JP2014072493A - Cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cutting device which allows for further enhancement of productivity.SOLUTION: A cutting device 2 comprises: first cutting means 6 having a first cutting blade 66 for cutting a workpiece 56 held on a holding table 4, and a first spindle 67 to which the first cutting blade is attached; second cutting means 8 having a second cutting blade for cutting the workpiece held on the holding table and a second spindle to which the second cutting blade is attached; and third cutting means 72 having a third cutting blade for cutting the workpiece held on the holding table and a third spindle to which the third cutting blade is attached. The first cutting means, second cutting means and third cutting means are disposed in such a state that the axis lines of the first spindle, second spindle and third spindle are aligned on the same straight line.

Description

  The present invention relates to a cutting apparatus for cutting a workpiece such as a semiconductor wafer.

  In recent years, a facing dual dicer in which two cutting blades are arranged to face each other has been used as a cutting device for cutting a workpiece such as a wafer (see, for example, JP-A-11-026402). Although the facing dual dicer can reduce the cutting stroke and improve the productivity as compared with the dual dicer arranged in parallel, further improvement in productivity is desired.

JP 11-026402 A

  In particular, in recent years, semiconductor wafers have become larger in diameter, and a semiconductor wafer having a diameter of 450 mm is being prototyped. When the size of a workpiece such as a semiconductor wafer is increased, the processing time is naturally increased. Therefore, further improvement in productivity is desired.

  An object of the present invention is to provide a cutting apparatus that can further improve productivity.

  According to the present invention, there is provided a cutting device for cutting a workpiece, the holding table for holding the workpiece, the first cutting blade for cutting the workpiece held by the holding table, and the first cutting blade. A first cutting means having a first spindle to which the second cutting blade is attached, a second cutting blade for cutting a workpiece held by the holding table, and a second spindle to which the second cutting blade is attached. A second cutting means, a third cutting blade having a third cutting blade for cutting the workpiece held by the holding table, and a third spindle to which the third cutting blade is attached, The first cutting means, the second cutting means, and the third cutting means are arranged so that the axis of the first spindle, the axis of the second spindle, and the axis of the third spindle are aligned on the same straight line. A cut characterized by being installed Apparatus is provided.

  Preferably, the first cutting means and the second cutting means are arranged in a state where the first cutting blade and the second cutting blade face each other.

  Preferably, the first length of the first cutting means, the length of the second cutting means, and the length of the third cutting means in the axial direction are equal to or smaller than the diameter of the workpiece. One cutting means, the second cutting means, and the third cutting means are configured.

  According to the cutting apparatus of the present invention, since the first cutting means, the second cutting means, and the third cutting means arranged in a straight line are provided, further improvement in productivity is possible.

It is a perspective view of the cutting device concerning a 1st embodiment of the present invention. It is the surface side perspective view of a to-be-processed object which shows the state by which the to-be-processed object was affixed on the dicing tape with which the outer peripheral part was affixed on the cyclic | annular flame | frame. It is a top view explaining the processing process using the cutting device concerning a 1st embodiment of the present invention. It is a top view explaining the processing process using the cutting device concerning a 2nd embodiment of the present invention. It is a top view explaining the processing process using the cutting device concerning a 3rd embodiment of the present invention.

(First embodiment)
DESCRIPTION OF EMBODIMENTS Hereinafter, modes (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, a perspective view of a cutting device 2 according to the first embodiment of the present invention is shown. The cutting device 2 is a 3-spindle type cutting device.

  The cutting device 2 sucks and holds the workpiece 56 (see FIG. 2) on the holding table (chuck table) 4, and the holding table 4 reciprocates in the cutting feed direction (X-axis direction) while indexing feed direction (Y The workpiece 56 is cut by the action of the first cutting unit 6, the second cutting unit 8, and the third cutting unit 72 moving in the axial direction) and the cutting feed direction (Z-axis direction). Yes.

  The holding table 4 can be moved in the X-axis direction by the cutting feed means 10, the first imaging means 12 is integrally formed with the first cutting unit 6, and the second cutting unit 8 is Two image pickup means 14 are integrally formed, and a third image pickup means 74 is formed integrally with the third cutting unit 72.

