JP2013092409A - Shape measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a shape measurement device which achieves accurate measurement of a cross-sectional shape (surface contour shape) of a hair surface, and a step in a hair surface.SOLUTION: A shape measurement device comprises a confocal imaging device which includes an object lens 13 to project a scanning beam to a hair to be measured and receives light reflected from the hair so as to take a confocal picture of the hair surface, hair supporting means 15 which supports a plurality of hairs in X-axis direction as the longitudinal axial direction and supports and arranges the hairs along Y-axis direction orthogonal to X-axis at a predetermined intervals, a stage 14 and driving means thereof which is movable in X-axis direction and Y-axis direction and supports the hair supporting means, means 16 which shifts the relative distance between the object lens 13 and the stage, and a signal processing device 10 which outputs the cross-sectional image data and/or a step data to indicate the size of a step existing in the hair surface. The stage moves along a movement route configured in a zigzag form, on the basis of the number of hairs to be measured and the coordinate data of a measuring point.

Description

  The present invention relates to a shape measuring device that outputs step information indicating the surface shape of hair, in particular, a cross-sectional image of the hair surface and the size of the step existing on the hair surface.

  On the surface of the hair, a cuticle, which is a thin layered cuticle, is formed from the hair root to the hair tip. This cuticle is related to the degree of pain of the hair, and when the cuticle is peeled off, it causes split ends and cut hairs. In addition, the cuticle component is keratin (protein), and is easily dissolved in an alkaline solution. Therefore, since soap and shampoo have an acupuncture property that removes oil, frequent use of shampoo not only causes peeling of the cuticle, but also causes fluffing and listing of the cuticle. On the other hand, the rinse used after shampoo is acidic, and has the effect of returning the shampooed hair to weak acidity and supplementing the oil. Therefore, measuring the cross-sectional shape of the hair surface and the size of the step is a very useful method for evaluating the performance of cosmetics such as shampoos and rinses.

As a method for measuring the uneven shape of the hair surface, a measurement method using a laser microscope is known (for example, see Patent Document 1). In this known measuring method, a replica of the hair to be measured is created, and the shape of the surface of the replica is observed with a laser microscope. An image is formed while moving the replica in the optical axis direction, and unevenness data on one scanning line is acquired.
Japanese Patent Laid-Open No. 5-256631

  The unevenness of the hair surface is not large, and the level of the step is about 0.5 μm. Therefore, in the method of creating a hair replica and measuring the surface shape of the created replica, the error in the replica creation process is added in addition to the measurement error. There was a problem with sex.

  In order to acquire data useful for performance evaluation of various cosmetics, it is necessary to measure a large number of measurement points for a single hair to increase measurement accuracy. However, if measurement is performed while manually positioning the measurement points for one hair, the alignment of the measurement points of the hair is complicated, and a problem that takes a long time for measurement occurs.

  Furthermore, with regard to the measured unevenness data, if the heights of the recesses and protrusions were manually measured to find the size of the step, it took a long time to measure the height, for example, data necessary for performance evaluation The problem that it takes about one week to acquire is generated.

An object of the present invention is to realize a shape measuring apparatus capable of directly measuring the cross-sectional shape (surface contour shape) of the hair surface and measuring the size of the step on the hair surface with high accuracy.
Furthermore, another object of the present invention is to provide a shape measuring apparatus that can measure a plurality of hairs by one measurement operation and can measure in a short time even if a large number of measurement points are set for each hair. .
Furthermore, another object of the present invention is to realize a shape measuring apparatus capable of automatically measuring the size of the surface step of the hair at a large number of measurement points.

The shape measuring device according to the present invention is a shape measuring device for measuring the cross-sectional contour shape of hair,
A confocal imaging device that includes an objective lens that projects a scanning beam toward the hair to be measured, receives reflected light from the hair, and images a confocal image of the hair surface;
Hair support means for supporting a plurality of hairs in the X-axis direction which is the longitudinal axis direction thereof and aligning and supporting the hairs at predetermined intervals along the Y-axis direction orthogonal to the X-axis;
A stage supported so as to be movable in the X-axis direction and the Y-axis direction and supporting the hair support means;
Means for changing the relative distance between the objective lens and the stage;
Stage driving means for moving the stage in the X-axis direction and the Y-axis direction;
And a signal processing device that outputs cross-sectional image information on the hair surface and / or step information indicating the size of the step existing on the hair surface based on the image signal output from the confocal imaging device.

