JP2013115618A - Manufacturing method of speaker diaphragm and speaker diaphragm manufactured by the manufacturing method - Google Patents

Manufacturing method of speaker diaphragm and speaker diaphragm manufactured by the manufacturing method Download PDF

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JP2013115618A
JP2013115618A JP2011260149A JP2011260149A JP2013115618A JP 2013115618 A JP2013115618 A JP 2013115618A JP 2011260149 A JP2011260149 A JP 2011260149A JP 2011260149 A JP2011260149 A JP 2011260149A JP 2013115618 A JP2013115618 A JP 2013115618A
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speaker diaphragm
diaphragm
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JP5907553B2 (en
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Takashi Mikuniya
貴 三国谷
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Foster Electric Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a speaker diaphragm with which an edge formed from a soft material can be stabilized with respect to chemicals while suppressing a change in acoustic characteristics, and a speaker diaphragm which is manufactured by the manufacturing method.SOLUTION: On a surface of an edge 12 formed from a soft material in a speaker diaphragm 10, a coating 13 of an inorganic compound is formed according to chemical vapor deposition. The coating of the inorganic compound, which does not affect chemicals, is formed on the surface of the edge, thereby stabilizing the edge with respect to the chemicals while suppressing a change in product characteristics. Furthermore, since the coating is formed according to chemical vapor deposition, processing can be performed without any product characteristic change such as dissolution, swelling or deformation.

Description

本発明は、音響機器の一種であるヘッドホンやマイクロホンなどの電気音響変換器に用いられるスピーカ用振動板の製造方法、及びその製造方法によって作製されたスピーカ用振動板に関する。   The present invention relates to a method for manufacturing a speaker diaphragm used in an electroacoustic transducer such as a headphone or a microphone, which is a kind of acoustic equipment, and a speaker diaphragm manufactured by the manufacturing method.

ヘッドホンやイヤホンは、日常生活において化粧品、整髪料、医薬品や飲料水・ソース・油などの食料品類、洗剤などの様々な(広義の)化学薬品が付着する可能性があり、スピーカ用振動板材料の溶解、膨潤などの異常による音響特性の変化が発生する虞がある。このため、スピーカ用振動板に用いられる材料は、たとえこれらの化学薬品類が付着しても製品の特性が変化せずに安定であることが要求される。   Headphones and earphones may adhere to various chemicals (in a broad sense) such as cosmetics, hairdressing products, food products such as pharmaceuticals, drinking water, sauces and oils, and detergents in daily life. There is a risk that changes in acoustic characteristics may occur due to abnormalities such as dissolution and swelling. For this reason, the material used for the speaker diaphragm is required to be stable without changing the product characteristics even if these chemicals adhere.

しかし、これらの化学薬品類に対して安定な材料は限られており、安定な材料で形成しても製品特性が満足されるとは限らない。すなわち、スピーカ用振動板には分割振動や共鳴による固有振動を少なくして変換効率が良いことが求められ、高ヤング率で内部損失が大きく、かつ軽量な素材である必要がある。このような種々の要求を十分に満足する材料はほとんどないため、通常は製品特性を満足する材料に対して、化学薬品類に接触しても影響を受けないようにする表面処理が施されている。   However, materials that are stable with respect to these chemicals are limited, and even if formed with a stable material, product characteristics are not always satisfied. That is, the speaker diaphragm is required to have good conversion efficiency by reducing the natural vibration due to the divided vibration and resonance, and is required to be a light material having a high Young's modulus and a large internal loss. Since there are few materials that sufficiently satisfy these various requirements, surface treatment is usually applied to materials that satisfy product characteristics so that they are not affected by contact with chemicals. Yes.

例えば特許文献1には、振動板材料に対して物性向上の目的で表面処理することが開示されている。この特許文献1の技術では、基材に天然絹繊維を用い、表面に化学的蒸着法により金属層を設け、熱架橋型樹脂のコーティングを施している。これにより、基材の内部損失が高く、また剛性を高めることができるため歪みが少なくなり、耐熱性や耐候性を向上することができる。   For example, Patent Document 1 discloses that surface treatment is performed on a diaphragm material for the purpose of improving physical properties. In the technique of Patent Document 1, natural silk fibers are used as a base material, a metal layer is provided on the surface by a chemical vapor deposition method, and coating with a heat-crosslinking resin is performed. Thereby, since the internal loss of a base material is high and rigidity can be improved, distortion is reduced and heat resistance and weather resistance can be improved.