  Based on the image acquired by imaging, the street S to be cut can be detected by image processing such as pattern matching, and the state of the cut groove formed by cutting can be detected.

  The cutting feed means 10 includes a pair of X-axis guide rails 16 disposed in the X-axis direction, an X-axis movement base 18 slidably supported by the X-axis guide rails 16, and an X-axis movement base 18. An X-axis ball screw 20 that is screwed into a nut portion (not shown) formed on the X-axis, and an X-axis pulse motor 22 that rotationally drives the X-axis ball screw 20.

  The support base 24 that rotatably supports the holding table 4 is fixed to the X-axis moving base 18, and is driven by the X-axis pulse motor 22 to rotate the X-axis ball screw 20. It is moved in the X-axis direction.

  On the other hand, the first cutting unit 6, the second cutting unit 8, and the third cutting unit 72 are supported by the guide means 26 so as to be indexed and fed in the Y-axis direction. The guide means 26 includes a vertical column 28 disposed in the Y-axis direction orthogonal to the X-axis so as not to prevent the movement of the holding table 4, and a pair of Y disposed in the Y-axis direction on the side surface of the vertical column 28. A shaft guide rail 30 is included.

  The guide means 26 is further connected to the first ball screw 32, the second ball screw 34, the third ball screw 76, and the first ball screw 32 arranged in parallel with the Y-axis guide rail 30. The first Y-axis pulse motor 36, the second Y-axis pulse motor 38 connected to the second ball screw, and the third Y-axis pulse motor 78 connected to the third ball screw 76. It has.

  The Y-axis guide rail 30 supports the first support member 40, the second support member 42, and the third support member 80 so as to be slidable in the Y-axis direction. The nuts (not shown) provided in the second support member 42 and the third support member 80 are respectively screwed into the first ball screw 32, the second ball screw 34, and the third ball screw 76. Match.

  Driven by the first Y-axis pulse motor 36, the second Y-axis pulse motor 38, and the third Y-axis pulse motor 78, the first ball screw 32, the second ball screw 34, As the three ball screws 76 rotate, the first support member 40, the second support member 42, and the third support member 80 are independently moved in the Y-axis direction.

  The positions of the first support member 40, the second support member 42, and the third support member 80 in the Y-axis direction are measured by the linear scale 44, and are used for precise control of the position in the Y-axis direction. Although it is possible to provide the linear scale 44 separately for each support member, the first support member 40, the second support member 42, and the third support member 80 are formed by a single linear scale 44. Measuring the position of can control the distance between the three precisely.

  A first moving member 46 to which the first cutting unit 6 is attached is attached to the first support member 40 so as to be slidable in the vertical direction (Z-axis direction). The first Z-axis pulse motor When 48 is driven, the first moving member 46 is moved in the Z-axis direction.

  Similarly, a second moving member 50 to which the second cutting unit 8 is attached is attached to the second support member 42 so as to be slidable in the vertical direction (Z-axis direction). By driving the shaft pulse motor 52, the second moving member 50 is moved in the Z-axis direction.

  Further, a third moving member 82 to which a third cutting unit 72 is attached is attached to the third support member 80 so as to be slidable in the vertical direction (Z-axis direction). By driving the pulse motor 84, the third moving member 82 is moved in the Z-axis direction.

  In the present embodiment, the first cutting unit 6 and the second cutting unit 8 are disposed in a state where the first cutting blade 66 (see FIG. 3) faces the second cutting blade 68. . As shown in FIG. 3, the first cutting unit 6 includes a first cutting blade 66 and a first spindle 67 to which the first cutting blade 66 is attached.

  Similarly, the second cutting unit 8 includes a second cutting blade 68 and a second spindle 69 on which the second cutting blade 68 is mounted, and the third cutting unit 72 includes a third cutting unit 72. A cutting blade 70 and a third spindle 73 to which the third cutting blade 70 is attached are provided.

