JP2013242003A - Fluid control integrated unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fluid control integrated unit in which space saving of a fluid switching structure can be achieved.SOLUTION: At both ends of fluid control units 2A to 2E, a first input/output unit 3 and a second input/output unit 4 are arranged in surface contact with each other, a first port 7 and a second port 8 are installed in a first input/output block 30 of the first input/output unit 3, a first two-way valve 11 for switching a continuity condition between the first port 7 and a first common flow path 5 and a second two-way valve 12 for switching a continuity condition between the second port 8 and a second common flow path 6 are mounted on the first input/output block 30 of the first input/output unit 3, and meantime, a third port 9 and a fourth port 10 are installed in the second input/output block 40 of the second input/output unit 4, and a third two-way valve 13 for switching a continuity condition between a third port 9 and the first common flow path 5 and a fourth two-way valve 14 for switching a continuity condition between the fourth port 10 and the second common flow path 6 are mounted in the second input/output block 40 of the second input/output unit 4.

Description

  The present invention relates to a fluid control integrated unit that controls supply of a first fluid and a second fluid to a workpiece.

  Conventionally, this type of liquid integrated unit is used in a semiconductor manufacturing facility, a sputtering apparatus used in manufacturing a liquid crystal screen or a plasma display, and the like. For example, the sputtering apparatus includes a plurality of chambers in which substrates are set, and heaters are installed in the respective chambers. Each heater (corresponding to “work” described below) is provided with a system through which cooling water and air flow. A fluid control unit is connected to each system. The fluid control integrated unit is configured by integrating these fluid control units. The sputtering apparatus is operated so as to adjust the temperature of the substrate set in each chamber to 200 ° C. or more by a heater, and then stopped to lower the temperature of the substrate to room temperature when the substrate is taken out from the chamber. The fluid control integrated unit controls the amount of cooling water supplied to each heater system in order to shorten the cooling time for cooling the heater to room temperature after the sputtering apparatus is stopped. In addition, the fluid control integrated unit controls the flow rate of air supplied to each system in order to efficiently remove the coolant remaining in the heater system and efficiently heat the heater before the sputtering apparatus is operated. .

FIG. 16 is an example of a piping circuit to which a conventional fluid control integrated unit 1101 is applied.
The fluid control integrated unit 1101 is obtained by integrating the number of fluid control units 1102 corresponding to the system L of the workpieces W. Since the piping circuit shown in FIG. 16 includes five systems L connected to the workpiece W, the fluid control integrated unit 1101 includes five fluid control units 1102 integrated. In the drawing, in order to distinguish each workpiece W, system L, and fluid control unit 1102, the reference numerals A, B, C, D, and E are added to the respective symbols in order from the left side in the drawing.

  The fluid control integrated unit 1101 is provided with a first common flow channel 1105 and a second common flow channel 1106 independently along the integration direction of the fluid control unit 1102. The fluid control units 1102A to 1102E are provided with first branch channels 1124A to 1124E branched from the first common channel 1105 and second branch channels 1128A to 1128E branched from the second common channel 1106. . The first branch flow paths 1124A to 1124E include first control valves 1131A to 1131E for switching the communication state between the first branch flow paths 1124A to 1124E and the first common flow path 1105, and the first branch flow paths. Flow rate sensors 1151A to 1151E for measuring the flow rate of the fluid flowing into 1124A to 1124E are arranged. On the other hand, second control valves 1141A to 1141E for switching the communication state between the second branch flow paths 1128A to 1128E and the second common flow path 1106 are arranged in the second branch flow paths 1128A to 1128E.

A first input / output pipe 1115 that inputs and outputs water and air is connected to the first common flow path 1105. The first input / output pipe 1115 includes a first port 1107 and a third port 1109, and first and third two-way valves 1111 and 1113 are provided for the first and third ports 1107 and 1109, respectively.
The second common flow path 1106 is connected to a second input / output pipe 1116 that inputs and outputs water and air. The second input / output pipe 1116 includes a second port 1108 and a fourth port 1110, and second and fourth two-way valves 1112 and 1114 are provided for the second and fourth ports 1108 and 1110, respectively.

  In this piping circuit, for example, the first port 1107 is connected to the water discharge piping, the second port 1108 is connected to the water supply piping, the third port 1109 is connected to the air supply piping, and the fourth port 1110 is drained. Connected to piping.

  When the workpieces W1 to W5 are cooled, the first and second two-way valves 1111 and 1112, the first and second control valves 1131A to 1131E, and 1141A to 1141E are in the valve open state, and the third and fourth second valves. When the direction valves 1113 and 1114 are closed, water flows from the second port 1108 to the second input / output pipe 1116, the second common channel 1106, the second branch channels 1128A to 1128E, and the workpieces W1 to W5. , Flows to the first branch flow paths 1124A to 1124E, the first common flow path 1105, the first input / output pipe 1115, and is output from the first port 1107. At this time, the flow rate sensors 1151A to 1151E transmit the measured flow rate of water to an external device (not shown), whereby the flow rate of water flowing through the workpieces W1 to W5 is managed by the external device.

  On the other hand, when purging the workpieces W1 to W5, the third and fourth two-way valves 1113 and 1114, the first and second control valves 1131A to 1131E, and 1141A to 1141E are opened, and the first and second second valves When the direction valves 1111 and 1112 are closed, air flows from the third port 1109 to the first input / output pipe 1115, the first common flow path 1105, the first branch flow paths 1124A to 1124E, and the workpieces W1 to W5. , Flows to the second branch flow paths 1128A to 1128E, the second common flow path 1106, the second input / output pipe 1116, and is output from the fourth port 1110.

FIG. 17 is a plan view embodying the fluid switching structure 1120 including the fluid control integrated unit 1101 and the first and second input / output pipes 1115 and 1116 shown in FIG.
A conventional fluid control integrated unit 1101 has a joint block 1103 and a closing block 1104 arranged at both ends of the fluid control units 1102A to 1102E, and is integrated in a state where they are in surface contact with each other. The joint block 1103 is a block for connecting the first and second input / output pipes 1115 and 1116 to the first and second common flow paths 1105 and 1106. On the other hand, the closing block 1104 is a block for closing the openings of the first and second common flow paths 1105 and 1106.

  In the first input / output pipe 1115, the L-shaped pipe 1115 </ b> A is connected to the joint block 1103, and the direction of the flow path is changed with respect to the formation direction (unit integration direction) of the first common flow path 1105 (see FIG. 16). . In the first input / output pipe 1115, the cheese pipe 1115B is connected to the L-shaped pipe 1115A, and the first port 1107 and the third port 1109 are provided in different directions. In the first input / output pipe 1115, the first and third two-way valves 1111, 1113 are mounted on the first and third ports 1107, 1109.

  On the other hand, in the second input / output pipe 1116, the straight pipe 1116A is connected to the joint block 1103, and the flow path is formed in the same direction as the formation direction (unit integration direction) of the second common flow path 1106 (see FIG. 16). Yes. In the second input / output pipe 1116, the cheese pipe 1116B is connected to the straight pipe 1116A, and the second port 1108 and the fourth port 1110 are provided in different directions. In the second input / output pipe 1116, second and fourth two-way valves 1112 and 1114 are mounted on the second and fourth ports 1108 and 1110 (see, for example, Non-Patent Document 1).

“CKD Water Integrated Unit WXU Series Catalog CC-1026”, CKD Corporation, 2010

  However, in the conventional fluid switching structure 1120, the first and second input / output pipes 1115 and 1116 are connected to the fluid control integrated unit 1101 in order to switch between water and air. The first and second input / output pipes 1115 and 1116 use an L-shaped pipe 1115A, a straight pipe 1116A, and cheese pipes 1115B and 1116B in order to secure an operation space for the first to fourth two-way valves 1111 to 1114. The arrangement and orientation of the first to fourth ports 1107 to 1110 are changed. Therefore, the piping space of the 1st and 2nd input / output piping 1115,1116 is large, and the fluid switching structure 1120 has become large. In recent years, for example, semiconductor manufacturing apparatuses and sputtering apparatuses require many fluid control devices. In order to reduce the size of a device equipped with a large number of fluid control devices, it is strongly desired from the field to save space for the fluid switching structure.

  The present invention has been made to solve the above problems, and an object of the present invention is to provide a fluid control integrated unit capable of saving the space of the fluid switching structure.

The present invention has the following configuration.
(1) By integrating a plurality of fluid control units, a first common channel and a second common channel are provided independently along the direction in which the fluid control units are integrated, and the plurality of fluid control units are: A valve block including a first branch channel that branches from the first common channel and a second branch channel that branches from the second common channel, the first branch channel and the second branch channel; In a fluid control integrated unit that is connected to a path through a work and supplies a first fluid or a second fluid to the work, a first input / output unit and a second input are disposed at both ends of the plurality of fluid control units. An output unit is provided, and the first input / output unit is in surface contact with an adjacent valve block, and is electrically connected to the first common channel and the second common channel. Second port opened A first input / output block, a first two-way valve mounted on the first input / output block, for switching a conduction state between the first port and the first common flow path, and mounted on the first input / output block. A second two-way valve that switches a conduction state between the second port and the second common flow path, and the second input / output unit is in surface contact with an adjacent valve block, A third port connected to the first common flow path; a second input / output block provided with a fourth port connected to the second common flow path; and the second input / output block; A third two-way valve that switches a conduction state between the port and the first common flow path, and a fourth switch that is mounted on the second input / output block and switches the conduction state between the fourth port and the second common flow path. And a two-way valve.

(2) In the fluid control integrated unit described in (1), the first input / output block includes a first through channel that forms a part of the first common channel and a second common channel. A second through channel that forms a portion is formed in parallel along the unit integration direction, the first port is provided coaxially at one end opening of the first through channel, and the second through channel The second port is coaxially provided at one end opening of the second input / output block, and the second input / output block includes a third through channel that forms a part of the first common channel, and the second common channel. A fourth through flow path that forms a part of the path is formed in parallel along the unit integration direction, the third port is provided coaxially at one end opening of the third through flow path, and the fourth The fourth port is provided coaxially at one end opening of the through channel.

