JP2013254897A - Adhesive coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress variation in discharge quantity of a liquid adhesive per one time in an adhesive coating device, while enhancing the coating operation speed and the discharge position accuracy, and to increase the number of dischargeable times, while reducing manufacturing cost.SOLUTION: An adhesive coating device 1 provided in a die bonder includes a discharge tank 3 for discharging liquid adhesive 2 to a section supplied with adhesive, and a refill syringe 4 for refilling the discharge tank 3 with the liquid adhesive 2. Between the discharge tank 3 and the refill syringe 4, a check valve 7 for allowing supply of the liquid adhesive 2 from the refill syringe 4 to the discharge tank 3, and regulating the return of the liquid adhesive 2 from the discharge tank 3 to the refill syringe 4 is provided. The discharge tank 3 is a small capacity tank having a capacity smaller than that of the refill syringe 4.

Description

  The present invention relates to an adhesive application device provided in, for example, a die bonder.

  In a process called die bonding in a manufacturing process of a semiconductor integrated circuit such as LSI, a chip (die) generated by cutting a wafer is bonded to a lead frame or the like with a liquid adhesive such as silver paste or resin. (See Patent Document 1).

  In this die bonding, the above-mentioned liquid adhesive is applied to a lead frame or the like to which a die is bonded in an apparatus called a die bonder (see Patent Document 2).

  FIG. 2 is a schematic view of a main part of a configuration example of a conventional adhesive application device provided in this type of die bonder. The adhesive application device 21 includes a syringe 23 that discharges the liquid adhesive 22 from the nozzle, and a dispense controller 24 that controls the discharge of the liquid adhesive 22 from the syringe 23. When the liquid adhesive 22 is discharged from the syringe 23, the electromagnetic valve built in the dispense controller 24 is opened, whereby air set to a predetermined pressure is supplied to the syringe 23 via the pipe 25. . Then, the pressure in the syringe 23 rises, and the liquid adhesive 22 is discharged from the nozzle of the syringe 23 accordingly.

JP-A-6-204268 Japanese Patent No. 3498050

  However, the adhesive coating apparatus 21 having this configuration has the following problems. When the discharge of the liquid adhesive 22 from the syringe 23 is repeated, the space volume occupied by the air in the syringe 23 increases as the amount of the liquid adhesive 22 in the syringe 23 decreases. For this reason, compared with when there is much quantity of the liquid adhesive 22 in the syringe 23, the pressure rise in the syringe 23 at the time of air supply becomes slow, and, thereby, per time of the liquid adhesive 22 from the syringe 23. The discharge amount decreases. Further, when the amount of the liquid adhesive 22 in the syringe 23 is large, the liquid adhesive in the syringe 23 is larger than the amount of discharge from the syringe 23 per time due to the weight of the liquid adhesive 22 itself. As the amount of 22 decreases, the weight of the liquid adhesive 22 also decreases, and this also reduces the discharge amount of the liquid adhesive 22 from the syringe 23 per time. Such a decrease in the discharge amount per one time of the liquid adhesive 22 from the syringe 23 is a major factor in the variation in the discharge amount per one time of the liquid adhesive 22.

  Conventionally, for the discharge operation, the syringe 23 is moved in correspondence with the position of an adhesive supply portion such as a land portion in the lead frame. However, since the syringe 23 is relatively large, an increase in the size of a moving operation mechanism for moving the syringe 23 and a decrease in the operation speed thereof are caused. Moreover, because of the large mechanism, the syringe 23 is likely to vibrate, which may cause a decrease in the accuracy of the discharge position. On the other hand, from the viewpoint of improving the operation speed and suppressing vibration in the moving operation mechanism, the capacity of the syringe 23 is limited, and the number of possible discharges is limited.

  Further, conventionally, a dispense controller 24 having a function of correcting an air supply time or the like has been used in order to suppress variations in the discharge amount per time of the liquid adhesive. The dispense controller 24 having such a correction function is expensive.

  In view of the above circumstances, the present invention suppresses variation in the discharge amount of a liquid adhesive per time in an adhesive application device, improves application operation speed and discharge position accuracy, increases the number of discharges possible, and manufacturing costs. The problem is to reduce the amount of waste.

