JP2013191758A - Ultraviolet lamp unit and ultraviolet light irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the number of components for holding a plurality of ultraviolet lamps and to prevent curvature of the ultraviolet lamps without interrupting the ultraviolet emitting range of the ultraviolet lamps.SOLUTION: An ultraviolet lamp holder 10 holding a plurality of ultraviolet lamps 2 includes a frame body 31 having a top plate part 31a and side plate parts; and one or more intermediate support bodies 32 each extending downward from the top plate part 31a and having a recessed part 32M corresponding to facing surfaces of mutually adjacent ultraviolet lamps 2. Each of the ultraviolet lamps 2 is sandwiched and held between/by the intermediate support bodies 32 or between/by the intermediate support body 32 and the side plate parts 31b, 31c.

Description

  The present invention relates to an ultraviolet lamp unit having an ultraviolet lamp such as a dielectric barrier discharge lamp and an ultraviolet irradiation device using the ultraviolet lamp unit.

  Conventionally, an ultraviolet lamp such as a dielectric barrier discharge lamp has been used for optically cleaning an object to be processed such as a semiconductor or a glass substrate.

  As the workpiece becomes larger in recent years, the width direction of the workpiece also increases, and it is necessary to lengthen the discharge tube length of the ultraviolet lamp. In this case, the deflection of the discharge tube cannot be ignored, causing not only uneven irradiation but also contact between the discharge tube and the workpiece, and a device for preventing these is required.

  Here, as shown in Patent Document 1, in an ultraviolet irradiation device having one ultraviolet lamp, as a configuration for preventing bending due to thermal deformation of the ultraviolet lamp, a pair in a positional relationship facing each other through the ultraviolet lamp. One having an arc tube support is considered.

  However, in an ultraviolet irradiation apparatus having one ultraviolet lamp, a pair of arc tube supports may be provided, but when applied to an ultraviolet irradiation apparatus having a plurality of ultraviolet lamps, a pair of each ultraviolet lamp is provided. Therefore, it is difficult not only to increase the number of parts but also to reduce the distance between the ultraviolet lamps. In addition, if the ultraviolet lamp becomes longer, it will be necessary to provide a plurality of pairs of arc tube supports along the longitudinal direction. However, if this is done, the number of parts will increase further, and the ultraviolet lamp will be held by the arc tube support. The work to make becomes complicated.

JP 2009-160545 A

  Accordingly, the main object of the present invention is to reduce the number of parts for holding a plurality of ultraviolet lamps and to prevent the deflection of the ultraviolet lamps without interrupting the ultraviolet emission range of the ultraviolet lamps. .

  That is, an ultraviolet lamp unit according to the present invention includes a plurality of ultraviolet lamps having a straight tube shape, and an ultraviolet lamp holder that holds the plurality of ultraviolet lamps so that longitudinal directions of the ultraviolet lamps are parallel to each other. A lamp holder includes a frame having an upper plate facing the upper surface opposite to the light emitting side of the plurality of ultraviolet lamps and a side plate surrounding the periphery of the plurality of ultraviolet lamps, and extends downward from the upper plate. And one or a plurality of intermediate supports having recesses corresponding to the opposing surfaces and contacting both of the opposing surfaces of the ultraviolet lamps adjacent to each other. It is sandwiched and held between the intermediate supports on both sides of the lamp or between the intermediate support and the side plate portions. The both end portions of the ultraviolet lamp are axial end portions inserted into a power supply member such as a power supply socket in the ultraviolet lamp, and the portions other than both end portions of the ultraviolet lamp are power supply members such as a power supply socket in the ultraviolet lamp. It is the part except the axial direction both ends inserted in.

