JP2013217668A5 - - Google Patents
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- JP2013217668A5 JP2013217668A5 JP2012085867A JP2012085867A JP2013217668A5 JP 2013217668 A5 JP2013217668 A5 JP 2013217668A5 JP 2012085867 A JP2012085867 A JP 2012085867A JP 2012085867 A JP2012085867 A JP 2012085867A JP 2013217668 A5 JP2013217668 A5 JP 2013217668A5
- Authority
- JP
- Japan
- Prior art keywords
- physical quantity
- quantity detection
- groove
- detection device
- movable part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001514 detection method Methods 0.000 claims 15
Claims (8)
前記基部に継ぎ手部を介して接続され、第２の溝部を有する可動部と、
前記可動部の厚み方向からの平面視において、前記第１の溝部の内部の前記基部と前記第２の溝部の内部の前記可動部とに固定されている物理量検出素子と、
を含む、物理量検出デバイス。 A base having a first groove ;
A movable part connected to the base part via a joint part and having a second groove part;
A physical quantity detection element fixed to the base inside the first groove and the movable part inside the second groove in a plan view from the thickness direction of the movable part ;
The including, physical quantity detection device.
前記第１の溝部および前記第２の溝部の深さは、前記物理量検出素子の厚さ以上である、物理量検出デバイス。 In claim 1,
The depth of the said 1st groove part and the said 2nd groove part is a physical quantity detection device which is more than the thickness of the said physical quantity detection element.
前記平面視で前記第２の溝部に重なる部分を有して前記可動部と固定されている質量体を含み、
前記物理量検出素子は、前記質量体と前記可動部との間の前記第２の溝部内に位置している、物理量検出デバイス。 In claim 2,
Before Kitaira surface view having a portion overlapping the second groove comprises a mass which is fixed to the movable portion,
The physical quantity detection element is a physical quantity detection device located in the second groove between the mass body and the movable part .
前記第１の溝部内に設けられている第１接合部材を含み、
前記第１接合部材は、前記物理量検出素子と前記基部とを接合している、物理量検出デバイス。 In any one of Claims 1 thru | or 3,
Including a first joining member provided in the first groove ,
The first joining member is a physical quantity detection device that joins the physical quantity detection element and the base.
前記第２の溝部内に設けられている第２接合部材を含み、
前記第２接合部材は、前記物理量検出素子と前記可動部とを接合している、物理量検出デバイス。 In any one of Claims 1 thru | or 4,
Including a second joining member provided in the second groove ,
The second joining member is a physical quantity detection device that joins the physical quantity detection element and the movable part.
前記物理量検出素子は、双音叉型振動素子である、物理量検出デバイス。 In any one of Claims 1 thru | or 5,
The physical quantity detection device is a physical quantity detection device which is a double tuning fork type vibration element.
前記物理量検出デバイスを収容しているパッケージと、
を含む、物理量検出器。 The physical quantity detection device according to any one of claims 1 to 6,
A package containing the physical quantity detection device;
Including a physical quantity detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012085867A JP5954531B2 (en) | 2012-04-04 | 2012-04-04 | Physical quantity detection device, physical quantity detector, and electronic device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012085867A JP5954531B2 (en) | 2012-04-04 | 2012-04-04 | Physical quantity detection device, physical quantity detector, and electronic device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013217668A JP2013217668A (en) | 2013-10-24 |
| JP2013217668A5 true JP2013217668A5 (en) | 2015-05-14 |
| JP5954531B2 JP5954531B2 (en) | 2016-07-20 |
Family
ID=49589946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012085867A Expired - Fee Related JP5954531B2 (en) | 2012-04-04 | 2012-04-04 | Physical quantity detection device, physical quantity detector, and electronic device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5954531B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61178667A (en) * | 1985-02-04 | 1986-08-11 | Yokogawa Electric Corp | Vibration type accelerometer |
-
2012
- 2012-04-04 JP JP2012085867A patent/JP5954531B2/en not_active Expired - Fee Related
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