JP2014041383A - Optical device, optical scanner, and image forming device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compact optical device configured to prevent deflection of a light reflection member, and to provide an optical scanner and an image forming device.SOLUTION: An optical device 1 includes: a shaft member 20 having an elastic support part 22 for supporting a plate-like fitting part 21 and a fitting part 21 around a shaft A swingably; a magnet 40 arranged on one surface of the fitting part 21; and a light reflection member 10 arranged on the other surface of the fitting part 21 and having larger area than the fitting part 21. The shaft member 20 and the light reflection member 10 are formed as different members.

Description

  Some embodiments according to the present invention relate to an optical device, an optical scanner, and an image forming apparatus, which are manufactured by, for example, a MEMS (Micro Electro Mechanical System) technique and a movable plate reciprocates around an elastic support portion.

  Conventionally, as an optical device of this type, in an optical scanning device provided with a mirror with a magnet supported so as to be swingable on a shape memory alloy wire, the mirror with a magnet is shaped by a mirror and a magnet that are separately created in advance. A structure in which a memory alloy wire is sandwiched and fixed while being sandwiched is known. This optical scanning device can improve the durability by improving the fixing force between the mirror with magnet and the shape memory alloy wire by the above-described configuration. (For example, refer to Patent Document 1).

JP-A-9-304721

  However, in the conventional optical device, when the mirror with magnet is oscillated, the force due to the torsional deformation of the shaft member is transmitted to the mirror with magnet, and locally on the connection portion with the shape memory alloy wire in the mirror with magnet. There was a problem of causing a large deflection. Further, in order to suppress deflection (distortion) in the mirror with magnet, when the thickness of the mirror with magnet is increased, the vibration system composed of the mirror with magnet and the shape memory alloy wire is vibrated (oscillating motion). In this case, the wire required to vibrate at the same frequency (frequency) becomes longer compared to a vibration system that does not change the thickness of the mirror with magnet. As a result, there has been a problem that the optical device becomes large.

  Some aspects of the present invention have been made in view of the above-described problems, and can suppress the deflection (distortion) of the light reflecting member and can reduce the size of the optical device, the optical scanner, and the image formation. One object is to provide a device.

  An optical device according to the present invention includes a plate-shaped attachment portion, a shaft member having an elastic support portion that supports the attachment portion so as to be swingable around a predetermined axis, a rigid member provided on one surface of the attachment portion, A light reflecting member provided on the other surface of the attachment portion and having an area larger than that of the attachment portion.

  According to such a configuration, since the rigid member is provided in the attachment portion, the rigidity of the attachment portion is increased. Thereby, the bending (distortion) which arises in the light reflection member provided in the attachment part can be suppressed. Further, since the light reflecting member is provided in the attachment portion, the light reflecting member is connected to the shaft member via the attachment portion without being connected to the elastic support portion. Thereby, when the mounting portion swings around the predetermined axis, the force due to the torsional deformation of the elastic support portion is alleviated by the rigid member, so that the conventional light reflecting member has been generated at the connection portion with the elastic support portion. Deflection can be suppressed. Further, the light reflecting member has an area larger than that of the mounting portion. Here, since the elastic support portion is connected to the attachment portion, and the attachment portion has a smaller area than the light reflection member, the optical device has a structure in which the elastic support portion enters inside the end portion of the light reflection member. Thereby, compared with the conventional optical device in which the elastic support part was connected to the edge part of the light reflection member, the length of a shaft member can be shortened and an optical device can be reduced in size. Further, when an optical device is manufactured from a material such as a silicon substrate, for example, the number of optical devices that can be manufactured from a material having the same area can be increased, and the manufacturing cost of the optical device can be reduced. Further, since the rigid member is provided on one surface of the mounting portion and the light reflecting member is provided on the other surface of the mounting portion, the center of gravity of the vibration system composed of the light reflecting member, the shaft member, and the rigid member is pivoted. It becomes possible to arrange | position on the central axis of a member. Thereby, vibrations other than torsion can be suppressed when the mounting portion swings around a predetermined axis. Further, since the locus of the reflected light by the light reflecting member becomes a straight line with high accuracy, the image to be drawn is prevented from being distorted and the optical device can be easily controlled.

  Preferably, the rigid member is a ferromagnetic body, and further includes a magnetic field generation unit configured to generate a driving force between the rigid member and swing the mounting portion.

