JP2013235013A - Biosensor kit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide means capable of preventing a biosensor utilizing a field effect transistor from being deteriorated during storage or during conveyance, and thereby to achieve practical use of the biosensor utilizing the field effect transistor.SOLUTION: A biosensor kit comprises: a biosensor chip for measuring quantitatively detection material by a current value generated in a field effect transistor, when the detection material is reacted with detection object material recognition molecules immobilized in a reaction field connected to the field effect transistor; and a packing body comprising packing material comprising a metal film for sealing the biosensor chip. The biosensor chip comprises: the field effect transistor; and a mounting substrate for mounting the field effect transistor thereon.

Description

  The present invention relates to a biosensor kit having a biosensor chip.

  A biosensor using a field effect transistor (FET) has been proposed (see Patent Documents 1 to 3). In general, a biosensor using a field effect transistor has a field effect transistor and a reaction field of a substance to be detected formed on a channel. The reaction field is provided with a reaction film for binding the substance to be detected. Then, a gate voltage is applied from above the reaction film with a gate electrode, and the source-drain current at that time is measured to determine the presence / absence, concentration, etc. of the substance to be detected provided in the reaction field. Biosensors using FETs have very high sensitivity, and expectations for their practical use are increasing.

JP 2004-85392 A JP 2006-201178 A JP 2007-139762 A

  As described above, biosensors using field effect transistors are expected to be highly sensitive sensors, but there is a problem that sensitivity varies greatly depending on the use environment. Sensitivity variation occurs depending on the environment at the time of measurement by the biosensor, but also depends on the storage state of the biosensor.

  For example, when the biosensor being stored is exposed to moisture, the channel of the field effect transistor (especially the carbon nanotube channel) may deteriorate, resulting in hysteresis and the like. Further, when the biosensor being stored is exposed to light, the light may enter the FET semiconductor substrate and change the characteristics. Or when the molecule | numerator which recognizes a to-be-detected substance is fix | immobilized in the reaction field, the molecule | numerator will deteriorate during storage of a biosensor, and a sensitivity may fall.

  Therefore, an object of the present invention is to provide means for preventing deterioration of a biosensor using a field effect transistor during storage or transportation. Thereby, practical application of a biosensor using a field effect transistor is realized.

The present invention relates to the following biosensor kit.
[1] When a substance to be detected is immobilized in a reaction field connected to a field effect transistor and a substance to be detected is reacted with the substance to be detected, the value of a current generated in the field effect transistor is A biosensor chip to be measured, a first packing body made of a packing material including a metal film that seals the biosensor chip and the desiccant, the substance-recognized molecule, and the substance-recognized molecule in a moisturized state And a second packing body made of a packing material containing a metal film and a third packing body made of a packing material containing a metal film and sealing the first packing body and the second packing body. In the sensor kit, the biosensor chip includes a mounting substrate, the field effect transistor mounted on the mounting substrate, and the field effect transistor formed on the mounting substrate. The reaction field for supplying a gate potential, and the mounting substrate is electrically connected to an external connection terminal electrically connected to a source electrode of the field effect transistor and to a drain electrode of the field effect transistor A biosensor kit provided with an external connection terminal and an external connection terminal for applying a predetermined potential to the reaction field.
[2] The biosensor kit according to [1], wherein the reaction field is subjected to a surface treatment for immobilizing the target substance recognition molecule.
[3] The biosensor kit according to [2], wherein the surface treatment of the reaction field is a silanization treatment.
[4] The biosensor kit according to [2], wherein the surface treatment of the reaction field is a treatment in which a thin film of gold or platinum is formed and a SAM film is formed on the thin film.
[5] The biosensor kit according to any one of [1] to [4], wherein the reaction field is formed on a semiconductor substrate disposed on the mounting substrate.
[6] The biosensor kit according to any one of [1] to [4], wherein the mounting substrate is made of an inorganic material, an organic material, or a hybrid material thereof.

  According to the biosensor kit of the present invention, the characteristics of the field-effect transistor included in the biosensor chip are hardly changed during storage or transportation, so that stable biosensing is realized.