  In the present invention, a plurality of two-dimensional confocal images are picked up while changing the relative distance between the objective lens and the hair using a confocal imaging device or a confocal scanning device that two-dimensionally scans the sample surface with a light beam. Using the imaged two-dimensional confocal image and relative distance information between the objective lens and the hair, a three-dimensional image of the hair surface is formed, and the three-dimensional image information is used to cut along the longitudinal axis direction of the hair. A cross-sectional shape image shown in FIG. By forming the cross-sectional shape image, a surface height distribution curve indicating the surface height distribution with respect to the position in the longitudinal axis direction of the hair is obtained. By performing a differentiation process on the surface height distribution curve, the first inflection point corresponding to the stepped mountain portion existing on the hair surface, the surface height, and the second inflection corresponding to the valley portion. A point and its height position are detected. Then, by detecting the difference between the surface height position at the first inflection point and the surface height position at the second inflection point, the size of the step or cuticle formed on the hair surface is automatically determined. Can be measured.

  In the present invention, the support means for aligning and supporting the hair is used to align and support the plurality of hairs to be measured in the X-axis direction, the Y-axis direction orthogonal thereto, and the Z-axis direction orthogonal to the X-axis and Y-axis. The support means has a plurality of support grooves extending in the X-axis direction and formed at a predetermined pitch along the Y-axis direction, and the hair to be measured is placed in these support grooves. Then, stage control means for controlling the movement of the stage in the X and Y directions is provided, and a zigzag stage movement path is set by the stage control means. When the operator inputs the number of hairs measured by a single measurement operation using an input device such as a keyboard and the number of measurement points per hair, the movement path of the stage is automatically defined. Even if a large number of measurement points are set per hair, the measurement can be completed in a short time, and the advantage that the measurement throughput is substantially the same is achieved.

  In the present invention, a support means for aligning and supporting a plurality of hairs to be measured in the X, Y, and Z axis directions and a stage control means for setting a zigzag movement path along the X and Y axis directions of the stage are used. Therefore, it is possible to measure a large number of hairs in one measurement operation, and even if a large number of measurement points are set for each hair, it is possible to measure the step on the hair surface in a short time.

It is a figure which shows the structure of the optical system of the shape measuring apparatus by this invention. It is a figure which shows an example of a hair support means. It is a figure which shows the movement path | route of a stage. It is a graph which shows the actual value of the surface height distribution curve which shows the cross-sectional shape of hair. It is a figure which shows an example of a signal processing apparatus. It is a figure which shows the algorithm which calculates the magnitude | size of a level | step difference for every cuticle.

  FIG. 1 is a diagram showing a configuration of an optical system of a shape measuring apparatus according to the present invention. In this invention, the cross-sectional outline shape of the hair surface is imaged using a confocal imaging device. Referring to FIG. 1, a mercury lamp is used as the illumination light source 1. Various illumination light sources other than mercury lamps such as xenon lamps can also be used. The illumination beam emitted from the illumination light source 1 is incident on an optical fiber bundle 2 in which a plurality of optical fibers are stacked in a circle, propagates through the optical fiber, and is emitted as a divergent beam having a substantially circular cross section. Incident. The filter 3 emits, for example, green wavelength light (e line: wavelength 546 nm) from the incident light beam. The light beam emitted from the filter is converted into a parallel beam by the converging lens 4 and enters the slit 5. The slit 5 is disposed at the pupil position of the converging lens 4 and has an elongated opening extending in a first direction (a direction orthogonal to the paper surface). Here, the first direction corresponds to the X direction which is the longitudinal axis of the hair. The width of the opening of the slit 5 is set to 10 to 20 μm, for example. Therefore, an elongated line-shaped light beam extending in the first direction is emitted from the slit 5. This line-shaped light beam is reflected by the half mirror 6 that functions as a beam splitter, and enters a vibrating mirror 8 that functions as a scanning device via a relay lens 7.