(3) By integrating a plurality of fluid control units, a first common channel and a second common channel are provided independently along the direction in which the fluid control units are integrated, and the plurality of fluid control units are: A valve block including a first branch channel that branches from the first common channel and a second branch channel that branches from the second common channel, the first branch channel and the second branch channel; In a fluid control integrated unit in which a path is connected via the work and supplies the first fluid or the second fluid to the work, a closing block disposed at one end of the plurality of fluid control units; An input / output unit disposed at the other end of the fluid control unit, wherein the input / output unit is connected to the first common flow path, and the fourth port is connected to the second common flow path. Unit integration A second port that is opened to open in a direction and opens to a direction different from that of the third port and that is connected to the first common flow path, and that is connected to the second common flow path. An input / output block established to open in a different direction from the fourth port; and a first input / output block mounted on the input / output block for switching the first port and the third port to communicate with the first common flow path. 1 three-way valve, and a second three-way valve mounted on the input / output block, for switching the second port and the fourth port to communicate with the second common flow path, The closing block is in surface contact with the adjacent valve block.

(4) In the fluid control integrated unit described in (3), the input / output block includes a first through channel that forms a part of the first common channel and a part of the second common channel. The second through flow path to be formed is formed in parallel along the unit integration direction, the first port connection flow path is formed by branching from the first through flow path, and the second through flow path is branched from the second through flow path. A port connection flow path is formed, the first port is provided in an opening of the first port connection flow path, the second port is provided in an opening of the second port connection flow path, and the first port 3 ports are provided in the opening part of the said 1st penetration flow path, and the said 4th port is provided in the opening part of the said 2nd penetration flow path, It is characterized by the above-mentioned.

(5) In the fluid control integrated unit according to any one of (1) to (4), the valve block includes a first straight channel that forms a part of the first common channel, and the first A second straight flow path that constitutes a part of the two common flow paths is formed independently along the unit integration direction, and a communication state between the first straight flow path and the first branch flow path is controlled. 1 control valve, and a second control valve for controlling a communication state between the second straight flow path and the second branch flow path is arranged inside the axes of the first and second straight flow paths. In addition, a flow rate sensor that is attached to the side surface and measures the flow rate of the fluid is attached to the valve block in a state where a part of the flow rate sensor is superimposed on the side surface.

(6) In the fluid control integrated unit described in (5), the flow sensor includes a flow measurement block that measures the flow rate of the fluid flowing in a predetermined direction, and a control board that controls the operation of the flow sensor. The wiring connected to the control board has a board block taken out to the outside, and the flow rate measurement block is smaller than the board block and is arranged at the center of the board block.

  In the fluid control integrated unit having the above configuration, the first common flow path and the second common flow path are provided independently along the stacking direction of the fluid control unit by stacking a plurality of fluid control units. Each of the plurality of fluid control units includes a valve block including a first branch channel branched from the first common channel and a second branch channel branched from the second common channel. In the plurality of fluid control units, the first branch flow path and the second branch flow path are connected via a workpiece, and supply the first fluid or the second fluid to the workpiece.

  A first input / output unit and a second input / output unit are disposed at both ends of the plurality of integrated fluid control units.

  The first input / output unit includes a first input / output block, a first two-way valve, and a second two-way valve. The first input / output block makes surface contact with the adjacent valve block. The first input / output block has a first port that conducts to the first common flow path and a second port that conducts to the second common flow path. The first two-way valve is mounted on the first input / output block and switches a conduction state between the first port and the first common flow path. The second two-way valve is mounted on the first input / output block and switches a conduction state between the second port and the second common flow path. That is, the first input / output unit is provided with the first and second ports and the first and second two-way valves together.

  On the other hand, the second input / output unit includes a second input / output block, a third two-way valve, and a fourth two-way valve. The second input / output block makes surface contact with the adjacent valve block. The second input / output block is provided with a third port that conducts to the first common flow path and a fourth port that conducts to the second common flow path. The third two-way valve is mounted on the second input / output block and switches the conduction state between the third port and the first common flow path. The fourth two-way valve is mounted on the second input / output block, and switches the conduction state between the fourth port and the second common flow path. That is, the second input / output unit is provided with the third and fourth ports and the third and fourth two-way valves together.

  Thus, in the fluid control integrated unit, the first input / output unit is provided with the first and second ports and the first and second two-way valves together, and the second input / output unit is provided with the third and fourth ports. Since the 3 and fourth two-way valves are provided together, the installation space is small even if the first to fourth two-way valves are incorporated. In addition, since input / output piping including cheese piping is not externally attached, piping space can be saved. Therefore, according to this fluid control integrated unit, the fluid switching structure can be saved in space.

The first input / output block of the fluid control integrated unit includes a first through channel that forms part of the first common channel and a second through channel that forms part of the second common channel. They are formed in parallel along the stacking direction. In the first input / output block, a first port is provided coaxially at one end opening of the first through passage, and a second port is provided coaxially at one end opening of the second through passage. .
On the other hand, the second input / output block includes a third through channel that forms part of the first common channel and a fourth through channel that forms part of the second common channel along the unit integration direction. Are formed in parallel. In the second input / output block, a third port is provided coaxially at one end opening of the third through passage, and a fourth port is provided coaxially at one end opening of the fourth through passage. .
According to such a fluid control integrated unit, the distance between the first through fourth through passages formed in the first and second input / output blocks is short. Therefore, when purging is performed, even if fluid is accumulated between the adjacent fluid control unit and the two-way valve, the volume of the liquid reservoir is small and the replacement efficiency of the first and second fluids is good.

  The fluid control integrated unit described above has a closing block disposed at one end of the plurality of fluid control units, and an input / output unit disposed at the other end of the plurality of fluid control units.

  The input / output unit includes an input / output block, a first three-way valve, and a second three-way valve. The input / output block is established so that a third port that conducts to the first common channel and a fourth port that conducts to the second common channel open in the unit integration direction, and the first port that conducts to the first common channel. One port is opened to open in a direction different from the third port, and the second port connected to the second common flow path is opened to open in a direction different from the fourth port. The first three-way valve is mounted on the input / output block and switches between the first port and the third port to communicate with the first common flow path. The second three-way valve is mounted on the input / output block, and switches the second port and the fourth port to communicate with the second common flow path. That is, the input / output unit is provided with the first to fourth ports and the first and second three-way valves together.

  In the input / output unit, when the input / output block is in surface contact with the adjacent valve block, the first and third ports are connected to the first common flow path, and the second and fourth ports are connected to the second common flow path. Conduct. On the other hand, the closing block makes surface contact with the adjacent valve block and closes the openings of the first and second common flow paths.

  Thus, since the fluid control integrated unit is provided with the first to fourth ports and the first and second three-way valves in the input / output unit, the installation space even if the first and second three-way valves are incorporated. Is small. And since input-output piping provided with cheese piping etc. is not attached externally, piping space can be saved. Therefore, according to this fluid control integrated unit, the fluid switching structure can be saved in space.

The input / output block of the fluid control integrated unit includes a first through channel that forms part of the first common channel and a second through channel that forms part of the second common channel in the unit integration direction. It is formed in parallel along. This input / output block is branched from the first through flow path to form a first port connection flow path, and is branched from the second through flow path to form a second port connection flow path. The first port is provided at the opening of the first port connection channel. The second port is provided at the opening of the second port connection channel. The third port is provided at the opening of the first through channel. The fourth port is provided at the opening of the second through channel.
In such a fluid control integrated unit, since the first and second fluids flow through the input / output block and input / output, liquid cannot accumulate in the input / output block after purging, and the replacement efficiency of the first and second fluids Is good.

  The valve block of the fluid control integrated unit has a first straight flow path that forms part of the first common flow path and a second straight flow path that forms part of the second common flow path in the unit integration direction. Are formed independently along. On the side of the valve block, the first control valve for controlling the communication state between the first straight flow path and the first branch flow path, and the communication state between the second straight flow path and the second branch flow path are controlled. The second control valve is attached so as to be arranged on the inner side of the axes of the first and second straight flow paths. As a result, the valve block has a wider space on both sides of the first and second control valves than when the first and second control valves are mounted directly above the axes of the first and second straight flow paths. . Therefore, the flow rate sensor for measuring the flow rate of the fluid is attached to the valve block in a state where a part of the flow rate sensor overlaps the side surface of the valve block to which the first and second control valves are attached. According to such a fluid control integrated unit, the installation space of the flow sensor overlaps with the installation space of the valve block, and the installation space of the entire fluid control integrated unit can be reduced.

  Further, the flow sensor of the fluid control integrated unit includes a flow measurement block for measuring the flow rate of the fluid flowing in a predetermined direction and a control board for controlling the operation of the flow sensor, and wiring connected to the control board is taken out to the outside. Substrate block. The flow rate measurement block is smaller than the substrate block and is arranged at the center of the substrate block. In such a fluid control integrated unit, if the flow rate measurement block is inverted 180 ° with respect to the substrate block and attached integrally to the substrate block, the fluid measured by the flow rate sensor is maintained while maintaining the direction of the wiring taken out from the substrate block. Can change the flow direction.

It is a top view of the fluid control integrated unit which concerns on 1st Embodiment of this invention. It is AA sectional drawing of FIG. It is BB sectional drawing of FIG. It is the figure which made the manual valve of sectional drawing shown in FIG. 3 the closed state. It is an example of the piping circuit to which the fluid control integrated unit shown in FIG. 1 is applied. It is a figure which shows a flow path variation. It is a top view of the fluid control integrated unit which concerns on 2nd Embodiment of this invention. It is CC sectional drawing of FIG. It is an example of the piping circuit to which the fluid control integrated unit shown in FIG. 7 is applied. It is a figure which shows a flow path variation. It is a top view of the fluid control integrated unit which concerns on 3rd Embodiment of this invention. It is DD sectional drawing of FIG. It is EE sectional drawing of FIG. It is an example of the piping circuit to which the fluid control integrated unit shown in FIG. 11 is applied. It is sectional drawing of the fluid control unit used for the fluid control integrated unit which concerns on 4th Embodiment of this invention. It is an example of the piping circuit to which the conventional fluid control integrated unit is applied. It is the top view which actualized the fluid switching structure provided with the fluid control integrated unit shown in FIG. 16, and the 1st and 2nd input / output piping.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

(First embodiment)
(Overall configuration of fluid control integrated unit 1)
FIG. 1 is a plan view of a fluid control integrated unit 1 according to the first embodiment of the present invention.
The fluid control integrated unit 1 arranges and integrates the first and second input / output units 3 and 4 at both ends of the plurality of fluid control units 2 and controls the first fluid and the second fluid supplied to the external work. Is. The fluid control unit 2 is provided in the number corresponding to the system connected to the workpiece. In the present embodiment, five fluid control units 2 are provided. For convenience of explanation, FIG. 1 shows the fluid control units 2A, 2B, 2C, 2D, and 2E in order from the left side in the figure. In addition, when it is not necessary to distinguish in particular for description, the added alphabets A to E are omitted and referred to as the fluid control unit 2.