It is a 1st example of the biosensor chip of a 1st aspect. It is a 2nd example of the biosensor chip of a 1st aspect. It is a 3rd example of the biosensor chip of a 1st aspect. It is a 1st example of the biosensor kit containing the biosensor chip of a 1st aspect. It is a 2nd example of the biosensor kit containing the biosensor chip of a 1st aspect. It is a 3rd example of the biosensor kit containing the biosensor chip of a 1st aspect. It is an example of the detection system which has the biosensor chip of a 1st aspect. It is an example of the biosensor chip of a 2nd aspect. It is an example of the biosensor kit containing the biosensor chip of a 2nd aspect. It is an example of the detection system which has the biosensor chip of a 2nd aspect.

Biosensor kit The biosensor kit of the present invention includes a biosensor chip and a package that seals the biosensor chip. The package that seals the biosensor chip is preferably a laminated film having a metal film. This is to effectively suppress moisture permeation from the outside to the inside and light penetration. For example, the packing body has a resin layer that can be heat-sealed as an inner layer of a film constituting the packing body, and the opening of the packing body is closed by fusing.

  A desiccant or a hygroscopic agent may be sealed in the package together with the biosensor chip. This is because when the biosensor chip is exposed to moisture, the chip is likely to deteriorate. In addition, elements used in the sensing process, for example, a cleaning unit for cleaning the reaction field, a removal unit for removing the cleaning liquid from the reaction field after cleaning, and the like can be enclosed in the package.

  The biosensor chip included in the biosensor kit of the present invention is divided into two modes depending on whether or not a field effect transistor element is included. The biosensor chip according to the first aspect includes a field effect transistor and a mounting substrate on which the field effect transistor is mounted. On the other hand, the biosensor chip of the second aspect has a mounting substrate and a reaction field formed on the mounting substrate, but does not have a field effect transistor structure.

About a to-be-detected substance detection system The to-be-detected substance detection system of this invention comprises a biosensor chip and a detection apparatus. The biosensor chip may be any of the biosensor chips of the first aspect / second aspect described above. A detection target substance detection system including a biosensor chip according to the second aspect that does not include a field effect transistor uses a detection apparatus including a field effect transistor. The detection apparatus may also include elements used in the sensing process, for example, a cleaning unit for cleaning the reaction field, and a removal unit for removing the cleaning liquid from the reaction field after the cleaning.

  Hereinafter, the biosensor chip according to the first aspect and the biosensor chip according to the second aspect will be described.

Biosensor chip according to the first aspect The biosensor chip according to the first aspect includes a field effect transistor and a mounting substrate. The field effect transistor includes a semiconductor substrate having an insulating film, a source electrode and a drain electrode disposed on the insulating film, and a semiconductor disposed on the insulating film and electrically connected to the source electrode and the drain electrode. And a channel.

  The semiconductor substrate of the field effect transistor is usually a silicon substrate, but is not necessarily limited, and may be an SOI substrate, a compound semiconductor substrate, or a glass substrate. A source electrode / drain electrode and a channel are arranged on the surface of the semiconductor substrate, and an insulating film is formed on the arrangement surface. The insulating film is not particularly limited and should be appropriately selected according to the type of channel, but may be a silicon oxide film, a silicon nitride film, or a hafnium oxide film.

  The source electrode and the drain electrode are not particularly limited as long as they are conductive materials such as metals or semiconductor materials. The channel connecting the source electrode and the drain electrode may be a semiconductor, and may be a carbon nanotube, a polysilicon, or an amorphous silicon film. When the channel is a carbon nanotube, the insulating film on the surface of the semiconductor substrate may be preferably a silicon nitride film or a hafnium oxide film. On the other hand, when the channel is polysilicon or amorphous silicon, the insulating film on the surface of the semiconductor substrate may be preferably a silicon oxide film or a hafnium oxide film.

  The source electrode, the drain electrode, and the channel are preferably sealed so that moisture does not come in contact with them or light is not irradiated. When the channel is exposed to moisture or exposed to light, the characteristics of the field effect transistor may change significantly, and proper detection may not be performed. In particular, when the channel is polysilicon or amorphous silicon, it is easily affected by light. Sealing may be performed by covering the source electrode, the drain electrode, and the channel with an inorganic material or an organic material having low permeability to moisture and light. In addition, when the channel is a carbon nanotube, the influence of moisture on the characteristics is particularly great. Therefore, a passivation film may be formed at least on the channel with a silicon nitride film, a hafnium oxide film, or the like, and may be covered with an inorganic material or an organic material.