  A drive circuit 9 is connected to the vibration mirror 8, and the drive circuit 9 drives the vibration mirror based on a control signal supplied from the signal processing device 10. The oscillating mirror 8 functions as a beam scanning device that rotates by a predetermined deflection angle and deflects an incident line-shaped light beam in a second direction (Y direction) orthogonal to the first direction. The signal processing device 10 acquires position information in the Y direction of the light beam based on the rotation angle information of the vibrating mirror. Note that other scanning devices such as a polygon mirror may be used instead of the vibrating mirror. The line-shaped light beam emitted from the vibrating mirror 8 enters the objective lens 13 through the relay lenses 11 and 12.

  The objective lens 13 focuses the incident line-shaped light beam and projects it toward the hair that is aligned and supported on the plate-like hair support member 15 disposed on the stage 14. Therefore, the surface of the hair is scanned in the second direction (Y direction) orthogonal to the linear light beam extending in the first direction (X direction).

  A motor 16 is connected to the objective lens 13 and can be moved along the optical axis direction by a drive control signal supplied from the signal processing device 10. The position of the objective lens in the optical axis direction is detected by the position sensor 17 and supplied to the signal processing device 10. Here, the motor 16 functions as means for changing the relative distance in the optical axis direction between the objective lens and the hair on the stage, that is, the relative distance between the focal point of the light beam and the hair. The objective lens can move in the optical axis direction with a resolution of 10 nm, for example.

  Due to the characteristics of the confocal scanning device, the oscillating mirror 8 is driven while moving the objective lens 13 in the optical axis direction, and a two-dimensional confocal image of the hair surface is taken a plurality of times, and a maximum luminance value is generated for each pixel. By detecting the position in the optical axis direction, the three-dimensional shape information (three-dimensional image) of the hair surface can be acquired. Moreover, based on the acquired three-dimensional shape information, a surface contour shape (cross-sectional shape information) indicating the surface shape of the hair as a cross section can be acquired.

  The stage 14 is constituted by an XY stage, and freely moves in the X-axis direction and the Y-axis direction based on a drive signal supplied from the signal processing device 10. Further, the position information of the stage in the X and Y directions is detected by the stage position sensor 18 and supplied to the signal processing apparatus 10 as the position information of the stage. As will be described later, the stage 14 moves in a zigzag manner in the X direction and the Y direction, and captures a three-dimensional image of a plurality of measurement points set for a plurality of hairs by a series of imaging operations. The signal processing apparatus 10 functions as a processing apparatus that processes image information and also functions as a stage control unit that controls the movement of the stage. As a stage control means for controlling the movement of the stage, the signal processing apparatus 10 can be provided with a separate controller.

  The hair to be measured is aligned and supported on the hair support member 15 in the X and Y directions. The reflected beam from the hair is collected by the objective lens 13, enters the vibrating mirror 8 through the relay lenses 12 and 11, and is descanned by the vibrating mirror. The reflected beam emitted from the vibrating mirror 8 passes through the lens 7 acting as an imaging lens, passes through the half mirror 6, and enters the linear image sensor 20 through the positioner 19. The linear image sensor 20 includes a plurality of light receiving elements arranged in a direction corresponding to the first direction (X-axis direction), and receives an incident line-shaped reflected beam. The light receiving element array arranged in the linear shape of the linear image sensor is almost equivalent to a light receiving element array in which a pin hole is disposed on the front surface of each light receiving element because the entrance opening is limited by the frame. Therefore, the confocal optical system is configured by receiving the reflected light from the hair with the linear image sensor.

  The electric charge accumulated in each light receiving element of the linear image sensor is sequentially read out by a read control signal supplied from the signal processing device 10, and is output as a one-dimensional image signal of the hair surface. The image signal output from the linear image sensor is amplified by the amplifier 21 and supplied to the signal processing device 10. The signal processing device includes an image processing board, and generates a two-dimensional image of the hair surface using the received image signal and rotation angle information of the vibrating mirror.

  The hair to be measured is attached to the hair support means 15 so that its longitudinal axis extends in the X direction, and the position of the objective lens in the optical axis direction at a plurality of measurement points set at predetermined intervals in the X direction. A two-dimensional image is picked up while changing. Therefore, the signal processing apparatus 10 sequentially captures a three-dimensional image of the hair for each measurement point using the image signal output from the linear image sensor 20 and the position information of the objective lens.