  The length of the first cutting unit 6 in the axial direction, the length of the second cutting unit 8 in the axial direction, and the total length of the third cutting unit 72 in the axial direction are the workpiece 56 described later. The first cutting unit 6, the second cutting unit 8, and the third cutting unit 72 are configured to be equal to or smaller than the diameter of the first cutting unit 6.

  In the present embodiment, the holding table 4 is provided so that the diameter of the holding surface 4 a that holds the workpiece 56 of the holding table 4 is substantially equal to the diameter of the workpiece 56 described later. In other words, the diameter of the holding surface 4a of the holding table 4 is such that the length of the first cutting unit 6 in the axial direction, the length of the second cutting unit 8 in the axial direction, and the third cutting unit 72 in the axial direction. Is approximately equal to the total length of

  In FIG. 1, the dimensions and positional relationship between each cutting unit and the holding table 4 are exaggerated. Refer to FIG. 3 for the dimensions and positional relationship of the holding table 4 that holds each cutting unit and the workpiece 56 by suction.

  Referring to FIG. 2, there is shown a front side perspective view of the workpiece 56 showing a state in which the workpiece 56 such as a semiconductor wafer is stuck to the dicing tape T whose outer peripheral portion is stuck to the annular frame F. Yes. As shown in FIG. 2, the workpiece 56 to be cut by the cutting device 2 has a plurality of streets S (division lines) formed in a lattice shape on the surface and is partitioned by the plurality of streets S. A device D such as an IC or LSI is formed in each region.

  When cutting the workpiece 56, the workpiece 56 is supported by the annular frame F via the dicing tape T, and then placed on the holding table 4 to suck and hold the workpiece 56 on the holding table 4. .

  Next, the machining process of the workpiece 56 using the cutting device 2 according to the first embodiment of the present invention will be described. Referring to FIG. 3, there is shown a plan view illustrating a machining process using the cutting device 2 according to the first embodiment of the present invention.

  The first cutting unit 6, the second cutting unit 8, and the third cutting axis 6, the second spindle 69, and the third spindle 73 are aligned on the same straight line. A cutting unit 72 is provided.

  Before the workpiece 56 is cut by the first cutting unit 6, the second cutting unit 8, and the third cutting unit 72, the first imaging unit 12, the second imaging unit 14, and the second imaging unit The alignment which detects the street S which should image by image | photographing the to-be-processed object 56 with any imaging means among 3 imaging means 74 is implemented.

  First, the process of processing the workpiece 56 by the first cutting unit 6 will be described. At the time of cutting, by rotating the first spindle 67 provided in the first cutting unit 6 in advance, the first cutting blade 66 mounted on the first spindle 67 is rotated. Similarly, by rotating the second spindle 69 and the third spindle 73, the second cutting blade 68 attached to the second spindle 69 and the third cutting blade 70 attached to the third spindle 73 are used. Each rotates.

  After performing the alignment, the first cutting blade 66 is positioned on the street S in the first processing region 86 of the workpiece 56, and the first cutting blade 66 is cut through the workpiece 56 to the surface of the dicing tape T. Cutting is performed by moving the holding table 4 (not shown) on which the workpiece 56 is placed in the X-axis direction.

  As a first machining example of the present embodiment, as shown in FIG. 3, the first cutting blade 66 is positioned on the rightmost street S of the first machining area 86 of the workpiece 56, and cutting is started. Then, while indexing and feeding the first cutting unit 6 in the + Y-axis direction, the holding table 4 (not shown) is moved in the X-axis direction, and the cutting process of the street S extending in the first direction is sequentially repeated. .

  Next, the process of processing the workpiece 56 by the second cutting unit 8 will be described. After performing the alignment, the second cutting blade 68 is positioned on the street S in the second processing region 88 of the workpiece 56, and the second cutting blade 68 is cut through the workpiece 56 to the surface of the dicing tape T. Cutting is performed by moving the holding table 4 (not shown) on which the workpiece 56 is placed in the X-axis direction.

  As a first machining example of this embodiment, as shown in FIG. 3, the second cutting blade 68 is positioned on the leftmost street S of the second machining area 88 of the workpiece 56, and cutting is started. Thereafter, the second cutting unit 8 is cut in the second processing region 88 while being indexed and fed in the −Y-axis direction.

