JP2013177819A - Metering pump, liquid determination apparatus, and fluid purifying apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a metering pump for stably suppressing a chronological reduction of a discharging amount of liquid over a long period of time when carrying a fixed amount of liquid containing many floating substances.SOLUTION: A feeding liquid vibration part 30 is provided which includes a communicating chamber 31 in communication with a feeding check valve 10 of a metering pump, and an ultrasonic wave vibration unit 32 arranged inside the communicating chamber 31. Thus, by driving the ultrasonic wave vibration unit 32, ultrasonic wave vibration is applied to liquid inside the feeding check valve 10. Further, a discharging liquid vibration part 40 is provided which includes a communicating chamber 41 in communication with a discharging check valve 20 of a metering pump, and an ultrasonic wave vibration unit 42 arranged inside the communicating chamber 41. Thus, by driving the ultrasonic wave vibration unit 42, the ultrasonic wave vibration is applied to the liquid inside the discharging check valve 20.

Description

  The present invention relates to a metering pump that discharges while quantifying a liquid by changing the volume of a liquid storage chamber, and a liquid metering device and a liquid purification device using the metering pump.

  As this type of metering pump, a plunger pump, a diaphragm pump, and the like are known. In any metering pump, the liquid is taken into the liquid storage chamber and discharged while being metered. The volume of the liquid storage chamber is increased or decreased by the volume changing means. For example, in the plunger pump, the volume of the liquid storage chamber is increased or decreased as the piston as the volume changing means is reciprocated in the liquid storage chamber. Further, in the diaphragm pump, the volume of the liquid storage chamber is increased or decreased as the diaphragm, which functions as a volume change means that functions as a side wall of the liquid storage chamber, reciprocates. The liquid storage chambers of these metering pumps are connected to a feed pipe for feeding liquid to the liquid storage chamber and a discharge pipe for discharging liquid from the liquid storage chamber. The feed pipe is connected with a feed check valve that allows only the flow of the liquid contained in the feed pipe in the feed direction and prevents the flow in the reverse direction. The discharge pipe is connected with a discharge check valve that allows only the flow of the liquid contained in the discharge pipe in the discharge direction and blocks the flow in the reverse direction.

  The liquid is discharged from the liquid storage chamber as follows. That is, when the piston or the diaphragm moves in the direction of increasing the volume of the liquid storage chamber, the liquid in the supply pipe is prevented from flowing back from the discharge pipe into the liquid storage chamber by the discharge check valve. Is taken into the liquid storage chamber. At this time, the operation of the piston or diaphragm is stopped by a preset operation amount, so that the volume of the liquid storage chamber becomes a predetermined size, and a predetermined amount of liquid is taken into the liquid storage chamber. Thereby, the liquid is quantified. Thereafter, when the piston or the diaphragm moves in the direction of decreasing the volume of the liquid storage chamber, the liquid in the liquid storage chamber is prevented from flowing back from the liquid storage chamber to the supply pipe by the check valve for supply. Is discharged into the discharge pipe. In this way, a certain amount of liquid is discharged from the liquid storage chamber per unit time.

  In the metering pump having such a configuration, when used for transporting liquids containing a large amount of suspended solids, such as domestic wastewater, factory wastewater, and livestock manure, the amount of liquid discharged per unit time decreases over time. It is easy to cause. Specifically, the feed check valve and the discharge check valve of the metering pump are configured to flow in a normal direction while passing the liquid through the through hole of the valve seat. When the liquid tries to flow backward, the valve member such as a ball valve is pressed against the valve seat by utilizing the movement, thereby blocking the through-hole of the valve seat and preventing the liquid from flowing backward. If a liquid containing a large amount of suspended solids flows in the feed check valve or discharge check valve for a long period of time, the suspended matter adheres to the surface of the valve member or valve seat to form a small lump. To go. When the small mass is interposed between the valve member pressed against the valve seat by the liquid to be backflowed and the valve seat, a minute gap is formed between the valve member and the valve seat, and the liquid passes through the gap. Will come back. When a lump of floating material is formed on the surface of the valve member or valve seat of the check valve for feeding, a part of the liquid is fed from the liquid storage chamber when the liquid is discharged from the liquid storage chamber. As a result, the amount of liquid discharged to the discharge pipe decreases. In addition, when a small mass of floating material is formed on the surface of the valve member or valve seat of the discharge check valve, the liquid in the discharge pipe is stored when the liquid is taken into the liquid storage chamber from the supply pipe. Back into the room. As a result of reducing the amount of liquid taken into the liquid storage chamber from the supply pipe by the amount of the reverse flow, the amount of liquid discharged from the liquid storage chamber per unit time decreases.

  If it is a plunger pump of patent document 1, it will be thought that the growth of the small lump of the suspended | floating matter on the surface of a valve member or a valve seat can be prevented. This plunger pump is provided with valve seat rotating means for rotating the valve seat. Even if a small lump of suspended solid adheres to the surface of the valve member or valve seat, the valve seat rotates between the valve member and the valve seat while the valve member is pressed toward the valve seat. The small blob can be broken by rubbing it strongly against the surface. By periodically driving the valve seat, it is possible to periodically break up the nodule of suspended solids, so that it seems that the growth of the nodule can be prevented.

  However, in this plunger pump, the surface of the valve member or valve member is damaged by the lump as the small amount of floating substance is strongly rubbed against the surface of the valve member or valve seat, and a minute groove is formed on the surface. Resulting in. Then, since the liquid flows back through the groove, it seems that the temporal decrease in the discharge amount of the liquid cannot be stably suppressed over a long period of time.

  The present invention has been made in view of the above background, and the object of the present invention is to reduce the discharge amount of the liquid over time over a long period of time when the liquid containing a large amount of suspended matter is quantitatively conveyed. A metering pump or the like that can be stably suppressed is provided.

  In order to achieve the above object, the present invention provides a liquid storage chamber for taking in liquid for quantitative determination, volume changing means for changing the volume of the liquid storage chamber, and feeding the liquid into the liquid storage chamber. For this purpose, a supply pipe connected to the liquid storage chamber and a flow from the supply pipe side to the liquid storage chamber side of the liquid stored in the supply pipe connected to the supply pipe. A feed check valve that prevents flow from the liquid storage chamber side to the feed pipe side while allowing, and is connected to the liquid storage chamber for discharging liquid from the liquid storage chamber. The discharge pipe and the liquid accommodated from the discharge pipe side while permitting the flow of the liquid contained in the discharge pipe from the liquid storage chamber side to the discharge pipe side while being connected to the discharge pipe. A discharge check valve for blocking the flow toward the chamber, and by the volume changing means As the volume of the liquid storage chamber is increased, the liquid in the supply pipe is fed into the liquid storage chamber, while the volume of the liquid storage chamber is decreased by the volume changing means. Accordingly, in the metering pump that discharges the liquid in the liquid storage chamber to the discharge pipe, in order to vibrate the liquid in the check valve for feeding, in the vicinity of the check valve for feeding. At least one of the provided liquid supply vibration means and the discharge liquid vibration means provided in the vicinity of the discharge check valve to vibrate the liquid in the discharge check valve One of the features is that one is provided.