特開平5−183982号公報Japanese Patent Laid-Open No. 5-183982

上記特許文献1の技術は、スピーカ用振動板の表面に熱架橋型樹脂をコーティングするため、化学薬品類の接触に対して安定化させる効果も得られることが推測できる。しかしながら、剛体材料の物性向上が本来の目的であり、剛性を有する振動板胴体部には有効であるが、エッジ部を柔軟材料で形成した場合には剛性が上がることで最低共振周波数が高くなってしまう。   Since the technique of Patent Document 1 coats the surface of the speaker diaphragm with a heat-crosslinking resin, it can be estimated that the effect of stabilizing against contact with chemicals can be obtained. However, improvement of the physical properties of the rigid material is the original purpose, and it is effective for the diaphragm body portion having rigidity. However, when the edge portion is formed of a flexible material, the rigidity increases and the minimum resonance frequency increases. End up.

すなわち、フリーエッジタイプの振動板では、異常共振が発生しない程度の剛性を有する材料を用いた振動板胴体部と、最低共振周波数を下げるためにスティフネスの低い材料を用いたエッジ部との2ピース構造にすることで音質の向上を図っているが、熱架橋型樹脂のコーティングによってエッジ部の剛性が高くなると最低共振周波数が高くなり、音質の低下を招く。   That is, in the free edge type diaphragm, two pieces of a diaphragm body portion using a material having rigidity that does not cause abnormal resonance and an edge portion using a low stiffness material to lower the minimum resonance frequency. Although the sound quality is improved by adopting the structure, when the rigidity of the edge portion is increased by the coating of the heat-crosslinking resin, the lowest resonance frequency is increased, and the sound quality is deteriorated.

化学薬品類の接触に対して安定化させる効果があり柔軟材料の剛性に影響を与えにくい処理として、例えばフッ素処理、シリコーン処理などが知られているが、これらの処理方法は、溶液タイプが一般的であり、しかも溶媒が有機溶剤のタイプが多く処理により基材材料が溶解、膨潤してしまう。   For example, fluorine treatment, silicone treatment, etc. are known as treatments that have an effect of stabilizing against contact with chemicals and do not affect the rigidity of flexible materials. Moreover, many types of solvents are organic solvents, and the base material is dissolved and swollen by the treatment.

このため、柔軟材料に対して化学薬品類に対する安定化を図ろうとするとスピーカ用振動板の音響特性が変化する、という課題がある。   For this reason, there exists a subject that the acoustic characteristic of the diaphragm for speakers will change if it tries to stabilize with respect to chemicals with respect to a flexible material.

本発明は上記のことに鑑み提案されたもので、その目的とするところは、音響特性の変化を抑制しつつ、柔軟材料で形成されたエッジ部の化学薬品類に対する安定化を図れるスピーカ用振動板の製造方法、及びその製造方法によって作製されたスピーカ用振動板を提供することにある。   The present invention has been proposed in view of the above, and an object of the present invention is to provide vibration for a speaker capable of stabilizing chemicals in an edge portion formed of a flexible material while suppressing a change in acoustic characteristics. It is providing the manufacturing method of a board, and the diaphragm for speakers produced by the manufacturing method.

上記課題を解決するために、請求項1に係る本発明のスピーカ用振動板の製造方法は、スピーカ用振動板10における柔軟材料で形成されたエッジ部12表面に、化学気相蒸着法により無機化合物の皮膜13を形成したことを特徴とする。   In order to solve the above-described problem, the speaker diaphragm manufacturing method of the present invention according to claim 1 is an inorganic material formed by chemical vapor deposition on the surface of the edge portion 12 formed of a flexible material in the speaker diaphragm 10. A film 13 of the compound is formed.

請求項2に係る発明は、請求項1記載のスピーカ用振動板の製造方法において、前記化学気相蒸着法は、誘導結合型プラズマCVD法であることを特徴とする。   According to a second aspect of the present invention, in the method for manufacturing a speaker diaphragm according to the first aspect, the chemical vapor deposition method is an inductively coupled plasma CVD method.

請求項3に係る発明は、請求項1または2記載のスピーカ用振動板の製造方法において、前記無機化合物は、SiO、SiON、及びSiNのいずれかを含むことを特徴とする。 According to a third aspect of the present invention, in the method for manufacturing a speaker diaphragm according to the first or second aspect, the inorganic compound includes any one of SiO 2 , SiON, and SiN.

