JP2014058987A - Valve, and coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating method capable of adapting viscosity change of coating liquid.SOLUTION: An intermittent valve 200 comprises: a first valve 210; and a second valve 220 assembled in a cylinder 202. The first valve 210 is made such that an inner side of the cylinder is divided into a primary cylinder room 202a and a secondary cylinder room 202b, can be driven to advance or retract in a cylinder axial direction while sliding along an inner peripheral wall and has a through-hole 212. The second valve 220 enables an opened state of a through-hole 212 to be variable as well as its closing state and can be driven relatively in respect to the first valve 210. Flowing of fluid from the primary cylinder room 202a to the secondary cylinder room 202b via the through-hole 212 and a forced-flowing of fluid passed through the secondary cylinder room 202b in a downstream side are carried out together with a driving control of the first valve 210 in a cylinder axial direction and a variable driving control against the opened state of the second valve 220.

Description

  The present invention relates to a valve that pumps a supplied fluid downstream.

  Since such a valve can intermittently perform fluid pumping to the downstream side, for example, it is frequently used in a coating apparatus that intermittently forms a spray mark sprayed with a coating liquid on a substrate as a coating liquid layer. The application range of such a coating apparatus is expanding. For example, in a lithium-ion battery manufacturing process, a technique has been proposed in which a dispersion liquid such as graphite or coke as an electrode material is intermittently sprayed onto a base material such as a long aluminum foil (for example, the following patents) Reference 1). Such a technique can also be applied to a membrane electrode assembly in which both anode and cathode electrodes are formed as thin films on both membrane surfaces of an electrolyte membrane (for example, a solid polymer membrane) having proton conductivity.

JP 2001-38276 A

  Incidentally, in the valve configuration proposed in the above-mentioned patent document, the specifications such as the plate thickness of the valve constituent material are set according to the viscosity of the coating liquid, as specified in the specification. For this reason, although there is no hindrance to the intermittent application of the coating liquid so as not to cause the viscosity change, it is difficult to cope with the viscosity change in a situation where the viscosity change of the coating liquid occurs.

  In order to achieve at least a part of the above object, the present invention can be implemented as the following application examples.

  (1) According to one aspect of the present invention, there is provided a valve that feeds fluid supplied from a fluid supply source downstream based on supply pressure. The valve is slid along the inner peripheral wall of the cylinder after being divided into a cylinder and a primary side that receives the fluid supply and a secondary side that is a pressure-feeding side of the fluid. The first valve body having a fluid passage hole penetrating from the primary side to the secondary side can be driven relatively to the first valve body. A second valve body that changes the opening state of the fluid passage hole including the blockage of the fluid passage hole by the relative driving, drive control of the first valve body in the cylinder axial direction, and the Combined with the relative drive control of the second valve body that varies the opening state, the fluid passing from the primary side to the secondary side through the fluid passage hole and the fluid passing to the secondary side The valve body control part which aims at sending to the downstream of this. In the valve of the above aspect, the above control when the fluid that has passed to the secondary side of the cylinder is sent to the downstream side based on the supply pressure, that is, the control that drives the first valve body to move forward and backward in the cylinder axial direction, and the fluid passage In the control of driving the second valve body relative to the first valve body by changing the opening state of the hole, it is possible to perform control with some control intention. The relative drive of the second valve body that causes the first valve body to move forward and backward in the cylinder axis direction and the opening state of the fluid passage hole to vary affects the fluid feeding state. As a result, according to the valve of the above aspect, by controlling the valve body with the control intention corresponding to the change in the viscosity of the fluid, the fluid can be fed in accordance with the control intention. Therefore, it is possible to feed the fluid downstream. In addition, it is not necessary to configure or control the apparatus so that the viscosity of the fluid does not change.

  (2) In the valve of the above aspect, the valve body control unit detects a change in the viscosity of the fluid or a parameter corresponding to the change in the viscosity, and according to the detected change in the viscosity of the fluid, The drive control in the cylinder axis direction and the relative drive control of the second valve body can be adjusted. In this way, even if the viscosity of the fluid changes, it is possible to suppress the change in the situation of feeding the fluid to the downstream side due to the change in the viscosity, so that the quality of the fluid pumping can be maintained regardless of the change in the viscosity of the fluid. And so on.

  (3) In the valve of any one of the above-described forms, the fluid of the first valve body that is located at the original position at the start of pumping at the timing of starting pumping the liquid to the downstream side of the liquid. After the second valve body is driven and controlled so that the passage hole opens, the first control for driving and controlling the second valve body to the side where the fluid passage hole is closed, and the fluid passage hole is closed. After the first valve body is driven and controlled from the original position toward the secondary side in the state, the second control is executed to drive and control the second valve body so that the fluid passage hole is opened. You can If it carries out like this, the fluid will flow into the secondary side of a cylinder with the supply pressure from a fluid supply source by opening of the fluid passage hole by drive control of the 2nd valve body in 1st control. Thereby, the secondary side pressure of the cylinder can be increased. And the fluid which flowed into the secondary side of the cylinder is hold | maintained by obstruction | occlusion of the fluid passage hole by drive control of the 2nd valve body in the subsequent 1st control. Then, by driving from the original position of the first valve body to the secondary side while the fluid passage hole is closed in the second control, an amount of fluid matching the driving amount is supplied to the fluid downstream of the valve. It is possible to prepare for handling the fluid at the fluid supply destination by supplying the fluid toward the front. At this time, the driving amount and driving speed of the first valve body can be controlled by the valve body control unit. Therefore, after adjusting the drive amount and drive speed of the first valve body, it is possible to suppress the influence of the change in the viscosity of the fluid, as well as the surge pressure associated with the start of fluid pumping under circumstances where there is a pressure difference This can be suppressed. Then, after driving the second valve body to the opening side of the fluid passage hole in the second control, the fluid can be continuously pumped to the fluid supply destination through the opened fluid passage hole and the secondary region of the cylinder. As a result, if the fluid supply destination is a die head that performs fluid spraying, it is possible to stabilize the spraying state at the start of fluid spraying from the die head.

  (4) In any one of the above-described types of valves, the valve body control unit may be configured such that the second valve body toward the side where the fluid passage hole is closed at the timing of stopping the pressure-feeding of the liquid to the downstream side. Following the drive control, the first valve body can be controlled to return to the original position while the fluid passage hole is closed. In this way, the fluid can be sucked into the secondary side region of the cylinder from the fluid supply destination side after blocking the fluid pumping by blocking the fluid passage hole. As a result, if the fluid supply destination is a die head that performs fluid spraying, it is possible to stabilize the spraying state when the fluid spraying from the die head is stopped.

  (5) In the above-described several types of valves, the second valve body can be separated from the first valve body, and the fluid passage hole is closed by overlapping the first valve body. The fluid passage hole can be opened by separating from the first valve body. If it carries out like this, the opening condition of a fluid passage hole can be easily changed including the obstruction | occlusion by drive-controlling a 2nd valve body so that it may space apart from a 1st valve body.