  In the present invention, the feeding liquid vibration means vibrates the liquid in the feeding check valve, so that the floating substance contained in the liquid is removed from the valve seat and valve member of the feeding check valve. Before the floating substance that has been made difficult to adhere to the surface or has adhered to the surface of the valve seat or the valve member is grown to a small mass, it is dropped from the surface by vibration. For this reason, since it becomes possible to prevent the growth of a small lump on the surface of the valve seat or the valve member without causing scratches on the surface of the valve seat or the valve member due to strong rubbing of the small mass of the suspended matter. In addition, the occurrence of back flow of liquid in the check valve for feeding is stably suppressed over a long period of time. Alternatively, the discharge liquid oscillating means vibrates the liquid in the discharge check valve so that the occurrence of the back flow of liquid in the discharge liquid check valve is stably suppressed over a long period of time. As described above, by preventing at least one of the supply liquid vibration means and the discharge liquid vibration means from growing small lumps on the surface of the valve seat or the valve member, Can be stably suppressed over a long period of time.

The lineblock diagram showing the pump part of the metering pump of the liquid metering device concerning an embodiment. The front view which shows the ultrasonic vibration unit of the pump part. The perspective view which shows the ultrasonic transducer | vibrator accommodated in the ultrasonic vibration unit. The schematic block diagram which shows a discharge experiment apparatus. The graph which shows the relationship between the machine setting flow volume and discharge amount at the time of driving | operating a metering pump on the conditions which always stop the supply liquid vibration part and the discharge liquid vibration part. The graph which shows the relationship between continuous operation time and discharge amount at the time of driving | operating a metering pump on the conditions which always stop the supply liquid vibration part and the discharge liquid vibration part. The graph which shows the relationship between the machine setting flow volume and discharge amount at the time of driving | operating a metering pump on the conditions which drive a supply liquid vibration part and a discharge liquid vibration part. The graph which shows the relationship between continuous operation time and discharge amount at the time of driving | operating a metering pump on the conditions which drive a feed liquid vibration part and a discharge liquid vibration part. The schematic block diagram which shows the fluid purification apparatus which concerns on embodiment.

Hereinafter, an embodiment of a liquid metering apparatus to which the present invention is applied will be described.
First, the basic configuration of the liquid quantitative device according to the embodiment will be described. Drawing 1 is a lineblock diagram showing the pump part in the plunger pump of the liquid metering device concerning an embodiment. In the figure, the pump portion of the plunger pump includes a liquid storage chamber 1 for quantifying the liquid, a cylinder 2, a piston 3 as a volume changing means, a feed pipe 4, a discharge pipe 5, a feed check valve 10, It has a discharge check valve 20, a feed liquid vibration part 30, a discharge liquid vibration part 40, a liquid storage chamber vibrator 50, and the like.

  The cylinder 2 for quantifying the liquid has a tubular shape, and a cylindrical piston 3 is accommodated therein. The internal space of the cylinder 1 functions as a part of the liquid storage chamber 1. The piston 3 is reciprocated along the longitudinal direction of the cylinder 1 by a well-known drive mechanism (not shown) as indicated by arrows D ′ and D ″ in the drawing. The volume of the chamber 1 is increased or decreased, specifically, when the piston 3 is moved in the direction of the arrow D ′ in the figure by the drive mechanism, the volume of the liquid storage chamber 1 is increased, and the suction force due to the negative pressure is accordingly increased. In addition, when the piston 3 is moved in the direction of arrow D "in the drawing by the driving mechanism, the volume of the liquid storage chamber 1 is reduced, and accordingly, the discharge force due to the positive pressure is generated in the liquid storage chamber 1. Occur.

  One end of the feed pipe 4 for feeding the liquid into the liquid storage chamber 1 is connected to a liquid storage tank (not shown). Further, the liquid that has been sent into the feed pipe 4 from the upstream side in the feed direction, the other end of which is connected to the liquid storage chamber 1 in the figure, flows in the direction of the arrow E through the feed pipe 4.

  A region in the vicinity of the connection portion with the liquid storage chamber 1 in the feeding pipe 4 contains a feeding check valve 10. The feeding check valve 10 has a feeding chamber 11 in which a ball valve 12 is housed. The feeding chamber 11 includes a valve seat 13 at the upstream end in the liquid feeding direction. Moreover, the valve stop net | network 14 is comprised in the downstream edge part of the liquid feeding direction. The feeding chamber 11 communicates with the liquid storage chamber 1 through the valve stop network 14.

  When the piston 3 in the cylinder 2 moves in the direction of the arrow D ′ and a suction force is generated in the liquid storage chamber 1, the suction force is transmitted to the feeding chamber 11. Then, the ball valve 12 in the feeding chamber 11 is sucked toward the liquid storage chamber 1 and separated from the valve seat 13. As a result, the liquid existing on the upstream side of the feeding chamber 11 sequentially passes through the through-hole of the valve seat 13 and the valve stop network 14 and is taken into the liquid storage chamber 1.

  A region in the vicinity of the connection portion between the discharge pipe 5 and the liquid storage chamber 1 contains a discharge check valve 20. The discharge check valve 20 has a discharge chamber 21 in which a ball valve 22 is accommodated. The discharge chamber 21 includes a valve seat 23 at the upstream end in the liquid discharge direction. Moreover, the valve stop net | network 24 is comprised in the downstream edge part of the liquid discharge direction. The discharge chamber 21 communicates with the liquid storage chamber 1 through the through hole of the valve seat 23.

  When the piston 3 in the cylinder 2 moves in the direction of the arrow D ′ and a suction force is generated in the liquid storage chamber 1, the ball valve 22 is pressed against the valve seat 23 in the discharge liquid check valve 20. Then, the through hole of the valve seat 23 is closed. Thereby, the backflow of the liquid from the liquid storage chamber 1 to the discharge pipe 5 is prevented.

  On the other hand, when the piston 3 in the cylinder 2 moves in the direction of the arrow D ″ and discharge force is generated in the liquid storage chamber 1, the ball valve 12 is pressed against the valve seat 13 in the feed liquid check valve 10. Thus, the through hole of the valve seat 13 is closed, whereby the back flow of liquid from the liquid storage chamber 1 to the feed pipe 4 is prevented.

  Further, when the piston 3 in the cylinder 2 moves in the direction of the arrow D ″ and a discharge force is generated in the liquid storage chamber 1, the discharge force is transmitted to the first discharge chamber 21 of the discharge check valve 20. The ball valve 22 in the first discharge chamber 21 is pushed away from the valve seat 23 in the discharge direction. Thus, with the through hole of the valve seat 23 being opened, the piston 3 is further moved to the arrow D ". When moving in the direction, the liquid in the liquid storage chamber 1 sequentially passes through the through hole of the valve seat 23, the inside of the discharge chamber 21, and the valve stop net 24 and is discharged from the discharge check valve 20. .

  Next, a characteristic configuration of the liquid quantitative device according to the embodiment will be described. A feed liquid vibrating section 30 is connected to the outer wall of the feed pipe 4. The feed liquid vibrating unit 30 includes a communication chamber 31 that communicates with the feed chamber 11 of the feed check valve 10 and an ultrasonic transducer unit 32 that is accommodated in the communication chamber. A valve stop net 33 is provided at a communication port connecting the feeding chamber 11 and the communication chamber 31. This prevents the ball valve 12 from entering the communication chamber 31.

  In the communication chamber 31, the liquid which has moved from the inside of the feeding chamber 11 is accommodated, and the ultrasonic transducer unit 32 is immersed in the liquid. When the ultrasonic transducer unit 32 is driven, the liquid in the communication chamber 31 is vibrated ultrasonically, and the ultrasonic vibration propagates to the liquid in the feeding chamber 11.