  In order to solve the above problems, an adhesive application device of the present invention includes a discharge tank for discharging a liquid adhesive to an adhesive supply portion, and a replenishment for replenishing the discharge tank with the liquid adhesive. An adhesive application device comprising: a discharge tank, a discharge pressurizing means for applying pressure to discharge the liquid adhesive in the discharge tank to the adhesive supply portion; and the replenishment tank Replenishment pressurizing means for pressurizing the liquid adhesive to replenish the discharge tank, and between the discharge tank and the replenishment tank, from the replenishment tank to the discharge tank. The liquid adhesive is allowed to be supplied, and an allowance restricting means for restricting the return of the liquid adhesive from the discharge tank to the replenishment tank is provided, and the discharge tank is connected to the replenishment tank. Small capacity Characterized in that the tank.

  In this configuration, once the liquid adhesive is supplied to the discharge tank with a small capacity, the change in the weight of the liquid adhesive or the change in the air volume in the discharge tank due to the amount of fluctuation of the liquid adhesive in the discharge tank. Can be small. Therefore, in this adhesive application device, it is possible to suppress a decrease in the discharge amount of the liquid adhesive that occurs when the discharge of the liquid adhesive is repeated. It is possible to suppress variations in the discharge amount.

  Further, with this configuration, when the discharge tank is moved, the liquid adhesive can be discharged to the adhesive supply portion such as the land portion of the lead frame. At this time, since the discharge tank is a small tank, the moving operation mechanism for moving the discharge tank can be reduced in size and weight. Therefore, the moving operation can be speeded up, and thereby the speed of the entire coating operation can be improved. Further, the vibration in the moving operation can be suppressed by reducing the size and weight of the moving operation mechanism. For this reason, it is possible to suppress a decrease in accuracy of the discharge position due to vibration, and thereby it is possible to improve the discharge position accuracy. This improvement in ejection position accuracy is particularly effective for drawing ejection that requires fine operation.

  Further, in this configuration, it is not necessary to move the replenishing tank for the discharge operation, so that the capacity of the replenishing tank can be made larger than that of the conventional syringe. In this configuration, since the liquid adhesive in the replenishment tank is replenished to the discharge tank, the total amount of liquid adhesive replenished to the discharge tank is more than the total amount of liquid adhesive discharged from the conventional syringe. As a result, the discharge tank can repeat the discharge of the liquid adhesive more than the conventional syringe. Therefore, in this adhesive application device, the number of dischargeable times can be increased as compared with the conventional case.

  Further, with this configuration, an expensive dispense controller having a correction function can be eliminated from the discharge tank due to the effect of suppressing the variation in the discharge amount described above. In addition, since the replenishment of the liquid adhesive from the replenishment tank to the discharge tank is not the discharge to the adhesive supply portion, the variation in the replenishment amount per time of the liquid adhesive does not cause a problem. For this reason, an expensive dispense controller having a correction function can be dispensed with for the replenishment tank. Thus, since an expensive dispense controller can be dispensed with, it is possible to reduce the manufacturing cost in this adhesive application device as compared with the conventional case.

  Further, in this configuration, an allowance restricting means for restricting the return of the liquid adhesive from the discharge tank to the replenishing tank is provided. As a result, when the liquid adhesive in the discharge tank is pressurized to be discharged to the adhesive supply portion by the discharge pressurizing means, the allowance restricting means changes the discharge tank to the replenishment tank. It is possible to regulate the return of the liquid adhesive. Therefore, the liquid adhesive in the discharge tank is discharged stably and reliably to the adhesive supply portion.

  On the other hand, this permissible restricting means permits the supply of the liquid adhesive from the replenishment tank to the discharge tank. As a result, when the liquid adhesive in the replenishment tank is pressurized to replenish the discharge tank by the replenishment pressurizing means, the permissible restricting means prevents the liquid adhesive from the replenishment tank to the discharge tank. It is possible to allow supply. Therefore, replenishment of the liquid adhesive in the replenishment tank to the discharge tank is performed without any problem.

  This permissible restricting means can be constituted by a check valve, for example. However, the permissible restricting means is not limited to the check valve. For example, if the cost is not a problem, the allowable restricting means may be composed of an electromagnetic valve and a control means for controlling the electromagnetic valve.

  In any one of the above-described configurations, the discharge pressurizing unit includes an electromagnetic valve provided in the discharge tank, and an air supply unit that supplies the pressurization air into the discharge tank via the electromagnetic valve; You may have.