  If it is such, since each ultraviolet lamp is sandwiched and held at a position other than both ends of the ultraviolet lamp by the intermediate support disposed on both sides or between the intermediate support and the side plate, The bending of the ultraviolet lamp can be prevented. Here, since the ultraviolet lamps are held with the side surfaces sandwiched along the arrangement direction, the intermediate support is arranged so that the area overlapping the ultraviolet emission region of the ultraviolet lamp is as small as possible or not overlapping. It is possible to suppress irradiation unevenness and a decrease in the amount of light that occur when ultraviolet rays are blocked by the intermediate support. In addition, since the two ultraviolet lamps are held by a common intermediate support provided between adjacent ultraviolet lamps, it is not necessary to provide a dedicated intermediate support for each ultraviolet lamp, so the number of parts is reduced. It is possible to reduce and simplify the work of holding the ultraviolet lamp by the intermediate support. Furthermore, since it is set as the structure which hold | maintains an ultraviolet lamp using the side-plate part of a frame, the number of parts for holding a several ultraviolet lamp can be reduced. In addition, since the plurality of ultraviolet lamps are surrounded by a frame, the nitrogen purge of the ultraviolet lamp unit can be made more efficient.

  In particular, in order to simplify the work of attaching the ultraviolet lamp, the ultraviolet lamp is held by fitting the ultraviolet lamp between the intermediate support or between the intermediate support and the side plate. Is desirable. That is, after fixing the intermediate support to the frame, the ultraviolet lamp is fitted between the intermediate support or between the intermediate support and the side plate.

  In the above invention, by forming a concave portion along the longitudinal direction in the side plate portion, it can be considered that the outer surface of the ultraviolet lamp is fitted into the concave portion to support the ultraviolet lamp. The contact area with the outer surface of the ultraviolet lamp increases, which may cause damage to the ultraviolet lamp. For this reason, it has one or a plurality of side supports which are provided on the side plate portion and come into contact with the facing surface of the ultraviolet lamp facing the side plate portion and have a recess corresponding to the facing surface. It is desirable that the ultraviolet lamp is held between the intermediate supports on both sides of the ultraviolet lamp or between the intermediate support and the side supports.

  In addition to preventing the UV lamp from being damaged by the repulsive force from the intermediate support and the side support when fitting the UV lamp, the UV lamp is mounted between the intermediate support and the side support after being installed. In order to hold the ultraviolet lamp without backlash, a biasing spring for biasing the side support toward the ultraviolet lamp is provided between the side support and the side plate portion of the frame. desirable.

  In order to reduce the interval between the UV lamps adjacent to each other, the UV lamp has a straight tube discharge tube and a pair of high voltage electrodes provided on the outer surface of the discharge tube so as to face each other along the longitudinal direction thereof, and It is a dielectric barrier discharge lamp having an earth electrode, and it is desirable that the plurality of ultraviolet lamps are arranged so that high voltage electrodes or earth electrodes of the adjacent ultraviolet lamps face each other. If this is the case, the arrangement direction dimensions of the frame and the ultraviolet lamp unit can be reduced, and the nitrogen purge of the ultraviolet lamp unit can be performed more efficiently. At this time, it is desirable that the intermediate support provided between the adjacent ultraviolet lamps arranged so that the high voltage electrodes face each other is made of an insulator.

  As a configuration that simplifies the configuration of the ultraviolet lamp unit and makes the effects of the present invention most prominent, it has two ultraviolet lamps, and the high voltage electrodes of the two ultraviolet lamps are arranged so as to face each other, It is desirable that the first support is made of an insulator.

  In order to prevent light deterioration of the discharge tube material constituting the ultraviolet lamp and the accompanying damage, the ultraviolet lamp has an ultraviolet emission area for emitting ultraviolet rays to a predetermined area on the lower surface, and the ultraviolet emission It is desirable that the inner peripheral surface other than the region is subjected to light shielding processing for blocking ultraviolet rays or reflection processing for reflecting ultraviolet rays.

  It is desirable that the intermediate support is in contact with the opposite surface of the ultraviolet lamp so that ultraviolet rays emitted from the ultraviolet emission region do not strike.

  In order to prevent photodegradation of the discharge tube material constituting the ultraviolet lamp and the accompanying damage, the ultraviolet emission area is emitted to another ultraviolet lamp adjacent to the ultraviolet lamp provided with the ultraviolet emission area. It is desirable that the ultraviolet ray emitted from the region is not irradiated.