  FIG. 2 is a perspective view showing the ultrasonic transducer unit 32 of the liquid feeding vibration section (30). The ultrasonic transducer unit 32 houses a plurality of ultrasonic transducers 32b in a box-shaped metal housing 32a. As for the some ultrasonic transducer | vibrator 32b, the ultrasonic radiation surface is adhere | attached on the inner wall of the metal housing 32a, respectively. And the ultrasonic transducer | vibrator unit 32 is the attitude | position which orient | assigns the ultrasonic radiation surface of these ultrasonic transducer | vibrators 32b to the check valve (30) for a feed, and the communication chamber (31) of a feed liquid vibration part (30). It is fixed inside.

  FIG. 3 is an enlarged perspective view showing the ultrasonic transducer 32b of the ultrasonic vibration unit (32). The ultrasonic transducer 32 includes a first piezoelectric ceramic element 32c, a second piezoelectric ceramic element 32d, an ultrasonic radiation metal body 32e, a pressing metal body 32f, a hex nut 32g, and the like.

  The metal body 32e for ultrasonic emission emits ultrasonic waves by its own ultrasonic vibration, and includes a bolt part 32e-1 protruding from its upper surface. On the other hand, each of the first piezoelectric ceramic element 32c, the second piezoelectric ceramic element 32d, and the pressing metal body 32f includes a through-hole for allowing the bolt part 32e-1 to pass therethrough. Then, the first piezoelectric ceramic element 32c, the second piezoelectric ceramic element 32d, and the pressing metal body 32f are passed through the bolt part 32e-1 in this order, and the ultrasonic radiation metal body 32e is formed by the hexagon nut 32g. It is tightened.

  Each of the first piezoelectric ceramic element 32c and the second piezoelectric ceramic element 32d includes an electrode plate (32c-1, 32d-1), and an electric signal from an ultrasonic oscillator (not shown) is applied to the electrode plate. When applied, it vibrates ultrasonically. This ultrasonic vibration propagates to the ultrasonic radiation metal body 32e and then propagates to the liquid through the metal housing (32a).

  In FIG. 1, the discharge liquid vibrating section 40 includes a communication chamber 41 that communicates with the discharge chamber 21 of the discharge check valve 20, and an ultrasonic transducer unit 42 that is accommodated in the communication chamber 41. A valve stop network 43 is provided at a communication port that allows the discharge chamber 21 and the communication chamber 41 to communicate with each other. This prevents the ball valve 22 from entering the communication chamber 41.

  The communication chamber 41 contains the liquid that has moved from the discharge chamber 21, and the ultrasonic transducer unit 42 is immersed in the liquid. When the ultrasonic transducer unit 42 is driven, the liquid in the communication chamber 41 is vibrated ultrasonically, and the ultrasonic vibration propagates to the liquid in the discharge chamber 21. The configuration of the ultrasonic vibration unit 42 of the discharge liquid vibration unit 40 is the same as the configuration of the ultrasonic vibration unit 32 of the feed liquid vibration unit 30, and thus description thereof is omitted.

  The ultrasonic vibration unit 32 of the feed liquid vibrating unit 30 ultrasonically vibrates the liquid in the feed chamber 11 of the feed check valve 10 to feed floating substances contained in the liquid. It is made difficult to adhere to the surfaces of the ball valve 12 and the valve seat 13 of the check valve 10, and the suspended matter that has adhered to those surfaces is dropped from those surfaces by vibration before growing up to a small mass. For this reason, since no small lump of suspended solids is rubbed against these surfaces, the surface of the ball valve 12 or the valve seat 13 is not damaged by rubbing the small lump. In this way, by preventing the growth of a small lump on the surface of the ball valve 12 and the valve seat 13 without damaging the surface, the backflow of the liquid in the check valve for feeding 10 can be generated for a long period of time. It can be kept stable across.

  The ultrasonic vibration unit 42 of the discharge liquid vibration unit 40 ultrasonically vibrates the liquid in the discharge chamber 21 of the discharge check valve 20, thereby removing floating substances contained in the liquid from the discharge check valve 20. It is made difficult to adhere to the surfaces of the ball valve 22 and the valve seat 23, or suspended substances that have adhered to the surfaces of the ball valve 22 and the valve seat 23 are removed from the surfaces by vibration before growing to a small mass. For this reason, since no small lump of suspended solids is rubbed strongly against those surfaces, the surface of the ball valve 22 or the valve seat 23 due to rubbing of the small lump does not occur. In this way, by preventing the growth of a small lump on the surface of the ball valve 22 and the valve seat 23 without damaging the surface, the backflow of the liquid in the discharge check valve 20 is generated for a long period of time. Can be suppressed stably.

  The liquid quantifying apparatus according to the embodiment includes a drive control circuit (control means) (not shown) for driving the ultrasonic vibrator 32b of the feed liquid vibrating section 30 of the metering pump and the ultrasonic vibrator 42b of the discharge liquid vibrating section 40. )have. Further, not shown for detecting whether the piston 3 is moving in the direction of the arrow D ′, moving in the direction of the arrow D ″, or stopped by a known optical detection means or the like. Piston movement detection means is also included.

  When the movement of the piston 3 in the direction of the arrow D ′ is detected by the piston movement detection means or when the stop of the piston 3 is detected, the drive control circuit detects the ultrasonic vibrator 42b of the discharge liquid vibrating section 40. The process of stopping the driving of is performed. When the movement of the piston 3 in the direction of the arrow D ′ is detected, the volume of the liquid storage chamber 1 is increased so that the ball valve 22 of the discharge check valve 20 is pressed against the valve seat 23. At this time, a small mass of suspended matter dropped off from the surface of the ball valve 22 or the valve seat 23 by the ultrasonic vibration of the liquid before the pressing may be accidentally sandwiched between the ball valve 22 and the valve seat 23. There is sex. If the liquid is vibrated ultrasonically in this state, the surface of the ball valve 22 or the valve seat 23 may be damaged due to a small vibration of a small lump between the ball valve 22 and the valve seat 23. Therefore, in order to detect the movement of the piston 3 in the direction of the arrow D ', the driving of the ultrasonic vibrator 42b of the discharge liquid vibrating section 40 is stopped. Further, since the ball valve 22 may be pressed against the valve seat 23 even when the piston 3 is stopped, the driving of the ultrasonic vibrator 42b of the discharge liquid vibrating section 40 is stopped. This prevents the ball valve and the valve seat from being damaged by driving the ultrasonic vibrator 42b in a state where a small mass is accidentally sandwiched between the ball valve 22 and the valve seat 23 of the discharge check valve 20. can do.

  Further, the drive control circuit performs a process of driving the ultrasonic transducer 32b of the supply liquid drive unit 30 when the movement of the piston 3 in the direction of the arrow D 'is detected by the piston movement detection unit. When the movement of the piston 3 in the direction of the arrow D ′ is detected, the feeding check valve 10 is fed by feeding the liquid from the feeding pipe 4 to the liquid containing chamber 1 as the volume of the liquid containing chamber 1 increases. The ball valve 12 is separated from the valve seat 13. In this state, the ultrasonic transducer 32b is driven to ultrasonically vibrate the liquid in the check valve 10 for feeding, thereby suppressing floating substances from adhering to the surfaces of the ball valve 12 and the valve seat 13, or the like. It is possible to prevent the blob from falling on the surface and prevent the blob from growing on the surface.