  With this configuration, the liquid adhesive in the discharge tank can be easily pressurized with air. In addition, since air is supplied into the discharge tank through a solenoid valve provided in the discharge tank, the air is more space in the pipe than when air is supplied into the discharge tank through the pipe. Therefore, the time from the start of air supply until the liquid adhesive in the discharge tank is pressurized can be shortened.

  In any one of the configurations described above, the replenishing pressurizing unit may pressurize only when replenishing the liquid adhesive from the replenishing tank to the discharge tank.

  With this configuration, the running cost can be reduced as compared with the case of always applying pressure.

  In any one of the configurations described above, the capacity of the discharge tank may be 2 to 5 cc.

  When the capacity of the discharge tank is 2 cc or more, the frequency of replenishment can be reduced, the time for die bonding can be shortened by reducing the replenishment time, and the working efficiency can be improved. On the other hand, when the capacity of the discharge tank is 5 cc or less, it is possible to suppress the variation in the discharge amount per time of the liquid adhesive to a negligible level.

  In any one of the configurations described above, the liquid adhesive may not be replenished from the replenishment tank to the discharge tank during the discharge of the liquid adhesive from the discharge tank.

  If it is this structure, it can suppress that the discharge amount of the liquid adhesive discharged from the discharge tank fluctuates.

  Moreover, if it is an adhesive coating device with any one of the above-mentioned configurations provided in the die bonder, the above-mentioned actions and effects can be enjoyed by the die bonder.

  According to the present invention, in the adhesive application device, the variation in the discharge amount of the liquid adhesive per one time is suppressed, the application operation speed and the discharge position accuracy are improved, the number of dischargeable times is increased, and the manufacturing cost is reduced. You can plan.

It is a principal part simplification figure of one structural example of the adhesive agent coating apparatus which concerns on embodiment of this invention. It is a principal part simplification figure of the example of 1 structure of the conventional adhesive agent coating apparatus.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings.

  FIG. 1 is a partial cross-sectional side view conceptually showing a configuration example of an adhesive application device according to an embodiment of the present invention. In this embodiment, the adhesive application device 1 is provided in a die bonder, and applies a liquid adhesive 2 such as a silver paste or a resin to an adhesive supply portion such as a land portion of a lead frame.

  The adhesive application device 1 is for replenishment as a discharge tank 3 for discharging the liquid adhesive 2 to the adhesive supply portion and a replenishment tank for replenishing the liquid adhesive 2 to the discharge tank 3. The syringe 4, the discharge pressurizing unit 5, the replenishment pressurizing unit 6, and the check valve 7 are provided as main components.

  The discharge tank 3 has a discharge nozzle 3a at its lower end. The discharge tank 3 can store the liquid adhesive 2 for discharge inside, and can discharge the liquid adhesive 2 to the adhesive supply portion via the discharge nozzle 3a.

  The discharge pressurizing means 5 applies pressure to discharge the liquid adhesive 2 in the discharge tank 3 to the adhesive supply portion. In the present embodiment, the discharge pressurizing means 5 includes an electromagnetic valve 8 attached to the discharge tank 3, and an air supply means 9 for supplying pressurization air into the discharge tank 3 via the electromagnetic valve 8. Have Further, in the present embodiment, in order to suppress the discharge of the liquid adhesive 2 through the discharge nozzle 3a and store the liquid adhesive 2 in the discharge tank 3, the inside of the discharge tank 3 is connected to the electromagnetic valve 8. There is provided a negative pressure generating means 10 for making a negative pressure through the.

  By switching the electromagnetic valve 8, the discharge tank 3 is switched between a state in which the discharge tank 3 is connected to the air supply means 9 and a state in which the discharge tank 3 is connected to the negative pressure generating means 10. Accordingly, the switching of the electromagnetic valve 8 switches between a state in which pressurizing air having a predetermined pressure is supplied into the discharge tank 3 and a state in which the discharge tank 3 is set to a negative pressure. Switching of the electromagnetic valve 8 is controlled by a control means (not shown).

  The refilling syringe 4 has a refilling nozzle 4a at its lower end. The refilling syringe 4 can store the liquid adhesive 2 for refilling the discharge tank 3 therein, and can refill the discharge tank 3 with the liquid adhesive 2 via the refill nozzle 4a. .

