastic socket is compressed, preferable. In this example, the ring-shaped insulating member and the elastic socket are fixed by the adhesive layer. However, when the elastic socket is made of rubber, a thin ring-shaped rubber having high hardness may be sandwiched instead of the adhesive layer. . Since the frictional force between the rubbers is extremely large, the displacement of the ring-shaped insulating member with respect to the elastic socket can be stably suppressed.

  The configuration of Modification 2 can be applied to both the anisotropic conductive member according to the second embodiment and the anisotropic conductive member according to Examples 3-1 to 3-3.

  FIG. 12 conceptually shows a part of a cross section in the thickness direction of an elastic socket of a modified example (also referred to as “modified example 3” in this specification) of an anisotropic conductive member according to Example 3-1. FIG.

In the anisotropic conductive member according to Modification 3, the plunger does not have a ring-shaped insulating member. For this reason, the outer diameter of the plunger is small. The fact that the maximum outer diameter portion of the plunger is thin is effective in narrowing the arrangement of the probe pins.
The configuration of Modification 3 can be applied to any of the anisotropically conductive members according to Examples 3-1 to 3-3.

FIG. 13 is a part of a cross section in the thickness direction of an elastic socket of another modified example of the anisotropic conductive member according to the second embodiment (also referred to as “modified example 4” in the present specification). FIG.
The anisotropic conductive member according to Modification 4 includes a cylindrical member whose inner barrel forms a sliding surface and a member that forms part of the substrate contact portion. By having such a structure, it becomes possible to reduce the thickness of the cylindrical member. Therefore, the outer diameter of the outer barrel can be reduced. The narrowing of the outer barrel can reduce the maximum inner diameter of the through hole, and is therefore effective in narrowing the arrangement of the probe pins. There is also an advantage that the inner barrel can be easily manufactured.

  The configuration of Modification 4 can be applied to both the anisotropic conductive member according to the second embodiment and the anisotropic conductive member according to Examples 3-1 to 3-3.

  FIG. 14 is a partial cross-sectional view in the thickness direction of an elastic socket of still another modified example (also referred to as “modified example 5” in this specification) of the anisotropic conductive member according to the second embodiment. It is a figure shown notionally.

  The anisotropic conductive member according to Modification 5 has the basic structure opposite to the anisotropic conductive member according to the second embodiment. That is, the plunger provided with the slide shaft has the substrate contact portion, and the barrel provided with the slide surface has the electrode contact portion.

  The configuration of Modification 5 can be applied to both the anisotropic conductive member according to the second embodiment and the anisotropic conductive members according to Examples 3-1 and 3-2.

  The modifications 1 to 5 described above may be applied alone, or may be applied in combination with configurations according to a plurality of modifications.

DESCRIPTION OF SYMBOLS 100 Anisotropic conductive member 101 Elastic socket 102 Electrical penetration part 103 1st movable member 104 2nd movable member 105 Electrode contact part 106 Board | substrate contact part 113 Sliding surface 112 Sliding shaft 116 Sliding surface protrusion part 117 Sliding shaft latching part

In use of the electric through-portion in use, the terminal of the IC and the inspection substrate and the end portion on the main surface of the electric through-hole portion of the anisotropic conductive member are in a predetermined state in order to stabilize the electrical contact between them. Contact with pressure. In many cases, a structure for generating a contact pressure using an elastic restoring force is provided in the electric through-hole so that the contact pressure is generated to such an extent that the electrical contact is stabilized.