  It is desirable that the ultraviolet emission region of the ultraviolet lamp located on the outermost side is formed so that the ultraviolet rays emitted from the ultraviolet emission region do not hit the side plate portion of the frame adjacent to the ultraviolet lamp. If it is this, it can suppress that an electron jumps out by the photoelectric effect which arises when an ultraviolet-ray hits a side wall part.

  Alternatively, it is desirable that the ultraviolet emission region of the ultraviolet lamp located on the outermost side is formed so that the ultraviolet rays emitted from the ultraviolet emission region hit the side plate portion of the frame adjacent to the ultraviolet lamp. If this is the case, ultraviolet rays can be applied to the sidewall portion to emit electrons by the photoelectric effect, and the electrostatic charge is reduced by relaxing the positive charge (photoelectric effect) when the substrate patterned with the metal thin film is irradiated with ultraviolet rays. (ESD) can be prevented.

  According to the present invention configured as described above, since the plurality of ultraviolet lamps are held by being sandwiched from the arrangement direction, it is possible to prevent the ultraviolet lamp from being bent without blocking the ultraviolet emission range of the ultraviolet lamp.

The schematic diagram which shows the structure of the ultraviolet irradiation device of this embodiment. The bottom view which shows the ultraviolet lamp unit of the embodiment. The partial enlarged bottom view which shows the ultraviolet lamp unit of the embodiment. Sectional drawing which shows the ultraviolet lamp unit of the embodiment. The partial expanded side view which shows the ultraviolet lamp and intermediate support body of the embodiment. Sectional drawing which shows the ultraviolet lamp unit of deformation | transformation embodiment. Sectional drawing which shows the ultraviolet lamp unit of deformation | transformation embodiment.

  Hereinafter, an embodiment of an ultraviolet irradiation device according to the present invention will be described with reference to the drawings.

  As shown in FIG. 1, the ultraviolet irradiation apparatus 100 according to the present embodiment irradiates the workpiece W such as a semiconductor substrate or a glass substrate, which is conveyed by a conveyance mechanism (not shown), with ultraviolet rays. The object W is cleaned by decomposing and removing the organic matter adhering to the surface.

  Specifically, as shown in FIG. 1, the ultraviolet irradiation device 100 includes an ultraviolet lamp unit 10 in which a plurality of (two in the present embodiment) ultraviolet lamps 2 are integrated in the front-rear direction in a casing C. It is arranged and arranged. The front-rear direction is the same direction as the conveyance direction of the workpiece W and is an arrangement direction orthogonal to the longitudinal direction of the ultraviolet lamp 2.

  As shown in FIGS. 2 to 5, the ultraviolet lamp unit 10 includes a plurality of ultraviolet lamps 2 having a straight tube shape, and an ultraviolet lamp holder 3 having an opening on a lower surface that accommodates the plurality of ultraviolet lamps 2.

  As shown in FIGS. 3 and 4 in particular, the ultraviolet lamp 2 includes a long cylindrical discharge tube 21 and a pair of high-voltage electrodes 22 and a ground electrode provided facing each other along the longitudinal direction of the discharge tube 21. 23 is a dielectric barrier discharge lamp.

The discharge tube 21 is a round tube having a circular cross section in which both ends of a cylinder made of synthetic quartz glass are closed. The discharge space formed inside the discharge tube 21 is filled with a dielectric barrier discharge gas. As the dielectric barrier discharge gas, a rare gas such as xenon (Xe), argon (Ar), or krypton (Kr), or a halogen gas such as fluorine (F ₂ ) or chlorine (Cl ₂ ) is used. be able to. The dielectric barrier discharge lamp emits excimer light having different wavelengths (172 nm, 222 nm, 308 nm, etc.) depending on the type of gas. For example, in order to decompose an organic compound, a dielectric barrier discharge lamp that emits excimer light having a center wavelength of 172 nm is used by using xenon (Xe) as a discharge gas.

