JP2013185991A - Density measuring sensor and manufacturing method thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a density measuring sensor capable of decreasing manufacturing processes at manufacturing the density measuring sensor, shortening tact time, and reducing a manufacturing cost.SOLUTION: A first conductive layer 37 made of a first conductive material is formed on an insulation base material 12. Then, a second conductive layer 38 made of a second conductive material is formed on the first conductive layer 37 in a pattern. Thereafter, through etching the first conductive layer 37 using the second conductive layer 38 as an etching mask, a pair of wiring parts 13a, 13b is formed by the patterned first conductive layer 37, and a working electrode 14a, a counter electrode 14b and a pair of connection terminals 15a, 15b are formed by the second conductive layer 38.

Description

  The present invention relates to a concentration measuring sensor for measuring the concentration of a substance and a method for manufacturing the same.

  As a method for quickly and easily measuring a concentration or the like of a specific component in a biological sample such as blood, a sensor (concentration measurement sensor) using an electrochemical detection means has been put into practical use. An example of such a sensor is a glucose sensor that quantifies the glucose concentration in blood electrochemically.

  A glucose sensor includes a base material, an electrode system including a working electrode and a counter electrode provided on the base material, an enzyme, and an electron acceptor as basic components. The enzyme selectively oxidizes glucose in the blood to produce gluconic acid, and at the same time reduces the electron acceptor to produce a reduced form. By applying a certain voltage to the reductant from the external device to the electrode system, the reductant is oxidized again, and current is generated at that time. Since this current value depends on the glucose concentration in the blood, glucose in the blood can be quantified and measured.

  Conventionally, when manufacturing a glucose sensor, a paste containing silver is screen-printed on an insulating substrate to form a lead wiring, and a paste containing carbon as a main component is screen-printed and applied to the tip of the lead wiring to apply a working electrode. And a counter electrode are formed (see Patent Document 1).

JP 2006-275819 A

  However, conventionally, when manufacturing a glucose sensor, the step of patterning the lead wiring and the step of patterning the carbon electrode system are performed separately. For this reason, there was a problem that the tact time was increased, leading to an increase in cost.

  The present invention has been made in consideration of these points, and can reduce the manufacturing process when manufacturing the concentration measuring sensor, thereby reducing the tact time and the manufacturing cost. An object of the present invention is to provide a sensor and a manufacturing method thereof.

  The present invention is a concentration measurement sensor for measuring the concentration of a substance in a solution, wherein at least one surface is an insulating surface having an insulating property, and a first substrate provided on the insulating surface of the substrate. A pair of wiring parts made of one conductive material, a working electrode connected to one end of one wiring part, a counter electrode connected to one end of the other wiring part, and a pair connected to the other end of each wiring part In the method of manufacturing a concentration measurement sensor, the first embodiment includes a step of preparing a base material, a step of forming a first conductive layer made of a first conductive material on the insulating surface of the base material, Forming a second conductive layer made of a second conductive material different from the first conductive material on the one conductive layer in a pattern, and etching the first conductive layer using the second conductive layer as an etching mask; Forming a pair of wiring parts by the patterned first conductive layer And a second conductive layer by the working electrode, counter electrode and a pair of the manufacturing method of the concentration measuring sensor, characterized in that a step of forming a connecting terminal.

  In the present invention, after the step of forming the working electrode, the counter electrode, the pair of wiring portions, and the pair of connection terminals, the working electrode, the counter electrode, and the pair of connection terminals are arranged outwardly from the second conductive layer formed in a pattern. A method for manufacturing a concentration measuring sensor is provided, wherein a step of providing an insulating layer covering the exposed portion is provided.

  The present invention is the method for manufacturing a concentration measuring sensor, wherein the first conductive layer is formed by a vacuum film forming method.

  The present invention is the method for manufacturing a concentration measuring sensor, wherein the first conductive layer includes one or more selected from Ag, Al, Fe, Ni, Cr, Ti, Ta, and Cu.

  The present invention is the method for manufacturing the concentration measuring sensor, wherein the second conductive layer contains carbon.

  The present invention relates to a concentration measurement sensor for measuring the concentration of a substance in a solution, a base material on which at least one surface is an insulating surface having an insulating property, and a first conductivity provided on the insulating surface of the base material. A pair of wiring parts made of a conductive material, and a pair of conductive parts made of a second conductive material different from the first conductive material, each provided on each wiring part, A working electrode connected to one end of the wiring part; a connection terminal connected to the other end of the one wiring part; the other conductive part is a counter electrode connected to one end of the other wiring part; And a connecting terminal connected to the other end of the wiring portion, and the planar shape of each wiring portion is the same as the planar shape of the conductive portion provided on the wiring portion. is there.