The present invention provided to solve the above problems is as follows.
(1) A plate-like elastic socket made of an insulator and having elasticity, and individually held in the elastic socket in the thickness direction of the elastic socket (that is, the main surface of the anisotropic conductive member according to the present invention) An anisotropic conductive member having a plurality of electrical through portions that allow current to pass in the normal direction), and the electrical through portions are electrically connected and vary in relative position in the thickness direction of the elastic socket. A first movable member and a second movable member, wherein the first movable member has an electrode contact portion for contacting an electrode attached to the measurement object on one main surface side of the elastic socket. The second movable member includes a substrate contact portion for contacting the wiring substrate of the measuring device on the other main surface side of the elastic socket, and external force is applied to the electrode contact portion and the substrate contact portion. Given these is the thickness of the elastic socket The first and second movable members are arranged in the state where at least the electrode contact portion and the substrate contact portion are close to each other so that an elastic restoring force is generated in the elastic socket when they are close to each other in the direction. A part of the elastic socket is disposed so as to be compressible, and the electric through-hole includes a sliding shaft provided on one of the first and second movable members and a sliding surface provided on the other of the members. It has a sliding contact structure that slides in the thickness direction of the elastic socket, and the distance between the electrode contact portion and the substrate contact portion maintains the electrical connection of these contact portions by the sliding contact structure. The sliding contact structure can be moved in the thickness direction of the elastic socket as it is, and the sliding contact structure includes a movable limiting means for limiting a range in which the sliding shaft slides on the sliding surface in the thickness direction of the elastic socket. , The movable limiting means, the movable range with respect to the substrate contact portion of the electrode contact portion is to have an upper limit, anisotropic conductive member according to the present invention is characterized.

The anisotropic conductive member also has the following characteristics. The movable restricting means includes a detachment stopper that restricts a range in which the electrode contact portion is separated from the substrate contact portion, and the detachment stopper protrudes from the slide surface to the slide shaft side. And a sliding shaft locking portion that stops sliding in one direction of the sliding shaft by contacting the sliding surface protrusion .

The anisotropic conductive member also has the following characteristics. One of the first and second movable members includes a first columnar body extending from one of the electrode contact portion and the substrate contact portion toward the elastic socket in the thickness direction of the elastic socket, Further, the other of the first and second movable members includes a second columnar body extending from the other of the electrode contact portion and the substrate contact portion toward the elastic socket in the thickness direction of the elastic socket. The first columnar body includes a large-diameter portion and a small-diameter portion that are continuously arranged in the thickness direction of the elastic socket, and the slide shaft is provided in the large-diameter portion, and the slide shaft mechanism A stopper is provided at a connecting portion between the large diameter portion and the small diameter portion, and the second columnar body is hollow inside and is an end on the first columnar body side in the thickness direction of the elastic socket. Has an opening in the part, and the sliding surface is provided on the inner surface of the hollow part. A partially closed portion projecting inwardly from an edge of the opening so as to partially close the opening constitutes the sliding surface protruding portion, and the sliding shaft provided in the large diameter portion is in the hollow portion. The sliding contact structure is configured in contact with the sliding surface provided on the inner surface of the hollow portion .

The anisotropic conductive member described above further has the following characteristics. The partially closed portion can be deformed by contact with the large-diameter portion, and the large-diameter portion exceeds the partially closed portion by the deformation of the partially closed portion, and into the hollow portion of the second columnar body. It is inserted.

(2) The partial blocking portion is configured such that an external force corresponding to an adhesion force generated between the electrode contact portion and the electrode attached to the measurement object using an anisotropic conductive member is a thickness of the elastic socket. The anisotropic conductive member according to the above (1) , which constitutes the sliding surface protruding portion even when applied in a direction opposite to the center direction of the elastic socket.

(3) The anisotropic conductive member according to (2) , wherein the large-diameter portion is made of a metal-based material and the partially closed portion is made of a resin-based material.

(4) As for said 1st and 2nd movable member, said 1st and 2nd columnar body is inserted in the through-hole provided in said elastic socket, and said through-hole is a pore part with a thin diameter. And a thick hole portion with a large diameter adjacent to the thickness direction of the elastic socket, wherein at least a part of the small diameter portion of the first columnar body is disposed in the pore portion, The anisotropic conductive member according to any one of (1) to (3) , wherein the second columnar body is disposed.

(5) the second columnar body is composed of a member and the other member constituting the partial occlusion, members constituting the partial occlusion is a the other member and another member, wherein the partial obstruction constituting a part member is held between the step formed by the large hole portion and the pore portion and the other member, the position variation relative to the other member is limited, the (4), wherein An anisotropic conductive member.

(6) The other of the first and second movable members provided with the second columnar body is hollow inside and at the end on the first columnar body side in the thickness direction of the elastic socket. A first columnar member and a second columnar member having an opening and coaxially disposed, wherein the first columnar member has at least a part of a peripheral portion of the opening and an outer side surface following the first columnar member. The anisotropic conductive member according to any one of (1) to (5) , wherein the anisotropically closed member is disposed in a hollow of the second columnar member, and the partial blocking portion is provided in an opening of the second columnar member. .

