JP2013119130A - Spraying nozzle, spray processing device, spray processing method by spray processing device, method of manufacturing battery material, and secondary battery - Google Patents

Spraying nozzle, spray processing device, spray processing method by spray processing device, method of manufacturing battery material, and secondary battery Download PDF

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JP2013119130A
JP2013119130A JP2011267204A JP2011267204A JP2013119130A JP 2013119130 A JP2013119130 A JP 2013119130A JP 2011267204 A JP2011267204 A JP 2011267204A JP 2011267204 A JP2011267204 A JP 2011267204A JP 2013119130 A JP2013119130 A JP 2013119130A
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injection
nozzle
component
opening
interval
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Saeed Sepasy Zahmaty Mohammad
モハマドサイド セパシィザマティ
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Nikon Corp
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

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Abstract

PROBLEM TO BE SOLVED: To increase a region where a film thickness formed of sprayed particles is uniformized.SOLUTION: This spraying nozzle is formed with an opening for spraying a mixture fluid of particles and gas. An outer peripheral part determining the opening includes: a pair of extensions extending in a longitudinal direction by maintaining a first interval; termination parts formed in vicinities of ends of the pair of extensions and each forming a straight line in a predetermined angle direction with respect to the longitudinal direction; first connection parts each used for connecting the end of one-side extension part to a one-side end of the termination part; and second connection parts each used for connecting the end of the other-side extension to the other-side end of the termination part where the length of at least one of the termination parts is longer than the first interval.

Description

本発明は、噴射用ノズル、噴射加工装置、噴射加工装置による噴射加工方法、電池材料の製造方法および二次電池に関する。   The present invention relates to an injection nozzle, an injection processing device, an injection processing method using an injection processing device, a battery material manufacturing method, and a secondary battery.

従来から、幅広の開口部から、たとえば金属、金属酸化物、セラミックス、ガス等を噴射する噴射ノズルが知られている（たとえば特許文献１）。   Conventionally, an injection nozzle that injects, for example, metal, metal oxide, ceramics, gas or the like from a wide opening is known (for example, Patent Document 1).

特開２０００−１３５６８０号公報JP 2000-135680 A

しかしながら、開口部の両端から噴射される流体の速度は低下することになり、粉体を加工物に付着させる場合には、付着した粉体により構成される膜の厚さが不均一になるという問題がある。   However, the speed of the fluid ejected from both ends of the opening will decrease, and when the powder adheres to the workpiece, the thickness of the film constituted by the adhered powder becomes non-uniform. There's a problem.

請求項１に記載の発明による噴射用ノズルは、粒子と気体との混合流体を噴射する開口部が設けられた噴射用ノズルであって、開口部を決定する外周は、第１の間隔を維持して長手方向へ延伸する一対の延伸部と、一対の延伸部の端部の近傍に設けられ、長手方向に対して所定角度方向に直線をなす終端部と、一方の延伸部の端部と終端部の一方の端部とを接続する第１接続部と、他方の延伸部の端部と終端部の他方の端部とを接続する第２接続部と、を有し、終端部のうち少なくとも一方の長さは、第１の間隔よりも長いことを特徴とする。
請求項１３に記載の発明による噴射用ノズルは、粒子と気体との混合流体を噴射する開口部が設けられた噴射用ノズルであって、開口部を決定する外周は、第１の間隔を維持して長手方向へ直線状に延伸する一対の延伸部と、一対の延伸部の一方の端部の近傍に設けられ、長手方向に対して直角に直線状をなす第１終端部と、一方の延伸部の一方の端部と接続され、第１終端部と第１の間隔よりも短い第２の間隔を維持して直線状をなす第１構成部と、第１構成部と第１終端部の一方の端部と接続する第２構成部とによって構成される第１接続部と、他方の延伸部の一方の端部と接続され、第１終端部と第２の間隔を維持して直線状をなす第３構成部と、第３構成部と第１終端部の他方の端部とを接続する第４構成部とによって構成される第２接続部と、一対の延伸部の他方の端部の近傍に設けられ、長手方向に対して直角に直線状をなす第２終端部と、一方の延伸部の他方の端部と接続され、第２終端部と第２の間隔を維持して直線状をなす第５構成部と、第５構成部と第２終端部の一方の端部とを接続する第６構成部とによって構成される第３接続部と、他方の延伸部の他方の端部と接続され、第２終端部と第２の間隔を維持して直線状をなす第７構成部と、第７構成部と第２終端部の他方の端部とを接続する第８構成部とによって構成される第４接続部と、を有し、第１終端部および第２終端部の長さは第１の間隔よりも長く、開口部の長手方向の中心線から所定角度方向に沿って逆方向に等分されることを特徴とする。
請求項１４に記載の発明による噴射加工装置は、請求項１乃至１３のいずれか一項に記載の噴射用ノズルと、粒子収容部に収容された粒子を噴射用ノズルへ導入する第１導入部と、噴射部に導入された微粒子を加速するための加速用気体を、噴射用ノズルに導く第２導入部と、を備えることを特徴とする。
請求項１５に記載の発明による噴射加工装置による噴射加工方法は、請求項１４に記載の噴射加工装置が有する開口部から粒子と気体との混合流体を噴射し、開口部に対向して配置した基材に粒子を衝突させて、基材の被加工面に粒子を付着させることを特徴とする。
請求項１７に記載の発明による電池材料の製造方法は、請求項１５または１６に記載の噴射加工装置による噴射加工方法によって、基材として設けられた電極基材に粒子を付着させて電極材料の膜を形成することを特徴とする。
請求項１８に記載の発明による二次電池は、請求項１７に記載の電池材料の製造方法により製造された電極材料の膜を電極として有することを特徴とする。 An injection nozzle according to a first aspect of the present invention is an injection nozzle provided with an opening for injecting a mixed fluid of particles and gas, and an outer periphery that determines the opening maintains a first interval. A pair of extending portions extending in the longitudinal direction, an end portion that is provided in the vicinity of the ends of the pair of extending portions, and forms a straight line in a predetermined angle direction with respect to the longitudinal direction, and an end portion of one extending portion, A first connecting portion that connects one end portion of the terminating portion, and a second connecting portion that connects the end portion of the other extending portion and the other end portion of the terminating portion, At least one of the lengths is longer than the first interval.
An injection nozzle according to a thirteenth aspect of the invention is an injection nozzle provided with an opening for injecting a mixed fluid of particles and gas, and the outer periphery that determines the opening maintains the first interval. A pair of extending portions that linearly extend in the longitudinal direction, a first terminal portion that is provided in the vicinity of one end of the pair of extending portions, and that is linearly perpendicular to the longitudinal direction, A first component that is connected to one end of the extending portion and maintains a second interval shorter than the first interval from the first end, and a first component and a first end A first connecting part constituted by a second constituent part connected to one end part of the first part and one end part of the other extension part, and a straight line maintaining a second distance from the first terminal part. A third component that is shaped and a fourth component that connects the third component and the other end of the first terminal portion. Connected to the connecting portion, the second end portion provided in the vicinity of the other end portion of the pair of extending portions, linearly perpendicular to the longitudinal direction, and the other end portion of the one extending portion; A second component that is formed in a straight line while maintaining a second interval with the second terminal, and a sixth component that connects the fifth component and one end of the second terminal. 3 connection parts and the 7th composition part which is connected with the other end part of the other extension part, and makes the 2nd end part and the 2nd interval, and makes the shape of a straight line, the 7th composition part, and the 2nd termination part And a fourth connecting portion configured to connect to the other end of the first end portion, and the length of the first terminal portion and the second terminal portion is longer than the first interval, It is characterized by being equally divided in the opposite direction along a predetermined angle direction from the center line in the longitudinal direction of the part.
An injection processing apparatus according to a fourteenth aspect of the present invention is the injection nozzle according to any one of the first to thirteenth aspects, and a first introduction portion that introduces particles contained in the particle accommodation portion into the injection nozzle. And a second introduction part for guiding an acceleration gas for accelerating the fine particles introduced into the injection part to the injection nozzle.
According to a fifteenth aspect of the present invention, there is provided an injection processing method using an injection processing apparatus, wherein a mixed fluid of particles and gas is injected from an opening of the injection processing apparatus according to the fourteenth aspect and disposed opposite to the opening. The method is characterized in that particles are made to collide with a base material, and the particles are adhered to a processed surface of the base material.
According to a seventeenth aspect of the present invention, there is provided a battery material manufacturing method in which particles are attached to an electrode base material provided as a base material by an injection processing method using an injection processing apparatus according to the fifteenth or sixteenth aspect. A film is formed.
A secondary battery according to an eighteenth aspect of the present invention includes an electrode material film manufactured by the method for manufacturing a battery material according to the seventeenth aspect as an electrode.

本発明によれば、噴射用ノズルの開口部を決定する外周では、一対の延伸部に対して所定角度方向に延在する終端部の長さを一対の延伸部の間の第１の間隔よりも長くするので、噴射した粒子により形成される膜厚が均一となる領域を増加させることができる。   According to the present invention, at the outer periphery that determines the opening of the injection nozzle, the length of the terminal portion that extends in the predetermined angle direction with respect to the pair of extending portions is greater than the first interval between the pair of extending portions. Therefore, the region where the film thickness formed by the ejected particles is uniform can be increased.

本発明の実施の形態による噴射加工装置の外観斜視図1 is an external perspective view of an injection processing apparatus according to an embodiment of the present invention. 図１のＡ−Ａ線断面図AA line sectional view of FIG. 噴射加工装置の透視斜視図Perspective perspective view of an injection processing device 噴射ノズルの開口部の形状を説明する平面図Plan view explaining the shape of the opening of the injection nozzle 開口部から噴射される混合流体の流速を説明する図The figure explaining the flow velocity of the mixed fluid injected from an opening part 変形例における開口部の形状を説明する平面図The top view explaining the shape of the opening in a modification 変形例における開口部の形状を説明する平面図The top view explaining the shape of the opening in a modification

図面を参照しながら、本発明の実施の形態による噴射加工装置について説明する。図１は実施の形態による噴射加工装置１の外観斜視図である。図２は、図１のＡ−Ａ線での噴射加工装置１の内部構成を示す断面図である。図３は、噴射加工装置１の内部を透視して示す斜視図である。なお、説明の都合上、ｘ軸、ｙ軸およびｚ軸で表される座標軸を、図１〜図３に示すように設定する。   An injection processing apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an external perspective view of an injection processing apparatus 1 according to an embodiment. FIG. 2 is a cross-sectional view showing an internal configuration of the jet machining apparatus 1 taken along line AA in FIG. FIG. 3 is a perspective view showing the inside of the injection processing apparatus 1 as seen through. For convenience of explanation, the coordinate axes represented by the x-axis, y-axis, and z-axis are set as shown in FIGS.