  (6) In the valve of the above aspect, following the second control at the timing of starting the pumping of the liquid to the downstream side, the second valve body toward the side where the fluid passage hole is opened The fluid is continuously supplied from the opened fluid passage hole while the first valve body is advanced and retracted along the cylinder axis direction to vary the volume of the secondary cylinder. You can do that. When the second valve body is driven to the side where the fluid passage hole opens and the second valve body is separated from the first valve body, the fluid supplied to the primary side is between the first valve body and the second valve body. After entering, the fluid passes through the fluid passage hole of the first valve body and enters the secondary side. Such a behavior of the fluid entering the secondary side changes under the influence of the supply pressure pulsation of the fluid supply source to the valve and the change in the viscosity of the fluid. In this type of valve, the variable status of the secondary cylinder internal volume accompanying the advancement and retraction of the first valve body can be controlled by the valve body control unit, so the secondary cylinder internal volume can be adjusted by adjusting the secondary cylinder internal volume. It is also possible to suppress the influence of supply pressure pulsation and fluid viscosity change. Therefore, when supplying the fluid from the valve to the fluid supply destination, the fluid can be continuously pumped at a stable supply pressure.

  (7) In the valves of some forms described above, the second valve body is provided with a through hole that overlaps the fluid passage hole and is rotatable relative to the first valve body. By changing the overlapping state of the through hole and the fluid passage hole, the opening state of the fluid passage hole can be made variable. If it carries out like this, the opening condition of a fluid passage hole can be easily changed including the obstruction | occlusion by carrying out drive control so that a 2nd valve body may rotate relatively with respect to a 1st valve body.

  (8) In the valve of the above aspect, following the second control at the timing of the start of pumping the liquid to the downstream side, the valve body control unit drives and controls the second valve body to control the fluid passage hole. The fluid can be continuously supplied from the opened fluid passage hole while varying the opening state of the fluid passage hole so that the degree of opening is increased or decreased. The change in the opening state of the fluid passage hole accompanying the drive of the second valve body changes the flow rate of the fluid passing through the fluid passage hole. On the other hand, the behavior of the fluid when the fluid supplied to the primary side passes through the fluid passage hole and enters the secondary side is affected by the supply pressure pulsation of the fluid supply source to the valve and the viscosity change of the fluid. Change. In the valve of this form, the opening state of the fluid passage hole accompanying the driving of the second valve body, that is, the flow rate of the fluid passing through the fluid passage hole can be controlled by the valve body control unit. By adjusting the opening state of the fluid passage hole that accompanies driving, it is possible to suppress the influence of supply pressure pulsation and fluid viscosity change. Therefore, when supplying the fluid from the valve to the fluid supply destination, the fluid can be continuously pumped at a stable supply pressure.

  (9) According to another aspect of the present invention, there is provided a coating apparatus that intermittently forms a spray mark on which a coating liquid is sprayed on a substrate as a coating liquid layer. The coating apparatus is provided in a die head for spraying the coating liquid so as to face the substrate, and a coating liquid conduit from the coating liquid tank to the die head, and is supplied from the coating liquid tank. An intermittent valve that intermittently pumps the coating liquid to the die head, the intermittent valve being any one of the above-described forms, and the valve body control unit Coating from the primary side through the fluid passage hole to the secondary side by using both the drive control in the axial direction of the cylinder and the relative drive control of the second valve body that changes the opening state The liquid is passed and the coating liquid that has passed to the secondary side is intermittently fed to the die head. In the coating apparatus of the above form, since the intermittent valve that intermittently feeds the coating liquid to the die head is a valve of any of the forms described above, after dealing with the viscosity change of the coating liquid, By spraying the coating liquid, stopping the blowing, and feeding the coating liquid at a stable supply pressure to the die head, a coating liquid layer can be intermittently formed on the substrate with high accuracy.

  The present invention can be realized, for example, in the form of a fluid pressure feeding method, a coating liquid intermittent coating method, or the like.

It is a block diagram showing a schematic structure of coating device 100 as a 1st embodiment of the present invention. It is explanatory drawing which expands and shows the intermittent valve 200 typically. It is explanatory drawing which shows the mode of a valve body structure and a valve body drive. It is explanatory drawing which shows the drive process of the intermittent valve | bulb 200 in the case of intermittent coating with the drive condition of each component, and the mode of paste spraying from the die head 112. FIG. It is explanatory drawing which shows the drive condition of the 1st valve body 210 and the 2nd valve body 220 with the transition of the coating die internal pressure P2. It is explanatory drawing which shows the coating performance evaluation item at the time of forming the coating liquid layer S on the base material K intermittently. It is the graph which showed coating performance. It is explanatory drawing which expands and shows typically the intermittent valve 200A of 2nd Embodiment. It is explanatory drawing which shows the mode of a valve body structure and a valve body drive. It is explanatory drawing which shows the relationship between the rotation transition of 2nd valve body 220A, and the opening condition of the through-hole 212. FIG. It is explanatory drawing which shows the drive process of 200 A of intermittent valves in the case of intermittent coating with the drive condition of each structural material, and the mode of paste spraying from the die head 112. FIG. It is explanatory drawing which shows the drive condition of the 1st valve body 210 and the 2nd valve body 220A with the transition of coating die internal pressure P2.

  FIG. 1 is a block diagram showing a schematic configuration of a coating apparatus 100 as a first embodiment of the present invention. In this embodiment, the manufacture of a membrane electrode assembly (MEA) incorporated in a cell that is a power generation unit of a fuel cell is intended, and the base material K is a fluorine-based electrolyte resin having proton conductivity. An electrolyte membrane comprising: And the coating liquid sprayed on the base material K is used as a catalyst paste so that the coating liquid layer S formed on the base material K (electrolyte membrane) can be used as an electrode. This catalyst paste is obtained by dispersing carbon particles or the like carrying a catalyst in a binder together with a fluorine-based electrolyte resin, and the paste viscosity at a steady state is about 1000 cps.

  As illustrated, the coating apparatus 100 includes an intermittent coating device group 110 and a control device group 400. The intermittent coating device group 110 includes a die head 112 facing the base material K and a tank 114 of catalyst paste, and a pipe line from the tank 114 to the die head 112 is used as a paste pressure feeding line 116. A pipeline that branches and returns to the tank 114 is referred to as a return pipeline 117. The coating apparatus 100 is provided with a pump 118 and an intermittent valve 200 from the tank side in the paste pressure feeding line 116, and the pump 118 sucks the catalyst paste from the tank 114 and directs the catalyst paste to the die head 112. To pump. The intermittent valve 200 intermittently feeds the catalyst paste supplied from the pump 118 via the in-side paste pressure feed line 116a to the die head 112 via the out-side paste pressure feed line 116b. The configuration of the intermittent valve 200 and the state of intermittent pumping will be described later. Further, the intermittent coating device group 110 includes a relief valve 119 in the return line 117, and circulates the catalyst paste pumped by the pump 118 to the tank 114 through the return line 117 while the valve is on.