  On the other hand, when the movement of the piston 3 in the direction of the arrow D "is detected by the piston movement detection means, or when the stop of the piston 3 is detected, the drive control circuit detects the ultrasonic wave of the liquid feeding vibration unit 30. A process for stopping the driving of the vibrator 32b is performed, and when the movement of the piston 3 in the direction of the arrow D 'is detected, the pressure check valve 10 for feeding is increased due to an increase in pressure accompanying a decrease in the volume of the liquid storage chamber 1. The ball valve 12 is pressed against the valve seat 13. At this time, the small mass of suspended solids dropped from the surface of the ball valve 12 and the valve seat 13 by the ultrasonic vibration of the liquid before pressing, There is a possibility that the liquid is accidentally sandwiched between the ball valve 12 and the valve seat 13. When the liquid is vibrated ultrasonically in this state, the ball is caused by a small vibration of the small block between the ball valve 12 and the valve seat 13. Valve 12 and valve seat 13 Therefore, when the movement of the piston 3 in the direction of arrow D "is detected, the driving of the ultrasonic vibrator 32b of the liquid feeding vibration unit 30 is stopped. Further, since the ball valve 12 may be pressed against the valve seat 13 even when the piston 3 is stopped, the driving of the ultrasonic vibrator 32b of the liquid feeding vibration unit 30 is stopped. Thereby, the ball valve or the valve seat is damaged by driving the ultrasonic vibrator 32b in a state where a small lump is accidentally sandwiched between the ball valve 12 and the valve seat 13 of the check valve 10 for feeding. Can be prevented.

  In addition, when the movement of the piston 3 in the direction of arrow D "is detected by the piston movement detection means, the drive control circuit performs a process of driving the ultrasonic transducer 42b of the discharge liquid drive unit 40. When the movement in the direction of arrow D "is detected, the ball valve 22 of the discharge check valve 20 is moved by the discharge of the liquid from the liquid storage chamber 1 to the discharge pipe 5 due to the decrease in the volume of the liquid storage chamber 1. It is in a state of being separated from the valve seat 23. In this state, the ultrasonic vibrator 42 b is driven to ultrasonically vibrate the liquid in the discharge check valve 20, thereby preventing floating substances from sticking to the surfaces of the ball valve 22 and the valve seat 23. The lumps are prevented from falling off from the surface, and the growth of the lumps on the surfaces can be prevented.

  The liquid storage chamber vibrator 50 vibrates the cylinder 2 by vibrating while being fixed to the outer wall of the cylinder 2. By transmitting this vibration to the liquid in the cylinder 2 and the piston 3, the occurrence of sticking of floating substances to the inner wall surface of the cylinder 2 and the piston 3 is suppressed.

  Although an example of a metering pump using a ball valve as a valve member has been described, the present invention can also be applied to a metering pump using a valve member of another type such as a check valve. Further, although an example of a metering pump using a piston as the volume changing means has been described, the present invention can be applied to a metering pump using other types of volume changing means such as a diaphragm.

Next, experiments conducted by the present inventors will be described.
[First experiment]
The inventors prepared an experimental apparatus as shown in FIG. In this experimental device, the raw water tank 82 stores experimental wastewater experimentally produced by the present inventors. The raw water tank 82 is placed on the main body frame of the stirrer 81. In the raw water tank 82, a stirrer 81a of a stirrer 81 is put. The agitator 81 rotates the stirrer 81a sucked by the magnet through the bottom wall of the raw water tank 82 in the experimental waste water by rotating the magnet in the main frame. By this rotation, the experimental wastewater is agitated and the suspended matter in the experimental wastewater is evenly dispersed.

  The metering pump 70 of the experimental apparatus in the figure has the same configuration as the metering pump of the liquid metering apparatus according to the embodiment. The inlet side end of the feed pipe of the metering pump 70 is immersed in the experimental waste water so that the experimental waste water in the raw water tank 82 can be sucked.

  A main pipe 86 is connected to the discharge pipe of the metering pump 70, and the main pipe 86 is divided into a main pipe body and a priming pipe on the way. A suction device 89 is connected to the priming pipe through a gate valve 88. A back pressure valve 84 is connected to the main pipe body. The pressure of the experimental wastewater in the main pipe is measured by a pressure gauge 85.

  The priming water pipe is for priming the experimental wastewater in the raw water tank 82 into the metering pump 70 in a state where the experimental wastewater is not sucked into the metering pump 70. When priming water, the gate valve 88 is opened, and then the suction device 89 is driven to feed the raw water tank through the priming pipe, the gate valve 88, the main pipe 86, the metering pump 70, and the raw water suction pipe 83. Aspirate the experimental wastewater in 82. When the experimental waste water reaches the suction device 89, the suction device 89 is stopped and the gate valve 88 is closed. By performing priming water in the metering pump 70 in this way, the metering pump 70 can suck the experimental wastewater in the raw water tank 82.

  The back pressure valve 84 is for applying a certain amount of pressure to the experimental wastewater in the main pipe 86, and the experiment in the main pipe 86 is performed only when the pressure of the experimental wastewater in the main pipe 86 exceeds a predetermined set pressure. Waste water is discharged toward the graduated cylinder 87. The set pressure can be adjusted by operating the back pressure adjusting screw of the back pressure valve 84.

As experimental wastewater, water in which organic fine particles having a density of 1.6 g / cm ³ and an average particle diameter of 10 μm were dispersed at a rate of 20 g per 1000 g of water was used. The pressure in the discharge pipe by the back pressure valve 84 was set to 10 MPa.

  First, the mechanical setting of the discharge flow rate of the metering pump 70 was set to 2 [L (liter) / min]. The machine setting of the discharge flow rate (hereinafter referred to as the machine set flow rate) specifically means that the stroke length of the piston (3) of the metering pump 70 is mechanically set. The stroke length adjustment dial mounted on the metering pump 70 for mechanically setting the stroke length is provided with a scale for indicating an approximate discharge flow rate. The stroke length was adjusted to the position of the scale of 2 [L / min].

  Under the conditions of this setting, the above-described priming was performed in a state where the feeding liquid vibration part (30) and the discharge liquid vibration part (40) of the metering pump 70 were always stopped. Immediately thereafter, the metering pump 70 was driven to start discharging experimental wastewater from the metering pump 70 to the main pipe 86. Thereafter, the time when the experimental wastewater began to be discharged from the back pressure valve 84 toward the graduated cylinder 87 was taken as the operation start time.

  The amount of experimental waste water discharged to the graduated cylinder 87 from one minute after the start of operation was measured by the scale of the graduated cylinder 87. And the result was made into the discharge amount per minute. The same experiment was performed under the conditions of machine setting = 4, 6, 8, 10 [L / min], respectively. FIG. 5 shows the relationship between the machine set flow rate obtained by this experiment and the actual discharge amount. As shown in the figure, it was found that the discharge amount was approximately 0.62 times the machine set flow rate. Compared with the set flow rate described, the actual discharge amount was considerably lower.

  Next, the present inventors conducted an experiment in which the metering pump 70 was continuously operated for 121 minutes under the conditions where the machine set flow rate was 2, 4, 6, 8, 10 L / min. Then, at 0, 20, 40, 60, 80, 100, 120 minutes after the start of operation, the experimental waste water discharged from the metering pump 70 by 1 minute after that time is received by the measuring cylinder 87, The discharge amount in 1 minute was measured. In this experiment, the relationship between the continuous operation time and the discharge amount is shown in FIG. In this graph, the measurement results of the discharge amount are plotted at the time points of 0, 20, 40, 60, 80, 100, and 120 minutes. The discharge amount from 1 to 1 minute later.