図１〜図３に示すように、噴射加工装置１は、粒径６μｍ程度の固体微粒子を収容する微粒子供給ユニット（不図示）が着脱可能なノズルユニット１０によって構成される。固体微粒子としては、銅、銀、金等の金属の微粒子、銅微粒子の表面に銀や金等がコーティングされた複合微粒子などが用いられる。ノズルユニット１０は、ノズルブロック１１と、噴射ノズル１２と、加速ガス供給ポート１３ａ〜１３ｄ（総称する場合には符合１３とする）と、加速ガス導入路１４ａ〜１４ｄ（総称する場合には符合１４とする）と、微粒子供給路１５とを備えている。ノズルブロック１１は、ノズルユニット１０のベースであり、その内部に噴射ノズル１２と、加速ガス導入路１４と、微粒子供給路１５とが設けられている。本実施の形態の噴射加工装置１では、噴射ノズル１２に供給された固体微粒子が加速ガス供給ポート１３から加速ガス導入路１４を介して供給された気体によって分散される。そして、固体微粒子と気体との混合流体が噴射ノズル１２の先端に設けられた開口部１２１から、たとえば電極基材等の基材の被加工面に向けて噴射される。   As shown in FIGS. 1 to 3, the injection processing apparatus 1 includes a nozzle unit 10 to which a fine particle supply unit (not shown) that stores solid fine particles having a particle diameter of about 6 μm is detachable. As the solid fine particles, fine particles of metals such as copper, silver, and gold, composite fine particles in which the surface of the copper fine particles is coated with silver, gold, or the like are used. The nozzle unit 10 includes a nozzle block 11, an injection nozzle 12, acceleration gas supply ports 13 a to 13 d (reference numeral 13 when collectively referred to), and acceleration gas introduction paths 14 a to 14 d (reference numeral 14 when generically referred to). And a fine particle supply path 15. The nozzle block 11 is a base of the nozzle unit 10, and an injection nozzle 12, an acceleration gas introduction path 14, and a fine particle supply path 15 are provided therein. In the injection processing apparatus 1 according to the present embodiment, the solid fine particles supplied to the injection nozzle 12 are dispersed by the gas supplied from the acceleration gas supply port 13 through the acceleration gas introduction path 14. Then, a mixed fluid of solid fine particles and gas is ejected from an opening 121 provided at the tip of the ejection nozzle 12 toward a processed surface of a base material such as an electrode base material.

ノズルブロック１１の内部に設けられた微粒子供給路１５は、たとえばセラミックス等の耐食材料を用いて形成された中空の部材であり、ｘ軸に垂直な方向のｙｚ断面が、ｙ軸方向を長辺とする矩形形状に形成されている。微粒子供給路１５は、ｘ軸方向に沿って延在し、上流側の端部（ｘ軸−側）は、パウダー状の固体微粒子が収容された微粒子供給ユニット（不図示）と接続される。微粒子供給路１５の下流側の端部（ｘ軸＋側）は、後述する噴射ノズル１２の上流側の端部と接続されている。さらに、微粒子供給路１５には、たとえばＨｅ、Ｎ２、Ａｒ、空気等の種々のガス（供給用気体）がチューブ等を介して接続されたガスボトル（不図示）から供給される。供給用気体が微粒子供給路１５内部を流れることにより、微粒子供給路１５に負圧が生じる。この負圧を利用して、微粒子供給ユニットに収容された固体微粒子が微粒子供給路１５内に供給され、供給用気体中に分散される。その結果、微粒子供給路１５は、微粒子供給ユニットから供給された固体微粒子と供給用気体との混合流体を噴射ノズル１２へ導くための導入路として機能する。 The fine particle supply path 15 provided inside the nozzle block 11 is a hollow member formed using a corrosion-resistant material such as ceramics, and the yz section perpendicular to the x-axis has a long side in the y-axis direction. It is formed in a rectangular shape. The fine particle supply path 15 extends along the x-axis direction, and the upstream end (x-axis-side) is connected to a fine particle supply unit (not shown) in which powdery solid fine particles are accommodated. A downstream end (x-axis + side) of the fine particle supply path 15 is connected to an upstream end of the injection nozzle 12 described later. Furthermore, various gases (supply gas) such as He, N 2 , Ar, and air are supplied to the fine particle supply path 15 from a gas bottle (not shown) connected via a tube or the like. As the supply gas flows through the inside of the fine particle supply path 15, a negative pressure is generated in the fine particle supply path 15. Using this negative pressure, the solid fine particles accommodated in the fine particle supply unit are supplied into the fine particle supply path 15 and dispersed in the supply gas. As a result, the fine particle supply path 15 functions as an introduction path for guiding the mixed fluid of the solid fine particles and the supply gas supplied from the fine particle supply unit to the injection nozzle 12.

噴射ノズル１２は、たとえばセラミックス等の耐食性材料を用いて形成された中空の部材である。噴射ノズル１２はｘ軸方向に沿って延在し、上流側の端部（ｘ軸−側）は微粒子供給路１５の下流側の端部と一部重複して配設される。この重複部、すなわち噴射ノズル１２の内周と微粒子供給路１５の外周との間には、後述する加速ガス導入路１４が接続される。噴射ノズル１２の下流側（噴射側）の端部（ｘ軸＋側）はノズルブロック１１からｘ軸＋方向に突出して固定され、固体微粒子を噴射するための開口部１２１を形成している。その結果、噴射ノズル１２は、微粒子供給路１５から導かれた固体微粒子と供給用気体との混合流体を、加速ガス導入路１４を介して供給された加速用気体によって加速させて開口部１２１から噴射させるための加速用導入路として機能する。   The injection nozzle 12 is a hollow member formed using a corrosion resistant material such as ceramics. The injection nozzle 12 extends along the x-axis direction, and the upstream end (x-axis-side) is disposed so as to partially overlap the downstream end of the particulate supply path 15. An acceleration gas introduction path 14 to be described later is connected between the overlapping portion, that is, between the inner periphery of the injection nozzle 12 and the outer periphery of the fine particle supply path 15. An end (x-axis + side) on the downstream side (injection side) of the injection nozzle 12 protrudes from the nozzle block 11 in the x-axis + direction and is fixed to form an opening 121 for injecting solid fine particles. As a result, the injection nozzle 12 accelerates the mixed fluid of the solid fine particles guided from the fine particle supply path 15 and the supply gas by the acceleration gas supplied via the acceleration gas introduction path 14 and from the opening 121. It functions as an acceleration introduction path for injecting.

噴射ノズル１２は、ｘ軸に垂直な方向の断面がＨ型状に形成され、このＨ型形状を維持した状態でｘ軸方向に延在している。すなわち、噴射ノズル１２の開口部１２１はＨ型状に形成されている。なお、開口部１２１の形状については、その詳細を後述する。   The injection nozzle 12 is formed in an H-shaped cross section in a direction perpendicular to the x-axis, and extends in the x-axis direction while maintaining the H-shaped shape. That is, the opening 121 of the injection nozzle 12 is formed in an H shape. Details of the shape of the opening 121 will be described later.

加速ガス供給ポート１３ａ〜１３ｄは、それぞれノズルブロック１１のｚ軸＋側の面、ｚ軸−側の面、ｙ軸＋側の面、ｙ軸−側の面に設けられている。加速ガス供給ポート１３ａ〜１３ｄには、たとえばＨｅ、Ｎ２、Ａｒ、空気等の種々のガス（加速用気体）がチューブ等を介して接続されたガスボトル（不図示）から供給される。加速ガス導入路１４ａ〜１４ｄは、加速ガス供給ポート１３ａ〜１３ｄのそれぞれに対応して設けられている。加速用ガス供給ポート１３から供給される加速用気体は、加速ガス導入路１４によって、上述した微粒子供給路１５の先端部と噴射ノズル１２とが接続された重複部を介して噴射ノズル１２内に導かれる。 The acceleration gas supply ports 13a to 13d are provided on the z axis + side surface, the z axis-side surface, the y axis + side surface, and the y axis-side surface of the nozzle block 11, respectively. Various gases (acceleration gas) such as He, N 2 , Ar, and air are supplied to the acceleration gas supply ports 13a to 13d from a gas bottle (not shown) connected via a tube or the like. The acceleration gas introduction paths 14a to 14d are provided corresponding to the acceleration gas supply ports 13a to 13d, respectively. The accelerating gas supplied from the accelerating gas supply port 13 is injected into the injection nozzle 12 via the accelerating gas introduction path 14 through the overlapping portion where the tip of the fine particle supply path 15 and the injection nozzle 12 are connected. Led.

上述した構成を有する噴射加工装置１では、微粒子供給ユニットから供給された固体微粒子は、主として加速ガス導入路１４の出口と微粒子供給路１５の出口の気体とのエジェクタ効果による負圧を利用して加速用気体中に分散される。そして、噴射ノズル１２内で加速用気体により加速されて開口部１２１から電極基材に向けて噴射される。すなわち、加速ガス供給ポート１３を介して加速ガス導入路１４に所定圧力（０．１ＭＰａ〜１．０ＭＰａ、最適値は０．５ＭＰａ）で加速用気体が供給されると、加速用気体は噴射ノズル１２内を流れ、固体微粒子とともに混合流体として開口部１２１から電極基材に向けて噴射される。   In the injection processing apparatus 1 having the above-described configuration, the solid fine particles supplied from the fine particle supply unit mainly use the negative pressure due to the ejector effect of the gas at the outlet of the acceleration gas introduction path 14 and the outlet of the fine particle supply path 15. Dispersed in the accelerating gas. And it accelerates with the gas for acceleration in the injection nozzle 12, and is injected toward the electrode base material from the opening part 121. FIG. That is, when the acceleration gas is supplied to the acceleration gas introduction path 14 through the acceleration gas supply port 13 at a predetermined pressure (0.1 MPa to 1.0 MPa, the optimum value is 0.5 MPa), the acceleration gas is injected into the injection nozzle. 12 flows through the opening 121 toward the electrode base material as a mixed fluid together with the solid fine particles.