  Next, the process of processing the workpiece 56 by the third cutting unit 72 will be described. After performing the alignment, the third cutting blade 70 is positioned on the street S in the third processing region 90 of the workpiece 56, and the third cutting blade 70 is cut through the workpiece 56 onto the surface of the dicing tape T. Cutting is performed by moving the holding table 4 (not shown) on which the workpiece 56 is placed in the X-axis direction.

  As a first machining example of the present embodiment, as shown in FIG. 3, the third cutting blade 70 is positioned on the leftmost street S of the third machining area 90 of the workpiece 56, and cutting is started. Thereafter, the third cutting region 70 is cut with the third cutting blade 70 while being indexed and fed in the −Y-axis direction in the same manner as the second cutting unit 8.

  In the above description, the cutting process by the first cutting unit 6, the second cutting unit 8, and the third cutting unit 72 has been described separately. However, in the actual cutting process, the workpiece 56 is processed. At the same time, cutting is carried out. As a result, the time required for cutting the workpiece 56 can be significantly reduced.

  In the first machining example of the present embodiment, the second cutting unit 8 and the third cutting unit 72 are indexed and fed in a direction away from the first cutting unit 6, but the second cutting unit 8 and the third cutting unit. 72 may be indexed and fed in a direction approaching the first cutting unit 6.

  That is, as a second machining example of the present embodiment, in FIG. 3, the first cutting blade 66 is positioned at the left end of the first machining region 86, and the second cutting blade 68 and the third cutting blade 70 are the first. It is possible to start the cutting process from the state positioned at the right end of the second processing region 88 and the right end of the third processing region 90, respectively.

  In this case, the first cutting blade 66 is indexed and fed in the −Y axis direction, and the second cutting blade 68 and the third cutting blade 70 are indexed and fed in the + Y axis direction to cut the workpiece 56. carry out.

  When the cutting of all the streets S extending in the first direction is completed, the holding table 4 is rotated by 90 degrees, and then the first cutting unit 6, the second cutting unit 8, and the third cutting unit 72 are moved. Used to cut the street S extending in the second direction orthogonal to the first direction.

  As a modification of the present embodiment, the second cutting unit 8 and the third cutting unit 72 are integrated, and the second cutting unit 8 and the third cutting unit 72 are indexed and fed in an integrated manner. Processing can be carried out.

(Second embodiment)
Next, the machining process of the workpiece 56 using the cutting apparatus 2A according to the second embodiment of the present invention will be described. Referring to FIG. 4, there is shown a plan view for explaining a machining process using the cutting device 2 </ b> A according to the second embodiment of the present invention. A description of the same configuration as that of the first embodiment will be omitted, and a configuration different from that of the first embodiment will be described.

  In the present embodiment, the first cutting unit 6, the second cutting unit 8, and the first cutting blade 66, the second cutting blade 68, and the third cutting blade 70 are oriented in the same direction. A third cutting unit 72 is provided.

  In this embodiment, the same cutting as in the first embodiment is performed, but in this embodiment, the first cutting unit 6, the second cutting unit 8, and the third cutting unit 72 are all indexed and fed in the same direction. While cutting.

  As a first machining example of the present embodiment, as shown in FIG. 4, the first cutting blade 66 is placed on the leftmost street S of the first machining area 86, and the second cutting blade 68 is placed on the second machining area 88. The third cutting blade 70 is positioned on the leftmost street S of the third machining area 90 on the leftmost street S, and cutting is performed while indexing and feeding in the -Y-axis direction.

  As a second machining example of the present embodiment, the first cutting blade 66 is placed on the rightmost street S of the first machining area 86, and the second cutting blade 68 is placed on the rightmost street S of the second machining area 88. In addition, it is possible to start cutting from a state in which the third cutting blade 70 is positioned on the rightmost street S of the third processing region 90.

  In this case, the first cutting blade 66, the second cutting blade 68, and the third cutting blade 70 are all indexed and fed in the + Y-axis direction to perform the cutting process.

