JP2013174449A - Differential pressure measurement device - Google Patents

Differential pressure measurement device Download PDF

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JP2013174449A
JP2013174449A JP2012037485A JP2012037485A JP2013174449A JP 2013174449 A JP2013174449 A JP 2013174449A JP 2012037485 A JP2012037485 A JP 2012037485A JP 2012037485 A JP2012037485 A JP 2012037485A JP 2013174449 A JP2013174449 A JP 2013174449A
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pressure sensing
pressure receiving
seal ring
section
stainless steel
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JP5896133B2 (en
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Toshio Ogino
敏夫 荻野
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Yokogawa Electric Corp
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Yokogawa Electric Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a differential pressure measurement device having a welded section which is resistant to stress corrosion cracking at low cost.SOLUTION: A differential pressure measurement device has a tabular pressure sensing block, a thin and tabular pressure sensing diaphragm having a periphery of one face in contact with a face of the pressure sensing block, a ring-shaped seal ring having one face in contact with the periphery of another face of the pressure sensing diaphragm, and a welded section which secures the pressure sensing diaphragm and the seal ring to the pressure sensing block by welding. The pressure sensing block is made of an austenitic stainless steel, and the pressure sensing diaphragm and the seal ring are made of a duplex stainless steel. The welded section has a substantially T-shaped cross-section whose horizontal portion is located in the seal ring and vertical portion is located in the pressure sensing block and is shaped such that the ratio of a cross-section of the horizontal portion of the T shape on a plane parallel to the face of the pressure sensing diaphragm to a cross-section of the vertical section on a plane parallel to the face of the pressure sensing diaphragm maintains the quality of the dual stainless steel even after the weld hardens.

Description

本発明は、差圧測定装置に関するものである。
更に詳述すれば、低コストで応力腐食割れに強い接液部が実現出来る差圧測定装置に関するものである。 The present invention relates to a differential pressure measuring device.
More specifically, the present invention relates to a differential pressure measuring apparatus that can realize a liquid contact portion that is resistant to stress corrosion cracking at low cost.

図３（ａ）は従来より一般に使用されている従来例の要部構成説明図、図３（ｂ）は図３（ａ）の要部拡大説明図である。
図において、１は差圧測定装置本体である。２はプロセスのタンクや配管に接続されるダイアフラムシールユニットで、図４に示す如く、受圧ブロック３に受圧ダイアフラム４が、シールリング４ａを介して、溶接部４ｂにより溶接取り付けられてあり、封入液５が封じ込められたキャピラリチューブ６で差圧測定装置本体１と結ばれ、差圧測定装置本体１にプロセス圧力を伝えている。
キャピラリチューブ６は、圧力を伝える導圧管の一種である。
７はダイアフラムシールユニット２をプロセスのタンクあるいは配管に取り付けるためのフランジであり、ねじによりプロセスのタンクあるいは配管に取り付けられている。
キャピラリチューブ６内は、圧力を伝達するために通常シリコンオイル５などの非圧縮性の液体で満たされており、差圧測定装置本体１にプロセス圧力を伝えている。 FIG. 3A is an explanatory diagram of a main part configuration of a conventional example that is generally used conventionally, and FIG. 3B is an enlarged explanatory diagram of the main part of FIG.
In the figure, reference numeral 1 denotes a differential pressure measuring device main body. Reference numeral 2 denotes a diaphragm seal unit connected to a process tank or piping. As shown in FIG. 4, a pressure receiving diaphragm 4 is welded to the pressure receiving block 3 by a welded portion 4b via a seal ring 4a. 5 is connected to the differential pressure measuring device main body 1 by a sealed capillary tube 6 to transmit the process pressure to the differential pressure measuring device main body 1.
The capillary tube 6 is a kind of pressure guiding tube that transmits pressure.
Reference numeral 7 denotes a flange for attaching the diaphragm seal unit 2 to a process tank or pipe, which is attached to the process tank or pipe by screws.
The capillary tube 6 is usually filled with an incompressible liquid such as silicon oil 5 for transmitting pressure, and the process pressure is transmitted to the differential pressure measuring device main body 1.