  In addition, the intermittent coating device group 110 includes a first pressure sensor 121 in the paste pressure feeding line 116, a second pressure sensor 122 in the die head 112, and a temperature sensor 123 in the tank 114. The first pressure sensor 121 detects the paste pumping pressure P0 in the paste pumping pipe 116 and outputs the detected pressure to the control device 410 described later. The second pressure sensor 122 detects the die internal pressure Pd of the die head 112 and outputs the detected pressure to the control device 410 described later. The temperature sensor 123 detects the temperature of the catalyst paste stored in the tank 114 and outputs the detected pressure to the control device 410 described later. In this case, the temperature sensor 123 can detect the temperature of the catalyst paste flowing through the paste pressure feed line 116. The control device 410 calculates the viscosity of the catalyst paste with reference to a map or the like based on the received catalyst paste temperature.

  The control device group 400 includes a control device 410, a first servo motor 420, a second servo motor 430, and driver units 422 and 432 for these motors. The control device 410 controls the operation of the pump 118 in a steady state while drivingly controlling the intermittent valve 200 and the relief valve 119, and supplies the catalyst paste to be pumped by the pump 118 to either the intermittent valve 200 or the relief valve 119. Switch to. The die head 112 moves at a predetermined speed as indicated by a white arrow in the drawing while the intermittent valve 200 is driven in accordance with the switching and the paste pressure feeding described later is performed (the relief valve 119 is closed). A catalyst paste is sprayed on the base material K, and a coating liquid layer S is formed on the base material K as a spray mark of the catalyst paste. When the coating liquid layer S is formed, the control device 410 switches the supply destination of the catalyst paste to the relief valve 119 side, so that the catalyst paste pressure feeding to the die head 112 and the catalyst paste spraying are stopped, and the catalyst paste is Then, it returns to the tank 114 via the return line 117. Also during this time, the base material K moves, and the control device 410 repeats the above-described control. Therefore, the intermittent coating equipment group 110 intermittently applies the coating liquid layer S as spray marks of the catalyst paste to the base material K. To form.

  The driver unit 422 inputs the motor drive amount from the encoder attached to the motor while controlling the drive of the first servo motor 420 under the control of the control device 410. The first servo motor 420 is connected to a first valve body 210 (described later) of the intermittent valve 200 by a power transmission device 424, and drives the first valve body 210 under the control of the driver unit 422. The same applies to the driver unit 432, and the second servo motor 430 is connected to a later-described second valve body 220 of the intermittent valve 200 by a power transmission device 434, and the second valve body 220 is controlled by the driver unit 432. To drive. In the present embodiment, since the first valve body 210 and the second valve body 220 need only be driven forward and backward, both the power transmission devices described above include, for example, linear rails or ball screws.

  Next, the configuration of the intermittent valve 200 will be described. FIG. 2 is an explanatory diagram schematically showing the intermittent valve 200 in an enlarged manner, and FIG. 3 is an explanatory diagram showing the configuration of the valve body and the state of driving the valve body.

  As shown in FIG. 2, the intermittent valve 200 includes a cylinder 202, a first valve body 210, and a second valve body 220. The cylinder 202 is a cylindrical hollow body, and is connected to the in-side paste pressure feeding line 116a and the out-side paste pressure feeding line 116b. The first valve body 210 has a disk shape with an outer diameter that can be fitted and slid into the cylinder 202, has through holes 212 at an equal pitch, and is supported by the first valve body shaft 214. The first valve body 210 is incorporated in the cylinder 202, and the cylinder 202 is divided into two parts on the side of the primary side cylinder chamber 202a on the side of the in-side paste pressure feed line 116a and on the side of the out side paste pressure feed line 116b. It is partitioned into a secondary cylinder chamber 202b. When the first valve body 210 is thus incorporated in the cylinder 202, the first valve body 210 is driven to advance and retract in the axial direction of the cylinder while sliding along the inner peripheral wall of the cylinder by receiving a driving force via the first valve body shaft 214. The through hole 212 serves as a passage hole for the catalyst paste from the primary side cylinder chamber 202a to the secondary side cylinder chamber 202b.

  The second valve body 220 has a disk shape smaller in diameter than the first valve body 210, is supported by the second valve body shaft 222, and has a shaft through hole 224 that penetrates the shaft. The shaft through hole 224 has a diameter that allows the first valve body shaft 214 of the first valve body 210 to slide smoothly. As shown in FIG. 3, the shaft through hole 224 includes the first valve body shaft. 214 is inserted from the second valve body 220 side. In this state, the first valve body 210 is incorporated into the cylinder 202 as described above together with the second valve body 220.

  The first valve body 210 is linearly moved forward and backward when the power transmission device 424 that connects the first valve body shaft 214 to the first servo motor 420 (see FIG. 1) converts the forward / reverse rotational driving force of the first servo motor 420. Receives driving force. The second valve body 220 is a linear advance / retreat in which the power transmission device 434 that connects the second valve body shaft 222 to the second servo motor 430 (see FIG. 1) converts the forward / reverse rotational driving force of the first servo motor 420. Receives driving force. Since the driving force is transmitted to both valve bodies independently by the respective servo motors, the first valve body 210 and the second valve body 220 are individually arranged in the cylinder axial direction inside the cylinder 202. Both valve bodies can be advanced and retracted in the axial direction of the cylinder while the second valve body 220 is overlapped with the first valve body 210. Since such valve body drive is possible, the 2nd valve body 220 advances and retreats so that separation | spacing relatively with respect to the 1st valve body 210 is possible. And the 2nd valve body 220 obstruct | occludes all the through-holes 212 of the 1st valve body 210 by overlapping with the 1st valve body 210, as shown in FIGS. On the other hand, the second valve body 220 opens the through-hole 212 by separating from the first valve body 210. That is, the second valve element 220 forms a valve element gap 228 (see FIG. 3) between the first valve element 210 and the first valve element 210 in the primary side cylinder chamber 202a. By the relative separation drive with respect to 210, the value is made variable from zero to a relative separation drive amount.

  Next, the state of intermittent coating using the intermittent valve 200 will be described. FIG. 4 is an explanatory view showing the driving process of the intermittent valve 200 during intermittent coating together with the driving status of each component and the state of paste spraying from the die head 112, and FIG. 5 is a diagram illustrating the first valve body 210 and the second valve body 220. It is explanatory drawing which shows this drive condition together with transition of coating die internal pressure P2.

  This driving process is repeated by the controller 410 while the coating liquid layer S is intermittently formed on the substrate K. Then, at the start, the control device 410 positions both valve bodies at the original position y0 with the second valve body 220 superimposed on the first valve body 210. In this start state, the pump 118 (see FIG. 1) is under operation control by the control device 410 in response to an operation of a coating start switch (not shown), etc., and at a paste pumping pressure P0 determined by the pump rotation speed, the catalyst paste Is pumped to the primary cylinder chamber 202a of the cylinder 202. Further, in the die head 112, the catalyst paste is sucked in the die head at the final stage of the application of one coating liquid layer S as will be described later. The secondary side cylinder chamber 202b in the cylinder 202 of the die head 112 and the intermittent valve 200 remains almost at atmospheric pressure.