  Furthermore, the field effect transistor has a reaction field having a function as a gate electrode in a semiconductor substrate. The reaction field may be on the surface of the semiconductor substrate on the side where the source / drain electrodes and the channel are arranged, or on the opposite surface. It is preferable that an insulating film is also present on the surface of the reaction field.

  It is necessary to apply a desired potential (scanning potential or reference potential) to the reaction field formed on the semiconductor substrate. For this reason, it is preferable that a gate electrode is disposed in part or all of the periphery of the reaction field. The material of the gate electrode is not particularly limited, and may be a metal such as gold, platinum, titanium, or aluminum, or a conductive plastic.

  In the reaction field, a molecule for recognizing the substance to be detected is fixed on the surface, or the molecule can be fixed. Examples of molecules that recognize a substance to be detected include antibodies, enzymes, proteins such as lectins, nucleic acids, oligosaccharides or polysaccharides, or substances having a structure thereof; they react specifically with the target substance to be detected. Select what you want. The substance to be detected is a specific protein or chemical substance.

  When molecules that recognize a substance to be detected are immobilized on the surface of the reaction field, it may be preferable that the reaction field is moisturized so that the immobilized molecules do not deteriorate. This is because the aforementioned substance to be detected-recognizing molecule generally tends to be deteriorated by drying. In order to keep the reaction field moist, a moisturizing seal that covers the reaction field may be arranged. A moisturizing seal is a member that affixes a film that is difficult to transmit moisture so as to cover the reaction field with a peelable adhesive. The film that hardly allows moisture to permeate is, for example, a multilayer film having a metal layer.

  On the other hand, when the molecule for recognizing the substance to be detected is not fixed on the surface of the reaction field and can be fixed as necessary, the molecule for recognizing the substance to be detected is combined with the biosensor chip. It is preferable that the package is hermetically sealed. It is preferable that the molecule that recognizes the target substance sealed in the package is further sealed with a separate packing material. As described above, it is preferable that the field effect transistor does not come into contact with moisture. On the other hand, it is often preferable that the molecule recognizing the substance to be detected is in a moisturizing environment.

  In order to make it possible to immobilize a molecule that recognizes a substance to be detected on the surface of the reaction field as needed, for example, the surface of the reaction field may be silanized. The silanization treatment includes surface treatment with a silane coupling agent or the like. A SAM (Self-Assembly Monolayer) film may be formed on the surface of the reaction field. In order to form the SAM film, first, a metal thin film (for example, a thin film of gold or platinum) is formed on the surface of the reaction field, and the SAM film may be disposed on the metal foil film.

  The biosensor chip according to the first aspect includes a mounting substrate on which a field effect transistor is mounted. The mounting substrate is preferably made of an insulating material and does not have optical transparency. This is because the characteristics change when light transmitted through the mounting substrate hits the channel of the field effect transistor or the semiconductor substrate. For example, the mounting substrate may be an organic resin molded body containing a pigment.

  The mounting substrate has terminals electrically connected to the source electrode, the drain electrode, and the gate electrode of the field effect transistor. Through these terminals, the biosensor chip of the first aspect is attached to a detection device (described later).

The biosensor chip of the first aspect can be manufactured, for example, by the following process.
1) An insulating film such as a silicon oxide film, a silicon nitride film, or a hafnium oxide film is formed on the surface of the semiconductor substrate. For example, an insulating film may be formed by a thermal oxidation method, a CVD method, or the like.
2) On the insulating film, a source electrode and a drain electrode, and a channel connecting both electrodes are formed. If it is a carbon nanotube channel, it can be formed by a CVD method using an organic material such as ethyl alcohol or a ready-made carbon nanotube, and if it is a polysilicon or amorphous silicon channel, it can be formed by a CVD method or an epitaxial growth method. After forming the channel, a passivation film made of an insulating film such as a silicon oxide film, a silicon nitride film, or a hafnium oxide film is formed on at least the channel, and both ends of the channel are opened. Thereafter, a conductive material is deposited by, for example, a sputtering method to join the channel end portion, and unnecessary portions are removed by etching to form a source electrode and a drain electrode.