  As shown in the graph of FIG. 6, regardless of the value of the machine set flow rate, the discharge amount decreased with time and eventually the discharge amount became zero. This is because the check valve of the metering pump 70 is clogged.

  Next, the present inventors conducted a similar experiment under the condition that the feeding liquid vibrating section (30) and the discharged liquid vibrating section (40) of the metering pump 70 are driven in the same manner as the liquid metering apparatus according to the embodiment. It was. In this experiment, the feeding liquid vibration part (30) and the discharge liquid vibration part (40) are also driven when the above-described priming is performed. The results of this experiment are shown in FIGS.

  As shown in FIG. 7, in the relationship between the machine set flow rate and the actual discharge amount, the machine set flow rate and the actual discharge amount are almost the same value regardless of the value of the machine set flow rate. From the comparison between FIG. 5 and FIG. 7, the check valve is already clogged at the start of operation under the condition that the supply liquid vibration part (30) and the discharge liquid vibration part (40) are not driven (FIG. 5). I found out that I was starting to do. The cause of such a rapid clogging seems to be because the back pressure valve 84 applies a high pressure of 10 MPa to the experimental waste water in the main pipe 86 and the metering pump 70.

As shown in FIG. 8, it was found that clogging of the check valve of the metering pump 70 can be effectively suppressed by driving the feed liquid vibrating section (30) and the discharge liquid vibrating section (40).
Obtained from the results [second experiment]
As experimental wastewater, water in which organic fine particles having a density of 1.6 g / cm ³ and an average particle size of 10 μm were dispersed at a rate of 100 g per 1000 g of water was used. Except for this point, the discharge amount of the metering pump 70 was measured in the same manner as in the first experiment. As a result, as in the first experiment, clogging of the check valve of the metering pump 70 could be effectively suppressed under the conditions in which the feed liquid vibration part (30) and the discharge liquid vibration part (40) were driven. .

[Third experiment]
Example 3]
As experimental wastewater, water in which organic fine particles having a density of 1.6 g / cm ³ and an average particle diameter of 100 μm were dispersed at a rate of 20 g per 1000 g of water was used. Except for this point, the discharge amount of the metering pump 70 was measured in the same manner as in the first experiment. As a result, as in the first experiment, clogging of the check valve of the metering pump 70 could be effectively suppressed under the conditions in which the feed liquid vibration part (30) and the discharge liquid vibration part (40) were driven. .

[Fourth experiment]
As experimental wastewater, water in which organic fine particles having a density of 1.6 g / cm ³ and an average particle size of 100 μm were dispersed at a rate of 100 g per 1000 g of water was used. Except for this point, the discharge amount of the metering pump 70 was measured in the same manner as in the first experiment. As a result, as in the first experiment, clogging of the check valve of the metering pump 70 could be effectively suppressed under the conditions in which the feed liquid vibration part (30) and the discharge liquid vibration part (40) were driven. .

  Next, an embodiment of a fluid purification device according to the embodiment will be described. FIG. 9 is a schematic configuration diagram illustrating a fluid purification device according to the embodiment. The fluid purification device according to the embodiment includes a raw water tank 101, a stirrer 102, a raw water supply device 103, a raw water pressure gauge 104, a raw water inlet valve 105, an oxidant pressure feed pump 106, an oxidant pressure gauge 107, an oxidant inlet valve 108, and heat. An exchanger 109, a heat medium tank 110, a heat exchange pump 111, an outlet pressure gauge 112, an outlet valve 113, a gas-liquid separator 114, a reaction tank 120, a reaction tank thermometer 124, a control unit (not shown), and the like are provided.

  The control unit has a power supply circuit composed of a combination of an earth leakage breaker, a magnet switch, a thermal relay, and the like corresponding to each of the stirrer 102, the raw water supply device 103, the oxidant pressure feed pump 106, and the heat exchange pump 111. Yes. And the on / off of the power supply with respect to these apparatuses is controlled separately by turning on / off the magnet switch of a feed circuit with the control signal from a programmable sequencer.

  The raw water pressure gauge 104, the oxidant pressure gauge 107, and the outlet pressure gauge 112 each output a voltage having a value corresponding to the pressure detection result. The reaction vessel thermometer 124 outputs a voltage corresponding to the temperature detection result. The voltages output from these measuring devices are individually converted into digital data by an A / D converter (not shown) and then input to the programmable sequencer as sensing data. The programmable sequencer controls driving of various devices based on the sensing data.

  In the raw water tank 101, waste water W which is a purification target fluid containing an organic substance having a relatively large molecular weight is stored in an unpurified state. The waste water W is composed of at least one of organic solvent waste water, paper making waste water generated in the paper manufacturing process, and toner manufacturing waste water generated in the toner manufacturing process. Papermaking wastewater and toner manufacturing wastewater may contain persistent organic substances.

  The stirrer 102 agitates the waste water W stored in the raw water tank 101 to uniformly disperse suspended solids contained in the waste water, thereby achieving a uniform organic substance concentration. Waste water W in the raw water tank 101 is continuously pumped toward the reaction tank 20 by the raw water supply device 103. In addition, as the raw water supply apparatus 103, what consists of the liquid fixed_quantity | assay apparatus which concerns on embodiment is used.

  The raw water inlet valve 105 plays the role of a check valve, and allows the waste water W pumped from the raw water supply apparatus 103 to flow from the raw water supply apparatus 103 side to the reaction tank 120 side, but in the reverse direction. Block the flow of

  The reaction tank 120 has a double cylinder structure including an outer cylinder 121 and an inner cylinder 122 arranged inside the outer cylinder 121. The waste water W that has passed through the raw water inlet valve 105 flows into the inner cylinder 122 of the reaction tank 120 through the raw water transport pipe 115.

  The inflow pressure of the waste water W due to the driving of the raw water supply device 103 is detected by the raw water pressure gauge 104 disposed on the upstream side of the raw water inlet valve 105 and is input to the programmable sequencer of the control unit as sensing data. The inflow pressure of the waste water W when the raw water supply device 103 is driven and the pressure in the inner cylinder 122 are substantially the same. The programmable sequencer determines whether or not the pressure in the inner cylinder 122 is appropriate based on the pressure detection result sent from the raw water pressure gauge 104 when the raw water supply device 103 is being driven.

  The oxidant pressure feed pump 106 made of a compressor feeds the air taken in as the oxidant to the reaction tank 120 through the oxidant inlet valve 108 while compressing it to the same pressure as the inflow pressure of the waste water W. The oxidant inlet valve 108 plays the role of a check valve, and allows the air pressure-fed from the oxidant pressure feed pump 106 to flow from the oxidant pressure feed pump 106 side to the reaction tank 120 side, Prevent reverse flow.

  The air pumped into the reaction tank 120 enters the inter-cylinder space between the outer cylinder 121 and the inner cylinder 122 and then flows into the vicinity of the longitudinal inlet of the inner cylinder 122. And it mixes with the waste water W sent in the inner cylinder 122 with the insertion pipe mentioned later, and becomes mixed fluid.

