JP2013157360A - Mounting substrate manufacturing apparatus and manufacturing method of mounting substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a mounting substrate manufacturing apparatus capable of precisely and swiftly recognizing the shape of an object.SOLUTION: The mounting substrate manufacturing apparatus includes: a camera 10 that has an area image sensor 11 which is virtually segmented in a first imaging area 150 for taking an image of a first imaging target area 50 which is segmented so that the imaging target area 110 is aligned in an X-axis direction, and a second imaging area 160 for taking an image of a second imaging target area 60 which is aligned in an X-axis direction with respect to the first imaging target area 50; an irradiation part 20 that irradiates a beam of intensity changing light that has the identical intensity along a Y-axis direction but the intensity changes periodically depending on the position in the X-axis direction at an angle with respect to a reference plane; a moving section 40 that moves an object 30 relative to the camera 10 in the X-axis direction; and a light reduction section 13 that reduces one of the light intensity of a first light beam L1 proceeding to the first imaging area 50 and the light intensity of a second light beam L2 proceeding to the second imaging area 60 by a predetermined degree smaller than the other.

Description

  The present invention relates to a mounting board production apparatus that recognizes the shape of an object and mounts the recognized component on a board.

  A mounting board production system for producing a mounting board on which a component is mounted includes a component mounting apparatus for mounting a part on a board, an inspection apparatus for inspecting a part mounted on the board, or a board on which cream solder is printed, etc. Mounting board production equipment. In the component mounting apparatus, in order to improve the component mounting accuracy, the shape of the component adsorbed on the nozzle is recognized before the component is mounted. The inspection apparatus recognizes the shape of the component on the substrate in order to inspect the mounting state of the component on the substrate. For this reason, in order to produce a mounting board with high accuracy, it is necessary to accurately recognize the shape of the component.

  As a technique for accurately recognizing the shape of such a component, for example, a method of recognizing the three-dimensional shape of an object using a phase shift method is known. In the phase shift method, a plurality of sinusoidal fringe pattern lights having different phases are projected onto an object, the object is imaged with a camera, and the shape of the object is recognized.

  However, the shape, material, surface state, and the like of components mounted on the substrate are various, and the reflectance often varies greatly depending on the components. When imaging such a component, the width of the minimum and maximum luminance values in the obtained image data is larger than when imaging a component with uniform reflectance. For this reason, especially in the phase shift method that changes the amount of light to be projected according to the phase, depending on the part of the component, the pixel in the obtained image data causes brightness saturation, On the other hand, the luminance is insufficient and the image sensor may be buried in the noise of the image sensor.

  Thus, in order to recognize a pixel without whiteout or blackout using a phase shift method for recognizing the three-dimensional shape of an object, in Patent Document 1, a predetermined pattern light is projected onto an object to be inspected. The amount of light of the pattern light to be projected is varied by inserting / removing a neutral density filter with respect to the optical path output from the light source. That is, in Patent Document 1, imaging is performed with two different amounts of light by both disposing the neutral density filter on the optical path and removing the neutral density filter from the optical path. As a result, it is possible to prevent the occurrence of pixels that have been saturated in luminance or pixels that are buried in noise in the image data.

JP 2005-214653 A

  However, in the technique of Patent Document 1, since the light amount of the pattern light to be projected is adjusted by inserting and removing the neutral density filter on the optical path, an image without dimming while the object is stationary, It is necessary to capture the existing image. Further, in the phase shift method, at least, for example, the luminance value on the reference plane when the height is set to 0 corresponds to phases corresponding to three different values in the phase of one cycle of the sine wave fringe pattern light to be irradiated. It is necessary to irradiate the measurement site of the object with the luminance change light having the luminance value and take an image. For these reasons, in order to obtain the height of the parts having different reflectances, when the object is stationary, switching between the presence / absence of dimming and the switching of the luminance value of the luminance change light is performed. There is a problem that it takes time to obtain information on the shape of the object.

  Therefore, the present invention has been made in view of such a situation, and an object of the present invention is to provide a mounting board production apparatus capable of performing object shape recognition accurately and at high speed.

  In order to achieve the above object, a mounting board production apparatus according to an embodiment of the present invention images a target object in an imaging target region and measures the shape of the target object based on the captured result. A mounting substrate production apparatus that uses a first imaging region for imaging a first imaging target region that is one of regions partitioned so that the imaging target region is arranged in a second direction, and the imaging target region Is an area segmented in the second direction and virtually divided into a second imaging region that images the second imaging target region aligned in the second direction with respect to the first imaging target region Luminance change light having a luminance distribution in which the luminance is the same along the first direction intersecting the second direction and the luminance is periodically changed according to the position in the second direction. The second direction and the second direction An irradiation unit that irradiates the surface defined by the direction obliquely; a moving unit that moves the object relative to the camera along a second direction; and a first imaging of the area image sensor A dimming unit for dimming one of the light amount of the first light toward the region and the light amount of the second light toward the second imaging region of the area image sensor at a predetermined degree than the other.

  According to this, the camera from the first imaging target area that is one of the imaging target areas of the area image sensor and is divided so that the imaging target areas are arranged in the second direction by the dimming unit. The amount of the first light directed to the first imaging area of the area image sensor and one of the areas divided so that the imaging target area is aligned in the second direction and in the second direction with respect to the first imaging target area One of the light amounts of the second light directed from the aligned second imaging target region to the second imaging region of the area image sensor is dimmed with a predetermined degree of dimming than the other. In other words, in the area image sensor of the camera, the amount of light when imaging in the first imaging region for imaging the first imaging target region is different from the amount of light when imaging in the second imaging region for imaging the second imaging target region. Images can be taken as the amount of light. Then, the moving unit moves the object relative to the camera along the second direction, which is a direction in which the first imaging target region and the second imaging target region are arranged in the imaging target region. Further, the irradiation unit emits luminance change light whose luminance periodically changes in the second direction, which is the direction in which the object moves relative to the camera.

  Thus, the moving unit is a direction in which the first imaging target region and the second imaging target region are aligned in the imaging target region with respect to the camera, and the direction in which the luminance change light periodically changes. In order to relatively move along the second direction, the area image sensor of the camera, for example, performs the continuous shooting so that the measurement site of the target is the first imaging target region and the second imaging target region in the second direction. After imaging at a plurality of (at least three or more) timings sequentially corresponding to a plurality of (at least three or more) positions corresponding to the phase of the desired luminance change light in one of the above, the measurement site of the target object in the second direction A plurality (at least 3) sequentially corresponding to a plurality (at least 3 or more) positions corresponding to the phase of the desired luminance change light in the other of the first imaging target region and the second imaging target region. It can be imaged at the timing of the above). In this way, the moving unit moves the object relative to the camera in the second direction, and the camera captures images at a plurality of desired timings described above. Imaging can be performed at positions corresponding to a plurality of phases in the desired luminance change light under each condition of the kind of light quantity. Accordingly, the moving unit captures the object in the second direction with respect to the camera in the state where the luminance change light for use in the phase shift method is applied to the measurement region of the object in each of the different light amounts. This can be done while moving the image relative to the image. Pixels that have become saturated in the captured image data or pixels that are buried in noise due to insufficient output values (luminance values) are generated. While preventing this, imaging for recognizing the shape of the object can be performed at high speed. Further, by moving a plurality of objects relatively continuously in the second direction with respect to the camera, imaging for recognizing the shapes of the plurality of objects can be performed at high speed.

  In addition, preferably, in the first line-shaped imaging target region in the first imaging target region irradiated with the linear first luminance distribution light parallel to the first direction by the irradiation unit, the target object The first line output value, which is the result of imaging the measurement site, is different from the first luminance distribution light, and the line-shaped second luminance distribution light parallel to the first direction is the irradiation unit. In the second line-shaped imaging target region within the first imaging target region irradiated by the second line output value that is a result of imaging the measurement site of the target and the second luminance distribution light are luminance And measuring the object in a third line-shaped imaging target region in the first imaging target region irradiated with the line-shaped third luminance distribution light parallel to the first direction by the irradiation unit. This is the result of imaging the part A determination unit for determining whether each of the three line output values is within a predetermined luminance range, and the first line output value, the second line output value, and the third line output value are all Outputs the first line output value, the second line output value, and the third line output value determined by the determination unit when it is determined by the determination unit to be within the predetermined luminance range A data acquisition unit to acquire, and a measurement site of the object by a phase shift method based on the first line output value, the second line output value, and the third line output value acquired by the data acquisition unit A waveform generation unit that generates a waveform of the object, the waveform being used for calculating a position in a third direction that intersects the first direction and the second direction. Further preferably, the data acquisition unit is configured so that the determination unit determines that any one of the first line output value, the second line output value, and the third line output value is not within the predetermined luminance range. If determined, the first line output value, the second line output value, and the third line output value are not acquired.

  According to this, the determination unit images the measurement site of the target in each of the first line-shaped imaging target region, the second line-shaped imaging target region, and the third line-shaped imaging target region in the first imaging target region. It is determined whether or not the first line output value, the second line output value, and the third line output value, which are obtained results, are within a predetermined luminance range. When the data acquisition unit determines that the first line output value, the second line output value, and the third line output value are all within a predetermined luminance range, the first line output value The second line output value and the third line output value are acquired. For example, when a predetermined luminance range is set between a minimum value that is not buried in noise without being short of an output value of the area image sensor and a value that does not cause luminance saturation (for example, a dynamic range), Of the values detected by the image sensor, the data acquisition unit acquires a value at which the light intensity is accurately detected. In addition, the data acquisition unit, when the determination unit determines that any one of the first line output value, the second line output value, and the third line output value is not within a predetermined luminance range, Therefore, the first line output value, the second line output value, and the third line output value are not acquired.

  In this way, the data acquisition unit acquires each output value (luminance value) when the determination unit determines a value with which the light intensity is accurately detected, and an output that includes an inaccurate value and cannot reproduce a sine wave. When the determination unit determines that the value is a value, the output value (luminance value) is not acquired. For this reason, it is possible to perform image processing on image data for recognizing the shape of the object by the phase shift method only for each output value (luminance value) determined by the determination unit to accurately reproduce the sine wave. .

  Preferably, the determination unit further determines that any one of the first line output value, the second line output value, and the third line output value is not within the predetermined luminance range. In addition, the fifth brightness distribution light in the second imaging target region irradiated with the line-like fifth brightness distribution light having the same brightness as the first brightness distribution light and parallel to the first direction is provided. In a line-shaped imaging target region, a fifth line output value that is a result of imaging the measurement site of the target object and a line that has the same luminance as the second luminance distribution light and is parallel to the first direction 6th line output value which is the result of having imaged the measurement part of the target object in the 6th line shape imaging object field in the 2nd imaging object field irradiated with the shape 6th luminance distribution light by the irradiation part And the third brightness distribution light and brightness In the seventh line-shaped imaging target region in the second imaging target region irradiated with the line-shaped seventh luminance distribution light parallel to the first direction by the irradiating unit. It is determined whether or not each of the seventh line output value, which is the result of imaging the measurement site, is within the predetermined luminance range. Furthermore, preferably, the data acquisition unit determines that any one of the fifth line output value, the sixth line output value, and the seventh line output value is within the predetermined luminance range. If determined, the fifth line output value, the sixth line output value, and the seventh line output value are acquired, and the waveform creation unit is configured to acquire the fifth line output value acquired by the data acquisition unit. A waveform used for calculating a position of the measurement site of the object in the third direction by a phase shift method based on the sixth line output value and the seventh line output value, the waveform of the object Create

  According to this, when the determination unit determines that any of the first line output value, the second line output value, and the third line output value is not within the predetermined luminance range, the first imaging target region The fifth line output is the result of the measurement site of the object imaged in step 5 being imaged in the fifth line-shaped imaging target area, the sixth line-shaped imaging target area, and the seventh line-shaped imaging target area of the second imaging target area Whether the value, the sixth line output value, and the seventh line output value are within a predetermined luminance range is determined. When the data acquisition unit determines that the fifth line output value, the sixth line output value, and the seventh line output value are all within a predetermined luminance range, the fifth line output value The sixth line output value and the seventh line output value are acquired. For example, when a predetermined luminance range is set between a minimum value that is not buried in noise without being short of an output value of the area image sensor and a value that does not cause luminance saturation (for example, a dynamic range), Of the values detected by the image sensor, the data acquisition unit acquires a value at which the light intensity is accurately detected.