  3) A reaction field is formed on the semiconductor substrate. In this embodiment, the reaction field is formed in a desired region on the insulating film formed in 1) above on the surface on which the source electrode, the drain electrode, and the channel are formed. The reaction field is subjected to a surface treatment so that the substance to be detected can be immobilized. As for the surface treatment, the method of the surface treatment differs between the measurement in liquid and the measurement in air. When used for in-liquid measurement, a chemically stable metal film such as gold or platinum is formed by, for example, a vacuum deposition method or a sputtering method in order to suppress the generation of ions from the liquid sample. Thereafter, a SAM film is formed to facilitate the immobilization of the substance-recognizing molecule. In the case of air measurement, surface treatment with a silane coupling agent or the like is performed. Further, a scanning electrode or a reference electrode is arranged around or in the vicinity of the reaction field so that a desired potential can be applied to the reaction field. This scanning electrode or reference electrode is formed at the same time when the source electrode and the drain electrode are formed in the above 2), for example.

  4) A semiconductor substrate including a field effect transistor is mounted on a mounting substrate to form a biosensor chip. Three external connection terminals are formed on the mounting substrate. Each terminal of the mounting substrate is connected to the source electrode, drain electrode, and gate electrode of the field effect transistor by, for example, a wire bonding method or a bump connection method.

  5) The source electrode, the drain electrode, the channel, and the connection portion of each terminal are sealed with an inorganic material or an organic material having a low moisture or light permeability using, for example, a potting method or a transfer molding method. Before sealing, a plasma cleaning process may be performed on the biosensor chip in order to prevent peeling of the sealing material. However, when carbon nanotubes are used for the field effect transistor, there is a high possibility that the carbon nanotubes are destroyed by the plasma. For example, by providing a shield layer made of metal on the carbon nanotubes, the destruction by the plasma is prevented. be able to.

  A biosensor kit is obtained by sealing the biosensor chip obtained through the above 5) in a packaging body provided with a desiccant or a hygroscopic agent. When the substance to be detected is immobilized on the biosensor chip in advance, the reaction field is covered with a moisturizing seal. In addition, when the detection substance recognition molecule is not immobilized on the biosensor chip in advance, the detection substance recognition molecule separately packed is enclosed in the package. Note that the packing body may be filled with an inert gas.

  FIG. 1 shows a first example of the biosensor chip of the first embodiment. FIG. 1A is a plan view of the biosensor chip 10, and FIG. 1B is a cross-sectional view of the biosensor chip 10 taken along the line A-A ′. A biosensor chip 10 shown in FIG. 1 includes a mounting substrate 11, a semiconductor substrate 20 constituting a field effect transistor, a source electrode 21, a drain electrode 22, a channel 23, a reaction field 24, and a scan electrode or a reference electrode 25. . Further, three external connection terminals 30 (30A, 30B, 30C) are arranged at the end of the mounting substrate 11, and are electrically connected to the source electrode 21, the drain electrode 22, the scan electrode, or the reference electrode 25, respectively. ing.

  It is preferable that the source electrode 21, the drain electrode 22, and the channel 23 of the biosensor chip 10 are sealed with a sealing member 40 to shield the light. The sealing member 40 may be a member that does not transmit light, and may be an organic resin or an inorganic material. Note that at least the channel 23 of the biosensor chip 10 is covered with a passivation film (not shown).

  FIG. 2 shows a second example of the biosensor chip of the first aspect. FIG. 2A is a plan view of the biosensor chip 10 ′, and FIG. 1B is a cross-sectional view taken along the line A-A ′ of the biosensor chip 10 ′. A biosensor chip 10 ′ shown in FIG. 2 includes the same components as the biosensor chip 10 shown in FIG. 1, and a substance-to-be-detected molecule recognition molecule 26 is fixed to the reaction field 24. Further, the reaction field 24 of the biosensor chip 10 ′ is covered and moisturized with a moisturizing seal 50.

  FIG. 3 shows a third example of the biosensor chip of the first aspect. 3A is a plan view of the biosensor chip 10 ″, and FIG. 3B is an A-A ′ cross-sectional view of the biosensor chip 10 ″. The biosensor chip 10 ″ includes the same components as the biosensor chip 10 ′ shown in FIG. 2, but the reaction field 24 is disposed on the back surface of the semiconductor substrate 20 (the source electrode 21, the drain electrode 22, and the channel 23 are arranged). In the reaction field 24 of the biosensor chip 10 ″, the substance-to-be-detected molecule 26 is fixed, and the moisture retaining seal 50 is arranged. However, similarly to the biosensor chip 10, the substance to be detected recognition molecule 26 is not fixed, and the moisturizing seal 50 may not be disposed.