  2 is a view showing the hair support means 15 and the state of the attached hair, FIG. 2 (A) is a schematic plan view, and FIG. 2 (B) is a side view seen from the side. (C) is a figure which shows the support state of the hair supported in the support groove | channel. The hair support means 15 has a support plate 30. In the support plate 30, support grooves 31a to 31e extending in a first direction (corresponding to the X direction) are provided along a second direction (corresponding to the Y direction) orthogonal to the first direction. Form at equal intervals. The number of support grooves is not limited to five and can be set to various numbers. First holding means 32a to 32e and second holding means 33a to 33e are provided at both ends of each of the support grooves 31a to 31e, respectively. The support groove 31 and the first and second gripping means 32 and 33 are formed on the same axis. The first and second gripping means 32 and 33 have a V-shaped groove and a gap for gripping the hair, and the end portion of the hair is sandwiched in the gap via the V-shaped groove. Fixed.

  As shown in FIG. 2B, the support grooves 31a to 31e have a V-shaped cross section for accommodating and supporting hair. In addition, the cross-sectional shape of the support groove is not limited to the V shape, and can be set to various shapes for supporting the hair. The hair to be measured is placed in a V-shaped support groove so that its longitudinal axis extends in the X direction, and both ends thereof are gripped by gripping means 32 and 33. Thereby, the hair is supported in a state in which tension is applied in the longitudinal direction, and is aligned in the X direction and the Y direction. Further, since it is supported in a state in which tension is applied along the longitudinal axis direction, it is aligned linearly with respect to the optical axis direction (Z-axis direction) of the objective lens over almost the entire length of the measurement area of the hair. As a result, if the hair support means 15 is arranged on the stage 14 so that the support grooves 31a to 31e are parallel to the X direction, the hair to be measured has its longitudinal axis extending from the light beam. Arranged in parallel with the direction (X direction).

  FIG. 3 is a diagram for explaining a moving path of the stage during measurement. In this example, the objective lens 13 is fixed in the X and Y directions, and the measurement points set for each hair by moving the stage 14 holding the hair supporting means on which the hair is mounted in a zigzag manner in the X and Y directions. Move sequentially. In this example, the hair support means 15 aligns and supports five hairs at a predetermined interval in the Y direction, and the stage moves so that the optical axis of the objective lens sequentially scans the five hairs. At each measurement point, the stage is stationary, and while moving the objective lens in the optical axis direction, a linear light beam is scanned in the Y direction to capture a plurality of two-dimensional images.

  The stage movement path 40 is set in a zigzag manner from the movement start point 41 to the movement end point 42. First, the movement starts from the movement start point 41 and reaches the first measurement point 43a. A plurality of two-dimensional images are captured at the first measurement point. Subsequently, the robot moves in the X direction by a predetermined pitch, reaches the second measurement point 43b, and similarly takes a plurality of two-dimensional images. This operation is sequentially repeated for the set measurement points. In this example, six measurement points are set for one hair, and when the imaging operation for six measurement points is completed, the imaging operation for one hair is completed. Finally, a plurality of two-dimensional images are taken at six measurement points for each of the five hairs. Of course, six measurement points are shown for convenience of explanation, but the number of measurement points for one hair can be arbitrarily set, and the number of measurement points corresponding to the input number information is set. Further, the number of hairs to be measured by one measurement operation can be arbitrarily set.

  The coordinate information of the measurement points set for one hair can be obtained from the movement distance of the stage in the X direction and the number of measurement points input to the signal processing device via an input device such as a keyboard. Then, the signal processing device calculates the coordinates of each measurement point based on the input number of measurement points and the movement distance of the stage in the X direction, and on the stage movement path based on the coordinate information of the obtained measurement points. The stage is controlled to move at a predetermined interval.

  FIG. 3B shows an imaging area 43 set for one hair. In this example, the line-shaped light beam is set to extend in the X direction, which is the extending direction of the hair. By scanning the line-shaped light beam in the Y direction orthogonal to the X direction, a two-dimensional image of the hair is obtained. Take an image. In this case, the scanning time in the Y direction is defined by the rotation angle of the vibration mirror 8 and the diameter of the hair is about 200 μm at most, so the rotation angle of the vibration mirror is extremely small. As a result, the imaging time of the two-dimensional image is extremely short, and high throughput is achieved.