開口部１２１から噴射される固体微粒子の速度は、主として噴射ノズル１２に供給される加速用気体の種類及び圧力を制御することによって設定される。たとえば、加速用気体がＮ２の場合には、固体微粒子は１００ｍ／ｓｅｃ〜５００ｍ／ｓｅｃ程度の速度で噴射される。開口部１２１から噴射された混合流体中の固体微粒子は、開口部１２１からｘ軸方向へ０．５ｍｍ〜５ｍｍ程度の距離に配置された電極基材の被付着面に衝突して付着する。そして、固体微粒子を噴射させながら噴射加工装置１と電極基材とをｙｚ平面に沿って、ｚ軸方向に相対移動させることにより、常温かつ常圧下で、電極基材上に電極材料の膜が形成される。電極基材のｙ軸方向の長さが開口部１２１のｙ軸方向の長さよりも長い場合には、開口部１２１と電極基材とのｙ軸方向の相対位置をずらす。そして、再度、同様にして噴射加工装置１と電極基材とをｚ軸方向に相対移動させて固体微粒子を付着させることにより、広範囲の成膜加工を行う。 The speed of the solid fine particles ejected from the opening 121 is set mainly by controlling the type and pressure of the acceleration gas supplied to the ejection nozzle 12. For example, when the acceleration gas is N 2 , the solid fine particles are injected at a speed of about 100 m / sec to 500 m / sec. The solid fine particles in the mixed fluid ejected from the opening 121 collide with and adhere to the adherend surface of the electrode substrate disposed at a distance of about 0.5 mm to 5 mm in the x-axis direction from the opening 121. Then, the film of the electrode material is formed on the electrode base material at normal temperature and normal pressure by relatively moving the injection processing apparatus 1 and the electrode base material along the yz plane while injecting the solid fine particles. It is formed. When the length of the electrode base in the y-axis direction is longer than the length of the opening 121 in the y-axis direction, the relative position in the y-axis direction between the opening 121 and the electrode base is shifted. Then, in a similar manner, the spray processing apparatus 1 and the electrode base material are relatively moved in the z-axis direction to deposit solid fine particles, thereby performing a wide range of film forming processing.

以下、図４を参照しながら、噴射ノズル１２の開口部１２１について詳細に説明する。図４（ａ）は、本実施の形態の噴射ノズル１２の開口部１２１をｘ軸＋方向から見た場合、すなわちｙｚ平面に平行な面での平面図である。なお、図４（ａ）においては、座標軸の原点を図中の点Ｃに設けるものとし、以後、点Ｃを開口部１２１の中点と呼称する。   Hereinafter, the opening 121 of the injection nozzle 12 will be described in detail with reference to FIG. FIG. 4A is a plan view when the opening 121 of the injection nozzle 12 of the present embodiment is viewed from the x-axis + direction, that is, a plane parallel to the yz plane. In FIG. 4A, the origin of the coordinate axis is provided at point C in the figure, and point C is hereinafter referred to as the midpoint of opening 121.

図に示すように、開口部１２１はＨ型状に形成され、ｙ軸方向にたとえば２０ｍｍの長さを有する。開口部１２１を決定する外周は、第１延伸部２００と、第２延伸部２０１と、終端部３００と、第１接続部３０１と、第２接続部３０２とを有している。第１延伸部２００および第２延伸部２０１は、ｚ軸方向にたとえば１．６ｍｍの間隔を維持して対向し、ｙ軸方向に直線状に延在している。以後、説明の都合上、第１延伸部２００と第２延伸部２０１との間の領域（空間）を開口部１２１の中央部１２１ｃと呼ぶ。   As shown in the figure, the opening 121 is formed in an H shape and has a length of, for example, 20 mm in the y-axis direction. The outer periphery that determines the opening 121 includes a first extending part 200, a second extending part 201, a terminal part 300, a first connecting part 301, and a second connecting part 302. The first extending portion 200 and the second extending portion 201 are opposed to each other while maintaining an interval of 1.6 mm, for example, in the z-axis direction, and extend linearly in the y-axis direction. Hereinafter, for convenience of explanation, a region (space) between the first extending portion 200 and the second extending portion 201 is referred to as a central portion 121c of the opening 121.

終端部３００は、第１延伸部２００および第２延伸部２０１のｙ軸方向の両端部の近傍に設けられている。なお、以後の説明では、第１延伸部２００の端部Ｐ１側および第２延伸部２０１の端部Ｐ３側、すなわちｙ軸方向＋側に設けられた終端部３００についての説明を主とする。終端部３００は、第１延伸部２００および第２延伸部２０１の端部Ｐ１およびＰ３から、ｙ軸方向に沿って、たとえば０．４ｍｍ〜０．８ｍｍ離れた位置に設けられている。第１接続部３０１は、第１延伸部２００の端部Ｐ１と終端部３００の両端のうちの一方の端部Ｐ２とを接続するように構成される。第２接続部３０２は、第２延伸部２０１の端部Ｐ３と終端部３００の両端のうちの他方の端部Ｐ４とを接続するように構成される。以後、説明の都合上、終端部３００と第１接続部３０１と第２接続部３０２とによって規定される領域（空間）を、開口部１２１の端部１２１ｄと呼ぶ。   The terminal portion 300 is provided in the vicinity of both ends of the first extending portion 200 and the second extending portion 201 in the y-axis direction. In the following description, the description will be mainly made of the end portion 300 provided on the end portion P1 side of the first extending portion 200 and the end portion P3 side of the second extending portion 201, that is, on the + side in the y-axis direction. The terminal portion 300 is provided at a position, for example, 0.4 mm to 0.8 mm away from the ends P1 and P3 of the first extending portion 200 and the second extending portion 201 along the y-axis direction. The first connection portion 301 is configured to connect the end portion P1 of the first extending portion 200 and one end portion P2 of both ends of the termination portion 300. The second connection portion 302 is configured to connect the end portion P3 of the second extending portion 201 and the other end portion P4 of both ends of the termination portion 300. Hereinafter, for convenience of explanation, a region (space) defined by the terminal portion 300, the first connection portion 301, and the second connection portion 302 is referred to as an end portion 121d of the opening 121.

終端部３００は、第１延伸部２００と第２延伸部２０１とが延在する方向（ｙ軸方向）に対して所定の角度としてほぼ直角となる方向（ｚ軸方向）に直線状に形成されている。本実施の形態においては、終端部３００のｚ軸方向の長さは、たとえば３．８ｍｍである。換言すると、終端部３００のｚ軸方向の直線の長さは、第１延伸部２００と第２延伸部２０１との間のｚ軸方向の間隔（長さ）よりも長くなるように形成される。また、終端部３００のｚ軸方向の長さは、開口部１２１の中点Ｃを通る中心線（すなわちｚ軸）を基準として、ｚ軸＋方向と−方向とに同一の長さを有する。すなわち、終端部３００のｚ軸方向の長さは、ｚ軸の＋方向と−方向とに１．９ｍｍずつ等分されている。   The terminal portion 300 is formed linearly in a direction (z-axis direction) that is substantially perpendicular to the direction in which the first extending portion 200 and the second extending portion 201 extend (y-axis direction). ing. In the present embodiment, the length of the end portion 300 in the z-axis direction is, for example, 3.8 mm. In other words, the length of the straight line in the z-axis direction of the terminal portion 300 is formed to be longer than the interval (length) in the z-axis direction between the first extending portion 200 and the second extending portion 201. . Further, the length of the terminal portion 300 in the z-axis direction has the same length in the z-axis + direction and the − direction with reference to the center line passing through the midpoint C of the opening 121 (that is, the z-axis). That is, the length of the terminal portion 300 in the z-axis direction is equally divided by 1.9 mm into the + and − directions of the z-axis.

第１接続部３０１は、第１構成部３０３および第２構成部３０４によって構成される。第１構成部３０３は、第１延在部２００の端部Ｐ１と接続され、ｚ軸、すなわち終端部３００と平行な直線状に形成されている。第２構成部３０４は一方の端部が第１構成部３０３と接続され、他方の端部が終端部３００の一方の端部Ｐ２と接続される。なお、本実施の形態では、第２構成部３０４は、ｙ軸に平行となるように形成されている。上述したように、終端部３００は第１延伸部２００の端部Ｐ１および第２延伸部２０１の端部Ｐ３からｙ軸方向に沿って０．４ｍｍ〜０．８ｍｍ離れた位置に形成されている。このため、第１構成部３０３は、終端部３００に対して０．４ｍｍ〜０．８ｍｍの間隔を維持して形成される。さらに、第２構成部３０４の長さも同様に０．４〜０．８ｍｍに形成される。   The first connection unit 301 includes a first configuration unit 303 and a second configuration unit 304. The first component 303 is connected to the end P <b> 1 of the first extension 200 and is formed in a straight line parallel to the z-axis, that is, the terminal end 300. The second component 304 has one end connected to the first component 303 and the other end connected to one end P <b> 2 of the termination unit 300. In the present embodiment, the second component 304 is formed so as to be parallel to the y-axis. As described above, the terminal portion 300 is formed at a position 0.4 mm to 0.8 mm away from the end portion P1 of the first extending portion 200 and the end portion P3 of the second extending portion 201 along the y-axis direction. . For this reason, the 1st structure part 303 is formed maintaining the space | interval of 0.4 mm-0.8 mm with respect to the termination | terminus part 300. FIG. Furthermore, the length of the 2nd structure part 304 is similarly formed in 0.4-0.8 mm.