請求項4に係る発明は、請求項1乃至3いずれか1項記載のスピーカ用振動板の製造方法において、前記エッジ部12の柔軟材料は、加硫ゴム、エラストマー、織布もしくは不織布基材にゴムをコーティングした材料のいずれかを含むことを特徴とする。   The invention according to claim 4 is the method for manufacturing a speaker diaphragm according to any one of claims 1 to 3, wherein the flexible material of the edge portion 12 is a vulcanized rubber, an elastomer, a woven fabric, or a nonwoven fabric substrate. It includes any material coated with rubber.

請求項5に係る発明は、請求項1乃至4いずれか1項記載のスピーカ用振動板の製造方法において、前記無機化合物の皮膜13の膜厚は、25nm以上、400nm以下、好ましくは50nm〜200nmの範囲であることを特徴とする。   The invention according to claim 5 is the method of manufacturing a speaker diaphragm according to any one of claims 1 to 4, wherein the film thickness of the inorganic compound film 13 is 25 nm or more and 400 nm or less, preferably 50 nm to 200 nm. It is the range of these.

請求項6に係る本発明は、請求項1乃至5いずれか1項記載のスピーカ用振動板の製造方法で作製されたことを特徴とするスピーカ用振動板である。   A sixth aspect of the present invention is a loudspeaker diaphragm manufactured by the loudspeaker diaphragm manufacturing method according to any one of the first to fifth aspects.

請求項1に係る本発明によれば、振動板における柔軟材料で形成されたエッジ部表面に、化学薬品類に対して影響がない無機化合物の皮膜を形成したので、エッジ部に要求される製品特性の変化を抑制しつつ化学薬品類に対する安定化を図れる。また、化学気相蒸着法により皮膜を形成するので、溶解、膨潤、変形などの製品特性変化を与えない処理を行うことができる。   According to the first aspect of the present invention, since an inorganic compound film that does not affect chemicals is formed on the surface of the edge portion formed of the flexible material in the diaphragm, the product required for the edge portion. It is possible to stabilize chemicals while suppressing changes in properties. Further, since the film is formed by the chemical vapor deposition method, it is possible to perform a treatment that does not change the product characteristics such as dissolution, swelling, and deformation.

請求項2に係る発明によれば、誘導結合型プラズマCVD法を用いることで常圧、低温処理が可能であり、エッジ部の柔軟材料の変質や特性変化を抑制できる。   According to the invention which concerns on Claim 2, a normal pressure and low temperature process are possible by using the inductively coupled plasma CVD method, and the quality change and characteristic change of the flexible material of an edge part can be suppressed.

請求項3に記載したように、無機化合物としては、SiO、SiON、SiNなどを用いることができる。 As described in claim 3, as the inorganic compound, SiO 2 , SiON, SiN or the like can be used.

請求項4に記載したように、エッジ部の柔軟材料は、加硫ゴム、エラストマー、織布もしくは不織布基材にゴムをコーティングした材料を用いることができる。   As described in claim 4, as the flexible material for the edge portion, a material obtained by coating rubber on a vulcanized rubber, an elastomer, a woven fabric, or a nonwoven fabric substrate can be used.

請求項5に係る発明によれば、化学薬品類に対して耐性が得られかつ製品特性にも影響がない。   According to the invention which concerns on Claim 5, tolerance with respect to chemicals is acquired, and a product characteristic is not affected.

請求項6に係る本発明によれば、化学薬品類が付着しても音響特性が変化せずに安定なスピーカ用振動板を提供できる。   According to the sixth aspect of the present invention, it is possible to provide a speaker diaphragm that is stable without changing its acoustic characteristics even when chemicals adhere.