  The present invention provides a concentration measuring sensor, wherein an insulating layer is provided on the pair of conductive portions so as to cover the pair of conductive portions with the working electrode, the counter electrode, and the pair of connection terminals exposed to the outside. It is.

  The present invention is the concentration measurement sensor, wherein the metal material of each wiring part includes one or more selected from Ag, Al, Fe, Ni, Cr, Ti, Ta, and Cu.

  The present invention is the concentration measurement sensor, wherein the conductive portion contains carbon.

  ADVANTAGE OF THE INVENTION According to this invention, the manufacturing process at the time of manufacturing a density | concentration measurement sensor can be reduced, tact time can be shortened, and manufacturing cost can be reduced.

FIG. 1 is an exploded perspective view showing a concentration measuring sensor according to the present invention. FIG. 2 is a plan view showing a wiring portion and a conductive portion (a working electrode, a counter electrode, and a pair of connection terminals). 3A to 3B are cross-sectional views taken along line AA in FIG. 4A and 4B are cross-sectional views taken along line BB in FIG. FIG. 5 is a perspective view showing a concentration measurement sensor and an external device. 6 (a) to 6 (d) are diagrams showing manufacturing steps of the concentration measuring sensor according to the present invention.

  Embodiments of the present invention will be described below with reference to the drawings. Drawing is an illustration and may exaggerate a characteristic part for explanation, and may differ from an actual thing. In addition, the present invention can be implemented with appropriate modifications without departing from the technical idea. Note that, in the following drawings, the same portions are denoted by the same reference numerals, and some detailed description may be omitted.

  1 to 6 are diagrams showing an embodiment of a concentration measuring sensor and a manufacturing method thereof according to the present invention.

  First, an embodiment of a concentration measuring sensor will be described with reference to FIG. As shown in FIG. 1, the concentration measurement sensor 10 measures the concentration of a substance in a solution, and detects a blood glucose level by measuring the concentration of glucose in blood, for example.

  Such a concentration measurement sensor 10 is provided on a base substrate 11, an insulating substrate 12 provided on the base substrate 11, and an upper surface (insulating surface having insulating properties) 12a of the insulating substrate 12. A pair of wiring portions 13a and 13b and a pair of conductive portions 20a and 20b provided on the respective wiring portions 13a and 13b are provided.

  Among these, the insulating base material 12 constitutes a base material whose upper surface 12a is an insulating surface.

  The insulating base 12 is held by a rigid base body 11. In addition, when the insulating base material 12 itself has appropriate rigidity and strength, the base base material 11 may not be provided.

  The pair of conductive portions 20a and 20b is composed of one conductive portion 20a and the other conductive portion 20b.

  Of these, one conductive portion 20a includes a working electrode 14a connected to one end of one wiring portion 13a, a connection terminal 15a connected to the other end of one wiring portion 13a, a working electrode 14a and a connection terminal 15a. And a connecting portion 22a having a linear shape. The working electrode 14a, the connecting portion 22a, and the connecting terminal 15a are integrally formed.

  Similarly, the other conductive portion 20b includes a counter electrode 14b connected to one end of the other wiring portion 13b, a connection terminal 15b connected to the other end of the other wiring portion 13b, a counter electrode 14b, and a connection terminal 15b. And a connecting portion 22b having a linear shape. The counter electrode 14b, the connection portion 22b, and the connection terminal 15b are integrally formed.

  In the present embodiment, the planar shapes of the wiring portions 13a and 13b are the same as the planar shapes of the conductive portions 20a and 20b provided on the wiring portions 13a and 13b. As a result, the wiring portions 13a and 13b are not exposed, and the wiring portions 13a and 13b can be protected and oxidation thereof can be prevented.

  The working electrode 14a and the counter electrode 14b constitute an electrode system 14 in contact with the solution to be measured.

  The connection terminals 15a and 15b are connected to a connection portion (not shown) on the external device 25 side when the concentration measurement sensor 10 is inserted into the insertion port 26 of the external device 25 as will be described later (FIG. 5). .

  An insulating layer 16 is provided so as to cover the pair of wiring portions 13a and 13b. The insulating layer 16 covers the pair of wiring portions 13a and 13b so as to expose the working electrode 14a, the counter electrode 14b, and the pair of connection terminals 15a and 15b to the outside.