  FIG. 4 shows a cross-sectional shape (surface contour shape) of the hair surface at one measurement point actually measured by the shape measuring apparatus according to the present invention shown in FIGS. In FIG. 4, the horizontal axis indicates the position in the longitudinal axis direction of the hair, and the vertical axis indicates the surface height. This measurement data indicates a surface height distribution (surface height distribution curve) on a reference line (one scanning line) of a three-dimensional image of hair imaged at one measurement point. As shown in the data of FIG. 4, the size of the cuticle formed on the hair surface is clearly imaged, and each cuticle is composed of a peak portion and a valley portion, and each cuticle is a longitudinal portion of the hair. It is formed continuously in the axial direction. From this measurement data, the surface height between adjacent peak portions and valley portions in the surface height distribution curve is not the cuticle size or the step size of the hair surface.

  Based on the measurement data of FIG. 4, in the present invention, the difference in distance between the height position of the adjacent mountain portion and the height position of the valley portion of the surface height distribution curve is obtained, and the size of the surface step of the hair is determined. Or the size of the cuticle step. Differentiating the surface height distribution curve, the inflection point at which the derivative changes from positive to negative corresponds to the valley portion, and the inflection point at which the derivative changes from negative to positive corresponds to the valley portion. . Accordingly, the size of the surface step is obtained by obtaining the value of the position in the surface height direction of the inflection points adjacent to each other.

  FIG. 5 is a diagram illustrating an example of a signal processing device. First, the setting of the stage movement path will be described. Through the input device 50 such as a keyboard device, the number of hairs measured by one measurement operation and the number of measurement points per hair are input. This measurement condition is supplied to the measurement point pitch calculation means 51. The measurement point pitch calculation means 51 calculates the pitch (interval) between measurement points from the total movement distance d1 in the X direction of the stage (see FIG. 3) and the input number of measurement points per hair. The calculated pitch between the measurement points is supplied to the movement path setting means 52 together with the information on the number of hairs. The movement path setting means 52 calculates the calculated pitch d2 between the measurement points, the arrangement pitch d3 of the support grooves formed in the hair support means 15 in the Y direction (see FIG. 3), and the coordinates of the measurement start point 41. Is used to set the stage movement path in one measurement operation. The set movement path is supplied to a stage drive circuit (not shown), and the stage captures a three-dimensional image for each measurement point along the set movement path. When the stage reaches the measurement end point 42, one measurement operation ends.

  A method for generating step information indicating the cross-sectional shape viewed as a cross-section of the hair surface and the size of the unevenness of the hair surface will be described. The image signal output from the linear image sensor 20 and amplified by the amplifier 21 is converted into a digital signal by the A / D converter 53 and input to the signal processing device 10. The image signal is supplied to the two-dimensional image forming means 54, and a two-dimensional image signal representing a two-dimensional image of hair is formed. The formed two-dimensional image signal is supplied to the maximum luminance value detecting means 55. The maximum luminance value detection means 55 is also supplied with position information of the objective lens from the position sensor 17 that detects the position of the objective lens 13 in the optical axis direction. In the present invention, since a plurality of two-dimensional images are picked up while changing the position of the objective lens in the optical axis direction, the three-dimensional image forming means 5 has a plurality of two-dimensional images in which the focal point of the objective lens is displaced in the optical axis direction. Are input sequentially.

  On the other hand, as a characteristic of the confocal imaging device, the intensity of the reflected light from the hair surface becomes maximum when the focus of the objective lens coincides with the hair surface. Therefore, by taking a plurality of two-dimensional images while displacing the objective lens in the optical axis direction, and detecting the position in the Z-axis direction where the luminance value output from the imaging element is maximum for each pixel, A three-dimensional image is formed. The maximum luminance value detecting means 55 uses the position information in the optical axis direction of the objective lens supplied from the position sensor 17 for the sequentially input two-dimensional image to determine the position in the Z-axis direction where the luminance value is maximum for each pixel. To detect. Then, the maximum luminance value of each pixel is supplied to the confocal image forming means 56, and a two-dimensional confocal image of the hair surface is formed. The formed two-dimensional confocal image signal is supplied to the image memory 57, and is supplied to a display device such as a monitor as necessary, so that a two-dimensional confocal image of the hair surface can be displayed.