  The pair of high-voltage electrodes 22 and the ground electrode 23 form a film shape having a length substantially equal to that of the discharge tube 21 and are provided at positions sandwiching the discharge tube 21 from the front-rear direction. The high voltage electrode 22 and the ground electrode 23 are made of a conductive material such as aluminum, aluminum alloy, stainless steel, and are thin film electrodes formed on the side peripheral surface of the discharge tube 21 by, for example, plating, thermal spraying, vapor deposition, or sputtering. It is. In addition, an ultraviolet emission region 2X that emits excimer light is formed in a lower surface region between the pair of high voltage electrodes 22 and the ground electrode 23 on the side peripheral wall of the discharge tube 21 (see FIGS. 4 and 5).

  In particular, as shown in FIGS. 3 and 4, the high-voltage electrode 22 of the pair of high-voltage electrodes 22 and the ground electrode 23 is connected to the power supply socket 41 by being attached to one end of the ultraviolet lamp 2. The ground electrode 23 of the pair of high voltage electrode 22 and ground electrode 23 is electrically connected to the voltage terminal side, and is electrically connected to the ground terminal side of the power supply device by the power supply socket 42 attached to the other end of the ultraviolet lamp 2. Connected. In order to prevent discharge between the adjacent ultraviolet lamps 2, the high voltage electrodes 22 or the ground electrodes 23 of the adjacent ultraviolet lamps 2 are arranged to face each other. Since the present embodiment has two ultraviolet lamps 2, the high voltage electrodes 22 of the two ultraviolet lamps 2 face each other, and the ground electrode 23 of the ultraviolet lamp 2 faces the front and rear side plate portions 31b and 31c. .

  The ultraviolet lamp holder 3 holds a plurality of ultraviolet lamps 2 and power supply sockets 41 and 42 into which both end portions of the ultraviolet lamp 2 are inserted.

  Specifically, as shown in FIGS. 2 to 4, the ultraviolet lamp holder 3 has an upper plate portion 31 a facing the upper surface opposite to the light emitting side of the plurality of ultraviolet lamps 2 and the periphery of the plurality of ultraviolet lamps 2. A frame 31 having surrounding side plate portions 31b to 31e and a plurality of intermediate supports 32 provided to extend downward from the upper plate portion 31a of the frame 31 are provided.

  The frame 31 has an opening on the lower surface and has a substantially rectangular parallelepiped shape that accommodates the ultraviolet lamp 2, and feeds power to the left and right side plate portions 31d and 31e facing each other in the longitudinal direction of the frame 31 or in the vicinity thereof. Sockets 41 and 42 are fixed. The frame 31 may surround a part of the periphery of the ultraviolet lamp 2 as long as it has the upper plate portion 31a and the front and rear side plate portions 31b and 31c. Further, the front and rear side plate portions 31b and 31c may be partially provided in the longitudinal direction.

  The plurality of intermediate supports 32 provided on the upper plate portion 31a are formed of an insulator and have, for example, a rotating body shape, and are adjacent to each other ultraviolet lamps 2 (two ultraviolet lamps 2 in the present embodiment). Between the two ends of the ultraviolet lamp 2 in the axial direction (portions inserted into the power supply sockets 41 and 42). In the present embodiment, the three intermediate supports 32 are provided at equal intervals between the two ultraviolet lamps 2, and specifically, provided at positions that divide the ultraviolet lamp 2 into four equal parts.

  The intermediate support 32 has a recess 32 </ b> M corresponding to both of the opposing surfaces of the two ultraviolet lamps 2 (in this embodiment, the side surface including the high voltage electrode 22) and corresponding to the opposing surfaces.

  A plurality of side support bodies 33 are provided on the inner surfaces of the front and rear side plate portions 31 b and 31 c of the frame body 31 at positions corresponding to the intermediate support bodies 32. In the present embodiment, it is provided at substantially the same position as the intermediate support 32 in the longitudinal direction. When the intermediate support body 32 and the side support body 33 are provided at different positions in the longitudinal direction, the ultraviolet lamp 2 may be bent in the front-rear direction.