  Thus, the determination unit includes a first line output value is captured output value (luminance value) in the first image capturing target area, one of the second line output value and the third line output value is predetermined If it is determined not within the luminance range, the fifth line output value object in the second image capturing target area for the next first imaging target region is an output value that has been captured, the sixth line output value and the seventh determines whether the brightness within a predetermined range for each of the line output value, the fifth line output value, within a luminance range in which all predetermined sixth line output value and the seventh line output value If it is determined that the data acquisition unit is the fifth line output values, in order to obtain the sixth line output value and the seventh line output values, each output value captured in the first image capturing target area (luminance value) ( 1st to 3rd line output value By if it is determined that the sine wave can not be reproduced, the output value captured in the second image capturing target area is a moving destination of the next object (luminance value) (fifth to seventh line output value) It will be judged. Then, each output value (luminance value) which is determined after if the (fifth to seventh line output value) in luminance predetermined range, the output value (luminance value) (fifth to seventh line output Value) is acquired by the data acquisition unit, and image processing can be performed on an output value (luminance value) that can accurately reproduce a sine wave.

  Preferably, when the determination unit determines that all of the first line output value, the second line output value, and the third line output value are within the predetermined luminance range, An output value that is a result of imaging by the second imaging region of the area image sensor is not determined.

  According to this, the fifth line output value, the sixth line output value, and the seventh line output value when all of the first line output value, the second line output value, and the third line output value are within the predetermined luminance range. The determination unit does not determine the line output value. In other words, all of the first line output value, the second line output value, and the third line output value are within the previously determined luminance range and are optimal values for recognizing the shape of the object. When it is determined by the determination unit, it is not necessary to refer to image data captured in the second imaging target area whose light amount has been changed from the first imaging target area, and the process is omitted. Thereby, when it is determined that all of the first line output value, the second line output value, and the third line output value acquired previously are optimum values, the data acquisition unit performs the following fifth operation. Since the process of acquiring the line output value, the sixth line output value, and the seventh line output value is not performed, the processing load for recognizing the shape of the object can be reduced.

  In addition, preferably, in the first line-shaped imaging target region in the first imaging target region irradiated with the linear first luminance distribution light parallel to the first direction by the irradiation unit, the target object The first line output value, which is the result of imaging the measurement site, is different from the first luminance distribution light, and the line-shaped second luminance distribution light parallel to the first direction is the irradiation unit. In the second line-shaped imaging target region within the first imaging target region irradiated by the second line output value that is a result of imaging the measurement site of the target and the second luminance distribution light are luminance And measuring the object in a third line-shaped imaging target region in the first imaging target region irradiated with the line-shaped third luminance distribution light parallel to the first direction by the irradiation unit. This is the result of imaging the part A three-line output value and an output value corresponding to the first line output value, the first luminance distribution light having the same luminance, and a line-shaped fifth luminance distribution parallel to the first direction In a fifth line-shaped imaging target region in the second imaging target region irradiated with light by the irradiation unit, a fifth line output value that is a result of imaging the measurement site of the target, and the second line The output value corresponding to the output value, the luminance is the same as that of the second luminance distribution light, and the line-shaped sixth luminance distribution light parallel to the first direction is irradiated by the irradiation unit. A sixth line output value that is a result of imaging a measurement site of the object in a sixth line-shaped imaging target region in the second imaging target region, and an output value corresponding to the third line output value, The brightness is the same as the third brightness distribution light. In addition, in the seventh line-shaped imaging target region in the second imaging target region irradiated with the line-shaped seventh luminance distribution light parallel to the first direction, the measurement part of the target is imaged A determination unit for determining whether each of the seventh line output value, which is a result of the determination, is within the predetermined luminance range; the first line output value; the second line output value; A data acquisition unit that acquires an output value within the predetermined luminance range among the third line output value, the fifth line output value, the sixth line output value, and the seventh line output value; When at least one of the first line output value, the second line output value, and the third line output value is not acquired by the data acquisition unit, the output value is not acquired by the data acquisition unit. Correspondence The output value captured in the second imaging target area is corrected from the output value corresponding to the light amount of the second light to the output value corresponding to the light amount of the first light based on the predetermined degree. Based on the output value acquired by the correction unit, the output value acquired by the data acquisition unit, and the correction value corrected by the correction unit, the first direction and the first direction of the measurement site of the object by the phase shift method A waveform generator used to calculate a position in a third direction that intersects the two directions, and generates a waveform of the object.

  According to this, the first line output value, the second line output value, and the third line output value, which are the results of imaging in the first imaging target area, and the results of imaging in the second imaging target area. The determination unit determines whether or not the output values (luminance values) of the fifth line output value, the sixth line output value, and the seventh line output value are within a predetermined luminance range. In addition, the data acquisition unit is predetermined among the first line output value, the second line output value, the third line output value, the fifth line output value, the sixth line output value, and the seventh line output value. The output value (luminance value) determined by the determination unit to be within the specified luminance range is acquired. The correction unit outputs an output value (not acquired by the data acquisition unit) when at least one of the first line output value, the second line output value, and the third line output value is not acquired by the data acquisition unit ( Light intensity of the first light from the output value corresponding to the light intensity of the second light, based on the predetermined dimming degree of the output value (luminance value) captured in the second imaging target area corresponding to the (luminance value) The output value corresponding to is corrected.

  Accordingly, the determination unit determines that any one of the first line output value, the second line output value, and the third line output value is not within the predetermined luminance range, and the output value (luminance value) is a sine. Even if the wave cannot be reproduced, it is an output value (luminance value) imaged at a phase corresponding to an output value that is not within a predetermined luminance range, and the first imaging target region in the second imaging target region The output value (luminance value) corresponding to the light amount of the output value (luminance value) determined by the determination unit from the output value (luminance value) captured in a state where the amount of light is different from the output value (luminance value) (Value) is corrected based on a predetermined dimming degree, so that it is determined that the value is not within a predetermined luminance range, and an inaccurate output value can be compensated as an accurate value. By performing such correction, even if an inaccurate output value exists in the output value imaged in the first imaging target area, the dimming rate of the dimming unit is determined from the output value imaged in the second imaging target area. Can be estimated. As a result, an accurate sine wave that can be used for the phase shift method can be reproduced with an accurate output value, and the shape of the object can be recognized with higher quality.

  Note that the present invention can be realized not only as such a mounting board production apparatus, but also as a mounting board production method that includes operations of characteristic components included in the mounting board production apparatus. Moreover, it is also realizable as a program for making a computer perform the mounting board production method. Such a program can also be distributed via a recording medium such as a CD-ROM or a transmission medium such as the Internet. The present invention can also be realized as an integrated circuit that performs processing of each processing unit.

  According to the mounting board production apparatus according to the present invention, the shape of an object can be recognized accurately and at high speed.

It is an external view which shows the structure of the mounting board | substrate production apparatus in 1st embodiment of this invention. It is a top view which shows schematic structure of an ND filter. It is a figure explaining the imaging region of an area image sensor. It is the figure which looked at the mounting board production apparatus shown in FIG. 1 along the Y-axis direction. It is a figure which shows the luminance distribution of luminance change light. It is a figure which shows an example of the brightness change light irradiated to the reference plane in the state where an object does not exist. It is a block diagram which shows the function structure of the mounting board | substrate production apparatus in 1st embodiment of this invention. It is a flowchart which shows an example of operation | movement of the mounting board | substrate production apparatus in 1st embodiment of this invention. It is a figure for demonstrating a phase difference. It is a figure for demonstrating the object which has a site | part of a different reflectance. It is a graph which shows the relationship between the output value (luminance value) of an area image sensor, and incident light intensity in the case where light reduction is not performed and the case where light reduction is performed. It is a block diagram which shows the function structure of the mounting board | substrate production apparatus in 2nd embodiment of this invention. It is a flowchart which shows an example of operation | movement of the mounting board | substrate production apparatus which concerns on 2nd embodiment of this invention. It is a graph for demonstrating the correction | amendment by the correction | amendment part for reproducing a sine wave pattern.

  Hereinafter, a mounting board production apparatus according to an embodiment of the present invention will be described with reference to the drawings.

<First embodiment>
FIG. 1 is an external view showing a configuration of a mounting board production apparatus 100 according to the first embodiment of the present invention. FIG. 2 is a plan view showing a schematic configuration of the ND filter 13. FIG. 3 is a diagram illustrating the imaging region of the area image sensor 11 of the camera 10. FIG. 4 is a view of the mounting board production apparatus 100 shown in FIG. 1 as viewed along the Y-axis direction.

  The mounted board production apparatus 100 is an apparatus that recognizes the shape of an object 30 such as a board, a part mounted on the board, or a part on the board as a target. As shown in the figure, the object 30 moves in the X-axis direction (second direction) while being placed on the reference plane B <b> 1 of the moving unit 40. The mounting board production apparatus 100 includes a camera 10, an irradiation unit 20, and a moving unit 40.

  Here, for simplification of description, in order to recognize the shape of the object 30, the object 30 is moved relative to the camera 10 in the X-axis direction (second direction) of the drawing by the moving unit 40. It will be done. That is, the camera 10 may be moved by the moving unit 40 with respect to the object 30 as the object, or the object 30 may be moved with respect to the camera 10. As an example, the movement of the object 30 is performed by placing the object 30 on a belt conveyor or table and transporting it, or a component in a state of being sucked and held by a tool of a mounting head that mounts the component on a substrate Or as an object 30 to be imaged. In the latter case, the positional relationship between the object 30 and the camera 10 is arranged upside down from that shown in FIG. That is, the camera 10 is arranged below the part as the object 30 held by the tool, and the irradiation unit 20 is arranged obliquely below the part held by the tool (not shown).

  The camera 10 includes a rectangular area image sensor 11 that can capture an imaging target area 110. The area image sensor 11 is, for example, a complementary metal oxide semiconductor (CMOS) image sensor having a number of pixels of 4000 × 3000 pixels. Here, a CMOS image sensor having a pixel number of 4000 × 3000 pixels is described as an example of a CMOS image sensor. Further, it may be a CCD (Charge Coupled Device) image sensor. The area image sensor 11 outputs a luminance value indicated by a numerical value from 0 to 255, for example, according to the detected light intensity. That is, the area image sensor 11 outputs light intensity as a luminance value detected by 256 numerical values.

  The camera 10 is provided with a lens 12 and an ND filter 13.

  For example, the lens 12 is defined by a Y-axis direction (first direction) in which an object 30 as an object is imaged and an X-axis direction (second direction) intersecting (orthogonal) with the Y-axis direction (first direction). An imaging target area 110 that is an area to be imaged is guided to the area image sensor 11 and is composed of a lens group including a telecentric lens (not shown).