  When the control device 410 determines that the paste pressure feed in the paste pressure feed line 116 reaching the intermittent valve 200 is in a predetermined stable state based on the detected pressure of the first pressure sensor 121 (see FIG. 1), the coating operation is performed. A start process is performed (step S100). In step S100, the control device 410 keeps the first valve body 210 at the original position y0, and drives the second valve body 220 to move backward and return to the original position y0 that overlaps the first valve body 210 (forward). Drive) sequentially. The forward / backward drive of the second valve body 220 is performed when the driver unit 432 under the control of the control device 410 drives the second servo motor 430 in pulses. The second valve body 220 is separated from the first valve body 210 by the backward drive of the second valve body 220, and the second valve body 220 is overlapped with the first valve body 210 by the subsequent return drive. The through hole 212 of the single valve body 210 is opened. Therefore, the catalyst paste that has been pressure-fed to the primary side cylinder chamber 202a enters the valve element gap 228 from the periphery of the second valve element 220 and passes through the through hole 212 as shown in the drawing, and is secondary at the paste pressure supply pressure P0. It flows into the side cylinder chamber 202b. As a result, the internal pressure of the secondary cylinder chamber 202b and the die head 112 (die internal pressure) rises as shown in FIG. 5, and the intermittent valve is closed due to the blockage of the through hole 212 accompanying the return drive of the second valve body 220 described above. 200 holds the catalyst paste in the secondary cylinder chamber 202b.

  In the above step S100, even if the catalyst paste flows into the secondary side cylinder chamber 202b at the paste pressure feed pressure P0, the above-described backward drive amount and speed of the second valve body 220 are prevented so that the paste is not sprayed from the die head 112. The elapsed time until the through-hole 212 is closed is set. In the present embodiment, since the second valve body 220 is driven forward and backward by the second servo motor 430, an output pulse to the motor is determined so that paste spray does not occur from the die head 112. In this case, the paste passing state passing through the through hole 212 from the periphery of the second valve body 220 through both valve bodies varies depending on the viscosity of the catalyst paste, but the pulse output to the second servomotor 430 is adjusted. Thus, it is possible to suppress changes in the state of passage of the paste due to changes in the viscosity of the catalyst paste. For example, when the viscosity increases, the above-described paste passing state becomes lower than when the viscosity is low. Therefore, when the paste viscosity increases, the amount of the catalyst that flows into the secondary cylinder chamber 202b when the viscosity is low is approximately the same amount. The pulse output to the second servo motor 430 may be adjusted so that the paste flows. In this case, the viscosity of the catalyst paste is calculated from the catalyst paste temperature by the control device 410 as described above. The paste viscosity can be directly measured.

  When the control device 410 confirms that the die internal pressure in the die head 112 is increased by the detected pressure of the second pressure sensor 122 (see FIG. 1), the control device 410 increases the die internal pressure to the predetermined coating die internal pressure P2 and starts the coating process. (Step S110). In step S110, the control device 410 drives the first valve body 210 forward from the original position y0 to the intermediate position y1 together with the second valve body 220 while the through-hole 212 is closed in the second valve body 220. Let The forward drive of both the valve bodies is performed by driving the first servo motor 420 in a pulsed manner by the driver unit 422 under the control of the control device 410 for the first valve body 210. Regarding the second valve body 220, the driver unit 432 under the control of the control device 410 drives the second servo motor 430 in pulses. The catalyst paste (step S100) that has entered the secondary cylinder chamber 202b at the paste pressure feed pressure P0 is increased in pressure by the forward drive of the both valve bodies and is sent to the die head 112. The forward drive amount of the body, that is, the internal volume of the secondary cylinder chamber 202b from the original position y0 to the intermediate position y1 is determined.

  In the above step S110, the internal pressure of the secondary cylinder chamber 202b is higher by ΔPn than the coating pressure of the catalyst paste from the die head 112 (coating die internal pressure P2), and the catalyst paste is actually applied from the die head 112. The forward drive amount and the speed of both valve bodies are set so as to start. In the present embodiment, since both the first and second valve bodies are driven forward and backward by the respective servo motors, output pulses to the motor are determined so that the above-described increase in internal pressure and paste coating occur. In this case, the state of arrival of the paste reaching the die head 112 from the secondary side cylinder chamber 202b varies depending on the viscosity of the catalyst paste, but by adjusting the pulse output to both the first and second servo motors, It is possible to suppress changes in the paste arrival status due to changes in viscosity. For example, when the viscosity increases, the above-mentioned paste arrival situation becomes lower than that when the viscosity is low. Therefore, when the paste viscosity increases, the first and second paste arrival conditions are almost the same as those when the viscosity is low. The pulse output to both servo motors can be adjusted.

  Since the control device 410 has started the paste coating in step S110, in the subsequent step S120, the first valve body 210 and the second valve body 220 are further driven forward from the intermediate position y1, and the first valve For body 210, this is repeatedly retracted forward. That is, as shown in FIG. 5, the second valve body 220 is advanced at a constant speed from the intermediate position y1 to the final position y2, and thus the first valve body 210 with respect to the second valve body 220 thus moving forward. Is repeatedly retracted forward so that the through hole 212 is not blocked. This final position y2 is defined as a position that is sufficient for the suction of the paste that accompanies the stoppage of coating that will be described later. That is, the final position y2 is defined so that the cylinder internal volume from the original position y0 to the final position y2 matches the paste suction amount. After the second valve body 220 reaches the final position y2, the first valve body 210 is repeatedly retracted forward so that the through hole 212 is not blocked while the second valve body 220 is positioned at the final position y2. By this advance / retreat drive of the first valve body 210, the internal volume of the secondary side cylinder chamber 202b changes in a wide range within the advance / retreat drive range of the first valve body 210. Such a forward / backward drive of the first valve body 210 is nothing but a relative forward / backward drive of the second valve body 220 with respect to the first valve body 210, and the second valve body 220 has a valve body gap 228 shown in FIG. Will be changed. As a result, the second valve body 220 is separated from the first valve body 210 with the valve body gap 228 therebetween, so that the through hole 212 of the first valve body 210 is continuously opened. Therefore, the catalyst paste passes from the primary side cylinder chamber 202a through the valve element gap 228, passes through the through hole 212 and enters the secondary side cylinder chamber 202b, and is sprayed from the die head 112 to the base material K based on the paste pressure P0. It is done. And since a catalyst paste is supplied continuously, the coating liquid layer S is formed in the base material K conveyed. In this case, the coating die internal pressure P <b> 2 in the die head 112 becomes lower than the paste pumping pressure P <b> 0 due to the pressure loss until the catalyst paste reaches the die head 112. Moreover, the catalyst paste is pumped to the die head 112 while the pressure of the catalyst paste to the die head 112 is raised and lowered within a predetermined range by the above-described advance / retreat driving of the first valve body 210.