第２接続部３０２は、第３構成部３０５および第４構成部３０６によって構成される。第３構成部３０５および第４構成部３０６は、上記の第１構成部３０１および第２構成部３０２とｙ軸に対してそれぞれ対称となるように形成される。このため、第３構成部３０５についても、終端部３００に対して０．４ｍｍ〜０．８ｍｍの間隔を維持して形成され、第４構成部３０６の長さも同様に０．４〜０．８ｍｍに形成される。換言すると、第１接続部３０１と第２接続部３０２とは、ｙ軸に対して対称の形状となるように形成される。   The second connection unit 302 includes a third configuration unit 305 and a fourth configuration unit 306. The third component 305 and the fourth component 306 are formed so as to be symmetrical with the first component 301 and the second component 302, respectively, with respect to the y-axis. For this reason, the third component 305 is also formed with an interval of 0.4 mm to 0.8 mm with respect to the terminal end 300, and the length of the fourth component 306 is similarly 0.4 to 0.8 mm. Formed. In other words, the first connection portion 301 and the second connection portion 302 are formed so as to be symmetrical with respect to the y-axis.

第１延伸部２００および第２延伸部２０１のｙ軸−側の端部についても、上述した終端部３００、第１接続部３０１、第２接続部３０２、第１構成部３０３、第２構成部３０４、第３構成部３０５、第４構成部３０６の形状と同様の形状が形成されている。すなわち、第１延伸部２００および第２延伸部２０１のｙ軸−側の端部には、上記の終端部３００、第１接続部３０１、第２接続部３０２、第１構成部３０３、第２構成部３０４、第３構成部３０５、第４構成部３０６とｚ軸に対して対称な形状をした外周が接続される。換言すると、開口部１２１は、中央部１２１と、中央部１２１ｃの両端に設けられた２つの端部１２１ｄとによって構成される。   The end portion 300, the first connection portion 301, the second connection portion 302, the first configuration portion 303, and the second configuration portion described above also with respect to the y-axis-side end portions of the first extension portion 200 and the second extension portion 201. A shape similar to the shapes of 304, the third component 305, and the fourth component 306 is formed. That is, the end portion 300, the first connection portion 301, the second connection portion 302, the first configuration portion 303, the second end portion 300, the end portion on the y-axis-side of the first extension portion 200 and the second extension portion 201. The component 304, the third component 305, and the fourth component 306 are connected to the outer periphery having a symmetrical shape with respect to the z axis. In other words, the opening 121 is constituted by a central portion 121 and two end portions 121d provided at both ends of the central portion 121c.

上述したように、開口部１２１は、噴射ノズル１２の他方の端部に設けられたものであり、噴射ノズル１２はｘ軸に垂直な方向の断面がＨ型状に形成された状態でｘ軸方向に延在している。したがって、噴射ノズル１２の各部の寸法についても、上記の開口部１２１の外周を決定する各部の寸法と同一である。   As described above, the opening 121 is provided at the other end of the injection nozzle 12, and the injection nozzle 12 has an X-axis in a state in which a cross section perpendicular to the x-axis is formed in an H shape. Extends in the direction. Therefore, the dimensions of each part of the injection nozzle 12 are the same as the dimensions of each part that determines the outer periphery of the opening 121.

上述した開口部１２１の各部の寸法は、以下に示す各パラメータおよび公式を用いたシミュレーションの結果に基づいて、端部１２１ｄでの混合流体の流速低下を低減するために適した形状となるように決定されている。
（１）噴射ノズル１２内気体：圧縮性、乱流場
（２）噴射ノズル１２先端の速度：１００ｍ／ｓｅｃ〜５００ｍ／ｓｅｃ（最適値３００ｍ／ｓｅｃ）
（３）噴射ノズル１２内の圧力：０．１Ｍｐａ〜１．０Ｍｐａ（最適値は０．５Ｍｐａ）
（４）固体微粒子：Ａｌ２Ｏ３
（５）固体微粒子の平均粒径：６［μｍ］
（６）使用公式：ナビエ・ストークスの式、乱流モデル（標準ｋ−εモデル及び壁面関数）、粒子運動方程式（ラグラジアン関数）、各粒子間抵抗（カンニングハム相関でのストークス抵抗） The dimension of each part of the opening 121 described above is a shape suitable for reducing a decrease in the flow velocity of the mixed fluid at the end 121d based on the result of simulation using the following parameters and formulas. It has been decided.
(1) Gas in the injection nozzle 12: compressibility, turbulent flow field (2) Speed at the tip of the injection nozzle 12: 100 m / sec to 500 m / sec (optimum value 300 m / sec)
(3) Pressure in the injection nozzle 12: 0.1 Mpa to 1.0 Mpa (the optimum value is 0.5 Mpa)
(4) Solid fine particles: Al 2 O 3
(5) Average particle diameter of solid fine particles: 6 [μm]
(6) Formulas used: Navier-Stokes equation, turbulence model (standard k-ε model and wall function), particle motion equation (Lagradian function), interparticle resistance (Stokes resistance at Cunningham correlation)

通常、開口部１２１の端部１２１ｄでは、終端部３００（境界層）の影響により中央部１２１ｃに比べて噴射される混合流体の流速が低下する。特に、図４（ｂ）に示す、従来技術のように、ｙ軸方向に延在する矩形形状を有する開口部５００の端部の終端部５１０では、端部における混合流体の流速低下が顕著になる。これに対して、本実施の形態の噴射加工装置１では、噴射ノズル１２の終端部３００のｚ軸方向の長さが、第１延伸部２００および第２延伸部２０１の間隔よりも長く、かつ、終端部３００が直線状に形成されている。本実施の形態では、終端部３００が上記のように形成されることによって、開口部１２１でのｙ軸方向の境界層領域が狭くなると考えられる。その結果、開口部１２１から噴射される混合流体の流速が一定になるｙ軸方向の長さが長くなる。このため、開口部１２１のｙ軸方向の両端、すなわち開口部１２１を構成する２つの端部１２１ｄでの混合流体の流速低下が低減される。以下、開口部１２１の端部１２１ｄの終端部３００近傍における混合流体の流速について説明する。   Usually, at the end 121d of the opening 121, the flow rate of the mixed fluid to be ejected is lower than that at the center 121c due to the influence of the terminal portion 300 (boundary layer). In particular, as in the prior art shown in FIG. 4B, at the end portion 510 of the end portion of the opening portion 500 having a rectangular shape extending in the y-axis direction, the decrease in the flow velocity of the mixed fluid at the end portion is significant. Become. In contrast, in the injection processing apparatus 1 of the present embodiment, the length in the z-axis direction of the terminal portion 300 of the injection nozzle 12 is longer than the interval between the first extending portion 200 and the second extending portion 201, and The terminal portion 300 is formed in a straight line. In the present embodiment, it is considered that the boundary layer region in the y-axis direction at the opening 121 is narrowed by forming the terminal portion 300 as described above. As a result, the length in the y-axis direction in which the flow velocity of the mixed fluid ejected from the opening 121 is constant is increased. For this reason, a decrease in the flow velocity of the mixed fluid at both ends of the opening 121 in the y-axis direction, that is, at the two ends 121d constituting the opening 121 is reduced. Hereinafter, the flow rate of the mixed fluid in the vicinity of the end portion 300 of the end 121d of the opening 121 will be described.

図５に開口部１２１の端部１２１ｄでの噴射される混合流体の流速と、ｙ軸方向の位置との関係を示す。図５は、上述した開口部１２１の各部の寸法を決定する際に使用したパラメータによるシミュレーションの結果を示している。図５では、縦軸が混合流体の流速、横軸が開口部１２１の中点Ｃを基準としたｙ軸方向の位置を表している。また、図５では、第２構成部３０４および第４構成部３０６のｙ軸方向の長さが０．４ｍｍの場合を実線Ｌ１で示し、ｙ軸方向の長さが０．８ｍｍの場合を破線Ｌ２で示す。さらに、比較例として、開口部に端部１２１ｄが形成されていない場合、すなわち図４（ｂ）に示すｙ軸方向に延在する矩形形状を有する開口部５００（幅広ノズル）の終端部５１０における混合流体の流速と位置との関係を一点鎖線Ｌ３で示す。なお、比較例における開口部５００の形状は、ｚ軸方向に１．６ｍｍの長さを保持した状態でｙ軸方向に２０ｍｍ延在する矩形形状とする。   FIG. 5 shows the relationship between the flow velocity of the mixed fluid ejected at the end 121d of the opening 121 and the position in the y-axis direction. FIG. 5 shows the result of the simulation based on the parameters used when determining the dimensions of each part of the opening 121 described above. In FIG. 5, the vertical axis represents the flow velocity of the mixed fluid, and the horizontal axis represents the position in the y-axis direction with respect to the middle point C of the opening 121. In FIG. 5, the solid line L1 indicates the case where the length of the second component 304 and the fourth component 306 in the y-axis direction is 0.4 mm, and the broken line indicates the case where the length in the y-axis direction is 0.8 mm. This is indicated by L2. Furthermore, as a comparative example, when the end portion 121d is not formed in the opening portion, that is, in the terminal portion 510 of the opening portion 500 (wide nozzle) having a rectangular shape extending in the y-axis direction shown in FIG. The relationship between the flow rate and position of the mixed fluid is indicated by a one-dot chain line L3. The shape of the opening 500 in the comparative example is a rectangular shape extending 20 mm in the y-axis direction while maintaining a length of 1.6 mm in the z-axis direction.

図５の一点鎖線Ｌ３で示すように、比較例における開口部５００では、ｙ座標が０ｍｍ〜９．５ｍｍ付近の範囲では、混合流体はほぼ同一の流速となる。しかし、ｙ座標が９．５ｍｍ付近、すなわち終端部５１０から０．５ｍｍの位置から急激に混合流体の流速が低下する。   As indicated by the one-dot chain line L3 in FIG. 5, in the opening 500 in the comparative example, the mixed fluid has substantially the same flow velocity in the range where the y coordinate is in the vicinity of 0 mm to 9.5 mm. However, the flow velocity of the mixed fluid suddenly decreases from the position where the y coordinate is around 9.5 mm, that is, 0.5 mm from the end portion 510.