  The ND filter 13 functions as a dimming unit, and images the first imaging target region 50 that is one of the regions that are segmented so that the imaging target region 110 of the camera 10 is aligned in the X-axis direction (second direction). The first imaging target region 50 is a region in which the amount of first light directed to the first imaging region 150 (see later) of the area image sensor 11 and the imaging target region 110 are divided in the X-axis direction (second direction). The amount of second light directed toward the second imaging region 160 (see later) of the area image sensor 11 that images the second imaging target region 60 different from the state of the amount of light different from the predetermined amount of dimming Let me.

  As illustrated in FIG. 2, the ND filter 13 serving as a light reduction unit includes a light amount of the first light traveling toward the first imaging region 150 of the area image sensor 11 and a second light traveling toward the second imaging region 160 of the area image sensor 11. The first filter area FA1 and the second filter area FA2 have different amounts of light with different amounts of light depending on a predetermined degree of dimming. The ND filter 13 as a light reducing portion hardly changes with respect to the amount of the first light traveling toward the first imaging area 150 of the area image sensor 11 in the first filter area FA1, and the area in the second filter area FA2. The amount of the second light traveling toward the second imaging region 160 of the image sensor 11 is reduced by a predetermined degree of dimming (for example, ½) from the amount of the first light (light having an arbitrary frequency). That is, the ND filter 13 as the light reducing unit does not reduce the light passing through the first filter area FA1, but reduces the light passing through the second filter area FA2 by a predetermined degree of light reduction. It has become. Note that the ND filter 13 as the light reduction unit may attenuate light passing through the first filter area FA1, and in this case, the second filter area FA2 is in the degree of attenuation by the first filter area FA1. Dimming or not dimming to a greater or lesser degree. That is, the form of the ND filter 13 as the light reduction unit is not limited as long as the degree of light attenuation in the first filter area FA1 and the degree of light attenuation in the second filter area FA2 are different.

  The irradiation unit 20 is an area that is defined by the X-axis direction (second direction) and the Y-axis direction (first direction) orthogonal to (intersects) the X-axis direction (second direction) and images the object 30 as an object. This is a light source that irradiates the first imaging target region 50 and the second imaging target region 60 that are brightness change light obliquely. The luminance change light emitted by the irradiation unit 20 has the same luminance along the Y-axis direction (first direction), and the luminance periodically changes according to the position in the X-axis direction (second direction). Brightness distribution.

  In addition, the luminance change light is irradiated on the reference plane B1, which is a virtual reference plane when the height of the object 30 in the imaging target region 110 is 0, for example, and is parallel to each other along the Y-axis direction. The luminance values at which each of the line-shaped imaging target areas 51 to 54 and 61 to 64 arranged in the same area are the same for all pixels within the same linear imaging target area. In addition, the luminance change light emitted by the irradiation unit 20 is emitted over at least the width of both ends of the first imaging target region 50 and the second imaging target region 60 in the Y-axis direction.

  The irradiation unit 20 includes a projection optical system such as a projector, and can be realized by a DMD (Digital Mirror Device), a liquid crystal, or the like. Note that the luminance change light that changes in the X-axis direction (second direction) is light having a sinusoidal fringe pattern. Further, the irradiation unit 20 may be configured to use a linear or planar parallel light source instead of the projection optical system. Even when a linear or planar light source is used, by arranging a pattern generator such as a grid pattern, DMD, or LCD (liquid crystal) in the light beam projected toward the imaging target area 110 of the object 30, The light that has passed through the pattern generator is converted into light having a sinusoidal fringe pattern, and is projected onto the imaging target area 110 as luminance change light.

  Specifically, as shown in FIG. 1, the object 30 as the target object becomes an object 30 in the imaging target region 110 while the irradiation unit 20 emits the luminance change light in the X-axis direction obliquely downward in the figure. By moving relative to the X-axis direction of the figure with respect to the irradiation unit 20 that irradiates the brightness change light and the camera 10 that captures the object 30, the irradiation unit 20 moves relatively along the X-axis direction. The object 30 to be illuminated is irradiated with luminance change light from the oblique direction in the X-axis direction.

  As shown in FIG. 4, the camera 10 is an object 30 as an object that moves relatively in the arrangement direction (X-axis direction) of a plurality of linear imaging target areas 51 to 54 and 61 to 64 extending in the Y-axis direction. The measurement site P, which is the measurement target site, is sequentially imaged at the timing of imaging when passing through each of the line-shaped imaging target regions 51 to 54 and 61 to 64. That is, for example, eight linear imaging target areas 51 to 54 of the imaging target area 110 before the measurement site P at the same position of the object 30 passes through the imaging target area 110 of the camera 10 in the X-axis direction. Since the images are sequentially captured at the imaging timings T1 to T8 when passing through 61 to 64, the camera performs imaging eight times to image the measurement site P of the same object 30. The X coordinates of the line-shaped imaging target areas 51 to 54 and 61 to 64 are assumed to be x1, x2, x3, x4, x5, x6, x7, and x8, respectively. The plurality of line-shaped imaging target areas 51 to 54 and 61 to 64 are areas within the imaging target area 110.

  As shown in FIG. 3, the area image sensor 11 of the camera 10 is virtually divided into a first imaging region 150 and a second imaging region 160. The first imaging region 150 of the area image sensor 11 that captures the first imaging target region 50 described above corresponds to the plurality of linear imaging target regions 51 to 54 extending along the Y-axis direction of the first imaging target region 50. A plurality of line-shaped image pickup areas 151 to 154 each including a line-shaped pixel group in the image pickup device. In addition, as described above, the second imaging region 160 of the area image sensor 11 that images the second imaging target region 60 has a plurality of linear imaging target regions 61 to 61 that extend along the Y-axis direction of the second imaging target region 60. 64 have a plurality of line-shaped imaging regions 161 to 164 for imaging.

  That is, the measurement site P of the object 30 that moves from the right to the left in the X-axis direction in FIG. 4 with respect to the imaging target area 110 is a plurality of linear imaging areas 151 to 154 and 161 of the area image sensor 11. 164 to 164 correspond to the positions of the linear imaging target areas 51 to 54 and 61 to 64 of the imaging target area 110 (positions of X coordinates x1, x2, x3, x4, x5, x6, x7, x8). Images are taken sequentially at the timings T1 to T8 of the first to eighth imaging.

  Next, the luminance change light that the irradiation unit 20 irradiates the imaging target region 110 will be described in detail.

  The irradiation unit 20 serves as a reference height in the Z-axis direction when the height of the object 30 as the target in the imaging target region 110 is set to 0, for example, from the upper right diagonal direction in the X-axis direction in FIG. Luminance change light is irradiated to the reference plane B1, which is a virtual plane. This luminance change light is light (light having a sinusoidal fringe pattern) in which the change in position of the luminance distribution can be indicated by a sine wave. For example, as shown in FIG. 5, the luminance distribution of the luminance change light is a reference plane when the height of the object 30 in the plurality of linear imaging target areas 51 to 54 and 61 to 64 in the imaging target area 110 is zero. When the luminance distribution on B1 is a luminance curve indicated by the X coordinate on the horizontal axis and the luminance on the vertical axis, the waveform of the luminance distribution is indicated by a sine wave. For example, in eight line-shaped imaging target areas (line-shaped imaging target areas 51, 52, 53, 54, 61, 62, 63 and 64) having X coordinates of x1, x2, x3, x4, x5, x6, x7 and x8 The phase of the sine wave is a phase in which 0 radians, (π / 2) radians, π radians, and (3π / 2) radians are repeated twice. As described above, when the number of lines in the line-shaped imaging target area in each line-shaped imaging target area group (the number of line-shaped imaging areas) is N (in this case, N = 8), the luminance change The phase of the luminance distribution of light differs by (2π / N) radians between adjacent linear imaging regions.

  Note that the reference surface B1 as a virtual surface may be irradiated with the brightness change light and adjusted in advance by placing a reference jig plate or the like in the imaging target region 110 as the reference surface B1 for experimental adjustment. .

  FIG. 6 shows an example of the luminance change light irradiated to the reference plane B1 as the reference height plane in the Z-axis direction when the height of the object 30 in a state where the object 30 as the target does not exist is zero. FIG. As shown in the figure, luminance change light indicated by a sine wave whose luminance does not change in the Y-axis direction and whose luminance periodically changes in the X-axis direction is, for example, a second line-shaped imaging target whose X coordinate is x2. The region 52 and the sixth line-shaped imaging target region 62 whose X coordinate is x6 are the brightest, and the fourth line-shaped imaging target region 54 whose X coordinate is x4 and the eighth linear imaging target region 64 whose X coordinate is x8 are the brightest. Get dark.

  Note that the luminance change light is emitted from the irradiation unit 20 from obliquely above in the X-axis direction with respect to the reference plane B1 arranged in the imaging target region 110. For this reason, the luminance change light has a luminance distribution of luminance change indicated by a sine wave in a direction perpendicular to the reference plane B1 defined in the X-axis direction and the Y-axis direction (Z-axis direction). The line-shaped imaging target regions 51 to 54 and 61 to 64 have a luminance distribution of luminance change indicated by a sine wave in the arrangement direction (X-axis direction). Further, the luminance change light has a luminance distribution having the same (uniform) luminance in each of the linear imaging target areas 51 to 54 and 61 to 64 extending in the Y-axis direction.

  Here, the description returns to the area of the imaging element of the area image sensor 11 of the camera 10 that captures the imaging target area 110 that is the imaging area of the object 30 in FIG. 3. The plurality of linear imaging regions 151 to 154 of the first imaging region 150 of the area image sensor 11 and the plurality of linear imaging regions 161 to 164 of the second imaging region 160 are used when the camera 10 and the irradiation unit 20 are installed or adjusted. The position of the X coordinate at which the luminance value of the luminance change light irradiated by the irradiation unit 20 on the reference plane B1 previously set for adjustment in the imaging target region 110 becomes a desired luminance value (for example, at the time of initial setting) Are each set as a line-shaped imaging region composed of a line-shaped pixel group. Specifically, on the reference plane B1 which is a plane as a height reference in the Z-axis direction when the height of the object 30 as an imaging target when the object 30 passes in the X-axis direction is set to 0, for example. After the irradiated luminance change light is imaged by the area image sensor 11 of the camera 10, the luminance change light is based on the image data in the X-axis direction imaged in the first imaging region 150 of the imaged area image sensor 11. A line-like pixel group parallel to the Y-axis direction in which the luminance corresponding to the phase of the sine wave fringe pattern is taken to correspond to 0 radians (2π radians) is set as the first line-like imaging region 151, and the phase is (1/2 ) A line-like pixel group parallel to the Y-axis direction in which the luminance corresponding to π radians is imaged is set as the second line-shaped imaging region 152, and the phase is set in the Y-axis direction in which the luminance corresponding to π radians is imaged. A line-shaped pixel group is set as a third line-shaped imaging region 153, and a line-shaped pixel parallel to the Y-axis direction in which luminance is captured corresponding to a phase of (3/2) π radians is defined as a fourth line shape. Set as the imaging region 154. Similarly, based on the pixel data in the X-axis direction imaged in the second imaging region 160 of the area image sensor 11, the Y-axis obtained by imaging the luminance corresponding to the phase of the sinusoidal fringe pattern of the luminance change light of 0 radians. A line-like pixel group parallel to the direction is set as the fifth line-shaped imaging region 161, and a line-like pixel group parallel to the Y-axis direction in which the luminance corresponding to (1/2) π radians is imaged. A line-like pixel group parallel to the Y-axis direction in which the luminance corresponding to π radians is imaged is set as the sixth line-shaped imaging region 162, and the phase is (3/2). ) A line-like pixel group parallel to the Y-axis direction in which the luminance corresponding to π radians is imaged is set as the eighth line-shaped imaging region 164.