  The fluid control integrated unit 1 includes a plurality of fluid control units 2A to 2E and first and second input / output units 3 and 4 that are in surface contact with each other and penetrated through the second input / output unit 4 and the fluid control units 2A to 2E. By fastening the fixing bolts V into the female screw holes N formed in the first input / output unit 3, the fluid control units 2A to 2E and the first and second input / output units 3 and 4 are integrally connected.

  In the fluid control integrated unit 1, the first common flow path 5 and the second common flow path 6 are formed straight and independently along the unit integration direction (the left-right direction in the drawing of FIG. 1). A first port 7, a second port 8, a third port 9, and a fourth port 10 are opened at both end faces of the fluid control integrated unit 1. The first port 7 and the third port 9 are coaxially provided at both end openings of the first common flow path 5. The second port 8 and the fourth port 10 are coaxially provided at both end openings of the second common flow path 6. Therefore, the fluid control integrated unit 1 is arranged along the flow direction of the fluid flowing through the first and second common flow paths 5 and 6 regardless of which of the first to fourth ports 7 to 10 is the input port and the output port. It is possible to input and output fluid, and the flow path structure has good fluid removal efficiency.

  The fluid control integrated unit 1 is provided with first to fourth two-way valves 11, 12, 13, 14 for each of the first to fourth ports 7, 8, 9, 10, and the first to fourth ports 7 to 10 are provided. The fluid that is input and output to the can be individually controlled.

  In the fluid control integrated unit 1, five first branch channels 24A, 24B, 24C, 24D, and 24E are branched from the first common channel 5. In the fluid control integrated unit 1, the communication state between the first common flow path 5 and the first branch flow paths 24A to 24E can be individually switched by the first control valves 31A, 31B, 31C, 31D, and 31E. Yes.

  In the fluid control integrated unit 1, five second branch channels 28 </ b> A, 28 </ b> B, 28 </ b> C, 28 </ b> D, 28 </ b> E are branched from the second common channel 6. In the fluid control integrated unit 1, the communication state between the second common flow path 6 and the second branch flow paths 28A to 28E can be individually switched by the second control valves 41A, 41B, 41C, 41D, and 41E. Yes.

  The flow sensors 51A, 51B, 51C, 51D, and 51E are attached to the fluid control integrated unit 1 so as to be connected to the first branch flow paths 24A to 24E, respectively. The flow sensors 51A to 51E are arranged so as to measure the flow rate of the fluid flowing into the first branch flow paths 24A to 24E. In the flow sensors 51A to 51E, wirings 56A, 56B, 56C, 56D, and 56E are electrically connected to an external device (not shown), respectively, and transmit a fluid measurement value.

(Configuration of input / output unit)
FIG. 2 is a cross-sectional view taken along the line AA of FIG.
In the first input / output unit 3, manual first and second two-way valves 11 and 12 are attached to a first input / output block 30. As shown in FIG. 1, the first input / output block 30 includes a first through channel 30 a that constitutes a part of the first common channel 5 and a second that constitutes a part of the second common channel 6. The through channel 30b is formed so as to penetrate straight. First and second valve body storage chambers 30c and 30d are formed in a columnar shape on the upper end surface of the first input / output block 30 in the drawing. The first and second valve body storage chambers 30c and 30d have inner diameters set larger than the flow path inner diameters of the first and second through passages 30a and 30b, and the first and second through passages 30a and 30b. It is formed so as to cross in the orthogonal direction. Therefore, the first and second through passages 30a and 30b are opened on the inner side surfaces of the first and second valve body storage chambers 30c and 30d, respectively.

  In the first input / output block 30, a plurality of bolt insertion holes 30g are provided in parallel to the first and second through passages 30a, 30b. In the present embodiment, when the fixing bolt V is tightened in the female screw hole N, the three bolt insertion holes 30g press the outer peripheries of the first and second through passages 30a and 30b evenly against the adjacent unit. The first input / output block 30 is formed so that it can be sealed.

  Since the first and second two-way valves 11 and 12 shown in FIG. 2 have the same configuration, the configuration of the first two-way valve 11 will be described here, and the description of the second two-way valve 12 will be omitted. The first two-way valve 11 is attached to the first input / output block 30 in a state where the valve body 112 is rotatably housed in the first valve body housing chamber 30c. The valve body 112 is formed with a flow hole 112a in a straight line so as to be orthogonal to the rotation axis. The first two-way valve 11 rotates the valve body 112 via the handle 111 to switch the communication state and the non-communication state between the first through-flow passage 30a and the flow hole 112a, and controls the fluid input / output. It is configured as follows.

  The valve body 112 is formed in a columnar shape and is rotatably loaded in the first valve body storage chamber 30c. The valve body 112 is held by a cover 113 that closes the opening of the first valve body storage chamber 30c, and is held in the first valve body storage chamber 30c so as not to rattle in the direction of the rotation axis. The inner diameter dimension of the flow hole 112a is set to be substantially the same as the flow path inner diameter of the first through flow path 30a in order to make it difficult for fluid loss to occur at the connection portion between the flow hole 112a and the first through flow path 30a. . An annular seal member 115 is attached to the outer peripheral surface of the valve body 112 along the outer periphery of the opening of the flow hole 112a to prevent fluid leakage.

  As for the valve body 112, the spindle parts 112b and 112c are protrudingly provided in the center part of both end surfaces. In the valve body 112, support shaft portions 112b and 112c are respectively supported by a shaft hole 113a formed in the cover 113 and a shaft hole 30e formed in the first input / output block 30, and the first and second valve bodies are accommodated. The chambers 30c and 30d can rotate stably around the rotation axis. A handle coupling portion 112 d is provided on the support shaft portion 112 b so as to protrude from the cover 113. The valve body 112 is configured such that a handle connecting portion 112 d is connected to the handle 111 via a connecting bolt 114 and is rotated integrally with the handle 111.

  Seal members 115 are disposed between the cover 113 and the first input / output block 30 and between the support shaft portion 112b and the cover 113, respectively, to prevent fluid from leaking to the outside.

  The second input / output unit 4 includes the second input / output block 40 and the third and fourth two-way valves 13 and 14, and the first input / output block 30 of the first input / output unit 3 and the first and second two-way valves. The third and fourth ports 9 and 10 are configured to be symmetrical with respect to the first and second ports 7 and 8.

(Configuration of fluid control unit)
As shown in FIG. 1, the fluid control unit 2 is attached to the valve block 21 with the first control valve 31, the second control valve 41, and the flow sensor 51 aligned in a row.

3 is a cross-sectional view taken along line BB in FIG. FIG. 4 is a view in which the manual valve of the cross-sectional view shown in FIG. 3 is closed.
The valve block 21 of the fluid control unit 2 includes a first straight flow path 22 that forms part of the first common flow path 5 and a second straight flow path 26 that forms part of the second common flow path 6. , And is formed so as to penetrate along the unit integration direction (the direction penetrating FIGS. 3 and 4 from the near side to the far side). The first straight flow path 22 communicates with the first branch flow path 24 via the first communication flow path 23 and the valve body storage chamber 21c. On the other hand, the second straight channel 26 communicates with the second branch channel 28 via the second communication channel 27 and the valve body storage chamber 21d.

  The valve body storage chamber 21c and the first communication channel 23 are formed coaxially from the valve mounting surface (upper surface in FIGS. 3 and 4) of the valve block 21. The valve body storage chamber 21 c and the first communication channel 23 are formed in a direction orthogonal to the first straight channel 22. The first communication channel 23 has a channel inner diameter dimension set smaller than a channel inner diameter dimension of the first linear channel 22 because a fluid that is merged or divided into the first common channel 5 flows. The inner diameter dimension of the valve body storage chamber 21c is set to be larger than that of the first communication channel 23 so that the valve body 312 of the first control valve 31 can be rotatably stored. The first branch flow path 24 is formed in a direction orthogonal to the first straight flow path 22 from a position shifted from the first straight flow path 22 toward the valve mounting surface, and is opened in the inner wall of the valve body storage chamber 21c. doing.

  The valve body storage chamber 21d, the second communication channel 27, and the second branch channel 28 are formed in the same manner as the valve body storage chamber 21c, the first communication channel 23, and the first branch channel 24.

  Here, the valve body storage chambers 21c and 21d and the first and second communication channels 23 and 27 are disposed on the valve block 21 so that the axis is closer to the inside than the axis of the first and second linear channels 22 and 26. Is provided. That is, the first and second control valves 31 and 41 are attached to the valve block 21 on the inner side of the axes of the first and second straight flow paths 22 and 26. Therefore, the valve block 21 has a space outside the first and second control valves 31 and 41 on the valve mounting surface so that the first and second control valves 31 and 41 are connected to the first and second straight flow paths 22 and 26. Wider than when placed on the axis. Accordingly, the valve block 21 is provided with steps 21h and 21i along the outer periphery of the openings of the first and second branch flow paths 24 and 28, and the joint 29 and the flow sensor 51 are attached inward from the end face. ing. Therefore, in the fluid control unit 2, the installation area of the joint 29 and the flow sensor 51 overlaps with the installation area of the valve block 21, and the installation space is smaller than the case where the joint 29 and the flow sensor 51 are attached to the end face of the valve block 21. .

  The valve block 21 has a bolt insertion hole 21 g formed at a position corresponding to the bolt insertion hole 30 g of the first input / output block 30.