本実施の形態のように端部１２１ｄを有する開口部１２１では、図５の実線Ｌ１および破線Ｌ２で示すように、ｙ座標が１０．０ｍｍ付近における流速の低下は、一点鎖線Ｌ３で示す比較例の開口部５００における流速の低下よりも少ない。すなわち、端部１２１ｄから噴射される混合流体の流速が、比較例の開口部５００の終端部５１０付近から噴射される混合流体よりも高速である。換言すると、開口部１２１のｙ軸方向について、中央部１２１ｃから噴射される混合流体とほぼ同一の流速の混合流体が噴射される領域が比較例の開口部５００の場合よりも長くなる。   In the opening 121 having the end portion 121d as in the present embodiment, as indicated by the solid line L1 and the broken line L2 in FIG. 5, the decrease in the flow velocity when the y coordinate is around 10.0 mm is a comparative example indicated by the alternate long and short dash line L3. This is less than the decrease in the flow velocity at the opening 500. That is, the flow velocity of the mixed fluid ejected from the end portion 121d is higher than that of the mixed fluid ejected from the vicinity of the end portion 510 of the opening 500 of the comparative example. In other words, about the y-axis direction of the opening part 121, the area | region where the mixed fluid of the substantially the same flow velocity as the mixed fluid injected from the center part 121c becomes longer than the case of the opening part 500 of a comparative example.

したがって、このような噴射ノズル１２の開口部１２１から固体微粒子を電極基材に噴射させて膜を形成する場合、均一な厚さの膜が形成されるｙ軸方向の長さがより長くなるという第１の現象がある。さらに、端部１２１ｄが形成されて、ｚ軸方向の開口面積が広がったことによって、端部１２１ｄから噴射される固体微粒子の量が増加するという第２の現象がある。この結果、噴射ノズル１２と電極基材とをｚ軸方向に相対的にずらしながら膜を形成する場合を考えると、上記の第１および第２の現象が相乗的に効果を発揮して、均一な厚さの膜が形成されるｙ軸方向の長さがさらに長くなる。   Therefore, when solid fine particles are sprayed onto the electrode substrate from the opening 121 of the spray nozzle 12 to form a film, the length in the y-axis direction in which a film having a uniform thickness is formed is longer. There is a first phenomenon. Furthermore, there is a second phenomenon that the amount of solid fine particles ejected from the end 121d is increased by forming the end 121d and increasing the opening area in the z-axis direction. As a result, considering the case where the film is formed while the spray nozzle 12 and the electrode base material are relatively shifted in the z-axis direction, the first and second phenomena described above synergistically exhibit a uniform effect. The length in the y-axis direction where a film with a sufficient thickness is formed is further increased.

以上で説明した噴射加工装置１を用いることにより、ＰＪＤ（Powder Jet Deposition）により電極基材上に電極材料膜を形成して、たとえばリチウムイオン二次電池等の電池用の負極材料を形成することができる。この場合、電極基材には、集電体を構成する銅（Ｃｕ）が用いられる。   By using the jet machining apparatus 1 described above, an electrode material film is formed on an electrode substrate by PJD (Powder Jet Deposition), and a negative electrode material for a battery such as a lithium ion secondary battery is formed. Can do. In this case, copper (Cu) constituting the current collector is used for the electrode base material.

この電極材料を電池の形態（たとえば円筒形型、角型、セル型、ラミネート型等）に合わせた形状寸法に打ち抜くことによって負極が形成される。アルミ箔にコバルト酸リチウム等のリチウム遷移金属酸化物を正極活物質として付着形成された公知の正極と、上記の負極とをセパレータを挟んで対峙させ、公知の溶媒中に公知の電解液（非水電解質）とともに封入することによって、リチウムイオン二次電池が構成される。なお、公知の溶媒はプロピレンカーボネートやエチレンカーボネート等であり、公知の電解液はＬｉＣｌＯ４やＬｉＰＦ６等である。この結果、高い電気容量と長期間安定的に保持可能なリチウムイオン二次電池が得られる。なお、噴射加工装置１を用いて、リチウムイオン二次電池の負極材料を形成するものに代えて、正極材料を形成するものであってもよい。この場合、電極基材としては、たとえばアルミニウムが用いられる。 A negative electrode is formed by punching out this electrode material into a shape and size that matches the battery type (for example, cylindrical type, square type, cell type, laminate type, etc.). A known positive electrode formed by attaching a lithium transition metal oxide such as lithium cobalt oxide as a positive electrode active material to an aluminum foil and the negative electrode are opposed to each other with a separator interposed therebetween. A lithium ion secondary battery is formed by enclosing it with a water electrolyte. Incidentally, known solvents are propylene carbonate, ethylene carbonate, etc., known electrolytic solution is LiClO 4 or LiPF 6 or the like. As a result, a lithium ion secondary battery that can be stably held for a long period of time with a high electric capacity can be obtained. In addition, it may replace with what forms the negative electrode material of a lithium ion secondary battery using the injection processing apparatus 1, and may form positive electrode material. In this case, for example, aluminum is used as the electrode base material.

以上で説明した実施の形態による噴射加工装置１によれば、以下の作用効果が得られる。
（１）噴射用ノズル１２には、固体微粒子と気体との混合流体を噴射する開口部１２１が設けられている。開口部１２１を決定する外周は、第１延伸部２００と、第２延伸部２０１と、終端部３００と、第１接続部３０１と、第２接続部３０２とを有している。一対の第１延伸部２００および第２延伸部は、所定の間隔（１．６ｍｍ）を維持して長手方向（ｙ軸方向）へ延伸する。終端部３００は、一対の第１延伸部２００および第２延伸部２０１の端部Ｐ１，Ｐ３の近傍に設けられ、長手方向に対して直角方向（ｚ軸方向）に直線をなす。第１接続部３０１は、第１延伸部２００の端部Ｐ１と終端部３００の一方の端部Ｐ２とを接続する。第２接続部３０２は、第２延伸部２０１の端部Ｐ３と終端部３００の他方の端部Ｐ４とを接続する。そして、終端部３００の長さは、第１延伸部２００と第２延伸部２００とがなす間隔である１．６ｍｍよりも長くなるようにした。換言すると、噴射ノズル１２の終端部３００のｚ軸方向の長さが、第１延伸部２００および第２延伸部２０１の間隔よりも長く、かつ、終端部３００が直線状に形成されている。このため、上述したように、開口部１２１でのｙ軸方向の境界層領域が狭くなるので、開口部１２１から噴射される混合流体の流速が一定となるｙ軸方向の長さが長くなり、終端部３００の近傍の混合流体の流速低下が抑制される。 According to the jet machining apparatus 1 according to the embodiment described above, the following functions and effects can be obtained.
(1) The injection nozzle 12 is provided with an opening 121 for injecting a mixed fluid of solid fine particles and gas. The outer periphery that determines the opening 121 includes a first extending part 200, a second extending part 201, a terminal part 300, a first connecting part 301, and a second connecting part 302. A pair of 1st extending | stretching part 200 and a 2nd extending | stretching part are extended | stretched to a longitudinal direction (y-axis direction) maintaining a predetermined space | interval (1.6 mm). The terminal portion 300 is provided in the vicinity of the ends P1 and P3 of the pair of first extending portion 200 and second extending portion 201, and forms a straight line in the direction perpendicular to the longitudinal direction (z-axis direction). The first connection portion 301 connects the end portion P1 of the first extending portion 200 and one end portion P2 of the termination portion 300. The second connection portion 302 connects the end portion P3 of the second extending portion 201 and the other end portion P4 of the termination portion 300. And the length of the termination | terminus part 300 was made longer than 1.6 mm which is the space | interval which the 1st extending | stretching part 200 and the 2nd extending | stretching part 200 make. In other words, the length of the terminal portion 300 of the injection nozzle 12 in the z-axis direction is longer than the interval between the first extending portion 200 and the second extending portion 201, and the terminal portion 300 is formed linearly. For this reason, as described above, since the boundary layer region in the y-axis direction at the opening 121 becomes narrow, the length in the y-axis direction at which the flow rate of the mixed fluid ejected from the opening 121 becomes constant, A decrease in the flow velocity of the mixed fluid in the vicinity of the end portion 300 is suppressed.

特に、本実施の形態では、終端部３００を直線状に形成している。これに対して、たとえば終端部３００がｙ軸＋方向に沿って円弧状に形成されている場合、すなわち端部１２１ｄが図４（ｃ）に示すように円形に形成されている場合、開口部１２１でのｙ軸方向の境界層領域が狭くならないと考えられる。この場合の端部１２１ｄから噴射される混合流体の流速と、ｙ軸方向の位置との関係を、図５の二点鎖線で示す直線Ｌ４で表す。なお、直線Ｌ４についても、上述した開口部１２１の各部の寸法を決定する際に使用したパラメータによるシミュレーションの結果を示している。図５の二点鎖線Ｌ４では、ｙ座標が７．５ｍｍ付近から混合流体の流速が低下する。換言すると、終端部３００が直線状に形成されている場合と比べて、開口部１２１から噴射される混合流体の流速が一定となるｙ軸方向の長さが短くなる。本実施の形態では、終端部３００を直線状に形成しているので、終端部３００を直線以外の形状とする場合と比べて、開口部１２１から噴射される混合流体の流速が一定となるｙ軸方向の長さを長くして、終端部３００の近傍の混合流体の流速低下を抑制できる。   In particular, in the present embodiment, the end portion 300 is formed in a straight line. On the other hand, for example, when the terminal portion 300 is formed in an arc shape along the y-axis + direction, that is, when the end portion 121d is formed in a circular shape as shown in FIG. It is considered that the boundary layer region in the y-axis direction at 121 does not become narrower. In this case, the relationship between the flow velocity of the mixed fluid ejected from the end 121d and the position in the y-axis direction is represented by a straight line L4 indicated by a two-dot chain line in FIG. The straight line L4 also shows the result of the simulation based on the parameters used when determining the dimensions of each part of the opening 121 described above. In the two-dot chain line L4 in FIG. 5, the flow velocity of the mixed fluid decreases when the y coordinate is around 7.5 mm. In other words, the length in the y-axis direction at which the flow velocity of the mixed fluid ejected from the opening 121 is constant is shorter than in the case where the end portion 300 is formed in a straight line. In the present embodiment, since the end portion 300 is formed in a straight line shape, the flow velocity of the mixed fluid ejected from the opening 121 is constant compared to the case where the end portion 300 has a shape other than a straight line. By reducing the axial length, it is possible to suppress a decrease in the flow rate of the mixed fluid in the vicinity of the terminal portion 300.