  According to such a configuration, the magnetic field generating means configured to generate a driving force between the ferromagnetic material and swing the mounting portion is provided. For example, an alternating current is supplied to the coil as the magnetic field generating means. By using a power source that performs this, an electromagnetic force can be generated between the ferromagnetic body and the mounting portion can be easily swung.

Preferably, the ferromagnetic material is a permanent magnet.
According to this configuration, since the permanent magnet is used as the rigid member, the rigidity of the mounting portion can be increased, and a larger electromagnetic force can be generated between the magnetic field generating means and the magnetic field generating means.

  Preferably, an interposition member provided in the attachment portion is further provided, and the light reflecting member is provided in the attachment portion via the interposition member.

  According to this configuration, the light reflecting member is provided on the attachment portion via the interposition member. Here, a space corresponding to the thickness of the interposed member is formed between the attachment portion and the light reflecting member. Therefore, by setting the thickness of the interposed member to an appropriate value, the optical device has a structure in which the light reflecting member and the support member do not come into contact with the mounting portion when the light reflecting member swings around a predetermined axis. It becomes possible to do. Thereby, even when a supporting member has a frame part (frame), the width of a supporting member can be made small and an optical device can be made further smaller.

Preferably, the attachment portion has substantially the same shape as the interposed member.
According to such a configuration, since the attachment portion has substantially the same shape as the interposition member, alignment is facilitated when the interposition member is provided on the attachment portion.

Preferably, the shaft member and the light reflecting member are formed as different members.
According to this configuration, since the shaft member and the light reflecting member are formed as different members, restrictions such as length, width, and thickness, which are restricted when the shaft member and the light reflecting member are integrally formed, are limited. Therefore, the shaft member and the light reflecting member can be formed by setting the length, width, thickness, etc. to optimum values. Thereby, an optical device can be designed easily.

  Preferably, a support member that supports the shaft member is further provided, and the shaft member and the support member are integrally formed.

  According to this configuration, since the shaft member and the support member are integrally formed, the rigidity of the connection portion between the shaft member and the support member is increased. Thereby, when the attachment portion swings around the predetermined axis, the risk of breakage or breakage at the connecting portion between the shaft member and the support member can be reduced.

  The optical device according to the present invention includes a plate-like attachment portion, a shaft member having an elastic support portion that supports the attachment portion so as to be swingable around a predetermined axis, a rigid member provided in the attachment portion, and the rigidity A light reflecting member provided on the attachment portion via the member and having a larger area than the attachment portion.

  According to such a configuration, since the rigid member is provided in the attachment portion, the rigidity of the attachment portion is increased. Thereby, the bending (distortion) which arises in the light reflection member provided in the attachment part can be suppressed. Further, since the light reflecting member is provided in the attachment portion, the light reflecting member is connected to the shaft member via the attachment portion without being connected to the elastic support portion. Thereby, when the mounting portion swings around the predetermined axis, the force due to the torsional deformation of the elastic support portion is alleviated by the rigid member, so that the conventional light reflecting member has been generated at the connection portion with the elastic support portion. Deflection can be suppressed. Further, the light reflecting member has an area larger than that of the mounting portion. Here, since the elastic support portion is connected to the attachment portion, and the attachment portion has a smaller area than the light reflection member, the optical device has a structure in which the elastic support portion enters inside the end portion of the light reflection member. Thereby, compared with the conventional optical device in which the elastic support part was connected to the edge part of the light reflection member, the length of a shaft member can be shortened and an optical device can be reduced in size. Further, when an optical device is manufactured from a material such as a silicon substrate, for example, the number of optical devices that can be manufactured from a material having the same area can be increased, and the manufacturing cost of the optical device can be reduced. Further, the light reflecting member is provided on the attachment portion via the rigid member. Here, a space corresponding to the thickness of the rigid member is formed between the attachment portion and the light reflecting member. Therefore, by setting the thickness of the rigid member to an appropriate value, the optical device has a structure in which the light reflecting member and the supporting member do not come into contact with the mounting portion when the light reflecting member swings around a predetermined axis. It becomes possible to do. Thereby, even when it has a supporting member, the width | variety of a supporting member can be made small and an optical device can be reduced further.

  Preferably, the rigid member is a ferromagnetic body, and further includes a magnetic field generation unit configured to generate a driving force between the rigid member and swing the mounting portion.

  According to such a configuration, the magnetic field generating means configured to generate a driving force between the ferromagnetic material and swing the mounting portion is provided. For example, an alternating current is supplied to the coil as the magnetic field generating means. By using a power source that performs this, an electromagnetic force can be generated between the ferromagnetic body and the mounting portion can be easily swung.