  The first and second control valves 31 and 41 rotate the handle bodies 311 and 411 to rotate the valve bodies 312 and 412 in the valve body storage chambers 21c and 21d, and the first and second control valves 31 and 41 rotate through the communication holes 312a and 412a. The second straight flow paths 22 and 26 are attached to the valve block 21 so as to communicate with the first and second branch flow paths 24 and 28.

  The first and second control valves 31 and 41 have handles 311 and 411, valve bodies 312 and 412, covers 313 and 413, and seal members 315 and 415 except for the shapes of the communication holes 312a and 412a. The two-way valves 11 and 12 are configured in the same manner as the handles 111 and 121, the valve bodies 112 and 122, the covers 113 and 123, and the seal members 115 and 125. The communication holes 312a and 412a are provided in the figure of the valve bodies 312 and 412 in order to make the first and second communication flow paths 23 and 27 below and the lateral first and second branch flow paths 24 and 28 conductive, respectively. It is formed in an L shape that opens to the lower surface and the outer peripheral surface.

  The flow sensor 51 is attached to the valve block 21 so that the flow rate of the fluid flowing into the first branch flow path 24 can be measured. The flow sensor 51 includes a flow rate measurement block 52 that measures a flow rate and a substrate block 53 that contains a control board. As shown in FIG. 1, the flow sensor 51 has a width equal to or smaller than the width of the valve block 21. On the other hand, as shown in FIGS. 3 and 4, the flow rate sensor 51 has a flow rate measurement block 52 that is smaller than the substrate block 53 and is disposed at the center of the substrate block 53. In the flow sensor 51, a joint 54 is attached to a step portion between the substrate block 53 and the flow measurement block 52.

  In such a flow rate sensor 51, the wiring 56 of the substrate block 53 is taken out in the direction opposite to the first control valve 31. The flow rate sensor 51 is fixed to the valve block 21 with the substrate block 53 partially overlapped on the valve mounting surface of the valve block 21 and the flow rate measurement block 52 fitted into the step 21 h of the valve block 21. The flow sensor 51 is fixed by inserting a fixing bolt (not shown) in the longitudinal direction of the flow measurement block 52 and inserting the fixing bolt (not shown) into a female screw hole (not shown) formed in the valve block 21. This is done by tightening.

(Piping circuit)
FIG. 5 is an example of a piping circuit to which the fluid control integrated unit 1 shown in FIG. 1 is applied.
The fluid control integrated unit 1 is piped so as to switch and supply water and air to the cooling units W1 to W5 which are examples of the workpiece. That is, in the fluid control integrated unit 1, the system L1 connected to the cooling unit W1 is connected to the first branch channel 24A and the second branch channel 28A. Similarly, the first branch channels 24B to 24E and the second branch channels 28B to 28E are connected to the systems L2 to L5 of the cooling units W2 to W5.

  In the fluid control integrated unit 1, the first and third ports 7 and 9 are provided symmetrically in the left and right openings of the linear first common flow path 5, and the second and fourth ports 8 and 10 are linear first. The two common flow paths 6 are provided symmetrically at the left and right openings. Therefore, the connection direction and connection position of the water supply pipe for supplying water, the water discharge pipe for discharging water, the air supply pipe for supplying air, and the drain discharge pipe for discharging drain are not limited. Therefore, according to the piping circuit connected to FIG. 5, the water supply port (hereinafter also referred to as “water IN”) supplied with water from the water supply piping, and the water discharge port (hereinafter referred to as “water inlet”) for discharging water to the water discharge piping. Also referred to as “water OUT”), an air supply port through which air is supplied from an air supply pipe (hereinafter also referred to as “air IN”), and a drain discharge port that discharges air mixed with water (drain) into the drain discharge pipe ( Hereinafter, it is also referred to as “drain OUT”) between the first to fourth ports 7 to 10 to realize various flow path variations.

(Explanation of flow path variations)
The flow path variations A to H will be specifically described with reference to FIG. In the figure, OUT1 to OUT5 indicate directions in which water flows out to the cooling units W1 to W5, and IN1 to IN5 indicate directions in which water circulated through the cooling units W1 to W5 flows. Flow path variations A, B, F, and G are examples in which air flows in the opposite direction to water, and flow path variations C, D, E, and H are examples in which air flows in the same direction as water. In the following description, the flow path variations A and C will be specifically described, and the other flow path variations B and D to H are the same as the flow path variations A and C. The explanation will be centered.

<Flow path variation A>
In the drawing, the flow path variation A has the first port 7 as water OUT, the second port 8 as water IN, the third port 9 as air IN, and the fourth port 10 as drain OUT. This is an example of improving water drainage efficiency by switching water and air in opposite directions.

  In the flow path variation A, the fluid control integrated unit 1 is supplied with water up to the second port 8 when all the valves 11, 12, 13, 14, 31A to 31E and 41A to 41E are closed. Air is supplied to the third port 9.

  When the cooling units W1 to W5 are cooled with water, the operator switches the first and second two-way valves 11 and 12 and the first and second control valves 31A to 31E and 41A to 41E from the valve closed state. Switch to the open state. Then, the water supplied to the second port 8 is diverted from the second common flow path 6 to the second branch flow paths 28A to 28E and supplied to the cooling units W1 to W5. The water that has cooled the cooling units W1 to W5 flows into the flow rate sensors 51A to 51E and the flow rate is measured, and then flows into the first branch flow paths 24A to 24E and joins the first common flow path 5, It is discharged from 1 port 7.

  At the time of cooling, the flow sensors 51A to 51E transmit a flow rate measurement value to an external device (not shown). An external device (not shown) monitors the flow rate of water flowing through the workpieces W1 to W5 based on the flow rate measurement values flowing from the flow rate sensors 51A to 51E. An external device (not shown) issues a warning to the operator by an alarm, guidance, screen display, etc., when the measured flow rate deviates from the set value beyond the allowable range. The valve opening degree of the valves 11 to 14 and the first and second control valves 31A to 31E and 41A to 41E is adjusted and checked.

  When the cooling units W1 to W5 are cooled to a predetermined temperature or lower, the operator moves the first and second two-way valves 11 and 12 and the first and second control valves 31A to 31E and 41A to 41E from the valve open state. Switch to the valve closed state. Thereby, water is no longer supplied to the workpieces W1 to W5. It should be noted that the fact that the cooling units W1 to W5 have been cooled to a predetermined temperature or less may be managed mechanically, such as an external device (not shown) notifying the worker by an alarm or a screen display. However, it may be artificially managed by a thermometer or time.

  Thereafter, when purging the cooling parts W1 to W5, the operator turns the third and fourth two-way valves 13 and 14 and the first and second control valves 31A to 31E and 41A to 41E from the valve closed state. Switch to the open state. Thereby, the air supplied to the third port 9 is diverted from the first common flow path 5 to the first branch flow paths 24A to 24E and supplied to the cooling units W1 to W5 via the flow rate sensors 51A to 51E. . Air (drain) containing water remaining in the flow paths and the cooling parts W1 to W5 flows into the second branch flow paths 28A to 28E, merges with the second common flow path 6, and is discharged from the fourth port 10. The At the time of this purge, air flows in the opposite direction to water with respect to the cooling parts W1 to W5. Therefore, the water that has entered the gaps between the cooling parts W1 to W5 is easily blown off by the air and removed.

  When the purging of the cooling parts W1 to W5 is completed, the operator changes the third and fourth two-way valves 13 and 14 and the first and second control valves 31A to 31E and 41A to 41E from the valve open state to the valve closed state. Switch. Thereby, air is no longer supplied to the cooling units W1 to W5. Note that the completion of the purge may be managed mechanically, such as an external device (not shown) notifying the worker by an alarm or a screen display, or may be managed manually by the worker according to time or the like. May be.

  In the flow path variation A, air is purged between the first control valve 31A and the first two-way valve 11 in the first common flow path 5 and in the second common flow path 6 during the purge. There is a possibility that water between the control valve 41A and the second two-way valve 12 cannot be expelled and a liquid pool is generated. However, in the fluid control integrated unit 1, the first and second input / output blocks 30, 40 of the first and second input / output units 3, 4 are in surface contact with the valve blocks 21A, 21E of the adjacent fluid control units 2A, 2E. By doing so, the first and second through channels 30a, 30b are connected to the first and second straight channels 22, 26, respectively. Therefore, the flow volume between the first control valve 31 </ b> A and the first two-way valve 11 in the first common flow path 5, and the second control valve 41 </ b> A and the second flow rate in the second common flow path 6. The volume of the flow path between the two-way valve 12 is smaller than that of the conventional technique (see FIG. 17) using the first and second input / output pipes 1115 and 1116. Therefore, the fluid control integrated unit 1 has less liquid pool than the prior art.

<Flow path variation B>
In the drawing, the flow path variation B is configured such that the first port 7 is air IN, the second port 8 is water IN, the third port 9 is water OUT, and the fourth port 10 is drain OUT. This is an example of flowing water and air in opposite directions.

  During cooling, the second and third two-way valves 12 and 13 and the first and second control valves 31A to 31E and 41A to 41E are opened, and the first and fourth two-way valves 11 and 14 are closed. As a result, water flows from the second port 8 to the second common flow path 6, the second branch flow paths 28A to 28E, the cooling units W1 to W5, the flow sensors 51A to 51E, the first branch flow paths 24A to 24E, 1 It flows to the common flow path 5 and the 3rd port 9, and the workpiece | work W1-W5 is cooled.

  At the time of purging, the first and fourth two-way valves 11 and 14 and the first and second control valves 31A to 31E and 41A to 41E are opened, and the second and third two-way valves 12 and 13 are closed. As a result, air flows from the first port 7 to the first common flow path 5, the first branch flow paths 24A to 24E, the flow rate sensors 51A to 51E, the cooling units W1 to W5, the second branch flow paths 28A to 28E, 2 Flow to the common flow path 6 and the fourth port 10 to purge the workpieces W1 to W5.