本発明の実施例に係るスピーカ用振動板の製造方法について説明するための工程図である。It is process drawing for demonstrating the manufacturing method of the diaphragm for speakers concerning the Example of this invention. 図1に示した製造方法で作製された振動板を示しており、(a)図は平面図、(b)図は(a)図のA−A線矢示断面図である。The diaphragm produced with the manufacturing method shown in FIG. 1 is shown, (a) A figure is a top view, (b) A figure is the sectional view on the AA line of FIG. 図2に示した振動板を用いたスピーカ(ヘッドホン用ドライバ)の構成例を示す断面図である。FIG. 3 is a cross-sectional view illustrating a configuration example of a speaker (headphone driver) using the diaphragm illustrated in FIG. 2. 無機化合物の皮膜の厚さと化学薬品類に対する耐性との関係について説明するための図である。It is a figure for demonstrating the relationship between the thickness of the membrane | film | coat of an inorganic compound, and the tolerance with respect to chemicals. 無機化合物の皮膜の厚さと音響特性(最低共振周波数)との関係について説明するための図である。It is a figure for demonstrating the relationship between the thickness of the membrane | film | coat of an inorganic compound, and an acoustic characteristic (minimum resonance frequency).

本発明は、スピーカ用振動板における柔軟材料で形成されたエッジ部表面に、化学気相蒸着(CVD:Chemical Vapor Deposition)法により、無機化合物の皮膜を形成するものである。振動板胴体部とエッジ部は別の製造工程で形成し、エッジ部表面に無機化合物の皮膜を形成した後、振動板胴体部の外周縁にエッジ部を接着剤などにより接着、あるいは熱圧着により接合して振動板を形成する。   In the present invention, an inorganic compound film is formed on a surface of an edge portion formed of a flexible material in a speaker diaphragm by a chemical vapor deposition (CVD) method. The diaphragm body and edge are formed in separate manufacturing processes, and after forming an inorganic compound coating on the surface of the edge, the edge is bonded to the outer periphery of the diaphragm body with an adhesive or by thermocompression bonding. Joining to form a diaphragm.

柔軟材料で形成されたエッジ部表面に、化学薬品類に対して影響がない無機化合物の皮膜を形成することにより安定化を図れる。上記無機化合物の皮膜の膜厚を適切に設定することにより、振動板としての音響特性の変化を抑制できる。また、化学気相蒸着法により皮膜を形成するので、溶解、膨潤、変形などの製品特性の変化を与えない処理を施すことができる。   Stabilization can be achieved by forming a coating of an inorganic compound that does not affect chemicals on the surface of the edge portion formed of a flexible material. By appropriately setting the film thickness of the inorganic compound film, it is possible to suppress changes in acoustic characteristics as the diaphragm. Further, since the film is formed by the chemical vapor deposition method, it is possible to perform a treatment that does not change the product characteristics such as dissolution, swelling, and deformation.

以下、本発明の一実施例を図面に基づいて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

図1は、本発明の実施例に係るスピーカ用振動板の製造方法について説明するための工程図である。本例では、振動板胴体部とエッジ部を別の製造工程で形成して接合するフリーエッジ構造の製造方法を示している。図2は、図1に示した製造方法で作製された振動板を示しており、(a)図は平面図、(b)図は(a)図のA−A線矢示断面図である。   FIG. 1 is a process diagram for explaining a method of manufacturing a speaker diaphragm according to an embodiment of the present invention. In this example, a manufacturing method of a free edge structure in which the diaphragm body and the edge are formed and joined in different manufacturing processes is shown. 2A and 2B show a diaphragm manufactured by the manufacturing method shown in FIG. 1, wherein FIG. 2A is a plan view, and FIG. 2B is a cross-sectional view taken along line AA in FIG. .

図1に示すように、本発明の実施例に係るスピーカ用振動板の製造方法は、(a)振動板胴体部の製造工程、(b)エッジ部の製造工程、(c)エッジ部表面への無機化合物の皮膜形成工程、(d)振動板胴体部とエッジ部の接合工程などからなる。ここで、(a)の振動板胴体部の製造工程と(b)のエッジ部の製造工程はどちらを先に行っても良い。   As shown in FIG. 1, the speaker diaphragm manufacturing method according to the embodiment of the present invention includes (a) a diaphragm body manufacturing process, (b) an edge manufacturing process, and (c) an edge surface. And (d) a step of joining the diaphragm body and the edge portion. Here, either the manufacturing process of the diaphragm body part of (a) or the manufacturing process of the edge part of (b) may be performed first.