特開２００３−３４４２０７号公報JP 2003-344207 A 特開２０１１−００２２３３号公報JP 2011-002233 A

このような装置においては、以下の問題点がある。
受圧ブロック３、受圧ダイアフラム４、シールリング４ｂは、耐食性に優れたオーステナイト系ステンレス鋼のＪＩＳ規格番号ＳＵＳ３１６Ｌ材を使用することが多い。
しかし、ＳＵＳ３１６Ｌ材は、応力腐食割れに弱い欠点があり、微量のハロゲン元素を含む特定のプロセスのアプリケーションで、ダイアフラム膜４の応力腐食割れが発生することがある。 Such an apparatus has the following problems.
The pressure receiving block 3, the pressure receiving diaphragm 4, and the seal ring 4b are often made of austenitic stainless steel JIS standard number SUS316L having excellent corrosion resistance.
However, the SUS316L material has a drawback that it is vulnerable to stress corrosion cracking, and stress corrosion cracking of the diaphragm film 4 may occur in a specific process application including a trace amount of halogen element.

本発明の目的は、上記の課題を解決するもので、受圧ダイアフラムとシールリングに応力腐食割れに強い２相ステンレス鋼を、受圧ブロックに低価格のオーステナイト系ステンレス鋼を使用することにより、低コストで応力腐食割れに強い接液部が実現出来る差圧測定装置を提供することにある。   The object of the present invention is to solve the above-mentioned problems. By using a duplex stainless steel resistant to stress corrosion cracking for the pressure receiving diaphragm and the seal ring, and using a low-cost austenitic stainless steel for the pressure receiving block, the cost is reduced. An object of the present invention is to provide a differential pressure measuring device capable of realizing a wetted part resistant to stress corrosion cracking.

このような課題を達成するために、本発明では、請求項１の差圧測定装置においては、
板状の受圧ブロックと、この受圧ブロックの一方の面に一方の面の周縁が接する薄板状の受圧ダイアフラムと、この受圧ダイアフラムの他方の面の周縁に一方の面が接するリング状のシールリングと、前記受圧ブロックに前記受圧ダイアフラムと前記シールリングとを溶接固定する溶接部とを具備する差圧測定装置において、オーステナイト系ステンレス鋼よりなる受圧ブロックと、二相ステンレス鋼よりなる受圧ダイアフラムとシールリングと、横棒部分が前記シールリングに設けられ縦棒部分が前記受圧ブロックに設けられ断面ほぼＴ字形状をなし前記Ｔ字形状の横棒部分の前記受圧ダイアフラム面に平行な断面と前記Ｔ字形状の縦棒部分の前記受圧ダイアフラムに平行な断面との比率が溶接固化後においてなお二相ステンレス鋼材質を保つような比率にされた溶接部と、を具備したことを特徴とする。 In order to achieve such a problem, in the present invention, in the differential pressure measuring device of claim 1,
A plate-shaped pressure receiving block, a thin plate-shaped pressure receiving diaphragm in which the periphery of one surface is in contact with one surface of the pressure receiving block, and a ring-shaped seal ring in which one surface is in contact with the periphery of the other surface of the pressure receiving diaphragm; In the differential pressure measuring device comprising a welded portion for welding and fixing the pressure receiving diaphragm and the seal ring to the pressure receiving block, a pressure receiving block made of austenitic stainless steel, a pressure receiving diaphragm and a seal ring made of duplex stainless steel A horizontal bar portion is provided on the seal ring, and a vertical bar portion is provided on the pressure receiving block. The cross section of the T-shaped horizontal bar portion is parallel to the pressure receiving diaphragm surface and the T shape. The ratio of the shape of the vertical bar to the cross section parallel to the pressure-receiving diaphragm is And welds the ratio of Tsuyo, characterized by comprising a.