  The driving state of the first valve body 210 and the second valve body 220 in the above step S120 can be defined by the pulse control of the first and second servo motors described above, and the valve body from the original position y0 to the intermediate position y1. The moving speed, the forward / backward drive amount of the first valve body 210 (the internal volume variable amount of the secondary side cylinder chamber 202b) and the speed thereof can be variously set by adjusting the pulse output to the servo motor. In the process of forming the coating liquid layer S while the second valve body 220 is separated from the first valve body 210 with the valve body gap 228 being separated, the control device 410 has a coating die internal pressure P2 of a predetermined value. The first valve body 210 and the second valve body 220 are advanced and retracted so as to be within the pressure range. That is, the control device 410, based on the sensor outputs of the first pressure sensor 121 and the second pressure sensor 122 (see FIG. 1), as shown in FIG. 5, the advance / retreat drive amount Δyn of the first valve body 210 and the drive speed Is adjusted so that the coating die internal pressure P2 falls within a predetermined pressure range. As shown in FIG. 5, the cylinder internal pressure of the secondary side cylinder chamber 202b changes reflecting the level change (pulsation) of the paste pumping pressure P0, and is equal to the pressure loss accompanying the catalyst paste supply from the paste pumping pressure P0. small. The coating die internal pressure P2 is smaller than the cylinder internal pressure in the secondary cylinder chamber 202b by the pressure loss associated with the intermittent valve 200 and the supply of catalyst paste from the valve to the die head 112. Therefore, the control device 410 adjusts the advance / retreat drive amount Δyn and the drive speed of the first valve body 210 so that the difference ΔPn between the cylinder internal pressure in the secondary cylinder chamber 202b and the coating die internal pressure P2 is within a predetermined range. It will be. In the present embodiment, since the first valve body 210 is driven forward and backward by the first servo motor 420, by adjusting the pulse output to the first servo motor 420, the above-described equalization of pressure and the accompanying die head 112 are achieved. In addition to supplying the paste at a stable supply amount, it is possible to suppress changes in the state of passage of the paste through the valve gap 228 and the through hole 212 due to changes in the viscosity of the catalyst paste. For example, when the viscosity increases, the above-mentioned paste passing situation becomes lower than that when the viscosity is low. Therefore, when the paste viscosity increases, the first servo motor is set so as to increase the driving speed of the first valve body 210 compared with the case where the viscosity is low. The pulse output to 420 may be adjusted.

  When the control device 410 continues the above step S120 for a time that matches the formation size of the coating liquid layer S, the control device 410 starts the coating end operation (step S130). In step S130, the control device 410 drives the first valve body 210 backward so that the first valve body 210 overlaps the second valve body 220 located at the final position y2, and closes the through hole 212. Thereby, the supply of the catalyst paste to the die head 112 is stopped. Following step S130, the control device 410 drives both the first valve body 210 and the second valve body 220 backward to return both valve bodies to the original position y0 (step S140). As a result, the volume of the secondary cylinder chamber 202b is expanded, so that the catalyst paste remaining in the out-side paste pressure feed line 116b and the die head 112 is sucked to reliably stop the paste blowing from the die head 112. . Therefore, the state of spraying when the paste spraying from the die head 112 is stopped can be stabilized, and the shape of the coating liquid layer S can be stabilized. When stopping the coating in step S140, the control device 410 waits for a time corresponding to the interval formation between the adjacent coating liquid layers S on the base material K (step S150), and proceeds to the above-described step S100. Then, the next coating liquid layer S is formed.

  In step S140, the driving speed when the first valve body 210 and the second valve body 220 are driven to return to the original position y0 can be changed by adjusting the pulse output to the servo motor. The suction state of the catalyst paste that accompanies the return of the valve body changes depending on the viscosity of the catalyst paste. By adjusting the pulse output to the servo motor, changes in the suction state of the paste due to changes in the viscosity of the catalyst paste are suppressed. Can be. For example, when the viscosity is high, the above-mentioned paste suction state becomes lower than when the viscosity is low, so if the paste viscosity is high, the pulse output to the servo motor is set so that the paste suction occurs to the same extent as when the viscosity is low. Adjust it.

  Next, the coating performance of the coating apparatus 100 according to the first embodiment having the intermittent valve 200 will be described. FIG. 6 is an explanatory view showing the coating performance evaluation items when the coating liquid layer S is intermittently formed on the substrate K. In the performance evaluation, 200 patterns of the coating liquid layer S shown in FIG. 6 were formed on the substrate K, and the actual coating length and coating width in each coating pattern and the uncoated interval between patterns were measured. On that basis, the error between the actually measured value and the coating length, coating width, and uncoating interval, which were the target of coating, was evaluated by averaging. A comparative example for comparison is an application device in which the intermittent valve 200 in FIG. 1 is replaced with an existing two-way valve. In forming the coating liquid layer S, a carbon-containing fluorine-based solution is sprayed from the die head 112, and the viscosity has been adjusted to around 1000 cps. Then, the temperature of the piping system including the paste pressure-feeding pipe 116 in FIG. 1 was adjusted to about 50 ° C. and the solution was sprayed from the die head 112 so that the viscosity did not change as much as possible because of performance evaluation. The coating conditions at this time are a coating speed of 1 m / min, a coating thickness of 100 μm (Wet), a coating width of 150 mm, a coating length of 300 mm, and an uncoated length of 100 mm. With respect to the coating liquid layer S formed under the above conditions with the coating apparatus using the two-way valve and the coating apparatus 100 of the present embodiment, the above-described actual measurement was performed, and the error was obtained. FIG. 7 is a graph showing the coating performance. As shown in FIG. 7, it was demonstrated that the coating apparatus 100 of the present embodiment has a performance capable of intermittently forming the coating liquid layer S on the substrate K with high accuracy. When the performance was evaluated by replacing the coating solution with a carbon-containing alcohol-based solution, the same results as in FIG. 7 were obtained. Therefore, the coating apparatus 100 of this embodiment is concerned with the component properties of the coating solution. It was proved that the coating liquid layer S has the ability to intermittently form the substrate K with high accuracy. In applying the carbon-containing alcohol solution, the temperature of the piping system was adjusted to 25 ° C.

  As explained above, according to the coating apparatus 100 of the first embodiment, the catalyst paste held in the secondary side cylinder chamber 202b is pumped (step S110), and the coating die internal pressure P2 is maintained thereafter. By continuously supplying the catalyst paste (step S120), stopping the supply due to the blocking of the through-hole 212 (step S130), and suctioning the catalyst paste by returning the valve body (step S140), the substrate K is applied with high accuracy. The working fluid layer S can be formed intermittently. Moreover, in the coating apparatus 100 of the first embodiment, the state of valve body driving when the catalyst paste held in the secondary cylinder chamber 202b is pumped (step S110), while maintaining the coating die internal pressure P2 is maintained. State of valve body drive when continuous supply of catalyst paste (step S120) is attempted, state of valve body drive when stop of supply due to blockage of through hole 212 (step S130), and suction of catalyst paste by return of valve body The state of driving the valve body at the time of (Step S140) can be adjusted corresponding to the viscosity change of the catalyst paste. As a result, according to the coating apparatus 100 of the first embodiment, even if the viscosity of the catalyst paste changes, it is possible to suppress the change in the paste pumping condition toward the die head 112 due to the change in viscosity, so the viscosity change of the catalyst paste Thus, the coating liquid layer S can be intermittently formed on the substrate K with high accuracy. In addition, it is possible to eliminate the equipment configuration and its control so that the viscosity of the catalyst paste does not change.