(a)振動板胴体部の製造工程
振動板胴体部11には、紙系、高分子系、金属系、複合化系及びセラミックス系など種々の材料を用いることができ、周知の製造方法により振動板胴体部11を製造する。紙系の材料を例に取ると、パルプを抄紙、乾燥、加熱プレスするなどして作製する。この際、パルプを主材料とし、必要とする音響特性に応じて他の副材料を強化材として混抄しても良い。高分子系の材料では、ポリエステルなどが広く用いられる。
(A) Manufacturing Process of Diaphragm Body The diaphragm body 11 can be made of various materials such as paper, polymer, metal, composite, and ceramics. The plate body part 11 is manufactured. Taking a paper-based material as an example, the pulp is produced by papermaking, drying, and heat pressing. At this time, pulp may be used as a main material, and other sub-materials may be mixed as a reinforcing material depending on the required acoustic characteristics. Polyester and the like are widely used for polymer materials.

そして、必要に応じてこの振動板胴体部11の表面に樹脂などをコーティングし、化学薬品類の接触に対して安定化させる。あるいはパルプを叩解して繊維状にし、樹脂の粉末を混ぜ合わせて分散させ、成型時に熱で溶融させることでパルプ間の隙間を埋めて振動板胴体部11に含浸させても同様な効果が得られる。   Then, if necessary, the surface of the diaphragm body 11 is coated with resin or the like to stabilize against contact with chemicals. Alternatively, the same effect can be obtained by beating the pulp into a fiber, mixing and dispersing the resin powder, and melting with heat during molding to fill the gap between the pulp and impregnate the diaphragm body 11. It is done.

(b)エッジ部の製造工程
エッジ部12は、約10〜200μmの厚さの加硫ゴムやエラストマーなどの柔軟材料を含むシート状材料を加熱成形機にセットし、100〜200℃程度の温度で成形をした後、プレス機にてエッジ部12の内径抜きを行って形成する。
(B) Manufacturing process of edge part The edge part 12 sets the sheet-like material containing flexible materials, such as vulcanized rubber and an elastomer of thickness of about 10-200 micrometers, to a thermoforming machine, and is about 100-200 degreeC. Then, the inner diameter of the edge portion 12 is removed by a press machine.

上記加硫ゴムとしては、例えばスチレン−ブタジエンゴム、ニトリル−ブタジエンゴム、エチレン−プロピレン−ターポリマーゴム、イソプレンゴム、クロロプレンゴム、イソブチレン−イソプレンゴム、エチレン−プロピレンゴム、シリコーンゴムなど用いることができる。また、上記エラストマーとしては、例えばポリスチレン系、ポリオレフィン系、ポリウレタン系、ポリエステル系、ポリアミド系、ポリブタジエン系、エチレン−酢酸ビニル系、ポリ塩化ビニル系などを用いることができる。あるいは、織布や不織布基材にゴムなどをコーティングした柔軟材料を用いても良い。   Examples of the vulcanized rubber include styrene-butadiene rubber, nitrile-butadiene rubber, ethylene-propylene-terpolymer rubber, isoprene rubber, chloroprene rubber, isobutylene-isoprene rubber, ethylene-propylene rubber, and silicone rubber. Examples of the elastomer include polystyrene, polyolefin, polyurethane, polyester, polyamide, polybutadiene, ethylene-vinyl acetate, and polyvinyl chloride. Or you may use the flexible material which coated rubber etc. on the woven fabric or the nonwoven fabric base material.

(c)エッジ部表面への無機化合物の皮膜形成工程
上記のようにして形成されたエッジ部12表面に、化学気相蒸着(CVD:Chemical Vapor Deposition)法により、無機化合物の皮膜13を形成する。上記柔軟材料は高圧や高温に弱いため、CVD法の中でも常圧、低温処理が可能な誘導結合型プラズマCVD(ICP−CVD:Inductively Coupled Plasma-CVD)を用いると良い。
(C) Film formation step of inorganic compound on edge surface The inorganic compound film 13 is formed on the surface of the edge 12 formed as described above by the chemical vapor deposition (CVD) method. . Since the flexible material is vulnerable to high pressure and high temperature, it is preferable to use inductively coupled plasma-CVD (ICP-CVD), which can be processed at normal pressure and low temperature, among CVD methods.

ICP−CVD法で無機化合物、例えばSiOを堆積する場合、SiH、O、Nガスフローで高周波電力500W、圧力0.1Pa、温度50℃の条件で10分程度の時間成膜すると、厚さが200nmのSiO膜を形成できる。 When depositing an inorganic compound such as SiO 2 by the ICP-CVD method, the film is formed for about 10 minutes under the conditions of high-frequency power of 500 W, pressure of 0.1 Pa, and temperature of 50 ° C. with SiH 4 , O 2 , and N 2 gas flow. A SiO 2 film having a thickness of 200 nm can be formed.

