JP2013223902A - Cutting blade and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cutting blade, which has superior accuracy of the thickness of a blade, is high in yield, has superior heat resistance and long in life, and to provide a manufacturing method of the cutting blade.SOLUTION: A cutting blade 10 has a thin-blade abrasive grain layer 12 of a circular thin-plate shape at which abrasive grains 18 are dispersed in a resin bond phase 16 containing a specified polyimide resin, and in the thin-blade abrasive grain layer 12, a resin composition containing a specified polyamic acid and the abrasive grains is molded and heat-treated into the circular thin plate shape, and a thickness formed by the conversion of the polyamic acid to the polyimide resin is 0.05 to 0.5 mm. Furthermore, there is provided a manufacturing method of the cutting blade 10 having a molding step of sheet-molding the resin composition containing the polyamic acid and the abrasive grains 18 into the thin-plate shape, and obtaining a thin-blade abrasive grain layer precursor by punching the composition into a circular shape; and a heat treatment step of heat-treating the thin-blade abrasive grain layer precursor, converting the polyamic acid to the polyimide resin, and forming the thin-blade abrasive grasp layer 12.

Description

  The present invention relates to a cutting blade and a manufacturing method thereof.

Able to process with high precision in groove processing to form grooves in workpieces made of hard and brittle materials such as aluminum oxide, quartz, glass and quartz used for semiconductor products, etc. Therefore, a cutting blade having a thin thin-plate abrasive layer of a circular thin plate in which abrasive grains are dispersed in a resin bond phase is widely used.
For example, a cutting blade having a circular thin blade-like thin abrasive layer in which abrasive grains made of diamond or cBN (cubic boron nitride) are dispersed in a resin bond phase mainly composed of phenol resin or polyimide resin is known. (For example, Patent Document 1).

  Such a cutting blade is formed by, for example, forming a slurry resin composition containing a phenol resin or a polyimide resin and abrasive grains into a sheet, drying the sheet, and then drying the thin blade abrasive grain layer into a circular thin blade abrasive grain layer. It is obtained by the method of hollowing out.

JP 2006-62009 A

  However, it is difficult to obtain a cutting blade having a sufficient life by the method of forming a resin bond phase using a phenol resin. In addition, the method of forming a resin bond phase using polyimide resin can provide a cutting blade having a long life and excellent heat resistance, but it is difficult to sufficiently increase the thickness accuracy of the blade, so that a sufficient yield can be obtained. Is difficult to obtain.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a cutting blade having excellent blade thickness accuracy, high yield, and excellent heat resistance, and a method for producing the cutting blade.

The cutting blade of the present invention is a cutting blade having a circular thin plate-like thin blade abrasive grain layer in which abrasive grains are dispersed in a resin bond phase containing a polyimide resin represented by the following formula (1):
The thin blade abrasive grain layer is a polyamic acid represented by the following formula (2) and a resin composition containing abrasive grains is molded into a circular thin plate and heat-treated, and the polyamic acid represented by the formula (2) Is a layer formed by being converted to the polyimide resin represented by the formula (1), and has a thickness of 0.05 to 0.5 mm.

（ただし、式（１）、（２）中、ｎは３０〜２００の整数である。）

(However, in formula (1), (2), n is an integer of 30-200.)

The cutting blade manufacturing method of the present invention is a cutting blade having a circular thin plate-like thin blade abrasive layer in which abrasive grains are dispersed in a resin bond phase containing a polyimide resin represented by the above formula (1). A manufacturing method comprising:
After molding the resin composition containing the polyamic acid represented by the formula (2) and abrasive grains into a thin plate shape, a molding step of cutting out into a circular shape to obtain a thin blade abrasive grain layer precursor,
The thin blade abrasive layer precursor is heat-treated, and the polyamic acid represented by the formula (2) is converted into the polyimide resin represented by the formula (1) to form the thin blade abrasive layer. A process comprising the steps of:

The cutting blade of the present invention has excellent blade thickness accuracy, high yield, excellent heat resistance, and long life.
Further, according to the cutting blade manufacturing method of the present invention, a high blade thickness accuracy can be obtained, and a long-life cutting blade excellent in heat resistance can be manufactured with a high yield.

It is the side view which showed an example of the blade for cutting | disconnection of this invention. It is an AA cross section of the blade for cutting of FIG. FIG. 3 is an enlarged view of a portion B in the cutting blade of FIG. 2.