  In the flow path variation B, after purging, between the first control valve 31E and the third two-way valve 13 in the first common flow path 5 and the second control valve 41A in the second common flow path 6 after purging. And the second two-way valve 12 may cause a liquid pool. However, the fluid control integrated unit 1 is similar to the channel variation A in that the channel volume between the first control valve 31E and the third two-way valve 13 in the first common channel 5 and the second Since the volume of the flow path between the second control valve 41A and the second two-way valve 12 in the common flow path 6 is smaller than that of the conventional technique (see FIG. 17), the liquid pool is less than that of the conventional technique.

<Flow path variation C>
In the drawing, the flow path variation C is such that the first port 7 is water OUT, the second port 8 is water IN, the third port 9 is drain OUT, and the fourth port 10 is air IN. This is an example of switching water and air to flow in the same direction.

  In the flow path variation C, the fluid control integrated unit 1 is supplied with water up to the second port 8 when all the valves 11, 12, 13, 14, 31A to 31E and 41A to 41E are in the standby state. Air is supplied to the fourth port 10.

  When the cooling units W1 to W5 are cooled with water, the operator switches the first and second two-way valves 11 and 12 and the first and second control valves 31A to 31E and 41A to 41E from the valve closed state. Switch to the open state. Then, the water supplied to the second port 8 is diverted from the second common flow path 6 to the second branch flow paths 28A to 28E and supplied to the cooling units W1 to W5. The water that has cooled the cooling units W1 to W5 flows into the flow rate sensors 51A to 51E and the flow rate is measured, and then flows into the first branch flow paths 24A to 24E and joins the first common flow path 5, It is discharged from 1 port 7. At this time, the flow rate of the water flowing through the workpieces W1 to W5 is monitored by an external device (not shown) as in the flow path variation A.

  When the cooling units W1 to W5 are cooled to a predetermined temperature or lower, the operator moves the first and second two-way valves 11 and 12 and the first and second control valves 31A to 31E and 41A to 41E from the valve open state. Switch to the valve closed state. Thereby, water is no longer supplied to the workpieces W1 to W5. In addition, like the flow path variation A, it is managed mechanically or artificially that the cooling parts W1 to W5 are cooled to a predetermined temperature or lower.

  Thereafter, when purging the cooling parts W1 to W5, the operator turns the third and fourth two-way valves 13 and 14 and the first and second control valves 31A to 31E and 41A to 41E from the valve closed state. Switch to the open state. As a result, the air supplied to the fourth port 10 is diverted from the second common flow path 6 to the second branch flow paths 28A to 28E and supplied to the cooling units W1 to W5. The air (drain) containing water remaining in the flow paths and the cooling units W1 to W5 flows into the first branch flow paths 24A to 24E via the flow rate sensors 51A to 51E and joins the first branch flow path 5. And is discharged from the third port 9. At the time of this purge, air flows in the same direction as water with respect to the cooling parts W1 to W5.

  When the purging of the cooling parts W1 to W5 is completed, the operator changes the third and fourth two-way valves 13 and 14 and the first and second control valves 31A to 31E and 41A to 41E from the valve open state to the valve closed state. Switch. Thereby, air is no longer supplied to the cooling units W1 to W5. The completion of the purge is managed mechanically or artificially as in the flow path variation A.

  In the flow path variation C, air is purged between the first control valve 31 </ b> A and the first two-way valve 11 in the first common flow path 5 and in the second common flow path 6 during the purge. There is a possibility that water between the control valve 41A and the second two-way valve 12 cannot be expelled and a liquid pool is generated. However, in the fluid control integrated unit 1, the first and second input / output blocks 30, 40 of the first and second input / output units 3, 4 are in surface contact with the valve blocks 21A, 21E of the adjacent fluid control units 2A, 2E. By doing so, the first and second through channels 30a, 30b are connected to the first and second straight channels 22, 26. Therefore, the flow volume between the first control valve 31 </ b> A and the first two-way valve 11 in the first common flow path 5, and the second control valve 41 </ b> A and the second flow rate in the second common flow path 6. The volume of the flow path between the two-way valve 12 is smaller than that of the conventional technique (see FIG. 17) using the first and second input / output pipes 1115 and 1116. Therefore, the fluid control integrated unit 1 has less liquid pool than the prior art.

<Flow path variation D>
In the drawing, the flow path variation D is such that the first port 7 is drained OUT, the second port 8 is water IN, the third port 9 is water OUT, and the fourth port 10 is air IN. This is an example of flowing water and air in the same direction.

  During cooling, the second and third two-way valves 12 and 13 and the first and second control valves 31A to 31E and 41A to 41E are opened, and the first and fourth two-way valves 11 and 14 are closed. As a result, water flows from the second port 8 to the second common flow path 6, the second branch flow paths 28A to 28E, the cooling units W1 to W5, the flow sensors 51A to 51E, the first branch flow paths 24A to 24E, 1 It flows to the common flow path 5 and the 3rd port 9, and the workpiece | work W1-W5 is cooled.

  At the time of purging, the first and fourth two-way valves 11 and 14 and the first and second control valves 31A to 31E and 41A to 41E are opened, and the second and third two-way valves 12 and 13 are closed. As a result, air flows from the fourth port 10 to the second common flow path 6, the second branch flow paths 28A to 28E, the cooling units W1 to W5, the flow sensors 51A to 51E, the first branch flow paths 24A to 24E, It flows into the 1 branch flow path 5 and the 1st port 7, and purges the workpiece | work W1-W5.

  In the flow path variation D, after purging, between the first control valve 31E and the third two-way valve 13 in the first common flow path 5 and the second control valve 41A in the second common flow path 6 after purging. And the second two-way valve 12 may cause a liquid pool. However, in the fluid control integrated unit 1, the flow path volume between the first control valve 31 </ b> E and the third two-way valve 13 in the first common flow path 5, as well as the flow path variation C, and the second Since the volume of the flow path between the second control valve 41A and the second two-way valve 12 in the common flow path 6 is smaller than that of the conventional technique (see FIG. 17), the liquid pool is less than that of the conventional technique.

<Flow path variation E>
In the figure, the flow path variation E is such that the first port 7 is water OUT, the second port 8 is air IN, the third port 9 is drain OUT, and the fourth port 10 is water IN. This is an example of flowing water and air in the same direction.

  During cooling, the first and fourth two-way valves 11 and 14 and the first and second control valves 31A to 31E and 41A to 41E are opened, and the second and third two-way valves 12 and 13 are closed. As a result, water flows from the fourth port 10 to the second common flow path 6, the second branch flow paths 28A to 28E, the cooling units W1 to W5, the flow sensors 51A to 51E, the first branch flow paths 24A to 24E, 1 flows to the common flow path 5 and the first port 7 to cool the workpieces W1 to W5.

  At the time of purging, the second and third two-way valves 12 and 13 and the first and second control valves 31A to 31E and 41A to 41E are opened, and the first and fourth two-way valves 11 and 14 are closed. As a result, air flows from the second port 8 to the second common flow path 6, the second branch flow paths 28A to 28E, the cooling units W1 to W5, the flow sensors 51A to 51E, the first branch flow paths 24A to 24E, It flows into the 1 branch flow path 5 and the 3rd port 9, and purges the cooling parts W1-W5.

  In the flow path variation E, after purging, between the first control valve 31A and the first two-way valve 11 in the first common flow path 5 and the second control valve 41E in the second common flow path 6 after purging. And the fourth two-way valve 14 may cause a liquid pool. However, the fluid control integrated unit 1 is similar to the channel variation C in that the channel volume between the first control valve 31A and the first two-way valve 11 in the first common channel 5 and the second Since the flow path volume between the second control valve 41E and the fourth two-way valve 14 in the common flow path 6 is smaller than that of the conventional technique (see FIG. 17), the liquid pool is less than that of the conventional technique.

<Flow path variation F>
In the drawing, the flow path variation F has the first port 7 as air IN, the second port 8 as drain OUT, the third port 9 as water OUT, and the fourth port 10 as water IN. This is an example of flowing water and air in opposite directions.

  During cooling, the third and fourth two-way valves 13, 14 and the first and second control valves 31A to 31E, 41A to 41E are opened, and the first and second two-way valves 11 and 12 are closed. As a result, water flows from the fourth port 10 to the second common flow path 6, the second branch flow paths 28A to 28E, the cooling units W1 to W5, the flow sensors 51A to 51E, the first branch flow paths 24A to 24E, 1 It flows to the common flow path 5 and the 3rd port 9, and the workpiece | work W1-W5 is cooled.

  At the time of purging, the first and second two-way valves 11 and 12 and the first and second control valves 31A to 31E and 41A to 41E are opened, and the third and fourth two-way valves 13 and 14 are closed. As a result, air flows from the first port 7 to the first common flow path 5, the first branch flow paths 24A to 24E, the flow rate sensors 51A to 51E, the cooling units W1 to W5, the second branch flow paths 28A to 28E, 2 flows to the common flow path 6 and the second port 8 to purge the cooling parts W1 to W5.

  In the flow path variation F, after purging, between the first control valve 31E and the third two-way valve 13 in the first common flow path 5 and the second control valve 41E in the second common flow path 6 after purging. And the fourth two-way valve 14 may cause a liquid pool. However, the fluid control integrated unit 1 is similar to the channel variation A in that the channel volume between the first control valve 31E and the third two-way valve 13 in the first common channel 5 and the second Since the flow path volume between the second control valve 41E and the fourth two-way valve 14 in the common flow path 6 is smaller than that of the conventional technique (see FIG. 17), the liquid pool is less than that of the conventional technique.

<Flow path variation G>
In the figure, the flow path variation G has the first port 7 as water OUT, the second port 8 as drain OUT, the third port 9 as air IN, and the fourth port 10 as water IN. This is an example of flowing water and air in opposite directions.

  During cooling, the first and fourth two-way valves 11 and 14 and the first and second control valves 31A to 31E and 41A to 41E are opened, and the second and third two-way valves 12 and 13 are closed. As a result, water flows from the fourth port 10 to the second common flow path 6, the second branch flow paths 28A to 28E, the cooling units W1 to W5, the flow sensors 51A to 51E, the first branch flow paths 24A to 24E, 1 flows to the common flow path 5 and the first port 7 to cool the workpieces W1 to W5.