  In addition, in the coating apparatus 100 of the present embodiment, by starting the coating operation in step S100, the pressure in the secondary cylinder chamber 202b of the cylinder 202 is increased prior to the coating, and the catalyst to the die head 112 is increased. It prepares for paste feeding and paste blowing from the die head 112. For this reason, since it is possible to suppress the generation of surge pressure associated with the start of paste pressure feeding to the die head 112 under a situation where there is a pressure difference, the spraying state at the start of paste spraying from the die head 112 is stabilized, and the coating liquid layer The shape of S can also be stabilized. In addition, the drive state of the first valve body 210 and the second valve body 220 for increasing the pressure in the secondary cylinder chamber 202b is controlled through the pulse output adjustment of the servo motor to suppress the influence of the viscosity change of the catalyst paste. Since it can also be made, the versatility with respect to a viscosity change also increases.

  Further, in the coating apparatus 100 of the present embodiment, the second valve body 220 can be relatively separated from the first valve body 210 in the intermittent valve 200 involved in intermittent coating. Then, the second valve body 220 overlaps the first valve body 210, thereby closing the through hole 212 of the first valve body 210, and opening the through hole 212 by leaving the first valve body 210. For this reason, by controlling the second valve body 220 so as to be separated from the first valve body 210, the opening state of the through-hole 212 can be easily changed including the blockage thereof.

  Next, a second embodiment will be described. This embodiment is characterized in that the opening state of the through hole 212 of the first valve body 210 is variable. FIG. 8 is an explanatory diagram schematically showing the intermittent valve 200A of the second embodiment in an enlarged manner, and FIG. 9 is an explanatory diagram showing a valve element configuration and a state of valve element driving. Note that the same reference numerals are used for the same configurations as those in the above-described embodiment, and detailed descriptions thereof are omitted.

  As shown in FIGS. 8 to 9, the intermittent valve 200 </ b> A includes a first valve body 210 having through holes 212 at an equal pitch incorporated in a cylinder 202, and the first valve body 210 causes the cylinder 202 to be a primary cylinder. The chamber 202a and the secondary cylinder chamber 202b are partitioned. The second valve body 220 </ b> A has a disk shape with the same diameter as the first valve body 210, has through holes 226 at an equal pitch, and is supported by the second valve body shaft 222. The first valve body shaft 214 of the first valve body 210 is inserted into the shaft through hole 224 of the second valve body 220A so that the upper surface of the second valve body 220A overlaps the lower surface of the first valve body 210. Is done. In this state, the first valve body 210 is incorporated in the cylinder 202 together with the second valve body 220, and the second valve body 220 </ b> A is rotatable relative to the first valve body 210.

  As described above, the first valve body 210 receives the driving force of the first servo motor 420 via the power transmission device 424, and advances and retreats in the cylinder axial direction while sliding along the cylinder inner peripheral wall. Unlike the first embodiment, the power transmission device 434 that transmits the driving force of the second servomotor 430 to the second valve body 220A is configured to apply the forward / reverse rotational driving force of the second servomotor 430 by a gear or a pulley (not shown). It is transmitted as it is to the second valve body 220A via the second valve body shaft 222. Therefore, the second valve body 220 </ b> A passes through the through-hole 226 through the first valve body 210 according to the relative rotation state with respect to the first valve body 210 while the upper surface of the second valve body 220 </ b> A is overlapped with the lower surface of the first valve body 210. Overlay the hole 212. FIG. 10 is an explanatory view showing the relationship between the rotation transition of the second valve body 220A and the opening state of the through hole 212. FIG. As shown in FIG. 10, when the second valve body 220A receives the rotational driving force of the second servo motor 430 and rotates forward and backward, the through hole 212 and the through hole 226 overlap according to the forward and reverse rotational transition. By changing the situation, the through hole 212 is variable from the closed state to the fully opened state. As described above, since the driving force is transmitted to the first and second valve bodies independently by the servo motors, the first valve body 210 overlaps the second valve body 220. The cylinder 202 is moved forward and backward in the axial direction of the cylinder inside the cylinder 202. The second valve body 220A rotates forward and backward relative to the first valve body 210 regardless of the advance / retreat position of the first valve body 210, and the opening state of the through hole 212 is variable as described above. . 9 to 10, the through hole 212 and the through hole 226 have irregular shapes, but may be circular as in the first embodiment.

  The state of intermittent coating using the intermittent valve 200A of the second embodiment is as follows. FIG. 11 is an explanatory diagram showing the driving process of the intermittent valve 200A during intermittent coating, together with the driving status of each constituent material and the state of paste spraying from the die head 112, and FIG. 12 shows the first valve body 210 and the second valve body 220A. It is explanatory drawing which shows this drive condition together with transition of coating die internal pressure P2.

  Even in the driving process of the second embodiment, the process is repeated by the control device 410 while the coating liquid layer S is intermittently formed on the substrate K. At the start, both valve bodies are positioned at the original position y0 with the second valve body 220A overlaid on the first valve body 210, and the second valve body 220A is inserted into the through hole 212 of the first valve body 210. Place it in the rotational position where it will be closed. The driving state of the pump 118 in the start state and the pressure state of the die head 112 and the secondary side cylinder chamber 202b are as described above.

  In the coating operation start process in step S100, the control device 410 keeps the first valve body 210 and the second valve body 220A in the original position y0, and the second valve to the side that opens the through hole 212. The rotation drive (forward rotation drive) of the body 220A and the return drive (reverse rotation drive) of the second valve body 220A toward the side closing the through hole 212 are sequentially executed. The forward / reverse driving of the second valve body 220A is performed when the driver unit 432 under the control of the control device 410 drives the second servo motor 430 in pulses. The through-hole 212 of the first valve body 210 is once opened and closed between the time when the second valve body 220A is driven to rotate forward and the time when the second valve body 220A is driven to return. Therefore, the catalyst paste that has been pumped to the primary cylinder chamber 202a passes through the through hole 226 of the second valve body 220A and the through hole 212 of the first valve body 210 as shown in the drawing, and the paste pumping pressure P0. To flow into the secondary cylinder chamber 202b. As a result, the internal pressure of the secondary cylinder chamber 202b and the die head 112 (die internal pressure) rises as shown in FIG. 12, and the intermittent valve is closed due to the blockage of the through-hole 212 accompanying the return drive of the second valve body 220 described above. 200A holds the catalyst paste in the secondary cylinder chamber 202b.

  In the above step S100, the above-mentioned forward rotation drive amount of the second valve body 220A and the above-mentioned forward rotation amount are set so that the paste is not sprayed from the die head 112 even if the catalyst paste flows into the secondary cylinder chamber 202b at the paste pressure feed pressure P0. The rotation speed and the elapsed time until the through hole 212 is closed are set. In the present embodiment, the second valve body 220A is driven to rotate in the forward and reverse directions by the second servo motor 430. Therefore, the output pulse to the motor is determined so that paste inflow that causes paste spray from the die head 112 does not occur. It has been. In this case, the second valve body 220 </ b> A functions as a throttle that changes the opening state of the through hole 212 by changing the overlapping state of the through hole 226 and the through hole 212. Therefore, the paste passing state passing through the restriction determined by the overlap of the through hole 226 and the through hole 212 varies depending on the viscosity of the catalyst paste, but by adjusting the pulse output to the second servo motor 430, It is possible to suppress changes in the passing state of the paste due to changes in viscosity. For example, when the viscosity increases, the above-described paste passing state becomes lower than when the viscosity is low. Therefore, when the paste viscosity increases, the amount of the catalyst that flows into the secondary cylinder chamber 202b when the viscosity is low is approximately the same amount. The pulse output to the second servo motor 430 may be adjusted so that the paste flows.