上記無機化合物としては、SiO以外にSiONやSiNなどが好適である。無機化合物の皮膜13は、化学薬品類に対して影響がないので、溶解、膨潤、変形などの製品特性に変化を与えない。しかし、一般に剛性が高いので、振動板10のエッジ部12に必要以上の厚さに形成すると弾性率や最低共振周波数などの音響特性を変化させてしまう。 Examples of the inorganic compounds, such as SiON or SiN in addition to SiO 2 is preferred. Since the inorganic compound film 13 has no effect on chemicals, it does not change the product characteristics such as dissolution, swelling and deformation. However, since the rigidity is generally high, if the thickness of the edge portion 12 of the diaphragm 10 is more than necessary, the acoustic characteristics such as the elastic modulus and the minimum resonance frequency are changed.

そこで、化学薬品類に対して耐性が得られる厚さと音響特性に影響のない厚さのバランスを考慮し、膜厚は化学薬品類に対して耐性が得られるように25nm以上でかつ音響特性に影響のない400nm以下であり、より好ましくは50nm〜200nmの範囲とする。   Therefore, considering the balance between the thickness that can withstand the chemicals and the thickness that does not affect the acoustic characteristics, the film thickness should be 25 nm or more so that the chemical characteristics can be obtained. It is 400 nm or less without influence, and more preferably in the range of 50 nm to 200 nm.

(d)振動板胴体とエッジ部の接合工程
上述した工程が終了した後、周知の方法を用いて振動板胴体部11とエッジ部12の接合工程を行う。この工程では、例えば、製造した振動板胴体部11の外周縁部と、エッジ部12の内周縁部とを接着剤などにより接着する。
(D) Step of joining diaphragm body and edge portion After the above-described steps are completed, a step of joining the diaphragm body portion 11 and the edge portion 12 is performed using a known method. In this step, for example, the outer peripheral edge of the manufactured diaphragm body 11 and the inner peripheral edge of the edge 12 are bonded with an adhesive or the like.

接着剤としては、例えばウレタン系接着剤を用いることができる。これによって、図2(a)、(b)に示すように、振動板胴体部11の外周縁部と、表面に無機化合物の皮膜13が形成されたエッジ部12の内周縁部が接合され、2ピース構造の振動板10が形成される。   For example, a urethane-based adhesive can be used as the adhesive. As a result, as shown in FIGS. 2A and 2B, the outer peripheral edge of the diaphragm body 11 and the inner peripheral edge of the edge 12 having the inorganic compound coating 13 formed on the surface are joined. A diaphragm 10 having a two-piece structure is formed.

図3は、図2に示した振動板10を用いたスピーカ(ヘッドホン用ドライバ)1の構成例を示す断面図である。このスピーカ1は、いわゆる内磁型であり、フレームを兼ねたポット型のヨーク2、マグネット3及び円盤状のポールプレート4を有する磁気回路5と、この磁気回路5の磁気ギャップ中に支持されるボイスコイル6を屈曲部下方に配置した振動板胴体部11と、この振動板胴体部11の外周縁部に接合されたエッジ部12とを備えている。上記振動板胴体部11とエッジ部12とは接着剤などにより接着されて一体化されている。   FIG. 3 is a cross-sectional view illustrating a configuration example of the speaker (headphone driver) 1 using the diaphragm 10 illustrated in FIG. 2. The speaker 1 is a so-called internal magnet type, and is supported in a magnetic circuit 5 having a pot-type yoke 2, a magnet 3 and a disk-shaped pole plate 4 that also serves as a frame, and a magnetic gap of the magnetic circuit 5. A diaphragm body 11 having the voice coil 6 disposed below the bent part and an edge 12 joined to the outer peripheral edge of the diaphragm body 11 are provided. The diaphragm body 11 and the edge 12 are integrated by being bonded with an adhesive or the like.

