JP2013152208A5 - - Google Patents
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- JP2013152208A5 JP2013152208A5 JP2012066580A JP2012066580A JP2013152208A5 JP 2013152208 A5 JP2013152208 A5 JP 2013152208A5 JP 2012066580 A JP2012066580 A JP 2012066580A JP 2012066580 A JP2012066580 A JP 2012066580A JP 2013152208 A5 JP2013152208 A5 JP 2013152208A5
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- magnetic
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- yokes
- yoke
- magnetic sensor
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- 239000000758 substrate Substances 0.000 claims description 7
- 230000004907 flux Effects 0.000 claims 8
Description
上記従来例の問題点を解決するための発明は、磁気センサデバイスであって、基板と、前記基板の面上に形成された２ｎ＋１（ｎは自然数）個の磁気ヨークと、前記磁気ヨークに巻回されるコイルと、固定層及び自由層を有し、一対の前記磁気ヨーク間に形成される磁場の強さを検出する２ｍ（ｍは自然数）個の磁気抵抗効果素子であって、２個ずつの磁気抵抗効果素子がそれぞれブリッジ回路を構成してなる磁気抵抗効果素子と、を含むこととしたものである。
An invention for solving the problems of the above conventional example is a magnetic sensor device, in which a substrate, 2 n + 1 (n is a natural number) magnetic yokes formed on the surface of the substrate, and the magnetic yoke 2m (m is a natural number) magnetoresistive effect element that has a coil to be wound, a fixed layer, and a free layer, and detects the strength of a magnetic field formed between the pair of magnetic yokes. Each magnetoresistive effect element includes a magnetoresistive effect element that forms a bridge circuit.
Claims (10)
前記基板の面上に形成された２ｎ＋１（ｎは自然数）個の磁気ヨークと、
前記磁気ヨークに巻回されるコイルと、
固定層及び自由層を有し、一対の前記磁気ヨーク間に形成される磁場の強さを検出する２ｍ（ｍは自然数）個の磁気抵抗効果素子であって、２個ずつの磁気抵抗効果素子がそれぞれブリッジ回路を構成してなる磁気抵抗効果素子と、
を含む磁気センサデバイス。 A substrate,
2 n + 1 (n is a natural number) magnetic yokes formed on the surface of the substrate;
A coil wound around the magnetic yoke;
2m (m is a natural number) magnetoresistive effect element having a fixed layer and a free layer and detecting the strength of a magnetic field formed between a pair of the magnetic yokes, each of the magnetoresistive effect elements Magnetoresistive effect elements each comprising a bridge circuit;
Including magnetic sensor device.
前記コイルは、前記磁気ヨークに対してソレノイド状に巻回されている磁気センサデバイス。 The magnetic sensor device according to claim 1,
The magnetic sensor device, wherein the coil is wound in a solenoid shape around the magnetic yoke.
前記磁気ヨークは、磁束の方向に沿って一列に、２ｎ＋１（ｎは自然数）個配され、
当該磁気ヨークの少なくとも一つが、前記コイルが巻回される本体部と、当該本体部に連結され、磁束の方向に交差する方向に延びる延伸部とを有する磁気センサデバイス。 A magnetic sensor device according to claim 1 or 2,
The magnetic yokes are arranged in 2n + 1 (n is a natural number) in a line along the direction of magnetic flux,
A magnetic sensor device in which at least one of the magnetic yokes includes a main body around which the coil is wound, and an extending portion that is connected to the main body and extends in a direction intersecting the direction of magnetic flux.
前記磁気ヨークは、磁束の方向に沿って一列に配されるとともに、前記コイルが巻回され、
当該一列に配された磁気ヨークのうち、磁束方向両端に配された二つの磁気ヨークのそれぞれが、末端側に、磁束の方向に交差する方向に延びる延伸部を具備する磁気センサデバイス。 A magnetic sensor device according to claim 1 or 2,
The magnetic yoke is arranged in a line along the direction of the magnetic flux, and the coil is wound,
Of the magnetic yokes arranged in a row, each of the two magnetic yokes arranged at both ends in the magnetic flux direction has an extension portion extending in a direction intersecting the direction of the magnetic flux on the terminal side.
前記磁気ヨークは、磁束の方向に沿って一列に、２ｎ＋１（ｎは自然数）個配されるとともに、前記コイルが巻回され、
当該一列に配された磁気ヨークのうち、磁束方向両端に配された二つの磁気ヨークが、それぞれの末端側から延伸される延伸部を有し、
当該延伸部が互いに連結されて閉磁路を形成する磁気センサデバイス。 A magnetic sensor device according to claim 1 or 2,
The magnetic yoke is arranged in a row along the direction of the magnetic flux, 2n + 1 (n is a natural number), and the coil is wound,
Among the magnetic yokes arranged in one row, two magnetic yokes arranged at both ends in the magnetic flux direction have extending portions extending from the respective terminal sides,
A magnetic sensor device in which the extending portions are connected to each other to form a closed magnetic circuit.