  In the subsequent step S110, the control device 410 increases the die internal pressure to the predetermined coating die internal pressure P2 as described above, and starts the coating process. In step S110, the control device 410 drives the first valve body 210 forward from the original position y0 to the intermediate position y1 together with the second valve body 220 while the through-hole 212 is closed in the second valve body 220. Let The forward drive of both valve bodies is performed by the driver unit 422 under the control of the control device 410 driving the first servo motor 420 in pulses. That is, since the second valve element 220A rotates while overlapping the first valve element 210 as described above, if the first valve element 210 is driven forward by the first servo motor 420, the second valve element 220A inevitably becomes necessary. The second valve body 220A also moves forward. The catalyst paste (step S100) that has entered the secondary cylinder chamber 202b at the paste pressure feed pressure P0 is increased in pressure by the forward drive of both the valve bodies and is fed to the die head 112 as described above. Then, the internal pressure of the secondary cylinder chamber 202b becomes higher by ΔPn than the coating pressure of the catalyst paste from the die head 112 (coating die internal pressure P2), so that the application of the catalyst paste from the die head 112 is actually started. The forward drive amount and the speed of both valve bodies are set. In the present embodiment, since both the first and second valve bodies are driven forward and backward by the first servo motor 420, the output pulse to the motor is determined so that the above-described increase in internal pressure and paste coating occur. In this case, the state of arrival of the paste reaching the die head 112 from the secondary cylinder chamber 202b varies depending on the viscosity of the catalyst paste, but by adjusting the pulse output to the first servo motor 420, the paste due to the change in the viscosity of the catalyst paste It is possible to suppress changes in the arrival situation. For example, when the viscosity increases, the above-mentioned paste arrival status becomes lower than that when the viscosity is low. Therefore, when the paste viscosity increases, the paste arrival status is almost the same as that when the viscosity is low. The pulse output may be adjusted.

  In the subsequent step S120, the first valve body 210 and the second valve body 220A are both driven forward from the intermediate position y1 to the final position y2, while the second valve body 220A is driven as shown in FIG. At the beginning of the forward drive of the valve body, the valve body is driven to the side where the opening state of the through hole 212 is reduced. This is because the amount of paste pumping to the die head 112 increases due to further forward drive of the valve body from the intermediate position y1, so that the opening state of the through-hole 212 is controlled so as not to increase excessively. This is to narrow down according to the situation. The degree of this restriction is determined by the rotational drive amount of the second valve body 220A, and can be adjusted by adjusting the pulse output. Therefore, the inflow state of the catalyst paste that passes through the narrowed through hole 212 and flows into the secondary cylinder chamber 202b can be made substantially the same regardless of the viscosity of the catalyst paste. For example, when the viscosity increases, the paste passing through the narrowed through-hole 212 is lower than when the viscosity is low. Therefore, when the paste viscosity increases, the pulse to the second servo motor 430 is reduced so as to loosen the degree of squeezing. Adjust the output. Then, if the valve body is driven forward to the final position y2, no further valve body advance occurs, so that the opening state of the through hole 212 is almost the same for the second valve body 220A. Rotational drive control is performed relative to the first valve body 210. As a result, the through hole 212 of the first valve body 210 is continuously opened with the degree of restriction determined by the rotational driving status of the second valve body 220A. Therefore, the catalyst paste passes through the through hole 212 from the primary side cylinder chamber 202a and enters the secondary side cylinder chamber 202b, and is sprayed from the die head 112 to the substrate K based on the paste pressure P0. And since a catalyst paste is supplied continuously, the coating liquid layer S is formed in the base material K conveyed.

  The driving state of the first valve body 210 and the second valve body 220A in the above step S120 can be defined by the pulse control of the first and second servo motors described above, and the valve body from the original position y0 to the intermediate position y1. The moving speed, the rotational driving amount of the second valve body 220A (the variable amount of the aperture of the through hole 212), and its speed can be variously set by adjusting the pulse output to the servo motor. And in the formation process of the coating liquid layer S while the opening condition of the through-hole 212 is prescribed | regulated by the rotational drive of 2nd valve body 220A, the control apparatus 410 is that coating die internal pressure P2 is predetermined pressure. The second valve body 220A is driven to rotate forward and backward so as to be within the range. In FIG. 12, since the paste pumping pressure P0 is substantially constant and the driving state of both valve bodies is shown, the opening degree adjustment of the through-hole 212 by forward / reverse rotation driving of the second valve body 220A is not so necessary. However, as shown in FIG. 5, when the paste pumping pressure P0 changes (pulsates), the control device 410 is based on the sensor outputs of the first pressure sensor 121 and the second pressure sensor 122 (see FIG. 1). Thus, as shown by a two-dot chain line in FIG. 12, the forward / reverse rotational drive amount and drive speed of the second valve body 220A can be adjusted so that the coating die internal pressure P2 falls within a predetermined pressure range. In addition, if the forward / reverse rotational drive amount and drive speed of the second valve body 220A are adjusted in consideration of the viscosity change of the catalyst paste, the coating die internal pressure P2 is set within a predetermined pressure range in response to the viscosity change of the catalyst paste. Can fit inside.

  Following the continuation of step S120 for a time that matches the formation size of the coating liquid layer S, the control device 410 starts the coating end operation of step S130. In step S130, the control device 410 drives the second valve body 220A to rotate so that the through hole 212 of the first valve body 210 is closed. Thereby, the supply of the catalyst paste to the die head 112 is stopped. Following step S130, the control device 410 drives both the first valve body 210 and the second valve body 220 backward to return both valve bodies to the original position y0 (step S140). As a result, the secondary cylinder chamber 202b expands, so that the catalyst paste remaining in the out-side paste pressure feeding line 116b and the die head 112 is sucked to reliably stop the paste spraying from the die head 112. Therefore, the state of spraying when the paste spraying from the die head 112 is stopped can be stabilized, and the shape of the coating liquid layer S can be stabilized. When stopping the coating in step S140, the control device 410 waits for a time corresponding to the interval formation between the adjacent coating liquid layers S on the base material K (step S150), and proceeds to the above-described step S100. Then, the next coating liquid layer S is formed.

  The driving speed at the time of returning the first valve body 210 and the second valve body 220 to the original position y0 in step S140 can be changed by adjusting the pulse output to the first servomotor 420. The suction state of the catalyst paste that accompanies the return of the valve body changes depending on the viscosity of the catalyst paste. By adjusting the pulse output to the servo motor, changes in the suction state of the paste due to changes in the viscosity of the catalyst paste are suppressed. Can be. For example, when the viscosity is high, the above-mentioned paste suction state becomes lower than when the viscosity is low, so if the paste viscosity is high, the pulse output to the servo motor is set so that the paste suction occurs to the same extent as when the viscosity is low. Adjust it.