  Furthermore, a cavity 17 having a suction port 17a made of an insulating material and guiding blood to be measured from the outside to the working electrode 14a and the counter electrode 14b is provided on the insulating layer 16. Further, a cover 19 made of an insulating material is provided on the cavity 17, and a reagent layer 18 containing glycose oxidase is held by the cavity 17 and the cover 19.

  Next, components of each part will be described.

Base substrate 11
The base substrate 11 is made of, for example, polyethylene terephthalate (PET) resin, polyester resin, vinyl chloride resin, polystyrene (PS) resin, polypropylene (PP) resin, and more preferably made of PET, The thickness is 50 μm or more and 1 mm or less.

Insulating substrate 12
The insulating substrate 12 is a substrate that supports the pair of wiring portions 13a and 13b, and the upper surface 12a on which at least the pair of wiring portions 13a and 13b is disposed is an insulating surface. As the insulating base material 12, for example, a resin base material, a ceramic base material, a glass base material, a semiconductor base material or a metal base material whose surface is insulated at least can be used. The insulating substrate 12 may be a rigid body or an elastic body. Among them, it is preferable to use an elastic body having electrical insulation properties. For example, a film such as polyethylene terephthalate (PET) resin, polyester resin, vinyl chloride resin, polystyrene (PS) resin, polypropylene (PP) resin is preferably used. it can. The insulating base 12 has a thickness of about 12 μm to 200 μm, for example.

Wiring part 13a, 13b
The wiring portions 13a and 13b are made of a first conductive material, and the first conductive material has higher conductivity than the pair of conductive portions 20a and 20b (the working electrode 14a, the counter electrode 14b, and the connection terminals 15a and 15b). preferable. The first conductive material may include a metal material selected from, for example, Ag, Al, Fe, Ni, Cr, Ti, Ta, and Cu. The wiring portions 13a and 13b may have a thickness in the range of 10 nm to 20 μm, for example, depending on the forming method. In addition, when forming wiring part 13a, 13b by a vacuum film-forming method, it is preferable that the thickness shall be about 10 nm-200 nm.

Conductive parts 20a, 20b
The conductive portions 20a and 20b are preferably made of a second conductive material that is different from the first conductive material, and are less likely to be oxidized than the metal material of the wiring portions 13a and 13b. The conductive portions 20a and 20b may have a thickness of about 300 nm to 30 μm.

  The conductive portions 20a and 20b are obtained by applying, for example, a conductive paste containing carbon (second conductive material) onto the first conductive layer 37 described later by screen printing. In this case, the conductive paste is formed on the first conductive layer 37. Further, the working electrode 14a is formed on the first conductive layer 37 at a position corresponding to one end of the wiring portion 13a, and the counter electrode 14b is formed at a position corresponding to one end of the wiring portion 13b.

  Further, when the conductive portions 20a and 20b are formed, the connection terminals 15a and 15b are formed simultaneously with the working electrode 14a and the counter electrode 14b. That is, as described above, for example, a conductive paste containing carbon is applied onto the first conductive layer 37 by screen printing, so that the connection terminals 15a and 15b are formed simultaneously with the working electrode 14a and the counter electrode 14b. In this case, connection terminals 15a and 15b are formed on the first conductive layer 37 at positions corresponding to the other ends of the wiring portions 13a and 13b, respectively.

Insulating layer 16
The insulating layer 16 is made of a water-insoluble resist resin layer made of, for example, an acrylic oligomer, and is provided in a pattern so as to cover the pair of wiring portions 13a and 13b.

Reagent layer 18
The reagent layer 18 contains glucose oxidoreductase and can measure the concentration of glucose in blood. However, the reagent layer 18 may contain an enzyme other than glucose oxidase.

  The reagent layer 18 includes an enzyme and an electron acceptor. In this embodiment, the reagent layer 18 may include an enzyme other than glucose oxidase, for example, an enzyme that functions as a cholesterol sensor, an alcohol sensor, a scroll sensor, a lactate sensor, or a fructose sensor. Good. In this case, as the enzyme used for each sensor, those suitable for the reaction system such as cholesterol esterase, cholesterol oxidase, alcohol oxidase, lactate oxidase, fructose dehydrogenase, xanthine oxidase, and amino acid oxidase can be appropriately used.