<Blade for cutting>
The cutting blade of the present invention is, for example, cutting or grooving of a workpiece made of a hard and brittle material (aluminum oxide, silicon carbide, quartz, glass, quartz, etc.) used for a semiconductor device (electronic material component) or the like. Is used. In particular, by forming a large product precursor in a form where a plurality of products are connected, such as an oscillator, etc., where it is necessary to process grooves at a narrow pitch, the product precursor is cut into individual pieces. It is suitable for the electronic material manufacturing field that employs a manufacturing method for obtaining each product.

Hereinafter, the cutting blade 10 which is an example of the cutting blade of the present invention will be described with reference to FIGS.
As shown in FIGS. 1 and 2, the cutting blade 10 includes a thin blade abrasive grain layer 12 having a circular thin plate shape centering on the axis O. The outer peripheral edge 12d formed by the outer peripheral surface 12a of the thin blade abrasive grain layer 12, the outer peripheral edge of both side surfaces 12b, 12b perpendicular to the axis O, and the edge portions 12c, 12c intersecting the outer peripheral surface 12a and the side surfaces 12b, 12b. Works as a cutting edge.

  At the center of the thin blade abrasive grain layer 12, a circular mounting hole 14 centering on the axis O of the thin blade abrasive grain layer 12 penetrates in the thickness direction of the thin blade abrasive grain layer 12 (left and right direction in FIG. 2). Is formed. Although not specifically shown, the cutting blade 10 has a thin blade abrasive grain layer 12 attached to a main shaft of a cutting device via a flange, and the thin blade abrasive grain layer 12 is rotated about the axis O while being perpendicular to the axis O. Sent out. Forming or cutting a groove in the workpiece by bringing the portion protruding from the flange at the outer peripheral edge 12d (cutting edge) of the thin blade abrasive grain layer 12 in the rotated state into contact with the workpiece. Can do.

  As shown in FIG. 3, the thin blade abrasive grain layer 12 includes a resin bond phase 16 containing a polyimide resin represented by the following formula (1) (hereinafter referred to as “polyimide resin (1)”), and a resin bond phase. 16 have abrasive grains 18 dispersed therein. In the cutting blade 10, the thin blade abrasive grain layer 12 is a circular thin plate made of a resin composition containing polyamic acid represented by the following formula (2) (hereinafter referred to as “polyamic acid (2)”) and abrasive grains 18. The polyamic acid (2) is converted into a polyimide resin (1) by being molded and heated, and is characterized by having a thickness of 0.05 to 0.5 mm. That is, the thin-blade abrasive grain layer 12 is a layer in which the abrasive grains 18 are dispersed in the resin bond phase 16 using the polyimide resin (1) converted from the polyamic acid (2) after molding as a resin binder, and the thickness is 0. 0.05 to 0.5 mm.

  However, in formula (1), (2), n is an integer of 30-200. N in the formulas (1) and (2) is preferably an integer of 50 to 200, and more preferably an integer of 100 to 200.

The resin bond phase 16 may contain a resin other than the polyimide resin (1) in addition to the polyimide resin (1) obtained by converting the polyamic acid (2) by heat treatment. Examples of the other resins include phenol resins.
The ratio of the polyimide resin (1) to all the resins (100% by volume) contained in the resin bond phase 16 is preferably 80% by volume or more, more preferably 90% by volume or more, and particularly preferably 100% by volume. If the ratio of polyimide resin (1) is more than the said lower limit, it will become the cutting blade 10 with the long life which has the outstanding heat resistance.

The abrasive grains 18 are uniformly dispersed in the resin bond phase 16 and are held in the thin blade abrasive grain layer 12 by the resin bond phase 16.
Examples of the abrasive grains 18 include diamond abrasive grains and cBN (cubic boron nitride) abrasive grains, and at least one of diamond abrasive grains and cBN abrasive grains is preferable.
A filler such as tungsten carbide (WC) or zinc oxide may be further dispersed in the resin bond phase 16 of the thin blade abrasive grain layer 12. Further, the thin blade abrasive grain layer 12 may contain an additive such as a silane coupling agent.

  The degree of concentration of the abrasive grains 18 in the thin blade abrasive grain layer 12 is preferably 25 to 200, and more preferably 50 to 125. If the degree of concentration of the abrasive grains 18 is equal to or higher than the lower limit value, the life of the cutting blade 10 is prolonged. If the degree of concentration of the abrasive grains 18 is equal to or less than the above upper limit value, the cutting blade 10 has good sharpness.