(Third embodiment)
Next, the machining process of the workpiece 56 using the cutting device 2B according to the third embodiment of the present invention will be described. Referring to FIG. 5, there is shown a plan view illustrating a machining process using a cutting device 2B according to a third embodiment of the present invention. A description of the same configuration as that of the first embodiment and the second embodiment will be omitted, and a configuration different from the first embodiment and the second embodiment will be described.

  In the present embodiment, the first cutting unit 6 and the fifth cutting unit 98 are arranged in parallel with the first processing region 86, and the second cutting unit 8 and the sixth cutting unit 102 are the second processing. The third cutting unit 72 and the seventh cutting unit 106 are arranged in parallel with the third machining region 90, and the fourth cutting unit 94 and the eighth cutting unit 110 are arranged in parallel with the region 88. The fourth processing region 92 is disposed in parallel.

  In the present embodiment, the second cutting unit 8 corresponds to the first cutting means in the claims, the third cutting unit 72 corresponds to the second cutting means in the claims, and the fourth cutting unit 94 in the claims. Respectively corresponding to the third cutting means. That is, the first cutting means (second cutting unit 8) and the second cutting blade are in a state where the first cutting blade (second cutting blade 68) and the second cutting blade (third cutting blade 70) face each other. Means (third cutting unit 72) are disposed.

  Further, the second cutting unit 8 and the third cutting unit 72 are arranged to face each other, and the sixth cutting unit 102 and the seventh cutting unit 106 are arranged to face each other. Each cutting unit includes a cutting blade and a spindle on which the cutting blade is mounted.

  The length of the first cutting unit 6 in the axial direction, the length of the second cutting unit 8 in the axial direction, the length of the third cutting unit 72 in the axial direction, and the length of the fourth cutting unit 94 in the axial direction. The first cutting unit 6, the second cutting unit 8, the third cutting unit 72, and the fourth cutting unit 6, so that the total length is equal to or less than the diameter of the workpiece 56. A cutting unit 94 is configured.

  Similarly, the length of the fifth cutting unit 98 in the axial direction, the length of the sixth cutting unit 102 in the axial direction, the length of the seventh cutting unit 106 in the axial direction, and the axis of the eighth cutting unit 110 A fifth cutting unit 98, a sixth cutting unit 102, a seventh cutting unit 106, so that the total length in the direction is equal to or less than the diameter of the workpiece 56; An eighth cutting unit 110 is configured.

  This embodiment also performs the same cutting process as the first embodiment and the second embodiment, but in this embodiment, the first cutting unit 6, the second cutting unit 8, and the fifth cutting unit 98 The sixth cutting unit 102 is indexed and fed in the same Y-axis direction, and the third cutting unit 72, the fourth cutting unit 94, the seventh cutting unit 106, and the eighth cutting unit 110 are The cutting is performed by indexing and feeding in the Y-axis direction opposite to the indexing direction of the first cutting unit 6, the second cutting unit 8, the fifth cutting unit 98, and the sixth cutting unit 102.

  As a first processing example of the present embodiment, as shown in FIG. 5, the first cutting blade 66 and the fifth cutting blade 100 are arranged at the right end of the first processing region 86, and the second cutting blade 68 and the sixth cutting blade 86 are used. The cutting blade 104 is at the right end of the second processing region 88, the third cutting blade 70 and the seventh cutting blade 108 are at the left end of the third processing region 90, and the fourth cutting blade 96 and the eighth cutting blade. 112 is positioned at the left end of the fourth machining area 92, and the first cutting blade 66, the fifth cutting blade 100, the second cutting blade 68, and the fourth cutting blade 104 are indexed and fed in the + Y-axis direction. Then, the third cutting blade 70, the seventh cutting blade 108, the fourth cutting blade 96, and the eighth cutting blade 112 are indexed and fed in the −Y-axis direction to perform the cutting process.

  As a second machining example of the present embodiment, the first cutting blade 66 and the fifth cutting blade 100 are arranged at the left end of the first machining region 86, and the second cutting blade 68 and the sixth cutting blade 104 are used as the second machining example. The third cutting blade 70 and the seventh cutting blade 108 are arranged at the left end of the machining region 88, and the fourth cutting blade 96 and the eighth cutting blade 112 are arranged at the right end of the third machining region 90, respectively. It is possible to start cutting by positioning at the right end of the region 92, respectively.

