JP2013150075A

JP2013150075A - Oscillation apparatus and electronic apparatus

Info

Publication number: JP2013150075A
Application number: JP2012007470A
Authority: JP
Inventors: Yasuharu Onishi; 康晴大西; Atsushi Kuroda; 淳黒田; Yuichiro Kishinami; 雄一郎岸波; Motoyoshi Komoda; 元喜菰田
Original assignee: NEC Casio Mobile Communications Ltd
Current assignee: NEC Casio Mobile Communications Ltd
Priority date: 2012-01-17
Filing date: 2012-01-17
Publication date: 2013-08-01

Abstract

PROBLEM TO BE SOLVED: To reduce the frequency dependence of the output in an oscillation apparatus having a piezoelectric element.SOLUTION: A piezoelectric element 10 is attached to a first vibration member 20. A second vibration member 30 is positioned at the opposite side of the piezoelectric element 10 across the first vibration member 20, and the first vibration member 20 is attached to the second vibration member 30. A holding member 40 holds an edge of the second vibration member 30. The second vibration member 30 has a sheet form. The first vibration member 20 has a form where multiple kinds of beams, having basic resonance frequencies different from each other, face in directions different from each other.

Description

本発明は、圧電素子を発信源として有する発振装置及び電子機器に関する。 The present invention relates to an oscillation device and an electronic apparatus having a piezoelectric element as a transmission source.

圧電素子を利用した発振装置は、例えばパラメトリックスピーカや、超音波センサの発振源として使用されている。この発振装置は、磁石を用いて振動板を振動させる動電型のスピーカと比較して、小型化しやすい、という利点がある。 An oscillating device using a piezoelectric element is used as an oscillation source of, for example, a parametric speaker or an ultrasonic sensor. This oscillation device has an advantage that it is easy to miniaturize compared to an electrodynamic speaker that vibrates a diaphragm using a magnet.

特許文献１、特許文献２、及び特許文献３には、圧電素子を、台座に搭載し、さらに台座を振動膜に搭載することが記載されている。振動膜の剛性は、台座の合成よりも低くなっている。さらに特許文献１及び２において、台座は、複数の梁を有している。これらの梁は、互いに同一の形状を有している。 Patent Document 1, Patent Document 2, and Patent Document 3 describe mounting a piezoelectric element on a pedestal and further mounting the pedestal on a vibrating membrane. The rigidity of the diaphragm is lower than that of the pedestal composition. Further, in Patent Documents 1 and 2, the pedestal has a plurality of beams. These beams have the same shape.

国際公開２００７／８３４９７号パンフレットInternational Publication No. 2007/83497 Pamphlet 国際公開２００８／８４８０６号パンフレットInternational Publication No. 2008/84806 Pamphlet 特開２０１１−１１４５９７号公報JP 2011-114597 A

圧電素子は機械品質係数Ｑが高い。このため、圧電素子を発振装置の発振源として利用すると、この発振装置は、基本共振周波数付近では出力が高くなるが、基本共振周波数から外れると出力が小さくなる。すなわち、発振装置の出力の周波数依存性が大きくなってしまう。 The piezoelectric element has a high mechanical quality factor Q. For this reason, when the piezoelectric element is used as an oscillation source of the oscillation device, the output of the oscillation device increases near the fundamental resonance frequency, but the output decreases when the oscillation frequency deviates from the fundamental resonance frequency. That is, the frequency dependency of the output of the oscillation device becomes large.

本発明の目的は、圧電素子を有する発振装置において、出力の周波数依存性を小さくすることにある。 An object of the present invention is to reduce the frequency dependence of output in an oscillation device having a piezoelectric element.