  Next, a functional configuration in which the mounting board production apparatus 100 controls each unit illustrated in FIG. 4 will be described in detail.

  FIG. 7 is a block diagram showing a functional configuration of the mounting board production apparatus 100 according to the first embodiment of the present invention.

  As shown in the figure, the mounting board production apparatus 100 includes a control unit 101 that controls each unit in addition to the irradiation unit 20 and the camera 10 shown in FIG. The control unit 101 is a computer that controls each unit incorporated in the mounting board production apparatus 100, but may be realized by a general-purpose computer system such as a personal computer executing a program.

  The control unit 101 includes an irradiation processing unit 102, an imaging processing unit 103, and a recognition unit 104.

  The irradiation processing unit 102 controls the irradiation unit 20. Specifically, the irradiation processing unit 102 causes the irradiation unit 20 to irradiate the reference plane B1 as a virtual surface of the imaging target region 110 with the luminance change light.

  The imaging processing unit 103 includes a movement processing unit 103a, a determination unit 103b, a data acquisition unit 103c, and a waveform creation unit 103d.

  The movement processing unit 103a controls the moving unit 40 to arrange a plurality of linear imaging target regions 51 to 54 and 61 to 64 arranged in parallel with each other in the first imaging target region 50 and the second imaging target region 60. For example, the object 30 is relatively moved in the X-axis direction, which is a direction, at a predetermined constant speed, for example. The imaging processing unit 103 passes through at least the same measurement site P in the moving object 30 through the linear imaging target areas 51 to 54 and 61 to 64 of the first imaging target area 50 and the second imaging target area 60. In this case, the imaging is performed at the imaging timings T1 to T8.

  In the first line-shaped imaging target region 51 in the first imaging target region 50 in which the linear first luminance distribution light parallel to the Y-axis direction (first direction) is irradiated by the irradiation unit 20, the determination unit 103b The first line output value, which is the result of imaging the measurement site P of the object 30 as the object, and the first luminance distribution light are different in luminance, and are linear in the Y-axis direction (first direction). In the second line-shaped imaging target region 52 in the first imaging target region 50 irradiated with the second brightness distribution light of the first luminance distribution light, the measurement site P of the object 30 as the target is imaged. The two-line output value and the second luminance distribution light are different in luminance, and the first imaging target irradiated with the line-shaped third luminance distribution light parallel to the Y-axis direction (first direction) by the irradiation unit 20 In the third line-shaped imaging target area 53 in the area 50 The third line output value, which is the result of imaging the measurement site P of the object 30 as the object, and the first luminance distribution light, the second luminance distribution light, and the third luminance distribution light have different luminances, and In the fourth linear imaging target area 54 in the first imaging target area 50 irradiated with the line-shaped fourth luminance distribution light parallel to the Y-axis direction (first direction), Each of the fourth line output values obtained as a result of imaging the measurement site P of the object 30 and a predetermined brightness range (for example, brightness values that can be output by the area image sensor) are detected with high accuracy and stability. In the range of 30 to 230 of 256 gradation values ranging from 0 to 255.

  Further, when the determination unit 103b determines that any one of the first line output value, the second line output value, the third line output value, and the fourth line output value is not within the predetermined luminance range, The first luminance distribution light in the second imaging target region 60 in which the luminance is the same and the line-shaped fifth luminance distribution light parallel to the Y-axis direction (first direction) is irradiated by the irradiation unit 20. In the five-line imaging target region 61, the fifth line output value, which is the result of imaging the measurement site P of the object 30 as the target, has the same luminance as the second luminance distribution light, and is in the Y-axis direction. Measurement of the object 30 as a target in the sixth line-shaped imaging target region 62 in the second imaging target region 60 irradiated with the line-shaped sixth luminance distribution light parallel to the (first direction). The sixth lie, which is the result of imaging the part P The second imaging target region that is irradiated by the irradiating unit 20 with the output value, the third luminance distribution light having the same luminance, and the line-shaped seventh luminance distribution light parallel to the Y-axis direction (first direction) In the seventh line-shaped imaging target region 63 in 60, the seventh line output value, which is the result of imaging the measurement site P of the object 30 as the target, has the same luminance as the fourth luminance distribution light, and In the eighth line-shaped imaging target region 64 in the second imaging target region 60 irradiated with the line-shaped eighth luminance distribution light parallel to the Y-axis direction (first direction), as an object It is determined whether or not each of the eighth line output value that is a result of imaging the measurement site P of the object 30 is within the predetermined luminance range.

  The determination unit 103b also includes a first line output value, a second line output value, a third line output value, and a first line output value obtained as a result of imaging the measurement site P of the object 30 as the target in the first imaging target region 50. When it is determined that all the four line output values are within the predetermined luminance range, the fifth line output value, the fifth line output value, which is the result of imaging the measurement site P of the object 30 in the second imaging target region 60, The six line output value, the seventh line output value, and the eighth line output value are not judged.

  When the determination unit 103b determines that the first line output value, the second line output value, the third line output value, and the fourth line output value are all within a predetermined luminance range, the data acquisition unit 103c The first line output value, the second line output value, the third line output value, and the fourth line output value determined by the determination unit 103b are acquired. In addition, the data acquisition unit 103c determines by the determination unit 103b that any one of the first line output value, the second line output value, the third line output value, and the fourth line output value is not within a predetermined luminance range. In this case, the first line output value, the second line output value, the third line output value, and the fourth line output value are not acquired. The data acquisition unit 103c determines that any of the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value is within the predetermined luminance range. When it is determined, the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value are acquired.

  The waveform creation unit 103d uses the phase shift method to measure the target region based on the first line output value, the second line output value, the third line output value, and the fourth line output value acquired by the data acquisition unit 103c. Is a waveform used for calculating a position in the Y-axis direction (first direction) and the Z-axis direction (third direction) intersecting the X-axis direction (second direction), and the height of the object 30 as the object Create a waveform (sine wave) indicating Further, the waveform creation unit 103d is used as an object by the phase shift method based on the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value acquired by the data acquisition unit 103c. A waveform (sinusoidal wave) indicating the height of the object 30 as an object is generated, which is used for calculating the position of the measurement site P of the object 30 in the Z-axis direction (third direction).

  The recognizing unit 104 recognizes the shape of the object 30 according to the phase shift method using the sine wave waveform imaged by the area image sensor 11 of the camera 10 and generated by the waveform generating unit 103d. Specifically, the recognizing unit 104 uses the sine wave waveform of the luminance value of the luminance change light generated by the waveform generating unit 103 d from the image data obtained by imaging the measurement site P of the object 30, and the object 30 by the irradiation unit 20. The height of the object 30 is detected from the phase difference from the reference sine wave irradiated to the reference plane B1 when the height in the Z-axis direction is zero (corresponding to the case where the height of the object is zero) By doing so, the shape of the object 30 is recognized.

  The control unit 101 may include a display unit such as a CRT (Cathode Ray Tube) or an LCD (Liquid Crystal Display), an input unit such as a keyboard or a mouse, or the like.

  Next, processing in which the mounting board production apparatus 100 recognizes the shape of an object will be described.

  FIG. 8 is a flowchart showing an example of the operation of the mounting board production apparatus 100 in the first embodiment of the present invention.

  In accordance with an instruction from the irradiation processing unit 102, the irradiating unit 20 emits luminance change light whose luminance periodically changes according to the position in the X-axis direction, and the first imaging target region 50 and the second imaging target region in the imaging target region 110. 60 is irradiated respectively (S101). That is, as illustrated in FIG. 4, the irradiation unit 20 transmits the luminance change light in the X-axis direction to the object 30 that moves relative to the camera 10 and the irradiation unit 20 in the X-axis direction in the imaging target region 110. Irradiate from the upper right direction in the figure.

  The area image sensor 11 of the camera 10 in accordance with an instruction from the imaging processing unit 103 has a plurality of linear imaging target areas 51 to 54 and 61 arranged in parallel to each other on a reference plane B1 that is a virtual plane in the imaging target area 110. The measurement site P of the object 30 that moves relatively in the arrangement direction (X-axis direction) of ~ 64 is imaged when passing through each of the line-shaped imaging target areas 51 to 54 and 61 to 64 (S102). That is, for example, as illustrated in FIG. 4, the reference plane B <b> 1 that is a virtual reference plane in the Z-axis direction (a reference plane when the height of the object 30 is 0) in which the object 30 moves along the X-axis direction. A measurement site P, which is a measurement site as the height of the object 30 that moves relatively from the right to the left in the X-axis direction in FIG. 154 and 161 to 164 are imaging timings T1 to T8 for imaging when the measurement site P of the object 30 passes through the positions of the X coordinates x1, x2, x3, x4, x5, x6, x7, and x8, Take images sequentially. For example, in the measurement site P on the object 30, at the position of the X coordinate x 1, the light (luminance value) of the luminance change light reflected on the object 30 as the position 31 is received by the first line-shaped imaging region 151. . In addition, at the position of the X coordinate x4, the light reflected on the object 30 as the position 34 is received by the fourth line-shaped imaging region 154. For example, the phase of the luminance change light irradiated to the position of the X coordinate x1 on the reference plane B1 is 0 radians. However, the phase of the luminance change light irradiated as the position 31 on the measurement site P of the object 30 having the same X coordinate x1 is not 0 radians but is close to (π / 2) radians.

  FIG. 9 shows a reference waveform when the height of the object 30 indicating the position change of the luminance distribution of the luminance change light on the reference plane B1 where the height in the Z-axis direction of the object 30 is zero is 0, for example. A sine wave 81 and a sine wave 82 indicating the position change of the luminance distribution of the luminance change light at the measurement site P, which is the height of the object 30 when the object 30 is imaged, are shown. The vertical and horizontal axes of the graph are the same as the graph shown in FIG. From FIG. 9, the phase is shifted by Δφ between the sine wave 81 of the reference waveform when the height of the object 30 is 0 and the sine wave 82 of the imaging waveform of the object obtained by imaging the object 30 as the object. I understand. If the height of the object 30 is 0, the phase difference Δφ is 0, but the value of the phase difference Δφ increases as the height of the object 30 increases. In the phase shift method, the height of the object 30 is obtained from this phase difference Δφ. In the phase shift method, the sine wave 82 can be obtained by imaging the same measurement position (measurement site P) of the object 30 at four different X coordinate positions of the luminance change light.

  The determination unit 103b is an output value (luminance value) of each of the line-shaped imaging regions 151 to 154 of the first imaging region 150 of the area image sensor 11 that images the measurement site P of the object 30 in the first imaging target region 50. Each of the one-line output value, the second-line output value, the third-line output value, and the fourth-line output value is, for example, a predetermined luminance range that can be detected stably with high accuracy (for example, an area image sensor can output it) It is determined whether or not it is within the range of 30 to 230 of 256 gradation values ranging from 0 to 255 indicating the luminance value (S103).

  When the determination unit 103b determines that the first line output value, the second line output value, the third line output value, and the fourth line output value are all within a predetermined luminance range, the data acquisition unit 103c The first line output value, the second line output value, the third line output value, and the fourth line output value determined by the determination unit 103b are acquired (S104).