Preferably, the ferromagnetic material is a permanent magnet.
According to this configuration, since the permanent magnet is used as the rigid member, the rigidity of the mounting portion can be increased, and a larger electromagnetic force can be generated between the magnetic field generating means and the magnetic field generating means.

Preferably, the light reflecting member has a recess, and the rigid member is fitted in the recess.
According to this configuration, since the rigid member is fitted into the concave portion of the light reflecting member, alignment of the light reflecting member and the rigid member is facilitated.

Preferably, the attachment portion has substantially the same shape as the rigid member.
According to such a configuration, since the attachment portion has substantially the same shape as the rigid member, alignment is facilitated when the rigid member is provided on the attachment portion.

Preferably, the shaft member and the light reflecting member are formed as different members.
According to this configuration, since the shaft member and the light reflecting member are formed as different members, restrictions such as length, width, and thickness, which are restricted when the shaft member and the light reflecting member are integrally formed, are limited. Therefore, the shaft member and the light reflecting member can be formed by setting the length, width, thickness, etc. to optimum values. Thereby, an optical device can be designed easily.

  Preferably, a support member that supports the shaft member is further provided, and the shaft member and the support member are integrally formed.

  According to this configuration, since the shaft member and the support member are integrally formed, the rigidity of the connection portion between the shaft member and the support member is increased. Thereby, when the attachment portion swings around the predetermined axis, the risk of breakage or breakage at the connecting portion between the shaft member and the support member can be reduced.

An optical scanner according to the present invention includes the above-described optical device according to the present invention.
According to this configuration, since the optical device according to the present invention described above is provided, it is possible to suppress deflection (distortion) that occurs in the light reflecting member. Thereby, the frequency (frequency) in the vibration system composed of the light reflecting member and the shaft member can be further increased, and the angle when the light reflecting member swings around the predetermined axis can be further increased. An optical scanner having a different scanning range can be realized.

An image forming apparatus according to the present invention includes the above-described optical scanner according to the present invention.
According to this configuration, since the optical scanner according to the present invention described above is provided, the frequency (frequency) in the vibration system is further increased, and the angle when the light reflecting member swings around the predetermined axis is further increased. Can do. Thereby, a high-resolution image can be formed, and an image forming apparatus having excellent drawing characteristics can be realized.

It is a top view explaining the structure in 1st Embodiment of the optical device which concerns on this invention. It is a top view explaining the shaft member and supporting member which were shown in FIG. It is the front view and back view explaining the light reflection member shown in FIG. It is sectional drawing in the II line | wire shown in FIG. It is the front view and back view explaining the light reflection member in 2nd Embodiment of the optical device which concerns on this invention. It is a sectional side view explaining the structure in 2nd Embodiment of the optical device which concerns on this invention. 1 is a schematic diagram illustrating an example of an image forming apparatus including an optical scanner according to the present invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
<Optical device>
(First embodiment)
1 to 4 show a first embodiment of an optical device according to the present invention, and FIG. 1 is a plan view for explaining a configuration of the optical device according to the first embodiment of the present invention. In the following description, unless otherwise specified, the dimension in the X-axis direction in FIG. 1 is referred to as “length”, the dimension in the Y-axis direction is referred to as “width”, and the dimension in the Z-axis direction is referred to as “thickness”.

  As shown in FIG. 1, the optical device 1 includes a light reflecting member 10, a shaft member 20, and a support member 30. The light reflecting member 10 and the shaft member 20 are formed as different members, and the light reflecting member 10 is attached on the shaft member 20. The shaft member 20 and the support member 30 are preferably integrally formed so as to be substantially in the same plane.

  FIG. 2 is a plan view for explaining the shaft member and the support member shown in FIG. As shown in FIG. 2, the shaft member 20 swings around the axis A, which is the central axis of the shaft member 20, with respect to the plate-shaped mounting portion 21 disposed substantially at the center and the support member 30. It has a pair of elastic support part 22 supported so that it is possible.

  The support member 30 supports the shaft member 20. The support member 30 is connected to each of the pair of elastic support portions 22. The fixing portion 31 fixes both ends of the shaft member 20 and the frame portion (frame) that connects the fixing portions 31 to each other. ) 32. In the present embodiment, the support member 30 is configured to have the fixed portion 31 and the frame portion (frame) 32. However, the present invention is not limited to this, and the support member 30 includes only the fixed portion 31 and has the frame portion (frame) 32. The structure which does not do may be sufficient.