本発明の請求項１によれば、次のような効果がある。
支持ブロックの材質はオーステナイト系ステンレス鋼であるが、測定流体が接する部分にある溶接部の化学成分は、二相ステンレス鋼であるので、応力腐食割れに強い接液部分を実現できる差圧測定装置が得られる。
特に、微量のハロゲン元素を含む特定のアプリケーションでの、ダイアフラム膜の応力腐食割れに強い接液部を実現できる差圧測定装置が得られる。 According to claim 1 of the present invention, there are the following effects.
The material of the support block is austenitic stainless steel, but the chemical composition of the welded part at the part where the measurement fluid contacts is duplex stainless steel, so a differential pressure measuring device that can realize a wetted part resistant to stress corrosion cracking Is obtained.
In particular, a differential pressure measuring device capable of realizing a wetted part resistant to stress corrosion cracking of the diaphragm film in a specific application including a trace amount of halogen element can be obtained.

本発明の一実施例の要部構成説明図である。It is principal part structure explanatory drawing of one Example of this invention. 図１の動作説明図である。It is operation | movement explanatory drawing of FIG. 従来より一般に使用されている従来例の要部構成説明図である。It is principal part structure explanatory drawing of the prior art example generally used conventionally. 図３の従来例の要部構成説明図である。It is principal part structure explanatory drawing of the prior art example of FIG.

以下本発明を図面を用いて詳細に説明する。
図１は本発明の一実施例の要部構成説明図、図２は図１の動作説明図である。
図において、図３，図４と同一記号の構成は同一機能を表す。
以下、図３，図４との相違部分のみ説明する。 Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is a diagram illustrating the configuration of the main part of one embodiment of the present invention, and FIG.
In the figure, configurations with the same symbols as in FIGS. 3 and 4 represent the same functions.
Only the differences from FIGS. 3 and 4 will be described below.

図１において、受圧ブロック１１は、オーステナイト系ステンレス鋼ＪＩＳ規格番号ＳＵＳ３１６Ｌ材よりなる。
受圧ダイアフラム１２とシールリング１３は、二相ステンレス鋼ＪＩＳ規格番号ＳＵＳ３２９Ｊ１材よりなる。 In FIG. 1, the pressure receiving block 11 is made of an austenitic stainless steel JIS standard number SUS316L material.
The pressure receiving diaphragm 12 and the seal ring 13 are made of duplex stainless steel JIS standard number SUS329J1.

溶接部１４は、断面ほぼＴ字形状をなし、Ｔ字形状の横棒部分１４ａがシールリング１３に設けられ、Ｔ字形状の縦棒部分１４ｂが、受圧ブロック１１に設けられている。
そして、受圧ブロック１１とシールリング１３とが接する面Ａに対して平行な横棒部分１４ａの断面Ｂ寸法Ｂと、受圧ブロック１１とシールリング１３とが接する面Ａに対して平行な縦棒部分１４ｂの断面寸法Ｃ、との比率が溶接固化後においてなお二相ステンレス鋼材質を保つような比率Ｂ対Ｃに構成されている。 The welded portion 14 has a substantially T-shaped cross section, a T-shaped horizontal bar portion 14 a is provided on the seal ring 13, and a T-shaped vertical bar portion 14 b is provided on the pressure receiving block 11.
And, the cross-section B dimension B of the horizontal bar portion 14a parallel to the surface A where the pressure receiving block 11 and the seal ring 13 are in contact, and the vertical bar portion parallel to the surface A where the pressure receiving block 11 and the seal ring 13 are in contact with each other. The ratio of the cross-sectional dimension C of 14b is such that the ratio B to C keeps the duplex stainless steel material after welding solidification.

より具体的には、例えば、シールリング１３の厚さを１ｍｍ、受圧ダイアフラム１２の厚さを０．１ｍｍ、受圧ブロック１１の厚さを２５ｍｍとし、電子ビーム溶接又はレーザー溶接により、溶接部１４の溶け込み深さは約２ｍｍとする。
シールリング１３、受圧ダイアフラム１２、受圧ブロック１１を一体に溶接固定し、溶接部１４を形成することが出来る。 More specifically, for example, the thickness of the seal ring 13 is 1 mm, the thickness of the pressure receiving diaphragm 12 is 0.1 mm, the thickness of the pressure receiving block 11 is 25 mm, and the welding portion 14 is formed by electron beam welding or laser welding. The penetration depth is about 2 mm.
The seal ring 13, the pressure receiving diaphragm 12, and the pressure receiving block 11 can be integrally welded to form the welded portion 14.