  The maximum luminance value detection means 55 detects the position of each pixel that generates the maximum luminance value in the optical axis direction using the position information in the optical axis direction (Z-axis direction) of the objective lens supplied from the position sensor 17. To the Z-axis image forming means 58. The Z-axis image forming unit 58 forms a Z-axis image indicating the position in the Z-axis direction of each pixel having the maximum luminance value. The Z-axis image is supplied to the cross-sectional shape forming unit 59. The cross-sectional shape forming means 59 extracts the position in the Z-axis direction of each pixel on the reference line or scanning line along the X direction, which is the hair extending direction, and forms a cross-sectional shape. That is, since the Z-axis image is information indicating the position of the hair surface in the Z-axis direction for each pixel, by extracting the position of the pixel along the Z-axis direction along an arbitrary reference line or scanning line, the hair surface Is obtained as a cross-sectional image, that is, a hair surface height distribution curve (Z-axis profile) along the reference line. As shown in FIG. 4, this surface height distribution curve is a curve that continuously indicates the surface height of the hair with respect to the position in the extending direction of the hair. As a method for setting the reference line, for example, a straight line extending in the X direction through the center coordinate in the Y axis direction of the support groove formed in the hair support means can be used. The obtained hair cross-sectional image signal is supplied to the memory 60. And the cross-sectional outline shape (surface height distribution curve) of hair can be displayed on a monitor as needed.

  A cross-sectional shape signal indicating the hair surface height distribution curve (Z-axis profile) is supplied to the differentiating means 61. The differentiating means 61 performs a differentiation process on the input surface height distribution curve using the distance in the hair extending direction as a variable, and calculates a differential coefficient. The calculated derivative is supplied to the first inflection point detection means 62 and the second inflection point detection means 63, respectively. The first inflection point detection means 62 detects an inflection point where the derivative is inverted from positive to negative, and the surface height position, that is, the height direction (Z-axis direction) of the crest portion of the hair surface. Is output for each mountain part. Further, the second inflection point detecting means 63 detects the inflection point at which the derivative is inverted from negative to positive, and determines the surface height, that is, the position in the height direction at the valley portion of the hair surface. Output for each valley position.

  The surface height information output from the first and second inflection point detection means 62 and 63 is supplied to the first and second addition means 64 and 65, respectively. The first adding means 64 adds the value of the height position of the mountain part. The second adding means 65 adds the value of the surface height position of the valley part. The added values output from the first and second addition means are supplied to the difference means 66. The difference means 66 calculates the difference between the addition output of the height position value of the mountain region and the addition output of the height position value of the valley region, and outputs the difference as step information. That is, the average value of the difference in the height direction between the peak portion and the valley portion on the hair surface at one measurement point is output. This average value is data indicating the average value of the size of the cuticle formed on the hair surface.

  Of course, the information indicating the size of the step on the hair surface shown in FIG. 5 is merely an example, and it is possible to calculate data indicating the size of the step on the hair surface or the size of the cuticle by various other methods. . For example, the difference (the size of each cuticle) between the height direction position values of the valley portion and the mountain portion adjacent to each other in the longitudinal axis direction of the hair is calculated, and the calculated difference is added to obtain the average value. It is also possible. Alternatively, the standard deviation can be calculated and output as data other than the average value.

  The output from the difference means 66 is the surface level difference output of one measurement point of hair. Therefore, an average value for one hair can be calculated from the step data measured at a plurality of measurement points set for each hair. An output signal from the difference means 66 is supplied to the hair level calculation means 67. The hair level difference calculating means 67 is also supplied with the movement path information supplied from the movement path setting means. The hair level calculating means is supplied with the average value of the level difference for the measurement points set for each hair, and calculates the average level value of the level difference for one hair using this average value. Alternatively, not only the average value of the steps but also various data such as standard deviation can be calculated for one hair in addition to the average value.