  The attachment portion 21 and the elastic support portion 22 in the shaft member 20 can be integrally formed by, for example, etching a silicon substrate. Further, when the shaft member 20 and the support member 30 are integrally formed, they can be integrally formed by etching the silicon substrate similarly.

  FIG. 3 is a front view (FIG. 3A) and a back view (FIG. 3B) for explaining the light reflecting member shown in FIG. As shown in FIG. 3A, a metal film 11 that reflects incident light is formed on one surface (hereinafter referred to as a surface) of the light reflecting member 10. The metal film 11 can be formed, for example, by applying a film forming method such as vacuum deposition, sputtering, or metal foil bonding to a silicon substrate that has been formed into a predetermined shape by etching. Further, as shown in FIG. 3B, a concave portion 12 is formed in the substantially central portion on the other surface (hereinafter referred to as the back surface) of the light reflecting member 10. The recess 12 is formed, for example, by etching a silicon substrate.

  In the present embodiment, a circular shape is shown as the planar shape of the light reflecting member 10. However, the planar shape of the light reflecting member 10 is not limited to this. Other shapes may be used.

  FIG. 4 is a cross-sectional view taken along the line II shown in FIG. The I-I line shown in FIG. 1 is arranged at a predetermined distance from the axis A. As shown in FIG. 4, a magnet 40 is joined to one surface (the upper surface in FIG. 4) of the attachment portion 21 via an adhesive (not shown). Thus, since the magnet 40 with high rigidity is provided in the attachment part 21, the rigidity of the attachment part 21 is improved. In addition, it is preferable to use a permanent magnet as the magnet 40.

  The upper part of the magnet 40 is fitted in the concave portion 12 of the light reflecting member 10, and the light reflecting member 10 is joined via an adhesive (not shown). In this way, the light reflecting member 10 is provided on the attachment portion 21 via the magnet 40. Here, a space corresponding to the thickness of the magnet 40 is formed between the attachment portion 21 and the light reflecting member 10. Therefore, by setting the thickness of the magnet 40 to an appropriate value, the optical device 1 allows the light reflecting member 10 and the frame portion (frame) when the light reflecting member 10 swings around the axis A together with the mounting portion 21. ) It is possible to make a structure that does not contact 32. For example, when the diameter of the light reflecting member 10 is 2 mm, the thickness is 200 μm, and the thickness of the support member 30 is 200 μm, the light reflecting member 10 swings around the axis A when the thickness of the magnet 40 is set to 400 μm. Even if the deflection angle is 40 degrees, the light reflecting member 10 does not contact the frame portion (frame) 32.

  In addition, it is preferable that the shape of the recessed part 12 is shape | molded in the shape substantially the same as the magnet 40 when planarly viewed. Moreover, it is preferable that the shape of the attachment part 21 is also formed into a shape substantially the same as that of the magnet 40 when viewed in plan.

  As shown in FIG. 1, when the optical device 1 is viewed in plan, the light reflecting member 10 covers the mounting portion 21 and the magnet 40 so as to cover the mounting portion 21 and the magnet 40 provided on the upper surface of the mounting portion 21. Has a larger area. Here, since the elastic support part 22 is connected to the attachment part 21 and the attachment part 21 has an area smaller than that of the light reflecting member 10, as shown in FIG. 4, in the optical device 1, the elastic support part 22 has the light reflecting member 10. It becomes a structure which penetrates only part B from the edge part.

  Further, when the optical device 1 is viewed in plan, the magnet 40 is magnetized in a direction perpendicular to the axis A (Y-axis direction in FIG. 1). That is, the magnet 40 has a pair of magnetic poles that are opposed to each other with the axis A and have different polarities. In this embodiment, although the magnet 40 was demonstrated as a member different from the light reflection member 10 and the shaft member 20, it is not limited to this, You may integrally form with the light reflection member 10 or the shaft member 20. FIG. In this case, the magnet 40 is formed by applying a film forming method such as sputtering to the surface of the light reflecting member 10 or the attachment portion 21.