  At the time of purging, the second and third two-way valves 12 and 13 and the first and second control valves 31A to 31E and 41A to 41E are opened, and the first and fourth two-way valves 11 and 14 are closed. As a result, air flows from the third port 9 to the first common flow path 5, the first branch flow paths 24A to 24E, the flow sensors 51A to 51E, the cooling units W1 to W5, the second branch flow paths 28A to 28E, 2 flows to the common flow path 6 and the second port 8, and the workpieces W1 to W5 are purged.

  In the flow path variation G, after purging, between the first control valve 31A and the first two-way valve 11 in the first common flow path 5 and the second control valve 41E in the second common flow path 6. And the fourth two-way valve 14 may cause a liquid pool. However, in the fluid control integrated unit 1, the flow path volume between the first control valve 31 </ b> A and the first two-way valve 11 in the first common flow path 5, as well as the flow path variation A, and the second Since the flow path volume between the second control valve 41E and the fourth two-way valve 14 in the common flow path 6 is smaller than that of the conventional technique (see FIG. 17), the liquid pool is less than that of the conventional technique.

<Flow path variation H>
In the figure, the flow path variation H is configured such that the first port 7 is drained OUT, the second port 8 is air IN, the third port 9 is water OUT, and the fourth port 10 is water IN. This is an example of flowing water and air in the same direction.

  During cooling, the third and fourth two-way valves 13, 14 and the first and second control valves 31A to 31E, 41A to 41E are opened, and the first and second two-way valves 11 and 12 are closed. As a result, water flows from the fourth port 10 to the second common flow path 6, the second branch flow paths 28A to 28E, the cooling units W1 to W5, the flow sensors 51A to 51E, the first branch flow paths 24A to 24E, 1 flows to the common flow path 5 and the third port 9 to cool the cooling parts W1 to W5.

  At the time of purging, the first and second two-way valves 11 and 12 and the first and second control valves 31A to 31E and 41A to 41E are opened, and the third and fourth two-way valves 13 and 14 are closed. As a result, air flows from the second port 8 to the second common flow path 6, the second branch flow paths 28A to 28E, the cooling units W1 to W5, the flow sensors 51A to 51E, the first branch flow paths 24A to 24E, It flows into the 1 branch flow path 5 and the 1st port 7, and purges the cooling parts W1-W5.

  In the flow path variation H, after purging, between the first control valve 31E and the third two-way valve 13 in the first common flow path 5 and the second control valve 41E in the second common flow path 6 after purging. And the fourth two-way valve 14 may cause a liquid pool. However, in the fluid control integrated unit 1, the flow path volume between the first control valve 31 </ b> E and the third two-way valve 13 in the first common flow path 5, as well as the flow path variation C, and the second Since the flow path volume between the second control valve 41E and the fourth two-way valve 14 in the common flow path 6 is smaller than that of the conventional technique (see FIG. 17), the liquid pool is less than that of the conventional technique.

(Explanation of effects)
The fluid control integrated unit 1 of the present embodiment described above integrates a plurality of fluid control units 2A to 2E so that the first common flow path 5 and the second common flow path 6 are integrated with the fluid control units 2A to 2E. It is provided independently along the direction. The plurality of fluid control units 2 </ b> A to 2 </ b> E include first branch channels 24 </ b> A to 24 </ b> E that branch from the first common channel 5 and second branch channels 28 </ b> A to 28 </ b> E that branch from the second common channel 6. 21A to 21E are provided. In the plurality of fluid control units 2A to 2E, the first branch flow paths 24A to 24E and the second branch flow paths 28A to 28E are connected via the works W1 to W5, and water (the first fluid of the first fluid) is connected to the works W1 to W5. An example) or air (an example of the second fluid).

  A first input / output unit 3 and a second input / output unit 4 are arranged at both ends of the plurality of integrated fluid control units 2A to 2E.

  The first input / output unit 3 includes a first input / output block 30, a first two-way valve 11, and a second two-way valve 12. The first input / output block 30 is in surface contact with the adjacent valve block 21A. The first input / output block 30 is provided with a first port 7 that conducts to the first common flow path 5 and a second port 8 that conducts to the second common flow path 6. The first two-way valve 11 is mounted on the first input / output block 30 and switches the conduction state between the first port 7 and the first common flow path 5. The second two-way valve 12 is mounted on the first input / output block 30 and switches the conduction state between the second port 8 and the second common flow path 6. That is, the first input / output unit 3 is provided with the first and second ports 7 and 8 and the first and second two-way valves 11 and 12 collectively.

  On the other hand, the second input / output unit 4 includes a second input / output block 40, a third two-way valve 13, and a fourth two-way valve 14. The second input / output block 40 makes surface contact with the adjacent valve block 21E. The second input / output block 40 is provided with a third port 9 that conducts to the first common flow path 5 and a fourth port 10 that conducts to the second common flow path 6. The third two-way valve 13 is mounted on the second input / output block 40 and switches the conduction state between the third port 9 and the first common flow path 5. The fourth two-way valve 14 is mounted on the second input / output block 40 and switches the conduction state between the fourth port 10 and the second common flow path 6. That is, the second input / output unit 4 is provided with the third and fourth ports 9 and 10 and the third and fourth two-way valves 13 and 14 together.

  As described above, the fluid control integrated unit is provided with the first input / output unit 3 and the first and second ports 7 and 8 and the first and second two-way valves 11 and 12 together. Since the third and fourth ports 9.10 and the third and fourth two-way valves 13 and 14 are provided together, the installation space is small even if the first to fourth two-way valves 11 to 14 are incorporated. Moreover, since the first and second input / output pipes 1115 and 1116 including the cheese pipes 1115B and 1116B are not externally attached as in the prior art (see FIG. 17), the piping space can be saved. Therefore, according to the fluid control integrated unit 1, the fluid switching structure can be saved in space.

The first input / output block 30 of the first input / output unit 3 of the fluid control integrated unit 1 includes a first through channel 30 a that forms a part of the first common channel 5 and one of the second common channels 6. The second through flow path 30b that forms the section is formed in parallel along the unit integration direction. In the first input / output block 30, the first port 7 is coaxially provided at one end opening of the first through passage 30a, and the second port 8 is coaxially provided at one end opening of the second through passage 30b. Is provided.
On the other hand, the second input / output block 40 of the second input / output unit 4 includes a third through channel 40 a that forms part of the first common channel 5 and a second part that forms part of the second common channel 6. Four through channels 40b are formed in parallel along the unit integration direction. In the second input / output block 40, the third port 9 is coaxially provided at one end opening of the third through passage 40a, and the fourth port 10 is coaxially provided at one end opening of the fourth through passage 40b. Is provided.
According to such a fluid control integrated unit 1, the distance between the first to fourth through passages 30a, 30b, 40a, 40b formed in the first and second input / output blocks 30, 40 is short. Therefore, when purging is performed, even if a fluid is accumulated between the adjacent fluid control unit 1 and the first to fourth two-way valves 11 to 14, the volume of the liquid reservoir is small, and the replacement efficiency of water and air Is good.

  The valve block 21 of the fluid control integrated unit 1 includes a first straight flow path 22 that forms part of the first common flow path 5 and a second straight flow path 26 that forms part of the second common flow path 6. Are formed independently along the unit integration direction. On the side surface of the valve block 21, a first control valve 31 that controls the communication state between the first straight flow path 22 and the first branch flow path 24, a second straight flow path 26, and a second branch flow path 28. The 2nd control valve 41 which controls the communication state with is attached so that it may be arranged inside the axis of the 1st and 2nd straight flow paths 22 and 26. As a result, the valve block 21 has the first and second control valves 31 as compared to the case where the first and second control valves 31 and 41 are mounted directly above the axis of the first and second linear flow paths 22 and 26. , 41 vacant space on both sides. Therefore, the flow rate sensor 51 for measuring the flow rate of the fluid is attached to the valve block 21 in a state where a part of the flow rate sensor 51 is overlapped with the side surface of the valve block 21 to which the first and second control valves 31 and 41 are attached. According to such a fluid control integrated unit 1, the installation space of the flow sensor 51 overlaps with the installation space of the valve block 21, and the installation space of the entire fluid control integrated unit 1 can be reduced.

  The flow rate sensor 51 of the fluid control integrated unit 1 includes a flow rate measurement block 52 that measures the flow rate of fluid flowing in a predetermined direction and a control board that controls the operation of the flow rate sensor 51, and wiring that connects to the control board. 56 has a substrate block 53 taken out to the outside. The flow rate measuring block 52 is smaller than the substrate block 53 and is arranged at the center of the substrate block 53. In such a fluid control integrated unit 1, if the flow rate measurement block 52 is removed from the substrate block 53 and then the flow rate measurement block 52 is inverted by 180 ° with respect to the substrate block 53 and attached integrally to the substrate block 53, The flow direction of the fluid measured by the flow sensor 51 can be changed while maintaining the direction of the wiring 56 taken out from the flow sensor 51. Accordingly, if the joint 54 is replaced with the opening opposite to the flow measurement block 52, the flow direction of the fluid measured by the flow sensor 51 can be changed without changing the installation area of the flow sensor 51.

(Second Embodiment)
FIG. 7 is a plan view of a fluid control integrated unit 1A according to the second embodiment of the present invention. 8 is a cross-sectional view taken along the line CC of FIG. FIG. 9 is an example of a piping circuit to which the fluid control integrated unit shown in FIG. 7 is applied. FIG. 10 is a diagram showing flow path variations. Since the configuration of the fluid control units 2A to 2E is the same, in FIG.
The fluid control integrated unit 1A of the present embodiment shown in FIG. 7 is configured in the same manner as the fluid control integrated unit 1 of the first embodiment except for the mounting direction of the flow sensors 51A to 51E.

  As shown in FIG. 8, the flow sensor 51 is a fluid that flows out of the first branch flow path 24 by inverting the flow measurement block 52 and the substrate block 53 integrally by 180 degrees with respect to the mounting direction of the first embodiment. It arrange | positions at the valve block 21 so that the flow volume of this may be measured. In this case, the wiring 56 of the flow sensor 51 is drawn from the substrate block 53 toward the first control valve 31. Therefore, the flow sensor 51 is attached to the valve block 21 via the intermediate block 55, and a space for drawing out the wiring 56 is provided between the first flow control sensor 31 and the first flow control valve 31. The flow sensor 51 has a plurality of fixing bolts (not shown) inserted into the valve block 21 from the right end face side in the drawing where the joint 54 is provided, and a female screw hole (not shown) formed in the valve block 21. To the valve block 21 by tightening.