  When the determination unit 103b determines that any of the first line output value, the second line output value, the third line output value, and the fourth line output value is not within a predetermined luminance range, the second imaging is performed. A fifth line output value and a sixth line, which are output values (luminance values) of the line-shaped imaging regions 161 to 164 of the second imaging region 160 of the area image sensor 11 that images the measurement site P of the object 30 in the target region 60. It is determined whether each of the output value, the seventh line output value, and the eighth line output value is within the predetermined luminance range (S105). In this case (determination unit 103b determines that any one of the first line output value, the second line output value, the third line output value, and the fourth line output value is not within the predetermined luminance range. The data acquisition unit 103c does not output the first line output value, the second line output value, the third line output value, and the fourth line output value determined by the determination unit 103b.

  When the data acquisition unit 103c determines that the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value are all within the predetermined luminance range, by the determination unit 103b Then, the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value are acquired (S106).

  For example, as shown in FIG. 10, it is assumed that there is an object 30 in which a low reflectance member 30a and a high reflectance member 30b are mixed. The object 30 shown in FIG. 10 is made of a low-reflectance member 30a made of resin, for example, black and the surface is textured, and a metallic color made of metal such as an electrode terminal and has a mirror-like surface. The high-reflectance member 30b that easily reflects light. FIG. 11 shows a case where light passes through the first filter area FA1 of the ND filter 13 ((i) no filter: that is, almost no dimming is performed) and light in the second filter area FA2 of the ND filter 13. 4 is a graph showing the relationship between the output value of the area image sensor 11 and the intensity of incident light on the area image sensor 11 when (2) is present (that is, when dimming is performed).

  In FIG. 11, the incident light intensity A indicates the light intensity of the light reflected by the low reflectance member 30a, and the incident light intensity B indicates the light intensity of the light reflected by the high reflectance member 30b. Yes. Note that the predetermined luminance range (30 to 230) of the output value (luminance value) of the area image sensor 11 in FIG. 11 corresponds to the incident light intensity that the area image sensor 11 can detect accurately and stably, for example. This is a range of output values (luminance values) to be performed. In other words, when an output value (luminance value) outside the predetermined luminance range is output by the area image sensor 11, there is a high possibility of erroneous detection. For example, when the output value (brightness value) indicates 15, the incident light intensity is too small to be detected by the area image sensor 11 and is buried in the noise of the area image sensor 11, causing so-called blackout. End up. For example, when the output value (luminance value) is 255, the incident light intensity is too high for the area image sensor 11 to detect, and so-called whiteout occurs that causes luminance saturation.

  As shown in FIG. 11, when the area image sensor 11 captures the light that has passed through the first filter area FA1 of the ND filter 13 (when no filter is present), it is reflected by the low reflectance member 30a having the incident light intensity A. The output value (luminance value) at which light is detected by the area image sensor 11 is 100, for example, and is within the predetermined luminance range, and is determined to be OK by the determination unit 103b. On the other hand, when the area image sensor 11 captures the light that has passed through the second filter area FA2 of the ND filter 13 (when the filter is present), the light reflected by the low reflectance member 30a having the incident light intensity A is the area image. The output value (luminance value) detected by the sensor 11 is, for example, 25, and is outside a predetermined luminance range, so that the pixel in which the light on the image data is detected may be blacked out. High nature.

  In addition, the output value (luminance value) detected by the area image sensor 11 for the light reflected by the high reflectivity member 30b having the incident light intensity B in the case of no filter (FA1 passing) is a value far exceeding, for example, 255. Therefore, 255 is output. In this case, as described above, the pixel in which the light on the image data is detected has caused whiteout. On the other hand, the output value (luminance value) detected by the area image sensor 11 for the light reflected by the high reflectivity member 30b when there is a filter (passing FA2) is, for example, 200, and is a predetermined luminance range. The determination unit 103b determines that it is OK. As described above, when the same object 30 is configured by the low reflectance member 30a and the high reflectance member 30b which are members having different reflectances, the light enters the area image sensor 11 with a filter (passing through FA2). If only the result of imaging with dimming the amount of light, or only the result of imaging without dimming the amount of light entering the area image sensor 11 without a filter (passing through FA1), so-called blackout, overexposure, etc. NG value, which is a value of poor quality, may be included. For this reason, even if it is the object 30 comprised by the low reflectance member 30a and the high reflectance member 30b which are members from which reflectance differs by performing the process of said step S103-S106, NG value is obtained. Since it can be excluded, the shape of the object 30 can be recognized with high quality.

  Referring to FIG. 8 again, the recognition unit 104 recognizes the shape of the object 30 according to the phase shift method using the image data of the measurement site P of the object 30 captured by the area image sensor 11 (S107). Specifically, the measurement site P of the object 30 located at the X coordinates x1, x2, x3, x4, x5, x6, x7, and x8 when passing through the first imaging target region 50 and the second imaging target region 60. When the luminance of the image data is a, b, c, and d, respectively, the recognition unit 104 calculates the phase φ of the sine wave 82 according to Equation 1 below.

φ = tan ⁻¹ ((b−d) / (c−a)) (Formula 1)

  The recognition unit 104 calculates a phase difference Δφ from the calculated phase φ with respect to the phase φ ′ of the sine wave 81 of the reference waveform when the height of the object 30 corresponding to the phase φ is 0, and the calculated phase difference Δφ. The shape of the object 30 is recognized by calculating the height of the object 30 at the measurement site P of the object 30 from the above. Further, the more detailed the shape of the object 30 can be recognized as a plurality of measurement sites P on the object 30 are measured. The method for calculating the height of the object 30 from the phase difference Δφ is a known technique as a phase shift method, and is not the main point of the present invention, so a detailed description thereof will be omitted.

  In Step S105, when the determination unit 103b determines that any of the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value is not within the predetermined luminance range. The data acquisition unit 103c displays an unrecognizable error display without outputting the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value (S108).

  Thus, the process of recognizing the shape of the object by the mounting board production apparatus 100 ends.

  As described above, according to the mounting board production apparatus 100 according to the first embodiment, the camera 10 is the imaging target area 110 of the area image sensor 11 by the ND filter 13 serving as a dimming unit, and is the imaging target. From the amount of the first light L1 that travels from the first imaging target region 50, which is one of the regions partitioned so that the region 110 is aligned in the X-axis direction (second direction), to the first imaging region 150 of the area image sensor 11. Is also one of the areas that are segmented so that the imaging target area 110 is aligned in the X-axis direction (second direction), and is second aligned in the X-axis direction (second direction) with respect to the first imaging target area 50. The light quantity of the second light L2 from the imaging target area 60 toward the second imaging area 160 of the area image sensor 11 is dimmed with a predetermined degree of dimming. That is, in the area image sensor 11 of the camera 10, an image is captured in the second imaging region 160 that captures the second imaging target region 60 rather than a light amount when the first imaging region 150 that captures the first imaging target region 50 is captured. It is possible to take an image while reducing the amount of light. The moving unit 40 then moves the object 30 as the target object in the imaging target area 110 with respect to the area image sensor 11 of the camera 10 in the direction in which the first imaging target area 50 and the second imaging target area 60 are aligned. Move relatively along the direction (second direction). Further, the irradiation unit 20 emits luminance change light whose luminance periodically changes with respect to the X-axis direction (second direction), which is the direction in which the object 30 as the target moves with respect to the camera 10.

  The first imaging target area 50 and the second imaging target area 60 are aligned in the imaging target area 110 with respect to the camera 10, and the X-axis direction (second direction in which the luminance change light periodically changes) The area image sensor 11 of the camera 10 performs, for example, continuous shooting to measure the measurement site of the object 30 as the target object. A plurality of Ps corresponding to the phases of the desired luminance change light in the first imaging target region 50 that is one of the first imaging target region 50 and the second imaging target region 60 in the imaging target region 110 (4 in the first embodiment). Image) at a plurality of (four in the first embodiment) timings T1 to T4 corresponding to the positions (X coordinates x1, x2, x3, x4), and then the measurement site P of the object 30 is imaged. 110 in the second imaging target region 60 that is the other of the first imaging target region 50 and the second imaging target region 60 (four in the present embodiment) corresponding to the phase of the luminance change light (X coordinate x5). , X6, x7, x8), it is possible to pick up images at a plurality of timings T5 to T8 (four in this embodiment). As described above, the camera 10 captures images at the plurality of corresponding timings T1 to T8 while the moving unit 40 moves the object 30 as the target object relative to the camera 10 in the X-axis direction (second direction). Thus, with respect to the measurement site P of the object 30 as the target, each position (X coordinate x1, x2,. Imaging at x3, x4, x5, x6, x7, x8) can be performed. Therefore, imaging is performed in a state in which luminance change light for use in the phase shift method is irradiated on the measurement site P of the object 30 as the target in each of the different amounts of light by the ND filter 13 as the dimming unit. The moving unit 40 can sequentially perform the operation while moving the object 30 as the object relative to the camera 10 in the X-axis direction (second direction), and the luminance saturation is obtained in the captured image data. High-speed imaging for recognizing the height shape of the object 30 in the Z-axis direction, while preventing the occurrence of pixels that have suffered from an image or pixels that are insufficient in output values (luminance values) and are buried in noise It can be carried out. In addition, by moving the object 30 as a plurality of objects relatively continuously in the X-axis direction (second direction) with respect to the camera 10, the height shape of the plurality of objects 30 in the Z-axis direction is recognized. Imaging can be performed at high speed.

  Moreover, according to the mounting board production apparatus 100 according to the first embodiment, the determination unit 103b includes the first line-shaped imaging target area 51, the second line-shaped imaging target area 52, and the third line in the first imaging target area 50. In each of the line-shaped imaging target region 53 and the fourth line-shaped imaging target region 54, the first line output value, the second line output value, and the third result obtained by imaging the measurement site P of the object 30 as the target object. It is respectively determined whether or not the line output value and the fourth line output value are within a predetermined luminance range. When the data acquisition unit 103c determines by the determination unit 103b that all of the first line output value, the second line output value, the third line output value, and the fourth line output value are within a predetermined luminance range. In addition, the first line output value, the second line output value, the third line output value, and the fourth line output value are acquired. For example, as a predetermined luminance range, the output value (luminance value) of the area image sensor 11 is not predetermined and is predetermined from a minimum value that is not buried in noise to a value at which luminance saturation does not occur (for example, dynamic range). When the brightness range is set, the data acquisition unit 103c acquires a value from which the light intensity is accurately detected among the values detected by the area image sensor 11. In addition, the data acquisition unit 103c determines by the determination unit 103b that any one of the first line output value, the second line output value, the third line output value, and the fourth line output value is not within a predetermined luminance range. In this case, since the sine wave 82 cannot be reproduced, the first line output value, the second line output value, the third line output value, and the fourth line output value are not acquired.

  In this way, the data acquisition unit 103c acquires each output value (brightness value) when the determination unit 103b determines the value with which the light intensity is accurately detected, and reproduces a sine wave including an inaccurate value. When the determination unit 103b determines that the output value (luminance value) cannot be obtained, the output value (luminance value) is not acquired. For this reason, it is possible to perform image processing on image data for recognizing the shape of the object by the phase shift method for only each output value (luminance value) determined by the determination unit 103b that the sine wave can be accurately reproduced. it can.