本発明によれば、圧電素子と、
前記圧電素子が取り付けられた第１振動部材と、
前記第１振動部材を介して前記圧電素子とは反対側に位置し、前記第１振動部材が取り付けられた第２振動部材と、
前記第２振動部材の縁を保持する保持部材と、
を有し、
前記第２振動部材はシート形状を有しており、
前記第１振動部材は、互いに異なる基本共振周波数を有する複数種類の梁を、互いに異なる方向に向けた形状を有している発振装置が提供される。 According to the present invention, a piezoelectric element;
A first vibrating member to which the piezoelectric element is attached;
A second vibrating member that is located on the opposite side of the piezoelectric element via the first vibrating member, and to which the first vibrating member is attached;
A holding member for holding an edge of the second vibrating member;
Have
The second vibrating member has a sheet shape,
An oscillation device is provided in which the first vibrating member has a shape in which a plurality of types of beams having different fundamental resonance frequencies are directed in different directions.

本発明によれば、発振装置と、
前記発振装置を制御する制御手段と、
を有し、
前記発振装置は、
圧電素子と、
前記圧電素子が取り付けられた第１振動部材と、
前記第１振動部材を介して前記圧電素子とは反対側に位置し、前記第１振動部材が取り付けられた第２振動部材と、
前記第２振動部材の縁を保持する保持部材と、
を有し、
前記第２振動部材はシート形状を有しており、
前記第１振動部材は、互いに異なる基本共振周波数を有する複数種類の梁を、互いに異なる方向に向けた形状を有している電子機器が提供される。 According to the present invention, an oscillation device;
Control means for controlling the oscillation device;
Have
The oscillator is
A piezoelectric element;
A first vibrating member to which the piezoelectric element is attached;
A second vibrating member that is located on the opposite side of the piezoelectric element via the first vibrating member, and to which the first vibrating member is attached;
A holding member for holding an edge of the second vibrating member;
Have
The second vibrating member has a sheet shape,
The first vibration member is provided with an electronic device having a shape in which a plurality of types of beams having different fundamental resonance frequencies are directed in different directions.

本発明によれば、圧電素子を有する発振装置において、出力の周波数依存性を小さくすることができる。 According to the present invention, the frequency dependence of the output can be reduced in the oscillation device having the piezoelectric element.

第１の実施形態に係る発振装置の構成を示す平面図である。It is a top view which shows the structure of the oscillation apparatus which concerns on 1st Embodiment. 図１のＡ−Ａ´断面図である。It is AA 'sectional drawing of FIG. 第１振動部材２０の形状を示す平面図である。4 is a plan view showing the shape of a first vibrating member 20. FIG. 第２の実施形態に係る発振装置１００の構成を示す平面図である。It is a top view which shows the structure of the oscillation apparatus 100 which concerns on 2nd Embodiment. 第３の実施形態に係る電子機器２００の構成を示す平面図である。It is a top view which shows the structure of the electronic device 200 which concerns on 3rd Embodiment.

以下、本発明の実施の形態について、図面を用いて説明する。尚、すべての図面において、同様な構成要素には同様の符号を付し、適宜説明を省略する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same reference numerals are given to the same components, and the description will be omitted as appropriate.

（第１の実施形態）
図１は、第１の実施形態に係る発振装置１００の構成を示す平面図である。図２は図１のＡ−Ａ´断面図である。発振装置１００は、圧電素子１０、第１振動部材２０、第２振動部材３０、及び保持部材４０を有している。圧電素子１０は、第１振動部材２０に取り付けられている。第２振動部材３０は、第１振動部材２０を介して圧電素子１０とは反対側に位置し、第１振動部材２０が取り付けられている。保持部材４０は、第２振動部材３０の縁を保持している。第２振動部材３０はシート形状を有している。そして第１振動部材２０は、互いに異なる基本共振周波数を有する複数種類の梁を、互いに異なる方向に向けた形状を有している。 (First embodiment)
FIG. 1 is a plan view showing the configuration of the oscillation device 100 according to the first embodiment. 2 is a cross-sectional view taken along the line AA ′ of FIG. The oscillation device 100 includes the piezoelectric element 10, the first vibration member 20, the second vibration member 30, and the holding member 40. The piezoelectric element 10 is attached to the first vibrating member 20. The second vibrating member 30 is located on the opposite side of the piezoelectric element 10 with the first vibrating member 20 interposed therebetween, and the first vibrating member 20 is attached thereto. The holding member 40 holds the edge of the second vibrating member 30. The second vibrating member 30 has a sheet shape. The first vibrating member 20 has a shape in which a plurality of types of beams having different fundamental resonance frequencies are directed in different directions.