  A modification of the step measurement on the hair surface will be described. In this example, a cuticle existing on the hair surface is detected, and a cuticle step is detected for each detected cuticle. FIG. 6 is a diagram showing an algorithm for calculating the step size for each cuticle. First, from the Z-axis image formed by the position data in the Z-axis direction for each pixel formed by the Z-axis image forming means, a grayscale luminance image is formed by converting the position in the Z-axis direction to grayscale luminance. In this case, for example, the lower the position in the Z-axis direction, the lower the luminance, and the higher the surface height, the higher the luminance. The generated luminance image and the confocal image in which each pixel formed by the confocal image forming unit has the maximum luminance value are combined to generate an FZ image composed of grayscale luminance information (step 1). . As a combination method, for example, luminance values can be added for each pixel to obtain an FZ image.

  Subsequently, a masking process is performed on the low-luminance portion using the FZ filter, and a portion where the luminance is suddenly reduced is extracted from the FZ image (step 2). The cuticle on the hair surface is formed in a scale shape. The surface height gradually increases along the longitudinal axis direction of the hair, and when it reaches the highest position, it has a characteristic of rapidly decreasing. Therefore, by performing a masking process on the FZ image, a boundary where the height sharply decreases in the longitudinal axis direction of the hair of the cuticle is detected, and the detected boundary corresponds to the boundary of the adjacent cuticle.

  Subsequently, a cross-sectional profile (surface height distribution curve) along the hair reference line is extracted from the Z-axis image (step 3).

  The boundary image formed in step 2 is superimposed on the cross-sectional shape profile, a boundary portion indicating the boundary of each cuticle is set, and a region divided by the adjacent boundary portion is set as a measurement section (step 4). By setting this boundary portion, a range in the X-axis direction of each cuticle in the cross-sectional profile is set.

  The position in the surface height direction (maximum value) and the surface height direction position (minimum value) of the lowest part in each set measurement section are extracted, and the difference between the maximum value and the minimum value is formed. . The obtained difference indicates the height or size of the cuticle step. For example, an average value can be calculated for the size of the obtained step and set as the size of the step at the measurement point. In this example, since the size of the step is measured for each cuticle, even if the hair attached to the hair support means is bent in the optical axis direction, the cuticle step without alignment error in the Z-axis direction is measured. Benefits are achieved.

  The present invention is not limited to the above-described embodiments, and various changes and modifications can be made. For example, in the above-described embodiments, the confocal imaging device is configured to scan the hair surface using a line-shaped light beam, but the confocal imaging device or the confocal imaging device that scans the hair surface using a single laser beam. It is also possible to use a focus scanning device. In this case, for example, a laser beam emitted from a laser light source is two-dimensionally scanned in the X and Y directions using a two-dimensional scanner, and the scanning beam is projected toward the hair surface while moving the objective lens in the optical axis direction. The reflected light from the hair surface is received by an imaging device such as a line sensor through the objective lens to form a two-dimensional image and a three-dimensional image of the hair surface. And it is also possible to obtain the cross-sectional shape image of the hair surface by performing the signal processing shown in FIG.

  Further, in the above-described embodiment, as a method of changing the distance between the focal point of the scanning beam and the hair surface, the objective lens is moved in the optical axis direction, but the stage that supports the hair is placed on the optical axis of the objective lens. It is also possible to change the relative distance between the focal point of the scanning beam and the hair surface by moving along the direction.

DESCRIPTION OF SYMBOLS 1 Light source 2 Optical fiber 3 Filter 4 Focusing lens 5 Slit 6 Half mirror 7 Lens
8 Vibration mirror
DESCRIPTION OF SYMBOLS 9 Drive circuit 10 Signal processor 11, 12 Relay lens 13 Objective lens 14 Stage 15 Hair support means 16 Motor 17 Position sensor 18 Stage position sensor 19 Positioner 20 Linear image sensor 21 Amplifier 30 Support plate 30a-30e Support groove 31 Hair 40 Stage Movement path 41 Scan start point 42 Scan end point 43 Measurement point

Claims (9)