  FIG. 4A shows a biosensor kit in which a biosensor chip 10 (see FIG. 1) is sealed in a chip package 100. The chip package 100 is sealed with a hygroscopic agent or a desiccant 110 together with the biosensor chip 10. FIG. 4B shows a biosensor kit in which the biosensor chip 10 and the molecule to be detected 26 are sealed in the kit package 200. The biosensor chip is sealed in the package 100 as shown in FIG. 4A. The detected recognition molecule 26 is also sealed in a separate package 300.

  FIG. 5 shows a biosensor kit in which the biosensor chip 10 ′ (FIG. 2) is sealed in the chip package 100. In the chip package 100, a hygroscopic agent or a desiccant 110 is sealed together with the biosensor chip 10 '.

  6 shows a biosensor kit in which a biosensor chip 10 ″ (FIG. 3) is sealed in a chip package 100. The chip package 100 includes a hygroscopic agent or a desiccant 110 together with the biosensor chip 10 ″. Is also sealed.

  FIG. 7 shows a detection system including the biosensor chip according to the first aspect (for example, the biosensor chip 10 ′ (see FIG. 2)) and the detection device 400. The detection device 400 is connected to three input terminals 410 (410A to 410C), a current detection unit 420 connected to the input terminal 410A, a power source 470 connected to the current detection unit 420, and an input terminal 410B. And a detection circuit 440 including a power source 430 connected to the input terminal 410C. Furthermore, it comprises determination means 450 for determining the detection result based on the detected current, display means 460 for displaying the result, and storage means (not shown) for recording the result. The determination means 450 is composed of a processor, a ROM, a RAM, and the like necessary for calculating the presence / absence and concentration of a substance to be detected, based on the detected current value. As the display means 460, a liquid crystal, an organic EL, a plasma display, or the like is used. As a simple display means, a lamp display using LEDs may be used. The storage means is composed of a rewritable nonvolatile memory such as a flash memory.

  The biosensor chip 10 'is mounted on the detection device 400, and the input terminals 410A to 410C of the detection device are connected to the external connection terminals 30A to 30C of the biosensor chip 10', respectively. Thereby, the power source 430 can apply a desired potential to the scan electrode or the reference electrode 25; the current detection means 420 can detect the current flowing in the channel 23.

  For example, the determination unit 450 stores a relationship (a calibration curve or the like) between the detected current and the amount of the substance to be detected.

Biosensor chip according to the second aspect The biosensor chip according to the second aspect includes a mounting substrate and a reaction field formed on the mounting substrate. A semiconductor substrate may be disposed on the mounting substrate, and the reaction field is preferably formed on the semiconductor substrate. It is necessary to apply a desired potential to the reaction field of the biosensor chip of the second aspect. For this reason, a reference electrode is arranged in part or all of the periphery of the reaction field.

  Similar to the biosensor chip of the first aspect, the reaction field is configured such that a molecule that recognizes a substance to be detected is immobilized on the surface thereof, or the molecule can be immobilized. Further, it may be moisturized by a moisturizing seal or the like.

  The mounting board is the same as the mounting board in the first aspect. An external connection terminal for applying a potential to the reference electrode of the reaction field and an external connection terminal for extracting a potential generated in the reaction field are arranged on the mounting substrate. Through these terminals, the biosensor chip of the second aspect is attached to a detection device (described later).

The biosensor chip according to the second aspect can be manufactured, for example, by the following process.
1) An insulating film such as a silicon oxide film, a silicon nitride film, or a hafnium oxide film is formed on the surface of the semiconductor substrate. For example, an insulating film may be formed by a thermal oxidation method, a CVD method, or the like.
2) A reaction field is formed in a desired region of the semiconductor substrate on which the insulating film is formed in 1) above. Next, a part of the insulating film is opened as a planned electrode part for extracting the potential of the reaction field. Next, a conductive film made of aluminum or the like is formed on the insulating film around or in the vicinity of the reaction field, and the connection for connecting the gate electrode or the reference electrode to the wiring drawn from the conductive film or the wiring on the mounting substrate described later. A terminal and an electrode for extracting the potential of the reaction field are formed by etching. In the reaction field thus formed, a surface treatment is performed so that the substance to be detected can be immobilized as in the first embodiment. Furthermore, a substance to be detected may be immobilized on the reaction field.

