JP2014078905A5 - - Google Patents
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- Publication number
- JP2014078905A5 JP2014078905A5 JP2012226670A JP2012226670A JP2014078905A5 JP 2014078905 A5 JP2014078905 A5 JP 2014078905A5 JP 2012226670 A JP2012226670 A JP 2012226670A JP 2012226670 A JP2012226670 A JP 2012226670A JP 2014078905 A5 JP2014078905 A5 JP 2014078905A5
- Authority
- JP
- Japan
- Prior art keywords
- higher performance
- stable
- less expensive
- electronic device
- manufacturing yield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Description
上述したように、電子部品として、より高性能な特性を劣化させることなく、また、製
造歩留まりを高く安定させたＭＥＭＳ振動子１００が活用されることにより、より高性能
で安価な電子機器を提供することができる。
As described above, by using the MEMS vibrator 100 having a stable and high manufacturing yield without degrading higher performance characteristics as an electronic component , a higher performance and less expensive electronic device is provided. can do.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012226670A JP2014078905A (en) | 2012-10-12 | 2012-10-12 | Vibrator, electronic apparatus, and manufacturing method of vibrator |
| CN201310459275.7A CN103731116A (en) | 2012-10-12 | 2013-09-23 | Vibrator, manufacturing method of vibrator, electronic apparatus, and mobile unit |
| US14/047,302 US20140103778A1 (en) | 2012-10-12 | 2013-10-07 | Vibrator, manufacturing method of vibrator, electronic apparatus, and mobile unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012226670A JP2014078905A (en) | 2012-10-12 | 2012-10-12 | Vibrator, electronic apparatus, and manufacturing method of vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014078905A JP2014078905A (en) | 2014-05-01 |
| JP2014078905A5 true JP2014078905A5 (en) | 2014-06-19 |
Family
ID=50783868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012226670A Pending JP2014078905A (en) | 2012-10-12 | 2012-10-12 | Vibrator, electronic apparatus, and manufacturing method of vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2014078905A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116671005A (en) | 2020-12-11 | 2023-08-29 | 株式会社村田制作所 | Piezoelectric vibrator, piezoelectric oscillator, and method for manufacturing piezoelectric vibrator |
-
2012
- 2012-10-12 JP JP2012226670A patent/JP2014078905A/en active Pending
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