  When the filler is dispersed in the resin bond phase 16 of the thin blade abrasive grain layer 12, the ratio of the filler to the total amount of the resin bond phase 16 and the filler is preferably 5 to 60% by volume, and more preferably 20 to 40% by volume. If the ratio of the filler is equal to or more than the lower limit value, the blade life becomes long. If the ratio of a filler is below the said upper limit, sharpness will become good.

The thin blade abrasive grain layer 12 has a uniform thickness from the axis O side to the outer peripheral end 12d.
The thickness of the thin blade abrasive grain layer 12 is 0.05 to 0.5 mm, preferably 0.1 to 0.3 mm.
The diameter of the thin blade abrasive grain layer 12 is preferably 25 to 100 mm, and more preferably 50 to 80 mm.

Since the cutting blade 10 uses the polyimide resin (1) for the resin bond phase 16 of the thin blade abrasive grain layer 12, it has excellent heat resistance and a long life. Moreover, since the thin blade abrasive grain layer 12 is formed by converting the polyamic acid (2) into the polyimide resin (1) by heat treatment after molding using the polyamic acid (2), the thickness accuracy of the blade is increased. Excellent and high yield.
The cutting blade of the present invention is a layer formed by converting the polyamic acid (2) to the polyimide resin (1) by heat treatment after the thin blade abrasive grain layer is molded using the polyamic acid (2). If there is, it is not limited to the cutting blade 10. For example, although the thin blade abrasive grain layer 12 is one layer in the cutting blade 10, a plurality of thin blade abrasive grain layers may be laminated.

<Manufacturing method of cutting blade>
Hereinafter, as an example of the method for manufacturing the cutting blade of the present invention, a method for manufacturing the cutting blade 10 will be described.
Examples of the method for manufacturing the cutting blade 10 include a method having the following molding step, compression step, heat treatment step, and finishing step.
Molding step: a step of forming a thin blade abrasive layer precursor by forming a sheet of a resin composition containing polyamic acid (2) and abrasive grains 18 into a thin plate shape and then cutting it into a circular shape.
Compression step: a step of compression-molding the thin blade abrasive layer precursor.
Heat treatment step: A step of heat-treating the thin blade abrasive layer precursor to convert the polyamic acid (2) into a polyimide resin (1) to form the thin blade abrasive layer 12.
Finishing step: A step of obtaining a cutting blade 10 by performing a finishing process for adjusting the thin-blade abrasive grain layer 12 into a predetermined shape.

(Molding process)
For example, a thin blade abrasive layer precursor of a circular thin plate shape is obtained by forming a sheet of a resin composition containing polyamic acid (2) and abrasive grains 18 by a doctor blade method to form a thin plate shape and drying it into a circular shape after drying. Get.
The resin composition is prepared by adding a resin component containing polyamic acid (2) and other resin to be used if necessary to a solvent, and adding abrasive grains 18 and a filler to be used if necessary to the resin solution. It is obtained by adding to a slurry. The resin composition may contain a polyimide resin (1) as long as the effects of the present invention are not impaired. A silane coupling agent may be added to the resin composition.
The solvent is not particularly limited as long as a resin composition capable of sheet molding is obtained, and examples thereof include dimethylacetamide (DMAc).

  70-90 mass% is preferable and, as for content of the solvent in a resin composition, 80-90 mass% is more preferable. If the content of the solvent is not less than the lower limit, the sheet moldability will be good. If the content of the solvent is not more than the above upper limit, drying after sheet molding becomes easy.

The content of the resin component and the abrasive grains 18 in the resin composition may be an amount such that the concentration of the abrasive grains 18 in the thin-blade abrasive grain layer 12 to be formed is within the above range.
The ratio of the polyamic acid (2) to the resin component (100% by volume) in the resin composition is preferably 80% by volume or more, more preferably 90% by volume or more, and particularly preferably 100% by volume. If the ratio of the polyamic acid (2) is equal to or higher than the lower limit value, the blade thickness accuracy is high and the yield is high.

  Moreover, when using a filler, 5-60 volume% is preferable and, as for the ratio of the filler with respect to the total amount of the resin component and filler in a resin composition, 20-40 volume% is more preferable.

It does not specifically limit as a method of drying the molded object after sheet | seat shaping | molding, Heat drying etc. are mentioned.
A method for hollowing out the thin blade abrasive layer precursor in a circular thin plate shape from a thin plate-shaped molded body after sheet molding is not particularly limited, and a known method using an existing apparatus can be employed.
The thickness of the thin blade abrasive grain layer precursor in the molding step is preferably 0.05 to 0.5 mm, more preferably 0.1 to 0.4 mm.
Moreover, 30-150 mm is preferable and, as for the diameter of the thin blade abrasive grain layer precursor in a formation process, 60-100 mm is more preferable.