  3) A semiconductor substrate having a reaction field is mounted on a mounting substrate to form a biosensor chip. Two external connection terminals are formed on the mounting substrate. One is connected to a terminal connected to the gate electrode of an external field effect transistor, and the other is connected to a terminal for a scanning electrode or a reference electrode by, for example, a wire bonding method or a bump connection method. These connecting portions are made of an inorganic material or an organic material having low moisture permeability, and are sealed using, for example, a potting method or a transfer molding method.

  A biosensor kit is obtained by sealing the obtained biosensor chip in a package.

  Note that the biosensor chip of this aspect is not limited to a semiconductor substrate, and an insulating substrate can also be used. For example, when a glass substrate is used, a biosensor chip can be created without preparing a separate mounting substrate. First, a conductive film such as aluminum is formed on a glass substrate, and a reaction field, wirings drawn from the reaction field, and external connection terminals are formed by etching. Next, an insulating film such as a silicon oxide film, a silicon nitride film, or a hafnium oxide film is formed by a CVD method so as to cover the reaction field. Next, a conductive film made of aluminum or the like is formed on an insulating film around or near the reaction field, and a scan electrode or a reference electrode, wirings drawn therefrom and external connection terminals are formed by etching. A biosensor kit can be obtained by subjecting the reaction field thus obtained to the same surface treatment as described above and sealing it in a package.

  FIG. 8A shows an example of the biosensor chip of the second embodiment. The biosensor chip 60 includes a mounting substrate 61 and a semiconductor substrate 70 disposed thereon. A reference electrode 71 and a reaction field 72 are disposed on the semiconductor substrate 70. On the mounting substrate 61, two external connection terminals 80 (an external connection terminal for gate potential application 80A and an external connection terminal for reference potential application 80B) are arranged. A connector member may be sealed by arranging a sealing member 90.

  FIG. 8B shows another example of a biosensor chip using the glass substrate of the second embodiment. The biosensor chip 60-1 includes a glass substrate 65, a reaction field 72 and a reaction field potential extraction wiring 75 formed thereon, an insulating film 66 formed thereon, and a reference formed on the insulating film. It has an electrode 71 and a reference potential application wiring. Further, on the glass substrate 65, two external connection terminals (an external connection terminal 80A for extracting a gate potential and an external connection terminal 80B for applying a reference potential) are arranged.

  FIG. 9A shows a biosensor kit including a kit package 200 in which a biosensor chip 60 sealed in a chip package 100 and a substance to be detected recognition molecule 73 sealed in a package 300 are enclosed. . In the chip package 100, the hygroscopic agent 110 is sealed together with the biosensor chip 60.

  FIG. 9B shows an example of a biosensor chip 60 ′ in which a detection substance recognition molecule 73 is fixed to the reaction field 72 of the biosensor chip 60 shown in FIG. 8 and the reaction field is covered with a moisturizing seal (not shown). A biosensor kit sealed to the body 100 is shown. In the chip package 100, the hygroscopic agent 110 is sealed together with the biosensor chip 60 '.

  FIG. 10 shows a detection target substance detection system in which the biosensor chip 60 ′ (see FIG. 9B) of the second aspect is mounted on the detection apparatus 500. The detection device 500 includes a detection circuit 550 including two input terminals 510 (510A and 510B), a field effect transistor 540, current detection means 520, a power source 580, and a power source 530. The input terminal 510A is connected to the gate of the field effect transistor 540. The input terminal 510B is connected to the power source 530. Furthermore, it comprises determination means 560 for determining the detection result based on the detected current, display means 570 for displaying the result, and storage means (not shown) for recording the result. The determination unit 560 includes a processor, a ROM, a RAM, and the like necessary for calculating the presence / absence and concentration of the substance to be detected, based on the detected current value. As the display means 570, a liquid crystal, an organic EL, a plasma display, or the like is used. As a simple display means, a lamp display using LEDs may be used. The storage means is composed of a rewritable nonvolatile memory such as a flash memory. The field effect transistor 540 is composed of a channel made of, for example, carbon nanotube, polysilicon, or amorphous silicon, a source electrode, and a drain electrode, and these are sealed with an inorganic material or an organic material having low moisture and light permeability. . By providing the detection device 500 with the field effect transistor 540, it is only necessary to prepare as many field effect transistors as the number of detection devices, and the influence of yield can be reduced. In addition, the biosensor chip itself can be produced at low cost.

