JP2014022296A5 - - Google Patents

Description

In view of the above problems, the present invention provides , for example, a sample stage on which a sample is set, an ion beam irradiation system that generates and focuses an ion beam on the sample surface, and an electron beam that is focused on the sample surface. An electron beam irradiation system for scanning, a detector for detecting secondary charged particles generated from the sample, a secondary charged particle image formed from the secondary charged particles detected by the detector, and a plurality of cross sections A charged particle beam apparatus comprising: a calculation unit that acquires three-dimensional reconstruction data from a secondary charged particle image, wherein a predetermined cross-sectional image is extracted from the three-dimensional reconstruction data, and the extracted cross-sectional image based on the comparison information with the processed cross section image of the working portion of the sample, it stops the processing, with the configuration of the.

Claims (13)

A sample stage for setting a sample; an ion beam irradiation system for generating and focusing an ion beam on the sample surface; an electron beam irradiation system for generating and focusing an electron beam on the sample surface; and A detector for detecting secondary charged particles generated from a sample, and forming a secondary charged particle image from secondary charged particles detected by the detector, and three-dimensional reconstruction data from a plurality of cross-sectional secondary charged particle images a charged particle beam apparatus provided with an arithmetic unit for obtaining the extracted predetermined cross-sectional images from a three-dimensional reconfiguration Chikude over data, processing of the working portion of the with the extracted cross-section image sample A charged particle beam apparatus characterized by stopping processing based on comparison information with a cross-sectional image.   The charged particle beam apparatus according to claim 1, wherein a cross-sectional image serving as a processing end point is extracted from three-dimensional reconstruction data that is three-dimensionally reconstructed using a secondary cross-sectional charged particle beam image, and processing of a processed portion of the sample A charged particle beam apparatus characterized in that when a cross-sectional image is compared and coincident, the processing end point is determined and processing stops. The charged particle beam apparatus according to claim 1, wherein a plurality of cross-sectional images are extracted from three-dimensional reconstruction data reconstructed three-dimensionally using a secondary cross-sectional charged particle beam image, and a processed cross-sectional image of a processed portion of the sample and to compare, the plurality of the cross section image processing section image and it is determined milling end point and when they do not match, the charged particle beam device processing wherein the stop. The charged particle beam apparatus according to claim 3, wherein when a matching section is not detected, recognizes the processed cross section and defective part, machining charged particle beam apparatus characterized by automatically stopped. 5. The charged particle beam apparatus according to claim 2 , wherein the sample is a minute sample piece extracted by a mechanical probe , and the minute sample piece is processed to produce a thin film sample. Charged particle beam device . The charged particle beam device according to claim 1, wherein a section A that is a processing end point is extracted from the three-dimensional reconstruction data, collated with a current processing section B, and a matching section C is extracted from the three-dimensional reconstruction data. A charged particle beam apparatus characterized by calculating a sample rotation angle and a sample inclination angle of a cross section C with respect to a cross section A and reflecting the calculated sample rotation angle and inclination angle on a current sample stage. 2. The charged particle beam apparatus according to claim 1, wherein a transmission electron detector for detecting electrons transmitted through the sample, a means for displaying a transmission electron image formed from the transmission electrons, and a minute sample piece are tilted. A three-dimensional reconstruction comprising a means capable of acquiring a continuous tilt transmission electron image and a three-dimensional reconstruction system capable of three-dimensional reconstruction using the continuous tilt transmission image, and three-dimensional reconstruction using the continuous tilt transmission image A charged particle beam apparatus characterized in that a cross-sectional image serving as a processing end point is extracted from data, collated with a current processing cross-sectional image, and when it matches, the processing end point is determined, and the processing is automatically stopped . 8. The charged particle beam apparatus according to claim 7, wherein a secondary charged particle beam image of a processed cross section by an ion beam is acquired, and the acquired secondary charged particle beam image is collated with an entire cross sectional image extracted from three-dimensional reconstruction data. A charged particle beam apparatus characterized by continuously repeating processing with an ion beam and observation with an electron beam when a matching cross section is detected. The charged particle beam apparatus according to claim 8, when a matching section is not detected, recognizes the processed cross section and defective part, machining charged particle beam apparatus characterized by automatically stopped. 10. The charged particle beam apparatus according to claim 7 , wherein the sample is a micro sample piece extracted by a mechanical probe , and the micro sample piece is processed to produce a thin film sample. Charged particle beam device . The charged particle beam apparatus according to claim 7, wherein a section A that is a processing end point is extracted from the three-dimensional reconstruction data, is compared with a current processing section B, and a matching section C is extracted from the three-dimensional reconstruction data. A charged particle beam apparatus characterized by calculating a sample rotation angle and a sample inclination angle of a cross section C with respect to a cross section A and reflecting the calculated sample rotation angle and inclination angle on a current sample stage. Oite the charged particle beam apparatus according to claim 5, wherein, by extracting the secondary charged particle image of both cross-section of the film sample from the three-dimensional reconstruction data, characterized by calculating a sample thickness of the thin film sample A charged particle beam device . The charged particle beam device Oite according to claim 10, by extracting the secondary charged particle image of both cross-section of the film sample from the three-dimensional reconstruction data, characterized by calculating a sample thickness of the thin film sample Charged particle beam device .