上記のような製造方法によれば、振動板10における柔軟材料で形成されたエッジ部12に、化学薬品類に対して影響がない無機化合物の皮膜13を形成したので、振動板10としての音響特性の変化を抑制しつつ化学薬品類に対する安定化を図れる。特に、ヘッドホンやマイクロホンなどの場合、エッジ部12は装着時に使用者の耳側に突出しているので化学薬品類が付着しやすく、高い効果が得られる。   According to the manufacturing method as described above, since the film 13 of the inorganic compound that does not affect the chemicals is formed on the edge portion 12 made of the flexible material in the vibration plate 10, the sound as the vibration plate 10 is obtained. It is possible to stabilize chemicals while suppressing changes in properties. In particular, in the case of headphones, microphones, and the like, the edge portion 12 protrudes toward the user's ear when worn, so that chemicals are likely to adhere and a high effect is obtained.

また、常圧、低温処理が可能な誘導結合型プラズマCVDにより皮膜を形成するので、エッジ部12の柔軟材料の変質や特性変化を抑制しつつ、溶解、膨潤、変形などの製品特性変化を与えない処理を行うことができる。   In addition, since the film is formed by inductively coupled plasma CVD capable of normal pressure and low temperature processing, the product properties such as dissolution, swelling, and deformation are changed while suppressing the deterioration and property change of the flexible material of the edge portion 12. No processing can be done.

本発明者は、作製した振動板10の化学薬品類に対する耐性と音響特性を調べる実験を行った。図4は、無機化合物の皮膜の厚さと化学薬品類に対する耐性との関係について説明するための図である。図5は、無機化合物の皮膜の厚さと音響特性との関係について説明するための図である。   The inventor conducted an experiment to examine the resistance and acoustic characteristics of the manufactured diaphragm 10 to chemicals. FIG. 4 is a diagram for explaining the relationship between the thickness of the inorganic compound film and the resistance to chemicals. FIG. 5 is a diagram for explaining the relationship between the thickness of the inorganic compound film and the acoustic characteristics.

図4に示すように、無機化合物の皮膜の厚さを厚くするのにしたがって化学薬品類に対する耐性が高くなり、図5に示すように無機化合物の皮膜の厚さを厚くするのにしたがって最低共振周波数が高くなる。化学薬品類に対して十分な耐性が得られる厚さと最低共振周波数に影響のない厚さのバランスを考慮すると、無機化合物の膜厚は化学薬品類に対して耐性が得られるように25nm以上でかつ最低共振周波数の上昇が少ない400nm以下が望ましく、より好ましくは50nm〜200nmの範囲である。   As shown in FIG. 4, the resistance to chemicals increases as the thickness of the inorganic compound film increases, and as shown in FIG. 5, the lowest resonance increases as the thickness of the inorganic compound film increases. The frequency increases. Considering the balance between the thickness at which sufficient resistance to chemicals is obtained and the thickness that does not affect the minimum resonance frequency, the film thickness of the inorganic compound is 25 nm or more so that resistance to chemicals can be obtained. And 400 nm or less with a small raise of the minimum resonance frequency is desirable, More preferably, it is the range of 50 nm-200 nm.

また、エッジ部12の材料として、材厚40μmのTPU(Thermoplastic Polyurethane)と呼ばれる熱可塑性ポリウレタンに対して、ICP−CVD法によりSiOを300nmの厚さに形成して弾性率を測定した。この処理により弾性率は10%程度上昇したが、製品に対しての影響は見られなかった。 In addition, as a material of the edge portion 12, a thermoplastic polyurethane called TPU (Thermoplastic Polyurethane) having a thickness of 40 μm was measured by measuring the elastic modulus by forming SiO 2 with a thickness of 300 nm by ICP-CVD method. This treatment increased the modulus of elasticity by about 10%, but had no effect on the product.

この処理品に日常生活で使用する薬品類として、日焼け止めクリーム(NIVEA SUN (登録商標) PROTECT WATER GEL SPF30 PA++)を塗布した。未処理品は膨潤したが、処理品には膨潤は見られなかった。   A sunscreen cream (NIVEA SUN (registered trademark) PROTECT WATER GEL SPF30 PA ++) was applied to the treated product as chemicals used in daily life. The untreated product swelled, but the treated product did not swell.

従って、本発明によれば、音響特性の変化を抑制しつつ、柔軟材料で形成されたエッジ部の化学薬品類に対する安定化を図れるスピーカ用振動板の製造方法、及びその製造方法によって作製されたスピーカ用振動板を提供できる。   Therefore, according to the present invention, a speaker diaphragm manufacturing method capable of stabilizing an edge portion formed of a flexible material with respect to chemicals while suppressing changes in acoustic characteristics, and the speaker diaphragm manufacturing method are provided. A speaker diaphragm can be provided.