  As shown in FIG. 4, the support member 30 is joined to the holder 50 via an adhesive (not shown), and a coil 41 for swinging the mounting portion 21 is disposed on the bottom 51 of the holder 50. ing. The coil 41 corresponds to the driving means of the present invention. The coil 41 is supplied with an alternating current having a predetermined frequency from a power source (not shown). As a result, the coil 41 alternately generates a magnetic field directed upward (movable plate 11 side) and a magnetic field directed downward. As a result, one of the pair of magnetic poles of the magnet 40 approaches the coil 41 and the other magnetic pole is separated so that the elastic support portion 22 is twisted and deformed while the attachment portion 21 and the attachment portion 21 are moved. The provided light reflecting member 10 and the magnet 40 are swung around the axis A.

  The predetermined frequency of the alternating current supplied to the coil 41 is preferably set so as to substantially match the frequency (torsional resonance frequency) of the vibration system composed of the light reflecting member 10, the shaft member 20, and the magnet 40. . By utilizing resonance in this way, the swing angle can be increased with less power consumption when the mounting portion 21 is swung around the axis A.

  In the present embodiment, the driving method using the electromagnetic force between the magnet 40 and the coil 41 is shown. However, the present invention is not limited to this, and the magnet 40 corresponding to the ferromagnetic material, the coil 41 corresponding to the magnetic field generating means, and What is necessary is just to be comprised so that a driving force may be generated between power supplies. Further, the optical device 1 may adopt a method using electrostatic attraction or a driving method using a piezoelectric element as a driving means, as long as a rigid member in place of the magnet 40 is provided on the mounting portion 21. For example, in the case of a system using electrostatic attraction, the magnet 40 is not necessary, and one or more electrodes are installed at a position facing the mounting portion 21 in the bottom 51 of the holder 50 instead of the coil 41. Is done. Then, by applying an alternating voltage of a predetermined frequency between the mounting portion 21 and the electrode, an electrostatic attractive force is generated between the mounting portion 21 and the electrode, and the elastic support portion 22 is twisted and deformed. The light reflecting member 10 and the magnet 40 provided in the portion 21 and the attachment portion 21 are swung around the axis A.

  Thus, according to the optical device 1 in the present embodiment, since the magnet 40 is provided in the attachment portion 21, the rigidity of the attachment portion is increased. Thereby, the deflection (distortion) which arises in the light reflection member 10 provided in the attaching part 21 can be suppressed. Further, since the light reflecting member 10 is provided in the attachment portion 21, the light reflecting member 10 is connected to the shaft member 20 via the attachment portion 21 without being connected to the elastic support portion 22. As a result, when the mounting portion 21 swings around the axis A, the force due to the torsional deformation of the elastic support portion 22 is alleviated by the magnet 40, so that it occurs at the connection portion with the elastic support portion in the conventional light reflecting member. The warping (distortion) that has occurred can be suppressed. Further, the light reflecting member 10 has a larger area than the mounting portion 21. Here, since the elastic support portion 22 is connected to the attachment portion 21, and the attachment portion 21 has a smaller area than the light reflecting member 10, the optical device 1 is configured such that the elastic support portion 22 is only part B from the end portion of the light reflecting member 10. It has a structure that goes inside. Thereby, compared with the conventional optical device in which the elastic support part was connected to the edge part of the light reflection member, the length of the shaft member 20 can be shortened and the optical device 1 can be reduced in size. . Moreover, when manufacturing the optical device 1 from materials, such as a silicon substrate, the number of the optical devices 1 which can be manufactured from the material of the same area can be increased, and the manufacturing cost of the optical device 1 can be reduced. Further, the light reflecting member 10 is provided on the attachment portion 21 via the magnet 40. Here, a space corresponding to the thickness of the magnet 40 is formed between the attachment portion 21 and the light reflecting member 10. Therefore, by setting the thickness of the magnet 40 to an appropriate value, the optical device 1 allows the light reflecting member 10, the support member 30, and the mounting portion 21 to swing around the predetermined axis. It becomes possible to make the structure which does not contact. Thereby, even when it has the supporting member 30, the width | variety of the supporting member 30 can be made small and the optical device 1 can be further reduced in size.

  Further, according to the optical device 1 of the present embodiment, the magnetic device 40 includes magnetic field generating means configured to generate a driving force between the magnet 40 and swing the mounting portion 21. By using 41 and a power source that supplies an alternating current to the coil, an electromagnetic force can be generated between the magnet 40 and the mounting portion 21 can be easily swung.

  Further, according to the optical device 1 in the present embodiment, since a permanent magnet is used as the magnet 40, the rigidity of the mounting portion 21 is increased, and a larger electromagnetic force can be generated between the coil 41 and the power source. it can.