本図に示す例において、圧電素子１０及び第２振動部材３０は円形を有している。圧電素子１０及び第２振動部材３０は、互いの中心が重なっている。そして保持部材４０は枠形状を有している。ただし圧電素子１０及び第２振動部材３０は他の形状、例えば矩形や六角形などの多角形であってもよい。 In the example shown in this figure, the piezoelectric element 10 and the second vibrating member 30 have a circular shape. The centers of the piezoelectric element 10 and the second vibrating member 30 overlap each other. The holding member 40 has a frame shape. However, the piezoelectric element 10 and the second vibrating member 30 may have other shapes, for example, a polygon such as a rectangle or a hexagon.

圧電素子１０は、ＰＺＴなどの圧電セラミックスにより形成されている。ただし、圧電素子１０は、圧電特性を示す高分子材料、例えばポリフッ化ビニリデンにより形成されていてもよい。いずれの場合においても、圧電素子１０の平面形状は、第２振動部材３０の平面形状よりも小さい。 The piezoelectric element 10 is formed of piezoelectric ceramics such as PZT. However, the piezoelectric element 10 may be formed of a polymer material exhibiting piezoelectric characteristics, such as polyvinylidene fluoride. In any case, the planar shape of the piezoelectric element 10 is smaller than the planar shape of the second vibrating member 30.

制御部５０は、圧電素子１０に駆動信号を同時に入力する。例えば制御部５０は、発振装置１００を通常のスピーカとして使用する場合、外部から入力された音声データを増幅することにより駆動信号を生成する。また制御部５０は、発振装置をパラメトリックスピーカとして使用する場合、外部から入力された音声データを変調してパラメトリックスピーカ用の変調データを生成し、このデータを増幅して駆動信号を生成する。この場合のキャリア周波数は、例えば２０ｋＨｚ以上である。 The control unit 50 inputs drive signals to the piezoelectric element 10 at the same time. For example, when the oscillation device 100 is used as a normal speaker, the control unit 50 generates a drive signal by amplifying audio data input from the outside. Further, when the oscillation device is used as a parametric speaker, the control unit 50 modulates audio data input from the outside to generate modulation data for the parametric speaker, and amplifies this data to generate a drive signal. The carrier frequency in this case is 20 kHz or more, for example.

第１振動部材２０は、第２振動部材３０よりも剛性が高い材料により形成されている。このため、第１振動部材２０の剛性は第２振動部材３０よりも高い。第１振動部材２０は、例えばアルミニウム合金、リン青銅、チタン、チタン合金、又はステンレスなどの金属により形成されている。また第２振動部材３０は、ウレタン、ＰＥＴ（Polyethylene terephthalate）、ポリエチレンなどの樹脂材料により形成されている。ただし第１振動部材２０は、第２振動部材３０よりも剛性が高い樹脂材料、例えばエポキシ樹脂、アクリル、ポリイミド、又はポリカーボネートにより形成されても良い。 The first vibrating member 20 is made of a material having higher rigidity than the second vibrating member 30. For this reason, the rigidity of the first vibrating member 20 is higher than that of the second vibrating member 30. The first vibrating member 20 is made of a metal such as aluminum alloy, phosphor bronze, titanium, titanium alloy, or stainless steel. The second vibrating member 30 is made of a resin material such as urethane, PET (Polyethylene terephthalate), or polyethylene. However, the first vibration member 20 may be formed of a resin material having higher rigidity than the second vibration member 30, for example, epoxy resin, acrylic, polyimide, or polycarbonate.