  In this case, the first cutting blade 66, the fifth cutting blade 100, the second cutting blade 68, and the sixth cutting blade 104 are indexed and fed in the −Y-axis direction, and the third cutting blade 70 is Then, the seventh cutting blade 108, the fourth cutting blade 96, and the eighth cutting blade 112 are indexed and fed in the + Y-axis direction to perform the cutting process.

  The cutting method is not particularly limited. For example, in the first processing region 86, the first cutting blade 66 forms a cutting groove having a predetermined depth and the cutting groove formed by the first cutting blade 66. A cutting process (a so-called step process) is performed in which the fifth cutting blade 100 cuts the center of the bottom part of the sheet.

  Alternatively, in the first processing region 86, the cutting is performed by shifting the street S cut by the first cutting blade 66 and the street S cut by the fifth cutting blade 100. That is, the first cutting blade 66 cuts the street S extending in the first direction, and the fifth cutting blade 100 simultaneously cuts the street S parallel to the street S cut by the first cutting blade 66.

  Thus, since the first cutting blade 66 and the fifth cutting blade 100 simultaneously cut the street S in the first processing region 86, the time required for cutting the first processing region 86. And the productivity of the cutting device 2 is improved. The same cutting process as described above is performed not only in the first machining area 86 but also in other machining areas.

  In the first embodiment, three cutting units are provided. However, the present invention is not limited to this, and has an axial length equal to or less than a value obtained by dividing the diameter of the workpiece 56 by an integer. If the integer number of cut units are arranged, the object of the present invention can be achieved.

  Further, the other cutting units are arranged so that the axes of the other cutting units are arranged on a straight line parallel to the same straight line in which the axes of the first cutting unit 6, the second cutting unit 8, and the third cutting unit 72 are arranged. By arranging the cutting unit, it is possible to further improve productivity.

  The present invention is not limited by the contents described in the above embodiments. The constituent elements described above include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described above can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

2 Cutting device 4 Holding table 6 First cutting unit (first cutting means)
8 Second cutting unit (second cutting means)
56 Workpiece 66 First cutting blade (first cutting blade)
67 First spindle (first spindle)
68 Second cutting blade (second cutting blade)
69 Second spindle (second spindle)
70 Third cutting blade (third cutting blade)
72 3rd cutting unit (3rd cutting means)
73 Third spindle (third spindle)
86 1st processing area 88 2nd processing area 90 3rd processing area 92 4th processing area 94 4th cutting unit 96 4th cutting blade 97 4th spindle 98 5th cutting unit 100 5th Cutting blade 101 fifth spindle 102 sixth cutting unit 104 sixth cutting blade 105 sixth spindle 106 seventh cutting unit 108 seventh cutting blade 109 seventh spindle 110 eighth cutting unit 112 second 8 cutting blades 113 8th spindle

Claims (3)

A cutting device for cutting a workpiece,
A holding table for holding the workpiece;
A first cutting means having a first cutting blade for cutting a workpiece held by the holding table, and a first spindle to which the first cutting blade is mounted;
A second cutting means having a second cutting blade for cutting the workpiece held by the holding table, and a second spindle to which the second cutting blade is mounted;
A third cutting means having a third cutting blade for cutting a workpiece held by the holding table and a third spindle to which the third cutting blade is mounted;
The first cutting means, the second cutting means, and the third cutting means are arranged so that the axis of the first spindle, the axis of the second spindle, and the axis of the third spindle are aligned on the same straight line. A cutting device characterized by being provided.   The cutting device according to claim 1, wherein the first cutting means and the second cutting means are disposed in a state where the first cutting blade and the second cutting blade face each other.   The first cutting means such that the total length of the length of the first cutting means, the length of the second cutting means and the length of the third cutting means in the axial direction is equal to or less than the diameter of the workpiece. The cutting apparatus according to claim 1, wherein the second cutting means and the third cutting means are configured.

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