  Moreover, according to the optical device 1 in this embodiment, since the magnet 40 is fitted in the recessed part 12 of the light reflection member 10, alignment with the light reflection member 10 and the magnet 40 becomes easy.

  Moreover, according to the optical device 1 in this embodiment, since the attachment part 22 has substantially the same shape as the magnet 40, alignment is facilitated when the magnet 40 is provided on the attachment part 22.

  Moreover, according to the optical device 1 in this embodiment, since the shaft member 20 and the light reflecting member 10 are formed as different members, there is a restriction when the shaft member 20 and the light reflecting member 10 are integrally formed. The shaft member 20 and the light reflecting member 10 can be formed by setting the length, width, thickness, etc. to optimum values without being restricted by the length, width, thickness, etc. . Thereby, the optical device 1 can be designed easily.

  Moreover, according to the optical device 1 in this embodiment, since the shaft member 20 and the support member 30 are integrally formed, the rigidity of the connection portion between the shaft member 20 and the support member 30 is increased. Thereby, when the attachment part 21 swings around the axis A, it is possible to reduce the possibility of breakage or breakage at the connection portion between the shaft member 20 and the support member 30.

(Second Embodiment)
5 and 6 show a second embodiment of the optical device according to the present invention, and FIG. 5 shows a front view and a back surface for explaining the light reflecting member in the second embodiment of the optical device according to the present invention. FIG. Note that the same components as those of the first embodiment described above are denoted by the same reference numerals, and description thereof is omitted.

  As shown in FIG. 5A, a metal film 11 that reflects incident light is formed on the surface of the light reflecting member 10 as in the first embodiment. Further, as shown in FIG. 5B, an interposition member 13 is provided on the back surface of the light reflecting member 10 at a substantially central portion. The intervening member 13 may be formed integrally with the light reflecting member 10 by, for example, etching a silicon substrate, or formed as a member different from the light reflecting member 10, and the back surface of the light reflecting member 10 with an adhesive or the like. May be joined. In addition, it is preferable that the shape of the interposition member 13 is shape | molded in the substantially same shape as the attaching part 22 when planarly viewed.

  FIG. 6 is a side sectional view for explaining the configuration of the optical device according to the second embodiment of the present invention. This figure corresponds to FIG. 4 in the first embodiment. As shown in FIG. 6, the magnet 40 is joined to one surface (the lower surface in FIG. 6) of the mounting portion 21 via an adhesive (not shown). Moreover, the interposition member 13 is joined to the other surface (upper surface in FIG. 6) of the attachment portion 21 via an adhesive (not shown). Thereby, the light reflecting member 10 is provided on the attachment portion 21 via the interposition member 13. Here, a space corresponding to the thickness of the interposition member 13 is formed between the attachment portion 21 and the light reflecting member 10. Therefore, by setting the thickness of the interposition member 13 to an appropriate value, the optical device 1 is configured such that when the light reflecting member 10 swings around the axis A together with the mounting portion 21, the light reflecting member 10 and the frame portion ( It is possible to make a structure that does not contact the frame.

  In the present embodiment, the light reflecting member 10 is provided on the attachment portion 21 via the interposition member 13, but is not limited thereto, and the light reflecting member 10 is provided directly on the other surface of the attachment portion 21. May be.

  The magnet 40 is provided on one side (lower side in FIG. 6) of the mounting portion 21, and the light reflecting member 10 (and the interposed member 13) is provided on the other side (lower side in FIG. 6) of the mounting portion 21. Therefore, the center of gravity of the vibration system including the light reflecting member 10 (and the interposing member 13), the shaft member 20, and the magnet 40 can be easily controlled. That is, by appropriately setting the size and position of the light reflecting member 10 (and the interposing member 13), the shaft member 20, and the magnet 40, the center of gravity position of the vibration system (in the X-axis direction shown in FIG. 1). , Positions in the Y-axis direction and Z-axis direction) can be arranged on the axis A.