図３は、第１振動部材２０の形状を示す平面図である。上記したように、第１振動部材２０は複数の梁を有している。本図に示す例では、第１振動部材２０は、第１梁２２、第２梁２４、及び第３梁２６を有している。第１梁２２、第２梁２４、及び第３梁２６は一体的に形成されているが、互いに長さが異なる。詳細には、第１梁２２、第２梁２４、及び第３梁２６は、互いの中心が重なっている。この中心は、図１に示すように、圧電素子１０の中心及び第２振動部材３０の中心にも重なっている。そして第１梁２２の長さをＬ_１、第２梁２４の長さをＬ_２、第３梁２６の長さをＬ_３とした場合、Ｌ_１＜２×Ｌ_２＜３×Ｌ_３である。 FIG. 3 is a plan view showing the shape of the first vibrating member 20. As described above, the first vibrating member 20 has a plurality of beams. In the example shown in the drawing, the first vibrating member 20 includes a first beam 22, a second beam 24, and a third beam 26. The first beam 22, the second beam 24, and the third beam 26 are integrally formed, but have different lengths. Specifically, the first beam 22, the second beam 24, and the third beam 26 are overlapped at the centers. This center also overlaps the center of the piezoelectric element 10 and the center of the second vibration member 30 as shown in FIG. When the length of the first beam 22 is L ₁ , the length of the second beam 24 is L ₂ , and the length of the third beam 26 is L ₃ , L ₁ <2 × L ₂ <3 × L ₃ is there.

また本図に示す例において、最も長い第１梁２２と、その次に長い第２梁２４はそれぞれ一つずつ設けられており、互いに直交している。そして最も短い第３梁２６は複数、例えば２本設けられている。これらの２本の第３梁２６は互いに直交しており、かつ第１梁２２及び第２梁２４に対して４５°の角度で交わっている。 In the example shown in this figure, the longest first beam 22 and the next longest second beam 24 are provided one by one and are orthogonal to each other. A plurality of, for example, two shortest third beams 26 are provided. These two third beams 26 are orthogonal to each other and intersect the first beam 22 and the second beam 24 at an angle of 45 °.

次に、本実施形態の作用及び効果について説明する。本実施形態によれば、第１振動部材２０は、互いに異なる基本共振周波数を有する複数種類の梁（２２，２４，２６）を、互いに異なる方向に向けた形状を有している。従って、第１振動部材２０は、複数の基本共振周波数を有する。このため、圧電素子１０、第１振動部材２０、及び第２振動部材３０を一つの振動部材としてみた場合、この振動部材は複数の基本共振周波数を有することになる。従って、発振装置１００の出力の周波数依存性は低くなる。 Next, the operation and effect of this embodiment will be described. According to this embodiment, the first vibrating member 20 has a shape in which a plurality of types of beams (22, 24, 26) having different fundamental resonance frequencies are directed in different directions. Accordingly, the first vibrating member 20 has a plurality of fundamental resonance frequencies. For this reason, when the piezoelectric element 10, the first vibrating member 20, and the second vibrating member 30 are viewed as one vibrating member, the vibrating member has a plurality of fundamental resonance frequencies. Therefore, the frequency dependency of the output of the oscillation device 100 is reduced.

（第２の実施形態）
図４は、第２の実施形態に係る発振装置１００の構成を示す平面図であり、第１の実施形態における図１に対応している。本実施形態に係る発振装置１００は、第１梁２２、第２梁２４、及び第３梁２６の形状を除いて、第１の実施形態に係る発振装置１００と同様の構成である。 (Second Embodiment)
FIG. 4 is a plan view showing the configuration of the oscillation device 100 according to the second embodiment, and corresponds to FIG. 1 in the first embodiment. The oscillation device 100 according to the present embodiment has the same configuration as the oscillation device 100 according to the first embodiment except for the shapes of the first beam 22, the second beam 24, and the third beam 26.

本実施形態において、第１梁２２、第２梁２４、及び第３梁２６は、断面形状が互いに異なる。詳細には、第１梁２２、第２梁２４、及び第３梁２６は長さが互いに等しい。そして、第１梁２２、第２梁２４、及び第３梁２６は、断面形状が互いに異なる。本図に示す例では、第１梁２２、第２梁２４、及び第３梁２６の順に、断面形状が小さく（細く）なっている。そして第１梁２２、第２梁２４、及び第３梁２６の長さは、全て圧電素子１０の直径よりも大きい。 In the present embodiment, the first beam 22, the second beam 24, and the third beam 26 have different cross-sectional shapes. Specifically, the first beam 22, the second beam 24, and the third beam 26 have the same length. The first beam 22, the second beam 24, and the third beam 26 have different cross-sectional shapes. In the example shown in the figure, the cross-sectional shape is smaller (thinner) in the order of the first beam 22, the second beam 24, and the third beam 26. The lengths of the first beam 22, the second beam 24, and the third beam 26 are all larger than the diameter of the piezoelectric element 10.