Cavity 17 and cover 19
The cavity 17 and the cover 19 can be formed of the same material as that of the insulating substrate 12, and the thickness of the cavity 17 and the cover 19 is, for example, 100 μm or more and 300 μm or less and 50 μm or more and 100 μm or less, respectively.

  Next, with reference to FIG. 2 to FIG. 4, the stacking relationship between the wiring portions 13a and 13b and the conductive portions 20a and 20b will be described.

  Here, FIG. 2 is a plan view showing the wiring portions 13a and 13b and the conductive portions 20a and 20b (the working electrode 14a, the counter electrode 14b, and the connection terminals 15a and 15b) provided on the insulating base 12 in a simplified manner. 3 is a cross-sectional view taken along line AA in FIG. 2, and FIG. 4 is a cross-sectional view taken along line BB in FIG.

  As described above, the planar shapes of the wiring portions 13a and 13b are the same as the planar shapes of the conductive portions 20a and 20b provided on the wiring portions 13a and 13b. Therefore, the wiring parts 13a and 13b are entirely covered with the conductive parts 20a and 20b, respectively (FIGS. 3A and 4A).

  In addition, undercut portions 13c that are concave inward are formed on the periphery of the wiring portions 13a and 13b, respectively, and the ends of the wiring portions 13a and 13b enter inside the ends of the conductive portions 20a and 20b. It is good also as such a position (FIG.3 (b), FIG.4 (b)). In this case, the wiring portions 13a and 13b can be more reliably protected by the conductive portions 20a and 20b. Therefore, in this specification, the planar shape of each wiring part 13a, 13b is the same as the planar shape of the conductive parts 20a, 20b. The planar shape of each wiring part 13a, 13b is the plane of the conductive parts 20a, 20b. A case where the size is the same size as the shape or a case where the size is smaller than the planar shape of the conductive portions 20a and 20b but is similar is also included.

  Next, a method for manufacturing the concentration measuring sensor will be described with reference to FIGS.

  First, base materials 11 and 12 are prepared by bonding an insulating base material 12 on a base substrate 11 (FIG. 6A). In this case, when only the insulating substrate 12 has rigidity, the base substrate 11 is not necessarily used.

  In addition, when supplying the insulating base material 12 as a raw roll, it is preferable that the base substrate 11 and the insulating base material 12 are bonded together. This bonding is performed by a conductive layer 33 and an overcoat layer 34 described later. It is preferable to carry out after forming. The reason is that the number of turns of the insulating substrate 12 in the roll state can be increased, and the productivity can be improved.

  Next, as shown in FIG. 2, a first conductive layer 37 is formed on the insulating upper surface (insulating surface) 12a of the insulating substrate 12 (FIG. 6B). The first conductive layer 37 is preferably formed over substantially the entire top surface 12a.

  The first conductive layer 37 is made of a first conductive material constituting the pair of wiring portions 13a and 13b, and includes, for example, a metal material selected from Ag, Al, Fe, Ni, Cr, Ti, Ta, and Cu. Yes. The thickness of the first conductive layer 37 can be set to 50 nm, for example.

  In addition, as a method of providing the 1st conductive layer 37, vacuum film-forming methods, such as a vacuum evaporation method and sputtering method, can be mentioned, for example. Thus, when the vacuum film-forming method is used, the first conductive layer 37 can be formed as a thin film, and the material cost can be reduced. Moreover, the 1st conductive layer 37 can be formed at high speed with respect to the long insulating base material 12 drawn | fed out from a roll original fabric.

  Next, a second conductive layer 38 made of the second conductive material is formed in a pattern on the first conductive layer 37 (FIG. 6C). The second conductive layer 38 corresponds to the pair of conductive portions 20a and 20b described above, and includes the working electrode 14a and the counter electrode 14b, a pair of connection terminals 15a and 15b, and a pair of connection portions 22a and 22b. Yes. In this case, the working electrode 14a and the counter electrode 14b are formed on the first conductive layer 37 at a position corresponding to one end of the pair of wiring portions 13a and 13b, and correspond to the other end of the pair of wiring portions 13a and 13b. A pair of connection terminals 15a and 15b are formed at the positions to be operated.

  Specifically, for example, a conductive paste containing carbon (second conductive material) is prepared, and this conductive paste is applied onto the first conductive layer 37 by a screen printing method. Thus, the second conductive layer 38 (a pair of conductive portions 20a and 20b) having a predetermined shape is formed. In addition, the thickness of the 2nd conductive layer 38 can be 10 micrometers, for example.