  The replenishment pressurizing means 6 pressurizes the liquid adhesive 2 in the replenishment syringe 4 to replenish the discharge tank 3. In the present embodiment, the replenishing pressurizing means 6 includes an air pipe 11 having one end connected to the upper end opening of the refilling syringe 4, and an electromagnetic valve 12 connected to the other end of the air pipe 11. The air supply means 13 supplies pressure air to the air pipe 11 through the electromagnetic valve 12.

  By switching the solenoid valve 12, the state where the refilling syringe 4 and the air pipe 11 are connected to the air supply means 13, and the inside of the refilling syringe 4 is connected to the air supply means 13 to the air supply means 13. It switches to the state that is not done. Accordingly, the switching of the electromagnetic valve 12 seals the state in which pressurizing air having a predetermined pressure is supplied into the supplementary syringe 4 via the air pipe 11 and the interior of the supplementary syringe 4 and the air pipe 11. The state is switched. Switching of the solenoid valve 12 is controlled by a control means (not shown).

  The check valve 7 is provided between the discharge tank 3 and the refill syringe 4 in the adhesive application device 1. In this embodiment, the check valve 7 is attached to the discharge tank 3, and the end of the refilling pipe 14 is connected to each of the check valve 7 and the refilling nozzle 4 a of the refilling syringe 4. Yes. The check valve 7 allows the supply of the liquid adhesive 2 from the replenishing syringe 4 to the discharge tank 3 and allows the liquid adhesive 2 to return from the discharge tank 3 to the refilling syringe 4. Functions as a means.

  The discharge tank 3 is a small volume tank having a smaller capacity than the refilling syringe 4. The capacity of the discharge tank 3 is, for example, 2 to 5 cc. When the capacity of the discharge tank 3 is less than 2 cc, replenishment is frequent, and the die bonding time becomes longer as the replenishment time increases, and the work efficiency may be lowered. On the other hand, when the capacity of the discharge tank 3 exceeds 5 cc, the variation in the discharge amount per time of the liquid adhesive 2 becomes so large that it cannot be ignored. The capacity of the refilling syringe 4 is, for example, 20 cc or more. If the capacity of the refilling syringe 4 is less than 20 cc, the replenishment of the liquid adhesive 2 to the discharge tank 3 may not be sufficiently repeated.

  Next, a characteristic operation of the adhesive application device 1 of the present embodiment having the above configuration will be described.

  The characteristic operation of the adhesive application device 1 of the present embodiment includes an operation of replenishing the discharge tank 3 with the liquid adhesive 2 in the replenishing syringe 4 and an adhesive coating such as a land portion on the lead frame. In this operation, the liquid adhesive 2 in the discharge tank 3 is discharged to the supply unit. In the present embodiment, in order to discharge the liquid adhesive 2 in the discharge tank 3 to the adhesive supply portion, only the discharge tank 3 is moved by a moving operation mechanism (not shown) to replenish. The syringe 4 is configured not to move.

  The replenishment operation of the liquid adhesive 2 to the discharge tank 3 will be described in detail below.

  First, a predetermined amount of the liquid adhesive 2 is stored in the refilling syringe 4 before the start of the refilling operation (at a time other than the refilling operation). At this time, since the air pipe 11 and the refill syringe 4 are sealed by the electromagnetic valve 12, the liquid adhesive 2 does not move from the refill syringe 4. On the other hand, the discharge tank 3 is in a state where a small amount of the liquid adhesive 2 remains or is empty, and the discharge tank 3 is in a negative pressure state via the electromagnetic valve 8.

  The replenishment operation is started when air of a predetermined pressure is supplied into the refill syringe 4 through the air pipe 11 by switching the electromagnetic valve 12. By supplying this air, the liquid adhesive 2 in the refilling syringe 4 is pressurized. Then, since the check valve 7 allows the supply of the liquid adhesive 2 from the refilling syringe 4 to the discharge tank 3, the liquid adhesive 2 in the refilling syringe 4 is connected to the refilling pipe 14 and the check valve. 7 is supplied to the discharge tank 3 via the discharge tank 7. At this time, since the discharge tank 3 has a negative pressure via the electromagnetic valve 8, the liquid adhesive 2 is stored in the discharge tank 3 without leaking from the discharge nozzle 3a.

  After elapse of a predetermined time, the inside of the refilling syringe 4 and the air pipe 11 are sealed by switching the electromagnetic valve 12. Then, the supply of the liquid adhesive 2 from the refilling syringe 4 to the discharge tank 3 is stopped. Thus, a predetermined amount of the liquid adhesive 2 is stored in the discharge tank 3, and the replenishment operation is completed.