  Thus, according to the optical device 1 in the present embodiment, since the magnet 40 is provided in the attachment portion 21 as in the first embodiment, the rigidity of the attachment portion is increased. Thereby, the deflection (distortion) which arises in the light reflection member 10 provided in the attaching part 21 can be suppressed. Further, since the light reflecting member 10 is provided in the attachment portion 21, the light reflecting member 10 is connected to the shaft member 20 via the attachment portion 21 without being connected to the elastic support portion 22. As a result, when the mounting portion 21 swings around the axis A, the force due to the torsional deformation of the elastic support portion 22 is alleviated by the magnet 40, so that it occurs at the connection portion with the elastic support portion in the conventional light reflecting member. The warping (distortion) that has occurred can be suppressed. Further, the light reflecting member 10 has a larger area than the mounting portion 21. Here, since the elastic support portion 22 is connected to the attachment portion 21, and the attachment portion 21 has a smaller area than the light reflecting member 10, the optical device 1 is configured such that the elastic support portion 22 is only part B from the end portion of the light reflecting member 10. It has a structure that goes inside. Thereby, compared with the conventional optical device in which the elastic support part was connected to the edge part of the light reflection member, the length of the shaft member 20 can be shortened and the optical device 1 can be reduced in size. . Moreover, when manufacturing the optical device 1 from materials, such as a silicon substrate, the number of the optical devices 1 which can be manufactured from the material of the same area can be increased, and the manufacturing cost of the optical device 1 can be reduced. Furthermore, unlike the first embodiment, the magnet 40 is provided on one surface of the mounting portion 21 and the light reflecting member 10 is provided on the other surface of the mounting portion 21, so that the light reflecting member 10, the shaft member 20, and The center of gravity of the vibration system composed of the magnet 40 can be arranged on the central axis of the shaft member 20, that is, the axis A. Thereby, when the attaching part 21 swings around the axis A, vibrations other than torsion can be suppressed. Moreover, since the locus of the reflected light by the light reflecting member 10 becomes a straight line with high accuracy, the image to be drawn is prevented from being distorted and the optical device 1 can be easily controlled.

  Further, according to the optical device 1 in the present embodiment, similarly to the first embodiment, the magnetic device 40 includes a magnetic field generation unit configured to generate a driving force between the magnet 40 and swing the mounting portion 21. Therefore, for example, by using the coil 41 and a power source that supplies an alternating current to the coil as magnetic field generating means, an electromagnetic force can be generated between the magnet 40 and the mounting portion 21 can be easily swung.

  Moreover, according to the optical device 1 in the present embodiment, since a permanent magnet is used as the magnet 40 as in the first embodiment, the rigidity of the mounting portion 21 is increased, and further between the coil 41 and the power source. A large electromagnetic force can be generated.

  Moreover, according to the optical device 1 in the present embodiment, the light reflecting member 10 is provided on the attachment portion 21 via the interposing member 13. Here, a space corresponding to the thickness of the interposition member 13 is formed between the attachment portion 21 and the light reflecting member 10. Therefore, by setting the thickness of the interposition member 13 to an appropriate value, the optical device 1 allows the light reflecting member 10 and the support member 30 when the light reflecting member 10 swings around the axis A together with the mounting portion 21. It becomes possible to make it the structure which does not contact. Thereby, even when it has the supporting member 30, the width | variety of the supporting member 30 can be made small and the optical device 1 can be further reduced in size.

  Moreover, according to the optical device 1 in the present embodiment, the attachment portion 2 has substantially the same shape as the interposition member 13, and therefore, alignment is facilitated when the interposition member 13 is provided on the attachment portion 21.

  Further, according to the optical device 1 in the present embodiment, the shaft member 20 and the light reflecting member 10 are formed as different members in the same manner as in the first embodiment, so that the shaft member 20 and the light reflecting member 10 are integrated. The shaft member 20 and the light reflecting member 10 are set to optimum values for the length, width, thickness, etc., without being restricted by the length, width, thickness, etc., which were restricted when forming. Can be formed. Thereby, the optical device 1 can be designed easily.

  Further, according to the optical device 1 in the present embodiment, the shaft member 20 and the support member 30 are integrally formed as in the first embodiment, so that the rigidity of the connection portion between the shaft member 20 and the support member 30 is increased. Rise. Thereby, when the attachment part 21 swings around the axis A, it is possible to reduce the possibility of breakage or breakage at the connection portion between the shaft member 20 and the support member 30.

(Optical scanner)
Since the optical device 1 includes the light reflecting member 10, the optical device 1 is suitably applied to an optical scanner provided in an image forming apparatus such as a laser printer, a barcode reader, a scanning confocal laser microscope, or an imaging display. be able to. The optical scanner according to the present invention has the same configuration as that of the optical device 1 described above, and thus the description thereof is omitted.