さらに、終端部３００のｚ軸方向の長さが、第１延伸部２００および第２延伸部２０１の間隔よりも長くなるようにした。すなわち、上述したように、端部１２１ｄが形成されて、ｚ軸方向の開口面積が広がっているので、端部１２１ｄから噴射される固体微粒子の量が増加する。この結果、噴射ノズル１２と電極基板とをｚ軸方向に相対移動させた場合、端部１２１ｄから噴射される固体微粒子の増加と、上述した混合流体の流速低下の抑制との相乗効果によって、均一な厚さの膜が形成されるｙ軸方向の長さがさらに長くなる。   Further, the length of the terminal portion 300 in the z-axis direction is made longer than the distance between the first extending portion 200 and the second extending portion 201. That is, as described above, since the end portion 121d is formed and the opening area in the z-axis direction is increased, the amount of solid fine particles ejected from the end portion 121d increases. As a result, when the ejection nozzle 12 and the electrode substrate are relatively moved in the z-axis direction, the uniform effect is obtained by the synergistic effect of the increase in the solid fine particles ejected from the end portion 121d and the above-described suppression of the decrease in the flow velocity of the mixed fluid. The length in the y-axis direction where a film with a sufficient thickness is formed is further increased.

さらに詳細には、第１接続部３０１は、第１延伸部２００の一方の端部Ｐ１と接続され、終端部３００と１．６ｍｍよりも短い間隔を維持して直線状をなす第１構成部３０３と、第１構成部３０３と終端部３００の一方の端部Ｐ２と接続する第２構成部３０４とによって構成される。第２接続部３０２は、第２延伸部の一方の端部Ｐ３と接続され、終端部３００と１．６ｍｍよりも短い間隔を維持して直線状をなす第３構成部３０５と、第３構成部３０５と終端部３００の他方の端部Ｐ４とを接続する第４構成部３０６とによって構成される。第１延伸部２００および第２延伸部２０１の他方（ｙ軸−側）の端部についても、上記と同様の外周を有する。そして、終端部３００は、開口部１２１の長手方向の中心線（ｙ軸）からｚ軸方向に沿って逆方向に等分される。   More specifically, the first connecting portion 301 is connected to one end P1 of the first extending portion 200, and is a first constituent portion that forms a straight line with a distance shorter than 1.6 mm from the end portion 300. 303, the first component 303 and the second component 304 connected to one end P <b> 2 of the terminal unit 300. The second connecting portion 302 is connected to one end portion P3 of the second extending portion, and has a third configuration portion 305 that forms a straight line while maintaining an interval shorter than 1.6 mm from the end portion 300, and a third configuration. The fourth component 306 connects the unit 305 and the other end P4 of the terminal unit 300. The other ends (y-axis-side) of the first extending portion 200 and the second extending portion 201 also have the same outer periphery as described above. The terminal portion 300 is equally divided in the reverse direction along the z-axis direction from the longitudinal center line (y-axis) of the opening 121.

開口部１２１を決定する外周は上記の各部を有するので、上述したように、終端部３００付近から噴射される固体微粒子と気体との混合流体の流速低下が防止されるとともに、端部１２１ｄから噴射される固体微粒子の量が増加する。このため、開口部１２１のｙ軸方向の長さ（２０ｍｍ）に対して、膜厚が均一となるｙ軸方向の長さを増加させることができる。換言すると、ｙ軸方向に所定の長さだけ均一な膜厚を得ようとする場合、上述した比較例に示す開口部５００と比べて、本実施の形態の開口部１２１ではｙ軸方向の長さを短くすることができるので、開口部１２１の小型化に寄与する。その結果、噴射加工装置１全体を小型化することができる。   Since the outer periphery that determines the opening 121 has the above-described portions, as described above, the flow velocity of the mixed fluid of the solid fine particles and the gas injected from the vicinity of the terminal portion 300 is prevented from being lowered, and the liquid is injected from the end portion 121d. The amount of solid particulates increases. For this reason, the length in the y-axis direction where the film thickness is uniform can be increased with respect to the length (20 mm) of the opening 121 in the y-axis direction. In other words, when trying to obtain a uniform film thickness by a predetermined length in the y-axis direction, the opening 121 of this embodiment has a longer length in the y-axis than the opening 500 shown in the comparative example. Since the length can be shortened, it contributes to downsizing of the opening 121. As a result, the entire jet machining apparatus 1 can be reduced in size.

さらに、ｙ軸方向に幅の広い電極基材に対して成膜加工を行う場合、電極基材全体について均一な膜厚を得るために、均一な膜厚のｙ軸方向の長さに応じて重ね合わせ部分を設けて成膜加工を行う必要がある。すなわち、均一な膜厚が得られていない領域に、再び開口部１２１から噴射された固体微粒子を付着させて均一な膜厚となるようにする必要がある。比較例に示すような開口部５００を有する場合、均一な膜厚のy軸方向の長さが短いので、開口部のｙ軸方向の長さの約５〜１０パーセントを重ね合わせ部としていた。これに対して、本実施の形態では、均一な膜厚のｙ軸方向の長さが増加するので、重ね合わせ部分が少なくなり、成膜加工の効率を向上させることができる。   Furthermore, when performing film forming on an electrode base material having a wide width in the y-axis direction, in order to obtain a uniform film thickness for the entire electrode base material, according to the length of the uniform film thickness in the y-axis direction. It is necessary to perform film formation processing by providing an overlapping portion. That is, it is necessary to attach the solid fine particles ejected from the opening 121 again to a region where a uniform film thickness is not obtained so as to obtain a uniform film thickness. In the case of having the opening 500 as shown in the comparative example, since the length in the y-axis direction with a uniform film thickness is short, about 5 to 10 percent of the length in the y-axis direction of the opening was used as the overlapping portion. On the other hand, in the present embodiment, since the length of the uniform film thickness in the y-axis direction is increased, the overlapping portion is reduced, and the efficiency of the film forming process can be improved.

（２）さらに加えて、第１構成部３０３および第３構成部３０５と終端部３００との間隔（０．４〜０．８ｍｍ）を、第１延伸部２００と第２延伸部２００との間隔（１．６ｍｍ）よりも短くして、終端部３００の近傍で過大な流量とならないようにした。したがって、中央部１２１ｃから噴射される混合流体の流速低下が防止される。その結果、中央部１２１ｃから噴射される混合流体とほぼ同一の流速を有する混合流体が中央部１２１ｃと端部１２１ｄの境界付近から噴射されることになり、均一な膜厚のｙ軸方向の長さの増加に寄与する。 (2) In addition, the interval (0.4 to 0.8 mm) between the first component 303 and the third component 305 and the terminal portion 300 is set to the interval between the first extending portion 200 and the second extending portion 200. It was made shorter than (1.6 mm) so that an excessive flow rate would not be generated in the vicinity of the terminal portion 300. Accordingly, a decrease in the flow velocity of the mixed fluid ejected from the central portion 121c is prevented. As a result, a mixed fluid having substantially the same flow velocity as the mixed fluid ejected from the central portion 121c is ejected from the vicinity of the boundary between the central portion 121c and the end portion 121d. This contributes to an increase in depth.

以上で説明した実施の形態による噴射加工装置１を、以下のように変形できる。
（１）開口部１２１の形状がＨ型状に形成されるものに代えて、種々の形状に形成することが可能である。この場合、終端部３００の長さが第１延伸部２００と第２延伸部２０１との間隔よりも長く、かつ、終端部３００が直線状に形成されていればよい。図６、図７に開口部１２１の形状の各種の変形例を示す。 The jet machining apparatus 1 according to the embodiment described above can be modified as follows.
(1) The opening 121 can be formed in various shapes instead of being formed in an H shape. In this case, it is only necessary that the length of the terminal portion 300 is longer than the interval between the first extending portion 200 and the second extending portion 201 and the terminal portion 300 is formed in a linear shape. 6 and 7 show various modifications of the shape of the opening 121. FIG.

（１−１）図６（ａ）に開口部１２１の形状の第１変形例を示す。第１変形例では、開口部１２１は第１延伸部２００および第２延伸部２０１の一方の端部Ｐ１、Ｐ３の近傍にのみ形成される。この場合、端部１２１ｄが形成されていない、第１延伸部２００および第２延伸部２０１の他方（ｙ軸−側）の端部では噴射される混合流体の流速低下が顕著となるが、端部１２１ｄの終端部３００(境界層)では実施の形態の場合と同様に、混合流体の流速低下が抑制される。 (1-1) A first modification of the shape of the opening 121 is shown in FIG. In the first modification, the opening 121 is formed only in the vicinity of one end P1, P3 of the first extending portion 200 and the second extending portion 201. In this case, although the end portion 121d is not formed, a decrease in the flow velocity of the injected mixed fluid becomes significant at the other end portion (the y-axis-side) of the first extending portion 200 and the second extending portion 201. In the terminal part 300 (boundary layer) of the part 121d, a decrease in the flow rate of the mixed fluid is suppressed as in the case of the embodiment.

（１−２）図６（ｂ）に開口部１２１の形状の第２変形例を示す。第２変形例では、端部１２１ｄはｚ軸＋方向にのみ設けられ、ｚ軸−方向には設けられていない。すなわち、第２接続部３０２は、第２延伸部２０１の一方の端部と接続され、ｙ軸方向に延在して終端部３００の他方の端部と接続される。すなわち、第２延伸部２０１と第２接続部３０２とがｙ軸方向に沿って同一の直線状に形成される。なお、一方の端部１２１ｄはｚ軸＋方向にのみ設けられ、他方の端部１２１ｄがｚ軸−方向にのみ設けられるものであってもよい。第２変形例に示す場合であっても、端部１２１ｄから噴射される固体微粒子の量は増加するので、均一な膜厚のｙ軸方向の長さを増加させることができる。 (1-2) FIG. 6B shows a second modification of the shape of the opening 121. In the second modification, the end 121d is provided only in the z-axis + direction and is not provided in the z-axis-direction. That is, the second connection portion 302 is connected to one end portion of the second extending portion 201, extends in the y-axis direction, and is connected to the other end portion of the termination portion 300. That is, the second extending portion 201 and the second connecting portion 302 are formed in the same linear shape along the y-axis direction. One end 121d may be provided only in the z-axis + direction, and the other end 121d may be provided only in the z-axis-direction. Even in the case of the second modification, the amount of the solid fine particles ejected from the end 121d increases, so that the length of the uniform film thickness in the y-axis direction can be increased.