(Compression process)
The thin blade abrasive layer precursor obtained in the molding process is compression molded.
The method of compression molding is not particularly limited, and examples thereof include a method of compression molding with a hot press machine at a temperature of 200 to 250 ° C. and a pressure of 100 to 200 kg / mm ² for 30 to 60 minutes.
The thickness of the thin blade abrasive layer precursor after compression molding is preferably 0.05 to 0.5 mm, and more preferably 0.05 to 0.4 mm.

(Heat treatment process)
The thin blade abrasive layer precursor after compression molding is accommodated in, for example, an electric furnace (oven) and heat-treated, and the polyamic acid (2) in the thin blade abrasive layer precursor is converted into a polyimide resin (1). Thus, the thin blade abrasive grain layer 12 in which the abrasive grains 18 are dispersed in the resin bond phase 16 containing the polyimide resin (1) is formed.
The heat treatment can be performed in an air atmosphere.

The heating temperature in the heat treatment step is preferably 250 to 430 ° C, more preferably 350 to 420 ° C, and further preferably 400 to 420 ° C. If heating temperature is more than a lower limit, reaction which converts a polyamic acid (2) into a polyimide resin (1) will fully advance. If heating temperature is below an upper limit, it will be easy to suppress thermal degradation of resin.
The heating time in the heat treatment step varies depending on the heating temperature, but is preferably 0.5 to 24 hours, and more preferably 1 to 5 hours. If heating time is more than the said lower limit, reaction which converts polyamic acid (2) into a polyimide resin (1) will fully advance. If the heating time is equal to or less than the upper limit, the productivity of the cutting blade 10 is high.

(Finishing process)
An attachment hole 14 is formed in the center of the thin-blade abrasive grain layer 12, and a part of the outer peripheral end 12d is cut or ground to finish it into a predetermined shape, whereby the cutting blade 10 is obtained.
A known method can be adopted as the finishing method.

In the manufacturing method of the cutting blade of the present invention described above, since the sheet is formed using the polyamic acid (2), the thickness accuracy of the blade is high, and the thickness variation can be 10 μm or less. It is possible and the yield is high. Further, since the polyamic acid (2) is converted into the polyimide resin (1) by heat treatment, a long-life cutting blade having excellent heat resistance can be obtained.
In addition, the manufacturing method of the cutting blade of the present invention is not limited to the above-described method. For example, a method of forming a hole to be the attachment hole 14 in the molding process without performing the finishing process may be used. Moreover, the method of manufacturing the braid | blade for cutting with which the thin blade abrasive grain layer 12 was laminated | stacked by overlapping and sintering a sheet | seat may be sufficient.

EXAMPLES Hereinafter, although an Example demonstrates this invention in detail, this invention is not limited by the following description.
[Example 1]
The cutting blade was manufactured by setting the predetermined thickness of the thin blade abrasive grain layer to 0.3 mm by the following method.
A nickel-coated diamond abrasive grain (# 170), fillers WC and zinc oxide are mixed in a polyamic acid (2) solution (trade name “COMPOCERAN H801D”, manufactured by Arakawa Chemical Industries, Ltd.), and a resin composition is prepared as a slurry. Got.
The resin composition is formed into a sheet having a thickness of 0.25 mm by a doctor blade method, dried by heating at 100 ° C. for 1 hour, and punched into a circular shape with a diameter of 70 mm to obtain a thin blade abrasive layer precursor with a circular thin plate shape. Obtained. Subsequently, the obtained thin-blade abrasive grain layer precursor was compression-molded by a hot press machine at a temperature of 250 ° C., a pressure of 100 kg / mm ² , and a compression time of 30 minutes. Next, the thin blade abrasive grain layer precursor after compression molding was heat-treated at 400 ° C. for 2 hours to convert the polyamic acid (2) into a polyimide resin (1) to form a thin blade abrasive grain layer. In addition, an attachment hole having an inner diameter of 40 mm was formed, and finally grinding and polishing were performed to obtain a cutting blade.
The thin blade abrasive grain layer of the cutting blade has a polyimide resin ratio of 65% by volume, a WC ratio of 25% by volume, and a zinc oxide ratio of 10% with respect to the total amount of polyimide resin (resin binder) and filler. %. The concentration of abrasive grains was 75.