  As shown in FIG. 9, the fluid control integrated unit 1A of the present embodiment includes first and second branch flow paths 24A to 24E and 28A to 28E via systems L1 to L5 connected to cooling units W1 to W5. The pipes are connected so that water and air can be switched and supplied to the cooling parts W1 to W5.

  The fluid control integrated unit 1A of the present embodiment can also realize various flow path variations I to P as shown in FIG. In the fluid control integrated unit 1A, flow rate sensors 51A to 51E are reversed and attached to the fluid control integrated unit 1 of the first embodiment. Therefore, the flow path variations I to P are configured so that water flows out of the flow sensors 51A to 51E and flows into the second branch flow paths 28A to 28E, as indicated by IN1 to IN5 and OUT1 to OUT5 in the drawing. Has been. Since the flow of water and air of the flow path variations I to P can be considered similarly to the flow path variations A to H of the first embodiment, the flow path variations I to P will be briefly described.

  The channel variations I, L, M, and N are cooled and purged by supplying water and air to the cooling units W1 to W5 while switching them in the same direction. In particular, in the flow path variation I, the first port 7 is water IN, the second port 8 is water OUT, the third port 9 is air IN, and the fourth port 10 is drain OUT. In the flow path variation L, the first port 7 is water IN, the second port 8 is drain OUT, the third port 9 is air IN, and the fourth port 10 is water OUT. In the flow path variation M, the first port 7 is air IN, the second port 8 is water OUT, the third port 9 is water IN, and the fourth port 10 is drain OUT. In the flow path variation N, the first port 7 is air IN, the second port 8 is drain OUT, the third port 9 is water IN, and the fourth port 10 is water OUT.

  On the other hand, the flow path variations J, K, O, and P supply water and air to the cooling units W1 to W5 while switching them in the reverse direction to improve the replacement efficiency. Particularly, in the flow path variation J, the first port 7 is water IN, the second port 8 is air IN, the third port 9 is drain OUT, and the fourth port 10 is water OUT. In the flow path variation K, the first port 7 is water IN, the second port 8 is water OUT, the third port 9 is drain OUT, and the fourth port 10 is air IN. In the flow path variation O, the first port 7 is drained OUT, the second port 8 is water OUT, the third port 9 is water IN, and the fourth port 10 is air IN. In the flow path variation P, the first port 7 is drained OUT, the second port 8 is air IN, the third port 9 is water IN, and the fourth port 10 is water OUT.

  In any of the flow path variations I to P, a liquid pool is formed between the port opening in the direction opposite to the air IN port and the air OUT port and the first and second control valves 31 and 41 adjacent to the port. . However, the first and second input / output blocks 30, 40 are in surface contact with the valve blocks 21A, 21E, and the first and second control valves 31A, 41A, 31E, 41E and the first through fourth two-way valves 11-14. The volume between is small. For this reason, the volume of the flow path in which the liquid pool is formed is smaller than that of the prior art, and the water and air replacement efficiency (purge efficiency) is good.

  Further, the fluid control integrated unit 1A has a structure in which the mounting direction of the flow sensor 51 is reversed with respect to the mounting direction of the first embodiment, so that the installation space is substantially the same as the fluid control integrated unit 1A of the first embodiment. It is. Therefore, for example, when it is desired to monitor the flow rate of water supplied to the cooling units W1 to W5 instead of the flow rate of water actually flowing to the cooling units W1 to W5, the fluid control integrated unit 1 of the first embodiment is used. If the configuration of the fluid control integrated unit 1A of the present embodiment is reversed by reversing the mounting direction of the flow sensor 51, the installation space can be realized with little increase.

  In addition, since the fluid control integrated unit 1A is provided with the first to fourth ports 7, 8, 9, and 10 symmetrically at both ends, the water supply pipe, the water discharge pipe, the air supply pipe, and the drain discharge pipe The connection direction and connection position are not limited. Therefore, the fluid control integrated unit 1A can realize various flow path variations I to P by changing the ports through which water and air are input and output.

(Third embodiment)
FIG. 11 is a plan view of a fluid control integrated unit 1B according to the third embodiment of the present invention. 12 is a cross-sectional view taken along the line DD of FIG. 13 is a cross-sectional view taken along line EE in FIG. FIG. 14 is an example of a piping circuit to which the fluid control integrated unit shown in FIG. 11 is applied.
The fluid control integrated unit 1B of the present embodiment is the same as the fluid control integrated unit 1 of the first embodiment, except that the closing block 80 and the input / output unit 71 are disposed at both ends of the fluid control units 2A to 2E. It is configured.

  As shown in FIG. 11, the fluid control integrated unit 1 </ b> B is provided with first to fourth ports 7, 8, 9, and 10 in an input / output unit 71 arranged at the right end in the drawing. In the fluid control integrated unit 1B, the opening portions of the first and second common flow paths 5 and 6 are closed by the closing block 80 disposed at the left end in the drawing.

  The fluid control integrated unit 1B includes a plurality of fixing bolts V inserted into the closing block 80 and the fluid control units 2A to 2E along the unit integration direction (the left-right direction in the figure). By closing each in the hole N, the closing block 80, the fluid control units 2A to 2E, and the input / output unit 71 are integrally connected.

  In the input / output block 70 of the input / output unit 71, the first and second through passages 70a and 70b constituting a part of the first and second common passages 5 and 6 are arranged in the stacking direction (left and right direction in the figure). It is formed through. A third port 9 and a fourth port 10 are provided coaxially at one end openings of the first and second through passages 70a and 70b. In the input / output block 70, first and second port connection channels 70e and 70f are formed so as to be orthogonal to the first and second through channels 70a and 70b from the upper and lower end surfaces in the drawing. The first and second port connection channels 70e and 70f have the same inner diameter as the first and second through channels 70a and 70b, and any one of the first to fourth ports 7, 8, 9, and 10 can be used. Also, the fluid is input and output to the first and second common flow paths 5 and 6 at the same flow rate. The first port 7 and the second port 8 are provided coaxially at the openings of the first and second port connection channels 70e and 70f.

  The first three-way valve 90 is disposed at a portion where the first through flow path 70 a and the first port connection flow path 70 e merge, and the first port 7 communicates with the first common flow path 5 and the third port 9. Switches the state of communication with the first common flow path 5. The second three-way valve 100 is disposed at a portion where the second through flow path 70b and the second port connection flow path 70f merge, and the second port 8 communicates with the second common flow path 6 and the fourth port 10. Switches the state of communication with the second common flow path 6.

  The first and second three-way valves 90 and 100 shown in FIG. 12 are configured in the same manner as the first and second two-way valves 11 and 12 of the first embodiment except for the shape of the flow hole. In addition, about the structure similar to 1st Embodiment, the same code | symbol as 1st Embodiment is used for drawing, and description is abbreviate | omitted suitably.

  As shown in FIG. 13, the first and second three-way valves 90, 100 have valve bodies such that the flow holes 91, 92 open at 90 ° intervals in the circumferential direction on the outer peripheral surfaces of the valve bodies 112, 122. 112 and 122 are formed in a T-shape. The first and second three-way valves 90 and 100 are configured by rotating the valve bodies 112 and 122 in the valve body storage chambers 70c and 70d in the directions K1 to K4 in the drawing via the handles 111 and 121, respectively. The first valve position (the position shown in FIGS. 12 and 13) where the first and second through passages 70a and 70b communicate with the third and fourth ports 9 and 10, and the first and second through passages 70a and 70b. Is connected to the first and second ports 7 and 8, and the first and second through passages 70a and 70b are not connected to any of the first to fourth ports 7 to 10 and are closed. The third valve position (the position where the first and third ports 7 and 9 communicate with each other) and the position where the second and fourth ports 8 and 10 communicate with each other can be switched.

  The flow path inner diameters of the flow holes 91 and 92 are the flow rate and pressure of fluid input and output between the first to fourth ports 7, 8, 9 and 10 and the first and second common flow paths 5 and 6. In order to reduce the loss, the first and second common channels 5, 6 (first and second through channels 70a, 70b) and the same channel inner diameter dimensions as the first and second port connection channels 70e, 70f are used. Is provided.

  As shown in FIG. 14, in the fluid control integrated unit 1B, the second branch channels 28A to 28E and the flow rate sensors 51A to 51E are connected to the systems L1 to L5, and water and air are switched and supplied to the cooling units W1 to W5. Used to do.

  Unlike the first embodiment, the fluid control integrated unit 1B is provided with first to fourth ports 7 to 10 in one input / output block 70. However, as in the first embodiment, the input / output block 70 is provided so that the first and third ports 7 and 9 are electrically connected to the first common flow path 5, and the second and fourth ports 8 and 10 are the first. 2 It is provided so as to conduct to the common flow path 6. Therefore, the fluid control integrated unit 1B can also realize the same flow path variations A to H (see FIG. 6) as in the first embodiment.

  The fluid control integrated unit 1B described above includes a closing block 80 disposed at one end of the plurality of fluid control units 2A to 2E and an input / output unit 71 disposed at the other end of the plurality of fluid control units 2A to 2E. .

  The input / output unit 71 includes an input / output block 70, a first three-way valve 90, and a second three-way valve 100. The input / output block 70 is opened so that the third port 9 that conducts to the first common flow path 5 and the fourth port 10 that conducts to the second common flow path 6 open in the unit integration direction. The first port 7 connected to the path 5 is opened so as to open in a direction different from the third port 9, and the second port 8 connected to the second common flow path 6 is opened in a direction different from that of the fourth port 10. Has been established. The first three-way valve 90 is mounted on the input / output block 70 and switches the first port 7 and the third port 9 to communicate with the first common flow path 5. The second three-way valve 100 is mounted on the input / output block 70 and switches the second port 8 and the fourth port 10 to communicate with the second common flow path 6. That is, the input / output unit 71 is provided with the first to fourth ports 7 to 10 and the first and second three-way valves 90 and 100 together.