この時、図１に示す如く、溶接部１４の表面近傍１４ａは幅広に、奥部１４ｂは幅狭に溶接部１４を形成させる。
そして、一例として、例えば、溶接部１４の断面において、断面Ｂと断面Ｃの比率Ｂ／Ｃ＝８０／２０と設定する。 At this time, as shown in FIG. 1, the welded portion 14 is formed so that the vicinity 14 a of the surface of the welded portion 14 is wide and the depth 14 b is narrowed.
And as an example, in the cross section of the welded part 14, the ratio B / C = 80/20 of the cross section B and the cross section C is set.

以上の構成において、溶接部１４の断面において、断面Ｂと断面Ｃの比率Ｂ／Ｃ＝８０／２０と設定した場合に付いて考察する。   In the above configuration, the case where the ratio B / C = 80/20 of the cross section B and the cross section C is set in the cross section of the welded portion 14 will be considered.

２相ステンレス鋼ＪＩＳ規格番号ＳＵＳ３２９Ｊ１の主な化学成分は。
Cr:23〜28%、Ni:3〜6%、Mo:1〜3%、Si:0〜1%、Mn:0〜1.5%、C:0〜0.08%
オーステナイト系ステンレス鋼ＪＩＳ規格番号ＳＵＳ３１６Ｌの主な化学成分は。
Cr:16〜18%、Ni:12〜15%、Mo:2〜3%、Si:0〜1%、Mn:0〜2%、C:0〜0.03% What are the main chemical components of duplex stainless steel JIS standard number SUS329J1?
Cr: 23-28%, Ni: 3-6%, Mo: 1-3%, Si: 0-1%, Mn: 0-1.5%, C: 0-0.08%
What are the main chemical components of austenitic stainless steel JIS standard number SUS316L?
Cr: 16-18%, Ni: 12-15%, Mo: 2-3%, Si: 0-1%, Mn: 0-2%, C: 0-0.03%

２相ステンレス鋼ＳＵＳ３２９Ｊ１の各成分の下限値と上限値に付いて図２に示すＣｒ当量とＮｉ当量を計算する。
Cr当量(下限値)＝23＋1＋1.5×0＋0.5×0＝24.0
Cr当量(上限値)＝28＋3＋1.5×1＋0.5×0＝32.5
Ni当量(下限値)＝3＋30×0＋0.5×0＝3.0
Ni当量(下限値)＝6＋30×0.08＋0.5×1.5＝9.15 The Cr equivalent and Ni equivalent shown in FIG. 2 are calculated for the lower limit and the upper limit of each component of the duplex stainless steel SUS329J1.
Cr equivalent (lower limit) = 23 + 1 + 1.5 x 0 + 0.5 x 0 = 24.0
Cr equivalent (upper limit) = 28 + 3 + 1.5 x 1 + 0.5 x 0 = 32.5
Ni equivalent (lower limit) = 3 + 30 x 0 + 0.5 x 0 = 3.0
Ni equivalent (lower limit) = 6 + 30 x 0.08 + 0.5 x 1.5 = 9.15

溶接部１４の合金成分は、例えば、断面Ｂと断面Ｃの比率Ｂ／Ｃ＝８０／２０と設定した場合、８０％２相ステンレス鋼＋２０％オーステナイト系ステンレス鋼となる。   For example, when the ratio B / C = 80/20 of the cross section B and the cross section C is set, the alloy component of the welded portion 14 is 80% duplex stainless steel + 20% austenitic stainless steel.