  Next, the first conductive layer 37 is selectively etched using the second conductive layer 38 as an etching mask. Thereby, the second conductive layer 38 is hardly dissolved and only the first conductive layer 37 is dissolved, and the first conductive layer 37 is patterned into the same shape as the second conductive layer 38. Etching may use a wet etching method or a dry etching method. For example, when the first conductive layer 37 is made of Ag and the second conductive layer 38 is made of carbon, a wet etching method using an etching solution made of a mixed acid of phosphoric acid and oxalic acid can be used. In addition, by using an isotropic etchant, it is possible to form undercut portions 13c that are concave inward toward the periphery of the wiring portions 13a and 13b (FIGS. 3B and 4B). )reference).

  The first conductive layer 37 thus patterned forms a pair of wiring portions 13a and 13b. In addition, the second conductive layer 38 provided on the first conductive layer 37 allows a pair of conductive portions 20a and 20b (a working electrode 14a, a counter electrode 14b, a pair of connection portions 22a and 22b, and a pair of connection terminals 15a and 15b). ) Is formed (FIG. 6D).

  Thereafter, the insulating layer 16 is formed in a pattern covering the pair of conductive portions 20a and 20b. In this case, the working electrode 14a, the counter electrode 14b, and the pair of connection terminals 15a and 15b are exposed to the outside without being covered with the insulating layer 16.

  Next, a cavity 17 is provided on the insulating layer 16, and a reagent layer 18 is provided on the cavity 17. Thereafter, a cover 19 is provided on the reagent layer 18 and the reagent layer 18 is sandwiched between the cavity 17 and the cover 19.

  In this way, the concentration measuring sensor 10 is obtained.

  Next, concentration measurement using the concentration measurement sensor 10 will be described.

  First, the concentration measuring sensor 10 is inserted into the insertion port 26 of the external device 25. At this time, the connection portion on the external device 25 side comes into contact with the connection terminals 15a and 15b of the concentration measurement sensor 10, respectively. Then, a switch (not shown) in the external device 25 is activated by the concentration measurement sensor 10, and the external device 25 enters a liquid sample suction standby state.

  Thereafter, the user attaches a liquid sample to the suction port 17 a of the cavity 17 of the concentration measurement sensor 10. At this time, the liquid sample is drawn from the suction port 17 a of the cavity 17 by capillary action of the suction port 17 a of the cavity 17. As the liquid sample, for example, a liquid sample derived from a living body such as blood, sweat or urine, a liquid sample derived from the environment, a liquid sample derived from food, or the like is used. For example, when the concentration measurement sensor 10 is used as a blood glucose level sensor, the user punctures his / her finger, palm, arm or the like to squeeze out a small amount of blood, and use this blood as a liquid sample to suck the suction port of the cavity 17 It adheres to 17a.

  The blood adhering to the suction port 17a of the cavity 17 then reaches the reagent layer 18, and after the blood reaches the reagent layer 18, the concentration of glucose in the blood is measured by the external device 25, and the measurement result is obtained from the external device 25. It is displayed on the display unit 27.

  Next, the principle of measuring the glucose concentration by the external device 25 will be described.

  First, the reagent layer 18 contains glycose oxidoreductase and potassium ferricyanide as an electron acceptor, specifically reacts with glucose in blood, and emits gluconic acid and electrons. This electron turns potassium ferricyanide into potassium ferrocyanide. By applying a certain voltage from the external device 25 side through the connection terminals 15a and 15b, the wiring portions 13a and 13b, the working electrode 14a, and the counter electrode 14b, potassium ferricyanide is added again. Then, current is generated. Since the current value in this case is proportional to the glucose concentration in the blood, the glucose value can be measured by measuring this current value with the external device 25.

The reaction in the reagent layer 18 will be further described. When glucose oxidase (GOD) is used as the oxidoreductase and potassium ferricyanide (K ₃ Fe (CN) ₆ ) is used as the electron carrier, the following reaction occurs in the reagent layer 18.

Glucose +2 [Fe (CN) ₆ ] ³⁻ + H ₂ O → Gluconic acid + 2H ⁺ +2 [Fe (CN) ₆ ] ⁴⁻

  At this time, the ferrocyanide ions are oxidized at the working electrode 14a to generate an oxidation current, and are reduced to ferricyanide ions as follows.

^{_{2 [Fe (CN) 6]}} 4- → 2 [Fe (CN) 6] 3- + 2e -

  After the measurement is completed, the user pulls out the concentration measurement sensor 10 from the insertion port 26 of the external device 25.