本実施形態によっても、第１の実施形態と同様の効果を得ることができる。また、第１梁２２、第２梁２４、及び第３梁２６の長さを異ならせる必要がない。このため、第１梁２２、第２梁２４、及び第３梁２６の全ての長さを、圧電素子１０の直径よりも大きくすることができる。従って、圧電素子１０を第１振動部材２０の上に安定させることができる。 Also according to this embodiment, the same effect as that of the first embodiment can be obtained. Further, it is not necessary to make the lengths of the first beam 22, the second beam 24, and the third beam 26 different. For this reason, all the lengths of the first beam 22, the second beam 24, and the third beam 26 can be made larger than the diameter of the piezoelectric element 10. Therefore, the piezoelectric element 10 can be stabilized on the first vibrating member 20.

（第３の実施形態）
図５は、第３の実施形態に係る電子機器２００の構成を示す平面図である。本実施形態に係る電子機器２００は、携帯型の電子機器、例えば携帯通信端末、携帯型パーソナルコンピュータ、携帯型ゲーム機器、携帯型音声再生装置、又は携帯型映像再生装置である。ただし、電子機器２００はこれら以外の機器であっても良い。電子機器２００は、ディスプレイ２０２及び発振装置１００を有している。発振装置１００はスピーカとして使用される。発振装置１００の構成は、第１の実施形態又は第２の実施形態に示した通りである。 (Third embodiment)
FIG. 5 is a plan view illustrating a configuration of an electronic device 200 according to the third embodiment. The electronic device 200 according to the present embodiment is a portable electronic device, such as a portable communication terminal, a portable personal computer, a portable game device, a portable audio playback device, or a portable video playback device. However, the electronic device 200 may be other devices. The electronic device 200 includes a display 202 and an oscillation device 100. The oscillation device 100 is used as a speaker. The configuration of the oscillation device 100 is as shown in the first embodiment or the second embodiment.

本実施形態によっても、第１又は第２の実施形態と同様の効果を得ることができる。 According to this embodiment, the same effect as that of the first or second embodiment can be obtained.

以上、図面を参照して本発明の実施形態について述べたが、これらは本発明の例示であり、上記以外の様々な構成を採用することもできる。例えば第１振動部材２０を構成する複数種類の梁の基本共振周波数を異ならせる方法は、上記した実施形態に限定されない。例えば、梁の種類によって材料を変えることにより、梁の基本共振周波数を異ならせてもよい。また、第１振動部材２０を構成する梁の一部に錘を設ける（例えば部分的に太くする）ことによっても、梁の基本共振周波数を異ならせることができる。 As mentioned above, although embodiment of this invention was described with reference to drawings, these are the illustrations of this invention, Various structures other than the above are also employable. For example, the method of making the fundamental resonance frequencies of the plurality of types of beams constituting the first vibrating member 20 different is not limited to the above-described embodiment. For example, the fundamental resonance frequency of the beam may be varied by changing the material depending on the type of beam. Also, the basic resonance frequency of the beam can be made different by providing a weight (for example, partially thickening) on a part of the beam constituting the first vibrating member 20.