（１−３）図６（ｃ）に開口部１２１の形状の第３変形例を示す。第３変形例では、終端部３００のｚ軸方向の長さが、開口部１２１の中点Ｃを通るｙ軸を中心線として、ｚ軸＋方向と−方向とで異なる長さを有する。この場合であっても、端部１２１ｄの終端部３００では実施の形態の場合と同様に、混合流体の流速低下が抑制される。 (1-3) FIG. 6C shows a third modification of the shape of the opening 121. In the third modification, the length of the terminal portion 300 in the z-axis direction has different lengths in the z-axis + direction and the − direction, with the y-axis passing through the midpoint C of the opening 121 as the center line. Even in this case, in the terminal portion 300 of the end portion 121d, a decrease in the flow rate of the mixed fluid is suppressed as in the case of the embodiment.

（１−４）図６（ｄ）に開口部１２１の形状の第４変形例を示す。第４変形例では、第１接続部３０１を構成する第１構成部３０３と第２構成部３０４とは、同一の直線状に形成され、第１構成部３０３と終端部３００とが平行となるように形成されていない。また、第２接続部３０２を構成する第３構成部３０５と第４構成部３０６とは、同一の直線状に形成され、第１構成部３０３と終端部３００とが平行となるように形成されていない。図６（ｄ）では、第１接続部３０１および終端部３００のｙ軸方向の間隔と、第２接続部３０２および終端部３００のｙ軸方向の間隔とが、ｚ軸上の位置が大きくなる程短くなるように形成されている。第４変形例に示す場合であっても、端部１２１ｄから噴射される固体微粒子の量が増加するので、均一な膜厚のｙ軸方向の長さを増加させることができる。さらには、図７（ａ）に示すように第１構成部３０３および第２構成部３０４からなる第１接続部３０１と、第３構成部３０５および第４構成部３０６からなる第２接続部３０２とが直線状に形成されたものではなく、ｙｚ平面上で曲線となるように形成されていてもよい。 (1-4) FIG. 6D shows a fourth modification of the shape of the opening 121. In the fourth modified example, the first component 303 and the second component 304 constituting the first connection portion 301 are formed in the same straight line, and the first component 303 and the terminal portion 300 are parallel to each other. Is not formed. In addition, the third component 305 and the fourth component 306 constituting the second connection unit 302 are formed in the same straight line, and the first component 303 and the terminal unit 300 are formed in parallel. Not. In FIG. 6 (d), the position in the y-axis direction between the first connecting part 301 and the terminal part 300 and the distance in the y-axis direction between the second connecting part 302 and the terminal part 300 increase the position on the z-axis. It is formed to be as short as possible. Even in the case of the fourth modification, the amount of the solid fine particles ejected from the end 121d increases, so that the length of the uniform film thickness in the y-axis direction can be increased. Further, as shown in FIG. 7A, the first connection unit 301 composed of the first configuration unit 303 and the second configuration unit 304 and the second connection unit 302 composed of the third configuration unit 305 and the fourth configuration unit 306. Are not formed in a straight line, but may be formed in a curve on the yz plane.

（１−５）図７（ｂ）に開口部１２１の形状の第５変形例を示す。第５変形例では、第１接続部３０１を構成する第１構成部３０３が曲線となるように形成され、第２構成部３０４は直線状に形成される。また、第２接続部３０２を構成する第３構成部３０５が曲線となるように形成され、第４構成部３０６は直線状に形成される。第５変形例に示す場合であっても、端部１２１ｄから噴射される固体微粒子の量が増加するので、均一な膜厚のｙ軸方向の長さを増加させることができる。なお、第１構成部３０１のうち、第１延伸部２００の端部Ｐ１との接続部位近傍については曲線をなし、第２構成部３０２との接続部位近傍については、終端部３００と平行は直線状をなすものでもよい。 (1-5) FIG. 7B shows a fifth modification of the shape of the opening 121. In the fifth modification, the first component 303 constituting the first connecting portion 301 is formed to be a curve, and the second component 304 is formed in a straight line. Further, the third component 305 constituting the second connection unit 302 is formed to be a curve, and the fourth component 306 is formed in a straight line shape. Even in the case of the fifth modification, the amount of the solid fine particles ejected from the end 121d increases, so that the length of the uniform film thickness in the y-axis direction can be increased. Of the first component 301, the vicinity of the connection part with the end P1 of the first extending part 200 is curved, and the vicinity of the connection part with the second component 302 is a straight line parallel to the terminal part 300. It may be a shape.

（１−６）図７（ｃ）に開口部１２１の形状の第６変形例を示す。第６変形例では、終端部３００が、第１延伸部２００および第２延伸部２０１が延在する方向に対して直角に形成されていない。すなわち第１延伸部２００および第２延伸部２０１がｙ軸方向に沿って延在していない。この場合であっても、端部１２１ｄから噴射される固体微粒子の量が増加するので、均一な膜厚のｙ軸方向の長さを増加させることができる。また、図示はしないが、第１延伸部２００および第２延伸部２０１が直線状に形成されたものでなくてもよい。たとえば、第１延伸部２００および第２延伸部２０１が１．６ｍｍの間隔を維持した状態で、ｙｚ平面上で湾曲した形状を有していてもよい。
（１−７）開口部１２１の形状として、上記の第１〜第６変形例を適宜組み合わせた形状となるように形成されてもよい。 (1-6) FIG. 7C shows a sixth modification of the shape of the opening 121. In the sixth modification, the terminal portion 300 is not formed at a right angle to the direction in which the first extending portion 200 and the second extending portion 201 extend. That is, the first extending portion 200 and the second extending portion 201 do not extend along the y-axis direction. Even in this case, since the amount of the solid fine particles ejected from the end 121d increases, the length of the uniform film thickness in the y-axis direction can be increased. Moreover, although not shown in figure, the 1st extending | stretching part 200 and the 2nd extending | stretching part 201 do not need to be formed in linear form. For example, the 1st extending | stretching part 200 and the 2nd extending | stretching part 201 may have the shape curved on the yz plane in the state which maintained the space | interval of 1.6 mm.
(1-7) The shape of the opening 121 may be formed so as to have a shape appropriately combined with the first to sixth modifications.

（２）開口部１２１の各部の寸法は実施の形態のものに限定されるものではない。各部の寸法は、固体微粒子の材質・粒径に応じて、端部１２１ｄから噴射される混合流体の流速が中央部１２１ｃから噴射される混合流体の流速をほぼ同一となるように決定されればよい。 (2) The dimensions of each part of the opening 121 are not limited to those of the embodiment. If the dimensions of each part are determined so that the flow velocity of the mixed fluid ejected from the end portion 121d is substantially the same as the flow velocity of the mixed fluid ejected from the central portion 121c according to the material and particle size of the solid fine particles. Good.

（３）噴射加工装置１から電極基材に固体微粒子を噴射して電極材料の膜を形成させるものに限定されない。たとえば、基材の被加工面に噴射した固体微粒子によって電気配線層を形成するものでもよい。 (3) It is not limited to what forms the film | membrane of an electrode material by injecting a solid fine particle from the injection processing apparatus 1 to an electrode base material. For example, the electrical wiring layer may be formed of solid fine particles sprayed on the work surface of the substrate.

また、本発明の特徴を損なわない限り、本発明は上記実施の形態に限定されるものではなく、本発明の技術的思想の範囲内で考えられるその他の形態についても、本発明の範囲内に含まれる。説明に用いた実施の形態および変形例は、それぞれを適宜組み合わせて構成しても構わない。   In addition, the present invention is not limited to the above-described embodiment as long as the characteristics of the present invention are not impaired, and other forms conceivable within the scope of the technical idea of the present invention are also within the scope of the present invention. included. The embodiments and modifications used for the description may be configured by appropriately combining them.

１ 噴射加工装置、 １０ ノズルユニット、
１２ 噴射ノズル、 １４、１４ａ、１４ｂ 加速ガス導入路、
１５ 微粒子供給路、 １２１ 開口部、
１２１ｃ 中央部、 １２１ｄ 端部、
２００ 第１延伸部、 ２０１ 第２延伸部、
３００ 終端部、 ３０１ 第１接続部、
３０２ 第２接続部、 ３０３ 第１構成部、
３０４ 第２構成部、 ３０５ 第３構成部、
３０６ 第４構成部 1 injection processing device, 10 nozzle unit,
12 injection nozzles, 14, 14a, 14b acceleration gas introduction path,
15 fine particle supply path, 121 opening,
121c center part, 121d end part,
200 first stretching section, 201 second stretching section,
300 terminal part, 301 first connection part,
302 second connection section, 303 first configuration section,
304 second component, 305 third component,
306 Fourth component

Claims (18)