  The inflow pressure of air generated by driving the oxidant pump 106 is detected by an oxidant pressure gauge 107 disposed upstream of the oxidant inlet valve 108 and input as sensing data to the programmable sequencer of the control unit. . The inflow pressure of air when the oxidant pressure gauge 107 is driven and the pressure in the reaction tank 120 are substantially the same. The programmable sequencer determines whether the pressure in the reaction tank 120 is appropriate based on the detection result of the pressure sent from the oxidant pressure gauge 7 when the oxidant pressure feed pump 6 is being driven.

  The amount of air pumped by driving the oxidant pump 106 is determined based on the stoichiometric amount of oxygen required to completely oxidize the organic matter in the wastewater W. More specifically, COD (Chemical Oxygen Demand) of wastewater, total nitrogen (TN), total phosphorus (TP), etc. are necessary for complete oxidation of organic matter based on organic matter concentration, nitrogen concentration, phosphorus concentration, etc. in wastewater W The amount of oxygen is calculated, and the pumping amount of air is set based on the result.

  The inflow of air is set by the worker, but the type of organic matter contained in the wastewater W is stable over time, and the physical properties such as turbidity, light transmittance, electrical conductivity, specific gravity, etc. When the correlation with the amount of oxygen is relatively good, the programmable sequencer is configured to perform the process of automatically correcting the above-mentioned control range based on the result of detecting the physical property by a sensor or the like. May be.

  As the oxidizing agent, in addition to air, any one of oxygen gas, ozone gas, hydrogen peroxide water, or a mixture of two or more of them can be used. From the viewpoint of suppressing the release of heat from the inner cylinder 22, it is preferable to use a gas such as air, oxygen gas, or ozone gas. This is because the gas has a lower thermal conductivity than the liquid, so that the gas can function as a heat insulating material by filling the space between the cylinders with the gas.

  A heater 123 for heating the mixed fluid in the inner cylinder 122 is wound around the outer surface of the inner cylinder 122. In addition to being heated by the heater 123, the mixed fluid in the inner cylinder 122 is heated by heat generated by the oxidative decomposition of the organic matter. When the wastewater W contains organic matter at a high concentration, the mixed fluid may be heated to a desired temperature only by a large amount of heat generated when a large amount of organic matter is decomposed by oxidation. In this case, heating by the heater 123 is performed only when the apparatus is started up, and the power supply to the heater 123 can be turned off after the oxidative decomposition is started.

  Examples of the pressure applied to the mixed fluid in the inner cylinder 122 include a range of 0.5 to 30 Mpa (desirably 5 to 30 Mpa). The pressure in the inner cylinder 122 is adjusted by an outlet valve 113 described later. When the pressure in the inner cylinder 122 becomes higher than the threshold value, the outlet valve 113 automatically opens the valve and discharges the mixed fluid in the inner cylinder 122 to the outside, thereby maintaining the pressure in the inner cylinder 122 near the threshold value. To do.

  Examples of the temperature of the mixed fluid in the inner cylinder 122 include 100 to 700 ° C. (desirably 200 to 550 ° C.). The temperature is adjusted by turning on / off the heater 123 described above and turning on / off the operation of the heat exchanger 109 described later.

  When temperature = 374.2 ° C. or higher and pressure = 21.8 MPa or higher are adopted as temperature and pressure conditions, the critical temperature and critical pressure of water are exceeded, and the critical temperature and critical pressure of air are also exceeded. In this state, the mixed fluid becomes a supercritical fluid having an intermediate property between liquid and gas. In such a supercritical fluid, the organic matter is well dissolved in the supercritical fluid and is in good contact with air, so that the oxidative decomposition of the organic matter proceeds rapidly.

  As a condition of temperature and pressure, a relatively high pressure of temperature = 200 ° C. or higher (desirably 374.2 ° C. or higher) and pressure = 21.8 MPa (desirably 10 MPa or higher) is adopted. The waste water in the mixed fluid may be converted into high-temperature and high-pressure steam.

  In the inner cylinder 122, the mixed fluid is brought into a high temperature and high pressure state to promote oxidative decomposition of organic matter and ammonia nitrogen in the mixed fluid. The mixed fluid obtained by oxidizing and decomposing organic matter and ammonia nitrogen is discharged from the reaction tank 120. Then, after being rapidly cooled, the pressure is reduced by the outlet valve 113 and then separated into liquid and gas by the gas-liquid separator 114.

  The inner cylinder 122 is a cylinder made of acid-resistant titanium (Ti). Instead of titanium, one made of Ta, Au, Pt, Ir, Rh, or Pd may be used. Moreover, you may use what consists of an alloy containing at least any one among Ti, Ta, Au, Pt, Ir, Rh, and Pd.

  The outer cylinder 123 is a cylinder made of a metal material having excellent strength, such as stainless steel (SUS304, SUS316), Inconel 625, and the like. The pressure inside the reaction tank 120 is controlled to a high pressure of 0.5 to 30 Mpa, desirably 5 to 30 Mpa. The outer cylinder 121 is thick so that it can withstand such a high pressure. On the other hand, since the inner cylinder 122 is required to have corrosion resistance rather than pressure resistance, titanium that exhibits excellent corrosion resistance is adopted as a material.

  Waste water W pumped toward the reaction tank 120 by the raw water supply device 103 flows into the inner cylinder 122 of the reaction tank 120 connected to the outlet side of the raw water inlet valve 105 after passing through the raw water inlet valve 105. To do.

  On the other hand, the air A pumped into the reaction tank 120 by the oxidant introduction pump 106 flows into the inter-cylinder space between the outer cylinder 121 and the inner cylinder 122. Then, the inter-cylinder space moves from the lower side in the vertical direction toward the upper side along the longitudinal direction. The inner cylinder 122 has, at its upper end, an upper end opening that is centered on the center line of the cylinder cross section and has the same diameter as the cylinder inner diameter. The tip of the pipe for introducing the waste water W into the inner cylinder 122 is inserted into the inner cylinder 122 through this upper end opening. Since the outer diameter of the distal end portion of the insertion tube is much smaller than the inner diameter of the inner cylinder 122, there is a gap between the outer peripheral surface of the insertion tube and the inner peripheral surface of the inner cylinder 122 in the inner cylinder 122. Is formed. The air A that has moved to the upper end of the inter-cylinder space between the outer cylinder 121 and the inner cylinder 122 enters the inner cylinder 122 through the above-described gap in the upper end opening, while going around the upper side of the inner cylinder 122.

  The inside of the inner cylinder 122 is at a high temperature in addition to the high pressure. The temperature is 100 to 700 ° C, desirably 200 to 550 ° C. When the operation of the fluid purification device is started, the mixed fluid of the waste water W and the air A in the inner cylinder 122 is under pressure, but the temperature is not so high. Therefore, at the start of operation, the programmable sequencer causes the heater 123 to generate heat, and raises the temperature of the mixed fluid in the inner cylinder 122 to 200 to 550 ° C.

  When the oxidative decomposition of the organic substance is started in the inner cylinder 122 and the temperature of the mixed fluid in the inner cylinder 122 is maintained at a high temperature, the inner cylinder 122 and the outer cylinder 121 have an inner space in the inter-cylinder space. The air A moving upward from the lower side in the vertical direction while being in contact with the outer peripheral surface of the cylinder 122 and the heater 123 is preheated by heat conduction from the outer peripheral surface of the inner cylinder 122 and the heater 123, and enters the inner cylinder 122. Inflow.