(7) The second columnar member has a second opening at an end opposite to the first columnar body in the thickness direction of the elastic socket, and the second opening is located on the inner side from the edge. And the first columnar member has a peripheral edge portion of the opening and at least a part of the outer side surface that follows the partial closed portion and the second partial closed portion at both ends. The anisotropic conductive member according to (6) , which is disposed in the hollow of the second columnar member.

(8) The anisotropic conductive member according to (6) or (7) , wherein the first columnar member is made of a metal-based material, and the second columnar member is made of a resin-based material.

(9) One of the electrode contact portion and the substrate contact portion on which the first columnar body is extended is made of a conductive material and directly connected to the electrode attached to the measurement object or the wiring board of the measurement device A central member in contact with the ring-shaped member made of an insulator including a portion having the largest outer diameter in one of the electrode contact portion and the substrate contact portion, and a central hollow portion in the ring-shaped member The anisotropic conductive member according to any one of the above (1) to (8) , wherein one of the electrode contact portion and the substrate contact portion is configured by fitting the member on the center side into the substrate.

(10) The other of the electrode contact portion and the substrate contact portion on which the second columnar body extends is provided with a protruding portion protruding in an in-plane direction of the main surface of the elastic socket, and the protruding portion is The anisotropic conductive member according to any one of (1) to (9) , wherein the second columnar body is inserted into the through hole so as to contact a main surface of the elastic socket.

The anisotropic conductive member described above further has the following characteristics. The partially closed portion can be deformed by contact with the large-diameter portion, and the large-diameter portion exceeds the partially closed portion by the deformation of the partially closed portion, and into the hollow portion of the second columnar body. Ri Na is inserted, the partial occlusion is Ru is composed of a resin-based material.

(3) The anisotropic conductive member according to (2) , wherein the large-diameter portion is made of a metal-based material.

(10) The other of the electrode contact portion and the substrate contact portion on which the second columnar body extends is provided with a protruding portion protruding in an in-plane direction of the main surface of the elastic socket, and the protruding portion is The anisotropic conductive member according to (4) , wherein the second columnar body is inserted into the through hole so as to contact the main surface of the elastic socket.

Claims (13)