1 スピーカ
2 ヨーク
3 マグネット
4 ポールプレート
5 磁気回路
6 ボイスコイル
10 振動板(スピーカ用振動板)
11 振動板胴体部
12 エッジ部
13 無機化合物の皮膜
1 Speaker 2 Yoke 3 Magnet 4 Pole Plate 5 Magnetic Circuit 6 Voice Coil 10 Diaphragm (Speaker Diaphragm)
11 Diaphragm body 12 Edge 13 Inorganic compound film

Claims (6)

スピーカ用振動板(10)における柔軟材料で形成されたエッジ部(12)表面に、化学気相蒸着法により無機化合物の皮膜(13)を形成したことを特徴とするスピーカ用振動板の製造方法。   A method for manufacturing a speaker diaphragm, characterized in that an inorganic compound film (13) is formed on the surface of an edge portion (12) formed of a flexible material in the speaker diaphragm (10) by chemical vapor deposition. . 前記化学気相蒸着法は、誘導結合型プラズマCVD法であることを特徴とする請求項1記載のスピーカ用振動板の製造方法。   2. The method for manufacturing a speaker diaphragm according to claim 1, wherein the chemical vapor deposition method is an inductively coupled plasma CVD method. 前記無機化合物は、SiO、SiON、及びSiNのいずれかを含むことを特徴とする請求項1または2記載のスピーカ用振動板の製造方法。 The method for manufacturing a speaker diaphragm according to claim 1, wherein the inorganic compound includes any one of SiO 2 , SiON, and SiN. 前記エッジ部(12)の柔軟材料は、加硫ゴム、エラストマー、織布もしくは不織布基材にゴムをコーティングした材料のいずれかを含むことを特徴とする請求項1乃至3いずれか1項記載のスピーカ用振動板の製造方法。   The flexible material of the edge portion (12) includes any one of a material obtained by coating rubber on a vulcanized rubber, an elastomer, a woven fabric, or a non-woven fabric base material. Manufacturing method of speaker diaphragm. 前記無機化合物の皮膜(13)の膜厚は、25nm以上、400nm以下、好ましくは50nm〜200nmの範囲であることを特徴とする請求項1乃至4いずれか1項記載のスピーカ用振動板の製造方法。   5. The loudspeaker diaphragm according to claim 1, wherein a film thickness of the inorganic compound film (13) is 25 nm or more and 400 nm or less, preferably 50 nm to 200 nm. Method. 前記請求項1乃至5いずれか1項記載の製造方法によって作製されたことを特徴とするスピーカ用振動板。   A speaker diaphragm manufactured by the manufacturing method according to any one of claims 1 to 5.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI551154B (en) * 2014-05-16 2016-09-21

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Publication number Priority date Publication date Assignee Title
JPH08116589A (en) * 1994-10-14 1996-05-07 Matsushita Electric Ind Co Ltd Speaker
JPH1042390A (en) * 1996-07-26 1998-02-13 Matsushita Electric Ind Co Ltd Edge for speaker
JP2006041984A (en) * 2004-07-28 2006-02-09 Matsushita Electric Ind Co Ltd Method of manufacturing edge for speaker, and the edge, diaphragm for speaker and speaker using the same, electronic apparatus, and device
JP2009164866A (en) * 2008-01-07 2009-07-23 Azuma Kasei Kk Method of manufacturing diaphragm for micro speaker, diaphragm for micro speaker manufactured with the manufacturing method, micro speaker using the diaphragm and cellular phone using the micro-speaker

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08116589A (en) * 1994-10-14 1996-05-07 Matsushita Electric Ind Co Ltd Speaker
JPH1042390A (en) * 1996-07-26 1998-02-13 Matsushita Electric Ind Co Ltd Edge for speaker
JP2006041984A (en) * 2004-07-28 2006-02-09 Matsushita Electric Ind Co Ltd Method of manufacturing edge for speaker, and the edge, diaphragm for speaker and speaker using the same, electronic apparatus, and device
JP2009164866A (en) * 2008-01-07 2009-07-23 Azuma Kasei Kk Method of manufacturing diaphragm for micro speaker, diaphragm for micro speaker manufactured with the manufacturing method, micro speaker using the diaphragm and cellular phone using the micro-speaker

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI551154B (en) * 2014-05-16 2016-09-21

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