[Comparative Example 1]
Resin composition prepared by mixing DMAc with a phenol resin (trade name “Shonol BRP 5417”, manufactured by Showa Polymer Co., Ltd.), nickel-coated diamond abrasive grains (# 170), filler WC and zinc oxide. A thin blade abrasive layer precursor in the form of a circular thin plate was obtained in the same manner as in Example 1. After that, after compression molding in the same manner as in Example 1, an attachment hole with an inner diameter of 40 mm was formed, and finally grinding and polishing were performed to obtain a cutting blade.
The thin blade abrasive grain layer of the cutting blade has a phenol resin ratio of 65% by volume, a WC ratio of 25% by volume, and a zinc oxide ratio of 10% with respect to the total amount of phenol resin (resin binder) and filler. %. The concentration of abrasive grains was 75.

[Comparative Example 2]
Powdered polyimide resin (trade name “Vespel SP-1”, manufactured by DuPont), nickel-coated diamond abrasive grains (# 170), fillers WC and zinc oxide are mixed, diameter 70 mm, thickness 0 After sintering into a 3 mm circular thin plate, an attachment hole with an inner diameter of 40 mm was formed, and finally grinding and polishing were performed to obtain a cutting blade.
The thin blade abrasive grain layer of the cutting blade has a polyimide resin ratio of 65% by volume, a WC ratio of 25% by volume, and a zinc oxide ratio of 10% with respect to the total amount of polyimide resin (resin binder) and filler. %. The concentration of abrasive grains was 75.

[Evaluation method]
1. Yield Evaluation 100 cutting blades were prepared for each example, and the thickness tolerance was 300 ± 10 μm, and the number of NG products having a thickness was measured. In addition, with respect to those having a thickness in the range of 300 ± 10 μm, the amount of warping in the thickness direction when placed on a flat surface was measured, and those having a warping amount of 300 μm or more were measured as warped NG products. The number of acceptable products was the number obtained by subtracting the number of NG products with the thickness and the number of warped NG products from 100. The results are shown in Table 1.
2. Life Evaluation Evaluate the yield of the cutting blade of each example in the above yield evaluation, attach it to a cutting device, and perform a wear test using a dress plate (trade name “A2-1”, manufactured by Mitsubishi Materials Corporation) as the workpiece. went. Specifically, AWD-10A (manufactured by Tokyo Seimitsu Co., Ltd.) is used as a dicer, the spindle rotation speed is 15000 rpm, the feed rate is 100 mm / second, the cooling water supply amount is 0.8 L / min with respect to the outer peripheral surface, 30 grooving processes (that is, a total of 150 grooving processes) were performed on five workpieces at 1.2 L / min on both sides. And the average amount of abrasion of the radial direction in the cutting blade after processing was measured. The results are shown in Table 1.

As shown in Table 1, in Example 1, which is the cutting blade of the present invention, the yield was very high, the wear amount in the wear test was small, and the life was long.
On the other hand, the cutting blade of Comparative Example 1 using phenol resin as the resin binder had a sufficiently high yield, but had a large amount of wear in the wear test, and had a shorter life compared to the cutting blade of Example 1.
Moreover, the cutting blade produced using the powdered polyimide resin has a very low yield, and a cutting blade having a predetermined thickness cannot be obtained.

  DESCRIPTION OF SYMBOLS 10 ... Blade for cutting | disconnection, 12 ... Thin blade abrasive grain layer, 14 ... Mounting hole, 16 ... Resin bond phase, 18 ... Abrasive grain.

Claims (2)

A cutting blade having a thin blade abrasive layer of a circular thin plate in which abrasive grains are dispersed in a resin bond phase containing a polyimide resin represented by the following formula (1):
The thin blade abrasive grain layer is a polyamic acid represented by the following formula (2) and a resin composition containing abrasive grains is molded into a circular thin plate and heat-treated, and the polyamic acid represented by the formula (2) Is a layer formed by converting into a polyimide resin represented by the formula (1), and has a thickness of 0.05 to 0.5 mm.

(However, in formula (1), (2), n is an integer of 30-200.) A manufacturing method of a cutting blade having a thin blade abrasive layer of a circular thin plate in which abrasive grains are dispersed in a resin bond phase containing a polyimide resin represented by the following formula (1):
After molding the resin composition containing the polyamic acid represented by the following formula (2) and abrasives into a thin plate shape, a molding step of cutting out into a circular shape to obtain a thin blade abrasive grain layer precursor,
The thin blade abrasive layer precursor is heat-treated, and the polyamic acid represented by the formula (2) is converted into the polyimide resin represented by the formula (1) to form the thin blade abrasive layer. And a cutting blade manufacturing method comprising the steps of:

(However, in formula (1), (2), n is an integer of 30-200.)

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