  In the inner cylinder 122, hydrochloric acid derived from a chloro group of organic chloride and sulfuric acid derived from a sulfonyl group such as an amino acid may be generated, and the inner wall of the inner cylinder 122 may be placed under strong acidity. For this reason, a cylinder made of titanium having excellent corrosion resistance is adopted as the inner cylinder 122. However, since titanium is a very expensive material, if the thickness of the inner cylinder 122 is increased to a value that can withstand high pressure, the cost becomes very high. Therefore, the outer cylinder 121 is disposed outside the inner cylinder 122, and the required pressure resistance is exhibited by the outer cylinder 121 made of stainless steel or the like that is cheaper than titanium. Since the pressure in the inter-cylinder space between the inner cylinder 122 and the outer cylinder 121 becomes approximately the same value as the pressure in the inner cylinder 122 by the air A being pumped, for the inner cylinder 122 made of thin titanium, A large pressure is not applied.

  Of the entire region in the longitudinal direction of the inner cylinder 122, a honeycomb structured catalyst (not shown) extends along the cylinder axis direction of the inner cylinder 122 in a downstream area (lower end area) in the fluid conveyance direction. It is arrange | positioned with the attitude | position which makes it. This catalyst is made of a material that promotes the oxidative decomposition of organic matter and ammonia nitrogen contained in the wastewater W. Examples of such materials include Ru, Pd, Rh, Pt, Au, Ir, Os, Fe, Cu, Zn, Ni, Co, Ce, Ti, or Mn. Moreover, the compound containing at least any one among them may be sufficient. Most of the organic substances contained in the waste water W are oxidatively decomposed in the first half region in the longitudinal direction of the inner cylinder 122, but organic matter and ammonia nitrogen that are not oxidatively decomposed even after passing through the first half region are oxidized and decomposed by the catalyst. Is promoted. In such a configuration, even when a hardly decomposable organic substance is contained in the waste water W, it can be oxidatively decomposed satisfactorily. Moreover, even if ammonia nitrogen is contained in the waste water W in a large amount, it can be oxidized and decomposed satisfactorily.

  The mixed fluid moved at the lower end of the inner cylinder 122 is in a state in which organic substances and inorganic compounds are almost completely oxidized and decomposed. A purified fluid transport pipe 116 is connected to the lower end portion of the inner cylinder 122. The mixed fluid purified by oxidative decomposition of the organic matter enters the purified fluid transport pipe 116.

  In the purified fluid transport pipe 116, the water in the purified mixed fluid is cooled to change the state from the supercritical state or the high temperature / high pressure vapor state to the liquid state. On the other hand, oxygen and nitrogen in the mixed fluid change the mode from the supercritical state to the gas state. The mixed fluid that has passed through the purified fluid transport pipe 116 is separated into treated water and gas by the gas-liquid separator 114, and the treated liquid is stored in the treated liquid tank. Gas is also released into the atmosphere.

  The treated water contains almost no suspended solids and organic matter because the very low molecular weight organic matter that cannot be removed by biological treatment with activated sludge is almost completely oxidized and decomposed. It contains only a small amount of inorganic material that could not be oxidized. Even as it is, it can be reused as industrial water depending on the application. Further, if a filtration process using an ultrafiltration membrane is performed, it can be diverted to an LSI cleaning liquid or the like. The gas separated by the gas-liquid separator 114 is mainly composed of carbon dioxide, nitrogen gas, and oxygen.

  A heat exchanger 109 is mounted on the outer surface of the purified fluid transport pipe 116. The main body of the heat exchanger 109 is constituted by an outer tube that covers the outer surface of the purified fluid transport pipe 116, and a space between the outer tube and the outer surface of the purified fluid transport pipe 116 is filled with a heat exchange fluid such as water. Then, heat exchange between the outer surface of the purified fluid transport pipe 116 and the heat exchange fluid is performed. When the reaction tank 120 is in operation, a very high-temperature liquid flows into the purified fluid transport pipe 116, so that heat is transferred from the purified fluid transport pipe 116 to the heat exchange fluid in the heat exchanger 109, and the heat exchange fluid is Be heated. The transfer direction of the heat exchange fluid in the heat exchanger 109 is opposite to the transfer direction of the liquid in the purified fluid transfer pipe 116 so as to perform so-called countercurrent heat exchange. That is, the heat exchange fluid is sent from the outlet valve 113 side to the reaction tank 120 side. This is performed by the heat exchange pump 111 that sends the heat exchange fluid in the heat medium tank 110 to the heat exchanger 109 while sucking the heat exchange fluid.

  The heat exchange fluid heated through the heat exchanger 109 is sent to a thermal energy utilization facility through a pipe (not shown). A generator can be illustrated as an example of a thermal energy utilization facility. In the generator, power generation is performed by rotating the turbine with an air flow generated when the heat exchange fluid that has been heated to increase the pressure from a liquid to a gas state.

  A part of the heat exchange fluid that has passed through the heat exchanger 109 may be conveyed to the vicinity of the raw water tank 101 by a branch pipe and used for preheating the waste water W.

  An outlet thermometer (not shown) that detects the temperature of the purified fluid transport pipe 116 or the temperature of the liquid in the purified fluid transport pipe 116 is provided in the vicinity of the outlet valve 113 in the purified fluid transport pipe 116. The programmable sequencer of the control unit controls the driving of the heat exchange pump 111 so that the detection result by the outlet thermometer is maintained within a predetermined numerical range. Specifically, when the detection result by the outlet thermometer reaches a predetermined upper limit temperature, the drive amount of the heat exchange pump 111 is increased to increase the supply amount of the heat exchange fluid to the heat exchanger 109, thereby increasing the heat The cooling function by the exchanger 109 is enhanced. On the other hand, when the detection result by the outlet thermometer reaches a predetermined lower limit temperature, the amount of heat exchange fluid supplied to the heat exchanger 109 is reduced by reducing the drive amount of the heat exchange pump 111, thereby exchanging heat. The cooling function by the vessel 109 is reduced. In such a configuration, the temperature of the liquid in the purified fluid transport pipe 116 can be maintained within a certain range by appropriately adjusting the heat exchange amount. The heat exchanger 109 may be attached to the outer cylinder 121 of the reaction tank 120 in addition to or instead of being attached to the purified fluid transport pipe 116.

  When the organic matter concentration in the wastewater W is relatively high, a large amount of heat is generated by oxidative decomposition of the organic matter. For this reason, although the heater 123 is operated at the initial stage of operation, after the oxidative decomposition of the organic matter is started, the temperature of the mixed fluid of the waste water W and the air A is set to a desired value by the heat generated by the oxidative decomposition of the organic matter. In some cases, the temperature can be naturally increased to the temperature. Therefore, the programmable sequencer of the control unit turns off the heater 123 as the heating means when the detection result by the thermometer 124 that detects the temperature of the outer cylinder 121 becomes higher than a predetermined temperature. Thereby, useless energy consumption can be suppressed.