  In the second embodiment described above, the coating performance described above was examined. As in the first embodiment, the coating liquid layer S could be intermittently formed on the substrate K with high accuracy. Therefore, also in the second embodiment, the catalyst paste held in the secondary cylinder chamber 202b is pumped (step S110), and the catalyst paste is continuously supplied while maintaining the coating die internal pressure P2 (step S120). ), The supply stop due to the blockage of the through-hole 212 (step S130), and the suction of the catalyst paste by the return of the valve body (step S140) to cope with the change in the viscosity of the catalyst paste, and to achieve the above-described effect. Can play.

  In the second embodiment, in the intermittent valve 200 </ b> A involved in intermittent coating, the second valve body 220 </ b> A can be rotated forward and backward relative to the first valve body 210. After that, the overlapping state of the through hole 226 of the second valve body 220A and the through hole 212 of the first valve body 210 is changed by the rotation of the second valve body 220A, and the opening state of the through hole 212 is blocked. Including variable. For this reason, by controlling the second valve body 220 </ b> A to rotate and control relative to the first valve body 210, the opening state of the through-hole 212 can be easily changed including the blockage thereof.

  The present invention is not limited to the above-described embodiment, and can be realized with various configurations without departing from the spirit of the present invention. For example, the technical features of the embodiments corresponding to the technical features in each embodiment described in the summary section of the invention are intended to solve part or all of the above-described problems, or part of the above-described effects. Or, in order to achieve the whole, it is possible to replace or combine as appropriate. Further, if the technical feature is not described as essential in the present specification, it can be deleted as appropriate.

  In the above embodiment, the second valve body 220 is incorporated on the primary cylinder chamber 202a side, but the second valve body 220 may be incorporated on the secondary cylinder chamber 202b side. In this case, a shaft through hole may be formed in the first valve body shaft 214 of the first valve body 210, and the second valve body shaft 222 of the second valve body 220 may be inserted into the through hole. The same applies to the intermittent valve 200A of the second embodiment.

  Further, in the second embodiment, the second valve body 220A is rotated in the forward and reverse directions. However, the second valve body 220A may overlap the first valve body 210 and rotate only in one direction.

  In addition, the case where a membrane electrode assembly for a fuel cell is manufactured using a catalyst paste as a coating liquid has been described as an example. However, a coating liquid other than the catalyst paste is intermittently sprayed to form a coating liquid layer on the substrate. It can also be formed intermittently.

DESCRIPTION OF SYMBOLS 100 ... Coating apparatus 110 ... Intermittent coating apparatus group 112 ... Die head 114 ... Tank 116 ... Paste pressure feeding line 116a ... In side paste pressure feeding line 116b ... Out side paste pressure feeding line 117 ... Return line 118 ... Pump 119 ... Relief valve 121 ... 1st pressure sensor 122 ... 2nd pressure sensor 123 ... Temperature sensor 150 ... Coating width 200 ... Intermittent valve 200A ... Intermittent valve 202 ... Cylinder 202a ... Primary side cylinder chamber 202b ... Secondary side cylinder chamber 210 ... 1st valve body 212 ... Through hole 214 ... 1st valve body shaft 220 ... 2nd valve body 220A ... 2nd valve body 222 ... 2nd valve body shaft 224 ... Shaft through-hole 226 ... Through-hole 228 ... Valve body clearance gap 400 ... Control device group 410 ... Control device 420 ... First servo motor 422 ... Dora Eber unit 424 ... Power transmission device 430 ... Second servo motor 432 ... Driver unit 434 ... Power transmission device S ... Coating liquid layer K ... Base material y0 ... Original position y1 ... Intermediate position y2 ... Final position

Claims (9)

A valve that feeds fluid supplied from a fluid supply source downstream based on supply pressure,
A cylinder,
Incorporated into the cylinder, the cylinder is divided into a primary side that receives the fluid supply and a secondary side that is the fluid pressure feeding side, and then slides along the inner peripheral wall of the cylinder while moving forward and backward in the cylinder axis direction. A first valve body that is drivable to have a fluid passage hole penetrating from the primary side to the secondary side;
A second valve body that can be driven relative to the first valve body, and can change an opening state of the fluid passage hole including the blockage of the fluid passage hole by the relative driving;
Using the drive control of the first valve body in the axial direction of the cylinder and the relative drive control of the second valve body that changes the opening state in combination, the primary side from the primary side through the fluid passage hole is used. A valve comprising: a fluid passage to the secondary side; and a valve body control unit that feeds the fluid that has passed to the secondary side to the downstream side. The valve according to claim 1,
The valve body control unit
The viscosity change of the fluid or a parameter corresponding to the viscosity change is detected, and the drive control of the first valve element in the axial direction of the cylinder and the second valve element according to the detected viscosity change of the fluid. Valve to adjust relative drive control. The valve according to claim 1 or 2, wherein
The valve body control unit
At the timing of starting the pumping of the liquid to the downstream side,
The side on which the fluid passage hole is closed after the second valve body is driven and controlled so that the fluid passage hole of the first valve body located at the original position at the start of pumping opens. A first control for driving and controlling
The second valve body is driven and controlled so that the fluid passage hole opens after the first valve body is driven and controlled from the original position toward the secondary side while the fluid passage hole is closed. A valve that executes the second control. The valve according to any one of claims 1 to 3,
The valve body control unit
At the timing of stopping the pumping of the liquid to the downstream side,
Following the drive control of the second valve body to the side where the fluid passage hole is closed, the drive control is performed so that the first valve body is returned to the original position while the fluid passage hole is closed. .   The second valve body is separable relative to the first valve body, and closes the fluid passage hole by overlapping the first valve body, and passes the fluid by separating from the first valve body. The valve according to claim 3 or 4, wherein the hole is opened. The valve according to claim 5,
The valve body control unit
Following the second control at the timing of starting the pumping of the liquid to the downstream side, the first valve body is moved to the cylinder while driving the second valve body to the side where the fluid passage hole opens. A valve for continuously supplying fluid from the opened fluid passage hole while varying the volume in the cylinder on the secondary side by moving forward and backward along the axial direction.   The second valve body includes a through hole that overlaps the fluid passage hole and is rotatable relative to the first valve body, and changes an overlapping state of the through hole and the fluid passage hole by rotation. The valve according to claim 3 or 4, wherein the opening state of the fluid passage hole is variable. The valve according to claim 7,
The valve body control unit
Following the second control at the timing of starting the pumping of the liquid to the downstream side, the opening state of the fluid passage hole can be varied so that the degree of opening of the fluid passage hole is increased or decreased by controlling the driving of the second valve body. A valve that continuously supplies fluid from the opened fluid passage hole. A coating apparatus that intermittently forms a spray mark on which a coating liquid is sprayed on a substrate as a coating liquid layer,
A die head that sprays the coating liquid against the substrate;
A coating liquid conduit is provided from the coating liquid tank to the die head, and the coating liquid supplied from the coating liquid tank is intermittently supplied to the die head based on the supply pressure of the coating liquid. With intermittent valve to feed,
The intermittent valve is a valve according to any one of claims 1 to 8, and the valve body control unit controls the drive control of the first valve body in the cylinder axial direction and the opening state. Combined with relative drive control of the variable second valve body, the coating liquid passes from the primary side to the secondary side through the fluid passage hole and the coating passes to the secondary side. A coating device that intermittently feeds liquid to the die head.

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