  The side support 33 is in contact with the facing surface of the ultraviolet lamp 2 facing the front and rear side plate portions 31b and 31c (in this embodiment, the side surface including the ground electrode 23), and is formed of an insulator or a conductor. Has been. And the side support body 33 has the recessed part 33M corresponding to the opposing surface of the ultraviolet lamp 2 which opposes the said front-and-back side board parts 31b and 31c in the inner surface of the front-and-back side board parts 31b and 31c.

  In the ultraviolet lamp holder 3 configured as described above, the two ultraviolet lamps 2 are in a state in which portions other than both end portions of each ultraviolet lamp 2 are fitted in the recesses 32M of the intermediate support 32 and the recesses 33M of the side support 33. And sandwiched from the arrangement direction (front-rear direction). In this manner, the ultraviolet lamp 2 is supported upward by the lower end protrusions of the recess 32M and the recess 33M by being sandwiched and held in a state of being fitted in the recess 32M of the intermediate support 32 and the recess 33M of the side support 33. Thus, downward deflection of the ultraviolet lamp 2 is suppressed. The recess 32M of the intermediate support 32 and the recess 33M of the side support 33 do not have to be a U-shaped recess as long as it has a lower end protrusion.

  Here, an urging spring 34 for urging the side support 33 toward the ultraviolet lamp 2 is provided between the side support 33 and the front and rear side plate portions 31 b and 31 c of the frame 31. Via this urging spring 34, the side support 33 is provided so as to be able to move forward and backward relative to the front and rear side plate portions 31b and 31c.

  An example of an assembly method of the ultraviolet lamp unit 10 configured as described above will be described.

  First, the side support 33 is attached to the intermediate support 32 and the front and rear side plate portions 31 b and 31 c on the upper plate portion 31 a of the frame 31. Thereafter, the ultraviolet lamp 2 is attached from the opening of the frame 31 so that the ultraviolet lamp 2 is fitted between the intermediate support 32 and the side support 33. At this time, both end portions of the ultraviolet lamp 2 are attached to the power supply sockets 41 and 42. Here, since the side support 33 is configured to be movable back and forth with respect to the front and rear side plate portions 31b and 31c, when the ultraviolet lamp 2 is fitted, the side support 33 is retracted, whereby the ultraviolet lamp 2 Can be prevented from coming into contact with the intermediate support 32 and the side support 33 and being damaged. In the fitted state, the ultraviolet lamp 2 is securely held by being sandwiched between the intermediate support 32 and the side support 33 biased by the biasing spring 34.

  Further, as shown in FIG. 4, the ultraviolet lamp 2 of the present embodiment is provided with a light shielding process for blocking ultraviolet rays or a reflection process for reflecting ultraviolet rays on the inner peripheral surface of the discharge tube 21 other than the ultraviolet emission region 2X. .

  In the ultraviolet lamp 2, the intermediate support 32 and the side support 33 are configured to come into contact with the outer peripheral surface other than the portion where the ultraviolet emission region 2X is formed. Thereby, it is comprised so that the ultraviolet-ray inject | emitted from the ultraviolet emission area | region 2X may not hit the intermediate | middle support body 32 and the side support body 33. FIG.

  The ultraviolet emission region 2X is formed so that the ultraviolet ray emitted from the ultraviolet emission region 2X does not hit another ultraviolet lamp 2 adjacent to the ultraviolet lamp 2 provided with the ultraviolet emission region 2X. The front and rear side plate portions 31b and 31c adjacent to the ultraviolet lamp 2 are formed so that the ultraviolet rays emitted from the ultraviolet emission region 2X do not hit. Specifically, it is configured as described above by setting a circumferential range of light shielding processing or reflection processing applied to the inner peripheral surface of the discharge tube 21.

  According to the ultraviolet irradiation apparatus 100 according to the present embodiment configured as described above, the two ultraviolet lamps 2 are sandwiched between the common intermediate support 32 and the side supports 33 provided on the front and rear side plates 31b and 31c. Since it is held, bending of the ultraviolet lamp 2 can be prevented. Here, since the respective ultraviolet lamps 2 are held with the side surfaces being sandwiched along the arrangement direction, the area where the intermediate support 32 overlaps the ultraviolet emission region 2X of the ultraviolet lamp 2 is made as small or as small as possible. It is possible to suppress the irradiation unevenness and the light amount decrease caused by the ultraviolet rays being blocked by the intermediate support 32.