前記磁気ヨークの前記コイルが巻回される部分には、隣接する磁気ヨークに向けてその幅が狭くなるようテーパーを有してなる磁気センサデバイス。 A magnetic sensor device according to any one of claims 3 to 5,
A magnetic sensor device in which a portion of the magnetic yoke around which the coil is wound has a taper so that the width is narrowed toward an adjacent magnetic yoke.
前記テーパーの先端の幅は、前記磁気抵抗効果素子の実効長さよりも長い磁気センサデバイス。 The magnetic sensor device according to claim 6,
The width of the tip of the taper is a magnetic sensor device longer than the effective length of the magnetoresistive effect element.
一対の前記磁気ヨーク間に、それぞれ複数の前記磁気抵抗効果素子を配してなる磁気センサデバイス。 A magnetic sensor device according to any one of claims 1 to 7,
A magnetic sensor device comprising a plurality of magnetoresistive elements arranged between a pair of magnetic yokes.
前記基板の面上に形成され、コイルが巻回される第１磁気ヨークと、
前記基板の面上に形成され、前記第１の磁気ヨークの両端部に隣接する２つの端部を有してそれぞれＣ字状をなす一対の第２の磁気ヨークと、
固定層及び自由層を有し、それぞれが前記第１磁気ヨーク両端で、第１磁気ヨークと第２磁気ヨークとの間に形成される磁場の強さを検出する２つの磁気抵抗効果素子であって、当該２つの磁気抵抗効果素子がブリッジ回路を構成してなる磁気抵抗効果素子と、
を含み、
前記一対の第２の磁気ヨークが、磁束の方向に延びる前記第１の磁気ヨークの中心線に対して線対称に配されてなる磁気センサデバイス。 A substrate,
A first magnetic yoke formed on the surface of the substrate and wound with a coil;
A pair of second magnetic yokes formed on the surface of the substrate and having two ends adjacent to both ends of the first magnetic yoke, each having a C-shape;
These are two magnetoresistive elements having a fixed layer and a free layer, each detecting the strength of a magnetic field formed between the first magnetic yoke and the second magnetic yoke at both ends of the first magnetic yoke. A magnetoresistive element in which the two magnetoresistive elements constitute a bridge circuit;
Including
A magnetic sensor device in which the pair of second magnetic yokes are arranged in line symmetry with respect to a center line of the first magnetic yoke extending in the direction of magnetic flux.
A current sensor circuit comprising the magnetic sensor device according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012066580A JP5990963B2 (en) | 2011-12-26 | 2012-03-23 | Magnetic sensor device and current sensor circuit |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011283926 | 2011-12-26 | ||
| JP2011283926 | 2011-12-26 | ||
| JP2012066580A JP5990963B2 (en) | 2011-12-26 | 2012-03-23 | Magnetic sensor device and current sensor circuit |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013152208A JP2013152208A (en) | 2013-08-08 |
| JP2013152208A5 true JP2013152208A5 (en) | 2015-04-30 |
| JP5990963B2 JP5990963B2 (en) | 2016-09-14 |
Family
ID=49048647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012066580A Expired - Fee Related JP5990963B2 (en) | 2011-12-26 | 2012-03-23 | Magnetic sensor device and current sensor circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5990963B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6299069B2 (en) * | 2013-03-11 | 2018-03-28 | 日立金属株式会社 | Magnetic sensor device |
| CN104569870B (en) * | 2015-01-07 | 2017-07-21 | 江苏多维科技有限公司 | A kind of single-chip has the z axis magnetic resistance sensor of calibration/replacement coil |
| DE102017004349A1 (en) * | 2017-05-08 | 2018-11-08 | Tdk-Micronas Gmbh | Magnetic field compensation device |
| JP6986002B2 (en) * | 2018-11-26 | 2021-12-22 | Tdk株式会社 | Magnetic sensor device |
| KR102615083B1 (en) * | 2022-04-06 | 2023-12-19 | 연세대학교 산학협력단 | Electrostatically Driven 2-Axis MEMS Magnetometer Using Electromagnetic Inductor on Eccentric Resonator and manufacturing method thereof |
| CN116825658B (en) * | 2023-08-30 | 2023-11-24 | 粤芯半导体技术股份有限公司 | Method and device for monitoring beam current of ion beam in real time |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008146809A1 (en) * | 2007-05-28 | 2008-12-04 | Mitsubishi Electric Corporation | Magnetic field detection device |
| JP2009300196A (en) * | 2008-06-12 | 2009-12-24 | Tamura Seisakusho Co Ltd | Electric current detector |
| JP5250108B2 (en) * | 2009-06-12 | 2013-07-31 | アルプス・グリーンデバイス株式会社 | Magnetic balanced current sensor |
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2012
- 2012-03-23 JP JP2012066580A patent/JP5990963B2/en not_active Expired - Fee Related
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