A shape measuring device for measuring the cross-sectional contour shape of hair,
A confocal imaging device that includes an objective lens that projects a scanning beam toward the hair to be measured, receives reflected light from the hair, and images an image of the hair surface;
Hair support means for supporting a plurality of hairs in the X-axis direction which is the longitudinal axis direction thereof and aligning and supporting the hairs at predetermined intervals along the Y-axis direction orthogonal to the X-axis;
A stage supported so as to be movable in the X-axis direction and the Y-axis direction and supporting the hair support means;
Means for changing the relative distance between the objective lens and the stage;
Stage moving means for moving the stage in the X-axis direction and the Y-axis direction;
A shape measurement comprising: a signal processing device that outputs cross-sectional information on the hair surface and / or step information indicating the size of the step existing on the hair surface based on an image signal output from the confocal imaging device apparatus.   The shape measuring apparatus according to claim 1, further comprising stage control means for setting a movement path of the stage, the stage control means based on coordinate information indicating measurement points on the hair and in the X-axis direction and A zigzag stage moving path is set along the Y-axis direction, and shape measurement is performed for a plurality of hairs by one measurement operation, and shape measurement is performed for a plurality of measurement points for each hair. Shape measuring device.   The shape measuring apparatus according to claim 2, wherein the stage control means includes an X axis of measurement points set in the movement path and a number of measurement points per hair and the number of measurement points per hair. A shape measuring apparatus comprising means for forming coordinate information indicating coordinates in the Y-axis direction.   The shape measuring apparatus according to claim 1, 2, or 3, wherein the hair support means includes a support plate for supporting hair, and the surface of the support plate extends in the X-axis direction and the Y-axis. A plurality of support grooves that are formed at predetermined intervals along the direction and in which the hair is arranged are formed, and gripping means for gripping the hair is provided at both ends in the X-axis direction of each support groove, and should be measured. A shape measuring apparatus characterized in that hair is aligned and supported in the X and Y axis directions and the Z axis direction by being placed in a support groove and being gripped by a gripping means. 5. The shape measuring apparatus according to claim 1, wherein the confocal imaging device captures a plurality of two-dimensional images while changing a relative distance between the objective lens and the hair on the stage. ,
The signal processing device uses the image signal output from the confocal imaging device to form a surface height distribution curve indicating a surface height distribution with respect to the longitudinal axis of the hair, and from the surface height distribution curve, the length Differentiating means for calculating the differential coefficient distribution in the axial direction, first inflection point detecting means for detecting the inflection point at which the differential coefficient reverses from positive to negative, and its surface height, and the differential coefficient from negative to positive An inflection point to be inverted and a second inflection point detecting means for detecting the surface height thereof,
A shape measuring apparatus that outputs step information indicating the size of the step on the hair surface based on output signals from the first and second inflection point detecting means.   6. The shape measuring apparatus according to claim 5, wherein the signal processing device further includes first addition means for adding the surface height at each inflection point output from the first inflection point detection means, A second addition means for adding the surface height at each inflection point output from the second inflection point detection means; an output from the first addition means; and an output from the second addition means. A shape measuring apparatus comprising: a difference means for calculating a difference, wherein an average value of step information on the hair surface at one measurement point is output from the difference means.   7. The shape measuring apparatus according to claim 6, wherein the signal processing device is further set for each hair using an output signal from the difference means and stage movement path information output from the stage control means. A shape measuring apparatus comprising means for calculating an average value of step data at a plurality of measurement points. 5. The shape measuring apparatus according to claim 1, wherein the confocal imaging device captures a plurality of two-dimensional images while changing a relative distance between the objective lens and the hair on the stage. ,
The signal processing device uses the image signal output from the confocal imaging device to form a surface height profile indicating a surface height distribution with respect to the longitudinal axis of the hair, and from the surface height profile, the cuticle of each cuticle Means for determining the longitudinal axis range, and means for determining the maximum and minimum surface height for each cuticle,
A shape measuring apparatus that outputs cuticle step information based on the maximum and minimum values of the obtained surface height. 9. The shape measuring apparatus according to claim 1, wherein the confocal imaging device includes a light source device that generates a light beam, a scanner that two-dimensionally scans the light beam emitted from the light source device, and the like. A shape measuring apparatus comprising: an objective lens that projects a light beam emitted from a scanner toward the hair to be measured; and a light detection means that receives a reflected beam emitted from the hair via the objective lens .

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