  Further, since the two ultraviolet lamps 2 are held by a common intermediate support 32 provided between the adjacent ultraviolet lamps 2, it is necessary to provide a dedicated intermediate support 32 for each ultraviolet lamp 2. Since there are no parts, the number of parts can be reduced, and the work of holding the ultraviolet lamp 2 by the intermediate support 32 can be simplified.

  Further, since the urging spring 34 is provided between the side support 33 and the front and rear side plate portions 31b and 31c, the ultraviolet lamp is caused by the repulsive force from the intermediate support 32 and the side support 33 when the ultraviolet lamp 2 is fitted. In addition to preventing the 2 from being damaged, the ultraviolet lamp 2 can be held without play between the intermediate support 32 and the side support 33 after the ultraviolet lamp 2 is attached.

  In addition, since the plurality of ultraviolet lamps 2 are surrounded by the frame 31, the nitrogen purge of the ultraviolet lamp unit 10 can be made efficient.

  Further, in the ultraviolet irradiation device 100 of the present embodiment, the ultraviolet lamp unit 10 has two ultraviolet lamps 2, and each ultraviolet lamp 2 is sandwiched between an intermediate support 32 and a side support 33 that can move forward and backward. Therefore, each ultraviolet lamp 2 is easily attached to the ultraviolet lamp holder 3, and each ultraviolet lamp 2 after being attached is elastically pressed against the side support 33. Each rattling can be prevented.

The present invention is not limited to the above embodiment.
For example, in the embodiment, the side support 33 is provided on the front and rear side plate portions 31b and 31c. However, as shown in FIG. 6, the intermediate support 32 and the front and rear side plate portions are not provided without providing the side support 33. The configuration may be such that the ultraviolet lamp 2 is sandwiched and held from the arrangement direction by 31b and 31c. At this time, the front and rear side plate portions 31b and 31c are formed with recesses 31M along the longitudinal direction corresponding to the recesses 32M of the intermediate support 32. If this is the case, the side support 33 is unnecessary, and therefore the number of parts can be further reduced.

  Further, the ultraviolet emission region 2X may be formed such that the ultraviolet rays emitted from the ultraviolet emission region 2X hit the front and rear side plate portions 31b and 31c adjacent to the ultraviolet lamp 2. Specifically, it is performed by adjusting the circumferential range of light shielding processing or reflection processing applied to the inner peripheral surface of the discharge tube 21. In this case, the front and rear side plate portions 31b and 31c can be irradiated with ultraviolet rays to emit electrons by the photoelectric effect, and the positive charge (photoelectric effect) when the substrate W patterned with the metal thin film is irradiated with ultraviolet rays is reduced. Thus, electrostatic discharge (ESD) in the substrate W can be prevented.

  Furthermore, although the said embodiment demonstrated the ultraviolet lamp unit 10 which has the two ultraviolet lamps 2, you may have three or more ultraviolet lamps 2. FIG. In this case, as shown in FIG. 7, the ultraviolet lamp 2 located on the outermost side is sandwiched and held by the intermediate support 32 and the side support 33 from both sides, and the ultraviolet lamps 2 other than the outermost are arranged in the arrangement direction. It is configured to be sandwiched and held from both sides by the intermediate support body 32 that makes a pair.

  Further, in the above embodiment, the ultraviolet lamp 2 is assembled so as to be fitted from the opening side of the frame body 31, but by inserting the ultraviolet lamp 2 from the longitudinal direction of the frame body 31, the frame body 31 is inserted. It may be attached.

  In addition, in the above-described embodiment, the case where the intermediate support body 32 and the side support body 33 are provided at a plurality of locations (three locations) along the longitudinal direction has been described. Alternatively, a plurality of intermediate supports 32 and side supports 33 may be provided at each of the dividing points obtained by equally dividing the ultraviolet lamp 2 into a plurality.