  In addition, according to the mounting board production apparatus 100 according to the first embodiment, the determination unit 103b determines whether any of the first line output value, the second line output value, the third line output value, and the fourth line output value is in advance. When it is determined that it is not within the determined luminance range, the measurement site P of the object 30 as the target imaged in the first imaging target region 50 is the fifth line-shaped imaging target region 61 of the second imaging target region 60. , The fifth line output value, the sixth line output value, and the seventh line output, which are the results of imaging in the sixth line-shaped imaging target area 62, the seventh line-shaped imaging target area 63, and the eighth line-shaped imaging target area 64. It is determined whether or not the value and the eighth line output value are within a predetermined luminance range. When the data acquisition unit 103c determines by the determination unit 103b that all of the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value are within a predetermined luminance range. In addition, the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value are obtained. For example, as a predetermined luminance range, the output value (luminance value) of the area image sensor 11 is not predetermined and is predetermined from a minimum value not buried in noise to a value at which luminance saturation does not occur (for example, dynamic range). When the brightness range is set, the data acquisition unit 103c acquires a value from which the light intensity is accurately detected among the values detected by the area image sensor 11 of the camera 10.

  As described above, the determination unit 103b includes the first line output value, the second line output value, the third line output value, and the fourth line output value that are output values (luminance values) imaged in the first imaging target region 50. When it is determined that any of the above is not within the predetermined luminance range, the measurement site P of the object 30 as the target is imaged in the second imaging target area 60 next to the first imaging target area 50. Determining whether each of the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value, which are output values (luminance values), is within a predetermined luminance range; When it is determined that the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value are all within the predetermined luminance range, the data acquisition unit 103c outputs the fifth line output value. Value, 6th line In order to acquire the force value, the seventh line output value, and the eighth line output value, a sine wave is generated by each output value (luminance value) (first to fourth line output values) imaged in the first imaging target region 50. When it is determined that it cannot be reproduced, each output value (luminance value) (fifth to seventh line output values) imaged in the second imaging target region 60 that is the destination of movement of the object 30 as the next target object. Will be judged. If each output value (brightness value) (fifth to seventh line output value) determined later is within a predetermined luminance range, each output value (brightness value) (fifth to seventh line output) Value) is acquired by the data acquisition unit 103c, it is possible to perform image processing on an output value (luminance value) that can accurately reproduce a sine wave.

<Second embodiment>
Next, a second embodiment of the present invention will be described.

  The mounting board production apparatus 200 according to the second embodiment shown in FIG. 12 is different from the mounting board production apparatus 100 according to the first embodiment shown in FIG. 7 in that the imaging processing unit 103 further includes a correction unit 103e. Since the processing performed by the determination unit 103b, the data acquisition unit 103c, and the waveform creation unit 103d in order for the mounting board production apparatus 200 to recognize the shape of the object is different, the configuration common to the mounting board production apparatus 100 according to the first embodiment Will be omitted, and a configuration and processing different from the imaging processing unit 103 of the mounting board production apparatus 200 according to the first embodiment will be described.

  In the first line-shaped imaging target region 51 in the first imaging target region 50 in which the linear first luminance distribution light parallel to the Y-axis direction (first direction) is irradiated by the irradiation unit 20, the determination unit 103b The first line output value, which is the result of imaging the measurement site P of the object 30 as the object, and the first luminance distribution light are different in luminance, and are linear in the Y-axis direction (first direction). In the second line-shaped imaging target region 52 in the first imaging target region 50 irradiated with the second brightness distribution light of the first luminance distribution light, the measurement site P of the object 30 as the target is imaged. The two-line output value and the second luminance distribution light are different in luminance, and the first imaging target irradiated with the line-shaped third luminance distribution light parallel to the Y-axis direction (first direction) by the irradiation unit 20 In the third line-shaped imaging target area 53 in the area 50 The third line output value, which is the result of imaging the measurement site P of the object 30 as the object, and the first luminance distribution light, the second luminance distribution light, and the third luminance distribution light have different luminances, and In the fourth linear imaging target area 54 in the first imaging target area 50 irradiated with the line-shaped fourth luminance distribution light parallel to the Y-axis direction (first direction), The fourth line output value that is the result of imaging the measurement site P of the object 30 and the output value (luminance value) corresponding to the first line output value, and the first luminance distribution light and the luminance are the same, And in the 5th linear imaging target area | region 61 in the 2nd imaging target area | region 60 in which the linear 5th brightness distribution light parallel to a Y-axis direction (1st direction) is irradiated by the irradiation part 20, as a target object Is the result of imaging the measurement site P of the object 30 A line output value and an output value (luminance value) corresponding to the second line output value, the luminance is the same as that of the second luminance distribution light, and a line shape parallel to the Y-axis direction (first direction) The measurement site P of the object 30 as the target is imaged in the sixth line-shaped imaging target region 62 in the second imaging target region 60 irradiated with the sixth luminance distribution light of the second. Six line output values and output values (luminance values) corresponding to the third line output values, the same luminance as the third luminance distribution light, and parallel to the Y-axis direction (first direction) The measurement site P of the object 30 as an object is imaged in the seventh line-shaped imaging target region 63 in the second imaging target region 60 irradiated with the shape-like seventh luminance distribution light by the irradiation unit 20. Output corresponding to the 7th line output value and 4th line output value The irradiation unit 20 irradiates the line-shaped eighth luminance distribution light which is a value (luminance value) and has the same luminance as the fourth luminance distribution light and is parallel to the Y-axis direction (first direction). In the eighth imaging target area 64 in the second imaging target area 60, each of the eighth line output value, which is the result of imaging the measurement site P of the object 30 as the target, has a predetermined luminance. It is determined whether it is within the range.

  The data acquisition unit 103c includes a first line output value, a second line output value, a third line output value, a fourth line output value, a fifth line output value, a sixth line output value, a seventh line output value, and an eighth line. Among the line output values, an output value (luminance value) within the predetermined luminance range is acquired.

  When the data acquisition unit 103c has not acquired at least one of the first line output value, the second line output value, the third line output value, and the fourth line output value, the correction unit 103e performs the data acquisition unit 103c. The output value (luminance value) imaged in the second imaging target region 60 corresponding to the output value not acquired in the first is determined based on the predetermined dimming degree of the ND filter 13 as the dimming unit. The output value (luminance value) corresponding to the light amount of the two lights is corrected to the output value corresponding to the light amount of the first light. As described above, the set of the first line output value and the fifth line output value, the set of the second line output value and the sixth line output value, the set of the third line output value and the seventh line output value, The sets of the fourth line output value and the eighth line output value have the same luminance of the luminance distribution light irradiated by the irradiation unit 20 and are associated with each other. And the 1st-4th line output value (luminance value) which is a result imaged in the 1st imaging object field 50, and the 5th-8th line output value which is the result imaged in the 2nd imaging object field 60 (Luminance value) is set by the ND filter 13 so that the amount of light picked up by the area image sensor 11 is different. In this way, the correction unit 103e is an area image sensor that images the second imaging target region 60 rather than the amount of light that enters the first imaging region 150 of the area image sensor 11 that images the first imaging target region 50. Since the amount of light incident on the second imaging region 160 of the eleventh is set to a different amount by the ND filter 13 serving as a dimming unit, the amount of light dimming in advance is set differently. Assuming that all of the output values are detected without significant errors, the ratio of the first line output value and the fifth line output value and the ratio of the second line output value and the sixth line output value The ratio between the third line output value and the seventh line output value and the ratio between the fourth line output value and the eighth line output value are equal to the preset dimming level. That is, if one output value (luminance value) of the four groups is determined to be within the luminance range set in advance by the determination unit 103b, one output value of the four groups determined by the determination unit 103b. The other output value of the four groups (for example, the fifth to eighth line output values) can be obtained from (for example, the first to fourth line output values) and a predetermined degree of dimming. In this way, the correction unit 103e does not acquire any one of the first to fourth line output values by the data acquisition unit 103c (that is, any one of the first to fourth line output values is the determination unit 103b. Output value (luminance value) imaged in the second imaging target region 60 corresponding to the output value not acquired by the data acquisition unit 103c. An output value (luminance value) that is not acquired by the data acquisition unit 103c can be obtained by performing correction based on the degree of dimming.

  The waveform creation unit 103d performs phase shift based on the output value (luminance value) acquired by the data acquisition unit 103c and the correction value (luminance value converted by the degree of dimming) corrected by the correction unit 103e. This is a waveform used for calculating the position in the Z-axis direction (third direction) intersecting the Y-axis direction (first direction) and the X-axis direction (second direction) of the measurement site P of the object 30 as an object by the method. Thus, a waveform indicating the height shape of the object 30 as the target in the Z-axis direction is created.

  FIG. 13 is a flowchart showing an example of the operation of the mounting board production apparatus 200 according to the second embodiment of the present invention. Note that steps S101, S102, and S107 of the flowchart of FIG. 8 of the first embodiment are the same as steps S201, S202, and S207 of this flowchart, and thus detailed description thereof is omitted.

  In accordance with an instruction from the irradiation processing unit 102, the irradiating unit 20 emits luminance change light whose luminance periodically changes according to the position in the X-axis direction. 60 is irradiated (S201).

  The area image sensor 11 of the camera 10 is a plurality of lines arranged in parallel with each other on a reference plane B1 that is a virtual plane as a reference position in the Z-axis direction in the imaging target region 110 in accordance with an instruction from the imaging processing unit 103. The measurement site P of the object 30 that moves relatively in the direction in which the imaging target areas 51 to 54 and 61 to 64 are arranged (X-axis direction) is sequentially imaged when each of the linear imaging target areas 51 to 54 and 61 to 64 passes. (S202).

  The determination unit 103b includes a first line output value, a second line output value, a third line output value, a fourth line output value, a fifth line output value, a sixth line output value, and a seventh line. It is determined whether each of the output value and the eighth line output value is within the predetermined luminance range (S203).

  The data acquisition unit 103c includes a first line output value, a second line output value, a third line output value, a fourth line output value, a fifth line output value, a sixth line output value, and a seventh line output value. An output value (luminance value) within a predetermined luminance range is acquired from the line output value and the eighth line output value (S204). That is, here, the output value (luminance value) determined by the determination unit 103b to be outside the predetermined luminance range is not output (S205).

  The correcting unit 103e determines whether all of the first line output value, the second line output value, the third line output value, and the fourth line output value have been acquired by the data acquisition unit 103c (S206). If the correcting unit 103e determines that all of the first to fourth line output values have been acquired (S206: Yes), the correcting unit 103e outputs the first to fourth line output values as they are (S207).

  The waveform creation unit 103d, based on the first to fourth line output values output from the correction unit 103e, the Y-axis direction (first direction) and X of the measurement site P of the object 30 as the target by the phase shift method. A waveform used for calculating a position in the Z-axis direction (third direction) intersecting with the axial direction (second direction) and creating a waveform indicating the height shape of the object 30 as the object in the Z-axis direction. (S208).

  If the correction unit 103e determines that at least one of the first to fourth line output values is not acquired by the data acquisition unit 103c (S206: No), the correction unit 103e is not acquired by the data acquisition unit 103c. The output value (luminance value) imaged in the second imaging target area 60 corresponding to the output value (luminance value) of the target line is converted into the amount of the second light based on a predetermined degree of dimming. The corresponding output value is corrected to an output value (correction value) corresponding to the amount of the first light (S209).

  Based on the output value (luminance value) acquired by the data acquisition unit 103c and the correction value (converted luminance value) corrected by the correction unit 103e, the waveform creation unit 103d is used as an object by the phase shift method. A waveform used for calculating a position in the Y-axis direction (first direction) and the Z-axis direction (third direction) intersecting the X-axis direction (second direction) of the measurement site of the object 30, A waveform indicating the height shape of the object 30 in the Z-axis direction is created (S210).

  The recognition unit 104 recognizes the shape of the object 30 based on the sine wave generated by the waveform creation unit 103d (S211).

  Thus, the process of recognizing the shape of the object by the mounting board production apparatus 200 ends.