化学成分は規格の中央値で製造されることが多いので、溶接部１４の各化学成分は。
Cr含有率＝0.8×25.5%＋0.2×17%＝23.8%
Ni含有率＝0.8×4.5%＋0.2×13.5%＝6.3%
Mo含有率＝0.8×2%＋0.2×2.5%＝2.1%
Si含有率＝0.8×0.5%＋0.2×0.5%＝0.5%
Mn含有率＝0.8×0.75%＋0.2×1%＝0.8%
C 含有率＝0.8×0.04%＋0.2×0.015%＝0.035% Since chemical components are often manufactured at the median value of the standard, what are the chemical components of the welded portion 14?
Cr content = 0.8 x 25.5% + 0.2 x 17% = 23.8%
Ni content = 0.8 x 4.5% + 0.2 x 13.5% = 6.3%
Mo content = 0.8 x 2% + 0.2 x 2.5% = 2.1%
Si content = 0.8 x 0.5% + 0.2 x 0.5% = 0.5%
Mn content = 0.8 x 0.75% + 0.2 x 1% = 0.8%
C Content = 0.8 x 0.04% + 0.2 x 0.015% = 0.035%

図２によるCr当量とNi当量を、溶接部１４の化学成分について計算すると。
Cr当量＝23.8＋2.1＋1.5×0.5＋0.5×0＝26.65
Ni当量＝6.3＋30×0.035＋0.5×0.8＝7.75
よって、溶接部１４の化学成分のＣｒ当量とＮｉ当量は、例えば、断面Ｂと断面Ｃの比率Ｂ／Ｃ＝８０／２０と設定した場合、ＪＩＳのステンレス鋼規格番号ＳＵＳ３２９Ｊ１のＣｒ当量とＮｉ当量の範囲内にあることが分かる。 If the Cr equivalent and Ni equivalent according to FIG.
Cr equivalent = 23.8 + 2.1 + 1.5 x 0.5 + 0.5 x 0 = 26.65
Ni equivalent = 6.3 + 30 x 0.035 + 0.5 x 0.8 = 7.75
Therefore, the Cr equivalent and the Ni equivalent of the chemical component of the welded portion 14 are set, for example, when the ratio B / C = 80/20 of the cross section B and the cross section C, the Cr equivalent and the Ni equivalent of JIS stainless steel standard number SUS329J1. It turns out that it exists in the range of.

この結果、
支持ブロック１１の材質はオーステナイト系ステンレス鋼であるが、測定流体が接する部分にある溶接部１４の化学成分は、二相ステンレス鋼であるので、応力腐食割れに強い接液部１２，１３を実現できる差圧測定装置が得られる。
特に、微量のハロゲン元素を含む特定のアプリケーションでの、ダイアフラム膜１２の応力腐食割れに強い接液部分１２，１３を実現できる差圧測定装置が得られる。 As a result,
The material of the support block 11 is austenitic stainless steel, but since the chemical component of the welded portion 14 in the portion where the measurement fluid contacts is duplex stainless steel, the wetted portions 12 and 13 that are resistant to stress corrosion cracking are realized. A differential pressure measuring device that can be obtained is obtained.
In particular, a differential pressure measuring device capable of realizing the wetted parts 12 and 13 that are resistant to stress corrosion cracking of the diaphragm film 12 in a specific application including a trace amount of halogen element is obtained.

なお、以上の説明は、本発明の説明および例示を目的として特定の好適な実施例を示したに過ぎない。
したがって本発明は、上記実施例に限定されることなく、その本質から逸脱しない範囲で更に多くの変更、変形をも含むものである。 The above description merely shows a specific preferred embodiment for the purpose of explanation and illustration of the present invention.
Therefore, the present invention is not limited to the above-described embodiments, and includes many changes and modifications without departing from the essence thereof.

１ 差圧測定装置本体
２ ダイアフラムシールユニット
３ 受圧ブロック
４ 受圧ダイアフラム
４ａ シールリング
４ｂ 溶接部
５ 封入液
６ キャピラリチューブ
７ フランジ
１１ 受圧ブロック
１２ 受圧ダイアフラム
１３ シールリング
１４ 溶接部
１４ａ 横棒部分
１４ｂ 縦棒部分
Ａ 受圧ブロック１１とシールリング１３とが接する面
Ｂ 横棒部分１４ａの断面寸法
Ｃ 縦棒部分１４ｂの断面寸法 DESCRIPTION OF SYMBOLS 1 Differential pressure measuring device main body 2 Diaphragm seal unit 3 Pressure receiving block 4 Pressure receiving diaphragm 4a Seal ring 4b Welding part 5 Filled liquid 6 Capillary tube 7 Flange 11 Pressure receiving block 12 Pressure receiving diaphragm 13 Seal ring 14 Welding part 14a Horizontal bar part 14b Vertical bar part A Surface where pressure-receiving block 11 and seal ring 13 are in contact B Cross-sectional dimension of horizontal bar part 14a C Cross-sectional dimension of vertical bar part 14b