  In addition, it goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 100 ... Ultraviolet irradiation apparatus 10 ... Ultraviolet lamp unit 2 ... Ultraviolet lamp (dielectric barrier discharge lamp)
21... Discharge tube 22... High voltage electrode 23... Earth electrode 2X... UV emission region P .. Longitudinal direction Q. Body 31a ... Upper plate 31b ... Front plate 31c ... Rear plate 32 ... Intermediate support 32M ... Recess 33 ... Side support 33M ... Recess 34 ... Biasing spring

Claims (12)

A plurality of ultraviolet lamps in a straight tube;
An ultraviolet lamp holder for holding the plurality of ultraviolet lamps so that the longitudinal directions of the ultraviolet lamps are parallel to each other,
The ultraviolet lamp holder is
A frame having an upper plate facing the upper surface opposite to the light emitting side of the plurality of ultraviolet lamps and a side plate surrounding the periphery of the plurality of ultraviolet lamps;
One or a plurality of intermediate supports extending downward from the upper plate portion and contacting both opposing surfaces of the adjacent ultraviolet lamps and having a recess corresponding to the opposing surface;
A part other than both end parts of each ultraviolet lamp is held between the intermediate support on both sides of the ultraviolet lamp or sandwiched between the intermediate support and the side plate part. unit. One or more side supports that are provided on the side plate portion and that have a recess corresponding to the facing surface while contacting the facing surface of the ultraviolet lamp facing the side plate portion,
A portion other than both ends of each ultraviolet lamp is held between the intermediate support on both sides of the ultraviolet lamp or between the intermediate support and the side support. Item 6. The ultraviolet lamp unit according to Item 1.   The ultraviolet lamp unit according to claim 2, wherein a biasing spring is provided between the side support and the side plate portion to bias the side support toward the ultraviolet lamp.   The ultraviolet lamps are held by fitting the ultraviolet lamps between the intermediate supports or between the intermediate support and the side plates from the lower surface opening of the frame. The ultraviolet lamp unit according to claim 1. The ultraviolet lamp is a dielectric barrier discharge lamp having a straight tube discharge tube and a pair of high voltage electrode and ground electrode provided on the outer surface of the discharge tube so as to face each other along the longitudinal direction thereof,
5. The ultraviolet lamp unit according to claim 1, wherein the plurality of ultraviolet lamps are arranged so that high-voltage electrodes or earth electrodes of adjacent ultraviolet lamps face each other.   6. The ultraviolet lamp unit according to claim 5, wherein the intermediate support provided between the adjacent ultraviolet lamps disposed so that the high voltage electrodes face each other is made of an insulator.   The ultraviolet lamp has an ultraviolet emission region for emitting ultraviolet rays to the outside in a predetermined region on the lower surface, and an inner peripheral surface other than the ultraviolet emission region is subjected to light shielding processing for blocking ultraviolet rays or reflection processing for reflecting ultraviolet rays. The ultraviolet lamp unit according to claim 1, wherein the ultraviolet lamp unit is provided.   The ultraviolet lamp unit according to claim 7, wherein the intermediate support is in contact with a facing surface of the ultraviolet lamp so that ultraviolet rays emitted from the ultraviolet emission region do not hit.   The ultraviolet ray emission region is formed so that the ultraviolet ray emitted from the ultraviolet ray emission region does not hit another ultraviolet lamp adjacent to the ultraviolet lamp provided with the ultraviolet ray emission region. The ultraviolet lamp unit according to 7 or 8.   The ultraviolet emission region of the ultraviolet lamp located on the outermost side is formed so that the ultraviolet rays emitted from the ultraviolet emission region do not hit the side plate portion of the frame adjacent to the ultraviolet lamp. The ultraviolet lamp unit according to claim 7.   The ultraviolet ray emission region of the ultraviolet lamp located on the outermost side is formed so that the ultraviolet ray emitted from the ultraviolet ray emission region hits a side plate portion of the frame adjacent to the ultraviolet lamp. Item 10. The ultraviolet lamp unit according to any one of Items 7 to 9.   An ultraviolet irradiation device comprising the ultraviolet lamp unit according to claim 1.