  In the input / output unit 71, the input and output block 70 is in surface contact with the adjacent valve block 21E, whereby the first and third ports 7 and 9 are electrically connected to the first common flow path 5 and the second and fourth ports. 8 and 10 are connected to the second common flow path 6. On the other hand, the closing block 80 is in surface contact with the adjacent valve block 21A and closes the openings of the first and second common flow paths 5 and 6.

  Thus, since the fluid control integrated unit 1B is provided with the first to fourth ports 7 to 10 and the first and second three-way valves 90 and 100 in the input / output unit 71, the first and second three-way valves are provided. Even if the valves 90 and 100 are incorporated, the installation space is small. And since the 1st and 2nd input / output piping 1115, 1116 (refer FIG. 17) provided with cheese piping 1115B, 1116B etc. is not externally attached, piping space can be saved. Therefore, according to this fluid control integrated unit 1B, the fluid switching structure can be saved in space.

The input / output block 70 includes a first through channel 70a that forms a part of the first common channel 5 and a second through channel 70b that forms a part of the second common channel 6 in the unit integration direction. It is formed in parallel along. The input / output block 70 is branched from the first through channel 70a to form a first port connection channel 70e, and is branched from the second through channel 70b to form a second port connection channel 70f. . The first port 7 is provided in the opening of the first port connection channel 70e. The second port 8 is provided in the opening of the second port connection flow path 70f. The 3rd port 9 is provided in the opening of the 1st penetration channel 70a. The 4th port 10 is provided in the opening of the 2nd penetration channel 70b.
In such a fluid control integrated unit 1B, since water and air flow through the input / output block 70 and are input / output, water does not remain in the input / output block 70 after purging, and water / air replacement efficiency is good.

  However, in the fluid control integrated unit 1 </ b> B, a liquid pool may be formed between the first and second control valves 31 </ b> A and 41 </ b> A and the closing block 80. Therefore, it is preferable to provide protrusions 80a and 80b fitted in the first and second common flow paths 5 and 6 in the closing block 80 (see FIG. 11). As a result, the fluid control integrated unit 1B can reduce the volume of the flow path between the first and second control valves 31A, 41A and the closing block 80 and reduce the liquid pool.

(Fourth embodiment)
FIG. 15 is a cross-sectional view of a fluid control unit used in a fluid control integrated unit 1C according to the fourth embodiment of the present invention.
The fluid control integrated unit 1C of this embodiment is configured in the same manner as the fluid control integrated unit 1 of the first embodiment except for the substrate block 110A of the flow sensor 110. Here, points different from the first embodiment will be mainly described, and the points common to the first embodiment will be denoted by the same reference numerals as those of the first embodiment in the drawings, and description thereof will be omitted as appropriate.

  The flow rate sensor 110 of the fluid control integrated unit 1C includes a flow rate measurement block 52 that measures the flow rate of the fluid flowing in a predetermined direction, and a substrate block 110A that incorporates a control board that controls the operation of the flow rate sensor. The flow rate measuring block 52 is smaller than the substrate block 110A and is arranged at the center of the substrate block 110A. The substrate block 110A is provided with outlets for taking out the wiring 56 connected to the external device in two directions (left and right side surfaces in the figure). That is, the flow rate sensor 110 is provided with an outlet in the substrate block 110 </ b> A so that the wiring 56 can always be taken out in the opposite direction to the first control valve 31. Therefore, the fluid control integrated unit 1C does not use the intermediate block 55 (see FIG. 8) used in the second embodiment, and uses the flow sensor 110 to measure the flow rate of the fluid flowing out from the first branch flow path 24. It can be attached to the valve block 21.

Therefore, the fluid control integrated unit 1 </ b> C can be attached to the valve block 21 by reversing the flow rate sensor 110 without changing the installation area of the flow rate sensor 110 if the outlet for taking out the wiring 56 is changed.
Further, between the normal position (position for measuring the flow rate of the fluid flowing into the first branch flow path 24) and the reverse position (position for measuring the flow rate of the fluid flowing out from the first branch flow path 24), By replacing with, it is possible to realize flow path variations AP (see FIGS. 6 and 10) without changing the installation area of the entire fluid control integrated unit 1C.

In addition, this invention is not limited to the said embodiment, Various application is possible.
For example, in the above embodiment, the fluid control integrated unit 1 controls switching between fluid and air, but it may be used for switching water at different temperatures or switching between different fluids.
For example, the first to fourth two-way valves 11, 12, 13, 14 and the first and second control valves 31, 41 and the first and second three-way valves 90 and 100 of the above embodiment are manually opened and closed. However, the valve body may be rotated by a motor mechanism to switch the valve open / closed state. In addition, the first to fourth two-way valves 11, 12, 13, 14 and the first and second control valves 31, 41 and the first and second three-way valves 90, 100 have a poppet mechanism, and an air operated mechanism or the like. The poppet mechanism may be driven by this.

1, 1A, 1B, 1C Fluid control integrated unit 2 Fluid control unit 3 First input / output unit 4 Second input / output unit 5 First common channel 6 Second common channel 7 First port 8 Second port 9 Third Port 10 Fourth port 11 First two-way valve 12 Second two-way valve 13 Third two-way valve 14 Fourth two-way valve 21 Valve block 22 First straight flow path 26 Second straight flow path 24 First branch flow path 28 Second branch flow path 31 First control valve 41 Second control valve 51 Flow rate sensor 52 Flow rate measurement block 53 Substrate block 56 Wiring 30 First input / output block 30a First through flow path 30b Second through flow path 40 Second input Output block 40a Third through channel 40b Second through channel 70 Input / output block 70a First through channel 70b Second through channel 70e First port connection channel 70f Second port connection channel 71 Input / output unit G 90 First three-way valve 100 Second three-way valve 110 Flow rate sensor 110A Substrate block

Claims (6)

By integrating a plurality of fluid control units, a first common channel and a second common channel are provided independently along the integration direction of the fluid control unit. A valve block including a first branch channel that branches from the common channel and a second branch channel that branches from the second common channel; In a fluid control integrated unit that is connected to the workpiece and supplies the first fluid or the second fluid to the workpiece,
A first input / output unit and a second input / output unit disposed at both ends of the plurality of fluid control units;
The first input / output unit is
A first input / output block that is in surface contact with an adjacent valve block and has a first port connected to the first common flow path; and a second port connected to the second common flow path;
A first two-way valve mounted on the first input / output block for switching a conduction state between the first port and the first common flow path;
A second two-way valve mounted on the first input / output block and for switching a conduction state between the second port and the second common flow path;
The second input / output unit is
A second input / output block that is in surface contact with an adjacent valve block and has a third port connected to the first common flow path, and a fourth port connected to the second common flow path;
A third two-way valve mounted on the second input / output block for switching a conduction state between the third port and the first common flow path;
A fluid control integrated unit, comprising: a fourth two-way valve mounted on the second input / output block and switching a conduction state between the fourth port and the second common flow path. The fluid control integrated unit according to claim 1,
The first input / output block includes a first through channel that forms a part of the first common channel and a second through channel that forms a part of the second common channel in a unit integration direction. The first port is coaxially provided at one end opening of the first through flow path, and the second port is coaxially provided at one end opening of the second through flow path. And
The second input / output block includes a third through channel that forms a part of the first common channel and a fourth through channel that forms a part of the second common channel in a unit integration direction. The third port is coaxially provided at one end opening of the third through flow path, and the fourth port is coaxially provided at one end opening of the fourth through flow path. A fluid control integrated unit. By integrating a plurality of fluid control units, a first common channel and a second common channel are provided independently along the integration direction of the fluid control unit. A valve block including a first branch channel that branches from a common channel and a second branch channel that branches from the second common channel, each of the first branch channel and the second branch channel; In a fluid control integrated unit connected via a workpiece and supplying the first fluid or the second fluid to the workpiece,
A closing block disposed at one end of the plurality of fluid control units; and an input / output unit disposed at the other end of the plurality of fluid control units;
The input / output unit is
A first port connected to the first common flow path is opened so that a third port connected to the first common flow path and a fourth port connected to the second common flow path are opened in the unit integration direction. Is opened so as to open in a direction different from the third port, and the input / output block opened so that the second port connected to the second common flow path opens in a direction different from the fourth port;
A first three-way valve mounted on the input / output block for switching the first port and the third port to communicate with the first common flow path;
A second three-way valve mounted on the input / output block for switching the second port and the fourth port to communicate with the second common flow path;
The fluid control integrated unit, wherein the input / output block and the closing block are in surface contact with an adjacent valve block. The fluid control integrated unit according to claim 3,
The input / output block is:
A first through channel that forms a part of the first common channel and a second through channel that forms a part of the second common channel are formed in parallel along the unit integration direction. A first port connection channel is formed by branching from the through channel, and a second port connection channel is formed by branching from the second through channel,
The first port is provided in an opening of the first port connection flow path;
The second port is provided in an opening of the second port connection flow path;
The third port is provided at an opening of the first through-flow path;
The fluid control integrated unit, wherein the fourth port is provided in an opening of the second through flow path. The fluid control integrated unit according to any one of claims 1 to 4,
The valve block is
A first straight flow path that forms part of the first common flow path and a second straight flow path that forms part of the second common flow path are independently formed along the unit integration direction;
A first control valve for controlling a communication state between the first straight channel and the first branch channel, and a second control valve for controlling a communication state between the second straight channel and the second branch channel. Is attached to the side surface so as to be arranged inside the axis of the first and second straight flow paths,
A fluid control integrated unit, wherein a flow rate sensor for measuring a flow rate of fluid is attached to the valve block in a state where a part of the flow rate sensor is superimposed on the side surface. The fluid control integrated unit according to claim 5,
The flow sensor includes a flow measurement block that measures a flow rate of a fluid flowing in a predetermined direction, a substrate block that includes a control board that controls the operation of the flow sensor, and a wiring that connects to the control board is taken out to the outside. Have
The fluid control integrated unit according to claim 1, wherein the flow rate measuring block is smaller than the substrate block and disposed in the center of the substrate block.

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