  FIG. 14 is performed by the correction unit 103e when reproducing the sine wave pattern after the first to eighth line output values are detected by the respective linear imaging regions 151 to 154 and 161 to 164 of the area image sensor 11. It is a graph explaining correction | amendment. As shown in FIG. 14, the first line output value P11, the second line output value P12, the third line output value P13, the fourth line output value P14, the fifth line output value P21, and the sixth line. It is assumed that the output value P22, the seventh line output value P23, and the eighth line output value P24 are output by the line-shaped imaging regions 151 to 154 and 161 to 164 of the area image sensor 11. Here, since the second line output value P12 and the eighth line output value P24 are values outside the predetermined luminance range, the output second line output value P12 and the eighth line output value P24 is determined to be outside the predetermined luminance range by the determination unit 103b and is not acquired by the data acquisition unit 103c.

  Therefore, an object in which the first imaging region 150 of the area image sensor 11 passes through the first imaging target region 50 via the first filter region FA1 of the ND filter 13 that is a region without a filter among the eight line output values. For the first to fourth line output values P11 to P14 that are the results of imaging 30 measurement sites P, the first line output value P11, the third line output value P13, and the fourth line other than the second line output value P12. The determination unit 103b determines that three of the output values P14 are values that are within a predetermined luminance range, but the second line output value P12 is not within the predetermined luminance range and is not an accurate value. Since it is determined by the determination unit 103b, a distorted sine wave is reproduced.

  In such a case, the correction unit 103e sets the second line output value P12 that is not correctly output as an output value (luminance value) corresponding to the second line output value P12, and the second line output value P12 is A sixth luminance distribution which is π / 2 radians of light having the same phase as the second luminance distribution light emitted from the irradiation unit 20 to the second linear imaging target region 52 to be imaged by the output second linear imaging region 152. A sixth line output value (luminance value) P22 that is an output value output from the sixth line-shaped imaging region 162 that images the sixth line-shaped imaging target region 62 irradiated with light by the irradiation unit 20 is predetermined. It is obtained by dividing, for example, 1/2 that is the degree of dimming (dimming rate). That is, the second line output value P12 is obtained by dividing 140 of the sixth line output value (luminance value) P22 by 1/2, and the luminance value obtained by converting the second line output value P12 by the correcting unit 103e. 280 is calculated as the correction value AP12. Thus, even when an output value (luminance value) that falls outside the predetermined luminance range is detected, correction is performed based on the output value corresponding to the output value and the predetermined dimming level. By doing so, it is possible to estimate an output value (luminance value) that is out of a predetermined luminance range. The first imaging region 150 of the area image sensor 11 images the measurement site P of the object 30 passing through the first imaging target region 50 through the first filter region FA1 of the ND filter 13 that is a region without a filter. In this case, a sine wave including the second line output value P12 that is not within the predetermined luminance range can be reproduced, and this sine wave can be used for the phase shift method.

  In the above, the case where the sine wave is reproduced based on the result captured by the first imaging region 150 is considered. However, the case where the sine wave is reproduced based on the result captured by the second imaging region 160 is as follows. Conceivable. That is, contrary to the above, the measurement of the object 30 in which the second imaging region 160 of the area image sensor 11 passes through the second imaging target region 60 via the second filter region FA2 of the ND filter 13 that is a region with a filter. As for the fifth to eighth line output values P21 to P24 obtained by imaging the part P, the fifth line output value P21, the sixth line output value P22 and the seventh line output value P23 other than the eighth line output value P24 are also used. Are determined to be within the predetermined luminance range by the determining unit 103b, but the determining unit determines that the eighth line output value P24 is not an accurate value (not within the predetermined luminance range). Since it is determined by 103b, a distorted sine wave is reproduced.

  In this case, the eighth line output value P24 that is not within the predetermined luminance range and is not an accurate value is an output value (luminance value) corresponding to the eighth line output value P24, and the eighth line output value. A fourth light that is 3π / 2 radians in phase with the eighth luminance distribution light irradiated by the irradiating unit 20 onto the eighth line-shaped imaging target region 64 imaged by the eighth line-shaped imaging region 164 to which P24 is output. The fourth line output value P14 that is an output value (luminance value) output from the fourth line-shaped imaging region that images the fourth line-shaped imaging target region 54 irradiated with the luminance distribution light is set to a predetermined dimming level. You may obtain | require by multiplying, for example, 1/2 which is a degree (dimming rate). That is, the eighth line output value P24 is obtained by multiplying 40 of the fourth line output value P14 by 1/2, and the correction unit 103e corrects the eighth line output value P24 (converted luminance value) AP24. 20 is calculated as follows. In this way, the sine wave may be used in the phase shift method by reproducing the sine wave with the filter.

  According to the mounting board production apparatus 200 according to the second embodiment, the first line output value, the second line output value, the third line output value, and the fourth line, which are the results of imaging in the first imaging target region 50. Output values (brightness values) of the output value and the fifth line output value, the sixth line output value, the seventh line output value, and the eighth line output value, which are the results of imaging in the second imaging target region 60 Is determined by the determination unit 103b. On this basis, the data acquisition unit 103c performs the first line output value, the second line output value, the third line output value, the fourth line output value, the fifth line output value, the sixth line output value, and the seventh line output. The output value (luminance value) determined by the determination unit 103b to be within the predetermined luminance range among the value and the eighth line output value is acquired. Then, the correction unit 103e is a data acquisition unit when at least one of the first line output value, the second line output value, the third line output value, and the fourth line output value is not acquired by the data acquisition unit 103c. The output value (luminance value) imaged in the second imaging target region 60 corresponding to the output value (luminance value) not acquired by 103c is determined based on a predetermined degree of dimming (dimming rate). The output value corresponding to the light amount of the second light L2 is corrected to the converted output value corresponding to the light amount of the first light L1.

  Accordingly, the determination unit 103b determines that any one of the first line output value, the second line output value, the third line output value, and the fourth line output value is not within the predetermined luminance range. Even when the sine wave cannot be reproduced by the first to fourth line output values, the output value (luminance value) imaged in the phase corresponding to the output value not within the predetermined luminance range, In the second imaging target area 60, a predetermined luminance range based on an output value (luminance value) captured in a state where the amount of light is different from that of the first imaging target area 50 and a predetermined degree of dimming. By calculating a correction value as a converted luminance value corresponding to the light amount of the output value (brightness value) determined by the determination unit 103b that is not within, the correction value is within a predetermined luminance range. In Can compensate for incorrect output value as an accurate value is determined contemplated. By performing such correction, even if an inaccurate output value exists in the output value imaged in the first imaging target region, the ND filter 13 as a light reducing unit from the output value imaged in the second imaging target region. It can be estimated from the degree of dimming (the dimming rate). As a result, an accurate sine wave that can be used for the phase shift method can be reproduced with an accurate output value, and the shape of the object can be recognized with higher quality.

  The mounting board production apparatus according to the present invention has been described using the above embodiment, but the present invention is not limited to this.

  That is, the embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  For example, in the above-described embodiment, the ND filter 13 serving as the dimming unit emits the first light L1 toward the first imaging region 150 of the area image sensor 11 that images the first imaging target region 50, and the second imaging. The moving unit 40 moves the imaging target area 110 as the target object with the camera 10 so as to have two types of light quantity, that is, the light quantity of the second light L2 toward the second imaging area 160 of the area image sensor 11 that images the target area 60. Although the image 30 is divided with respect to the X-axis direction, which is a direction in which the object 30 is moved relatively, the division of the imaging target region 110 is not limited to two regions. The number of areas divided by the dimming section such as the ND filter 13 into a plurality of areas of the area image sensor 11 divided in the X-axis direction may be, for example, three areas or four areas, It may be more.

  In the above embodiment, the first imaging region 150 of the area image sensor 11 that captures an image through the first filter region FA1 that is an unfiltered region of the ND filter 13 that functions as a light reduction unit is the ND filter 13. The upstream side in the X-axis direction in which the object 30 is moved with respect to the camera 10 in the second imaging area 160 of the area image sensor 11 that images through the second filter area FA2, which is an area with a filter dimmed by However, the present invention is not limited to this, and the positional relationship between the first imaging region 150 and the second imaging region 160 in the X-axis direction may be reversed. This also applies to the positional relationship between the first filter region FA1 and the second filter region FA2 of the ND filter 13, and the positional relationship between the first imaging target region 50 and the second imaging target region 60. The same can be said.

  In the above embodiment, the number of linear imaging regions in each of the first imaging region 150 and the second imaging region 160 of the area image sensor 11 is one of the luminance change light with respect to one light amount set by the ND filter. Four lines with the phase shifted by π / 2 with respect to the period are set. Three lines for obtaining the minimum three output values (luminance values) required to reproduce the sine wave of the phase shift method. In order to increase the accuracy of the sine wave more than four, it may be five or more. In the above embodiment, all four output values (luminance values) among the first to fourth line output values output from the first imaging region 150 are within the luminance range determined in advance by the determination unit 103b. Although the sine wave is reproduced only when it is determined that the output signal is in the range, for example, the minimum three output values (luminance values) necessary to reproduce the sine wave of the phase shift method are within a predetermined luminance range. If the determination unit 103b determines that there is, the waveform generation unit 103d may reproduce the sine wave based on the three output values (luminance values).

  Although not particularly mentioned in the above embodiment, the ratio of light attenuation by the ND filter 13 as a light reduction unit can be detected in the first imaging region 150 of the area image sensor 11 where a large amount of light is incident. It is desirable that the maximum value of the incident light intensity is larger than the minimum value of the incident light intensity that can be detected in the second imaging region 160 of the area image sensor 11 that receives light with a small amount of light.

  As a result, the maximum output value as a result of the first imaging region 150 of the area image sensor 11 imaging the measurement site P of the object 30 via the first filter region FA1 of the ND filter 13 that is a region without a filter is 255. The output value of the minimum value as a result of the second imaging region 160 of the area image sensor 11 imaging the measurement site P of the object 30 via the second filter region FA2 of the ND filter 13 that is a region with a filter. Is 30, that is, one of the output values (luminance values) in both the first imaging area 150 and the second imaging area 160 is a predetermined luminance range (for example, 30 to 230 within 256 gradation values). ) It can be prevented from going out.

  In the above-described embodiment, the ND filter 13 including the first filter area FA1 and the second filter area FA2 having different dimming levels as the dimming unit is provided in the lens 12 of the camera 10. Not limited to. For example, the light reduction unit may provide the ND filter 13 on the irradiation unit 20 side. Further, when a liquid crystal projector is employed for the irradiating unit 20, the dimming unit is a light amount of the luminance change light that irradiates the first imaging target region 50 and the luminance change light that irradiates the second imaging target region 60. Irradiation may be performed after adjustment by software processing so that the values are different in advance. In addition, the dimming unit may be a mechanism that can employ two types of lenses having different F values so that the first imaging target region 50 and the second imaging target region 60 have different light amounts. You may employ | adopt the mechanism from which a degree differs in two imaging object area | regions.

  In the above embodiment, the irradiating unit 20 irradiates from the diagonally upper right side in FIG. 4, but not only this, the irradiating unit 20 that irradiates from the diagonally upper left side of the illustrated side to prevent shadowing. Further, it may be provided. In this case, it is desirable that the ND filter 13 as a light reduction unit is provided not on the irradiation unit 20 side but on the camera 10 side as in the first embodiment. When two irradiating units 20 are provided, if the ND filter 13 is provided on the irradiating unit 20 side, two ND filters 13 are required, and it is necessary to align the two ND filters. This is because there are a demerit that a load is applied and a demerit that the cost of one ND filter 13 is increased.