Claims (1)

板状の受圧ブロックと、この受圧ブロックの一方の面に一方の面の周縁が接する薄板状の受圧ダイアフラムと、この受圧ダイアフラムの他方の面の周縁に一方の面が接するリング状のシールリングと、前記受圧ブロックに前記受圧ダイアフラムと前記シールリングとを溶接固定する溶接部とを具備する差圧測定装置において、
オーステナイト系ステンレス鋼よりなる受圧ブロックと、
二相ステンレス鋼よりなる受圧ダイアフラムとシールリングと、
横棒部分が前記シールリングに設けられ縦棒部分が前記受圧ブロックに設けられ断面ほぼＴ字形状をなし前記Ｔ字形状の横棒部分の前記受圧ダイアフラム面に平行な断面と前記Ｔ字形状の縦棒部分の前記受圧ダイアフラムに平行な断面との比率が溶接固化後においてなお二相ステンレス鋼材質を保つような比率にされた溶接部と、
を具備したことを特徴とする差圧測定装置。 A plate-shaped pressure receiving block, a thin plate-shaped pressure receiving diaphragm in which the periphery of one surface is in contact with one surface of the pressure receiving block, and a ring-shaped seal ring in which one surface is in contact with the periphery of the other surface of the pressure receiving diaphragm; In the differential pressure measuring device comprising a welded portion for welding and fixing the pressure receiving diaphragm and the seal ring to the pressure receiving block,
A pressure receiving block made of austenitic stainless steel;
A pressure-receiving diaphragm and seal ring made of duplex stainless steel;
A horizontal bar portion is provided on the seal ring, and a vertical bar portion is provided on the pressure receiving block so as to have a substantially T-shaped cross section. The T-shaped horizontal bar portion has a cross section parallel to the pressure receiving diaphragm surface and the T shape. A welded portion in which the ratio of the vertical bar portion to the cross-section parallel to the pressure-receiving diaphragm is such that the duplex stainless steel material is still maintained after welding solidification;
A differential pressure measuring device comprising:
JP2012037485A 2012-02-23 2012-02-23 Differential pressure measuring device Active JP5896133B2 (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07110278A (en) * 1993-10-08 1995-04-25 Hitachi Ltd Pressure transmission equipment
JPH11351991A (en) * 1998-06-08 1999-12-24 Yokogawa Electric Corp Differential pressure measuring device
JP2003344207A (en) * 2002-05-31 2003-12-03 Yokogawa Electric Corp Diaphragm seal type measuring instrument for measuring differential pressure
JP2006038538A (en) * 2004-07-23 2006-02-09 Nagano Keiki Co Ltd Pressure sensor
JP2010019828A (en) * 2008-06-11 2010-01-28 Epson Toyocom Corp Diaphragm for pressure sensor, and pressure sensor
JP2011002233A (en) * 2009-06-16 2011-01-06 Yokogawa Electric Corp Diaphragm seal type pressure difference measuring device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07110278A (en) * 1993-10-08 1995-04-25 Hitachi Ltd Pressure transmission equipment
JPH11351991A (en) * 1998-06-08 1999-12-24 Yokogawa Electric Corp Differential pressure measuring device
JP2003344207A (en) * 2002-05-31 2003-12-03 Yokogawa Electric Corp Diaphragm seal type measuring instrument for measuring differential pressure
JP2006038538A (en) * 2004-07-23 2006-02-09 Nagano Keiki Co Ltd Pressure sensor
JP2010019828A (en) * 2008-06-11 2010-01-28 Epson Toyocom Corp Diaphragm for pressure sensor, and pressure sensor
JP2011002233A (en) * 2009-06-16 2011-01-06 Yokogawa Electric Corp Diaphragm seal type pressure difference measuring device

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