  The biosensor chip 60 'is mounted on the detection device 500, and the input terminals 510A to 510B of the detection device are connected to the external connection terminals 80A to 80B of the biosensor chip 60', respectively. Thereby, the potential generated in the reaction field 72 can be set as the gate potential of the field effect transistor 540; the power source 530 can apply a desired reference potential to the reference electrode 71.

  For example, the determination unit 570 stores a relationship (a calibration curve or the like) between the detected current and the amount of the substance to be detected.

Detection method of a substance to be detected Using the biosensor kit of the present invention, a substance to be detected can be detected by the following method, for example.

  First, the biosensor chip is taken out from the package of the biosensor kit of the present invention. If the substance to be detected is not fixed in the reaction field of the extracted biosensor chip, the substance to be detected is immobilized.

  Next, a sample containing the substance to be detected is added to the reaction field. The sample is usually an aqueous solution. Incubate after sample addition. Thereafter, the reaction field is washed. Cleaning may be performed with water, for example. After washing, the washing liquid (water) in the reaction field is preferably removed as much as possible. The cleaning liquid can be removed, for example, by drying under reduced pressure or by blowing a gas.

  Thereafter, the biosensor chip is mounted on the detection device described above. After mounting, the current flowing through the channel of the field effect transistor (either in the biosensor chip or in the detection device) is measured. Based on the measurement result, the presence / absence and concentration of the substance to be detected in the sample are detected.

  A practical high-sensitivity biosensing is realized by not degrading a biosensor using a field effect transistor during storage or transportation.

10, 10 ′, 10 ″ Biosensor chip 11 Mounting substrate 20 Semiconductor substrate 21 Source electrode 22 Drain electrode 23 Channel 24 Reaction field 25 Scanning electrode or reference electrode 26 Target substance recognition molecule 30A, 30B, 30C External connection terminal 40 Sealing Member 50 Moisturizing seal 60, 60 ′, 60-1 Biosensor chip 61 Mounting substrate 65 Glass substrate 66 Insulating film 70 Semiconductor substrate 71 Reference electrode 72 Reaction field 73 Detected substance recognition molecule 75 Reaction field potential extraction wiring 80A, 80B External connection Terminal 90 Sealing member 91 Moisturizing seal 100 Chip package 110 Hygroscopic agent or desiccant 200 Kit package 300 Package 400 Detection device 410A, 410B, 410C Input terminal 420 Current detection means 430 Power supply 440 Detection circuit 450 Determination means 460 Display Stage 470 power 500 detector 510A, 510B input terminal 520 current detecting means 530 Power 540 field effect transistor 550 detection circuit 560 determining means 570 Display means 580 Power

Claims (6)

When a substance to be detected is immobilized in a reaction field connected to a field effect transistor and the substance to be detected is reacted with the substance to be detected, the value of a current generated in the field effect transistor is measured. A biosensor chip, a first packing body made of a packing material including a metal film, which seals the biosensor chip and the desiccant, and the target substance recognition molecule and the target substance recognition molecule are sealed in a moisturized state. A biosensor kit comprising: a second packing body made of a packing material containing a metal film; and a third packing body made of a packing material containing a metal film that seals the first packing body and the second packing body. There,
The biosensor chip includes a mounting substrate, the field effect transistor mounted on the mounting substrate, and the reaction field that is formed on the mounting substrate and supplies a gate potential to the field effect transistor. ,
An external connection terminal electrically connected to a source electrode of the field effect transistor, an external connection terminal electrically connected to a drain electrode of the field effect transistor, and a predetermined potential applied to the reaction field on the mounting substrate And an external connection terminal,
Biosensor kit.   The biosensor kit according to claim 1, wherein the reaction field is subjected to a surface treatment for immobilizing the substance to be detected recognition molecule.   The biosensor kit according to claim 2, wherein the surface treatment of the reaction field is a silanization treatment.   The biosensor kit according to claim 2, wherein the surface treatment of the reaction field is a treatment in which a thin film of gold or platinum is formed and a SAM film is formed on the thin film.   The biosensor kit according to any one of claims 1 to 4, wherein the reaction field is formed on a semiconductor substrate arranged on the mounting substrate.   The biosensor kit according to any one of claims 1 to 4, wherein the mounting substrate is made of an inorganic material, an organic material, or a hybrid material thereof.

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