  INDUSTRIAL APPLICABILITY The present invention can be used as a mounting board production apparatus that can accurately and rapidly recognize the shape of an object.

DESCRIPTION OF SYMBOLS 10 Camera 11 Area image sensor 12 Lens 13 ND filter 20 Irradiation part 30 Object 30a Low reflectivity member 30b High reflectivity member 31-34 Position 40 Moving part 50 1st imaging target area 51 1st linear imaging target area 52 2nd Line-shaped imaging target area 53 Third line-shaped imaging target area 54 Fourth line-shaped imaging target area 60 Second imaging target area 61 Fifth-line imaging target area 62 Sixth-line imaging target area 63 Seventh-line imaging target area Area 64 Eighth line-shaped imaging target area 81 Sine wave 82 Sine wave 100, 200 Mounting board production apparatus 101 Control unit 102 Irradiation processing unit 103 Imaging processing unit 103a Movement processing unit 103b Judgment unit 103c Data acquisition unit 103d Waveform creation unit 103e Correction Unit 104 recognition unit 110 imaging target region 150 first shooting Image area 151 First line imaging area 152 Second line imaging area 153 Third line imaging area 154 Fourth line imaging area 160 Second imaging area 161 Fifth line imaging area 162 Sixth line imaging area 163 Seventh line-shaped imaging area 164 Eighth line-shaped imaging area AP12, AP24 Correction value B1 Reference plane FA1 First filter area FA2 Second filter area L1 First light L2 Second light P11 First line output value P12 Second line output Value P13 3rd line output value P14 4th line output value P21 5th line output value P22 6th line output value P23 7th line output value P24 8th line output value

Claims (9)

A mounting board production apparatus that uses a phase shift method of imaging a target object in an imaging target region and measuring the shape of the target object based on the captured result,
A first imaging area that images a first imaging target area that is one of the areas that are segmented so that the imaging target areas are arranged in the second direction; and an area that is segmented in the second direction. A camera having an area image sensor virtually divided into a second imaging region that images the second imaging target region aligned in the second direction with respect to the first imaging target region;
Luminance change light having a luminance distribution having the same luminance along a first direction intersecting with the second direction and having a luminance periodically changing according to a position in the second direction is changed to the first direction. And an irradiating unit that irradiates the surface defined by the second direction obliquely;
A moving unit that moves the object relative to the camera along a second direction;
One of the light amount of the first light toward the first imaging region of the area image sensor and the light amount of the second light toward the second imaging region of the area image sensor is dimmed at a predetermined degree than the other. A mounting board production apparatus comprising a dimming unit. further,
In the first line-shaped imaging target region in the first imaging target region irradiated by the irradiation unit with the line-shaped first luminance distribution light parallel to the first direction, the measurement site of the target is imaged The resulting first line output value,
Second line-shaped imaging in the first imaging target region irradiated with the second luminance distribution light in a line shape different from the first luminance distribution light and parallel to the first direction. In the target region, a second line output value that is a result of imaging the measurement site of the target object;
The third line-shaped imaging in the first imaging target area irradiated with the line-shaped third luminance distribution light that is different in luminance from the second luminance distribution light and is parallel to the first direction by the irradiation unit. A determination unit configured to determine whether or not each of the third line output value obtained as a result of imaging the measurement site of the object within a target area is within a predetermined luminance range;
When the determination unit determines that the first line output value, the second line output value, and the third line output value are all within the predetermined luminance range, the determination unit determines A data acquisition unit for acquiring the first line output value, the second line output value, and the third line output value;
Based on the first line output value, the second line output value, and the third line output value acquired by the data acquisition unit, the first direction and the first direction of the measurement site of the object by the phase shift method The mounting board production apparatus according to claim 1, further comprising: a waveform generation unit that generates a waveform of the object, the waveform being used for calculating a position in a third direction that intersects the two directions. The data acquisition unit, when the determination unit determines that any one of the first line output value, the second line output value, and the third line output value is not within the predetermined luminance range. The mounting board production apparatus according to claim 2, wherein the first line output value, the second line output value, and the third line output value are not acquired. The determination unit further includes:
When it is determined that any of the first line output value, the second line output value, and the third line output value is not within the predetermined luminance range,
A fifth line shape in the second imaging target region irradiated with the line-shaped fifth luminance distribution light having the same luminance as the first luminance distribution light and parallel to the first direction. In the imaging target region, a fifth line output value that is a result of imaging the measurement site of the target object;
The sixth line shape in the second imaging target region irradiated with the line-like sixth luminance distribution light having the same luminance as the second luminance distribution light and parallel to the first direction. In the imaging target region, a sixth line output value that is a result of imaging the measurement site of the object;
The seventh line shape in the second imaging target region irradiated with the line-shaped seventh luminance distribution light having the same luminance as the third luminance distribution light and parallel to the first direction. The determination is made as to whether or not each of the seventh line output value, which is a result of imaging the measurement site of the object, is within the predetermined luminance range in the imaging target region. The mounting board production apparatus described. The data acquisition unit, when the determination unit determines that any one of the fifth line output value, the sixth line output value, and the seventh line output value is within the predetermined luminance range. , Obtain the fifth line output value, the sixth line output value and the seventh line output value,
The waveform generation unit is configured to determine the measurement site of the object by the phase shift method based on the fifth line output value, the sixth line output value, and the seventh line output value acquired by the data acquisition unit. The mounted substrate production apparatus according to claim 4, wherein the waveform is used for calculating a position in a third direction, and the waveform of the object is created. When the determination unit determines that all of the first line output value, the second line output value, and the third line output value are within the predetermined luminance range, the area image sensor The mounting board production apparatus according to claim 2, wherein an output value that is a result of imaging by the second imaging area is not determined. further,
In the first line-shaped imaging target region in the first imaging target region irradiated by the irradiation unit with the line-shaped first luminance distribution light parallel to the first direction, the measurement site of the target is imaged The resulting first line output value,
Second line-shaped imaging in the first imaging target region irradiated with the second luminance distribution light in a line shape different from the first luminance distribution light and parallel to the first direction. In the target region, a second line output value that is a result of imaging the measurement site of the target object;
The third line-shaped imaging in the first imaging target area irradiated with the line-shaped third luminance distribution light that is different in luminance from the second luminance distribution light and is parallel to the first direction by the irradiation unit. In the target area, the third line output value that is the result of imaging the measurement site of the target object,
An output value corresponding to the first line output value, the first luminance distribution light having the same luminance as the first luminance distribution light, and a line-shaped fifth luminance distribution light parallel to the first direction is generated by the irradiation unit. In a fifth line-shaped imaging target area in the second imaging target area to be irradiated, a fifth line output value that is a result of imaging the measurement site of the object;
An output value corresponding to the second line output value, the luminance is the same as the second luminance distribution light, and the line-like sixth luminance distribution light parallel to the first direction is caused by the irradiation unit. In a sixth line-shaped imaging target region in the second imaging target region to be irradiated, a sixth line output value that is a result of imaging the measurement site of the target object;
The output value corresponding to the third line output value, the luminance is the same as that of the third luminance distribution light, and the line-shaped seventh luminance distribution light parallel to the first direction is caused by the irradiation unit. In the seventh line-shaped imaging target area in the second imaging target area to be irradiated, each of the seventh line output value that is a result of imaging the measurement site of the target is the predetermined luminance range. A determination unit for determining whether or not it is within,
The predetermined brightness among the first line output value, the second line output value, the third line output value, the fifth line output value, the sixth line output value, and the seventh line output value. A data acquisition unit for acquiring an output value within a range;
An output value not acquired by the data acquisition unit when at least one of the first line output value, the second line output value, and the third line output value is not acquired by the data acquisition unit The output value captured in the second imaging target region corresponding to the output value corresponding to the light amount of the first light from the output value corresponding to the light amount of the second light, based on the predetermined degree A correction unit for correcting to
Based on the output value acquired by the data acquisition unit and the correction value corrected by the correction unit, the first direction and the second direction of the measurement site of the object by the phase shift method are crossed. The mounted substrate production apparatus according to claim 1, further comprising: a waveform generation unit that generates a waveform of the object, the waveform being used for calculating a position in a third direction. A mounting board production method using a phase shift method of imaging a target object in an imaging target region and measuring the shape of the target object based on the captured result,
A first imaging area that images a first imaging target area that is one of the areas that are segmented so that the imaging target areas are arranged in the second direction; and an area that is segmented in the second direction. An imaging step of imaging with a camera having an area image sensor virtually divided into a second imaging region that images the second imaging target region aligned in the second direction with respect to the first imaging target region;
Luminance change light having a luminance distribution having the same luminance along a first direction intersecting with the second direction and having a luminance periodically changing according to a position in the second direction is changed to the first direction. And an irradiation step of irradiating the surface defined by the second direction from an oblique direction,
One of the light amount of the first light toward the first imaging region of the area image sensor and the light amount of the second light toward the second imaging region of the area image sensor is attenuated at a predetermined degree than the other. And a moving step of moving the object relative to the camera along a second direction in a state. further,
In the first line-shaped imaging target region in the first imaging target region irradiated by the irradiation unit with the line-shaped first luminance distribution light parallel to the first direction, the measurement site of the target is imaged The resulting first line output value,
Second line-shaped imaging in the first imaging target region irradiated with the second luminance distribution light in a line shape different from the first luminance distribution light and parallel to the first direction. In the target region, a second line output value that is a result of imaging the measurement site of the target object;
The third line-shaped imaging in the first imaging target area irradiated with the line-shaped third luminance distribution light that is different in luminance from the second luminance distribution light and is parallel to the first direction by the irradiation unit. In the target area, the third line output value that is the result of imaging the measurement site of the target object,
An output value corresponding to the first line output value, the first luminance distribution light having the same luminance as the first luminance distribution light, and a line-shaped fifth luminance distribution light parallel to the first direction is generated by the irradiation unit. In a fifth line-shaped imaging target area in the second imaging target area to be irradiated, a fifth line output value that is a result of imaging the measurement site of the object;
An output value corresponding to the second line output value, the luminance is the same as the second luminance distribution light, and the line-like sixth luminance distribution light parallel to the first direction is caused by the irradiation unit. In a sixth line-shaped imaging target region in the second imaging target region to be irradiated, a sixth line output value that is a result of imaging the measurement site of the target object;
The output value corresponding to the third line output value, the luminance is the same as that of the third luminance distribution light, and the line-shaped seventh luminance distribution light parallel to the first direction is caused by the irradiation unit. In the seventh line-shaped imaging target area in the second imaging target area to be irradiated, each of the seventh line output value that is a result of imaging the measurement site of the target is the predetermined luminance range. A determination step for determining whether or not the
The predetermined brightness among the first line output value, the second line output value, the third line output value, the fifth line output value, the sixth line output value, and the seventh line output value. A data acquisition step in which the data acquisition unit acquires an output value within the range; and
An output value not acquired by the data acquisition unit when at least one of the first line output value, the second line output value, and the third line output value is not acquired by the data acquisition unit The output value captured in the second imaging target region corresponding to the output value corresponding to the light amount of the first light from the output value corresponding to the light amount of the second light, based on the predetermined degree A correction step to be corrected by the correction unit,
Based on the output value acquired by the data acquisition unit and the correction value corrected by the correction unit, the first direction and the second direction of the measurement site of the object by the phase shift method are crossed. The mounting board production method according to claim 8, further comprising: a waveform creating step for creating a waveform of the object, the waveform being used for calculating a position in a third direction.