粒子と気体との混合流体を噴射する開口部が設けられた噴射用ノズルであって、
前記開口部を決定する外周は、
第１の間隔を維持して長手方向へ延伸する一対の延伸部と、
前記一対の延伸部の端部の近傍に設けられ、前記長手方向に対して所定角度方向に直線をなす終端部と、
一方の前記延伸部の端部と前記終端部の一方の端部とを接続する第１接続部と、他方の前記延伸部の端部と前記終端部の他方の端部とを接続する第２接続部と、を有し、
前記終端部のうち少なくとも一方の長さは、前記第１の間隔よりも長いことを特徴とする噴射用ノズル。 An injection nozzle provided with an opening for injecting a mixed fluid of particles and gas,
The outer periphery that determines the opening is:
A pair of extending portions extending in the longitudinal direction while maintaining the first interval;
A terminal portion that is provided in the vicinity of the end portions of the pair of extending portions and forms a straight line in a predetermined angular direction with respect to the longitudinal direction;
A first connecting portion connecting an end of one of the extending portions and one end of the terminating portion, and a second connecting the end of the other extending portion and the other end of the terminating portion. A connecting portion,
The length of at least one of the said termination | terminus parts is longer than the said 1st space | interval, The nozzle for injection characterized by the above-mentioned. 請求項１に記載の噴射用ノズルにおいて、
前記一対の延伸部は、前記長手方向に直線状に延伸することを特徴とする噴射用ノズル。 The injection nozzle according to claim 1,
The pair of extending portions extend in a straight line in the longitudinal direction, and the jet nozzle. 請求項１または２に記載の噴射用ノズルにおいて、
前記終端部は、前記開口部の前記長手方向の中心線から前記所定角度方向に沿って逆方向に等分されることを特徴とする噴射用ノズル。 In the nozzle for injection according to claim 1 or 2,
The nozzle for injection is characterized in that the terminal portion is equally divided in the opposite direction along the predetermined angle direction from the center line in the longitudinal direction of the opening. 請求項１乃至３のいずれか一項に記載の噴射用ノズルにおいて、
前記所定角度は、前記長手方向に対して直角であることを特徴とする噴射用ノズル。 In the injection nozzle according to any one of claims 1 to 3,
The nozzle for injection according to claim 1, wherein the predetermined angle is perpendicular to the longitudinal direction. 請求項１乃至４のいずれか一項に記載の噴射用ノズルにおいて、
前記第１接続部は、第１構成部および第２構成部によって構成され、
前記第１構成部は、前記一方の延伸部の端部と接続され、前記所定角度方向に延在し、
前記第２構成部は、前記第１構成部と前記終端部の前記一方の端部とを接続し、
前記終端部と前記第１構成部とは第２の間隔を有することを特徴とする噴射用ノズル。 In the nozzle for injection according to any one of claims 1 to 4,
The first connecting part is constituted by a first constituent part and a second constituent part,
The first component is connected to an end of the one extending portion and extends in the predetermined angular direction.
The second component connects the first component and the one end of the terminal end,
The nozzle for injection, wherein the terminal portion and the first component portion have a second interval. 請求項５に記載の噴射用ノズルにおいて、
前記第２接続部は、第３構成部および第４構成部によって構成され、
前記第３構成部は前記他方の延伸部の端部と接続され、前記所定角度方向に延在し、
前記第４構成部は、前記第３構成部と前記終端部の前記他方の端部とを接続し、
前記終端部と前記第３構成部とは前記第２の間隔を有することを特徴とする噴射用ノズル。 The injection nozzle according to claim 5,
The second connecting part is constituted by a third constituent part and a fourth constituent part,
The third component is connected to an end of the other extending portion, extends in the predetermined angle direction,
The fourth component connects the third component and the other end of the terminal portion,
The nozzle for injection, wherein the terminal portion and the third component portion have the second interval. 請求項６に記載の噴射用ノズルにおいて、
前記第１構成部および前記第３構成部は、前記所定角度方向に平行に直線状をなすことを特徴とする噴射用ノズル。 The injection nozzle according to claim 6,
The jet nozzle, wherein the first component and the third component are linearly parallel to the predetermined angle direction. 請求項１乃至７のいずれか一項に記載の噴射用ノズルにおいて、
前記一対の延伸部の２つの端部近傍に設けられた前記終端部の長さは、いずれも前記第１の間隔よりも長いことを特徴とする噴射用ノズル。 In the nozzle for injection according to any one of claims 1 to 7,
The length of the termination | terminus part provided in the vicinity of the two end parts of the pair of extending parts is longer than the first interval. 請求項５乃至６のいずれか一項に記載の噴射用ノズルにおいて、
前記第２の間隔は、前記第１の間隔よりも短いことを特徴とする噴射用ノズル。 In the nozzle for injection according to any one of claims 5 to 6,
The injection nozzle, wherein the second interval is shorter than the first interval. 請求項９に記載の噴射用ノズルにおいて、
前記第２の間隔は、０．４ｍｍ〜０．８ｍｍであることを特徴とする噴射用ノズル。 The injection nozzle according to claim 9,
The nozzle for injection, wherein the second interval is 0.4 mm to 0.8 mm. 請求項１乃至１０のいずれか一項に記載の噴射用ノズルにおいて、
前記第１の間隔は、２ｍｍ以下であることを特徴とする噴射用ノズル。 In the nozzle for injection according to any one of claims 1 to 10,
The nozzle for injection, wherein the first interval is 2 mm or less. 請求項１乃至１１のいずれか一項に記載の噴射用ノズルにおいて、
前記終端部の長さは、前記第１の間隔よりも２ｍｍ以上長いことを特徴とする噴射用ノズル。 In the nozzle for injection according to any one of claims 1 to 11,
The length of the said termination | terminus part is 2 mm or more longer than the said 1st space | interval, The nozzle for injection characterized by the above-mentioned. 粒子と気体との混合流体を噴射する開口部が設けられた噴射用ノズルであって、
前記開口部を決定する外周は、
第１の間隔を維持して長手方向へ直線状に延伸する一対の延伸部と、
前記一対の延伸部の一方の端部の近傍に設けられ、前記長手方向に対して直角に直線状をなす第１終端部と、
一方の前記延伸部の前記一方の端部と接続され、前記第１終端部と前記第１の間隔よりも短い第２の間隔を維持して直線状をなす第１構成部と、前記第１構成部と前記第１終端部の一方の端部と接続する第２構成部とによって構成される第１接続部と、
他方の前記延伸部の前記一方の端部と接続され、前記第１終端部と前記第２の間隔を維持して直線状をなす第３構成部と、前記第３構成部と前記第１終端部の他方の端部とを接続する第４構成部とによって構成される第２接続部と、
前記一対の延伸部の前記他方の端部の近傍に設けられ、前記長手方向に対して直角に直線状をなす第２終端部と、
前記一方の延伸部の前記他方の端部と接続され、前記第２終端部と前記第２の間隔を維持して直線状をなす第５構成部と、前記第５構成部と前記第２終端部の一方の端部とを接続する第６構成部とによって構成される第３接続部と、
前記他方の延伸部の前記他方の端部と接続され、前記第２終端部と前記第２の間隔を維持して直線状をなす第７構成部と、前記第７構成部と前記第２終端部の他方の端部とを接続する第８構成部とによって構成される第４接続部と、を有し、
前記第１終端部および前記第２終端部の長さは前記第１の間隔よりも長く、前記開口部の前記長手方向の中心線から前記所定角度方向に沿って逆方向に等分されることを特徴とする噴射用ノズル。 An injection nozzle provided with an opening for injecting a mixed fluid of particles and gas,
The outer periphery that determines the opening is:
A pair of extending portions extending linearly in the longitudinal direction while maintaining the first interval;
A first terminal portion provided in the vicinity of one end of the pair of extending portions and linearly formed at right angles to the longitudinal direction;
A first component connected to the one end of one of the extending portions and maintaining a second interval shorter than the first end portion and the first interval; A first connecting part constituted by a constituent part and a second constituent part connected to one end of the first terminal part;
A third component which is connected to the one end of the other extension portion and forms a straight line while maintaining the second distance from the first terminal, and the third component and the first terminal A second connecting portion configured by a fourth component that connects the other end of the portion;
A second terminal portion provided in the vicinity of the other end portion of the pair of extending portions, and having a linear shape perpendicular to the longitudinal direction;
A fifth component which is connected to the other end of the one extending portion and maintains a straight line with the second end portion, and the fifth component and the second end A third connecting part constituted by a sixth constituent part for connecting one end of the part;
A seventh component that is connected to the other end of the other extending portion and is linear with the second termination, maintaining the second distance; and the seventh component and the second termination And a fourth connecting part configured by an eighth constituent part that connects the other end of the part,
The lengths of the first terminal end and the second terminal end are longer than the first interval, and are equally divided in the opposite direction along the predetermined angular direction from the longitudinal center line of the opening. Nozzle for injection characterized by. 請求項１乃至１３のいずれか一項に記載の噴射用ノズルと、
粒子収容部に収容された前記粒子を前記噴射用ノズルへ導入する第１導入部と、
前記噴射部に導入された前記微粒子を加速するための加速用気体を、前記噴射用ノズルに導く第２導入部と、を備えることを特徴とする噴射加工装置。 A nozzle for injection according to any one of claims 1 to 13,
A first introduction part for introducing the particles contained in the particle accommodation part into the ejection nozzle;
An injection processing apparatus comprising: a second introduction unit that guides an acceleration gas for accelerating the fine particles introduced into the injection unit to the injection nozzle. 請求項１４に記載の噴射加工装置が有する前記開口部から前記粒子と前記気体との混合流体を噴射し、
前記開口部に対向して配置した基材に前記粒子を衝突させて、前記基材の被加工面に前記粒子を付着させることを特徴とする噴射加工装置による噴射加工方法。 A mixed fluid of the particles and the gas is injected from the opening of the injection processing device according to claim 14,
An injection processing method using an injection processing apparatus, wherein the particles collide with a base material arranged to face the opening, and the particles are attached to a processing surface of the base material. 請求項１５に記載の噴射加工装置による噴射加工方法において、
前記開口部と前記基材とを、前記開口部の長手方向に対する前記所定角度の方向に沿って相対的に移動させることを特徴とする噴射加工装置による噴射加工方法。 In the injection processing method by the injection processing apparatus according to claim 15,
An injection processing method using an injection processing apparatus, wherein the opening and the base material are relatively moved along a direction of the predetermined angle with respect to a longitudinal direction of the opening. 請求項１５または１６に記載の噴射加工装置による噴射加工方法によって、前記基材として設けられた電極基材に前記粒子を付着させて電極材料の膜を形成することを特徴とする電池材料の製造方法。   A battery material manufacturing method comprising: forming an electrode material film by adhering the particles to an electrode base material provided as the base material by an injection processing method using an injection processing apparatus according to claim 15 or 16. Method. 請求項１７に記載の電池材料の製造方法により製造された前記電極材料の膜を電極として有することを特徴とする二次電池。   A secondary battery comprising, as an electrode, a film of the electrode material manufactured by the method for manufacturing a battery material according to claim 17.
JP2011267204A 2011-12-06 2011-12-06 Spraying nozzle, spray processing device, spray processing method by spray processing device, method of manufacturing battery material, and secondary battery Pending JP2013119130A (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008110293A (en) * 2006-10-30 2008-05-15 Ntn Corp Aerosol discharge nozzle and filming device
JP2011204499A (en) * 2010-03-26 2011-10-13 Nikon Corp Anode for lithium ion secondary battery and lithium ion secondary battery

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008110293A (en) * 2006-10-30 2008-05-15 Ntn Corp Aerosol discharge nozzle and filming device
JP2011204499A (en) * 2010-03-26 2011-10-13 Nikon Corp Anode for lithium ion secondary battery and lithium ion secondary battery

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