  As described above, according to the present embodiment, when the concentration measurement sensor 10 is manufactured, the first conductive layer 37 is etched by using the second conductive layer 38 as an etching mask. A pair of wiring portions 13a and 13b is formed, and the working electrode 14a, the counter electrode 14b, and the pair of connection terminals 15a and 15b are formed by the second conductive layer 38. Therefore, a pair of wiring portions 13a and 13b made of a first conductive material (for example, Ag), a working electrode 14a, a counter electrode 14b, and a pair of connection terminals 15a and 15b made of a second conductive material (for example, carbon) It is not necessary to pattern the pattern separately, the work process can be reduced, and the tact time can be shortened. Thereby, the manufacturing cost of the concentration measurement sensor 10 can be reduced.

  Further, according to the present embodiment, the planar shape of each wiring portion 13a, 13b is the same as the planar shape of the conductive portions 20a, 20b provided on the wiring portions 13a, 13b, and the outside of the wiring portions 13a, 13b. The exposed surface area is reduced. As a result, the entire areas of the wiring portions 13a and 13b are covered with the conductive portions 20a and 20b, thereby protecting the wiring portions 13a and 13b and preventing the wiring portions 13a and 13b from being oxidized.

DESCRIPTION OF SYMBOLS 10 Concentration measurement sensor 11 Base base body 12 Insulating base material 13a, 13b Wiring part 14 Electrode system 14a Working electrode 14b Counter electrode 15a, 15b Connection terminal 16 Insulating layer 17 Cavity 18 Reagent layer 19 Cover 20a, 20b Conductive part 22a, 22b Connection Part 25 External device 26 Insertion slot 27 Display part 37 First conductive layer 38 Second conductive layer

Claims (9)

A concentration measuring sensor for measuring the concentration of a substance in a solution, wherein at least one surface is an insulating surface having an insulating property, and a first conductive material provided on the insulating surface of the substrate A working electrode connected to one end of one wiring part, a counter electrode connected to one end of the other wiring part, and a pair of connection terminals connected to the other end of each wiring part In a method for manufacturing a concentration measuring sensor, comprising:
Preparing a substrate;
Forming a first conductive layer made of a first conductive material on the insulating surface of the substrate;
Forming a second conductive layer made of a second conductive material different from the first conductive material in a pattern on the first conductive layer;
By etching the first conductive layer using the second conductive layer as an etching mask, a pair of wiring portions are formed by the patterned first conductive layer, and the working electrode, the counter electrode, and the pair of connection terminals are formed by the second conductive layer. And a step of forming the concentration measuring sensor.   After the step of forming the working electrode, the counter electrode, the pair of wiring portions, and the pair of connection terminals, the second conductive layer formed in a pattern is exposed to the outside. The method for producing a concentration measuring sensor according to claim 1, further comprising a step of providing an insulating layer covered with.   The method of manufacturing a concentration measuring sensor according to claim 1, wherein the first conductive layer is formed by a vacuum film forming method.   4. The concentration measuring sensor according to claim 1, wherein the first conductive layer includes at least one selected from Ag, Al, Fe, Ni, Cr, Ti, Ta, and Cu. 5. Manufacturing method.   The method of manufacturing a concentration measuring sensor according to claim 1, wherein the second conductive layer contains carbon. In a concentration measurement sensor for measuring the concentration of a substance in a solution,
A base material on which at least one surface is an insulating surface having an insulating property;
A pair of wiring parts made of a first conductive material provided on the insulating surface of the substrate;
A pair of conductive parts provided on each wiring part and made of a second conductive material different from the first conductive material;
One conductive part includes a working electrode connected to one end of one wiring part, and a connection terminal connected to the other end of one wiring part,
The other conductive part includes a counter electrode connected to one end of the other wiring part, and a connection terminal connected to the other end of the other wiring part,
A concentration measurement sensor, wherein the planar shape of each wiring portion is the same as the planar shape of a conductive portion provided on the wiring portion.   7. The concentration measurement according to claim 6, wherein an insulating layer is provided on the pair of conductive portions so as to cover the pair of conductive portions with the working electrode, the counter electrode, and the pair of connection terminals exposed to the outside. Sensor.   The concentration measurement sensor according to claim 6 or 7, wherein the metal material of each wiring part includes at least one selected from Ag, Al, Fe, Ni, Cr, Ti, Ta, and Cu.   The concentration measuring sensor according to claim 6, wherein the conductive portion contains carbon.

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