  As described above, according to the optical scanner according to the present invention, since the optical device 1 according to the present invention is provided, the deflection (distortion) generated in the light reflecting member 10 can be suppressed and the size can be reduced. it can. Thereby, the frequency (frequency) in the vibration system constituted by the light reflecting member 10 and the shaft member 20 is made higher, and the deflection angle when the light reflecting member 10 swings around the axis A is made larger. And an optical scanner with a wide scanning range can be realized.

(Image forming device)
Next, an image forming apparatus according to the present invention will be described with reference to FIG. FIG. 7 is a schematic diagram illustrating an example of an image forming apparatus including an optical scanner according to the present invention.

  An image forming apparatus (imaging display) 119 shown in FIG. 7 includes an optical device 1 that is an optical scanner according to the present invention, and light sources 191 and 192 of three colors of R (red), G (green), and B (blue). 193, a cross dichroic prism (X prism) 194, a galvano mirror 195, a fixed mirror 196, and a screen 197.

  In such an image forming apparatus 119, light of each color is irradiated from the light sources 191, 192, and 193 to the optical device 1 (the light reflecting member 10) via the cross dichroic prism 194. At this time, the red light from the light source 191, the green light from the light source 192, and the blue light from the light source 193 are combined by the cross dichroic prism 194. Then, the light (three colors of combined light) reflected by the light reflecting member 10 is reflected by the galvanometer mirror 195, then by the fixed mirror 196, and irradiated on the screen 197.

  At this time, the light reflected by the light reflecting member 10 is scanned in the horizontal direction of the screen 197 (main scanning) by the operation of the optical device 1 (swinging of the mounting portion 21 around the axis X). On the other hand, the light reflected by the light reflecting member 10 is scanned (sub-scanned) in the vertical direction of the screen 197 by the rotation of the galvano mirror 195 around the axis Y. In addition, the intensity of light output from the light sources 191, 192, and 193 of each color changes according to image information received from a host computer (not shown).

  As described above, according to the image forming apparatus 119 according to the present invention, since the optical scanner according to the present invention is provided, the frequency (frequency) in the vibration system including the light reflecting member 10 and the shaft member 20 is set. The deflection angle when the light reflecting member 10 swings around the axis X can be further increased. As a result, an image with high resolution can be formed, and an image forming apparatus 119 having excellent drawing characteristics can be realized.

  In addition, you may replace the structure of each above-mentioned embodiment, or may replace some components. The configuration of the present invention is not limited to the above-described embodiment, and various modifications may be made without departing from the scope of the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Optical device, 10 ... Light reflection member, 12 ... Recessed part, 13 ... Interposition member, 20 ... Shaft member, 21 ... Mounting part, 22 ... Elastic support part, 30 ... Support member, 31 ... Fixed part, 32 ... Frame part (Frame), 40 ... magnet, 41 ... coil, 119 ... image forming apparatus.

Claims (9)

A shaft portion having a plate-like attachment portion, and an elastic support portion that supports the attachment portion so as to be swingable around a predetermined axis;
A rigid portion which is provided in the mounting portion and is a ferromagnetic material;
A light reflecting portion provided on the mounting portion via the rigid portion, and having a larger area than the mounting portion;
A magnetic field generating part that generates a driving force between the rigid part and swings the attachment part,
The light reflecting portion has a recess;
The optical device, wherein the rigid portion is fitted into the concave portion.   The optical device according to claim 1, wherein the rigid portion is a permanent magnet.   The optical device according to claim 1, wherein the attachment portion has substantially the same shape as the rigid portion.   The optical device according to claim 1, wherein the shaft portion and the light reflecting portion are formed as different members. A support portion for supporting the shaft portion;
The optical device according to any one of claims 1 to 4, wherein the shaft portion and the support portion are integrally formed. A shaft portion having a plate-like attachment portion, and an elastic support portion that supports the attachment portion so as to be swingable around a predetermined axis;
A rigid portion that is provided on one surface of the mounting portion and is a permanent magnet;
An interposition part provided on the other surface of the mounting part;
A light reflecting portion provided in the attachment portion via the interposition portion, and having a larger area than the attachment portion;
A magnetic field generating part that generates a driving force between the rigid part and swings the attachment part,
An optical device, wherein a pair of magnetic poles of the permanent magnet is provided across the predetermined axis in plan view of the light reflecting member.   The optical device according to claim 6, wherein the attachment portion has substantially the same shape as the interposition portion.   An optical scanner comprising the optical device according to claim 1.   An image forming apparatus comprising the optical scanner according to claim 8.

Images