なお、上記実施形態によれば、以下の発明が開示されている。
（付記１）
圧電素子と、
前記圧電素子が取り付けられた第１振動部材と、
前記第１振動部材を介して前記圧電素子とは反対側に位置し、前記第１振動部材が取り付けられた第２振動部材と、
前記第２振動部材の縁を保持する保持部材と、
を有し、
前記第２振動部材はシート形状を有しており、
前記第１振動部材は、互いに異なる基本共振周波数を有する複数種類の梁を、互いに異なる方向に向けた形状を有している発振装置。
（付記２）
付記１に記載の発振装置において、
前記複数種類の梁は、長さが互いに異なる発振装置。
（付記３）
付記２に記載の発振装置において、
前記複数種類の梁として、長さＬ_１である第１の梁、長さＬ_２である第２の梁、及び長さＬ_３である第３の梁を有しており、
Ｌ_１＜２×Ｌ_２＜３×Ｌ_３である発振装置。
（付記４）
付記２又は３に記載の発振装置において、
平面視において、前記複数種類の梁は、中心が互いに重なっており、かつ当該中心が、前記圧電素子及び前記第２振動部材の中心と重なっている発振装置。
（付記５）
付記１〜４のいずれか一つに記載の発振装置において、
前記複数種類の梁は、断面形状が互いに異なる発振装置。
（付記６）
付記１〜５のいずれか一つに記載の発振装置において、
前記第１振動部材は、前記複数種類の梁の少なくとも一つを、複数有している発振装置。
（付記７）
付記１〜６のいずれか一つに記載の発振装置において、
前記第１振動部材は、前記第２振動部材よりも剛性が高い発振装置。
（付記８）
発振装置と、
前記発振装置を制御する制御手段と、
を有し、
前記発振装置は、
圧電素子と、
前記圧電素子が取り付けられた第１振動部材と、
前記第１振動部材を介して前記圧電素子とは反対側に位置し、前記第１振動部材が取り付けられた第２振動部材と、
前記第２振動部材の縁を保持する保持部材と、
を有し、
前記第２振動部材はシート形状を有しており、
前記第１振動部材は、互いに異なる基本共振周波数を有する複数種類の梁を、互いに異なる方向に向けた形状を有している電子機器。
（付記９）
付記８に記載の電子機器において、
前記複数種類の梁は、長さが互いに異なる電子機器。
（付記１０）
付記９に記載の電子機器において、
前記複数種類の梁として、長さＬ_１である第１の梁、長さＬ_２である第２の梁、及び長さＬ_３である第３の梁を有しており、
Ｌ_１＜２×Ｌ_２＜３×Ｌ_３である電子機器。
（付記１１）
付記９又は１０に記載の電子機器において、
平面視において、前記複数種類の梁は、中心が互いに重なっており、かつ当該中心が、前記圧電素子及び前記第２振動部材の中心と重なっている電子機器。
（付記１２）
付記８〜１１のいずれか一つに記載の電子機器において、
前記複数種類の梁は、断面形状が互いに異なる電子機器。
（付記１３）
付記８〜１２のいずれか一つに記載の電子機器において、
前記第１振動部材は、前記複数種類の梁の少なくとも一つを、複数有している電子機器。
（付記１４）
付記８〜１３のいずれか一つに記載の電子機器において、
前記第１振動部材は、前記第２振動部材よりも剛性が高い電子機器。 In addition, according to the said embodiment, the following invention is disclosed.
(Appendix 1)
A piezoelectric element;
A first vibrating member to which the piezoelectric element is attached;
A second vibrating member that is located on the opposite side of the piezoelectric element via the first vibrating member, and to which the first vibrating member is attached;
A holding member for holding an edge of the second vibrating member;
Have
The second vibrating member has a sheet shape,
The oscillation device in which the first vibration member has a shape in which a plurality of types of beams having different fundamental resonance frequencies are directed in different directions.
(Appendix 2)
In the oscillation device according to attachment 1,
The plurality of types of beams are oscillation devices having different lengths.
(Appendix 3)
In the oscillation device according to attachment 2,
Examples plurality of beams has a first beam, the third beam is the second beam, and the length L ₃ is the length L ₂ is a length L _1,
Oscillator with L ₁ <2 × L ₂ <3 × L ₃ .
(Appendix 4)
In the oscillator according to appendix 2 or 3,
In plan view, the plurality of types of beams have centers overlapping each other, and the centers overlap the centers of the piezoelectric element and the second vibrating member.
(Appendix 5)
In the oscillation device according to any one of appendices 1 to 4,
The plurality of types of beams are oscillation devices having different cross-sectional shapes.
(Appendix 6)
In the oscillation device according to any one of appendices 1 to 5,
The oscillation device in which the first vibration member has a plurality of at least one of the plurality of types of beams.
(Appendix 7)
In the oscillation device according to any one of appendices 1 to 6,
The first vibration member is an oscillation device having higher rigidity than the second vibration member.
(Appendix 8)
An oscillation device;
Control means for controlling the oscillation device;
Have
The oscillator is
A piezoelectric element;
A first vibrating member to which the piezoelectric element is attached;
A second vibrating member that is located on the opposite side of the piezoelectric element via the first vibrating member, and to which the first vibrating member is attached;
A holding member for holding an edge of the second vibrating member;
Have
The second vibrating member has a sheet shape,
The first vibration member is an electronic device having a shape in which a plurality of types of beams having different fundamental resonance frequencies are directed in different directions.
(Appendix 9)
In the electronic device according to attachment 8,
The plurality of types of beams are electronic devices having different lengths.
(Appendix 10)
In the electronic device according to attachment 9,
Examples plurality of beams has a first beam, the third beam is the second beam, and the length L ₃ is the length L ₂ is a length L _1,
An electronic device satisfying L ₁ <2 × L ₂ <3 × L ₃ .
(Appendix 11)
In the electronic device according to appendix 9 or 10,
In plan view, the plurality of types of beams have electronic centers in which the centers overlap each other, and the centers overlap the centers of the piezoelectric element and the second vibrating member.
(Appendix 12)
In the electronic device according to any one of appendices 8 to 11,
The plurality of types of beams are electronic devices having different cross-sectional shapes.
(Appendix 13)
In the electronic device according to any one of appendices 8 to 12,
The first vibration member is an electronic device having a plurality of at least one of the plurality of types of beams.
(Appendix 14)
In the electronic device according to any one of appendices 8 to 13,
The first vibration member is an electronic device having higher rigidity than the second vibration member.