  The discharge operation of the liquid adhesive 2 to the adhesive supply portion such as the land portion of the lead frame will be described in detail below.

  Before the discharge operation (when other than the discharge operation), the liquid adhesive 2 is stored in the discharge tank 3. At this time, since the inside of the discharge tank 3 is set to a negative pressure by the electromagnetic valve 8, the liquid adhesive 2 does not move from the inside of the discharge tank 3.

  In the discharge operation, the electromagnetic valve 8 is switched to a state where air of a predetermined pressure is supplied into the discharge tank 3 with the discharge nozzle 3a of the discharge tank 3 positioned above the adhesive supply portion. Started by. The liquid adhesive 2 in the discharge tank 3 is pressurized by the supplied air and discharged from the discharge nozzle 3a. Accordingly, the liquid adhesive 2 is supplied and applied to the adhesive supply portion. At this time, the return of the liquid adhesive 2 from the discharge tank 3 to the refilling syringe 4 is regulated by the check valve 7.

  After a predetermined time has elapsed, the solenoid valve 8 is switched to a state where the inside of the discharge tank 3 is at a negative pressure. Then, the discharge of the liquid adhesive 2 from the discharge nozzle 3a is stopped. This completes the ejection operation.

  The replenishment operation of the liquid adhesive 2 to the discharge tank 3 is performed, for example, when the lead frame is sent or when the lead frame is awaiting recognition after the discharge operation is performed a plurality of times. In addition, a detecting means for detecting the amount of the liquid adhesive 2 in the discharge tank 3 is provided, and the replenishment operation is automatically performed by detecting that the amount of the liquid adhesive 2 in the discharge tank 3 is less than a predetermined amount. You may comprise so that it may implement. In this case, the replenishment operation may be automatically terminated by detecting that the amount of the liquid adhesive 2 in the discharge tank 3 is equal to or greater than a predetermined amount by the detection means.

  As can be seen from the above description, in the present embodiment, the replenishing pressurizing means 6 is configured so that the liquid adhesive 2 in the refilling syringe 4 is supplied only when the liquid adhesive 2 is refilled from the refilling syringe 4 to the discharge tank 3. Pressurize. Further, during the discharge of the liquid adhesive 2 from the discharge tank 3, the liquid adhesive 2 is not replenished from the refill syringe 4 to the discharge tank 3.

  The adhesive coating apparatus 1 according to the present embodiment can enjoy the following effects.

  By once supplying the liquid adhesive 2 to the discharge tank 3 having a small capacity, the weight change of the liquid adhesive 2 due to the variation amount of the liquid adhesive 2 in the discharge tank 3 and the air volume in the discharge tank 3 can be reduced. Change can be reduced. Therefore, in this adhesive application device 1, it is possible to suppress a decrease in the discharge amount of the liquid adhesive 2 that occurs when the discharge of the liquid adhesive 2 is repeated. It is possible to suppress variations in the discharge amount per time.

  Further, the discharge tank 3 is moved by a moving operation mechanism so that the liquid adhesive is discharged to an adhesive supply portion such as a land portion of the lead frame. The discharge tank 3 is a small tank. Therefore, the moving operation mechanism for moving the discharge tank 3 can be reduced in size and weight. Therefore, the moving operation can be speeded up, and thereby the speed of the entire coating operation can be improved. Further, the vibration in the moving operation can be suppressed by reducing the size and weight of the moving operation mechanism. For this reason, it is possible to suppress a decrease in accuracy of the discharge position due to vibration, and thereby it is possible to improve the discharge position accuracy. This improvement in ejection position accuracy is particularly effective for drawing ejection that requires fine operation.

  In addition, since the refilling syringe 4 is not moved for the discharge operation, the capacity of the refilling syringe 4 can be made larger than that of the conventional syringe. In this configuration, since the liquid adhesive 2 in the refilling syringe 4 is replenished to the discharge tank 3, the entire amount of the liquid adhesive 2 replenished to the discharge tank 3 is discharged from the conventional syringe. More than the total amount of the adhesive 2, the discharge tank 3 can repeat the discharge of the liquid adhesive 2 more than the conventional syringe. Therefore, in this adhesive application device 1, the number of dischargeable times can be increased as compared with the conventional case.