  In addition to suppressing the temporal decrease in the supply amount of the waste water W to the reaction tank 120 by using the liquid quantitative device according to the embodiment as the raw water supply device 103 in the fluid purification device having such a configuration, the following There is an effect. That is, the waste water W may contain organic suspended substances having a considerably large molecular weight. When this high molecular weight organic suspended substance is sent to the reaction tank 120 as it is, it takes a relatively long time for its oxidative decomposition. This is because oxygen is supplied only to the outer part of the high-molecular-weight organic suspended substance, and therefore, oxidative decomposition gradually proceeds from the outer part toward the center. On the other hand, when the liquid in the supply pipe of the metering pump and the liquid in the discharge pipe are ultrasonically vibrated like the liquid quantifying apparatus according to the embodiment, the high-molecular-weight organic suspended solids are broken apart by the ultrasonic vibration. By doing so, the size of the organic suspended substance can be reduced. As a result, the rate of oxidative decomposition of the organic suspended substance can be increased, and the amount of organic matter that can be exhausted out of the reaction tank 120 without being completely oxidized and decomposed can be greatly reduced.

What has been described above is merely an example, and the present invention has a specific effect for each of the following modes.
[Aspect A]
A liquid storage chamber (for example, liquid storage chamber 1) for taking in liquid for determination, volume changing means (for example, piston 3) for changing the volume of the liquid storage chamber, and supplying liquid into the liquid storage chamber A feeding pipe (for example, feeding pipe 4) connected to the liquid storage chamber for feeding, and feeding of the liquid contained in the inside of the feeding pipe contained in or connected to the feeding pipe A check valve for feeding (for example, a check valve for feeding 10) that allows a flow from the pipe side to the liquid storage chamber side while preventing a flow from the liquid storage chamber side to the feeding pipe side. ), A discharge pipe (for example, the discharge pipe 5) connected to the liquid storage chamber for discharging the liquid from the liquid storage chamber, and the inside of the discharge pipe included in or connected to the discharge pipe While allowing the flow of liquid stored in the liquid storage chamber side toward the discharge pipe side, A discharge check valve (for example, a discharge check valve 20) that blocks the flow from the outlet side toward the liquid storage chamber side, and the volume changing means increases the volume of the liquid storage chamber. Accordingly, while the liquid in the feeding pipe is fed into the liquid storage chamber, the volume of the liquid storage chamber is decreased by the volume changing means. In the metering pump for discharging the liquid in the discharge pipe to the discharge pipe, the feed liquid vibration means disposed in the vicinity of the feed check valve for vibrating the liquid in the feed check valve (E.g., the supply liquid vibration unit 30) and discharge liquid vibration means (e.g., discharge liquid vibration) disposed in the vicinity of the discharge check valve in order to vibrate the liquid in the discharge check valve Part 40).

[Aspect B]
Aspect B provides the supply liquid vibration means in aspect A with a communication chamber for storing liquid in communication with the internal space of the supply check valve and a vibrator stored in the communication chamber. In addition, the discharge liquid oscillating means is provided with a communication chamber that stores liquid in a state of communication with the discharge check valve, and a vibrator that is stored in the communication chamber. . In such a configuration, the vibration generated by the vibrator can be transmitted to the liquid in the feeding check valve and the liquid in the discharge check valve via the liquid in the communication chamber.

[Aspect C]
Aspect C is characterized in that, in aspect B, ultrasonic vibrators are used as vibrators of the supply liquid vibration means and the discharge liquid vibration means, respectively. In such a configuration, the liquid in the check valve for feeding and the liquid in the discharge check valve are ultrasonically vibrated to break apart the aggregates of the organic suspended solids contained in the liquid. By reducing the agglomerates, the oxidative decomposition can be promoted in the fluid purification device for organic suspended solids.

[Aspect D]
Aspect D is a liquid quantification apparatus using the metering pumps of aspects A to C, wherein when the volume of the liquid storage chamber is increased by the volume changing means, the feeding liquid vibrating means is operated and the discharge is performed. While the liquid vibrating means is stopped, when the volume of the liquid storage chamber is decreased by the volume changing means, the supply liquid vibrating means is stopped and the discharge liquid vibrating means is operated. Thus, the control means is configured. In such a configuration, as described above, it is possible to avoid the occurrence of a situation where a small blob is rubbed against the surface of the valve seat or the valve member due to ultrasonic vibration.

1: Liquid storage chamber 4: Feed pipe 5: Discharge pipe 10: Feed check valve 20: Discharge check valve 30: Feed liquid vibration section (feed liquid vibration means)
31: Communication chamber 32: Ultrasonic vibrator unit 32a: Ultrasonic vibrator 40: Discharge liquid vibration part (discharge liquid vibration means)
41: Communication chamber 42: Ultrasonic transducer unit 42a: Ultrasonic transducer 70: Metering pump

Japanese Patent Laid-Open No. 5-1661

Claims (7)

A liquid storage chamber for taking in the liquid for determination; volume changing means for changing the volume of the liquid storage chamber; and a feed connected to the liquid storage chamber for feeding the liquid into the liquid storage chamber The pipe and the supply pipe are allowed to flow from the liquid supply pipe side to the liquid storage chamber side while being contained or connected to the supply pipe, while from the liquid storage chamber side. A check valve for feeding for preventing a flow toward the feed pipe, a discharge pipe connected to the liquid storage chamber for discharging the liquid from the liquid storage chamber, and an inclusion in the discharge pipe Or, in a connected state, while allowing the flow of the liquid stored in itself from the liquid storage chamber side to the discharge tube side, the flow from the discharge tube side to the liquid storage chamber side is allowed. A volume of the liquid storage chamber by the volume changing means. As the liquid is increased, the liquid in the supply pipe is supplied into the liquid storage chamber, while the volume of the liquid storage chamber is decreased by the volume changing means. In the metering pump for discharging the liquid in the storage chamber to the discharge pipe,
In order to vibrate the liquid in the feeding check valve, the liquid feeding means disposed in the vicinity of the feeding check valve and the liquid in the discharge check valve are vibrated. Therefore, a metering pump comprising at least one of discharge liquid vibrating means disposed in the vicinity of the discharge check valve. The metering pump of claim 1,
A metering pump, characterized in that both the feed liquid vibration means and the discharge liquid vibration means are provided. The metering pump of claim 2,
While providing a communication chamber for storing liquid in a state communicating with the internal space of the check valve for feeding, and a vibrator accommodated in the communication chamber, the feeding liquid vibration means,
A metering pump comprising: a communication chamber for storing liquid in a state of communication with the discharge check valve; and a vibrator stored in the communication chamber in the discharge liquid vibrating means. The metering pump of claim 3,
A metering pump characterized in that an ultrasonic vibrator is used as a vibrator of the liquid feeding vibration means or the discharge liquid vibration means. In a liquid metering device comprising a metering pump that discharges liquid while metering, and a control means for controlling the driving of the metering pump,
A liquid metering apparatus using the metering pump according to claim 1 as the metering pump. The liquid quantification device according to claim 5, wherein
When the volume of the liquid storage chamber is increased by the volume change means, the liquid supply chamber is operated and the discharge liquid vibration means is stopped, while the liquid change chamber is stopped by the volume change means. The liquid metering apparatus is characterized in that the control means is configured to stop the feeding liquid vibration means and operate the discharge liquid vibration means when the volume of the liquid is reduced. . While heating and pressurizing the mixed fluid of the purification target fluid and the oxidant inside itself, the reaction tank for decomposing the organic matter in the purification target fluid by an oxidation reaction, and the liquid as the purification target fluid are directed to the reaction tank In a fluid purification device comprising a metering pump that feeds while metering or a liquid metering device equipped with the metering pump,
A fluid purification device using the metering pump according to any one of claims 1 to 4 as the metering pump, or the liquid metering device according to claim 5 or 6 as the liquid metering device.

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