１０圧電素子
２０第１振動部材
２２第１梁
２４第２梁
２６第３梁
３０第２振動部材
４０保持部材
５０制御部
１００発振装置
２００電子機器
２０２ディスプレイ DESCRIPTION OF SYMBOLS 10 Piezoelectric element 20 1st vibration member 22 1st beam 24 2nd beam 26 3rd beam 30 2nd vibration member 40 Holding member 50 Control part 100 Oscillator 200 Electronic device 202 Display

Claims

A piezoelectric element;
A first vibrating member to which the piezoelectric element is attached;
A second vibrating member that is located on the opposite side of the piezoelectric element via the first vibrating member, and to which the first vibrating member is attached;
A holding member for holding an edge of the second vibrating member;
Have
The second vibrating member has a sheet shape,
The oscillation device in which the first vibration member has a shape in which a plurality of types of beams having different fundamental resonance frequencies are directed in different directions.

The oscillation device according to claim 1,
The plurality of types of beams are oscillation devices having different lengths.

The oscillation device according to claim 2,
Examples plurality of beams has a first beam, the third beam is the second beam, and the length L ₃ is the length L ₂ is a length L _1,
Oscillator with L ₁ <2 × L ₂ <3 × L ₃ .

The oscillation device according to claim 2 or 3,
In plan view, the plurality of types of beams have centers overlapping each other, and the centers overlap the centers of the piezoelectric element and the second vibrating member.

In the oscillating device according to any one of claims 1 to 4,
The plurality of types of beams are oscillation devices having different cross-sectional shapes.

In the oscillation device according to any one of claims 1 to 5,
The oscillation device in which the first vibration member has a plurality of at least one of the plurality of types of beams.

In the oscillation device according to any one of claims 1 to 6,
The first vibration member is an oscillation device having higher rigidity than the second vibration member.

An oscillation device;
Control means for controlling the oscillation device;
Have
The oscillator is
A piezoelectric element;
A first vibrating member to which the piezoelectric element is attached;
A second vibrating member that is located on the opposite side of the piezoelectric element via the first vibrating member, and to which the first vibrating member is attached;
A holding member for holding an edge of the second vibrating member;
Have
The second vibrating member has a sheet shape,
The first vibration member is an electronic device having a shape in which a plurality of types of beams having different fundamental resonance frequencies are directed in different directions.