  Moreover, the expensive dispense controller which has a correction | amendment function with respect to the tank 3 for discharge can be made unnecessary by the effect which suppresses the variation in the discharge amount mentioned above. Further, since the replenishment of the liquid adhesive 2 from the refilling syringe 4 to the discharge tank 3 is not a discharge to the adhesive supply portion, the variation in the replenishment amount per time of the liquid adhesive 2 does not become a problem. . For this reason, the expensive dispense controller which has a correction | amendment function also with respect to the refilling syringe 4 can be made unnecessary. Thus, since an expensive dispense controller can be dispensed with, it is possible to reduce the manufacturing cost of the adhesive application device 1 as compared with the prior art.

  Further, in the present embodiment, a check valve 7 is provided for restricting the return of the liquid adhesive 2 from the discharge tank 3 to the refilling syringe 4. Thus, when the liquid adhesive 2 in the discharge tank 3 is pressurized to be discharged to the adhesive supply portion by the discharge pressurizing means 5, the check valve 7 is used for replenishment from the discharge tank 3. It is possible to regulate the return of the liquid adhesive 2 to the syringe 4. Accordingly, the discharge of the liquid adhesive 2 in the discharge tank 3 to the adhesive supply portion is stably and reliably performed.

  On the other hand, the check valve 7 allows the supply of the liquid adhesive 2 from the refilling syringe 4 to the discharge tank 3. As a result, when the liquid adhesive 2 in the refilling syringe 4 is pressurized to refill the discharge tank 3 by the refill pressurizing means 6, the check valve 7 is moved from the refill syringe 4 to the discharge tank. It is possible to allow the supply of the liquid adhesive 2 to 3. Therefore, replenishment of the liquid adhesive 2 in the refilling syringe 4 to the discharge tank 3 is performed without any problem.

  In the above embodiment, the refilling syringe 4 is sealed at a time other than the refilling operation. However, at a time other than the refilling operation, the refilling syringe 4 may be connected to the negative pressure generating means so as to have a negative pressure. In this way, it is possible to reliably prevent the liquid adhesive 2 from being supplied from the refilling syringe 4 to the discharge tank 3 at times other than the refilling operation.

  In the above embodiment, the present invention is applied to an adhesive application device provided in a die bonder, but is not limited to this, and an adhesive that discharges and applies a liquid adhesive to an adhesive supply portion If it is a coating device, it can be widely applied to other adhesive coating devices.

DESCRIPTION OF SYMBOLS 1 Adhesive application apparatus 2 Liquid adhesive 3 Discharge tank 4 Replenishment syringe 5 Discharge pressurization means 6 Replenishment pressurization means 7 Check valve 8 Electromagnetic valve 9 Air supply means 10 Negative pressure generation means 11 Air piping 12 Solenoid valve 13 Air supply means 14 Supplementary piping

Claims (7)

An adhesive applicator comprising a discharge tank for discharging a liquid adhesive to an adhesive supply portion, and a replenishment tank for replenishing the liquid adhesive to the discharge tank,
Discharge pressurizing means for applying pressure to discharge the liquid adhesive in the discharge tank to the adhesive supply portion, and replenishing the discharge tank with the liquid adhesive in the replenishment tank And a pressurizing means for replenishing to pressurize,
The liquid adhesive is allowed to be supplied from the replenishment tank to the discharge tank between the discharge tank and the replenishment tank, and from the discharge tank to the replenishment tank. There is an allowable restriction means to restrict the return of
The adhesive coating apparatus according to claim 1, wherein the discharge tank is a small tank having a smaller capacity than the replenishing tank.   The adhesive application device according to claim 1, wherein the permissible regulating means is a check valve.   3. The discharge pressurizing means includes: a solenoid valve provided in the discharge tank; and an air supply means for supplying pressurization air into the discharge tank via the solenoid valve. The adhesive application device described.   The adhesive application device according to any one of claims 1 to 3, wherein the replenishment pressurizing unit applies pressure only when replenishing the liquid adhesive from the replenishment tank to the discharge tank.   The adhesive applicator according to any one of claims 1 to 4, wherein the discharge tank has a capacity of 2 to 5 cc.   The adhesion according to any one of claims 1 to 5, wherein the liquid adhesive is not replenished from the replenishment tank to the discharge tank during the discharge of the liquid adhesive from the discharge tank. Agent applicator.   The said adhesive agent coating apparatus of any one of Claims 1-6 with which the die bonder was equipped.

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