An anisotropic conductive member comprising a plate-like elastic socket made of an insulator and having elasticity, and a plurality of electric through-holes that are individually held in the elastic socket and pass current in the thickness direction of the elastic socket. There,
The electrical penetration portion includes a first movable member and a second movable member that are electrically connected and capable of changing a relative position in the thickness direction of the elastic socket.
The first movable member includes an electrode contact portion for contacting an electrode attached to a measurement object on one main surface side of the elastic socket,
The second movable member is provided with a substrate contact portion on the other main surface side of the elastic socket for contacting the wiring substrate of the measuring device,
When the external force is applied to the electrode contact portion and the substrate contact portion so that they are close to each other in the thickness direction of the elastic socket, an elastic restoring force that separates them is generated in the elastic socket. The second movable member is arranged so that at least a part of the elastic socket can be compressed in a state where the electrode contact portion and the substrate contact portion are close to each other.
In the electrical penetration portion, a slide shaft provided on one of the first or second movable member and a slide surface provided on the other of the members slide in the thickness direction of the elastic socket. With a sliding contact structure, the distance between the electrode contact portion and the substrate contact portion can be varied in the thickness direction of the elastic socket while maintaining the electrical connection between the contact portions. And
The sliding contact structure includes a movable restricting means for restricting a range in which the slide shaft slides on the sliding surface in the thickness direction of the elastic socket, and the substrate contact of the electrode contact portion by the movable restricting means. An anisotropic conductive member characterized in that the movable range with respect to the portion has an upper limit.   The movable restricting means includes a detachment stopper that restricts a range in which the electrode contact portion is separated from the substrate contact portion, and the detachment stopper protrudes from the slide surface to the slide shaft side. The anisotropic conductive member according to claim 1, further comprising a sliding shaft locking portion that stops sliding in one direction of the sliding shaft by contacting the sliding surface protruding portion. One of the first and second movable members includes a first columnar body extending from one of the electrode contact portion and the substrate contact portion toward the elastic socket in the thickness direction of the elastic socket, Further, the other of the first and second movable members includes a second columnar body extending from the other of the electrode contact portion and the substrate contact portion toward the elastic socket in the thickness direction of the elastic socket. ,
The first columnar body includes a large-diameter portion and a small-diameter portion that are continuously arranged in the thickness direction of the elastic socket, and the slide shaft is provided in the large-diameter portion, and the slide shaft is locked. The portion is provided at a connecting portion between the large diameter portion and the small diameter portion,
The second columnar body has a hollow inside and has an opening at an end portion on the first columnar body side in the thickness direction of the elastic socket, and the sliding surface is provided on an inner surface of the hollow portion. The partial blocking portion protruding inwardly from the edge of the opening to partially close the opening constitutes the sliding surface protruding portion,
The slide shaft provided in the large-diameter portion is disposed in the hollow portion, and constitutes the sliding contact structure in contact with the slide surface provided on the inner surface of the hollow portion. An anisotropic conductive member.   The partially closed portion can be deformed by contact with the large-diameter portion, and the large-diameter portion exceeds the partially closed portion by the deformation of the partially closed portion, and into the hollow portion of the second columnar body. The anisotropically conductive member according to claim 3, wherein the anisotropically conductive member is inserted.   The partially closed portion uses an anisotropic conductive member, and an external force corresponding to an adhesion force generated between the electrode contact portion and the electrode attached to the object to be measured is in the thickness direction of the elastic socket. The anisotropic conductive member according to claim 4, wherein the sliding surface protruding portion is configured even when applied in a direction opposite to the elastic socket center direction.   The anisotropic conductive member according to claim 5, wherein the large-diameter portion is made of a metal-based material, and the partially closed portion is made of a resin-based material. In the first and second movable members, the first and second columnar bodies are inserted into through holes provided in the elastic socket,
The through hole is provided with a fine pore part having a small diameter and a thick hole part having a large diameter adjacent to the thickness direction of the elastic socket,
The at least one part of the small diameter part of said 1st columnar body is arrange | positioned in the said pore part, and said 2nd columnar body is arrange | positioned in the said large hole part. Anisotropic conductive member.   In the second columnar body, the member constituting the partial blockage is a separate body from the other members, and the member constituting the partial blockage is formed by the thick hole portion and the pore portion. The anisotropic conductive member according to claim 7, wherein a position variation with respect to the other member is limited by being sandwiched between the step and the other member. The other of the first and second movable members including the second columnar body is hollow inside and has an opening at the end on the first columnar body side in the thickness direction of the elastic socket. And a first columnar member and a second columnar member arranged on the same axis,
In the first columnar member, a peripheral portion of the opening and at least a part of the outer side surface subsequent thereto are arranged in the hollow of the second columnar member,
The anisotropic conductive member according to any one of claims 3 to 8, wherein the partially closed portion is provided in an opening of the second columnar member.   The second columnar member has a second opening at an end opposite to the first columnar body in the thickness direction of the elastic socket, and the second opening protrudes inward from the edge. The first columnar member includes a second partially closed portion, and at least a part of the outer peripheral surface of the first columnar member has the partially closed portion and the second partially closed portion as both ends. The anisotropic conductive member according to claim 9, which is disposed in the hollow of the second columnar member.   The anisotropic conductive member according to claim 9 or 10, wherein the first columnar member is made of a metal-based material, and the second columnar member is made of a resin-based material.   One of the electrode contact portion and the substrate contact portion on which the first columnar body is extended includes a central member that is made of a conductive material and is in direct contact with the electrode, and the electrode contact portion and the substrate contact portion. The electrode contact portion and the substrate are formed by a ring-shaped member made of an insulator including a portion having the largest outer diameter on one side, and the center-side member is fitted into a central hollow portion of the ring-shaped member. The anisotropic conductive member according to claim 3, wherein one of the contact portions is configured.   The other of the electrode contact portion and the substrate contact portion on which the second columnar body extends is provided with a protrusion portion that protrudes in the in-plane direction of the main surface of the elastic socket, and the protrusion portion of the elastic socket The anisotropic conductive member according to any one of claims 3 to 12, wherein the second columnar body is inserted into the through hole so as to contact the main surface.

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